Flange connecting structure of reaction cavity of semiconductor equipment and connecting method of flange connecting structure

Abstract

The invention discloses a semiconductor equipment reaction cavity flange connecting structure and a connecting method thereof, and relates to the technical field of semiconductor equipment reaction cavities, the semiconductor equipment reaction cavity flange connecting structure comprises a connector and a flange body, and the flange body is arranged at the front end of the connector; the fixing block is arranged on one side of the exterior of the flange body, a first round hole is integrally formed in the fixing block, a connecting column is connected to the interior of the fixing block, the connecting column is movably clamped in the first round hole, and fixing clamps are symmetrically arranged on the two sides of the exterior of the flange body; clamping grooves are integrally formed in the inner sides of the fixing clamps, the fixing clamps are connected with the connecting columns through connecting pieces, the fixing clamps can swing, the fixing clamps on the two sides are closed, the clamping grooves in the inner sides of the fixing clamps are clamped with the outer side of the flange body, and then the flange body can be clamped and fixed; and the flanges can be spliced together and are not easy to loosen.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment reaction chambers, in particular to a semiconductor equipment reaction chamber flange connection structure and a connection method thereof. Background Art

[0002] The semiconductor equipment reaction chamber is a vital component in the semiconductor industry. It directly affects the quality and output of semiconductor devices. The semiconductor equipment reaction chamber is mainly composed of a reaction chamber, a vacuum sealing interface, a gas nozzle, a heating element, a substrate clamping device and a reaction chamber support frame. Under high vacuum conditions, the main working principle of the semiconductor equipment reaction chamber is to evenly introduce the reaction gas into the reaction chamber through the gas nozzle, while the heating element maintains a constant temperature in the reaction chamber. The reaction gas reacts with the substrate surface to achieve the purpose of deposition or etching. During the whole process, the vacuum sealing interface ensures a high vacuum environment in the reaction chamber to prevent external interference.

[0003] Existing semiconductor reaction chambers are provided with flange connection structures for docking with the outside, but the flange connection structure is usually connected in a relatively simple manner, which makes the docking more complicated. Bolts need to be aligned with threaded holes to connect and fix the flanges. For this reason, we provide a semiconductor equipment reaction chamber flange connection structure and a connection method thereof. Summary of the invention

[0004] The purpose of the present invention is to provide a semiconductor equipment reaction chamber flange connection structure and a connection method thereof, so as to solve the problem that the existing flange connection structure mentioned in the above background technology is usually connected in a relatively simple manner, which makes the docking more complicated and requires bolts to align with threaded holes to connect and fix the flanges.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a semiconductor equipment reaction chamber flange connection structure, comprising a joint and a flange body, wherein the flange body is arranged at the front end of the joint; Also includes: A fixing block is arranged on one side of the exterior of the flange body, a first circular hole is integrally formed inside the fixing block, a connecting column is connected to the interior of the fixing block, and the connecting column is movably engaged with the interior of the first circular hole, fixing clips are symmetrically arranged on both sides of the exterior of the flange body, a locking groove is integrally formed on the inner side of the fixing clip, and the outer edge of the flange body is engaged with the inside of the locking groove, a first connecting piece is arranged above one end of the fixing clip on one side, and a second connecting piece is arranged below one end of the fixing clip on the other side, both the first connecting piece and the second connecting piece are provided with through holes, the through holes are engaged with the connecting column, and the fixing clips on both sides are swung on the outside of the flange body through the connecting pieces.

[0006] Preferably, the outer surfaces of the upper and lower ends of the connecting column are both provided with first external threads, the upper and lower ends of the connecting column are both connected with first fixing nuts, and the first fixing nuts are threadedly connected to the first external threads.

[0007] Preferably, a circular groove is provided on the outer end surface of the flange body, and limiting plates are provided at both upper and lower ends of the locking groove. The limiting plates are provided in a semicircular arc shape, and the bottom of the limiting plates are provided in a triangular shape, and the limiting plates are movably engaged in the inside of the circular groove. Movable grooves are provided on the surfaces of both upper and lower ends of the locking groove, and the limiting plates are movably engaged in the inside of the movable groove.

