Cross-scale multi-mode piezoelectric nano motion platform and control method

Abstract

The invention discloses a cross-scale multi-mode piezoelectric nano motion platform and a control method, and relates to the field of micro-nano operation. The platform comprises a step driving mechanism and a direct driving mechanism, wherein the step driving mechanism is composed of lever movement feet and triangular movement feet, and the direct driving mechanism is integrally formed. The triangular motion foot realizes a stick-slip motion working mode through a slow-forward and fast-backward voltage time sequence, the lever motion foot and the triangular motion foot are matched to realize an inchworm motion working mode, and the direct-push motion working mode is directly driven by a driving ceramic of the direct-drive mechanism. The advantages of a direct-push type piezoelectric motion platform and a stepping type piezoelectric motion platform are integrated, the stick-slip motion working mode, the inchworm motion working mode and the direct-push motion working mode can be achieved, and the motion requirements under the extreme working conditions of large stroke, high speed, large load, high precision and the like can be met.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano operation, and in particular to a cross-scale multi-mode piezoelectric nano motion platform and a control method. Background Art

[0002] The statements in this section merely provide background information related to the present invention and do not necessarily constitute prior art.

[0003] In recent years, with the continuous improvement of science and technology and industrial level, the fields of integrated circuit equipment manufacturing, photolithography machine preparation, microelectronics manufacturing, micro-robot operation, precision optical instruments and biomedical operation have developed rapidly, and the operating environment of high-precision motion platforms has become more and more extreme. There is an urgent need for motion platforms with large stroke, high speed, large load and high precision to meet extreme working conditions. Traditional piezoelectric motion platforms are divided into two types: direct drive and stepper drive. The direct drive type mainly has the advantages of high precision and no retraction, but the stroke is limited, with a maximum stroke of centimeters. The stepper drive type mainly has the advantages of large stroke, high speed and large load, but the motion accuracy is much lower than the direct drive type.

[0004] At present, the invention name is a multi-mode piezoelectric drive device based on a sequential control strategy and its working method, and the Chinese invention patent publication number is CN114204841A. It realizes three motion modes of stick-slip, slip-slip and stick-stick through two driving mechanisms. The device has high precision, high speed and high load capacity, but can only move in one direction, there is obvious retraction movement, and the accuracy does not reach the nanometer level, which is difficult to meet today's use needs. The invention name is a multi-mode driver and linear smooth motion realization method with composite stick-slip and impact, and the Chinese invention patent publication number is CN114584001A. It realizes three working modes of inertial stick-slip mode, inertial impact mode and composite drive mode through a motion unit. It has important application value in the fields of biological cell engineering, integrated circuit packaging and precision optics, but it is difficult to achieve large load capacity. The preload is adjusted manually, which is also difficult to meet the development needs of industrial automation. Summary of the invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a cross-scale multi-mode piezoelectric nano-motion platform and control method. The platform combines the advantages of direct-push and stepping piezoelectric motion platforms, has the advantages of compact structure, large stroke, high speed, large load, nanometer-level precision, and bidirectional non-retraction, and can be widely used in the field of precision positioning and tracking.

[0006] In order to achieve the above object, the present invention is implemented through the following technical solutions:

[0007] The first aspect of the present invention provides a cross-scale multi-mode piezoelectric nano-motion platform, comprising:

[0008] The step-drive mechanism comprises a step-drive mechanism fixing frame, a triangular motion foot and a lever motion foot, wherein the triangular motion foot and the lever motion foot are mounted on the step-drive mechanism fixing frame, the step-drive mechanism performs stick-slip motion through the triangular motion foot, and the step-drive mechanism performs inchworm motion through the cooperation of the triangular motion foot and the lever motion foot;

[0009] A direct drive mechanism is used for performing direct push motion, and is driven by the step drive mechanism to perform stick-slip motion and inchworm motion, wherein the direct drive mechanism comprises a direct drive mechanism fixing frame and a micro positioning stage, and the micro positioning stage is installed at the top of the direct drive mechanism fixing frame as an output end;

[0010] The step drive pre-tightening mechanism is used to drive the step drive mechanism for pre-tightening. The step drive pre-tightening mechanism includes a step drive pre-tightening adapter frame. The step drive mechanism is installed on the step drive pre-tightening adapter frame. The step drive pre-tightening mechanism is used to drive the step drive mechanism to pre-tighten the direct drive mechanism, so that the triangular motion foot and the lever motion foot are in contact with the direct drive mechanism, and further drive the direct drive mechanism to move.

