Automatic scanning device for appearance defects of quartz diffusion tube

Abstract

The invention relates to the technical field of optical detection, in particular to an automatic scanning device for appearance defects of a quartz diffusion tube. The film type light reflecting device comprises a film covering mechanism, a guide mechanism and a film pasting mechanism which are sequentially arranged in the advancing direction of the moving shaft, the film covering mechanism comprises a plurality of winding rollers and a guide roller set which are fixed to the circumferential side of the moving shaft and distributed at equal intervals, a light reflecting film is wound around the winding rollers, and one end of the light reflecting film penetrates through the guide roller set and is fixedly provided with an arc-shaped clamping head. The quartz diffusion tube solves the problems that when an existing quartz diffusion tube is subjected to laser scanning, reflective powder coated on the quartz diffusion tube is difficult to remove, and the tube body is polluted and damaged.

Description

Technical Field

[0001] The invention relates to the technical field of optical detection, and in particular to an automatic scanning device for appearance defects of a quartz diffusion tube. Background Art

[0002] In the semiconductor manufacturing industry, quartz diffusion tubes are widely used as important components. However, during the production process, various reasons may cause defects on the surface of quartz diffusion tubes, such as cracks and scratches, which will affect the quality and performance of the product. Traditional inspections are manual visual inspections or laser scanning for appearance defect inspections. With the development of the industry, laser scanning has become a dominant method.

[0003] Existing laser scanning has strict requirements on the environment. During operation, it often encounters reflection and scattering problems caused by the material of the quartz diffusion tube. In the existing technology, special coatings, reflective powders, reflective stickers, etc. are added to the quartz diffusion tube to improve the environment. Because the quartz diffusion tube is small in size, a mixture of glue and reflective powder is often used, and then attached to the inner wall of the diffusion tube by dipping or spraying. However, this method is difficult to remove after use, so it is easy to cause pollution and damage to the diffusion tube. Summary of the invention

[0004] The purpose of the present invention is to provide an automatic scanning device for appearance defects of a quartz diffusion tube in view of the problems existing in the background technology.

[0005] The technical solution of the present invention is: an automatic scanning device for appearance defects of a quartz diffusion tube, comprising positioning sleeves and a moving shaft respectively arranged on both sides of a frame, and also comprising a light shielding device installed on the frame, the positioning sleeve is sleeved with a quartz diffusion tube body to be inspected, the moving shaft is provided with a film-type reflective device that can enter into the quartz diffusion tube body, and the film-type reflective device comprises a film-coating mechanism, a guide mechanism and a film-sticking mechanism sequentially arranged along the forward direction of the moving shaft; The laminating mechanism includes a plurality of winding rollers and guide roller groups fixed on the circumference of the moving shaft and distributed at equal intervals, the winding rollers are wound with a reflective film, one end of the reflective film passes through the guide roller group and is fixed with an arc-shaped clamp, the guide mechanism includes a guide plate fixed on the moving shaft, and a plurality of circularly distributed rubber wheels are rotatably installed in the guide plate; The film sticking mechanism includes a mounting tube whose center coincides with the moving axis, and also includes a plurality of circularly distributed rubber airbags fixed on the outside of the mounting tube. A power component for driving the mounting tube to rotate and inflating the rubber airbags is provided in the film sticking mechanism. The shading device includes two shading covers respectively arranged on both sides of the moving axis, and also includes a driving mechanism for driving the two shading covers to close and surround the film sticking mechanism. The two shading covers are provided with a detection mechanism and an electric heating plate. The driving mechanism operates when the moving axis moves.

[0006] Preferably, the laminating mechanism also includes a plurality of first mounting frames and second mounting frames respectively fixed on the circumferential sides of the movable shaft and equidistantly distributed, the winding roller is rotatably mounted on the first mounting frame, the guide roller group is rotatably mounted on the second mounting frame, the guide roller group consists of two guide rollers rotatably mounted on the second mounting frame, a support rod is fixedly mounted on the second mounting frame, and the arc clamping head is fixedly mounted on an arc clamping plate.

[0007] Preferably, the guide mechanism further comprises a circular groove formed on the guide plate, a plurality of partitions are equidistantly installed in the circular groove, a rotating shaft is rotatably installed between adjacent partitions, and the rubber wheel is fixedly installed on the rotating shaft.

