Shutter transport device and scanning electron microscope having the same

Abstract

The application discloses a light barrier conveying device and a scanning electron microscope with the same. The light barrier conveying device belongs to the technical field of scanning electron microscopes and comprises a supporting piece, a pushing rod, a driving assembly and an actuating assembly. The supporting piece is provided with a supporting hole, and the pushing rod is arranged in the supporting hole. The pushing rod is provided with a pushing end and a light barrier connecting end. The pushing end and the light barrier connecting end are located on the two sides of the axial direction of the supporting hole. The light barrier connecting end is suitable for being connected with a light barrier. The driving assembly is used for driving the pushing rod to move along the axial direction of the supporting hole. When the pushing rod moves along the axial direction of the supporting hole, the actuating assembly is used for driving the pushing rod to swing, so that the light barrier connecting end of the pushing rod forms a variable-rail curve movement, thereby being favorable for reducing the abrasion of the light barrier on the light barrier connecting end, reducing the pollution of the abrasion debris to the scanning electron microscope and prolonging the service life of the scanning electron microscope.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of scanning electron microscopy, in particular to a diaphragm conveying device and a scanning electron microscope having the same. BACKGROUND

[0002] A scanning electron microscope is a kind of electron microscope with high resolution, which can be used to observe the surface topography and microstructure of a sample. The scanning electron microscope can utilize electron beam imaging to provide higher resolution than optical microscopes.

[0003] In the related art, a movable diaphragm is usually arranged at the objective aperture of the scanning electron microscope. When the diaphragm cooperates with and separates from the objective aperture, the diaphragm generates a flat rubbing motion relative to the objective aperture, which causes the diaphragm to be worn and reduces the service life of the diaphragm. In addition, the abrasion generated by the friction between the diaphragm and the objective aperture can pollute the scanning electron microscope and affect the imaging quality. SUMMARY

[0004] The present application aims to at least solve one of the above technical problems in the prior art to some extent. To this end, the present application provides a diaphragm conveying device which can reduce the wear of the diaphragm.

[0005] The present application also provides a scanning electron microscope having the above diaphragm conveying device.

[0006] According to the diaphragm conveying device of the present application, the diaphragm conveying device comprises a support member having a support hole, a push rod arranged in the support hole, the push rod having a push end and a diaphragm connecting end, the push end and the diaphragm connecting end being located on the two sides of the axial direction of the support hole, the diaphragm connecting end being adapted to be connected with a diaphragm, a driving assembly for driving the push rod to move along the axial direction of the support hole, and an actuating assembly for driving the push rod to swing when the push rod moves along the axial direction of the support hole, so that the movement directions of the push end and the diaphragm connecting end are opposite in the radial direction of the support hole.

[0007] According to the diaphragm conveying device of the present application, the driving assembly can drive the push rod to move along the axial direction of the support hole, and the actuating assembly can drive the push rod to swing, so that the diaphragm connecting end of the push rod forms a variable orbit curve motion, thereby reducing the wear of the diaphragm on the diaphragm connecting end, reducing the pollution of the scanning electron microscope by the abrasion, and improving the service life of the scanning electron microscope.

[0008] According to some embodiments of the present application, the driving assembly comprises a transmission member movably connected with the push end, and a driving member for driving the transmission member to move along the axial direction of the support hole.

[0009] According to some embodiments of the present application, the actuating assembly comprises a guide frame having a guide surface which is arranged obliquely relative to the axis of the support hole; and a guide member connected to the push rod and adapted to guide with the guide surface.

[0010] According to some embodiments of the present application, the guide member comprises a mounting plate fixedly connected to the push rod; and a roller rotatably connected to the mounting plate and adapted to roll along the guide surface.

[0011] According to some embodiments of the present application, the guide frame is arranged between the support member and the push end, the guide surface is located above the push rod, and in the axial direction of the support hole, the guide surface has a guide front end close to the diaphragm connecting end and a guide rear end away from the diaphragm connecting end, and in the direction from the guide front end to the guide rear end, the distance between the guide surface and the push rod gradually increases.

[0012] According to some embodiments of the present application, the actuating assembly further comprises elastic members respectively connected to the transmission member and the push end, and configured to apply elastic force to the push end so as to keep the guide member in abutting contact with the guide surface.

[0013] According to another aspect of the present application, a scanning electron microscope comprises an electron gun chamber having an objective lens opening; a sample chamber in communication with the electron gun chamber through the objective lens opening; a diaphragm conveying device as described above, the diaphragm connecting end being located in the sample chamber; a diaphragm connected to the diaphragm connecting end, the diaphragm conveying device being configured to drive the diaphragm to move to a first preset position and a second preset position, the diaphragm being in sealing engagement with the objective lens opening when the diaphragm moves to the first preset position, and the diaphragm being separated from the objective lens opening when the diaphragm moves to the second preset position; and a vacuum pump configured to vacuumize the electron gun chamber and the sample chamber.

