Wafer fixing tool and wafer detection equipment using the same

Abstract

The present invention discloses a wafer fixing tool and a wafer detection device using the same, wherein the wafer fixing tool comprises: a workpiece suction cup, the upper surface of which is connected to the output shaft of a rotary motor through a connecting sleeve; an anti-chip drop mechanism, comprising a T-shaped movable seat that can be lifted and lowered on an inverted T-shaped mounting seat, the upper surface of the T-shaped movable seat is fixedly connected with a driving seat plate, the driving seat plate is folded downwardly on one side close to the inverted T-shaped mounting seat and is fixedly connected with a group of docking plates, a screw seat is movably installed on the docking plate through a guide rail mounting plate, the screw seat is respectively fixedly connected with a clamping driving plate outwardly, and the end of the clamping driving plate is fixedly connected with an anti-chip drop clamping plate downwardly; a group of driving screws with opposite rotation directions are fixedly connected to the driving seat plate through a dual-axis motor, and the driving screw extends through and extends to the outside of the clearance hole. The present invention realizes the setting of the anti-chip drop mechanism under the premise of low space occupancy, and effectively ensures the stability of the downward adsorption and fixation of the wafer workpiece.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer detection, and in particular to a wafer fixing tool and a wafer detection device using the same. Background Art

[0002] In order to improve the evaporation accuracy of the wafer, the evaporation material needs to be evaporated on the bottom surface of the wafer glass carrier. Before the wafer after evaporation enters the next production process, it needs to be illuminated and tested by the corresponding probe card. Since the evaporation material is evaporated on the bottom surface of the wafer glass carrier, during the inspection process, it needs to be fixed face down by the corresponding wafer fixing tool so that it can cooperate with the probe card on the bottom side to complete its lighting test.

[0003] Most of the existing wafer fixing tools use adsorption to fix the workpiece. Simply adsorbing and fixing the wafer workpiece on the bottom side of the workpiece suction cup by adsorption may cause the wafer to drop during the inspection process. For this reason, some manufacturers began to set up a clamping mechanism on the bottom side of the workpiece suction cup. During the clamping process, not only the clamping and loosening of the clamping mechanism needs to be controlled, but also the contact between the clamping mechanism and the periphery of the wafer workpiece needs to be controlled. As a result, the space occupied by the overall driving mechanism is extremely large, making it impossible to set up the corresponding clamping mechanism (anti-dropping mechanism) on the existing wafer fixing tool, which is very troublesome.

[0004] Therefore, the research purpose of the present invention is to design a wafer fixing tool and a wafer detection device using the same that can realize the setting of an anti-chip falling mechanism under the premise of low space occupancy, thereby effectively ensuring the stability of the face-down adsorption and fixation of the wafer workpiece. Summary of the invention

[0005] In view of the technical problems existing in the above-mentioned prior art, the present invention provides a wafer fixing tool and a wafer detection equipment using the same, which can effectively solve the technical problems existing in the above-mentioned prior art.

[0006] The technical solution of the present invention is:

[0007] A wafer fixing tool, comprising:

[0008] A workpiece suction cup, wherein the lower surface of the workpiece suction cup is provided with corresponding adsorption holes, the adsorption holes are connected to an external vacuum pump through corresponding vacuum joints, and the upper surface of the workpiece suction cup is connected to the output shaft of the corresponding rotary motor through corresponding connecting sleeves, and corresponding communication holes are respectively provided on both sides of the connecting sleeves;

[0009] The anti-dropping mechanism comprises an inverted T-shaped mounting seat fixedly connected to the workpiece suction cup on the inner side of the connecting sleeve, a corresponding T-shaped movable seat is installed on one side of the inverted T-shaped mounting seat in a liftable manner, a corresponding driving seat plate is fixedly connected to the upper surface of the T-shaped movable seat, a side of the driving seat plate close to the inverted T-shaped mounting seat is folded downward and fixedly connected to a group of docking plates with a clearance hole in the middle, a corresponding guide rail mounting plate is fixedly connected to the side of the docking plate not connected to the driving seat plate, and corresponding screw rod seats are movably installed on both sides of the guide rail mounting plate, and the screw rod seats are respectively moved to A corresponding clamping drive plate is fixed to the outside, and the ends of the clamping drive plate extend to the outside of the workpiece suction cup respectively, and are fixed downwardly with a corresponding anti-dropping clamping plate; a corresponding dual-axis motor is fixedly installed on a drive seat plate between a group of the docking plates, and a group of driving screws with opposite rotation directions are fixedly connected to the output shaft end of the dual-axis motor, and the driving screws extend through and extend to the outside of the clearance hole, and the screw seats are respectively connected to the corresponding driving screws; an electric cylinder for driving the T-shaped moving seat is fixedly connected to the end of the inverted T-shaped mounting seat away from the dual-axis motor.

