Vacuum pump and adjusting method

Abstract

The invention provides a vacuum pump and an adjusting method, which can adjust the position of a static side magnet from the side surface or the upper surface of a frame body. The vacuum pump includes a housing portion that accommodates a rotor, a magnetic bearing, and a magnet nut. The magnetic bearing includes: a first permanent magnet disposed around a magnet holder portion; and a second permanent magnet disposed on the rotor so as to face the first permanent magnet in the radial direction. The magnet nut has a main body portion and a protruding portion. The main body portion rotates with respect to the magnet holder portion to adjust the position of the first permanent magnet with respect to the second permanent magnet. The protruding part protrudes from the upper surface of the main body part, and has, on the outer peripheral side, an abutted surface that can be brought into contact with a first jig that rotates the main body part from the upper surface side of the main body part, and that can be brought into contact with a second jig that rotates the main body part from the outer peripheral side of the main body part.

Description

Technical Field

[0001] The invention relates to a vacuum pump and an adjustment method thereof. Background Art

[0002] Turbomolecular pumps are used as vacuum pumps for ultra-high vacuum, vacuum pumps for leak detectors, etc. For example, a vacuum pump disclosed in Patent Document 1 houses a rotor inside a housing and performs vacuum exhaust by rotating the rotor at tens of thousands of revolutions.

[0003] In the vacuum pump shown in Patent Document 1, the rotor is rotatably supported on the frame by means of a magnetic bearing and a rolling bearing. The magnetic bearing includes a rotating body side magnet disposed on the rotor, and a stationary side magnet disposed on a magnet support portion fixed to the frame. The rolling bearing needs to be preloaded in order to reduce the generation of shaking or abnormal noise during rotation. By adjusting the position of the rotating body side magnet relative to the stationary side magnet, an appropriate preload can be applied to the rolling bearing.

[0004] The position adjustment of the rotating body side magnet is performed by rotating the magnet nut screwed to the magnet holder. In the frame, an air intake port is formed at the upper part of the magnet nut, and the operator can rotate the magnet nut through the air intake port.

[0005] [Prior art literature]

[0006] [Patent Document]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 2020-122529 Summary of the invention

[0008] [Problems to be solved by the invention]

[0009] In a vacuum pump used for a leak detector, the air inlet is sometimes not provided on the upper part of the magnet nut but formed on the side of the magnet nut. In addition, in a vacuum pump, the rotor is sometimes accommodated in a frame (called an adjustment frame) different from the frame of the vacuum pump to adjust the rotational balance of the rotor. When the stationary magnet is also provided in the adjustment frame and the rotor is accommodated in the adjustment frame, the position of the stationary magnet is also adjusted by the magnet nut.

[0010] In the conventional magnet nut, the jig for rotating the magnet nut can only hold the magnet nut from the side or the upper surface. Therefore, the common magnet nut cannot be used in the frame of the vacuum pump and the frame for adjustment.

[0011] An object of the present invention is to enable the position of a stationary magnet to be adjusted from both the side surface and the upper surface of a housing in a vacuum pump having a stationary magnet.

[0012] [Technical means to solve the problem]

[0013] A vacuum pump according to an embodiment of the present invention includes a rotor, a frame, a magnetic bearing, and an adjustment member. The rotor is rotatable. The frame accommodates the rotor. The magnetic bearing has: a first magnet, which is arranged around a magnet support portion fixed on the frame; and a second magnet, which is radially opposite to the first magnet and arranged on the rotor. The adjustment member adjusts the position of the first magnet relative to the second magnet. The adjustment member has a main body and a protrusion. The main body has a second thread shape on the inner circumferential surface that is engaged with a first thread shape formed around the magnet support portion, and the main body moves in a direction along the rotation axis of the rotor by rotating relative to the magnet support portion, thereby adjusting the position of the first magnet relative to the second magnet. The protrusion protrudes from the upper surface of the main body. The protrusion has an abutted surface on the outer circumferential side of the main body, and the abutted surface can be abutted by a first clamp that rotates the main body from the upper surface side of the main body, and can be abutted by a second clamp that rotates the main body from the side side of the main body.

[0014] [Effects of the Invention]

[0015] In the vacuum pump, a protrusion protruding from the upper surface of the main body of the adjustment member for adjusting the position of the first magnet has an abutted surface that is abutted by a clamp that rotates the main body. The abutted surface is arranged on the outer peripheral side of the main body in the protrusion, and can be abutted not only by a first clamp that rotates the main body from the upper surface side of the main body, but also by a second clamp that rotates the main body from the side side of the main body. In this way, the adjustment member can be rotated using the clamp from both the upper surface side and the side side of the main body, so the position of the first magnet can be adjusted from both the upper surface side and the side side of the adjustment member. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a cross-sectional view of a vacuum pump.

[0017] Figure 2 It is a top perspective view of a vacuum pump.

[0018] Figure 3 yes Figure 1 Enlarged view of the S part.

[0019] Figure 4 It is a three-dimensional diagram of a magnet nut.

[0020] Figure 5 is a top view of the magnet nut.

[0021] Figure 6 It is a figure which shows the arrangement state of the protrusion part in the magnet nut.

[0022] Figure 7 It is a diagram showing a balance adjustment frame.

[0023] Figure 8 It is a diagram showing the structure of the first clamp.

[0024] Fig. 9 It is a figure which shows the state which holds the magnet nut by the 1st clamp.

[0025] Fig.10 It is a diagram showing the structure of the second jig.

[0026] Fig.11 It is a figure which shows the state which holds the magnet nut by the second clamp.

[0027] Fig.12 It is a diagram showing a first jig according to another embodiment.

[0028] Fig.13 It is a diagram showing a state where a magnet nut is held by a first clamp according to another embodiment.

