A safety device

Abstract

The present invention discloses a safety device comprising: an overhead crane, the overhead crane at least comprising a front car body and a rear car body both having a accommodating space; a pallet having a front end and a rear end, the pallet being configured to be able to extend out or retract into the accommodating space; a first posture adjustment mechanism being configured at the front end of the pallet, the pallet at least comprising a lower baffle extending in a vertical direction to the top of the pallet; a second posture adjustment mechanism being configured at the top surface of the pallet, the pallet at least comprising two groups of clamping arms pivotally connected to the top surface of the pallet and an elastic member elastically connecting the clamping arms to the pallet; wherein, when the pallets of the front car body and the rear car extend out of the accommodating space, the lower baffle is rotated from the inner side surface of the pallet to the front end of the pallet to block the box cover, and the protrusions of the box body are gradually clamped by the two groups of clamping arms; the present invention can solve the problem that the wafer box is prone to shaking when moving with the overhead crane, which makes the wafers in the wafer box vulnerable to damage and the box cover of the wafer box vulnerable to being pushed open and falling off by the wafers.

Description

Technical Field

[0001] The invention relates to the field of wafer box transportation, and in particular to a safety device. Background Art

[0002] During the semiconductor manufacturing process, a crane is usually used to transfer wafer boxes containing wafers between different process machines. During this process, the crane uses a gripping mechanism to grab the T-shaped structure on the top of the wafer box. After the crane uses a lifting device to lift the wafer box to a predetermined height, the wafer box containing wafers can be moved to the next process machine with the crane. Since only the top of the wafer box is gripped and clamped, the crane will move inertially to the front or rear position of the crane's forward direction due to inertia when the crane is moving forward with the wafer box clamped. Not only will the wafers in the wafer box be easily damaged, but the cover door of the wafer box will be easily pushed open and fall due to the push of the wafer. In addition, the posture of the wafer box before being grabbed by the crane may be tilted left and right, which results in poor consistency in the position of the crane after grabbing the wafer box each time, which affects the placement of the wafer box and easily causes the wafer box to extend out of the crane during transportation and be hit and fall. Summary of the invention

[0003] In order to overcome the above shortcomings, the purpose of the present invention is to provide a safety device, which can solve the problem that the wafer box is prone to shaking when moving with the overhead crane, causing the wafers in the wafer box to be easily damaged and the cover of the wafer box to be easily pushed open and fall by the wafers.

[0004] In order to achieve the above objectives, the technical solution adopted by the present invention includes: an overhead crane for grabbing and transporting wafer boxes, the overhead crane at least including a front car body and a rear car body both having a storage space; a pallet having a front end and a tail end, the pallet being configured to be able to extend or retract into the storage space; a first posture adjustment mechanism, arranged at the front end of the pallet, for blocking the wafer box cover on the wafer box body, at least including a lower baffle extending to the top of the pallet in the vertical direction; a second posture adjustment mechanism, arranged on the top surface of the pallet, for clamping the protrusion of the wafer box body, at least including two groups of clamping arms pivotally connected to the top surface of the pallet and an elastic member elastically connecting the clamping arms to the pallet; wherein, when the pallets of the front car body and the rear car extend out of the storage space, the lower baffle is rotated from the inner side surface of the pallet to the front end of the pallet to block the box cover, and the protrusion of the box body is gradually clamped by the two groups of clamping arms.

[0005] In the preferred technical solution of the above-mentioned safety device, it also includes a connecting rod mechanism for pushing the pallet out of the accommodating space in an arc trajectory, and the connecting rod mechanism includes at least a first connecting rod whose two ends are respectively rotatably mounted on the front end of the pallet and in the accommodating space, and a second connecting rod whose two ends are respectively rotatably mounted on the rear end of the pallet and in the accommodating space.

[0006] In the preferred technical solution of the above-mentioned safety device, the first posture adjustment mechanism also includes a gear module, with the aid of which the lower baffle can be rotated from the inner side of the pallet to the front end of the pallet to block the box cover, the gear module includes a first gear fixedly connected to the first connecting rod, a second gear rotatably arranged at the front end of the pallet and meshing with the first gear, and the lower baffle is arranged on the second gear.

[0007] In the preferred technical solution of the above-mentioned safety device, the clamping arm at least includes a swing arm rotatably configured on the top surface of the support plate, and a pressure wheel rotatably configured vertically at the end of the top surface of the swing arm; wherein the elastic member has a first end fixed on the swing arm and a second end fixed on the support plate.

[0008] In a preferred technical solution of the above safety device, the swing arm has stepped layers arranged along the vertical direction.

[0009] In a preferred technical solution of the above safety device, when the angle between the two groups of clamping arms is at a minimum value, the ends of the two groups of clamping arms do not extend out of the inner and outer sides of the support plate.