[0014] According to the scanning electron microscope of the present application, the diaphragm conveying device is configured to drive the diaphragm to move to the first preset position and the second preset position, the diaphragm being in sealing engagement with the objective lens opening when the diaphragm moves to the first preset position, and the diaphragm being separated from the objective lens opening when the diaphragm moves to the second preset position, and the vacuum pump is configured to vacuumize the electron gun chamber and the sample chamber, so that the scanning electron microscope can realize the compatibility and rapid switching between the standard vacuum working mode and the low vacuum working mode, thereby facilitating the improvement of the product competitiveness of the scanning electron microscope.

[0015] According to some embodiments of the present application, the diaphragm conveying device further comprises a sealed bellows, the sealed bellows and the driving assembly are both arranged outside the sample chamber, the sealed bellows is sleeved on the push rod, one end of the sealed bellows is in communication with the sample chamber, and the other end of the sealed bellows is fixedly and sealingly connected with the push rod.

[0016] According to some embodiments of the present application, the diaphragm comprises a rotating shaft base, the rotating shaft base is rotationally connected with the diaphragm connecting end around a first axis, and a diaphragm body, the diaphragm body is rotationally connected with the rotating shaft base around a second axis, and the second axis is perpendicular to the first axis.

[0017] According to some embodiments of the present application, the diaphragm further comprises a sealing ring, the sealing ring is arranged on the diaphragm body, and the sealing ring is sealingly connected with the objective lens port when the diaphragm moves to the first preset position.

[0018] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be understood through practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a perspective view of a diaphragm conveying device and a diaphragm according to an embodiment of the present application;

[0020] Figure 2 is a front view of Figure 1 ;

[0021] Figure 3 is a schematic view of a scanning electron microscope when a diaphragm according to an embodiment of the present application moves to be separated from an objective lens port;

[0022] Figure 4 is a schematic view of a scanning electron microscope when a diaphragm according to an embodiment of the present application moves to be connected with an objective lens port;

[0023] Figure 5 is a front view of Figure 2 ;

[0024] Figure 6 is a schematic view of a diaphragm conveying device according to an embodiment of the present application at a support;

[0025] Figure 7 is a perspective view of a diaphragm according to an embodiment of the present application;

[0026] Figure 8 is an exploded view of a diaphragm according to an embodiment of the present application;

[0027] Figure 9 is a sectional view of a diaphragm body according to an embodiment of the present application.

[0028] Reference signs:

[0029] Support 1; support hole 11; support base point 111; first mounting groove 12; second mounting groove 13;

[0030] Push rod 2; push end 21; diaphragm connecting end 22;

[0031] Drive assembly 3; transmission member 31; driving member 32; motor 321; lead screw 322; guide rod 323;

[0032] Actuating assembly 4; guide frame 41; guide surface 411; guide front end 4111; guide rear end 4112; guide member 42; mounting plate 421; roller 422; elastic member 43;

[0033] Base 5;

[0034] First rolling connecting member 6; first connecting part 61; first rolling part 62;

[0035] Second rolling connecting member 7; second connecting part 71; second rolling part 72;

[0036] Sealing bellow 8; sealing flange 9;

[0037] Diaphragm conveying device 10;

[0038] Electron gun chamber 20; objective aperture 201;

[0039] Sample chamber 30;

[0040] Diaphragm 40; pivot base 401; first supporting arm 4011; second supporting arm 4012; connecting supporting arm 4013; first pivot 4014; diaphragm body 402; adapter block 403; fastening screw 405; lubricating gasket 406; second pivot 407; sealing ring 408;

[0041] Scanning electron microscope 100. DETAILED DESCRIPTION

[0042] Embodiments of the present application are described in detail below with reference to the attached drawings, which show by way of example, embodiments in which the same or similar elements have the same or similar reference numbers. The embodiments described below are examples intended to explain the present application, and are not to be understood as limiting the present application.

[0043] In the description of the present application, it is to be understood by the terms "upper", "lower", "front", "back", "left", "right", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0044] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features referred to. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise explicitly specified and limited.

[0045] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected or can communicate with each other; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] The light barrier conveying device 10 and the scanning electron microscope 100 having the same according to the embodiments of the present application will be described in detail below with reference to the drawings.

[0047] Referring to Figures 1-4 As shown in the drawings, the light barrier conveying device 10 comprises a support 1, a pushing rod 2, a driving assembly 3 and an actuating assembly 4, the support 1 has a support hole 11, the pushing rod 2 is arranged in the support hole 11, the pushing rod 2 has a pushing end 21 and a light barrier connecting end 22, the pushing end 21 and the light barrier connecting end 22 are located on both sides of the axial direction of the support hole 11, the light barrier connecting end 22 is adapted to be connected with the light barrier 40, the driving assembly 3 is used to drive the pushing rod 2 to move along the axial direction of the support hole 11, and when the pushing rod 2 moves along the axial direction of the support hole 11, the actuating assembly 4 is used to drive the pushing rod 2 to swing, so that the movement directions of the pushing end 21 and the light barrier connecting end 22 are opposite in the radial direction of the support hole 11.

