Flatness appearance visual detection all-in-one machine

Abstract

The application discloses a flatness appearance visual detection all-in-one machine, which comprises an X-axis running tray conveying line, a code scanning mechanism, a golden finger detection mechanism, a chip top detection mechanism, a long side opposite two side and bottom detection mechanism, a detection transfer table, a short side opposite two side detection mechanism and a waste material removing mechanism which form a "mouth" type with the tray conveying line; and further comprises a first Y-axis vacuum manipulator, a second Y-axis vacuum manipulator, a first X-axis vacuum manipulator, a second X-axis vacuum manipulator and a third Y-axis vacuum manipulator. The application integrates chip code scanning detection, golden finger detection and six surface visual detection, and improves the detection efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of visual detection, in particular to a flatness appearance visual detection all-in-one machine. BACKGROUND

[0002] After the IC chip is made, the flatness of the six faces of the chip and the flatness of the gold finger need to be detected. The flatness can detect whether there are pits, scratches, dirt and other defects. At present, the flatness detection is carried out by using a visual camera detection device. For example, the invention patent with publication number CN115178476A and publication date October 14, 2022 discloses a chip high-speed high-precision six-face appearance detection equipment. The disclosed detection mechanism includes a first detection industrial camera, a second detection industrial camera and a third detection industrial camera, which realizes detection of the six faces of the chip. However, the appearance detection equipment does not integrate the detection of the gold finger of the chip. At present, the detection of the gold finger needs to be carried out on an additional device, which reduces the detection efficiency. SUMMARY

[0003] In order to overcome the above-mentioned shortcomings, the purpose of the present application is to provide a flatness appearance visual detection all-in-one machine which integrates the visual detection of the gold finger and the six faces of the chip, improves the detection efficiency, has a compact structure and a reasonable distribution.

[0004] In order to achieve the above purpose, the technical scheme adopted by the present application is as follows: a flatness appearance visual detection all-in-one machine, comprising an X-axis running tray conveying line, a code scanning mechanism, a gold finger detection mechanism, a chip top detection mechanism, a long side opposite two side and bottom detection mechanism, a detection transfer table, a short side opposite two side detection mechanism and a waste removing mechanism are sequentially arranged on the same side of the tray conveying line to form a "mouth" type; the gold finger detection mechanism comprises a glass detection platform, a line scan camera aligned with the glass detection platform and a line scan X-axis linear module driving the movement of the line scan camera; a first Y-axis vacuum manipulator is arranged above the inlet end of the tray conveying line, the code scanning mechanism and the glass detection platform to connect the three; the glass detection platform and the chip top detection mechanism are connected by a second Y-axis vacuum manipulator; the chip top detection mechanism, the long side opposite two side and bottom detection mechanism and the detection transfer table are connected by a first X-axis vacuum manipulator; the detection transfer table and the short side opposite two side detection mechanism are connected by a second X-axis vacuum manipulator; a third Y-axis vacuum manipulator is arranged above the short side opposite two side detection mechanism, the waste removing mechanism and the outlet end of the tray conveying line to connect the three.

[0005] Preferably, the tray conveying line comprises a plurality of belt groups composed of a plurality of pairs of conveying belts, and an upper feeding bin and a lower collecting bin are arranged at the upper end and the lower end of each belt group respectively, each of the upper feeding bin and the lower collecting bin comprises a bin body for storing trays, the bin body is penetrated from top to bottom and from side to side, two support members are arranged at the two opposite sides of the bin body, two bin body two-axis driving modules are arranged to drive the two support members to move up and down and to move horizontally respectively, so as to force the two support members to move towards each other or to move away from each other, when the two support members move towards each other, the two support members support the trays in the bin body, and when the two support members move away from each other, the two support members release the trays in the bin body, and a lifting platform is arranged between the two conveying belts below the bin body, the lifting platform is driven to move up and down by a bin body lifting cylinder, the lifting platform can extend into the bin body when the lifting platform moves up, and the lifting platform is lower than the belt group when the lifting platform moves down.

[0006] Preferably, the first Y-axis vacuum manipulator, the first X-axis vacuum manipulator, the second X-axis vacuum manipulator and the third Y-axis vacuum manipulator each comprise a first manipulator two-axis driving module, a servo motor and a first vacuum suction head, the servo motor is driven by the first manipulator two-axis driving module to move back and forth in two-axis directions, and the first vacuum suction head is driven to rotate by the servo motor, the second Y-axis vacuum manipulator comprises a second manipulator two-axis driving module and a second vacuum suction head, the second vacuum suction head is driven by the second manipulator two-axis driving module to move back and forth in Y-axis and Z-axis directions, and the detection transfer platform is adjusted in the Z-axis direction by a matched dovetail groove slider and a bolt.

[0007] Preferably, a position detection camera is arranged above the feeding end of the tray conveying line, and an identification hole is arranged on the chip, the position detection camera detects the position of the identification hole to identify whether the polarity direction of the chip is reversed.

