Multi-point test equipment of piezoresistive sensor and test method of multi-point test equipment

Abstract

The invention relates to the technical field of sensor testing, and provides a multi-point testing device of a piezoresistive sensor and a testing method.The multi-point testing device of the piezoresistive sensor comprises a data processing system, a power module, a multi-point testing system and a sealing cover, and the data processing system comprises a data acquisition module, a detection table and a display module; on one hand, mechanical equipment can be simulated to carry out multiple single-point tests on the film pressure sensor along an X-direction or Y-direction track, on the other hand, the mechanical equipment can be simulated to carry out continuous tests on the film pressure sensor along the X-direction or Y-direction track, and processing equipment can be simulated to carry out tests on the film pressure sensor according to an annular track. Multiple times of single-point testing and continuous testing can be performed on film pressure sensors of different models in a targeted manner according to actual application scenes or application objects, and the device has the characteristics that the movement track of a ball wheel is conveniently simulated according to the movement track of mechanical equipment, the testing modes are diversified, the pressure of the ball wheel is accurately controlled, and the practicability is high.

Description

Technical Field

[0001] The present invention relates to the technical field of sensor testing, and in particular to a multi-point testing device for a piezoresistive sensor and a testing method thereof. Background Art

[0002] The thin film pressure sensor is an ultra-thin flexible circuit component, with a typical sensor thickness of about 0.23mm. It has up to 2288 independent pressure sensing points, which can also be called sensing unit points. The sensors are arranged on the sensor in a cross-shaped form of rows and columns (Cartesian coordinates), and its pressure sensitive material is a piezoresistive structure. When there is no pressure on the sensor surface, its resistance is very high; when a force acts on the sensor, the resistance gradually decreases.

[0003] Thin film pressure sensors with piezoresistive structures are generally used to test the pressure distribution of mechanical equipment, such as the dispensing pressure of a dispensing device when the dispensing head dispenses glue on the workpiece surface along the dispensing track, and the pressure distribution of a car tire on the road surface when it is running.

[0004] In order to ensure the quality of the thin film pressure sensor, it is necessary to test the thin film pressure sensor before leaving the factory. In the prior art, multi-point testing is generally completed by manually placing weights at different positions on the surface of the thin film pressure sensor. On the one hand, this testing method is relatively inefficient, and on the other hand, it is impossible to automatically perform multiple single-point tests and continuity tests on thin film pressure sensors of different models in a targeted manner according to actual application scenarios or application objects. Summary of the invention

[0005] The object of the present invention is to provide a multi-point testing device for a piezoresistive sensor and a testing method thereof, aiming to solve the problems existing in the use of an existing multi-point testing device for a piezoresistive sensor.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a multi-point test device for a piezoresistive sensor, comprising a data processing system and a sealing cover, wherein the data processing system comprises a data acquisition module, a test bench, a first cavity, a second cavity, a display module and a data transfer interface, wherein the first cavity and the second cavity are located on one side of the test bench, and the display module and the data transfer interface are respectively installed on the surface and one side of the first cavity, wherein the data acquisition module is installed on the surface of the test bench, wherein the surface of the test bench is used to place a thin film pressure sensor, wherein the data acquisition module is connected to an electrode end of the thin film pressure sensor, wherein the display module is connected to the data acquisition module in communication, wherein the sealing cover is fixedly connected to the test bench, and further comprises:

[0007] a power module located in the second cavity;

[0008] A multi-point test system located in the first cavity, the multi-point test system comprising a rotating part, a linkage assembly, an air pump module and a pressure test module, the rotating part comprising a rotating guide rail and a first transmission gear, the rotating guide rail and the first transmission gear are fixedly connected, and one side of the power module is transmission-connected to the first transmission gear for controlling the rotation of the rotating guide rail;

[0009] The linkage assembly includes a threaded rod, a second drive motor, a nut seat, a rotating seat, a bent pipe and a movable frame, the threaded rod and the second drive motor are both installed in the rotating guide rail, the nut seat is threadedly connected to the threaded rod, the rotating seat is rotatably connected to the nut seat, the bent pipe is fixedly connected to the rotating seat, and one side of the movable frame is movably sleeved on the surface of the bent pipe;

[0010] A first fixing rod is fixedly connected to the first cavity, and the other side of the movable frame is movably sleeved on the surface of the first fixing rod;

[0011] An air pump module is communicatively connected to the display module, and the air pump module is connected to one end of the curved pipe;

[0012] The pressure test module includes a sealing tube, a piston, a pressure rod, a ball wheel, a second return spring and a pressure gauge. The sealing tube is fixedly connected to the bent tube, the piston is slidably connected in the sealing tube, one end of the pressure rod is fixedly connected to the piston, the ball wheel is movably connected to the other end of the pressure rod, the pressure gauge is fixedly connected to the sealing tube, the display module is communicatively connected to the pressure gauge, and the second return spring is connected between the piston and the sealing tube.

