Large precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device

Abstract

Large precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device belongs to the field of vibration isolation technology, adopting 4n (n≥1, n∈N + ) layers of equal-cross-section magnetic rings are arranged in an axial array and the adjacent layers are magnetized perpendicularly, forming coaxially nested inner and outer permanent magnet arrays, thereby constructing a high-magnetic-density excitation magnetic field around the conductor plate. The conductor plate produces a strong damping effect relative to the movement of the magnetic field. When the external excitation frequency changes, the current in the coaxially nested coils outside the conductor plate is precisely regulated by speed feedback, and the damping force is dynamically adjusted. In low-frequency micro-vibrations, it exhibits high damping characteristics, effectively reducing the vibration transmission rate; in high-frequency micro-vibrations, it exhibits low damping characteristics, achieving efficient attenuation of vibration interference. This active and passive composite damping control strategy enhances the adaptability and stability of large-scale precision micro-vibration isolation and its vibration isolation performance in complex vibration environments.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision vibration isolation, in particular to a large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device. Background Art

[0002] During the installation, testing, and experimentation of precision instruments and equipment, low-frequency, micro-vibration interference in the environment has become one of the key issues affecting research results. Equipping precision instruments and equipment with low-frequency vibration isolation platforms has gradually become the main technical means to suppress environmental micro-vibrations in the field of precision engineering. Damping is one of the core parameters that determine the effect of vibration isolation, and directly affects the effect of the vibration isolation platform on vibrations of different frequencies. Specifically, high damping helps to reduce the vibration gain of the vibration isolation platform in the low-frequency to resonant frequency range. Conversely, low damping can effectively promote the rapid attenuation of high-frequency vibrations by the vibration isolation platform. This means that for vibrations of different frequencies, the damping value required to achieve effective attenuation is different. However, the damping coefficient of existing vibration isolation platforms remains constant in the amplitude-frequency characteristics, which limits their adaptability and effectiveness in vibration environments with various frequencies. Therefore, how to effectively control the damping coefficient of the vibration isolation platform has become a key issue that needs to be solved to improve vibration isolation performance.

[0003] Existing research on damping control devices primarily focuses on small optical micro-vibration isolation platforms and devices, which typically weigh between kilograms and hundreds of kilograms, rarely exceeding tons. For large precision micro-vibration isolation platforms with loads exceeding hundreds of tons, existing damping control devices struggle to provide a sufficiently high damping force to effectively adjust the damping coefficient, resulting in a fixed damping coefficient for these platforms. Furthermore, the damping coefficient of existing damping control devices also exhibits a constant amplitude-frequency characteristic, effectively improving the damping coefficient of large precision micro-vibration isolation platforms by only slightly. These devices are unable to dynamically adjust the damping based on changes in the excitation frequency, making it impossible to achieve high-performance vibration isolation in multi-frequency vibration environments.

[0004] Patent No. CN202210957290.3 discloses a magnetorheological damper with a toothed flow channel. The toothed piston adopts a gear-like design, and three groups of excitation coils are evenly distributed and wound around the inner layer of the piston cylinder to maximize magnetic flux utilization. Patent No. CN202210441343.6 discloses a multi-excitation, multi-disc magnetorheological broadband vibration isolator. This replaces the liquid environment in the flow mode with a composite matrix magnetorheological material based on non-woven fabric to expand the adjustable damping force range and reduce the hardening effect under medium and high frequency excitation. To adjust the damping force, Patent No. CN202111522940.3 discloses a multi-stage excitation double-tube magnetorheological damper and its control method. By alternating N magnetic yokes and (N-1) coils in the axial direction of the inner tube, the coils are coaxially nested with the outer tube to create (2N-1) magnetorheological fluid flow paths. By regulating the magnetic field, the number of flow gaps is dynamically changed to ensure adjustable damping. Magnetorheological dampers have limitations when used in large-scale precision micro-vibration isolation: 1) The shear yield strength of magnetorheological dampers is low, making it difficult to generate sufficient damping to regulate large-scale precision micro-vibration isolation; increasing the damping by increasing the number of excitation coils, excitation voltage / current, effective magnetic field area, throttling channel length, etc. will increase energy consumption and cost; 2) The properties of magnetorheological fluids are unstable and easily affected by external environmental factors such as temperature and humidity. In high or low temperature environments, their damping performance may change, and they may even fail to work properly; 3) Prolonged use or improper use may cause residue to form inside the magnetorheological damper, affecting the damping effect and service life.

