Cavity Structure and Deposition Equipment

Abstract

Embodiments of the present disclosure relate to the field of semiconductor manufacturing, and provide a cavity structure and a deposition apparatus. The cavity structure includes: a first cavity, a second cavity, and a communication channel located between the first cavity and the second cavity; an air outlet channel, the air outlet channel being in communication with the communication channel; an air outlet regulation mechanism, at least a part of the air outlet regulation mechanism being located in the air outlet channel and the communication channel, the air outlet regulation mechanism being configured to divide a part of the communication channel communicating with the air outlet channel into a first exhaust hole and a second exhaust hole, the first exhaust hole being in communication with the first cavity, and the second exhaust hole being in communication with the second cavity; wherein, the position of the air outlet regulation mechanism is adjustable, so that the opening degree of the first exhaust hole is adjustable and the opening degree of the second exhaust hole is adjustable. Embodiments of the present disclosure can at least reduce the differences in film thickness and film quality of the films prepared in the two cavities in the cavity structure.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to the field of semiconductor manufacturing, and in particular, to a cavity structure and a deposition apparatus. Background Art

[0002] The deposition process is a common film-forming process in semiconductor manufacturing processes. The deposition process mainly includes chemical vapor deposition (CVD), physical vapor deposition (PVD), and atomic layer deposition (ALD). Taking chemical vapor deposition as an example, chemical vapor deposition is a process technology in which reactants undergo chemical reactions under gaseous conditions to form solid substances deposited on the surface of a wafer to obtain a thin film. This process technology is realized through a deposition apparatus. Specifically, a thin film is obtained in a cavity structure of the deposition apparatus.

[0003] In related technologies, a deposition apparatus usually adopts a cavity structure including two cavities to prepare a thin film. In this way, target thin films can be prepared on two wafers at the same time, which can improve the preparation efficiency of the deposition apparatus. However, in the cavity structure in related technologies, due to the uneven gas distribution of the total gas inlet pipeline to the two cavities, there are significant differences in the film thickness and film quality of the thin films prepared in the two cavities. Therefore, the differences in the film thickness and film quality of the thin films prepared in the two cavities of the cavity structure in related technologies need to be reduced. Summary of the Invention

[0004] Embodiments of the present disclosure provide a cavity structure and a deposition apparatus, which at least help to reduce the differences in the film thickness and film quality of the thin films prepared in the two cavities of the cavity structure.

[0005] According to some embodiments of the present disclosure, on the one hand, an embodiment of the present disclosure provides a cavity structure, including: a first cavity, a second cavity, and a communication channel located between the first cavity and the second cavity, the communication channel being used to communicate the first cavity and the second cavity, a first air inlet mechanism being disposed in the first cavity, the first air inlet mechanism being used to supply gas to the inside of the first cavity, a second air inlet mechanism being disposed in the second cavity, the second air inlet mechanism being used to supply gas to the inside of the second cavity; an air inlet main pipeline, the air inlet main pipeline being used to communicate with an air inlet pipe that supplies gas and being connected to both the first air inlet mechanism and the second air inlet mechanism, for supplying gas to the first cavity and the second cavity; a first base and a second base, the first base being disposed in the first cavity, the second base being disposed in the second cavity, both the first base and the second base being used to carry wafers; an air outlet channel, the air outlet channel being communicated with the communication channel and further being used to be connected to an air extraction pump to extract the gas in the first cavity and the second cavity through the air outlet channel; an air outlet regulation mechanism, at least a part of the air outlet regulation mechanism being located in the air outlet channel and the communication channel, the air outlet regulation mechanism being used to divide the part of the communication channel communicated with the air outlet channel into a first exhaust hole and a second exhaust hole, the first exhaust hole being communicated with the first cavity, the second exhaust hole being communicated with the second cavity; wherein, the position of the air outlet regulation mechanism is adjustable, so that the opening degree of the first exhaust hole is adjustable and the opening degree of the second exhaust hole is adjustable.

[0006] In some embodiments, the air outlet regulation mechanism includes: a shielding component, the shielding component being located in the air outlet channel and the communication channel; an adjusting component, the adjusting component being used to control the position of the shielding component to be adjustable, so that the opening degree of the first exhaust hole is adjustable and the opening degree of the second exhaust hole is adjustable.

[0007] In some embodiments, the top of the shielding component abuts against the top of the communication channel, and the shielding component is used to divide the communication channel into a part communicated with the first cavity and another part communicated with the second cavity.

[0008] In some embodiments, the air outlet channel includes: a main air outlet channel communicated with each other and branch air outlet channels located on both sides of the main air outlet channel, the distance between one of the branch air outlet channels and the first cavity being less than the distance between the branch air outlet channel and the second cavity, and the distance between the other branch air outlet channel and the second cavity being less than the distance between the branch air outlet channel and the first cavity; the shielding component includes: a shielding portion, the shielding portion being located at the communication position between the branch air outlet channel and the communication channel; a movable portion, the movable portion being connected to the shielding portion, and the movement of the movable portion drives the position of the shielding portion to be adjustable.

[0009] In some embodiments, the communication channel includes: a first communication air outlet channel and a second communication air outlet channel; the air outlet channel includes: a first air outlet channel, which is communicated with the first communication air outlet channel; a second air outlet channel, which is connected to the second communication air outlet channel; wherein, the shielding member is located in the second air outlet channel and the second communication air outlet channel; the shielding member includes: a shielding portion, which is located at the communication position of the second air outlet channel and the second communication air outlet channel; a movable portion, which is connected to the shielding portion, and the movement of the movable portion drives the position of the shielding portion to be adjustable, so as to adjust the opening degree of the first exhaust hole and the opening degree of the second exhaust hole.

[0010] In some embodiments, on one side of the shielding portion facing the air outlet channel, there are two clamping groove plates, and the two clamping groove plates are used to form a clamping groove. The adjusting member includes: a rotating connection portion, which is used for rotatably connecting with one end of the movable portion away from the shielding portion; a rotating power portion and a rotating shaft, one end of the rotating shaft is rotatably connected to the rotating power portion, and the other end is connected to the movable portion. The rotating power portion provides power for the rotating shaft to make the rotating shaft rotate around the rotating power portion, and the rotation of the rotating shaft drives the movable portion to rotate around the rotating connection portion; a slider, which is located in the clamping groove and is slidably connected to the clamping groove plate, and the slider is also rotatably connected to one end of the movable portion away from the rotating connection portion; wherein, the rotating shaft rotates around the rotating power portion, driving the movable portion to rotate around the rotating connection portion, and the rotation of the movable portion drives the slider to slide in the clamping groove and drives the position of the shielding portion to be adjustable.

[0011] In some embodiments, the adjusting member is a connecting rod, the connecting rod is connected to the shielding member and penetrates through the side wall of the air outlet channel, and the position of the connecting rod is adjustable to drive the position of the shielding member to be adjustable; the air outlet regulating mechanism further includes: a first fixed seal, which is sleeved on the outer periphery of the connecting rod located outside the air outlet channel and abuts against the side wall of the air outlet channel, for fixing the connecting rod and preventing the gas in the air outlet channel from leaking from the connection position of the air outlet channel and the connecting rod, and the first fixed seal is also detachably connected to the connecting rod.

[0012] In some embodiments, the adjusting member includes: a threaded rod, which is threadedly connected to the shielding member, and at least one end of the threaded rod penetrates through the side wall of the air outlet channel; at least one knob, which is connected to the end of the threaded rod penetrating through the side wall of the air outlet channel, and the rotation of the knob drives the threaded rod to rotate, so as to drive the position of the shielding member to be adjustable.

[0013] In some embodiments, a magnet is included in the shielding component, the adjusting component is an energized coil, the adjusting component is located outside the air outlet channel, and the position of the shielding component is adjustable by changing the magnitude and direction of the current of the energized coil.

[0014] According to some embodiments of the present disclosure, on the other hand, the present disclosure embodiments further provide a deposition device, including the cavity structure described in any of the above embodiments.

[0015] The technical solutions provided by the embodiments of the present disclosure have at least the following advantages:

[0016] In the cavity structure provided by the embodiments of the present disclosure, the cavity structure includes: a first cavity, a second cavity, and a communication channel located between the first cavity and the second cavity. The communication channel is used to connect the first cavity and the second cavity. The first cavity is provided with a first air inlet mechanism for supplying gas to the inside of the first cavity, and the second cavity is provided with a second air inlet mechanism for supplying gas to the inside of the second cavity; an air inlet main pipeline for connecting the air inlet pipe that supplies gas and connected to both the first air inlet mechanism and the second air inlet mechanism to supply gas to the first cavity and the second cavity; a first base and a second base, the first base is arranged in the first cavity, and the second base is arranged in the second cavity. Both the first base and the second base are used to carry wafers; an air outlet channel connected to the communication channel and further used to connect to an air extraction pump to extract the gas in the first cavity and the second cavity through the air outlet channel; an air outlet regulation mechanism, at least part of the air outlet regulation mechanism is located in the air outlet channel and the communication channel. The air outlet regulation mechanism is used to divide the part connecting the communication channel and the air outlet channel into a first exhaust hole and a second exhaust hole. The first exhaust hole is connected to the first cavity, and the second exhaust hole is connected to the second cavity; wherein, the position of the air outlet regulation mechanism is adjustable so that the opening degree of the first exhaust hole is adjustable and the opening degree of the second exhaust hole is adjustable. The first exhaust hole is connected to the first cavity and the air outlet channel, and the opening degree of the first exhaust hole is positively correlated with the gas discharge speed in the first cavity. The second exhaust hole is connected to the second cavity and the air outlet channel, and the opening degree of the second exhaust hole is positively correlated with the gas discharge speed in the second cavity. Therefore, by adjusting the position of the air outlet regulation mechanism, the opening degrees of the first exhaust hole and the second exhaust hole can be changed to change the gas discharge speeds in the first cavity and the second cavity, so as to compensate for the differences in the film thickness and film quality of the films in the first cavity and the second cavity caused by the air inlet differences between the first cavity and the second cavity, thereby reducing the differences in the film thickness and film quality of the films prepared in the two cavities of the cavity structure. In addition, the air outlet regulation mechanism of the embodiments of the present disclosure reduces the differences in the film thickness and film quality of the films in the first cavity and the second cavity by adjusting the opening degrees of the first exhaust hole and the second exhaust hole, which can avoid the problem of reduced film yield caused by adding a needle valve to the air inlet main pipeline in the related art, thereby improving the reliability of film preparation of the cavity structure. Description of the Drawings

