Arm tip attachment of robotic arm

Abstract

An apparatus includes: a robot arm; a robot system includes a robot arm having a replaceable portion, and an arm end attachment fixedly attached to the robot arm, where the arm end attachment includes: a fixed portion of the arm end attachment fixedly attached to the robot arm, the fixed portion adapted to receive the replaceable portion of the arm end attachment; a first replaceable portion of the arm end attachment adapted to remove the lid from the container, to hold the lid, and to remount the lid on the container; and a second replaceable portion of the arm end attachment adapted to mount a dispensing head on and remove the dispensing head from the container, where the dispensing head is capable of dispensing a liquid-based material from the container. Methods of using the apparatus are provided.

Description

Technical Field

[0001] The present disclosure relates to automated dispensing of liquids from containers, such as high purity, highly corrosive liquids used in semiconductor processing and chemical manufacturing. Background Art

[0002] High purity and highly corrosive liquids are commonly used in industries such as semiconductor processing and chemical manufacturing. For quality and safety reasons, these liquids must often be contained in high integrity containers and distributed using highly reliable distribution systems.

[0003] Conventionally, the container is a barrel formed of high purity polyethylene, such as the barrel described in U.S. Patent No. 6,045,000. Examples of distribution systems suitable for these barrels are described in U.S. Patents No. 4,699,298, No. 5,108,015, No. 5,957,328 and No. 5,526,956. Connections, pipes and fittings for handling these fluids are usually formed of inert materials, such as various fluoropolymers. Pipes are usually formed of perfluoroalkoxy ("PFA"), and fittings and valve assemblies can be formed of components such as PFA, polytetrafluoroethylene ("PTFE") and other various fluoropolymers.

[0004] Conventional cartridges typically include a plug opening and a cartridge insert connected to an upwardly and concentrically threaded fitting on the plug. A dispensing head may be operably coupled to the cartridge insert and may include a primary fluid passageway connected to and sealingly engaging the plug. The dispensing head may additionally include a recirculation passageway so that fluid dispensed from the cartridge may be later recirculated to the cartridge.

[0005] When using a dispensing head to draw high purity, highly corrosive and highly alkaline liquids from a cartridge, it can be important not to connect a dispensing head for a device that requires one liquid to a cartridge that contains an inappropriate or incompatible different liquid. To prevent this, coded pointer segments and grooves are provided in the dispensing head and cartridge insert to enable the cartridge insert to be assembled to the dispensing head only when the proper coding is present.

[0006] One such delivery system (Sentry QCIII Quick Connect System TM1A and 1B. The barrel 10 has two plugs 20, one of which is occupied by a threaded bolt 25. A barrel insert 30 is installed in the second plug 20. The barrel insert 30 includes a plug thread 31 for engaging with the plug 20 of the barrel 10. The barrel insert 30 includes a cap thread 32 for engaging with a shipping cap 40 (depicted as being removed and placed aside in FIG. 1A). In particular, a lower tube 33 can be used to extract the contents of the barrel 10. A second coaxial recirculation channel formed in the volume between the lower tube 33 and the recirculation lower tube 34 opens at the deflector 35 and can be used to recirculate the dispensed fluid to the barrel 10. The shipping cap 40 can be color-coded to identify the contents of the barrel 10.

[0007] The dispensing head 50 is engaged with the cartridge insert 30 by rotation of the locking ring 51 for dispensing the contents of the cartridge 10. When engaged, the dispensing head 50 provides communication between the conduit 52 and the cartridge 10 for withdrawing the contents of the cartridge 10, recirculating the withdrawn fluid to the cartridge 10, venting the cartridge 10, and verifying a tight seal established between the dispensing head 50, the cartridge insert 30, and the stopper 20 of the cartridge 10.

[0008] Installation of the dispensing head 50 is accomplished by hand using a specially designed torque wrench. Summary of the invention

[0009] The present disclosure provides an apparatus and method for automatically dispensing potentially hazardous liquid-based materials from a cartridge that can provide greater accuracy, speed, repeatability, and safety. From removing the shipping cap to installing the dispensing head, and then to finally reinstalling the shipping cap, all open port operations on the cartridge (as well as all dispensing operations) can be performed in an enclosed area without the presence of personnel in the enclosed area.

