Glass plate inspection device and glass plate manufacturing method

Abstract

The invention provides a glass plate inspection device capable of inspecting a plurality of inspection items of a glass plate by using one inspection device and a glass plate manufacturing method. A glass plate inspection device (1) is provided with a placement unit (2) and a measurement unit (3). The mounting section (2) is provided with a mounting surface comprising a plurality of protrusions, and a plurality of support members (6a) disposed between the protrusions. The placement unit (2) has: a support mode for warpage measurement in which the glass plate (G) is supported by the placement surface in a state in which the support member (6a) is disposed at the standby position; and a support mode for deflection measurement in which the glass plate (G) is supported by the support member (6a) in a state in which the support member (6a) is disposed at the support position.

Description

Technical Field

[0001] The present invention relates to a glass plate inspection device and a glass plate manufacturing method. Background Art

[0002] In recent years, light and flexible thin-walled glass substrates are used in displays such as liquid crystal displays and organic EL displays. Thin film transistors (TFTs) are formed by uniformly coating various films on the surface of the glass substrate used for the display using an optical process (exposure process, development process, etc.).

[0003] In order to form a thin film transistor with high precision, a glass substrate is required to have high dimensional accuracy. Therefore, in the manufacturing process of a glass plate, a process of inspecting the shape of the manufactured glass plate is implemented.

[0004] As an apparatus used in such an inspection process, there is an apparatus for measuring the warpage of a glass plate. For example, Patent Document 1 discloses an inspection apparatus (glass plate measuring apparatus) having a platform for placing a glass plate and an optical measuring mechanism that utilizes irradiation and reflection of light during measurement (see Technical Solution 1 of the document).

[0005] In addition, as a glass plate inspection device, there is a device that measures the deflection difference of the glass plate. For example, Patent Document 2 discloses an inspection device including two support members that support the glass plate from below and a laser meter that measures the deflection of the glass plate supported by the two support members (see paragraphs 0029, 0030 and Figure 3 ).

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2021-148446

[0009] Patent Document 2: Japanese Patent Application Publication No. 2009-117301 Summary of the invention

[0010] Problems to be solved by the invention

[0011] In recent years, in order to cope with the trend of larger displays, the glass plates used in the displays have also been made larger. Under such circumstances, in order to inspect multiple shape characteristics of the glass plates, such as warping and bending, multiple inspection devices must be used. As a result, the inspection process becomes complicated and the glass plates cannot be manufactured efficiently.

[0012] The present invention has been made in view of the above circumstances, and an object of the present invention is to inspect a plurality of inspection items of a glass plate using one inspection device.

[0013] Solutions to Solve Problems

[0014] (1) The present invention is a glass plate inspection device for solving the above-mentioned problems, comprising a loading portion for loading a glass plate and a measuring portion for measuring the shape of the glass plate loaded on the loading portion, wherein the glass plate inspection device is characterized in that the loading portion comprises a loading surface composed of a plurality of convex portions and a plurality of supporting members arranged between the convex portions, the supporting members being movable between a supporting position and a standby position, wherein in the supporting position, the upper end of the supporting member is above the loading surface, and in the standby position, the upper end of the supporting member is below the loading surface, and the loading portion has: a support mode for warpage measurement, in which the glass plate is supported by the loading surface when the supporting member is arranged at the standby position; and a support mode for deflection measurement, in which the glass plate is supported by the supporting member when the supporting member is arranged at the supporting position.

[0015] According to this configuration, the placement section has a support pattern for warpage measurement and a support pattern for deflection measurement, and thus a plurality of inspection items (warpage, deflection) of the glass sheet can be inspected by one inspection device.

[0016] (2) In the glass sheet inspection apparatus described in (1) above, the placement surface of the placement portion may include a discharge hole capable of discharging a fluid.

[0017] According to this configuration, the placement section can support the glass sheet in a state where the glass sheet is separated from the placement surface by discharging the fluid from the discharge holes of the placement surface.

[0018] (3) In the glass plate inspection device described in (2) above, the support mode for measuring the warpage may include a support mode in which the glass plate is supported in a state in which the glass plate is floated from the loading surface by utilizing a fluid discharged from the discharge hole of the loading surface, and the shape of the glass plate measured by the measuring unit includes a warping shape in a state in which the glass plate is floated from the loading surface.

[0019] According to this configuration, the support mode for warp measurement includes a support mode in which the glass plate is directly supported by the placement surface and a support mode in which the glass plate is indirectly supported via a fluid. Thus, the warp of the glass plate can be measured with higher accuracy.

[0020] (4) In the glass plate inspection device described in any one of (1) to (3) above, the loading portion may include a positioning portion that abuts against a portion of two adjacent sides of the glass plate, and the loading surface of the loading portion may be a surface inclined in a manner to guide the glass plate toward the positioning portion.

