Intelligent vacuum butterfly valve, control method of intelligent vacuum butterfly valve and computing device

Abstract

The present application discloses an intelligent vacuum butterfly valve, a control method of the intelligent vacuum butterfly valve and a computing device. The control method is applied to the intelligent vacuum butterfly valve, and the intelligent vacuum butterfly valve is applied to a single crystal furnace. The intelligent vacuum butterfly valve includes a valve body and a butterfly plate for controlling the valve body opening. The control method of the intelligent vacuum butterfly valve includes: obtaining the current vacuum degree in the single crystal furnace; determining the opening change amount according to the current vacuum degree and the preset target vacuum degree; generating a control signal according to the opening change amount; and controlling the butterfly plate to rotate according to the control signal. Through the above settings, the intelligent vacuum butterfly valve has a faster response speed and improves the adjustment accuracy of the intelligent vacuum butterfly valve.

Description

Technical Field

[0001] The present application relates to the field of valve control, and in particular to an intelligent vacuum butterfly valve, a control method for the intelligent vacuum butterfly valve, and a computing device. Background Art

[0002] The intelligent vacuum butterfly valve is a valve used in single crystal furnaces. By changing the rotation angle of the butterfly plate in the intelligent vacuum butterfly valve, the opening of the intelligent vacuum butterfly valve can be controlled, thereby changing the vacuum degree in the single crystal furnace.

[0003] In the prior art, when there is a deviation between the vacuum degree and the target vacuum degree, the vacuum degree is usually adjusted by manually rotating the butterfly plate directly or by manually controlling the motor to rotate the butterfly plate. However, after receiving the deviation reminder, the human needs to go near the intelligent vacuum butterfly valve to adjust the vacuum degree by manual operation, which results in a slow adjustment speed of the vacuum degree. In addition, manual adjustment is prone to over-adjustment or under-adjustment, resulting in poor adjustment accuracy. Summary of the invention

[0004] In order to address the deficiencies in the prior art, the purpose of the present application is to provide an intelligent vacuum butterfly valve with faster adjustment speed and higher accuracy, a control method for the intelligent vacuum butterfly valve, and a computing device.

[0005] To achieve the above objectives, this application adopts the following technical solutions:

[0006] In a first aspect, the present application provides a control method for an intelligent vacuum butterfly valve, the intelligent vacuum butterfly valve is applied to a single crystal furnace, the intelligent vacuum butterfly valve comprises a valve body and a butterfly plate for controlling the opening of the valve body, and the control method for the intelligent vacuum butterfly valve comprises:

[0007] Get the current vacuum degree in the single crystal furnace;

[0008] Determine the opening change amount according to the current vacuum degree and the preset target vacuum degree;

[0009] Generate a control signal according to the change in opening;

[0010] The butterfly plate is controlled to rotate according to the control signal.

[0011] Further, determining the opening change amount according to the current vacuum degree and the preset target vacuum degree includes:

[0012] According to the current vacuum degree, the input vacuum degree is obtained through filtering algorithm;

[0013] Obtaining a vacuum ratio according to an input vacuum and a preset target vacuum;

[0014] The opening change is determined based on the vacuum ratio.

[0015] Further, determining the opening change amount according to the vacuum ratio includes:

[0016] Determine whether the vacuum ratio is less than or equal to a preset first threshold or greater than or equal to a preset second threshold;

[0017] If the vacuum ratio is less than or equal to a preset first threshold or greater than or equal to a preset second threshold, the vacuum difference is obtained according to the input vacuum and the preset target vacuum, and the first opening change is determined by a first incremental PID algorithm according to the vacuum difference.

[0018] Further, determining the opening change amount according to the vacuum ratio includes:

[0019] Determine whether the vacuum ratio is greater than a preset first threshold and less than a preset second threshold;

[0020] If the vacuum ratio is greater than a preset first threshold and less than a preset second threshold, a vacuum difference is obtained according to the input vacuum and a preset target vacuum, and a second opening change is determined by a second incremental PID algorithm according to the vacuum difference.

