Workpiece conveying device, cylindrical grinding device, and offset correction method

Abstract

A workpiece conveying apparatus includes a clamping mechanism including a pair of claw portions that clamp a workpiece, a steering mechanism configured to rotate the clamping mechanism in a state in which the workpiece is clamped, and an offset correction mechanism configured to correct an offset amount of the workpiece by rotating the clamping mechanism in a state in which the workpiece is clamped. And an X-ray device configured to measure a crystal face orientation of the workpiece sandwiched between a main shaft sleeve and a tail sleeve of the cylindrical grinding device main body in a state where a center axis of the workpiece and a rotation axis of the cylindrical grinding device main body coincide with each other, and outputs a correction value for correcting the offset of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding device main body.

Description

Technical Field

[0001] The invention relates to a workpiece conveying device, an external cylindrical grinding device and an offset correction method. Background Art

[0002] Cylindrical grinding devices for grinding cylindrical workpieces have long existed (for example, see Japanese Unexamined Patent Application Publication No. 2009-190142). Methods for measuring crystal orientation have also long existed (for example, see Japanese Unexamined Patent Application Publication No. 2000-266697).

[0003] In contrast, the present inventors have studied an external cylindrical grinding device that is capable of performing predetermined processing on cylindrical workpieces having various diameters and various lengths (lengths along the center axis direction) so as to meet predetermined processing conditions (for example, grinding the outer peripheral surface of the workpiece and additionally processing the flat surface (OF), V-shaped slits (cuts), etc.). In a factory where the external cylindrical grinding device is installed, cylindrical workpieces having various diameters and various lengths (lengths along the center axis direction) are stored, and therefore, the relevant workpieces taken out from the storage position are clamped between the spindle unit (spindle sleeve) and the tail unit (tail sleeve) of the external cylindrical grinding device as needed, and the clamped workpieces are subjected to predetermined processing to meet the predetermined processing conditions. At this time, the workpiece is preferably clamped between the spindle unit (spindle sleeve) and the tail unit (tail sleeve) in a state where the crystal axis of the workpiece and the rotation axis of the external cylindrical grinding device coincide.

[0004] To this end, it is conventionally practiced to measure the crystal axis of the workpiece by using a crystal orientation measuring device (e.g., SU-021 model manufactured by Toshiba IT & Control Systems Corporation) as an X-ray device, correct the offset between the measured crystal axis and the rotation axis of the cylindrical grinding device, and, after the correction, re-clamp the workpiece between the spindle unit (spindle sleeve) and the tail unit (tail sleeve) of the cylindrical grinding device.

[0005] However, there is a problem in that the measurement of the crystal axis of the workpiece, the correction of the offset and re-clamping must be performed manually, which is labor-intensive. Summary of the invention

[0006] In order to solve this problem, the purpose of the present invention is to provide a workpiece conveying device, an external cylindrical grinding device and an offset correction method. By using the device and method, when the crystal axis of the workpiece and the rotating axis of the external cylindrical grinding device coincide with each other, the workpiece can be automatically clamped between the spindle unit (spindle sleeve) and the tail unit (tail sleeve).

[0007] The technical solution adopted by the present invention to solve its technical problem is: in order to solve this problem, the purpose disclosed by the present invention is to provide a workpiece conveying device, an external cylindrical grinding device and an offset correction method. By using the device and method, when the crystal axis of the workpiece and the rotating axis of the external cylindrical grinding device coincide with each other, the workpiece can be automatically clamped between the spindle unit (spindle sleeve) and the tail unit (tail sleeve).

[0008] The workpiece conveying device disclosed in the present invention is a workpiece conveying device for conveying a columnar workpiece to be processed to a main body of an external cylindrical grinding device, and the workpiece conveying device comprises:

[0009] A clamping mechanism including a pair of claws for clamping a workpiece;

[0010] a steering mechanism configured to rotate the clamping mechanism while the workpiece is clamped; and

[0011] The X-ray device is configured to measure the crystal plane orientation of the workpiece clamped between the main shaft sleeve and the tail sleeve of the cylindrical grinding device body in a state where the central axis of the workpiece and the rotation axis of the cylindrical grinding device body coincide with each other, and output a correction value for correcting the offset of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body,

[0012] When the rotation axis of the cylindrical grinding device body is the X axis, the axis orthogonal to the X axis is the Y axis, and the axis orthogonal to the plane including the X axis and the Y axis is the Z axis.

[0013] In a state where the workpiece is clamped, the steering mechanism rotates the clamping mechanism about a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction, and the rotation angle corresponds to the correction value.

[0014] Through the above configuration, a workpiece conveying device can be provided, by which the workpiece can be automatically clamped between the spindle unit (spindle sleeve) and the tail unit (tail sleeve) when the crystal axis of the workpiece and the rotation axis of the cylindrical grinding device coincide.

[0015] This is because the workpiece conveying device includes a steering mechanism that rotates the clamping mechanism about a θ-axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction) in a state where the workpiece is clamped.

[0016] In the above-mentioned workpiece conveying device, the clamping mechanism includes a claw moving mechanism, which moves a pair of claws in a direction in which the claws approach each other or in a direction in which the claws separate from each other; the claw moving mechanism can clamp the workpiece by moving the pair of claws in the Y-axis direction in a direction in which the claws approach each other and causing the pair of claws to contact the outer peripheral surface of the workpiece.

[0017] In the above workpiece conveying device, the moving mechanism may include:

[0018] A first moving mechanism, configured to move the clamping mechanism along the Z-axis direction;

[0019] A second moving mechanism configured to move the clamping mechanism and the first moving mechanism along the Y-axis direction; and

[0020] The third moving mechanism is configured to move the clamping mechanism, the first moving mechanism and the second moving mechanism along the X-axis direction.

[0021] In the above workpiece conveying device, the moving mechanism may include:

[0022] A first moving mechanism, configured to move the clamping mechanism along the Z-axis direction;

[0023] A second moving mechanism configured to move the clamping mechanism and the first moving mechanism along the X-axis direction; and

[0024] The third moving mechanism is configured to move the clamping mechanism, the first moving mechanism and the second moving mechanism along the Y-axis direction.

[0025] In the above workpiece conveying device, the pair of claws may respectively include a first contact portion that contacts a lower portion of the workpiece when the claws move in a direction in which they approach each other, and a second contact portion that contacts an upper portion of the workpiece when the pair of claws move in a direction in which they approach each other.

[0026] In the above workpiece conveying device, the pair of claw portions may respectively include tapered surfaces opened in a V-shape toward each other, the tapered surfaces serving as the first contact portion and the second contact portion.

[0027] In the above workpiece conveying device, the moving mechanism can move the clamping mechanism when the workpiece is clamped until the center axis of the workpiece and the rotation axis of the cylindrical grinding device body coincide between the main axis and the tail of the cylindrical grinding device body.

[0028] In the above workpiece conveying device, the moving mechanism can further move the clamping mechanism when the workpiece is clamped until one end surface of the workpiece abuts against the main shaft.

[0029] In the above workpiece conveying device, the pair of claws may clamp the center of the workpiece.

[0030] The cylindrical grinding device disclosed in the present invention is a cylindrical grinding device, comprising:

[0031] a cylindrical grinding device body; and

[0032] a workpiece conveying device configured to convey the cylindrical workpiece to be processed to the cylindrical grinding device body;

[0033] The workpiece conveying device comprises:

[0034] A clamping mechanism including a pair of claws for clamping a workpiece;

[0035] a steering mechanism configured to rotate the clamping mechanism while the workpiece is clamped; and

[0036] The X-ray device is configured to measure the crystal plane orientation of the workpiece clamped between the main shaft sleeve and the tail sleeve of the cylindrical grinding device body in a state where the central axis of the workpiece and the rotation axis of the cylindrical grinding device body coincide with each other, and output a correction value for correcting the offset of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body,

[0037] When the rotation axis of the cylindrical grinding device body is the X axis, the axis orthogonal to the X axis is the Y axis, and the axis orthogonal to the plane including the X axis and the Y axis is the Z axis.

[0038] In a state where the workpiece is clamped, the steering mechanism rotates the clamping mechanism about a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction, and the rotation angle corresponds to the correction value.

[0039] Through the above configuration, a workpiece conveying device can be provided, by which the workpiece can be automatically clamped between the spindle unit (spindle sleeve) and the tail unit (tail sleeve) when the crystal axis of the workpiece and the rotation axis of the cylindrical grinding device coincide.

[0040] This is because the workpiece conveying device includes a steering mechanism that rotates the clamping mechanism about a θ-axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction) in a state where the workpiece is clamped.

[0041] The offset correction method disclosed in the present invention is an offset correction method for correcting the offset of a clamped workpiece relative to a rotating axis of a cylindrical grinding device body by using the above-mentioned workpiece conveying device, and the offset correction method comprises:

[0042] a measuring step of measuring the crystal plane orientation of the workpiece clamped and positioned at a reference position, and measuring the workpiece rotated by a predetermined angle from the reference position, and outputting a correction value for correcting the offset of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body, in a state where the spindle sleeve of the cylindrical grinding device body contacts the top end surface of the cylindrical workpiece to be processed and the tail sleeve of the cylindrical grinding device body contacts the bottom end surface of the workpiece; and

[0043] The offset correction step controls the steering mechanism so that the offset is eliminated.

[0044] Through the above configuration, an offset correction method can be provided, by which the workpiece can be automatically clamped between the spindle unit (spindle sleeve) and the tail unit (tail sleeve) when the crystal axis of the workpiece and the rotation axis of the cylindrical grinding device coincide.

[0045] This is because the workpiece conveying device includes a steering mechanism that rotates the clamping mechanism about a θ-axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction) in a state where the workpiece is clamped.

[0046] In the above-described offset correction method, the measuring step and the offset correction step may be repeatedly performed until the offset of the workpiece after the offset correction step is reduced to a set value or less.

[0047] In the above offset correction method,

[0048] The offset amount may be an offset angle of the central axis of the workpiece relative to the rotation axis of the cylindrical grinding device body; and

[0049] In the offset amount correction step, the steering mechanism may be controlled so that the clamping mechanism rotates at the offset angle when the workpiece is clamped.

[0050] The beneficial effects of the present invention are:

[0051] According to the disclosure of the present invention, a workpiece conveying device, an external cylindrical grinding device and an offset correction method can be provided, by which the workpiece can be automatically clamped between a spindle unit (spindle sleeve) and a tail unit (tail sleeve) in a state where the crystal axis of the workpiece and the rotation axis of the external cylindrical grinding device coincide.

[0052] The above and other objects, features and advantages of the present disclosure will be fully understood from the detailed description and drawings given below, which are given as examples only and thus should not be considered as limiting the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 It is a stereoscopic diagram of the cylindrical grinding device;

[0054] Figure 2 It is a three-dimensional image of the workpiece;

[0055] Figure 3 It is a schematic structural diagram of the main body of the cylindrical grinding device;

[0056] Figure 4A 1 is a diagram showing a state where a workpiece is clamped between a main spindle unit (main spindle sleeve) and a tail unit (tail sleeve) (the center axis of the workpiece and the rotation axis coincide with each other);

[0057] Figure 4B1 is a diagram showing a state where a workpiece is clamped between a main spindle unit (main spindle sleeve) and a tail unit (tail sleeve) (the center axis of the workpiece is offset by an angle θ with respect to the rotation axis);

[0058] Figure 5A 1. It is a diagram showing a state where a workpiece is sandwiched between a main shaft sleeve and a tail sleeve in a state where the center axis of the workpiece and the rotation axis coincide with each other;

[0059] Figure 5B Schematic diagram showing a state where the workpiece is clamped between the spindle sleeve and the tail sleeve in a state where the center axis of the workpiece is offset from the rotation axis by an angle θ;

[0060] Figure 5C Schematic diagram showing a state in which a workpiece is clamped between a main shaft sleeve and a tail sleeve in a state in which the center axis of the workpiece is offset from the rotation axis by an angle θ;

[0061] Fig. 6A is a schematic diagram showing a situation where a circular grinding unit performs circular grinding or orientation flat processing on a workpiece;

[0062] Figure 6B is a schematic diagram showing a situation where a cutting unit performs a cutting process on a workpiece;

[0063] Figure 7 is a three-dimensional diagram of a workpiece conveying device;

[0064] Figure 8 Is selected from Figure 7 A three-dimensional view of a first movable frame (including an outer diameter measuring mechanism) and components attached to the first movable frame (a second movable frame, etc.);

[0065] Fig. 9 Is selected from Figure 7 A perspective view of the first movable frame and components attached to the first movable frame (second movable frame, etc.) Figure 8 A stereogram from another angle in the figure);

[0066] Fig.10 Is selected from Figure 7 A three-dimensional diagram of a third movable frame and components (clamping mechanism, etc.) attached to the third movable frame;