[0008] Preferably, the code scanning mechanism comprises a code scanning gun, the code scanning gun is fixed on one side of the first vacuum suction head of the first Y-axis vacuum manipulator, the scanning port of the code scanning gun is aligned with the two-dimensional code of the chip on the glass detection platform, and the two-dimensional code of the chip on the glass detection platform is scanned, one side of the glass detection platform is provided with a code scanning NG platform, a plurality of code scanning NG grooves are arranged on the code scanning NG platform, and the code scanning NG platform is driven by a code scanning X-axis linear module to move between the code scanning gun and the glass detection platform.

[0009] Preferably, the top chip detection mechanism comprises: a top visual detection camera, which is adjustable in the X-axis and Z-axis directions through a plurality of sets of matched dovetail slot sliders and bolts; a sliding transfer station, which is located below the top visual detection camera; a second Y-axis vacuum manipulator, which connects the glass detection platform and the sliding transfer station; and a detection Y-axis linear module, which drives the sliding transfer station to move back and forth along the Y-axis between the glass detection platform and the long-side opposite two-side and bottom detection mechanism.

[0010] Preferably, the long-side opposite two-side and bottom detection mechanism comprises: two long-side visual detection cameras, which are oppositely arranged and distributed along the Y-axis direction, and are adjustable in the Y-axis direction through a plurality of sets of matched dovetail slot sliders and bolts; and a bottom visual detection camera, which is located below the middle of the two long-side visual detection cameras and is adjustable in the X-axis and Z-axis directions through a plurality of sets of matched dovetail slot sliders and bolts; when the first X-axis vacuum manipulator moves the chip to between the two long-side visual detection cameras and above the bottom visual detection camera, the two long-side visual detection cameras and the bottom visual detection camera sequentially perform visual detection on the two side surfaces and the bottom surface of the chip.

[0011] Preferably, the short-side opposite two-side detection mechanism comprises two short-side visual detection cameras, which are oppositely arranged and distributed along the Y-axis direction, and sequentially perform visual detection on the two side surfaces of the chip when the second X-axis vacuum manipulator moves the chip to between the two short-side visual detection cameras; and the two short-side visual detection cameras are adjustable in the Y-axis direction through a plurality of sets of matched dovetail slot sliders and bolts.

[0012] Preferably, a discharging transfer station is arranged between the waste removal mechanism and the short-side opposite two-side detection mechanism, and the discharging transfer station is driven to move back and forth along the Y-axis by a discharging Y-axis linear module; the second X-axis vacuum manipulator moves the chip to the discharging transfer station, and the third Y-axis vacuum manipulator moves the chip on the discharging transfer station to the waste removal mechanism.

[0013] Preferably, the waste removal mechanism comprises a waste platform and a waste X-axis linear module, and the waste platform is driven to be directly below the third Y-axis vacuum manipulator by the waste X-axis linear module; the waste platform is provided with a gold finger NG slot, a chip top NG slot, a long-side NG slot, a bottom NG slot and a short-side NG slot, which are used to receive the defective chips moved by the third Y-axis vacuum manipulator.

[0014] The planarity appearance visual detection all-in-one machine has the following beneficial effects:

[0015] Firstly, the application integrates the functions of chip code scanning detection, gold finger detection, chip top detection, long side relative two side and bottom detection, short side relative two side detection and waste removal, without the need for detection in other equipment, thereby improving the detection efficiency.

[0016] Secondly, the tray conveying line, code scanning mechanism, gold finger detection mechanism, chip top detection mechanism, long side relative two side and bottom detection mechanism, detection transfer table, short side relative two side detection mechanism, waste removal mechanism and the tray conveying line form a "mouth" shape, the chips are fed from the feeding end of the tray conveying line, the empty trays circulate on the tray conveying line, the chips are sequentially detected during the circulation, and then the chips are collected from the collection end after the detection, so that the structure is compact and the layout is reasonable.

[0017] Thirdly, the scanning NG platform and the waste removal mechanism are integrated, thereby improving the collection efficiency of defective chips; for the scanning NG platform, the first mechanical two-axis driving module of the first Y-axis vacuum manipulator and the scanning X-axis linear module are cooperated to realize the movement in the X-axis, Y-axis and Z-axis directions, so that the scanning NG chips can be directly and neatly placed into the scanning NG groove without the need for later tray loading; for the waste removal mechanism, the first mechanical two-axis driving module of the third Y-axis vacuum manipulator and the waste X-axis linear module are cooperated to realize the movement in the X-axis, Y-axis and Z-axis directions, so that the chips with gold finger defects and six surface defects can be neatly placed into the NG groove on the corresponding waste platform without the need for later tray loading, thereby improving the collection efficiency of defective chips.