[0010] Briefly, the present disclosure provides an apparatus comprising: a. a robot arm; and b. an end-of-arm attachment fixedly attached to the robot arm, wherein the end-of-arm attachment comprises: i. a fixed portion of the end-of-arm attachment fixedly attached to the robot arm, the fixed portion being adapted to receive a replaceable portion of the end-of-arm attachment; ii. a first replaceable portion of the end-of-arm attachment adapted to remove a cap from a container, retain the cap, and reinstall the cap on the container; and iii. a second replaceable portion of the end-of-arm attachment adapted to install a dispensing head on a container and remove the dispensing head from a container, wherein the dispensing head is capable of dispensing a liquid-based material from the container. In some embodiments, the liquid-based material is a CMP process chemical, and the CMP process chemical is dispensed to a CMP process tool. In some embodiments, the apparatus includes a programmable logic controller that controls the movement of the robot arm and the end-of-arm attachment element, and coordinates the actions of the apparatus with the actions of the CMP process tool as appropriate. Additional embodiments of the apparatus of the present disclosure are described below.

[0011] In another aspect, the present disclosure provides a method for automatically dispensing liquid-based materials from a container, comprising: a. providing an apparatus for automatically filling or dispensing liquid-based materials from a container, the apparatus comprising: i. a robotic arm; and ii. an arm end attachment fixedly attached to the robotic arm, wherein the arm end attachment comprises: 1. a fixed portion of the arm end attachment fixedly attached to the robotic arm; the fixed portion is adapted to receive a replaceable portion of the arm end attachment; 2. a first replaceable portion of the arm end attachment adapted to remove a cap from the container, retain the cap, and reinstall the cap on the container; and 3. a second replaceable portion of the arm end attachment adapted to install a dispensing head on the container and remove the dispensing head from the container; b. removing the cap from the container with the first replaceable portion by virtue of the first replaceable portion being attached to the fixed portion; and c. installing a dispensing head on the container by virtue of the second replaceable portion being attached to the fixed portion. In some embodiments, the method further comprises: d. dispensing the liquid-based material from the container via the dispensing head. In some embodiments, the method further comprises: e. supplying the portion of the liquid-based material to a CMP process tool; and f. recycling the portion of the liquid-based material back to the container through the dispensing head. Additional embodiments of the methods of the present disclosure are described below.

[0012] The foregoing summary of the invention disclosed herein is not intended to describe every embodiment of the invention. Details of one or more embodiments of the invention are also set forth in the following description. Other features, objectives, and advantages of the invention should be apparent from the description and claims.

[0013] Unless otherwise defined, all scientific and technical terms used herein have the commonly used meanings in the art.

[0014] As used in this specification and the appended claims, the singular forms "a," "an," and "the" encompass plural referenced embodiments unless the content clearly dictates otherwise.

[0015] As used in this specification and the appended claims, the term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise.

[0016] As used herein, "have," "having," "include," "including," "comprise," "comprising," or the like are used in their open-ended sense and generally mean "including, but not limited to." It should be understood that the terms "consisting of" and "consisting essentially of" are encompassed by the terms "comprising" and the like. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] FIG. 1A is a photograph of a prior art manually applied device for dispensing liquids from a cartridge.

[0018] 1B is an elevation view of a cartridge insert used in the prior art apparatus of FIG. 1A .

[0019] Figure 2A is a plan view of an apparatus according to the present disclosure.

[0020] Figure 2B is an elevational view of an apparatus according to the present disclosure.

[0021] Figure 3A is an elevation view of a universal head according to the present disclosure.

[0022] Figure 3B is an elevation view of a detail of the underside of a universal head according to the present disclosure.

[0023] Figure 4 is an elevational view of a shipping cap end-of-arm tooling according to the present disclosure.

[0024] Figure 5 is an elevational view of a dispensing head end-of-arm tool according to the present disclosure.

[0025] Figure 6 is an elevational view of an apparatus in operation according to the present disclosure.

[0026] Figure 7 is an elevational view of an apparatus in operation according to the present disclosure.

[0027] Figure 8 is an elevational view of an apparatus in operation according to the present disclosure.

