Inspection probe

Abstract

The purpose of the present invention is to provide an inspection probe capable of suppressing a reduction in inspection accuracy due to unpredictable resonance. The inspection probe includes a plunger connected to a ground potential, a signal pin connected to a connector signal terminal, and a ground pin connected to a connector ground terminal. The plunger has a main surface. The main surface is provided with a recess that is recessed upward. The ground pin includes a pin body located in the recess, a pin tip portion extending downward from the pin body, and a ring portion located in the recess. The pin front end portion protrudes downward from the main surface. The ring portion has an outer diameter larger than an outer diameter of the pin body when viewed in the upper direction, and is supported by a side surface of the recess. The upper end of the pin body is not in contact with the side surface of the recess.

Description

Technical Field

[0001] The present invention relates to an inspection probe which is connected to a connector to inspect an electronic device having the connector. Background Art

[0002] As an invention related to the existing inspection probe, for example, a connector measuring probe described in Patent Document 1 is known. The connector measuring probe described in Patent Document 1 is connected to the connector to be measured. The connector to be measured has a signal terminal and a ground terminal for inputting and outputting high-frequency signals. The connector measuring probe described in Patent Document 1 has a plurality of probe parts, a conductive plunger, and a ground conductor part. Each of the plurality of probe parts has a center conductor that contacts the signal terminal of the connector to be measured. The plunger has an insertion hole for inserting each of the plurality of probe parts. The front end of the center conductor is configured to be able to protrude from the main surface of the plunger toward the connector to be measured, so as to be able to contact the signal terminal of the connector to be measured. The ground conductor part is electrically connected to the plunger. The ground conductor part has a protrusion that protrudes from the main surface of the plunger toward the connector to be measured between adjacent center conductors, so as to contact the ground terminal of the connector to be measured.

[0003] In the connector measuring probe described in Patent Document 1, the ground conductor portion is sometimes used as a probe pin (see FIG. 21 ). The ground conductor portion is pressed into the plunger. The ground conductor portion elastically protrudes from the main surface of the plunger toward the connector to be measured by a coil spring inside the ground conductor portion. The ground conductor portion contacts the top surface or tapered portion of the ground terminal of the connector to be measured.

[0004] Patent Document 1: International Publication No. 2021 / 60189

[0005] If a gap is generated between the ground conductor and the plunger, the contact point between the ground conductor and the plunger cannot be determined. In addition, if a gap is generated between the ground conductor and the plunger, unpredictable stray capacitance is generated between the ground conductor and the plunger. The connector measuring probe described in Patent Document 1 measures a connector for inputting and outputting high-frequency signals, so if unpredictable stray capacitance is generated, the inspection accuracy may be reduced due to unpredictable resonance. Summary of the invention

[0006] Therefore, an object of the present invention is to provide an inspection probe capable of suppressing a decrease in inspection accuracy due to unpredictable resonance.

[0007] An inspection probe according to one aspect of the present invention is an inspection probe connected to a connector having a connector ground terminal and a connector signal terminal, and includes:

[0008] a plunger, connected to ground potential;

[0009] A signal pin connected to the connector signal terminal; and

[0010] Ground pin, connected to the ground terminal of the above connector,

[0011] The plunger has a main surface,

[0012] The main surface is provided with a recessed portion recessed upward.

[0013] The above ground pins include:

[0014] A pin body, located in the recess;

[0015] A pin front end portion extending downward from the pin body; and

[0016] The ring portion is located in the above-mentioned recessed portion,

[0017] The front end portion of the pin protrudes from the main surface toward the downward direction.

[0018] When viewed in the upward direction, the ring portion has an outer diameter larger than an outer diameter of the pin body, and the ring portion is supported by a side surface of the recessed portion.

[0019] The upper end portion of the pin body does not contact the side surface of the recessed portion.

[0020] When viewed in an upward direction, the ring portion has an outer diameter that is larger than the outer diameter of the pin body. Therefore, the mechanical strength of the ring portion is higher than that of the pin body. Therefore, the ring portion is less likely to deform than the pin body. Since the ring portion that is less likely to deform is supported on the side of the recess, it is less likely that a gap will be generated between the ring portion and the side of the recess. As a result, the generation of unpredictable stray capacitance is suppressed. Therefore, in this embodiment, the generation of unpredictable resonance can be suppressed, and the reduction in inspection accuracy can be suppressed.

[0021] According to the inspection probe according to the present invention, it is possible to suppress a decrease in inspection accuracy due to unpredictable resonance. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a front view of the inspection unit 100 .

[0023] Figure 2 It is a perspective view of the lower end portion of the coaxial cable 3a.

[0024] Figure 3 It is a cross-sectional view showing the inside of the inspection probe 1 .

[0025] Figure 4It is a cross-sectional view showing the inside of the plunger 8, the coaxial cable 3a, the coaxial cable 3b, the coaxial cable 3c, the ground pin 10a, the ground pin 10b, the ground pin 10c, and the ground pin 10d.

[0026] Figure 5 It is a plan view of the main surface S1 viewed from the upper direction.

[0027] Figure 6 It is a cross-sectional view showing the inside of the plunger 8 and the earth pin 10 a.

[0028] Figure 7 is a perspective view of the connector 200 .

[0029] Figure 8 It is a cross-sectional view of the lower portion of the inspection probe 1 and the connector 200 when the inspection probe 1 and the connector 200 are connected.