[0010] Corresponding guide rails are respectively arranged on both sides of the guide rail mounting plate; the screw rod seat is arranged in an L shape, and one side of the screw rod seat is slidably mounted on the guide rails through a corresponding sliding block.

[0011] A corresponding guide sleeve is fixedly connected to the side of the screw seat that is not connected to the guide rail, and the screw seat is transmission-connected to the driving screw through the cooperation of the guide sleeve and the driving screw.

[0012] The ends of the clamping driving plates are respectively fixed downwardly with corresponding positioning blocks, and the bottom ends of the positioning blocks are respectively fixed inwardly with the anti-sheet-dropping clamping plates.

[0013] The anti-dropping clamping plate includes a clamping plate body connected to the positioning block, and one end of the clamping plate body not connected to the positioning block is integrally formed with a corresponding arc-shaped connecting arm, and both ends of the arc-shaped connecting arm are respectively integrally formed with corresponding locking teeth inwardly provided.

[0014] The anti-chip-dropping clamping plate is made of an elastic steel plate. When the clamping teeth of the anti-chip-dropping clamping plate are clamped to the periphery of the workpiece, the clamping plate body and the arc-shaped connecting arm are pressed downward.

[0015] A positioning camera is fixedly connected to the outer side of the connecting sleeve.

[0016] A wafer inspection device comprises a chassis, a probe card fixing tool, and the wafer fixing tool described above, wherein an XY axis two-dimensional moving platform is arranged on the upper part of the chassis, a rotary motor of the wafer fixing tool is fixedly mounted on the XY axis two-dimensional moving platform, an XYZ axis three-dimensional moving platform is arranged on the lower part of the chassis, the probe card fixing tool comprises a probe card mounting platform fixedly mounted on the XYZ axis three-dimensional moving platform, a probe card mounting slot is arranged in the middle part of the probe card mounting platform, corresponding probe card clamping blocks are movably arranged on the probe card mounting platforms on both sides of the probe card mounting slot, and the probe card clamping blocks are driven by corresponding pneumatic clamps; an industrial camera for detecting the lighting state of a workpiece is arranged on the bottom side of the probe card mounting platform.

[0017] A probe card installation cavity is arranged on the outer side of the chassis, in which a probe card installation plate driven by a corresponding rotating motor is rotatably installed, and an isolation door driven by a corresponding telescopic cylinder is installed at the connection between the probe card installation cavity and the chassis.

[0018] A manipulator for grabbing the probe card on the probe card mounting plate to the probe card mounting platform is fixedly connected to the chassis.

[0019] Advantages of the present invention:

[0020] 1) Based on the workpiece suction cup, the present invention is additionally provided with a compact and stable anti-piece drop mechanism, which comprises an inverted T-shaped mounting seat, a T-shaped movable seat is installed on one side of the inverted T-shaped mounting seat in a liftable manner, a driving seat plate is fixedly connected to the upper surface of the T-shaped movable seat, a side of the driving seat plate close to the inverted T-shaped mounting seat is folded downward and fixedly connected to a group of docking plates with a clearance hole in the middle, a guide rail mounting plate is fixedly connected to the side of the docking plate that is not connected to the driving seat plate, screw rod seats are movably installed on both sides of the guide rail mounting plate, clamping drive plates are fixedly connected to the screw rod seats outwardly, and anti-piece drop clamping plates are fixedly connected downward to the ends of the clamping drive plates.