[0011] Furthermore, it also includes a cover mechanism, which includes a step-drive mechanism cover and a direct-drive mechanism cover. The step-drive mechanism cover is used to encapsulate the step-drive mechanism, and the direct-drive mechanism cover is used to encapsulate the direct-drive mechanism.

[0012] Furthermore, the step drive preload adapter frame is in the shape of a frame, with a step drive preload mechanism ceramic fixing frame in the middle for installing the step drive preload mechanism driving ceramic, the top of the step drive preload mechanism ceramic fixing frame is connected to the step drive preload mechanism fixing frame, and slide grooves are provided on both sides of the lower surface of the step drive preload adapter frame.

[0013] Furthermore, it also includes a base mechanism, which includes a bottom plate, on which are provided a step-drive preload mechanism guide rail, a direct-drive mechanism fixing platform and a fixing through hole. The step-drive preload adapter frame is installed on the step-drive preload mechanism guide rail through a slide groove. The direct-drive mechanism fixing platform is used to fix the direct-drive mechanism. The moving platform is fixed as a whole by bolts through the fixing through holes. The direct-drive mechanism fixing platform is a protrusion perpendicular to the bottom plate. After the direct-drive mechanism is installed on the direct-drive mechanism fixing platform, it maintains the same height as the step-drive mechanism.

[0014] Furthermore, it also includes a driving ceramic mechanism, which includes multiple driving ceramics. The driving ceramics are used to provide driving force for each mechanism. The driving ceramics include step drive mechanism lever motion foot driving ceramics, step drive mechanism triangle motion foot driving ceramics, step drive preload mechanism driving ceramics and direct drive mechanism driving ceramics.

[0015] Furthermore, the direct-drive mechanism fixing frame is also provided with a direct-drive mechanism slide groove, a driving ceramic fixing groove and a guide leaf spring. The direct-drive mechanism slide groove is arranged in the middle position of the lower surface of the direct-drive mechanism fixing frame for connecting with the direct-drive mechanism fixing table. The driving ceramic fixing groove is used to fix the direct-drive mechanism driving ceramic. One end of the guide leaf spring is connected to the direct-drive mechanism slide groove, and the other end is connected to the micro-positioning table for guiding and fixing the micro-positioning table.

[0016] Furthermore, the step drive mechanism fixing frame is also provided with a triangular motion foot ceramic fixing frame and a lever motion foot ceramic fixing frame, the triangular motion foot ceramic fixing frame is used to fix the triangular motion foot driving ceramic of the step drive mechanism, and the lever motion foot ceramic fixing frame is used to fix the lever motion foot driving ceramic of the step drive mechanism.

[0017] The second aspect of the present invention provides a control method for the cross-scale multi-mode piezoelectric nano-motion platform according to the first aspect, comprising the following steps:

[0018] Fix the piezoelectric nano-motion platform as a whole;

[0019] According to the task requirements, the direct drive mechanism is controlled to perform different motion modes, wherein the motion modes include: direct push motion, stick-slip motion and inchworm motion;

[0020] After the movement is completed, the micro-positioning stage records and outputs the movement results.

[0021] Furthermore, the direct-push motion is that the direct-drive mechanism in the direct-drive mechanism drives the ceramic to directly drive and control the movement of the direct-drive mechanism; the stick-slip motion is that the triangular motion foot drives the direct-drive mechanism to move forward, and the triangular motion foot is directly reset after the motion is completed; the inchworm motion is that the triangular motion foot drives the direct-drive mechanism to move forward, and after the motion is completed, the lever motion foot presses the direct-drive mechanism tightly, and then the triangular motion foot is reset.

[0022] Furthermore, both the inchworm motion and the stick-slip motion require that a step-drive pre-tightening mechanism be used in advance to drive the step-drive mechanism to approach the direct-drive mechanism for pre-tightening.