[0048] The diaphragm conveying device 10 can be used in the scanning electron microscope 100, the diaphragm connecting end 22 on the push rod 2 is suitable for being connected with the diaphragm 40, the diaphragm conveying device 10 can drive the push rod 2 to move and swing to control the position of the diaphragm 40, when the diaphragm 40 cooperates with the electron gun objective aperture 201 of the scanning electron microscope 100, the abrasion of the diaphragm 40 to the objective aperture 201 can be reduced, thereby reducing the abrasion of the diaphragm 40 and the objective aperture 201, reducing the pollution of the electron gun and the sample by the abrasion, improving the service life and scanning precision of the scanning electron microscope 100.

[0049] Specifically, the support hole 11 on the support 1 is a through hole, the axial direction of the support hole 11 is the front-rear direction in the Figures 1-4 , the support hole 11 can be gap-fitted with the push rod 2, the push rod 2 is movably arranged in the support hole 11 along the axial direction of the support hole 11, one end of the push rod 2 is the push end 21, the other end of the push rod 2 is the diaphragm connecting end 22, the driving assembly 3 can be connected with the push end 21, the driving assembly 3 can drive the push rod 2 to move in the front-rear direction, so that the diaphragm 40 connected with the diaphragm connecting end 22 moves in the front-rear direction, at the same time, when the push rod 2 moves, the actuating assembly 4 drives the push rod 2 to swing, the contact point between the push rod 2 and the bottom of the support hole 11 can be used as the support base point 111 of the swing of the push rod 2, and when the actuating assembly 4 drives the push rod 2 to swing around the support base point 111, the movement directions of the push end 21 and the diaphragm connecting end 22 are opposite in the radial direction of the support hole 11 (i.e. the up-down direction in the Figures 1-4 , that is, the diaphragm connecting end 22 can be raised relative to the push end 21, so that the diaphragm connecting end 22 forms a variable-rail curve movement, when the diaphragm 40 on the diaphragm connecting end 22 cooperates with the objective aperture 201, the abrasion of the diaphragm 40 and the objective aperture 201 can be reduced.

[0050] Referring to Figure 3 and Figure 4As shown, direction A is clockwise, and the opposite direction of direction A is counterclockwise. When the driving component 3 drives the push rod 2 to move forward, the actuating component 4 can cause the push rod 2 to swing clockwise. When the driving component 3 drives the push rod 2 to move backward, the actuating component 4 can cause the push rod 2 to swing counterclockwise. That is to say, when the push end 21 moves forward, it also moves downward; when the push end 21 moves backward, it also moves upward. When the aperture connection end 22 moves forward, it also moves upward; when the aperture connection end 22 moves backward, it also moves downward. The aperture transport device 10 moves the aperture 40 forward and upward with the aperture connecting end 22 when it needs to transport the aperture 40 to cooperate with the objective lens aperture 201, thereby reducing the wear between the aperture 40 and the objective lens aperture 201 when they come into contact. When the aperture transport device 10 needs to transport the aperture 40 to separate it from the objective lens aperture 201, the aperture 40 moves backward and downward with the aperture connecting end 22, thereby reducing the wear between the aperture 40 and the objective lens aperture 201 when they separate, and preventing the aperture 40 from blocking the objective lens aperture 201 after separation.

[0051] According to the embodiment of the present invention, the aperture conveying device 10 can drive the push rod 2 to move along the axial direction of the support hole 11. At the same time, the actuation component 4 can drive the push rod 2 to swing so that the aperture connection end 22 of the push rod 2 forms a variable trajectory curve motion, which helps to reduce the wear of the aperture 40 on the aperture connection end 22, reduce the contamination of the scanning electron microscope 100 by the wear debris, and improve the service life of the scanning electron microscope 100.

[0052] In some embodiments of the present invention, reference is made to... Figures 1-4 As shown, the drive assembly 3 includes a transmission component 31 and a drive component 32. The transmission component 31 is movably connected to the push end 21, and the drive component 32 is used to drive the transmission component 31 to move along the axial direction of the support hole 11.

[0053] When the driving component 32 drives the transmission component 31 to move along the axial direction of the support hole 11, the transmission component 31 can drive the push rod 2 to move along the axial direction of the support hole 11. The transmission component 31 is movably connected to the push end 21 so as to reduce or avoid interference between the push rod 2 and the transmission component 31 when the push rod 2 swings.