[0005] Professor Cui Junning of Harbin Institute of Technology proposed an ultra-low frequency air spring isolator (1. "Air Spring Isolator Based on Electromagnetic Negative Stiffness Structure," ZL202010605223.6; 2. Ultra-low Frequency Isolator Based on a Negative Stiffness Structure with a Perpendicularly Magnetized Magnetic Ring, ZL202010605241.4; 3. Ultra-low Frequency Air Spring Isolator Based on a Negative Stiffness Structure with an Axially Magnetized Magnetic Ring, ZL202010606309.0; 4. High-Load Ultra-low Frequency Air Spring Isolator Based on a Negative Stiffness Magnetic Spring, ZL202010605236.3). This device achieves negative stiffness by utilizing inner and outer magnetic rings with radially opposite magnetization, axially co-magnetization, or perpendicular magnetization. Damping is achieved by utilizing eddy currents generated by an orifice and the relative motion of the inner and outer magnetic rings. In these schemes, both the inner and outer magnetic rings are permanent magnets uniformly magnetized in a single direction, and their excitation magnetic fields are symmetrical. In actual applications, only one side of the magnetic field realizes the damping characteristics, while the other side of the magnetic field is in an idle state, and the magnetic field utilization rate is low.

[0006] Guangxi University of Science and Technology proposed a damper that is a composite of electromagnetic energy feeding and magnetorheological fluid (1. "An electromagnetic energy feeding stepped magnetorheological damper", CN202310051772.7; 2. "A double-tube embedded hybrid electromagnetic energy feeding damper", CN202210120495.6; 3. "A hybrid energy feeding electromagnetic damper", CN202210120558.8; 4. "A hybrid electromagnetic energy feeding damper", CN202210120502.2). By setting a stepped magnetorheological fluid damping gap between the inner side of the cylinder and the piston head, the effective damping channel length is increased; at the same time, an electromagnetic energy feeding damping structure composed of a Halburg permanent magnet array and a coil is combined to improve the damping amplitude and realize the adjustment of the damping. Beijing Institute of Technology has proposed a damped rotational positioning spring (1. "An Eddy Current Damping Magnetic Spring Based on Multiple Halbach Permanent Magnet Arrays," CN201610855716.9; 2. "An Eddy Current Damping Magnetic Spring," CN201610857360.2). This design leverages the magnetic field generated by the face-to-face interaction of multiple coaxially nested Halbach permanent magnet arrays and the magnetic flux leakage from their back surfaces to achieve high positioning stiffness and high-speed switching. The key features of this technical solution are: 1) The excitation magnetic field generated by the Halbach permanent magnet arrays that comprise the damped rotational positioning spring exhibits significant imbalance, significantly improving magnetic field utilization. 2) Using Halbach permanent magnet arrays to construct an eddy current damper only damps rotational motion and is unable to isolate low-frequency, micro-vibration disturbances found in the environments of large precision instruments and equipment. 3) The damping cannot be adjusted in real time to dynamically change the external excitation frequency, limiting its ability to provide optimal vibration isolation under varying operating conditions.

[0007] In summary, the question is how to develop a large-scale precision micro-vibration isolation and damping control device that adapts to changes in excitation frequency through structural and principle innovation. Without changing its large load capacity, it can produce high damping characteristics for low-frequency micro-vibration excitation and low damping characteristics for high-frequency micro-vibration excitation, effectively eliminating or attenuating micro-vibration interference of various frequencies in the environment, and ensuring the optimal working environment for precision instruments and equipment. This innovation not only marks a new leap forward in the technology for optimizing the working environment of precision instruments and equipment, but will also directly propel their operating accuracy to new heights, meeting the urgent demand for high-precision, high-stability equipment in current and future scientific research and industrial fields. Summary of the Invention