[0008] Preferably, a plurality of evenly distributed third circular holes are provided at both upper and lower ends of the fixing clamp, and the third circular holes are connected to the movable groove, a plurality of evenly distributed telescopic rods are provided at the upper end of the limiting plate, and the plurality of telescopic rods extend to the outside of the fixing clamp through the corresponding third circular holes, a semicircular plate is provided at the other end of the telescopic rod, a spring is provided between the semicircular plate and the fixing clamp, and the spring is sleeved on the outside of the telescopic rod.

[0009] Preferably, a threaded hole is provided in the middle of the semicircular plate, screws are provided in the middle of the upper and lower ends of the fixing clamp, and the screws are threadedly connected to the threaded holes, and a twisting disk is provided at one end of the screw, and the twisting disk is located on the outside of the semicircular plate.

[0010] Preferably, the screw rod and the fixing clamp are connected via a bearing.

[0011] Preferably, a first connecting plate is provided on the outer side of the fixing clamp on one side, and a second connecting plate is provided on the outer side of the fixing clamp on the other side, a second connecting groove is provided at the middle front end of the second connecting plate, a first connecting groove is provided at the middle front end of the first connecting plate, a connecting rod is provided inside the first connecting groove, the connecting rod swings inside the first connecting groove through a rotating shaft, and the connecting rod is movably engaged inside the second connecting groove.

[0012] Preferably, a second external thread is disposed on the outside of the front end of the connecting rod, a second fixing nut is disposed on the outside of the front end of the connecting rod, and the second fixing nut is threadedly connected to the second external thread.

[0013] Preferably, the connection method of the flange connection structure of the semiconductor equipment reaction chamber comprises the following steps: Step 1: Butt and fit the flange body to be butted with the flange body of the joint, align the fixing blocks on the outside of the two flange bodies, and then pass the connecting column through the first circular hole between the two fixing blocks, align and limit the flange body and the fixing blocks; Step 2: Then, two sets of fixing clips are installed on the outer side of the flange body through the engagement of the connecting pieces and the connecting columns. The connecting pieces of the two sets of fixing clips are staggered and respectively engaged with the upper and lower ends of the connecting columns. Then, the two sets of fixing clips are closed so that the engagement grooves wrap the outer edge of the flange body. Step 3: At this time, the limit plate on the inner side of the engaging groove is inside the movable groove. When the fixing clamp is closed, the screw is rotated by twisting the disk, and the rotation of the screw drives the semicircular arc plate to descend, so that the telescopic rod moves. The other end of the telescopic rod is connected to the limit plate, so that the limit plate can be lowered and engaged into the inside of the circular groove, so that the fixing clamp can be limited, so that the fixing clamp is stuck outside the flange body and cannot be opened or closed; Step 4: After the two sets of fixing clips are closed, the first connecting plate is fitted with the second connecting plate, the connecting rod is rotated from the first connecting groove to the second connecting groove, and then the second fixing nut is tightened so that the second fixing nut is fitted on the outer side of the second connecting plate, so that the first connecting plate and the second connecting plate are tightly fitted together; Step 5: Finally, screw the first fixing nut into the upper and lower ends of the connecting column respectively to limit and fix the first connecting piece and the second connecting piece, and fix the two ends of the fixing clip so that the fixing clip is firmly engaged on the outside of the flange body and is not easy to loosen.

[0014] Compared with the prior art, the present invention has the following beneficial effects: The present invention arranges fixing clips symmetrically on both sides of the outside of the flange body, and arranges fixing blocks on the outside of the flange body. The fixing blocks are connected by connecting columns, and the fixing clips and the connecting columns are connected by connecting pieces, so that the fixing clips can be swung, and the fixing clips on both sides are closed, so that the engaging grooves on the inner sides of the fixing clips are engaged with the outer sides of the flange body, so that the flange body can be engaged and fixed, so that the flanges can be spliced ​​together and are not prone to loosening.