[0023] One or more of the above technical solutions have the following beneficial effects:

[0024] The present invention discloses a cross-scale multi-mode piezoelectric nano-motion platform and a control method. Aiming at the shortcomings of traditional piezoelectric motion platforms, the two major types of direct drive and stepper drive are combined to effectively highlight their respective advantages and design a cross-scale multi-mode motion platform.

[0025] The present invention realizes flexible conversion of stick-slip, inchworm and direct-push motion modes through the cooperation of the step drive mechanism and the direct drive mechanism, taking the advantages of each motion mode, so that the motion platform has the advantages of unlimited stroke, high speed, large load, high precision, bidirectional non-retraction motion, etc., meeting the use requirements of extreme working conditions;

[0026] The piezoelectric nano motion platform proposed by the present invention can realize automatic pre-tightening through a step-driven pre-tightening mechanism, and has a high degree of automation.

[0027] The three working modes of the piezoelectric nano-motion platform proposed in the present invention can be converted into each other, and the shortcomings of each mode can be compensated, such as the stick-slip mode compensates for the shortcomings of slow movement speed of the inchworm mode, the inchworm mode compensates for the shortcomings of low load capacity of the stick-slip mode, the direct-push mode compensates for the shortcomings of low positioning accuracy of the step-drive mode, and the step-drive mode compensates for the shortcomings of small stroke of the direct-push mode.

[0028] Advantages of additional aspects of the present invention will be given in part in the following description, and in part will become obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings in the specification, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0030] Figure 1 is an overall schematic diagram of a motion platform according to a first embodiment of the present invention;

[0031] Figure 2 This is an exploded schematic diagram of the overall structure of the motion platform of the first embodiment of the present invention;

[0032] Figure 3 Schematic diagram of the step-drive mechanism of the motion platform of the first embodiment of the present invention;

[0033] Figure 4 is a schematic diagram of a direct-drive mechanism of a motion platform according to a first embodiment of the present invention;

[0034] Figure 5 Schematic diagram of the step-driven pre-tightening mechanism of the motion platform of the first embodiment of the present invention;

[0035] Figure 6 is a schematic diagram of a motion platform base mechanism according to a first embodiment of the present invention;

[0036] Figure 7 Schematic diagram of the stick-slip motion working mode of the motion platform of the first embodiment of the present invention;

[0037] Figure 8 Schematic diagram of the inchworm motion working mode of the motion platform of the first embodiment of the present invention;

[0038] In the figure, 1. step drive mechanism cover plate, 2. step drive mechanism lever motion foot driving ceramic, 3. step drive mechanism triangle motion foot driving ceramic, 4. step drive mechanism, 5. step drive preload mechanism driving ceramic, 6. step drive preload mechanism, 7. base mechanism, 8. direct drive mechanism, 9. direct drive mechanism driving ceramic, 10. direct drive mechanism cover plate, 11. lever motion foot, 12. lever motion foot ceramic fixing frame, 13. step drive mechanism fixing frame, 14. triangle motion foot ceramic fixing frame, 15. triangle motion foot, 16. direct drive mechanism fixing frame, 17. driving ceramic fixing groove, 18. guide leaf spring, 19. micro positioning table, 20. direct drive mechanism slide groove, 21. step drive preload adapter frame, 22. step drive preload mechanism ceramic fixing frame, 23. step drive preload mechanism fixing frame, 24. step drive preload mechanism guide rail, 25. direct drive mechanism fixing table, 26. bottom plate. DETAILED DESCRIPTION

[0039] It should be noted that the following detailed descriptions are exemplary and are intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present invention belongs.

[0040] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or their combinations;

[0041] Embodiment 1:

[0042] The first embodiment of the present invention provides a cross-scale multi-mode piezoelectric nano-motion platform, such as Figure 1 As shown, the present invention adopts a parallel structure as a whole. The step drive mechanism 4 drives the direct drive mechanism 8 for macro movement, and the direct drive mechanism 8 drives the micro motion platform 19 for micro movement, so as to realize three motion modes: stick-slip, inchworm and direct push, so that the motion platform has unlimited stroke, high speed, large load, high precision, and bidirectional non-retraction motion functions, which can meet the needs of use in extreme working conditions.