[0008] The core goal of this invention is to solve the adverse effects of environmental vibration interference on the research results of precision instruments and equipment. In view of the current lack of research on large-scale precision micro-vibration isolation damping control mechanisms and the inability to adapt to changes in excitation frequency, a large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device is proposed. This device adopts 4 n ( n ≥1, n∈N+ ) layers are arranged in an axial array, and adjacent layers are magnetized perpendicularly to each other, forming an inner permanent magnet array and an outer permanent magnet array that are coaxially nested to form a high magnetic density excitation magnetic field. When the conductor plate moves relative to the high magnetic density excitation magnetic field, a high damping characteristic is generated. In addition, by precisely controlling the magnitude and direction of the current flowing through the coil coaxially nested on the outside of the conductor plate, it responds immediately to changes in the external excitation frequency and dynamically adjusts the damping force to ensure high damping characteristics during low-frequency micro-vibration excitation and low damping characteristics during high-frequency micro-vibration excitation, thereby providing the best vibration isolation effect under different working conditions. This active and passive composite damping control strategy not only enhances the adaptability and stability of large-scale precision micro-vibration isolation, but also significantly improves its vibration isolation performance in complex vibration environments, thereby ensuring that various types of precision instruments and equipment operate in the optimal working environment, thereby promoting further improvement in their accuracy and performance.

[0009] The technical solution of the present invention is:

[0010] The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device can accurately adapt to the change of the excitation frequency and generate adjustable high damping characteristics in real time, thereby realizing the effective isolation of large-scale precision micro-vibration isolation from micro-vibration interference of different frequencies. It is characterized by comprising a load platform, a vertically magnetized space electromagnetic array and a large-scale air-floating micro-vibrator. The large-scale air-floating micro-vibrator includes an upper cover, an elastic membrane, an air tank and compressed gas. The upper cover is fixedly connected to the load platform and forms a closed air chamber with the elastic membrane and the air tank. Pressurized gas is introduced into the closed air chamber. The vertical magnetization space electromagnetic array comprises an inner permanent magnet array, an inner magnetic array fixing part, an inner permanent magnet array cover plate, an outer permanent magnet array, an outer magnetic array fixing part, a conductor plate and a coil. The inner permanent magnet array, the conductor plate and the outer permanent magnet array are coaxially nested and arranged in sequence with equal gaps along the radius from the axis outward; the inner magnetic array fixing part is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixed and the top of which maintains a certain gap with the load platform; the inner permanent magnet array is coaxially tightly fitted and fixedly installed on the outer side of the inner magnetic array fixing part, and the top of the inner permanent magnet array is connected to the outer surface of the inner magnetic array fixing part. The array cover is pressed and fixed; the conductor plate is an annular cylinder with deep grooves set along the circumference of the outer cylindrical surface. Its top is fixedly connected to the load platform and the bottom maintains a certain gap with the ground; the coil is coaxially tightly fitted and fixedly installed in the deep groove on the outer side of the conductor plate. The magnitude and direction of the current is adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the external magnetic array fixture is an annular cylinder with deep grooves set along the circumference on the inner side. The external permanent magnet array is coaxially tightly fitted and fixedly installed inside the external magnetic array fixture. deep groove; the inner permanent magnet array and the outer permanent magnet array are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and perpendicularly magnetized between adjacent layers, and the heights of the magnetic rings in the same layer in the inner permanent magnet array and the outer permanent magnet array are equal, the heights of the magnetic rings in the odd-numbered layers are equal, and the heights of the magnetic rings in the even-numbered layers are equal; the first layer of magnetic rings in the inner permanent magnet array and the outer permanent magnet array are magnetized in the same direction in the radial direction, and their bottom surfaces coincide; on the right half of the front cross-sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0011] Preferably, the vertical magnetization space electromagnetic array and the large air-floating isolation micro-vibrator are arranged in adjacent gaps or the vertical magnetization space electromagnetic array is coaxially nested and fixedly installed in the gas tank of the large air-floating isolation micro-vibrator.

[0012] Preferably, the number of layers of the inner permanent magnet array and the outer permanent magnet array satisfies 4 n ,in n ≥1, n∈N + .

[0013] Preferably, the conductor plate is made of copper, aluminum, iron or nickel.

[0014] Preferably, the deep grooves of the outer cylindrical array of the conductor plate are rectangular, triangular or arc-shaped.

[0015] Preferably, the large air-floating micro-vibrator is sealed by a steel ring, an O-ring, a diaphragm or a pressure self-sealing method.

[0016] Preferably, the pressure of the compressed gas is 0.1 MPa~0.8 MPa.

[0017] Preferably, the radially magnetized magnetic rings in the inner permanent magnet array and the outer permanent magnet array are composed of multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0018] Preferably, the inner magnetic array fixing member and the outer magnetic array fixing member are made of non-magnetic or weakly magnetic conductive metal materials such as aluminum alloy, titanium alloy, etc.