[0030] Fig. 9 It is a cross-sectional view showing a path of current flowing through the ground pin 10 c and the signal probe 9 c when the inspection probe 1 is connected to the connector 200 .

[0031] Fig.10 1 is a cross-sectional view showing an example of the ground pin 10 a including a plurality of ring portions 10 a 4 .

[0032] Description of Reference Numerals

[0033] 1…Inspection probe; 2a to 2c…Connector for external connection; 3a to 3c…Coaxial cable; 3a1…Center conductor; 3a2…External conductor; 3b1…Insulator; 3b2…Coating; 4…Casing; 5…Flange; 6, 9a33, 10a3…Spring; 7…Spacer; 8…Plunger; 9a to 9c…Signal probe; 9a1…Tube; 9a2…Socket; 9a3…Signal pin; 9a31, 10a1…Tube portion; 9a32, 10a2…Pin tip portion ; 9a4…insulating supporting member; 10a~10d…grounding pin; 10a4…ring; 100…inspection unit; 200…connector; 201a~201v…connector signal terminal; 202a~202f…connector grounding terminal; 203…connector body; 203a…protrusion; 203b…frame; 203c…connecting portion; A…first distance; B…second distance; G…recess; H1…first through hole; H3…third through hole; S1…main surface. DETAILED DESCRIPTION

[0035] Hereinafter, the inspection unit 100 according to the embodiment of the present invention will be described with reference to the drawings. Figure 1 It is a front view of the inspection unit 100 . Figure 2 It is a perspective view of the lower end portion of the coaxial cable 3a. Figure 3 1 is a cross-sectional view showing the interior of the inspection probe 1. Figure 3 , the plunger 8, the signal probe 9a, the signal probe 9b, the signal probe 9c, the ground pin 10a, the ground pin 10b, the ground pin 10c, and the ground pin 10d are simplified for illustration. Figure 4 It is a cross-sectional view showing the inside of the plunger 8, the coaxial cable 3a, the coaxial cable 3b, the coaxial cable 3c, the ground pin 10a, the ground pin 10b, the ground pin 10c, and the ground pin 10d. Figure 5 It is a plan view of the main surface S1 viewed from the upper direction. Figure 6 It is a cross-sectional view showing the inside of the plunger 8 and the earth pin 10 a. Figure 7 is a perspective view of the connector 200 . Figure 8 It is a cross-sectional view of the lower portion of the inspection probe 1 and the connector 200 when the inspection probe 1 and the connector 200 are connected. Figure 8 2 is an example of a connection structure between the inspection probe 1 and the connector 200. Figure 8 , the connection structure of the inspection probe 1 and the connector 200 is shown when the signal probe 9a and the connector signal terminal 201r, the signal probe 9b and the connector signal terminal 201t, the signal probe 9c and the connector signal terminal 201v, the grounding pin 10a and the connector grounding terminal 202a, the grounding pin 10b and the connector grounding terminal 202c, the grounding pin 10c and the connector grounding terminal 202d, and the grounding pin 10d and the connector grounding terminal 202f are respectively connected.

[0036] In this specification, directions are defined as follows. Figure 8 As shown, when the inspection probe 1 is connected to the connector 200, the direction in which the inspection probe 1 and the connector 200 are arranged in this order is defined as the downward direction. The opposite direction of the downward direction is defined as the upward direction. Figure 1 As shown, the direction in which the lower ends of the coaxial cables 3a, 3b, and 3c are arranged in this order is defined as the right direction. The opposite direction of the right direction is defined as the left direction. The right direction and the left direction are orthogonal to the lower direction and the upper direction. In addition, the direction orthogonal to the upper direction and the lower direction is defined as the front direction. The opposite direction of the front direction is defined as the rear direction. However, the lower direction, upper direction, right direction, left direction, front direction, and rear direction in this specification are directions defined for the convenience of explanation, and may be inconsistent with the lower direction, upper direction, right direction, left direction, front direction, and rear direction when the inspection probe 1 is used.

[0037] The inspection unit 100 is used to measure a high-frequency signal transmitted by a connector 200 mounted on a circuit board of an electronic device. Figure 1As shown, the inspection unit 100 includes an inspection probe 1, an external connection connector 2a, an external connection connector 2b, an external connection connector 2c, a coaxial cable 3a, a coaxial cable 3b, and a coaxial cable 3c.

[0038] The external connection connectors 2a, 2b, and 2c are connected to measuring devices (not shown), respectively. The structures of the external connection connectors 2a, 2b, and 2c are general structures, and thus description thereof is omitted.

[0039] like Figure 1 As shown, the coaxial cable 3a, the coaxial cable 3b and the coaxial cable 3c are respectively inserted into the inspection probe 1, and are inserted into each of the external connection connectors 2a, the external connection connectors 2b and the external connection connectors 2c. Thus, the coaxial cable 3a, the coaxial cable 3b and the coaxial cable 3c respectively electrically connect the inspection probe 1 with the external connection connectors 2a, the external connection connectors 2b and the external connection connectors 2c. The lower ends of the coaxial cables 3a, the coaxial cables 3b and the coaxial cables 3c are arranged in a row in this order along the right direction. In addition, the coaxial cables 3a, the coaxial cables 3b and the coaxial cables 3c have the same structure as each other. In addition, the coaxial cables 3a, the coaxial cables 3b and the coaxial cables 3c are general structures. Therefore, the structure of the coaxial cable 3a is listed for simple description, and the description of the coaxial cables 3b and the coaxial cables 3c is omitted.