[0067] Fig.11 is an example of a steering mechanism (motor for rotation) that rotates the clamping mechanism;

[0068] Fig.12 is a stereogram of the clamping mechanism;

[0069] Fig.13 is a schematic diagram showing a state where a workpiece is clamped by a pair of claws;

[0070] Fig.14 is a perspective view of a sensor attached to the pair of claws;

[0071] Fig.15 is a schematic diagram showing a state where the length of a workpiece is measured by a sensor attached to the pair of claws;

[0072] Fig.16 is a system configuration diagram including the control device;

[0073] Fig.17 is a flow chart of an example of operation of a cylindrical grinding device;

[0074] Fig.18 It is a three-dimensional view of the cylindrical grinding device installed in the factory;

[0075] Fig.19A and 19B is a schematic diagram for explaining the operation of the clamping mechanism;

[0076] Fig. 20A and 20B is a schematic diagram for explaining the operation of the clamping mechanism;

[0077] Fig.21 is a schematic diagram for explaining the operation of the spindle unit and the tail unit;

[0078] Fig.22A and 22B is a schematic diagram for explaining the operation of the spindle unit and the tail unit;

[0079] Fig.23 is a flow chart of the offset measurement process;

[0080] Fig.24A and 24B is a schematic diagram showing a workpiece being rotated 90 degrees at a time;

[0081] Fig.25 The outer diameter measuring mechanism is shown to measure the outer diameter of the bottom end surface;

[0082] Fig.26 It is a summary as Fig.23 a table of measurement values ​​of the workpiece measured as a result of the processing shown;

[0083] Fig. 27 is a flow chart of the offset correction process;

[0084] Fig.28A It is a schematic diagram explaining the moving direction of the movable frame of the cylindrical grinding device;

[0085] Fig.28B is a schematic diagram for explaining the moving direction of the movable frame of the cylindrical grinding device in the modified example;

[0086] Figures 29A to 29C is a schematic diagram for explaining a specific example 1 of the offset correction process;

[0087] Figures 30A to 30D is a schematic diagram for explaining a specific example 2 of the offset correction process;

[0088] Figures 31A to 31C is a schematic diagram for explaining a specific example 3 of the offset correction process;

[0089] Figures 32A to 32D is a schematic diagram for explaining a specific example 4 of the offset correction process;

[0090] Figures 33A to 33E is a schematic diagram for explaining a specific example 5 of the offset correction process;

[0091] Figures 34A to 34E is a schematic diagram for explaining a specific example 6 of the offset correction process;

[0092] Fig.35 is a flow chart of another operation example of the cylindrical grinding device;

[0093] Fig.36 is a perspective view showing a state in which the workpiece is clamped between the spindle sleeve (spindle) and the tail sleeve (tail) in a state in which the center axis of the workpiece and the rotation axis of the cylindrical grinding device body coincide with each other;

[0094] Fig.37 is a flow chart of the planar orientation measurement process;

[0095] Fig.38 is a schematic diagram showing a situation where an X-ray device irradiates a workpiece with X-rays and performs plane orientation measurement;

[0096] Fig.39 is a flow chart of the rotation angle / swing angle correction process;

[0097] Fig.40 : is a schematic diagram showing a situation where an X-ray device irradiates a workpiece with X-rays and performs plane orientation measurement.

[0098] Reference numerals:

[0099] External cylindrical grinding device-1 External cylindrical grinding device body-100

[0100] Workpiece conveying device-200 Control device-300

[0101] Rotation axis-AX 100 Workpiece-W, W W3-W1 , W W2-W4 ;

[0102] Center axis-AX W Top side surface-Wt

[0103] Bottom side surface-Wb operating equipment-400

[0104] Spindle unit-110 Spindle sleeve-111

[0105] Spindle body-112 Spindle motor-113

[0106] Tail unit-120 Tail pipe sleeve-121;

[0107] Tail body-122 Tail motor-123;

[0108] Circular grinding unit-130 Circular grinding stone-131

[0109] Circular grinding motor-133 Cutting unit-140

[0110] Cutting grinding stone-141 Cutting frame-142

[0111] Cutting motor -143 X-ray device -150

[0112] Column-201 First movable frame-220

[0113] Second movable frame -230 Third movable frame -240

[0114] Clamping mechanism-250 First frame-211a, 211b

[0115] The second frame-212a, 212b fixes the frame-210;

[0116] Third frame - 221a, 221b Fourth frame - 222a, 222b

[0117] Guide rails - 223a, 223b, 231a, 231b, 241a, 241b, 275, 253a, 253b

[0118] Ball screw-224, 232 Drive motor-225, 233, 242, 255, 276

[0119] Outer diameter measuring mechanism-270 Lifting frame-271

[0120] Measuring arm - 272a, 272b Probe - 273a, 273b

[0121] Bracket-274 Z-axis bracket base-243

[0122] Buffer shaft bracket base-245 top plate-262

[0123] Claw-251a, 251b Claw moving mechanism-M250

[0124] Frame-252 Movable Frame-254a, 254b

[0125] First contact part-256a Second contact part-256b

[0126] Light emitter-257a Light receiver-257b

[0127] Movable frame moving mechanism-M220, M230, M240

[0128] Steering Motor-260 Pallet Loader-500

[0129] Vertical Line - V1, V2 Automatic Guided Vehicle - AGV1, AGV2

[0130] Pallet - P1, P2, P3, P4, P5 Position - p1, p2

[0131] Angle-θ θ axis-AX θ

[0132] Crystal axis-AXC DETAILED DESCRIPTION

[0133] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0134] Example 1

[0135] Next, a cylindrical grinding device 1 according to a first embodiment of the present invention will be explained with reference to the drawings. In the drawings, corresponding components are denoted by the same reference numerals and symbols, and redundant explanations of these components are omitted.

[0136] <Cylindrical grinding device 1>

[0137] Figure 1 It is a perspective view of the cylindrical grinding device 1 .

[0138] like Figure 1 As shown, the cylindrical grinding device 1 includes a cylindrical grinding device body 100, a workpiece conveying device 200, and a control device 300 for controlling the cylindrical grinding device body 100 and the workpiece conveying device 200. Figure 1 AX 100 The rotation axis AX represents the rotation axis (processing axis) of the cylindrical grinding device body 100. The rotation axis is hereinafter referred to as the rotation axis AX. 100 .

[0139] <Workpiece W>

[0140] First, an example of a configuration of a columnar workpiece W to be processed is explained.

[0141] Figure 2 It is a three-dimensional view of the workpiece W.

[0142] The workpiece W is a single crystal silicon ingot (eg, a cylindrical ground silicon ingot) or a columnar workpiece (also referred to as a block workpiece) obtained by cutting a single crystal silicon ingot. The workpiece W includes a central axis AX perpendicular to the workpiece W. W Note that as the workpiece W, various diameters D and various lengths L (the center axis AX of the workpiece W) can be used. W length in the direction) of the workpiece.

[0143] <Cylindrical Grinding Device Main Body 100>

[0144] Subsequently, a configuration example of the cylindrical grinding device main body 100 is explained.

[0145] Figure 3 2 is a schematic structural diagram of a cylindrical grinding device main body 100 .

[0146] In the following explanation, for ease of explanation, the X, Y, and Z axes are defined as follows Figure 1 The X-axis is parallel to the rotation axis AX of the cylindrical grinding device body 100. 100 The Y axis extends in the same direction as the X axis (horizontal axis). The Y axis extends in a direction perpendicular to the X axis (horizontal axis). The Z axis extends in a direction perpendicular to a plane including the X axis and the Y axis (vertical axis).

[0147] The cylindrical grinding device main body 100 is a well-known cylindrical grinding device that can perform a predetermined process on the workpiece W to meet a predetermined process condition. The process condition is a condition such as the grinding amount of the outer peripheral surface of the workpiece W and whether to perform additional processes such as a flat surface (OF), a V-shaped slit (notch), etc. For example, an operator inputs the process condition through the operation device 400. The predetermined process is, for example, the grinding amount of the outer peripheral surface of the workpiece W and additional processes such as a flat surface (OF), a V-shaped slit (notch), etc.

[0148] like Figure 3 As shown, the cylindrical grinding device body 100 includes a spindle unit 110, a tail unit 120, a cylindrical grinding unit 130, a cutting unit 140, an X-ray device 150, and the like.

[0149] The main shaft unit 110 is installed in a state where the main shaft unit 110 is fixed to the floor surface. On the other hand, the tail unit 120 is installed in a state where the tail unit 120 can move in the X-axis direction.

[0150] Figure 4AThe workpiece W is shown in a state where the workpiece W is clamped between the spindle unit 110 (spindle sleeve 111) and the tail unit 120 (tail sleeve 121) (when the center axis AX of the workpiece W is W and the rotation axis AX 100 overlap). Figure 4B The figure shows a state where the workpiece W is clamped between the spindle unit 110 (spindle sleeve 111) and the tail unit 120 (tail sleeve 121) (the center axis AX of the workpiece W is W Relative to the rotation axis AX 100 offset angle θ).

[0151] like Figure 4A As shown, the workpiece W is clamped between the spindle unit 110 (spindle sleeve 111 ) and the tail unit 120 (tail sleeve 121 ).

[0152] At this time, the spindle sleeve 111 and the rotating shaft rotated by the spindle motor 113 form a spherical matching surface (see Figure 4A ). Therefore, if Figure 4B As shown, even when the center axis AX of the workpiece W is W Relative to the rotation axis AX 100 When the tilt angle θ is reached, the spindle sleeve 111 also rotates following the top end surface Wt of the workpiece W and comes into contact with (adheres to) the top end surface Wt.

[0153] Similarly, the tail sleeve 121 and the rotating shaft rotated by the tail motor 123 form a spherical mating surface (see Figure 4A ). Therefore, if Figure 4B As shown, even when the center axis AX of the workpiece W is W Relative to the rotation axis AX 100 When the angle θ is tilted, the tail sleeve 121 also rotates following the bottom end surface Wb of the workpiece W, and contacts (adheres) to the bottom end surface Wb.

[0154] like Figure 3 As shown, the spindle unit 110 includes a spindle sleeve 111, a spindle body 112, and a spindle motor 113. The spindle sleeve 111 is attached to a spindle body 112 and a spindle motor 113. 100 The spindle motor 113 is a servo motor.

[0155] The tail unit 120 includes a tail sleeve 121, a tail body 122, and a tail motor 123. The tail sleeve 121 is attached to a tail body 122 and is rotated around an axis AX by the tail motor 123. 100 The tail motor 123 is a servo motor. The main shaft motor 113 and the tail motor 123 are controlled to rotate synchronously with each other.

[0156] The workpiece W is ideally centered on the center axis A of the workpiece W.W With rotation axis AX 100 In the overlapped state, it is clamped between the main shaft sleeve 111 and the tail sleeve 121 (see Figure 5A However, sometimes the workpiece W is located at the center axis AX of the workpiece W. W With rotation axis AX 100 In the non-overlapping state, it is clamped between the main shaft sleeve 111 and the tail sleeve 121 (see Figure 5B and Figure 5C ).

[0157] Figure 5A The workpiece W is shown with its central axis AX W and the rotation axis AX 100 The case where the main shaft sleeve 111 and the tail sleeve 121 are sandwiched between them in an overlapped state. Figure 5B Schematic diagram showing a state where the workpiece is clamped between the spindle sleeve and the tail sleeve in a state where the center axis of the workpiece is offset from the rotation axis by an angle θ; Figure 5B Indicates the center point CP (center axis AX) of the workpiece W. W The center point on the rotation axis AX 100 The correction method of the offset angle θ is as follows. Figure 5B The dotted rectangle A1 represents Figure 5A Workpiece W in.

[0158] Similarly, Figure 5C The workpiece W is shown with its central axis AX W Relative to the rotation axis AX 100 The case where the ferrule is sandwiched between the main shaft sleeve 111 and the tail sleeve 121 in a state of being offset by an angle θ. Figure 5C Indicates the center point CP (center axis AX) of the workpiece W. W The center point on the rotation axis AX is not 100 on the Y axis, but from the rotation axis AX in the Y direction 100 The offset angle θ and the offset distance Y are corrected as explained below. Note that Figure 5C The dotted rectangle A2 represents Figure 5B Workpiece W in.

[0159] Note that Figure 5B and 5C In the figure, Δct represents the center of the top end surface Wt and the rotation axis AX. 100 On the other hand, Δcb represents the distance between the center of the bottom end surface Wb and the rotation axis AX. 100 The distance between. ΔY can be calculated by Δct-Δcb. Figure 5BIn the case of W The center point on the rotation axis AX 100 When (i.e., the center point CP of the workpiece W is the true center), there exists a relationship Δct = Δcb. On the other hand, Figure 5C In the case of W The center point on the rotation axis AX is not 100 When , there exists a relationship Δct>Δcb (or Δct<Δcb).