[0043] The specific structure of the piezoelectric nano-motion platform is as follows: Figure 2 As shown, it includes: a step-drive mechanism 4, a direct-drive mechanism 8, a step-drive pre-tightening mechanism 6, a cover mechanism, a base mechanism 7 and a driving ceramic mechanism.

[0044] Step drive mechanism 4, such as Figure 3As shown, it includes a step-drive mechanism fixing frame 13, a triangular motion foot 15 and a lever motion foot 11. The triangular motion foot 15 and the lever motion foot 11 are installed on the step-drive mechanism fixing frame 13. The step-drive mechanism 4 performs stick-slip motion through the triangular motion foot 15, and the step-drive mechanism 4 performs inchworm motion through the cooperation of the triangular motion foot 15 and the lever motion foot 11.

[0045] Specifically, the triangular motion foot 15 realizes the stick-slip motion working mode through the voltage timing of slow forward and fast backward, that is, slow sticking and fast sliding. The lever motion foot 11 and the triangular motion foot 15 cooperate to realize the inchworm motion working mode, specifically, the triangular motion foot 15 drives the direct drive mechanism 8 to move forward, and then the lever motion foot 11 presses the direct drive mechanism 8, and the triangular motion foot 15 returns to the initial state to complete a motion cycle. This mode does not produce a retraction displacement. The direct push motion working mode is realized by the direct drive mechanism of the direct drive mechanism 8 driving the ceramic 9 directly.

[0046] In this embodiment, the step drive mechanism fixing frame 13 is rectangular, and has four through holes at the four corners, so that the step drive mechanism can be fixed to the step drive pre-tightening mechanism 6 by bolts.

[0047] The step-drive mechanism fixing frame 13 is also provided with a triangular motion foot ceramic fixing frame 14 and a lever motion foot ceramic fixing frame 12. The triangular motion foot ceramic fixing frame 14 is used to fix the triangular motion foot driving ceramic 3 of the step-drive mechanism, and the triangular motion foot driving ceramic 3 of the step-drive mechanism provides power to the triangular motion foot 15. The lever motion foot ceramic fixing frame 12 is used to fix the lever motion foot driving ceramic 2 of the step-drive mechanism, and the lever motion foot driving ceramic 2 of the step-drive mechanism provides power to the lever motion foot 11. In this embodiment, the lever motion foot ceramic fixing frame 12 is vertically fixedly connected to the middle part of the lever motion foot, and the other end of the lever motion foot ceramic fixing frame 12 is fixedly connected to the step-drive mechanism fixing frame 13. An arc head is provided at the top end of one end of the lever motion foot for contacting with the direct drive mechanism, and the other end is connected to the step-drive mechanism fixing frame 13 through an arc-shaped flexible hinge. One end of the triangular motion foot ceramic fixing frame 14 is vertically fixedly connected to the lever motion foot ceramic fixing frame 12, and the other end is connected to a bottom corner of the triangular motion foot 15 through a leaf spring-shaped flexible hinge, and the other bottom corner of the triangular motion foot 15 is connected to the step drive mechanism fixing frame 13 through a leaf spring-shaped flexible hinge. The lever motion foot and the triangular motion foot are respectively moved by the flexible hinge. In addition, the above-mentioned components arranged on the step drive mechanism fixing frame 13 are all in the same plane, and the step drive preload mechanism is divided into two layers, the upper layer is fixedly connected to the step drive mechanism fixing frame 13, and the lower layer is slidably connected to the base mechanism, so as to realize the overall preload movement of the step drive mechanism.

[0048] The lever motion foot 11 and the triangular motion foot 15 cooperate with the direct drive mechanism 8 to achieve Figure 7 The stick-slip operation mode shown and Figure 8 The working mode of the inchworm movement is shown.

[0049] The direct drive mechanism 8 is used to drive the ceramic 9 to directly drive the ceramic 9 to perform direct push motion, and the step drive mechanism 4 drives the ceramic 9 to perform stick-slip motion and inchworm motion. Figure 4 As shown, the direct drive mechanism 8 is an integral structure in the shape of a rectangular parallelepiped, including a direct drive mechanism fixing frame 16 and a micro positioning platform 19. The micro positioning platform 19 is installed as an output end at the top of the fixing frame of the direct drive mechanism 8. The final output result of the platform as a whole is determined by measuring the data of the micro positioning platform.

