Automatic probe cleaning equipment

Abstract

The invention discloses automatic probe cleaning equipment which comprises a lifting device, a connecting rod is connected to the bottom of the lifting device, a cleaning filter bag is installed at the bottom of the connecting rod, two guiding devices are arranged on the two sides of the cleaning filter bag, the guiding devices are connected with the cleaning filter bag, and the cleaning filter bag is connected with the connecting rod. A water outlet is formed above the cleaning filter bag, and the rear end of the water outlet is connected with a water outlet pipe. The lifting device is used for driving the cleaning filter bag to move up and down, oil stains and impurities on the surface of the probe can be rapidly removed through the impact force of water and the automatic up-and-down swinging function of a mechanical structure, the surface of the probe cannot be damaged, the original quality of the probe is kept, and the service life of the probe is prolonged. Compared with a traditional manual cleaning method and an ultrasonic cleaning technology, the method is more efficient and environmentally friendly, use of chemical solvents is reduced, and the influence on the environment is reduced.

Description

Technical Field

[0001] The invention relates to the field of probe cleaning equipment, and in particular to an automatic probe cleaning equipment. Background Art

[0002] During the remanufacturing process of semiconductor probes, pollutants, rust and other impurities will adhere to the probe surface. These impurities need to be cleaned before electroplating of the semiconductor probe to ensure that the workpiece surface is clean before electroplating, so that the plating layer is uniform and bright during the electroplating process, and to avoid missed plating and uneven plating, thereby improving the quality and efficiency of electroplating.

[0003] In the prior art, the probe is generally cleaned manually or ultrasonically, but manual cleaning requires the operator to stand, bend over, stretch hands, etc. for a long time, which can easily lead to physical fatigue and muscle strain. Especially when performing long-term cleaning work, the operator may experience problems such as back pain and wrist pain, which affects work efficiency and physical health. Ultrasonic cleaning uses the cavitation effect generated by high-frequency vibration to clean impurities on the surface of an object. However, if the power of the ultrasound is too large or the cleaning time is too long, it may cause damage to the probe surface. In addition, cleaning agents are required during ultrasonic cleaning, and these cleaning agents may cause certain pollution to the environment. If the discharge of the cleaning agent is not properly handled, it may cause damage to the soil, water sources, etc. Summary of the invention

[0004] In order to solve the above-mentioned problems, the present invention provides an automatic probe cleaning device, including a lifting device, a connecting rod is connected to the bottom of the lifting device, a cleaning filter bag is installed at the bottom of the connecting rod, two guide devices are arranged on both sides of the cleaning filter bag, the guide devices are connected to the cleaning filter bag, a water outlet is arranged above the cleaning filter bag, and a water outlet pipe is connected to the rear end of the water outlet.

[0005] Furthermore, the lifting device includes a rotating motor, and an eccentric wheel is installed on the driving end of the rotating motor. When the rotating motor is started, the rotating motor can drive the eccentric wheel to rotate. The eccentric wheel includes a fixed part that is dynamically connected to the rotating motor, an inertial expansion part formed along one side of the fixed part, and a connecting part formed along the other side of the fixed part. An eccentric shaft is provided on the connecting part, and the connecting rod is sleeved on the eccentric shaft.

[0006] Furthermore, a cut-off portion for reducing weight is also provided on the connecting portion.

[0007] Furthermore, the cut-off portion is an arc-shaped circular cut along the circumferential surface between the fixing portion of the eccentric wheel and the eccentric shaft, and the number of the cut-off portions is two.

[0008] Furthermore, the guide device includes a vertically arranged guide rail, a sliding seat is arranged on the guide rail, the sliding seat can slide along the guide rail, a support plate is arranged between the sliding seats, and the cleaning filter bag is arranged on the support plate.

[0009] Furthermore, a filtering platform is provided at the bottom of the cleaning filter bag, the cleaning filter bag is placed on the filtering platform, and the filtering platform is connected to a supporting plate.

[0010] Furthermore, a connecting plate is provided on the top of the guide device, and a fixing clip is arranged on the connecting plate.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] The present application utilizes a lifting device to drive the cleaning filter bag to move up and down, and utilizes the impact force of water and the automatic up and down swinging function of the mechanical structure to quickly remove oil and impurities on the probe surface without causing damage to the probe surface, thereby maintaining its original quality. Compared with traditional cleaning methods, ultrasonic cleaning technology is more environmentally friendly, reduces the use of chemical solvents, and reduces the impact on the environment.