[0028] 9 is an elevational view of an apparatus in operation according to the present disclosure.

[0029] Fig.10 is an elevational view of an apparatus in operation according to the present disclosure.

[0030] Fig.11 is an elevational view of an apparatus in operation according to the present disclosure. DETAILED DESCRIPTION

[0031] The present disclosure provides an end-of-arm tool that can be mounted on a robotic arm. The tool includes a first workpiece attached to the arm and a second workpiece detachably attached to the first workpiece. The first workpiece includes one or more pneumatically controlled locks that interact with the second workpiece. The first workpiece may include one or more pins, guides, grooves, etc. for guiding the connection between the first workpiece and the second workpiece. The first workpiece includes a servo drive adapter to provide torque to a portion of the second workpiece. The first workpiece may include a sensor. In an embodiment, the sensor can measure the torque applied with the servo drive adapter. The sensor can measure the rotation of the servo drive adapter.

[0032] The first workpiece acts as a universal head for interfacing with a variety of second workpieces that are configured to work with different cartridge designs or perform different operations on the cartridge. For example, the second workpiece may be designed to remove or place a shipping cap in the cartridge. The second workpiece may be a cartridge head assembly that is configured to assist in filling or emptying the cartridge. The second workpiece may be mounted in the robot's cell for quick change. This may allow the robot arm to perform a wider range of tasks than if the end-of-arm tooling lacked this quick change feature.

[0033] The use of one or more guide pins can enhance the ability of the robot arm to replace the second workpiece. The guide pin may include a tapered tip and / or may be received in a hole with a tapered opening. Similarly, grooves, protrusions, recesses, guides, etc. can be used to assist in automatic alignment between the first workpiece and the second workpiece. In one embodiment, the first workpiece includes two guide pins to engage the hole in the second workpiece. In an embodiment, the first workpiece includes a guide pin mounted near the outer edge of the first workpiece. In another embodiment, the first workpiece includes a guide pin mounted near the servo drive adapter. In some embodiments, the guide pin is positioned on the first workpiece, and the hole for receiving the guide pin is positioned on the second workpiece. In other embodiments, the guide pin is part of the second workpiece, and the first workpiece includes a hole for receiving the guide pin. In other embodiments, both the first workpiece and the second workpiece include both the guide pin and the hole for receiving the guide pin.

[0034] The first workpiece includes one or more pneumatically controlled locks. The pneumatically controlled locks facilitate temporary attachment between the first workpiece and the second workpiece. The pneumatically controlled locks are configured to remain locked in the event of a loss of pressure in the pneumatically controlled locks. Similarly, the pneumatically controlled locks are configured to remain locked in the event of a power outage in the system. This helps ensure that in the event of a power failure or loss of pneumatic pressure, the second workpiece will remain attached to the first workpiece.

[0035] The first workpiece includes one or more servo drive adapters. The servo drive adapter may include a rotating wheel having a plurality of fingers extending away from the wheel and away from the first workpiece. The fingers are used to interlock with a receiving component on the second workpiece and allow rotation to be transmitted to the receiving component. In an embodiment, the rotating wheel includes three fingers of equal size. However, a different number of fingers may be used. In some embodiments, the figure includes fingers of different sizes or gaps between fingers. In some embodiments, the fingers and gaps are of equal size, for example, alternating 60 degree arcs around the rotating wheel. For four fingers, a 45 degree arc may be used.

[0036] The first workpiece may further include one or more cameras. In an embodiment, the first workpiece includes two cameras. The cameras may perform port identification, port location, shipping cap configuration, and cartridge embed key verification. The camera vision system capability eliminates the need to maintain perfect cartridge placement on the pallet after filling. High pixel resolution color images enable higher quality and security with additional automated inspections, such as reading product ID labels or key codes on cartridge inserts. The cameras may include deep learning software.

[0037] The first workpiece may include a port connected to a programmable logic controller (PLC). In an example, the PLC controls the operation of the servo drive adapter and / or the pneumatic control lock.