[0050] The direct drive mechanism fixing frame 16 is also provided with a direct drive mechanism slideway 20, a driving ceramic fixing groove 17 and a guide leaf spring 18. The direct drive mechanism slideway 20 is arranged at the middle position of the lower surface of the direct drive mechanism fixing frame 16, and is used to connect with the direct drive mechanism fixing platform 25. The driving ceramic fixing groove 17 is used to fix the direct drive mechanism driving ceramic 9, and the direct drive mechanism driving ceramic 9 provides a driving force to the micro positioning platform 19. One end of the guide leaf spring 18 is connected to the direct drive mechanism slideway 20, and the other end is connected to the micro positioning platform 19, which is used to guide and connect and fix the micro positioning platform 19 in the middle, and jointly realize the direct push motion working mode. The direct drive mechanism slideway 20 is connected to the base mechanism, which allows the step drive mechanism to drive the direct drive mechanism to realize the overall movement.

[0051] The step-drive pre-tightening mechanism 6 includes a step-drive pre-tightening adapter frame 21, and the step-drive mechanism 4 is installed on the step-drive pre-tightening adapter frame 21. The step-drive pre-tightening mechanism 6 is used to drive the step-drive mechanism 4 to pre-tighten the direct-drive mechanism 8, so that the triangular motion foot 15 and the lever motion foot 11 are in contact with the direct-drive mechanism 8, and further drive the direct-drive mechanism 8 to move.

[0052] The pre-tightening process is to pre-tighten the triangular motion foot 15 and the lever motion foot 11 as a whole through the step-drive pre-tightening mechanism 6. The step-drive mechanism is fixed on the step-drive pre-tightening adapter 21 as a whole. The step-drive pre-tightening mechanism drives the ceramic 5 to push the step-drive pre-tightening adapter 21 forward, thereby driving the triangular motion foot and the lever motion foot to move forward as a whole until the desired pre-tightening degree is reached. This forward movement process is the pre-tightening process. Among them, the pre-tightening degree is determined according to demand. In this embodiment, when the stick-slip mode is performed, a small pre-tightening force is used, such as about 3N. When the inchworm mode is performed, a large pre-tightening force is used, such as about 100N. The pre-tightening force can be customized according to needs.

[0053] In this embodiment, Figure 5As shown, the step-drive pre-tightening adapter frame 21 is in the shape of a rectangular frame, with through holes provided at the four corners, and the step-drive mechanism fixing frame 13 is fixedly installed on the step-drive pre-tightening adapter frame 21 by means of bolts through the four through holes. A step-drive pre-tightening mechanism ceramic fixing frame 22 is provided in the middle of the step-drive pre-tightening adapter frame 21, which is used to install the step-drive pre-tightening mechanism driving ceramic 5, and the step-drive pre-tightening mechanism driving ceramic 5 is used to provide driving force for the step-drive pre-tightening mechanism 6. The top of the step-drive pre-tightening mechanism ceramic fixing frame 22 is connected to the step-drive pre-tightening mechanism fixing frame 23, and the step-drive pre-tightening mechanism fixing frame 23 is provided with two bolt holes, and the bolts are fixedly connected to the step-drive mechanism fixing frame 13 through the bolt holes, further improving the firmness of the two. In this embodiment, the step-drive pre-tightening adapter frame 21 is divided into two layers, that is, the step-drive pre-tightening mechanism fixing frame 23 is the upper layer, and the two sides of the frame of the step-drive pre-tightening adapter frame 21 are the lower layer. The side of the step-drive pre-tightening adapter frame 21 connected to the step-drive pre-tightening mechanism fixing frame 23 is thicker than the other two sides, so that the position where the step-drive pre-tightening mechanism fixing frame 23 is connected can be made a little higher, and the positions of the two sides of the frame of the step-drive pre-tightening adapter frame 21 can be made a little lower, so that the upper and lower layers can be distinguished. Slide grooves are provided on both sides of the lower surface of the step-drive pre-tightening adapter frame 21, and the slide grooves are used to connect the base mechanism 7 to achieve the sliding connection between the step-drive pre-tightening mechanism 6 and the base mechanism 7. A through hole is provided at the rear end of the step-drive pre-tightening mechanism fixing frame 23, which cooperates with the driving ceramic fixing groove 17 to fix the step-drive pre-tightening mechanism driving ceramic 5. The step-drive pre-tightening adapter frame 21 is connected to the base mechanism 7 at the bottom and the step-drive mechanism 4 at the top, which can drive the step-drive mechanism 4 to achieve the pre-tightening movement close to the direct drive mechanism 8.