[0054] In some embodiments, refer to Figures 1-4As shown, the transmission member 31 and the driving member 32 are a ball screw pair, the driving member 32 comprises a motor 321, a screw rod 322 and a guide rod 323, the screw rod 322 and the guide rod 323 extend along the axial direction of the support hole 11, the screw rod 322 and the guide rod 323 are both arranged in the transmission member 31, the transmission member 31 is threadedly connected with the screw rod 322, and the transmission member 31 is guided by the guide rod 323, the motor 321 is used to drive the screw rod 322 to rotate, so that the transmission member 31 moves along the extension direction of the screw rod 322, wherein the motor 321 can be a high-resolution stepper motor, so as to improve the movement accuracy of the transmission member 31.

[0055] In other embodiments, the driving member 32 can be a hydraulic rod, which can be extended and retracted in the axial direction of the support hole 11 to drive the transmission member 31 to move in the axial direction.

[0056] In some embodiments, the movable connection between the pushing end 21 and the transmission member 31 is a movable connection, for example, the transmission member 31 is provided with a mounting square hole, the pushing end 21 is arranged in the mounting square hole and is in clearance fit with the mounting square hole, the pushing end 21 is provided with a guide groove, the guide groove is opposite to the hole wall of the mounting square hole, the extension direction of the guide groove is parallel to the radial direction of the support hole 11, and the transmission member 31 is provided with a connecting piece inserted into the guide groove, so that when the pushing rod 2 swings, the pushing end 21 can move along the extension direction of the guide groove under the limitation of the connecting piece, so as to reduce the interference amount between the pushing rod 2 and the transmission member 31.

[0057] In other embodiments, the movable connection between the pushing end 21 and the transmission member 31 is a movable and rotatable connection, for example, the transmission member 31 can be provided with a sliding rail parallel to the radial direction of the support hole 11, the sliding rail is provided with a sliding block, and the pushing end 21 is hinged to the sliding block, so that when the pushing rod 2 swings, the pushing end 21 can move and rotate relative to the transmission member 31, thereby avoiding the interference between the pushing rod 2 and the transmission member 31.

[0058] In some embodiments of the present application, referring to Figures 1-5 As shown, the actuating assembly 4 comprises a guide frame 41 and a guide member 42, the guide frame 41 has a guide surface 411, the guide surface 411 is arranged obliquely relative to the axis of the support hole 11, and the guide member 42 is connected with the pushing rod 2 and is adapted to be guided by the guide surface 411.

[0059] When the driving assembly 3 drives the pushing rod 2 to move along the axial direction of the support hole 11, the guide member 42 on the pushing rod 2 is guided by the guide surface 411 which is oblique relative to the axis of the support hole 11, and under the action of the guide surface 411 on the guide member 42, the swinging of the pushing rod 2 is realized, and the structure of the actuating assembly 4 is simple and reliable.

[0060] In some embodiments of the present application, as shown in

[0061] In some embodiments of the present application, as shown in Figure 5 The guide 42 comprises a mounting plate 421 and a roller 422, the mounting plate 421 is fixedly connected with the push rod 2, and the roller 422 is rotatably connected with the mounting plate 421, and the roller 422 is adapted to roll along the guide surface 411.

[0062] The roller 422 is rotatably connected with the mounting plate 421 through a roller rotating shaft, and when the transmission member 31 drives the push rod 2 to move along the axis of the support hole 11, the roller 422 can roll on the guide surface 411 to realize the swing of the push rod 2, and the roller 422 can reduce the resistance of the guide surface 411 to the guide 42 and reduce the wear of the guide 42 and the guide surface 411.

[0063] In some embodiments of the present application, as shown in

[0064] In some embodiments of the present application, as shown in Figures 1-5 The guide bracket 41 is arranged between the support 1 and the push end 21, the guide surface 411 is located above the push rod 2, and in the axial direction of the support hole 11, the guide surface 411 has a guide front end 4111 close to the diaphragm connecting end 22 and a guide rear end 4112 away from the diaphragm connecting end 22, and in the direction from the guide front end 4111 to the guide rear end 4112, the distance between the guide surface 411 and the push rod 2 gradually increases.

[0065] Specifically, in the direction from the guide front end 4111 to the guide rear end 4112, the distance between the guide surface 411 and the push rod 2 is D1, D2, …, Dn respectively, and the relationship D1 < D2 < … < Dn is satisfied, when the drive assembly 3 drives the push rod 2 to move forward, the guide 42 moves from the guide rear end 4112 to the guide front end 4111, and the guide 42 gradually moves downward under the action of the guide surface 411, thereby realizing the clockwise swing of the push rod 2 while moving forward, and when the drive assembly 3 drives the push rod 2 to move backward, the guide 42 moves from the guide front end 4111 to the guide rear end 4112, and the guide 42 gradually moves upward under the action of the guide surface 411, thereby realizing the counterclockwise swing of the push rod 2 while moving backward.