[0015] A circular groove is provided on the surface of the flange body, and limit plates are provided at the upper and lower ends of the locking groove. The limit plates are movably connected. When the fixing clamp is closed on both sides of the flange body, the semicircular arc plate can be driven down by a screw rod to drive the limit plate to descend and lock on the outside of the circular groove, so that the fixing clamp is locked on the outside of the flange body, and the fixing clamp is limited so that the fixing clamp will not expand to the outside.

[0016] External threads are provided at the upper and lower ends of the connecting column. When the fixing clamp is installed on the connecting column and engaged with the outer side of the flange body, the first fixing nut can be screwed on the upper and lower ends of the connecting column to limit the fixing clamp and fix one end of the fixing clamp. Two connecting plates are provided at the other end of the fixing clamp. The connecting plates are connected and locked by the connecting rod and the second fixing nut, so that the other end of the fixing clamp can be fixed, so that the fixing clamp is fixed to the outside of the flange and is not easy to loosen. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the overall structure of the present invention; Figure 3 It is a schematic diagram of the fixing clamp structure of the present invention; Figure 4 It is a front view of the fixing clip of the present invention; Figure 5 It is a side cross-sectional view of the connection between the fixing clamp and the flange body of the present invention; Figure 6 It is a cross-sectional view of the connection between the connecting column and the fixing block of the present invention; Figure 7 A top cross-sectional view of the connection between the first connecting plate and the second connecting plate of the present invention; In the figure: 1, joint; 2, flange body; 3, circular groove; 4, fixing clip; 5, fixing block; 6, connecting column; 7, first external thread; 8, first circular hole; 9, first fixing nut; 10, snap-fit ​​groove; 11, first connecting member; 12, second connecting member; 13, through hole; 14, semicircular arc plate; 15, telescopic rod; 16, spring; 17, limit plate; 18, movable groove; 19, third circular hole; 20, first connecting plate; 21, second connecting plate; 22, second connecting groove; 23, first connecting groove; 24, rotating shaft; 25, connecting rod; 26, second external thread; 27, second fixing nut; 28, twisting plate; 29, screw; 30, threaded hole; 31, bearing. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] See also Figure 1-7 , an embodiment provided by the present invention: a semiconductor equipment reaction chamber flange connection structure, comprising a joint 1 and a flange body 2, wherein the flange body 2 is arranged at the front end of the joint 1; Also includes: A fixing block 5 is arranged on one side of the outside of the flange body 2, and a first circular hole 8 is integrally formed inside the fixing block 5. A connecting column 6 is connected inside the fixing block 5, and the connecting column 6 is movably engaged inside the first circular hole 8. Fixing clips 4 are symmetrically arranged on both sides of the outside of the flange body 2, and a clamping groove 10 is integrally formed on the inner side of the fixing clip 4, and the outer edge of the flange body 2 is engaged with the inside of the clamping groove 10. A first connecting member 11 is arranged above one end of the fixing clip 4 on one side, and a second connecting member 12 is arranged below one end of the fixing clip 4 on the other side. Both the first connecting member 11 and the second connecting member 12 are provided with through holes 13, which are engaged with the connecting column 6, and the fixing clips 4 on both sides are swung outside the flange body 2 through the connecting members.

[0020] The fixing clip 4 is connected to the connecting column 6 by a connecting piece, so that the fixing clip 4 can swing. The fixing clips 4 on both sides are closed, so that the locking groove 10 on the inner side of the fixing clip 4 is locked with the outer side of the flange body 2, and the flange body 2 can be locked and fixed, so that the flange can be spliced ​​together without loosening.

[0021] See also Figure 3 The outer surfaces of the upper and lower ends of the connecting column 6 are provided with first external threads 7, and the upper and lower ends of the connecting column 6 are connected with first fixing nuts 9, and the first fixing nuts 9 are threadedly connected with the first external threads 7 to lock and limit one end of the fixing clip 4 to prevent it from falling off.

