Electromagnetic device

Abstract

Provided is an electromagnetic device in which a field magnetic part in which a plurality of permanent magnets are arranged such that the magnetization direction is gradually changed at a set angle [theta] and the length is a natural number multiple of the length of one cycle of a magnetic pole faces an armature part so as to be relatively movable. Coils of all phases are sequentially arranged in the armature part, and the coils of the same phase are connected with one another, so that the same current flows in all the coils. By such an arrangement, even if a change in the magnetic flux distribution of the coil intersection chain occurs at the end in the moving direction of the field magnetic part, the electromagnetic device can suppress an end effect that the change occurs in a portion of the coil, thereby effectively suppressing thrust fluctuations caused by the end effect.

Description

Technical Field

[0001] The disclosed technology relates to a moving magnet type electromagnetic device in which a field magnet moves relative to an armature coil. Background Art

[0002] Japanese Patent Laid-Open No. 2003-209963 discloses a linear motor having a field magnetic pole of a Halbach array structure. In the linear motor, a first main magnetic pole is arranged at both ends of a magnetic yoke of a field magnetic pole that moves relative to an armature, a second main magnetic pole is arranged at a position other than the two ends of the magnetic yoke, a first auxiliary magnetic pole is arranged between the first main magnetic pole and the second main magnetic pole, and a second auxiliary magnetic pole is arranged between the second main magnetic poles.

[0003] In addition, the width of the first main magnetic pole of the linear motor is narrower than that of the second main magnetic pole, and the width of the first auxiliary magnetic pole is wider than that of the second auxiliary magnetic pole. Summary of the invention

[0004] Problem that the invention aims to solve

[0005] In addition, the above-mentioned linear motor requires permanent magnets having not only different magnetization directions but also different widths in order to suppress the end effect in the Halbach array.

[0006] The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide an electromagnetic device capable of effectively suppressing thrust fluctuations caused by end effects.

[0007] Technical means of solving problems

[0008] The first form of electromagnetic device for achieving the above-mentioned purpose includes: a field magnetic part, which has a plurality of permanent magnets arranged in the following manner in a moving body that moves relatively along the long side direction of a long fixed body: taking any integer greater than 3 as the division number n, dividing the electrical angle period corresponding to the magnetic pole period by the division number n, and changing the magnetization direction successively according to the obtained angle so that the length reaches a natural number of times the length of the electrical angle period in the moving direction of the moving body; and an armature part, which is arranged in the fixed body, and a plurality of groups of armature coils are arranged in a group according to the number of phases along the long side direction of the fixed body within the moving range of the moving body, and are powered by a method in which the same current flows through each of the armature coils of the same phase.

[0009] In the first form of the electromagnetic device, the moving body moves relative to the fixed body. The moving body is provided with a disclosure part. A plurality of permanent magnets are arranged in the field magnetic part in the following manner, that is, taking any integer greater than 3 as the division number n, the electrical angle period corresponding to the magnetic pole period is divided by the division number n, and the magnetization direction is changed successively according to the obtained angle so that the length reaches a natural number multiple (integer multiple greater than 1) of the length of the electrical angle period (magnetic pole period) in the moving direction of the moving body.

[0010] The armature part is arranged in the fixed body, and in the armature part, a plurality of armature coils are arranged in a group according to the number of phases in the long side direction of the fixed body within the moving range of the moving body. In addition, the armature coil is arranged in the entire moving range of the field magnetic part that moves together with the moving body, and by supplying the required alternating current to the multi-phase armature coil, the moving body can be moved together with the field magnetic part by the thrust generated between the armature coil and the field magnetic part.

[0011] Here, the armature coils of each phase are configured so that the same current flows through each armature coil of the same phase. At this time, the armature coils of the same phase can be connected in series, and power can be supplied in a manner that the same current flows between the armature coils of the same phase. As a result, even if a change in the magnetic flux distribution interlinked with the armature coil occurs at the ends (both ends) of the moving direction of the field magnetic part, the change can be suppressed from occurring in some coils, thereby effectively suppressing thrust fluctuations caused by the end effect.

[0012] The second form of the electromagnetic device includes: a field magnetic part, which has a plurality of permanent magnets arranged in a movable body that moves relatively along the long side direction of a long fixed body in the following manner, that is, taking any integer greater than 3 as the division number n, a period of electrical angle corresponding to a period of magnetic poles is divided by the division number n, and the magnetization direction is changed successively according to the obtained angle so that the length reaches a natural number of times the length of the period of electrical angle in the moving direction of the movable body; an armature part, which is arranged in the fixed body, and a plurality of groups of armature coils are arranged in a group according to the number of phases along the long side direction of the fixed body within the moving range of the movable body; and a power supply part, which supplies power to each of the armature coils in the armature part in a manner such that the same current flows between the armature coils of the same phase when power is supplied to each of the armature coils to move the movable body.

[0013] The electromagnetic device of a third aspect is the electromagnetic device according to the first aspect, and includes a power supply unit that supplies power to each of the armature coils so that the same current flows between the same armature coils when the movable body is moved.

[0014] The fourth form of the electromagnetic device is an electromagnetic device according to the second form or the third form, wherein the power supply unit supplies power to the armature coils within the range interlinked by the magnetic flux generated by the field magnetic unit of the moving body in such a way that the same current flows through each of the armature coils of the same phase.

[0015] The fifth form of the electromagnetic device is an electromagnetic device according to any one of the second to fourth forms, wherein the power supply unit supplies power to the armature coils at both ends of the permanent magnet array, each within a range of half a period length relative to a magnetic pole period, in a manner such that the same current flows through each of the armature coils of the same phase.

[0016] The sixth form of the electromagnetic device is an electromagnetic device according to the fourth form or the fifth form, which includes a detection component, which is arranged on the fixed body in a manner opposite to the field magnetic part, detects magnetic flux and detects the permanent magnet array, and the power supply part supplies power to the armature coil according to the detection result of the detection component.

[0017] The electromagnetic device of the seventh aspect is the electromagnetic device according to any one of the first aspect to the sixth aspect, wherein an arrangement length Lc of a group of the armature coils is a natural number multiple of a length Lm of one period of the magnetic poles of the permanent magnet.

[0018] An electromagnetic device according to an eighth aspect is the electromagnetic device according to any one of the first to sixth aspects, wherein an arrangement length of the armature coils in the armature portion is a natural number multiple of an arrangement length Lc of a group of the armature coils.

[0019] The ninth form of the electromagnetic device is an electromagnetic device according to any one of the first to eighth forms, wherein the field magnetic part includes a first magnet array and a second magnet array, each of which is arranged with the multiple permanent magnets, and the first magnet array and the second magnet array face each other through the armature coil in a manner that mutually enhances the magnetic field formed.

[0020] The tenth form of the electromagnetic device is an electromagnetic device according to any one of the first to eighth forms, wherein a ferromagnetic material is arranged on the armature part within the arrangement range of the plurality of armature coils on the side of the armature coil opposite to the field magnetic part.

[0021] Effects of the Invention

[0022] According to the disclosed technology, the electromagnetic device can suppress thrust fluctuation caused by the end effect by means of the current flowing in the armature coil, and thus has the effect of effectively suppressing thrust fluctuation caused by the end effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1AIt is a schematic configuration diagram of the main parts showing an example of the electromagnetic device according to the present embodiment.

[0024] Figure 1B To express Figure 1A A schematic diagram showing the magnetic flux density distribution in an electromagnetic device.

[0025] Figure 2 To express Figure 1A The schematic diagram of the main parts of the electromagnetic device and the magnetic flux density distribution obtained by using the Halbach magnet array.

[0026] Figure 3A This is a schematic diagram showing the change in magnetic flux density with respect to the position of the magnet array in one period of magnetic poles.

[0027] Figure 3B To express Figure 1A A line graph showing an example of a change in voltage caused by back electromotive force in an electromagnetic device.

[0028] Figure 3C To express Figure 1A A line graph showing an example of torque variation in an electromagnetic device.

[0029] Figure 4A This is a schematic configuration diagram showing the main parts and magnetic flux density distribution of another example of the electromagnetic device according to the present embodiment.

