Gate valve for semiconductor production equipment and semiconductor production equipment

Abstract

The invention discloses a gate valve for semiconductor production equipment and the semiconductor production equipment, and belongs to the technical field of semiconductor production equipment.The gate valve for the semiconductor production equipment comprises a shell, a power device, a driving device, a valve element and a guiding device; the power device is connected with the shell; the driving device is connected with the power device, the driving device is provided with a first initial position and a first locking position, the power device can enable the driving device to move from the first initial position to the first locking position, and the power device can limit the driving device; the valve core is connected with the driving device; the second locking mechanism has a second initial position and a second locking position; the driving device can drive the valve element to move between the second initial position and the second locking position. The guide device is connected with the valve core; the guiding device is used for limiting the valve element. By arranging the power device capable of limiting the driving device and the driving device and the guiding device capable of limiting the valve element, the sealing performance is good, and the semiconductor device yield is high.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor production equipment, and specifically relates to a gate valve for semiconductor production equipment and semiconductor production equipment. Background Art

[0002] The semiconductor production equipment includes a gate valve for controlling the opening or closing of a negative pressure pipeline. The gate valve for semiconductor production equipment realizes the opening and closing of the gate valve for semiconductor production equipment by moving the valve core. When the gate valve for semiconductor production equipment is closed, the valve core covers the through hole of the gate valve for semiconductor production equipment.

[0003] However, in actual use, the gate valve for semiconductor production equipment will be affected by other forces, causing the valve core to move when the gate valve for semiconductor production equipment is closed, resulting in incomplete closure of the gate valve for semiconductor production equipment and poor sealing performance, thereby causing chemical gases in the semiconductor production equipment to mix, and further resulting in low yield of semiconductor devices produced by the semiconductor production equipment. Summary of the invention

[0004] Purpose of the invention: The present application provides a gate valve for semiconductor production equipment, which is used to solve the technical problem of incomplete closure of the gate valve for semiconductor production equipment caused by the movement of the valve core; another purpose of the present application is to provide a semiconductor production equipment.

[0005] Technical solution: This application provides a gate valve for semiconductor production equipment, including: A housing, wherein the housing has a receiving cavity, and the housing includes a first wall, wherein the first wall is provided with a first through hole communicating with the receiving cavity; A power device, the power device is connected to the housing, and at least a part of the power device is disposed in the accommodating cavity; A driving device, the driving device is arranged in the accommodating cavity and connected to the power device, the driving device has a first initial position and a first locking position, the power device can move the driving device from the first initial position to the first locking position, and the power device is used to limit the driving device when the driving device moves to the first locking position; A valve core, the valve core is arranged in the accommodating cavity, the valve core is located between the driving device and the first wall and is connected to the driving device; the valve core has a second initial position and a second locking position; when the driving device moves, it can drive the valve core to move between the second initial position and the second locking position; A guide device, wherein the guide device is arranged in the accommodating cavity and connected to the valve core; the guide device is used to cooperate with the driving device to limit the valve core when the valve core moves to the second locking position.

[0006] In some embodiments, The power device comprises a power part and a transmission part connected to each other, the transmission part is connected to the driving device, and the power part can drive the transmission part to rotate; The driving device is connected to the housing, and the housing can limit the driving device so that the driving device performs linear motion driven by the transmission part; and when the driving device is in the first locking position, the transmission part locks the driving device.

[0007] In some embodiments, the driving device has a slide groove, the transmission part includes a rotating member and a moving member connected to each other, the rotating member is connected to the power part, the moving member is arranged in the slide groove, and the moving member can move along the extension direction of the slide groove so that the driving device moves between the first initial position and the first locking position.

[0008] In some embodiments, The driving device comprises a second body, the second body having a length direction and a thickness direction; wherein the direction of movement from the first initial position to the first locking position is the length direction, and the thickness direction is perpendicular to the length direction; The second body has the slide groove, and the opening of the slide groove penetrates the surface of the second body along the thickness direction; The slide groove has a first moving area, a second moving area and a transition area located between the first moving area and the second moving area and connected to the first moving area and the second moving area respectively; when the moving member passes through the transition area, the speed of the driving device in the length direction is less than the speed of the moving member in the length direction.

[0009] In some embodiments, the second body further has a width direction perpendicular to both the length direction and the thickness direction, and the second body has a first side wall in the width direction; the first moving area and the second moving area extend along the width direction, and the first moving area is farther away from the inner wall of the second moving area and closer to the first side wall of the second body in the width direction; When the driving device is located at the first initial position, the second body has a second side wall away from the first through hole in the length direction, and the second side wall is connected to the first side wall; the first moving area has a first groove wall close to the first side wall in the length direction; the second moving area has a second groove wall close to the first side wall in the length direction, the first groove wall and the second side wall have a minimum distance D1 along the length direction, and the second groove wall and the second side wall have a minimum distance D2 along the length direction, satisfying D1<D2.

[0010] In some embodiments, the transition zone has a third groove wall close to the first side wall in the length direction, the third groove wall is located between and connected to the first groove wall and the second groove wall, and the surface of the third groove wall is an arc surface; Alternatively, the surface of the third groove wall is a plane; Alternatively, the surface of the third groove wall consists of at least one plane and at least one arc surface.

[0011] In some embodiments, The driving device has a first guide groove; The valve core includes a first body and a first guide portion, the first body and the first guide portion are connected, the first guide portion is arranged in the first guide groove, and the first guide portion can move along the extension direction of the first guide groove; In which, the first guide groove has a first guide area and a second guide area which are connected to each other, and when the first guide portion is located in the first guide area, the valve core moves toward or away from the first wall relative to the driving device; when the first guide portion is located in the second guide area, the valve core is located in the second locking position, and the driving device can perform linear displacement and limit the valve core.

[0012] In some embodiments, the first body comprises: Main body; A first connecting portion, the first connecting portion is connected to a side of the main body away from the first wall, the first connecting portion has a second guide groove, the first guide portion is arranged in the second guide groove, and the first guide portion can move along an extension direction of the second guide groove; Wherein, the second guide groove has a third guide area and a fourth guide area which are connected to each other, and when the first guide portion is located in the third guide area, the first guide portion moves toward or away from the first wall relative to the first connecting portion; when the first guide portion is located in the fourth guide area, the valve core is located in the second locking position, and the first guide portion follows the driving device to perform linear displacement.

[0013] In some embodiments, the driving device comprises: A second body, wherein the second body has a second through hole, and the second through hole has a hole wall; a second connecting portion, the second connecting portion being disposed in the second through hole and connected to the first body, the second connecting portion having the first guide groove, a portion of the first body being located in the second through hole and connected to the second connecting portion; Wherein, the hole wall can be connected with the first guide portion to limit the position of the first guide portion.

[0014] In some embodiments, the driving device includes at least two second connecting parts, at least two second connecting parts are arranged in one second through hole and form a gap, and the portion of the first body is located in the gap and clamped by at least two second connecting parts.

[0015] In some embodiments, the valve core further includes a first connecting member, which is located and connected between the portion of the first body and the second connecting portion to form a rolling friction force between the portion of the first body and the second connecting portion.