[0021] According to this configuration, the glass sheet is guided toward the positioning section by the placement surface of the placement section, so that both sides of the glass sheet can be reliably brought into contact with the positioning section. Thus, the glass sheet can be positioned with high accuracy.

[0022] (5) In the glass plate inspection device described in any one of (1) to (4) above, the supporting member may support the glass plate by point contact or line contact. Thus, the contact area of ​​the supporting member with respect to the glass plate can be minimized. In addition, the supporting device can support the glass plate in a stable posture.

[0023] (6) The method for manufacturing a glass plate of the present invention is used to solve the above-mentioned problems, and is characterized by comprising an inspection step of inspecting the shape of the glass plate using the glass plate inspection device described in any one of (1) to (5). With this configuration, the glass plate can be manufactured efficiently.

[0024] Effects of the Invention

[0025] According to the present invention, a plurality of inspection items of a glass plate can be inspected by one inspection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a perspective view of the inspection device.

[0027] Figure 2 It is a top view of the inspection device.

[0028] Figure 3 yes Figure 2 A cross-sectional view of the carrying portion taken along the line of sight III-III.

[0029] Figure 4 It is the front view of the supporting device.

[0030] Figure 5 It is a side view showing the operation of the positioning unit of the inspection device.

[0031] Figure 6 This is a front view showing the operation of the positioning unit of the inspection device.

[0032] Figure 7 1 is a flowchart showing a method for manufacturing a glass plate.

[0033] Figure 8 It is a flowchart which shows the inspection process.

[0034] Fig. 9A It is a side view showing a preparatory process of the inspection process.

[0035] Fig. 9B It is a side view showing a preparatory process of the inspection process.

[0036] Fig. 10A This is a front view showing a preparatory process for the inspection process.

[0037] Fig. 10B This is a front view showing a preparatory process for the inspection process.

[0038] Fig.11 It is a front view showing the measuring process of the inspection process.

[0039] Fig.12 It is a top view showing the measuring process of the inspection process.

[0040] Fig.13 It is a front view showing the measuring process of the inspection process.

[0041] Fig.14 It is a front view showing the measuring process of the inspection process.

[0042] Fig.15 It is a top view showing the measuring process of the inspection process.

[0043] Fig.16 It is a front view showing the measuring process of the inspection process.

[0044] Fig.17 It is a front view showing the measuring process of the inspection process.

[0045] Fig.18 It is a top view showing the measuring process of the inspection process.

[0046] Fig.19 It is a top view of the inspection device.

[0047] Fig. 20 It is a three-dimensional diagram of the supporting member.

[0048] Description of Reference Numerals

[0049] 1. Inspection device

[0050] 2 Loading part

[0051] 3. Measurement Department

[0052] 5 Platform

[0053] 5a Upper surface of the platform (loading surface)

[0054] 5b discharge hole

[0055] 6a Supporting member

[0056] G Glass Plate

[0057] S6 inspection process. DETAILED DESCRIPTION

[0058] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figures 1 to 18 A first embodiment of a glass plate inspection apparatus and a glass plate manufacturing method using the inspection apparatus according to the present invention will be described.

[0059] like Figure 1 as well as Figure 2 As shown, the inspection device 1 includes: a placement section 2 for placing a glass plate G; a measuring section 3 for measuring the shape of the glass plate G placed on the placement section 2; and a control section 4 for controlling the placement section 2 and the measuring section 3.

[0060] The glass plate G to be inspected is, for example, a rectangular glass original plate (mother glass plate) from which one or more product glass plates are extracted. The thickness of the glass original plate and the product glass plate is, for example, 0.05 mm to 1.2 mm. The size of the glass original plate is, for example, 1000 mm × 1000 mm to 3500 mm × 3500 mm, and the size of the product glass plate is, for example, 700 mm × 700 mm to 3500 mm × 3500 mm. The product glass plate is used, for example, as a substrate or cover glass for a display. It should be noted that the substrate and cover glass of the display are not limited to flat panels, but can also be used in curved panels and foldable panels.

[0061] Hereinafter, one surface of the glass plate G is referred to as a first main surface Ga, and the other surface is referred to as a second main surface Gb. In addition, the sides of the glass plate G are referred to as a first side GS1, a second side GS2, a third side GS3, and a fourth side GS4.

[0062] The placement section 2 includes a plurality of stages 5 , a plurality of support devices 6 provided between the stages 5 , positioning sections 7 a and 7 b for positioning the glass sheet G, and a guide member 8 for guiding the glass sheet G to the stages 5 .

[0063] The platform 5 is a long strip-shaped member, and is arranged in a manner that its length direction is along the carrying-in direction A1 and the carrying-out direction A2 of the glass plate G. The platform 5 is made of a metal such as an aluminum alloy. The upper surface 5a of the platform 5 functions as a loading surface for the glass plate G to be loaded. The upper surface 5a of the platform 5 has a plurality of discharge holes 5b for discharging (spraying) a fluid (such as a gas). The discharge holes 5b are connected to a pipe not shown and a fluid pressure delivery device such as a compressor or a pump.

