Multi-dimensional piezoelectric motor of single piezoelectric device and control method

Abstract

The invention discloses a multi-dimensional piezoelectric motor of a single piezoelectric device and a control method. The piezoelectric motor comprises a two-dimensional moving platform, a sliding rod mechanism and a scanning tube mechanism. The sliding rod mechanism is elastically fixed in the scanning tube mechanism, and the two-dimensional moving platform is fixed at the top of the sliding rod mechanism; wherein the two-dimensional moving platform comprises a sample table, an x-axis sliding block, a blade block and a y-axis sliding block from top to bottom; the winding device further comprises a winding pile. The blade block is a block with a central through hole, the upper surface is provided with two blades which are parallel along the x axis and are centrosymmetric, and the lower surface is provided with two blades which are parallel along the y axis and are centrosymmetric; the upper surface of the x-axis sliding block is attached to the plane of the sample table, the lower surface of the x-axis sliding block is tangent to blades on the two sides of the upper surface of the blade block, and a through inverted-T-shaped hole is formed in the x-axis sliding block. The upper surface of the y-axis sliding block is tangent to blades on two sides of the lower surface of the blade block, and a through convex hole is formed in the y-axis sliding block; the winding pile is in the shape of a tube with outer steps at the upper end and the lower end and is coaxially arranged in the inverted convex hole of the x-axis sliding block. According to the invention, the robot walks along the specific double-edge guide rail in different dimensions, so that the displacement deviation can be effectively reduced, and the positioning precision is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of piezoelectric motors, and in particular to a multi-dimensional piezoelectric motor with a single piezoelectric device and a control method thereof. Background Art

[0002] Piezoelectric motors or piezoelectric brakes use the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy through the periodic micro-nano movement of the core piezoelectric device, thereby achieving precise macroscopic displacement or rotation of moving parts. Compared with traditional electromagnetic motors that work on the principle of electromagnetic induction, piezoelectric motors have the advantages of high displacement accuracy, small size, and strong resistance to electromagnetic interference.

[0003] In particular, with the development of technologies such as high-precision micro-nano processing represented by lithography machines, high-precision scientific instruments, and quantum communications, higher performance requirements have been placed on micro-nano positioning motors, especially positioning motors in complex environments such as vacuum and low temperature. However, the design of electromagnetic motors makes it difficult to apply to these extreme environments. Accordingly, a variety of piezoelectric motors based on piezoelectric devices have been designed and successfully commercialized. For example, the PILine ultrasonic piezoelectric motor launched by Physik Instrumente in Germany. However, these piezoelectric motors can usually only achieve reciprocating motion in a single direction. If multi-dimensional motion is to be achieved, the cooperation of multiple piezoelectric motors is generally required. For example, the three-dimensional motor of AttoCube requires the stacking of three one-dimensional motors, which increases the complexity and cost of the system while reducing reliability.

[0004] The invention patent with patent publication number CN105092896A discloses a multidimensional piezoelectric motor driven by a single scanning tube and a searchable scanning probe microscope, and proposes a multidimensional piezoelectric motor realized by a single piezoelectric device, but its movement in the xy plane direction has no guide rail, and precise plane positioning is difficult to ensure.

[0005] In addition, the invention patent with patent publication number CN106546770A discloses a scanning tunneling microscope based on an inertial piezoelectric motor. This patent only uses one piezoelectric scanning tube to achieve nanometer-level stepping of the probe and the sample and atomic-precision scanning of the sample surface, but can only achieve Z-direction movement relying on the spike signal. Summary of the invention

[0006] The technical problem to be solved by the present invention is that the multi-dimensional piezoelectric motor has a complex structure and cannot ensure positioning accuracy without a positioning guide rail.

[0007] In order to solve the above technical problems, the present invention provides the following technical solutions: A multi-dimensional piezoelectric motor with a single piezoelectric device includes: a two-dimensional moving platform 100, a slide bar mechanism 200, and a scanning tube mechanism 300; the slide bar mechanism 200 is elastically fixed in the scanning tube mechanism 300, and the two-dimensional moving platform 100 is fixed on the top of the slide bar mechanism 200; wherein, The two-dimensional moving platform 100 includes, from top to bottom, a sample stage 110, an x-axis slider 120, a blade block 130, a y-axis slider 140; and also includes a winding pile 150; The blade block 130 is in the shape of a block with a central through hole, with two blades parallel to the x-axis and symmetrically centered on the upper surface, and two blades parallel to the y-axis and symmetrically centered on the lower surface; the upper surface of the x-axis slider 120 is in contact with the plane of the sample stage 110, and the lower surface is tangent to the blades on both sides of the upper surface of the blade block 130, and a through inverted convex hole is arranged inside it; the upper surface of the y-axis slider 140 is tangent to the blades on both sides of the lower surface of the blade block 130, and a through convex hole is arranged inside it, the large end of the convex hole is a square groove, and the small end is a round hole; the winding pile 150 is tubular with external steps at both the upper and lower ends, and is coaxially placed in the inverted convex hole of the x-axis slider 120.