[0013] As a further solution of the present invention, it also includes an overall test system, which includes a pressure roller, a mobile frame, a traction line, a winding wheel, a second transmission gear, a rotating rod and a third reset spring, the winding wheel and the second transmission gear are both fixedly connected to the rotating rod, the rotating rod is installed in the second cavity, the pressure roller is rotatably connected to the surface of the mobile frame, the detection platform is in contact with the surface of the pressure roller, one end of the traction line is wound on the surface of the winding wheel, the mobile frame is connected to the other end of the traction line, and the other side of the power module is transmission-connected to the second transmission gear;

[0014] A second fixing rod is fixedly connected in the second cavity, the moving frame is movably sleeved on the surface of the second fixing rod, and the third return spring is connected between the moving frame and the second cavity.

[0015] As a further solution of the present invention, the power module includes a first drive motor, a drive shaft, a key bar, a drive gear, a magnetic strip, an electromagnet, a first return spring and a first bracket. The first drive motor and the first bracket are both fixedly connected to the second cavity. The first drive motor is connected to the drive shaft. The drive gear is movably connected to the surface of the drive shaft. The surface of the drive shaft is provided with a key bar. The surface of the drive gear is provided with a key slot. The key bar is slidably connected to the key slot. The electromagnet and the magnetic strip are respectively embedded in the surface of the first bracket and the drive gear. The first return spring is connected between the first bracket and the drive gear.

[0016] As a further solution of the present invention, when the electromagnet is energized, the magnetic strip is magnetically fitted to the electromagnet, and the driving gear is transmission connected to the first transmission gear; when the electromagnet is de-energized, the first return spring drives the driving gear to fit to the surface of the second cavity, and the second transmission gear is transmission connected to the driving gear.

[0017] As a further solution of the present invention, the rotating part also includes a center tube, the rotating guide rail is fixedly connected to the center tube, the center tube is installed between the first cavity and the second cavity, the first transmission gear is fixedly connected to the center tube, and the bent pipe and the air pump module are both connected to the center tube.

[0018] As a further scheme of the present invention, the linkage assembly also includes a rotating shaft, a first sleeve, a second sleeve, a rigid tube, a flexible tube and a second bracket. The rotating seat is fixedly connected to the rotating shaft, the nut seat is rotatably connected to the rotating shaft, the first sleeve and the second sleeve are fixedly connected on both sides of the movable frame, the bent pipe is movably sleeved in the first sleeve, the first fixed rod is movably sleeved in the second sleeve, one end of the rigid tube is fixedly connected to the flexible tube, the center tube is fixedly connected to the other end of the rigid tube, the bent pipe is fixedly connected to the flexible tube, the bent pipe is fixedly connected to the second bracket, and the sealing tube is fixedly connected to the second bracket.

[0019] As a further solution of the present invention, the second cavity is fixedly connected to the air pump module, the air pump module is fixedly connected to an air guide tube, and the air guide tube is movably connected to the central tube.

[0020] As a further solution of the present invention, a method for testing a multi-point testing device of a piezoresistive sensor comprises:

[0021] Step 1: Open the sealing cover, place the thin film pressure sensor on the surface of the test bench, and connect the data acquisition module to the electrode end of the thin film pressure sensor;

[0022] Step 2: When it is necessary to simulate mechanical equipment to perform multiple single-point tests on the thin film pressure sensor along the X-direction or Y-direction trajectory, the display module is used to control the power module and the second drive motor to start in sequence. The power module controls the rotating guide rail to be parallel to the X-direction or Y-direction coordinate axis. The second drive motor controls the elbow, the movable frame and the pressure test module to move along the axis of the first fixed rod or the elbow in the X-direction or Y-direction through the threaded rod and the nut seat. When the same distance is moved each time, the second drive motor is controlled to be closed, and the air pump module is controlled to inflate the sealing tube. The air pressure controls the ball wheel to squeeze the thin film pressure sensor through the piston. The display module accurately controls the pressure of the ball wheel through the pressure gauge, and the display module obtains pressure data through the data acquisition module.

