Ceramic substrate degreasing rack

Abstract

The invention relates to the technical field of semiconductor manufacturing, and discloses a ceramic substrate degreasing rack, which has a first direction, a second direction and a third direction which are intersected pairwise, and comprises a rack body, a plurality of placement cavities are formed in the rack body in the third direction at intervals, limiting columns are arranged at one ends, in the first direction, of the placement cavities, and door frames are arranged at the other ends of the placement cavities; the number of the supporting frames is the same as that of the placing cavities, the positions of the supporting frames correspond to those of the placing cavities, and the supporting frames are slidably connected with the support and used for bearing ceramic substrates; the locking assembly is used for rotationally connecting and limiting the door frame and the frame body; and the plurality of limiting assemblies are uniformly distributed on the supporting frame. The device has the beneficial effects that the ceramic substrate is easy to take and place, meanwhile, the position of the ceramic substrate in the placing cavity can be fixed, the ceramic substrate is prevented from colliding with a degreasing material frame when sliding, the yield of finished ceramic substrates is increased, and the production cost is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a ceramic substrate degreasing rack. Background Art

[0002] After the ceramic substrate is converted into a raw ceramic tape through the tape casting method, and then cut into pieces, hot pressed and other processes, it needs to be degreased. That is, the ceramic substrate is placed in a degreasing rack and the organic matter in the formed ceramic substrate is removed by heating or other physical methods to avoid defects in the subsequent sintering process.

[0003] The degreasing rack in the prior art is provided with a plurality of placement cavities stacked up and down. The ceramic substrate is not easy to take and place in the placement cavity, and the position of the ceramic substrate in the placement cavity is not easy to fix. In the process of transporting the degreasing rack as a whole, the ceramic substrate is easy to slip in the placement cavity and collide with the degreasing rack and be damaged, which affects the yield rate of the finished ceramic substrate and has a high production cost. Summary of the invention

[0004] The purpose of the present invention is to provide a ceramic substrate degreasing rack, which is easy to take and place the ceramic substrate. At the same time, the ceramic substrate can be fixed in the position of the placement cavity to avoid collision between the ceramic substrate and the degreasing rack when sliding, thereby improving the yield of the finished ceramic substrate and reducing production costs.

[0005] In order to achieve the above object, the present invention provides a ceramic substrate degreasing rack, which has a first direction, a second direction and a third direction intersecting in pairs, including:

[0006] The frame body is provided with a plurality of placement cavities at intervals in the third direction, the placement cavities are provided with a limiting column at one end in the first direction and a door frame at the other end, the limiting column is fixedly connected to the frame body, and the door frame is rotatably connected to the frame body;

[0007] A support frame having the same number and corresponding position as the placement cavities and being slidably connected to the bracket, the support frame being used to carry the ceramic substrate;

[0008] A locking assembly, used for limiting the rotational connection between the door frame and the frame;

[0009] A plurality of limit assemblies, evenly distributed on the support frame, for limiting the position of the ceramic substrate in the first direction and the second direction;

[0010] Wherein, the ceramic substrate is fixedly arranged on the support frame through the limiting assembly, the support frame is arranged in the placement cavity, one end of the support frame in the first direction is against the limiting column, the door frame is rotated and fixed with the frame position through the locking assembly, and the other end of the support frame in the first direction is against the door frame.

[0011] Furthermore, the support frame includes a frame body and support rods. The support rods are arranged inside the frame body along the first direction and the second direction. The limiting components are symmetrically arranged on the diagonal lines of the frame body.

[0012] Furthermore, the limit assembly includes an adjusting screw, a limit plate, two guide rods, and two first springs. The end of the adjusting screw passes through the frame and extends into the frame to be connected to the limit plate. The adjusting screw is threadedly connected to the frame. The end of the limit plate facing the adjusting screw is connected to the two guide rods, and the end of the limit plate away from the adjusting screw is abutted against the side wall of the ceramic substrate; the two guide rods are symmetrically arranged on both sides of the adjusting screw and are respectively slidably connected to the frame. The first spring is sleeved on the guide rod, and one end abuts against the limit plate, and the other end abuts against the frame. The first spring has a tendency to push the limit plate away from the frame.

