Glass substrate chemical strengthening furnace device

Abstract

The invention provides a chemical strengthening furnace device for a glass substrate. The furnace device for chemically strengthening the glass substrate comprises a bottom surface part and a side wall, the bottom surface part and the side wall define a reaction space, and the side wall extends from the edge of the bottom surface part; a plurality of heaters for supplying heat to the reaction space; and a plurality of ultrasonic generators for supplying ultrasonic waves to the reaction space, the plurality of heaters are arranged adjacent to the inside of the side wall or the side wall, and the plurality of heaters are not arranged inside the bottom surface part or on the upper and lower sides of the bottom surface part. The ultrasonic generator is disposed adjacent to the inside of the bottom surface portion or the bottom surface portion.

Description

[0001] This application is a divisional application with a filing date of November 16, 2020, application number 202011277656.X, and invention name “Glass substrate chemical strengthening furnace device”. Technical Field

[0002] The invention relates to a glass substrate chemical strengthening furnace device. Background Art

[0003] Glass products are widely used in electronic devices including display devices or building materials, etc. For example, glass products are used in substrates of flat panel display devices such as liquid crystal display (LCD), OLED (organic light-emitting diode), and electrophoretic display (EPD) or cover windows that protect them.

[0004] As display devices of portable electronic devices such as smartphones and tablet computers develop toward bendable, foldable, and rollable forms, glass products suitable for use therein are also required to have corresponding properties.

[0005] Although a transparent polyimide film (CPI, Colorless polyimide) is used in the cover window of an existing foldable display device, ultra-thin tempered glass (Ultra-thin glass) has recently attracted much attention due to its better brittleness against scratches and bidirectional foldability. Summary of the invention

[0006] The problem to be solved by the present invention is to provide a glass substrate chemical strengthening furnace device that minimizes the scattering of fine glass particles.

[0007] The problems of the present invention are not limited to the problems mentioned above, and other technical problems not mentioned can be clearly understood by those skilled in the art from the following description.

[0008] According to one embodiment, a glass substrate chemical strengthening furnace device for solving the above-mentioned problem includes: a bottom portion and a side wall, wherein the bottom portion and the side wall define a reaction space, and the side wall extends from the edge of the bottom portion; and a plurality of heaters for providing heat to the reaction space, wherein the bottom portion includes: an inclined portion located in the center; and a groove-shaped collecting portion arranged between the inclined portion and the side wall, and the upper surface of the collecting portion is sunken than the inclined portion, and the plurality of heaters include a bottom heater arranged inside the bottom portion or adjacent to the bottom portion.

[0009] The plurality of heaters may further include a side wall heater disposed inside the side wall or adjacent to the side wall.

[0010] The side wall heater may not be arranged adjacent to the collecting portion.

[0011] The glass substrate chemical strengthening furnace device may further include a discharge unit, wherein the discharge unit includes: a discharge pipe configured to discharge the substance in the reaction space to the outside; and a valve controlling the discharge pipe.

[0012] The inclined portion may include: a first inclined portion, the upper surface of which is inclined downward on one side and the other side of the first direction; and a second inclined portion, the upper surface of which is inclined downward on one side and the other side of the second direction perpendicular to the first direction.

[0013] The upper surface of the collecting portion, the side surface of the inclined portion extending from the upper surface of the collecting portion, and the inner side surface of the side wall extending from the upper surface of the collecting portion may define a groove-shaped collecting groove.

[0014] A glass substrate chemical strengthening furnace device according to another embodiment for solving the above-mentioned problem includes: a bottom portion and a side wall, wherein the bottom portion and the side wall define a reaction space, and the side wall extends from the edge of the bottom portion; a plurality of heaters for providing heat to the reaction space; and a plurality of ultrasonic generators for providing ultrasonic waves to the reaction space, wherein the plurality of heaters are arranged inside the side wall or adjacent to the side wall, and the plurality of heaters are not arranged inside the bottom portion or on the upper and lower sides of the bottom portion, and the ultrasonic generators are arranged inside the bottom portion or adjacent to the bottom portion.

[0015] According to yet another embodiment, a glass substrate chemical strengthening furnace device for solving the above-mentioned problem includes: a bottom portion and a side wall, wherein the bottom portion and the side wall define a reaction space, and the side wall extends from the edge of the bottom portion; a plurality of heaters for providing heat to the reaction space; and a porous ceramic filter configured to adsorb fine particles, wherein the plurality of heaters include a side wall heater arranged inside the side wall or adjacent to the side wall.

[0016] The porous ceramic filter may be disposed inside the reaction space.

[0017] It can be that the glass substrate chemical strengthening furnace device also includes: an external pipe that passes through the side wall; and a circulation pump that is connected to the external pipe, and one side inlet and the other side inlet of the external pipe are connected to the reaction space, and the circulation pump is configured to act as a pump from one side inlet of the external pipe toward the other side inlet of the external pipe, and the porous ceramic filter is arranged inside the external pipe.

[0018] Details of other embodiments are included in the detailed description and drawings.

[0019] (Effects of the Invention)

[0020] By using the glass substrate chemical strengthening furnace device according to one embodiment, the generation of scratches and recess defects caused by fine glass particles scattered in the glass substrate chemical strengthening furnace device can be minimized.

[0021] The effects according to the present invention are not limited to the above-exemplified contents, and more effects are included in this specification.

[0022] The effects according to the embodiment are not limited to the above-exemplified contents, and more effects are included in this specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 4 is a perspective view showing an example in which a glass product according to an embodiment is suitable for use as a cover window of a display device.

[0024] Figure 2 is a cross-sectional view showing a glass product according to an embodiment.

[0025] Figure 3 is a graph showing stress distribution of a glass product according to an embodiment.

[0026] Figure 4 This is a schematic diagram showing the ion exchange process of the chemical strengthening step.

[0027] Figure 5 FIG. 1 is a perspective view of a glass substrate chemical strengthening furnace device according to an embodiment.

[0028] Figure 6 The present invention is a schematic cross-sectional view of a glass substrate chemical strengthening furnace according to one embodiment.

[0029] Figure 7 The present invention is a perspective view of the bottom portion of a glass substrate chemical strengthening furnace according to an embodiment.

[0030] Figure 8 is a step-by-step diagram of a glass strengthening method according to an embodiment.

[0031] Fig. 9This is a schematic diagram of a cartridge used in glass strengthening.

[0032] Fig.10 This is a perspective view of a hanger used in glass strengthening.

[0033] Fig.11 This is a schematic diagram showing the steps of immersing the ultra-thin glass in a molten salt and taking it out.

[0034] Fig.12 This is a schematic diagram showing the ion exchange process of ultra-thin glass.

[0035] Fig.13 It is a schematic diagram of a glass substrate chemical strengthening furnace device according to another embodiment.