[0054] The cover mechanism includes a step drive mechanism cover 1 and a direct drive mechanism cover 10. The step drive mechanism cover 1 is used to encapsulate the step drive mechanism 4, and the direct drive mechanism cover 10 is used to encapsulate the direct drive mechanism 8. The step drive mechanism cover 1 and the direct drive mechanism cover 10 are respectively fixed to the top of the step drive mechanism 4 and the direct drive mechanism 8 by bolts.

[0055] Base mechanism 7, such as Figure 6 As shown, it includes a bottom plate 26, on which are provided a step-drive pre-tightening mechanism guide rail 24, a direct-drive mechanism fixing platform 25 and a fixing through hole, and the step-drive pre-tightening adapter 21 is installed on the step-drive pre-tightening mechanism guide rail 24 through a slide groove. A fixing through hole is provided at the front end of the bottom plate 26, and the motion platform is fixed as a whole by bolts through the fixing through hole. The direct-drive mechanism fixing platform 25 is used to fix the direct-drive mechanism 8, and the direct-drive mechanism fixing platform 25 is a protrusion perpendicular to the bottom plate 26. After the direct-drive mechanism 8 is installed on the direct-drive mechanism fixing platform 25, it maintains the same height as the step-drive mechanism 4, and is used for the overall stepping motion of the direct-drive mechanism 8.

[0056] The driving ceramic mechanism includes multiple driving ceramics, which are used to provide driving force for each mechanism. In this embodiment, the driving ceramics include a step drive mechanism lever motion foot driving ceramic 2, a step drive mechanism triangle motion foot driving ceramic 3, a step drive preload mechanism driving ceramic 5 and a direct drive mechanism driving ceramic 9.

[0057] In a specific implementation, the direct push motion is that the direct drive mechanism in the direct drive mechanism drives the ceramic to directly drive and control the movement of the direct drive mechanism; the stick-slip motion is that the triangular motion foot drives the direct drive mechanism to move forward, and the triangular motion foot is directly reset after the movement is completed; the inchworm motion is that the triangular motion foot drives the direct drive mechanism to move forward, and after the movement is completed, the lever motion foot presses the direct drive mechanism, and then the triangular motion foot is reset. Among them, both the inchworm motion and the stick-slip motion require the use of a step-drive pre-tightening mechanism in advance to drive the step-drive mechanism to approach the direct drive mechanism for pre-tightening.

[0058] Stick-slip motion Figure 7 As shown in the figure, the short square represents the lever motion foot, the triangle represents the triangle motion foot, and the long square represents the direct drive mechanism. Figure 7 The graph of the change of the medium voltage U with time t shows that the moment from t0 to t2 is a movement cycle of the stick-slip mode. Specifically, from t0 to t1, the triangular motion foot drives the direct drive mechanism to slowly move forward by a distance x1, where t0 is the initial moment of a cycle and t1 is the moment when the triangular motion foot moves to the maximum displacement required for the task. From t1 to t2, the triangular motion foot quickly returns to its original position, and t2 represents the moment when the triangular motion foot returns to its original state. Due to the friction force, it drives the direct drive mechanism to move backward by a distance x2, thus completing a cycle of the stick-slip motion working mode. The actual forward distance is Δx = x1-x2.