[0029] [Explanation of Symbols]

[0030] 1: Vacuum pump

[0031] 2, 2': Frame

[0032] 3: Rotor

[0033] 4: Motor

[0034] 5: Stator blade unit

[0035] 6: Stator cylinder

[0036] 7, 7': Shell

[0037] 8: Base

[0038] 8a: concave part

[0039] 8b: Through hole

[0040] 9: cover

[0041] 11: First end

[0042] 12: Second end

[0043] 13: Side face

[0044] 15: Base end

[0045] 16, 16': Magnet support part

[0046] 16a: concave part

[0047] 16b, 16b': beam

[0048] 21: Axis

[0049] 22: Rotor blade unit

[0050] 23: Rotor cylinder

[0051] 25: Rotor blades

[0052] 26: Motor rotor

[0053] 27: Motor stator

[0054] 28: Stator blades

[0055] 31: Protect bearings

[0056] 32: Magnetic bearings

[0057] 33, 33': rolling bearing

[0058] 34, 34': thrust nut

[0059] 41: The first permanent magnet

[0060] 41': Third permanent magnet

[0061] 42: Second permanent magnet

[0062] 43: Fixed components

[0063] 43a: Balance adjustment hole

[0064] 44: Disc spring

[0065] 45: Spring support member

[0066] 46: Magnet nut

[0067] 51: Main body

[0068] 51a: Inner week

[0069] 51b: Upper surface

[0070] 51c: Peripheral

[0071] 52: Protrusion

[0072] 53a: first abutted surface

[0073] 53b: Second abutted surface

[0074] 61, 61': First clamp

[0075] 61a: First gripping portion

[0076] 61a': Third gripping portion

[0077] 61b: First contact portion

[0078] 61b': third contact portion

[0079] 62: Second fixture

[0080] 62a: Second grip

[0081] 62b: Second contact portion

[0082] 70: Balance adjustment frame

[0083] 611, 611', 621: abutment surface

[0084] A: Axis

[0085] A1: First direction

[0086] A2: Second direction

[0087] B: Radial

[0088] T:Turbine

[0089] D: Traction pump

[0090] P11: First air intake

[0091] P12: Second air intake

[0092] P13: Second air intake

[0093] P21: Exhaust port

[0094] OP: Opening DETAILED DESCRIPTION

[0095] 1. First Implementation

[0096] <1-1. Vacuum pump structure>

[0097] Below, use Figure 1 and Figure 2 , a vacuum pump 1 according to an embodiment of the present disclosure will be described with reference to the drawings. Figure 1 It is a cross-sectional view of the vacuum pump 1 . Figure 2 1 is a top perspective view of the vacuum pump 1. The vacuum pump 1 includes a housing 2, a rotor 3, a motor 4, a plurality of stator blade units 5, and a stator cylindrical portion 6.

[0098] The frame 2 accommodates the rotor 3, the motor 4, the plurality of stator blade units 5, and the stator cylinder 6. The frame 2 has a housing 7 and a base 8. The frame 2 is formed of a metal such as an aluminum alloy or iron. The housing 7 is a cylindrical member.

[0099] The housing 7 accommodates a plurality of stator blade units 5 and a multi-stage rotor blade unit 22 provided on the rotor 3. The housing 7 has a first end portion 11, a second end portion 12, and a side portion 13. The first end portion 11 is configured to cover the rotor 3 perpendicularly with respect to the axis A of the rotor 3. Figure 2 The first end portion 11 is omitted.

[0100] The second end portion 12 is located on the opposite side of the first end portion 11 in the direction of the axis A of the rotor 3. The second end portion 12 is connected to the base 8. The side portion 13 connects the first end portion 11 and the second end portion 12. A first air intake port P11, a second air intake port P12, and a second air intake port P13 are formed on the side portion 13 of the housing 7. The first air intake port P11 is formed near the first end portion 11 of the side portion 13. An exhaust target device including an exhaust target space is connected to the first air intake port P11.

[0101] The base 8 is configured to block the opening on the second end 12 side of the housing 7. The housing 7 and the base 8 accommodate the stator cylindrical portion 6 and the rotor cylindrical portion 23 provided on the rotor 3. The base 8 has a base end 15. The base end 15 is connected to the second end 12 of the housing 7. In addition, the connection between the housing 7 and the base 8 includes a case where separate components are joined, and also includes a case where different parts of an integral component are connected.

[0102] An exhaust port P21 is formed on the side of the base 8. An auxiliary pump is connected to the exhaust port P21. An exhaust path from the first air intake port P11 to the exhaust port P21 is formed in the internal space of the frame portion 2. A plurality of second air intake ports P12 and P13 are connected to the exhaust path. When the vacuum pump 1 is used as a leak detector, pipes from a test body are respectively connected to the plurality of second air intake ports P12 and P13. The second air intake port P12 is formed between the turbine portion T and the traction pump portion D. The second air intake port P13 is formed in the middle of the traction pump portion D. In addition, depending on the purpose of the vacuum pump 1, the second air intake port P12 and the second air intake port P13 may not be formed.

[0103] The rotor 3 has a rotating shaft 21, a multi-stage rotor blade unit 22, and a rotor cylindrical portion 23. The rotating shaft 21 extends in the axis A direction of the rotor 3. In the following description, the direction from the base 8 toward the housing 7 in the axis A direction is referred to as a first direction A1, and the opposite direction is referred to as a second direction A2.

[0104] The vacuum pump 1 has a magnet holder 16. The magnet holder 16 is arranged inside the housing 7. The magnet holder 16 is arranged to face the base 8 from the first end 11 of the housing 7. The magnet holder 16 is formed integrally with the housing 7. The so-called integral formation means, for example, using the same material and forming by mold, or forming by cutting.

[0105] The magnet holder 16 has a cylindrical outer shape. A recess 16a is formed at the end of the magnet holder 16 on the second direction A2 side so as to face the first direction A1. The end of the rotation shaft 21 on the first direction A1 side is inserted into the recess 16a.

[0106] The magnet support part 16 has a beam part 16b. Three beam parts 16b are provided at equal intervals along the circumferential direction of the magnet support part 16. The beam part 16b is formed in a manner of bridging the magnet support part 16 and the side part 13 of the housing 7. Thus, the beam part 16b can support the magnet support part 16 on the side part 13. That is, the beam part 16b fixes the magnet support part 16 while keeping the distance between the beam part 16b and the side part 13 constant.

[0107] A recessed portion 8 a is formed in the center of the surface on the second direction A2 side of the base 8 so as to face the first direction A1. The vacuum pump 1 includes a cover 9. The cover 9 is disposed so as to close the recessed portion 8 a of the base 8.

[0108] A through hole 8b is formed in the ceiling portion of the recess 8a of the base 8 on the first direction A1 side along the axis A. The shaft 21 is inserted into the through hole 8b, and the end of the shaft 21 on the second direction A2 side protrudes into the recess 8a.

[0109] The vacuum pump 1 has a protective bearing 31, a magnetic bearing 32, and a rolling bearing 33. The protective bearing 31 is arranged between the magnet support portion 16 and the rotating shaft 21. The protective bearing 31 is arranged inside the recess 16a of the magnet support portion 16. The protective bearing 31 functions as a touchdown bearing that limits the radial swing of the rotating shaft 21 on the first direction A1 side. When the rotating shaft 21 is in a constant rotation state, the rotating shaft 21 does not contact the protective bearing 31. When a large disturbance is applied, or when the swing rotation of the rotating shaft 21 increases during acceleration or deceleration of the rotation, the rotating shaft 21 contacts the inner surface of the inner ring of the protective bearing 31. The protective bearing 31 can use a ball bearing, for example.