[0021] Further, obtaining a vacuum difference according to the input vacuum and a preset target vacuum, and determining a second opening change amount by a second incremental PID algorithm according to the vacuum difference includes:

[0022] Determine whether the vacuum ratio is less than 1;

[0023] If the vacuum ratio is less than 1, a vacuum difference is obtained according to the input vacuum and the preset target vacuum, and a third opening change is determined by a third incremental PID algorithm according to the vacuum difference;

[0024] If the vacuum ratio is greater than 1, a vacuum difference is obtained according to the input vacuum and a preset target vacuum, and a fourth opening change is determined by a fourth incremental PID algorithm according to the vacuum difference.

[0025] Furthermore, the filtering algorithm is a Kalman filtering algorithm.

[0026] Further, generating a control signal according to the opening change includes:

[0027] Get the current opening of the butterfly valve;

[0028] Obtain the target opening according to the current opening and the opening change;

[0029] Determining whether the target opening is greater than a preset first opening threshold and less than a preset second opening threshold;

[0030] If the target opening is greater than a preset first opening threshold and less than a preset second opening threshold, a control signal is generated according to the opening change.

[0031] Further, if the target opening is less than or equal to a preset first opening threshold, a first opening difference between the current opening and the preset first opening threshold is obtained, and a control signal is generated according to the first opening difference.

[0032] Further, if the target opening is greater than or equal to a preset second opening threshold, a second opening difference between the preset second opening threshold and the current opening is obtained, and a control signal is generated according to the second opening difference.

[0033] In the second aspect, the present application also provides an intelligent vacuum butterfly valve, which is applied to a single crystal furnace. The intelligent vacuum butterfly valve includes a valve body, a butterfly plate and a valve stem. The butterfly plate is located in the valve body and can rotate relative to the valve body to change the opening of the valve body. The valve stem is penetrated through the valve body and fixedly connected to the butterfly plate. The intelligent vacuum butterfly valve also includes:

[0034] A vacuum degree sampling module is installed in the single crystal furnace and is used to obtain the current vacuum degree in the single crystal furnace;

[0035] An opening determination module, the opening determination module is electrically connected to the vacuum sampling module, the opening determination module is used to receive the current vacuum degree and determine the opening change amount according to a preset target vacuum degree, and the opening determination module is also used to generate a control signal according to the opening change amount;

[0036] The opening adjustment module is electrically connected to the opening determination module and is also fixedly connected to the valve stem. The opening adjustment module is used to receive a control signal and control the butterfly plate to rotate according to the control signal.

[0037] In a third aspect, the present application also provides a computing device, comprising a memory and one or more processors; wherein the memory stores computer program code, and the computer program code comprises computer instructions; when the computer instructions are executed by the processor, any one of the methods in the above-mentioned first aspect is executed.

[0038] The above-mentioned intelligent vacuum butterfly valve opening is provided with a determination module, which determines the opening change and generates a control signal according to the opening change to control the rotation of the butterfly plate through the opening adjustment module, thereby improving the adjustment speed and accuracy of the intelligent vacuum butterfly valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 This is a schematic diagram of the structure of the intelligent vacuum butterfly valve in the implementation manner of this application;

[0040] Figure 2 A connection block diagram of a partial structure of an intelligent vacuum butterfly valve in an embodiment of the present application;

[0041] Figure 3This is a flow chart of a control method of an intelligent vacuum butterfly valve in an embodiment of the present application;

[0042] Figure 4 A flow chart for determining the opening change in an embodiment of the present application;

[0043] Figure 5 This is a flow chart of determining the opening change amount according to the vacuum ratio in the implementation manner of the present application;

[0044] Figure 6 A flow chart for determining a second opening change amount in an embodiment of the present application;

[0045] Figure 7 This is a flow chart of generating a control signal according to the opening change in an embodiment of the present application. DETAILED DESCRIPTION

[0046] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0047] like Figure 1 As shown, the present application provides an intelligent vacuum butterfly valve 100, which is applied to a single crystal furnace. The single crystal furnace includes a furnace body and a vacuum pump, the vacuum pump is connected to the furnace body through a vacuum pipe, and the vacuum pump is used to extract the gas in the furnace body to reduce the gas pressure in the furnace body. The intelligent vacuum butterfly valve 100 is arranged in the vacuum pipe between the vacuum pump and the furnace body, and the intelligent vacuum butterfly valve 100 is used to control the vacuum degree in the furnace body.