[0017] One or more embodiments are exemplarily illustrated by pictures in the corresponding drawings. These exemplary illustrations do not constitute a limitation on the embodiments. Unless otherwise stated, the figures in the drawings do not constitute a scale limitation. To more clearly illustrate the technical solutions in the embodiments of the present disclosure or in the prior art, the drawings required to be used in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present disclosure. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0018] Figure 1 It is a schematic structural diagram of a cavity structure in the related art;

[0019] Figure 2 It is a schematic structural diagram of another cavity structure in the related art;

[0020] Figure 3 It is a schematic structural diagram of yet another cavity structure in the related art;

[0021] Figure 4 It is a partial top view of yet another cavity structure in the related art;

[0022] Figure 5 It is Figure 4 A sectional view along the A1 - A2 section;

[0023] Figure 6 It is Figure 4 A sectional view along the B1 - B2 section;

[0024] Figure 7 It is Figure 4 A sectional view along the C1 - C2 section;

[0025] Figure 8 It is a schematic structural diagram of a cavity structure provided by some embodiments of the present disclosure;

[0026] Figure 9 It is a partial top view of a cavity structure provided by some embodiments of the present disclosure;

[0027] Figure 10 It is Figure 9 A sectional view along the A1' - A2' section;

[0028] Figure 11 It is Figure 9 The first sectional view along the B1' - B2' section;

[0029] Figure 12 It is Figure 9 The second sectional view along the B1' - B2' section;

[0030] Figure 13For Figure 9 The third sectional view along the B1'-B2' section;

[0031] Figure 14 A schematic structural view of a cavity structure provided by some other embodiments of the present disclosure;

[0032] Figure 15 A partial top view of a cavity structure provided by some other embodiments of the present disclosure;

[0033] Figure 16 For Figure 15 An enlarged schematic view of the outlet channel in

[0034] Figure 17 A schematic view of the outlet channel and the shielding member in a cavity structure provided by some other embodiments of the present disclosure;

[0035] Figure 18 Another schematic view of the outlet channel and the shielding member in a cavity structure provided by some other embodiments of the present disclosure;

[0036] Figure 19 For Figure 15 A sectional view along the A1'-A2' section;

[0037] Figure 20 For Figure 15 The first sectional view along the B1'-B2' section;

[0038] Figure 21 A schematic structural view of the shielding member and the adjusting member in a cavity structure provided by some other embodiments of the present disclosure;

[0039] Figure 22 Another schematic structural view of the shielding member and the adjusting member in a cavity structure provided by some other embodiments of the present disclosure;

[0040] Figure 23 For Figure 15 The second sectional view along the B1'-B2' section;

[0041] Figure 24 For Figure 15 The third sectional view along the B1'-B2' section;

[0042] Figure 25 For Figure 15 The fourth sectional view along the B1'-B2' section;

[0043] Figure 26 A schematic structural view of a cavity structure provided by some other embodiments of the present disclosure;

[0044] Figure 27A partial top view of the cavity structure provided by some other embodiments of the present disclosure;

[0045] Figure 28 A schematic diagram of the second air outlet channel and the air outlet regulating mechanism in the cavity structure provided by some other embodiments of the present disclosure;

[0046] Figure 29 Another schematic diagram of the second air outlet channel and the air outlet regulating mechanism in the cavity structure provided by some other embodiments of the present disclosure;

[0047] Figure 30 For Figure 27 A sectional view along the A1''-A2'' section;

[0048] Figure 31 For Figure 27 The first sectional view along the B1''-B2'' section;

[0049] Figure 32 A schematic structural diagram of the shielding component and the adjusting component in the cavity structure provided by some other embodiments of the present disclosure;

[0050] Figure 33 Another schematic structural diagram of the shielding component and the adjusting component in the cavity structure provided by some other embodiments of the present disclosure;

[0051] Figure 34 For Figure 27 The second sectional view along the B1''-B2'' section;

[0052] Figure 35 For Figure 27 The third sectional view along the B1''-B2'' section;

[0053] Figure 36 For Figure 27 The fourth sectional view along the B1''-B2'' section. Detailed implementation manners

[0054] Figure 1 A schematic structural diagram of a cavity structure in the related art, Figure 2 A schematic structural diagram of another cavity structure in the related art.

[0055] For the deposition process, generally two cavity structure design forms are adopted: the spray type design (as shown in Figure 1 ) and the cross-flow design (as shown in Figure 2 ).

[0056] Referring to Figure 1, the cavity structure with a spray design includes cavity 100, an air inlet 110 at the top, and an air extraction port 120 at the bottom. The cavity structure also includes an air intake mechanism 101 and a base 102 for carrying the wafer 11. The air intake mechanism 101 is connected to the air inlet 110 and is used to supply gas into the cavity 100. In this cavity structure with a spray design, the gas enters from the air inlet 110 and finally exits through the air extraction port 120 at the bottom of the cavity.

[0057] Reference Figure 2 , the cavity structure with a cross-flow design includes cavity 200, and an air inlet 210 and an air extraction port 220 respectively located on opposite sides. The cavity 200 also has a base 201 for carrying the wafer 11. In this cavity structure with a cross-flow design, the gas enters from the air inlet 210 on one side of the cavity 200 and exits through the air extraction port 220 on the other side of the cavity 200.

[0058] Figure 3 It is a schematic structural diagram of another cavity structure in the related art. Figure 4 For Figure 3 the top view of the cavity structure in Figure 5 For Figure 4 the sectional view along the A1 - A2 section. Figure 6 For Figure 4 the sectional view along the B1 - B2 section. Figure 7 For Figure 4 the sectional view along the C1 - C2 section.

[0059] Reference Figure 3 , for the cavity structure with a spray design, in order to improve the output efficiency (throughput) of the deposition equipment, the cavity structure in the deposition equipment includes two cavities, enabling the deposition of thin films simultaneously in the two cavities. In the same time, compared with Figure 1 the cavity structure of

[0060] Combined with reference Figures 3 to 7, the cavity structure includes: a first cavity 300, a second cavity 301, and a communication channel 302 located between the first cavity 300 and the second cavity 301. The communication channel 302 is used to connect the first cavity 300 and the second cavity 301. There is a first gas inlet mechanism 310 in the first cavity 300, and the first gas inlet mechanism 310 is used to supply gas into the first cavity 300. There is a second gas inlet mechanism 311 in the second cavity 301, and the second gas inlet mechanism 311 is used to supply gas into the second cavity 301. The cavity structure includes a main gas inlet pipeline 303, and the main gas inlet pipeline 303 is used to connect to the gas inlet pipe that supplies gas, and is connected to both the first gas inlet mechanism 310 and the second gas inlet mechanism 311, and is used to supply gas to the first cavity 300 and the second cavity 301. The cavity structure further includes a first base 320 and a second base 321. The first base 320 is disposed in the first cavity 300, and the second base 321 is disposed in the second cavity 301. Both the first base 320 and the second base 321 are used to carry wafers. The cavity structure further includes an air outlet channel 304. The air outlet channel 304 is connected to the communication channel 302, and is also used to connect to a vacuum pump (not shown) to extract the gas in the first cavity 300 and the second cavity 301 through the air outlet channel 304.

[0061] Reference Figure 4 , the communication channel 302 includes a communication air outlet channel 312 and a communication test channel 322. The communication air outlet channel 312 is used to connect to the air outlet channel 304, so that the gas in the first cavity 300 and the second cavity 301 is discharged through the air outlet channel 304.

[0062] The cavity structure further includes a test channel 305. The communication test channel 322 is connected to the test channel 305, and the test channel 305 is used to connect to a vacuum gauge (not shown) to test the vacuum degree or air pressure in the first cavity 300 and the second cavity 301.

[0063] In the cavity structure in the related art, the main gas inlet pipeline 303 is respectively connected to the first cavity 300 and the second cavity 301. Due to problems such as the part structure error and assembly error of the main gas inlet pipeline 303, the gas cannot be evenly divided into the first cavity 300 and the second cavity 301, resulting in a large difference in the film thickness and film quality of the films prepared in the first cavity 300 and the second cavity 301.

[0064] Therefore, the difference in the film thickness and film quality of the films prepared in the two cavities of the cavity structure in the related art needs to be reduced.