[0110] The magnetic bearing 32 is disposed between the magnet support portion 16 and the rotor 3. The magnetic bearing 32 supports the rotor 3 in a non-contact manner. The magnetic bearing 32 will be described in detail later.

[0111] The rolling bearing 33 is arranged between the rotating shaft 21 and the base 8. The rolling bearing 33 supports the rotating shaft 21 so as to be rotatable relative to the base 8. The rolling bearing 33 is arranged in the through hole 8b of the base 8. For example, a ball bearing can be used as the rolling bearing 33. The vacuum pump 1 has a thrust nut 34 fixed to the rotating shaft 21. The thrust nut 34 is arranged in a portion of the rotating shaft 21 that protrudes from the through hole 8b and is located inside the recess 8a. The thrust nut 34 is arranged on the second direction A2 side of the rolling bearing 33. When the magnetic bearing 32 described later is adjusted, a force is applied to the rotor 3 to move toward the housing 7 side, so the thrust nut 34 applies preload to the rolling bearing 33 toward the first direction A1.

[0112] The multi-stage rotor blade units 22 are connected to the rotating shaft 21, respectively. The multi-stage rotor blade units 22 are arranged at intervals from each other in the direction of the axis A. Each rotor blade unit 22 includes a plurality of rotor blades 25. Although not shown in the figure, each of the plurality of rotor blades 25 extends radially with the rotating shaft 21 as the center. In addition, in the drawings, only one of the multi-stage rotor blade units 22 and one of the plurality of rotor blades 25 are marked with a symbol, and the symbols of the other rotor blade units 22 and the other rotor blades 25 are omitted.

[0113] The rotor cylinder 23 is connected to the rotating shaft 21. The rotor cylinder 23 is arranged below the rotor blade unit 22. The rotor cylinder 23 is cylindrical and extends in the direction of the axis A. The rotor cylinder 23 is arranged to surround the rotating shaft 21 on the outer peripheral side of the rotating shaft 21. The outer peripheral surface of the rotor cylinder 23 is a cylindrical curved surface.

[0114] The motor 4 drives the rotor 3 to rotate. As the motor 4, for example, a brushless motor can be used. The motor 4 includes a motor rotor 26 and a motor stator 27. The motor rotor 26 is attached to the rotating shaft 21. The motor stator 27 is attached to the base 8. The motor stator 27 is arranged to face the motor rotor 26.

[0115] The multi-stage stator blade unit 5 is connected to the inner surface of the housing 7. The multi-stage stator blade units 5 are arranged at intervals from each other in the direction of the axis A. Each of the multi-stage stator blade units 5 is arranged between the multi-stage rotor blade units 22. Each stator blade unit 5 includes a plurality of stator blades 28. Although not shown in the figure, the plurality of stator blades 28 extend radially with the rotating shaft 21 as the center.

[0116] The multi-stage rotor blade units 22 and the multi-stage stator blade units 5 constitute a turbine unit T (turbomolecular pump). In the drawings, only one of the plurality of stator blade units 5 and one of the plurality of stator blades 28 is denoted by a reference numeral, and the reference numerals of the other stator blade units 5 and other stator blades 28 are omitted.

[0117] The stator cylindrical portion 6 is arranged radially outside the rotor cylindrical portion 23. The stator cylindrical portion 6 is connected to the base 8. The stator cylindrical portion 6 is arranged facing the rotor cylindrical portion 23 in the radial direction of the rotor cylindrical portion 23.

[0118] A spiral thread groove is provided on the inner circumferential surface of the stator cylindrical portion 6. The rotor cylindrical portion 23 and the stator cylindrical portion 6 constitute a traction pump portion D (thread groove pump). In the vacuum pump 1, the gas from the exhaust target space of the exhaust target device is exhausted by the turbine portion T, and then exhausted by the traction pump portion D and discharged to the outside of the vacuum pump 1.

[0119] <1-2. Structure of magnetic bearing>

[0120] Below, use Figure 1 to Figure 3 The structure of the magnetic bearing 32 will be described. Figure 3 yes Figure 1 The magnetic bearing 32 includes a first permanent magnet 41 (an example of a first magnet) and a second permanent magnet 42 (an example of a second magnet).

[0121] The first permanent magnet 41 is disposed on the outer peripheral surface of the magnet holder 16 . The second permanent magnet 42 is fixed to the inner peripheral surface of the rotor 3 .

[0122] The first permanent magnet 41 and the second permanent magnet 42 are arranged so as to face each other in the radial direction B.

[0123] The first permanent magnet 41 and the second permanent magnet 42 are annular. Figure 1 In the embodiment, three first permanent magnets 41 and three second permanent magnets 42 are arranged along the axis A direction, but the number of the first permanent magnets 41 and the number of the second permanent magnets 42 are not particularly limited.

[0124] A gap is formed between the first permanent magnet 41 and the second permanent magnet 42. Each annular magnet element constituting the first permanent magnet 41 and the second permanent magnet 42 is configured so that one end in the direction of the axis A is an N pole and the other end is an S pole. The annular magnet elements of the stacked first permanent magnet 41 are configured so that the N poles or the S poles are opposite to each other in the direction of the axis A. The annular magnet elements of the stacked second permanent magnet 42 are configured so that the N poles or the S poles are opposite to each other in the direction of the axis A. The first permanent magnet 41 and the second permanent magnet 42 are configured so that the same poles are approximately opposite to each other, but due to the positional offset in the direction of the axis A, a force is applied to the rotating shaft 21 to move in the first direction A1 relative to the housing 7 and the base 8, and a preload is applied to the rolling bearing 33 through the thrust nut 34. The preload can be adjusted by adjusting the positional offset of the first permanent magnet 41 relative to the second permanent magnet 42 in the direction of the axis A.

[0125] The vacuum pump 1 further includes a fixing member 43 , a disc spring 44 , a spring supporting member 45 , and a magnet nut 46 .

[0126] The fixing member 43 is disposed on the surface of the second permanent magnet 42 on the first direction A1 side. The fixing member 43 is annular. The fixing member 43 is fixed to the rotor 3. The fixing member 43 is a pressing member for fixing the position of the second permanent magnet 42. The fixing member 43 is fixed to the rotor 3 by shrink fitting, cold fitting, etc.

[0127] A plurality of balance adjustment holes 43a are provided at the end of the fixing member 43 in the first direction A1, that is, at the upper end of the fixing member 43. The plurality of balance adjustment holes 43a are provided along the circumferential direction of the fixing member 43. A thread for screwing a screw is formed in each of the plurality of balance adjustment holes 43a. By screwing a screw into any of the plurality of balance adjustment holes 43a, the center of gravity position of the rotor 3 can be adjusted. By adjusting the center of gravity position of the rotor 3, the vibration of the rotor 3 during rotation can be reduced.