[0008] In one embodiment of the present invention, the lower surface of the x-axis slider 120 is an arc surface; the upper surface of the y-axis slider 140 is an arc surface; and the outer diameter of the outer step of the winding pile 150 is smaller than the major diameter of the convex hole of the x-axis slider 120 and larger than the minor diameter.

[0009] In one embodiment of the present invention, the slide bar mechanism 200 includes an elastic member 210, a wire drawing 220, a z slider 230, and a spring base 240; The z slider 230 is a rectangular parallelepiped, and a non-through circular hole is provided on its upper section, in which the spring base 240, the elastic member 210, and the wire drawing 220 are coaxially arranged from bottom to top; the upper section of the z slider 230 is coaxially installed in the square groove at the bottom of the convex hole of the y-axis slider 140; One end of the wire drawing 220 passes through the convex hole of the y-axis slider 140 , the blade block 130 , and the inverted convex hole of the x-axis slider 120 in sequence, and is then fixed on the winding pile 150 .

[0010] In one embodiment of the present invention, the scanning tube mechanism 300 includes a piezoelectric scanning tube 310, a sleeve 320 and a base 330; the sleeve 320 is coaxially placed on the piezoelectric scanning tube 310, and its upper surface is coplanar and fixed with the upper surface of the piezoelectric scanning tube 310, and the bottom of the piezoelectric scanning tube 310 is installed on the base 330.

[0011] In one embodiment of the present invention, the slide bar mechanism 200 further includes a spring sheet 250; the spring sheet 250 is an arched sheet, whose outer arc surface contacts the inner wall of the sleeve 320, and whose two ends contact the lateral surface of the z slider 230, fixing the z slider 230 to the sleeve 320 by elastic force.

[0012] In one embodiment of the present invention, the y-axis slider 140, the z-slider 230, the spring sheet 250 and the sleeve 320 are removed, and the spring base 240 is fixed to the base 330, so that the three-dimensional motor can be reduced to a two-dimensional planar motor.

[0013] In one embodiment of the present invention, when the elastic member 210 is a tension spring, the other end of the wire drawing 220 is fixedly connected to the free end of the tension spring; when the elastic member 210 is a compression spring, the other end of the wire drawing 220 is fixedly connected to the spring base 240 .

[0014] In one embodiment of the present invention, a scanning probe 400 is added above the sample stage 110 , and the whole device serves as a scanning probe microscope device for searching the active area of ​​the sample in three dimensions.

[0015] In one embodiment of the present invention, the conductive coating of the outer electrode of the piezoelectric scanning tube 310 is cut into four equal parts along the axial direction, and the inner electrode coating is a whole.

[0016] The present invention also provides a control method for a multi-dimensional piezoelectric motor of a single piezoelectric device, including: applying a pulse excitation voltage to the inner electrode of a scanning tube mechanism 300, combining with a slide bar mechanism 200 to achieve vertical displacement, applying a pulse excitation voltage with a phase angle difference of one hundred and eighty degrees to two diagonal outer electrodes of the scanning tube mechanism 300, combining with a two-dimensional moving platform 100 to achieve horizontal displacement.

[0017] Compared with the prior art, the beneficial effect of the present invention is that in the present invention, walking in different dimensions is along a specific double-edged guide rail, which can effectively reduce displacement deviation and improve positioning accuracy.

[0018] The present invention uses a single piezoelectric device to achieve multi-dimensional motion, has a simple and reliable structure, low cost, and reduces assembly difficulty.

[0019] The control signal of the present invention is simple, and multi-dimensional motion can be realized only by relying on the peak signal, thereby reducing the hardware requirements.

[0020] The present invention can realize the scanning function while realizing multi-dimensional motion, and can further realize the functions of a scanning probe microscope with multi-dimensional positioning function. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of a multi-dimensional piezoelectric motor of a single piezoelectric device according to an embodiment of the present invention.