[0036] Fig.14 It is a schematic diagram of a glass substrate chemical strengthening furnace according to yet another embodiment.

[0037] Fig.15 It is a schematic diagram of a glass substrate chemical strengthening furnace according to yet another embodiment.

[0038] Fig.16 It is a schematic diagram of a glass substrate chemical strengthening furnace according to yet another embodiment.

[0039] (Explanation of Reference Numerals)

[0040] 10: Ultra-thin glass

[0041] 100: Glass substrate chemical strengthening furnace device

[0042] 200: Heater

[0043] 300: Hanger

[0044] 400: Card box DETAILED DESCRIPTION

[0045] Reference and attachment Figure 1 The advantages and features of the present invention and the methods for achieving them will become clear from the embodiments described in detail below. However, the present invention is not limited to the embodiments disclosed below, and can be implemented in various forms different from each other. This embodiment is only provided to make the disclosure of the present invention complete and to fully convey the scope of the invention to people with common knowledge in the technical field to which the present invention belongs. The present invention is only limited by the scope of the claims.

[0046] When an element or layer is referred to as being "on" another element or layer, it includes all cases where the element is directly on the other element or has another layer or element interposed therebetween. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0047] As spatially relative terms, "below", "beneath", "lower", "above", "upper", etc. can be used to easily describe the relationship between one element or constituent element and another element or constituent element as shown in the drawings. Spatially relative terms should be understood as terms that include different directions of elements when used or in action in addition to the directions shown in the drawings.

[0048] Although the terms first, second, etc. are used to describe various components, it is clear that these components are not limited to these terms. These terms are used only to distinguish one component from other components. Therefore, the first component mentioned below can obviously also be the second component within the technical concept of the present invention.

[0049] In this specification, a "glass product" refers to an object that is entirely composed of glass or partially contains glass.

[0050] Hereinafter, embodiments will be described with reference to the accompanying drawings.

[0051] Figure 1 4 is a perspective view showing an example in which a glass product according to an embodiment is suitable for use as a cover window of a display device.

[0052] Reference Figure 1 Glass is used not only in tablet computers, laptops, smart phones, e-books, televisions, and computer monitors, but also in electronic devices including display devices such as refrigerators and washing machines that include display screens, as cover windows for protecting display devices, display panel substrates, touch panel substrates, optical components such as light guides, etc. Glass can also be used for glass covers of car dashboards, glass covers for solar cells, built-in materials for building materials, windows of buildings or houses, etc.

[0053] Some glass products 10 are required to have strong strength. For example, in the case of a cover window glass product 10, in order to meet the necessary conditions of high transmittance and light weight, it is preferred to have a thin thickness and a strength that is not easily broken by external impact. The glass product 10 with enhanced strength can be manufactured by a chemical strengthening method including an ion exchange process.

[0054] Figure 1 FIG. 4 shows an example in which the glass article 10 is suitable for being a cover window of a display device 40. Figure 1 As described above, the display device 40 may include a display panel 20 , a glass product 10 disposed on the display panel 20 , and an optically transparent bonding layer 30 disposed between the display panel 20 and the glass product 10 to bond the display panel 20 and the glass product 10 .

[0055] The display device 40 according to an embodiment may be a foldable display device 40. The display panel 20 used in the foldable display device 40 may be a flexible panel at least a portion of which can be folded.

[0056] The display panel 20 not only includes self-luminous display panels such as organic light-emitting display panel (OLED), inorganic light-emitting display panel (inorganic EL), quantum dot light-emitting display panel (QED), micro LED display panel (micro-LED), nano LED display panel (nano-LED), plasma display panel (PDP), field emission display panel (FED), cathode ray display panel (CRT), etc., but also may include light-receiving display panels such as liquid crystal display panel (LCD) and electrophoretic display panel (EPD).

[0057] The display panel 20 includes a plurality of pixels, and an image can be displayed using light emitted from each pixel. The display device 40 may further include a touch component (not shown). In one embodiment, the touch component may be built into the display panel 20. For example, by directly forming a touch component on the display component of the display panel 20, the display panel 20 itself can perform a touch function. In another embodiment, the touch component may be separately manufactured relative to the display panel 20 and attached to the upper surface of the display panel 20 through an optically transparent bonding layer.

[0058] The glass article 10 is disposed above the display panel 20. The glass article 10 protects the display panel 20 above the display panel 20. The glass article 10 used as a cover window of the foldable display device 40 may be an ultra-thin tempered glass. The ultra-thin tempered glass may have a thickness of about 300 μm or less or about 100 μm or less.

[0059] An optically transparent bonding layer 30 is disposed between the display panel 20 and the glass product 10. The optically transparent bonding layer 30 serves to fix the glass product 10 on the display panel 20. The optically transparent bonding layer 30 may include an optically clear adhesive (OCA) or an optically clear resin (OCR). If the display device 40 is folded, the glass product 10 and the optically transparent bonding layer 30 may be folded into a shape corresponding to the display panel 20.

[0060] Hereinafter, the above-mentioned tempered glass product 100 will be described in more detail.

[0061] Figure 2 is a cross-sectional view of a glass article according to an embodiment.

[0062] Reference Figure 2 , the glass product 10 includes a plurality of surfaces US, RS, SS. The surface of the glass product may include a first surface US, a second surface RS, and a side surface SS. In the glass product 10 in a flat plate shape, the first surface US and the second surface RS are main surfaces (e.g., the top and the bottom) having a wide area, and the side surface SS becomes an outer side surface connecting the first surface US and the second surface RS.

[0063] The first surface US and the second surface RS face each other in the thickness t direction. When the glass article 10 functions to transmit light like a window of a display device, light may mainly enter one of the first surface US and the second surface RS and transmit the other.

[0064] The thickness t of the glass article 10 is defined as the distance between the first surface US and the second surface RS. The glass article 10 may be an ultra-thin tempered glass. The thickness t of the glass article 10 may be in the range of 10 μm to 300 μm. In one embodiment, the thickness t of the glass article 10 may be about 100 μm or less. In another embodiment, the thickness t of the glass article 10 may be about 70 μm or less. In yet another embodiment, the thickness t of the glass article 10 may be about 50 μm or less. In yet another embodiment, the thickness t of the glass article 10 may be about 30 μm or less, but is certainly not limited thereto. The glass article 10 may have a uniform thickness t, but is not limited thereto, and may also have thicknesses that are different from each other according to regions.