[0038] In some embodiments, the end-of-arm tooling for the first and second workpieces is part of an automation cell that includes a robotic arm. The automation cell may include a frame designed to allow the entire automation cell to be fully movable by a forklift while maintaining the integrity of sensitive equipment. The automation cell can run on a single air and power connection. This ensures fast installation time and minimal invasive infrastructure needs. The automation cell footprint can allow for expansion or addition of process steps, such as a cartridge head rinse station, test equipment.

[0039] Figure 2A and 2BOne embodiment of an apparatus according to the present disclosure is depicted. The apparatus may be mounted on a base 160 so that the entire apparatus forms a fully movable (i.e., via a forklift) unit 200 while maintaining the integrity of sensitive equipment. The unit 200 may be designed to run on a single air and power connection. This ensures fast installation time and minimal intrusive infrastructure needs. Typical power requirements may include three-phase power 380 to 575V, typically 480V power, which is capable of consuming 2.5kW of power. Transformers may be added for different plant power supplies available in different regions. Typical air supply requirements may include 550 to 690kPa (80 to 100PSI) for operation of pneumatic components. The unit 200 may additionally include an enclosure wall 170, including a door 175. In order to provide safe operation, a door safety interlock may be included to prevent operation of components when the door is open. The footprint of the unit 200 may allow for expansion or addition of process steps, such as a dispensing head rinse station, test equipment, and the like.

[0040] One or more cartridges 110, which may be carried on a pallet 111, may be placed within the unit 200 with the door 175 closed. The cartridges 110 may contain any suitable liquid; however, the apparatus is particularly suitable for high purity, highly corrosive and / or highly alkaline liquids, such as those utilized in the semiconductor processing and chemical manufacturing industries.

[0041] The apparatus includes a robotic arm 180. A programmable logic controller 190 adapted and connected to control the motion of the robotic arm 180 and optionally additional functions may be an integral part of the unit 200. The robotic arm 180 may be a FANUC Foundry PRO M-710iC / 50 robotic arm, characterized by protection against dust ingress and immersion, chemical vapor resistant epoxy coating, 6-axis motion, 50kg payload capacity, and 2050mm reach. The programmable logic controller 190 may be an Allen Bradley programmable logic controller with an AB PanelView HMI touch screen, local network connectivity, remote access for technical support, and pin-out options for communicating with an existing CDU system for a complete dead-loop process. A universal head (UH) 250 is mounted at the end of the robotic arm 180. The UH 250 is the first workpiece of the end-of-arm tool of the present disclosure. It is equipped to engage and manipulate a plurality of second workpieces of the end-of-arm tool, including a shipping cover end-of-arm tool (SC EOAT) 230 and a delivery head end-of-arm tool (DH EOAT) 240. Robot 180 is able to reach SC EOAT docking station 210, DH EOAT docking station 220, and cartridge 110. As depicted, SC EOAT docking station 210 carries SC EOAT 230. As depicted, DH EOAT docking station 220 carries DH EOAT 240.

[0042] Figure 3A and 3B The universal head (UH) 250 is depicted in more detail. The UH 250 is the first workpiece of the end-of-arm tool of the present disclosure. The UH 250 includes a chassis 251 that carries the other components of the UH 250. The chassis 251 includes a top plate 252 that is adapted to be permanently (e.g., by welding, adhesive, rivets, or the like) or semi-permanently (e.g., by machine bolts or the like) attached to the end of the robot arm 180. A servo motor 253 is configured to drive a servo drive adapter 254. When engaged with a SC EOAT or DH EOAT, the servo drive adapter 254 can provide torque to the moving components of the second workpiece. The servo motor 253 can be equipped to accommodate the monitoring of torque, rotation, speed, and position (including the start and end of rotation). A guide pin 255 engages a complementary portion of the SCEOAT or DH EOAT to guide the attachment of the second workpiece and provide stability when attached. The lock 256 engages the complementary portion of the SC EOAT or DH EOAT to lock the second workpiece to the UH when engaged. The lock 256 may be pneumatically actuated. The lock 256 may be biased to a locked position so that the loss of power (or pneumatic pressure) to the lock does not cause the lock to open and release the engaged second workpiece. The UH 250 may additionally include a vision system including one or two cameras 257. The vision system may be a high-resolution color system so that it can be used for port identification, port position determination, shipping cap identification, and barrel insert identification. In addition, the UH 250 may include a laser range finder in or adjacent to one or both cameras 257.