[0059] The movement of the inchworm is as follows Figure 8 As shown in the figure, the short square represents the lever motion foot, the triangle represents the triangle motion foot, and the long square represents the direct drive mechanism. Figure 8The graph of the change of the medium voltage U with time t shows that the time from 0 to T is a movement cycle of the inchworm mode. Specifically, 0 represents the initial time of a cycle, t0 represents the time when the triangular motion foot moves to the maximum displacement required for the task, t1 represents the time when the lever motion foot starts to move, t2 represents the time when the lever motion foot moves to the maximum displacement required for the task, t3 represents the time when the triangular motion foot starts to reset, t4 represents the time when the triangular motion foot is reset, t5 represents the time when the lever motion foot starts to reset, t6 represents the time when the lever motion foot is reset, and T represents the time when a cycle of the inchworm mode ends. From 0 to t0, the triangular motion foot drives the direct drive mechanism to move forward by a distance of x3, and then remains motionless until t3. At this time, from t1 to t2, the lever motion foot presses against the direct drive mechanism, and then remains motionless until t5. From t3 to t4, the triangular motion foot is reset. Since the lever motion foot has been pressing against the direct drive mechanism at this moment, the reset of the triangular motion foot will not cause the direct drive mechanism to move backward. At t4, the triangular motion foot is completely reset, and from t5 to t6, the lever motion foot is reset again. Therefore, the actual forward distance of the inchworm motion working mode is Δx = x3. This mode can achieve forward and backward motion without retraction through the cooperation of the triangular motion foot and the lever motion foot.

[0060] Embodiment 2:

[0061] Embodiment 2 of the present invention provides a control method for the cross-scale multi-mode piezoelectric nano-motion platform described in Embodiment 1, comprising the following steps:

[0062] S1: Fix the piezoelectric nano-motion platform as a whole.

[0063] S2: According to the task requirements, the direct drive mechanism is controlled to perform different motion modes, where the motion modes include: direct push motion, stick-slip motion and inchworm motion.

[0064] S3: After the movement is completed, the micro-positioning stage records and outputs the movement results.

[0065] In S2, the direct push motion is that the direct drive mechanism in the direct drive mechanism drives the ceramic to directly drive and control the movement of the direct drive mechanism; the stick-slip motion is that the triangular motion foot drives the direct drive mechanism to move forward, and the triangular motion foot is directly reset after the movement is completed; the inchworm motion is that the triangular motion foot drives the direct drive mechanism to move forward, and after the movement is completed, the lever motion foot presses the direct drive mechanism, and then the triangular motion foot is reset. Among them, both the inchworm motion and the stick-slip motion require the use of a step drive pre-tightening mechanism in advance to drive the step drive mechanism to approach the direct drive mechanism for pre-tightening.

[0066] The steps involved in the above embodiment 2 correspond to those in embodiment 1. For the specific implementation method, please refer to the relevant description part of embodiment 1.

[0067] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cross-scale multi-mode piezoelectric nano-motion platform, characterized in that: include: The step-drive mechanism comprises a step-drive mechanism fixing frame, a triangular motion foot and a lever motion foot, wherein the triangular motion foot and the lever motion foot are mounted on the step-drive mechanism fixing frame, the step-drive mechanism performs stick-slip motion through the triangular motion foot, and the step-drive mechanism performs inchworm motion through the cooperation of the triangular motion foot and the lever motion foot; A direct drive mechanism is used for performing direct push motion, and is driven by the step drive mechanism to perform stick-slip motion and inchworm motion, wherein the direct drive mechanism comprises a direct drive mechanism fixing frame and a micro positioning stage, and the micro positioning stage is installed at the top of the direct drive mechanism fixing frame as an output end; The step drive pre-tightening mechanism is used to drive the step drive mechanism for pre-tightening. The step drive pre-tightening mechanism includes a step drive pre-tightening adapter frame. The step drive mechanism is installed on the step drive pre-tightening adapter frame. The step drive pre-tightening mechanism is used to drive the step drive mechanism to pre-tighten the direct drive mechanism, so that the triangular motion foot and the lever motion foot are in contact with the direct drive mechanism, and further drive the direct drive mechanism to move.

2. The cross-scale multi-mode piezoelectric nano-motion platform according to claim 1, characterized in that: It also includes a cover mechanism, which includes a step-drive mechanism cover and a direct-drive mechanism cover. The step-drive mechanism cover is used to encapsulate the step-drive mechanism, and the direct-drive mechanism cover is used to encapsulate the direct-drive mechanism.