[0013] Furthermore, the limiting plate is provided with a limiting groove corresponding to the shape of the ceramic substrate, the bottom surface of the limiting groove fits the bottom surface of the ceramic substrate, and the side wall of the limiting groove fits the side wall of the ceramic substrate.

[0014] Furthermore, the frame is provided with first handles at both ends in the first direction.

[0015] Furthermore, the frame is provided with second handles at both ends in the second direction.

[0016] Furthermore, the bottom of the frame is provided with supporting feet, and the top of the frame is provided with limiting holes corresponding to the positions of the supporting feet.

[0017] Furthermore, the door frame is provided with mounting holes at both ends in the third direction, and the frame is provided with insertion holes corresponding to the positions of the mounting holes. The locking assembly includes a second spring and a latch. The second spring is arranged in the mounting hole, and the latch is arranged above the second spring. One end of the second spring is against the bottom surface of the mounting hole, and the other end is against the bottom surface of the latch. The second spring has a tendency to push the latch to move upward.

[0018] Furthermore, a strip groove is formed on the side wall of the mounting hole along the first direction, the long side direction of the strip groove is the same as the third direction, and a pressure rod is provided on the latch, the pressure rod is arranged along the first direction and passes through the strip groove.

[0019] Furthermore, a reinforcing rod is provided along the diagonal line on the top of the frame.

[0020] Compared with the prior art, the ceramic substrate degreasing rack of the embodiment of the present invention has the following beneficial effects: a support frame is provided, and the support frame is slidably connected to the frame body. When the ceramic substrate needs to be placed, the support frame is moved out of the placement cavity to facilitate the placement of the ceramic substrate. Subsequently, the ceramic substrate is fixed on the support frame through a limiting assembly, and the support frame and the ceramic substrate are moved into the placement cavity as a whole, which makes it easy to take and place the ceramic substrate, thereby improving production efficiency. In addition, a limiting column and a door frame are provided. When the support frame is moved into the placement cavity as a whole, one end of the support frame in the first direction is against the limiting column, and the rotating door frame is fixed to the position of the frame body through a locking assembly. The other end of the support frame in the first direction is against the door frame to prevent the support frame from sliding out of the placement cavity. At the same time, the position of the support frame is fixed to prevent the ceramic substrate from sliding and colliding and being damaged, thereby improving the yield rate of the finished ceramic substrate and reducing the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 2 is a schematic structural diagram of a ceramic substrate degreasing rack according to an embodiment of the present invention;

[0022] Figure 2 It is a structural schematic diagram of a frame body of a ceramic substrate degreasing frame according to an embodiment of the present invention;

[0023] Figure 3 It is a schematic structural diagram of a limit assembly of a ceramic substrate degreasing rack according to an embodiment of the present invention;

[0024] Figure 4 It is a cross-sectional view of a locking assembly of a ceramic substrate degreasing rack according to an embodiment of the present invention.

[0025] In the figure, 1, frame; 11, placement cavity; 12, support foot; 13, limit hole; 14, plug hole; 15, reinforcement rod; 2, limit column; 3, door frame; 31, installation hole; 311, strip groove; 4, support frame; 41, frame; 42, support rod; 5, locking assembly; 51, second spring; 52, latch; 53, pressure rod; 6, limit assembly; 61, adjustment screw; 62, limit plate; 621, limit groove; 63, guide rod; 64, first spring; 7, first handle; 8, second handle; X, first direction; Y, second direction; Z, third direction; a, ceramic substrate. DETAILED DESCRIPTION

[0026] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or positional relationship are based on the positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred devices and elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] In the description of the present invention, it should be understood that the present invention uses the terms "first", "second", etc. to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information.

