A low-angle-dependence impact inertia piezoelectric actuator and a driving method thereof

Abstract

This invention relates to a low-angle-dependent impact inertial piezoelectric actuator and its driving method, belonging to the field of precision machinery. The actuator includes an L-shaped plate, an electromagnet, a flexible hinge mechanism, a base plate, a piezoelectric stack, a fine-tuning platform, fixed blocks, a guide rail, and a slider. The guide rail and fine-tuning platform are mounted on the base plate and vertically fixed to a tabletop via side plates. The flexible hinge mechanism is fixed to the slider and elastically contacts the fixed blocks on both sides. The flexible hinge mechanism achieves displacement through the piezoelectric stack and the electromagnet. The advantages of this invention are: simple structure, small size, easy processing, assembly, and control; it can be used at multiple angles and can be applied to precision instruments, precision machining, and other fields.

Description

Technical Field

[0001] This invention relates to the field of precision machinery, and particularly to a low-angle-dependent impact inertial piezoelectric actuator and its driving method. The piezoelectric drive overcomes the high angle dependence of electromagnetic drives of the same size. It can be used in precision instruments, precision machining, and other fields. Background Technology

[0002] A piezoelectric actuator is a device that uses the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy or mechanical motion. With the development of science and technology, the demand for such precision machinery as piezoelectric actuators is increasing in fields such as precision instruments and precision machining.

[0003] With increasing modern demands, these precision mechanical devices often need to be used in various types of applications, which makes them dependent on the tilt angle of the equipment. In existing applications such as precision machining and assembly, and micro-nano manipulation, most stepper piezoelectric actuators, although able to achieve a certain stroke through the accumulation of step displacement, often result in displacement that is too large or too small when positioned on an inclined working plane, significantly reducing accuracy. While some inchworm-type piezoelectric actuators offer higher accuracy, their complex structure and assembly limit their practical applications. Therefore, innovative designs for piezoelectric actuators with low angle dependence, stability, simple structure, and ease of control are essential. Summary of the Invention

[0004] The purpose of this invention is to provide a low-angle-dependent impact inertial piezoelectric actuator, which solves the above-mentioned problems. This invention has advantages such as low angle dependence, simple structure, stability, and ease of processing and control, and can be used in precision machining and assembly, micro-nano manipulation, and other fields.

[0005] The above-mentioned objective of the present invention is achieved through the following technical solution:

[0006] A low-angle-dependent impact inertial piezoelectric actuator, characterized in that it includes an L-shaped plate (1), an electromagnet (2), a flexible hinge mechanism (3), a base plate (4), a piezoelectric stack (5), a fine-tuning platform (6), a fixing block (7), a guide rail (8), and a slider (9).

[0007] The base plate (4) is fixed to the long arm of the L-shaped plate (1), and the short arm of the L-shaped plate (1) is fixed to the experimental table. The fine-tuning platform (6) and the guide rail (8) are fixed on the base plate (4), and the fixing block (7) is fixed above the fine-tuning platform (6). The flexible hinge mechanism (3) is fixed above the slider (9), the piezoelectric stack (5) is placed in the flexible hinge mechanism (3), the electromagnet (2) is fixed below the flexible hinge mechanism (3), and the two sides of the flexible hinge mechanism (3) are in elastic contact with the fixing block (7). The slider (9) can slide freely on the guide rail (8).

[0008] The flexible hinge mechanism (3) includes a hinge front end (3-5), a hinge rear end (3-6), a hinge (3-3), a slider connection hole (3-1) located in the center of the hinge rear end (3-6), an elastic beam (3-2) located on both sides of the hinge rear end (3-6), and an electromagnet connection hole (3-4) located in the center of the hinge front end (3-5); the L-shaped plate (1) includes an angle adjustment hole (1-2) on the long arm and a desktop fixing hole (1-1) on the short arm.

[0009] The elastic beam (3-2) on the rear end (3-6) of the flexible hinge mechanism (3) is in elastic contact with the fixed block (7) and is installed on the slider (9) through the slider connection hole (3-1); the electromagnet (2) is installed below the front end (3-5) of the flexible hinge mechanism (3) through the electromagnet connection hole (3-4), and the piezoelectric stack (5) is placed between the two hinges (3-3); the base plate (4) is installed on the long arm of the L-shaped plate (1) through the angle adjustment hole (1-2), and the short arm of the L-shaped plate (1) is installed on the table through the tabletop fixing hole (1-1).