[0065] In the cavity structure provided by the embodiments of the present disclosure, the cavity structure includes a first cavity, a second cavity, a communication channel, an air outlet channel, a first exhaust hole, a second exhaust hole, and an air outlet regulation mechanism located between the first cavity and the second cavity. Among them, the position of the air outlet regulation mechanism is adjustable, so that the opening degree of the first exhaust hole is adjustable and the opening degree of the second exhaust hole is adjustable. The first exhaust hole is communicated with the first cavity and the air outlet channel, and the opening degree of the first exhaust hole is positively correlated with the discharge speed of the gas in the first cavity. The second exhaust hole is communicated with the second cavity and the air outlet channel, and the opening degree of the second exhaust hole is positively correlated with the discharge speed of the gas in the second cavity. Therefore, by adjusting the position of the air outlet regulation mechanism, the opening degrees of the first exhaust hole and the second exhaust hole can be changed, so as to change the gas discharge speeds in the first cavity and the second cavity, to make up for the differences in the film thickness and film quality of the films in the first cavity and the second cavity caused by the intake differences between the first cavity and the second cavity, thereby reducing the differences in the film thickness and film quality of the films prepared in the two cavities of the cavity structure.

[0066] In addition, in the related art, in order to reduce the differences in the film thickness and film quality of the films in the two cavities, a needle valve is usually added to the intake main pipeline to control the intake air volume entering the two cavities, so as to make the intake air volumes of the two cavities as identical as possible, thereby reducing the differences in the film thickness and film quality of the films in the first cavity and the second cavity caused by the intake differences between the first cavity and the second cavity. However, when the gas condenses at the needle valve, particles will be generated and carried into the cavity, and finally deposited on the film, increasing the particle size of the film and reducing the yield of the film. The air outlet regulation mechanism of the embodiments of the present disclosure can reduce the differences in the film thickness and film quality of the films in the first cavity and the second cavity by adjusting the opening degrees of the first exhaust hole and the second exhaust hole, and can avoid the problem of reducing the film yield caused by adding a needle valve to the intake main pipeline in the related art, thereby improving the reliability of the film preparation of the cavity structure.

[0067] The following will elaborate on the embodiments of the present disclosure in conjunction with the drawings. However, those of ordinary skill in the art can understand that in the embodiments of the present disclosure, many technical details are proposed to help readers better understand the present disclosure. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed by the present disclosure can still be implemented.

[0068] Figure 8 A schematic structural diagram of a cavity structure provided by some embodiments of the present disclosure Figure 9 A partial top view of a cavity structure provided by some embodiments of the present disclosure Figure 10 is Figure 9 a sectional view along the A1'-A2' section Figure 11 is Figure 9 a first sectional view along the B1'-B2' section.

[0069] Combined reference Figures 8 to 11 , the cavity structure includes a first cavity 400, a second cavity 401, and a communication channel 402 located between the first cavity 400 and the second cavity 401. The communication channel 402 is used to connect the first cavity 400 and the second cavity 401. The first cavity 400 is provided with a first air inlet mechanism 410, and the first air inlet mechanism 410 is used to supply gas into the first cavity 400. The second cavity 401 is provided with a second air inlet mechanism 411, and the second air inlet mechanism 411 is used to supply gas into the second cavity 401. The cavity structure further includes an air inlet main pipeline 403, an air outlet channel 404, and an air outlet regulation mechanism 405. The air inlet main pipeline 403 is used to connect the air inlet pipe that supplies gas, and is connected to both the first air inlet mechanism 410 and the second air inlet mechanism 411, and is used to supply gas to the first cavity 400 and the second cavity 401; a first base 420 and a second base 421 are provided. The first base 420 is disposed in the first cavity 400, and the second base 421 is disposed in the second cavity 401. Both the first base 420 and the second base 421 are used to carry the wafer 11; the air outlet channel 404 is connected to the communication channel 402, and is further used to be connected to a vacuum pump (not shown) to extract the gas in the first cavity 400 and the second cavity 401 through the air outlet channel 404. At least a part of the air outlet regulation mechanism 405 is located in the air outlet channel 404 and the communication channel 402. The air outlet regulation mechanism 405 is used to divide the part of the communication channel 402 connected to the air outlet channel 404 into a first exhaust hole 414 and a second exhaust hole 424. The first exhaust hole 414 is connected to the first cavity 400, and the second exhaust hole 424 is connected to the second cavity 401. Wherein, the position of the air outlet regulation mechanism 405 is adjustable, so that the opening degree of the first exhaust hole 414 is adjustable, and the opening degree of the second exhaust hole 424 is adjustable.

[0070] The cavity structure is used to prepare a thin film on the surface of the wafer 11. Specifically, the first cavity 400 and the second cavity 401 of the cavity structure are used to provide a reaction space for preparing a thin film on the surface of the wafer 11, so as to prepare a thin film on the surface of the wafer 11.

[0071] The communication channel 402 is used to connect the first cavity 400 and the second cavity 401. The communication channel 402 may include a communication air outlet channel 412 and a communication test channel 422. The communication air outlet channel 412 is used to connect to the air outlet channel 404, so that the gas in the first cavity 400 and the second cavity 401 can be discharged through the air outlet channel 404.

[0072] The cavity structure further includes a test channel 408. The test channel 408 is connected to the communication test channel 422, and the test channel 408 is used to be connected to a vacuum gauge (not shown) to test the vacuum degree or air pressure in the first cavity 400 and the second cavity 401.

[0073] The intake main pipeline 403 is used to connect the intake pipe that provides gas, so as to supply gas to the first cavity 400 and the second cavity 401.

[0074] The air outlet channel 404 is connected to the communication channel 402. Specifically, the air outlet channel 404 is connected to the communication air outlet channel 412, and is used to discharge the gas in the first cavity 400 and the second cavity 401.

[0075] The side wall of the communication channel 402 is the cavity side wall 406, and the side wall of the air outlet channel 404 is the cavity side wall 406 and the air outlet pipe 407. In some examples, the air outlet pipe 407 is a metal pipe, a ceramic pipe, etc. In other examples, the material of the air outlet pipe 407 can be the same as the material of the cavity side wall 406, and the air outlet pipe 407 can be a part of the cavity side wall 406.

[0076] The air outlet control mechanism 405 is used to divide the part where the communication channel 402 is connected to the air outlet channel 404 into a first exhaust hole 414 and a second exhaust hole 424. Specifically, the part where the air outlet channel 404 is connected to the communication air outlet channel 412 is divided into a first exhaust hole 414 and a second exhaust hole 424.

[0077] The first exhaust hole 414 is connected to the first cavity 400 and the air outlet channel 404, and the opening degree of the first exhaust hole 414 is positively correlated with the discharge speed of the gas in the first cavity 400. The second exhaust hole 424 is connected to the second cavity 401 and the air outlet channel 404, and the opening degree of the second exhaust hole 424 is positively correlated with the discharge speed of the gas in the second cavity 401. Therefore, by adjusting the position of the air outlet control mechanism 405, the opening degrees of the first exhaust hole 414 and the second exhaust hole 424 can be adjusted to adjust the discharge speeds of the gas in the first cavity 400 and the second cavity 401.

[0078] In a specific example, if the intake air volume in the first cavity 400 is greater than that in the second cavity 401 due to the intake main pipeline 403, at this time, by adjusting the position of the air outlet control mechanism 405, the opening degree of the first exhaust hole 414 can be made greater than that of the second exhaust hole 424, so that the discharge speed of the gas in the first cavity 400 is greater than that of the gas in the second cavity 401, and the exhaust volume per unit time in the first cavity 400 is greater than that in the second cavity 401 per unit time, so as to make up for the difference in the film thickness and film quality of the films in the first cavity 400 and the second cavity 401 caused by the intake difference between the first cavity 400 and the second cavity 401, thereby reducing the difference in the film thickness and film quality of the films prepared in the first cavity 400 and the second cavity 401 in the cavity structure.

[0079] In another specific example, if the intake air volume in the first cavity 400 is less than that in the second cavity 401 due to the total intake air pipeline 403, at this time, the position of the air outlet control mechanism 405 can be adjusted to make the opening degree of the first exhaust hole 414 less than that of the second exhaust hole 424, so that the gas discharge speed in the first cavity 400 is less than that in the second cavity 401, and the exhaust air volume per unit time in the first cavity 400 is less than that in the second cavity 401 per unit time, so as to make up for the difference in film thickness and film quality of the films in the first cavity 400 and the second cavity 401 caused by the intake air difference between the first cavity 400 and the second cavity 401, thereby reducing the difference in film thickness and film quality of the films prepared in the first cavity 400 and the second cavity 401 in the cavity structure.

[0080] Continue to refer to Figure 11 , the air outlet control mechanism 405 includes a shielding component 415 and an adjusting component 425. The shielding component 415 is located in the air outlet channel 404 and the communication channel 402. The adjusting component 425 is used to control the position of the shielding component 415 to be adjustable, so that the opening degree of the first exhaust hole 414 is adjustable and the opening degree of the second exhaust hole 424 is adjustable.

[0081] The shielding component 415 is located in the air outlet channel 404 and the communication channel 402. Specifically, the shielding component 415 is located in the air outlet channel 404 and the communication air outlet channel 412, and is used to adjust the opening degrees of the first exhaust hole 414 and the second exhaust hole 424.

[0082] The adjusting component 425 is used to control the position of the shielding component 415 so that the position of the shielding component 415 is adjustable.

[0083] In some embodiments, the top of the shielding component 415 can be in contact with the top of the communication channel 402. The shielding component 415 is used to divide the communication channel 402 into a part communicating with the first cavity 400 and another part communicating with the second cavity 401. With such a setting, by controlling the shielding component 415 to move in the direction from the first cavity 400 to the second cavity 401, the opening degrees of the first exhaust hole 414 and the second exhaust hole 424 can be controlled.