[0029] like Figures 1 to 4 As shown, a ceramic substrate degreasing rack according to a preferred embodiment of the present invention has a first direction X, a second direction Y and a third direction Z that intersect each other, and includes: a frame body 1, a support frame 4, a limiting column 2, a door frame 3, a locking assembly 5 and a plurality of limiting assemblies 6, wherein the frame body 1 is provided with a plurality of placement cavities 11 at intervals in the third direction Z, and in order to facilitate the placement of ceramic substrates, a support frame 4 is provided, the number of the support frame 4 being the same as the placement cavities 11 and the positions corresponding thereto, and the support frame 4 is slidably connected to the bracket, and the support frame 4 is used to carry the ceramic substrate, that is, when the ceramic substrate needs to be placed, the support frame 4 can be pulled out from the placement cavity 11, so as to avoid collision when the ceramic substrate is directly placed in the placement cavity 11. As shown Figure 1 As shown, a limiting column 2 is provided at one end of the placement cavity 11 in the first direction X, and a door frame 3 is provided at the other end. The limiting column 2 is fixedly connected to the frame 1, and the door frame 3 is rotatably connected to the frame 1. The door frame 3 is rotated to close or open the placement cavity 11, so that the support frame 4 can be slid out. In order to facilitate the fixing of the position of the ceramic substrate on the support frame 4 and prevent the position of the ceramic substrate from moving, a plurality of limiting components 6 are evenly distributed on the support frame 4, which are used to limit the position of the ceramic substrate in the first direction X and the second direction Y. When placing the ceramic substrate a, the door frame 3 is rotated to slide out the support frame 4, and the ceramic substrate a is fixed on the support frame 4 through the limiting component 6. In order to facilitate the fixing of the position of the support frame 4, one end of the support frame 4 in the first direction X is set against the limiting column 2, and the rotating door frame 3 is fixed to the frame 1 through the locking component 5, and the other end of the support frame 4 in the first direction X is set against the door frame 3. In this way, the position of the ceramic substrate a in each placement cavity 11 is fixed.

[0030] In some embodiments, in order to facilitate the design of the support frame 4 and to have a certain structural strength, refer to Figure 3 The support frame 4 includes a frame body 41 and support rods 42. The support rods 42 are arranged inside the frame body 41 along the first direction X and the second direction Y, which are used to provide auxiliary support for the ceramic substrate and improve the overall structural strength of the support frame 4. Since the ceramic substrate is generally circular or rectangular, in order to facilitate the upper limit of the ceramic substrate in the first direction X and the second direction Y, in this embodiment, limit assemblies 6 are symmetrically arranged on the diagonal lines of the frame body 41, and the position of the limit assemblies 6 can also be adjusted according to actual needs.

[0031] In some embodiments, the limiting assembly 6 includes an adjusting screw 61, a limiting plate 62, two guide rods 63, and two first springs 64, wherein Figure 3 The end of the adjusting screw 61 passes through the frame 41 and extends into the frame 41 to be connected with the limit plate 62. The adjusting screw 61 is threadedly connected with the frame 41. The limit plate 62 is connected with two guide rods 63 at one end facing the adjusting screw 61. When the adjusting screw 61 is rotated, one end of the limit plate 62 away from the adjusting screw 61 abuts against the side wall of the ceramic substrate. In order to facilitate the guidance of the limit plate 62 when it moves, and at the same time ensure the strength of the limit plate 62 to fix the ceramic substrate, the two guide rods 63 are symmetrically arranged on both sides of the adjusting screw 61 and are respectively slidably connected with the frame 41. The first spring 64 is sleeved on the guide rod 63, and one end abuts against the limit plate 62, and the other end abuts against the frame 41. The first spring 64 has a movement tendency to push the limit plate 62 away from the frame 41, so as to ensure that the ceramic substrate is always in a fixed state. Due to this design of the limit assembly 6, it is suitable for fixing ceramic substrates of different specifications.