[0023] Step 3: When it is necessary to simulate mechanical equipment to perform continuity test on the film pressure sensor along the X-direction or Y-direction trajectory, the ball wheel is controlled to move at a uniform speed along the X-direction or Y-direction while ensuring that the ball wheel squeezes the film pressure sensor with the same pressure.

[0024] Step 4. When it is necessary to simulate the processing equipment to test the thin film pressure sensor along a circular trajectory, the second drive motor and the threaded rod are used to adjust the position of the ball wheel on the surface of the thin film pressure sensor, and the power module is used to control the rotation of the rotating guide rail. The horizontal limit of the first fixed rod and the matching structure of the rotating seat and the nut seat are rotatably connected, so that the ball wheel can move along the surface of the thin film pressure sensor along the circular trajectory. By controlling the continuous start and stop or continuous operation of the power module, the purpose of controlling the intermittent extrusion and continuous extrusion of the ball wheel can be achieved, thereby achieving the purpose of intermittent multi-point testing and continuous multi-point testing along the circular trajectory.

[0025] Step 5: When the display module does not receive the pressure data at the coordinates of the ball wheel or the pressure data received by the display module is interrupted, output unqualified information of the thin film pressure sensor.

[0026] The beneficial effects of the present invention are as follows: the design of the combination of the data processing system, the power module and the multi-point test system can, on the one hand, simulate mechanical equipment to perform multiple single-point tests on the thin film pressure sensor along an X-direction or Y-direction trajectory, and on the other hand, simulate mechanical equipment to perform continuity tests on the thin film pressure sensor along an X-direction or Y-direction trajectory, and can also simulate processing equipment to test the thin film pressure sensor along a circular trajectory, and can perform multiple single-point tests and continuity tests on thin film pressure sensors of different models in a targeted manner according to actual application scenarios or application objects, and has the characteristics of being easy to simulate the motion trajectory of the ball wheel according to the running trajectory of the mechanical equipment, having various testing methods, accurately controlling the ball wheel pressure and being highly practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1This is a schematic diagram of opening a sealing cover of a multi-point testing device for a piezoresistive sensor according to an embodiment of the present invention.

[0028] Figure 2 This is an exploded view of a multi-point testing device for a piezoresistive sensor according to an embodiment of the present invention.

[0029] Figure 3 Schematic diagram of the disassembly of the power module according to an embodiment of the present invention.

[0030] Figure 4 It is an exploded diagram of a multi-point testing system according to an embodiment of the present invention.

[0031] Figure 5 It is a three-dimensional diagram of the rotating part of an embodiment of the present invention.

[0032] Figure 6 It is a three-dimensional diagram of the linkage assembly according to an embodiment of the present invention.

[0033] Figure 7 It is a cross-sectional view of a pressure test module according to an embodiment of the present invention.

[0034] Figure 8 It is a three-dimensional diagram of the overall testing system according to an embodiment of the present invention.

[0035] Fig. 9 It is an assembly diagram of the power module, multi-point test system and overall test system according to an embodiment of the present invention.

[0036] Fig.10 This is a first cross-sectional view of a multi-point testing device for a first piezoresistive sensor according to an embodiment of the present invention.

[0037] Fig.11 This is a second cross-sectional view of the multi-point testing device of the first piezoresistive sensor according to an embodiment of the present invention.

[0038] Fig.12 It is a third cross-sectional view of the multi-point testing device of the first piezoresistive sensor according to an embodiment of the present invention.

[0039] Fig.13 For the present invention Fig.12 A partial enlarged view of point a in the middle.

[0040] Fig.14 This is a three-dimensional diagram of a multi-point testing device for a piezoresistive sensor according to an embodiment of the present invention.

[0041] Figure numerals: 1-data processing system, 11-data acquisition module, 12-testing table, 13-first cavity, 14-first fixed rod, 15-second cavity, 16-second fixed rod, 17-display module, 18-data transfer interface, 2-power module, 21-first drive motor, 22-drive shaft, 221-key bar, 23-drive gear, 231-magnetic strip, 24-electromagnet, 25-first return spring, 26-first bracket, 3-multi-point test system, 31-rotating part, 311-rotating guide rail, 312-center tube, 313-first transmission gear, 32-linkage assembly, 321-threaded rod, 322-second drive motor, 323-nut Seat, 3231-rotating shaft, 3232-rotating seat, 324-bend pipe, 325-movable frame, 3251-first sleeve, 3252-second sleeve, 326-rigid tube, 327-flexible tube, 328-second bracket, 33-air pump module, 331-air guide tube, 34-pressure test module, 341-sealing tube, 342-piston, 343-pressure rod, 344-ball wheel, 345-second return spring, 346-arc cover, 347-pressure gauge, 4-integral test system, 41-pressure roller, 42-movable frame, 43-traction line, 44-winding wheel, 45-second transmission gear, 46-rotating rod, 47-third return spring, 5-sealing cover. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0043] The specific implementation of the present invention is described in detail below in conjunction with specific embodiments.