[0021] In this way, the anti-dropping clamping plate can be movably installed on the outside of the docking plate under the premise of low space occupation, and then the dual-axis motor can be installed between a set of docking plates, so that a set of anti-dropping clamping plates and the dual-axis motor for driving the anti-dropping clamping plates are distributed and arranged on one side of the inverted T-shaped mounting seat; finally, the electric cylinder for lifting and lowering driving is installed at the end of the inverted T-shaped mounting seat away from the dual-axis motor. The anti-dropping mechanism can be set up under the premise of low space occupation, thereby effectively ensuring the stability of the face-down adsorption and fixation of the wafer workpiece.

[0022] 2) The guide rail mounting plate of the present invention is provided with corresponding guide rails on both sides, the screw seat is L-shaped, and one side of the screw seat is slidably mounted on the guide rail through the corresponding slider, and the screw seat is not connected to the side installed on the guide rail and is fixed with a corresponding guide sleeve, and the screw seat is transmission-connected to the drive screw through the guide sleeve and the drive screw. Through the L-shaped screw seat and the intervention of the guide sleeve, the stable drive installation of the clamping drive plate can be further achieved under the premise of simple and compact structure, thereby effectively improving the practical effect of the present invention.

[0023] 3) The anti-chip-drop clamping plate of the present invention includes a clamping plate body connected to the positioning block, and the end of the clamping plate body that is not connected to the positioning block is integrally formed with a corresponding arc-shaped connecting arm, and the two ends of the arc-shaped connecting arm are respectively integrally formed with corresponding clamping teeth inwardly arranged; the anti-chip-drop clamping plate is made of elastic steel plate, and when the clamping teeth of the anti-chip-drop clamping plate are clamped to the periphery of the workpiece, the clamping plate body and the arc-shaped connecting arm are pressed downward. Under the condition of low contact surface, the anti-chip-drop clamping of the wafer workpiece is effectively achieved through slight elastic deformation, so as to further improve the fixing effect of the wafer workpiece under the premise of low space occupation.

[0024] 4) The outer side of the chassis of the wafer inspection equipment of the present invention is provided with a probe card installation cavity, in which a probe card installation disk is rotatably installed, and a manipulator for grabbing the probe card on the probe card installation disk to the probe card installation platform is fixed to the chassis. During the inspection process, if the probe card is damaged, the manipulator can be used to replace the probe card in time to ensure that the equipment can continue to be used for inspection effectively. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of the wafer fixing tooling of the present invention.

[0026] Figure 2 It is a schematic diagram of the assembly of the anti-sheet-dropping mechanism of the present invention.

[0027] Figure 3 It is a schematic diagram of the bottom structure of the workpiece suction cup of the present invention.

[0028] Figure 4 It is a schematic structural diagram of the wafer detection equipment of the present invention.

[0029] Figure 5 It is a schematic diagram of the structure of the wafer detection equipment of the present invention after the chassis is removed.

[0030] Figure 6 It is a schematic diagram of assembling the wafer fixing tool and the probe card fixing tool of the present invention.

[0031] Figure 7It is a schematic structural diagram of the wafer fixing tool and the probe card fixing tool of the present invention.

[0032] In the attached drawings: workpiece suction cup 1, adsorption hole 101, vacuum joint 2, connecting sleeve 3, connecting hole 301, rotating motor 4, anti-dropping mechanism 5, inverted T-shaped mounting seat 501, T-shaped moving seat 502, driving seat plate 503, docking plate 504, guide rail mounting plate 505, screw seat 506, clamping driving plate 507, anti-dropping clamping plate 508, clamping plate body 5081, arc-shaped connecting arm 5082, latching tooth 5083, dual-axis motor 509, Driving screw 5010, electric cylinder 5011, give way hole 6, guide rail 7, slider 8, guide sleeve 9, positioning block 10, positioning camera 11, chassis 12, probe card fixing tool 13, probe card installation platform 1301, probe card clamping block 1302, XY axis two-dimensional moving platform 14, XYZ axis three-dimensional moving platform 15, industrial camera 16, probe card installation cavity 17, probe card installation plate 18, telescopic cylinder 19, isolation door 20, manipulator 21. DETAILED DESCRIPTION

[0033] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the embodiments in conjunction with the accompanying drawings:

[0034] Embodiment 1:

[0035] refer to Figure 1-3 , a wafer fixing tool, comprising:

[0036] A workpiece suction cup 1, wherein the lower surface of the workpiece suction cup 1 is provided with a corresponding adsorption hole 101, wherein the adsorption hole 101 is connected to an external vacuum pump through a corresponding vacuum joint 2, and the upper surface of the workpiece suction cup 1 is connected to an output shaft of a corresponding rotary motor 4 through a corresponding connecting sleeve 3, wherein corresponding communication holes 301 are respectively provided on both sides of the connecting sleeve 3;

[0037] The anti-dropping mechanism 5 comprises an inverted T-shaped mounting seat 501 fixedly connected to the workpiece suction cup 1 on the inner side of the connecting sleeve 3, a corresponding T-shaped movable seat 502 is installed on one side of the inverted T-shaped mounting seat 501 in a liftable manner, a corresponding driving seat plate 503 is fixedly connected to the upper surface of the T-shaped movable seat 502, a side of the driving seat plate 503 close to the inverted T-shaped mounting seat 501 is folded downwardly and fixedly connected to a group of docking plates 504 with a clearance hole 6 in the middle, a side of the docking plate 504 not connected to the driving seat plate 503 is fixedly connected to a corresponding guide rail mounting plate 505, and corresponding screw rod seats 506 are movably installed on both sides of the guide rail mounting plate 505, and the screw rod seats 506 are respectively fixedly connected outwardly There is a corresponding clamping drive plate 507, the ends of which extend to the outside of the workpiece suction cup 1 respectively, and are fixedly connected downwardly with a corresponding anti-dropping clamping plate 508; a corresponding dual-axis motor 509 is fixedly installed on the driving seat plate 503 between a group of docking plates 504, and a group of driving screw rods 5010 with opposite rotation directions are fixedly connected to the output shaft end of the dual-axis motor 509, and the driving screw rods 5010 extend through and extend to the outside of the clearance hole 6, and the screw rod seats 506 are respectively connected to the corresponding driving screw rods 5010; an end of the inverted T-shaped mounting seat 501 facing away from the dual-axis motor 509 is fixedly connected with an electric cylinder 5011 for driving the T-shaped movable seat 502.

[0038] On the basis of the workpiece suction cup 1, the present invention is additionally provided with an anti-piece falling mechanism 5 with a compact structure and stable operation, which includes an inverted T-shaped mounting seat 501, and a T-shaped movable seat 502 is installed on one side of the inverted T-shaped mounting seat 501 in a liftable manner, and a driving seat plate 503 is fixedly connected to the upper surface of the T-shaped movable seat 502, and the driving seat plate 503 is folded downward on one side close to the inverted T-shaped mounting seat 501 and fixedly connected to a group of docking plates 504 with a clearance hole 6 in the middle, and a guide rail mounting plate 505 is fixedly connected to the side of the docking plate 504 that is not connected to the driving seat plate 503, and screw rod seats 506 are movably installed on both sides of the guide rail mounting plate 505, and the screw rod seats 506 are respectively fixedly connected to clamping driving plates 507 outwardly, and the ends of the clamping driving plates 507 are fixedly connected downward to anti-piece falling clamping plates 508. In this way, the anti-dropping clamping plate 508 can be movably installed on the outer side of the docking plate 504 under the premise of low space occupation, and then the double-axis motor 509 is installed between a group of docking plates 504, so that a group of anti-dropping clamping plates 508 and the double-axis motor 509 for driving the anti-dropping clamping plates 508 are distributed and arranged on one side of the inverted T-shaped mounting seat 501; finally, the lifting and driving electric cylinder 5011 is installed at the end of the inverted T-shaped mounting seat 501 away from the double-axis motor 509. The anti-dropping mechanism 5 is set under the premise of low space occupation, thereby effectively ensuring the stability of the downward adsorption fixation of the wafer workpiece.

[0039] The guide rails 7 are respectively arranged on both sides of the guide rail mounting plate 505, and the screw seat 506 is arranged in an L shape, and one side thereof is limitedly slidably mounted on the guide rail 7 through a corresponding slider 8. A corresponding guide sleeve 9 is fixedly connected to the side of the screw seat 506 not connected to the guide rail 7, and the screw seat 506 is transmission-connected to the drive screw 5010 through the cooperation of the guide sleeve 9 and the drive screw 5010.

[0040] By means of the L-shaped screw seat 506 and the guide sleeve 9, the clamping drive plate 507 can be stably driven and installed under the premise of a simple and compact structure, thereby effectively improving the practical effect of the present invention.