[0019] The technical innovation and good effects of the present invention are:

[0020] (1) The present invention innovatively proposes a vertical magnetization space electromagnetic array technology with adjustable high damping characteristics. Multiple layers of axially arrayed, uniform cross-section magnetic rings with perpendicular magnetization between adjacent layers are coaxially nested to form inner and outer permanent magnet arrays, thereby forming a high magnetic density excitation magnetic field around the conductor plate, achieving high damping characteristics. The damping force is dynamically adjusted by precisely controlling the magnitude and direction of the current flowing through the coil coaxially nested outside the conductor plate, achieving efficient attenuation of vibration interference. This not only improves the magnetic field utilization rate, but also achieves adjustable damping characteristics. This is one of the innovative points that distinguish the present invention from the existing technology.

[0021] (2) The present invention can ensure that large-scale precision micro-vibration isolation can provide the best vibration isolation effect under different working conditions. When the vertically magnetized space electromagnetic array and the large air-floating micro-vibration isolation are connected in parallel to support the load platform, the frequency changes of the external micro-vibration interference are sensed in real time to adjust the magnitude and direction of the current in the coil coaxially embedded on the outer side of the conductor plate. This can achieve dynamic regulation of the vibration isolation damping without changing the large load of the vibration isolator, ensuring high damping characteristics when low-frequency micro-vibration is excited and low damping characteristics when high-frequency micro-vibration is excited. This can not only enhance the stability of the large-scale precision micro-vibration isolation system, but also enable it to maintain high-performance vibration isolation effect in complex and changing vibration environments, providing a "super-quiet" working environment for cutting-edge instruments and equipment, thereby effectively promoting a leap-forward improvement in the accuracy of precision instruments and equipment. This is the second innovation that distinguishes the present invention from the existing technology.

[0022] (3) The present invention has a fast response speed and high stability, avoiding the nonlinearity caused by friction. The vertically magnetized space electromagnetic array uses the principle of electromagnetic induction to produce an eddy current damping effect. It not only has an immediate and sensitive response speed, but also has high stability. Its damping force is almost unaffected by the external environment (such as temperature fluctuations and humidity changes). In addition, the non-contact magnetic levitation design has no mechanical friction, avoiding the nonlinearity caused by friction. It not only extends the service life, but also reduces subsequent maintenance costs and improves the economic efficiency of the device. This is the third innovation that distinguishes the present invention from the existing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional view of an electromagnetic array in a perpendicularly magnetized space;

[0024] Figure 2 It is a front cross-sectional view of a vertically magnetized space electromagnetic array;

[0025] Figure 3 and Figure 4 They are respectively a three-dimensional diagram and a front cross-sectional view of Example 1 of a large-scale precision micro-vibration isolation adaptive active-passive composite spatial electromagnetic array damping control device;

[0026] Figure 5 and Figure 6 They are respectively a three-dimensional diagram and a front cross-sectional view of Example 2 of a large-scale precision micro-vibration isolation adaptive active-passive composite spatial electromagnetic array damping control device;

[0027] Figures 7 to 13 Schematic diagram of the relative positions and magnetization directions of the inner and outer permanent magnet arrays when 4, 5, 6, 8, 10, 12 and 15 tile-shaped magnets are spliced ​​together to form a radially magnetized magnetic ring.

[0028] Explanation of the part numbers in the figure: 1 ground, 2 inner permanent magnetic array, 3 inner magnetic array fixing part, 4 outer permanent magnetic array, 5 outer magnetic array fixing part, 6 conductor plate, 7 compressed gas, 8 load platform, 9 vertical magnetization space electromagnetic array, 10 large air-floating micro-vibrator, 11 upper cover, 12 elastic membrane, 13 gas tank, 14 inner permanent magnetic array cover, 15 coil. DETAILED DESCRIPTION