[0010] In the preferred technical solution of the above-mentioned safety device, the positions of the second ends of the two elastic members on the support plate can be adjusted to be relatively close to each other to expand the angle formed between the two clamping arms, or can be adjusted to be relatively far away to reduce the angle formed between the two clamping arms.

[0011] In a preferred technical solution of the above safety device, it also includes a base plate fixed in the accommodating space, and the first connecting rod and the second connecting rod are both rotatably arranged on the base plate at one end away from the supporting plate.

[0012] In the preferred technical solution of the above-mentioned safety device, a first limit block is arranged at the first position of the top surface of the substrate, and a second limit block is arranged at the second position of the top surface of the substrate. When the first connecting rod and the second connecting rod drive the support plate to fully extend out of the accommodating space, the first connecting rod is blocked and limited by the first limit block. When the first connecting rod and the second connecting rod drive the support plate to fully retract into the accommodating space, the support plate is blocked and limited by the second limit block.

[0013] In a preferred technical solution of the above safety device, an optical sensor is arranged on the substrate to detect and determine whether the bottom surface of the wafer box grasped by the overhead crane is lower than or parallel to the top surface of the pallet. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of the structure of a wafer box;

[0015] Figure 2 This is a schematic diagram of the structure of the overhead crane grabbing the wafer box;

[0016] Figure 3 for Figure 2 A partial enlarged schematic diagram;

[0017] Figure 4 for Figure 3 A partial enlarged view of the middle part;

[0018] Figure 5 A front view of the first posture adjustment mechanism and the second posture adjustment mechanism extending out of the accommodation space;

[0019] Figure 6 It is a front view of the first posture adjustment mechanism and the second posture adjustment mechanism retracting into the accommodation space;

[0020] Figure 7 A top view of the first posture adjustment mechanism and the second posture adjustment mechanism extending out of the accommodation space;

[0021] Figure 8 A bottom view showing the first posture adjustment mechanism and the second posture adjustment mechanism extending out of the accommodation space;

[0022] Fig. 9 for Figure 8 A partial enlarged view of point B in the middle;

[0023] Fig.10 It is the front view of the second posture adjustment mechanism;

[0024] Fig.11 is a top view of the second posture adjustment mechanism;

[0025] Fig.12 for Fig.11 Cross-sectional view at AA in the middle. DETAILED DESCRIPTION

[0026] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0027] It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0028] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] See also Figures 1 to 12 The safety device of the present invention comprises: an overhead crane 2, used for grabbing and carrying a wafer box 1, the overhead crane 2 at least comprising a front body 21 and a rear body 22, both of which have a storage space 23; a pallet 3, having a front end 31 and a rear end 32, the pallet 3 being configured to be able to extend or retract into the storage space 23; a first posture adjustment mechanism 4, which is arranged at the front end 31 of the pallet 3, and is used to block the cover 12 of the wafer box 1 on the body 11 of the wafer box 1, and at least comprises a lower baffle 41 extending in the vertical direction to the top of the pallet 3; a second posture adjustment mechanism 4, which is arranged at the front end 31 of the pallet 3, and is used for blocking the cover 12 of the wafer box 1 on the body 11 of the wafer box 1 The posture adjustment mechanism 5 is arranged on the top surface of the pallet 3, and is used to clamp the protrusion 111 of the box body 11 of the wafer box 1, and includes at least two groups of clamping arms 51 pivotally connected to the top surface of the pallet 3 and elastic members 52 elastically connecting the clamping arms 51 to the pallet 3; wherein, when the pallet 3 of the front vehicle body 21 and the rear vehicle extends out of the accommodating space 23, the lower baffle 41 rotates from the inner side surface of the pallet 3 to the front end 31 of the pallet 3 to block the box cover 12, and the protrusion 111 of the box body 11 is gradually clamped by the two groups of clamping arms 51.

[0030] See also Figures 1 to 3 The wafer box 1 consists of a box body 11 and a box cover 12. The box body 11 is open on the side. The box cover 12 can cover the side opening of the box body 11. The box body 11 has a protrusion 111 at the lower position near the opening. The top of the box body 11 has a T-shaped structure to facilitate the overhead crane 2 to grab the wafer box 1.