[0066] In the above embodiment, the guide frame 41 is arranged between the support 1 and the pushing end 21, and the guide surface 411 is located above the pushing rod 2. The guide frame 41 is convenient to install and maintain, and is not easy to interfere with the driving assembly 3.

[0067] In some other embodiments of the present application, the guide frame 41 can also be arranged between the support 1 and the diaphragm connecting end 22, and the guide surface 411 is located below the pushing rod 2. In the axial direction of the support hole 11, the guide surface 411 has a guide front end 4111 close to the diaphragm connecting end 22 and a guide rear end 4112 away from the diaphragm connecting end 22. In the direction from the guide front end 4111 to the guide rear end 4112, the distance between the guide surface 411 and the pushing rod 2 gradually increases, so as to realize the clockwise swing of the pushing rod 2 when moving forward and the counterclockwise swing of the pushing rod 2 when moving backward.

[0068] In some embodiments of the present application, as shown in Figures 2-5 , the actuating assembly 4 further comprises an elastic member 43 connected with the transmission member 31 and the pushing end 21 respectively. The elastic member 43 is used to apply an elastic force to the pushing end 21, so as to keep the guide member 42 in abutting state with the guide surface 411.

[0069] The elastic member 43 can be a coil spring, a gas spring or the like. The elastic force applied to the pushing end 21 by the elastic member 43 can keep the guide member 42 in abutting state with the guide surface 411, so that the guide member 42 always cooperates with the guide surface 411, thereby avoiding the failure of the actuating assembly 4.

[0070] In some other embodiments of the present application, the gravity can also be used to keep the guide member 42 in abutting state with the guide surface 411. For example, the length of the pushing rod 2 from the support hole 11 to the diaphragm connecting end 22 is always greater than the length of the pushing rod 2 from the support hole 11 to the pushing end 21. Under the action of gravity, the pushing end 21 has a tendency to tilt upward, so as to keep the guide member 42 in abutting state with the guide surface 411.

[0071] In some embodiments of the present application, as shown in Figure 1 and Figure 2 , the diaphragm conveying device 10 further comprises a base 5. The support 1, the driving member 32 and the guide frame 41 are all mounted on the base 5, so as to facilitate the assembly and use of the diaphragm conveying device 10.

[0072] In some embodiments of the present application, as shown in Figure 6As shown, the diaphragm conveying device 10 further comprises a first rolling connecting piece 6, and the support 1 further has a first mounting groove 12 in communication with the support hole 11, the first rolling connecting piece 6 comprises a first connecting part 61 and a first rolling part 62, the first connecting part 61 is at least partially arranged in the first mounting groove 12, the first rolling part 62 is at least partially arranged in the support hole 11, the push rod 2 passes through the support hole 11, the first rolling part 62 is abutted between the first connecting part 61 and the push rod 2, and the length of the first connecting part 61 is telescopic, when the push rod 2 moves along the axial direction of the support hole 11, the first rolling part 62 can reduce the abrasion between the push rod 2 and the support hole 11 by rolling relative to the push rod 2, at the same time, when the push rod 2 swings, the first rolling part 62 can move between the push rod 2 and the first connecting part 61, the length of the first connecting part 61 can be telescopic with the movement of the first rolling part 62, so that the first rolling part 62 can keep supporting the push rod 2, reduce the resistance of the push rod 2 through the support hole 11 when the push rod 2 swings, and avoid the damage of the push rod 2 and the support 1 caused by the strong pushing of the driving assembly 3.

[0073] Referring to Figure 6 As shown, the support 1 further has a plurality of second mounting grooves 13 in communication with the support hole 11, and the diaphragm conveying device 10 further comprises a plurality of second rolling connecting pieces 7, the plurality of second rolling connecting pieces 7 correspond to the plurality of second mounting grooves 13 one by one, the second rolling connecting piece 7 comprises a second connecting part 71 and a second rolling part 72, the second connecting part 71 is at least partially arranged in the corresponding second mounting groove 13, the second rolling part 72 is at least partially arranged in the support hole 11, and the second rolling part 72 is abutted between the second connecting part 71 and the push rod 2, the second rolling part 72 can reduce the abrasion between the push rod 2 and the support hole 11 by rolling relative to the push rod 2, reduce the resistance of the push rod 2 through the support hole 11, and reduce the energy consumption of the driving assembly 3.

[0074] Referring to 6, the number of the second mounting grooves 13 is two, the angle between the extension direction of the first mounting groove 12 and the extension direction of any one of the second mounting grooves 13 is equal, that is to say, the first mounting groove 12 and the two second mounting grooves 13 can be arranged radially, the angle between the extension direction of the first mounting groove 12 and the extension direction of any one of the second mounting grooves 13 is 120°, and the angle between the extension directions of the two second mounting grooves 13 is 120°, thereby the first rolling connecting piece 6 and the two second rolling connecting pieces 7 can support and limit the push rod 2 at three different positions in the radial direction of the push rod 2, so as to improve the stability of the push rod 2.