[0160] The circular grinding unit 130 is a device for circular grinding or flattening the workpiece W sandwiched between the spindle sleeve 111 and the tail sleeve 121, and is held by a circular grinding base 132. The circular grinding unit 130 includes a circular grindstone 131 and a circular grinding motor 133 that rotates the circular grindstone 131.

[0161] Fig. 6A 1 is a schematic diagram showing a state where the circular grinding unit 130 performs circular grinding or flat-orientation processing on the workpiece W.

[0162] The circular grinding stone 131 rotated by the circular grinding motor 133 cuts into the rotating workpiece W with the input and instructed grinding amount x1, and circularly grinds the rotating workpiece W (external cylindrical grinding mode). On the other hand, the circular grinding unit 130 cuts into the non-rotating workpiece W with the input and instructed grinding amount x1, and performs orientation plane processing on the non-rotating workpiece W (orientation plane grinding mode).

[0163] The notching unit 140 is a device for notching the workpiece W sandwiched between the spindle sleeve 111 and the tail sleeve 121, and is held by a notching frame 142. The notching unit 140 includes a notching grindstone 141, a notching motor 143 for rotating the notching grindstone 141, and the like.

[0164] Figure 6B 1 is a schematic diagram showing a state where the notching unit 140 performs a notching process on the workpiece W. The notching grindstone 141 rotated by the notching motor 143 cuts the input and instructed grinding amount x2 in the non-rotating workpiece W, and performs an orientation flattening process on the non-rotating workpiece W.

[0165] The X-ray device 150 is a device for measuring the crystal plane orientation of the workpiece W, and is arranged to be movable in the X-axis direction. For example, the X-ray device 150 may use a crystal orientation measuring device (for example, a SU-021 type measuring device manufactured by Toshiba IT & Control Systems Corporation). The crystal orientation measuring device simultaneously measures the axial orientation of the workpiece W before the cutting plane orientation (axial orientation) wafer processing and the crystal orientation of the V-cut.

[0166] <Workpiece Conveying Device 200>

[0167] Subsequently, a configuration example of the workpiece conveying device 200 is explained.

[0168] Figure 7 It is a perspective view of the workpiece conveying device 200 .

[0169] like Figure 7 As shown, the workpiece conveying device 200 includes a fixed frame 210 supported by four columns 201 extending in the Z-axis direction, a first movable frame 220 attached to the fixed frame 210 so as to be movable in the X-axis direction, a second movable frame 230 attached to the first movable frame 220 so as to be movable in the Y-axis direction, a third movable frame 240 attached to the second movable frame 230 so as to be movable in the Z-axis direction, and a clamping mechanism 250.

[0170] <Fixed frame 210>

[0171] The fixed frame 210 is a rectangular frame configured by combining a pair of first frames 211 a and 211 b extending in the X-axis direction and a pair of second frames 212 a and 212 b extending in the Y-axis direction.

[0172] The four columns 201 supporting the fixed frame 210 are fixed to the floor surface by anchors (not shown), respectively. In this state, the length in the Z-axis direction is adjusted by an adjuster (not shown) at the bottom of the column to make the fixed frame 210 horizontal. Note that each column 201 is fixed to the cylindrical grinding device body 100 by a fastening member such as a bolt.

[0173] <First Movable Frame 220>

[0174] like Figure 7 As shown, the first movable frame 220 is a rectangular frame configured by combining a pair of third frames 221a and 221b extending in the X-axis direction and a pair of fourth frames 222a and 222b extending in the Y-axis direction.

[0175] The first movable frame 220 is attached to the fixed frame 210 to be able to slide in the X-axis direction. Specifically, the first movable frame 220 is slidably attached to guide rails 223a and 223b extending in the X-axis direction provided on the upper surface of the fixed frame 210 (first frames 211a and 211b).

[0176] The ball screw 224 extending along the X-axis direction is connected to the first movable frame 220, and is rotated regularly forward and reversely by a driving motor 225 (e.g., a servo motor) fixed on the fixed frame 210 (i.e., the first frame 211a), thereby causing the first movable frame 220 to move in the X-axis direction along the guide rails 223a and 223b.

[0177] The movable frame moving mechanism M220 is mainly composed of guide rails 223a and 223b, a ball screw 224, and a driving motor 225, and moves the first movable frame 220 along the X-axis direction. The movable frame moving mechanism M220 is an example of the first moving mechanism disclosed in the present invention.

[0178] <Outer diameter measuring mechanism 270>

[0179] Figure 8 Is selected from Figure 7 2 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) and components attached to the first movable frame 220 (the second movable frame 230, etc.).

[0180] like Figure 8 As shown, the outer diameter measuring mechanism 270 is provided in the first movable frame 220 (fourth frame 222a).

[0181] The outer diameter measuring mechanism 270 is a device that measures the outer diameter (the outer diameter of each of the top side end surface Wt and the bottom side end surface Wb) of the workpiece W sandwiched between the spindle sleeve 111 and the tail sleeve 121 .

[0182] The outer diameter measuring mechanism 270 includes an elevating frame 271, measuring arms 272a and 272b, probes 273a and 273b, and a bracket 274 on which the elevating frame 271, the measuring arms 272a and 272b, and the probes 273a and 273b are mounted.

[0183] The bracket 274 is slidably attached to a guide rail 275 extending in the Z-axis direction provided on the side of the first movable frame 220 (fourth frame 222 a ).

[0184] A ball screw (not shown) connected to the outer diameter measuring mechanism 270 and extending in the Z-axis direction is regularly rotated forward and reversely by a drive motor 276 (e.g., a servo motor) attached to the side of the first movable frame 220 (third frame 221a), thereby moving (lifting and lowering) the outer diameter measuring mechanism 270 (including probes 273a and 273b, etc.) in the Z-axis direction along the guide rail 275.

[0185] Although not shown, the outer diameter measuring mechanism 270 includes a first probe moving mechanism that moves one measuring arm 272a (and the probe 273a) in the Y-axis direction and a second probe moving mechanism that moves the other measuring arm 272b (and the probe 273b) in the Y-axis direction. The first probe moving mechanism and the second probe moving mechanism include probe drive motors (e.g., servo motors), respectively. Each probe drive motor is controlled, whereby each probe 273a and 273b moves individually in the Y-axis direction.

[0186] By using the outer diameter measuring mechanism 270, each of the probes 273a and 273b moves in the Y-axis direction and contacts the outer peripheral surface of the workpiece W, so that the position (position data) of each contact point can be acquired. The control device 300 performs a predetermined arithmetic operation based on the position (position data), so that the outer diameter of the workpiece W sandwiched between the main shaft sleeve 111 and the tail sleeve 121 (the outer diameter of each of the top side end surface Wt and the bottom side end surface Wb of the workpiece W) can be measured (calculated).

[0187] <Second Movable Frame 230>

[0188] Fig. 9 Is selected from Figure 7 A perspective view of the first movable frame 220 and components (the second movable frame 230, etc.) attached to the first movable frame 220 (with Figure 8 (3D images from different angles).

[0189] like Fig. 9 As shown, the second movable frame 230 is a rectangular tubular frame extending in the Z-axis direction.

[0190] The second movable frame 230 is attached to the first movable frame 220 so as to be able to slide in the Y-axis direction. Specifically, the second movable frame 230 is slidably attached to guide rails 231a and 231b extending in the Y-axis direction provided on the upper surface of the first movable frame 220 (fourth frames 222a and 222b).

[0191] The ball screw 232 extending along the Y-axis direction and connected to the second movable frame 230 is regularly rotated forward and reversely by a driving motor 233 (e.g., a servo motor) attached to the first movable frame 220 (fourth frame 222b), thereby moving the second movable frame 230 in the Y-axis direction along the guide rails 231a and 231b.

[0192] The movable frame moving mechanism M230 is mainly composed of guide rails 231a and 223b, a ball screw 232, and a driving motor 233, and moves the second movable frame 230 in the Y-axis direction. The movable frame moving mechanism M230 is an example of the second moving mechanism disclosed in the present invention.

[0193] <Third Movable Frame 240>

[0194] Fig.10 Is selected from Figure 7 A three-dimensional view of the third movable frame 240 and components (clamping mechanism 250, etc.) attached to the third movable frame 240.

[0195] The third movable frame 240 is a rectangular tubular frame extending in the Z-axis direction, and is disposed in the second movable frame 230 , which is also a rectangular tubular frame extending in the Z-axis direction.

[0196] The third movable frame 240 is attached to the second movable frame 230 so as to be able to slide in the Z-axis direction. Specifically, the third movable frame 240 is slidably attached to guide rails 241a and 241b extending in the Z-axis direction on one inner surface of the second movable frame 230 (see FIG. Fig.10 ) and a guide rail (not shown) attached to another inner surface.

[0197] A ball screw (not shown) connected to the third movable frame 240 and extending in the Z-axis direction is regularly rotated forward and reversely by a drive motor 242 (e.g., a servo motor) attached to the second movable frame 230, thereby causing the third movable frame 240 (and the clamping mechanism 250 attached to the third movable frame 240) to move in the Z-axis direction along the guide rails 241a and 241b, etc.

[0198] The movable frame moving mechanism M240 is mainly composed of guide rails 241a and 241b, a ball screw (not shown), and a drive motor 242, and moves the third movable frame 240 (and the clamping mechanism 250 attached to the third movable frame 240) in the Z-axis direction. The movable frame moving mechanism M240 is an example of the third moving mechanism disclosed in the present invention.

[0199] <Clamping Mechanism 250>

[0200] like Fig.10As shown, the clamping mechanism 250 is attached to the lower end portion of the third movable frame 240 via a steering mechanism (steering motor 260).

[0201] The clamping mechanism 250 is attached to the buffer shaft support base 245 so as to be able to clamp the buffer shaft support base 245 about the θ axis AX. θ Rotation (see Fig.11 ). As described below, the θ axis AX θ The center (center axis AX) of the workpiece W clamped by the clamping mechanism 250 is W and extends in the Z-axis direction. Fig.11 It is an example of a steering mechanism (steering motor 260 ) that rotates the clamp mechanism 250 .

[0202] Specifically, the clamping mechanism 250 is installed in the following state: the rotating shaft of the steering motor 260 (for example, a hollow shaft motor) fixed to the top plate 262 of the clamping mechanism 250 is fixed to the buffer shaft support base 245. Therefore, the steering motor 260 fixed to the top plate 262 rotates forward and reverse regularly, so that the clamping mechanism 250 rotates around the θ axis AX relative to the buffer shaft support base 245. θ Rotate a predetermined angle (for example, angle θ, see Figure 5B and 5C ). The steering motor 260 is an example of the steering mechanism disclosed in the present invention. Note that other drive mechanisms such as a worm gear, a gear, and a universal motor may be used instead of the steering motor 260 (eg, a hollow shaft motor) as the steering mechanism.

[0203] As described above, the buffer shaft support base 245 connected with the clamping mechanism 250 is connected to the Z-axis support base 243 so as to be able to slide in the X-axis direction. Specifically, the slide rail 244 extending in the X-axis direction provided on the upper surface of the buffer shaft support base 245 is slidably engaged with the lower surface of the Z-axis support base 243 fixed to the third movable frame 240. Therefore, as described below, when the workpiece W (top side end surface Wt) clamped by the clamping mechanism 250 (a pair of claws 251a and 251b) is pressed against the spindle sleeve 111, the buffer shaft support base 245 (and the clamping mechanism 250 attached to the buffer shaft support base 245) slides in the X-axis direction relative to the Z-axis support base 243. Therefore, when the workpiece W (top side end surface Wt) clamped by the clamping mechanism 250 (a pair of claws 251a and 251b) is pressed against the spindle sleeve 111, it is possible to prevent excessive force from being applied to the clamping mechanism 250.

[0204] Fig.12 is a perspective view of the clamping mechanism 250 .

[0205] like Fig.12As shown, the clamp mechanism 250 includes a pair of claws 251a and 251b that clamp the workpiece W, and a claw moving mechanism M250 that moves the claws 251a and 251b in a direction in which the claws 251a and 251b approach each other or in a direction in which the claws 251a and 251b separate from each other.

[0206] One claw 251a is attached to the lower end of the third movable frame 240 so as to be able to slide in the Y-axis direction. Specifically, one claw 251a is fixed to the lower surface of a movable frame 254a, and the movable frame 254a is slidably attached to guide rails 253a and 253b extending in the Y-axis direction and provided on the lower surface of the frame 252 fixed to the lower end of the third movable frame 240.

[0207] Similarly, another claw 251b is also attached to the lower end of the third movable frame 240 so as to be able to slide in the Y-axis direction. Specifically, the other claw 251b is fixed to the lower surface of another movable frame 254b, which is slidably attached to guide rails 253a and 253b extending in the Y-axis direction and provided on the lower surface of the frame 252 fixed to the lower end of the third movable frame 240.