[0048] Specifically, the intelligent vacuum butterfly valve 100 includes a valve body 11, a butterfly plate 12 and a valve stem 13. The butterfly plate 12 is installed in the vacuum pipeline, one end of the valve stem 13 is fixedly connected to the butterfly plate 12, and the other end of the valve stem 13 is installed on the valve body 11 and can rotate relative to the valve body 11 around its own axis, so as to control the gap between the butterfly plate 12 and the vacuum pipeline (the opening of the butterfly plate 12).

[0049] like Figure 2As shown, the intelligent vacuum butterfly valve 100 also includes a vacuum sampling module 14, an opening determination module 15 and an opening adjustment module 16. The vacuum sampling module 14 is located in the furnace body of the single crystal furnace. The vacuum sampling module 14 is used to obtain the current vacuum degree in the furnace body. The opening determination module 15 is electrically connected to the vacuum sampling module 14 and the opening adjustment module 16 respectively. After the vacuum sampling module 14 obtains the current vacuum degree, the vacuum sampling module 14 transmits the current vacuum degree to the opening determination module 15. The opening determination module 15 stores a preset target vacuum degree. The opening determination module 15 determines the opening change according to the current vacuum degree and the preset target vacuum degree. The opening determination module 15 generates a control signal according to the opening change. The opening determination module 15 transmits the control signal to the opening adjustment module 16, so that the opening adjustment module 16 controls the butterfly plate 12 to rotate, thereby adjusting the opening of the butterfly plate 12.

[0050] The opening adjustment module 16 is configured as a motor, and high-precision control of the butterfly plate 12 is achieved through the motor, including speed control of the butterfly plate 12 and control of the rotation angle of the butterfly plate 12 .

[0051] It should be noted that in the prior art, the opening of the intelligent vacuum butterfly valve 100 is usually adjusted by manually controlling the rotation of the butterfly plate 12. Since the user needs to manually rotate the valve stem 13 to adjust the opening of the intelligent vacuum butterfly valve 100, the opening of the intelligent vacuum butterfly valve 100 is adjusted too slowly, and manual operation is prone to errors. The embodiment of the present application determines the opening change through the opening determination module 15, and generates a control signal according to the opening change to control the rotation of the butterfly plate 12 through the opening adjustment module 16, thereby improving the adjustment speed and accuracy of the intelligent vacuum butterfly valve 100.

[0052] In the embodiment of the present application, the vacuum sampling module 14 is a vacuum sensor or a vacuum detector, etc., and the vacuum sensor is arranged in the furnace body. The opening determination module 15 is a CPU (Central Processing Unit) or an MCU (Microcontroller Unit), etc. The opening adjustment module 16 is a motor, and the opening adjustment module 16 controls the butterfly plate 12 to rotate according to the opening change to adjust the vacuum degree of the intelligent vacuum butterfly valve 100.

[0053] like Figure 2 As shown, as an implementation method, the present application also provides a control method of an intelligent vacuum butterfly valve 100, which is used to control the above-mentioned intelligent vacuum butterfly valve 100, and the control method of the intelligent vacuum butterfly valve 100 includes the following steps:

[0054] S1, the vacuum sampling module 14 obtains the current vacuum degree in the single crystal furnace;

[0055] Specifically, the vacuum degree sampling module 14 obtains the current vacuum degree of the single crystal furnace, and transmits the current vacuum degree to the opening degree determining module 15 .

[0056] S2, the opening determination module 15 determines the opening change amount according to the current vacuum degree and the preset target vacuum degree;

[0057] Specifically, a preset target vacuum degree is stored in the opening determination module 15. After the opening determination module 15 receives the current vacuum degree transmitted by the vacuum sampling module 14, the opening determination module 15 determines the opening change amount according to the current vacuum degree and the preset target vacuum degree, and transmits the opening change amount to the opening adjustment module 16.