[0030] Figure 4B To express Figure 4A The electromagnetic device uses a double Halbach magnet array to obtain the main parts of the electromagnetic device and a schematic diagram of the magnetic flux density distribution.

[0031] Figure 5 It is a schematic perspective view showing the conveying device according to the first embodiment.

[0032] Figure 6 This is a cross-sectional view showing the main part of the conveying device as viewed in the longitudinal direction.

[0033] Figure 7 This is a cross-sectional view showing the main part of the conveying device when viewed in the width direction.

[0034] Figure 8 This is a block diagram showing the schematic structure of the main parts of the drive device.

[0035] Fig. 9 This is a block diagram showing a schematic configuration of an electrical angle detection unit.

[0036] Fig.10 This is a block diagram showing the schematic structure of a coil excitation unit.

[0037] Fig.11It is a schematic perspective view showing a vibration excitation device according to the second embodiment.

[0038] Fig.12 It is a cross-sectional view showing the main parts of the excitation device as viewed in the long-side direction.

[0039] Fig.13 This is a plan view of the main parts of the excitation device. DETAILED DESCRIPTION

[0040] Embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0041] The electromagnetic device of this embodiment uses a multi-phase alternating current with more than two phases. The electromagnetic device includes a field magnetic part in which a plurality of permanent magnets are arranged and an armature part in which armature coils having a number of phases corresponding to the alternating current are arranged. The armature part of the electromagnetic device is arranged on a fixed body, and the field magnetic part is arranged on a moving body. In the electromagnetic device, the arrangement length of the armature coil of the armature part is greater than the length of the magnet array of the field magnetic part. The electromagnetic device functions as a driving source that moves the moving body (unidirectionally or reciprocatingly) by means of the thrust generated between the armature coil and the permanent magnet within the range of the arrangement length of the armature coil.

[0042] Furthermore, the electromagnetic device can function as a power generation device that generates electricity for the armature coil by the movement of the moving body. The electromagnetic device that functions as a driving source in various mobile devices is used as an example for explanation. In addition, in the disclosed technology, the so-called "same" includes the range in which the shape, size, value or change of the value is regarded as the same, in addition to the same shape, size, value or change of the value, and the following will include the same and be described in the form of the same.

[0043] 〔Halbach array magnetic field (single Halbach array magnetic field)〕

[0044] Figure 1A and Figure 1B The main parts of the electromagnetic device 10 of this embodiment are shown in a schematic configuration diagram. Figure 2 The main parts of the electromagnetic device 12 corresponding to the electromagnetic device 10 are shown in a schematic diagram. In the following description, the arrangement direction of the permanent magnets and the armature coils is taken as the thrust direction. In the accompanying drawings, the thrust direction (also called the moving direction) is indicated by an arrow Y. In addition, Figure 1B The distribution of magnetic lines of force (magnetic flux density distribution) in the electromagnetic device 10 is shown in FIG. Figure 2 , the distribution of magnetic lines of force (magnetic flux density distribution) in the electromagnetic device 12 is shown.

[0045] like Figure 1AAs shown, the electromagnetic device 10 includes an armature portion 14 disposed on a fixed body and a field magnetic portion 16 disposed on a movable body in a manner facing the armature portion 14. In the electromagnetic device 10, a plurality of armature coils (hereinafter referred to as coils) 18 are disposed on the armature portion 14, and a plurality of permanent magnets 20 are disposed on the field magnetic portion 16, and the coils 18 and the permanent magnets 20 are arranged in the thrust direction, respectively.

[0046] In addition, in the electromagnetic device 10, the length of the armature part 14 along the thrust direction (the total length of the coil 18 array) is greater than the length of the field magnetic part 16 (the total length of the permanent magnet 20 array). Therefore, in the electromagnetic device 10, the field magnetic part 16 moves relatively along the arrangement direction of the plurality of coils 18 (thrust direction) within the arrangement range of the plurality of coils 18 in the armature part 14. Furthermore, the arrangement direction of the plurality of coils 18 that becomes the thrust direction is not limited to the direction along the plane, and may also include the direction along the arc-shaped curved surface, but the thrust direction is described below in the form of the direction along the plane to simplify the description.

[0047] The permanent magnets 20 of the field magnetic part 16 are respectively the same outer diameter shape (size), and the cross-sectional shape (hereinafter referred to as the cross-sectional shape) cut along the thrust direction and the up-down direction (the direction intersecting the surface along the thrust direction, the up-down direction on the paper) is the same. The cross-sectional shape of the permanent magnet 20 is a rectangle. Moreover, in the following description, the so-called same includes the same and the same shape and size. In addition, the cross-sectional shape of the permanent magnet 20 is not limited to a rectangle, and can also be used according to the installation of the moving body, the thrust direction, etc., triangles such as isosceles triangles, trapezoids, sectors, circles, etc., as long as the same shape is used between multiple permanent magnets 20.

[0048] In the field magnetic part 16, the arrangement of the permanent magnets 20 adopts the Halbach magnet array. In the Halbach magnet array, an integer greater than 3 is used as the division number n, and the electrical angle period (2π=360°) corresponding to the magnetic pole period (two magnetic poles) is divided by the division number n, and the resulting angle is used as the set angle θ. The permanent magnets 20 whose magnetization directions are successively changed according to the set angle θ are arranged in sequence in the Halbach magnet array. Furthermore, the magnetization direction is the direction from the S pole to the N pole inside the permanent magnet 20 (in the cross section) ( Figure 1A The direction indicated by the arrows in each permanent magnet 20).

[0049] In the field magnetic part 16, as an example, the number of divisions n=12, the angle θ is set to 30° (θ=30°), and in the field magnetic part 16, the length of one period of magnetic poles corresponding to one period of electrical angle in the arrangement direction of the permanent magnets 20 is set to length Lm, and 12 permanent magnets 20A~20L are sequentially arranged within the range of length Lm to form a magnet array 22. Thus, if the magnet array 22 is two poles, the angle between the magnetization directions of the adjacent permanent magnets 20 is the set angle θ (=30°). Furthermore, the field magnetic part 16 can be arranged by arranging one or more magnet arrays 22 so that the length of the overall arrangement direction is formed as a natural number multiple (integer multiple greater than 1) of the length Lc.

[0050] In the field magnetic part 16, by forming a Halbach magnet array, the magnetic field on one side of the direction intersecting the arrangement direction of the permanent magnets 20 is suppressed (weakened), and the magnetic field on the other side is enhanced compared to the magnetic field on one side. In the field magnetic part 16, the side where the magnetic field is enhanced becomes the armature part 14 side.

[0051] In the electromagnetic device 10, multiphase power is used in the form of alternating current, and the number of phases of the alternating current can be two or three phases or more. As an example, three-phase alternating current is used in the electromagnetic device 10. The armature part 14 is provided with a plurality of coil arrays 24 in which coils 18 of each phase (coil 18U of U phase, coil 18V of V phase and coil 18W of W phase) are grouped. The winding of each coil 18 uses Litz wire, and each coil 18 is hollow (it can be magnetically hollow).

[0052] In the armature part 14, each coil 18 (18U, 18V, 18W) is arranged at a required magnetic gap interval, and a plurality of coil arrays 24 are arranged along the thrust direction on the support body 26. In addition, in the armature part 14, the length of one electrical angle cycle corresponding to the length of a group of coils 18U to 18W (coil array 24) is Lc. Furthermore, the length of one electrical angle cycle Lc is the length (distance) of the middle position of each magnetic gap of the coil array 24 and the coil arrays 24 on both sides of the coil array 24, and is the length from the center position of the magnetic gap of the coil 18W and the coil 18U to the center position of the magnetic gap of the next coil 18W and the coil 18U.

[0053] like Figure 2 As shown, the electromagnetic device 12 corresponds to the electromagnetic device 10, and the electromagnetic device 12 includes an armature portion 14 and a field magnetic portion 28 facing the armature portion 14. In the field magnetic portion 28, a magnet array (equivalent to the magnet array 22) formed by permanent magnets 20A to 20L whose magnetization directions are successively staggered according to a predetermined setting angle θ is a group, and multiple groups are arranged along the thrust direction. As a result, the field magnetic portion 28 can use a conventional Halbach array magnetic field that is longer than the field magnetic portion 16.