[0208] A pair of claws 251a and 251b are fixed to the movable frames 254a and 254b, and a left and right coaxial ball screw (not shown) extending in the Y-axis direction is regularly rotated by a drive motor 255 mounted on the frame 252, so that the pair of claws 251a and 251b move along the guide rails 253a and 253b together with the movable frames 254a and 254b in the direction (Y-axis direction) in which the pair of claws 251a and 251b approach each other. The drive motor 255 reversely rotates the left and right coaxial ball screw (not shown) connected to the movable frames 254a and 254b to which the pair of claws 251a and 251b are fixed, thereby moving the pair of claws 251a and 251b together with the movable frames 254a and 254b along the guide rails 253a and 253b in the direction (Y-axis direction) in which the pair of claws 251a and 251b are separated from each other.

[0209] The claw moving mechanism M250 is mainly composed of guide rails 253a and 253b, left and right coaxial ball screws (not shown) and a drive motor 255. The claw moving mechanism M250 moves a pair of claws 251a and 251b in a direction in which the pair of claws 251a and 251b approach each other or in a direction in which the pair of claws 251a and 251b separate from each other.

[0210] Fig.13 251a and 251b are schematic diagrams showing a state where the workpiece W is clamped by a pair of claws 251a and 251b.

[0211] like Fig.13 As shown, the pair of claws 251a and 251b respectively include a first contact portion 256a that contacts the lower portion of the workpiece W and a second contact portion 256b that contacts the upper portion of the workpiece W. Specifically, the pair of claws 251a and 251b respectively include tapered surfaces that open toward each other in a V shape (the cross-sectional shape taken along the YZ plane is V-shaped). The tapered surfaces serve as the first contact portion 256a and the second contact portion 256b. In the following explanation, the first contact portion 256a and the second contact portion 256b are also referred to as tapered surfaces 256a and 256b.

[0212] The pair of claws 251a and 251b are respectively made of synthetic resin or metal, and the tapered surfaces 256a and 256b are covered with synthetic resin. Note that when the workpiece W is a columnar workpiece other than a silicon ingot, the pair of claws 251a and 251b may be made of metal, and the tapered surfaces 256a and 256b are not covered with synthetic resin.

[0213] The pair of claws 251a and 251b move in a direction approaching each other, and clamp the workpiece W in a state where the tapered surfaces 256a and 256b are in contact with the outer peripheral surface of the workpiece W, respectively (see FIG. Fig.13 ).

[0214] The pair of claws 251a and 251b allows the workpiece W to be positioned along the center axis AX of the workpiece W regardless of the diameter of the workpiece W. W The two components are clamped while being located at the same position.

[0215] Fig.14 is a perspective view of a sensor attached to the pair of claws.

[0216] For measuring the length L of workpiece W (see Figure 2 ) is attached to the pair of claws 251a and 251b. Fig.14 As shown, the sensor includes a light projector 257a attached to the lower portion of one claw 251a and a light receiver 257b attached to the lower portion of the other claw 251b. Note that conversely, the light projector 257a may be attached to the lower portion of the other claw 251b, and the light receiver 257b may be attached to the lower portion of one claw 251a.

[0217] Fig.15 251 a and 251 b are schematic diagrams showing a state in which the length L of the workpiece W is measured by the sensor attached to the pair of claws 251 a and 251 b .

[0218] With this sensor, the length L of a workpiece W can be measured, for example Fig.15As shown, the clamping mechanism 250 (light projector 257a and light receiver 257b) is moved above the workpiece W in the direction of the thick arrow (X-axis direction), and the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200) where the workpiece W blocks the light from the light projector 257a received by the light receiver 257b is calculated respectively (see Fig.14 ), and the light receiver 257b receives the light from the light projector 257a (see Fig.14 )’s position p2 (the coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200).

[0219] <Control device 300>

[0220] Subsequently, the control device 300 is explained.

[0221] Fig.16 3 is a system configuration diagram including the control device 300 .

[0222] Although not shown in the figure, the control device 300 includes a processor, a random access memory (RAM), and a read-only memory (ROM). Fig.16 As shown, a driving motor 225 of a movable frame moving mechanism M220 configured to move the first movable frame 220 in the X-axis direction, a driving motor 233 of a movable frame moving mechanism M230 configured to move the second movable frame 230 in the Y-axis direction, a driving motor 242 of a movable frame moving mechanism M240 configured to move the third movable frame 240 (and the clamping mechanism 250 attached to the third movable frame 240) in the Z-axis direction, and a claw moving mechanism M240 configured to move the claws 251a and 251b in a direction approaching each other or in a direction separating from each other. The driving motor 255 of 250, the steering motor 260 for rotating the clamping mechanism 250, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the circular grinding unit 130 (circular grinding motor 133), the incision unit 140 (incision motor 143) and the X-ray device 150; the steering motor 260, the outer diameter measuring mechanism 270 (driving motor 276 and probe driving motor), the operating device 400, the pallet loader 500, and the sensor (projector 257a and light receiver 257b) are all electrically connected to the control device 300.

[0223] For example, the processor is a CPU. In some cases, there is one processor, and in other cases, there are multiple processors. For example, the processor executes a program read from the read-only memory into the random access memory to serve as a control method for controlling the drive motors 225, 233, 242 and 255, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the circular grinding unit 130 (circular grinding motor 133), the incision unit 140 (incision motor 143), the X-ray device 150, the steering motor 260, the outer diameter measuring mechanism 270 (drive motor 276 and probe drive motor), etc.

[0224] Subsequently, an operation example of the cylindrical grinding device 1 having the above-described configuration is explained.

[0225] Fig.17 1 is a flowchart of another operation example of the cylindrical grinding device 1 . Fig.18 It is a perspective view of the cylindrical grinding device 1 installed in a factory. Figures 19A to 20B is a schematic diagram for explaining the operation of the clamping mechanism 250 . Fig.21 22A and 22B are schematic diagrams for explaining the operations of the main shaft unit 110 and the tail unit 120.

[0226] exist Fig.18 In the drawings, reference numerals AGV1 and AGV2 denote automatic guided vehicles. Reference numeral 500 denotes a pallet loader. In the following explanation, the automatic guided vehicle and the pallet loader are referred to as the automatic guided vehicles AGV1 and AGV2 and the pallet loader 500.

[0227] The automatic guided vehicle AGV1 will place the workpiece W to be processed ( Fig.18 A pallet P1 containing workpieces W1 in the center of the cylindrical grinding machine 1 is transported from a predetermined location in the factory where cylindrical workpieces having various diameters and various lengths (lengths in the direction of the central axis) are stored to a pallet loader 500 installed near the cylindrical grinding machine 1, and the workpieces W and the pallet P1 ( Fig.18 The workpiece W2 and the pallet P2) are transported together to the pallet loader 500.

[0228] The pallet loader 500 transports the pallet P2 transported from the automated guided vehicle AGV1 to a predetermined standby position ( Fig.18 The workpiece W3 and the pallet P3 in the standby position. Fig.18 The center axis AX of the workpiece W3) W Extends in the X-axis direction.

[0229] Reference Fig.17 etc. explain an operation example of the cylindrical grinding device 1 installed in a factory.

[0230] First, the control device 300 obtains information about the workpiece W to be processed (step S10). For example, the information about the workpiece W to be processed is the diameter D of the workpiece W to be processed (see Figure 2 ), which is affixed as a barcode on a predetermined portion of the pallet. When the pallet P1 is delivered to the pallet loader 500, information (barcode) on the workpiece W to be processed is read by a barcode reading device (not shown) attached to a predetermined portion of the pallet loader 500. The control device 300 acquires the read information on the workpiece W to be processed. Note that the control device 300 sometimes acquires information on the workpiece W to be processed transmitted from another device.

[0231] Subsequently, the control device 300 acquires the processing conditions of the workpiece W to be processed (for example, the grinding amount of the outer peripheral surface of the workpiece W and whether to perform additional processing such as a flat surface (OF), a V-shaped slit (notch), etc.) (step S11). For example, the operator inputs the processing conditions through the operating device 400. The control device 300 acquires the input processing conditions. Note that the control device 300 sometimes acquires processing conditions sent from another device.

[0232] Then, the control device 300 measures the length L of the workpiece W (see Figure 2 )(Step S11A). For example, Fig.15 As shown in FIG. 1 , the control device 300 moves the clamping mechanism 250 (light projector 257a and light receiver 257b) above the workpiece W in the direction of the thick arrow (X-axis direction). Accordingly, the control device 300 calculates the workpiece W ( Fig.18 The position p1 (see FIG. 1 ) where the workpiece W3 in FIG. 1 blocks the light from the projector 257a received by the light receiver 257b. Fig.14 ), and the light receiver 257b receives the light from the light projector 257a (see Fig.14 ) (the coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200). This is achieved by the control device 300 (processor) executing the program read from the read-only memory to the random access memory.

[0233] Then, if Fig.19A and 19B As shown, the clamping mechanism 250 moves to the workpiece W ( Fig.18 Above the workpiece W3) (step S12).

[0234] Specifically, the control device 300 moves the clamping mechanism 250 until Fig.19A As shown, in the Y-axis direction, the center Pa between one claw portion 251a and the other claw portion 251b is aligned with the center axis AX passing through the workpiece W. W The vertical line V1 of Fig.19BAs shown, in the X-axis direction, the center Pb of the pair of claws 251a and 251b coincides with a vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be processed automatically measured in step S11A). This is achieved by the control device 300 that controls the drive motors (servomotors) 225, 233, and 242.

[0235] Then, if Fig. 20A As shown, in the Z-axis direction, the control device 300 moves (lowers) the clamping mechanism 250 until the center Pa between one claw portion 251a and the other claw portion 251b is aligned with the center axis AX of the workpiece W. W Overlap (step S13). This is achieved by the control device 300 controlling the drive motor 242. The moving distance d (the descending distance; see Fig. 20A ) can be calculated based on the diameter D of the workpiece W to be processed obtained in step S10, etc.

[0236] Then, if Fig. 20B As shown, the control device 300 clamps the workpiece W by moving the pair of claws 251a and 251b in the Y-axis direction in a direction in which the pair of claws 251a and 251b approach each other and bringing the pair of claws (the tapered surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W (step S14). This is achieved by the control device 300 controlling the drive motor (servo motor) 255.

[0237] Subsequently, the control device 300 conveys the workpiece W clamped as described above to the cylindrical grinding device main body 100 (between the spindle sleeve 111 and the tail sleeve 121) (step S15).

[0238] At this time, in the cylindrical grinding device 1, for example, before the process of step S10, the standard workpiece (not shown) is set to be subjected to the same process as steps S12 to S15 to move the clamping mechanism 250 with the standard workpiece clamped so that the center axis AX of the standard workpiece is MW and the rotation axis AX of the cylindrical grinding device body 100 100 It overlaps between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100.

[0239] To this end, in step S15, Fig.21 As shown, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the center axis AX of the set standard workpiece MW and the rotation axis AX of the cylindrical grinding device body 100 100The outer cylindrical grinding device body 100 overlaps between the main shaft sleeve 111 and the tail sleeve 121. This is achieved by the control device 300 that controls the drive motors (servomotors) 225, 233 and 242. Fig. 22B As shown, the control device 300 is set on the central axis AX of the standard workpiece MW The rotation axis AX of the cylindrical grinding device main body 100 is 100 In the overlapped state, the workpiece W is sandwiched between the main spindle 101 (main spindle sleeve 111) and the tail section 102 (tail section sleeve 121) (step S16).

[0240] Specifically, first, Fig.22A As shown, the control device 300 moves the clamping mechanism 250 in the X-axis direction when the workpiece W is clamped until the top end surface Wt of the workpiece W abuts against the spindle sleeve 111 . This is achieved by the control device 300 controlling the drive motor (servomotor) 225 .

[0241] Then, if Fig. 22B As shown, the control device 300 moves the tail unit 120 in the X-axis direction so that the tail sleeve 121 abuts against the bottom side end surface Wb of the workpiece W and presses the bottom side end surface Wb with a sufficient force relative to the weight of the workpiece and the external force of the process. This is achieved by the control device 300 controlling the tail motor 123. At this time, the control device 300 measures (calculates) the length L of the workpiece W based on the position of the time point when the tail sleeve 121 contacts the bottom side end surface Wb of the workpiece W. The length L of the workpiece W measured here is more accurate than the length L of the workpiece W measured in step S11A. In the following explanation, the accurately measured length L is used as the length L of the workpiece W.

[0242] Then, the control device 300 releases the workpiece W from the claws 251 a and 251 b (step S17 ). This is achieved by the control device 300 controlling the drive motor (servo motor) 255 .

[0243] Subsequently, the control device 300 performs an offset measurement process (step S17A).

[0244] Fig.23 is a flowchart of the offset measurement process.