[0084] Refer to Figure 8 、 Figure 9 and Figure 11, in some embodiments, the adjusting member 425 may be a connecting rod. The connecting rod is connected to the shielding member 415 and penetrates through the side wall of the air outlet passage 404. The position of the connecting rod is adjustable to drive the position of the shielding member 415 to be adjustable. The air outlet regulating mechanism 405 may further include: a first fixed seal 435. The first fixed seal 435 is sleeved on the outer periphery of the connecting rod located outside the air outlet passage 404 and abuts against the side wall of the air outlet passage 404, for fixing the connecting rod and preventing the gas in the air outlet passage 404 from leaking from the connection between the air outlet passage 404 and the connecting rod. The first fixed seal 435 is also detachably connected to the connecting rod. Wherein, the adjusting member 425 penetrates through the side wall of the air outlet passage 404, and what it penetrates through is the air outlet pipe 407, rather than the cavity side wall 406.

[0085] The adjusting member 425 is a connecting rod, and the connecting rod is fixedly connected to the shielding member 415. By controlling the movement of the connecting rod in the direction from the first cavity 400 to the second cavity 401, the position of the shielding member 415 is adjusted.

[0086] The first fixed seal 435 is detachably connected to the connecting rod. When the shielding member 415 does not need to move, the connecting rod does not need to move either. The first fixed seal 435 is sleeved on the outer periphery of the connecting rod located outside the air outlet passage 404 and abuts against the air outlet passage 404, for fixing the connecting rod and preventing the gas in the air outlet passage 404 from leaking from the connection between the air outlet passage 404 and the connecting rod, thereby improving the reliability of the cavity structure. When the position of the shielding member 415 needs to be adjusted, the connecting rod also needs to move. The first fixed seal 435 can be removed, so that the connecting rod can move in the direction from the first cavity 400 to the second cavity 401 to adjust the position of the shielding member 415.

[0087] Figure 12 For Figure 9 The second sectional view along the B1'-B2' section.

[0088] Reference Figure 8 、 Figure 9 And Figure 12 , in some embodiments, the adjusting member 425 may include: a threaded rod 4251 and at least one knob 4252. The threaded rod 4251 is threadedly connected to the shielding member 415, and at least one end of the threaded rod 4251 penetrates through the side wall of the air outlet passage 404; the knob 4252 is connected to the end of the threaded rod 4251 that penetrates through the air outlet passage 404. The rotation of the knob 4252 drives the rotation of the threaded rod 4251 to drive the position of the shielding member 415 to be adjustable. Wherein, the threaded rod 4251 penetrates through the side wall of the air outlet passage 404, and what it penetrates through is the air outlet pipe 407, rather than the cavity side wall 406.

[0089] The threaded rod 4251 is threadedly connected to the shielding member 415, and the knob 4252 is connected to one end of the threaded rod 4251 passing through the air outlet channel 404. By rotating the knob 4252, the threaded rod 4251 can be driven to rotate. The rotation of the threaded rod 4251 drives the shielding member 415 to move in the direction from the first cavity 400 to the second cavity 401, so that the opening degrees of the first exhaust hole 414 and the second exhaust hole 424 can be adjusted. In addition, the rotation angle of the knob 4252 is the same as the rotation angle of the threaded rod 4251, and the rotation angle of the threaded rod 4251 is related to the moving distance of the shielding member 415 in the direction from the first cavity 400 to the second cavity 401. Therefore, the moving distance of the shielding member 415 can be accurately controlled by the rotation angle of the knob 4252, which is beneficial to improving the practicality of the cavity structure.

[0090] In some embodiments, the air outlet regulation mechanism 405 may further include a second fixed seal 445. The second fixed seal 445 is sleeved on the outer periphery of the threaded rod 4251 located outside the air outlet channel 404 and abuts against the air outlet channel 404, for fixing the threaded rod 4251 and preventing the gas in the air outlet channel 404 from leaking from the connection between the air outlet channel 404 and the threaded rod 4251. The second fixed seal 445 is also detachably connected to the threaded rod 4251. With such a setting, when the shielding member 415 does not need to move, the threaded rod 4251 and the knob 4252 do not need to rotate either. The second fixed seal 445 is sleeved on the outer periphery of the threaded rod 4251 located outside the air outlet channel 404 and abuts against the air outlet channel 404, for fixing the threaded rod 4251 and preventing the gas in the air outlet channel 404 from leaking from the connection between the air outlet channel 404 and the threaded rod 4251, thereby improving the reliability of the cavity structure. When the position of the shielding member 415 needs to be adjusted, the threaded rod 4251 and the knob 4252 also need to rotate. The second fixed seal 445 can be removed, so that the threaded rod 4251 can move in the direction from the first cavity 400 to the second cavity 401 to adjust the position of the shielding member 415.

[0091] Figure 13 For Figure 9 The third sectional view along the B1'-B2' section.

[0092] With reference to Figure 8 、 Figure 9 and Figure 13 In some embodiments, the shielding member 415 contains a magnet (not shown), and the adjusting member 425 is an energized coil. The adjusting member 425 is located outside the air outlet channel 404, and the position of the shielding member 415 can be adjusted by changing the magnitude and direction of the current in the energized coil. By controlling the movement of the shielding member 415 with the energized coil and the magnet, the adjusting member 425 can be located outside the air outlet channel 404 without passing through the air outlet channel 404, making the structure of the cavity structure more concise.

[0093] Some other embodiments of the present disclosure further provide a cavity structure, which is substantially the same as the cavity structure provided in the foregoing embodiments. The main difference is that in the cavity structure provided in the following embodiments, the air outlet channel includes a main air outlet channel communicating with each other and branched air outlet channels located on both sides of the main air outlet channel. The following will describe this cavity structure in detail with reference to the accompanying drawings. It should be noted that for the same or corresponding features as those in the foregoing embodiments, in order to avoid repetition, they will not be described in detail below. Without contradiction, the corresponding descriptions of the foregoing embodiments are also applicable to the corresponding features of the following embodiments.

[0094] Figure 14 It is a schematic structural diagram of the cavity structure provided in some other embodiments of the present disclosure. Figure 15 It is a partial top view of the cavity structure provided in some other embodiments of the present disclosure. Figure 16 is Figure 15 an enlarged schematic diagram of the air outlet channel in Figure 17 It is a schematic diagram of the air outlet channel and the shielding member in the cavity structure provided in some other embodiments of the present disclosure. Figure 18 It is another schematic diagram of the air outlet channel and the shielding member in the cavity structure provided in some other embodiments of the present disclosure. Figure 19 is Figure 15 a sectional view along the A1'-A2' section.

[0095] With reference to Figures 14 to 19, the cavity structure includes a first cavity 500, a second cavity 501, and a communication channel 502 located between the first cavity 500 and the second cavity 501. The communication channel 502 is used to connect the first cavity 500 and the second cavity 501. The first cavity 500 is provided with a first air intake mechanism 510, and the first air intake mechanism 510 is used to supply gas to the inside of the first cavity 500. The second cavity 501 is provided with a second air intake mechanism 511, and the second air intake mechanism 511 is used to supply gas to the inside of the second cavity 501. The cavity structure further includes an intake main pipeline 503, an air outlet channel 504, and an air outlet regulation mechanism 505. The intake main pipeline 503 is used to connect to the intake pipe that supplies gas, and is connected to both the first air intake mechanism 510 and the second air intake mechanism 511, and is used to supply gas to the first cavity 500 and the second cavity 501; a first base 520 and a second base 521, the first base 520 is disposed in the first cavity 500, the second base 521 is disposed in the second cavity 501, and both the first base 520 and the second base 521 are used to carry the wafer 11; the air outlet channel 504 is connected to the communication channel 502, and is also used to connect to a vacuum pump (not shown) to extract the gas in the first cavity 500 and the second cavity 501 through the air outlet channel 504. At least a part of the air outlet regulation mechanism 505 is located in the air outlet channel 504 and the communication channel 502. The air outlet regulation mechanism 505 is used to divide the part connecting the communication channel 502 and the air outlet channel 504 into a first exhaust hole 514 and a second exhaust hole 524. The first exhaust hole 514 is connected to the first cavity 500, and the second exhaust hole 524 is connected to the second cavity 501. Wherein, the position of the air outlet regulation mechanism 505 is adjustable, so that the opening degree of the first exhaust hole 514 is adjustable, and the opening degree of the second exhaust hole 524 is adjustable.

[0096] It should be noted that the first cavity 500, the second cavity 501, the first air intake mechanism 510, the second air intake mechanism 511, the first base 520, the second base 521, the communication channel 502, the communication air outlet channel 512, the communication test channel 522, the intake main pipeline 503, the air outlet channel 504, the cavity side wall 506, the air outlet pipeline 507, and the test channel 508 in the embodiments of the present disclosure can refer to the first cavity 400, the second cavity 401, the first air intake mechanism 410, the second air intake mechanism 411, the first base 420, the second base 421, the communication channel 402, the communication air outlet channel 412, the communication test channel 422, the intake main pipeline 403, the air outlet channel 404, the cavity side wall 406, the air outlet pipeline 407, and the test channel 408 in the previous embodiment, and will not be elaborated here.

[0097] Figure 20 For Figure 15 The first sectional view along the B1'-B2' section.