[0065] The strengthened glass product 10 includes compression regions CSR1, CSR2 and a tension region CTR. The compression regions CSR1, CSR2 are regions where compressive stress acts, and the tension region CTR is a region where tensile stress acts. The compression regions CSR1, CSR2 are arranged adjacent to the surfaces US, RS, SS of the glass product 10, and the tension region CTR is arranged in the inner region (or central region) of the glass product 10. The compression regions CSR1, CSR2 are arranged adjacent not only to the first surface US and the second surface RS, but also to the side surface SS. The depth (compression depth) of the compression regions CSR1, CSR2 extending from each surface US, RS, SS in the depth direction may be approximately uniform, but is not limited thereto. The tension region CTR may be surrounded by the compression regions CSR1, CSR2.

[0066] Figure 3 is a graph showing stress distribution of a glass product according to an embodiment. Figure 3 In the graph of , the x-axis represents the thickness t direction of the glass article 10. Figure 3In the formula (A), compressive stress is represented by a positive value, and tensile stress is represented by a negative value. In this specification, the magnitude of compressive / tensile stress means the magnitude of the absolute value regardless of the sign of the value.

[0067] Reference Figure 2 as well as Figure 3 The glass product 10 includes a first compression region CSR1 extending from the first surface US to a first depth (first compression depth DOC1) and a second compression region CSR2 extending from the second surface RS to a second depth (second compression depth DOC2). A tensile region CTR is disposed between the first compression depth DOC1 and the second compression depth DOC2. Figure 3 Although shown in FIG. 1 , compression and tension regions may also be configured in a similar manner between the facing sides SS of the glass article 10 .

[0068] The first compression region CSR1 and the second compression region CSR2 resist external impacts and alleviate cracks or breakage of the glass product 10. It can be understood that the greater the maximum compression stresses CS1 and CS2 of the first compression region CSR1 and the second compression region CSR2, the greater the strength of the glass product 10. External impacts are usually transmitted through the surfaces US, RS, and SS of the glass product 10, so having the maximum compression stresses CS1 and CS2 on the surfaces US, RS, and SS of the glass product 10 is advantageous in terms of durability.

[0069] The first compression depth DOC1 and the second compression depth DOC2 prevent cracks or grooves formed on the first surface US and the second surface RS from propagating to the tensile region CTR inside the glass product 10. The larger the first compression depth DOC1 and the second compression depth DOC2, the better the cracks can be prevented from propagating.

[0070] Figure 3 The graph is a stress distribution of a region that traverses the first surface US and the second surface RS in the thickness t direction. The side surface SS can produce ion exchange similar to the first surface US and the second surface RS, and thus can produce a stress distribution similar to the first compression region CSR1.

[0071] The stress accumulated in a region having a certain width in the thickness t direction in the glass product 10 can be calculated as the value of integrating the stress distribution. When the stress distribution in the glass product 10 having a thickness t is represented by a function f(x), the following relationship can be established.

[0072] [Formula 1]

[0073]

[0074] That is, in Figure 3In the stress distribution shown in , the sum of the area of ​​the region corresponding to the first compression region CSR1 and the area of ​​the region corresponding to the second compression region CSR2 is the same as the sum of the areas of the region corresponding to the tension region CTR.

[0075] The tensile stress of the tensile region CTR may be balanced with the compressive stress of the compression regions CSR1 and CSR2 across the entire glass article 10. That is, the sum of the compressive stress (i.e., compression energy) and the sum of the tensile stress (i.e., tensile energy) within the glass article 10 may be the same. Specifically, the sum of the sum of the compressive stress of the first compression region CSR1 (i.e., first compression energy) and the sum of the compressive stress of the second compression region CSR2 (i.e., second compression energy) may be the same as the sum of the tensile stress of the tensile region CTR (i.e., tensile energy).

[0076] The larger the tensile stress in the glass product 10 is, the more violently the fragments are emitted when the glass product 10 is broken, and there is a concern that the glass product 10 may break from the inside. In the case where the glass product 10 is an ultra-thin glass product with a thickness t of about 50 μm or less, the thickness of the tensile region CTR cannot be sufficiently ensured and the tensile stress may be large. Therefore, when the ultra-thin glass product 10 is broken, the fragments may be violently emitted. In an exemplary embodiment, when the ultra-thin glass product 10 is broken during the process of strengthening or during the slow cooling process after strengthening, fine glass particles may be generated as the fragments.

[0077] In some embodiments, the maximum tensile stress CT1 of the ultra-thin glass article 10 may be greater than about 100 MPa, or greater than about 150 MPa, or greater than about 200 MPa, but is not limited thereto.

[0078] The maximum tensile stress CT1 of the glass product 10 may be approximately located at the center of the thickness t direction of the glass product 10. For example, the maximum tensile stress CT1 of the glass product 10 may be located at a depth in the range of 0.4t to 0.6t or in the range of 0.45t to 0.55t, or at a depth of about 0.5t.

[0079] The first compression depth DOC1 and the second compression depth DOC2 prevent cracks or grooves formed on the first surface US and the second surface RS from propagating to the tensile region CTR inside the glass product 10. The larger the first compression depth DOC1 and the second compression depth DOC2, the better the cracks can be prevented from propagating. The location corresponding to the first compression depth DOC1 and the second compression depth DOC2 corresponds to the boundary between the compression regions CSR1, CSR2 and the tensile region CTR, and the stress value becomes 0. Figure 3 The stress profile shown can be created by an ion exchange process as a chemical strengthening step.

[0080] Figure 4 This is a schematic diagram showing the ion exchange process of the chemical strengthening step.

[0081] Reference Figure 4 The ion exchange process is a process of exchanging ions inside the glass product 10 for other ions. Through the ion exchange process, ions on the surface US, RS, SS or near the surface of the glass product 10 can be replaced or exchanged with larger ions with the same valence or oxidation state.

[0082] exist Figure 4 In the embodiment shown in FIG. 1 , an ion exchange process of exposing glass including sodium (Na) ions to potassium (K) ions is exemplified. Specifically, if the glass including sodium (Na) ions is immersed in potassium nitrate (KNO) contained in a glass substrate chemical strengthening furnace device, the glass substrate chemical strengthening furnace device is used to strengthen the glass substrate. 3 ) molten salt and the like, the sodium (Na) ions inside the glass are discharged to the outside and replaced by potassium (K) ions. The exchanged potassium (K) ions have a larger ionic radius than sodium (Na) ions, so compressive stress is generated. The more potassium (K) ions are exchanged, the greater the compressive stress becomes. Ion exchange is achieved through the surfaces US and RS of the glass, so the amount of potassium (K) ions on the surfaces US and RS of the glass can be the largest. While a portion of the exchanged potassium (K) ions diffuses into the interior of the glass, the depth of the compression regions CSR1 and CSR2, that is, the compression depths DOC1 and DOC2, can be increased, but the amount can be generally reduced the farther away from the surfaces US and RS. Therefore, the glass can have a stress distribution in which the compressive stresses CS1 and CS2 on the surfaces US and RS are the largest and decrease the further inward. However, the embodiments are not limited to the examples, and the stress distribution can be changed according to the temperature, time, number of times, presence or absence of heat treatment, etc. of the ion exchange process.