[0016] In some embodiments, The first connecting portion has a connecting surface facing the first body; The main body comprises: A bracket, wherein the bracket has a third through hole, and the bracket has a first surface away from the first wall; a cover plate, the cover plate being disposed in the third through hole and connected to the bracket, the cover plate having a second surface away from the first wall and a third surface close to the first wall, the third surface being used to connect to the first wall; The first connecting portion is connected to the first main body portion so that the connecting surface is in contact with the first surface and the connecting surface is in contact with the second surface.

[0017] In some embodiments, the driving device has at least two first guide grooves; The valve core includes at least two first guide portions, and at least one of the first guide portions is disposed in at least two of the first guide grooves to limit the rotation of the valve core relative to the driving device.

[0018] In some embodiments, the valve core further includes a second connecting member, the second connecting member is connected to the first body, and the first guide portion is connected to the second connecting member, so that at least two of the first guide portions are relatively stationary.

[0019] In some embodiments, the guide device has a third guide groove, and the third guide groove has a fifth guide area and a sixth guide area connected to each other; The valve core further includes a second guide portion, the second guide portion is connected to the first body, the second guide portion is arranged in the third guide groove, and the second guide portion can move along the extension direction of the first guide groove; When the second guide portion is located in the fifth guide area, the valve core follows the driving device to perform linear displacement; when the second guide portion is located in the sixth guide area, the valve core moves toward or away from the first wall relative to the driving device.

[0020] Correspondingly, the present application also provides a semiconductor production equipment, which includes a gate valve for semiconductor production equipment as described in any one of the above embodiments.

[0021] Beneficial effects: Compared with the prior art, the gate valve for semiconductor production equipment provided in the embodiment of the present application includes a shell, a power device, a driving device, a valve core and a guide device, the shell has a accommodating chamber, the shell includes a first wall, and the first wall is provided with a first through hole connected to the accommodating chamber; the power device is connected to the shell, and at least part of the power device is arranged in the accommodating chamber; the driving device is arranged in the accommodating chamber and connected to the power device, the driving device has a first initial position and a first locking position, the power device can make the driving device move to move from the first initial position to the first locking position, and the power device can lock the driving device in the first locking position; the valve core is arranged in the accommodating chamber, the valve core is located between the driving device and the first wall and is connected to the driving device; the valve core has a second initial position and a second locking position; when the driving device moves, it can drive the valve core to move between the second initial position and the second locking position; the guide device is arranged in the accommodating chamber and connected to the valve core; the guide device is used to cooperate with the driving device when the valve core moves to the second locking position to limit the valve core. The present application provides a power device capable of locking the driving device and a driving device and a guide device capable of locking the valve core, thereby preventing the valve core from moving after the gate valve for semiconductor production equipment is closed, so that the gate valve for semiconductor production equipment has better sealing performance.

[0022] Accordingly, the present application also provides a semiconductor production equipment, the semiconductor production equipment comprising a gate valve for semiconductor production equipment as in any one of the above embodiments. The semiconductor production equipment comprising the gate valve for semiconductor production equipment has better sealing performance, so that the yield of semiconductor devices produced by using the semiconductor production equipment is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.

[0024] Figure 1 A schematic diagram of the structure of a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 2 A schematic diagram of the structure of a gate valve for semiconductor production equipment provided in an embodiment of the present application without the housing hidden; Figure 3 for Figure 2 Detailed view of the center circle A; Figure 4 A schematic diagram of the structure of a drive device and a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 5 for Figure 4 Detailed view of the center circle B; Figure 6 A schematic structural diagram of a drive device and a valve core from another angle in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 7 A schematic diagram of the exploded structure of a drive device and a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 8 A schematic structural diagram of a drive device and a valve core from another angle in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig. 9 A schematic diagram of the structure of a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.10 for Fig. 9 Detailed view of the center circle C; Fig.11 A schematic diagram of the structure of a drive device in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.12 for Fig.11 Detailed view of the center circle D; Fig.13 A schematic diagram of the structure of a guide device in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.14 A schematic diagram of the relative position relationship between the drive device and the valve core in the gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.15 A schematic diagram of another relative position relationship between a drive device and a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application.

[0025] Figure numerals, 1-shell, 11-accommodating chamber, 12-first wall, 121-first through hole, 13-second wall, 14-third wall, 15-fourth wall, 2-driving device, 21-second connecting portion, 211-first guide groove, 212-first guide area, 213-second guide area, 22-second body, 221-second through hole, 222-hole wall, 23-slide groove, 231-second moving area, 2311-second groove wall, 2331-first groove wall, 232-transition area, 2321-third groove wall, 233-second moving area, 2331-first groove wall, 24-second side wall, 25-first side wall, 3-valve core, 31-first body, 311-main body, 311 1-bracket, 3112-third through hole, 3113-first surface, 3114-cover plate, 3115-second surface, 3116-third surface, 3117-seal, 312-first connecting part, 3121-second guide groove, 3122-third guide area, 3123-fourth guide area, 3124-connecting surface, 32-first guide part, 33-first connecting member, 34-second connecting member, 35-second guide part, 4-guiding device, 41-third guide groove, 411-fifth guide area, 412-sixth guide area, 5-power device, 51-power part, 52-transmission part, 521-rotating member, 522-moving member, 6-first guide member, 7-second guide member. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0027] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or can communicate with each other; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more features.

[0028] It should also be noted that in the drawings of the embodiments of the present application, the arrows marked with X, Y, and Z respectively represent the length direction X, the thickness direction Y, and the width direction Z. The description of the present application introduces the length direction X, the thickness direction Y, and the width direction Z in order to more clearly express the relative position relationship involved in the present application, wherein the length direction X, the thickness direction Y, and the width direction Z are three relative directions that intersect with each other, rather than absolute directions. In actual applications, the length direction X, the thickness direction Y, and the width direction Z can point to any direction in space as long as the intersection relationship between the two is maintained.

[0029] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application.

[0030] The gate valve for semiconductor production equipment realizes opening and closing of the gate valve for semiconductor production equipment by moving the valve core 3. When the gate valve for semiconductor production equipment is closed, the valve core 3 covers the through hole of the gate valve for semiconductor production equipment.

[0031] However, in actual use, the gate valve for semiconductor production equipment may be affected by other forces so that the valve core 3 moves when the gate valve for semiconductor production equipment is closed, resulting in incomplete closure of the gate valve for semiconductor production equipment.

[0032] It is understandable that other forces may include gravity. During the closing process of the gate valve for semiconductor production equipment, the valve core 3 needs to overcome gravity to do work. After the gate valve for semiconductor production equipment is closed, the valve core 3 always needs to overcome gravity to maintain the closed state of the gate valve for semiconductor production equipment, which is prone to the problem of sealing failure caused by gravity. Similarly, other forces may also include the impact force of the fluid. The valve core 3 needs to overcome the impact force of the fluid when the gate valve for semiconductor production equipment is closed. Once the impact force of the fluid pushes the valve core 3 away from the first wall 12, the seal fails.