[0022] Figure 2 , 3 Schematic diagrams of the sample stage, x-axis slider, blade block, and y-axis slider at two viewing angles of an embodiment of the present invention.

[0023] Figure 4 Schematic diagram of a blade block according to an embodiment of the present invention.

[0024] Figure 5 This is a schematic diagram of an elastic member of an embodiment of the present invention being a compression spring.

[0025] Figure 6 This is a schematic diagram of an elastic member of an embodiment of the present invention being a tension spring.

[0026] Figure 7 This is a schematic diagram of reducing a three-dimensional motor to a two-dimensional planar motor according to an embodiment of the present invention.

[0027] Figure 8 Schematic diagram of a scanning probe microscope according to an embodiment of the present invention.

[0028] Fig. 9 From left to right are the distribution of inner and outer electrodes of the piezoelectric scanning tube according to an embodiment of the present invention, the outer electrode excitation voltage signal and the inner electrode excitation voltage signal. DETAILED DESCRIPTION

[0029] To facilitate those skilled in the art to understand the technical solution of the present invention, the technical solution of the present invention is further described in conjunction with the accompanying drawings.

[0030] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0031] See also Figure 1 As shown, the present invention provides a multi-dimensional piezoelectric motor with a single piezoelectric device, including a two-dimensional moving platform 100, a slide bar mechanism 200, and a scanning tube mechanism 300. The slide bar mechanism 200 is elastically fixed in the scanning tube mechanism 300, and the two-dimensional moving platform 100 is fixed on the top of the slide bar mechanism 200.

[0032] See also Figures 1 to 4 As shown, in one embodiment of the present invention, the two-dimensional moving platform 100 includes, from top to bottom, a sample stage 110 , an x-axis slider 120 , a blade block 130 , and a y-axis slider 140 , and further includes a winding pile 150 .

[0033] In this embodiment, the blade block 130 is in the shape of a block with a central through hole, and two blades are provided on the upper surface that are parallel and symmetrical along the x-axis, and two blades are provided on the lower surface that are parallel and symmetrical along the y-axis. The x-axis slider 120 is in the shape of a block with a circular arc surface on the lower surface, and the upper surface is in contact with the sample stage 110 plane, and the circular arc surface of the lower surface is tangent to the blades on both sides of the upper surface of the blade block 130, and a through inverted convex hole is provided inside it, and the large end of the convex hole is a square groove, and the small end is a circular hole. The y-axis slider 140 is in the shape of a block with a circular arc surface on the upper surface, and the circular arc surface of the upper surface is tangent to the blades on both sides of the lower surface of the blade block 130, and a through convex hole is provided inside it. The winding pile 150 is in the shape of a tube with external steps at both the upper and lower ends, and the outer diameter of the external step is smaller than the large diameter of the convex hole of the x-axis slider 120 and larger than the small diameter, and is coaxially placed in the convex hole of the x-axis slider 120. The lower surface of the x-axis slider 120 and the upper surface of the y-axis slider 140 are arc-shaped, which can reduce resistance.

[0034] Please participate Figures 1 to 6 As shown, in one embodiment of the present invention, the slide bar mechanism 200 includes an elastic member 210 , a wire drawing 220 , a z slider 230 , a spring base 240 and a spring sheet 250 .

[0035] In this embodiment, the z slider 230 is a rectangular parallelepiped, and a non-through circular hole is provided on the upper section thereof, in which the spring base 240, the elastic member 210, and the wire drawing 220 are coaxially arranged from bottom to top. The upper section of the z slider 230 is coaxially installed in the square groove at the bottom of the convex hole of the y-axis slider 140. One end of the wire drawing 220 passes through the convex hole of the y-axis slider 140, the blade block 130, and the inverted convex hole of the x-axis slider 120 in sequence, and is fixed on the winding pile 150.

[0036] In this embodiment, the elastic member 210 is a tension spring or a compression spring. When it is a tension spring, the other end of the wire drawing 220 is fixedly connected to the free end of the tension spring. Figure 6 When it is a compression spring, the other end of the wire drawing 220 is fixedly connected to the spring base 240, and the components of the two-dimensional mobile platform 100 are elastically fixed by the compression spring, such as Figure 5 shown.

[0037] See also Figures 1 to 6 As shown, in one embodiment of the present invention, the scanning tube mechanism 300 includes a piezoelectric scanning tube 310, a sleeve 320 and a base 330. The sleeve 320 is coaxially disposed on the piezoelectric scanning tube 310, and its upper surface is coplanar and fixed with the upper surface of the piezoelectric scanning tube 310, and the bottom of the piezoelectric scanning tube 310 is mounted on the base 330.