[0083] As described above, the ion exchange process in the chemical strengthening step can be realized by immersing the glass in a molten salt contained in a glass substrate chemical strengthening furnace device, etc. Hereinafter, the glass substrate chemical strengthening furnace device used in the ion exchange process will be described in detail.

[0084] Figure 5 FIG. 1 is a perspective view of a glass substrate chemical strengthening furnace device according to an embodiment. Figure 6 The present invention is a schematic cross-sectional view of a glass substrate chemical strengthening furnace according to one embodiment. Figure 7 The present invention is a perspective view of the bottom portion of a glass substrate chemical strengthening furnace according to an embodiment.

[0085] Reference Figures 5 to 7The glass substrate chemical strengthening furnace device 100 is a device for chemically strengthening glass, for example, for chemically strengthening ultra-thin glass by an ion exchange process. As an example of chemical strengthening, the ultra-thin glass is immersed in a molten salt including potassium nitrate (KNO3), but it is not limited thereto.

[0086] A salt including at least one of sodium (Na), potassium (K), rubidium (Rb), and cesium (Cs) ions is disposed inside the glass substrate chemical strengthening furnace device 100. The salt inside the glass substrate chemical strengthening furnace device 100 may be heated by the heater 200 to become a molten salt. If the ultra-thin glass is immersed in the molten salt inside the glass substrate chemical strengthening furnace device 100, an ion exchange process can be achieved and the ultra-thin glass can be chemically strengthened.

[0087] The ultra-thin glass chemically strengthened inside the glass substrate chemical strengthening furnace device 100 can have a thin thickness of less than 100 μm as described above, and has a high tensile stress due to the thin thickness. When the ultra-thin glass is broken during strengthening or during the slow cooling process after strengthening due to the high tensile stress, fine glass particles may be scattered in the glass substrate chemical strengthening furnace device 100. The fine glass particles scattered in the glass substrate chemical strengthening furnace device 100 may cause scratches and dents in other ultra-thin glasses. Therefore, in order to prevent this, a process of removing the fine glass particles generated by the breakage of the ultra-thin glass is required through a post-processing method. The glass substrate chemical strengthening furnace device 100 can minimize the scratches and dents caused by the fine glass particles scattered in the glass substrate chemical strengthening furnace device 100 by introducing a structure for recovering such fine glass particles.

[0088] The glass substrate chemical strengthening furnace device 100 may include: a bottom portion 110; a top portion 120, which is opposite to the bottom portion 110 and is disposed on one side of the third direction DR3; a side wall 130, which extends from the edge of the bottom portion 110 to one side of the third direction DR3; a discharge portion 140, which is disposed on both side regions of the other side of the side wall 130 in the third direction DR3; and a heater 200, which is disposed on the sides of the bottom portion 110 and the side wall 130. The bottom portion 110 and the side wall 130 may define a reaction space in the glass substrate chemical strengthening furnace device 100.

[0089] The bottom portion 110 constitutes the bottom surface of the glass substrate chemical strengthening furnace apparatus 100 , and may have a planar shape of a rectangle including short sides extending in the first direction DR1 and long sides extending in the second direction DR2 .

[0090] like Figure 6 as well as Figure 7As shown, the bottom surface portion 110 may include inclined portions 111 and 112 having inclined upper surfaces and a collecting portion 113 extending from the inclined portions 111 and 112 toward the side wall 130 .

[0091] The inclined portions 111 and 112 may include a first inclined portion 111 that is inclined downward at an angle of θ° from a line area connecting the midpoints of the short sides toward the first direction DR1 (i.e., inclined downward) and a second inclined portion 112 that is inclined downward at an angle of θ° from a line area connecting the midpoints of the long sides toward the second direction DR2 (i.e., inclined downward). In one embodiment, the angle (θ) of the upper inclination may be about 45° or less. In another embodiment, the angle (θ) of the upper inclination may be about 30° or less. In yet another embodiment, the angle (θ) of the upper inclination may be about 20° or less. In yet another embodiment, the angle (θ) of the upper inclination may be about 10° or less, but is certainly not limited thereto. The angle (θ) of the upper inclination may be uniform, but is not limited thereto, and may have different angles (θ) from each other according to the region.

[0092] The first inclined portion 111 may include a region 111a and a region 111b sloping downward in the first direction DR1 and the second inclined portion 112 may include a region 112a and a region 112b sloping downward in the second direction DR2 and the second inclined portion 112a sloping downward in the second direction DR2 and the second inclined portion 112b sloping downward in the second direction DR2.

[0093] A V-shaped valley defined by the upper surface of the first inclined portion 111 and the upper surface of the second inclined portion 112 may be formed in the area where the first inclined portion 111 and the second inclined portion 112 meet. The V-shaped valley may be inclined downward toward the collecting portion 113 along the intersection of the first inclined portion 111 and the second inclined portion 112. The collecting portion 113 may be disposed at the outer end of the V-shaped valley. The fine glass particles 12 generated in the chemical strengthening process may be guided toward the collecting portion 113 along the V-shaped valley after descending toward the bottom portion 110 due to specific gravity.

[0094] The collecting portion 113 may be disposed between the inclined portions 111 and 112 of the bottom portion 110 and the side wall 130. The upper surface of the collecting portion 113 and the upper surfaces of the inclined portions 111 and 112 are discontinuously disposed, so that the collecting portion 113 and the inclined portions 111 and 112 may have a certain step difference. The heater 200 may not be disposed inside the collecting portion 113 or on the upper and lower sides of the collecting portion 113.

[0095] The collecting groove 115 may be defined by the upper surface of the collecting portion 113, the side surfaces of the inclined portions 111 and 112 extending from the upper surface of the collecting portion 113 toward the third direction DR3, and the inner surface of the side wall 130 extending from the upper surface of the collecting portion 113 toward the third direction DR3. The fine glass particles 12 guided along the inclination of the bottom portion 110 may be collected in the collecting groove 115. The height of the collecting groove 115 may be the same as the step difference between the collecting portion 113 and the inclined portions 111 and 112. In one embodiment, the height of the collecting groove 115 may be about 0.2 times or less of the height of the side wall 130. In another embodiment, the height of the collecting groove 115 may be about 0.15 times or less of the height of the side wall 130. In yet another embodiment, the height of the collecting groove 115 may be about 0.1 times or less of the height of the side wall 130. In yet another embodiment, the height of the collecting groove 115 may be about 0.05 times or less of the height of the side wall 130, but is not limited thereto.