[0031] See also Figures 1 to 3The overhead crane 2 includes a front car body 21 and a rear car body 22 that move synchronously, and a clamping space for the wafer box 1 to enter is formed between the front car body 21 and the rear car body 22. The overhead crane 2 is provided with a grasping mechanism 24 above the clamping space. The grasping mechanism 24 can be a liftable clamping claw. The grasping mechanism 24 can move downward to grasp the T-shaped structure on the top of the wafer box 1. After completing the grasping action, the grasping mechanism 24 moves upward to lift the wafer box 1 into the clamping space. The overhead crane 2 can walk on the walking track, thereby realizing the transportation and conveying of the grasped wafer box 1; the front car body 21 is provided with a accommodating space 23 on the side facing the rear car body 22, and the rear car body 22 is provided with a accommodating space 23 on the side facing the front car body 21, and the accommodating space 23 is relatively located at the lower position on the front car body 21 and the rear car body 22.

[0032] See also Figure 5 , Figure 6 The support plate 3 has a front end 31, a rear end 32, an inner side surface and an outer side surface. The inner side surface of the support plate 3 is a side surface of the support plate 3 close to the accommodating space 23, and the outer side surface of the support plate 3 is a side surface of the support plate 3 away from the accommodating space 23.

[0033] See also Figures 2 to 5 The two accommodating spaces 23 are both equipped with a support plate 3, a first posture adjustment mechanism 4 and a second posture adjustment mechanism 5. The first posture adjustment mechanism 4 is relatively arranged at the front end 31 of the support plate 3, and the second posture adjustment mechanism 5 is arranged on the top surface of the support plate 3. The first posture adjustment mechanism 4 at least includes a lower baffle 41 that can rotate in the direction of the front end 31 of the support plate 3 and extends to the top of the support plate 3 in the vertical direction. The second posture adjustment mechanism 5 at least includes two groups of clamping arms 51 that are pivotally connected to the top surface of the support plate 3 and an elastic member 52 that connects the clamping arms 51 to the support plate 3; when the two groups of clamping arms 51 do not clamp the protrusions 111 of the box body 11, the two groups of clamping arms 51 are in a static state under the action of the elastic member 52 and maintain a certain angle.

[0034] Specifically, when the overhead crane 2 is used to transport the wafer box 1, the overhead crane 2 is first moved to the top of the wafer box 1, and the wafer box 1 is grabbed by the grabbing mechanism 24 and enters the clamping space between the front car body 21 and the rear car body 22. The pallet 3 in the accommodating space 23 of the front car body 21 and the rear car body 22 is controlled to extend to the bottom of the wafer box 1. As the pallet 3 approaches the wafer box 1, the two groups of clamping arms 51 on the top surface of the pallet 3 can contact the protrusions 111 on the box body 11 and are stretched open by the protrusions 111. Under the action of the elastic member 52, the two groups of clamping arms 51 can gradually clamp The protrusion 111 of the wafer box 1 body 11 is tightened to achieve the correction and fixation of the position of the wafer box 1 body 11, to ensure the consistency of the position of the overhead crane 2 each time it takes and places the wafer box 1, and at the same time to avoid the problem that the wafer box 1 body 11 will be skewed and swung in the forward direction of the overhead crane 2 due to inertia when the overhead crane 2 transports the wafer box 1, to ensure the fixing effect of the wafer box 1 body 11 of the present application, while the clamping arm 51 clamps the wafer box 1 body 11, the lower baffle 41 rotates from the inner side of the support plate 3 to the front end 31 of the support plate 3, to form a blockage for the wafer box 1 cover 12.

[0035] It should be noted that, after the wafer box 1 is grasped by the grasping mechanism 24 of the overhead crane 2, if the position of the wafer box 1 in the clamping space of the overhead crane 2 is skewed to the left or right, the two sets of clamping arms 51 arranged on the pallet 3 can clamp the protrusions 111 of the box body 11 of the wafer box 1, and at the same time, realize the correction of the position of the box body 11 of the wafer box 1. When the cover 12 of the wafer box 1 is excessively deviated toward the front end 31 of the pallet 3, in the process of the lower baffle 41 rotating from the inner side surface of the pallet 3 to the front end 31 of the pallet 3, the lower baffle 41 can push the cover 12 toward the box body 11, thereby realizing further adjustment of the position of the box body 11 of the wafer box 1, further avoiding the problem that the wafer box 1 shakes during the movement of the overhead crane 2, causing the cover 12 to be pushed open and fall by the wafer, thereby ensuring the stability of the overhead crane 2 for wafer transportation.

[0036] In one or more embodiments, the grabbing mechanism 24 of the overhead travelling crane 2 further includes an upper baffle 241 .

[0037] See also Figure 2 , Figure 3 When the grabbing mechanism 24 of the crane 2 grabs the wafer box 1, the upper baffle 241 will be placed on the side of the cover 12 of the wafer box 1, thereby forming a stop for the upper position of the cover 12 of the wafer box 1. When the support plate 3 is fully extended, the support plate 3 is located below the wafer box 1 and the lower baffle 41 is located at the lower position of the side of the cover 12 of the wafer box 1. Through the coordinated use of the upper baffle 241 and the lower baffle 41, the cover 12 of the wafer box 1 will not separate from the box body 11 and will not fall off even if it is opened. Therefore, the problem of the wafers in the wafer box 1 falling and breaking during the transportation of the wafer box 1 is further avoided.