[0128] The disc spring 44 is arranged on the second direction A2 side of the first permanent magnet 41. The end of the disc spring 44 on the opposite side to the first permanent magnet 41 is supported by a spring support member 45 fixed to the magnet holder 16. The disc spring 44 as an elastic body elastically supports the first permanent magnet 41 between the magnet nut 46 arranged on the surface of the first permanent magnet 41 on the first direction A1 side and the spring support member 45. In addition, a shim ring may be arranged between the disc spring 44 and the first permanent magnet 41.

[0129] <1-3. Structure of magnet nut>

[0130] The magnet nut 46 (an example of an adjustment member) is annular. The magnet nut 46 is arranged on the surface of the first permanent magnet 41 on the first direction A1 side. The magnet nut 46 adjusts the position of the first permanent magnet 41 in the direction of the axis A. The magnet nut 46 can be said to be a pressing member for receiving the pressure of the preload caused by the repulsive force of the magnet applied to the rolling bearing 33. The magnet nut 46 is movably arranged on the outer periphery of the magnet support part 16.

[0131] Below, use Figures 4 to 6 The specific structure of the magnet nut 46 will be described. Figure 4 It is a perspective view of the magnet nut 46 . Figure 5 It is a top view of the magnet nut 46 . Figure 6 1 and 2 are diagrams showing the arrangement of the protruding portion 52 in the magnet nut 46. The magnet nut 46 includes a main body portion 51 and the protruding portion 52.

[0132] The main body 51 is a portion of the magnet nut 46 that presses the first permanent magnet 41. The main body 51 is annular. A female thread shape (an example of a second thread shape) is formed on the inner periphery 51a of the main body 51. A male thread shape (an example of a first thread shape) is formed on the outer peripheral surface of the magnet holder 16. The female thread shape of the main body 51 is engaged with the male thread shape of the outer peripheral surface of the magnet holder 16. That is, the main body 51 is screwed with the magnet holder 16, and can move along the axis A direction by rotating circumferentially relative to the magnet holder 16. In addition, in order to protect the first permanent magnet 41, a spacer may also be arranged between the main body 51 and the first permanent magnet 41.

[0133] When the main body 51 rotates around the axis A relative to the magnet holder 16, the main body 51 moves in the direction of the axis A. Due to the movement of the main body 51, the first permanent magnet 41 elastically supported by the disc spring 44 moves along the direction of the axis A. That is, by rotating the main body 51, the position of the first permanent magnet 41 relative to the second permanent magnet 42 can be adjusted.

[0134] The protrusion 52 protrudes in the first direction A1 from the upper surface 51b of the main body 51. The protrusion 52 has a first abutted surface 53a and a second abutted surface 53b formed on the outer periphery 51c side of the main body 51 (i.e., the side facing the rotor 3) to be abutted by the jig (the first jig 61, the second jig 62) that rotates the main body 51. In the present embodiment, six protrusions 52 are provided at equal intervals along the circumferential direction of the main body 51 on the upper surface 51b of the main body 51.

[0135] The first abutted surface 53a extends from a portion of the protrusion 52 corresponding to the vertex on the outer periphery 51c side toward the vertex of one of the two protrusions 52 adjacent to the protrusion 52 when viewed from the upper surface 51b side. The first abutted surface 53a extends obliquely from the outer periphery 51c side of the main body 51 toward the inner periphery 51a side in the upper surface 51b of the main body 51.

[0136] The second abutted surface 53b is a surface extending from a portion of the protrusion 52 corresponding to the vertex on the outer periphery 51c side toward the vertex of the other of the two protrusions 52 adjacent to the protrusion 52 when viewed from the upper surface 51b side. The second abutted surface 53b extends obliquely from the outer periphery 51c side of the main body 51 toward the inner periphery 51a side in the upper surface 51b of the main body 51.

[0137] The second abutted surface 53b is adjacent to the first abutted surface 53a of the protrusion 52, and the protrusion 52 is adjacent to the protrusion 52 provided with the second abutted surface 53b. Therefore, the second abutted surface 53b and the adjacent first abutted surface 53a are arranged on a common side of the hexagon formed by the six protrusions 52.

[0138] like Figures 4 to 6 As shown, the protrusion 52 is smaller than the main body 51. In this way, by forming the abutted surfaces 53a and 53b abutted by the clamp in the small protrusion 52, the magnet nut 46 can be held by the clamp and the magnet nut 46 can be reduced. By reducing the size of the magnet nut 46, the inherent value of the vacuum pump 1 will not decrease, and it is not easy to generate large vibrations in the vacuum pump 1. Furthermore, the proportion of the magnet nut 46 in the housing 7 can be reduced, so that a large first permanent magnet 41 (and a large second permanent magnet 42) can be used in the vacuum pump 1, and the exhaust speed of the vacuum pump 1 can be increased.

[0139] In this embodiment, six protrusions 52 are provided at equal intervals along the circumferential direction of the main body 51 on the upper surface 51b of the main body 51. Figure 6 As shown, the six protrusions 52 constitute a part of a hexagon when viewed from the upper surface 51b of the main body 51. Specifically, the vertices on the outer periphery 51c side of the protrusion 52 correspond to the vertices of the hexagon, and the first abutted surface 53a and the second abutted surface 53b formed on the protrusion 52 correspond to the sides extending from the vertices of the hexagon.

[0140] The following is a description of the reason why six (a multiple of 6) protrusions 52 are provided on the upper surface 51b of the main body 51. As described later, the first jig 61 ( Figure 8 ) has three abutting portions, and the three abutting portions are used to abut against the abutted surfaces 53a and 53b of the protrusion 52 through three spaces formed by the three beam portions 16b provided on the magnet support portion 16. In order to stably hold the magnet nut 46 using the first clamp, it is preferred that each of the three abutting portions abuts against the abutted surface 53a and 53b of at least one protrusion 52. Therefore, the number of the protrusions 52 provided on the upper surface 51b of the main body 51 is preferably a multiple of 3.

[0141] On the other hand, the second jig 62 ( Fig.10 ) has two abutting portions for abutting against the abutted surfaces 53a and 53b of the protruding portion 52. In order to stably hold the magnet nut 46 by the second clamp, it is preferred that each of the two abutting portions abuts against the abutted surface 53a and 53b of at least one protruding portion 52. Therefore, the number of the protruding portions 52 provided on the upper surface 51b of the main body 51 is preferably a multiple of 2.