[0054] In the field magnetic section 28, focusing on a group of permanent magnets 20A to 20L and the permanent magnet 20A adjacent to the permanent magnet 20L, the distance (length) between the middle position of one permanent magnet 20A in the array and the middle position of another permanent magnet 20A becomes the length Lm of one magnetic pole cycle. If this part is used as a magnet array 30, the field magnetic section 28 becomes a Halbach magnet array in which the number of magnetic links interlinked with the coil 18 changes in a sinusoidal wave within the range of each magnet array 30. Therefore, the field magnetic section 28 provided with a plurality of permanent magnet 20A to 20L arrays (equivalent to the magnet array 22) is composed of a plurality of magnet arrays 30 arranged.

[0055] Figure 1B 1 shows the field magnetic part 16A after the magnetic array 22 of the field magnetic part 16 is replaced with the magnetic array 30 in the electromagnetic device 10. Figure 1B In the embodiment, the length of the permanent magnet 20A in the arrangement direction is divided into 1 / 2, and the divided permanent magnets 20A are arranged at both ends in the arrangement direction, thereby forming a length Lm of one magnetic pole cycle.

[0056] like Figure 1B As shown, in the field magnetic part 16A, the magnetic flux density distribution around the permanent magnets 20A at both ends of the arrangement direction of the magnet array 30 is different from the magnetic flux density distribution at both ends of the arrangement direction of the magnet array 30 when the Halbach magnet array (field magnetic part 28) is used. In the field magnetic part 16A, the difference in the magnetic flux density distribution at both ends of the arrangement direction of the magnet array 30 causes an end effect in the electromagnetic device 10.

[0057] However, by combining the two magnet arrays 30 , according to the electromagnetic superposition theorem, the magnetic flux density distribution between the two magnet arrays 30 becomes the same as that of the Halbach magnet array (the magnet array 30 in the field magnetic portion 28 ).

[0058] In the electromagnetic devices 10 and 12, the length Lm of one magnetic pole cycle is the same as the length Lc of one electrical angle cycle (Lm=Lc). In addition, in the electromagnetic devices 10 and 12, it is assumed that the starting point and the end point of one magnetic pole cycle of the magnet array 30 are consistent with the starting point and the end point of one electrical angle cycle of the coil array 24.

[0059] At this time, if we focus on the coil 18U, in the field magnetic part 28 that constitutes the Halbach magnet array, the back electromotive force generated by the coil 18U changes in a sinusoidal shape due to the magnetic flux density distribution of the magnetic poles of the magnetic array 30. The voltage between the winding start and the winding end in the coil 18U depends on the vector sum of the magnetic flux of the magnetic poles of the magnetic array 30.

[0060] In contrast, in the field magnetic section 16A, the magnetic flux of the permanent magnet 20A at one end of the magnet array 30 is linked to the coil 18U of the coil array 24 facing the magnet array 30, and the magnetic flux of the permanent magnet 20A at the other end of the magnet array 30 is linked to the coil 18U of the coil array 24 next to the coil array 24 facing the magnet array 30.

[0061] Therefore, in the field magnetic section 16A, due to the magnetic flux density distribution of the magnetic pole cycle of the magnetic array 30, the coil 18U of the coil array 24 facing the magnetic array 30 and the coil 18U of the coil array 24 next to the coil array 24 facing the magnetic array 30 generate a counter electromotive force. In addition, in the magnetic array 30 of the magnetic pole cycle in the field magnetic section 28, the vector sum of the magnetic flux at one end of the magnetic array 30 is consistent with the vector sum of the magnetic flux at the other end of the magnetic array 30.

[0062] When the coil 18U of the coil array 24 facing the magnet array 30 and the coil 18U of the coil array 24 next to the magnet array 30 are connected in series, the magnet array 30 causes the back electromotive force generated by the two coils 18U to change in a sinusoidal shape. At this time, for example, the winding end of the coil 18U of the coil array 24 facing the magnet array 30 and the winding beginning of the coil 18U next to the coil array 24 facing the magnet array 30 are connected, so that the voltage between the winding beginning of the coil 18U of the coil array 24 facing the magnet array 30 and the winding end of the coil 18U next to the coil array 24 facing the magnet array 30 depends on the vector sum of the magnetic flux of the magnetic pole of the magnet array 30 in one cycle.

[0063] That is, in the field magnetic section 16A, the sum of the number of magnetic fluxes interlinked with the two coils 18U by the magnet array 30 is the same as the number of magnetic fluxes interlinked with one coil 18U by one magnet array 30 in the field magnetic section 28. Therefore, in the field magnetic section 16A, the sum of the voltages generated in the two coils 18U interlinked by the magnetic flux generated by the magnet array 30 is equal to the voltage generated in the one coil 18U interlinked by the magnetic flux generated by one magnet array 30 in the field magnetic section 28.

[0064] Since then, Figure 1A and Figure 1B As shown, in the electromagnetic device 10, a plurality of coils 18U are electrically connected in series along the thrust direction (arrangement direction) ( Figure 1A and Figure 1BAs a result, in the field magnetic section 16A (the same applies to the field magnetic section 16), the connection points between the adjacent coils 18U in the plurality of coils 18U are at the same potential. The magnet array 22 (magnet array 30) of the electromagnetic device 10 is the same as the magnet array 30 in the field magnetic section 28 using the Halbach magnet array, and can suppress the generation of the end effect in the U-phase coil 18U.

[0065] The effect brought by the magnetic array 30 of the field magnetic section 16A is also effective in the magnetic array 22 of the field magnetic section 16. In addition, the above-mentioned structure established in the coil 18U of one phase is also applicable to the structure of the coils 18V and 18W of other phases, and the generation of end effects can also be suppressed in the coil 18V of the V phase and the coil 18W of the W phase.

[0066] Therefore, in the electromagnetic device 10, in the multi-phase coil array 24 in which the electrical angle period is set to the length Lc relative to the length Lm of the magnetic pole period of the magnet array 22, the same current flows between the coils 18 of the same phase and the coils 18 of the same phase are regarded as being electrically connected in series, so that the generation of the end effect can be suppressed. In addition, even if the length of the field magnetic part 16 is an integer multiple (positive integer multiple) of the length Lm or the length of the armature part 14 is an integer multiple (positive integer multiple) of the length Lc, the generation of the end effect can be suppressed.

[0067] Figure 3A Targeted Figure 1B The magnetic array of the magnetic pole cycle shown (corresponding to the magnetic array 22) is used as a line diagram to show the general change of the magnetic flux density By along the contact and separation direction of the magnetic array on the magnetic array side of the coil 18. Figure 3A The position of the coil 18 on the magnet array side (relative position relative to the magnet array) is the horizontal axis (x-axis), and the direction from the coil 18 to the magnet array is the vertical axis (y-axis). Figure 3A In the diagram, 1 / 2 of the length Lm of one magnetic pole cycle is set as length τ (τ=Lm / 2), and the point corresponding to the center position of the magnet array is set as the 0 point on the horizontal axis to plot the magnetic flux density (T) on the vertical axis.

[0068] like Figure 3A As shown, in the magnet array of length Lm, the magnetic flux density increases in the center and both ends of the arrangement direction. In addition, in the space above the coil 18, leakage magnetic flux is generated in the range from position τ to position 2τ away from the end of the magnet array and in the range from position -τ to position -2τ, and the magnetic flux density is not 0 [T]. In the electromagnetic device 10, this leakage magnetic flux is one of the causes of the end effect.

[0069] on the other hand, Figure 3BThe change of the back electromotive force generated in the coil 18 by the magnet array 22 (the magnet array 30 is the same) of the one-pole period in the electromagnetic device 10 is shown in the form of a line graph and a voltage change. Figure 3C The line graph in FIG. 1 shows the change of the torque (thrust torque) generated between the magnet array 22 and the coil 18. Furthermore, Figure 3B and Figure 3C The horizontal axis is set to time (seconds), and Figure 3B The vertical axis is set as voltage (V), Figure 3C The vertical axis is set to torque (thrust torque) (N). Figure 3B and Figure 3C 2 shows the voltage change and torque change with respect to time when the magnet array 22 is moved relative to the coil 18 at a specified speed.