[0044] See also Figures 1 to 14 In one embodiment of the present invention, a multi-point test device for a piezoresistive sensor includes a data processing system 1 and a sealing cover 5. The data processing system 1 includes a data acquisition module 11, a test bench 12, a first cavity 13, a second cavity 15, a display module 17 and a data transfer interface 18. The first cavity 13 and the second cavity 15 are located on one side of the test bench 12. The display module 17 and the data transfer interface 18 are respectively installed on the surface and one side of the first cavity 13. The data acquisition module 11 is installed on the surface of the test bench 12. The surface of the test bench 12 is used to place a thin film pressure sensor. The data acquisition module 11 is connected to the electrode end of the thin film pressure sensor. The display module 17 is in communication connection with the data acquisition module 11. The sealing cover 5 is fixedly connected to the test bench 12, and further includes:

[0045] A power module 2 located in the second cavity 15;

[0046] A multi-point test system 3 is located in the first cavity 13, and the multi-point test system 3 includes a rotating part 31, a linkage assembly 32, an air pump module 33 and a pressure test module 34. The rotating part 31 includes a rotating guide rail 311 and a first transmission gear 313. The rotating guide rail 311 and the first transmission gear 313 are fixedly connected. One side of the power module 2 is in transmission connection with the first transmission gear 313, and is used to control the rotation of the rotating guide rail 311;

[0047] The linkage assembly 32 includes a threaded rod 321, a second drive motor 322, a nut seat 323, a rotating seat 3232, a bent pipe 324 and a movable frame 325. The threaded rod 321 and the second drive motor 322 are both installed in the rotating guide rail 311. The nut seat 323 is threadedly connected to the threaded rod 321. The rotating seat 3232 is rotatably connected to the nut seat 323. The bent pipe 324 is fixedly connected to the rotating seat 3232. One side of the movable frame 325 is movably sleeved on the surface of the bent pipe 324.

[0048] The first fixing rod 14 is fixedly connected to the first cavity 13, and the other side of the movable frame 325 is movably sleeved on the surface of the first fixing rod 14;

[0049] An air pump module 33 is connected to the display module 17 and communicates with one end of the curved pipe 324;

[0050] The pressure test module 34 includes a sealing tube 341, a piston 342, a pressure rod 343, a ball wheel 344, a second reset spring 345 and a pressure gauge 347. The sealing tube 341 is fixedly connected to the curved tube 324, the piston 342 is slidably connected in the sealing tube 341, one end of the pressure rod 343 is fixedly connected to the piston 342, the ball wheel 344 is movably connected to the other end of the pressure rod 343, the pressure gauge 347 is fixedly connected to the sealing tube 341, the display module 17 is communicatively connected to the pressure gauge 347, the second reset spring 345 is connected between the piston 342 and the sealing tube 341, one end of the pressure rod 343 is fixedly connected to the arc cover 326, and the ball wheel 344 is movably connected in the arc cover 326.

[0051] See also Figure 5 and Fig. 9 Furthermore, the rotating part 31 also includes a center tube 312, the rotating guide rail 311 is fixedly connected to the center tube 312, the center tube 312 is installed between the first cavity 13 and the second cavity 15, the first transmission gear 313 is fixedly connected to the center tube 312, and the bent pipe 324 and the air pump module 33 are both connected to the center tube 312.

[0052] See also Figure 6 and Fig. 9Further, the linkage assembly 32 also includes a rotating shaft 3231, a first sleeve 3251, a second sleeve 3252, a rigid tube 326, a flexible tube 327 and a second bracket 328, the rotating seat 3232 is fixedly connected to the rotating shaft 3231, the nut seat 323 is rotatably connected to the rotating shaft 3231, the first sleeve 3251 and the second sleeve 3252 are fixedly connected on both sides of the movable frame 325, the bent pipe 324 is movably sleeved in the first sleeve 3251, and the first The fixed rod 14 is movably sleeved in the second sleeve 3252, one end of the rigid tube 326 is fixedly connected to the flexible tube 327, the central tube 312 is fixedly connected to the other end of the rigid tube 326, the bent tube 324 is fixedly connected to the flexible tube 327, the bent tube 324 is connected to the second bracket 3212, further, the second cavity 15 is fixedly connected to the air pump module 33, the air pump module 33 is fixedly connected to the air guide tube 331, and the air guide tube 331 is movably connected to the central tube 312.