[0018] Fourthly, since the device as a whole has a "mouth" shape, the middle space is relatively large, and the two long side visual detection cameras and the two short side visual detection cameras are arranged in the Y-axis direction, so that the layout is more reasonable. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a top view of the embodiment;

[0020] Figure 2 is a perspective view of the embodiment;

[0021] Figure 3 is a perspective view of the tray conveying line of the embodiment;

[0022] Figure 4 is Figure 3 is a local enlarged view of A in FIG. 8;

[0023] Figure 5 is a perspective view of the feeding bin or the collection bin cooperating with the conveying belt of the embodiment;

[0024] Figure 6It is a perspective view of the tray conveying line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator of the embodiment;

[0025] Figure 7 It is a perspective view of the tray conveying line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator of the embodiment; Figure 6 It is a perspective view of the tray conveying line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator of the embodiment;

[0026] Figure 8 It is a perspective view of the tray conveying line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator of the embodiment;

[0027] Figure 9 It is a perspective view of the tray conveying line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator of the embodiment;

[0028] Figure 10 It is a perspective view of the tray conveying line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator of the embodiment;

[0029] Figure 11 It is a perspective view of the tray conveying line, the code scanning mechanism, the gold finger detection mechanism, and the first Y-axis vacuum manipulator of the embodiment.

[0030] In the figure: 100, tray conveying line; 110, conveying belt; 120a, feeding bin; 120b, collecting bin; 121, bin body; 122, support; 123, bin body two-axis driving module; 124, lifting platform; 125, bin lifting cylinder; 126, tray;

[0031] 200, code scanning mechanism; 210, code scanning gun; 220, code scanning NG platform; 221, code scanning NG slot; 230, code scanning X-axis linear module;

[0032] 300, gold finger detection mechanism; 310, glass detection platform; 320, line scanning camera; 330, line scanning X-axis linear module;

[0033] 400, chip top detection mechanism; 410, top vision detection camera; 420, sliding transfer table; 430, detection Y-axis linear module;

[0034] 500, long side relative two sides and bottom detection mechanism; 510, long side vision detection camera; 520, bottom vision detection camera;

[0035] 600, detection transfer table;

[0036] 700, short side relative two sides detection mechanism; 710, short side vision detection camera; 720, discharge transfer table; 730, discharge Y-axis linear module;

[0037] 800, waste removal mechanism; 810, waste platform; 820, waste X-axis linear module;

[0038] 900a, first Y-axis vacuum manipulator; 900b, second Y-axis vacuum manipulator; 900c, first X-axis vacuum manipulator; 900d, second X-axis vacuum manipulator; 900e, third Y-axis vacuum manipulator; 910, two-axis driving module of first manipulator; 920, servo motor; 930, first vacuum suction head; 940, two-axis driving module of second manipulator; 950, second vacuum suction head. DETAILED DESCRIPTION

[0039] The advantages and features of the present application will be more apparent from the following detailed description of preferred embodiments of the present application, taken in conjunction with the accompanying drawings, so as to make the scope of protection of the present application more clearly defined.

[0040] Referring to Figure 1 , Figure 2 , the embodiment discloses a flatness appearance visual detection all-in-one machine, which comprises an X-axis running tray conveying line 100, and a code scanning mechanism 200, a gold finger detection mechanism 300, a chip top detection mechanism 400, a long side relative two side and bottom detection mechanism 500, a detection transfer table 600, a short side relative two side detection mechanism 700 and a waste removing mechanism 800 which are sequentially arranged on the same side of the tray conveying line 100, wherein the tray conveying line 100, the code scanning mechanism 200, the gold finger detection mechanism 300, the chip top detection mechanism 400, the long side relative two side and bottom detection mechanism 500, the detection transfer table 600, the short side relative two side detection mechanism 700 and the waste removing mechanism 800 and the tray conveying line 100 form a "mouth" type.

[0041] As shown in Figure 6 , the gold finger detection mechanism 300 comprises a glass detection platform 310, a line-scan camera 320 aligned with the glass detection platform 310 and a line-scan X-axis linear module 330 for driving the line-scan camera 320 to move, in the embodiment, the line-scan camera 320 is located directly below the glass detection platform 310, and the inlet end 100a of the tray conveying line 100, the code scanning mechanism 200 and the glass detection platform 310 are provided with a first Y-axis vacuum manipulator 900a connected thereto.

[0042] As shown in Figure 1 , Figure 2 , the glass detection platform 310 and the chip top detection mechanism 400 are connected through a second Y-axis vacuum manipulator 900b.

[0043] As shown in Figure 1 , Figure 2 , Figure 10As shown, the chip top detection mechanism 400, the long side relative two side and bottom detection mechanism 500 and the detection transfer station 600 are connected through the first X-axis vacuum manipulator 900c, the detection transfer station 600 and the short side relative two side detection mechanism 700 are connected through the second X-axis vacuum manipulator 900d; the short side relative two side detection mechanism 700, the waste removal mechanism 800 and the top of the discharge end 100b of the tray conveying line 100 are provided with a third Y-axis vacuum manipulator 900e for connecting the three.