[0142] As a result, in order to stably hold the magnet nut 46 using both the first clamp and the second clamp, the number of protrusions 52 provided on the upper surface 51b of the main body 51 is preferably a multiple of 2 and a multiple of 3, that is, a multiple of 6 (a common multiple of 2 and 3).

[0143] <2.Balance adjustment frame>

[0144] Next, the balance adjustment frame 70 will be described. In the present embodiment, the balance adjustment (adjustment of the center of gravity position) of the rotor 3 is performed with the rotor 3 accommodated in the balance adjustment frame 70. Figure 7 The structure of the balance adjusting frame 70 will be described. Figure 7 It is a diagram showing the balance adjustment frame 70 .

[0145] The balance adjustment frame 70 has no first end portion on the frame portion 2', and an opening OP capable of accessing the internal space of the frame portion 2' is provided on the upper surface of the housing 7' of the frame portion 2'. Other than that, the balance adjustment frame 70 has the same structure as the vacuum pump 1 described above. Therefore, description of other components of the balance adjustment frame 70 is omitted.

[0146] By providing an opening OP in the housing 7', the user can access the plurality of balance adjustment holes 43a from the top of the vacuum pump 1 through the opening OP, insert a screw into any balance adjustment hole 43a, or remove a screw inserted into any balance adjustment hole 43a, thereby adjusting the balance of the rotor 3.

[0147] Furthermore, the first jig 61 can be inserted from the opening OP in the upper portion of the vacuum pump 1 , and the magnet nut 46 can be held and rotated from the upper surface 51 b side of the main body 51 by the first jig 61 .

[0148] In the following description, in the balance adjustment frame 70, the portion corresponding to the first permanent magnet 41 of the vacuum pump 1 is referred to as "third permanent magnet 41'". In addition, in the balance adjustment frame 70, the portion corresponding to the magnet holder 16 of the vacuum pump 1 is referred to as "magnet holder 16'", and the portion corresponding to the beam 16b is referred to as "beam 16b'".

[0149] <3. First clamp>

[0150] Below, use Figure 8 The first jig 61 will be described. Figure 8 : is a figure which shows the structure of the 1st jig|tool 61. The 1st jig|tool 61 is a jig|tool used when rotating the main body part 51 from the upper surface 51b side of the main body part 51 of the magnet nut 46. The 1st jig|tool 61 has a 1st gripping part 61a and three 1st contact parts 61b.

[0151] The first gripping portion 61 a is a rod-shaped member that is long in one direction. The first gripping portion 61 a has, for example, a cylindrical shape that is long in one direction. The first gripping portion 61 a is gripped by a user when the main body 51 is rotated by the first clamp 61 .

[0152] The three first abutting portions 61b are portions that branch off from one end of the first gripping portion 61a in the longitudinal direction and extend along the longitudinal direction of the first gripping portion 61a. The three first abutting portions 61b are arranged at equal intervals relative to the circumferential direction of the first gripping portion 61a. Each first abutting portion 61b has an abutting surface 611. When the first clamp 61 is inserted from the upper surface 51b side of the main body 51, the abutting surface 611 abuts against the first abutted surface 53a and the second abutted surface 53b of the protruding portion 52 of the magnet nut 46.

[0153] The first clamp 61 having the above-described structure is used to adjust the position of the magnet nut 46 when the rotor 3 is housed in the balance adjustment frame 70 and the magnet nut 46 is installed. Specifically, the first clamp 61 is inserted from the upper surface 51b side of the main body 51 through the opening OP of the frame portion 2', and each first abutment portion 61b of the first clamp 61 is inserted into the space formed between two adjacent beam portions 16b'. From each space into which each first abutment portion 61b is inserted, two adjacent protrusions 52 of the six protrusions 52 provided on the upper surface 51b of the main body 51 of the magnet nut 46 can be visually seen. In addition, as described above, the first abutted surface 53a of one of the two adjacent protrusions 52 and the second abutted surface 53b of the other are adjacent to each other and are arranged on one side of the hexagon formed by the six protrusions 52. Therefore, when the first abutment portion 61b is inserted between the two beam portions 16b', as Fig. 9 As shown, the abutting surface 611 of the first abutting portion 61 b ​​abuts against the first abutted surface 53 a of one of the two adjacent protruding portions 52 and the second abutted surface 53 b of the other protruding portion 52 . Fig. 9 It is a diagram showing a state where the magnet nut 46 is held by the first clamp 61 .

[0154] like Figures 4 to 6 As shown in the figure, the first abutted surface 53a of one of the two adjacent protrusions 52 and the second abutted surface 53b of the other exist separately from each other. Therefore, the main body 51 can be held at two separate points by the first abutting portions 61b of the first clamp 61 abutting against the first abutted surface 53a and the second abutted surface 53b adjacent to each other. As a result, the first clamp 61 can stably hold the main body 51 (magnet nut 46).

[0155] <4. Second clamp>

[0156] Below, use Fig.10 The second jig 62 will be described. Fig.10 : is a figure which shows the structure of the second jig 62. The second jig 62 is a jig used when rotating the main body 51 from the side surface (outer periphery 51c) of the main body 51 of the magnet nut 46. The second jig 62 has a second gripping portion 62a and two second contact portions 62b.

[0157] The second gripping portion 62a is a member that is long in one direction. The second gripping portion 62a is, for example, a plate-shaped member that is long in one direction. The second gripping portion 62a is gripped by a user when the main body 51 is rotated by the second clamp 62 .

[0158] The two second abutting portions 62b are respectively branched from one end of the second gripping portion 62a in the longitudinal direction and extend along the longitudinal direction of the second gripping portion 62a. The two second abutting portions 62b are larger than the diameter of the inner circumference 51a of the main body 51 of the magnet nut 46 and smaller than the diameter of the outer circumference 51c. Each second abutting portion 62b has an abutting surface 621. When the second clamp 62 is inserted from the outer circumference 51c side of the main body 51, the abutting surface 621 abuts against the first abutted surface 53a and the second abutted surface 53b of the protruding portion 52 of the magnet nut 46.

[0159] The second jig 62 having the above structure is used to adjust the position of the magnet nut 46 when the rotor 3 is housed in the frame 2 of the vacuum pump 1 and the magnet nut 46 is installed. Fig.11 As shown, the second clamp 62 is inserted from the outer periphery 51c side of the main body 51 through the first air inlet P11 of the vacuum pump 1, and the four protrusions 52 are sandwiched between the two second abutting portions 62b of the second clamp 62. By sandwiching the four protrusions 52 between the two second abutting portions 62b, the abutting surface 621 of each second abutting portion 62b of the second clamp 62 abuts against the first abutted surface 53a of one of the two adjacent protrusions 52 among the four sandwiched protrusions 52 and the second abutted surface 53b of the other protrusion 52. In this way, the second clamp 62 can hold the magnet nut 46 in a state where the four protrusions 52 are sandwiched between the two second abutting portions 62b. Fig.11 It is a diagram showing a state where the magnet nut 46 is held by the second clamp 62 .