[0010] Another object of the present invention is to provide a driving method for a low-angle-dependent impact inertial piezoelectric actuator, characterized by comprising the following steps:

[0011] a) After assembly, a sawtooth driving voltage is applied to the piezoelectric stack (5). When the voltage rises slowly, the piezoelectric stack (5) slowly elongates, causing the hinge (3-3) part of the flexible hinge mechanism (3) to undergo elastic deformation, which drives the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward. When the sawtooth driving voltage reaches its maximum value and is about to drop, a short square voltage is applied to the electromagnet (2), causing it to be attracted to the base plate (4). At this time, due to the rapid drop in driving voltage, the piezoelectric stack (5) shortens rapidly, causing the hinge (3-3) part of the flexible hinge mechanism (3) to return to its original state, thereby driving the hinge rear end (3-6) of the flexible hinge mechanism (3) to move forward on the guide rail (8) through the slider (9).

[0012] b) When the sawtooth driving voltage reaches its minimum value and is about to rise slowly again, remove the square voltage applied to the electromagnet (2) to make it detach from the adsorption state. In this way, the elongation of the piezoelectric stack (5) can continue to drive the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward. Then repeat step a) to achieve equal spacing of each displacement at a certain angle.

[0013] c) By adjusting the angle holes (1-2) on the long arm of the L-shaped plate (1), the angle between the base plate (4) and the vertical direction can be changed, so that the flexible hinge mechanism (3) can be in different angle environments. Then repeat steps a) and b) to achieve equal spacing of displacement at different angles. Attached Figure Description

[0014] The accompanying drawings are provided to further illustrate the invention and form part of this application. The illustrative examples and descriptions of the invention are used to explain the invention and do not constitute an undue limitation of the invention.

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0016] Figure 2 This is a schematic diagram of the flexible hinge mechanism of the present invention.

[0017] Figure 3 This is a schematic diagram of the structure of the L-shaped plate of the present invention.

[0018] Figure 4 This is a schematic diagram of a sawtooth-shaped drive voltage.

[0019] Figure 5 This is a schematic diagram of a square voltage.

[0020] In the diagram: 1. L-shaped plate; 1-1. Desktop fixing hole; 1-2. Angle adjustment hole; 2. Magnet; 3. Flexible hinge mechanism; 3-1. Slider connection hole; 3-2. Elastic beam; 3-3. Hinge; 3-4. Electromagnet connection hole; 3-5. Hinge front end; 3-6. Hinge rear end; 4. Base plate; 5. Piezoelectric stack; 6. Fine-tuning platform; 7. Fixing block; 8. Guide rail; 9. Slider. Detailed Implementation

[0021] The following description, in conjunction with the accompanying drawings, further illustrates the detailed content of the present invention and its specific embodiments.

[0022] See Figures 1-5 As shown, a low angle-dependent impact inertial piezoelectric actuator is characterized by comprising an L-shaped plate (1), an electromagnet (2), a flexible hinge mechanism (3), a base plate (4), a piezoelectric stack (5), a fine-tuning platform (6), a fixing block (7), a guide rail (8), and a slider (9).

[0023] The base plate (4) is fixed to the long arm of the L-shaped plate (1), and the short arm of the L-shaped plate (1) is fixed to the experimental table. The fine-tuning platform (6) and the guide rail (8) are fixed on the base plate (4), and the fixing block (7) is fixed above the fine-tuning platform (6). The flexible hinge mechanism (3) is fixed above the slider (9), the piezoelectric stack (5) is placed in the flexible hinge mechanism (3), the electromagnet (2) is fixed below the flexible hinge mechanism (3), and the two sides of the flexible hinge mechanism (3) are in elastic contact with the fixing block (7). The slider (9) can slide freely on the guide rail (8).

[0024] The flexible hinge mechanism (3) includes a hinge front end (3-5), a hinge rear end (3-6), a hinge (3-3), a slider connection hole (3-1) located in the center of the hinge rear end (3-6), an elastic beam (3-2) located on both sides of the hinge rear end (3-6), and an electromagnet connection hole (3-4) located in the center of the hinge front end (3-5); the L-shaped plate (1) includes an angle adjustment hole (1-2) on the long arm and a desktop fixing hole (1-1) on the short arm;

[0025] The elastic beam (3-2) on the rear end (3-6) of the flexible hinge mechanism (3) is in elastic contact with the fixed block (7) and is installed on the slider (9) through the slider connection hole (3-1); the electromagnet (2) is installed below the front end (3-5) of the flexible hinge mechanism (3) through the electromagnet connection hole (3-4), and the piezoelectric stack (5) is placed between the two hinges (3-3); the base plate (4) is installed on the long arm of the L-shaped plate (1) through the angle adjustment hole (1-2), and the short arm of the L-shaped plate (1) is installed on the table through the tabletop fixing hole (1-1).