[0064] The plurality of platforms 5 are arranged at predetermined intervals in the width direction X orthogonal to the longitudinal direction Y. With this arrangement, a groove 9 is formed between two adjacent platforms 5. The placement portion 2 is configured by alternately arranging the platforms 5 and the grooves 9. In other words, the placement portion 2 is configured by alternately arranging the convex portions formed by the plurality of platforms 5 and the concave portions formed by the plurality of grooves 9.

[0065] The width W of the terrace 5 (the width of the upper surface 5a) as the convex portion is preferably 50 mm to 200 mm. The interval D between the terraces 5 in the width direction X, that is, the width of the groove 9 is preferably 50 mm to 200 mm.

[0066] The upper surfaces 5a of the plurality of platforms 5 arranged at regular intervals constitute a rectangular placement surface for placing the glass plate G. Figure 1 as well as Figure 2 As shown, the placement surface has a first corner portion 10a, a second corner portion 10b, a third corner portion 10c, and a fourth corner portion 10d.

[0067] The placement surface functions as a guide surface for guiding the glass plate G toward the positioning portions 7a and 7b. Figure 3 As shown, the mounting surface is configured to follow the direction of its diagonal line (in Figure 2 The angle θ formed by the mounting surface with respect to the horizontal direction (horizontal line H) is preferably not less than 0.1° and not more than 5°.

[0068] The support device 6 is disposed between the upper surfaces 5a (convex portions) of the adjacent platforms 5 in the width direction X. In other words, the support device 6 is provided within the range of the groove portion 9 in the mounting portion 2. The plurality of support devices 6 are disposed at predetermined intervals in the longitudinal direction Y of the platform 5.

[0069] like Figure 4 As shown, the support device 6 includes a support member 6a that supports the glass sheet G and a lifting device 6b that moves the support member 6a in the up-down direction.

[0070] The support member 6a is configured in a rod or block shape. The upper end 6a1 of the support member 6a functions as a support portion for supporting the second main surface Gb, which is the lower surface of the glass plate G. The upper end 6a1 of the support member 6a is configured by a curved surface (e.g., a hemispherical surface) in a manner of point contact with the second main surface Gb of the glass plate G.

[0071] The support members 6a are arranged between the platforms 5 arranged at intervals in the width direction X. In other words, the upper surface 5a (mounting surface) of the platform 5 is arranged between the support members 6a arranged at intervals in the width direction X.

[0072] like Figure 4As shown, the lifting device 6b can move the support member 6a to a standby position represented by a solid line and a support position represented by a double-dashed line. In the standby position, the upper end 6a1 of the support member 6a is below the upper surface 5a of the platform 5. In the support position, the upper end 6a1 of the support member 6a is above the upper surface 5a of the platform 5.

[0073] The lifting device 6b is provided for each supporting member 6a so that the supporting member 6a can be operated individually. Thereby, the supporting device 6 can support glass sheets G of various sizes according to the sizes.

[0074] The positioning parts 7a and 7b include a first positioning part 7a and a second positioning part 7b that abut against a part of two adjacent sides GS1 and GS2 of the glass plate G. The first positioning part 7a contacts the first side GS1 of the glass plate G placed on the placement part 2, thereby positioning the first side GS1. The second positioning part 7b contacts the second side GS2 of the glass plate G placed on the placement part 2, thereby positioning the second side GS2.

[0075] Each positioning portion 7a, 7b is configured to be movable in the vertical direction and the horizontal direction. Figure 5 As shown, the first positioning portion 7a is configured to be able to move up and down to a standby position (a position indicated by a solid line) and a retreat position (a position indicated by a single dot-dash line), in which the first positioning portion 7a is below the upper surface 5a of the platform 5 at the standby position, and the retreat position is above the standby position and in which the first positioning portion 7a is separated from the first side GS1 of the glass plate G in the horizontal direction. Moreover, the first positioning portion 7a is configured to be able to move horizontally to the retreat position and the positioning position (a position indicated by a double dot-dash line) in contact with the first side GS1 of the glass plate G.

[0076] like Figure 6 As shown, the second positioning portion 7b is configured to be able to move up and down to a standby position (a position indicated by a solid line) and a retreat position (a position indicated by a single dot-dash line), in which the second positioning portion 7b is below the upper surface 5a of the platform 5 at the standby position, and the retreat position is above the standby position and in which the second positioning portion 7b is separated from the second side GS2 of the glass plate G in the horizontal direction. Moreover, the second positioning portion 7b is configured to be able to move horizontally to the retreat position and the positioning position (a position indicated by a double dot-dash line) in contact with the second side GS2 of the glass plate G.

[0077] The guide member 8 is provided at a position separated from the end of the stage 5 in the longitudinal direction Y. In the present embodiment, the guide member 8 is composed of, for example, a guide roller in contact with the second main surface Gb as the lower surface of the glass plate G. The structure of the guide member 8 is not limited to the present embodiment.