[0038] In one or more embodiments, a connecting rod mechanism 6 is further included, which is used to push the pallet 3 out of the accommodating space 23 in an arc trajectory. The connecting rod mechanism 6 includes at least a first connecting rod 61 whose two ends are respectively rotatably mounted on the front end 31 of the pallet 3 and in the accommodating space 23, and a second connecting rod 62 whose two ends are respectively rotatably mounted on the rear end 32 of the pallet 3 and in the accommodating space 23.

[0039] See also Figures 4 to 8 A driving device is disposed in the accommodation space of the front body 21 and the rear body 22. The driving device is used to drive the first connecting rod 61 or the second connecting rod 62 to rotate. The driving device may be a servo motor. The following description only takes the driving device driving the first connecting rod 61 to swing as an exemplary explanation.

[0040] See also Figures 4 to 8 Before the grasping mechanism 24 of the overhead crane 2 grasps the wafer box 1, the driving device drives the first connecting rod 61 to swing to drive the pallet 3 and the first posture adjustment mechanism 4 and the second posture adjustment mechanism 5 configured on the pallet 3 to enter the accommodating space 23, thereby avoiding the problem that the wafer box 1 collides with the pallet 3 or the first posture adjustment mechanism 4 and the second posture adjustment mechanism 5 when entering the clamping space and falls; when the wafer box 1 is grasped by the grasping mechanism 24 and enters the clamping space of the overhead crane 2, the driving device is used to control the first connecting rod 61 to swing, and under the action of the second connecting rod 62 limiting, the pallet 3 is pushed out of the accommodating space 23 in an arc-shaped swinging manner. At this time, the first posture adjustment mechanism 4 has The lower baffle 41 rotates from the inner side surface of the pallet 3 to the front end 31 of the pallet 3 to limit the cover 12 of the wafer box 1, and the two sets of clamping arms 51 of the second posture adjustment mechanism 5 gradually clamp the protrusions 111 of the box body 11 of the wafer box 1, thereby forming a stable position of the box body 11 and a stop limit for the cover 12; when it is necessary to put down the wafer box 1 grabbed by the overhead crane 2, the driving device is used to control the first connecting rod 61 to rotate in the opposite direction, so that the pallet 3 and the first posture adjustment mechanism 4 and the second posture adjustment mechanism 5 placed on the pallet 3 can completely enter the accommodating space 23, thereby preventing the pallet 3 and its first posture adjustment mechanism 4 and the second posture adjustment mechanism 5 from blocking the unloading position of the wafer box 1.

[0041] In one or more embodiments, the first posture adjustment mechanism 4 also includes a gear module, with the aid of which the lower baffle plate 41 can be rotated from the inner side of the tray 3 to the front end 31 of the tray 3 to block the box cover 12. The gear module includes a first gear 42 fixedly connected to the first connecting rod 61, and a second gear 43 rotatably configured at the front end 31 of the tray 3 and meshing with the first gear 42. The lower baffle plate 41 is configured on the second gear 43.

[0042] See also Figures 7 to 9The gear module includes a first gear 42 and a second gear 43 that mesh with each other. The first gear 42 is fixed on the first connecting rod 61, and the second gear 43 is rotatably configured at the bottom of the front end 31 of the support plate 3. The lower baffle 41 is fixed on the second gear 43 to rotate synchronously with the second gear 43.

[0043] See also Figures 7 to 9 When it is necessary to limit and stop the box body 11 and the box cover 12 of the wafer box 1 grabbed by the overhead crane 2, the driving device is used to control the first connecting rod 61 to swing. Under the action of the second connecting rod 62, the support plate 3 gradually swings out of the accommodating space 23. At the same time, when the first connecting rod 61 swings, the first gear 42 moves with the first connecting rod 61 and does not rotate. The second gear 43 moves with the support plate 3 in an arc trajectory and rotates on the first gear 42 as the axis of the first gear 42. When the second gear 43 rotates at the front end 31 of the support plate 3, the lower baffle 41 fixed to the second gear 43 is gradually moved from the inner side of the support plate 3. It rotates to the front end 31 of the support plate 3 to form a stop limit for the cover 12 of the wafer box 1. In addition, as the support plate 3 gradually extends out of the accommodating space 23 in an arc trajectory, the protrusion 111 of the box body 11 of the wafer box 1 will enter between the two groups of clamping arms 51 and be gradually clamped by the two groups of clamping arms 51; in addition, the present application uses the lower baffle 41 to block the lower position of the cover 12 of the wafer box 1 and the upper baffle 241 to block the upper position of the cover 12 of the wafer box 1. Even if the cover 12 of the wafer box 1 is in an open state, it will not fall off the box body 11, further preventing the wafers in the wafer box 1 from falling and breaking due to the lack of the cover 12 to block it.