[0029] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0030] The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device can accurately adapt to the change of the excitation frequency and generate adjustable high damping characteristics in real time, thereby realizing the effective isolation of large-scale precision micro-vibration isolation from micro-vibration interference of different frequencies. It is characterized by comprising a load platform 8, a vertically magnetized space electromagnetic array 9 and a large-scale air-floating micro-vibrator 10. The large-scale air-floating micro-vibrator 10 comprises an upper cover 11, an elastic membrane 12, an air tank 13 and compressed gas 7. The upper cover 11 is fixedly connected to the load platform 8 and forms a closed air chamber with the elastic membrane 12 and the air tank 13. Compressed gas 7 is introduced into the air chamber; the vertical magnetization space electromagnetic array 9 includes an inner permanent magnet array 2, an inner magnetic array fixing part 3, an inner permanent magnet array cover 14, an outer permanent magnet array 4, an outer magnetic array fixing part 5, a conductor plate 6 and a coil 15. The inner permanent magnet array 2, the conductor plate 6 and the outer permanent magnet array 4 are coaxially nested and arranged in sequence with equal gaps along the radius from the axis to the outside; the inner magnetic array fixing part 3 is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixed and the top maintains a certain gap with the load platform 8; the inner permanent magnet array 2 is coaxially tightly fitted and fixedly mounted on the outer side of the inner magnetic array fixing part 3 , its top is pressed and fixed by the inner permanent magnetic array cover 14; the conductor plate 6 is an annular cylinder with a deep groove set along the circumference of the outer cylindrical surface, its top is fixedly connected to the load platform 8, and the bottom maintains a certain gap with the ground 1; the coil 15 is coaxially tightly fitted and fixedly installed in the deep groove on the outer side of the conductor plate 6, and the magnitude and direction of the current is adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the outer magnetic array fixing member 5 is an annular cylinder with a deep groove set along the circumference on the inner side, and the outer permanent magnetic array 4 is coaxially tightly fitted and fixedly installed on the outer magnetic array In the deep groove on the inner side of the column fixing member 5; the inner permanent magnet array 2 and the outer permanent magnet array 4 are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and perpendicularly magnetized between adjacent layers, and the heights of the magnetic rings in the same layer in the inner permanent magnet array 2 and the outer permanent magnet array 4 are equal, the heights of the magnetic rings in the odd layers are equal, and the heights of the magnetic rings in the even layers are equal; the first layer of magnetic rings in the inner permanent magnet array 2 and the outer permanent magnet array 4 are magnetized in the same direction in the radial direction, and their bottom surfaces coincide; on the right half of the front cross-sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0031] As a specific implementation, the vertical magnetization space electromagnetic array 9 and the large air-floating isolation micro-vibrator 10 are arranged in adjacent gaps or the vertical magnetization space electromagnetic array 9 is coaxially nested and fixedly installed in the gas tank 13 of the large air-floating isolation micro-vibrator 10 .

[0032] As a specific embodiment, the number of layers of the inner permanent magnetic array 2 and the outer permanent magnetic array 4 satisfies 4. n ,in n ≥1, n∈N + .

[0033] As a specific implementation, the conductor plate 6 is made of copper, aluminum, iron or nickel.

[0034] As a specific implementation, the deep grooves of the cylindrical array outside the conductor plate 6 are rectangular, triangular or arc-shaped.

[0035] As a specific implementation, the large air-floating micro-vibrator 10 adopts a steel ring seal, an O-ring seal, a diaphragm seal or a pressure self-sealing method.

[0036] As a specific implementation, the pressure of the compressed gas 7 is 0.1 MPa to 0.8 MPa.

[0037] As a specific embodiment, the radially magnetized magnetic rings in the inner permanent magnet array 2 and the outer permanent magnet array 4 are composed of multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0038] As a specific implementation, the inner magnetic array fixing member 3 and the outer magnetic array fixing member 5 are made of non-magnetic or weakly magnetic conductive metal materials such as aluminum alloy, titanium alloy, etc.

[0039] The following combination Figures 1 to 4 An embodiment of the present invention is given.

[0040] The large-scale, precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device consists of a load platform 8, a perpendicularly magnetized space electromagnetic array 9, and a large air-floating micro-vibrator 10. The perpendicularly magnetized space electromagnetic array 9 and the large air-floating micro-vibrator 10 are arranged adjacent to each other in a gap and support the load platform 8 in parallel. The large air-floating micro-vibrator 10, the core device of ultra-precision air-floating micro-vibrator technology, is a non-metallic spring that uses the compressibility of compressed gas 7 filled in an elastic membrane 12 to achieve elastic support. Structurally, the large air-floating micro-vibrator 10 consists of an upper cover 11, an elastic membrane 12, a gas tank 13, and compressed gas 7. The upper cover 11 is fixedly connected to the load platform 8 and forms a sealed air chamber with the elastic membrane 12 and gas tank 13 through a steel ring seal, O-ring seal, diaphragm seal, or pressure self-sealing method. Compressed gas 7 at a pressure of 0.1 MPa to 0.8 MPa is introduced into the sealed chamber. When external microvibration interference acts on the large air-floating microvibration isolation device 10, the compressed gas 7 within the sealed air chamber compresses and expands according to the frequency and amplitude of the microvibration, effectively absorbing and dissipating the vibration energy and achieving a vibration isolation effect. Furthermore, by adjusting the pressure of the compressed gas 7 within the sealed air chamber, stable support for vibration isolation devices of varying mass and high-performance mid- and high-frequency vibration isolation can be achieved.