[0245] The offset measurement process is used to measure (calculate) the offset (offset angle θ and offset distance ΔY; see Figure 5B and 5C ), relative to the rotation axis AX of the cylindrical grinding device body 100 100 location.

[0246] The offset measurement process is performed n times on the workpiece W (steps S17A1 to S17A3). In the following explanation, the case where n is 2 is explained as an example. For example, the operator inputs n (the number of measurements) via the operating device 400. The number n is input at any time before the offset measurement process is performed. Note that n previously input and stored in a predetermined storage unit can be used. Note that n only needs to be an integer equal to or greater than 2. That is, the minimum value of n is 2. In consideration of practicality, the maximum value of n is about 16.

[0247] When n is 2, Fig.24A The workpiece W (hereinafter referred to as workpiece W) in the state shown (hereinafter also referred to as the origin state or origin position) is W3-W1 ) and the workpiece W rotated 180 degrees / n (here 90 degrees) counterclockwise from the origin state (see Fig. 24B , hereinafter referred to as workpiece W W2-W4 ) respectively execute the offset measurement processing (steps S17A1 to S17A3) (executed twice in total).

[0248] First, the control device 300 positions the workpiece W in the origin state. W3-W1 Execute the processing of step S17A1 and subsequent steps (see Fig.24A ).

[0249] Specifically, the control device 300 lowers the outer diameter measuring mechanism 270 in the Z-axis direction until the center between one probe 273a and the other probe 273b is aligned with the rotation axis AX. 100 Overlap, close to workpiece W W3-W1 Subsequently, the control device 300 moves the measuring arms 272a and 272b in the direction in which the measuring arms 272a and 272b approach each other (the Y-axis direction). The control device 300 thereby makes the probes 273a and 273b contact the workpiece Wt. W3-W1 The control device 300 thus obtains the position (position data) of each contact point. The control device 300 calculates the position (position data) of the workpiece W based on the position (position data). W3-W1 The center position of the top end surface Wt and the center position and the rotation axis AX 100 The distance between them is Δct.

[0250] Subsequently, the control device 300 measures the outer diameter of the bottom side end surface Wb (step S17A2 ). Fig.25 FIG. 2 shows a case where the outer diameter measuring mechanism 270 measures the outer diameter of the bottom end surface Wb. Fig.25In the figure, for the convenience of explanation, the workpiece W is drawn in an unclamped state. However, in reality, the outer diameter measuring mechanism 270 measures the workpiece W in a state where the spindle sleeve 111 contacts the top end surface Wt and the tail sleeve 121 contacts the bottom end surface Wb (i.e., a clamped state). W3-W1 The outer diameter of the top end surface Wt and the outer diameter of the bottom end surface Wb.

[0251] Specifically, in the Z-axis direction, the control device 300 lowers the outer diameter measuring mechanism 270 until the center between one probe 273a and the other probe 273b is aligned with the workpiece W. W3-W1 The rotation axis AX near the bottom end surface Wb 100 Until overlap (see Fig.25 ). Then, the control device 300 moves the measuring arms 272a and 272b in the direction (Y-axis direction) in which the measuring arms 272a and 272b approach each other (see Fig.25 The control device 300 thus makes the probes 273a and 273b contact the workpiece W. W3-W1 The control device 300 thus obtains the position (position data) of each contact point. The control device 300 calculates the position (position data) of the workpiece W based on the position (position data). W3-W1 The center position of the bottom end surface Wb and the distance Δcb between the center position and the rotation axis AX100.

[0252] Subsequently, the control device 300 calculates the offset amount based on the measured value (position data) (step S17A3). Specifically, the control device 300 calculates the offset angle θ and the offset distance Y as the offset amount (see Figure 5B and 5C ).

[0253] The offset angle θ is the center axis AX of the workpiece W. W Relative to the rotation axis AX 100 The deviation angle (see Figure 5B and 5C ). ΔY is the center point CP of the workpiece W (center axis AX W center point on the axis of rotation AX 100 The distance between Figure 5C ).

[0254] The calculation method of the offset angle θ is as follows.

[0255] like Figure 5A As shown, at the center axis AX of the workpiece W W and the rotation axis AX 100 In the case of overlap, the relationship is Δct=Δcb=0.

[0256] On the other hand, Figure 5BAs shown, at the center axis AX of the workpiece W W Relative to the rotation axis AX 100 When the tilt angle θ is reached (the center point CP is located on the rotation axis AX), 100 ), the relationship is Δct=Δcb≠0. In this case, the offset angle θ can be calculated by the following expression 1.

[0257]

[0258] like Figure 5C As shown, at the center axis AX of the workpiece W W Relative to the rotation axis AX 100 When the center point CP is not on the rotation axis AX, the 100 ), the relationship is Δct>Δcb (or Δct<Δcb). In this case as well, the deviation angle θ can be calculated in the above manner.

[0259] Subsequently, the control device 300 determines whether steps S17A1 to S17A3 have been executed n times (here, n=2) (step S17A4). When steps S17A1 to S17A3 have not been executed n times (step S17A4: No), the control device 300 rotates the workpiece W by 180 degrees / n (here, 90 degrees) (S17A5), and performs the workpiece W in the same manner as described above. W2-W4 Execute steps S17A1 to S17A3 (see Fig. 24B )(Steps S17A1 to S17A3 are executed for the second time).

[0260] When steps S17A1 to S17A3 have been executed n times (here, n=2) (step S17A4: Yes), the control device 300 ends. Fig.23 Processing shown.

[0261] Fig.26 It is a summary as Fig.23 The workpiece W is measured as a result of the processing shown in FIG. W3-W1 and W W2-W4 A table of measured values ​​Δct, Δcb, θ and θY (stored in a predetermined storage unit) is provided. Fig.26 In the measurement, the value Δct W3-W1 , Δcb W3-W1 ,θ W3-W1 and ΔY W3-W1 Indicates that by measuring the workpiece W W3-W1 The measured value obtained is similarly W2-W4 , Δcb W2-W4 ,θ W2-W4 and ΔY W2-W4 Indicates that by measuring the workpiece W W2-W4The measured values ​​obtained.

[0262] Then, return to reference Fig.17 , the control device 300 determines whether the offset amount measured in step S17A is ≤ a set value (predetermined threshold value) (step S17B).

[0263] When the determination result in step S17B is NO, the control device 300 performs an offset correction process (step S17C).

[0264] Fig. 27 is a flowchart of the offset correction process.

[0265] The offset correction process is used to correct the offset (offset angle θ and offset distance ΔY; see Figure 5B and 5C ), relative to the rotation axis AX of the cylindrical grinding device body 100 measured in step S17A 100 .

[0266] Specific examples 1 to 6 of the offset correction process will be explained below.

[0267] <Specific Example 1>

[0268] Figures 29A to 29C : is a schematic diagram for explaining a specific example 1 of the offset correction process.

[0269] In specific example 1, Fig.29A As shown in FIG. 1 , the workpiece W that needs to be subjected to the offset measurement process (step S17A) and the offset correction process (step S17C) is sandwiched between the main shaft sleeve 111 and the tail sleeve 121. At this time, when viewed from the direction of arrow Ar1 (see FIG. 1 ), Fig.29B ), the center of the workpiece W is relative to the rotation axis AX 100 Deviation angle θ(θ W3-W1 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX 100 superior.

[0270] On the other hand, when viewed from the direction of arrow Ar2 (see Fig.29B ), the center axis AX of the workpiece W W and the rotation axis AX 100 coincide.

[0271] As a result of performing the offset measurement process (step S17A) on the workpiece W clamped as described above, Fig.29C The measurements shown. Fig.29C The circle surrounds the measured value θ W3-W1 Represents a value other than zero.

[0272] First, the control device 300 moves the pair of claws 251a and 251b in the Y-axis direction in a direction in which the pair of claws 251a and 251b approach each other and brings the pair of claws (the tapered surfaces 256a and 256b thereof) into contact with the workpiece W. W3-W1 The outer peripheral surface of the workpiece W is contacted to clamp the workpiece W3-W1 (See Fig.29A and 29B ) (Step S17C1). The clamping mechanism 250 (a pair of claws 251a and 251b) clamps the workpiece W in this manner. W3-W1 In the state, the θ axis AX θ The workpiece W is clamped by the clamping mechanism 250. W3-W1 Center (central axis AX W center on the top) and extends in the Z-axis direction.

[0273] Then, the control device 300 releases the workpiece W on the main shaft sleeve 111 and the tail sleeve 121. W3-W1 (Step S17C2).

[0274] Then, the control device 300 performs reloading (step S17C3). W3-W1 Clamped around the θ axis AX θ With an offset angle θ(θ W3-W1 ) rotates the clamping mechanism 250 so that the Fig.29C The circle encloses the offset angle θ(θ W3-W1 ) is eliminated. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the angle θ (θ W3-W1 ) is corrected.

[0275] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W3-W1 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W3-W1 ) The center axis AX of the workpiece W after correction W and the rotation axis AX of the cylindrical grinding device body 100 100 The workpiece W is overlapped between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W3-W1 ) Corrected center axis AX W The rotation axis AX of the cylindrical grinding device body 100 is 100 In the overlapped state, the control device 300 clamps the moved workpiece W between the main spindle 101 (spindle sleeve 111 ) and the tail stock 102 (tail sleeve 121 ).

[0276] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W3-W1 (Step S17C5).

[0277] Then, return to reference Fig.17 , the control device 300 executes the processing in steps S17A and S17B again.

[0278] When the determination result in step S17B is "Yes", that is, when the workpiece W is W3-W1 When the offset measured again is less than or equal to the set value, this means that the center axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device body 100 100 Coincident (substantially coincident), the control device 300 executes the processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes Yes.

[0279] <Specific Example 2>

[0280] Figures 30A to 30D : is a schematic diagram for explaining a specific example 2 of the offset correction process.

[0281] In specific example 2, if Fig. 30A As shown, the workpiece W that needs to be subjected to the offset measurement process (step S17A) and the offset correction process (step S17C) is sandwiched between the main shaft sleeve 111 and the tail sleeve 121. At this time, when viewed from the direction of arrow Ar1 (see Fig. 30B ), the center axis AX of the workpiece W W and the rotation axis AX 100 coincide.

[0282] On the other hand, when viewed from the direction of arrow Ar2 (see Fig. 30B ), the center axis AX of the workpiece W W Relative to the rotation axis AX 100 Deviation angle θ(θ W2-W4 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX 100 superior.

[0283] As a result of performing the offset measurement process (step S17A) on the workpiece W clamped as described above, Fig. 30C The measurements shown. Fig. 30C The circle surrounds the measured value θ W2-W4 Represents a value other than zero.

[0284] First, the control device 300 places the workpiece W W3-W1 Rotate 180 degrees / n (here, 90 degrees) counterclockwise from the origin state (see Fig. 30B ), and the workpiece W W3-W1 Change to Fig.30D The workpiece W shown W2-W4 This is achieved by controlling the control device 300 of the spindle motor 113 and the tail motor 123.

[0285] Subsequently, the control device 300 moves the pair of claws 251a and 251b in the direction in which the pair of claws 251a and 251b approach each other in the Y-axis direction and brings the pair of claws 251a and 251b (the tapered surfaces 256a and 256b thereof) into contact with the workpiece W. W2-W4 The outer peripheral surface of the workpiece W is contacted to clamp the workpiece W2-W4 (See Fig.30D ) (Step S17C1). The clamping mechanism 250 (the pair of claws 251a and 251b) clamps the workpiece W in this manner. W2-W4 In the state, the θ axis AX θ The workpiece W is clamped by the clamping mechanism 250. W2-W4 Center (central axis AX W The center of the body is on the top of the figure), and extends in the Z-axis direction.

[0286] Then, the control device 300 releases the workpiece W on the main shaft sleeve 111 and the tail sleeve 121. W2-W4 (Step S17C2).

[0287] Then, the control device 300 performs reloading (step S17C3). W2-W4 When clamped, the θ With an offset angle θ(θ W2-W4 ) rotates the clamping mechanism 250 so that the Fig. 30C The circle encloses the offset angle θ(θ W2-W4 ) is eliminated. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the angle θ (θ W2-W4 ) is corrected.

[0288] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W2-W4 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W2-W4 ) The center axis AX of the workpiece W after correction Wand the rotation axis AX of the cylindrical grinding device body 100 100 The workpiece W is overlapped between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W2-W4 ) Corrected center axis AX W The rotation axis AX of the cylindrical grinding device body 100 is 100 In the overlapped state, the control device 300 clamps the moved workpiece W between the main spindle 101 (spindle sleeve 111 ) and the tail stock 102 (tail sleeve 121 ).

[0289] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W2-W4 (Step S17C5).

[0290] Then, return to reference Fig.17 , the control device 300 executes the processing in steps S17A and S17B again.