[0098] Combined reference Figure 14 , Figure 15 , Figure 17 , Figure 18 and Figure 20 , in some embodiments, the air outlet regulating mechanism 505 includes a shielding member 515 and an adjusting member. The shielding member 515 is located in the air outlet passage 504 and the communication passage 502. The adjusting member is used to control the position of the shielding member 515 to be adjustable, so that the opening degree of the first exhaust hole 514 is adjustable, and the opening degree of the second exhaust hole 524 is adjustable.

[0099] The shielding member 515 is located in the air outlet passage 504 and the communication passage 502. Specifically, the shielding member 515 is located in the air outlet passage 504 and the communication air outlet passage 512, and is used to adjust the opening degrees of the first exhaust hole 514 and the second exhaust hole 524.

[0100] The adjusting member is used to control the position of the shielding member 515 to be adjustable.

[0101] Combined reference Figures 14 to 18 and Figure 20 , in some embodiments, the air outlet passage 504 may include a main air outlet passage 534 communicated with each other and branch air outlet passages 544 located on both sides of the main air outlet passage 534. The distance between one of the branch air outlet passages 544 and the first cavity 500 is less than the distance between this branch air outlet passage 544 and the second cavity 501, and the distance between the other branch air outlet passage 544 and the second cavity 501 is less than the distance between this branch air outlet passage 544 and the first cavity 500. The shielding member 515 may include a shielding portion 5151 and a movable portion 5152. The shielding portion 5151 is located at the communication portion between the branch air outlet passage 544 and the communication passage 502; the movable portion 5152 is connected to the shielding portion 5151, and the movement of the movable portion 5152 drives the shielding portion 5151 to move, so that the position of the shielding portion 5151 is adjustable.

[0102] The main air outlet passage 534 is communicated with both the first cavity 500 and the second cavity 501, and is used to discharge the gas in the first cavity 500 and the second cavity 501.

[0103] The branch air outlet passages 544 are located on both sides of the main air outlet passage 534. The distance between one of the branch air outlet passages 544 and the first cavity 500 is less than the distance between this branch air outlet passage 544 and the second cavity 501, and the distance between the other branch air outlet passage 544 and the second cavity 501 is less than the distance between this branch air outlet passage 544 and the first cavity 500. The branch air outlet passage 544 with a smaller distance from the first cavity 500 is mainly used to discharge the gas in the first cavity 500, and the branch air outlet passage 544 with a smaller distance from the second cavity 501 is mainly used to discharge the gas in the second cavity 501.

[0104] The first exhaust hole 514 is the connecting part of the gas branch channel 544 close to the first cavity 500 and the connecting exhaust channel 512, and the second exhaust hole 524 is the connecting part of the gas branch channel 544 close to the second cavity 501 and the connecting exhaust channel 512.

[0105] The shielding part 5151 is located at the connection of the gas branch channel 544 and the connecting channel 502. The shielding part 5151 moves its position driven by the movable part 5152. By moving the position of the shielding part 5151, the opening degrees of the first exhaust hole 514 and the second exhaust hole 524 can be changed.

[0106] It can be understood that the first exhaust hole 514 in the embodiment of the present disclosure is not only connected to the first cavity 500, but also connected to the second cavity 501. Since the distance between the first exhaust hole 514 and the first cavity 500 is relatively small, the gas discharged from the first exhaust hole 514 is mainly the gas in the first cavity 500, and only a small amount of the gas in the second cavity 501 will be discharged from the first exhaust hole 514. Similarly, the distance between the second exhaust hole 524 and the second cavity 501 is relatively small, and the gas discharged from the second exhaust hole 524 is mainly the gas in the second cavity 501, and only a small amount of the gas in the first cavity 500 will be discharged from the second exhaust hole 524. Therefore, even if the first exhaust hole 514 and the second exhaust hole 524 are both connected to the first cavity 500 and the second cavity 501, the embodiment of the present disclosure can still adjust the opening degrees of the first exhaust hole 514 and the second exhaust hole 524 by changing the position of the shielding member 515, so as to change the gas discharge speeds in the first cavity 500 and the second cavity 501, to make up for the differences in the film thickness and film quality of the films in the first cavity 500 and the second cavity 501 caused by the intake differences between the first cavity 500 and the second cavity 501, thereby reducing the differences in the film thickness and film quality of the films prepared in the two cavities in the cavity structure.

[0107] In some embodiments, the aperture of the exhaust hole where the main exhaust channel 534 is connected to the connecting exhaust channel 512 can be larger than the apertures of the first exhaust hole 514 and the second exhaust hole 524. With such a setting, the exhaust hole where the main exhaust channel 534 is connected to the connecting exhaust channel 512 is larger, and the first exhaust hole 514 and the second exhaust hole 524 are smaller, which can ensure that the first cavity 500 and the second cavity 501 have a relatively large gas discharge speed, and use the shielding member 515 to change the opening degrees of the first exhaust hole 514 and the second exhaust hole 524 to achieve fine adjustment of the gas discharge speeds of the first cavity 500 and the second cavity 501.

[0108] In other embodiments, the aperture of the exhaust hole through which the main air outlet channel 534 communicates with the communicating air outlet channel 512 may be less than or equal to the aperture of the first exhaust hole 514; the aperture of the exhaust hole through which the main air outlet channel 534 communicates with the communicating air outlet channel 512 may be less than or equal to the aperture of the second exhaust hole 524.

[0109] Figure 21 FIG. 4 is a schematic structural diagram of an occlusion member and an adjustment member in a cavity structure provided in some other embodiments of the present disclosure; Figure 22 FIG. 5 is another schematic structural diagram of an occlusion member and an adjustment member in a cavity structure provided in some other embodiments of the present disclosure. Figure 21 and Figure 22 FIG. 6 is a schematic diagram of the occlusion member rotating at different angles around the rotation connection portion.

[0110] With reference to Figures 14 to 18 and Figures 20 to 22 , in some embodiments, on the side of the occlusion portion 5151 facing the air outlet channel 504, there are two slot plates 5153. The two slot plates 5153 are used to form a slot (not labeled). The adjustment member 525 includes a rotation connection portion 5251, a rotation power portion 5252, a rotating shaft 5253, a slider 5254, and a limiting block 5255. The rotation connection portion 5251 is used to rotatably connect with the end of the movable portion 5152 away from the occlusion portion 5151. One end of the rotating shaft 5253 is rotatably connected to the rotation power portion 5252, and the other end is connected to the movable portion 5152. The rotation power portion 5252 provides power for the rotating shaft 5253 to rotate around the rotation power portion 5252. The rotation of the rotating shaft 5253 drives the movable portion 5152 to rotate around the rotation connection portion 5251. The slider 5254 is located in the slot and is slidably connected to the slot plate 5153. The slider 5254 is also rotatably connected to the end of the movable portion 5152 away from the rotation connection portion 5251; the limiting block 5255 contacts the side of the occlusion portion 5151 away from the movable portion 5152 and is used to limit the movement of the occlusion portion 5151 in the direction perpendicular to the first cavity 500 and pointing to the second cavity 501; wherein, the rotating shaft 5253 rotates around the rotation power portion 5252, driving the movable portion 5152 to rotate around the rotation connection portion 5251. The rotation of the movable portion 5152 drives the slider 5254 to slide in the slot and drives the position of the occlusion portion 5151 to be adjustable.

[0111] The slot plate 5153 is used to form a slot (not labeled).

[0112] The rotation connection portion 5251 may be fixed in the air outlet channel 504 to provide a fulcrum for the rotation of the movable portion 5152.

[0113] The rotating power unit 5252 can be fixed to the side wall of the air outlet channel 504 and is used to provide power for the rotation of the rotating shaft 5253, so that the rotating shaft 5253 rotates around the rotating power unit 5252 to drive the movable part 5152 to rotate around the rotating connection part 5251.

[0114] The slider 5254 is located in the card slot and is slidably connected to the card slot plate 5153. The slider 5254 can slide in the card slot along the first direction X, and the first direction X is perpendicular to the direction from the first cavity 500 to the second cavity 501.

[0115] The limiting block 5255 is located in the communicating air outlet channel 512. The limiting block 5255 contacts the side of the shielding part 5151 away from the movable part 5152 and is used to limit the movement of the shielding part 5151 in the first direction X, so that the shielding part 5151 can only move in the second direction Y under the push of the slider 5254 and will not move in the first direction X. Among them, the second direction is parallel to the direction from the first cavity 500 to the second cavity 501.

[0116] When the rotating power unit 5252 provides power to rotate the rotating shaft 5253, the movable part 5152 rotates around the rotating connection part 5251 driven by the rotating shaft 5253. The rotation of the movable part 5152 drives the slider 5254 to slide in the card slot along the first direction X and pushes the card slot plate 5153 to move in the second direction Y, so that the shielding part 5151 moves in the second direction Y, that is, the slider 5254 drives the shielding part 5151 to move in the second direction Y under the drive of the movable part 5152, so as to change the opening degrees of the first exhaust hole 514 and the second exhaust hole 524, thereby changing the gas discharge speeds in the first cavity 500 and the second cavity 501, to make up for the differences in the film thickness and film quality of the films in the first cavity 500 and the second cavity 501 caused by the intake differences between the first cavity 500 and the second cavity 501, and further reduce the differences in the film thickness and film quality of the films prepared in the two cavities in the cavity structure.

[0117] Figure 23 For Figure 15 The second sectional view along the B1'-B2' section.