[0053] In an embodiment of the present invention, when the position of the nut seat 323 is fixed by using the threaded rod 321, when the power module 2 controls the rotating guide rail 311 to rotate around the center tube 312 through the first transmission gear 313, on the one hand, the rotating seat 3232 rotates on the surface of the nut seat 323 through the rotating shaft 3231, and on the other hand, the bent tube 324 moves along the first sleeve 3251, and the second sleeve 3252 moves along the first fixed rod 14. The above three types of movement drive the ball wheel 344 to perform continuous circular motion; in the process of the circular motion of the ball wheel 344, when the nut seat 323 is moved at intervals using the threaded rod 321, the movement radius of the ball wheel 344 can be adjusted, and a straight line motion trajectory can be left between two different circular trajectories.

[0054] See also Figures 8 to 12 In one embodiment of the present invention, an overall test system 4 is further included, the overall test system 4 includes a pressure roller 41, a moving frame 42, a traction line 43, a winding wheel 44, a second transmission gear 45, a rotating rod 46 and a third reset spring 47, the winding wheel 44 and the second transmission gear 45 are both fixedly connected to the rotating rod 46, the rotating rod 46 is installed in the second cavity 15, the pressure roller 41 is rotatably connected to the surface of the moving frame 42, the detection platform 12 is in contact with the surface of the pressure roller 41, one end of the traction line 43 is wound on the surface of the winding wheel 44, the moving frame 42 is connected to the other end of the traction line 43, and the other side of the power module 2 is transmission-connected to the second transmission gear 45;

[0055] The second cavity 15 is fixedly connected with a second fixing rod 16 . The moving frame 42 is movably sleeved on the surface of the second fixing rod 16 . The third return spring 47 is connected between the moving frame 42 and the second cavity 15 .

[0056] See also Figure 3 , Fig. 9 and Fig.13 Further, the power module 2 includes a first drive motor 21, a drive shaft 22, a key bar 221, a drive gear 23, a magnetic strip 231, an electromagnet 24, a first return spring 25 and a first bracket 26, the first drive motor 21 and the first bracket 26 are both fixedly connected to the second cavity 15, the first drive motor 21 is connected to the drive shaft 22, the drive gear 23 is movably connected to the surface of the drive shaft 22, the surface of the drive shaft 22 is provided with a key bar 221, the surface of the drive gear 23 is provided with a key slot, the key bar 221 is slidably connected to the key slot, the electromagnet 24 and the magnetic strip 231 are respectively embedded in the surfaces of the first bracket 26 and the drive gear 23, and the first return spring 25 is connected between the first bracket 26 and the drive gear 23.

[0057] In the embodiment of the present invention, when the electromagnet 24 is energized, the magnetic strip 231 is magnetically attached to the electromagnet 24, and the driving gear 23 is transmission-connected to the first transmission gear 313. When the electromagnet 24 is powered off, the first return spring 25 drives the driving gear 23 to fit the surface of the second cavity 15, and the second transmission gear 45 is transmission-connected to the driving gear 23. When it is necessary to simulate mechanical equipment to test the entire surface of the thin film pressure sensor, the electromagnet 24 is firstly controlled to be powered off through the display module 17. At this time, the first return spring 25 drives the driving gear 23 to fit the surface of the second cavity 15, and the second transmission gear 45 is transmission-connected to the driving gear 23. The first driving motor 21 is used to control the driving gear 23 to rotate. The rotating driving gear 23 controls the rotation of the winding wheel 44 through the second transmission gear 45. The rotating winding wheel 44 releases the traction line 43. The elastic contraction of the third return spring 47 drives the movable frame 42 and the pressure roller 41 to move along the second fixed rod 46, thereby driving the pressure roller 41 to roll along the surface of the thin film pressure sensor.