[0044] It should be noted that when the first connecting rod 61 and the second connecting rod 62 swing to be perpendicular to the accommodating space 23, the pallet 3 driven by the first connecting rod 61 and the second connecting rod 62 is in a fully extended state, and at this time, the pallet 3 is relatively located below the wafer box 1 clamped by the overhead crane 2; through this arrangement, even if the wafer box 1 clamped by the overhead crane 2 falls as a whole, it will be received by the pallet 3 located on the front body 21 and the rear body 22, which further ensures the stability of the overhead crane 2 in transporting the wafer box 1 and the internal wafers, and has the characteristic of a high safety factor.

[0045] In one or more embodiments, the lower baffle 41 is bent to form a horizontal portion 411 and a vertical portion 412 , the first gear 42 is fixedly connected to the first connecting rod 61 by means of a first fastener 44 , and the horizontal portion 411 of the lower baffle 41 is fixedly connected to the second gear 43 by means of a second fastener 45 .

[0046] See also Figure 5The lower baffle 41 is formed by bending the plate body once, and the cross-section of the lower baffle 41 is roughly "L"-shaped. The lower baffle 41 has a horizontal portion 411 and a vertical portion 412. The horizontal portion 411 of the lower baffle 41 is fixed to the second gear 43 by a second fastener 45 and rotates synchronously with the second gear 43. The vertical portion 412 is used to form a stop for the cover 12 of the wafer box 1; it should be noted that in the vertical direction, the top end of the vertical portion 412 of the lower baffle 41 is lower than or parallel to the top surface of the accommodating space 23, so that the lower baffle 41 can smoothly enter the accommodating space 23 without interfering with the front body 21 or the rear body 22.

[0047] In order to reduce the width of the accommodating space 23, the width of the vertical portion 412 of the lower baffle plate 41 should not be designed to be too long. When the vertical portion 412 of the lower baffle plate 41 is located in the accommodating space 23, the vertical portion 412 of the lower baffle plate 41 is configured to be parallel to the inner wall of the accommodating space 23 or inclined to the inner wall of the accommodating space 23. At this time, the lower baffle plate 41 completely enters the accommodating space 23 without extending out of the accommodating space 23 to interfere with the wafer box 1. When the vertical portion 412 of the lower baffle plate 41 completely extends out of the accommodating space 23, the vertical portion 412 of the lower baffle plate 41 is 12 is configured to be relatively parallel to the wafer box 1 cover 12 or inclined relative to the wafer box 1 cover 12. At this time, the vertical part 412 of the lower baffle plate 41 does not exceed the side wall of the support plate 3 on the side of the accommodating space 23 on the side away from the accommodating space 23. Through this arrangement, it is possible to ensure that the lower baffle plate 41 stops the wafer box 1 cover 12 while allowing the lower baffle plate 41 to completely enter the accommodating space 23 without interfering with the wafer box 1 clamped by the overhead crane 2, thereby ensuring the stability of the wafer box 1 when it is vertically taken and placed by the overhead crane 2.

[0048] In addition, it should be noted that the length of the vertical portion 412 of the lower baffle 41 needs to be maximized, that is, while ensuring that the vertical portion 412 of the lower baffle 41 can smoothly enter the accommodating space 23, the vertical portion 412 of the lower baffle 41 is lengthened to ensure that the vertical portion 412 of the lower baffle 41 stops the cover 12 of the wafer box 1, thereby avoiding the problem that the vertical portion 412 of the lower baffle 41 cannot stop the cover 12 due to the error in the height direction of the overhead crane 2 grasping the wafer box 1.

[0049] In one or more embodiments, the clamping arm 51 includes at least a swing arm 511 rotatably configured on the top surface of the support plate 3, and a pressure wheel 512 vertically rotatably configured at the end of the top surface of the swing arm 511; wherein the elastic member 52 has a first end 521 fixed on the swing arm 511 and a second end 522 fixed on the support plate 3.

[0050] It should be noted that in order to avoid wasting space due to a larger turning radius when the overhead crane 2 turns, the dimensions of the front body 21 and the rear body 22 of the overhead crane 2 in the forward direction of the overhead crane 2 cannot be too large. At the same time, the front body 21 and the rear body 22 of the overhead crane 2 need to be equipped with electrical appliances and other mechanical parts, which results in a smaller clamping space for the front body 21 and the rear body 22. Therefore, while the second posture adjustment mechanism 5 stably clamps the wafer box 1, the second posture adjustment mechanism 5 needs to be miniaturized.