[0078] like Figure 1 as well as Figure 2 As shown, the measurement unit 3 includes a sensor unit 11 and driving units 12 a and 12 b for moving the sensor unit 11 .

[0079] The sensor unit 11 is composed of, for example, a laser displacement meter, but the structure of the sensor unit 11 is not limited to this embodiment. The sensor unit 11 is preferably composed of a non-contact displacement meter such as a laser displacement meter or an ultrasonic displacement meter.

[0080] The driving parts 12a and 12b include a first driving part 12a supporting the sensor part 11 and a second driving part 12b supporting the first driving part 12a. The first driving part 12a includes a first strip-shaped supporting part 13 extending along the width direction X and a second supporting part 14 supporting an end of the first supporting part 13. The first supporting part 13 is configured to reciprocate the sensor part 11 along the width direction X. The second supporting part 14 is a strip-shaped member (leg) extending in the up-down direction.

[0081] The second driving unit 12b is configured as a pair of supporting platforms that movably support the second supporting unit 14 of the first driving unit 12a. The second driving unit 12b is configured as a long member extending along the carrying-in and carrying-out directions A1 and A2 of the glass sheet G. The second driving unit 12b is arranged outside the mounting unit 2 in the width direction X in a manner parallel to the platform 5.

[0082] The second drive unit 12b includes a guide rail 15 for guiding the second support portion 14 of the first drive unit 12a. With this configuration, the second drive unit 12b can reciprocate the first drive unit 12a along the longitudinal direction Y of the stage 5 or the carrying-in and carrying-out directions A1 and A2.

[0083] The control unit 4 is composed of a computer that controls the placement unit 2 and the measuring unit 3 and performs various calculations. The control unit 4 performs control related to the discharge operation of the fluid from the discharge hole 5b of the platform 5 in the placement unit 2, the operation of the support device 6 and the positioning units 7a and 7b of the placement unit 2, the operation of the sensor unit 11 and the driving units 12a and 12b of the measuring unit 3, and calculations related to the data measured by the measuring unit 3.

[0084] Hereinafter, a method of inspecting the glass sheet G and a method of manufacturing the glass sheet G using the inspection device 1 having the above-mentioned configuration will be described.

[0085] like Figure 7 As shown, the method for manufacturing the glass sheet G includes a forming step S1 , an annealing step S2 , a cooling step S3 , a first cutting step S4 , a second cutting step S5 , and an inspection step S6 .

[0086] In the forming step S1, a glass ribbon is continuously formed from molten glass using a forming device. The forming device has a forming body capable of performing an overflow down-draw method. The forming body causes the molten glass to overflow from an overflow trough formed on the upper portion thereof and flow down along the side wall surfaces on both sides of the forming body. Moreover, the forming body causes the molten glass flowing down to fuse at the lower end of each side wall surface. Thus, a glass ribbon having a predetermined width is formed. It should be noted that the forming step S1 may also perform other down-draw methods such as a slit down-draw method.

[0087] The annealing process S2 is performed in an annealing furnace arranged below the forming device. In the annealing process S2, the glass ribbon is conveyed downward by rollers arranged in the annealing furnace. A predetermined temperature gradient is set in the annealing furnace, and the glass ribbon is annealed by passing through the annealing furnace. In the cooling process S3 after the annealing process S2, the glass ribbon is cooled to near room temperature while passing through a cooling area arranged below the annealing furnace.

[0088] In the first cutting step S4, the midway portion of the glass ribbon is cut along the width direction by a cutting device disposed below the cooling zone, thereby cutting out a glass sheet G of a predetermined size. That is, in the first cutting step S4, a scoring line along the width direction is formed at the midway portion of the glass ribbon moving downward by a scoring device (scoring step), and a portion of the glass ribbon is broken along the scoring line to form a single glass sheet G (breaking step).

[0089] The second cutting step S5 is a step of removing the end portion (unnecessary portion) in the width direction of the glass sheet G cut out in the first cutting step S4. The second cutting step S5 is similar to the first cutting step S4, in which a scoring line is formed on a portion of the glass sheet G (scoring step), and then the end portion of the glass sheet G is broken by a breaking device (breaking step).

[0090] In the inspection step S6 , the shape of the glass sheet G is measured by the inspection device 1 , and the quality of the glass sheet G is determined based on the measured value by the control unit 4 .

[0091] like Figure 8 As shown, the inspection step S6 includes a preparation step S61 , a measurement step S62 , and an evaluation step S63 .

[0092] In the preparation step S61, a sample glass plate to be inspected is selected at a predetermined timing from the glass plates G formed through the second cutting step S5. The sample glass plates G may be selected, for example, at predetermined intervals or at predetermined numbers of sheets. The predetermined intervals and the predetermined numbers of sheets are appropriately selected according to the manufacturing conditions and inspection results of the glass plates G. Thereafter, the sample glass plates G are carried into the loading section 2 of the inspection device 1 (carrying-in step).