[0033] In order to solve the technical problem that the valve core 3 moves when subjected to other forces, resulting in incomplete closure of the gate valve for semiconductor production equipment, resulting in low yield of semiconductor devices, the first embodiment of the present application provides a gate valve for semiconductor production equipment, see Figure 1 and Figure 2The gate valve for semiconductor production equipment includes a housing 1, a power device 5, a drive device 2, a valve core 3 and a guide device 4. The housing 1 has a housing chamber 11. The housing 1 includes a first wall 12. The first wall 12 is provided with a first through hole 121 communicating with the housing chamber 11. The power device 5 is connected to the housing 1. At least part of the power device 5 is arranged in the housing chamber 11. The drive device 2 is arranged in the housing chamber 11 and connected to the power device 5. The drive device 2 has a first initial position and a first locking position. The power device 5 can move the drive device 2 from the first initial position to the first locking position. The power device 5 is used to limit the driving device 2 when the driving device 2 moves to the first locking position; the valve core 3 is arranged in the accommodating chamber 11, the valve core 3 is located between the driving device 2 and the first wall 12 and is connected to the driving device 2; the valve core 3 has a second initial position and a second locking position; when the driving device 2 moves, it can drive the valve core 3 to move between the second initial position and the second locking position; the guide device 4 is arranged in the accommodating chamber 11 and is connected to the valve core 3; the guide device 4 is used to cooperate with the driving device 2 when the valve core 3 moves to the second locking position to limit the valve core 3.

[0034] Specifically, when the driving device 2 is located at the first locking position, the gate valve for semiconductor production equipment is in a closed state.

[0035] Specifically, in some embodiments, the power device 5 is a screw rod, and the operator can rotate the screw rod and move the drive device 2 by turning a hand wheel sleeved on the end of the screw rod; in other embodiments, the screw rod is driven by a motor, and the motor can be any one of a pneumatic motor, an electric motor, and a hydraulic motor. Among them, the self-locking function of the screw rod can prevent the drive device 2 from moving under the action of external force.

[0036] In other embodiments, the power device 5 may be any one of a pneumatic cylinder, an electric push rod, and an oil cylinder with a self-locking function, so as to limit the driving device 2 after the driving device 2 stops moving, thereby preventing the driving device 2 from moving under the action of external force.

[0037] In some embodiments, please refer again to Figure 1 The shell 1 also includes a second wall 13 and a third wall 14, which are arranged opposite to each other along the width direction Z. The first wall 12 is connected to and located between the second wall 13 and the third wall 14. At least one of the driving device 2 and the valve core 3 includes a plurality of first guide members 6, which are rollingly connected to the second wall 13 or the third wall 14 to limit the position of at least one of the driving device 2 and the valve core 3 along the width direction Z.

[0038] In other embodiments, please refer again to Figure 2The driving device 2 includes a plurality of first guide members 6, which are used for rolling connection with the guide device 4 to reduce the friction when the driving device 2 moves relative to the guide device 4 and enable the driving device 2 to be guided when moving.

[0039] In some embodiments, please refer again to Figure 1 and Figure 2 The shell 1 also has a fourth wall 15 arranged opposite to the first wall 12 along the thickness direction Y. The driving device 2 also includes a second guide member 7, which is rollingly connected to the fourth wall 15 to limit the driving device 2 along the thickness direction Y.

[0040] Specifically, the power device 5 is used to drive the driving device 2 to reciprocate between the first initial position and the first locking position along the length direction X to realize the opening and closing of the gate valve for semiconductor production equipment. When the driving device 2 is in the first locking position, the driving device 2 cannot move due to the existence of the power device 5. In other words, when the driving device 2 is in the first locking position, the driving device 2 as an active member cannot drive the power device 5 to move, and the driving device 2 itself cannot move. Only when the power device 5 is used as an active member and the driving device 2 is used as a driven member, the driving device 2 can leave the first locking position.

[0041] In addition, the driving device 2 is used to drive the valve core 3 to move along the length direction X, and the guiding device 4 is used to guide the valve core 3 when the valve core 3 moves along the length direction X, so that the valve core 3 generates a partial movement along the thickness direction Y, and then the valve core 3 can be driven by the driving device 2 to move from the second initial position to the second locking position, so as to fit with the first wall 12 and cover the first through hole 121. When the valve core 3 moves to the second locking position, the driving device 2 limits the valve core 3 along the thickness direction Y to prevent the valve core 3 from moving along the thickness direction Y and separating from the first wall 12; the guiding device 4 limits the valve core 3 along the length direction X to prevent the valve core 3 from moving along the length direction X so that the first through hole 121 is not sealed. In other words, when the valve core 3 is in the second locking position, the valve core 3 as an active member cannot drive the driving device 2 to move, and the valve core 3 itself cannot move. Only when the driving device 2 is an active member and the valve core 3 is a driven member, can the valve core 3 leave the second locking position.

[0042] Furthermore, in some embodiments, after the valve core 3 is located in the second locking position, the driving device 2 can continue to move along the length direction X to enter the first locking position, that is, after the valve core 3 is located in the second locking position and the driving device 2 has not reached the first locking position, the valve core 3 and the driving device 2 can only move relative to each other along the length direction X, and cannot achieve relative movement along the thickness direction Y. The valve core 3 is upper-limited in the thickness direction Y by the driving device 2.

[0043] It can be understood that in the above embodiment, there are two positions of limitation, namely, the power device 5 limits the driving device 2 in the first locking position, and the driving device 2 in the first locking position limits the valve core 3 in the second locking position. When the valve core 3 is subjected to other forces, since the driving device 2 in the first locking position is in a state of being limited by the power device 5, and the valve core 3 is in a state of being limited by the driving device 2, that is, the valve core 3 will not leave the first wall 12 when subjected to other forces, so that the gate valve for semiconductor production equipment in the above embodiment has high reliability and good sealing performance, and the yield rate of semiconductor devices produced by the equipment including the gate valve for semiconductor production equipment is high.

[0044] In some embodiments, please refer again to Figure 1 Also see Figure 3 The power device 5 includes a power part 51 and a transmission part 52 which are connected to each other. The transmission part 52 is connected to the driving device 2, and the power part 51 can drive the transmission part 52 to rotate; the driving device 2 is connected to the shell 1, and the shell 1 can limit the driving device 2 so that the driving device 2 performs a linear motion driven by the transmission part 52; and when the driving device 2 is in the first locking position, the transmission part 52 locks the driving device 2.

[0045] Specifically, in some embodiments, the drive device 2 is connected to the housing 1 via the first guide member 6. In other embodiments, the drive device 2 is connected to the guide device 4 via the first guide member 6, and the guide device 4 limits the movement of the drive device 2 so that the drive device 2 can perform linear motion.

[0046] Specifically, when the drive device 2 is in the first locking position, the drive device 2 is in a dead point position in the mechanism formed by the drive device 2 and the power device 5, that is, when the drive device 2 is subjected to other forces, the drive device 2 as an active component cannot provide effective torque for the power device 5 to rotate the power device 5, and the power device 5 does not rotate, and the drive device 2 cannot move along the length direction X, that is, the drive device 2 is limited by the power device 5.