[0032] Furthermore, in order to facilitate the limiting of the limiting plate 62 and the ceramic substrate, a limiting groove 621 corresponding to the shape of the ceramic substrate is provided on the limiting plate 62, the bottom surface of the limiting groove 621 fits the bottom surface of the ceramic substrate, and the side wall of the limiting groove 621 fits the side wall of the ceramic substrate. Furthermore, in order to prevent the surface of the limiting groove 621 from scratching the ceramic substrate, a felt can be fitted in the limiting groove 621, or the limiting plate 62 is made of a soft material such as rubber or silicone.

[0033] Furthermore, in order to facilitate the support frame 4 to slide out of the placement cavity 11, the frame 41 is provided with first handles 7 at both ends in the first direction X. In order to facilitate the transportation of the degreasing material rack as a whole, the frame 1 is provided with second handles 8 at both ends in the second direction Y. In some embodiments, in order to enhance the structural strength of the frame 1, reinforcing rods 15 are staggered along the diagonal at the top of the frame 1.

[0034] In some embodiments, in order to reduce the space occupied by the defatted material rack in the horizontal direction, multiple racks 1 can be stacked. Specifically, in this embodiment, a support leg 12 is provided at the bottom of the rack 1, and a limiting hole 13 corresponding to the position of the support leg 12 is provided at the top of the rack 1.

[0035] Furthermore, in order to facilitate the quick fixing of the position of the door frame 3 after the door frame 3 is rotated, in this embodiment, the door frame 3 is provided with mounting holes 31 at both ends in the third direction Z, and the frame body 1 is provided with plug holes 14 corresponding to the positions of the mounting holes 31, see Figure 4 The locking assembly 5 includes a second spring 51 and a latch 52, wherein the second spring 51 is arranged in the mounting hole 31, and the latch 52 is arranged above the second spring 51. One end of the second spring 51 is against the bottom surface of the mounting hole 31, and the other end is against the bottom surface of the latch 52. The second spring 51 has a tendency to push the latch 52 to move upward. In order to facilitate the latch 52 to automatically slide into the insertion hole 14 when it contacts the side wall of the frame 1, so as to achieve the position fixation between the door frame 3 and the frame 1, a guide slope is provided on the top of the latch 52 facing the frame 1. Furthermore, in order to facilitate the release of the locking state between the door frame 3 and the frame 1, a strip groove is provided on the side wall of the mounting hole 31 along the first direction X, and the long side direction of the strip groove is the same as the third direction Z. A pressure rod 53 is provided on the latch 52, and the pressure rod 53 is arranged along the first direction X and passes through the strip groove 311. The pressure rod 53 and the latch 52 can be welded and fixed. When the locking state between the door frame 3 and the frame body 1 needs to be released, the pressing rod 53 is pressed to compress the second spring 51, so that the latch 52 can be removed from the insertion hole 14. The overall structure is simple.

[0036] In summary, the embodiment of the present invention provides a ceramic substrate degreasing material rack, which is provided with a support frame 4, and the support frame 4 is slidably connected to the frame body 1. When the ceramic substrate needs to be placed, the support frame 4 is moved out of the placement cavity 11 to facilitate the placement of the ceramic substrate. Then, the ceramic substrate is fixed on the support frame 4 through the limit assembly 6, and the support frame 4 and the ceramic substrate are moved into the placement cavity 11 as a whole, which is easy to take and place the ceramic substrate, thereby improving production efficiency. In addition, a limit column 2 and a door frame 3 are provided. When the support frame is moved into the placement cavity 11 as a whole, one end of the support frame 4 in the first direction X is against the limit column 2, and the rotating door frame 3 is fixed to the position of the frame body 1 through the locking assembly 5. The other end of the support frame 4 in the first direction X is against the door frame 3 to prevent the support frame 4 from sliding out of the placement cavity 11. At the same time, the position of the support frame 4 is fixed to prevent the ceramic substrate from sliding and colliding and being damaged, thereby improving the yield rate of the finished ceramic substrate and reducing the production cost.