[0041] The vertical magnetization space electromagnetic array 9 includes an inner permanent magnet array 2, an inner permanent magnet array fixture 3, an inner permanent magnet array cover 14, an outer permanent magnet array 4, an outer permanent magnet array fixture 5, a conductor plate 6, and a coil 15. The inner permanent magnet array 2, the conductor plate 6, and the outer permanent magnet array 4 are coaxially nested and arranged with equal spacing from the axis along the radius outward. The inner magnetic array fixture 3, the inner permanent magnet array cover 14, and the outer magnetic array fixture 5 are all made of non-magnetic or weakly magnetic aluminum alloy or titanium alloy. The inner magnetic array fixture 3 is a cylindrical structure with an inverted T-shaped cross-section. Its bottom is fixed and the top maintains a gap of 30mm to 100mm with the load platform 8. The inner permanent magnet array 22 is coaxially tightly fitted and fixedly mounted on the outer side of the inner magnetic array fixture 33. Its top is pressed and fixed by the inner permanent magnet array cover 14. Conductor plate 6 is an annular cylinder made of copper, aluminum, iron, or nickel, with deep grooves along its circumference. Highly conductive materials reduce the resistive losses caused by eddy currents and increase their intensity. The top of conductor plate 6 is fixedly connected to load platform 8, and the bottom maintains a 30-100 mm gap with ground 1. Coil 15 is wound in a loop of copper wire with a diameter of no less than 0.25 mm and no more than 2 mm. Each layer or section of copper wire is insulated with insulating varnish, paper, or tubing to prevent short circuits. Coil 15 is equal in height to the inner and outer permanent magnet arrays 2 and 4, and the current flowing through it does not exceed 10 A. Heat dissipation efficiency can be improved by increasing the heat dissipation area of ​​coil 15 (e.g., using a heat sink or increasing air circulation). Alternatively, high-efficiency cooling methods such as liquid cooling or phase change cooling can be used to quickly and effectively dissipate the heat generated by coil 15 during operation, preventing overheating. The coil 15 is coaxially and tightly fitted and fixedly installed in the deep groove on the outer side of the conductor plate 6. The magnitude and direction of the current flowing through it are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference, ensuring high damping characteristics during low-frequency micro-vibration excitation and low damping characteristics during high-frequency micro-vibration excitation; the external magnetic array fixing part is an annular cylinder with a deep groove arranged along the circumference on the inner side, and the external permanent magnet array 4 is coaxially and tightly fitted and fixedly installed in the deep groove on the inner side of the external magnetic array fixing part.

[0042] The inner permanent magnet array 2 and the outer permanent magnet array 4 are both composed of multiple layers of magnetic rings with equal cross-sections arranged in an axial array and perpendicular magnetization between adjacent layers. The heights of the magnetic rings in the same layer of the inner permanent magnet array 2 and the outer permanent magnet array 4 are equal. The magnetic rings are all N44H brand NiFeB permanent magnets with a remanence of 13.54kGs, an intrinsic coercive force of 12.66kOe, and a relative magnetic permeability of 1. μ r=1.23. The inner and outer radii of the inner permanent magnet array 2 are 13mm and 64mm, respectively. The height of the inner magnetic rings in odd-numbered layers is 20mm, and the height of the inner magnetic rings in even-numbered layers is 34mm. The inner and outer radii of the outer permanent magnet array 4 are 70mm and 100mm, respectively. The height of the outer magnetic rings in odd-numbered layers is 20mm, and the height of the outer magnetic rings in even-numbered layers is 34mm. The first layer of inner and outer magnetic rings are both magnetized radially toward the axis, and their bottom surfaces overlap. On the right half of the front cross-sectional view, with each additional layer of magnetic rings, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise. The radially magnetized magnetic rings in the inner and outer permanent magnet arrays 2 and 4 are both composed of eight 42° tile-shaped magnets, with a gap of 3° between adjacent tile-shaped magnets. When the heights of the magnetic rings in the same layer in the inner permanent magnetic array 2 and the outer permanent magnetic array 4 are equal, the damping value generated by the perpendicular magnetization spatial electromagnetic array 9 is the largest.