[0093] like Figure 1 as well as Figure 2 As shown, in the loading process, the first main surface Ga of the sampling glass plate G is set as the upper surface, and the second main surface Gb is set as the lower surface. The sampling glass plate G is sent to the platform 5 along the loading direction A1 in a state where the second main surface Gb contacts the guide member 8. At this time, the guide member 8 guides the second main surface Gb of the sampling glass plate G along the loading direction A1 while rotating. In addition, in the loading process, the gas is ejected from the ejection hole 5b under the control of the control unit 4. In this way, the contact between the sampling glass plate G and the platform 5 can be avoided, and the damage of the sampling glass plate G in the loading process can be prevented. During the period when the sampling glass plate G is loaded into the loading unit 2, the positioning parts 7a and 7b are located in the standby position, so they will not contact the sampling glass plate G.

[0094] like Figure 5 as well as Figure 6 As shown, when the sample glass plate G is carried into the placement section 2, the positioning sections 7a and 7b move from the standby position to the retracted position, and then move from the retracted position to the contact position (positioning step).

[0095] Fig. 9A as well as Fig. 10A The positional relationship between the positioning parts 7a and 7b moved to the contact position and the sampling glass plate G is shown. The first side GS1 of the sampling glass plate G placed on the placement surface is located at a position slightly separated from the first positioning part 7a. In addition, the second side GS2 of the sampling glass plate G is located at a position slightly separated from the second positioning part 7b.

[0096] Then, the platform 5 stops the exhaust of gas. As a result, the sampling glass plate G contacts the upper surface 5a of the platform 5. At this time, the upper surface 5a of the platform 5 is tilted in the direction from the third corner 10c of the mounting surface toward the first corner 10a (in the direction of Figure 2 The sampling glass plate G is guided in the direction indicated by arrow A3).

[0097] Therefore, if Fig. 9B As shown in FIG. 1 , the first side GS1 of the sampling glass plate G contacts the first positioning portion 7a located at the contact position. Fig. 10B As shown, the second side GS2 of the sample glass plate G contacts the second positioning portion 7b located at the contact position. As described above, the sample glass plate G is positioned at the reference measurement position that can be measured by the measurement unit 3.

[0098] In the measurement step S62 , the warpage amount, the deflection difference, and the plate thickness related to the shape of the sample glass plate G are measured.

[0099] In the measurement step S62, the loading section 2 of the inspection device 1 can change the support mode of the sample glass plate G according to the warp amount, deflection difference, and plate thickness as the measurement items. That is, the loading section 2 has a support mode for warp measurement, a support mode for deflection measurement, and a support mode for plate thickness measurement. In the support mode for warp measurement and the support mode for plate thickness measurement, the loading section 2 supports the sample glass plate G using the loading surface (upper surface 5a of the platform 5) in a state where the support member 6a of the support device 6 is arranged at the standby position. In the support mode for deflection measurement, the sample glass plate G is supported by the support member 6a in a state where the support member 6a of the support device 6 is arranged at the support position.

[0100] Hereinafter, a case where the warping shape (warping amount) of the sample glass plate G is measured in the measuring step S62 will be described.

[0101] The measuring unit 3, under the control of the control unit 4, measures the warping amount of the sampling glass plate G when it is placed on the loading surface (the upper surface 5a of the platform 5) (hereinafter referred to as the "first warping amount") and the warping amount of the sampling glass plate G when it is floated from the loading surface (hereinafter referred to as the "second warping amount").

[0102] The support mode for warp measurement formed by the loading portion 2 includes a first support mode in which the sampling glass plate G is directly supported by the loading surface of the loading portion 2 (the upper surface 5a of the platform 5) in order to measure the first warp amount, and a second support mode in which gas is discharged from the exhaust hole 5b of the platform 5 and the loading surface indirectly supports the sampling glass plate G with the help of the gas.

[0103] like Fig.11 As shown, the sensor unit 11 measures the first warpage amount of the sample glass plate G supported by the first support mode while moving along the width direction X. That is, the sensor unit 11 irradiates the first main surface Ga of the sample glass plate G with the laser light L while moving along the width direction X above the groove portion 9, and receives the laser light L reflected from the first main surface Ga, thereby measuring the distance from the sensor unit 11 to the first main surface Ga of the sample glass plate G (the first warpage amount).

[0104] like Fig.12As shown, a plurality of measuring points MP (measuring areas) are set on each sampling glass plate G, and the distance between the sensor unit 11 and the first main surface Ga of the sampling glass plate G is measured at each measuring point MP. The spacing between each measuring point MP is set to be, for example, not less than 10 mm and not more than 200 mm. It should be noted that each measuring point MP can be set at an equal spacing, or can be set at different spacings according to the position or direction on the sampling glass plate G. In the present embodiment, the measuring points MP are set at an equal spacing in the width direction X and the length direction Y of the platform 5, and include positions corresponding to the convex portion (platform 5) and positions corresponding to the concave portion (groove portion 9).