[0040] The coaxial cable 3a has a cylindrical shape extending in the up-down direction. Figure 2 As shown, the coaxial cable 3a includes a central conductor 3a1, an insulator 3b1, an outer conductor 3a2, and a coating 3b2. The central conductor 3a1 is a core wire of the coaxial cable 3a. When viewed in the direction in which the coaxial cable 3a extends, the central conductor 3a1 is located at the center of the coaxial cable 3a. When viewed in the direction in which the coaxial cable 3a extends, the central conductor 3a1 has a circular shape. The central conductor 3a1 is made of a conductor having a low resistance value, such as copper.

[0041] The insulator 3b1 electrically insulates the center conductor 3a1 from the outer conductor 3a2. The insulator 3b1 surrounds the center conductor 3a1. The insulator 3b1 is located between the center conductor 3a1 and the outer conductor 3a2. When viewed in the direction in which the coaxial cable 3a extends, the insulator 3b1 has a ring shape. The insulator 3b1 is made of an insulating resin such as polyethylene, for example.

[0042] The outer conductor 3a2 surrounds the insulator 3b1. When viewed in the direction in which the coaxial cable 3a extends, the outer conductor 3a2 has a ring shape. The outer conductor 3a2 is connected to the ground potential. The outer conductor 3a2 is made, for example, by braiding thin wires. The outer conductor 3a2 is made, for example, of a conductor with a low resistance value such as copper.

[0043] The coating 3b2 surrounds the outer conductor 3a2 and has a ring shape when viewed in the direction in which the coaxial cable 3a extends. The coating 3b2 is made of an insulating resin such as polyethylene.

[0044] like Figure 1 As shown, the inspection probe 1 is connected to the lower end of the coaxial cable 3a, the lower end of the coaxial cable 3b, and the lower end of the coaxial cable 3c. Figure 3 As shown, the inspection probe 1 includes a housing 4, a flange 5, a spring 6, a spacer 7, a plunger 8, signal probes 9a, 9b, 9c, and ground pins 10a, 10b, 10c, and 10d.

[0045] The housing 4 is a cylindrical member extending in the up-down direction. The housing 4 is provided with a first through hole H1 extending in the up-down direction. The first through hole H1 penetrates from the upper end to the lower end of the housing 4. The upper end of the housing 4 is inserted into the housing 4. The lower end of the housing 4 is inserted into the upper part of the plunger 8. The coaxial cable 3a, the coaxial cable 3b, and the coaxial cable 3c pass through the first through hole H1 in the up-down direction. The housing 4 is made of a conductor such as SUS (Stainless Used Steel).

[0046] The flange 5 is a component having a plate shape. When viewed in the downward direction, the flange 5 has a rectangular shape. The flange 5 is arranged near the upper end of the shell 4. A second through hole (not shown) extending in the up-down direction is provided in the flange 5. The second through hole passes from the upper end to the lower end of the flange 5. The shell 4 passes through the second through hole in the upward direction. However, the diameter of the upper end of the shell 4 is larger than the diameter of the second through hole of the flange 5. Therefore, the shell 4 cannot pass through the second through hole in the downward direction. The flange 5 is made of a conductor such as SUS (Stainless Used Steel), for example.

[0047] The spring 6 presses the flange 5 upward. The spring 6 presses the plunger 8 downward. In more detail, the upper end of the spring 6 is fixed to the lower surface of the flange 5. The lower end of the spring 6 is fixed to the upper end of the plunger 8. Therefore, if the plunger 8 is pressed upward, the spring 6 contracts, and the plunger 8 and the housing 4 are displaced upward relative to the flange 5. That is, the flange 5, the plunger 8, and the housing 4 are elastically connected by the spring 6.

[0048] The spacer 7 is disposed between the housing 4 and the plunger 8 in the vertical direction. The spacer 7 has a disc shape. When viewed from the lower direction, a slit extending in the left-right direction is provided in the spacer 7. The coaxial cable 3a, the coaxial cable 3b, and the coaxial cable 3c pass through the slit in the vertical direction. Thus, the spacer 7 positions the coaxial cable 3a, the coaxial cable 3b, and the coaxial cable 3c in the front-back direction and the left-right direction. The spacer 7 is made of a conductor such as SUS (Stainless Used Steel), for example.

[0049] The plunger 8 is provided with three third through holes H3 extending in the up-down direction. The third through hole H3 penetrates from the upper end to the lower end of the plunger 8. Each of the coaxial cable 3a, the coaxial cable 3b, and the coaxial cable 3c is connected to each of the signal probes 9a, the signal probes 9b, and the signal probes 9c in the third through hole H3. In addition, the connection structures of the coaxial cables and the signal probes are the same. Therefore, the connection structure of the coaxial cable 3a and the signal probe 9a is listed for description, and the description of the connection structure of the coaxial cable 3b and the signal probe 9b and the connection structure of the coaxial cable 3c and the signal probe 9c are omitted.

[0050] At the lower end of the coaxial cable 3a, as Figure 4 As shown, the center conductor 3a1 is exposed from the coaxial cable 3a by removing the coating 3b2, the outer conductor 3a2 and the insulator 3b1. In addition, the outer conductor 3a2 is exposed from the coaxial cable 3a by removing the coating 3b2 above the exposed portion of the center conductor 3a1.

[0051] A high-frequency signal is applied to the signal probe 9a. The signal probe 9a has a shape extending in the up-down direction. The signal probe 9a includes a cylinder 9a1, a socket 9a2, a signal pin 9a3, and an insulating support member 9a4.