[0044] As shown in Figure 1 , Figure 3 , Figure 4 , Figure 5 As shown, the tray conveying line 100 includes a belt group composed of multiple pairs of conveying belts 110, each pair of conveying belts 110 includes two conveying belts 110, and the feeding end and the receiving end of the belt group are respectively provided with a feeding bin 120a and a receiving bin 120b, the feeding bin 120a and the receiving bin 120b each include:

[0045] a bin body 121 for storing trays 126, the trays 126 are distributed with multiple chip slots, and each chip slot is placed with a chip, and the bin body 121 is penetrated from top to bottom and opposite sides;

[0046] two supporting members 122, which are arranged on the opposite sides of the bin body 121 penetrated, as shown in Figure 3 , Figure 4 , Figure 5 As shown, the two supporting members 122 in the embodiment are located on the two sides of the X-axis direction;

[0047] two bin body two-axis driving modules 123 for driving the two supporting members 122 to lift and translate, i.e. to move back and forth along the Z-axis and the X-axis, forcing the two supporting members 122 to move towards or reversely, when the two supporting members 122 move towards, the two supporting members 122 support the trays 126 in the bin body 121, when the two supporting members 122 move reversely, the two supporting members 122 release the trays 126 in the bin body 121;

[0048] a lifting platform 124, as shown in Figure 5 The lifting platform 124 is located between the two conveying belts 110 below the bin body 121, and the lifting platform 124 is lifted and lowered by the driving of the bin lifting cylinder 125, when the lifting platform 124 is lifted, it can extend into the bin body 121; when the lifting platform 124 is lowered, the lifting platform 124 is lower than the belt group.

[0049] When the feeding bin 120a feeds the tray on the belt group of the tray conveying line 100, the trays 126 are stacked in the bin body 121, and a plurality of chip products are placed on the trays 126. The two-axis driving modules 123 of the two bin bodies drive the two supporting members 122 to move towards each other, supporting the lowermost tray 126 in the bin body 121. At this time, the lowermost tray 126 is higher than the belt group. Then, the lifting platform 124 driven by the bin body lifting cylinder 125 is lifted until it abuts against the lowermost tray 126 in the bin body 121, and then stops lifting. The two-axis driving modules 123 of the two bin bodies drive the two supporting members 122 to move in the opposite direction, releasing the lowermost tray 126 in the bin body 121. The lifting platform 124 driven by the bin body lifting cylinder 125 is lowered by the thickness of a tray 126. Consequently, the trays 126 in the bin body 121 are lowered by the thickness of a tray 126. The two-axis driving modules 123 of the two bin bodies drive the two supporting members 122 to move towards each other again, supporting the lowermost tray 126 in the bin body 121. At the same time, the lifting platform 124 driven by the bin body lifting cylinder 125 is lowered below the belt group, and the tray 126 is caught by the belt group. The belt group drives the tray 126 to move in the X-axis direction.

[0050] When the receiving bin 120b receives the detected tray 126 on the belt group, the two-axis driving modules 123 of the two bin bodies drive the two supporting members 122 to move towards each other, supporting the lowermost tray 126 in the bin body 121. The lifting platform 124 driven by the bin body lifting cylinder 125 is lowered, and the lifting platform 124 is in a state below the belt group. When the detected tray 126 is driven by the belt group to be directly above the lifting platform 124, the lifting platform 124 driven by the bin body lifting cylinder 125 is lifted. At the same time, the two-axis driving modules 123 of the two bin bodies drive the two supporting members 122 to move upwards by the thickness of a tray 126. Then, the lifting platform 124 drives the tray 126 on the belt group to abut against the lowermost tray 126 in the bin body 121. Then, the two supporting members 122 release the upper tray 126 and are lowered to the sides of the tray 126 moved into the bin body 121. Then, the two supporting members 122 move towards each other, clamping the tray 126 moved into the bin body 121, and completing the receiving of the tray 126.

[0051] As shown in Figure 6 , Figure 10 , Figure 11 The first Y-axis vacuum manipulator 900a, the first X-axis vacuum manipulator 900c, the second X-axis vacuum manipulator 900d, and the third Y-axis vacuum manipulator 900e each include a first manipulator two-axis driving module 910, a servo motor 920, and a first vacuum suction head 930. The servo motor 920 can move back and forth in two-axis directions through the driving of the first manipulator two-axis driving module 910, and the first vacuum suction head 930 is driven to rotate by the servo motor 920.

[0052] As shown in Figure 9As shown, the second Y-axis vacuum manipulator 900b includes a second manipulator two-axis driving module 940 and a second vacuum suction head 950. The second vacuum suction head 950 can move back and forth in the Y-axis and Z-axis directions through the driving of the second manipulator two-axis driving module 940.

[0053] The tray conveying line 100 in the embodiment is provided with a position detection camera above the material inlet end 100a. The chip is provided with an identification hole. The position detection camera detects the position of the identification hole to identify whether the polarity direction of the chip is reversed. If the polarity direction of the chip is reversed, the chip is adsorbed by the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a. In the process of rising, the servo motor 920 of the first Y-axis vacuum manipulator 900a drives the first vacuum suction head 930 to rotate by 180°, and then transports the chip to the code scanning mechanism 200.