[0118] Combined with reference Figures 14 to 18 and Figure 23, in some embodiments, the adjusting member 525 is a connecting rod. The connecting rod is connected to the shielding member 515 and penetrates through the side wall of the air outlet channel 504. The position of the connecting rod is adjustable to drive the position of the shielding member 515 to be adjustable. The air outlet control mechanism 505 further includes: a first fixed seal 535. The first fixed seal 535 is sleeved on the outer periphery of the connecting rod located outside the air outlet channel 504 and abuts against the side wall of the air outlet channel 504, for fixing the connecting rod and preventing the gas in the air outlet channel 504 from leaking from the connection between the air outlet channel 504 and the connecting rod. The first fixed seal 535 is also detachably connected to the connecting rod. Wherein, the adjusting member 525 penetrates through the side wall of the air outlet channel 504, and it penetrates through the air outlet pipe 507, rather than the cavity side wall 506.

[0119] The adjusting member 525 is a connecting rod, and the connecting rod is fixedly connected to the movable part 5152 of the shielding member 515. By controlling the movement of the connecting rod in the direction from the first cavity 500 to the second cavity 501, the position of the movable part 5152 is adjusted to adjust the position of the shielding part 5151.

[0120] The first fixed seal 535 is detachably connected to the connecting rod. When the shielding member 515 does not need to move, the connecting rod does not need to move either. The first fixed seal 535 is sleeved on the outer periphery of the connecting rod located outside the air outlet channel 504 and abuts against the air outlet channel 504, for fixing the connecting rod and preventing the gas in the air outlet channel 504 from leaking from the connection between the air outlet channel 504 and the connecting rod, thereby improving the reliability of the cavity structure. When the position of the shielding member 515 needs to be adjusted, the connecting rod also needs to move. The first fixed seal 535 can be removed, so that the connecting rod can move in the direction from the first cavity 500 to the second cavity 501 to adjust the position of the shielding member 515.

[0121] Figure 24 is Figure 15 The third sectional view along the B1'-B2' section.

[0122] Combined reference Figures 14 to 18 , and Figure 24, in some embodiments, the adjusting member may include: a threaded rod 5256 and at least one knob 5257. The threaded rod 5256 is threadedly connected to the shielding member 515, and at least one end of the threaded rod 5256 penetrates through the side wall of the air outlet channel 504; the knob 5257 is connected to the end of the threaded rod 5256 that penetrates through the side wall of the air outlet channel 504. Rotating the knob 5257 drives the threaded rod 5256 to rotate, so as to drive the position of the shielding member 515 to be adjustable. The threaded rod 5256 is threadedly connected to the shielding member 515, and the knob 5257 is connected to one end of the threaded rod 5256 that penetrates through the air outlet channel 504. By rotating the knob 5257, the threaded rod 5256 can be driven to rotate. The rotation of the threaded rod 5256 drives the movable part 5152 of the shielding member 515 to move in the direction from the first cavity 500 to the second cavity 501, so that the shielding part 5151 moves in the direction from the first cavity 500 to the second cavity 501, thereby making the opening degrees of the first exhaust hole 514 and the second exhaust hole 524 adjustable. In addition, the rotation angle of the knob 5257 is the same as the rotation angle of the threaded rod 5256, and the rotation angle of the threaded rod 5256 is related to the moving distance of the shielding member 515 in the direction from the first cavity 500 to the second cavity 501. Therefore, the moving distance of the shielding member 515 can be accurately controlled by the rotation angle of the knob 5257, which is beneficial to improving the practicality of the cavity structure.

[0123] In some embodiments, the air outlet regulating mechanism 505 may further include: a second fixed seal 545. The second fixed seal 545 is sleeved on the outer periphery of the threaded rod 5256 located outside the air outlet channel 504 and abuts against the air outlet channel 504, for fixing the threaded rod 5256 and preventing the gas in the air outlet channel 504 from leaking from the connection between the air outlet channel 504 and the threaded rod 5256. The second fixed seal 545 is also detachably connected to the threaded rod 5256. With such a setting, when the shielding member 515 does not need to move, the threaded rod 5256 and the knob 5257 do not need to rotate either. The second fixed seal 545 is sleeved on the outer periphery of the threaded rod 5256 located outside the air outlet channel 504 and abuts against the air outlet channel 504, for fixing the threaded rod 5256 and preventing the gas in the air outlet channel 504 from leaking from the connection between the air outlet channel 504 and the threaded rod 5256, thereby improving the reliability of the cavity structure. When the position of the shielding member 515 needs to be adjusted, the threaded rod 5256 and the knob 5257 also need to rotate. The second fixed seal 545 can be removed, so that the threaded rod 5256 can move in the direction from the first cavity 500 to the second cavity 501 to adjust the position of the shielding member 515.

[0124] Figure 25 For Figure 15 The fourth sectional view along the B1'-B2' section.

[0125] With reference to Figures 14 to 18, and Figure 25 , in some embodiments, the shielding member 515 includes a magnet (not shown), the adjusting member 525 is an energized coil, the adjusting member 525 is located outside the air outlet passage 504, and the position of the shielding member 515 is adjustable by changing the magnitude and direction of the current in the energized coil. By controlling the movement of the shielding member 515 through the energized coil and the magnet, the adjusting member 525 can be located outside the air outlet passage 504 without penetrating the air outlet passage 504, making the structure of the cavity structure simple.

[0126] Some other embodiments of the present disclosure further provide a cavity structure, which is substantially the same as the cavity structure provided in the foregoing embodiments. The main difference is that the structures of the communication passage and the air outlet passage in the cavity structure provided in the following embodiments are different. The cavity structure will be described in detail below with reference to the drawings. It should be noted that the same or corresponding features as those in the foregoing embodiments will not be described in detail below to avoid redundancy. In the case of no contradiction, the corresponding descriptions of the foregoing embodiments also apply to the corresponding features of the following embodiments.

[0127] Figure 26 is a schematic structural diagram of a cavity structure provided in some other embodiments of the present disclosure. Figure 27 is a partial top view of a cavity structure provided in some other embodiments of the present disclosure, Figure 28 is a schematic diagram of a second air outlet passage and an air outlet control mechanism in a cavity structure provided in some other embodiments of the present disclosure, Figure 29 is another schematic diagram of a second air outlet passage and an air outlet control mechanism in a cavity structure provided in some other embodiments of the present disclosure, Figure 30 is Figure 27 a sectional view along the A1''-A2'' section, Figure 31 is Figure 27 the first sectional view along the B1''-B2'' section.

[0128] With reference to Figures 26 to 31, the cavity structure includes a first cavity 600, a second cavity 601, and a communication channel located between the first cavity 600 and the second cavity 601. The communication channel is used to connect the first cavity 600 and the second cavity 601. The first cavity 600 has a first air intake mechanism 610, and the first air intake mechanism 610 is used to supply gas to the inside of the first cavity 600. The second cavity 601 has a second air intake mechanism 611, and the second air intake mechanism 611 is used to supply gas to the inside of the second cavity 601. The cavity structure further includes an intake main pipeline 603, an air outlet channel, and an air outlet control mechanism 605. The intake main pipeline 603 is used to connect to the intake pipe that supplies gas, and is connected to both the first air intake mechanism 610 and the second air intake mechanism 611, and is used to supply gas to the first cavity 600 and the second cavity 601; a first base 620 and a second base 621, the first base 620 is disposed in the first cavity 600, the second base 621 is disposed in the second cavity 601, and both the first base 620 and the second base 621 are used to carry the wafer 11; the air outlet channel is connected to the communication channel, and is also used to connect to a suction pump (not shown) to extract the gas in the first cavity 600 and the second cavity 601 via the air outlet channel. At least part of the air outlet control mechanism 605 is located in the air outlet channel and the communication channel. The air outlet control mechanism 605 is used to divide the part connecting the communication channel and the air outlet channel into a first exhaust hole 614 and a second exhaust hole 624. The first exhaust hole 614 is connected to the first cavity 600, and the second exhaust hole 624 is connected to the second cavity 601. Wherein, the position of the air outlet control mechanism 605 is adjustable, so that the opening degree of the first exhaust hole 614 is adjustable, and the opening degree of the second exhaust hole 624 is adjustable.

[0129] It should be noted that the first cavity 600, the second cavity 601, the first air intake mechanism 610, the second air intake mechanism 611, the first base 620, the second base 621, the intake main pipeline 603, the cavity side wall 606, the air outlet pipeline 607, and the test channel 608 in the embodiments of the present disclosure can refer to the first cavity 500, the second cavity 501, the first air intake mechanism 510, the second air intake mechanism 511, the first base 520, the second base 521, the intake main pipeline 503, the cavity side wall 506, the air outlet pipeline 507, and the test channel 508 in the previous embodiment, which will not be elaborated here.

[0130] In some embodiments, the air outlet control mechanism 605 includes an occlusion member 615 and an adjustment member. The occlusion member 615 is located in the air outlet channel and the communication channel. The adjustment member is used to control the position of the occlusion member 615 to be adjustable, so that the opening degree of the first exhaust hole 614 is adjustable, and the opening degree of the second exhaust hole 624 is adjustable.

[0131] The shielding member 615 is located in the air outlet channel and the communication channel. Specifically, the shielding member 615 is located in the air outlet channel and the communication air outlet channel 612, and is used to adjust the opening degrees of the first exhaust hole 614 and the second exhaust hole 624.

[0132] The adjusting member is used to control the position of the shielding member 615 to be adjustable.