[0051] See Figure to Figures 4 to 6 , Figures 10 to 12 The second posture adjustment mechanism 5 is arranged on the top surface of the pallet 3 and relatively close to the tail end 32 of the pallet 3. The second posture adjustment mechanism 5 is used to clamp the protrusion 111 of the wafer box 1 near the box cover 12, thereby forming a stable clamping of the wafer box 1 body 11.

[0052] See also Figures 4 to 6 , Figures 10 to 12 The second posture adjustment mechanism 5 includes at least two groups of clamping arms 51 rotatably mounted on the base, and the two groups of clamping arms 51 are arranged on the top surface of the support plate 3 with the help of the base. Through this arrangement, it is convenient to assemble the clamping arms 51 and install the clamping arms 51 on the support plate 3. There is a certain angle between the two groups of clamping arms 51 to clamp the protrusion 111 of the box body 11 of the wafer box 1; the clamping arm 51 includes at least a swing arm 511 and a pressure wheel 512, wherein the swing arm 511 is rotatably mounted on the base with the help of a first bearing, and the pressure wheel 512 is rotatably mounted on the side of the swing arm 511 away from the base with the help of a second bearing, and the elastic member 52 has a first end 521 and a second end 522, the first end 521 is fixed on the swing arm 511, and the second end 522 is fixed on the base.

[0053] See also Figures 4 to 6 , Figures 10 to 12In the initial state, with the help of the elastic member 52, the angle between the two sets of swing arms 511 is an acute angle or an obtuse angle. When the box body 11 of the wafer box 1 is clamped, the first connecting rod 61 and the second connecting rod 62 drive the support plate 3 to extend out of the accommodating space 23 in an arc track. The pressure wheel 512 close to the protrusion 111 of the box body 11 of the wafer box 1 is squeezed and deflected toward the other pressure wheel 512. With the movement of the support plate 3, the squeezed pressure wheel 512 will roll over the protrusion 111 so that the protrusion 111 of the box body 11 is located between the two pressure wheels 512. At this time, the protrusion 111 will press the pressure wheels 512 on both sides. The wheel 512 is spread out to both sides so that there is a larger angle between the two swing arms 511, and the elastic member 52 stores elastic potential energy to clamp the protrusion 111 of the box body 11; through this arrangement, the second posture adjustment mechanism 5 can press and fix the wafer box 1 body 11 near the protrusions 111 on the side walls of the front car body 21 and the rear car body 22. When the wafer box 1 moves with the overhead crane 2, the wafer box 1 body 11 will not swing, further reducing the possibility of damage to the wafer in the wafer box 1.

[0054] In a possible implementation, the swing arm 511 has a stepped layer 5111 arranged along the vertical direction.

[0055] See also Fig.10 , the pressure wheel 512 is arranged on the step layer 5111 of the swing arm 511 in the vertical direction; through this arrangement, the position of the swing arm 511 close to one end of the wafer box 1 body 11 can be lower, so that the pressure wheel 512 placed on the step layer 5111 of the swing arm 511 has more axial length when extending upward, thereby avoiding the problem that the height position of the protrusion 111 has a large deviation in the height direction and is not clamped and pressed by the pressure wheel 512 due to the unstable height position of the overhead crane 2 clamping the wafer box 1, and has the characteristic of high clamping and pressing reliability.

[0056] In one or more embodiments, when the angle between the two groups of clamping arms 51 is at a minimum value, the ends of the two groups of clamping arms 51 do not extend out of the inner side and the outer side of the support plate 3 .

[0057] See also Figures 4 to 8In the initial state, the swing arms 511 of the two groups of clamping arms 51 have a certain angle with the help of the elastic force of the elastic member 52; in the extreme state, there is no angle between the two groups of clamping arms 51, that is, the two groups of clamping arms 51 are parallel to each other. At this time, the swing arms 511 of the clamping arms 51 at the end away from the accommodating space 23 still do not extend out of the outer side of the support plate 3. Through this arrangement, the clamping mechanism can be miniaturized while maintaining the clamping effect of the clamping mechanism on the protrusion 111 of the box body 11 of the wafer box 1, and at the same time, the clamping arm 51 can retreat with the support plate 3 into the accommodating space 23 of the front car body 21 or the rear car body 22, thereby avoiding the problem that the grasping mechanism 24 of the overhead crane 2 interferes with the clamping arm 51 when grasping the wafer box 1, thereby ensuring the stability of the wafer box 1 transportation in this application.