[0054] As shown in the figure, Figure 6 The code scanning mechanism 200 includes a code scanning gun 210. The code scanning gun 210 is fixed on one side of the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a. The scanning port of the code scanning gun 210 is aligned with the two-dimensional code of the chip on the glass detection platform 310 to scan the two-dimensional code of the chip on the glass detection platform 310. The code scanning gun 210 is specifically inclined to ensure that the scanning port can be aligned with the chip on the glass detection platform 310. Since the two-dimensional code on the chip is formed by attaching a label or laser, if the label is not attached or the laser is not complete, the chip is an unqualified product. In order to replace manual detection or detection by other detection equipment and improve the detection efficiency, the code scanning mechanism 200 is integrated in the embodiment. The code scanning gun 210 does not need an additional driving module and is directly fixed on one side of the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a, which simplifies the structure of the equipment. After the chip is moved to the glass detection platform 310 by the first Y-axis vacuum manipulator 900a, the chip is scanned and detected, and then the gold finger is detected.

[0055] As shown in the figure, Figure 6 The glass detection platform 310 is provided with a code scanning NG platform 220 on one side. The code scanning NG platform 220 is provided with a plurality of code scanning NG grooves 221. The code scanning NG platform 220 is located below the code scanning gun 210. The code scanning NG platform 220 can be moved to the position between the code scanning gun 210 and the glass detection platform 310 through the driving of the code scanning X-axis linear module 230, that is, the position directly below the code scanning gun 210 and the position directly above the glass detection platform 310.

[0056] In this embodiment, the first vacuum suction head 930 of the first Y-axis vacuum robot 900a can transfer defective chips to any position on the barcode scanning NG platform 220. The barcode scanning X-axis linear module 230 is used to enable the barcode scanning NG platform 220 to move at any position on the X-axis. The first robot two-axis drive module 910 of the first Y-axis vacuum robot 900a can move back and forth in the Y-axis and Z-axis directions. Therefore, through the cooperation of the barcode scanning X-axis linear module 230 and the first Y-axis vacuum robot 900a, arbitrary movement in three-axis directions is achieved. The barcode scanning NG platform 220 is provided with multiple evenly distributed barcode scanning NG slots 221, which can place each defective product in the barcode scanning NG slot 221, eliminating the need for manual subsequent tray placement of defective chips and improving the collection efficiency of defective chips.

[0057] In this embodiment, the X-axis linear scanning module 230 is lower than the glass inspection platform 310, while the NG scanning platform 220 is higher. When the barcode scanner 210 detects a defective QR code, the first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a first adsorbs the defective chip on the glass inspection platform 310. The NG scanning platform 220 is then moved by the X-axis linear scanning module 230 to a position directly above the glass inspection platform 310 and below the defective chip. The first vacuum suction head 930 of the first Y-axis vacuum manipulator 900a then transfers the defective chip to the NG scanning platform 220. This embodiment allows the NG scanning platform 220 to be moved directly above the glass inspection platform 310, fully utilizing the space above the glass inspection platform 310, resulting in a more compact structure and higher space utilization.

[0058] like Figure 8 , Figure 9 As shown, the chip top detection mechanism 400 includes:

[0059] Top visual inspection camera 410;

[0060] The sliding transfer stage 420 is located below the top visual inspection camera 410. The second Y-axis vacuum robot 900b is connected to the glass inspection platform 310 and the sliding transfer stage 420.

[0061] The Y-axis linear module 430 is used to drive the sliding turntable 420 to move back and forth along the Y-axis between the glass inspection platform 310 and the two sides opposite the long side and the bottom inspection mechanism 500.

[0062] The sliding transfer stage 420 is used to receive the chip transferred by the first vacuum suction head 930 of the first Y-axis vacuum robot 900a, and then the chip is moved by the sliding transfer stage 420 to be detected directly below the top vision inspection camera 410. After detection, the chip is transferred to the detection mechanisms 500 on the opposite sides of the long side and the bottom.

[0063] As shown in Figure 10 The long-side opposite two-side and bottom detection mechanism 500 includes:

[0064] Two long-side visual detection cameras 510, which are oppositely arranged and distributed along the Y-axis direction;

[0065] A bottom visual detection camera 520, which is located below the two long-side visual detection cameras 510.

[0066] When the first X-axis vacuum manipulator 900c drives the chip to move between the two long-side visual detection cameras 510 and above the bottom visual detection camera 520, the two long-side visual detection cameras 510 and the bottom visual detection camera 520 sequentially perform visual detection on the two side surfaces and the bottom surface of the chip.

[0067] The two long-side visual detection cameras 510 and the bottom visual detection camera 520 are used to realize the flatness detection on the two side surfaces and the bottom surface of the long side of the chip, and the detection is performed sequentially, i.e., one long-side visual detection camera 510 is detected first, then the second long-side visual detection camera 510 is detected, and finally the bottom visual detection camera 520 is detected, so that the flatness data obtained by detection is not inaccurate due to the interference of other light sources, and the accuracy of chip detection is ensured.