[0047] It can be understood that, from the above, when the closing process of the gate valve for semiconductor production equipment requires the driving device 2 to overcome gravity to do work, the driving device 2 in the gate valve for semiconductor production equipment in the closed state will not leave the first locking position due to the limitation of the power device 5, so that the gate valve for semiconductor production equipment is changed from a closed state to an open state.

[0048] In some embodiments, the power source provided by the power device 5 is a rotating power source, the power source is coaxial with the power unit 51, and the power source is directly coaxially connected to the power unit 51 to output the rotating power source; in other embodiments, the power source and the power unit 51 intersect, and the power transmission between the power source and the power unit 51 is achieved through a gear box; in still other embodiments, please refer to Figure 3 The power source provided by the power device 5 is a linear power source, and the power device 5 includes a rack that can output linear motion, that is, the power part 51 is a rack, and the transmission part 52 is a gear that can mesh with the rack to convert the linear power source output by the rack into rotational motion, thereby driving the transmission part 52 to rotate. Specifically, in some embodiments, please refer again to Figure 1 and Figure 3 The power source is a cylinder capable of providing reciprocating linear motion. The power unit 51 in the form of a rack is connected to the piston rod of the cylinder to achieve reciprocating linear motion and can drive the gear to rotate, that is, drive the transmission unit 52 to rotate.

[0049] In the above embodiment, by providing a rotating transmission part 52 and a driving device 2 that can be driven by the transmission part 52 to perform linear motion, the driving device 2 located in the first locking position can be limited by the power device 5, thereby preventing the gate valve for semiconductor production equipment from being converted from a closed state to an open state due to the action of other forces, thereby improving the reliability of the gate valve for semiconductor production equipment.

[0050] In some embodiments, see Figure 3 The driving device 2 has a slide groove 23, and the transmission part 52 includes a rotating member 521 and a moving member 522 that are connected to each other. The rotating member 521 is connected to the power part 51, and the moving member 522 is arranged in the slide groove 23, and the moving member 522 can move along the extension direction of the slide groove 23, so that the driving device 2 moves between the first initial position and the first locking position.

[0051] Specifically, the rotating member 521 includes a gear that can mesh with the power part 51 in the form of a rack.

[0052] Specifically, as the rotating member 521 rotates, the movable member 522 also rotates along with the rotating member 521, and during the rotation process, movement along the length direction X and movement in the thickness direction Y are generated. Since the shell 1 limits the driving device 2, the movement of the rotating member 521 along the length direction X can drive the driving device 2 to move along the length direction X, and the movement of the rotating member 521 along the thickness direction Y will cause the rotating member 521 to move in the slide groove 23.

[0053] In the above embodiment, by setting the slide groove 23 and the rotating member 521, the rotational motion of the rotating member 521 can be converted into the linear motion of the driving device 2, so that the driving device 2 can reciprocate along the length direction X between the first initial position and the first locking position, thereby realizing the closing and opening of the gate valve for semiconductor production equipment.

[0054] In some embodiments, see Fig.11 The driving device 2 includes a second body 22, and the second body 22 has a length direction X and a thickness direction Y; wherein the direction of movement from the first initial position to the first locking position is the length direction X, and the thickness direction Y is perpendicular to the length direction X; the second body 22 has a slide groove 23, and the opening of the slide groove 23 passes through the surface of the second body 22 along the thickness direction Y; please refer to Figure 6 The slide groove 23 has a first moving area 233, a second moving area 231 and a transition area 232 located between the first moving area 233 and the second moving area 231 and connected to the first moving area 233 and the second moving area 231 respectively; when the moving member 522 passes through the transition area 232, the speed of the driving device 2 in the length direction X is less than the speed of the moving member 522 in the length direction X.

[0055] Specifically, when the second guide portion 35 is located in the sixth guide area 412 , the moving member 522 is located in the transition area 232 .

[0056] Specifically, when the moving member 522 is located in the first moving area 233 and the second moving area 231, the component velocity of the moving member 522 in the length direction X is V 1X , the speed of the driving device 2 along the length direction X is V 2X , satisfying: V 1X =V 2X When the moving member 522 is located in the transition zone 232, the component velocity of the moving member 522 in the length direction X is V 1X ', the speed of the driving device 2 along the length direction X is V 2X ', satisfying: V 1X '>V 2X '.

[0057] It can be understood that when the extension direction of the transition zone 232 is the same as the motion trajectory of the moving member 522, the driving device 2 does not move when the moving member 522 moves. When the extension direction of the transition zone 232 is inclined to the extension directions of the first moving zone 233 and the second moving zone 231, the efficiency of the moving member 522 driving the driving device 2 can be reduced, so that the speed of the driving device 2 in the length direction X is slower than the speed of the moving member 522 in the length direction X.

[0058] It can be understood that when the valve core 3 is located at the second locking position, the moving member 522 is located in the second moving area 231, and the driving device 2 can move toward the first locking position.

[0059] It can be understood that when the valve core 3 moves from the second transition position to the second locking position, the valve core 3 moves in both the length direction X and the thickness direction Y, which requires the speed of the valve core 3 to generate a component speed in the thickness direction Y, and the speed of the valve core 3 in the length direction X is reduced. In the above embodiment, by providing the transition zone 232, the driving device 2 can be decelerated during the movement in the length direction X, thereby matching the speed of the valve core 3 moving from the second transition position to the second locking position in the length direction X, so that the movement of the valve core 3 is smoother, and interference of the valve core 3 during the movement is avoided.

[0060] In some embodiments, see Figure 4 , Figure 6 and Fig.11 The second body 22 also has a width direction Z perpendicular to both the length direction X and the thickness direction Y, and the second body 22 has a first side wall 25 in the width direction Z; the first moving area 233 and the second moving area 231 extend along the width direction Z, and the first moving area 233 is farther away from the inner wall of the second moving area 231 and closer to the first side wall 25 of the second body 22 in the width direction Z; When the driving device 2 is located at the first initial position, the second body 22 has a second side wall 24 away from the first through hole 121 in the length direction X, and the second side wall 24 is connected to the first side wall 25; the first moving area 233 has a first groove wall 2331 close to the first side wall 25 in the length direction X; the second moving area 231 has a second groove wall 2311 close to the first side wall 25 in the length direction X, and the first groove wall 2331 and the second side wall 24 have a minimum distance D1 along the length direction X, and the second groove wall 2311 and the second side wall 24 have a minimum distance D2 along the length direction X, see Figure 8 , satisfying D1<D2.

[0061] It can be understood that, in the above embodiment, when the driving device 2 moves from the first initial position to the first locking position, when the slide groove 23 is located between the power device 5 and the first through hole 121 along the length direction X, the extension direction of the transition zone 232 is close to the trajectory of the moving member 522, and the speed of the driving device 2 along the length direction X is lower than the speed of the moving member 522 along the length direction.

[0062] In some embodiments, the transition zone 232 has a third groove wall 2321 close to the first side wall 25 in the length direction X, the third groove wall 2321 is located between and connected to the first groove wall 2331 and the second groove wall 2311, and the surface of the third groove wall 2321 is an arc surface; or, the surface of the third groove wall 2321 is a plane; or, a portion of the third groove wall 2321 is a plane, and another portion of the third groove wall 2321 is an arc surface.