[0052] The cylinder 9a1 has a cylindrical shape having a central axis extending in the up-down direction. The upper and lower ends of the cylinder 9a1 are open. The cylinder 9a1 does not contact the center conductor 3a1. The cylinder 9a1 is not electrically connected to the center conductor 3a1. However, the inner side surface of the cylinder 9a1 contacts the outer conductor 3a2. Thus, the cylinder 9a1 is electrically connected to the outer conductor 3a2. Therefore, the cylinder 9a1 is connected to the ground potential. In addition, at the lower end of the cylinder 9a1, the outer side surface of the cylinder 9a1 contacts the plunger 8. Thus, the cylinder 9a1 is electrically connected to the plunger 8. Therefore, the plunger 8 is connected to the ground potential. In addition, in the portion other than the lower end of the cylinder 9a1, the outer side surface of the cylinder 9a1 does not contact the plunger 8 in the insulating member (not shown) located between the outer side surface of the cylinder 9a1 and the plunger 8. The cylinder 9a1 is made of a conductor such as brass, for example.

[0053] The socket 9a2 supports the center conductor 3a1. Specifically, the socket 9a2 has a cylindrical shape. The upper end of the socket 9a2 is open. The lower end of the center conductor 3a1 is inserted into the socket 9a2 from the upper end of the socket 9a2. The center conductor 3a1 is fixed to the socket 9a2 by solder (not shown). Thus, the socket 9a2 is electrically connected to the center conductor 3a1. However, the socket 9a2 is not electrically connected to the outer conductor 3a2.

[0054] The socket 9a2 is located inside the tube 9a1. Therefore, when viewed from the bottom, the socket 9a2 is surrounded by the tube 9a1. The socket 9a2 is made of a conductor such as brass.

[0055] A high frequency signal is applied to the signal pin 9a3. The signal pin 9a3 is a rod-shaped member extending in the up-down direction. More specifically, the upper end of the signal pin 9a3 is fixed to the lower end of the socket 9a2. Thus, the signal pin 9a3 is electrically connected to the socket 9a2. Therefore, the signal pin 9a3 is electrically connected to the center conductor 3a1.

[0056] The signal pin 9a3 extends downward from the socket 9a2. At least a portion of the signal pin 9a3 is located in the cylinder 9a1. However, the lower end of the signal pin 9a3 protrudes downward from the cylinder 9a1 and the plunger 8.

[0057] The signal pin 9a3 has a cylindrical portion 9a31, a pin tip portion 9a32, and a spring 9a33. The signal pin 9a3 is made of a conductor such as brass.

[0058] The barrel 9a31 has a cylindrical shape having a central axis extending in the up-down direction. The central axis of the barrel 9a31 coincides with the central axis of the barrel 9a1. The upper end of the barrel 9a31 is not open. The lower end of the barrel 9a31 is open. The barrel 9a31 has a shape in which the lower end of the barrel 9a31 is gathered, and the pin front end 9a32 is riveted.

[0059] The pin tip 9a32 is a rod-shaped member extending in the vertical direction. The upper portion of the pin tip 9a32 is located inside the barrel 9a31. The pin tip 9a32 protrudes downward from the barrel 9a31 and the plunger 8. However, the width of the upper portion of the pin tip 9a32 is greater than the width of the lower portion of the pin tip 9a32. Therefore, the pin tip 9a32 cannot pass through the opening at the lower end of the barrel 9a31 in the downward direction.

[0060] The spring 9a33 is provided in the cylinder 9a31. The upper end of the spring 9a33 contacts the inner peripheral surface of the cylinder 9a31. The lower end of the spring 9a33 contacts the upper end of the pin front end 9a32.

[0061] The spring 9a33 presses the pin tip 9a32 downward. When the pin tip 9a32 is pressed upward, the spring 9a33 contracts, and the pin tip 9a32 is displaced upward relative to the plunger 8.

[0062] When viewed in the downward direction, the insulating support member 9a4 has a ring shape surrounding the signal pin 9a3. The insulating support member 9a4 has a cylindrical shape having a central axis extending in the up-down direction. The central axis of the insulating support member 9a4 coincides with the central axis of the cylinder 9a1. The insulating support member 9a4 is arranged at the lower end of the cylinder 9a1 in the cylinder 9a1. The signal pin 9a3 extends in the up-down direction in the insulating support member 9a4. Thus, the insulating support member 9a4 is supported by the cylinder 9a1 and supports the signal pin 9a3. The insulating support member 9a4 is made of, for example, an insulating epoxy resin or the like. Thus, the signal pin 9a3 is electrically insulated from the cylinder 9a1.

[0063] like Figure 4 as well as Figure 5 As shown in FIG. 1 , the plunger 8 has a main surface S1. The main surface S1 is located at the lower end of the inspection probe 1. Figure 4 as well as Figure 6 As shown in FIG. 1 , a recess G recessed upward is provided on the main surface S1. The grounding pin 10a, the grounding pin 10b, the grounding pin 10c, and the grounding pin 10d are connected to the plunger 8 in the recess G, respectively. In addition, the grounding pin 10a, the grounding pin 10b, the grounding pin 10c, and the grounding pin 10d have the same structure as each other. In addition, the connection structure between the grounding conductor part and the plunger 8 is the same as each other. Therefore, the structure of the grounding pin 10a and the connection structure of the grounding pin 10a and the plunger 8 are listed for description, and the description of the connection structure of the grounding pin 10b and the plunger 8, the connection structure of the grounding pin 10c and the plunger 8, and the connection structure of the grounding pin 10d and the plunger 8 are omitted.