[0070] In the conveying device (linear motor) using the electromagnetic device 10 as a driving source, the field magnetic part 16 moves along (or parallel to) the direction of the moving magnetic field formed by flowing a multi-phase (three-phase) alternating current through each multi-phase (for example, three-phase) coil. Generally speaking, the number of magnetic flux linkages interlinked with a coil facing the Halbach array magnetic field changes in a sinusoidal shape according to the relative movement of the coil and the magnet.

[0071] Therefore, in the electromagnetic device 10, as the magnet array 22 moves relative to each other, the number of flux linkages in each coil 18 (18U, 18V, 18W) changes in a sinusoidal shape. Figure 3B As shown in FIG. 1 , in the electromagnetic device 10, the back electromotive force generated in the coil 18 is also in the form of a sine wave with the harmonic components suppressed (without the harmonic components). Figure 3C As shown, in the electromagnetic device 10, by passing an excitation current having the same frequency as the sine wave of the back electromotive force generated in each coil 18 through the coil, the thrust generated between the magnet array 22 and the coil 18 can be suppressed from fluctuating. Therefore, the electromagnetic device 10 can suppress the generation of the end effect, thereby effectively suppressing the thrust fluctuation caused by the end effect.

[0072] Regarding the effect in such an electromagnetic device 10, the length of the magnet array in the field magnetic part 16 is not limited to the length Lm of one period of the magnetic poles, and the length of the magnet array may also be a natural number multiple (an integer multiple greater than 1) of the length Lm of one period of the magnetic poles. In addition, regarding the effect in the electromagnetic device 10, as long as the arrangement length of the coils 18 in the armature part 14 is greater than the length of the magnet array in the field magnetic part 16 and the arrangement length Lc of a group of coils 18 in the armature part 14 is a natural number multiple (an integer multiple greater than 1). Furthermore, regarding the effect in the electromagnetic device 10, an integer multiple of 1 or more of the arrangement length Lc of a group of coils 18 in the armature part 14 may also be the length of the magnet array in the field magnetic part 16.

[0073] [Dual Halbach array magnetic field]

[0074] Figure 4A The main parts of the electromagnetic device 50 of this embodiment are shown in a schematic configuration diagram. Figure 4B 1 and 2 show the main parts of the electromagnetic device 60 corresponding to the electromagnetic device 50 in a schematic configuration diagram.

[0075] like Figure 4A As shown, the electromagnetic device 50 includes an armature portion 52 disposed on a fixed body and a field magnetic portion 54 provided on a movable body. The field magnetic portion 54 includes a field magnetic portion 54A and a field magnetic portion 54B disposed in a pair across the armature portion 52 .

[0076] The field magnetic parts 54A and 54B use a magnet array 22 formed by sequentially arranging permanent magnets 20A to 20L, but a magnet array 30 is shown here to facilitate comparison with the electromagnetic device 60. The magnet array 30 of the field magnetic part 54A and the magnet array 30 of the field magnetic part 54B (the magnet array 30 is used for simplicity of description) are arranged to reinforce the magnets on the opposite sides (the armature part 52 side) to each other.

[0077] like Figure 4B As shown, the electromagnetic device 60 is provided with an armature portion 52 and a field magnetic portion 62, and the field magnetic portion 62 is configured in pairs with a field magnetic portion 62A and a field magnetic portion 62B separated by the armature portion 52. The multiple magnet arrays 22 of the field magnetic portion 62A and the multiple magnet arrays 22 of the field magnetic portion 62B are configured to reinforce the magnets on the opposite sides (the armature portion 52 side) to each other.

[0078] Thus, the field magnetic section 62 of the electromagnetic device 60 uses a plurality of magnet arrays 22 to form a double Halbach magnet array, which is the same as the configuration in which a plurality of magnet arrays 30 are arranged in each field magnetic section 62A, 62 of the field magnetic section 62 to form a double Halbach array.

[0079] like Figure 4A and Figure 4B As shown, the length of one magnetic pole cycle in each of the field magnetic portion 54 of the electromagnetic device 50 and the field magnetic portion 62 of the electromagnetic device 60 is Lm. In addition, in the electromagnetic devices 50 and 60, the length of one electrical angle cycle of each coil array 24 (a group of coils 18U, 18V, 18W) in the armature portion 52 is Lc.

[0080] like Figure 4B As shown, in the electromagnetic device 60, the number of magnetic flux linkages intersecting with a coil 18U due to a pair of magnet arrays 30 changes in a sinusoidal manner, and the back electromotive force generated in the coil 18U due to a periodic magnetic flux density distribution of the magnetic poles of the pair of magnet arrays 30 changes in a sinusoidal manner.

[0081] In contrast, Figure 4AAs shown, in the field magnetic part 54, the magnetic flux of the permanent magnet 20A at one end of a pair of magnet arrays 30 is interlinked with the coil 18U of the coil array 24 facing the pair of magnet arrays 30, and the magnetic flux of the permanent magnet 20A at the other end of the pair of magnet arrays 30 is interlinked with the coil 18U of the coil array 24 next to the coil array 24 facing the pair of magnet arrays 30.

[0082] Therefore, in the field magnetic section 54, a counter electromotive force is generated in the coil 18U of the coil array 24 facing the pair of magnet arrays 30 and in the coil 18U of the coil array 24 next to the coil array 24 facing the pair of magnet arrays 30 due to a periodic magnetic flux density distribution of the magnetic poles of the pair of magnet arrays 30.

[0083] Here, if Figure 4A As shown, in the electromagnetic device 50 , the length Lm of one period of magnetic poles of a pair of magnet arrays 30 is the same as the length Lc of one period of electrical angle of the coil array 24 (Lm=Lc).

[0084] In addition, the electromagnetic device 50 electrically connects a plurality of coils 18 of the same phase in series from one side to the other side in the thrust direction for the coils 18 (each 18U, 18V, 18W) of each phase of the armature portion 52 ( Figure 4A That is, in the electromagnetic device 50, the winding end of the coil 18 is connected to the winding start end of the next same-phase coil 18, thereby connecting a plurality of coils 18 arranged along the thrust direction in each phase in series.

[0085] That is, in the electromagnetic device 50, for example, for the U phase, the sum of the number of magnetic fluxes interlinked with the two coils 18U by the pair of magnet arrays 30 is made equal to the number of magnetic fluxes interlinked with one coil 18U by the pair of magnet arrays 34 of the electromagnetic device 60. Thus, in the electromagnetic device 50, the sum of the voltages generated in the two coils 18U interlinked by the magnetic fluxes generated by the pair of magnet arrays 30 is equal to the voltage generated in the one coil 18U interlinked by the magnetic fluxes generated by the pair of magnet arrays 30 in the electromagnetic device 60.

[0086] Therefore, in the electromagnetic device 50, in the multi-phase coil array 24, in which the electrical angle period is set to the length Lc relative to the length Lm of the magnetic pole period of the magnet array, the same current (current of the same current value) flows between the coils 18 of the same phase, and the coils 18 of the same phase are regarded as being electrically connected in series, which can suppress the generation of the end effect. In addition, by using the field magnetic part 54, the electromagnetic device 50 can obtain greater power than the electromagnetic device 10.

[0087] On the other hand, the mirror image law in the electric field is also applicable (established) in the magnetic field. From this point on, the armature part 14 may be provided with a ferromagnetic material such as an electromagnetic steel plate facing the field magnetic part 16 at a desired interval with the field magnetic part 16, and the coil array 24 (coil 18) may be provided between the field magnetic part 16 and the ferromagnetic material. At this time, the ferromagnetic material is preferably not exposed from the coil 18 when viewed from the field magnetic part 16 side.

[0088] Thus, the same magnetic field as that of the field magnetic part 54 can be formed between the field magnetic part 16 and the ferromagnetic material configuring the armature part 14. In the electromagnetic device formed in this way, the structure of the field magnetic part can be made simpler than the field magnetic part 54 of the electromagnetic device 50, and at the same time, it can be made lighter, and a greater power can be obtained than the electromagnetic device 10.

[0089] [First embodiment]

[0090] Next, a first embodiment of the present disclosure will be described.