[0063] Specifically, in some embodiments, the transition zone 232 is an arc groove, that is, the third groove wall 2321 is a curved surface; in other embodiments, the transition zone 232 is an inclined groove, that is, the third groove wall 2321 is a plane inclined to the first groove wall 2331 and the second groove wall 2311; in still other embodiments, the third groove wall 2321 is composed of at least one curved surface and at least one plane.

[0064] In some embodiments, see Fig.11 and Fig.12 The driving device 2 has a first guide groove 211; the valve core 3 includes a first body 31 and a first guide portion 32, the first body 31 and the first guide portion 32 are connected, the first guide portion 32 is arranged in the first guide groove 211, and the first guide portion 32 can move along the extension direction of the first guide groove 211; wherein, the first guide groove 211 has a first guide area 212 and a second guide area 213 which are connected to each other, when the first guide portion 32 is located in the first guide area 212, the valve core 3 moves toward or away from the first wall 12 relative to the driving device 2; when the first guide portion 32 is located in the second guide area 213, the valve core 3 is located in the second locking position, and the driving device 2 can perform linear displacement and limit the valve core 3.

[0065] In some embodiments, the first guide portion 32 is a columnar object, such as a pin. Part of the first guide portion 32 is disposed in the first guide groove 211 to move in the first guide groove 211, and part of the first guide portion 32 is connected to the first body 31, that is, connected to the groove wall of the first guide groove 211, so that the first body 31 can move along the extension direction of the first guide groove 211, that is, the first guide groove 211 can guide the first body 31.

[0066] Furthermore, in some embodiments, the second guide area 213 extends in a straight line along the length direction X, so that a relative displacement along the length direction X can be generated between the valve core 3 and the driving device 2; the first guide area 212 extends along an oblique line or an arc line, so that the valve core 3, driven by the driving device 2, can move along the length direction X relative to the guide device 4, and can also move toward the first wall 12 along the thickness direction Y relative to the driving device 2 when moving along the length direction X relative to the guide device 4.

[0067] Specifically, in some embodiments, the driving device 2 further has a first transition position between the first initial position and the first locking position, and the valve core 3 further has a second transition position between the second initial position and the second locking position. When the valve core 3 is located between the second initial position and the second transition position, the driving device 2 is between the first initial position and the first transition position, the valve core 3 and the driving device 2 remain relatively stationary, the valve core 3 moves relative to the guide device 4 along the length direction X, and the first guide portion 32 is stationary in the first guide area 212; when the valve core 3 is located between the second transition position and the second locking position, the driving device 2 is located between the first initial position and the first transition position, the valve core 3 moves relative to the guide device 4 along the length direction X, and also moves toward the first wall 12 along the thickness direction Y, the valve core 3 moves relative to the driving device 2 along the thickness direction Y, and when the valve core 3 reaches the second locking position, the driving device 2 reaches the first transition position, during which the first guide portion 32 moves from the first guide area 2 12 moves from one end of the first guide area 212 away from the second guide area 213 to one end of the first guide area 212 close to the second guide area 213; when the valve core 3 is in the second locking position, the driving device 2 moves from the first transition position to the first locking position along the length direction X. During this period, the first guide portion 32 moves from one end of the second guide area 213 close to the first guide area 212 to one end of the second guide area 213 away from the first guide area 212. During this period, since the second guide area 213 can only guide the first guide portion 32 to move along the length direction X, the first guide portion 32 cannot move along the thickness direction Y, that is, the displacement of the first guide portion 32 along the thickness direction Y is limited. Since the valve core 3 includes the first guide portion 32 and the first body 31 connected thereto, the first guide groove 211 is provided on the driving device 2, that is, the driving device 2 can limit the limit of the valve core 3 in the second locking position along the thickness direction Y, so as to avoid the valve core 3 from being separated from the first wall 12, thereby improving the reliability and sealing of the gate valve for semiconductor production equipment when it is in a closed state.

[0068] In some embodiments, see Fig. 9 and Fig.10 The first body 31 includes a main body portion 311 and a first connecting portion 312; the first connecting portion 312 is connected to a side of the main body portion 311 away from the first wall 12, the first connecting portion 312 has a second guide groove 3121, the first guide portion 32 is arranged in the second guide groove 3121, and the first guide portion 32 can move along the extension direction of the second guide groove 3121; wherein, the second guide groove 3121 has a third guide area 3122 and a fourth guide area 3123 connected to each other, when the first guide portion 32 is located in the third guide area 3122, the first guide portion 32 moves toward or away from the first wall 12 relative to the first connecting portion 312; when the first guide portion 32 is located in the fourth guide area 3123, the valve core 3 is located in the second locking position, and the first guide portion 32 follows the driving device 2 to perform a linear displacement.

[0069] It is understandable that the driving device 2 is disposed on the side of the main body 311 away from the first wall 12 , and disposing the first connecting portion 312 on the side of the main body 311 away from the first wall 12 can facilitate the connection between the first connecting portion 312 and the driving device 2 .

[0070] Specifically, when the first guide portion 32 is located in the second guide area 213, the first guide portion 32 is also located in the fourth guide area 3123, and the first guide area 212 guides the first guide portion 32 so that the first guide portion 32 moves relative to the driving device 2 along the thickness direction Y, and the third guide area 3122 also guides the first guide portion 32 to move relative to the first body 31 along the thickness direction Y, that is, when the first guide portion 32 is located in the first guide area 212 and the third guide area 3122, the driving device 2 can move relative to the first body 31 along the thickness direction Y, and the driving device 2 and the valve core 3 both move relative to the guide device 4 along the length direction X; When the first guide portion 32 is located in the second guide area 213, the first guide portion 32 is also located in the fourth guide area 3123. When the second guide area 213 guides the first guide portion 32 so that the first guide portion 32 moves relative to the driving device 2 along the length direction X, the fourth guide area 3123 also guides the first guide portion 32 to move relative to the first body 31 along the length direction X. That is, when the first guide portion 32 is located in the second guide area 213 and the fourth guide area 3123, the driving device 2 can move relative to the first body 31 along the length direction X, and the driving device 2 and the valve core 3 do not produce displacement along the thickness direction Y relative to the guide device 4.

[0071] It can be understood that the volume inside the accommodating chamber 11 is relatively small, and the sizes of the first guide groove 211 and the second guide groove 3121 are limited. In order to make the relative displacement stroke between the driving device 2 and the first valve body larger, in the above embodiment, a second guide groove 3121 that can be used in conjunction with the first guide groove 211 is added to increase the relative displacement stroke between the first body 31 and the driving device 2, so that the valve core 3 can obtain better closing and locking effects.

[0072] In some embodiments, see Fig.11 and Fig.12 The driving device 2 includes a second body 22 and a second connecting part 21, the second body 22 has a second through hole 221, and the second through hole 221 has a hole wall 222; the second connecting part 21 is arranged in the second through hole 221 and is connected to the first body 31, the second connecting part 21 has a first guide groove 211, and a part of the first body 31 is located in the second through hole 221 and is connected to the second connecting part 21; wherein the hole wall 222 can be connected with the first guide part 32 to limit the first guide part 32.