[0160] As described above, the second abutting portions 62b of the second clamp 62 abut against the adjacent first abutted surfaces 53a and second abutted surfaces 53b, thereby holding the main body 51 at two separate points. As a result, the second clamp 62 can stably hold the main body 51 (magnet nut 46).

[0161] <5. How to adjust the vacuum pump>

[0162] Next, the adjustment method of the vacuum pump 1 is described. The adjustment of the vacuum pump 1 includes balancing the rotor 3 and adjusting the vacuum pump 1 with the balanced rotor 3 housed in the frame 2. The adjustment method of the vacuum pump 1 is described in detail below.

[0163] First, in order to perform balance adjustment on the rotor 3, the rotor 3 is accommodated in the internal space of the balance adjustment frame 70. In addition, the magnet nut 46 is mounted on the magnet holder portion 16' of the balance adjustment frame 70. Thereafter, the magnet nut 46 is rotated relative to the magnet holder portion 16' to adjust the position of the third permanent magnet 41' of the balance adjustment frame 70 relative to the second permanent magnet 42 of the rotor 3. Thus, the preload applied to the rolling bearing 33' of the balance adjustment frame 70 can be adjusted. The preload applied to the rolling bearing 33' can be measured, for example, using a dynamometer mounted on the thrust nut 34' of the balance adjustment frame 70.

[0164] As described above, regarding the balance adjustment frame 70, an opening OP is provided on the upper surface of the housing 7' of the frame portion 2' in order to be close to the balance adjustment hole 43a of the rotor 3. Therefore, when adjusting the balance of the rotor 3, in order to rotate the magnet nut 46 mounted on the magnet holder portion 16', the first clamp 61 for rotating the magnet nut 46 from the upper surface 51b side of the main body portion 51 is used.

[0165] Specifically, the first clamp 61 described above is inserted into the internal space of the balance adjustment frame 70 from the opening OP at the top of the balance adjustment frame 70, and the abutting surface 611 of the first abutting portion 61b of the first clamp 61 abuts against the abutted surfaces 53a and 53b of the magnet nut 46 accommodated in the internal space of the balance adjustment frame 70. Specifically, as shown in FIG. Fig. 9 As described, each first abutting portion 61b of the first clamp 61 is inserted into the space formed between two adjacent beam portions 16b' of the balance adjustment frame 70, and the abutting surface 611 of each first abutting portion 61b is abutted against the first abutted surface 53a of one of the two adjacent protrusions 52 and the second abutted surface 53b of the other protrusion 52.

[0166] When the magnet nut 46 is held by the first clamp 61 as described above, the magnet nut 46 can be rotated relative to the magnet holder portion 16' by rotating the first holding portion 61a of the first clamp 61 around the axis in the longitudinal direction, thereby adjusting the position of the third permanent magnet 41' relative to the second permanent magnet 42 of the rotor 3.

[0167] After the position of the third permanent magnet 41' is adjusted relative to the second permanent magnet 42 of the rotor 3, the balance of the rotor 3 is adjusted. Specifically, a screw is inserted into any one of the plurality of balance adjustment holes 43a provided in the rotor 3, or a screw inserted into any balance adjustment hole 43a is removed, and the center of gravity position of the rotor 3 in the radial direction (direction perpendicular to the axis A) and the circumferential direction is adjusted so that the center of gravity position of the rotor 3 coincides with the center position of the rotor 3. In addition, the center of gravity position of the rotor 3 can be estimated based on the vibration generated when the rotor 3 is rotated around the axis A, for example.

[0168] After the balance of the rotor 3 is adjusted, the balanced rotor 3 and the magnet nut 46 are assembled into the vacuum pump 1. Specifically, the balanced rotor 3 is housed in the frame portion 2 of the vacuum pump 1, and the magnet nut 46 is mounted on the magnet holder portion 16 of the vacuum pump 1. Thereafter, the magnet nut 46 is rotated relative to the magnet holder portion 16 to adjust the position of the first permanent magnet 41 of the vacuum pump 1 relative to the second permanent magnet 42 of the rotor 3. Thus, the preload applied to the rolling bearing 33 of the vacuum pump 1 can be adjusted. The preload applied to the rolling bearing 33 can be measured, for example, using a dynamometer mounted on the thrust nut 34 of the vacuum pump 1.

[0169] As described above, in the vacuum pump 1, the upper surface of the housing 7 of the frame portion 2 is closed by the first end portion 11. Therefore, when the rotor 3 is housed in the frame portion 2 of the vacuum pump 1, the first clamp 61 cannot be used to approach the magnet nut 46. On the other hand, a first air intake port P11 is provided on the side portion 13 of the frame portion 2. From the first air intake port P11, the magnet nut 46 can be approached from the side (periphery 51c) of the main body 51. Therefore, when the balanced rotor 3 is assembled into the vacuum pump 1, in order to rotate the magnet nut 46 mounted on the magnet support portion 16, a second clamp 62 is used to rotate the magnet nut 46 from the periphery 51c of the main body 51.

[0170] Specifically, the second clamp 62 described above is inserted into the internal space of the frame 2 from the first air inlet P11 provided on the side surface 13 of the frame 2, so that the abutting surface 621 of the second abutting portion 62b of the second clamp 62 abuts against the abutted surfaces 53a and 53b of the magnet nut 46 accommodated in the internal space of the frame 2. Specifically, when using Fig.11 As described, the four protrusions 52 of the magnet nut 46 are clamped between the two second abutment portions 62b of the second clamp 62, so that the abutment surface 621 of each second abutment portion 62b abuts against the first abutted surface 53a of one of two adjacent protrusions 52 among the four clamped protrusions 52 and the second abutted surface 53b of the other protrusion 52.

[0171] In the state where the magnet nut 46 is held by the second clamp 62 as described above, the second gripping portion 62a of the second clamp 62 is moved in the horizontal direction, so that the magnet nut 46 can be rotated relative to the magnet holder portion 16, and the position of the first permanent magnet 41 relative to the second permanent magnet 42 of the rotor 3 can be adjusted. As described above, the rotor 3 and the magnet nut 46 after the balance adjustment can be assembled into the vacuum pump 1.