[0043] The large-scale air-floating micro-vibration isolation device 10 stably supports the load platform 8 in an air-floating manner and effectively isolates vibrations in the medium and high frequency bands, providing a solid support foundation for precision equipment. When the load platform 8 vibrates up and down due to vibration interference, it drives the conductor plate 6 to produce relative movement relative to the excitation magnetic field of the inner permanent magnet array 2 and the outer permanent magnet array 4. During this process, the conductor plate 6 cuts the magnetic flux lines, causing its internal magnetic flux to change, thereby exciting circular eddy currents on the conductor surface. These eddy currents then apply a damping force on the conductor plate 6 that is opposite to its movement direction and proportional to its movement speed. When the frequency of the external micro-vibration interference changes, the controller adopts a speed feedback control algorithm. By precisely regulating the magnitude and direction of the current flowing through the coil 15 coaxially nested on the outside of the conductor plate 6, it can immediately respond to changes in the external excitation frequency and dynamically adjust the damping force to ensure high damping characteristics when low-frequency micro-vibration excitation is presented and low damping characteristics when high-frequency micro-vibration excitation is presented, thereby providing the best vibration isolation effect under different working conditions. From the perspective of energy conversion, eddy currents generate a damping force in the magnetic field that is proportional to the velocity. This damping force effectively converts the kinetic energy of the load platform 8 into electrical energy within the conductor plate 6. This electrical energy is then dissipated as heat, achieving the effect of energy dissipation and vibration reduction.

[0044] The vertically magnetized space electromagnetic array 9 utilizes magnetic levitation to generate high damping characteristics. By precisely controlling the electromagnetic field, the damping level is dynamically adjusted, effectively attenuating microvibrations of varying frequencies. Its rapid response and high-precision controllability ensure stability even in complex and variable vibration environments. As a non-contact, highly stable, adjustable damping structure, it features a lack of mechanical friction, thus avoiding nonlinearities caused by friction. This also prevents the introduction of additional stiffness, thus maintaining the stiffness characteristics of the vibration isolation system and fully ensuring the isolation bandwidth. Furthermore, this structure exhibits excellent dynamic performance in the low-speed range, while its damping characteristics exhibit high linearity, making it particularly effective for microvibration isolation. Using the vertically magnetized space electromagnetic array 9 in parallel with a large air-floating microvibrator 10 to support the load platform 8 improves vibration isolation performance without compromising load mass, providing an ultra-quiet working environment for cutting-edge equipment such as ultra-precision lithography machines, high-resolution satellite cameras, and ultra-precision machine tools.

[0045] Figure 5 and Figure 6 The three-dimensional diagram and front cross-sectional view of the second embodiment of a large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device are shown. The vertically magnetized space electromagnetic array 9 is coaxially nested and fixedly mounted within the gas tank 13, supporting the load platform 8 in parallel with the large air-floating micro-vibration isolation device 10. The top of the conductor plate 6 is fixedly connected to the bottom of the upper cover 11, with a gap of 30mm to 100mm between its bottom and the upper surface of the lower base of the gas tank 13. The inner permanent magnet array 22 is coaxially and tightly fitted and fixedly mounted on the outer side of the inner magnetic array fixture 33, with its top being pressed and fixed by the inner permanent magnet array cover 14. The outer permanent magnet array 4 is coaxially and tightly fitted and fixedly mounted within the deep groove inside the outer magnetic array fixture. The bottoms of the inner magnetic array fixture 3 and the outer magnetic array fixture 5 are fixedly mounted within the gas tank 13 of the large air-floating micro-vibration isolation device 10, fixedly connected to the upper surface of the lower base of the gas tank 13, with a gap of 30mm to 100mm between their tops and the bottom of the upper cover 11.

[0046] The radial magnetization process of the magnetic ring is complicated and the magnetization effect cannot be guaranteed. Therefore, multiple tile-shaped magnets that are uniformly magnetized in the radial direction are often spliced ​​together. Figures 7 to 13 Schematic diagram of the relative positions and magnetization directions of the inner permanent magnet array 2 and the outer permanent magnet array 4 when 4, 5, 6, 8, 10, 12 and 15 tile magnets are respectively spliced ​​together to form a radially magnetized magnetic ring. The gap between adjacent tile magnets is usually no more than 3° to ensure the continuity and uniformity of the magnetic field.