[0037] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A ceramic substrate degreasing rack, having a first direction, a second direction and a third direction intersecting each other, characterized in that: include: The frame body is provided with a plurality of placement cavities at intervals in the third direction, the placement cavities are provided with a limiting column at one end in the first direction and a door frame at the other end, the limiting column is fixedly connected to the frame body, and the door frame is rotatably connected to the frame body; A support frame having the same number and corresponding position as the placement cavities and being slidably connected to the bracket, the support frame being used to carry the ceramic substrate; A locking assembly, used for limiting the rotational connection between the door frame and the frame; A plurality of limit assemblies, evenly distributed on the support frame, for limiting the position of the ceramic substrate in the first direction and the second direction; Wherein, the ceramic substrate is fixedly arranged on the support frame through the limiting assembly, the support frame is arranged in the placement cavity, one end of the support frame in the first direction is against the limiting column, the door frame is rotated and fixed with the frame position through the locking assembly, and the other end of the support frame in the first direction is against the door frame.

2. The ceramic substrate degreasing rack according to claim 1, characterized in that: The support frame comprises a frame body and support rods. The support rods are arranged inside the frame body along the first direction and the second direction. The limiting components are symmetrically arranged on the diagonal lines of the frame body.

3. The ceramic substrate degreasing rack according to claim 2, characterized in that: The limit assembly includes an adjusting screw, a limit plate, two guide rods, and two first springs. The end of the adjusting screw passes through the frame and extends into the frame to be connected with the limit plate. The adjusting screw is threadedly connected to the frame. One end of the limit plate facing the adjusting screw is connected with the two guide rods, and one end of the limit plate away from the adjusting screw is abutted against the side wall of the ceramic substrate; the two guide rods are symmetrically arranged on both sides of the adjusting screw and are respectively slidably connected to the frame. The first spring is sleeved on the guide rod, and one end abuts against the limit plate, and the other end abuts against the frame. The first spring has a tendency to push the limit plate away from the frame.

4. The ceramic substrate degreasing rack according to claim 3, characterized in that: The limiting plate is provided with a limiting groove corresponding to the shape of the ceramic substrate, the bottom surface of the limiting groove is in contact with the bottom surface of the ceramic substrate, and the side wall of the limiting groove is in contact with the side wall of the ceramic substrate.

5. The ceramic substrate degreasing rack according to claim 2, characterized in that: The frame body is provided with first handles at two ends in the first direction.

6. The ceramic substrate degreasing rack according to claim 1, characterized in that: The frame is provided with second handles at both ends in the second direction.

7. The ceramic substrate degreasing rack according to claim 1, characterized in that: The bottom of the frame is provided with supporting feet, and the top of the frame is provided with limiting holes corresponding to the positions of the supporting feet.

8. The ceramic substrate degreasing rack according to claim 1, characterized in that: The door frame is provided with mounting holes at both ends in the third direction, and the frame is provided with insertion holes corresponding to the positions of the mounting holes. The locking assembly includes a second spring and a latch. The second spring is arranged in the mounting hole, and the latch is arranged above the second spring. One end of the second spring is against the bottom surface of the mounting hole, and the other end is against the bottom surface of the latch. The second spring has a tendency to push the latch to move upward.

9. The ceramic substrate degreasing rack according to claim 8, characterized in that: A strip groove is formed on the side wall of the mounting hole along the first direction, the long side direction of the strip groove is the same as the third direction, and a pressure rod is provided on the latch, the pressure rod is arranged along the first direction and passes through the strip groove.

10. The ceramic substrate degreasing rack according to claim 1, characterized in that: A reinforcing rod is provided along the diagonal line on the top of the frame.

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