[0133] In some embodiments, the communication channel may include a first communication air outlet channel 612 and a second communication air outlet channel 622; the air outlet channel includes: a first air outlet channel 634 and a second air outlet channel 644, and the first air outlet channel 634 is communicated with the first communication air outlet channel 612; the second air outlet channel 644 is connected to the second communication air outlet channel 622. Among them, the shielding member 615 is located in the second air outlet channel 644 and the second communication air outlet channel 622; the shielding member 615 includes a shielding portion 6151 and a movable portion 6152, the shielding portion 6151 is located at the communication portion of the second air outlet channel 644 and the second communication air outlet channel 622; the movable portion 6152, the movable portion 6152 is connected to the shielding portion 6151, and the movement of the movable portion 6152 drives the position of the shielding portion 6151 to be adjustable, so as to adjust the opening degrees of the first exhaust hole 614 and the second exhaust hole 624.

[0134] In some embodiments, the top of the shielding portion 6151 abuts against the top of the second communication air outlet channel 622. When the shielding portion 6151 is closer to the second cavity 601, the first exhaust hole 614 is the communication portion of the second air outlet channel 644 with the second communication air outlet channel 622. At this time, the first exhaust hole 614 is only communicated with the first cavity 600, and the opening degree of the first exhaust hole 614 can be adjusted by adjusting the position of the shielding portion 6151 to adjust the exhaust speed of the gas in the first cavity 600. When the shielding portion 6151 is closer to the first cavity 600, the second exhaust hole 624 is the communication portion of the second air outlet channel 644 with the second communication air outlet channel 622. At this time, the second exhaust hole 624 is only communicated with the second cavity 601, and the opening degree of the second exhaust hole 624 can be adjusted by adjusting the position of the shielding portion 6151 to adjust the exhaust speed of the gas in the second cavity 601.

[0135] In some embodiments, the exhaust hole through which the first air outlet channel 634 is communicated with the first communication air outlet channel 612 may be larger than the first exhaust hole 614 and the second exhaust hole 624. With such a setting, the exhaust hole through which the first air outlet channel 634 is communicated with the first communication air outlet channel 612 is larger, and the first exhaust hole 614 and the second exhaust hole 624 are smaller, which can ensure that the first cavity 600 and the second cavity 601 have a larger gas exhaust speed, and the shielding member 615 is used to change the opening degrees of the first exhaust hole 614 and the second exhaust hole 624 to realize fine adjustment of the gas exhaust speeds of the first cavity 600 and the second cavity 601.

[0136] In other embodiments, the exhaust holes through which the first air outlet channel 634 communicates with the first communicating air outlet channel 612 may be smaller than or equal to the first exhaust hole 614 and the second exhaust hole 624.

[0137] In some embodiments, the cavity structure further includes a test channel 608, and the communicating channel may further include a communicating test channel 632. The communicating test channel 632 is used to communicate with the test channel 608, and the test channel 608 is used to connect to a vacuum gauge (not shown) to test the vacuum degree or air pressure in the first cavity 600 and the second cavity 601.

[0138] Figure 32 FIG. is a schematic structural diagram of an occlusion member and an adjustment member in the cavity structure provided by still other embodiments of the present disclosure. Figure 33 FIG. is another schematic structural diagram of an occlusion member and an adjustment member in the cavity structure provided by still other embodiments of the present disclosure.

[0139] With reference to Figures 26 to 29 and Figures 31 to 33 , in some embodiments, on the side of the occlusion portion 6151 facing the air outlet channel, there are two slot plates 6153. The two slot plates 6153 are used to form a slot (not labeled). The adjustment member 625 includes a rotation connection portion 6251, a rotation power portion 6252, a rotating shaft 6253, and a slider 6254. The rotation connection portion 6251 is used to rotatably connect to the end of the movable portion 6152 away from the occlusion portion 6151. One end of the rotating shaft 6253 is rotatably connected to the rotation power portion 6252, and the other end is connected to the movable portion 6152. The rotation power portion 6252 provides power for the rotating shaft 6253 to rotate the rotating shaft 6253 around the rotation power portion 6252. The rotation of the rotating shaft 6253 drives the movable portion 6152 to rotate around the rotation connection portion 6251. The slider 6254 is located in the slot and is slidably connected to the slot plate 6153. The slider 6254 is also rotatably connected to the end of the movable portion 6152 away from the rotation connection portion 6251. Among them, the rotating shaft 6253 rotates around the rotation power portion 6252, driving the movable portion 6152 to rotate around the rotation connection portion 6251. The rotation of the movable portion 6152 drives the slider 6254 to slide in the slot and drives the position of the occlusion portion 6151 to be adjustable.

[0140] The slot plate 6153 is used to form a slot (not labeled).

[0141] The rotation connection portion 6251 may be fixed in the second air outlet channel 644 to provide a fulcrum for the rotation of the movable portion 6152.

[0142] The rotation power unit 6252 can be fixed to the side wall of the second air outlet channel 644 to provide power for the rotation of the rotating shaft 6253, so that the rotating shaft 6253 rotates around the rotation power unit 6252 to drive the movable part 6152 to rotate around the rotation connection part 6251.

[0143] The slider 6254 is located in the card slot and is slidably connected to the card slot plate 6153. The slider 6254 can slide in the card slot along the first direction X, and the first direction X is perpendicular to the direction from the first cavity 600 to the second cavity 601.

[0144] The top of the shielding part 6151 abuts against the top of the second communication air outlet channel 622, and the bottom of the shielding part 6151 abuts against the bottom of the second communication air outlet channel 622. Therefore, the side wall of the second communication air outlet channel 622 can play a role in restricting the movement of the shielding part 6151 in the first direction X, so that the shielding part 6151 can only move in the second direction Y under the push of the slider 6254 and will not move in the first direction X. Among them, the second direction is parallel to the direction from the first cavity 600 to the second cavity 601.

[0145] When the rotation power unit 6252 provides power to rotate the rotating shaft 6253, the movable part 6152 rotates around the rotation connection part 6251 driven by the rotating shaft 6253. The rotation of the movable part 6152 drives the slider 6254 to slide in the card slot along the first direction X and pushes the card slot plate 6153 to move in the second direction Y, so that the shielding part 6151 moves in the second direction Y, that is, the slider 6254 drives the shielding part 6151 to move in the second direction Y under the drive of the movable part 6152 to change the opening degrees of the first exhaust hole 614 and the second exhaust hole 624, thereby changing the gas discharge speeds in the first cavity 600 and the second cavity 601 to make up for the differences in the film thickness and film quality of the films in the first cavity 600 and the second cavity 601 caused by the intake differences between the first cavity 600 and the second cavity 601, and further reducing the differences in the film thickness and film quality of the films prepared in the two cavities in the cavity structure.

[0146] Figure 34 For Figure 27 The second sectional view along the B1''-B2'' section.

[0147] Combined with reference Figures 26 to 29 And Figure 34, in some embodiments, the adjusting member 625 is a connecting rod. The connecting rod is connected to the shielding member 615 and penetrates through the side wall of the air outlet passage. The position of the connecting rod is adjustable to drive the position of the shielding member 615 to be adjustable. The air outlet control mechanism 605 further includes: a first fixed seal 635. The first fixed seal 635 is sleeved on the outer periphery of the connecting rod located outside the air outlet passage and abuts against the side wall of the air outlet passage, for fixing the connecting rod and preventing the gas in the air outlet passage from leaking from the connection between the air outlet passage and the connecting rod. The first fixed seal 635 is also detachably connected to the connecting rod.

[0148] The adjusting member 625 is a connecting rod, and the connecting rod is fixedly connected to the shielding member 615. The position of the shielding member 615 is adjusted by moving the connecting rod in the direction from the first cavity 600 to the second cavity 601.

[0149] The first fixed seal 635 is detachably connected to the connecting rod. When the shielding member 615 does not need to move, the connecting rod does not need to move either. The first fixed seal 635 is sleeved on the outer periphery of the connecting rod located outside the air outlet passage and abuts against the air outlet passage, for fixing the connecting rod and preventing the gas in the air outlet passage from leaking from the connection between the air outlet passage and the connecting rod, thereby improving the reliability of the cavity structure. When the position of the shielding member 615 needs to be adjusted, the connecting rod also needs to move. The first fixed seal 635 can be removed, so that the connecting rod can move in the direction from the first cavity 600 to the second cavity 601 to adjust the position of the shielding member 615.

[0150] Figure 35 is Figure 27 The third sectional view along the B1''-B2'' section.

[0151] With reference to Figures 26 to 29 and Figure 35 , in some embodiments, the adjusting member may include: a threaded rod 6255 and at least one knob 6256. The threaded rod 6255 is threadedly connected to the shielding member 615, and at least one end of the threaded rod 6255 penetrates through the side wall of the air outlet passage; the knob 6256 is connected to the end of the threaded rod 6255 that penetrates through the side wall of the air outlet passage. The rotation of the knob 6256 drives the rotation of the threaded rod 6255 to drive the movement of the shielding member 615, so that the position of the shielding member 615 is adjustable.

[0152] The threaded rod 6255 is threadedly connected to the shielding member 615. The knob 6256 is connected to one end of the threaded rod 6255 that penetrates through the air outlet channel 504. By rotating the knob 6256, the threaded rod 6255 can be driven to rotate. The rotation of the threaded rod 6255 drives the shielding member 615 to move in the direction from the first cavity 600 to the second cavity 601, so that the opening degrees of the first exhaust hole 614 and the second exhaust hole 624 can be adjusted. In addition, the rotation angle of the knob 6256 is the same as the rotation angle of the threaded rod 6255, and the rotation angle of the threaded rod 6255 is related to the moving distance of the shielding member 615 in the direction from the first cavity 600 to the second cavity 601. Therefore, the moving distance of the shielding member 615 can be accurately controlled by the rotation angle of the knob 6256, which is beneficial to improving the practicality of the cavity structure.