[0075] Referring to Figure 6, in the vertical direction, the first mounting groove 12 is located above the support hole 11, and the second mounting groove 13 is located below the first mounting groove 12. The second rolling connector 7 can form a support base point 111 for the swing of the push rod 2 below the push rod 2. The first rolling connector 6 extends and retracts above the push rod 2 to avoid interference with the swing of the push rod 2.

[0076] Reference Figures 1-4 As shown, a scanning electron microscope 100 according to another embodiment of the present invention includes: an electron gun chamber 20, a sample chamber 30, an aperture transport device 10, an aperture 40, and a vacuum pump. The electron gun chamber 20 has an objective lens port 201. The sample chamber 30 is connected to the electron gun chamber 20 through the objective lens port 201. The aperture transport device 10 is the aperture transport device 10 of the above embodiment. The aperture connection end 22 is located inside the sample chamber 30. The aperture 40 is connected to the aperture connection end 22. The aperture transport device 10 is used to drive the aperture 40 to move to a first preset position and a second preset position. When the aperture 40 moves to the first preset position, the aperture 40 is sealed to the objective lens port 201. When the aperture 40 moves to the second preset position, the aperture 40 is separated from the objective lens port 201. The vacuum pump is used to evacuate the electron gun chamber 20 and the sample chamber 30.

[0077] Among them, such as Figure 4 As shown, when the aperture 40 moves to the first preset position, the aperture 40 is sealed to the objective lens aperture 201. The aperture 40 can reduce the flow area between the electron gun chamber 20 and the sample chamber 30 at the objective lens aperture 201. When the vacuum pump evacuates the electron gun chamber 20 and the sample chamber 30 with different power, a pressure difference can be formed between the electron gun chamber 20 and the sample chamber 30. That is, there is a pressure difference on both sides of the aperture 40, and the electron gun chamber 20 and the sample chamber 30 have different vacuum levels. For example, the vacuum pump can evacuate the electron gun chamber 20 with greater power than it can evacuate the sample chamber 30, thereby putting the electron gun chamber 20 in a high vacuum state (e.g., pressure less than 10). -3 To reduce electron beam attenuation, sample chamber 30 is kept in a low vacuum state (e.g., pressure at 10 Pa). -3 Pa~10 - 1 The aperture 40 reduces the leakage rate of the electron gun chamber 20 at the objective lens aperture 201, thereby reducing the need for vacuum pumps to evacuate the electron gun chamber 20 and lowering product manufacturing costs.

[0078] In addition, the power of the vacuum pump to evacuate the electron gun chamber 20 can be equal to the power to evacuate the sample chamber 30, so that the vacuum degree of the electron gun chamber 20 and the sample chamber 30 is high, so as to facilitate scanning of conventional samples in a high vacuum environment and ensure scanning accuracy.

[0079] Therefore, the scanning electron microscope 100 can realize compatibility and rapid switching of the standard vacuum working mode and the low vacuum working mode, has great economic value, and can improve the product competitiveness of the scanning electron microscope 100.

[0080] It can be understood that when the sample can withstand a high vacuum environment, the scanning electron microscope 100 can be switched to the standard vacuum working mode, and the vacuum pump can draw the electron gun chamber 20 and the sample chamber 30 to a high vacuum state to ensure scanning accuracy. For samples that cannot withstand a high vacuum environment, the scanning electron microscope 100 can be switched to the low vacuum working mode, at which time the vacuum pump draws the electron gun chamber 20 to a high vacuum state and draws the sample chamber 30 to a low vacuum state, thereby avoiding damage to the sample.

[0081] Referring to Figure 3 When the diaphragm 40 moves to the second preset position, the diaphragm 40 is separated from the objective lens port 201 to facilitate maintenance and maintenance of the diaphragm 40. When the diaphragm conveying device 10 drives the diaphragm 40 to move from the second preset position to the first preset position, the diaphragm 40 can move upward and forward with the diaphragm connecting end 22, thereby reducing the wear of the diaphragm 40 and the objective lens port 201 when they are in contact.

[0082] The scanning electron microscope 100 according to the embodiment of the present application, the diaphragm conveying device 10 is used to drive the diaphragm 40 to move to the first preset position and the second preset position. When the diaphragm 40 moves to the first preset position, the diaphragm 40 is in sealing cooperation with the objective lens port 201. The scanning electron microscope 100 can realize compatibility and rapid switching of the standard vacuum working mode and the low vacuum working mode by vacuumizing the electron gun chamber 20 and the sample chamber 30 through the vacuum pump, thereby facilitating improvement of the product competitiveness of the scanning electron microscope 100.