[0041] The ends of the clamping driving plates 507 are respectively fixed downwardly with corresponding positioning blocks 10 , and the bottom ends of the positioning blocks 10 are respectively fixed inwardly with the anti-sheet-dropping clamping plates 508 .

[0042] The anti-chip-drop clamping plate 508 includes a clamping plate body 5081 connected to the positioning block, and the end of the clamping plate body 5081 that is not connected to the positioning block 10 is integrally formed with a corresponding arc-shaped connecting arm 5082, and the two ends of the arc-shaped connecting arm 5082 are respectively integrally formed with corresponding clamping teeth 5083 inwardly provided. The anti-chip-drop clamping plate 508 is made of elastic steel plate. When the clamping teeth 5083 of the anti-chip-drop clamping plate 508 are clamped to the periphery of the workpiece, the clamping plate body 5081 and the arc-shaped connecting arm 5082 are pressed downward. Under the condition of low contact surface, the anti-chip-drop clamping of the wafer workpiece is effectively achieved through slight elastic deformation, so as to further improve the fixing effect of the wafer workpiece under the premise of low space occupation.

[0043] A positioning camera 11 is fixedly connected to the outer side of the connecting sleeve 3 .

[0044] Embodiment 2:

[0045] refer to Figure 4-7A wafer inspection device comprises a chassis 12, a probe card fixing tool 13, and the wafer fixing tool described in Example 1, wherein an XY axis two-dimensional moving platform 14 is arranged on the upper part of the chassis 12, and a rotary motor 4 of the wafer fixing tool is fixedly mounted on the XY axis two-dimensional moving platform 14, and an XYZ axis three-dimensional moving platform 15 is arranged on the lower part of the chassis 12, and the probe card fixing tool 13 comprises a probe card mounting platform 1301 fixedly mounted on the XYZ axis three-dimensional moving platform 15, and a probe card mounting groove is arranged in the middle part of the probe card mounting platform 1301, and corresponding probe card clamping blocks 1302 are movably arranged on the probe card mounting platforms 1301 on both sides of the probe card mounting groove, and the probe card clamping blocks 1302 are driven by corresponding pneumatic clamps; an industrial camera 16 for detecting the lighting state of a workpiece is arranged on the bottom side of the probe card mounting platform 1301.

[0046] A probe card installation cavity 17 is provided on the outside of the chassis 12, and a probe card installation disk 18 driven by a corresponding rotating motor can be rotatably installed in the probe card installation cavity 17. An isolation door 20 driven by a corresponding telescopic cylinder 19 can be opened and closed at the connection between the probe card installation cavity 17 and the chassis 12. A manipulator 21 for grabbing the probe card on the probe card installation disk 18 to the probe card installation platform 1301 is fixedly connected to the chassis 12. During the detection process, if the probe card is damaged, the probe card can be replaced in time by the manipulator 21 to ensure that the equipment can continue to be effectively used for detection.

[0047] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A wafer fixing tool, characterized in that: include: A workpiece suction cup (1), wherein a corresponding suction hole (101) is provided on the lower surface of the workpiece suction cup (1), the suction hole (101) is connected to an external vacuum pump via a corresponding vacuum joint (2), and the upper surface of the workpiece suction cup (1) is connected to an output shaft of a corresponding rotary motor (4) via a corresponding connecting sleeve (3), and corresponding communication holes (301) are respectively provided on both sides of the connecting sleeve (3); The anti-chip-dropping mechanism (5) comprises an inverted T-shaped mounting seat (501) fixedly connected to the workpiece suction cup (1) on the inner side of the connecting sleeve (3), a corresponding T-shaped movable seat (502) being movably mounted on one side of the inverted T-shaped mounting seat (501), a corresponding driving seat plate (503) being fixedly connected to the upper surface of the T-shaped movable seat (502), a side of the driving seat plate (503) being folded downwardly and fixedly connected to a group of docking plates (504) having a clearance hole (6) in the middle thereof, a side of the docking plate (504) not connected to the driving seat plate (503) being fixedly connected to a corresponding guide rail mounting plate (505), corresponding screw rod seats (506) being movably mounted on both sides of the guide rail mounting plate (505), and the screw rod seats (506) being fixedly connected outwardly. A corresponding clamping drive plate (507) is connected, and the ends of the clamping drive plate (507) extend to the outside of the workpiece suction cup (1) and are fixedly connected downwardly to a corresponding anti-dropping clamping plate (508); a corresponding double-axis motor (509) is fixedly installed on the driving seat plate (503) between a group of the docking plates (504), and a group of driving screw rods (5010) with opposite rotation directions are fixedly connected to the output shaft ends of the double-axis motor (509), and the driving screw rods (5010) extend through and extend to the outside of the clearance hole (6), and the screw rod seats (506) are respectively connected to the corresponding driving screw rods (5010); an electric cylinder (5011) for driving the T-shaped movable seat (502) is fixedly connected to one end of the inverted T-shaped mounting seat (501) away from the double-axis motor (509).