[0172] In the vacuum pump 1, the protrusion 52 protruding from the upper surface 51b of the main body 51 of the magnet nut 46 for adjusting the position of the first permanent magnet 41 and the third permanent magnet 41' has abutted surfaces 53a and 53b abutted by the jig for rotating the main body 51. The abutted surfaces 53a and 53b are provided on the outer periphery 51c side of the main body 51 in the protrusion 52, and can be abutted not only by the first jig 61 for rotating the main body 51 from the upper surface 51b side of the main body 51, but also by the second jig 62 for rotating the main body 51 from the side (outer periphery 51c) side of the main body 51. In this way, the magnet nut 46 can be rotated from both the upper surface side and the side side of the main body 51, so the position of the first permanent magnet 41 and the third permanent magnet 41' can be adjusted from both the upper surface side and the side side of the magnet nut 46.

[0173] For example, when the rotor 3 is housed in a balance adjustment frame 70 having an opening OP provided at the upper portion of the frame portion 2', that is, when adjusting the balance of the rotor 3, the position of the third permanent magnet 41' can be adjusted from the upper surface of the balance adjustment frame 70 by using a first clamp 61 that rotates the main body 51 from the upper surface 51b side of the main body 51.

[0174] On the other hand, when the rotor 3 is housed in the frame portion 2 of the vacuum pump 1 having the first air intake port P11 provided on the side portion 13, that is, when the rotor 3 is assembled into the vacuum pump 1, a second clamp 62 for rotating the main body 51 from the side (periphery 51c) of the main body 51 can be used to adjust the position of the first permanent magnet 41 from the side of the vacuum pump 1.

[0175] 2. Another Implementation

[0176] As mentioned above, although one embodiment of the present invention has been described, the present invention is not limited to the above embodiment, and various modifications can be made within the scope not departing from the gist of the invention.

[0177] In the above embodiment, six protrusions 52 are provided on the upper surface 51 b of the main body 51 of the magnet nut 46 , but the present invention is not limited thereto. The number of protrusions 52 may be a multiple of six, such as 12 or 18.

[0178] The number of protrusions 52 and / or the shape (number of vertices) of the polygon formed by the protrusions 52 and the abutting surfaces 53a and 53b may be arbitrary, depending on whether the beam 16b is provided in the magnet support portion 16 or the number of the beams 16b (i.e., the number of spaces formed by the beams 16b).

[0179] In the above embodiment, a plurality of (six) protrusions 52 are arranged at predetermined intervals on the upper surface 51b of the main body 51 so as to constitute a part of the polygonal shape. However, the present invention is not limited thereto, and a single protrusion 52 having an overall polygonal shape may be arranged on the upper surface 51b of the main body 51.

[0180] The first jig 61 for rotating the magnet nut 46 from the upper surface 51b side of the main body 51 is not limited to the jig 61 used for rotating the magnet nut 46 from the upper surface 51b side of the main body 51. Figure 7 and Figure 8 For example, the first clamp 61' may also have Fig.12 The structure shown. Fig.12 1 is a diagram showing a first clamp 61' according to another embodiment. The first clamp 61' includes a third gripping portion 61a' and three third contact portions 61b'.

[0181] The third gripping portion 61a' is a rod-shaped member that is long in one direction and is gripped by a user when the main body 51 is rotated by the first clamp 61'.

[0182] The three third abutting portions 61b' are respectively branches from one end of the third gripping portion 61a' in the longitudinal direction and extend along the longitudinal direction of the third gripping portion 61a'. The three third abutting portions 61b' are arranged at equal intervals relative to the circumferential direction of the third gripping portion 61a'. Each third abutting portion 61b' has an abutting surface 611'. The abutting surface 611' has a shape corresponding to the vertex portion of the protrusion 52 of the magnet nut 46. When the first clamp 61' is inserted from the upper surface 51b side of the main body 51, the abutting surface 611' abuts against the portion of the abutted surface (first abutted surface 53a, second abutted surface 53b) of a protrusion 52 of the magnet nut 46 corresponding to the vertex of the hexagon. That is, the abutting surface 611' abuts against the vertex portion of a protrusion 52.

[0183] When the magnet nut 46 mounted on the balance adjustment frame 70 is held and rotated by using the first clamp 61' having the above structure, the first clamp 61' is inserted from the upper surface 51b side of the main body 51 through the opening OP of the balance adjustment frame 70, and each third contact portion 61b' of the first clamp 61' is inserted into the space formed between two adjacent beam portions 16b'. Fig.13As shown, the contact surface 611 ′ of the third contact portion 61 b ​​′ is brought into contact with the first contacted surface 53 a and the second contacted surface 53 b existing at the top portion of one protrusion 52 . Fig.13 This is a diagram showing a state where the magnet nut 46 is held by a first clamp 61 ′ according to another embodiment.

[0184] like Fig.13 As shown, the third abutment portion 61b' of the first clamp 61' is thinner than the first abutment portion 61b of the first clamp 61 described in the first embodiment. Therefore, the third abutment portion 61b' can be further moved in the space between the two adjacent beam portions 16b'. As a result, as long as the first clamp 61' is temporarily inserted into the balance adjustment frame 70, the first clamp 61' does not need to re-hold the magnet nut 46, and the magnet nut 46 can be rotated within a wide angle range. That is, the first clamp 61' does not need to re-hold the magnet nut 46, and the position of the magnet nut 46 (that is, the position of the third permanent magnet 41') can be adjusted.

[0185] 3. Morphology

[0186] It will be understood by those skilled in the art that the exemplary embodiments described above are specific examples of the following forms.

[0187] (First form) The vacuum pump includes a rotor, a frame, a magnetic bearing and an adjustment member. The rotor is rotatable. The frame accommodates the rotor. The magnetic bearing has: a first magnet, which is arranged around a magnet support portion fixed on the frame; and a second magnet, which is radially opposite to the first magnet and arranged on the rotor. The adjustment member adjusts the position of the first magnet relative to the second magnet. The adjustment member has a main body and a protrusion. The main body has a second thread shape on the inner circumferential surface that is engaged with a first thread shape formed around the magnet support portion, and the main body moves in a direction along the rotation axis of the rotor by rotating relative to the magnet support portion, thereby adjusting the position of the first magnet relative to the second magnet. The protrusion protrudes from the upper surface of the main body. The protrusion has an abutted surface on the outer circumferential side of the main body, and the abutted surface can be abutted by a first clamp that rotates the main body from the upper surface side of the main body, and can be abutted by a second clamp that rotates the main body from the side side of the main body.

[0188] In a first form of vacuum pump, a protrusion protruding from the upper surface of a main body of an adjustment member for adjusting the position of a first magnet has an abutted surface that is abutted by a fixture that rotates the main body. The abutted surface is provided on the outer peripheral side of the main body in the protrusion, and can be abutted not only by a first fixture that rotates the main body from the upper surface side of the main body, but also by a second fixture that rotates the main body from the side side of the main body. In this way, the adjustment member can be rotated using the fixture from both the upper surface side and the side side of the main body, so the position of the first magnet can be adjusted from both the upper surface side and the side side of the adjustment member.