[0038] In this embodiment, the spring sheet 250 is an arched sheet, with its outer arc surface in contact with the inner wall of the sleeve 320 and its two ends in contact with a lateral surface of the z slider 230 , fixing the z slider 230 to the sleeve 320 through elastic force.

[0039] See also Figure 7 As shown, in another embodiment of the present invention, the y-axis slider 140, the z-slider 230, the spring sheet 250 and the sleeve 320 are removed, and the spring base 240 is fixed to the base 330, so that the three-dimensional motor can be reduced to a two-dimensional planar motor. In this case, the elastic member 210 is a tension spring, such as Figure 6 shown.

[0040] See also Figure 8 As shown, in yet another embodiment of the present invention, a scanning probe 400 is additionally installed above the sample stage 110, and the whole device is used as a scanning probe microscope device for searching the active area of ​​the sample in three dimensions.

[0041] See also Figures 1 to 8 As shown, in one embodiment of the present invention, the x-axis slider 120 and the y-axis slider 140 are made of sapphire material, and the z-slider 230 is made of high-purity tantalum material. The outer electrode conductive coating of the piezoelectric scanning tube 310 is cut into four equal parts along the axial direction, and the inner electrode coating is integral.

[0042] See also Figures 1 to 9 As shown, the present invention also provides a control method for a multi-dimensional piezoelectric motor of a single piezoelectric device, including: applying a pulse excitation voltage to the inner electrode of the scanning tube mechanism 300, combining with the sliding rod mechanism 200 to achieve vertical displacement, applying a pulse excitation voltage with a phase angle difference of one hundred and eighty degrees to the two diagonal outer electrodes of the scanning tube mechanism 300, and combining with the two-dimensional moving platform 100 to achieve horizontal displacement.

[0043] In one embodiment of the present invention, Fig. 9 As shown in the rightmost figure, the four outer electrodes of the piezoelectric scanning tube 310 are grounded, and a pulse excitation voltage is applied to the inner electrode to achieve vertical displacement. Reversing the pulse excitation voltage can achieve reverse movement in the vertical direction.

[0044] like Fig. 9 As shown in the middle figure, the inner electrode, +x and -x are grounded, +y and -y are connected to opposite pulse excitation voltages respectively, and the double-edged guide rail of the y-axis slider 140 is parallel to the y-axis movement direction, and can achieve translation in the y direction by relying on inertia. At the same time, the double-edged guide rail of the x-axis slider 120 is perpendicular to the y-axis direction, and the friction resistance is large, so it cannot move along the guide rail and is in a static state. By swapping the pulse excitation voltages of +y and -y, reverse translation in the y direction can be achieved.

[0045] Similarly, the inner electrode, +y and -y are grounded, and +x and -x are connected to reverse pulse excitation voltages respectively, so as to realize translation in the x direction. The pulse excitation voltages of +x and -x are swapped to realize reverse translation in the x direction.

[0046] like Figure 1 , 8 and Fig. 9As shown, the scanning probe microscope function is implemented as follows: the vertical displacement is controlled to send the sample to the active area, and the scanning function is realized by using the four outer electrodes of the piezoelectric scanning tube 310. If it is necessary to search for an active area or a specific micro-nano device sample, the vertical displacement can be controlled to move the needle sample away, the sample can be displaced in the horizontal direction, and then the sample can be sent to the active area again, and the four outer electrodes of the piezoelectric scanning tube 310 can be used to scan and search the functional area.

[0047] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-limiting from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention, and any reference numerals in the claims should not be regarded as limiting the claims involved.

[0048] The above-described embodiments merely represent implementation methods of the invention. The protection scope of the present invention is not limited to the above-described embodiments. For those skilled in the art, several modifications and improvements may be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A multi-dimensional piezoelectric motor with a single piezoelectric device, characterized in that: include: A two-dimensional moving platform (100), a sliding bar mechanism (200), and a scanning tube mechanism (300); the sliding bar mechanism (200) is elastically fixed inside the scanning tube mechanism (300), and the two-dimensional moving platform (100) is fixed on the top of the sliding bar mechanism (200); wherein: The two-dimensional mobile platform (100) includes, from top to bottom, a sample stage (110), an x-axis slider (120), a blade block (130), and a y-axis slider (140); and also includes a winding pile (150); The blade block (130) is in the shape of a block with a central through hole, and is provided with two blades parallel to and symmetrically along the x-axis on the upper surface, and two blades parallel to and symmetrically along the y-axis on the lower surface; the upper surface of the x-axis slider (120) is in contact with the plane of the sample stage (110), and the lower surface is tangent to the blades on both sides of the upper surface of the blade block (130), and a through inverted convex hole is provided inside the x-axis slider (120); the upper surface of the y-axis slider (140) is tangent to the blades on both sides of the lower surface of the blade block (130), and a through convex hole is provided inside the y-axis slider (140), the large end of the convex hole is a square groove, and the small end is a round hole; the winding pile (150) is in the shape of a tube with external steps at both the upper and lower ends, and is coaxially arranged in the inverted convex hole of the x-axis slider (120).