[0064] The grounding pin 10a has a shape extending in the up-down direction. A portion of the grounding pin 10a is located in the recess G. In the present embodiment, most of the grounding pin 10a is located in the recess G. Figure 6 As shown, the grounding pin 10a includes a barrel 10a1, a pin front end 10a2, a spring 10a3 and a ring 10a4. The grounding pin 10a is made of a conductor such as brass. In addition, the ring 10a4 may be integrated with the barrel 10a1 or the pin front end 10a2. However, the barrel 10a1 is not an essential component. In addition, most of the grounding pin 10a may not necessarily be located in the recess G.

[0065] The barrel 10a1 has a cylindrical shape extending in the up-down direction. In the present embodiment, the barrel 10a1 has a cylindrical shape having a central axis extending in the up-down direction. The upper end of the barrel 10a1 is not open. The lower end of the barrel 10a1 is open. The lower end of the barrel 10a1 has a gathered shape, and the front end 10a2 of the supply pin is riveted. The barrel 10a1 is in contact with the ring 10a4. The barrel 10a1 is located in the recess G. However, the upper end of the barrel 10a1 does not contact the side of the recess G. In the present embodiment, the entire barrel 10a1 does not contact the side of the recess G. The outer diameter of the barrel 10a1 is smaller than the inner diameter of the recess G. In addition, the outer diameter of the barrel 10a1 is the diameter of the outer side surface of the barrel 10a1 observed in the upward direction. The inner diameter of the recess G is the diameter of the side of the recess G observed in the upward direction. In addition, the upper end of the cylindrical portion 10a1 is located below the upper end of the recessed portion G. In addition, the cylindrical portion 10a1 does not need to have a cylindrical shape having a central axis extending in the up-down direction.

[0066] The pin tip 10a2 is a rod-shaped member extending in the vertical direction. The pin tip 10a2 extends downward from the spring 10a3. The upper portion of the pin tip 10a2 is located in the recess G. The lower end of the pin tip 10a2 is not located in the recess G. In this embodiment, the lower end of the pin tip 10a2 is chamfered. The pin tip 10a2 protrudes downward from the main surface S1 of the plunger 8. However, the upper portion of the pin tip 10a2 is located in the cylinder 10a1. In addition, the width of the upper portion of the pin tip 10a2 is larger than the width of the lower portion of the pin tip 10a2. Therefore, the pin tip 10a2 cannot pass through the opening at the lower end of the cylinder 10a1 in the downward direction. The pin tip 10a2 contacts the cylinder 10a1 and the spring 10a3. However, the pin tip 10a2 does not contact the side of the recess G. The width of the pin tip 10a2 is smaller than the inner diameter of the recess G. In addition, the lower end of the pin tip portion 10a2 does not need to be chamfered.

[0067] The spring 10a3 is disposed in the barrel 10a1. The spring 10a3 is located in the recess G. However, the upper end of the spring 10a3 does not contact the side of the recess G. In the present embodiment, the entire spring 10a3 does not contact the side of the recess G. The outer diameter of the spring 10a3 is smaller than the inner diameter of the recess G. In addition, the outer diameter of the spring 10a3 is the diameter of the spring 10a3 viewed in the upward direction. In addition, the upper end of the spring 10a3 is located below the upper end of the recess G. The upper end of the spring 10a3 contacts the inner circumferential surface of the barrel 10a1. The lower end of the spring 10a3 contacts the upper end of the pin front end 10a2.

[0068] The spring 10a3 presses the pin tip 10a2 downward. When the pin tip 10a2 is pressed upward, the spring 10a3 contracts, and the pin tip 10a2 is displaced upward relative to the plunger 8. In addition, the spring 10a3 and the upper part of the cylinder 10a1 including at least the spring 10a3 correspond to the "pin body" of the present invention. The "pin body" of the present invention may not be a spring.

[0069] The ring portion 10a4 is located in the recess G. The ring portion 10a4 has a cylindrical shape extending in the up-down direction. In the present embodiment, the ring portion 10a4 has a cylindrical shape having a central axis extending in the up-down direction. The ring portion 10a4 has an outer diameter larger than the outer diameter of the spring 10a3 and the upper portion of the barrel 10a1. The central axis of the ring portion 10a4 is consistent with the central axis of the barrel 10a1. In the present embodiment, the ring portion 10a4 is arranged near the lower end portion of the barrel 10a1. In addition, the length L1 of the ring portion 10a4 in the up-down direction is shorter than the length L2 of the spring 10a3 and the upper portion of the barrel 10a1 in the up-down direction. In addition, the ring portion 10a4 may not have a cylindrical shape having a central axis extending in the up-down direction.

[0070] The ring portion 10a4 is supported by the plunger 8. More specifically, the ring portion 10a4 is pressed into the recess G. Thus, the ring portion 10a4 is supported by the side surface of the recess G. That is, the ring portion 10a4 is in contact with the side surface of the recess G. Therefore, the ring portion 10a4 is electrically connected to the plunger 8 and connected to the ground potential. As a result, the ground pin 10a is connected to the ground potential.