[0073] In some embodiments, when the first guide portion 32 moves relative to the driving device 2, one end of the first guide portion 32 contacts the hole wall 222; in other embodiments, when the first guide portion 32 moves relative to the driving device 2, both ends of the first guide portion 32 contact the hole wall 222.

[0074] It is understandable that, in some embodiments, the first guide groove 211 and / or the second guide groove 3121 can only limit the first guide portion 32 along the length direction X and the thickness direction Y. In the above embodiment, when the first guide portion 32 slides in the first guide groove 211 and / or the second guide groove 3121, the end of the first guide portion 32 can be connected to the hole wall 222, and the hole wall 222 can limit the displacement of the first guide portion 32 along the width direction Z.

[0075] In the above embodiment, the hole wall 222 is arranged on one side of the second connecting portion 21 so that the first guide portion 32 passing through the second connecting portion 21 can be connected with the hole wall 222, so as to realize the limitation of the first guide portion 32 by the hole wall 222, so that the relative movement between the driving device 2 and the valve core 3 is more stable, and the relative stationary state between the driving device 2 and the valve core 3 is also more stable.

[0076] In some embodiments, please refer again to Fig.10 The driving device 2 includes at least two second connecting parts 21 , the at least two second connecting parts 21 are disposed in a second through hole 221 and form a gap, and a portion of the first body 31 is located in the gap and clamped between the at least two second connecting parts 21 .

[0077] Furthermore, in some embodiments, the two second connection parts 21 are spaced apart along the width direction Z to form a gap, a portion of the first body 31 is disposed in the gap and the two sides of the portion of the first body 31 are respectively connected to the two second connection parts 21, so that the two second connection parts 21 can limit the portion of the first body 31 along the width direction Z.

[0078] In some embodiments, the driving device 2 has at least two second through holes 221 and includes at least four second connecting portions 21 , so that at least two second through holes 221 are provided with two second connecting portions 21 to form a gap that can limit the first body 31 .

[0079] In the above embodiment, part of the first body 31 is disposed in the gap so that the second connection portion 21 limits the first body 31 along the width direction Z, thereby improving the stability of the valve core 3 during movement.

[0080] In some embodiments, please refer again to Figure 5The valve core 3 also includes a first connecting member 33 , which is located and connected between a portion of the first body 31 and the second connecting portion 21 to form a rolling friction force between the portion of the first body 31 and the second connecting portion 21 .

[0081] Specifically, in some embodiments, the first connecting member 33 is a ball bearing, and a fixing groove is opened on the first body 31 to limit the first connecting member 33, and also allow the first connecting member 33 to roll in the fixing groove, so that rolling friction is generated when the first connecting member 33 contacts and moves relative to the second connecting part 21.

[0082] It can be understood that the portion of the first body 31 clamped between the second connecting parts 21 can be limited by connecting with the second connecting parts 21. However, the first body 31 will be relatively displaced with the second connecting parts 21 along the length direction X and the thickness direction Y, and sliding friction will be generated between the portion of the first body 31 and the second connecting parts 21.

[0083] In the above embodiment, part of the sliding friction force is converted into rolling friction force by providing the first connecting member 33 so that the relative movement between the first body 31 and the second connecting portion 21 is smoother.

[0084] In some embodiments, see Figure 7 The first connecting portion 312 has a connecting surface 3124 facing the first body 31; the main body 311 includes a bracket 3111 and a cover plate 3114, the bracket 3111 has a third through hole 3112, and the bracket 3111 has a first surface 3113 away from the first wall 12; the cover plate 3114 is arranged at the third through hole 3112 and connected to the bracket 3111, the cover plate 3114 has a second surface 3115 away from the first wall 12 and a third surface 3116 close to the first wall 12, and the third surface 3116 is used to connect to the first wall 12; wherein the first connecting portion 312 is connected to the first body 31 so that the connecting surface 3124 is in contact with the first surface 3113, and the connecting surface 3124 is in contact with the second surface 3115.

[0085] It is understandable that the surface of the valve core 3 that contacts the first wall 12 has a high requirement for flatness, and the bracket 3111 may be made by bending, stamping and other processes. In the above embodiment, separating the sealing surface from the bracket 3111 can reduce the difficulty of processing.

[0086] Specifically, the first connection portion 312 is detachably connected to the first body 31 , and the first connection portion 312 is pressed on the cover plate 3114 so that the cover plate 3114 can be fixed to the third through hole 3112 .

[0087] In some embodiments, the main body 311 further includes a seal 3117 , the cover plate 3114 is sealedly connected to the bracket 3111 via the seal 3117 , and the seal 3117 is used to be sealedly connected to the first wall 12 so that the valve core 3 covers the first through hole 121 .

[0088] In the above embodiment, the difficulty of parts processing can be reduced by providing a detachable cover plate 3114 and a bracket 3111 . Meanwhile, providing a detachable first connecting portion 312 can make the connection between the cover plate 3114 and the bracket 3111 better.

[0089] In some embodiments, see Fig.11 and Fig.12 The driving device 2 has at least two first guide grooves 211 ; the valve core 3 includes at least two first guide portions 32 , and at least one first guide portion 32 is provided in at least two first guide grooves 211 to limit the rotation of the valve core 3 relative to the driving device 2 .

[0090] Specifically, in some embodiments, at least two first guide portions 32 are spaced apart in the plane where the length direction X and the thickness direction Y are located.

[0091] It is understandable that if the first guide portion 32 is a cylindrical pin shaft and there is only one first guide portion 32 in the length direction X or the thickness direction Y, rotation may occur between the driving device 2 and the valve core 3 .

[0092] In the above embodiment, by providing at least two first guide portions 32 spaced apart in the length direction X and the thickness direction Y, relative rotation between the driving device 2 and the valve core 3 can be further avoided, thereby making the movement of the driving device 2 and the valve core 3 smoother.

[0093] In some embodiments, see Figure 5 The valve core 3 further includes a second connecting member 34, which is connected to the first body 31, and the first guide portion 32 is connected to the second connecting member 34, so that at least two first guide portions 32 are relatively stationary.

[0094] In some embodiments, the first connecting portion 312 has a mounting groove connected to the second guide groove 3121 , the second connecting member 34 is disposed in the mounting groove, and the first guiding portion 32 passes through the second guide groove 3121 to communicate with the second connecting member 34 .

[0095] It is understandable that if relative movement occurs between the plurality of first guide portions 32 in the plane where the length direction X and the thickness direction Y are located, the relative movement between the driving device 2 and the valve core 3 may cause jamming.

[0096] In the above embodiment, a second connecting member 34 is provided to connect a plurality of first guide portions 32 spaced apart in the plane in the length direction X and the thickness direction Y so that the plurality of first guide portions 32 remain relatively stationary, thereby improving the stability of the relative movement of the valve core 3 and the drive device 2.