[0043] Figure 4A shipping cap end of arm tool (SC EOAT) 230 is depicted. The SC EOAT 230 is a second workpiece of the end of arm tool of the present disclosure. The SC EOAT 230 includes a chassis 231 that carries the other components of the SC EOAT 230. A servo drive receiver 232 is configured to engage with a servo drive adapter 254 of the UH 250 so that torque is transferred from the servo motor 253 of the UH 250 to the servo drive receiver 232. A belt and pulley system 233 transfers the torque to a shipping cap rotor 234. The shipping cap rotor 234 is capable of engaging and holding a shipping cap for a cartridge. The shipping cap rotor 234 may include active or passive clamping elements (not shown) positioned within the shipping cap rotor 234 so that they can work in conjunction to hold the cap. In a passive embodiment, two, three, or more clamping elements are positioned within the shipping cap rotor 234. One or more clamping elements are spring loaded so that pressing the shipping cover rotor 234 over the cover causes the spring loaded clamping elements to deflect to an open position and then return to a cover holding position over the cover. In an active embodiment, the clamping elements are opened and closed by a powered actuator (e.g., a servo). A pin receiver 235 engages a guide pin 255 of the UH 250 to guide the attachment of the SC EOAT 230 to the UH 250 and provide stability when attached. A lock receiver 236 engages a lock 256 of the UH 250 to lock the SC EOAT 230 to the UH 250 when engaged. A guard 237 encloses the belt and pulley system 233 to prevent the drive system from contaminating the workspace. When not attached to the UH 250, the SC EOAT 230 remains in the SCEOAT docking station 210. In use, the robot 180 maneuvers the UH 250 into position above the SC EOAT docking station 210 to engage or release the SC EOAT 230 .

[0044] Figure 5A dispensing head end-of-arm tool (DH EOAT) 240 is depicted. The DH EOAT 240 is a second piece of the end-of-arm tool of the present disclosure. The DH EOAT 240 includes a chassis 241 that carries the other components of the DH EOAT 240. A servo drive receiver 242 is configured to engage with a servo drive adapter 254 of the UH 250 so that torque is transferred from a servo motor 253 of the UH 250 to the servo drive receiver 242. A belt and pulley system 243 transfers the torque to a dispensing head rotor 244. The dispensing head rotor 244 is capable of holding a dispensing head (not shown), and more specifically, is capable of holding a locking ring of the dispensing head for attachment to a cartridge insert of a cartridge. The dispensing head rotor 244 can be fitted with a standard dispensing head, such as the dispensing head 50 of FIG. 1A . The pin receiver 245 engages the guide pin 255 of the UH 250 to guide the attachment of the DH EOAT 240 to the UH 250 and provides stability when attached. The lock receiver 246 engages the lock 256 of the UH 250 to lock the DH EOAT 240 to the UH 250 when engaged. The guard 247 encloses the belt and pulley system 243 to prevent the drive system from contaminating the workspace. When not attached to the UH 250, the DH EOAT 240 remains in the DH EOAT docking station 220. In use, the robot 180 manipulates the UH 250 into a position above the DH EOAT docking station 220 to engage or release the DH EOAT 240.

[0045] The method according to the present invention may comprise some or all of the following actions, which will be described in more detail below.

[0046] 1. The cartridge is delivered to the unit.

[0047] 2. With the robotic arm properly positioned the vision system is used to identify the port opening of the cartridge and confirm the correct selection of the cartridge by shipping cap type and / or other markings.

[0048] 3. With the laser rangefinder properly positioned by the robotic arm, use the laser rangefinder to determine the plane of the shipping cover that is orthogonal to the axis of rotation of the shipping cover.

[0049] 4. The robotic arm engages the SC EOAT resting in the SC EOAT docking station and uses the SC EOAT to unscrew the shipping cap from the cartridge insert of the cartridge by rotating the shipping cap about its rotation axis. The robotic arm returns the SC EOAT to the SC EOAT docking station and disengages, with the shipping cap remaining held in the shipping cap rotor of the SC EOAT.

[0050] 5. The robotic arm engages the DH EOAT resting in the DH EOAT docking station.