[0058] In one or more embodiments, the elastic member 52 is a torsion spring or an elastic steel sheet roll.

[0059] See also Fig.10 , Fig.12 A rotatable shaft is vertically arranged on the base, and the swing arm 511 is rotatably mounted on the shaft by means of a first bearing, thereby realizing the connection between the swing arm 511 and the base, and the elastic member 52 is sleeved on the shaft, and a first end 521 of the elastic member 52 is fixedly connected to the swing arm 511, and a second end 522 of the elastic member 52 is fixedly connected to the base, for example, by welding, clamping, plugging or other suitable connection methods, respectively forming a fixed connection with the swing arm 511 and the base.

[0060] In one or more embodiments, the positions of the second ends 522 of the two elastic members 52 on the support plate 3 can be adjusted to be relatively close to each other to expand the angle formed between the two clamping arms 51, or can be adjusted to be relatively far away to reduce the angle formed between the two clamping arms 51.

[0061] See also Figure 5 The swing arm 511 is mounted on the support plate 3 by means of the base, and the position of the second end 522 of the elastic member 52 on the support plate 3 is adjustable, that is, the second end 522 of the elastic member 52 is adjustable on the base.

[0062] Specifically, when the second end 522 of the elastic member 52 is fixedly connected to the base by plugging, a plurality of plug holes can be opened on the base along the length direction of the support plate 3; when it is necessary to expand the angle between the two clamping arms 51 to reduce the clamping force of the two clamping arms 51 on the protrusion 111 of the wafer box 1 body 11, the second ends 522 of the two sets of elastic members 52 can be respectively connected to two relatively small plug holes on the base; when it is necessary to reduce the angle between the two clamping arms 51 to expand the clamping force of the two clamping arms 51 on the protrusion 111 of the wafer box 1 body 11 When the clamping force is applied, the second ends 522 of the two groups of elastic members 52 can be respectively clamped in two relatively large sockets on the base; through this arrangement, the distance between the pressure wheel 512 and the side wall of the pallet 3 away from the accommodating space 23 can be adjusted to avoid the pressure wheel 512 extending out of the side wall of the pallet 3 away from the accommodating space 23, causing the pallet 3 to retreat into the accommodating space 23, and the pressure wheel 512 is at least partially located outside the accommodating space 23 and interferes with the box body 11 of the wafer box 1 picked up and transported by the overhead crane 2, further reducing the possibility of the wafer box 1 falling.

[0063] In one or more embodiments, a base plate 7 is further included which is fixed in the accommodating space 23 , and the first connecting rod 61 and the second connecting rod 62 are both rotatably disposed on the base plate 7 at one end away from the supporting plate 3 .

[0064] See also Figures 5 to 8 The base plate 7 is used to connect the first connecting rod 61 and the second connecting rod 62; the support plate 3 is installed in the accommodation space 23 of the front body 21 or the rear body 22 through the base plate 7, and has the characteristics of convenient assembly and easy replacement of parts.

[0065] In one or more embodiments, a first limit stop 81 is configured at the first position on the top surface of the substrate 7, and a second limit stop 82 is configured at the second position on the top surface of the substrate 7. When the first connecting rod 61 and the second connecting rod 62 drive the support plate 3 to fully extend out of the accommodating space 23, the first connecting rod 61 is blocked and limited by the first limit stop 81. When the first connecting rod 61 and the second connecting rod 62 drive the support plate 3 to fully retract into the accommodating space 23, the support plate 3 is blocked and limited by the second limit stop 82.

[0066] See also Figures 5 to 8 A first limit stopper 81 is configured at a first position on the top surface of the substrate 7, and a second limit stopper 82 is configured at a second position on the top surface of the substrate 7. The first limit stopper 81 is used to block the position of the first connecting rod 61 when it is fully extended out of the accommodating space 23, and the second limit stopper 82 is used to block the position of the second connecting rod 62 when it is fully retracted into the accommodating space 23.

[0067] Specifically, when the first connecting rod 61 and the second connecting rod 62 drive the support plate 3 to fully extend out of the accommodating space 23, that is, when the lower baffle plate 41 rotates from the inner side of the support plate 3 to the front end 31 of the support plate 3, the first connecting rod 61 is limited by the first limit stopper 81 on the side away from the second connecting rod 62 to prevent the lower baffle plate 41 from excessively rotating and causing a large deflection angle. At the same time, when the cover 12 of the wafer box 1 falls off the box body 11, the first limit stopper 81 can limit the rotation of the first connecting rod 61 to ensure that the lower baffle plate 41 can continue to rotate on the cover 1 2 for stopping; when the first connecting rod 61 and the second connecting rod 62 drive the support plate 3 to retreat completely into the accommodating space 23, that is, when the lower baffle 41 rotates from the front end 31 of the support plate 3 to the inner side of the support plate 3, the second connecting rod 62 is limited by the second limit stopper 82 on the side away from the first connecting rod 61, so as to avoid excessive rotation of the first connecting rod 61 and cause the lower baffle 41 to be excessively pressed against the inner side of the support plate 3, reduce the possibility of fracture at the connection between the lower baffle 41 and the second gear 43, and improve the service life of the safety device of the present application.