[0097] In some embodiments, see Figure 2 and Fig.13 The guide device 4 has a third guide groove 41, and the third guide groove 41 has a fifth guide area 411 and a sixth guide area 412 that are connected to each other; the valve core 3 also includes a second guide portion 35, the second guide portion 35 is connected to the first body 31, the second guide portion 35 is arranged in the third guide groove 41, and the second guide portion 35 can move along the extension direction of the first guide groove 211; wherein, when the second guide portion 35 is located in the fifth guide area 411, the valve core 3 follows the driving device 2 to perform a linear displacement; when the second guide portion 35 is located in the sixth guide area 412, the valve core 3 moves toward or away from the first wall 12 relative to the driving device 2.

[0098] It can be understood that when the valve core 3 is in the second locking position, the second guide portion 35 is located at the end of the third guide groove 41, and the valve core 3 needs to be unlocked only so that the valve core 3 moves relative to the drive device 2 along the direction from the second initial position to the second transition position, so that the valve core 3 approaches the drive device 2 along the thickness direction Y. However, since the second guide portion 35 is located at the end of the third guide groove 41 at this time, the second guide portion 35 cannot move along the direction from the second initial position to the second transition position, that is, the locking effect is achieved. By moving the drive device 2 in the first locking position to the first transition position, the valve core 3 moves relative to the drive device 2 along the direction from the second initial position to the second transition position, so that the valve core 3 can approach the drive device 2 along the thickness direction Y, thereby realizing the transition of the gate valve for semiconductor production equipment from the closed state to the open state.

[0099] The following is the action process of the gate valve used in semiconductor production equipment from opening to closing: 1. Figure 1 For example, the transmission part 52 in the power device 5 rotates clockwise, and the driving device 2 moves from the first initial position along the length direction X to the first transition position; the valve core 3 is driven by the driving device 2 to move from the second initial position along the length direction X to the second transition position, see Fig.13 ; 2. The valve core 3 reaches the second transition position, and the driving device 2 continues to move along the length direction X toward the first transition position; the valve core 3 is driven by the driving device 2 to move along the length direction X, and at the same time, under the guidance of the sixth guide area 412, the first guide area 212 and the third guide area 3122, the valve core 3 generates a sub-movement along the thickness direction Y and moves toward the first wall 12; 3. Please refer to Fig.14 , the valve core 3 reaches the second locking position, and the driving device 2 reaches the first transition position; 4. The valve core 3 is kept at the second locking position. Under the guidance of the second guide area 213 and the fourth guide area 3123, the driving device 2 moves from the first transition position along the length direction X to the first locking position. The driving device 2 has achieved the limit of the valve core 3 along the thickness direction Y. 5. The driving device 2 reaches the first locking position, the driving device 2 limits the valve core 3 along the thickness direction Y, and the power device 5 limits the driving device 2 along the length direction X.

[0100] The following is the action process of the gate valve used in semiconductor production equipment from closing to opening: 1. Figure 1 For example, the transmission part 52 in the power device 5 rotates counterclockwise, the limit of the power device 5 on the driving device 2 is released, the valve core 3 is kept in the second locking position, and under the guidance of the second guide area 213 and the fourth guide area 3123, the driving device 2 moves from the first locking position to the first transition position along the length direction X; 2. The driving device 2 reaches the first transition position, and the limiting effect of the driving device 2 on the valve core 3 along the thickness direction Y is released; 4. The driving device 2 moves from the first transition position to the first initial position along the length direction X, and the valve core 3 moves from the second locking position to the second transition position. During this period, the valve core 3 only moves relative to the driving device 2 along the thickness direction Y, and the valve core 3 performs a composite movement along the length direction X and the thickness direction Y relative to the guide device 4.

[0101] 5. Please refer to Fig.15 , the driving device 2 continues to move along the length direction X toward the first initial position, and the valve core 3 reaches the second transition position; 6. Driven by the driving device 2, the valve core 3 and the driving device 2 simultaneously move relative to the guide device 4 along the length direction X and reach the first initial position and the second initial position respectively.

[0102] Accordingly, the present application also provides a semiconductor production device, which includes a gate valve for semiconductor production equipment as in any one of the above embodiments. The semiconductor production device including the gate valve for semiconductor production equipment has better sealing performance and is not prone to chemical gas mixing, thereby improving the yield of semiconductor devices.

[0103] Specifically, the semiconductor production equipment can be chemical vapor deposition equipment or physical vapor deposition equipment. Specifically, the chemical vapor deposition equipment can be plasma enhanced chemical vapor deposition equipment, hot wire chemical vapor deposition equipment, low pressure chemical vapor deposition equipment, metal organic chemical vapor deposition equipment, atomic layer deposition equipment, chemical beam epitaxy equipment, laser chemical vapor deposition equipment. Specifically, the physical vapor deposition equipment can be vacuum evaporation coating equipment, sputtering coating equipment, ion plating equipment, molecular beam epitaxy equipment, pulsed laser deposition equipment, arc ion plating equipment, hollow cathode ion plating equipment, magnetron sputtering ion plating equipment.

[0104] The above is a detailed introduction to a gate valve for semiconductor production equipment and semiconductor production equipment provided in the embodiments of the present application. Specific examples are used in the present application to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and its core idea of ​​the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A gate valve for semiconductor production equipment, characterized in that: include: A housing (1), the housing (1) having a containing cavity (11), the housing (1) comprising a first wall (12), the first wall (12) being provided with a first through hole (121) communicating with the containing cavity (11); A power device (5), the power device (5) being connected to the housing (1), and at least a portion of the power device (5) being arranged in the accommodating cavity (11); a drive device (2), the drive device (2) being arranged in the accommodating cavity (11) and connected to the power device (5), the drive device (2) having a first initial position and a first locking position, the power device (5) being capable of moving the drive device (2) from the first initial position to the first locking position, the power device (5) being used to limit the drive device (2) when the drive device (2) moves to the first locking position; a valve core (3), the valve core (3) being arranged in the accommodating chamber (11), the valve core (3) being located between the driving device (2) and the first wall (12) and being connected to the driving device (2); the valve core (3) having a second initial position and a second locking position; when the driving device (2) moves, it can drive the valve core (3) to move between the second initial position and the second locking position; A guide device (4), the guide device (4) being arranged in the accommodating cavity (11) and connected to the valve core (3); the guide device (4) being used to cooperate with the drive device (2) to limit the position of the valve core (3) when the valve core (3) moves to the second locking position.

2. The gate valve for semiconductor production equipment according to claim 1, characterized in that: The power device (5) comprises a power part (51) and a transmission part (52) which are connected to each other, the transmission part (52) is connected to the driving device (2), and the power part (51) is capable of driving the transmission part (52) to rotate; The drive device (2) is connected to the housing (1), and the housing (1) is capable of limiting the position of the drive device (2) so that the drive device (2) performs linear motion under the drive of the transmission part (52); and when the drive device (2) is in a first locking position, the transmission part (52) locks the drive device (2).

3. The gate valve for semiconductor production equipment according to claim 2, characterized in that: The driving device (2) has a slide groove (23), and the transmission part (52) comprises a rotating member (521) and a moving member (522) which are connected to each other, the rotating member (521) is connected to the power part (51), and the moving member (522) is arranged in the slide groove (23), and the moving member (522) can move along the extension direction of the slide groove (23) so that the driving device (2) moves between the first initial position and the first locking position.