[0051] 6. With the robotic arm properly positioning the vision system, the vision system is used to identify the cartridge insert and confirm the correct selection of cartridge and compatibility of the dispense head with the cartridge insert.

[0052] 7. The robotic arm aligns the dispensing head with the axis of rotation of the shipping cap and engages the locking ring of the dispensing head with the cartridge insert.

[0053] 8. The DH EOAT is used to rotate the locking ring of the dispense head to engage the dispense head with the cartridge insert at the appropriate torque and monitor it.

[0054] 9. After the contents of the cartridge have been dispensed, the DH EOAT is used to rotate the locking ring of the dispensing head to disengage the dispensing head from the cartridge insert.

[0055] 10. The robotic arm returns the DH EOAT to the DH EOAT docking station, engages the SCEOAT resting in the SC EOAT docking station, and reinstalls the shipping cap with the proper torque using the SC EOAT, monitoring it.

[0056] refer to Figure 6 , the robot 180 positions the camera 257 of the vision system over the barrel 110 so that the field of view 258 includes the shipping cap 40. The vision system is used to identify each port opening of the barrel. (The apparatus is depicted as the UH 250 engaged with and carrying the DH EOAT 240 without the dispensing head installed therein.) The correct selection of the barrel is confirmed by the shipping cap type and / or other markings. The position of the shipping cap in the XY plane is determined.

[0057] refer to Figure 7 , the robot 180 positions a laser rangefinder instrument above the barrel 110 adjacent to the vision system's camera 257 so that it can measure distances to locations on the shipping cap 40. (The apparatus is depicted as the UH 250 engaging and carrying the SC EOAT 230.) The laser rangefinder instrument takes measurements at least in three locations 259. Using these 3 (or more) data points, a reference plane for port alignment is determined, which is a plane orthogonal to the shipping cap's axis of rotation. In subsequent operations, the robot 180 is oriented so that the axis of rotation of the SC EOAT and DH EOAT tools is aligned with the axis of rotation of the shipping cap, thereby preventing cross-threading or undue friction.

[0058] Figure 8Operation of the robot 180 is depicted so that the UH 250 can engage the SC EOAT 230 for use. The SC EOAT 230 rests on the SC EOAT docking station 210. The robot 180 positions the UH 250 directly above the SC EOAT 230 so that the guide pins 255 (one of which is visible) of the UH 250 are aligned with the pin receivers 235 of the SC EOAT 230, and the locks 256 of the UH 250 are aligned with the lock receivers 236 of the SC EOAT 230. The robot 180 lowers the UH 250 onto the SC EOAT 230 so that the servo drive adapter 254 engages the servo drive receiver 232. The locks 256 engage to secure the SC EOAT 230 to the UH 250 for use. In the reverse operation, to return and disengage the SC EOAT, the robot 180 positions the SC EOAT 230 on the SC EOAT docking station 210, and the lock 256 is disengaged. Engagement and disengagement of the DH EOAT 240 is performed by substantially the same method.

[0059] Fig. 9A and 9B The operation of the robot 180 is depicted, wherein the SC EOAT 230 engages the UH 250 to remove the shipping cap 40 from the cartridge 110. The robot 180 positions the SC EOAT 230 so that the shipping cap rotor 234 is located above the previously determined position of the shipping cap in the XY plane, and so that the axis of rotation of the shipping cap rotor 234 is aligned with the previously determined axis of rotation of the shipping cap. The robot 180 lowers the SC EOAT 230 over the shipping cap so that the shipping cap rotor 234 engages the shipping cap. The servo motor 253 rotates the shipping cap rotor 234 (generally counterclockwise) to disengage the shipping cap, exposing the cartridge insert. The shipping cap is retained in the shipping cap rotor 234 until it is reinstalled on the cartridge 110. Reinstalling the shipping cap again involves positioning the SC EOAT 230 so that the shipping cap rotor 234 is located above the previously determined position of the shipping cap (when installed) in the XY plane and so that the rotational axis of the shipping cap rotor 234 is aligned with the previously determined rotational axis of the shipping cap (when installed). The robotic arm 180 lowers the SC EOAT 230 over the cartridge insert so that the shipping cap held in the shipping cap rotor 234 engages the cartridge insert. The servo motor 253 rotates the shipping cap rotor 234 (generally clockwise) to engage the shipping cap with the cartridge insert while monitoring rotational position and torque to ensure proper sealing of the reinstalled shipping cap.