[0189] (Second aspect) According to the vacuum pump of the first aspect, the protrusion may have a polygonal shape when viewed from the upper surface side of the main body. In the vacuum pump of the second aspect, the adjustment member may be stably held and rotated using a jig.

[0190] (Third Form) According to the vacuum pump of the second form, a plurality of protrusions may be arranged on the upper surface of the main body. In this case, the plurality of protrusions may constitute a part of a polygonal shape. In the vacuum pump of the third form, the protrusions may be reduced and the adjustment member may be stably held and rotated using a clamp.

[0191] (Fourth aspect) According to the vacuum pump of the third aspect, each of the plurality of protrusions can be arranged at a vertex of a polygonal shape on the upper surface of the main body. In the vacuum pump of the fourth aspect, the protrusions can be reduced and the adjustment member can be stably held and rotated using a jig.

[0192] (Fifth aspect) According to the vacuum pump of the third aspect or the fourth aspect, the first clamp and the second clamp can abut against the abutted surface of any one of the plurality of protrusions and the abutted surface of a protrusion adjacent to the protrusion. In the vacuum pump of the fifth aspect, the clamp can be used to hold the adjustment member at two separate points, so that the adjustment member can be stably held and rotated.

[0193] (Sixth aspect) According to the vacuum pump of the fourth aspect, the first clamp can abut against a portion of the abutted surface of the protrusion corresponding to the vertex of the polygonal shape. In the vacuum pump of the sixth aspect, the position of the adjustment member can be adjusted in a wide range without using the first clamp to hold the adjustment member again.

[0194] (Seventh aspect) A vacuum pump according to any one of the third to sixth aspects, wherein the number of projections disposed on the upper surface of the main body may be a multiple of 6. In the seventh aspect of the vacuum pump, for example, the projections may be stably held at three locations using a first clamp, and the projections may be stably held at two locations using a second clamp.

[0195] (Eighth aspect) A method for adjusting a vacuum pump according to any one of the first to seventh aspects, comprising the following steps.

[0196] ◎A step of housing the rotor and the adjustment member in an adjustment frame having an opening provided at the top and a third magnet.

[0197] ◎ A step of inserting a first jig into the adjustment frame from the opening, bringing the first jig into contact with a contacted surface of an adjustment member housed in the adjustment frame, and rotating the adjustment member to adjust the position of the third magnet relative to the second magnet.

[0198] ◎A step of housing the rotor and the adjustment member in a frame of a vacuum pump having an air intake port formed on a side surface.

[0199] ◎The step of inserting the second jig into the frame from the air inlet, bringing the second jig into contact with the contacted surface of the adjustment member housed in the frame, and rotating the adjustment member to adjust the position of the first magnet relative to the second magnet.

[0200] In the eighth aspect of the vacuum pump adjustment method, when the rotor and the adjustment member are housed in an adjustment frame having an opening at the top, the position of the third magnet can be adjusted from the top surface of the adjustment frame using a first fixture that rotates the adjustment member from the top surface side of the main body. On the other hand, when the rotor and the adjustment member are housed in a frame of the vacuum pump having an air inlet at the side, the position of the first magnet can be adjusted from the side of the vacuum pump using a second fixture that rotates the main body from the side of the main body.

[0201] (Ninth aspect) The adjustment method according to the eighth aspect may further include a step of adjusting the balance of the rotor after the step of adjusting the position of the third magnet relative to the second magnet. In the ninth aspect of the adjustment method, the balance of the rotor may be adjusted to suppress vibration during the operation of the vacuum pump.

Claims

1. A vacuum pump, characterized in that: include: A rotor, capable of rotating; A frame portion, accommodating the rotor; A magnetic bearing having a first magnet and a second magnet, wherein the first magnet is arranged around a magnet support portion fixed to the frame portion, and the second magnet faces the first magnet in a radial direction and is arranged on the rotor; as well as an adjusting member for adjusting the position of the first magnet relative to the second magnet, Wherein, the adjusting member comprises: The main body has a second thread shape on the inner circumferential surface thereof, which is engaged with the first thread shape formed around the magnet holder, and is moved in a direction along the rotation axis of the rotor by rotating relative to the magnet holder to adjust the position of the first magnet relative to the second magnet; as well as a protrusion protruding from the upper surface of the main body, The protrusion has an abutted surface on the outer peripheral side of the main body, and the abutted surface can be abutted by a first clamp that rotates the main body from the upper surface side of the main body and can be abutted by a second clamp that rotates the main body from the side surface side of the main body.

2. The vacuum pump according to claim 1, characterized in that The protrusion has a polygonal shape when viewed from the upper surface side of the main body.

3. The vacuum pump according to claim 2, characterized in that The protrusion is arranged in plurality on the upper surface of the main body. The plurality of protrusions constitute a portion of the polygonal shape.

4. The vacuum pump according to claim 3, characterized in that Each of the plurality of protrusions is disposed at a vertex of the polygonal shape on the upper surface of the main body.

5. The vacuum pump according to claim 3, characterized in that The first clamp and the second clamp abut against a contacted surface of any one of the plurality of protrusions and a contacted surface of a protrusion adjacent to the protrusion.

6. The vacuum pump according to claim 4, characterized in that The first clamp abuts against a portion of the abutted surface of the protrusion corresponding to a vertex of the polygonal shape.

7. The vacuum pump according to claim 3, characterized in that The number of the protrusions arranged on the upper surface of the main body is a multiple of six.

8. An adjustment method, which is the adjustment method of the vacuum pump according to claim 1, characterized in that: include: The step of accommodating the rotor and the adjustment member in an adjustment frame, wherein the adjustment frame has an opening provided at an upper portion and a third magnet; Inserting a first jig into the adjustment frame from the opening, bringing the first jig into contact with the contacted surface of the adjustment member accommodated in the adjustment frame and rotating the adjustment member to adjust the position of the third magnet relative to the second magnet; The step of housing the rotor and the adjustment member in the frame portion of the vacuum pump having an air intake port formed on a side surface thereof; and The step of inserting a second jig into the frame from the air inlet, bringing the second jig into contact with the contacted surface of the adjustment member accommodated in the frame, and rotating the adjustment member to adjust the position of the first magnet relative to the second magnet.

9. The adjustment method according to claim 8, characterized in that: Also includes: After the step of adjusting the position of the third magnet relative to the second magnet, a step of adjusting the balance of the rotor is performed.

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