[0096] A heater 200 for generating heat required for heat treatment may be disposed on the side of the inclined portions 111 and 112. The heater 200 may be disposed adjacent to the inside or upper and lower portions of the inclined portions 111 and 112, or may be integrated with the inclined portions 111 and 112, but is not limited thereto, and may be disposed adjacent to the inclined portions 111 and 112 in various forms. The heater 200 may be provided as a heating means such as an electric heating wire having a resistor or a thermoelectric element.

[0097] The top surface portion 120 may be disposed on the third direction DR3 side of the bottom surface portion 110 of the glass substrate chemical strengthening furnace device 100, and provided in the form of an openable and closable door. The top surface portion 120 may be configured as a whole and opened and closed in a pull-type or push-type manner, but is not limited thereto, and may be a plurality of divided individuals that are opened and closed in a pull-type or push-type manner. The top surface portion 120 may seal the interior of the glass substrate chemical strengthening furnace device 100 from the outside. During the period when the glass substrate is chemically strengthened in the glass substrate chemical strengthening furnace device 100, the top surface portion 120 is in a closed state, and the interior of the glass substrate chemical strengthening furnace device 100 may be in a sealed state.

[0098] The side wall 130 constitutes a side wall of the glass substrate chemical strengthening furnace apparatus 100 , and may be in a shape bent from the edge of the bottom surface portion 110 toward the third direction DR3 .

[0099] The side wall 130 and the bottom portion 110 may also be manufactured separately to be combined, but may also be formed as a whole by a plate. A heater 200 for generating heat required for heat treatment may be arranged on the side of the side wall 130. The heater 200 may be arranged inside the side wall 130. In addition, the heater 200 may be arranged adjacent to the inner side or outer side of the side wall 130, or may be integrated with the side wall 130, but is not limited thereto, and may be arranged adjacent to the side wall 130 in various forms. However, the heater 200 arranged on the side wall 130 may not be arranged adjacent to the collecting portion 113 side. The heater 200 may be provided as a heating means such as an electric heating wire or a thermoelectric element having a resistor.

[0100] The two side regions of the lower end of the inner side surface of the side wall 130 may define the collecting groove 115. A discharge portion 140 configured to discharge the material contained in the glass substrate chemical strengthening furnace device 100 to the outside may be arranged at at least one of the side wall 130 and the collecting portion 113 adjacent to the collecting groove 115. The discharge portion 140 may be arranged through the side wall 130, but is not limited thereto, and may also be arranged through the collecting portion 113. The discharge portion 140 may be arranged corresponding to each collecting groove 115, but is not limited thereto, and a plurality of discharge portions 140 may also be arranged corresponding to one collecting groove 115.

[0101] The discharge part 140 may include a discharge pipe 141 configured to discharge the substance in the reaction space to the outside and a valve 142 controlling the discharge pipe 141. The discharge pipe 141 is a channel connecting the reaction space and the outside and configured to move the substance, and the valve 142 may be a device for controlling the discharge of the substance discharged through the discharge pipe 141. The discharge pipe 141 may have a reaction space side inlet and an external side. The reaction space side inlet of the discharge pipe 141 may be arranged adjacent to the collecting part 113.

[0102] Regarding the operation of the discharge unit 140 , if the valve 142 is opened, the internal materials of the glass substrate chemical strengthening furnace apparatus 100 can be discharged to the outside through the discharge pipe 141 , and if the valve 142 is closed, the discharge can be stopped.

[0103] The heater 200 can generate heat required for heat treatment. A plurality of heaters 200 may be provided. In order to maintain an appropriate temperature of the glass substrate chemical strengthening furnace device 100, the heater 200 may be provided on the bottom portion 110 or the side wall 130 as described above. During the ion exchange process, solid salt may be supplied to the inside of the glass substrate chemical strengthening furnace device 100, and the heat supplied from the heater 200 may melt the solid salt and maintain the temperature of the molten salt.

[0104] In addition, the heat provided from the heater 200 can maintain the temperature of the molten salt by convection of the molten salt. The farther away from the heater 200, the less heat generated from the heater 200 can reach. The molten salt in the area close to the heater 200 has a high temperature, and the farther away, the lower the temperature, which may cause a temperature difference. In this case, a convection phenomenon in which the relatively high-temperature molten salt rises to the upper side and the low-temperature molten salt falls to the lower side can be guided. Through such convection of the molten salt, the temperature of the entire molten salt inside the glass substrate chemical strengthening furnace device 100 can be kept constant.

[0105] On the other hand, when the fine glass particles 12 are present in the molten salt, the fine glass particles 12 may convect together. As described above, when the fine glass particles 12 are scattered, it may cause a bad influence on the ultra-thin glass, such as scratches or dents. Therefore, it is preferable not to set the heater 200 in the vicinity of the place where the fine glass particles 12 are accumulated.

[0106] Specifically, the heater 200 may not be arranged around the collecting groove 115 where the fine glass particles 12 are accumulated. That is, the heater 200 may not be arranged in the side wall 130 area defining the collecting groove 115, the collecting part 113 of the bottom part 110, and the inclined parts 111 and 112. As described above, the fine glass particles 12 generated in the ion exchange process of the ultra-thin glass can be guided to the collecting groove 115, and the fine glass particles 12 may be scattered when the convection of the molten salt in the collecting groove 115 is active. If the heater 200 is provided in the side wall 130 area defining the collecting groove 115, the fine glass particles 12 accumulated in the collecting groove 115 may be scattered due to the convection of the molten salt caused by the heat generated from the heater 200. The scattered fine glass particles 12 may scratch the surface of the ultra-thin glass, which may cause a dent defect. Therefore, in order to prevent the fine glass particles 12 from circulating due to convection, the heater 200 may not be disposed near the collecting groove 115. In one embodiment, the heater 200 may not be disposed in the entire side wall 130 and the bottom surface 110 defining the collecting groove 115.

[0107] The temperatures of the heaters 200 may be controlled together by one control unit (not shown), but the present invention is not limited thereto and the temperatures of the heaters 200 may be controlled individually by different control units (not shown).

[0108] Figure 8 is a step-by-step diagram of a glass strengthening method according to an embodiment. Fig. 9 This is a schematic diagram of a cartridge used in glass strengthening. Fig.10 This is a perspective view of a hanger used in glass strengthening. Fig.11 This is a schematic diagram showing the steps of immersing the ultra-thin glass in a molten salt and taking it out. Fig.12 This is a schematic diagram showing the ion exchange process of ultra-thin glass.

[0109] Reference Figure 8 According to one embodiment, a glass strengthening method includes: a step of providing solid salt to a glass substrate chemical strengthening furnace device (S11); a step of starting a heater to melt the solid salt (S12); a step of immersing ultra-thin glass in the molten salt (S13); and a step of discharging fine glass particles to the outside (S14).

[0110] The step of immersing the ultra-thin glass in the molten salt ( S13 ) may include a process of preparing the ultra-thin glass 11 and a process of loading the ultra-thin glass 11 on the cartridge 400 and the hanger 300 , immersing the ultra-thin glass 11 in the molten salt, and then taking it out.