[0022] See also Figure 4-5 A circular groove 3 is provided on the outer end surface of the flange body 2, and limiting plates 17 are provided at the upper and lower ends of the inner part of the engaging groove 10. The limiting plate 17 is arranged in a semicircular arc shape, and the bottom of the limiting plate 17 is arranged in a triangular shape, and the limiting plate 17 is movably engaged with the inner part of the circular groove 3. Active grooves 18 are provided on the surfaces of the upper and lower ends of the inner part of the engaging groove 10, and the limiting plate 17 is movably engaged with the inner part of the active groove 18. After the fixing clip 4 is closed on the outside of the flange body 2, the fixing clip 4 is fixed and limited by the engagement of the limiting plate 17 with the circular groove 3.

[0023] See also Figure 4-5 A plurality of evenly distributed third circular holes 19 are provided at both upper and lower ends of the fixing clamp 4, and the third circular holes 19 are communicated with the movable groove 18. A plurality of evenly distributed telescopic rods 15 are provided at the upper end of the limiting plate 17, and the plurality of telescopic rods 15 extend to the outside of the fixing clamp 4 through the corresponding third circular holes 19. A semicircular plate 14 is provided at the other end of the telescopic rod 15, and a spring 16 is provided between the semicircular plate 14 and the fixing clamp 4, and the spring 16 is sleeved on the outside of the telescopic rod 15. The spring 16 can keep the semicircular plate 14 balanced when moving up and down.

[0024] See also Figure 4A threaded hole 30 is provided in the middle of the semicircular plate 14, and a screw 29 is provided in the middle of the upper and lower ends of the fixing clamp 4, and the screw 29 is threadedly connected to the threaded hole 30, and a twisting disk 28 is provided at one end of the screw 29, and the twisting disk 28 is located on the outside of the semicircular plate 14, which is used to drive the limit plate 17 to move up and down.

[0025] See also Figure 4 The screw rod 29 and the fixing clamp 4 are connected via a bearing 31 to facilitate the rotation of the screw rod 29 .

[0026] See also Figure 7 A first connecting plate 20 is provided on the outer side of the fixing clamp 4 on one side, and a second connecting plate 21 is provided on the outer side of the fixing clamp 4 on the other side. A second connecting groove 22 is provided at the middle front end of the second connecting plate 21, and a first connecting groove 23 is provided at the middle front end of the first connecting plate 20. A connecting rod 25 is provided inside the first connecting groove 23. The connecting rod 25 swings inside the first connecting groove 23 through a rotating shaft 24, and the connecting rod 25 is movably engaged inside the second connecting groove 22 to lock the closure between the two sets of fixing clamps 4.

[0027] See also Figure 7 A second external thread 26 is provided on the outside of the front end of the connecting rod 25, and a second fixing nut 27 is provided on the outside of the front end of the connecting rod 25, and the second fixing nut 27 is threadedly connected with the second external thread 26. After the connecting rod 25 is engaged into the second connecting groove 22, the second fixing nut 27 is used to tighten the connecting rod 25 to fix the connecting rod 25 inside the second connecting groove 22.