[0013] Additional aspects and advantages of the present invention will be given in part in the description which follows, and in part will be obvious from the description which follows, or may be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0016] Figure 2 It is a structural schematic diagram of the lifting device of the present invention;

[0017] Figure 3 It is a structural schematic diagram of another eccentric wheel of the present invention;

[0018] Figure 4 It is a front schematic diagram of another eccentric wheel of the present invention;

[0019] Figure 5 It is a structural schematic diagram of the guide knot device of the present invention;

[0020] Figure 6 It is a schematic diagram of the overall structure from another angle of the present invention.

[0021] The reference numerals and names in the figures are as follows:

[0022] Lifting device 100, connecting rod 200, cleaning filter bag 300, guide device 400, rotating motor 110, eccentric wheel 120,

[0023] The fixing part 121 , the inertial expansion part 122 , the connecting part 123 , the eccentric shaft 124 , the cut-off part 125 , the guide rail 410 , the sliding seat 420 , the support plate 430 , the filtering platform 440 , the connecting plate 450 , the fixing clamp 460 , the water outlet 500 , and the water outlet pipe 510 . DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] The present invention is described in more detail. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more centered elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more centered elements therebetween.

[0026] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, vertical, horizontal" and "top, bottom" are usually based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description. Unless otherwise stated, these directional words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present invention; the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself. In the description of the present invention, it should be noted that the use of words such as "first" and "second" to define components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above words have no special meaning, and therefore cannot be understood as limiting the scope of protection of the present invention. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0027] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in this specification in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0028] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0029] The preferred embodiments of the present invention will now be further described in conjunction with the accompanying drawings. Figure 1 and Figure 6 As shown, the automatic probe cleaning equipment includes a lifting device 100, a connecting rod 200 is connected to the bottom of the lifting device 100, and a cleaning filter bag 300 is installed at the bottom of the connecting rod 200. When the lifting device 100 is started, it will drive the connecting rod 200 to move up and down, thereby driving the cleaning filter bag 300 to move up and down. Two guide devices 400 are arranged on both sides of the cleaning filter bag 300, and the guide devices 400 are connected to the cleaning filter bag 300. When the cleaning filter bag 300 moves up and down, the guide devices 400 are used to guide the movement of the cleaning filter bag 300. A water outlet 500 is arranged above the cleaning filter bag 300, and a water outlet pipe 510 is connected to the rear end of the water outlet 500.

[0030] When the present embodiment is working, the probe to be cleaned is placed in the cleaning filter bag 300, and the water outlet 500 is opened first. External clean water flows out from the water outlet 500 through the water outlet pipe 510 to flush the probe from the top of the probe. Then, the lifting device 100 is opened, and the lifting device 100 drives the cleaning filter bag 300 to move up and down. In the process of lifting and lowering the cleaning filter bag 300, the impact force of water is used in combination with the cyclic up and down swinging of the lifting device 100, so that the residue attached to the surface of the probe is peeled off by the strong impact force.

[0031] It can be seen from the above embodiments that compared with the prior art, the present application utilizes a lifting device 100 to drive the cleaning filter bag 300 to move up and down, and utilizes the impact force of water and the automatic up and down swinging function of the mechanical structure to quickly remove oil stains and impurities on the probe surface without causing damage to the probe surface, thereby maintaining its original quality. Compared with traditional cleaning methods, ultrasonic cleaning technology is more environmentally friendly, reduces the use of chemical solvents, and reduces the impact on the environment.

[0032] On the basis of the above embodiment, as Figure 2As shown, the lifting device 100 includes a rotating motor 110, and an eccentric wheel 120 is installed on the driving end of the rotating motor 110. When the rotating motor 110 is started, the rotating motor 110 can drive the eccentric wheel 120 to rotate. The eccentric wheel 120 includes a fixed part 121 that is powered and connected to the rotating motor 110, an inertial expansion part 122 formed along one side of the fixed part 121, and a connecting part 123 formed along the other side of the fixed part 121. An eccentric shaft 124 is provided on the connecting part 123, and the connecting rod 200 is sleeved on the eccentric shaft 124. In this way, when the rotating motor 110 is started, the eccentric wheel 120 is driven to rotate, thereby driving the eccentric shaft 124 to rotate eccentrically. Since the connecting rod 200 is sleeved on the eccentric shaft 124, it will drive the connecting rod 200 to move up and down.

[0033] In some implementations, such as Figure 3 As shown, a cut-out portion 125 for reducing weight is also provided on the connecting portion 123. The cut-out portion 125 can reduce the mass of the lower centerline of the eccentric wheel 120 to form a vibration reduction balance when connected to the connecting rod 200, so that the eccentric wheel 120 can drive the connecting rod 200 to rotate eccentrically, thereby driving the cleaning filter bag 300 to swing up and down, and the left and right swing caused by the eccentric rotation can be minimized. This can not only ensure the overall up and down swing output force, but also prevent the probe from being swung out of the cleaning filter bag 300 due to the left and right swing.