[0111] The preparation process of the ultra-thin glass 11 may include a glass composition preparation process and a glass composition molding process.

[0112] The glass composition may include various combinations known in the art. The glass composition is based on silicon dioxide (SiO 2 ) as the main component. In addition, aluminum oxide (Al 2 O 3 ), lithium oxide (LiO 2 ) and sodium oxide (Na 2 O) and the like, but not limited thereto, other components may be included as needed. In one embodiment, the glass composition may include a glass ceramic containing alkali aluminum silicate.

[0113] The glass composition can be formed into a glass shape by various methods known in the art, for example, by a float process, a fusion draw process, a slot draw process, or the like.

[0114] The process of loading the ultra-thin glass 11 into the cartridge 400 and the hanger 300, immersing them in the molten salt, and then taking them out is shown in FIG. Figures 9 to 11 To explain.

[0115] Fig. 9 FIG. 4 shows a card box 400 loaded with ultra-thin glass 11. Fig. 9The card box 400 can provide a storage space for loading the ultra-thin glass 11. The card box 400 may include a lower support platform 410 and a partition wall 420. Specifically, the storage space for loading the ultra-thin glass 11 may be defined by one side of a partition wall 420, another side of another partition wall 420 adjacent to the partition wall 420 in one direction, and the top of the lower support platform 410 connecting the two partition walls 420. Fig. 9 The embodiment of the present invention illustrates a card box 400 that can accommodate 14 ultra-thin glasses 11, but is certainly not limited to this.

[0116] The height of the partition wall 420 of the card box 400 may be smaller than the length of the long side of the ultra-thin glass 11. However, the height of the partition wall 420 may be such that the ultra-thin glass 11 loaded in the adjacent storage spaces do not come into contact with each other.

[0117] Fig.10 FIG. 3 shows a hanger 300 loaded with a card box 400 loaded with ultra-thin glass 11. Fig.10 , the hanger 300 can provide a storage space for loading the card box 400. Fig.10 The example in the figure shows a hanger 300 including three layers of frames in the horizontal direction and three layers in the vertical direction and configured to be able to load eight card boxes 400, but it is of course not limited thereto. The hanger 300 according to an embodiment may include a horizontal frame 310, a vertical frame 320, and a wire mesh 330. The space for loading the card boxes 400 may be the inner space of each rectangular parallelepiped structure formed by the horizontal frame 310 and the vertical frame 320. The card boxes 400 may be supported by the horizontal frame 310 and loaded on the hanger 300.

[0118] A wire mesh 330 may be provided at the lower portion of the hanger 300. The wire mesh 330 according to an embodiment is a mesh-shaped net formed of iron, and may be provided in combination with the lowermost horizontal frame 310. The wire mesh 330 may filter glass fragments that may be generated during chemical strengthening. However, fine glass particles generated in the ultra-thin glass 11 may be difficult to filter because they pass through the wire mesh 330.

[0119] Reference Fig.11 The process of loading the ultra-thin glass 11 on the cartridge 400 and the hanger 300 and immersing them in the molten salt and then taking them out can be performed by loading the cartridge 400 loaded with the ultra-thin glass 11 on the hanger 300 and immersing the hanger 300 in the glass substrate chemical strengthening furnace device 100 containing the molten salt for a certain period of time and then pulling it out. The hanger 300 can reciprocate up and down through the cable part 500 connected to the hanger 300 and located above.

[0120] The cable unit 500 includes a central cable 510, branch cables 520 branching from the central cable 510, and a bundling unit 530 connecting the central cable 510 and the branch cables 520. Each branch cable 520 is connected to the hanger 300, and the central cable 510 can move up and down by a lifting device (not shown). When the hanger 300 is immersed in the molten salt contained in the glass substrate chemical strengthening furnace device 100, the cable unit 500 can be lowered, and when the hanger 300 is taken out of the molten salt, the cable unit 500 can be raised. While the hanger 300 loaded with the card box 400 loaded with the ultra-thin glass 11 is immersed in the molten salt, chemical strengthening by an ion exchange process can be performed.

[0121] Reference Fig.12 , chemical strengthening can be performed by an ion exchange process. The ion exchange process is a process of exchanging ions inside the ultra-thin glass 11 for other ions. The ion exchange process can be performed more than twice. For example, the ion exchange process can include a primary ion exchange process and a secondary ion exchange process. Each ion exchange process can be performed simultaneously on a plurality of ultra-thin glasses 11. That is, a plurality of ultra-thin glasses 11 can be immersed in a molten salt contained in a glass substrate chemical strengthening furnace device 100 so that ion exchange can be achieved simultaneously in the plurality of ultra-thin glasses 11.

[0122] Through the ion exchange process, the ions on the surface of the ultra-thin glass 11 or in the vicinity thereof can be replaced or exchanged with larger ions having the same valence or oxidation state. For example, in the case where the ultra-thin glass 11 includes monovalent alkali metals such as lithium (Li), sodium (Na), potassium (K), and rubidium (Rb) ions, the monovalent cations on the surface can be exchanged for sodium (Na), potassium (K), rubidium (Rb), and cesium (Cs) ions having a larger ionic radius than the ions.

[0123] The step of chemical strengthening may be a single salt or mixed salt wet chemical strengthening based on an immersion method. Specifically, the step of chemical strengthening may be performed by immersing the ultra-thin glass 11 in a molten salt of an alkali metal ion salt contained in the glass substrate chemical strengthening furnace device 100, wherein the alkali metal may include at least one of sodium (Na), potassium (K), rubidium (Rb) and cesium (Cs) ions. That is, the chemical strengthening step may be performed by a molten salt of sodium (Na), potassium (K), rubidium (Rb) and cesium (Cs) ions. The wet chemical strengthening is advantageous in terms of mass production and can achieve more uniform strengthening characteristics.

[0124] In an exemplary embodiment, the step of chemically strengthening may be performed using potassium nitrate (KNO 3 ) or sodium nitrate (NaNO 3) and is treated at a molten salt temperature of about 300° C. to 500° C. and for 1 to 30 hours. The chemical strengthening step can exchange the alkali ions of the surface layer of the ultra-thin glass 11 with ions of a large ionic radius.

[0125] Through the ion exchange process, the ions on the surface US, RS or the vicinity of the ultra-thin glass 11 can be replaced or exchanged with larger ions having the same valence or oxidation state. For example, in the case where the glass includes monovalent alkali metal ions such as lithium (Li), sodium (Na), potassium (K), and rubidium (Rb), the monovalent cations on the surface can be exchanged for sodium (Na), potassium (K), rubidium (Rb), and cesium (Cs) ions having a larger ionic radius than the ions.