[0071] In the present embodiment, the first distance A from the upper end of the ring portion 10a4 to the main surface S1 along the up-down direction is shorter than the second distance B from the upper end of the ring portion 10a4 to the upper end of the recess G along the up-down direction. In addition, when the wavelength of the high-frequency signal emitted by the measuring device is set to λ, the first distance A is longer than 0 and less than 1 / 2λ. In the case where the frequency of the high-frequency signal emitted by the measuring device is a millimeter wave of 40 GHz, the length of the wavelength λ of the high-frequency signal is about 7.5 mm. Therefore, it is preferred that the first distance A is longer than 0 and less than 3.75 mm. In addition, the first distance A from the upper end of the ring portion 10a4 to the main surface S1 along the up-down direction may be greater than the second distance B from the upper end of the ring portion 10a4 to the upper end of the recess G along the up-down direction. In addition, the first distance A may also be greater than 1 / 2λ.

[0072] In the present embodiment, the inner diameter C of the lower end of the recess G is larger than the inner diameter D of the upper end of the recess G. In addition, the inner diameter C of the lower end of the recess G is the diameter of the lower end of the side surface of the recess G viewed in the upward direction. The inner diameter D of the upper end of the recess G is the diameter of the upper end of the side surface of the recess G viewed in the upward direction. In addition, the inner diameter C of the lower end of the recess G may be equal to the inner diameter D of the upper end of the recess G.

[0073] Next, the structure of the connector 200 will be described with reference to the drawings.

[0074] like Figure 7 As shown, the connector 200 includes connector signal terminals 201 a to 201 v , connector ground terminals 202 a to 202 f , and a connector body 203 .

[0075] The connector body 203 has a rectangular shape when viewed from the bottom. The connector body 203 includes a protrusion 203a, a frame 203b, and a connection portion 203c. The protrusion 203a has a rectangular parallelepiped shape. The protrusion 203a extends in the left-right direction. The connector body 203 holds the connector signal terminals 201a to 201v and the connector ground terminals 202a to 202f. The material of the connector body 203 is, for example, a resin having insulating properties.

[0076] The frame portion 203b has a ring shape surrounding the protrusion 203a when viewed from the bottom. The frame portion 203b has a rear end and a front end extending in the left-right direction, and a left end and a right end extending in the front-back direction.

[0077] When viewed from the bottom, the connecting portion 203c is located between the protrusion 203a and the frame 203b, and connects the protrusion 203a and the frame 203b. More specifically, the connecting portion 203c connects the lower end of the protrusion 203a and the lower end of the frame 203b.

[0078] A high frequency signal is applied to each of the connector signal terminals 201a to 201v. The connector signal terminals 201a to 201k are arranged in this order along the right direction at the rear of the connector 200. The connector signal terminals 201l to 201v are arranged in this order along the right direction at the front of the connector 200.

[0079] The connector ground terminals 202a to 202f are connected to the ground potential. The connector ground terminal 202a covers a portion of the rear end portion of the frame portion 203b at the left portion of the connector 200. The connector ground terminal 202b covers a portion of the left end portion of the frame portion 203b at the left portion of the connector 200. The connector ground terminal 202c covers a portion of the front end portion of the frame portion 203b at the left portion of the connector 200. The connector ground terminal 202d covers a portion of the rear end portion of the frame portion 203b at the right portion of the connector 200. The connector ground terminal 202e covers a portion of the right end portion of the frame portion 203b at the right portion of the connector 200. The connector ground terminal 202f covers a portion of the front end portion of the frame portion 203b at the right portion of the connector 200.

[0080] When viewed from the bottom, a portion of the connector signal terminals 201 a to 201 v and a portion of the connector ground terminals 202 a to 202 f are exposed from the connector body 203 .

[0081] Next, the connection structure between the inspection probe 1 and the connector 200 will be described with reference to the drawings.

[0082] like Figure 8 As shown, the inspection probe 1 is connected to the connector 200. When the inspection probe 1 is connected to the connector 200, the inspection probe 1 is located above the connector 200. The signal pin 9a3 of the signal probe 9a protrudes downward from the main surface S1, thereby contacting the connector signal terminal 201r. Thus, the signal probe 9a (signal pin 9a3) is connected to the connector signal terminal 201r. Similarly, the signal probe 9b is connected to the connector signal terminal 201t. The signal probe 9c is connected to the connector signal terminal 201v. The pin tip 10a2 of the grounding pin 10a protrudes downward from the main surface S1, thereby contacting the connector grounding terminal 202a. Thus, the grounding pin 10a is connected to the connector grounding terminal 202a. Similarly, the grounding pin 10b is connected to the connector grounding terminal 202c. The grounding pin 10c is connected to the connector grounding terminal 202d. The grounding pin 10d is connected to the connector grounding terminal 202f.

[0083] [Effect]

[0084] According to the inspection probe 1, it is possible to suppress a decrease in inspection accuracy due to unpredictable resonance. As a comparative example, an inspection probe 50 in which the ground pin 10a does not include the ring portion 10a4 and the barrel portion 10a1 is supported on the side surface of the recess G is described. In the case of the inspection probe 50 involved in the comparative example, the barrel portion 10a1 contacts the side surface of the recess G, thereby being electrically connected to the plunger 8 and connected to the ground potential. As a result, the ground pin 10a is connected to the ground potential.