[0058] S3, the opening determination module 15 generates a control signal according to the opening change;

[0059] S4. The opening adjustment module 16 controls the butterfly plate 12 to rotate according to the control signal.

[0060] It should be noted that in the prior art, the user needs to manually rotate the valve stem 13 to adjust the opening of the intelligent vacuum butterfly valve 100, which results in too slow opening adjustment of the intelligent vacuum butterfly valve 100, and manual operation is prone to errors. The embodiment of the present application determines the opening change through the opening determination module 15, and controls the rotation of the butterfly plate 12 through the opening adjustment module 16 according to the opening change, thereby improving the adjustment speed and accuracy of the intelligent vacuum butterfly valve 100.

[0061] like Figure 3 As shown, as an implementation method, step S2 also includes the following steps:

[0062] S21, the opening determination module 15 obtains the input vacuum degree through a filtering algorithm according to the current vacuum degree;

[0063] The opening determination module 15 stores a preset filtering algorithm. The opening determination module 15 obtains the input vacuum degree through the filtering algorithm according to the current vacuum degree, wherein the filtering algorithm is a Kalman filtering algorithm.

[0064] Specifically, the Kalman filter algorithm satisfies the following relationship:

[0065] ;

[0066] Where G is the Kalman gain, P is the estimated covariance, and R is the measurement noise covariance. is the input vacuum degree at time k, In the embodiment of the present application, the initial value of G is 0, the initial value of P is 20, and the initial value of R is 5000.

[0067] S22, the opening determination module 15 obtains a vacuum ratio according to the input vacuum and the preset target vacuum;

[0068] Specifically, the opening degree determination module 15 divides the input vacuum degree by a preset target vacuum degree to obtain a vacuum degree ratio.

[0069] S23, the opening determination module 15 determines the opening change amount according to the vacuum ratio.

[0070] Through the above settings, the opening determination module 15 filters the current vacuum amount obtained by the vacuum sampling module 14 through the Kalman filtering algorithm, then calculates the vacuum ratio, and determines the opening change amount according to the vacuum ratio, thereby improving the accuracy of the opening change amount, and further improving the accuracy of the intelligent vacuum butterfly valve 100 when adjusting the opening.

[0071] like Figure 4 As shown, as an implementation, step S23 includes the following steps:

[0072] S231, the opening determination module 15 determines whether the vacuum ratio is less than or equal to a preset first threshold or greater than or equal to a preset second threshold, if the judgment result is yes, execute step S232, if the judgment result is no, execute step S233;

[0073] S232: The opening determination module 15 obtains a vacuum difference according to the input vacuum and a preset target vacuum, and determines a first opening change amount by using a first incremental PID algorithm according to the vacuum difference.

[0074] Specifically, the input vacuum degree, the preset target vacuum degree and the vacuum degree difference satisfy the following relationship:

[0075] ;

[0076] in is the vacuum degree difference at time k, is the input vacuum degree at time k, and m is the preset target vacuum degree.

[0077] Further, the opening determination module 15 determines the first opening change amount by a first incremental PID algorithm according to the vacuum difference, and the first incremental PID algorithm satisfies the following relationship:

[0078] ;

[0079] in is the change in opening at time n, , and is an incremental PID parameter. In the implementation mode of the present application, is 1, is 0.1, is 0.

[0080] S233: The opening determination module 15 obtains a vacuum difference according to the input vacuum and the preset target vacuum, and determines a second opening change amount by a second incremental PID algorithm according to the vacuum difference.

[0081] like Figure 5 As shown, specifically, step S233 includes the following steps:

[0082] S2331, the opening determination module 15 determines whether the vacuum ratio is less than 1, if the judgment result is yes, execute step S2332, if the judgment result is no, execute step S2333;

[0083] S2332, the opening determination module 15 obtains a vacuum difference according to the input vacuum and the preset target vacuum, and the opening determination module 15 determines a third opening change amount by using a third incremental PID algorithm according to the vacuum difference;

[0084] Specifically, the input vacuum degree, the preset target vacuum degree and the vacuum degree difference satisfy the following relationship:

[0085] ;

[0086] in is the vacuum degree difference at time k, is the input vacuum degree at time k, and m is the preset target vacuum degree.