[0091] In the first embodiment, a conveying device 100 using a moving magnet linear motor as an electromagnetic device is described. Figure 5 The main parts of the conveying device 100 are shown in a three-dimensional diagram. Figure 6 The main part of the conveying device 100 is shown in a cross-sectional view from a long side direction. Figure 7 The main part of the conveying device 100 is shown in a cross-sectional view viewed from the outside in the width direction. In the drawings, the width direction of the device is indicated by arrow X, the long side direction of the device (direction along the thrust direction) is indicated by arrow Y, and the upper side of the device in the vertical direction is indicated by arrow Z.

[0092] like Figures 5 to 7 As shown, the conveying device 100 includes a long rail 102 and a conveying platform (conveying carriage) 104. The rail 102 includes a base 106 as a fixed body whose cross-sectional shape in the longitudinal direction is an upward shape (roughly a U-shape), floating guide grooves 108 formed in pairs on both sides in the width direction on the base 106, and an armature part 110 arranged on the base 106.

[0093] The base 106 is provided with supporting parts 106B in pairs on both sides of the substrate 106A in the width direction, and the supporting parts 106B are protruded upward from both ends of the substrate 106A in the width direction. In addition, the protruding top end of the supporting part 106B further protrudes upward in the device width direction, and a suspension guide groove 108 having a substantially L-shaped cross section is formed at the upper end of the supporting part 106B.

[0094] The suspension guide groove 108 has a first surface 108A facing upward and a second surface 108B facing inward in the width direction. The first surface 108A and the second surface 108B are finely processed to have a large number of nozzle holes (not shown).

[0095] The conveying device 100 is supplied with compressed air from an air compressor (not shown) and the like, and the supplied compressed air is ejected from the ejection holes of the first surface 108A and the second surface 108B. As a result, in the conveying device 100, the conveying platform 104 mounted on the suspension guide groove 108 is suspended and supported, thereby preventing the conveying platform 104 from contacting when moving along the track 102. Furthermore, the support of the conveying platform 104 is not limited to air suspension, and a rotating body such as tires or wheels may be used to support the conveying platform 104 on the first surface 108A in a movable manner via the rotating body.

[0096] An armature unit 110 is disposed between a pair of support portions 106B on the base 106. The armature unit 110 has a plurality of armature coils (coils) 112 disposed on a long flat plate-shaped arrangement plate 110A disposed on a substrate 106A of the base 106. The plurality of coils 112 are arranged along the longitudinal direction of the arrangement plate 110A at predetermined intervals.

[0097] In addition, a plurality of optical sensors 114 as position detection components and a plurality of Hall sensors 116 as position detection components and detection components (field magnet detection components) are provided on the configuration plate 110A. The optical sensor 114 is arranged at one end portion in the width direction of the configuration plate 110A, and the Hall sensor 116 is arranged at the other end portion in the width direction of the configuration plate 110A. In addition, the optical sensor 114 and the Hall sensor 116 are respectively installed between each coil 112 adjacent to each other in the long side direction of the configuration plate 110A, and a plurality of the optical sensors 114 and the Hall sensor 116 are respectively arranged along the long side direction of the base 106, that is, the moving direction of the conveyor 104.

[0098] The optical sensor 114 detects the conveyor table 104 on the track 102 by detecting whether light emitted from a light emitting unit (not shown) is reflected and reaches a light receiving unit. The Hall sensor 116 uses a Hall element and detects a magnetic field unit 118 of the conveyor table 104 described below by detecting magnetism emitted from the conveyor table 104.

[0099] The conveying device 100 uses three-phase alternating current, and the coils 112 use hollow (magnetically hollow) U-phase coils 112U, V-phase coils 112V, and W-phase coils 112W. In the armature unit 110, the coils 112U, 112V, and 112W form a group, and each group is arranged along the long side direction of the track 102 at a predetermined magnetic gap interval.

[0100] The conveyor 104 includes a rectangular base frame 120, and the conveyor 104 is arranged to be movable along the rail 102 by supporting the base frame 120 between a pair of suspension guide grooves 108. Sliders 124 are arranged at four corners of the base frame 120, and the base frame 120 is suspended and supported in a manner that the sliders receive air ejected from the ejection holes of the suspension guide grooves 108.

[0101] A field magnetic section 118 is disposed on the lower surface of the base frame 120. A plurality of permanent magnets 122 are disposed in the field magnetic section 118. In the field magnetic section 118, an integer greater than 3 is used as the division number n, and the electrical angle period (2π=360°) corresponding to the magnetic pole period (two magnetic poles) is divided by the division number n, and the resulting angle is used as the set angle θ. In the field magnetic section 118, the division number n=5, and the set angle θ is 72° (θ=72°). In the field magnetic section 118, the magnetic pole period corresponding to the electrical angle period is set to a length of Lm, and within the range of the length Lm, five permanent magnets 122A to 122E are arranged in order along the long side direction of the track 102 and face the coil 112.

[0102] Thus, the transport device 100 moves the transport stage 104 on the rail 102 by means of thrust generated between the armature portion 110 (coil 112 ) and the field magnetic portion 118 (permanent magnet 122 ) by exciting each coil 112 .

[0103] On the other hand, the transport device 100 includes a driving device 126 as a power supply unit for exciting the coil 112 . Figures 8 to 10 The main parts of the drive device 126 are shown in a schematic diagram.

[0104] like Figures 8 to 10 As shown, the driving device 126 is equipped with a field magnet detection unit 128 and an electrical angle detection unit 130. The field magnet detection unit 128 is connected to the Hall sensor 116. The electrical angle detection unit 130 detects the electrical angle φ of the U-phase coil 112U of the armature unit 110 relative to the N pole of the field magnet according to the output signal of the field magnet detection unit 128.

[0105] In addition, the drive device 126 has a vector control drive control unit 132, which calculates and outputs the current target values ​​itu, itv, and itw of each phase coil 112 required for speed control and position control of the field magnetic unit 118 (conveying platform 104) based on the electrical angle φ detected in the electrical angle detection unit 130.

[0106] In addition, the drive device 126 includes a coil excitation unit 134, and the coil excitation unit 134 is connected to a power supply device 136 for supplying power for exciting each coil 112. The coil excitation unit 134 excites each phase coil 112U, 112V, 112W near the field magnetic unit 118 according to the current target values ​​itu, itv, itw of each phase coil 112 and the output of the field magnetic body detection unit 128. Thus, the drive device 126 can make the current value (target current value) flowing through each coil 112 of the same phase the same for each phase, so that the coils 112 of the same phase can be connected in series.

[0107] In this embodiment, the magnetization direction of the permanent magnet 122C in the center of the conveyor 104 is downward. Thus, it is easy to adjust the origin of the moving magnetic field generated by the coil 112 and the origin of the conveyor 104 by aligning the center of the permanent magnet 122C with the center position (hollow center) of the U-phase coil 112. Furthermore, the field magnetic part 118 is the length Lm of one period of magnetic poles corresponding to one period of electrical angle.

[0108] From this, the drive device 126 can select two coils 112 closest to the two ends of the field magnetic part 118 in the U phase, V phase, and W phase, respectively, based on the presence or absence of the conveyor stage 104 detected by the optical sensor 114 and the accurate position of the field magnetic part 118 detected by the Hall sensor 116. In addition, the drive device 126 controls the selected coils 112 to be excited at the same (same) excitation current value (target current value).

[0109] In addition, when the arrangement length of the permanent magnet 122 is longer than two periods of electrical angle, the drive device 126 is controlled in such a manner that coils 112 other than the coils 112 closest to the two ends of each phase among the coils 112 facing the field magnetic portion 118 are also excited at the same excitation current value as the coils 112 closest to the two ends of each phase.

[0110] like Fig. 9As shown, the electrical angle detection unit 130 includes a plurality of output selectors 138, a plurality of output adjusters 140, an output operator 142, and an electrical angle operator 144. The output selector 138 associates each optical sensor 114 arranged in a right angle direction (arrow X direction) to the traveling direction of the conveyor 104 with respect to each Hall sensor 116, and outputs, for example, whether the optical sensor 114 corresponding to the Hall sensor 116U of the U phase and the optical sensors 114 on both sides thereof, a total of three optical sensors 114, have all detected the conveyor 104. The output adjuster 140 receives the output signals of the Hall sensors 116 (116U, 116V, 116W) of each phase and the output signal of the output selector 138, thereby classifying the Hall sensors 116 into the Hall sensor 116U of the U phase, the Hall sensor 116 of the V phase, and the Hall sensor 116W of the W phase in a predetermined order.