[0085] In the case of the inspection probe 50 involved in the comparative example, the outer diameter of the barrel 10a1 is the same, and a gap is likely to be generated between the barrel 10a1 and the side of the recess G. If a gap is generated between the barrel 10a1 and the side of the recess G, the contact point between the barrel 10a1 and the side of the recess G cannot be determined. In addition, if a gap is generated between the barrel 10a1 and the side of the recess G, unpredictable stray capacitance is generated between the barrel 10a1 and the side of the recess G. The measurement object of the inspection probe involved in the present invention is a connector for inputting and outputting high-frequency signals. Therefore, if unpredictable stray capacitance is generated, unpredictable resonance is likely to occur, and the inspection accuracy may be reduced.

[0086] Furthermore, since the barrel 10a1 is thin, if the barrel 10a1 contacts the side of the recess G when the barrel 10a1 is inserted into the recess G, the barrel 10a1 is easily deformed. Therefore, a gap is easily generated between the barrel 10a1 and the side of the recess G. In addition, if the barrel 10a1 is deformed, the distance between the barrel 10a1 and the side of the recess G changes, and the stray capacitance changes. Due to the change in stray capacitance, unpredictable resonance is also likely to occur, and the inspection accuracy may be reduced.

[0087] Furthermore, when the cylindrical portion 10a1 is pressed into the recessed portion G, the spring 10a3 may not function due to deformation of the cylindrical portion 10a1. In this case, the inspection accuracy may also be reduced.

[0088] On the other hand, according to the inspection probe 1 involved in this embodiment, the ground pin 10a includes a ring portion 10a4. The ring portion 10a4 has an outer diameter larger than the outer diameter of the spring 10a3 and the upper portion of the barrel 10a1. Therefore, the ring portion 10a4 is thicker than each of the barrel 10a1, the pin front end 10a2 and the spring 10a3. Therefore, the mechanical strength of the ring portion 10a4 is higher than the mechanical strength of each of the barrel 10a1, the pin front end 10a2 and the spring 10a3. Therefore, the ring portion 10a4 is less likely to deform than each of the barrel 10a1, the pin front end 10a2 and the spring 10a3. Since the ring portion 10a4 with high mechanical strength is supported on the side of the recess G, it is not easy to generate a gap between the ring portion 10a4 and the side of the recess G. Therefore, it is not easy to generate unpredictable stray capacitance and unpredictable resonance. In addition, the ring portion 10a4 with high mechanical strength is supported on the side of the recess G, so the distance between the barrel 10a1, the pin front end 10a2 and the spring 10a3 and the side of the recess G is stable, the stray capacitance is not easy to change, and unpredictable resonance is not easy to occur. In addition, the upper end of the barrel 10a1 and the upper end of the spring 10a3 do not contact the side of the recess G. Thus, it is possible to suppress the upper end of the barrel 10a1 or the upper end of the spring 10a3 from contacting the side of the recess G, which causes the grounding pin 10a to be easily bent. Therefore, according to the inspection probe 1, it is possible to suppress the reduction in inspection accuracy caused by unpredictable resonance. In addition, since the ring portion 10a4 is not easy to deform, the possibility of the spring 10a3 not functioning is also reduced. Thus, it is also possible to suppress the reduction in inspection accuracy.

[0089] In addition, according to the inspection probe 1, the reduction in inspection accuracy caused by unpredictable resonance can be further suppressed. In more detail, the outer diameter of the upper part of the cylinder 10a1 and the spring 10a3 is smaller than the inner diameter of the recess G. In addition, the upper end of the cylinder 10a1 and the upper end of the spring 10a3 are respectively located below the upper end of the recess G. Therefore, the upper part of the cylinder 10a1 and the spring 10a3 do not contact the side of the recess G. Thus, the upper part of the cylinder 10a1 and the spring 10a3 are suppressed from deforming due to contact with the side of the recess G. Therefore, the distance between each of the cylinder 10a1 and the spring 10a3 and the side of the recess G is stable, and the stray capacitance is not easy to change. As a result, according to the inspection probe 1, the reduction in inspection accuracy caused by unpredictable resonance can be further suppressed.

[0090] In addition, according to the inspection probe 1, it is possible to further suppress a decrease in inspection accuracy due to unpredictable resonance. Fig. 9 2 is a cross-sectional view showing the current path flowing through the ground pin 10c and the signal probe 9c when the inspection probe 1 is connected to the connector 200. A first distance A from the upper end of the ring portion 10a4 to the main surface S1 of the plunger 8 in the vertical direction is shorter than a second distance B from the upper end of the ring portion 10a4 to the upper end of the recess G in the vertical direction. Fig. 9 As shown, when the inspection probe 1 is connected to the connector 200, the current I flowing through the ground pin 10c and the signal probe 9c does not bypass the upper part of the ground pin 10c and flows through a shorter path. Therefore, the value of the stray capacitance generated between the ring portion 10a4 and the side surface of the recess G can be reduced. As a result, the resonance frequency can be made higher than the frequency of the high-frequency signal emitted by the measuring device. As a result, according to the inspection probe 1, the reduction in inspection accuracy caused by unpredictable resonance can be further suppressed.

[0091] In addition, according to the inspection probe 1, it is possible to further suppress the reduction of inspection accuracy caused by unpredictable resonance. In more detail, when the frequency of the high-frequency signal emitted by the measuring device is a millimeter wave of 40 GHz, the length of the wavelength λ of the high-frequency signal is about 7.5 mm. Therefore, by making the first distance A from the upper end of the ring portion 10a4 to the main surface S1 along the vertical direction longer than 0 and less than 3.75 mm, it is possible to further suppress the reduction of inspection accuracy caused by unpredictable resonance.