[0058] Working principle: First, open the sealing cover 5, then place the thin film pressure sensor on the surface of the detection platform 12, and connect the data acquisition module 11 to the electrode end of the thin film pressure sensor;

[0059] When it is necessary to simulate mechanical equipment to perform multiple single-point tests on the thin film pressure sensor along the X-direction or Y-direction trajectory, the display module 17 is first used to control the electromagnet 24 to be energized. At this time, the magnetic strip 231 is magnetically attached to the electromagnet 24, and the driving gear 23 is connected to the first transmission gear 313. The first driving motor 21 controls the driving gear 23 to rotate through the driving shaft 22 and the key strip 221. The rotating driving gear 23 controls the rotating guide rail 311 to rotate around the central tube 312 through the first transmission gear 313, which is used to control the rotating guide rail 311 to be parallel to the X-direction or Y-direction coordinate axis. Then the second driving motor 21 controls the driving gear 23 to rotate around the central tube 312 through the first transmission gear 313. The motor 322 controls the curved pipe 324, the movable frame 325 and the pressure test module 34 to move in the X direction or the Y direction along the axis of the first fixed rod 14 or the curved pipe 324 through the threaded rod 321 and the nut seat 323. When the second driving motor 322 moves the same distance each time, the air pump module 33 is controlled to inflate the sealing tube 341. The air pressure controls the ball wheel 344 to squeeze the film pressure sensor through the piston 342. The display module 17 accurately controls the pressure of the ball wheel 344 through the pressure gauge 347. The display module 17 obtains the pressure data of the film pressure sensor through the data acquisition module 11.

[0060] When it is necessary to simulate mechanical equipment to perform continuity test on the film pressure sensor along the X-direction or Y-direction trajectory, under the premise of ensuring that the ball wheel 344 squeezes the film pressure sensor with the same pressure, the ball wheel 344 is controlled to move at a uniform speed along the X-direction or Y-direction according to the above operation method.

[0061] When it is necessary to simulate the processing equipment to test the thin film pressure sensor according to a single circular trajectory or a multi-segment trajectory, the power module 2 is used to control the rotation of the rotating guide rail 311, the horizontal limit of the first fixed rod 14, and the matching structure of the rotating seat 3232 and the nut seat 323. When the second drive motor 322 and the threaded rod 321 are used to adjust the position of the ball wheel 344 on the surface of the thin film pressure sensor to remain stationary, the ball wheel 344 can move along the surface of the thin film pressure sensor according to a single circular trajectory. When the second drive motor 322 and the threaded rod 321 are used to intermittently adjust the position of the ball wheel 344 on the surface of the thin film pressure sensor, the ball wheel 344 can move along the surface of the thin film pressure sensor in a combination of arc and linear trajectories. The purpose of controlling the intermittent extrusion and continuous extrusion of the ball wheel 34 is achieved by controlling the power module 2 to start and stop continuously or to run continuously, thereby achieving the purpose of intermittent multi-point testing and continuous multi-point testing along the circular trajectory.

[0062] During the test process of the above situation, the display module 17 is used to receive the pressure signal data of the thin film pressure sensor transmitted by the data acquisition module 11. When the pressure data at the coordinates of the ball wheel 344 is not received or the pressure data received by the display module 17 is interrupted, the thin film pressure sensor failure information is output, and the coordinate information of one or more specific unqualified piezoresistive structures on the surface of the thin film pressure sensor is displayed.

[0063] To sum up, the design of the combination of the data processing system 1, the power module 2 and the multi-point test system 3 can, on the one hand, simulate the mechanical equipment to perform multiple single-point tests on the thin film pressure sensor along the X-direction or Y-direction trajectory, and on the other hand, simulate the mechanical equipment to perform continuity tests on the thin film pressure sensor along the X-direction or Y-direction trajectory, and can also simulate the processing equipment to test the thin film pressure sensor along a circular trajectory, and can perform multiple single-point tests and continuity tests on thin film pressure sensors of different models in a targeted manner according to actual application scenarios or application objects, and has the characteristics of being easy to simulate the motion trajectory of the ball wheel 34 according to the operation trajectory of the mechanical equipment, diverse testing methods, precise control of the pressure of the ball wheel 34 and strong practicality.

[0064] For those skilled in the art, although several embodiments and examples of the present invention are described, these embodiments and examples are presented as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the scope of the subject matter of the invention. These embodiments and their variations are included in the scope and subject matter of the invention, and are included in the invention described in the claims and the scope of their equivalents.