3. The cross-scale multi-mode piezoelectric nano-motion platform according to claim 1, characterized in that: The step drive pre-tightening adapter frame is in the shape of a frame, with a step drive pre-tightening mechanism ceramic fixing frame in the middle for installing the step drive pre-tightening mechanism driving ceramic. The top of the step drive pre-tightening mechanism ceramic fixing frame is connected to the step drive pre-tightening mechanism fixing frame, and slide grooves are arranged on both sides of the lower surface of the step drive pre-tightening adapter frame.

4. The cross-scale multi-mode piezoelectric nano-motion platform according to claim 3, characterized in that: It also includes a base mechanism, which includes a bottom plate, on which are provided a step-drive preload mechanism guide rail, a direct-drive mechanism fixing platform and a fixing through hole. The step-drive preload adapter frame is installed on the step-drive preload mechanism guide rail through a slide groove. The direct-drive mechanism fixing platform is used to fix the direct-drive mechanism. The motion platform is fixed as a whole by bolts through the fixing through holes. The direct-drive mechanism fixing platform is a protrusion perpendicular to the bottom plate. After the direct-drive mechanism is installed on the direct-drive mechanism fixing platform, it maintains the same height as the step-drive mechanism.

5. The cross-scale multi-mode piezoelectric nano-motion platform according to claim 1, characterized in that: It also includes a driving ceramic mechanism, which includes multiple driving ceramics. The driving ceramics are used to provide driving force for each mechanism. The driving ceramics include a step drive mechanism lever motion foot driving ceramic, a step drive mechanism triangle motion foot driving ceramic, a step drive preload mechanism driving ceramic and a direct drive mechanism driving ceramic.

6. The cross-scale multi-mode piezoelectric nano-motion platform according to claim 4, characterized in that: The direct-drive mechanism fixing frame is also provided with a direct-drive mechanism slide groove, a driving ceramic fixing groove and a guide leaf spring. The direct-drive mechanism slide groove is arranged in the middle position of the lower surface of the direct-drive mechanism fixing frame for connecting with the direct-drive mechanism fixing platform. The driving ceramic fixing groove is used to fix the direct-drive mechanism driving ceramic. One end of the guide leaf spring is connected to the direct-drive mechanism slide groove, and the other end is connected to the micro-positioning platform for guiding and fixing the micro-positioning platform.

7. The cross-scale multi-mode piezoelectric nano-motion platform according to claim 6, characterized in that: The step drive mechanism fixing frame is also provided with a triangular motion foot ceramic fixing frame and a lever motion foot ceramic fixing frame. The triangular motion foot ceramic fixing frame is used to fix the triangular motion foot driving ceramic of the step drive mechanism, and the lever motion foot ceramic fixing frame is used to fix the lever motion foot driving ceramic of the step drive mechanism.

8. A control method for a cross-scale multi-mode piezoelectric nano-motion platform based on any one of claims 1 to 7, characterized in that: The following steps are involved: Fix the piezoelectric nano-motion platform as a whole; According to the task requirements, the direct drive mechanism is controlled to perform different motion modes, wherein the motion modes include: direct push motion, stick-slip motion and inchworm motion; After the movement is completed, the micro-positioning stage records and outputs the movement results.

9. The control method of the cross-scale multi-mode piezoelectric nano-motion platform as described in claim 8, wherein the direct-push motion is that the direct-drive mechanism in the direct-drive mechanism drives the ceramic to directly drive and control the movement of the direct-drive mechanism; the stick-slip motion is that the triangular motion foot drives the direct-drive mechanism to move forward, and the triangular motion foot is directly reset after the motion is completed; the inchworm motion is that the triangular motion foot drives the direct-drive mechanism to move forward, and the lever motion foot presses the direct-drive mechanism tightly after the motion is completed, and then the triangular motion foot is reset again.

10. The control method of the cross-scale multi-mode piezoelectric nano-motion platform as described in claim 8, wherein both the inchworm motion and the stick-slip motion require the step-drive pre-tightening mechanism to drive the step-drive mechanism to approach the direct-drive mechanism for pre-tightening.

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