[0105] The sensor unit 11 is as shown in Fig.12 As shown by arrow B1 in FIG. 1 , the sensor unit 11 measures the first warpage amount at each measurement point MP while moving along the width direction X relative to the sample glass plate G placed on the placement unit 2. After completing the measurement of the measurement points MP for one row along the width direction X, the sensor unit 11 moves along the longitudinal direction Y of the stage 5 to measure the next row along the width direction X. The above sequence is repeated to measure the first warpage amount at all the measurement points MP of the sample glass plate G. The sensor unit 11 sends the obtained measurement data related to the first warpage amount to the control unit 4.

[0106] Preferably, before measuring the first warpage amount of the sample glass plate G, the first warpage amount of a reference glass plate serving as a reference of the shape of the glass plate is measured in advance, and the shape of the sample glass plate G is evaluated by comparing the first warpage amount of the reference glass plate with the first warpage amount of the sample glass plate G. The first warpage amount of the reference glass plate is measured in the same manner as the first warpage amount of the sample glass plate G. It should be noted that the reference glass plate may be composed of 3 to 10 qualified glass plates, and an average value of the first warpage amounts of these reference glass plates may be used for comparison.

[0107] When measuring the second warpage amount, the mounting unit 2 is controlled by the control unit 4 to discharge the gas from the discharge hole 5b of the stage 5. Fig.13 As shown, the sampling glass plate G supported on the upper surface 5a of the platform 5 floats from the upper surface 5a and is supported by the second support mode. The sensor unit 11 measures the shape of the first main surface Ga of the sampling glass plate G while moving along the width direction X in a state where the sampling glass plate G floats from the platform 5. That is, the sensor unit 11 irradiates the laser light L to the first main surface Ga of the sampling glass plate G while moving, receives the laser light L reflected from the first main surface Ga, and measures the distance (second warpage amount) from the sensor unit 11 to the first main surface Ga of the sampling glass plate G.

[0108] The measurement of the second warpage amount is performed on each measurement point MP set for each sample glass plate G in the same manner as the measurement of the first warpage amount.

[0109] The sensor unit 11 performs the second warpage measurement similarly to the first warpage measurement while repeatedly reciprocating along the width direction X relative to the sample glass plate G placed on the placement unit 2 (see FIG. 1 ). Fig.12 ). The sensor unit 11 sends the measurement data related to the second warpage amount to the control unit 4.

[0110] Hereinafter, a case where the deflection difference of the sample glass plate G is measured in the measuring step S62 will be described.

[0111] In order to measure the deflection difference of the sample glass plate G, first, the sample glass plate G placed on the placement surface (upper surface 5a of the platform 5) of the placement part 2 is supported by the support device 6 (supporting step). Figure 4 as well as Fig.14 As shown, the lifting device 6b of the support device 6 moves the support member 6a from the standby position to the supporting position. The support member 6a makes the upper end 6a1 contact the second main surface Gb of the sampling glass plate G supported by the stage 5 while moving from the standby position to the supporting position.

[0112] The support member 6a moves from the standby position to the support position, thereby lifting a portion of the sampling glass plate G. When the support member 6a is located at the support position, the upper end portion 6a1 of the support member 6a supports the sampling glass plate G at a position above the upper surface 5a of the platform 5. The sampling glass plate G supported by the support member 6a is separated from the upper surface 5a of the platform 5.

[0113] The control unit 4 controls the support device 6 to operate only the support device 6 located at a position overlapping with the sampling glass plate G, and supports the sampling glass plate G by the support member 6 a.

[0114] In the measuring step S62, the shape of the entire surface of the first main surface Ga in the sample glass plate G can be measured or the shape of a portion of the first main surface Ga can be measured. Here, the measurement of the shape of the entire surface of the first main surface Ga means that the sample glass plate G is supported by the maximum support member 6a that can contact the sample glass plate G, and the entire range of the sample glass plate G supported by the support member 6a is measured by the measuring unit 3.

[0115] like Fig.14 As shown, the sensor unit 11 irradiates the first main surface Ga of the sample glass plate G with laser light L while moving along the width direction X, receives the laser light L reflected from the first main surface Ga, and measures the distance from the sensor unit 11 to the first main surface Ga of the sample glass plate G.

[0116] The sensor unit 11 measures the distance to the sample glass plate G at a predetermined interval while moving in the area between two adjacent support members 6a in the width direction X. The predetermined interval in this case is, for example, 10 mm or more and 200 mm or less. Thus, the sensor unit 11 obtains measurement data at multiple positions between the two support members 6a. The data with the largest value among these measurement data can be used as the deflection between the two support members 6a.