Claims

1. A large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device can accurately adapt to changes in the excitation frequency and generate adjustable high damping characteristics in real time, thereby achieving effective isolation of large-scale precision micro-vibration isolation from micro-vibration interference of different frequencies; its characteristics are: The invention comprises a load platform (8), a vertical magnetization space electromagnetic array (9) and a large air-floating micro-vibrator (10), wherein the large air-floating micro-vibrator (10) comprises an upper cover plate (11), an elastic membrane (12), a gas tank (13), and compressed gas (7); the upper cover plate (11) is fixedly connected to the load platform (8), and forms a closed air chamber with the elastic membrane (12) and the gas tank (13); the compressed gas (7) is introduced into the closed air chamber; the vertical magnetization space electromagnetic array (9) comprises an inner permanent magnetic array (2), an inner magnetic array fixing member (3), an inner permanent magnetic array cover plate (14), and a plurality of inner permanent magnetic array fixing members (4). ), an outer permanent magnetic array (4), an outer magnetic array fixing member (5), a conductor plate (6) and a coil (15), an inner permanent magnetic array (2), a conductor plate (6) and an outer permanent magnetic array (4) are coaxially nested and arranged in sequence with equal gaps along the radius from the axis outward; the inner magnetic array fixing member (3) is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixed and the top of which maintains a certain gap with the load platform (8); the inner permanent magnetic array (2) is coaxially tightly matched and fixedly installed on the outer side of the inner magnetic array fixing member (3), and the top of which is pressed and fixed by the inner permanent magnetic array cover (14); the conductor plate (6 ) is an annular cylinder with a deep groove set along the circumference of the outer cylindrical surface, the top of which is fixedly connected to the load platform (8) and the bottom maintains a certain gap with the ground (1); the coil (15) is coaxially tightly fitted and fixedly installed in the deep groove on the outer side of the conductor plate (6), and the magnitude and direction of the current flowing through it are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the external magnetic array fixing part (5) is an annular cylinder with a deep groove set along the circumference of the inner side, and the external permanent magnetic array (4) is coaxially tightly fitted and fixedly installed in the deep groove inside the external magnetic array fixing part (5) The inner permanent magnet array (2) and the outer permanent magnet array (4) are both composed of multiple layers of magnetic rings of equal cross-section arranged in an axial array and magnetized perpendicularly between adjacent layers, and the heights of the magnetic rings in the same layer in the inner permanent magnet array (2) and the outer permanent magnet array (4) are equal, the heights of the magnetic rings in the odd-numbered layers are equal, and the heights of the magnetic rings in the even-numbered layers are equal; the first layer of magnetic rings in the inner permanent magnet array (2) and the outer permanent magnet array (4) are magnetized in the same radial direction, and their bottom surfaces overlap; on the right half of the front cross-sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

2. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The vertical magnetization space electromagnetic array (9) and the large air-floating isolation micro-vibrator (10) are arranged in adjacent gaps, or the vertical magnetization space electromagnetic array (9) is coaxially nested and fixedly installed in the gas tank (13) of the large air-floating isolation micro-vibrator (10).

3. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The number of layers of the inner permanent magnetic array (2) and the outer permanent magnetic array (4) satisfies 4 n ,in n ≥1, n ∈N + .

4. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The conductor plate (6) is made of copper, aluminum, iron or nickel.

5. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 or 4, characterized in that: The deep grooves of the outer cylindrical array of the conductor plate (6) are rectangular, triangular or arc-shaped.

6. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 or 2, characterized in that: The large air-floating micro-vibrator (10) adopts a steel ring seal, an O-type seal, a diaphragm seal or a pressure self-sealing method.

7. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The pressure of the compressed gas (7) is 0.1 MPa to 0.8 MPa.

8. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 or 3, characterized in that: The radially magnetized magnetic rings in the inner permanent magnet array (2) and the outer permanent magnet array (4) are formed by splicing a plurality of tile-shaped magnets uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 or 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

9. The large-scale precision micro-vibration isolation adaptive active-passive composite space electromagnetic array damping control device according to claim 1 is characterized by: The inner magnetic array fixing part (3) and the outer magnetic array fixing part (5) are made of non-magnetic or weakly magnetic aluminum alloy or titanium alloy.

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