[0028] See also Figure 1-7 , a connection method for a flange connection structure of a semiconductor device reaction chamber comprises the following steps: Step 1: dock and fit the flange body 2 to be docked with the flange body 2 of the joint 1, align the fixing blocks 5 on the outsides of the two flange bodies 2, and then pass the connecting column 6 through the first circular hole 8 between the two fixing blocks 5, align and limit the flange body 2 and the fixing block 5; Step 2: Then, two sets of fixing clips 4 are installed on the outer side of the flange body 2 through the engagement of the connecting pieces and the connecting columns 6. The connecting pieces of the two sets of fixing clips 4 are staggered and respectively engaged with the upper and lower ends of the connecting columns 6. Then, the two sets of fixing clips 4 are closed so that the engagement grooves 10 wrap the outer edge of the flange body 2. Step 3: At this time, the limiting plate 17 inside the engaging groove 10 is inside the movable groove 18. When the fixing clip 4 is closed, the screw 29 is rotated by twisting the disk 28. The rotation of the screw 29 drives the semicircular arc plate 14 to descend, so that the telescopic rod 15 moves. The other end of the telescopic rod 15 is connected to the limiting plate 17, so that the limiting plate 17 can be lowered and engaged into the inside of the circular groove 3, so that the fixing clip 4 can be limited, so that the fixing clip 4 is stuck outside the flange body 2 and cannot be opened or closed; Step 4: After the two sets of fixing clips 4 are closed, the first connecting plate 20 is fitted with the second connecting plate 21, and the connecting rod 25 is rotated from the first connecting groove 23 to the second connecting groove 22, and then the second fixing nut 27 is tightened so that the second fixing nut 27 is fitted on the outer side of the second connecting plate 21, so that the first connecting plate 20 and the second connecting plate 21 are tightly fitted together; Step 5: Finally, screw the first fixing nut 9 into the upper and lower ends of the connecting column 6 respectively, limit and fix the first connecting piece 11 and the second connecting piece 12, and fix the two ends of the fixing clip 4 so that the fixing clip 4 is firmly engaged on the outer side of the flange body 2 and is not easy to loosen.

[0029] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A semiconductor equipment reaction chamber flange connection structure, comprising a joint (1) and a flange body (2), wherein the flange body (2) is arranged at the front end of the joint (1); Features: Also includes: A fixing block (5) is arranged on one side of the outside of the flange body (2); a first circular hole (8) is integrally formed inside the fixing block (5); a connecting column (6) is connected inside the fixing block (5), and the connecting column (6) is movably engaged inside the first circular hole (8); fixing clips (4) are symmetrically arranged on both sides of the outside of the flange body (2); a locking groove (10) is integrally formed inside the fixing clip (4), and the outer edge of the flange body (2) is engaged inside the locking groove (10); a first connecting member (11) is arranged above one end of the fixing clip (4) on one side, and a second connecting member (12) is arranged below one end of the fixing clip (4) on the other side; both the first connecting member (11) and the second connecting member (12) are provided with through holes (13), and the through holes (13) are engaged with the connecting column (6); and the fixing clips (4) on both sides swing outside the flange body (2) through the connecting members.

2. The semiconductor equipment reaction chamber flange connection structure according to claim 1, characterized in that: The outer surfaces of the upper and lower ends of the connecting column (6) are both provided with first external threads (7), the upper and lower ends of the connecting column (6) are both connected with first fixing nuts (9), and the first fixing nuts (9) are threadedly connected to the first external threads (7).

3. The semiconductor equipment reaction chamber flange connection structure according to claim 1, characterized in that: The outer end surface of the flange body (2) is provided with a circular groove (3), and the upper and lower ends of the clamping groove (10) are provided with limit plates (17), the limit plates (17) are provided in a semicircular arc shape, the bottom of the limit plates (17) is provided in a triangular shape, and the limit plates (17) are movably engaged in the circular groove (3), and the upper and lower ends of the clamping groove (10) are provided with movable grooves (18), and the limit plates (17) are movably engaged in the movable grooves (18).

4. The semiconductor equipment reaction chamber flange connection structure according to claim 3, characterized in that: The fixing clamp (4) is provided with a plurality of evenly distributed third circular holes (19) at both upper and lower ends, and the third circular holes (19) are communicated with the movable groove (18); the upper end of the limit plate (17) is provided with a plurality of evenly distributed telescopic rods (15), and the plurality of telescopic rods (15) extend to the outside of the fixing clamp (4) through the corresponding third circular holes (19); the other end of the telescopic rod (15) is provided with a semicircular arc plate (14); a spring (16) is provided between the semicircular arc plate (14) and the fixing clamp (4), and the spring (16) is sleeved on the outside of the telescopic rod (15).