[0087] Further, the opening determination module 15 determines the opening change amount by a third incremental PID algorithm according to the vacuum difference, and the third incremental PID algorithm satisfies the following relationship:

[0088]

[0089] in is the change in opening at time n, , and is an incremental PID parameter. In the implementation mode of the present application, is 1, is 0.1, is 0.

[0090] S2333: The opening determination module 15 obtains a vacuum degree difference according to the input vacuum degree and a preset target vacuum degree, and the opening determination module 15 determines a fourth opening degree change amount according to the vacuum degree difference by using a fourth incremental PID algorithm.

[0091] Specifically, the input vacuum degree, the preset target vacuum degree and the vacuum degree difference satisfy the following relationship:

[0092] ;

[0093] in is the vacuum degree difference at time k, is the input vacuum degree at time k, and m is the preset target vacuum degree.

[0094] Further, the opening determination module 15 determines the opening change amount by a fourth incremental PID algorithm according to the vacuum difference, and the fourth incremental PID algorithm satisfies the following relationship:

[0095]

[0096] in is the change in opening at time n, , and is an incremental PID parameter. In the implementation mode of the present application, is 1, is 0.1, is 0.

[0097] Exemplarily, the preset first threshold is 0.85m, that is, the preset first threshold is 0.85 times the preset target vacuum. The preset second threshold is 1.15m, that is, the preset second threshold is 1.15 times the preset target vacuum. When the opening determination module 15 determines that the vacuum ratio is less than or equal to the preset first threshold or the opening determination module 15 determines that the vacuum ratio is greater than or equal to the preset second threshold, that is, the input vacuum is less than or equal to 0.85 times the target vacuum, or the input vacuum is greater than or equal to 1.15 times the target vacuum, the opening determination module 15 obtains the first opening change according to the first incremental PID algorithm, and generates a control signal according to the first opening change to control the rotation of the butterfly plate 12. When the opening determination module 15 determines that the vacuum ratio is greater than the preset first threshold and less than 1, that is, the input vacuum is greater than 0.85 times the target vacuum but less than the target vacuum, the opening determination module 15 obtains the third opening change according to the third incremental PID algorithm, and generates a control signal according to the third opening change to control the rotation of the butterfly plate 12. When the opening determination module 15 determines that the vacuum ratio is greater than 1 and less than the preset second threshold value, that is, the input vacuum is greater than the target vacuum but less than 1.15 times the target vacuum, the opening determination module 15 obtains the fourth opening change according to the fourth incremental PID algorithm, and generates a control signal according to the fourth opening change to control the rotation of the butterfly plate 12. Through the above settings, the opening determination module 15 can select different algorithms to obtain the opening change according to the difference between the input vacuum and the preset target vacuum, thereby improving the accuracy of the opening change, and further improving the accuracy of the intelligent vacuum butterfly valve 100 when adjusting the opening.

[0098] like Figure 6 As shown, as an implementation method, step S3 includes the following steps:

[0099] S31, the opening determination module 15 obtains the current opening of the butterfly plate 12;

[0100] The intelligent vacuum butterfly valve 100 further includes an encoder, which is located in the valve body 11 and is used to obtain the current opening of the butterfly plate 12 and transmit the current opening to the opening determination module 15;

[0101] S32, the opening determination module 15 obtains the target opening according to the current opening and the opening change;

[0102] The opening degree determination module 15 calculates the sum of the current opening degree and the opening degree change amount to obtain the target opening degree.

[0103] S33, the opening determination module 15 determines whether the target opening is greater than a preset first opening threshold and less than a preset second opening threshold, if the judgment result is yes, execute step S34, if the judgment result is no, execute step S35;

[0104] The opening determination module 15 stores a preset first opening threshold and a preset second opening threshold. After obtaining the target opening, the opening determination module 15 determines whether the target is greater than the preset first opening threshold and less than the preset second opening threshold. If the judgment result is yes, step S34 is executed; if the judgment result is no, step S35 is executed.