[0060] refer to Fig.10, removing the shipping cap exposes the cartridge insert 30 installed in the plug 20 of the cartridge 110. After removing the shipping cap, the robotic arm 180 returns the SC EOAT to the SC EOAT docking station (where the shipping cap is retained in the shipping cap rotor of the SC OEAT) and engages the UH 250 with the DH EOAT 240 at the DH EOAT docking station. The DH EOAT 240 includes a dispensing head 50 installed in a dispensing head rotor 244, which retains the dispensing head 50 by a locking ring of the dispensing head 50, which is not visible in this view. (For clarity, the tubing connected to the dispensing head 50 is omitted from this view.) Prior to installing the dispensing head 50 on the cartridge insert 30, the apparatus uses a vision system to verify the proper cartridge insert 30, such as Fig.10 The robot 180 positions the camera 257 of the vision system over the cartridge 110 so that the field of view 258 includes the cartridge insert 30 for confirmation of the proper cartridge insert 30 .

[0061] Additional references Fig.11 , if the correct cartridge insert 30 is present, the robot 180 then positions the DH EOAT 240 so that the dispensing head rotor 244 is above the previously determined position of the cartridge insert 30 in the XY plane (previously determined to be the position of the shipping cap), and so that the rotational axis of the dispensing head rotor 244 is aligned with the previously determined rotational axis of the cartridge insert 30 (previously determined to be the rotational axis of the shipping cap). The robot 180 lowers the DH EOAT 240 over the cartridge insert so that the locking ring of the dispensing head 50 held in the dispensing head rotor 244 engages the cartridge insert. The servo motor of the UH 250 rotates the dispensing head rotor 244 (typically in a clockwise direction) to engage the locking ring of the dispensing head 50 with the cartridge insert 30, while monitoring rotational position and torque to ensure proper sealing of the dispensing head 50. In addition, proper connection can be verified by using a verification port of the dispenser head 50 that includes the described features. The robot 180 remains in place during dispensing of the contents of the cartridge 110 through the conduit 52 connected to the dispensing head. Fig.11 In the figure, the conduit 52 is depicted as being truncated. In addition to verifying the establishment of a tight seal between the dispensing head 50, the cartridge insert 30 and the stopper 20 of the cartridge 110 (as mentioned above), the conduit 52 forms a connection for withdrawing the contents of the cartridge 110, recirculating the withdrawn fluid to the cartridge 110 and venting the cartridge 110.

[0062] After dispensing is complete, the servo motor of the UH 250 turns the dispensing head rotor 244 (typically counterclockwise) to disengage the locking ring of the dispensing head 50 from the cartridge insert 30. As described above, the robotic arm 180 then returns the DH EOAT 240 to the DH EOAT docking station 220, retrieves the SC EOAT 230 (which holds the shipping cap) from the SC EOAT docking station 210, and reinstalls the shipping cap.

[0063] Various modifications and alterations of this disclosure will become apparent to those skilled in the art without departing from the scope and principles of this disclosure, and it should be understood that this disclosure is not to be unduly limited to the illustrative embodiments set forth above.

Claims

1. A device comprising: a.Robotic arm; and b. an end-of-arm attachment fixedly attached to the robotic arm, wherein the end-of-arm attachment comprises: i. a fixed portion of the end-of-arm attachment fixedly attached to the robotic arm; the fixed portion being adapted to receive a replaceable portion of the end-of-arm attachment; ii. a first replaceable portion of the arm end attachment adapted to remove a cover from a container, retain the cover and reinstall the cover on the container; and iii. A second replaceable part of the arm end attachment adapted to mount and remove a dispensing head on and from the container, wherein the dispensing head is capable of dispensing a liquid based material from the container.

2. The apparatus of claim 1, wherein the first replaceable part comprises a first rotor, the first rotor comprising a plurality of clamps adapted to close around the cover such that torque can be applied to the cover by rotation of the first rotor.

3. The device according to claim 1, wherein the second replaceable part comprises a second rotor engaged with the dispensing head and capable of applying a torque to the dispensing head by rotation of the second rotor.