[0126] If the glass containing sodium (Na) ions is immersed in a solution containing potassium nitrate (KNO 3 ) molten salt, etc., the sodium (Na) ions inside the glass are discharged to the outside and replaced by potassium (K) ions in their place. The exchanged potassium (K) ions have a larger ionic radius than sodium (Na) ions, so compressive stress is generated. The more potassium (K) ions are exchanged, the greater the compressive stress becomes. Ion exchange is achieved through the surface of the glass, so the amount of potassium (K) ions on the surface of the glass can be the largest. While a part of the exchanged potassium (K) ions diffuse into the interior of the glass, it can increase the depth of the compression regions CSR1 and CSR2, that is, the compression depths DOC1 and DOC2, but the amount can be generally reduced the farther away from the surface. Therefore, the glass can have a stress distribution in which the compressive stresses CS1 and CS2 on the surface are the largest and decrease as they go deeper into the interior. However, the embodiments are not limited to the examples, and the stress distribution can be changed according to the temperature, time, number of times, presence or absence of heat treatment, etc. of the ion exchange process.

[0127] After the step (S13) of immersing the ultra-thin glass in the molten salt, the step (S14) of discharging the fine glass particles can be performed. As described above, if the ultra-thin glass 11 is chemically strengthened by the ion exchange process, a part of the ultra-thin glass 11 is damaged and the fine glass particles 12 may be scattered into the molten salt. The fine glass particles 12 may cause scratches or dents on other ultra-thin glasses 11, so it is preferable to remove them.

[0128] The fine glass particles 12 in the molten salt can drop to the bottom portion 110 side due to the difference in specific gravity with the molten salt. A portion of the fine glass particles 12 that drop to the bottom portion 110 side can move along the inclined portions 111 and 112 to the collecting groove 115 side, but another portion can rise again with the convection of the molten salt. When this phenomenon is repeated, the fine glass particles 12 are guided to the collecting groove 115 and can be collected. As mentioned above, near the collecting groove 115, since the heater 200 is not configured, convection will not be generated. Therefore, the fine glass particles 12 collected in the collecting groove 115 will not rise due to the convection of the molten salt, and can be deposited in the collecting groove 115.

[0129] The fine glass particles 12 deposited in the collecting groove 115 can be discharged to the outside through the discharge part 140. The discharge part 140 may include a discharge pipe 141 and a valve 142 for controlling the operation of the discharge pipe 141. Specifically, the fine glass particles 12 deposited in the collecting groove 115 can be discharged to the outside through the discharge pipe 141 by opening the valve 142. When the fine glass particles 12 are discharged, the molten salt can also be discharged together.

[0130] The ion exchange process can be repeated multiple times with the same molten salt. The fine glass particles 12 can be discharged between each repeated ion exchange process or periodically in the middle of the ion exchange process, but are not limited thereto and can also be discharged aperiodically according to the amount of deposition of the fine glass particles 12.

[0131] The glass substrate chemical strengthening furnace device 100 according to one embodiment can minimize the influence of fine glass particles 12 that may cause scratches or depression defects on other ultra-thin glasses 11 during the ion exchange process of the chemical strengthening step of ultra-thin glasses 11. Therefore, the generation of scratches and depression defects caused by the fine glass particles 12 scattered in the glass substrate chemical strengthening furnace device 100 can be minimized.

[0132] Fig.13 It is a schematic diagram of a glass substrate chemical strengthening furnace device according to another embodiment.

[0133] Reference Fig.13 The glass substrate chemical strengthening furnace device 100_1 according to this embodiment is different from the glass substrate chemical strengthening furnace device 100_1 according to Figure 6 The differences of the glass substrate chemical strengthening furnace device 100 of the embodiment are: a point where the bottom portion 110_1 does not include an inclined portion; a point where a plurality of heaters 200_1 are arranged inside the side wall 130_1 or adjacent to the side wall 130_1 and do not exist inside the bottom portion 110_1 or on the upper and lower sides of the bottom portion 110_1; a point where the collecting groove 115 and the discharge portion 140 do not exist; and a point where a plurality of ultrasonic generators 210_1 for providing ultrasonic waves to the reaction space are provided at the lower ends of the bottom portion 110_1 and the side wall 130_1.

[0134] The fine glass particles 12_1 may be deposited on the bottom portion 110_1 due to the difference in specific gravity of the molten salt. The ultrasonic generator 210_1 may be located inside the bottom portion 110_1, in an adjacent area of ​​the bottom portion 110_1, or at the lower end of the side wall 130_1. The ultrasonic generator 210_1 may be arranged at intervals of 45 cm to 55 cm in the second direction DR2, but is not limited thereto. Ultrasonic waves can ensure the temperature uniformity of the molten salt while not affecting the convection of the molten salt. That is, the glass substrate chemical strengthening furnace device 100_1 according to the present embodiment generates ultrasonic waves using the ultrasonic generator 210_1 located at the lower end of the bottom portion 110_1 and the side wall 130_1, so that the movement of the fine glass particles 12_1 deposited on the bottom portion 110_1 can be minimized while ensuring the temperature uniformity of the molten salt.

[0135] The molten salt can be replaced after being used multiple times. The fine glass particles 12_1 can be removed together with the molten salt when the molten salt is replaced.

[0136] According to the glass substrate chemical strengthening furnace device 100_1 of the present embodiment, the influence of the fine glass particles 12_1 that may cause scratches or depression defects on other ultra-thin glasses during the ion exchange process of the chemical strengthening step of ultra-thin glasses can be minimized. Therefore, the scratches and depression defects caused by the fine glass particles 12_1 scattered in the glass substrate chemical strengthening furnace device 100_1 can be minimized.

[0137] Fig.14 It is a schematic diagram of a glass substrate chemical strengthening furnace according to yet another embodiment.

[0138] Reference Fig.14 The glass substrate chemical strengthening furnace device 100_2 according to this embodiment is different from the glass substrate chemical strengthening furnace device 100_2 according to Figure 6 The glass substrate chemical strengthening furnace device 100 of the embodiment is different in that the collecting groove 115 and the discharge portion 140 do not exist; and a porous ceramic filter 220_2 is provided inside the reaction space of the glass substrate chemical strengthening furnace device 100_2.

[0139] The porous ceramic filter 220_2 includes fine pores and can absorb and remove fine glass particles 12_2. The porous ceramic filter 220_2 can also perform a filtering function at a high temperature when chemical strengthening is performed using the glass substrate chemical strengthening furnace device 100_2. The porous ceramic filter 220_2 can be manufactured by mixing glass powder, carbon (C) and water and heat treating at a temperature of about 700°C to 800°C.