4. The gate valve for semiconductor production equipment according to claim 3, characterized in that: The driving device (2) comprises a second body (22), the second body (22) having a length direction (X) and a thickness direction (Y); wherein the direction of movement from the first initial position to the first locking position is the length direction (X), and the thickness direction (Y) is perpendicular to the length direction (X); The second body (22) has the slide groove (23), and the opening of the slide groove (23) penetrates the surface of the second body (22) along the thickness direction (Y); The slide groove (23) comprises a first moving area (233), a second moving area (231), and a transition area (232) located between the first moving area (233) and the second moving area (231) and connected to the first moving area (233) and the second moving area (231) respectively; when the moving member (522) passes through the transition area (232), the speed of the driving device (2) in the length direction (X) is less than the speed of the moving member (522) in the length direction (X).

5. The gate valve for semiconductor production equipment according to claim 4, characterized in that: The second body (22) further has a width direction (Z) perpendicular to both the length direction (X) and the thickness direction (Y), and the second body (22) has a first side wall (25) in the width direction (Z); the first moving area (233) and the second moving area (231) extend along the width direction (Z), and the first moving area (233) is farther away from the inner wall of the second moving area (231) and closer to the first side wall (25) of the second body (22) in the width direction (Z); When the driving device (2) is located at the first initial position, the second body (22) has a second side wall (24) away from the first through hole (121) in the length direction (X), and the second side wall (24) is connected to the first side wall (25); the first moving area (233) has a first groove wall (2331) close to the first side wall (25) in the length direction (X); the second moving area (231) has a second groove wall (2311) close to the first side wall (25) in the length direction (X), the first groove wall (2331) and the second side wall (24) have a minimum distance D1 along the length direction (X), and the second groove wall (2311) and the second side wall (24) have a minimum distance D2 along the length direction (X), satisfying D1<D2.

6. The gate valve for semiconductor production equipment according to claim 5, characterized in that: The transition zone (232) has a third groove wall (2321) close to the first side wall (25) in the length direction (X), the third groove wall (2321) is located between and connected to the first groove wall (2331) and the second groove wall (2311), and the surface of the third groove wall (2321) is an arc surface; Alternatively, the surface of the third groove wall (2321) is a plane; Alternatively, the surface of the third groove wall (2321) is composed of at least one arc surface and at least one plane.

7. The gate valve for semiconductor production equipment according to claim 1, characterized in that: The driving device (2) has a first guide groove (211); The valve core (3) comprises a first body (31) and a first guide portion (32), the first body (31) and the first guide portion (32) are connected, the first guide portion (32) is arranged in the first guide groove (211), and the first guide portion (32) can move along the extension direction of the first guide groove (211); The first guide groove (211) has a first guide area (212) and a second guide area (213) which are connected to each other; when the first guide portion (32) is located in the first guide area (212), the valve core (3) moves toward or away from the first wall (12) relative to the drive device (2); when the first guide portion (32) is located in the second guide area (213), the valve core (3) is located in the second locking position, and the drive device (2) is able to perform linear displacement and limit the valve core (3).

8. The gate valve for semiconductor production equipment according to claim 7, characterized in that: The first body (31) comprises: Main body (311); a first connecting portion (312), the first connecting portion (312) being connected to a side of the main body portion (311) away from the first wall (12), the first connecting portion (312) having a second guide groove (3121), the first guide portion (32) being arranged in the second guide groove (3121), and the first guide portion (32) being able to move along an extension direction of the second guide groove (3121); The second guide groove (3121) has a third guide area (3122) and a fourth guide area (3123) which are connected to each other; when the first guide portion (32) is located in the third guide area (3122), the first guide portion (32) moves toward or away from the first wall (12) relative to the first connecting portion (312); when the first guide portion (32) is located in the fourth guide area (3123), the valve core (3) is located in the second locking position, and the first guide portion (32) follows the driving device (2) to perform linear displacement.

9. The gate valve for semiconductor production equipment according to claim 7, characterized in that: The driving device (2) comprises: A second body (22), the second body (22) having a second through hole (221), the second through hole (221) having a hole wall (222); a second connecting portion (21), the second connecting portion (21) being arranged in the second through hole (221) and connected to the first body (31), the second connecting portion (21) having the first guide groove (211), and a portion of the first body (31) being located in the second through hole (221) and connected to the second connecting portion (21); Wherein, the hole wall (222) can be connected to the first guide portion (32) to limit the position of the first guide portion (32).

10. The gate valve for semiconductor production equipment according to claim 9, characterized in that: The driving device (2) comprises at least two second connecting parts (21), the at least two second connecting parts (21) being arranged in one second through hole (221) and forming a gap, and the portion of the first body (31) being located in the gap and clamped between the at least two second connecting parts (21).

11. The gate valve for semiconductor production equipment according to claim 9, characterized in that: The valve core (3) further comprises a first connecting member (33), wherein the first connecting member (33) is located and connected between the portion of the first body (31) and the second connecting portion (21), so as to form a rolling friction force between the portion of the first body (31) and the second connecting portion (21).

12. The gate valve for semiconductor production equipment according to claim 8, characterized in that: The first connecting portion (312) has a connecting surface (3124) facing the first body (31); The main body (311) comprises: A bracket (3111), the bracket (3111) having a third through hole (3112), and the bracket (3111) having a first surface (3113) away from the first wall (12); a cover plate (3114), the cover plate (3114) being arranged in the third through hole (3112) and connected to the bracket (3111), the cover plate (3114) having a second surface (3115) away from the first wall (12) and a third surface (3116) close to the first wall (12), the third surface (3116) being used for connecting to the first wall (12); The first connecting portion (312) is connected to the first main body (31) so that the connecting surface (3124) fits the first surface (3113), and the connecting surface (3124) fits the second surface (3115).

13. The gate valve for semiconductor production equipment according to claim 7, characterized in that: The driving device (2) has at least two first guide grooves (211); The valve core (3) comprises at least two first guide portions (32), and at least one of the first guide portions (32) is provided in at least two of the first guide grooves (211) to limit the rotation of the valve core (3) relative to the drive device (2).

14. The gate valve for semiconductor production equipment according to claim 13, characterized in that: The valve core (3) further comprises a second connecting member (34), the second connecting member (34) being connected to the first body (31), and the first guide portion (32) being connected to the second connecting member (34), so that at least two of the first guide portions (32) are relatively stationary.

15. The gate valve for semiconductor production equipment according to claim 7, characterized in that: The guide device (4) has a third guide groove (41), and the third guide groove (41) has a fifth guide area (411) and a sixth guide area (412) that are connected to each other; The valve core (3) further comprises a second guide portion (35), the second guide portion (35) being connected to the first body (31), the second guide portion (35) being arranged in the third guide groove (41), and the second guide portion (35) being movable along an extension direction of the first guide groove (211); When the second guide portion (35) is located in the fifth guide area (411), the valve core (3) follows the driving device (2) to perform linear displacement; when the second guide portion (35) is located in the sixth guide area (412), the valve core (3) moves toward or away from the first wall (12) relative to the driving device (2).

16. A semiconductor production equipment, characterized in that: The semiconductor production equipment comprises the gate valve for semiconductor production equipment according to any one of claims 1 to 15.

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