2. A wafer fixing tool according to claim 1, characterized in that: Corresponding guide rails (7) are respectively arranged on both sides of the guide rail mounting plate (505); the screw rod seat (506) is arranged in an L-shape, and one side of the screw rod is mounted on the guide rail (7) by means of a corresponding sliding block (8) for limiting sliding movement.

3. The wafer fixing tool according to claim 2, characterized in that: A corresponding guide sleeve (9) is fixedly connected to the side of the screw seat (506) that is not connected to the guide rail (7), and the guide sleeve (9) cooperates with the driving screw (5010) to drive the screw seat (506) to the driving screw (5010).

4. The wafer fixing tool according to claim 1, characterized in that: The ends of the clamping drive plate (507) are respectively fixed downwardly with corresponding positioning blocks (10), and the bottom ends of the positioning blocks (10) are respectively fixed inwardly with the anti-sheet-dropping clamping plates (508).

5. The wafer fixing tool according to claim 4, characterized in that: The anti-dropping clamping plate (508) comprises a clamping plate body (5081) connected to the positioning block, and one end of the clamping plate body (5081) not connected to the positioning block (10) is integrally formed with a corresponding arc-shaped connecting arm (5082), and both ends of the arc-shaped connecting arm (5082) are respectively integrally formed with corresponding latching teeth (5083) disposed inwardly.

6. The wafer fixing tool according to claim 5, characterized in that: The anti-piece-drop clamping plate (508) is made of an elastic steel plate. When the clamping teeth (5083) of the anti-piece-drop clamping plate (508) are clamped to the periphery of the workpiece, the clamping plate body (5081) and the arc-shaped connecting arm (5082) are pressed downward.

7. The wafer fixing tool according to claim 1, characterized in that: A positioning camera (11) is fixedly connected to the outer side of the connecting sleeve (3).

8. A wafer inspection device, characterized in that: The invention comprises a chassis (12), a probe card fixing fixture (13), and a wafer fixing fixture according to any one of claims 1 to 7, wherein an XY axis two-dimensional moving platform (14) is arranged on the upper part of the chassis (12), a rotary motor (4) of the wafer fixing fixture is fixedly mounted on the XY axis two-dimensional moving platform (14), an XYZ axis three-dimensional moving platform (15) is arranged on the lower part of the chassis (12), and the probe card fixing fixture (13) comprises a probe card fixing fixture (13) fixedly mounted on the XYZ axis three-dimensional moving platform (15) is a probe card mounting platform (1301), wherein a probe card mounting slot is arranged in the middle of the probe card mounting platform (1301), and corresponding probe card clamping blocks (1302) are movably arranged on the probe card mounting platform (1301) on both sides of the probe card mounting slot, and the probe card clamping blocks (1302) are driven by corresponding pneumatic clamps; an industrial camera (16) for detecting the lighting state of a workpiece is arranged on the bottom side of the probe card mounting platform (1301).

9. The wafer inspection device according to claim 8, characterized in that: A probe card installation cavity (17) is arranged on the outside of the chassis (12), a probe card installation plate (18) driven by a corresponding rotating motor is rotatably installed in the probe card installation cavity (17), and an isolation door (20) driven by a corresponding telescopic cylinder (19) is installed at the connection between the probe card installation cavity (17) and the chassis (12) so as to be openable and closable.

10. The wafer inspection device according to claim 9, characterized in that: A robot arm (21) is fixedly connected to the chassis (12) and is used to grab a probe card on the probe card mounting plate (18) and place it on the probe card mounting platform (1301).

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