[0140] The porous ceramic filter 220_2 can be supported by the bracket 131_2 located on the inner side of the side wall 130_2 in the glass substrate chemical strengthening furnace device 100_2 and located at a position separated from the upper side of the bottom surface 110_2. Therefore, the fine glass particles 12_2 scattered by the convection of the molten salt can be effectively adsorbed and removed by the porous ceramic filter 220_2. When a large amount of fine glass particles 12_2 are adsorbed on the porous ceramic filter 220_2 and the filtering function cannot be performed, it can be replaced with a new porous ceramic filter 220_2.

[0141] According to the glass substrate chemical strengthening furnace device 100_2 of the present embodiment, the influence of the fine glass particles 12_2 that may cause scratches or depression defects on other ultra-thin glasses during the ion exchange process of the chemical strengthening step of ultra-thin glasses can be minimized. Therefore, the scratches and depression defects caused by the fine glass particles 12_2 scattered in the glass substrate chemical strengthening furnace device 100_2 can be minimized.

[0142] Fig.15 It is a schematic diagram of a glass substrate chemical strengthening furnace according to yet another embodiment.

[0143] Reference Fig.15 The glass substrate chemical strengthening furnace device 100_3 according to this embodiment is different from the glass substrate chemical strengthening furnace device 100_3 according to Figure 6 The glass substrate chemical strengthening furnace device 100 of the embodiment is different in that: the collecting groove 115 and the discharge portion 140 do not exist; and there is an external pipe 230_3 connected to the inside of the glass substrate chemical strengthening furnace device 100_3 and including a porous ceramic filter 220_3 and a circulation pump 240_3.

[0144] The external pipe 230_3 may be connected to a circulation pump 240_3. The circulation pump 240_3 may allow the molten salt inside the glass substrate chemical strengthening furnace device 100_3 to be sucked in from one side inlet of the external pipe 230_3 and discharged to the other side inlet. That is, the circulation pump 240_3 may function as a pump from one side inlet of the external pipe 230_3 toward the other side inlet. At this time, one side inlet of the external pipe 230_3 may be located above the other side inlet.

[0145] The porous ceramic filter 220_3 may be located inside the connecting pipe 230a_3 of the external pipe 230_3. The connecting pipe 230a_3 including the porous ceramic filter 220_3 may be connected to the external pipe 230_3 via a pipe connector 230b_3. When the porous ceramic filter 220_3 adsorbs a large amount of fine glass particles 12_3 and cannot perform the filtering function, the pipe connector 230b_3 may be untied to replace the porous ceramic filter 220_3 in the connecting pipe 230a_3. In an exemplary embodiment, the molten salt may pass through the porous ceramic filter 220_3 and then through the circulation pump 240_3, but is not limited thereto. Other descriptions about the porous ceramic filter 220_3, as described in reference Fig.14 As described in detail in the embodiments of the description.

[0146] According to the glass substrate chemical strengthening furnace device 100_3 of the present embodiment, the influence of the fine glass particles 12_3 that may cause scratches or depression defects on other ultra-thin glasses during the ion exchange process of the chemical strengthening step of ultra-thin glasses can be minimized. Therefore, the scratches and depression defects caused by the fine glass particles 12_3 scattered in the glass substrate chemical strengthening furnace device 100_3 can be minimized.

[0147] Fig.16 It is a schematic diagram of a glass substrate chemical strengthening furnace according to yet another embodiment.

[0148] Reference Fig.16 The glass substrate chemical strengthening furnace device 100_4 according to this embodiment is different from the glass substrate chemical strengthening furnace device 100_4 according to Figure 6 The difference of the glass substrate chemical strengthening furnace device 100 of the embodiment is that: the bottom portion 110_4 includes an inclined portion 111_4 inclined downward toward the center, and includes a collecting portion 113_4 in a groove shape arranged in the center and with an upper surface sunken than the inclined portion 111_4; the collecting groove 115_4 defined by the inner side surface of the inclined portion 111_4 and the upper surface of the collecting portion 113_4 is located at a point in the center of the bottom portion 110_4.

[0149] The fine glass particles 12_4 may be deposited on the bottom portion 110_4 due to the molten salt and the density difference. The fine glass particles 12_4 may move toward the collecting groove 115_4 along the inclined portion 111_4. The fine glass particles 12_4 deposited in the collecting groove 115_4 may be discharged to the outside through the discharge portion 140_4 connected to the collecting groove 115_4. When discharged to the outside, the fine glass particles 12_4 may be discharged together with the molten salt. The discharge of the fine glass particles 12_4 may be performed after the ion exchange process is completed and before the next ion exchange process begins.

[0150] According to the glass substrate chemical strengthening furnace device 100_4 of the present embodiment, the influence of the fine glass particles 12_4 that may cause scratches or depression defects on other ultra-thin glasses during the ion exchange process in the chemical strengthening step of ultra-thin glasses can be minimized. Therefore, the scratches and depression defects caused by the fine glass particles 12_4 scattered in the glass substrate chemical strengthening furnace device 100_4 can be minimized.

[0151] The embodiments of the present invention are described above with reference to the attached drawings, but it should be understood by those with common knowledge in the technical field to which the present invention belongs that the present invention can be implemented in other specific ways without changing its technical concept or essential features. Therefore, it should be understood that the embodiments described above are illustrative in all aspects and not restrictive.

Claims

1. A glass substrate chemical strengthening furnace device, wherein: include: a bottom portion and a side wall, the bottom portion and the side wall defining a reaction space, the side wall extending from an edge of the bottom portion; a plurality of heaters for providing heat to the reaction space; as well as A plurality of ultrasonic generators provide ultrasonic waves to the reaction space, The plurality of heaters are arranged inside the side wall or adjacent to the side wall, and the plurality of heaters are not arranged inside the bottom surface portion or on the upper and lower sides of the bottom surface portion. The ultrasonic generator is arranged inside the bottom surface portion or adjacent to the bottom surface portion.

2. A glass substrate chemical strengthening furnace device, wherein: include: a bottom portion and a side wall, the bottom portion and the side wall defining a reaction space, the side wall extending from an edge of the bottom portion; a plurality of heaters for providing heat to the reaction space; as well as The porous ceramic filter is constructed to absorb fine particles. The plurality of heaters include a side wall heater disposed inside the side wall or adjacent to the side wall.

3. The glass substrate chemical strengthening furnace device according to claim 2, wherein: The porous ceramic filter is arranged inside the reaction space.

4. The glass substrate chemical strengthening furnace device according to claim 2, wherein: The glass substrate chemical strengthening furnace device further includes: an external pipeline penetrating the side wall; and a circulation pump connected to the external pipeline. One side inlet and the other side inlet of the external pipeline are connected to the reaction space, The circulation pump is configured to function as a pump from an inlet on one side of the external pipe toward an inlet on the other side of the external pipe. The porous ceramic filter is disposed inside the external pipe.

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