[0026] A driving method for a low-angle-dependent impact inertial piezoelectric actuator, characterized by comprising the following steps:

[0027] a) After assembly, a sawtooth driving voltage is applied to the piezoelectric stack (5). When the voltage rises slowly, the piezoelectric stack (5) slowly elongates, causing the hinge (3-3) part of the flexible hinge mechanism (3) to undergo elastic deformation, which drives the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward. When the sawtooth driving voltage reaches its maximum value and is about to drop, a short square voltage is applied to the electromagnet (2), causing it to be attracted to the base plate (4). At this time, due to the rapid drop in driving voltage, the piezoelectric stack (5) shortens rapidly, causing the hinge (3-3) part of the flexible hinge mechanism (3) to return to its original state, thereby driving the hinge rear end (3-6) of the flexible hinge mechanism (3) to move forward on the guide rail (8) through the slider (9).

[0028] b) When the sawtooth driving voltage reaches its minimum value and is about to rise slowly again, remove the square voltage applied to the electromagnet (2) to make it detach from the adsorption state. In this way, the elongation of the piezoelectric stack (5) can continue to drive the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward. Then repeat step a) to achieve equal spacing of each displacement at a certain angle.

[0029] c) By adjusting the angle holes (1-2) on the long arm of the L-shaped plate (1), the angle between the base plate (4) and the vertical direction can be changed, so that the flexible hinge mechanism (3) can be in different angle environments. Then repeat steps a) and b) to achieve equal spacing of displacement at different angles.

Claims

1. A low-angle-dependent impact inertial piezoelectric actuator, characterized in that: Includes L-shaped plate (1), electromagnet (2), flexible hinge mechanism (3), base plate (4), piezoelectric stack (5), fine-tuning platform (6), fixing block (7), guide rail (8), slider (9); The base plate (4) is fixed to the long arm of the L-shaped plate (1), and the short arm of the L-shaped plate (1) is fixed to the experimental table. The fine-tuning platform (6) and the guide rail (8) are fixed on the base plate (4), and the fixing block (7) is fixed above the fine-tuning platform (6). The flexible hinge mechanism (3) is fixed above the slider (9), the piezoelectric stack (5) is placed in the flexible hinge mechanism (3), the electromagnet (2) is fixed below the flexible hinge mechanism (3), and the two sides of the flexible hinge mechanism (3) are in elastic contact with the fixing block (7). The slider (9) can slide freely on the guide rail (8). The flexible hinge mechanism (3) includes a hinge front end (3-5), a hinge rear end (3-6), a hinge (3-3), a slider connection hole (3-1) located in the center of the hinge rear end (3-6), an elastic beam (3-2) located on both sides of the hinge rear end (3-6), and an electromagnet connection hole (3-4) located in the center of the hinge front end (3-5); the L-shaped plate (1) includes an angle adjustment hole (1-2) on the long arm and a desktop fixing hole (1-1) on the short arm. The elastic beam (3-2) on the rear end (3-6) of the flexible hinge mechanism (3) is in elastic contact with the fixed block (7) and is installed on the slider (9) through the slider connection hole (3-1); the electromagnet (2) is installed below the front end (3-5) of the flexible hinge mechanism (3) through the electromagnet connection hole (3-4), and the piezoelectric stack (5) is placed between the two hinges (3-3); the base plate (4) is installed on the long arm of the L-shaped plate (1) through the angle adjustment hole (1-2), and the short arm of the L-shaped plate (1) is installed on the table through the tabletop fixing hole (1-1).

2. The driving method of a low-angle-dependent impact inertial piezoelectric actuator according to claim 1, characterized in that: Includes the following steps: a) After assembly, a sawtooth driving voltage is applied to the piezoelectric stack (5). When the voltage rises slowly, the piezoelectric stack (5) slowly elongates, causing the hinge (3-3) part of the flexible hinge mechanism (3) to undergo elastic deformation, which drives the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward. When the sawtooth driving voltage reaches its maximum value and is about to drop, a short square voltage is applied to the electromagnet (2), causing it to be attracted to the base plate (4). At this time, due to the rapid drop in driving voltage, the piezoelectric stack (5) shortens rapidly, causing the hinge (3-3) part of the flexible hinge mechanism (3) to return to its original state, thereby driving the hinge rear end (3-6) of the flexible hinge mechanism (3) to move forward on the guide rail (8) through the slider (9). b) When the sawtooth driving voltage reaches its minimum value and is about to rise slowly again, remove the square voltage applied to the electromagnet (2) to make it detach from the adsorption state. In this way, the elongation of the piezoelectric stack (5) can continue to drive the hinge front end (3-5) of the flexible hinge mechanism (3) to move forward. Then repeat step a) to achieve equal spacing of each displacement at a certain angle. c) By adjusting the angle holes (1-2) on the long arm of the L-shaped plate (1), the angle between the base plate (4) and the vertical direction can be changed, so that the flexible hinge mechanism (3) can be in different angle environments. Then repeat steps a) and b) to achieve equal spacing of displacement at different angles.

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