[0117] Without being limited to this, the sensor unit 11 can measure the distance to the first main surface Ga of the sampling glass plate G at the middle position between two adjacent support members 6a in the width direction X, and use the measurement data at the middle position as the deflection. Alternatively, the measurement can be performed at a plurality of points near the middle position between two adjacent support members 6a in the width direction X.

[0118] like Fig.15 As shown in FIG. 1 , the sensor unit 11 moves along the width direction X in a manner passing directly above the support member 6a along the path indicated by the arrow B2, while measuring the deflection at each measuring point. After completing the measurement of a row of measuring points along the width direction X, the sensor unit 11 moves along the length direction Y of the platform 5 to measure the next row of measuring points along the width direction X. The above sequence is repeated to measure the deflection at all measuring points of the sample glass plate G. Thus, the deflection is measured for each area between two adjacent support members 6a in the width direction X. The sensor unit 11 sends the measured data to the control unit 4.

[0119] Then, the sample glass plate G is unloaded from the mounting section 2 and turned upside down. Then, the preparation step S61 is performed again, and the sample glass plate G is mounted on the mounting surface of the mounting section 2 so that the second principal surface Gb is the upper surface and the first principal surface Ga is the lower surface.

[0120] Thereafter, a supporting step is performed on the sample glass plate G. Thereafter, the deflection of the sample glass plate G is measured by the sensor unit 11 . The sensor unit 11 transmits the measured data to the control unit 4 .

[0121] Fig.16 as well as Fig.17 is a conceptual diagram for explaining the method for calculating the deflection difference of this embodiment. In this method, Fig.16 As shown in FIG. 1 , the first deflection d1 of the sample glass plate G when supported by the support member 6a with the first main surface Ga facing upward is measured. Next, the sample glass plate G is turned upside down as shown in FIG. Fig.17As shown in FIG. 1 , the second deflection d2 is measured when the sample glass plate G is supported by the support member 6a with the second main surface Gb facing upward. Then, the difference (|d1-d2|) between the first deflection d1 and the second deflection d2 is calculated and evaluated as a "deflection difference".

[0122] The control unit 4 detects the deflection (d1, d2) of the sample glass plate G in the region between two support members 6a adjacent in the width direction X based on the measurement data sent from the sensor unit 11. That is, the control unit 4 detects the maximum value in the region between two support members 6a adjacent in the width direction X among the measurement data sent from the sensor unit 11 as the deflection. Not limited to this, the control unit 4 can detect the measurement data at the middle position between two support members 6a adjacent in the width direction X as the deflection. The control unit 4 calculates the deflection difference based on the detected first deflection and second deflection.

[0123] Hereinafter, the case where the plate thickness of the sample glass plate G is measured in the measuring step S62 will be described. The plate thickness is measured with the sample glass plate G placed on the placement surface (upper surface 5a of the stage 5) (support mode for plate thickness measurement).

[0124] The sensor unit 11 of the measuring unit 3 irradiates the sampling glass plate G with laser light L in the range of the groove 9 so as not to overlap with the supporting member 6a. Fig.18 As shown, the sensor unit 11 measures the thickness of the sample glass plate G while reciprocating along the longitudinal direction of the stage 5 and along the path indicated by the arrow B3.

[0125] The sensor unit 11 of the measuring unit 3 can irradiate the first main surface Ga as the upper surface and the second main surface Gb as the lower surface of the sample glass plate G with laser light L, receive the reflected laser light L, and measure the plate thickness based on the difference in optical path length. Specifically, when the plate thickness of the sample glass plate G is d [mm], the optical path length difference is L [mm], and the refractive index of the sample glass plate G is n, the plate thickness can be measured based on d = L / 2n. The sensor unit 11 sends the measurement data related to the plate thickness to the control unit 4. After the measurement step S63 is completed, the used sample glass plate G is discarded.

[0126] In the evaluation step S63 , the control unit 4 determines whether the shape of the sample glass plate G measured in the measurement step S62 is good or bad.

[0127] In the evaluation step S63, the control unit 4 determines the quality of the first warp amount, the second warp amount, the bend difference, and the plate thickness of the sample glass plate G measured in the measurement step S62. The control unit 4 stores threshold values ​​(reference values) related to each warp amount, bend difference, and plate thickness.

[0128] The control unit 4 determines whether the measured values ​​of the first warp amount, the second warp amount, the deflection difference, and the plate thickness of the sampled glass plate G are within the range of each threshold value. The control unit 4 determines that the shape of the sampled glass plate G is "good" when the measured value is within the range of the threshold value. The control unit 4 determines that the shape of the sampled glass plate G is "bad" when the measured value exceeds the range of the threshold value.

[0129] In the evaluation step S63, when the sampled glass sheet G is found to be defective, this information is transmitted to the forming step S1 or the annealing step S2. In the forming step S1 or the annealing step S2, the forming conditions or the annealing conditions are corrected to eliminate the shape defect of the glass ribbon.