[0083] In some embodiments of the present application, referring to Figure 3 and Figure 4 The diaphragm conveying device 10 further comprises a sealing bellows 8, the sealing bellows 8 and the driving assembly 3 are both arranged outside the sample chamber 30, the sealing bellows 8 is sleeved on the push rod 2, one end of the sealing bellows 8 is in communication with the sample chamber 30, and the other end of the sealing bellows 8 is fixedly connected with the push rod 2 in sealing cooperation.

[0084] The one end of the sealing bellows 8 is in communication with the sample chamber 30, the other end of the sealing bellows 8 is fixedly connected with the push rod 2 in sealing cooperation, the inside of the sealing bellows 8 is a low-pressure vacuum environment, and the external atmospheric pressure exerts a force on the sealing bellows 8, which is directed to the sample chamber 30, so that the sealing bellows 8 generates a pulling force on the push rod 2 in the direction of the sample chamber 30.

[0085] When the driving assembly 3 is a ball screw pair, the sealing bellow 8 can eliminate the backlash difference between the screw 322 of the driving member 32 and the nut (the transmission member 31) to the pulling force of the pushing rod 2, and the high-resolution stepper motor and the linear guide rail can improve the motion accuracy of the driving assembly 3 and the diaphragm 40.

[0086] In addition, when the driving assembly 3 is other motion pairs, the sealing bellow 8 can eliminate the virtual position of the driving assembly 3 to the pulling force of the pushing rod 2, so as to improve the motion accuracy of the driving assembly 3 and the diaphragm 40.

[0087] In some embodiments of the present application, referring to Figure 1 and Figure 2 As shown, the diaphragm conveying device 10 further comprises a sealing flange 9, the sealing flange 9 and the support 1 are arranged outside the sample chamber 30, the support 1 is sealingly connected with the outer wall of the sample chamber 30 through the sealing flange 9, the diaphragm connecting end 22 enters the sample chamber 30 in sequence through the support hole 11, the sealing flange 9 and the outer wall of the sample chamber 30, one end of the sealing bellow 8 is sealingly connected with the side of the support 1 away from the sealing flange 9, and the other end of the sealing bellow 8 is fixedly and sealingly connected with the pushing end 21, the sealing bellow 8 is connected with the sample chamber 30 through the support hole 11 and the sealing flange 9, so as to reduce the risk of air leakage between the sealing bellow 8 and the sample chamber 30.

[0088] In some embodiments of the present application, referring to Figures 7-9 As shown, the diaphragm 40 comprises a rotating shaft seat 401 and a diaphragm body 402, the rotating shaft seat 401 is rotationally connected with the diaphragm connecting end 22 around a first axis, and the diaphragm body 402 is rotationally connected with the rotating shaft seat 401 around a second axis, and the second axis is perpendicular to the first axis.

[0089] The diaphragm body 402 can control the intensity and diameter of the electron beam, the diaphragm body 402 is suitable for sealingly connecting with the objective aperture 201, the rotating shaft seat 401 can form a two-axis self-compensation structure, when the diaphragm body 402 is inclined relative to the objective aperture 201, under the pushing of the diaphragm connecting end 22, the diaphragm body 402 can automatically rotate to sealingly connect with the objective aperture 201 after contacting the objective aperture 201, so as to improve the connection effect of the diaphragm body 402 and the end surface of the objective aperture 201, and reduce the air leakage amount at the objective aperture 201.

[0090] In some embodiments of the present application, referring to Figure 7 and Figure 8As shown, the diaphragm 40 further comprises an adapter block 403, the rotating shaft seat 401 is connected with the diaphragm connecting end 22 through the adapter block 403, and the diaphragm connecting end 22 can be a standard external thread structure, so as to improve the universality of the diaphragm connecting end 22. When the diaphragm 40 is used, one end of the adapter block 403 is connected with the diaphragm connecting end 22, and the other end of the adapter block 403 is connected with the rotating shaft seat 401. In addition, the diaphragm 40 can be detached from the diaphragm connecting end 22, and then the backscattering detection chip, the electron gun pole shoe and other accessories are installed on the diaphragm connecting end 22, so as to facilitate widening the use range of the diaphragm conveying device 10.

[0091] Referring to Figure 8 As shown, the rotating shaft seat 401 comprises a first supporting arm 4011, a second supporting arm 4012, a connecting arm 4013 and a first rotating shaft 4014, the first supporting arm 4011 and the second supporting arm 4012 are oppositely arranged in the second axis direction, the connecting arm 4013 is connected between the first supporting arm 4011 and the second supporting arm 4012, the first rotating shaft 4014 is connected with the connecting arm 4013, the axis of the first rotating shaft 4014 is the first axis, the first rotating shaft 4014 is rotatably connected with the adapter block 403 through a fastening screw 405, and in the extension direction of the first axis, the fastening screw 405 and the adapter block 403 and the connecting arm 4013 and the adapter block 403 are all provided with lubricating gaskets 406, so as to reduce the abrasion of the rotating shaft seat 401 and the adapter block 403. The diaphragm body 402 is arranged between the first supporting arm 4011 and the second supporting arm 4012, and in the second axis direction, the first supporting arm 4011 and the second supporting arm 4012 are rotatably connected with the two sides of the diaphragm body 402 through corresponding second rotating shafts 407.