[0065] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A multi-point test device for a piezoresistive sensor, comprising a data processing system (1) and a sealing cover (5), wherein the data processing system (1) comprises a data acquisition module (11), a test bench (12), a first cavity (13), a second cavity (15), a display module (17) and a data transfer interface (18), wherein the first cavity (13) and the second cavity (15) are located on one side of the test bench (12), the display module (17) and the data transfer interface (18) are respectively installed on the surface and one side of the first cavity (13), the data acquisition module (11) is installed on the surface of the test bench (12), the surface of the test bench (12) is used to place a thin film pressure sensor, the data acquisition module (11) is connected to an electrode end of the thin film pressure sensor, the display module (17) is communicatively connected to the data acquisition module (11), and the sealing cover (5) is fixedly connected to the test bench (12), characterized in that: Also includes: A power module (2) located in the second cavity (15); A multi-point test system (3) located in a first cavity (13), the multi-point test system (3) comprising a rotating part (31), a linkage assembly (32), an air pump module (33) and a pressure test module (34), the rotating part (31) comprising a rotating guide rail (311) and a first transmission gear (313), the rotating guide rail (311) and the first transmission gear (313) being fixedly connected, and one side of the power module (2) being transmission-connected to the first transmission gear (313) for controlling the rotation of the rotating guide rail (311); The linkage assembly (32) comprises a threaded rod (321), a second drive motor (322), a nut seat (323), a rotating seat (3232), a bent pipe (324) and a movable frame (325); the threaded rod (321) and the second drive motor (322) are both installed in the rotating guide rail (311); the nut seat (323) is threadedly connected to the threaded rod (321); the rotating seat (3232) is rotatably connected to the nut seat (323); the bent pipe (324) is fixedly connected to the rotating seat (3232); and one side of the movable frame (325) is movably sleeved on the surface of the bent pipe (324); A first fixed rod (14) is fixedly connected to the first cavity (13), and the other side of the movable frame (325) is movably sleeved on the surface of the first fixed rod (14); An air pump module (33) communicatively connected to the display module (17), wherein the air pump module (33) is in communication with one end of the curved pipe (324); The pressure test module (34) comprises a sealing tube (341), a piston (342), a pressure rod (343), a ball wheel (344), a second return spring (345) and a pressure gauge (347); the sealing tube (341) is fixedly connected to the curved tube (324); the piston (342) is slidably connected in the sealing tube (341); one end of the pressure rod (343) is fixedly connected to the piston (342); the ball wheel (344) is movably connected to the other end of the pressure rod (343); the pressure gauge (347) is fixedly connected to the sealing tube (341); the display module (17) is communicatively connected to the pressure gauge (347); and the second return spring (345) is connected between the piston (342) and the sealing tube (341).

2. The multi-point testing device for a piezoresistive sensor according to claim 1, characterized in that: It also includes an overall test system (4), the overall test system (4) including a pressure roller (41), a movable frame (42), a traction line (43), a winding wheel (44), a second transmission gear (45), a rotating rod (46) and a third reset spring (47), the winding wheel (44) and the second transmission gear (45) are both fixedly connected to the rotating rod (46), the rotating rod (46) is installed in the second cavity (15), the pressure roller (41) is rotatably connected to the surface of the movable frame (42), the detection platform (12) is in contact with the surface of the pressure roller (41), one end of the traction line (43) is wound on the surface of the winding wheel (44), the movable frame (42) is connected to the other end of the traction line (43), and the other side of the power module (2) is transmission-connected to the second transmission gear (45); A second fixed rod (16) is fixedly connected inside the second cavity (15); the movable frame (42) is movably sleeved on the surface of the second fixed rod (16); and the third return spring (47) is connected between the movable frame (42) and the second cavity (15).

3. The multi-point testing device for a piezoresistive sensor according to claim 2, characterized in that: The power module (2) comprises a first drive motor (21), a drive shaft (22), a key bar (221), a drive gear (23), a magnetic bar (231), an electromagnet (24), a first return spring (25) and a first bracket (26); the first drive motor (21) and the first bracket (26) are both fixedly connected to the second cavity (15); the first drive motor (21) is connected to the drive shaft (22); the drive gear (23) is movably connected to the surface of the drive shaft (22); the surface of the drive shaft (22) is provided with a key bar (221); the surface of the drive gear (23) is provided with a key slot; the key bar (221) is slidably connected to the key slot; the electromagnet (24) and the magnetic bar (231) are respectively embedded in the surfaces of the first bracket (26) and the drive gear (23); and the first return spring (25) is connected between the first bracket (26) and the drive gear (23).

4. The multi-point testing device for a piezoresistive sensor according to claim 3, characterized in that: When the electromagnet (24) is powered on, the magnetic strip (231) is magnetically attached to the electromagnet (24), and the driving gear (23) is drivingly connected to the first transmission gear (313); when the electromagnet (24) is powered off, the first return spring (25) drives the driving gear (23) to be attached to the surface of the second cavity (15), and the second transmission gear (45) is drivingly connected to the driving gear (23).