[0105] S34, the opening determination module 15 generates a control signal according to the opening change;

[0106] Specifically, the opening adjustment module 16 determines and generates a control signal using a position PID algorithm according to the opening change, wherein the position PID algorithm satisfies the following relationship:

[0107] ;

[0108] Wherein N is a control signal. In the embodiment of the present application, the opening adjustment module 16 is a motor, and the control signal is the rotation speed of the motor. is the change in opening at time n.

[0109] S35, the opening determination module 15 determines whether the target opening is less than or equal to a preset first opening threshold, if the determination result is yes, execute step S36, if the determination result is no, execute step S37;

[0110] S36, the opening determination module 15 obtains a first opening difference between the current opening and a preset first opening threshold, and the opening determination module 15 generates a control signal according to the first opening difference;

[0111] The opening determination module 15 calculates the first opening difference according to the following formula:

[0112] ;

[0113] in is the first opening difference at time n, is the current opening at time n, and F is the preset first opening threshold. The opening determination module 15 transmits the first opening difference to the opening adjustment module 16, and the opening adjustment module 16 generates a control signal according to the first opening difference, wherein the first opening difference and the control signal satisfy the following relationship:

[0114] ;

[0115] Wherein N is a control signal. In the embodiment of the present application, the opening adjustment module 16 is a motor, and the control signal is the rotation speed of the motor. is the first opening difference at time n.

[0116] S37: The opening determination module 15 obtains a second opening difference between a preset second opening threshold and the current opening, and the opening determination module 15 generates a control signal according to the second opening difference.

[0117] The opening determination module 15 calculates the second opening difference according to the following formula:

[0118] ;

[0119] in is the second opening difference at time n, is the current opening at time n, and C is the preset second opening threshold. The opening determination module 15 transmits the second opening difference to the opening adjustment module 16, and the opening adjustment module 16 generates a control signal according to the second opening difference, wherein the second opening difference and the control signal satisfy the following relationship:

[0120] ;

[0121] Wherein N is a control signal. In the embodiment of the present application, the opening adjustment module 16 is a motor, and the control signal is the rotation speed of the motor. is the second opening difference at time n.

[0122] Exemplarily, the first opening threshold is 0°, and the second opening threshold is 90°, that is, the butterfly plate 12 can only rotate between 0° and 90°. When the opening determination module 15 determines that the target opening is between the first opening threshold and the second opening threshold, the opening determination module 15 generates a control signal according to the opening change, and uses the control signal to control the rotation of the butterfly plate 12. When the opening determination module 15 determines that the target opening is less than 0°, since the butterfly plate 12 can only rotate between 0° and 90°, the opening determination module 15 controls to obtain the first opening difference between the current opening and 0°, and generates a control signal according to the first opening difference to control the rotation of the butterfly plate 12. It can be understood that since the butterfly plate 12 cannot rotate more than 90°, when the target opening is greater than 90°, the opening determination module 15 controls to obtain the second opening difference between 90° and the current opening, and generates a control signal according to the second opening to control the rotation of the butterfly plate 12. Through the above-mentioned setting, it is possible to avoid errors in vacuum adjustment caused by the target opening being too large or too small, thereby improving the accuracy of the intelligent vacuum butterfly valve 100 during adjustment.

[0123] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. A control method for an intelligent vacuum butterfly valve, wherein the intelligent vacuum butterfly valve is applied to a single crystal furnace, and the intelligent vacuum butterfly valve comprises a valve body, a valve stem and a butterfly valve, wherein the valve stem is mounted on the valve body and can drive the butterfly valve to rotate relative to the valve body along its own circumferential direction, and is characterized in that: The control method of the intelligent vacuum butterfly valve comprises: Obtaining the current vacuum degree in the single crystal furnace; Filtering the current vacuum degree based on a filtering algorithm to obtain an input vacuum degree after filtering, determining a vacuum degree ratio according to the input vacuum degree and a preset target vacuum degree, and determining a change in the opening of the butterfly valve based on the vacuum degree ratio; It is determined whether the vacuum ratio is less than or equal to a preset first threshold or greater than or equal to a preset second threshold, and the first threshold is less than the second threshold. If so, a vacuum difference is obtained according to the input vacuum and the preset target vacuum, and a first opening change is determined by a first incremental PID algorithm according to the vacuum difference. The first incremental PID algorithm satisfies the following relationship: ； If not, the second opening change is determined by the second incremental PID algorithm according to the vacuum difference, and it is judged whether the vacuum ratio is less than 1. If so, the third opening change is determined by the third incremental PID algorithm according to the vacuum difference. If not, the fourth opening change is determined by the fourth incremental PID algorithm according to the vacuum difference. Both the third incremental PID algorithm and the fourth incremental PID algorithm satisfy the following relationship: ； In the formula, is the change in opening at time n, is the vacuum degree difference at time k, m is the preset target vacuum degree, , and It is the incremental PID parameter; A control signal representing the change in the opening degree is generated, and the butterfly plate is controlled to rotate according to the control signal.