[0291] When the determination result in step S17B is "Yes", that is, when the workpiece W is W2-W4 When the offset measured again is less than or equal to the set value, this means that the center axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device body 100 100 overlap (substantially overlap), so the control device 300 executes the processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is NO, that is, when “in step S17A, for the workpiece W W2-W4 When the condition "re-measured offset amount ≤ set value" is not satisfied, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes yes.

[0292] <Specific Example 3>

[0293] Figures 31A to 31C : is a schematic diagram for explaining specific example 3 of the offset correction process.

[0294] In specific example 3, if Fig.31A As shown in FIG. 1 , the workpiece W that needs to be subjected to the offset measurement process (step S17A) and the offset correction process (step S17C) is sandwiched between the main shaft sleeve 111 and the tail sleeve 121. At this time, when viewed from the direction of arrow Ar1 (see FIG. 1 ), Fig.31B ), the center of the workpiece W is relative to the rotation axis AX 100 Deviation angle θ(θ W3-W1 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX does not exist 100 on the axis of rotation AX.100 Deviation from the Y axis direction ΔY (ΔY W3-W1 )’s location.

[0295] On the other hand, when viewed from the direction of arrow Ar2 (see Fig.31B ), the center axis AX of the workpiece W W and the rotation axis AX 100 coincide.

[0296] As a result of performing the offset measurement process (step S17A) on the workpiece W clamped as described above, Fig. 31C The measurements shown. Fig. 31C The measured value θ surrounded by a circle W3-W1 and ∏Y W3-W1 Represents a non-zero value.

[0297] First, the control device 300 moves the pair of claws 251a and 251b in the Y-axis direction in a direction in which the pair of claws 251a and 251b approach each other and brings the pair of claws (the tapered surfaces 256a and 256b thereof) into contact with the workpiece W. W3-W1 The outer peripheral surface of the workpiece W is contacted to clamp the workpiece W3-W1 (See Fig.31A and 31B ) (Step S17C1). The clamping mechanism 250 (the pair of claws 251a and 251b) clamps the workpiece W in this manner. W3-W1 In the state, the θ axis AX θ The workpiece W is clamped by the clamping mechanism 250. W3-W1 Center (central axis AX W The center of the body is on the top of the figure), and extends in the Z-axis direction.

[0298] Then, the control device 300 releases the workpiece W on the main shaft sleeve 111 and the tail sleeve 121. W3-W1 (Step S17C2).

[0299] Then, the control device 300 performs reloading (step S17C3). W3-W1 When clamped, the θ With an offset angle θ(θ W3-W1 ) rotates the clamping mechanism 250 so that the Fig. 31C The circle encloses the offset angle θ(θ W3-W1 ) is eliminated. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the angle θ (θ W3-W1 ) is corrected.

[0300] At the same time, the control device 300 is shifted by an offset distance ΔY (ΔY W3-W1) Clamp the workpiece W W3-W1 In the case of moving the clamping mechanism 250, Fig.31C The circle encloses the offset distance ΔY (ΔY W3-W1 ) is eliminated. This is achieved by controlling the control device 300 of the drive motor 233. Accordingly, Δ(Δ W3-W1 ) is corrected.

[0301] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W3-W1 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W3-W1 ) The center axis AX of the workpiece W after correction W and the rotation axis AX of the cylindrical grinding device body 100 100 The workpiece W is overlapped between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W3-W1 ) Corrected center axis AX W The rotation axis AX of the cylindrical grinding device body 100 is 100 In the overlapped state, the control device 300 clamps the moved workpiece W between the main spindle 101 (spindle sleeve 111 ) and the tail stock 102 (tail sleeve 121 ).

[0302] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W3-W1 (Step S17C5).

[0303] Then, return to reference Fig.17 , the control device 300 executes the processing in steps S17A and S17B again.

[0304] When the determination result in step S17B is "Yes", that is, when the workpiece W is W3-W1 When the offset measured again is less than or equal to the set value, this means that the center axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device body 100 100 Coincident (substantially coincident), the control device 300 executes the processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes Yes.

[0305] <Specific Example 4>

[0306] Figures 32A to 32D : is a schematic diagram for explaining a specific example 4 of the offset correction process.

[0307] In specific example 4, if Fig.32A As shown, the workpiece W that needs to be subjected to the offset measurement process (step S17A) and the offset correction process (step S17C) is sandwiched between the main shaft sleeve 111 and the tail sleeve 121. At this time, when viewed from the direction of arrow Ar1 (see Fig.32B ), the center axis AX of the workpiece W W and the rotation axis AX 100 coincide.

[0308] On the other hand, when viewed from the direction of arrow Ar2 (see Fig.32B ), the center axis AX of the workpiece W W Relative to the rotation axis AX 100 Deviation angle θ(θ W2-W4 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX does not exist 100 on the axis of rotation AX. 100 The Z-axis direction is offset by ΔY (ΔY W2-W4 )’s location.

[0309] As a result of performing the offset measurement process (step S17A) on the workpiece W clamped as described above, Fig.32C The measurements shown. Fig.32C The measured value θ surrounded by a circle W2-W4 and ΔY W2-W4 Represents a non-zero value.

[0310] First, the control device 300 places the workpiece W W3-W1 Rotate 180 degrees / n (here, 90 degrees) counterclockwise from the origin state (see Fig.32B ), and the workpiece W W3-W1 Change to Fig.32D The workpiece W shown W2-W4 This is achieved by controlling the control device 300 of the spindle motor 113 and the tail motor 123.

[0311] Subsequently, the control device 300 moves the pair of claws 251a and 251b in the Y-axis direction in a direction in which the pair of claws 251a and 251b approach each other and brings the pair of claws (the tapered surfaces 256a and 256b thereof) into contact with the workpiece W. W2-W4 The outer peripheral surface of the workpiece W is contacted to clamp the workpiece W2-W4 (See Fig.32D ) (Step S17C1). The clamping mechanism 250 (the pair of claws 251a and 251b) clamps the workpiece W in this manner. W2-W4 In the state, the θ axis AX θThe workpiece W is clamped by the clamping mechanism 250. W2-W4 Center (central axis AX W The center of the body is on the top of the figure), and extends in the Z-axis direction.

[0312] Then, the control device 300 releases the workpiece W on the main shaft sleeve 111 and the tail sleeve 121. W2-W4 (Step S17C2).

[0313] Subsequently, the control device 300 performs reloading (step S17C3). That is, the control device 300 W2-W4 When clamped, the θ With an offset angle θ(θ W2-W4 ) rotates the clamping mechanism 250 so that the Fig.32C The circle encloses the offset angle θ(θ W2-W4) This is achieved by controlling the control device 300 of the steering motor 260. Accordingly, the angle θ (θ W2-W4 ) is corrected.

[0314] At the same time, the control device 300 is shifted by an offset distance ΔY (ΔY W2-W4 ) Clamp the workpiece W W2-W4 In the case of moving the clamping mechanism 250, Fig.32C The circle encloses the offset distance ΔY (ΔY W2-W4 ) is eliminated. This is achieved by controlling the control device 300 of the drive motor 233. Accordingly, Δ(Δ W2-W4 ) is corrected.

[0315] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W2-W4 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W2-W4 ) The center axis AX of the workpiece W after correction W and the rotation axis AX of the cylindrical grinding device body 100 100 The workpiece W is overlapped between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W2-W4 ) Corrected center axis AX W The rotation axis AX of the cylindrical grinding device body 100 is 100 In the overlapped state, the control device 300 clamps the moved workpiece W between the main spindle 101 (spindle sleeve 111 ) and the tail stock 102 (tail sleeve 121 ).

[0316] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W2-W4 (Step S17C5).

[0317] Then, return to reference Fig.17 , the control device 300 executes the processing in steps S17A and S17B again.

[0318] When the determination result in step S17B is "Yes", that is, when the workpiece W is W2-W4 When the offset measured again is less than or equal to the set value, this means that the center axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device body 100 100 Coincident (substantially coincident), the control device 300 executes the processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes Yes.

[0319] <Specific Example 5>

[0320] Figures 33A to 33E : is a schematic diagram for explaining a specific example 5 of the offset correction process.

[0321] In specific example 5, if Fig.33A As shown in FIG. 1 , the workpiece W that needs to be subjected to the offset measurement process (step S17A) and the offset correction process (step S17C) is sandwiched between the main shaft sleeve 111 and the tail sleeve 121. At this time, when viewed from the direction of arrow Ar1 (see FIG. 1 ), Fig.33B ), the center of the workpiece W is relative to the rotation axis AX 100 Deviation angle θ(θ W3-W1 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX 100 superior.

[0322] On the other hand, when viewed from the direction of arrow Ar2 (see Fig.33B ), the center axis AX of the workpiece W W Relative to the rotation axis AX 100 Deviation angle θ(θ W2-W4 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX 100 superior.

[0323] As a result of performing the offset measurement process (step S17A) on the workpiece W clamped as described above, Fig.33C The measurements shown. Fig.33C The measured value θ surrounded by a circleW3-W1 and θ W2-W4 Represents a non-zero value.

[0324] First, the control device 300 moves the pair of claws 251a and 251b in the Y-axis direction in a direction in which the pair of claws 251a and 251b approach each other and brings the pair of claws (the tapered surfaces 256a and 256b thereof) into contact with the workpiece W. W3-W1 The outer peripheral surface of the workpiece W is contacted to clamp the workpiece W3-W1 (See Fig.33A and 33B ) (Step S17C1). The clamping mechanism 250 (the pair of claws 251a and 251b) clamps the workpiece W in this manner. W3-W1 In the state, the θ axis AX θ The workpiece W is clamped by the clamping mechanism 250. W3-W1 Center (central axis AX W The center of the body is on the top of the figure), and extends in the Z-axis direction.

[0325] Then, the control device 300 releases the workpiece W on the main shaft sleeve 111 and the tail sleeve 121. W3-W1 (Step S17C2).

[0326] Then, the control device 300 performs reloading (step S17C3). W3-W1 When clamped, the θ With an offset angle θ(θ W3-W1 ) rotates the clamping mechanism 250 so that the Fig.33C The circle encloses the offset angle θ(θ W3-W1 ) is eliminated. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the angle θ (θ W3-W1 ) is corrected, such as Fig.33D shown.

[0327] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W3-W1 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W3-W1 ) The center axis AX of the workpiece W after correction W and the rotation axis AX of the cylindrical grinding device body 100 100 The workpiece W is overlapped between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W3-W1 ) Corrected center axis AX WThe rotation axis AX of the cylindrical grinding device body 100 is 100 In the overlapped state, the control device 300 clamps the moved workpiece W between the main spindle 101 (spindle sleeve 111 ) and the tail stock 102 (tail sleeve 121 ).

[0328] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W3-W1 (Step S17C5).

[0329] Then, the control device 300 moves the workpiece W W3-W1 from Fig.33D The state shown is rotated counterclockwise by 180 degrees / n (here, 90 degrees), and the workpiece W W3-W1 Change to Fig.33E The workpiece W shown W2-W4 status.

[0330] Then, as in step S17C1, the control device 300 clamps the workpiece W using the clamping mechanism 250. W2-W4 The control device 300 is arranged on the workpiece W W2-W4 When clamped, the θ With an offset angle θ(θ W2-W4 ) rotates the clamping mechanism 250 so that the Fig.33C The circle encloses the offset angle θ(θ W2-W4 ) is eliminated. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the angle θ (θ W2-W4 ) is corrected.

[0331] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W2-W4 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W2-W4 ) The center axis AX of the workpiece W after correction W and the rotation axis AX of the cylindrical grinding device body 100 100 The control device 300 overlaps between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W2-W4 ) The center axis AX of the workpiece W after correction W The rotation axis AX of the cylindrical grinding device main body 100 is 100 In the overlapped state, the workpiece W after movement is sandwiched between the main spindle 101 (main spindle sleeve 111) and the tail section 102 (tail section sleeve 121).

[0332] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W2-W4 (Step S17C5).

[0333] Then, return to reference Fig.17 , the control device 300 executes the processing in steps S17A and S17B again.

[0334] When the determination result in step S17B is "Yes", that is, when the workpiece W is W3-W1 The offset measured again is ≤ the set value and in step S17A the workpiece W is W2-W4 When the offset measured again is less than or equal to the set value, this means that the center axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device body 100 100 Coincident (substantially coincident), the control device 300 executes the processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes Yes.

[0335] <Specific Example 6>

[0336] Figures 34A to 34E : is a schematic diagram for explaining a specific example 6 of the offset correction process.

[0337] In specific example 6, Fig.34A As shown in FIG. 1 , the workpiece W that needs to be subjected to the offset measurement process (step S17A) and the offset correction process (step S17C) is sandwiched between the main shaft sleeve 111 and the tail sleeve 121. At this time, when viewed from the direction of arrow Ar1 (see FIG. 1 ), Fig.34B ), the center of the workpiece W is relative to the rotation axis AX 100 Deviation angle θ(θ W3-W1 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX does not exist 100 on the axis of rotation AX. 100 Deviation from the Y axis direction ΔY (ΔY W3-W1 )’s location.