[0092] In addition, according to the inspection probe 1, the ground pin 10a can be smoothly inserted into the recess G. More specifically, when manufacturing the inspection probe 1, the ground pin 10a is inserted into the recess G from below the recess G. Therefore, the outer edge of the lower end of the recess G viewed in the upward direction surrounds the outer edge of the upper end of the recess G viewed in the upward direction. As a result, when the ground pin 10a is inserted into the recess G, the ground pin 10a does not contact the lower end of the recess G, and the ground pin 10a can be smoothly inserted into the recess G.

[0093] [Other embodiments]

[0094] The inspection probe according to the present invention is not limited to the inspection probe 1, and can be modified within the scope of the gist thereof.

[0095] Fig.10 1 is a cross-sectional view showing an example of a ground pin 10a including a plurality of ring portions 10a4. Fig.10 As shown, the ground pin 10a may also include a plurality of ring portions 10a4.

[0096] The present invention has the following structure.

[0097] (1) An inspection probe connected to a connector having a connector ground terminal and a connector signal terminal, comprising:

[0098] a plunger, connected to ground potential;

[0099] A signal pin connected to the connector signal terminal; and

[0100] Ground pin, connected to the ground terminal of the above connector,

[0101] The plunger has a main surface,

[0102] The main surface is provided with a recessed portion recessed upward.

[0103] The above ground pins include:

[0104] A pin body, located in the recess;

[0105] A pin front end portion extending downward from the pin body; and

[0106] The ring portion is located in the above-mentioned recessed portion,

[0107] The front end portion of the pin protrudes from the main surface toward the downward direction.

[0108] When viewed in the upward direction, the ring portion has an outer diameter larger than an outer diameter of the pin body, and the ring portion is supported by a side surface of the recessed portion.

[0109] The upper end portion of the pin body does not contact the side surface of the recessed portion.

[0110] (2) The inspection probe according to (1), wherein:

[0111] The outer diameter of the pin body is smaller than the inner diameter of the recessed portion.

[0112] An upper end of the pin body is located below an upper end of the recessed portion.

[0113] (3) The inspection probe according to (1) or (2), wherein:

[0114] A first distance from an upper end of the ring portion to the main surface in a vertical direction is shorter than a second distance from an upper end of the ring portion to an upper end of the recessed portion in the vertical direction.

[0115] (4) The inspection probe according to (3), wherein:

[0116] The first distance is longer than 0 and smaller than 3.75 mm.

[0117] (5) The inspection probe according to any one of (1) to (4), wherein:

[0118] The inner diameter of the lower end of the recessed portion is larger than the inner diameter of the upper end of the recessed portion.

[0119] (6) The inspection probe according to any one of (1) to (5), wherein:

[0120] The pin body has a barrel and a spring.

[0121] The spring is disposed in the cylindrical portion.

[0122] (7) The inspection probe according to (6), wherein:

[0123] The lower end portion of the cylindrical portion has a gathered shape and is riveted to the front end portion of the pin.

[0124] (8) The inspection probe according to any one of (1) to (7), wherein:

[0125] The lower end of the front end of the pin is chamfered.

[0126] (9) The inspection probe according to any one of (1) to (8), wherein:

[0127] A plurality of the above-mentioned ground pins are provided.

[0128] (10) The inspection probe according to any one of (1) to (9), wherein a high-frequency signal is applied to the signal pin.

Claims

1. An inspection probe connected to a connector having a connector ground terminal and a connector signal terminal, comprising: a plunger, connected to ground potential; A signal pin connected to the connector signal terminal; and Ground pin, connected to the ground terminal of the above connector, The plunger has a main surface, The main surface is provided with a recessed portion recessed upward. The above ground pins include: A pin body, located in the recess; A pin front end portion extending downward from the pin body; and The ring portion is located in the above-mentioned recessed portion, The front end portion of the pin protrudes from the main surface toward the downward direction. When viewed in the upward direction, the ring portion has an outer diameter larger than an outer diameter of the pin body, and the ring portion is supported by a side surface of the recessed portion. The upper end portion of the pin body does not contact the side surface of the recessed portion.

2. The inspection probe according to claim 1, wherein: The outer diameter of the pin body is smaller than the inner diameter of the recessed portion. An upper end of the pin body is located below an upper end of the recessed portion.

3. The inspection probe according to claim 1 or 2, wherein: A first distance from an upper end of the ring portion to the main surface in a vertical direction is shorter than a second distance from an upper end of the ring portion to an upper end of the recessed portion in the vertical direction.

4. The inspection probe according to claim 3, wherein: The first distance is longer than 0 and smaller than 3.75 mm.

5. The inspection probe according to any one of claims 1 to 4, wherein: The inner diameter of the lower end of the recessed portion is larger than the inner diameter of the upper end of the recessed portion.

6. The inspection probe according to any one of claims 1 to 5, wherein: The pin body has a barrel and a spring. The spring is disposed in the cylindrical portion.

7. The inspection probe according to claim 6, wherein: The lower end portion of the cylindrical portion has a gathered shape and is riveted to the front end portion of the pin.

8. The inspection probe according to any one of claims 1 to 7, wherein: The lower end of the front end of the pin is chamfered.

9. The inspection probe according to any one of claims 1 to 8, wherein: A plurality of the above-mentioned ground pins are provided.

10. The inspection probe according to any one of claims 1 to 9, wherein: A high frequency signal is applied to the above-mentioned signal pin.

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