[0111] The output calculator 142 is provided for each phase (U-phase output calculator 142U, V-phase output calculator 142V, W-phase output calculator 142W), and calculates the sum of the output signals of the output regulator 140 for each phase according to the output of the output selector 138. The electrical angle calculator 144 calculates the electrical angle φ according to the output signals of the phase output calculators 142U to 142W of each phase.

[0112] Here, the output regulator 140 outputs a voltage proportional to the negative maximum voltage value to the positive maximum voltage in a manner proportional to the magnetic flux density formed by the predetermined NS level as a reference according to the output signal of the Hall sensor 116. Furthermore, when the detected magnetic flux density is zero, the output regulator 140 outputs zero volts.

[0113] like Fig.10 As shown, the coil excitation unit 134 includes a plurality of excitation selectors 146 and a plurality of excitation devices 148. The excitation selector 146 is arranged on the center line of the coil 112, and outputs a signal indicating whether the optical sensors 114 arranged at the same interval as the coil pitch and the optical sensors 114 arranged on both sides of the coil 112 corresponding to the optical sensors 114 have detected the conveyor table 104.

[0114] The excitation device 148 is provided for each phase (excitation device 148U, 148V, 148W). When the excitation device 148U, 148V, 148W of each phase receives a signal indicating that each optical sensor 114 has detected the conveyor table 104 based on the output signal of the excitation selector 146, an excitation current that is consistent with the current target value itu, itv, itw of each phase output from the vector control drive control unit 132 flows to the coil 112 of the corresponding phase.

[0115] In addition, when the excitation device 148 receives a signal indicating that each optical sensor 114 has not detected the conveyor table 104, the excitation device 148 stops energizing the coil 112 of the corresponding phase, based on the output signal of the excitation selector 146. Thus, the coil excitation unit 134 can excite only the coil 112 near the conveyor table 104, thereby reducing the power consumption for exciting the coil 112.

[0116] In the conveying device 100 thus configured, when the power is turned on and the power is supplied from the power supply device 136, the vector control drive control unit 132 starts vector control in such a way that the moving speed of the conveying platform 104 reaches a preset speed, and excites each coil 112. The conveying device 100 controls the magnetic poles of the moving magnetic field formed by the excitation of the coil 112 to a strength corresponding to the moving speed of the field magnetic unit 118. As a result, in the conveying device 100, the electromagnetic force formed by the coil 112 acts on the field magnetic unit 118, and the conveying platform 104 starts to float and walk. At this time, the conveying device 100 generates a counter electromotive force in each coil 112 due to the magnetic field formed by the field magnetic unit 118 while the conveying platform 104 moves.

[0117] At this time, the number of magnetic flux linkages of the two coils 112 facing the field magnetic part 118 in each phase becomes a sine wave component with the same amplitude and a phase difference of 120 degrees. Therefore, from the three-phase power supply side, the back electromotive force generated in the coil 112 becomes the same sine wave component, and the excitation current flowing with the difference between the power supply voltage and the back electromotive force also becomes a sine wave component.

[0118] Thus, between the armature portion 110 and the field magnetic portion 118, the electromagnetic force between the magnet array having a length Lm that is an integer (positive integer) multiple of the length of one magnetic pole period and the three-phase coil 112 facing thereto can be made equivalent to the electromagnetic force of an integer (positive integer) multiple of one magnetic pole period acting between the three-phase coils 112 facing each other in the sinusoidally changing magnetic flux density distribution formed by the Halbach array magnetic field.

[0119] That is, in the conveying device 100, if the length of the permanent magnet 122 in the field magnetic portion 118 along the arrangement direction is a natural number multiple (an integer multiple greater than 1) of the length Lm of a magnetic pole cycle, the same current as when the permanent magnet 122 of the next magnetic pole cycle is connected will flow in the coil 112 near the ends on both sides of the moving direction of the permanent magnet 20.

[0120] In the conveying device 100 , the driving device 126 detects the position of the conveying table 104 on the rail 102 using the optical sensor 114 and the Hall sensor 116 , and supplies power to the coil 112 facing the conveying table 104 and the coils 112 before and after the conveying direction.

[0121] Therefore, in the conveying device 100, the same current can be supplied to the coils 112 in the range where the magnetic flux generated by the permanent magnets 122 of the field magnetic part 118 interlinks, so that the same current flows through the coils 112 of the same phase. In addition, in the conveying device 100, the same current can be supplied to the coils 112 in the range where the magnetic flux generated by the permanent magnets 122 of the field magnetic part 118 interlinks, so that the same current flows through the coils 112 of the same phase. Thus, the conveying device 100 can efficiently supply power in a manner that suppresses the end effect.

[0122] Therefore, in the conveying device 100 , the thrust (electromagnetic force) acting between the field magnetic part 118 and the armature part 110 does not generate thrust fluctuation, so the thrust received by the conveying table 104 in the conveying device 100 is smooth, thereby preventing the generation of vibration and noise.

[0123] In addition, in the conveying device 100, the cargo placed on the conveying table 104 will not collapse or be damaged due to vibration, and for example, even semiconductor wafers that are easily damaged by vibration can be conveyed without being damaged. In addition, since the conveying device 100 does not generate thrust fluctuations, the conveying table 104 can be moved to or stopped at a target position, and the conveying table 104 can be moved with high precision.

[0124] Furthermore, since the conveying device 100 does not generate thrust fluctuations, the conveying table 104 can be accelerated and decelerated according to the target value, so that the conveying device 100 can also be used as an excitation test machine. In addition, in the conveying device 100, the output operator 142 of each phase obtains the result based on the sum of the outputs of the Hall sensor 116 corresponding to the coils 112 of each phase near the magnetic field part 118, so the phase difference between the output operators 142 of each phase is 120°, and a sinusoidal voltage signal without harmonic components can be generated. Therefore, the conveying device 100 can calculate the electrical angle φ with high accuracy in the electrical angle operator 144, so that no electromagnetic force that causes thrust fluctuations is generated between the excited coil 112 (armature part 110) and the permanent magnet 122 of the magnetic field part 118.

[0125] [Second embodiment]

[0126] Next, a second embodiment of the present disclosure will be described.

[0127] In the second embodiment, an excitation device 200 using a moving magnet linear motor as an electromagnetic device is described. In the second embodiment, the same functional components as those of the Halbach array magnetic field, the double Halbach array magnetic field, and the first embodiment are marked with the same symbols as those of the Halbach array magnetic field, the double Halbach array magnetic field, and the first embodiment, and their detailed description is omitted.

[0128] Fig.11The main parts of the excitation device 200 are shown in a three-dimensional diagram. Fig.12 The main parts of the excitation device 200 are shown in a cross-sectional view from the long side direction. Fig.13 The main parts of the excitation device 200 are shown in a plan view.

[0129] like Figures 11 to 13 As shown, the excitation device 200 includes a rail 202 and an excitation trolley (excitation table) 204. The rail 202 includes a long flat base 206, a pair of left and right suspension guide grooves 208 are arranged on the upper surface of the base 206, and an armature part 210 is arranged between the suspension guide grooves 208. Each suspension guide groove 208 has a guide part 208B erected at one end of the width direction of the plate-shaped base 208A, and the pair of suspension guide grooves 208 are installed on the base 206 facing each other at a predetermined interval on the side opposite to the guide part 208B. In the suspension guide groove 208, the upper surface of the base 208A is the first surface 108A, and the inner side surface of the guide part 208B in the width direction is the second surface 108B.

[0130] The armature part 210 is provided with a plurality of coils 212 (U-phase coil 212U, V-phase coil 212V, and W-phase coil 212W) excited by three-phase alternating current (AC), and each coil 212 is molded and has a roughly plate-like shape (molded coil). In the armature part 210, each coil 212 whose long side direction is the up-and-down direction is connected along the width direction, and the armature part 210 is in the shape of a strip plate. One side of the width direction of the armature part 210, i.e., the lower side of the coil 212, is embedded between the bases 208A of the pair of suspension guide grooves 208. Thus, the armature part 210 can be erected on the base 206.