2. The control method of the intelligent vacuum butterfly valve according to claim 1, characterized in that: The filtering algorithm is a Kalman filtering algorithm.

3. The control method of the intelligent vacuum butterfly valve according to claim 1, characterized in that: The generating of the control signal representing the opening change comprises: Obtaining the current opening of the butterfly plate; Acquire a target opening according to the current opening and the opening change; Determining whether the target opening is greater than a preset first opening threshold and less than a preset second opening threshold; If the target opening is greater than the preset first opening threshold and less than the preset second opening threshold, the control signal is generated according to the opening change.

4. The control method of the intelligent vacuum butterfly valve according to claim 3 is characterized in that: If the target opening is less than or equal to the preset first opening threshold, a first opening difference between the current opening and the preset first opening threshold is obtained, and the control signal is generated according to the first opening difference.

5. The control method of the intelligent vacuum butterfly valve according to claim 4, characterized in that: If the target opening is greater than or equal to the preset second opening threshold, a second opening difference between the preset second opening threshold and the current opening is obtained, and the control signal is generated according to the second opening difference.

6. An intelligent vacuum butterfly valve, applied to a single crystal furnace, characterized in that: The intelligent vacuum butterfly valve comprises: Valve body; a valve stem, the valve stem being mounted on the valve body, and at least a portion of the valve stem being located within the valve body; A butterfly valve, the butterfly valve is connected to the valve stem and is located outside the valve body, and the butterfly valve can rotate relative to the valve body along the circumferential direction of the valve stem under the action of the valve stem; A vacuum degree sampling module, wherein the vacuum degree sampling module is installed in the single crystal furnace and is used to obtain the current vacuum degree in the single crystal furnace; an opening determination module, for determining the opening change of the butterfly valve based on the current vacuum and a preset target vacuum, filtering the current vacuum based on a filtering algorithm to obtain an input vacuum after filtering, determining a vacuum ratio based on the input vacuum and a preset target vacuum, and determining the opening change of the butterfly plate based on the vacuum ratio; It is determined whether the vacuum ratio is less than or equal to a preset first threshold or greater than or equal to a preset second threshold, and the first threshold is less than the second threshold. If so, a vacuum difference is obtained according to the input vacuum and the preset target vacuum, and a first opening change is determined by a first incremental PID algorithm according to the vacuum difference. The first incremental PID algorithm satisfies the following relationship: ； If not, the second opening change is determined by the second incremental PID algorithm according to the vacuum difference, and it is judged whether the vacuum ratio is less than 1. If so, the third opening change is determined by the third incremental PID algorithm according to the vacuum difference. If not, the fourth opening change is determined by the fourth incremental PID algorithm according to the vacuum difference. Both the third incremental PID algorithm and the fourth incremental PID algorithm satisfy the following relationship: ； In the formula, is the change in opening at time n, is the vacuum degree difference at time k, m is the preset target vacuum degree, , and is an incremental PID parameter, and generates a corresponding control signal according to the opening change; The opening adjustment module is used to receive the control signal and drive the valve stem according to the control signal to drive the butterfly valve to rotate.

7. A computing device, characterized in that The computing device comprises a memory and one or more processors; wherein the memory stores computer program code, and the computer program code comprises computer instructions; when the computer instructions are executed by the processor, the method according to any one of claims 1 to 5 is executed.

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