[0008] Preferably, the power assembly includes a gear sleeve fixed in the mounting tube, and also includes a reduction motor fixedly mounted on the movable shaft, a gear is fixed at the output end of the reduction motor, the gear and the gear sleeve are meshed, a hollow column is fixed on the gear, a corrugated wheel is fixed on the hollow column, the power assembly also includes a micro air cylinder fixed under the movable shaft, the micro air cylinder includes an air pumping head cooperating with the corrugated wheel, the movable shaft includes an air guide tube, the micro air cylinder also includes an air supply pipe connected to the air guide tube, the hollow column is fixed and connected with one end of the hollow tube, the other end of the hollow tube is rotatably mounted in the air guide tube and connected thereto, an air supply pipe is fixed and connected between the corrugated wheel and the rubber airbag, and stabilizing sleeves are installed on both sides of the mounting tube, and the stabilizing sleeves are rotatably sleeved on the movable shaft.

[0009] Preferably, the reflective film comprises a reflective powder adhesive layer, a high temperature resistant flexible layer and a first smooth layer from top to bottom, the reflective powder adhesive layer is adhered to the high temperature resistant flexible layer, and the rubber airbag is provided with a second smooth layer and a heat insulation layer from outside to inside.

[0010] Preferably, a shielding plate is fixedly mounted on the movable shaft, a pushing plate is slidably mounted on the reflective film, cylinders are mounted on both sides of the frame, and pushing ends of the two cylinders are fixedly connected to the movable shaft and the pushing plate respectively.

[0011] Preferably, the driving mechanism includes a shell fixed on the frame, an adjusting column and an adjusting gear are rotatably installed in the shell, the light shield is fixedly installed on the adjusting column, a driven bevel gear is fixedly installed on the adjusting column, a driving bevel gear is fixedly installed on the adjusting gear, the driven bevel gear and the driving bevel gear are meshed, a movable moving rod is provided in the shell, a tooth plate meshing with the adjusting gear is fixedly installed on the moving rod, and the moving rod is fixedly connected to the baffle.

[0012] Preferably, the light shield is provided with a movable groove, the detection mechanism includes a reciprocating screw installed in the movable groove, a motor is installed in the movable groove, the reciprocating screw and the output end of the motor are fixedly connected, two reciprocating screws are threadedly mounted with movable seats, laser scanners and detection lights are respectively mounted on the two movable seats, the detection mechanism also includes a fill light fixed in the light shield, and a miniature industrial camera installed on the push plate.

[0013] Compared with the existing technology, the beneficial effects of the present invention are: a reflective film is formed by attaching a reflective powder glue layer to a high-temperature resistant flexible layer, and the reflective film is automatically attached to the inner wall of the quartz reaction tube through a film-type reflective device, and the heat generated by the electric heating plate is reused through the film-sticking mechanism, so that the reflective powder glue layer can be semi-melted and evenly coated on the inner wall of the quartz reaction tube, thereby avoiding the problem of refraction and reflection during operation of the laser scanner, improving the scanning effect, and after the operation, the reflective powder glue layer can be torn off through the reflective film, and will not cause pollution and damage to the quartz reaction tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 It is a side view structural schematic diagram of the present invention; Figure 3 It is a structural schematic diagram of the laminating mechanism and the guiding mechanism of the present invention; Figure 4 It is a schematic diagram of the structure of the reflective film of the present invention; Figure 5 It is a schematic diagram of the side cross-sectional structure of the film sticking mechanism of the present invention; Figure 6 for Figure 5 The enlarged structural diagram at A in the middle; Figure 7 It is a schematic diagram of the structure of the power assembly of the present invention; Figure 8 It is a schematic diagram of the front cross-sectional structure of the film sticking mechanism of the present invention; Fig. 9 It is a structural schematic diagram of the driving mechanism of the present invention.