[0131] The vibration device 200 is provided with a vibration carriage 204 as a movable body on a base 206. The vibration carriage 204 has a non-magnetic chassis 214, and the chassis 214 is in a substantially box-like shape with the bottom and both sides in the long-side direction of the rail 202 open. The chassis 214 is arranged between the guide portions 208B of the pair of suspension guide grooves 208 in a state where the armature portion 210 is inserted from the opening on the lower side.

[0132] In addition, a pair of sliders 218 are arranged on the base frame 214, and each slider 218 is in the shape of a long block. The sliders 218 are arranged to clamp the armature part 210, and are respectively installed at the lower end of the base frame 214, and each slider 218 faces the first surface 108A and the second surface 108B of the suspension guide groove 208. Thus, the base frame 214 is suspended and supported by the air ejected from the suspension guide groove 208, so that the excitation carriage 204 can move along the rail 202 in a non-contact manner while straddling the armature part 210 erected on the base 206.

[0133] A field magnetic part 220 is arranged inside the chassis 214. In the field magnetic part 220, magnet arrays 224 formed by arranging a plurality of permanent magnets 222 are arranged in pairs, and a pair of magnet arrays 224 are respectively mounted on the inner surface of the chassis 214 facing the armature part 210. The field magnetic part 220 is set to have a division number n=8 and a set angle θ=45° in the magnet array 224. In addition, in the field magnetic part 220, the initial angle of arrangement of the permanent magnets 222 in the magnet array 224 is 45°. In a pair of magnet arrays 224, 8 permanent magnets 222A to 222H are arranged according to the set angle θ and the initial angle, and face each other in the chassis 214 in a manner to enhance the magnetic field between each other.

[0134] In addition, in the field magnetic part 220, non-magnetic and non-conductive partitions 226 are embedded between adjacent permanent magnets 222 in each magnet array 224. In the field magnetic part 220, the sum of the width dimension of the permanent magnet 222 along the arrangement direction and the width dimension (thickness dimension) of the partition 226 is 1 / 8 (one eighth) of the length of one cycle of the electrical angle of the armature part 210, and at the same time, the thickness dimension of one partition 226 is 1 / 4 (one quarter) of the width dimension of one permanent magnet 222.

[0135] Furthermore, the total length (length in the moving direction) of the excitation carriage 204 is the length of two periods of the electrical angle formed in the magnet array 224, and the excitation carriage 204 is shorter than the width (dimension in the arrangement direction) of a conventional Halbach magnet array with a division number n=8 by the thickness of a partition plate 226. Therefore, the chassis 214 extends from both sides of each magnet array 224 by about 1 / 2 of the thickness of the partition plate 226.

[0136] On the other hand, on the armature part 210, a plurality of optical sensors 114 are arranged on one side in the width direction of the track 202, and a plurality of Hall sensors 116 are arranged on the other side in the width direction of the track 202. The optical sensors 114 are used to detect the position of the chassis 214 (excitation carriage 204) relative to the armature part 210, and the Hall sensors 116 are used to detect the magnetic pole position of the magnet array 224 mounted on the chassis 214 relative to the coil 212, etc.

[0137] In the field magnetic part 220 of the excitation device 200, the direction of the magnetic flux in the magnetic gap of the center line is the width direction of the track 202 (arrow X direction), and the center line of the excitation trolley 204 is consistent with the center line of the magnet array 224, the N pole center line of the magnet array 224, and the S pole center line of the magnet array 224. Therefore, when implementing the origin adjustment required to control the position, speed, and thrust of the excitation trolley 204, it is sufficient to align the center line of the excitation trolley 204 with the central position of the U-phase coil 212U in the coil 212, so that the excitation trolley 204 can be easily adjusted in the origin.

[0138] Furthermore, in the excitation device 200, when the driving device 126 performs the walking control of the excitation carriage 204, two coils 212 closest to the magnet array 224 are selected from the coils 212 of each phase of the armature part 210, and the selected coils 212 are excited with a specified current value. In this case, the excitation carriage 204 has a length of two magnetic pole cycles of the magnetic flux density distribution of a pair of magnet arrays 224 when a plurality of magnet arrays 224 are arranged with a partition 226 therebetween. Based on the accurate position of the magnet array 224 calculated based on the magnetic flux density detected by the Hall sensor 116 and the presence or absence of the excitation carriage 204 detected by the optical sensor 114, the coil 212 can be selected and the excitation current value of the selected coil 212 can be determined.

[0139] Specifically, the output adjuster 140 corresponding to the Hall sensor 116 of each phase is set to output a signal indicating whether any of the three corresponding optical sensors 114 has detected the excitation trolley 204. At the same time, the excitation selector 146 outputs a signal indicating whether one of the optical sensors 114 at both ends of the coil 212 has detected the excitation trolley 204.

[0140] In the conveying device 100 of the first embodiment, the ratio of the number of field poles to the number of armature slots is 2 to 3, whereas in the vibration device 200, the ratio of the number of field poles to the number of armature slots is 4 to 3. Therefore, in the vibration device 200, the same drive control as that of the conveying device 100 can be performed by simply changing the connection between the coils 212V and 212W and the connection between the hall sensors 116V and 116W in the driving device 126.

[0141] Next, the operation of the vibration excitation device 200 will be described.

[0142] When the vibration device 200 is powered on, the driving device 126 starts to operate under the three-phase AC power supplied from the power supply device 136, and the vibration carriage 204 starts to float and move. In the vibration device 200, while the vibration carriage 204 moves, a counter electromotive force is generated in the coil 212 due to the magnetic field generated by the magnet array 224 that presents a double Halbach array magnetic field.

[0143] Here, the partition 226 provided in the field magnetic part 220 in the excitation device 200 is described. The electromagnetic force acting between the magnet array (Halbach magnetic field array) of an integral multiple of one period of magnetic poles and the three-phase coils facing thereto can be equivalent to the electromagnetic force of an integral multiple of one period of magnetic poles acting between the three-phase coils 212 arranged facing each other in the magnetic flux density distribution formed by the Halbach array magnetic field.

[0144] That is, in the excitation device 200, if the length of the magnet array 224 of the field magnetic part 220 is a natural number multiple (an integer multiple greater than 1) of the length Lm of one period of the axial angle of the permanent magnet 222 along the arrangement direction, the same current as when the permanent magnet 222 is connected will flow in the coils 212 near the ends on both sides of the moving direction of the field magnetic part 220. In addition, in the excitation device 200, the drive device 126 also uses the optical sensor 114 and the Hall sensor 116 to detect the position of the excitation trolley 204 on the track 202 and the magnetic poles of the field magnetic part 220, and supplies power to the coils 212 facing the excitation trolley 204 and the coils 212 before and after the conveying direction, so that power can be supplied efficiently. As a result, the same effect as the conveying device 100 is also obtained in the excitation device 200.

[0145] In addition, in the excitation device 200, as in the conveying device 100, the number of magnetic fluxes interlinked with the two coils 212 of each phase for selective excitation also becomes a sine wave (fundamental wave) component with the same amplitude and a phase shift of 120°, and the thrust (electromagnetic force) acting between the magnet array 224 and the coil 212 will not produce thrust fluctuations. Therefore, in the excitation device 200, the excitation trolley 204 can be accelerated and decelerated according to the target value, so that the excitation trolley 204 can apply the desired excitation force to the vibration test body with a simple structure. In addition, the thrust acting on the excitation trolley 204 is smooth and does not generate vibration and noise. Therefore, even if the excitation device 200 adopts a structure for conveying goods, the goods will not collapse or be damaged, and it can also be used as a conveying device for conveying easily damaged items (goods, etc.) to the target location.

[0146] Furthermore, in this embodiment, the electromagnetic device of the present disclosure is described by taking the conveying device 100 of the first embodiment and the excitation device 200 of the second embodiment as examples. However, as long as it is a moving magnet type in which the field magnetic part moves relative to the armature part, the present disclosure can be applied, and it can also be applied to a speaker that vibrates the diaphragm by moving the field magnetic part (vibration movement). In addition, since the electromagnetic device of the present invention can prevent the end effect, it can also be used in various positioning devices, and by using it in the positioning device, positioning can be performed with high precision.