[0034] In some implementations, in combination Figure 3 and Figure 4 As shown, the cut-out portion 125 is an arc-shaped circular cut along the circumferential surface between the fixed portion 121 of the eccentric wheel 120 and the eccentric shaft 124. There are two cut-out portions 125, which are symmetrically distributed with the fixed portion 121 of the eccentric wheel 120 and the eccentric shaft 124 as the axis A, so as to ensure that after the connecting portion 123 is removed and cut out, the left and right weight is consistent with the fixed portion 121 of the eccentric wheel 120 and the eccentric shaft 124 as the axis, which can further reduce the left and right swing caused by the eccentric rotation.

[0035] On the basis of the above embodiment, as Figure 5 As shown, the guide device 400 includes a vertically arranged guide rail 410, on which a sliding seat 420 is arranged. The sliding seat 420 can slide along the guide rail 410, and a support plate 430 is arranged between the sliding seats 420. The cleaning filter bag 300 is arranged on the support plate 430. When the lifting device 100 drives the cleaning filter bag 300 to move up and down, it will drive the support plate 430 to move up and down synchronously along the guide rail 410, thereby guiding the movement of the cleaning filter bag 300.

[0036] In some implementations, such as Figure 6 As shown, a filter platform 440 is provided at the bottom of the cleaning filter bag 300, and the cleaning filter bag 300 is placed on the filter platform 440, and the filter platform 440 is connected to the support plate 430, so that when the water flow flushes the probe from the top of the probe, the residue is filtered twice by the cleaning filter bag 300 and the filter platform 440, and the residue can be retained on the cleaning filter bag 300 and the filter platform 440 to the maximum extent.

[0037] On the basis of the above embodiment, as Figure 6 As shown, a connecting plate 450 is provided on the top of the guide device 400, and a fixing clip 460 is arranged on the connecting plate 450. The fixing clip 460 is connected to the cleaning filter bag 300 through a metal wire (not marked in the figure), so that when the lifting device 100 drives the cleaning filter bag 300 to move up and down, the cleaning filter bag 300 can be further prevented from shaking left and right.

[0038] The details of the exemplary embodiments described above are not limited to the embodiments described above, and the invention may be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive in all respects, and the scope of the invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the invention.

Claims

1. A probe automatic cleaning device, characterized in that: The invention comprises a lifting device (100), a connecting rod (200) is connected to the bottom of the lifting device (100), a cleaning filter bag (300) is installed at the bottom of the connecting rod (200), two guide devices (400) are arranged on both sides of the cleaning filter bag (300), the guide devices (400) are connected to the cleaning filter bag (300), a water outlet (500) is arranged above the cleaning filter bag (300), and a water outlet pipe (510) is connected to the rear end of the water outlet (500).

2. The automatic probe cleaning device according to claim 1, characterized in that: The lifting device (100) comprises a rotating motor (110), an eccentric wheel (120) is installed on the driving end of the rotating motor (110), and when the rotating motor (110) is started, the rotating motor (110) can drive the eccentric wheel (120) to rotate, and the eccentric wheel (120) comprises a fixed part (121) which is connected to the rotating motor (110) by power, an inertial expansion part (122) formed along one side of the fixed part (121), and a connecting part (123) formed along the other side of the fixed part (121), an eccentric shaft (124) is arranged on the connecting part (123), and the connecting rod (200) is sleeved on the eccentric shaft (124).

3. The automatic probe cleaning device according to claim 2, characterized in that: A cut-off portion (125) for reducing weight is also provided on the connecting portion (123).

4. The automatic probe cleaning device according to claim 3, characterized in that: The cut-out portion (125) is an arc-shaped circular cut along the circumferential surface between the fixing portion (121) of the eccentric wheel (120) and the eccentric shaft (124), and the number of the cut-out portions (125) is two.

5. The automatic probe cleaning device according to claim 2, characterized in that: The guide device (400) comprises a vertically arranged guide rail (410), on which a sliding seat (420) is arranged, and the sliding seat (420) can slide along the guide rail (410), and between the sliding seats (420) there are support plates (430), and the cleaning filter bag (300) is arranged on the support plates (430).

6. The automatic probe cleaning device according to claim 5, characterized in that: A filtering platform (440) is provided at the bottom of the cleaning filter bag (300), the cleaning filter bag (300) is placed on the filtering platform (440), and the filtering platform (440) is connected to the supporting plate (430).

7. The automatic probe cleaning device according to claim 6, characterized in that: A connecting plate (450) is provided on the top of the guide device (400), and a fixing clip (460) is arranged on the connecting plate (450).

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