[0338] On the other hand, when viewed from the direction of arrow Ar2 (see Fig.34B ), the center axis AX of the workpiece W W Relative to the rotation axis AX 100 Deviation angle θ(θ W2-W4 ). The center point CP of the workpiece W (center axis AX W The center point on the rotation axis AX does not exist 100 on the axis of rotation AX.100 Deviation from the Z axis direction ΔY (ΔY W2-W4 )’s location.

[0339] As a result of performing the offset measurement process (step S17A) on the workpiece W clamped as described above, Fig.34C The measurements shown. Fig.34C The measured value θ surrounded by a circle W3-W1 ,θ W2-W4 , ΔY W3-W1 and ΔY W2-W4 Represents a non-zero numeric value.

[0340] First, the control device 300 moves the pair of claws 251a and 251b in the Y-axis direction in a direction in which the pair of claws 251a and 251b approach each other and brings the pair of claws (the tapered surfaces 256a and 256b thereof) into contact with the workpiece W. W3-W1 The outer peripheral surface of the workpiece W is contacted to clamp the workpiece W3-W1 (See Fig.34A and 34B ) (Step S17C1). The clamping mechanism 250 (the pair of claws 251a and 251b) clamps the workpiece W in this manner. W3-W1 In the state, the θ axis AX θ The workpiece W is clamped by the clamping mechanism 250. W3-W1 Center (central axis AX W The center of the body is on the top of the figure), and extends in the Z-axis direction.

[0341] Then, the control device 300 releases the workpiece W on the main shaft sleeve 111 and the tail sleeve 121. W3-W1 (Step S17C2).

[0342] Then, the control device 300 performs reloading (step S17C3). W3-W1 When clamped, the θ With an offset angle θ(θ W3-W1 ) rotates the clamping mechanism 250 so that the Fig.34C The circle encloses the offset angle θ(θ W3-W1 ) is eliminated. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the angle θ (θ W3-W1 ) is corrected.

[0343] At the same time, the control device 300 is shifted by an offset distance ΔY (ΔY W3-W1 ) Clamp the workpiece W W3-W1 In the case of moving the clamping mechanism 250, Fig.34C The circle encloses the offset distance ΔY (ΔY W3-W1) is eliminated. This is achieved by controlling the control device 300 of the drive motor 233. Accordingly, Δ(Δ W3-W1 ) is corrected.

[0344] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W3-W1 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W3-W1 ) The center axis AX of the workpiece W after correction W and the rotation axis AX of the cylindrical grinding device body 100 100 The workpiece W is overlapped between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W3-W1 ) Corrected center axis AX W The rotation axis AX of the cylindrical grinding device body 100 is 100 In the overlapped state, the control device 300 clamps the moved workpiece W between the main spindle 101 (spindle sleeve 111 ) and the tail stock 102 (tail sleeve 121 ).

[0345] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W3-W1 (Step S17C5).

[0346] Then, the control device 300 moves the workpiece W W3-W1 from Fig.34D The state shown is rotated counterclockwise by 180 degrees / n (here, 90 degrees), and the workpiece W W3-W1 Change to Fig.34E The workpiece W shown W2-W4 status.

[0347] Then, as in step S17C1, the control device 300 clamps the workpiece W using the clamping mechanism 250. W2-W4 The control device 300 is arranged on the workpiece W W2-W4 Clamped around the θ axis AX θ With an offset angle θ(θ W2-W4 ) rotates the clamping mechanism 250 so that the Fig.34C The circle encloses the offset angle θ(θ W2-W4 ) is eliminated. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the angle θ (θ W2-W4 ) is corrected.

[0348] At the same time, the control device 300 W2-W4 When clamped, the offset distance ΔY (ΔYW2-W4 ) moves the clamping mechanism 250 so that Fig.34C The circle encloses the offset distance ΔY (ΔY W2-W4 ) is eliminated. This is achieved by controlling the control device 300 of the drive motor 233. Accordingly, Δ(Δ W2-W4 ) is corrected.

[0349] Then, if Fig. 22B As shown, the control device 300 moves the workpiece W W3-W1 The workpiece W is clamped between the main shaft sleeve 111 and the tail sleeve 121 (step S17C4). That is, first, the control device 300 moves the clamping mechanism 250 when the workpiece W is clamped so that the angle θ (θ W2-W4 ) The center axis AX of the workpiece W after correction W and the rotation axis AX of the cylindrical grinding device body 100 100 The workpiece W is overlapped between the main shaft sleeve 111 and the tail sleeve 121 of the cylindrical grinding device body 100. W2-W4 ) Corrected center axis AX W The rotation axis AX of the cylindrical grinding device body 100 is 100 In the overlapped state, the control device 300 clamps the moved workpiece W between the main spindle 101 (spindle sleeve 111 ) and the tail stock 102 (tail sleeve 121 ).

[0350] Then, the control device 300 releases the workpiece W from the claws 251a and 251b. W2-W4 (Step S17C5).

[0351] Then, return to reference Fig.17 , the control device 300 executes the processing in steps S17A and S17B again.

[0352] When the determination result in step S17B is "Yes", that is, when the workpiece W is W3-W1 The offset measured again is ≤ the set value and in step S17A the workpiece W is W2-W4 When the offset measured again is less than or equal to the set value, this means that the center axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device body 100 100 Coincident (substantially coincident), the control device 300 executes the processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes Yes.

[0353] Subsequently, the processing in step S18 and subsequent steps is explained.

[0354] That is, when the determination result in step S17B is "yes", the control device 300 performs a predetermined process on the workpiece W sandwiched between the main shaft sleeve 111 and the tail sleeve 121 to satisfy the processing conditions acquired in step S11 (step S18). For example, the control device 300 grinds the outer peripheral surface of the workpiece W sandwiched between the main shaft sleeve 111 and the tail sleeve 121.

[0355] When the predetermined processing of the workpiece W to be processed (for example, grinding of the outer peripheral surface of the workpiece and additional processing of a flat surface (OF), a V-shaped slit (notch), etc.) has been completed (step S19: Yes), the control device 300 clamps the processed workpiece W with the clamping mechanism 250 as described above, and transports the clamped processed workpiece W to a predetermined portion (for example, Fig.18 The tray P4 in the tray (step S20).

[0356] The processed workpiece W is placed on it. Fig.18 The pallet P4 of the workpiece W4 is arranged by, for example, a known method ( Fig.18 The workpiece W5 and pallet P5) are transported to the automatic guided vehicle AGV2 together with the pallet P4.

[0357] The automated guided vehicle AGV2 places the processed workpiece W( Fig.18 The pallet P5 carrying the workpiece W5 is transported to the next process.

[0358] As described above, according to this embodiment, the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding device body 100 100 In the overlapped state, the workpiece W can be sandwiched between the main spindle unit 110 (main spindle sleeve 111 ) and the tail unit 120 (tail sleeve 121 ).

[0359] This is because the cylindrical grinding device 1 includes a steering mechanism (steering motor) which rotates around the θ axis AX in a state where the workpiece W is clamped. θ (through the center of the workpiece clamped by the clamping mechanism and extending in the Z-axis direction) Rotate the clamping mechanism.

[0360] According to the present embodiment, the workpieces W having various lengths can always be conveyed in a stable state.

[0361] This is because the clamping mechanism 250 moves until the center Pb of the pair of claws 251a and 251b coincides with the vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be processed automatically measured in step S11A) (see steps S12 and Fig.19B ), and the clamping mechanism 250 (the pair of claws 251a and 251b) clamps the center of the workpiece W in the Y-axis direction.

[0362] Subsequently, modification examples are described.

[0363] Fig.28A 1 is a schematic diagram for explaining the moving directions of the movable frames 220, 230 and 240 of the cylindrical grinding device 1. Fig.28B 2 is a schematic diagram for explaining the moving directions of the movable frames 220 , 230 , and 240 of the cylindrical grinding apparatus 1 in the modified example.

[0364] In the above embodiment, for example, Fig.28A As shown, the moving mechanism disclosed in the present invention adopts a movable frame moving mechanism M240 (e.g., a first moving mechanism disclosed in the present invention) that moves the third movable frame 240 (and the clamping mechanism 250 attached to the third movable frame 240) in the Z-axis direction and is attached to the second movable frame 230, a movable frame moving mechanism M230 (e.g., a second moving mechanism disclosed in the present invention) that moves the second movable frame 230 (the clamping mechanism 250 and the movable frame moving mechanism M240) in the Y-axis direction and is attached to the first movable frame 220, and a movable frame moving mechanism M220 (e.g., a third moving mechanism disclosed in the present invention) that moves the first movable frame 220 (the clamping mechanism 250, the movable frame moving mechanism M230, and the movable frame moving mechanism M240) in the X-axis direction and is attached to the fixed frame 210. However, the moving mechanism is not limited thereto.

[0365] For example, Fig.28B As shown, the moving mechanism disclosed in the present invention can adopt a movable frame moving mechanism M240 (for example, the first moving mechanism disclosed in the present invention) that moves the third movable frame 240 (and the clamping mechanism 250 attached to the third movable frame 240) in the Z-axis direction and is attached to the second movable frame 230, a movable frame moving mechanism M230 (for example, the second moving mechanism disclosed in the present invention) that moves the second movable frame 230 (the clamping mechanism 250 and the movable frame moving mechanism M240) in the X-axis direction and is attached to the first movable frame 220, and a movable frame moving mechanism M220 (for example, the third moving mechanism disclosed in the present invention) that moves the first movable frame 220 (the clamping mechanism 250, the movable frame moving mechanism M230 and the movable frame moving mechanism M240) in the Y-axis direction and is attached to the fixed frame 210.

[0366] Refer to the following Fig.35 Another operation example of the cylindrical grinding device 1 will be described below.

[0367] Fig.35 1 is a flowchart of another operation example of the cylindrical grinding device 1 . Fig.36 The center axis AX of the workpiece W is shownW and the rotation axis AX of the cylindrical grinding device body 100 100 A perspective view showing a state where a workpiece W is sandwiched between a main shaft sleeve 111 (main shaft 101) and a tail sleeve 121 (tail 102) in an overlapped state;

[0368] exist Fig.36 AX C AX represents the crystal axis of the workpiece W which is a silicon crystal (single crystal). The crystal axis is hereinafter referred to as the crystal axis AX. C Note that the crystal surface and the crystal axis AX C With Fig.36 The meaning of the rectangle in the middle.

[0369] because Fig.17 In the steps S10 to S17C shown in FIG. 1 , when the workpiece W is at its center axis AX W and the rotation axis AX of the cylindrical grinding device body 100 100 When the main shaft sleeve 111 (main shaft 101) and the tail sleeve 121 (tail 102) are sandwiched in the overlapped state (see Fig.36 ), usually, the crystal axis AX C With respect to the rotation axis AX of the cylindrical grinding device main body 100 100 Therefore, in order to correct the deviation, that is, to make the crystal axis AX C and the rotation axis AX of the cylindrical grinding device body 100 100 Overlap (basic overlap), execute Fig.35 Processing shown.

[0370] When executing Fig.17 When steps S10 to S17C are performed, Fig.35 In the process shown in step S17B, the result of determination is YES, and the center axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device body 100 100 In the overlapped (substantially overlapped) state, the workpiece W is clamped between the spindle sleeve 111 (spindle 101) and the tail sleeve 121 (tail 102) (see Fig.36 ).

[0371] First, the control device 300 determines whether there is a temporary incision (step S30). For example, this is achieved by irradiating the workpiece W with laser light from a laser sensor (not shown), rotating the workpiece 360°, and finding the presence or absence of a temporary incision (incision groove). When the determination result in step S30 is no, the control device 300 performs a temporary incision on the workpiece W (step S31). Note that based on the measurement result of the X-ray device 150, the portion where the temporary incision is performed is automatically determined. The temporary incision is implemented by the incision unit 140.

[0372] Subsequently, the control device 300 performs a plane orientation measurement process (step S32).

[0373] Fig.37 is a flow chart of the planar orientation measurement process.

[0374] Planar orientation measurement processing is used to measure (calculate) the crystal axis AX C With respect to the rotation axis AX of the cylindrical grinding device main body 100 100 Processing of the offset (axial offset rotation angle Δδ and swing angle Δφ).

[0375] The plane orientation measurement process is performed n times on the workpiece W (steps S321 to S324). In the following explanation, the case where n is 2 is explained as an example. For example, the operator inputs n (the number of measurements) via the operating device 400. The number n is input at any time before the plane orientation measurement process is performed. Note that n pre-input and stored in a predetermined storage unit can be used. Note that n only needs to be an integer equal to or greater than 2. That is, the minimum value of n is 2.