2. The multi-dimensional piezoelectric motor of a single piezoelectric device according to claim 1, characterized in that: The lower surface of the x-axis slider (120) is an arc surface; the upper surface of the y-axis slider (140) is an arc surface; and the outer diameter of the outer step of the winding pile (150) is smaller than the major diameter of the convex hole of the x-axis slider (120) and larger than the minor diameter.

3. The multi-dimensional piezoelectric motor with a single piezoelectric device according to claim 1, characterized in that: The slide bar mechanism (200) comprises an elastic member (210), a wire drawing (220), a z-slider (230), and a spring base (240); The slider (230) is in the shape of a rectangular parallelepiped, and a non-through circular hole is provided on the upper portion thereof, and the spring base (240), the elastic member (210), and the wire drawing (220) are coaxially arranged therein from bottom to top; The upper section of the z-slider (230) is coaxially mounted in the square groove at the bottom of the convex hole of the y-axis slider (140); One end of the wire drawing (220) passes through the convex hole of the y-axis slider (140), the blade block (130) and the inverted convex hole of the x-axis slider (120) in sequence, and is then fixed on the winding pile (150).

4. The multi-dimensional piezoelectric motor with a single piezoelectric device according to claim 3, characterized in that: The scanning tube mechanism (300) comprises a piezoelectric scanning tube (310), a sleeve (320) and a base (330); the sleeve (320) is coaxially disposed on the piezoelectric scanning tube (310), an upper surface of the sleeve (320) is coplanarly fixed with an upper surface of the piezoelectric scanning tube (310), and the bottom of the piezoelectric scanning tube (310) is mounted on the base (330).

5. The multi-dimensional piezoelectric motor of a single piezoelectric device according to claim 4, characterized in that: The slide bar mechanism (200) further comprises a spring sheet (250); the spring sheet (250) is in the shape of an arched sheet, the outer arc surface of which contacts the inner wall of the sleeve (320), and the two ends of which contact the lateral surface of the z-slider (230), thereby fixing the z-slider (230) to the sleeve (320) through elastic force.

6. The multi-dimensional piezoelectric motor of a single piezoelectric device according to claim 4, characterized in that: By removing the y-axis slider (140), the z-slider (230), the spring sheet (250) and the sleeve (320), and fixing the spring base (240) to the base (330), the three-dimensional motor can be reduced to a two-dimensional planar motor.

7. The multi-dimensional piezoelectric motor with a single piezoelectric device according to claim 3, characterized in that: When the elastic member (210) is a tension spring, the other end of the draw wire (220) is fixedly connected to the free end of the tension spring; when the elastic member (210) is a compression spring, the other end of the draw wire (220) is fixedly connected to the spring base (240).

8. The multi-dimensional piezoelectric motor with a single piezoelectric device according to claim 1, characterized in that: A scanning probe (400) is added above the sample stage (110), and the whole device serves as a scanning probe microscope device for searching the active area of ​​the sample in three dimensions.

9. The multi-dimensional piezoelectric motor with a single piezoelectric device according to claim 4, characterized in that: The outer electrode conductive coating of the piezoelectric scanning tube (310) is cut into four equal parts along the axial direction, and the inner electrode coating is integral.

10. A control method for a multi-dimensional piezoelectric motor using a single piezoelectric device according to any one of claims 1 to 9, characterized in that: include: A pulse excitation voltage is applied to the inner electrode of the scanning tube mechanism (300), and combined with the slide bar mechanism (200) to achieve vertical displacement, and a pulse excitation voltage with a phase angle difference of 180 degrees is applied to the two diagonal outer electrodes of the scanning tube mechanism (300), and combined with the two-dimensional moving platform (100) to achieve horizontal displacement.

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