[0130] In addition, when the sampled glass plate G is determined to be defective, the glass plates G produced between when the sampled glass plate G was last determined to be good and when it is again determined to be good are discarded.

[0131] According to the inspection device 1 and the manufacturing method of the glass plate G of the present embodiment described above, the loading portion 2 has a support mode for warping measurement, a support mode for deflection measurement, and a support mode for plate thickness measurement, so that the warping amount, deflection difference, and plate thickness that are inspection items of the glass plate G can be inspected using one inspection device 1.

[0132] Fig.19 as well as Fig. 20 A second embodiment of the glass plate inspection device is shown. In this embodiment, the structure of the support member 6a of the support device 6 is different from that of the first embodiment. The upper end portion 6a1 of the support member 6a of this embodiment is configured in a triangular prism shape.

[0133] The upper end 6a1 of the supporting member 6a is arranged between adjacent platforms 5 (within the range of the groove 9) in such a manner that its length direction is parallel to the length direction Y of the platform 5. The upper end 6a1 of the supporting member 6a is arranged in such a manner that one corner thereof faces upward. With this structure, the upper end 6a1 of the supporting member 6a can support the second main surface Gb of the glass plate G by line contact when it is located at the supporting position. The upper end 6a1 of the supporting member 6a can be as follows: Fig.19 As shown, the platform 5 is divided into a plurality of members along the longitudinal direction Y, but may be composed of a single member.

[0134] It should be noted that the present invention is not limited to the configuration of the above-described embodiment, nor is it limited to the above-described effects. The present invention can be modified in various ways without departing from the gist of the present invention.

[0135] In the second embodiment described above, an example is shown in which the upper end 6a1 of the support member 6a in the support device 6 is configured as a triangular prism, but the present invention is not limited to this structure. The upper end 6a1 of the support member 6a may also be configured as a polygonal prism other than a triangular prism, or may be configured in a cylindrical shape, a plate shape, or other shapes.

[0136] In the above-mentioned embodiment, the loading surface is inclined at an angle θ relative to the horizontal direction, but the present invention is not limited thereto. It is also possible to configure the loading surface to be able to switch between an inclined state and a state in which the inclined surface is aligned with the horizontal plane. In addition, the loading surface may be fixed to be aligned with the horizontal plane, so that the first side GS1 and the second side GS2 of the sampling glass plate G are in contact with the positioning parts 7a and 7b, and the sampling glass plate G2 is moved to perform positioning.

[0137] In the first embodiment described above, the sensor unit 11 measures the deflection while passing directly above the support member 6a in the width direction X. However, the present invention is not limited thereto. Alternatively, the sensor unit 11 measures the deflection while passing through the middle portion of the support member 6a in the length direction Y of the platform 5 in the width direction X.

[0138] In the above-mentioned embodiment, the plurality of protrusions are formed by the long strip-shaped platform 5, but the present invention is not limited thereto. Alternatively, the protrusions may be formed by a grid-shaped platform, and the recesses may be formed by the holes between the grids. Alternatively, the recesses may be formed in a grid-shaped manner, and the platforms may be arranged between the grids.

Claims

1. A glass plate inspection device comprising a placement portion for placing a glass plate and a measuring portion for measuring a shape of the glass plate placed on the placement portion, The glass plate inspection device is characterized in that: The placing portion includes a placing surface formed of a plurality of convex portions and a plurality of supporting members arranged between the convex portions. The support member is movable between a support position and a standby position, wherein the upper end of the support member is above the placement surface in the support position and the upper end of the support member is below the placement surface in the standby position. The placement section has: a support mode for warpage measurement, in which the glass plate is supported by the placement surface when the support member is arranged at the standby position; and a support mode for deflection measurement, in which the glass plate is supported by the support member when the support member is arranged at the support position.

2. The glass plate inspection device according to claim 1, characterized in that: The placement surface of the placement portion includes a discharge hole that can discharge a fluid.

3. The glass plate inspection device according to claim 2, characterized in that: The support mode for warpage measurement includes a support mode in which the glass sheet is supported in a state where the glass sheet is floated from the mounting surface by the fluid discharged from the discharge hole of the mounting surface. The shape of the glass sheet measured by the measuring unit includes a warping shape in a state where the glass sheet is floated from the mounting surface.

4. The glass sheet inspection device according to any one of claims 1 to 3, characterized in that: The placement portion includes a positioning portion that abuts against a portion of two adjacent sides of the glass plate. The placement surface of the placement portion is a surface inclined so as to guide the glass sheet toward the positioning portion.

5. The glass sheet inspection device according to any one of claims 1 to 3, characterized in that: The supporting member supports the glass plate through point contact or line contact.

6. A method for manufacturing a glass plate, characterized in that: The method for manufacturing the glass sheet includes an inspection step of inspecting the shape of the glass sheet using the glass sheet inspection apparatus according to any one of claims 1 to 3.

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