[0068] In one or more embodiments, an optical sensor 9 is disposed on the substrate 7 to detect whether the bottom surface of the wafer box 1 grasped by the overhead crane 2 is lower than or parallel to the top surface of the pallet 3 .

[0069] See also Figures 5 to 8 The optical sensor 9 is used to detect whether the wafer box 1 grasped by the overhead crane 2 falls. Specifically, when the wafer box 1 grasped by the overhead crane 2 does not fall, the signal emitted by the optical sensor 9 is not blocked. When the wafer box 1 grasped by the overhead crane 2 falls onto the pallet 3, the signal emitted by the optical sensor 9 is blocked by the wafer box 1. The type of the optical sensor 9 is not specifically limited.

[0070] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A safety device, characterized in that: include: An overhead crane is used to grab and carry the wafer box, and the overhead crane at least includes a front body and a rear body, both of which have a receiving space; A support plate having a front end and a rear end, wherein the support plate is configured to extend or retract into the accommodation space; A first posture adjustment mechanism is arranged at the front end of the support plate, and is used to block the wafer box cover on the wafer box body, and at least includes a lower baffle extending in the vertical direction to the top of the support plate; A second posture adjustment mechanism is disposed on the top surface of the support plate and is used to clamp the protrusion of the wafer box body, and includes at least two groups of clamping arms pivotally connected to the top surface of the support plate and an elastic member elastically connecting the clamping arms to the support plate; Among them, when the pallets of the front vehicle body and the rear vehicle extend out of the accommodating space, the lower baffle rotates from the inner side of the pallet to the front end of the pallet to block the box cover, and the protrusions of the box body are gradually clamped by the two groups of clamping arms.

2. The safety device according to claim 1, characterized in that: It also includes a connecting rod mechanism for pushing the pallet out of the accommodating space in an arc trajectory, and the connecting rod mechanism includes at least a first connecting rod with two ends respectively rotatably mounted on the front end of the pallet and in the accommodating space, and a second connecting rod with two ends respectively rotatably mounted on the rear end of the pallet and in the accommodating space.

3. The safety device according to claim 2, characterized in that: The first posture adjustment mechanism also includes a gear module, with the aid of which the lower baffle can be rotated from the inner side of the support plate to the front end of the support plate to block the box cover, the gear module includes a first gear fixedly connected to the first connecting rod, a second gear rotatably arranged at the front end of the support plate and meshing with the first gear, and the lower baffle is arranged on the second gear.

4. The safety device according to claim 1, characterized in that: The clamping arm at least includes a swing arm rotatably arranged on the top surface of the support plate, and a pressure wheel rotatably arranged at the end of the top surface of the swing arm; wherein the elastic member has a first end fixed on the swing arm and a second end fixed on the support plate.

5. The safety device according to claim 4, characterized in that: The swing arm has stepped layers arranged along the vertical direction.

6. The safety device according to claim 1 or 4, characterized in that: When the included angle between the two groups of clamping arms is at a minimum value, the ends of the two groups of clamping arms do not extend out of the inner side surface and the outer side surface of the support plate.

7. The safety device according to claim 4, characterized in that: The positions of the second ends of the two elastic members on the support plate can be adjusted to be relatively close to each other to enlarge the angle formed between the two clamping arms, or can be adjusted to be relatively far away to reduce the angle formed between the two clamping arms.

8. The safety device according to claim 2, characterized in that: It also includes a base plate fixed in the accommodating space, and the first connecting rod and the second connecting rod are both rotatably arranged on the base plate at one end away from the supporting plate.

9. The safety device according to claim 8, characterized in that: A first limit stop is configured at a first position on the top surface of the substrate, and a second limit stop is configured at a second position on the top surface of the substrate. When the first connecting rod and the second connecting rod drive the support plate to fully extend out of the accommodating space, the first connecting rod is blocked and limited by the first limit stop. When the first connecting rod and the second connecting rod drive the support plate to fully retract into the accommodating space, the support plate is blocked and limited by the second limit stop.

10. The safety device according to claim 8, characterized in that: An optical sensor is arranged on the substrate to detect and determine whether the bottom surface of the wafer box grasped by the overhead crane is lower than or parallel to the top surface of the support plate.

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