[0092] In some embodiments of the present application, referring to Figure 7 and Figure 8 As shown, the diaphragm 40 further comprises a sealing ring 408, and the sealing sleeve is arranged on the diaphragm body 402. When the diaphragm 40 moves to the first preset position, the sealing ring 408 is sealingly matched with the objective lens port 201.

[0093] The sealing ring 408 can be a rubber sealing ring, which can improve the sealing performance of the diaphragm 40 and the objective lens port 201, so as to further reduce the air leakage at the objective lens port 201, reduce the demand of the vacuum pump on the pumping speed of the electron gun chamber 20, and further reduce the production cost.

[0094] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0095] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. An aperture conveying device, characterized in that, include: Support member (1), the support member (1) having a support hole (11); Push rod (2), the push rod (2) passes through the support hole (11), the push rod (2) has a push end (21) and an aperture connection end (22), the push end (21) and the aperture connection end (22) are located on both sides of the axial direction of the support hole (11), and the aperture connection end (22) is adapted to be connected to the aperture (40); A drive assembly (3) is used to drive the push rod (2) to move along the axial direction of the support hole (11); The actuation component (4) is used to drive the push rod (2) to swing when the push rod (2) moves along the axial direction of the support hole (11) so that the movement directions of the push end (21) and the aperture connection end (22) are opposite in the radial direction of the support hole (11). The actuation component (4) includes: The guide frame (41) has a guide surface (411) which is inclined relative to the axis of the support hole (11); A guide member (42) is connected to the push rod (2) and is adapted to guide and cooperate with the guide surface (411); The guide (42) includes: Mounting plate (421), which is fixedly connected to the push rod (2); A roller (422) is rotatably connected to the mounting plate (421) and is adapted to roll along the guide surface (411).

2. The aperture conveying device according to claim 1, characterized in that, The driving component (3) includes: Transmission component (31), which is movably connected to the pushing end (21); A driving member (32) is used to drive the transmission member (31) to move along the axial direction of the support hole (11).

3. The aperture conveying device according to claim 2, characterized in that, The guide frame (41) is disposed between the support member (1) and the push end (21). The guide surface (411) is located above the push rod (2). In the axial direction of the support hole (11), the guide surface (411) has a guide front end (4111) close to the aperture connection end (22) and a guide rear end (4112) away from the aperture connection end (22). In the direction from the guide front end (4111) to the guide rear end (4112), the distance between the guide surface (411) and the push rod (2) gradually increases.

4. The aperture conveying device according to any one of claims 2-3, characterized in that, The actuation component (4) further includes an elastic element (43), which is connected to the transmission element (31) and the push end (21) respectively. The elastic element (43) is used to apply an elastic force to the push end (21) so that the guide element (42) and the guide surface (411) remain in contact.

5. A scanning electron microscope, characterized in that, include: An electron gun chamber (20) having an objective lens port (201); The sample chamber (30) is connected to the electron gun chamber (20) through the objective lens port (201); An aperture transport device, wherein the aperture transport device is an aperture transport device according to any one of claims 1-4, and the aperture connection end (22) is located inside the sample chamber (30); An aperture stop (40) is connected to an aperture stop connection end (22). The aperture stop delivery device is used to drive the aperture stop (40) to a first preset position and a second preset position. When the aperture stop (40) moves to the first preset position, the aperture stop (40) is sealed to the objective lens aperture (201). When the aperture stop (40) moves to the second preset position, the aperture stop (40) is separated from the objective lens aperture (201). A vacuum pump is used to evacuate the electron gun chamber (20) and the sample chamber (30).

6. The scanning electron microscope according to claim 5, characterized in that, The aperture conveying device further includes a sealed bellows (8), the sealed bellows (8) and the driving assembly (3) are both located on the outside of the sample chamber (30), the sealed bellows (8) is sleeved on the push rod (2), one end of the sealed bellows (8) is connected to the sample chamber (30), and the other end of the sealed bellows (8) is fixed and sealed to the push rod (2).

7. The scanning electron microscope according to claim 5, characterized in that, The aperture (40) includes: A rotating shaft seat (401) is rotatably connected to the aperture connection end (22) around a first axis; An aperture body (402) is rotatably connected to the pivot seat (401) about a second axis, and the second axis is perpendicular to the first axis.

8. The scanning electron microscope according to claim 7, characterized in that, The aperture (40) further includes a sealing ring (408), which is sealed and fitted onto the aperture body (402). When the aperture (40) moves to the first preset position, the sealing ring (408) seals and engages with the objective lens aperture (201).

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