[0153] In some embodiments, the air outlet regulation mechanism 605 may further include: a second fixed seal 645. The second fixed seal 645 is sleeved on the outer periphery of the threaded rod 6255 located outside the air outlet channel and abuts against the air outlet channel, for fixing the threaded rod 6255 and preventing the gas in the air outlet channel from leaking from the connection between the air outlet channel and the threaded rod 6255. The second fixed seal 645 is also detachably connected to the threaded rod 6255. With such a setting, when the shielding member 615 does not need to move, the threaded rod 6255 and the knob 6256 do not need to rotate either. The second fixed seal 645 is sleeved on the outer periphery of the threaded rod 6255 located outside the air outlet channel and abuts against the air outlet channel, for fixing the threaded rod 6255 and preventing the gas in the air outlet channel from leaking from the connection between the air outlet channel and the threaded rod 6255, thereby improving the reliability of the cavity structure. When the position of the shielding member 615 needs to be adjusted, the threaded rod 6255 and the knob 6256 also need to rotate. The second fixed seal 645 can be removed, so that the threaded rod 6255 can move in the direction from the first cavity 600 to the second cavity 601 to adjust the position of the shielding member 615.

[0154] Figure 36 For Figure 27 The fourth sectional view along the B1''-B2'' section.

[0155] With reference to Figures 26 to 29 And Figure 36 , in some embodiments, the shielding member 615 contains a magnet (not shown), and the adjusting member 625 is an energized coil. The adjusting member 625 is located outside the air outlet channel, and the position of the shielding member 615 can be adjusted by changing the magnitude and direction of the current in the energized coil. By controlling the movement of the shielding member 615 through the energized coil and the magnet, the adjusting member 625 can be located outside the air outlet channel without penetrating the side wall of the air outlet channel, making the structure of the cavity structure more concise.

[0156] In the cavity structure provided in the above embodiments, by adjusting the position of the gas outlet control mechanism and changing the opening degrees of the first exhaust hole and the second exhaust hole, the gas discharge speeds in the first cavity and the second cavity can be changed, so as to compensate for the differences in film thickness and film quality of the films in the first cavity and the second cavity caused by the intake differences between the first cavity and the second cavity, thereby reducing the differences in film thickness and film quality of the films prepared in the two cavities of the cavity structure. In addition, the gas outlet control mechanism in the embodiments of the present disclosure reduces the differences in film thickness and film quality of the films in the first cavity and the second cavity by adjusting the opening degrees of the first exhaust hole and the second exhaust hole, which can avoid the problem of reduced film yield caused by adding a needle valve in the intake main pipeline in the related art, and thus can also improve the reliability of preparing films by the cavity structure.

[0157] Correspondingly, another embodiment of the present disclosure further provides a deposition device having the cavity structure of any of the above embodiments. For the same or corresponding parts as in the previous embodiment, reference may be made to the corresponding description of the previous embodiment, and details will not be elaborated below.

[0158] The deposition device includes the cavity structure of any of the above embodiments.

[0159] The deposition device can be used to achieve the preparation of a target material layer by flowable chemical vapor deposition. The deposition device can also be used to achieve the preparation of a target material layer by other vapor chemical depositions. The other vapor chemical depositions can be atmospheric pressure chemical vapor deposition (APCVD), low pressure chemical vapor deposition (LPCVD), ultrahigh vacuum chemical vapor deposition (UHVCVD), metal-organic chemical vapor deposition (MOCVD), or plasma-enhanced chemical vapor deposition (PECVD), etc.

[0160] Those of ordinary skill in the art can understand that the above embodiments are specific embodiments for implementing the present disclosure. In actual applications, various changes can be made in form and details without departing from the spirit and scope of the present disclosure. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the scope defined by the claims.

Claims

1. A chamber structure, applied to a deposition device, characterized in that: include: A first cavity, a second cavity, and a communication passage between the first cavity and the second cavity, the communication passage is used to connect the first cavity and the second cavity, the first cavity has a first air intake mechanism, the first air intake mechanism is used to provide gas to the inside of the first cavity, the second cavity has a second air intake mechanism, the second air intake mechanism is used to provide gas to the inside of the second cavity; An air intake main pipeline, the air intake main pipeline is used to communicate with an air intake pipe for providing gas, and is connected to both the first air intake mechanism and the second air intake mechanism, and is used to provide gas to the first cavity and the second cavity; A first pedestal and a second pedestal, wherein the first pedestal is disposed in the first cavity, and the second pedestal is disposed in the second cavity, and both the first pedestal and the second pedestal are used to carry wafers; an air outlet channel, the air outlet channel being in communication with the communication channel and also used to be connected to an air pump so as to extract the gas in the first cavity and the second cavity through the air outlet channel; an air outlet regulating mechanism, at least part of which is located in the air outlet channel and the connecting channel, and the air outlet regulating mechanism is used to separate the part of the connecting channel connected to the air outlet channel into a first exhaust hole and a second exhaust hole, the first exhaust hole is connected to the first cavity, and the second exhaust hole is connected to the second cavity; Wherein, the air outlet regulating mechanism includes: a shielding component, which is located in the air outlet channel and the connecting channel; an adjusting component, which is used to control the position of the shielding component to be adjustable, so that the opening of the first exhaust hole is adjustable, and the opening of the second exhaust hole is adjustable.

2. The cavity structure according to claim 1, characterized in that: The top of the shielding component abuts against the top of the communication channel, and the shielding component is used to divide the communication channel into a part communicating with the first cavity and another part communicating with the second cavity.

3. The cavity structure according to claim 1, characterized in that: The air outlet channel comprises: A main outlet channel and branch outlet channels located on both sides of the main outlet channel are connected, wherein the distance between one branch outlet channel and the first cavity is smaller than the distance between the branch outlet channel and the second cavity, and the distance between the other branch outlet channel and the second cavity is smaller than the distance between the branch outlet channel and the first cavity; The shielding component comprises: a shielding portion, the shielding portion being located at a connecting portion between the branched gas channel and the connecting channel; The movable part is connected to the shielding part, and the movement of the movable part drives the position of the shielding part to be adjustable.

4. The cavity structure according to claim 1, characterized in that: The communication channel comprises: a first communicating air outlet passage and a second communicating air outlet passage; The air outlet channel comprises: a first air outlet channel, the first air outlet channel being in communication with the first communicating air outlet channel; a second air outlet channel, the second air outlet channel being connected to the second communicating air outlet channel; Wherein, the shielding component is located in the second air outlet channel and the second connecting air outlet channel; The shielding component comprises: a shielding portion, the shielding portion being located at a connection point between the second air outlet channel and the second communicating air outlet channel; The movable part is connected to the shielding part, and the movable part moves to drive the position of the shielding part to be adjustable, so as to adjust the opening of the first exhaust hole and the opening of the second exhaust hole.

5. The cavity structure according to claim 3 or 4, characterized in that: The shielding portion has two slot plates on one side facing the air outlet channel, and the two slot plates are used to form a slot. The adjusting component includes: A rotatable connection portion, the rotatable connection portion being used to be rotatably connected to an end of the movable portion away from the shielding portion; A rotating power unit and a rotating shaft, wherein one end of the rotating shaft is rotatably connected to the rotating power unit and the other end is connected to the movable unit, the rotating power unit provides power to the rotating shaft so that the rotating shaft rotates around the rotating power unit, and the rotation of the rotating shaft drives the movable unit to rotate around the rotating connection unit; A slider, the slider is located in the card slot and is slidably connected to the card slot plate, and the slider is also rotatably connected to an end of the movable part away from the rotating connection part; The rotating shaft rotates around the rotating power part, driving the movable part to rotate around the rotating connection part. The rotation of the movable part drives the slider to slide in the slot and drives the position of the shielding part to be adjustable.

6. The cavity structure according to any one of claims 2 to 4, characterized in that: The adjusting component is a connecting rod, which is connected to the shielding component and passes through the side wall of the air outlet channel. The position of the connecting rod is adjustable to drive the position of the shielding component to be adjustable; The gas outlet regulating mechanism also includes: The first fixed seal is sleeved on the outer periphery of the connecting rod located at the outer side of the air outlet channel and abuts against the side wall of the air outlet channel, and is used for fixing the connecting rod and preventing the gas in the air outlet channel from leaking from the connection between the air outlet channel and the connecting rod. The first fixed seal is also detachably connected to the connecting rod.

7. The cavity structure according to any one of claims 2 to 4, characterized in that: The adjusting component comprises: A threaded rod, wherein the threaded rod is threadedly connected to the shielding component, and at least one end of the threaded rod passes through the side wall of the air outlet channel; At least one knob is connected to one end of the threaded rod penetrating the side wall of the air outlet channel, and rotation of the knob drives the threaded rod to rotate, so as to drive the position of the shielding component to be adjustable.

8. The cavity structure according to any one of claims 2 to 4, characterized in that: The shielding component contains a magnet, the adjusting component is an energized coil, and the adjusting component is located outside the air outlet channel. The position of the shielding component can be adjusted by changing the current size and current direction of the energized coil.

9. A deposition device, characterized in that: Comprising the cavity structure as described in any one of claims 1 to 8.

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