[0068] In addition, since the detection Y-axis linear module 430 drives the sliding transfer platform 420 to move in the Y-axis direction, and the first two-axis driving module 910 of the first X-axis vacuum manipulator 900c drives the first vacuum suction head 930 to move back and forth in the X-axis and Z-axis directions, after the cooperation, the technical effect of three-axis is realized, i.e., even if the position of the chip on the sliding transfer platform 420 is not accurate, the position of the chip in the Y-axis direction and the position of the first vacuum suction head 930 in the X-axis and Z-axis directions can be adjusted to achieve the purpose of accurate grabbing.

[0069] As shown in Figure 10 The short-side opposite two-side detection mechanism 700 includes two short-side visual detection cameras 710, which are oppositely arranged and distributed along the Y-axis direction, and when the second X-axis vacuum manipulator 900d drives the chip to move between the two short-side visual detection cameras 710, the two short-side visual detection cameras 710 sequentially perform visual detection on the two side surfaces of the chip. Similarly, the detection is performed sequentially, which can ensure that the detection is not affected by other light sources and can ensure the accuracy of detection.

[0070] The reason why the two long-side vision detection cameras 510 and the two short-side vision detection cameras 710 are both arranged in the Y-axis direction is that the overall shape of the device is a "square" shape, and the space in the middle is relatively large, so this layout is more reasonable. The first X-axis vacuum manipulator 900c transfers the detected chip to the detection transfer table 600. The first vacuum chuck 930 of the second X-axis vacuum manipulator 900d sucks the chip and rotates it 90° by the servo motor 920, so that the two sides of the short side of the chip are aligned with the two short-side vision detection cameras 710 distributed in the Y-axis. After the vision detection of the two sides of the short side of the chip is completed, it is transferred to the waste rejection mechanism 800 by the second X-axis vacuum manipulator 900d.

[0071] As Figure 11 shown, the short-side relative two-side detection mechanism 700 further includes a discharge transfer table 720. The discharge transfer table 720 is located between the waste rejection mechanism 800 and the short-side vision detection camera 710. The discharge transfer table 720 is driven by a discharge Y-axis linear module 730 to move back and forth along the Y-axis. The second X-axis vacuum manipulator 900d transfers the chip to the discharge transfer table 720, and the third Y-axis vacuum manipulator 900e transfers the chip on the discharge transfer table 720 to the waste rejection mechanism 800. By using the discharge transfer table 720 to move back and forth in the Y-axis direction, and the first vacuum chuck 930 of the second X-axis vacuum manipulator 900d to move in the X-axis and Z-axis directions, the effect of three axes is achieved. Even if the position of the discharge transfer table 720 or the position of chip grasping is inaccurate, it can be adjusted, and finally the chip is accurately placed on the discharge transfer table 720.

[0072] As Figure 11 shown, the waste rejection mechanism 800 in this embodiment includes a waste platform 810 and a waste X-axis linear module 820. The waste platform 810 is driven by the waste X-axis linear module 820 to be directly below the third Y-axis vacuum manipulator 900e; on the waste platform 810, there are gold finger NG grooves, chip top NG grooves, long-side NG grooves, bottom surface NG grooves, and short-side NG grooves (not shown in the figure), which are respectively used to receive the defective chips transferred by the third Y-axis vacuum manipulator 900e.

[0073] After the gold finger detection and six-sided detection, the defective chips are uniformly stored on the waste platform 810. There is no need to equip each detection station with a NG rejection structure, which saves space. Even if the third Y-axis vacuum manipulator 900e can only move in the Y-axis and Z-axis, due to the cooperation of the waste platform 810 that moves in the X-axis, the effect of three axes can also be achieved, and the defective chips can be placed into the corresponding NG grooves. The chips without defects are rotated 90° in the reverse direction by the third Y-axis vacuum manipulator 900e and then placed into the empty tray 126 on the belt group. After the tray 126 is filled, it is conveyed by the belt group to the receiving bin 120b for receiving materials.

[0074] In some embodiments, in order to improve the applicability of the device, the following settings can also be made:

[0075] The top visual inspection camera 410 can be adjusted in the X-axis and Z-axis directions through a plurality of sets of matched dovetail groove sliders and bolts;

[0076] Both long-side visual inspection cameras 510 can be adjusted in the Y-axis direction through matched dovetail groove sliders and bolts;

[0077] The bottom visual inspection camera 520 can be adjusted in the X-axis and Z-axis directions through a plurality of sets of matched dovetail groove sliders and bolts;

[0078] The detection transfer station 600 can be adjusted in the Z-axis direction through a matched dovetail groove slider and a bolt;

[0079] Both short-side visual inspection cameras 710 can be adjusted in the Y-axis direction through matched dovetail groove sliders and bolts.