5. The semiconductor equipment reaction chamber flange connection structure according to claim 4, characterized in that: A threaded hole (30) is provided in the middle of the semicircular plate (14), a screw rod (29) is provided in the middle of the upper and lower ends of the fixing clamp (4), and the screw rod (29) is threadedly connected to the threaded hole (30), and a twisting disk (28) is provided at one end of the screw rod (29), and the twisting disk (28) is located outside the semicircular plate (14).

6. The semiconductor equipment reaction chamber flange connection structure according to claim 5, characterized in that: The screw rod (29) and the fixing clamp (4) are connected via a bearing (31).

7. The semiconductor equipment reaction chamber flange connection structure according to claim 1, characterized in that: A first connecting plate (20) is arranged on the outer side of the fixing clamp (4) on one side, and a second connecting plate (21) is arranged on the outer side of the fixing clamp (4) on the other side; a second connecting groove (22) is arranged at the middle front end of the second connecting plate (21); a first connecting groove (23) is arranged at the middle front end of the first connecting plate (20); a connecting rod (25) is arranged inside the first connecting groove (23); the connecting rod (25) swings inside the first connecting groove (23) via a rotating shaft (24), and the connecting rod (25) is movably engaged inside the second connecting groove (22).

8. The semiconductor equipment reaction chamber flange connection structure according to claim 1, characterized in that: A second external thread (26) is provided on the outside of the front end of the connecting rod (25), a second fixing nut (27) is provided on the outside of the front end of the connecting rod (25), and the second fixing nut (27) is threadedly connected to the second external thread (26).

9. A connection method for a semiconductor device reaction chamber flange connection structure, based on the semiconductor device reaction chamber flange connection structure according to claims 1 to 8, characterized in that: The following steps are involved: Step 1: The flange body (2) to be butted is butted and fitted with the flange body (2) of the joint (1), so that the fixing blocks (5) on the outside of the two flange bodies (2) are aligned, and then the connecting column (6) is passed through the first circular hole (8) between the two fixing blocks (5), so that the flange body (2) and the fixing block (5) are aligned and limited; Step 2: Then, two sets of fixing clips (4) are installed on the outer side of the flange body (2) through the engagement of the connecting pieces with the connecting column (6), the connecting pieces of the two sets of fixing clips (4) are arranged alternately and respectively engaged with the upper and lower ends of the connecting column (6), and then the two sets of fixing clips (4) are closed so that the engagement grooves (10) wrap the outer edge of the flange body (2); Step 3: At this time, the limiting plate (17) on the inner side of the engaging groove (10) is located inside the movable groove (18). When the fixing clamp (4) is closed, the screw rod (29) is rotated by twisting the disk (28). The rotation of the screw rod (29) drives the semicircular arc plate (14) to descend, so that the telescopic rod (15) moves. The other end of the telescopic rod (15) is connected to the limiting plate (17), so that the limiting plate (17) can be lowered and engaged into the inside of the circular groove (3), so that the fixing clamp (4) can be limited, so that the fixing clamp (4) is stuck outside the flange body (2) and cannot be opened or closed; Step 4: After the two sets of fixing clamps (4) are closed, the first connecting plate (20) and the second connecting plate (21) are fitted together, and the connecting rod (25) is rotated from the first connecting groove (23) to the second connecting groove (22), and then the second fixing nut (27) is tightened so that the second fixing nut (27) fits on the outer side of the second connecting plate (21), so that the first connecting plate (20) and the second connecting plate (21) are tightly fitted together; Step 5: Finally, screw the first fixing nut (9) into the upper and lower ends of the connecting column (6) respectively, limit and fix the first connecting piece (11) and the second connecting piece (12), and fix the two ends of the fixing clip (4) so ​​that the fixing clip (4) is firmly engaged on the outer side of the flange body (2) and is not easy to loosen.

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