4. Apparatus according to claim 3, wherein the dispensing head comprises three or more through-going channels.

5. The apparatus of claim 4, wherein at least one through-channel is connected to a CMP tool.

6. The apparatus of claim 3, wherein the dispensing head comprises four or more through-going channels.

7. The apparatus of claim 6, wherein at least one through-channel is connected to a CMP tool.

8. The apparatus of claim 1, wherein the liquid-based material is a CMP process chemical, and wherein the CMP process chemical is delivered to a CMP process tool.

9. The apparatus of claim 1 , wherein the fixed portion comprises a servomotor adapted to alternately engage with a first rotor of the first replaceable portion such that the servomotor can apply torque to the first rotor and to engage with a second rotor of the second replaceable portion such that the servomotor can apply torque to the second rotor.

10. The apparatus of claim 9, further comprising a torque monitor to measure the torque applied by the servo motor.

11. The apparatus of claim 9, wherein the stationary portion further comprises a position monitor to measure the rotational position of the servo motor.

12. The apparatus of claim 1 , wherein the fixed portion comprises one or more locks that maintain the first replaceable portion or the second replaceable portion in a fixed position relative to the fixed portion in a locked position, and that release the first replaceable portion or the second replaceable portion in an open position.

13. The apparatus of claim 1, wherein the fixed portion comprises one or more cameras capable of capturing images of the container.

14. The apparatus of claim 1, wherein the fixed portion comprises one or more ranging detectors.

15. The apparatus of claim 1, wherein the first replaceable portion comprises a first rotor, the first rotor comprising a plurality of clamps adapted to close about the cover such that torque can be applied to the cover by rotation of the first rotor; wherein the second replaceable part comprises a second rotor, the second rotor comprising a dispensing head, such that torque can be applied to the dispensing head by rotation of the second rotor; wherein the fixed portion comprises a servomotor adapted to alternately engage with the first rotor such that the servomotor can apply torque to the first rotor and engage with the second rotor such that the servomotor can apply torque to the second rotor, and wherein the apparatus comprises a torque monitor to measure the torque applied by the servomotor; wherein the fixed portion includes one or more locks that maintain the first replaceable part or the second replaceable part in a fixed position relative to the fixed portion in a locked position, and the locks release the first replaceable part or the second replaceable part in an open position; and The fixed part includes one or more cameras and one or more ranging detectors.

16. The apparatus of claim 15, further comprising a programmable logic controller; wherein the programmable logic controller is functionally connected to receive input from the torque monitor, the one or more cameras, and the one or more range detectors; and Wherein the programmable logic controller is functionally connected to control the movement of the robotic arm, the movement of the servo motor and the movement of the one or more locks.

17. The apparatus of claim 16, wherein the liquid-based material is a CMP process chemical, wherein the CMP process chemical is delivered to a CMP process tool, and wherein the programmable logic controller is functionally connected to send status signals to the CMP tool.

18. A method comprising: a. Providing an apparatus for automatically filling or dispensing a liquid-based material from a container, the apparatus comprising: i. Robotic arm; ii. an end-of-arm attachment fixedly attached to the robotic arm, wherein the end-of-arm attachment comprises:

1. A fixed portion of the end-of-arm attachment fixedly attached to the robotic arm; the fixed portion being adapted to receive a replaceable portion of the end-of-arm attachment; 2. A first replaceable portion of the arm end attachment adapted to remove a cover from the container, retain the cover and reinstall the cover on the container; and 3. A second replaceable part of the arm end attachment adapted to mount and remove a dispensing head on and from the container; b. removing the cover from the container with the first replaceable part by virtue of the first replaceable part being attached to the fixed part; and c. Mounting a dispensing head on the container by virtue of the attachment of the second exchangeable part to the fixed part.

19. The method of claim 18, further comprising: d. Dispensing a liquid-based material from the container through the dispensing head.

20. The method of claim 19, wherein the liquid-based material is a CMP process chemical, the method further comprising: e. supplying a portion of the distributed CMP process chemicals to a CMP process tool; and f. Recirculating a portion of the dispensed CMP process chemical back into the container through the dispensing head.

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