[0080] The working principle of the embodiment is as follows:

[0081] The loading bin 120a supplies the tray 126 filled with chips to the loading end of the tray conveying line 100. When the tray 126 is moved to the position below the first Y-axis vacuum manipulator 900a, the position detection camera detects whether the polarity of the chip in the tray 126 is placed reversely. If the chip is placed reversely, the first Y-axis vacuum manipulator 900a picks up the chip, rotates it by 180°, and then moves it to the glass detection platform 310. If the chip is not placed reversely, the first Y-axis vacuum manipulator 900a directly moves the chip to the glass detection platform 310. Then, the two-dimensional code of the chip on the glass detection platform 310 is scanned by the code scanning gun 210. If the scanning has NG, the scanning NG platform 220 moves to the position above the glass detection platform 310, the first Y-axis vacuum manipulator 900a moves the chip with scanning NG to the scanning NG platform 220, and the scanning NG platform 220 is reset. If the scanning has no NG, the gold fingers at the bottom of the chip are detected by the line scanning camera 320. After the detection, the system records whether there is NG, the second Y-axis vacuum manipulator 900b moves the chip to the sliding transfer table 420, the sliding transfer table 420 moves the chip to the position directly below the top visual detection camera 410 for detection. After the detection by the top visual detection camera 410, the system records whether there is NG, and then the sliding transfer table 420 moves to the position below the first X-axis vacuum manipulator 900c. The first X-axis vacuum manipulator 900c picks up the chip and moves it to the long-side opposite side and bottom detection mechanism 500 for detection of the two long-side sides and the bottom of the chip one by one. After the detection, the system records whether there is NG, the first X-axis vacuum manipulator 900c moves the chip to the detection transfer table 600, the second X-axis vacuum manipulator 900d moves the chip on the detection transfer table 600 to the short-side opposite side detection mechanism 700, and the two short-side visual detection cameras 710 detect the two short-side sides one by one. After the detection, the system records whether there is NG, the second X-axis vacuum manipulator 900d moves the chip to the discharge transfer table 720, and the third Y-axis vacuum manipulator 900e places the NG chips recorded by the system into the gold finger NG slot, the chip top NG slot, the long-side NG slot, the bottom NG slot, and the short-side NG slot, respectively, and directly loads the tray. If there is no NG, the third Y-axis vacuum manipulator 900e directly moves to the empty tray 126 at the discharge end of the tray conveying line 100. At this time, the detection of one chip is completed. After the chips in the tray 126 at the loading end are all taken away for detection, the empty tray is conveyed to the discharge end by the belt group of the tray conveying line 100. After the empty tray 126 at the discharge end is completely filled, the full tray is discharged by the discharge bin 120b.

[0082] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application, and any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A planarity appearance visual inspection integrated machine, characterized in that: The tray conveying line (100) including the X-axis direction, the same side of the tray conveying line (100) is sequentially provided with a code scanning mechanism (200) for forming a "mouth" type with the tray conveying line (100), a gold finger detection mechanism (300), a chip top detection mechanism (400), a long side opposite two sides and bottom detection mechanism (500), a detection transfer station (600), a short side opposite two sides detection mechanism (700), a waste removal mechanism (800); The gold finger detection mechanism (300) includes a glass detection platform (310), a line scanning camera (320) aligned with the glass detection platform (310), and a line scanning X-axis linear module (330) driving the line scanning camera (320) to move; The feeding end (100a) of the tray conveying line (100), the code scanning mechanism (200), and the top of the glass detection platform (310) are provided with a first Y-axis vacuum manipulator (900a) connected thereto; The glass detection platform (310) and the chip top detection mechanism (400) are connected by a second Y-axis vacuum manipulator (900b); The chip top detection mechanism (400), the long side opposite two sides and bottom detection mechanism (500), and the detection transfer station (600) are connected by a first X-axis vacuum manipulator (900c); The detection transfer station (600) and the short side opposite two sides detection mechanism (700) are connected by a second X-axis vacuum manipulator (900d); The short side opposite two sides detection mechanism (700), the waste removal mechanism (800), and the discharging end (100b) of the tray conveying line (100) are provided with a third Y-axis vacuum manipulator (900e) connected thereto; The tray conveying line (100) includes a belt group composed of multiple pairs of conveying belts (110), and the feeding end and the receiving end of the belt group are respectively provided with a feeding bin (120a) and a receiving bin (120b). The feeding bin (120a) and the receiving bin (120b) each include: A bin body (121) for storing a tray (126), the bin body (121) is penetrated from top to bottom and opposite sides; Two support members (122) are provided on opposite sides of the bin body (121); Two bin body two-axis drive modules (123) drive two support members (122) to ascend and translate, respectively, and force the two support members (122) to move towards or in opposite directions. When the two support members (122) move towards each other, the two support members (122) support the tray (126) in the bin body (121). When the two support members (122) move in opposite directions, the two support members (122) release the tray (126) in the bin body (121). A lifting platform (124) is located between two conveying belts (110) below a warehouse body (121), and is lifted by driving of a warehouse lifting cylinder (125), when the lifting platform (124) is lifted, can extend into the warehouse body (121), when the lifting platform (124) is lowered, the lifting platform (124) is lower than the belt group.