5. The multi-point testing device for a piezoresistive sensor according to claim 4, characterized in that: The rotating part (31) also includes a central tube (312), the rotating guide rail (311) is fixedly connected to the central tube (312), the central tube (312) is installed between the first cavity (13) and the second cavity (15), the first transmission gear (313) is fixedly connected to the central tube (312), and the bent tube (324) and the air pump module (33) are both connected to the central tube (312).

6. The multi-point testing device for a piezoresistive sensor according to claim 5, characterized in that: The linkage assembly (32) further comprises a rotating shaft (3231), a first sleeve (3251), a second sleeve (3252), a rigid tube (326), a flexible tube (327) and a second bracket (328); the rotating seat (3232) is fixedly connected to the rotating shaft (3231); the nut seat (323) is rotatably connected to the rotating shaft (3231); the first sleeve (3251) and the second sleeve (3252) are respectively fixedly connected to the two sides of the movable frame (325); the bent tube (324 ) is movably sleeved in the first sleeve (3251), the first fixing rod (14) is movably sleeved in the second sleeve (3252), one end of the rigid tube (326) is fixedly connected to the flexible tube (327), the center tube (312) is fixedly connected to the other end of the rigid tube (326), the bent tube (324) is fixedly connected to the flexible tube (327), the bent tube (324) is fixedly connected to the second bracket (328), and the sealing tube (341) is fixedly connected to the second bracket (328).

7. The multi-point testing device for a piezoresistive sensor according to claim 1, characterized in that: The second cavity (15) is fixedly connected to the air pump module (33), the air pump module (33) is fixedly connected to an air guide tube (331), and the air guide tube (331) is movably connected to the central tube (312).

8. A method for testing a multi-point testing device for a piezoresistive sensor, applied to the multi-point testing device for a piezoresistive sensor according to any one of claims 1 to 7, characterized in that: include: Step 1: open the sealing cover (5), place the thin film pressure sensor on the surface of the detection platform (12), and connect the data acquisition module (11) to the electrode end of the thin film pressure sensor; Step 2: When it is necessary to simulate mechanical equipment to perform multiple single-point tests on the thin film pressure sensor along an X-direction or Y-direction trajectory, the display module (17) is used to sequentially control the power module (2) and the second drive motor (322) to start, the power module (2) controls the rotating guide rail (311) to be parallel to the X-direction or Y-direction coordinate axis, and the second drive motor (322) controls the curved pipe (324), the movable frame (325) and the pressure test module (34) to move along the X-direction or Y-direction coordinate axis through the threaded rod (321) and the nut seat (323). The axis of the first fixed rod (14) or the curved tube (324) is displaced in the X direction or the Y direction. Each time the first fixed rod (14) or the curved tube (324) moves the same distance, the second driving motor (322) is controlled to be turned off, and the air pump module (33) is controlled to inflate the sealing tube (341). The air pressure controls the ball wheel (344) to squeeze the film pressure sensor through the piston (342). The display module (17) accurately controls the pressure of the ball wheel (344) through the pressure gauge (347). The display module (17) obtains pressure data through the data acquisition module (11); Step 3: When it is necessary to simulate mechanical equipment to perform continuity test on the thin film pressure sensor along the X-direction or Y-direction trajectory, the ball wheel (344) is controlled to move at a uniform speed along the X-direction or Y-direction while ensuring that the ball wheel (344) squeezes the thin film pressure sensor with the same pressure. Step 4. When it is necessary to simulate the processing equipment to test the thin film pressure sensor along a circular trajectory, the second drive motor (322) and the threaded rod (321) are used to adjust the position of the ball wheel (344) on the surface of the thin film pressure sensor, and the power module (2) is used to control the rotation of the rotating guide rail (311). The horizontal limit of the first fixed rod (14) and the matching structure of the rotating seat (3232) and the nut seat (323) are rotatably connected, so that the ball wheel (344) can move along the surface of the thin film pressure sensor along a circular trajectory. By controlling the power module (2) to start and stop continuously or run continuously, the purpose of controlling the intermittent extrusion and continuous extrusion of the ball wheel (34) is achieved, thereby achieving the purpose of realizing intermittent multi-point testing and continuous multi-point testing along the circular trajectory. Step 5: When the display module (17) does not receive the pressure data at the coordinates of the ball wheel (344) or the pressure data received by the display module (17) is interrupted, outputting information indicating that the thin film pressure sensor is unqualified.

Images