[0147] In this way, the electromagnetic device disclosed in the present invention can be deformed in various ways. In addition, the period length of the magnetic poles in the magnet array forming the Halbach array magnetic field can be an integer (positive integer) times of one period of the magnetic poles, and there is no problem with a period length of more than three. Furthermore, although the permanent magnets constituting the array magnetic field (Halbach array magnetic field) are magnetized in such a way that the N pole position on the side of the magnetic field enhancement of the Halbach array magnetic field becomes the center of the magnetic field, there is no problem in magnetizing the permanent magnets in such a way that the N pole or S pole position is at any position of the magnetic field. In addition, the first and second embodiments select two armature coils to be excited in each phase, but the number of armature coils selected is not limited, as long as it is more than two. Furthermore, the arrangement of the permanent magnets is not limited to a straight line, but can also be an arc or other curved shape, etc. Although the shape of the permanent magnets that appear is a rectangle, this does not limit the cross-sectional shape of the permanent magnets at all.

[0148] As described above, the present disclosure includes the following aspects.

[0149] <1> An electromagnetic device, comprising:

[0150] A field magnetic part, wherein a plurality of permanent magnets are arranged in a moving body that moves relatively along the long side direction of a long fixed body in the following manner, that is, taking any integer greater than 3 as a division number n, dividing one period of electrical angle corresponding to one period of magnetic poles by the division number n, and changing the magnetization direction successively according to the obtained angle so that the length reaches a natural number multiple of the length of one period of electrical angle in the moving direction of the moving body; and

[0151] The armature part is arranged in the fixed body, and a plurality of armature coils are arranged in a group according to the number of phases along the long side direction of the fixed body within the moving range of the movable body, and the same current flows through each armature coil of the same phase to obtain power.

[0152] <2> An electromagnetic device, comprising:

[0153] A field magnetic part, wherein a plurality of permanent magnets are arranged in a moving body that moves relatively along the long side direction of a long fixed body in the following manner, that is, taking any integer greater than 3 as a division number n, dividing a period of electrical angle corresponding to a period of magnetic poles by the division number n, and changing the magnetization direction successively according to the obtained angle so that the length reaches a natural number multiple of the length of a period of electrical angle in the moving direction of the moving body;

[0154] An armature part is provided in the fixed body, wherein a plurality of armature coils are arranged in a group according to the number of phases along the long side direction of the fixed body within the moving range of the movable body; and

[0155] A power supply unit supplies power to each of the armature coils of the armature unit so that a same current flows between the armature coils of the same phase when power is supplied to each of the armature coils to move the movable body.

[0156] <3> The electromagnetic device according to <1>, comprising a power supply unit configured to supply power to each of the armature coils so that the same current flows between the same armature coils when the movable body is moved.

[0157] <4> The electromagnetic device according to <2> or <3>, wherein the power supply unit supplies power to the armature coils within a range interlinked by the magnetic flux generated by the field magnetic unit of the moving body in such a manner that the same current flows through each of the armature coils of the same phase.

[0158] <5> An electromagnetic device according to any one of <2> to <4>, wherein the power supply unit supplies power to the armature coils at both ends of the permanent magnet array within a range of half a period length relative to one period of the magnetic poles in a manner such that the same current flows through each of the armature coils of the same phase.

[0159] <6> The electromagnetic device according to <4> or <5>, comprising a detection member, wherein the detection member is disposed on the fixed body in a manner facing the field magnetic portion, and detects the magnetic flux to detect the permanent magnet array.

[0160] The power supply unit supplies power to the armature coil according to a detection result of the detection member.

[0161] <7> An electromagnetic device according to any one of <1> to <6>, wherein an arrangement length Lc of a group of the armature coils is a natural number multiple of a length Lm of one period of the magnetic poles of the permanent magnet.

[0162] <8> The electromagnetic device according to any one of <1> to <6>, wherein an arrangement length of the armature coils in the armature portion is a natural number multiple of an arrangement length Lc of a group of the armature coils.

[0163] <9> An electromagnetic device according to any one of <1> to <8>, wherein the field magnetic part includes a first magnet array and a second magnet array, each of which is arranged with the plurality of permanent magnets, and the first magnet array and the second magnet array face each other across the armature coil in a manner so as to mutually enhance the magnetic field formed.

[0164] <10> An electromagnetic device according to any one of <1> to <8>, wherein a ferromagnetic material is arranged on the armature portion within the arrangement range of the plurality of armature coils on the side of the armature coil opposite to the field magnetic portion.

[0165] In addition, the disclosure of Japanese Patent Application No. 2022-087258 is incorporated into this specification by reference in its entirety.

[0166] All documents, patent applications and technical standards described in this specification are incorporated into this specification by reference to the same extent as if each document, patent application and technical standard was specifically and individually described as being incorporated by reference.

Claims

1. An electromagnetic device, comprising: A field magnetic part, wherein a plurality of permanent magnets are arranged in a moving body that moves relatively along the long side direction of a long fixed body in the following manner: taking any integer greater than 3 as a division number n, dividing one period of electrical angle corresponding to one period of magnetic poles by the division number n, and changing the magnetization direction successively according to the obtained angle so that the length reaches a natural number multiple of the length of one period of electrical angle in the moving direction of the moving body; and The armature part is arranged in the fixed body, and a plurality of armature coils are arranged in a group according to the number of phases along the long side direction of the fixed body within the moving range of the movable body, and the same current flows through each armature coil of the same phase to obtain power.

2. An electromagnetic device, comprising: A field magnetic part, wherein a plurality of permanent magnets are arranged in a moving body that moves relatively along the long side direction of a long fixed body in the following manner: taking any integer greater than 3 as a division number n, dividing a period of electrical angle corresponding to a period of magnetic poles by the division number n, and changing the magnetization direction successively according to the obtained angle so that the length reaches a natural number multiple of the length of a period of electrical angle in the moving direction of the moving body; An armature part is provided in the fixed body, wherein a plurality of armature coils are arranged in a group according to the number of phases along the long side direction of the fixed body within the moving range of the movable body; and A power supply unit supplies power to each of the armature coils of the armature unit so that a same current flows between the armature coils of the same phase when power is supplied to each of the armature coils to move the movable body. 3 . The electromagnetic device according to claim 1 , comprising a power supply unit configured to supply power to each of the armature coils so that the same current flows between the armature coils of the same phase when the movable body is moved.

4. The electromagnetic device according to claim 2, wherein: The power supply unit supplies power to the armature coils in a range interlinked with the magnetic flux generated by the magnetic field unit of the moving body so that the same current flows through the armature coils of the same phase.

5. The electromagnetic device according to claim 2, wherein: The power supply unit supplies power to the armature coils located within a range of a half cycle length relative to one magnetic pole cycle at both ends of the permanent magnet array so that the same current flows through the armature coils of the same phase.

6. The electromagnetic device according to claim 4, comprising a detection member, wherein the detection member is disposed on the fixed body in a manner facing the field magnetic portion, and detects the permanent magnet array by detecting magnetic flux. The power supply unit supplies power to the armature coil according to a detection result of the detection member.

7. The electromagnetic device according to claim 1, wherein: The arrangement length Lc of a group of the armature coils is a natural number multiple of the length Lm of one period of the magnetic poles of the permanent magnet.

8. The electromagnetic device according to claim 1, wherein: The arrangement length of the armature coils in the armature portion is a natural number multiple of an arrangement length Lc of a group of the armature coils.

9. The electromagnetic device according to claim 1, wherein: The field magnetic part includes a first magnet array and a second magnet array, each of which has the plurality of permanent magnets arranged therein, and the first magnet array and the second magnet array face each other via the armature coil in a manner of mutually reinforcing the magnetic fields formed therefrom.

10. The electromagnetic device according to claim 1, wherein: On the armature part, a ferromagnetic material is arranged on the side of the armature coil opposite to the field magnetic part within the range where the plurality of armature coils are arranged.

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