2. The flatness appearance visual inspection all-in-one machine according to claim 1, characterized in that: The first Y-axis vacuum manipulator (900a), the first X-axis vacuum manipulator (900c), the second X-axis vacuum manipulator (900d) and the third Y-axis vacuum manipulator (900e) all include a first manipulator two-axis driving module (910), a servo motor (920) and a first vacuum suction head (930), the servo motor (920) can move back and forth in two-axis direction by driving of the first manipulator two-axis driving module (910), and the first vacuum suction head (930) is driven to rotate by the servo motor (920); The second Y-axis vacuum manipulator (900b) includes a second manipulator two-axis driving module (940) and a second vacuum suction head (950), and the second vacuum suction head (950) can move back and forth in Y-axis and Z-axis direction by driving of the second manipulator two-axis driving module (940); The detection transfer station (600) can be adjusted in Z-axis direction by matched dovetail groove sliding blocks and bolts.

3. The flatness appearance visual inspection all-in-one machine according to claim 1, wherein: A position detection camera is arranged above an inlet end (100a) of the tray conveying line (100), and an identification hole is arranged on the chip, the position detection camera detects the position of the identification hole to identify whether the polarity direction of the chip is reversed.

4. The flatness appearance visual detection all-in-one machine according to claim 2, characterized in that: The code scanning mechanism (200) includes a code scanning gun (210), the code scanning gun (210) is fixed on one side of the first vacuum suction head (930) of the first Y-axis vacuum manipulator (900a), and a scanning port of the code scanning gun (210) is aligned with the two-dimensional code of the chip on the glass detection platform (310); One side of the glass detection platform (310) is provided with a code scanning NG platform (220), a plurality of code scanning NG grooves (221) are arranged on the code scanning NG platform (220), and the code scanning NG platform (220) can be moved to between the code scanning gun (210) and the glass detection platform (310) by driving of a code scanning X-axis linear module (230).

5. The flatness appearance visual inspection all-in-one machine according to claim 1, wherein: The chip top detection mechanism (400) includes: A top visual detection camera (410) can be adjusted in X-axis and Z-axis direction by matched dovetail groove sliding blocks and bolts; A sliding transfer station (420) is located below the top visual detection camera (410), and the second Y-axis vacuum manipulator (900b) is connected with the glass detection platform (310) and the sliding transfer station (420). A detection Y-axis linear module (430) drives the sliding transfer table (420) to move back and forth along the Y-axis between the glass detection platform (310) and the long-side opposite side and bottom detection mechanism (500).

6. The flatness appearance visual inspection all-in-one machine according to claim 1, wherein: The long-side opposite side and bottom detection mechanism (500) comprises: Two long-side visual detection cameras (510) are oppositely arranged and distributed along the Y-axis direction, and each of the two long-side visual detection cameras (510) can be adjusted in the Y-axis direction through a matched dovetail groove slider and a bolt. A bottom visual detection camera (520) is located below the middle of the two long-side visual detection cameras (510), and the bottom visual detection camera (520) can be adjusted in the X-axis and Z-axis directions through a plurality of matched dovetail groove sliders and bolts. When the first X-axis vacuum manipulator (900c) moves the chip between the two long-side visual detection cameras (510) and above the bottom visual detection camera (520), the two long-side visual detection cameras (510) and the bottom visual detection camera (520) sequentially detect the two side surfaces and the bottom surface of the chip.

7. The flatness appearance visual inspection all-in-one machine according to claim 1, wherein: The short-side opposite side detection mechanism (700) comprises two short-side visual detection cameras (710) which are oppositely arranged and distributed along the Y-axis direction, and when the second X-axis vacuum manipulator (900d) moves the chip between the two short-side visual detection cameras (710), the two short-side visual detection cameras (710) sequentially detect the two side surfaces of the chip.

8. The flatness appearance visual inspection all-in-one machine according to claim 7, characterized in that: The short-side opposite side detection mechanism (700) further comprises a discharge transfer table (720) located between the waste removal mechanism (800) and the short-side visual detection camera (710), and the discharge transfer table (720) is driven by a discharge Y-axis linear module (730) to move back and forth along the Y-axis, the second X-axis vacuum manipulator (900d) moves the chip to the discharge transfer table (720), and the third Y-axis vacuum manipulator (900e) moves the chip on the discharge transfer table (720) to the waste removal mechanism (800).

9. The flatness appearance visual detection all-in-one machine of claim 1, wherein: The waste removal mechanism (800) comprises a waste platform (810) and a waste X-axis linear module (820), and the waste platform (810) is driven by the waste X-axis linear module (820) to be directly below the third Y-axis vacuum manipulator (900e). The waste platform (810) is provided with a gold finger NG slot, a chip top NG slot, a long side NG slot, a bottom NG slot, and a short side NG slot for receiving the defective chip moved by the third Y-axis vacuum manipulator (900e).

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