[0376] First, the control device 300 rotates the workpiece W until the provisional cutout N1 is located at the reference position (step S321 ).

[0377] Subsequently, the control device 300 measures the plane orientation (step S322). This is achieved by the X-ray device 150. The X-ray device 150 irradiates the surface A of the workpiece W located at the reference position as described above with X-rays (toward the workpiece center WC) (see Fig.36 ), and perform planar orientation measurements. Fig.38 The middle left picture and Fig.40 1 is a diagram showing a case where the X-ray device 150 irradiates the workpiece W with X-rays and performs plane orientation measurement. The plane orientation measurement is performed at the workpiece center WC because the workpiece center WC exists on the θ-axis AX. θ Therefore, in the correction explained below, even if the clamping mechanism 250 in the state of clamping the workpiece W rotates about the axis, the distance between the clamping mechanism 250 and the X-ray device 150 does not change. The X-ray device 150 outputs the plane orientation and correction value (the plane orientation and correction value of the cut reference C surface) as the measurement value of the A surface.

[0378] Subsequently, the control device 300 determines whether step S322 has been executed n times (here, n=2) (step S323). When step S323 has not been executed n times (step S323: No), the control device 300 rotates the workpiece W by a predetermined angle (e.g., 90 degrees) (S324), and after the predetermined angle (e.g., 90 degrees) is rotated, the workpiece W is illuminated with X-rays (toward the workpiece center WC) (see FIG. 3 ). Fig.38The center figure in the figure) illuminates the B surface of the workpiece W (see Fig.36 ), and plane orientation measurement is performed (step S322) (a second plane orientation measurement is performed). The X-ray device 150 outputs the plane orientation and correction value (the plane orientation and correction value of the cut reference C surface) as the measurement value of the B surface.

[0379] When step S322 has been performed n times (here, n=2) (step S323: Yes), the control device 300 calculates the axial offset rotation angle Δδ and the swing angle Δφ based on the measured values ​​in step S322 (step S325). The X-ray device 150 outputs the calculated axial offset rotation angle Δδ and the calculated swing angle Δφ. The axial offset rotation angle Δδ is a value obtained by passing through the center axis AX of the workpiece W. W The straight line L1 of the temporary cut N1 and the center axis AX passing through the workpiece W W The angle formed by the straight line L2 of the regular cut (regular cut plan part N2) (see Fig.38 On the other hand, the workpiece W to be subjected to the swing angle correction process (step S34) is sandwiched between the main shaft sleeve 111 and the tail sleeve 121. When viewed from the direction of arrow Ar3 (see Fig.38 ), the crystal axis AX of the workpiece W C Relative to the rotation axis AX 100 Offset swing angle Δφ (see Fig.35 ).

[0380] Then, return to reference Fig.35 , the control device 300 determines whether the offset measured in step S32 is ≤ a set value (predetermined threshold value) (step S33).

[0381] When the determination result in step S33 is NO, the control device 300 performs a rotation angle / swing angle correction process (step S34).

[0382] The rotation angle / swing angle correction process is to correct the crystal axis AX measured (calculated) in step S32. C With respect to the rotation axis AX of the cylindrical grinding device main body 100 100 The offset (axial offset rotation angle Δδ and swing angle Δφ) is corrected.

[0383] Fig.39 : is a flowchart of the rotation angle / swing angle correction process.

[0384] First, the control device 300 rotates the workpiece W until the offset rotation angle of the plane orientation reaches horizontal (step S341). That is, the control device 300 rotates the workpiece W by a predetermined angle (270° axial offset rotation angle Δδ) until the regular incision (regular incision planned position N2) is located at Fig.38The reference position shown on the right end. The axial offset rotation angle Δδ is a correction value for correcting the offset amount of the regular incision (regular incision planned part N2) relative to the reference position.

[0385] Subsequently, the pair of claws clamps the workpiece (step S342). Specifically, the control device 300 clamps the workpiece W by moving the pair of claws 251a and 251b in the direction in which the pair of claws 251a and 251b approach each other in the Y-axis direction and bringing the pair of claws 251a and 251b (the tapered surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W. As described above, in the state where the clamping mechanism 250 (the pair of claws 251a and 251b) clamps the workpiece W, the θ-axis AX θ The workpiece W (center axis AX) clamped by the clamping mechanism 250 W center on the top) and extends in the Z-axis direction.

[0386] Then, the control device 300 releases the workpiece W on the main shaft sleeve 111 and the tail sleeve 121 (step S343).

[0387] Subsequently, the control device 300 moves the workpiece W to a position for correcting the angle of the plane orientation (step S344). Specifically, the control device 300 moves the workpiece W around the θ axis AX with the workpiece W clamped. θ The clamping mechanism 250 is rotated by swinging a certain angle, thereby eliminating the swing angle Δφ calculated in step S325. This is achieved by the control device 300 controlling the steering motor 260. Accordingly, the offset (swing angle Δφ) is corrected. The swing angle Δφ is used to correct the crystal axis AX of the workpiece W. C With respect to the rotation axis AX of the cylindrical grinding device main body 100 100 The correction value of the offset.

[0388] Subsequently, the control device 300 clamps the workpiece W between the main shaft sleeve 111 and the tail sleeve 121 (step S345), and the offset (swing angle Δφ) of the workpiece W has been corrected as described above. C and the rotation axis AX of the cylindrical grinding device body 100 100 In the overlapped state, the workpiece W is sandwiched between the main spindle sleeve 111 (main spindle 101 ) and the tail sleeve 121 (tail 102 ).

[0389] Subsequently, the control device 300 releases the workpiece W from the claws 251 a and 251 b (step S346 ).

[0390] Then, return to reference Fig.35 , the control device 300 executes the processing in steps S32 and S33 again.

[0391] When the result of the determination in step S33 is “Yes”, that is, for the workpiece W, the offset amount (swing angle Δφ) measured again in step S32 is ≤ the set value (predetermined threshold value), since this means that the crystal axis AXC and the rotation axis AX of the cylindrical grinding device main body 100 are 100 Coincident (substantially coincident), the control device 300 executes the processing in step S35 and subsequent steps. On the other hand, when the determination result in step S33 is No, the processing in steps S34 and S32 is repeatedly executed until the determination result in step S33 becomes Yes.

[0392] Subsequently, the processing in step S35 and subsequent steps is explained.

[0393] That is, when the determination result in step S33 is "yes", the control device 300 performs circular grinding on the workpiece W tightly disposed between the main shaft sleeve 111 and the tail sleeve 121 to satisfy the machining conditions acquired in step S11 (step S35). That is, the control device 300 grinds the outer peripheral surface of the workpiece W sandwiched between the main shaft sleeve 111 and the tail sleeve 121. Fig.35 In the "circular grinding" in FIG. 1 , the shaded area indicates the area to be circularly ground (grinded). This is achieved by the circular grinding unit 130 (see FIG. Fig. 6A ).

[0394] Subsequently, the control device 300 performs an incision (regular incision) on the workpiece (step S36). Note that the location to be incised (regular incision planned location N2) is determined based on the measurement result of the X-ray device 150. The incision is performed by the incision unit 140. Specifically, the control device 300 further performs the incision in step S36. Fig.38 The workpiece W is rotated 90° in the right end state, the portion to be cut (regular cut planned portion N2) faces the cut unit 140, and the regular cut planned portion N2 (see Figure 6B ) to make regular cuts. Accordingly, the cuts can be made along the crystal axis AX. C (at right angle to the crystal axis AX C A regular cut is accurately formed in the workpiece W) in the direction of the crystal surfaces at both ends.

[0395] When the circular grinding and cutting (regular cutting) of the workpiece W are completed, the control device 300 clamps the workpiece W with the clamping mechanism 250 as described above, and transports the clamped workpiece W to a predetermined location (e.g., Fig.18 (Pallet P4 in) (step S37).

[0396] All numerical values ​​described in the above embodiments are examples. Of course, appropriate numerical values ​​different from these numerical values ​​can be used.

[0397] The above-described embodiments are merely examples of various aspects. The present invention is not limited to the description of the embodiments. The present invention can be implemented in various other forms without departing from the spirit or main features of the present invention.

Claims

1. A workpiece conveying device, characterized in that: It transports the cylindrical workpiece to be processed to the cylindrical grinding device body, and the workpiece transport device includes: A clamping mechanism including a pair of claws for clamping the workpiece; a steering mechanism configured to rotate the clamping mechanism while the workpiece is clamped; as well as an X-ray device configured to measure the crystal plane orientation of the workpiece sandwiched between the main shaft sleeve and the tail sleeve of the cylindrical grinding device body in a state where the central axis of the workpiece and the rotation axis of the cylindrical grinding device body coincide with each other, and output a correction value for correcting the offset of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is the X axis, the axis orthogonal to the X axis is the Y axis, and the axis orthogonal to the plane including the X axis and the Y axis is the Z axis. In a state where the workpiece is clamped, the steering mechanism rotates the clamping mechanism about a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction, and the rotation angle coincides with the correction value.

2. The workpiece conveying device according to claim 1, characterized in that: The clamping mechanism includes a claw moving mechanism that moves the claws in a direction in which the claws approach each other or in a direction in which the claws separate from each other; The claw moving mechanism may clamp the workpiece by moving the claws in the Y-axis direction in a direction in which the claws approach each other and bringing the claws into contact with the outer peripheral surface of the workpiece.

3. The workpiece conveying device according to claim 2, characterized in that: The moving mechanism comprises: A first moving mechanism, configured to move the clamping mechanism along the Z-axis direction; A second moving mechanism configured to move the clamping mechanism and the first moving mechanism along the Y-axis direction; and The third moving mechanism is configured to move the clamping mechanism, the first moving mechanism and the second moving mechanism along the X-axis direction.

4. The workpiece conveying device according to claim 1, characterized in that: The claws respectively include a first contact portion that contacts a lower portion of the workpiece when the claws move in a direction in which they approach each other, and a second contact portion that contacts an upper portion of the workpiece when the claws move in a direction in which they approach each other.

5. The workpiece conveying device according to claim 4, characterized in that: The claw portions may respectively include tapered surfaces opened in a V-shape toward each other, the tapered surfaces serving as the first contact portion and the second contact portion.

6. The workpiece conveying device according to claim 1, characterized in that: The moving mechanism moves the clamping mechanism when the workpiece is clamped until the center axis of the workpiece and the rotation axis of the cylindrical grinding device body coincide with each other between the main axis and the tail of the cylindrical grinding device body.

7. The workpiece conveying device according to claim 6, characterized in that: The moving mechanism further moves the clamping mechanism when the workpiece is clamped until an end surface of the workpiece abuts against the spindle.

8. The workpiece conveying device according to claim 1, characterized in that: The claws grip the length center of the workpiece.

9. A cylindrical grinding device, characterized in that: include: External cylindrical grinding device body; as well as a workpiece conveying device configured to convey the cylindrical workpiece to be processed to the cylindrical grinding device body; The workpiece conveying device comprises: A clamping mechanism including a pair of claws for clamping the workpiece; a steering mechanism configured to rotate the clamping mechanism while the workpiece is clamped; and an X-ray device configured to measure the crystal plane orientation of the workpiece sandwiched between the main shaft sleeve and the tail sleeve of the cylindrical grinding device body in a state where the central axis of the workpiece and the rotation axis of the cylindrical grinding device body coincide with each other, and output a correction value for correcting the offset of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is the X axis, the axis orthogonal to the X axis is the Y axis, and the axis orthogonal to the plane including the X axis and the Y axis is the Z axis. In a state where the workpiece is clamped, the steering mechanism rotates the clamping mechanism about a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction, and the rotation angle corresponds to the correction value.

10. A method for correcting an offset of a clamped workpiece relative to a rotation axis of a cylindrical grinding device body by using the workpiece conveying device according to claim 1, characterized in that: The offset correction method comprises: a measuring step, in a state where a spindle sleeve of the cylindrical grinding device body contacts a top end face of a cylindrical workpiece to be processed and a tail sleeve of the cylindrical grinding device body contacts a bottom end face of the workpiece, measuring a crystal plane orientation of a workpiece clamped and positioned at a reference position, and measuring a crystal plane orientation of the workpiece rotated by a predetermined angle from the reference position, and outputting a correction value for correcting an offset of a crystal axis of the workpiece relative to a rotation axis of the cylindrical grinding device body; and The offset correction step controls the steering mechanism so that the offset is eliminated.

11. The offset correction method according to claim 10, characterized in that: The measuring step and the offset correction step are repeatedly performed until the offset of the workpiece after the offset correction step is reduced to a set value or less.

12. The offset correction method according to claim 10 or 11, characterized in that: The offset is an offset angle of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body; and In the offset amount correction step, the steering mechanism is controlled so that the clamping mechanism rotates according to the offset angle when the workpiece is clamped.

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