[0015] Figure numerals: 1, laminating mechanism; 2, guiding mechanism; 3, film sticking mechanism; 4, power assembly; 5, shading device; 6, reflective film; 7, pushing plate; 8, shielding plate; 9, detection mechanism; 11, winding roller; 12, first mounting frame; 13, second mounting frame; 14, guide roller group; 15, support rod; 21, guide plate; 22, rotating shaft; 23, rubber wheel; 24, circular groove; 25, partition; 31, mounting cylinder; 32, rubber airbag; 33, stabilizing sleeve; 41, gear sleeve; 42, reduction motor; 43, gear; 44, micro air cylinder; 45, pumping head; 46, corrugated wheel; 47, hollow column; 48, hollow tube; 49, air supply pipe; 51, shading hood; 52. Driving mechanism; 53. Moving groove; 521. Adjusting column; 522. Driven bevel gear; 523. Active bevel gear; 524. Adjusting gear; 525. Moving rod; 526. Tooth plate; 527. Shell; 61. Arc chuck; 62. Arc chuck plate; 63. First smooth layer; 64. High temperature resistant flexible layer; 65. Reflective powder adhesive layer; 91. Reciprocating screw; 92. Laser scanner; 93. Detection light; 94. Miniature industrial camera; 95. Fill light; 100. Moving axis; 101. Air guide tube; 200. Quartz diffusion tube body; 300. Second smooth layer; 400. Electric heating plate; 500. Air pipe; 600. Positioning sleeve; 700. Insulation layer. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0017] See attached Figure 1-9 , an automatic scanning device for appearance defects of a quartz diffusion tube, comprising a positioning sleeve 600 and a moving shaft 100 respectively arranged on both sides of a frame, and also comprising a light shielding device 5 installed on the frame, a quartz diffusion tube body 200 to be inspected is sleeved on the positioning sleeve 600, and a film-type reflective device that can enter the quartz diffusion tube body 200 is arranged on the moving shaft 100, and the film-type reflective device comprises a film-coating mechanism 1, a guide mechanism 2 and a film-coating mechanism 3 sequentially arranged along the forward direction of the moving shaft 100; The laminating mechanism 1 comprises a plurality of winding rollers 11 and a guide roller group 14 fixed to the circumference of the moving shaft 100 and distributed at equal intervals. The winding roller 11 winds up a reflective film 6. One end of the reflective film 6 passes through the guide roller group 14 and is fixed with an arc-shaped clamp 61. The guide mechanism 2 comprises a guide plate 21 fixed to the moving shaft 100. A plurality of rubber wheels 23 distributed in a circular shape are rotatably installed in the guide plate 21. The film-sticking mechanism 3 includes a mounting tube 31 whose center coincides with the moving axis 100, and also includes a plurality of circularly distributed rubber airbags 32 fixed on the outside of the mounting tube 31. A power assembly 4 for driving the mounting tube 31 to rotate and inflating the rubber airbags 32 is provided in the film-sticking mechanism 3. The shading device 5 includes two shading covers 51 respectively arranged on both sides of the moving axis 100, and also includes a driving mechanism 52 for driving the two shading covers 51 to close and surround the film-sticking mechanism 3. The two shading covers 51 are provided with a detection mechanism 9 and an electric heating plate 400. The driving mechanism 52 operates when the moving axis 100 moves.

[0018] When the film-type reflective device enters the quartz diffusion tube body 200, the arc-shaped clamp 61 is hung on one end of the quartz diffusion tube body 200, and as the quartz diffusion tube body 200 moves, the winding roller 11 and the guide roller group 14 release the reflective film 6 along the inner wall of the quartz diffusion tube body 200, and the rubber wheel 23 pushes the reflective film 6 against the inner wall of the quartz diffusion tube body 200. The film-sticking mechanism 3 makes the reflective film 6 tightly fit on the inner wall of the quartz diffusion tube body 200, and forms an anti-laser reflection and scattering coating by heating. As the quartz diffusion tube body 200 moves, the two light shielding covers 51 close to surround the quartz diffusion tube body 200 to form a detection environment, and then the film-sticking mechanism 3 drives the quartz diffusion tube body 200 to rotate and pass through the detection mechanism 9 for scanning.

[0019] Furthermore, the laminating mechanism 1 also includes a plurality of first mounting frames 12 and second mounting frames 13 respectively fixed on the sides of the movable shaft 100 and equidistantly distributed, the winding roller 11 is rotatably mounted on the first mounting frame 12, the guide roller group 14 is rotatably mounted on the second mounting frame 13, the guide roller group 14 is composed of two guide rollers rotatably mounted on the second mounting frame 13, the second mounting frame 13 is fixedly mounted with a support rod 15, and the arc clamping head 61 is fixedly mounted with an arc clamping plate 62.

[0020] When the reflective film 6 is in the rolled-up state, the support rod 15 is clamped between the arc-shaped clamping head 61 and the arc-shaped clamping plate 62 so that the arc-shaped clamping head 61 is supported.

[0021] Furthermore, the guide mechanism 2 also includes a circular groove 24 formed on the guide plate 21 , a plurality of partitions 25 are equidistantly installed in the circular groove 24 , a rotating shaft 22 is rotatably installed between adjacent partitions 25 , and a rubber wheel 23 is fixedly installed on the rotating shaft 22 .

[0022] When the winding roller 11 unwinds the reflective film 6 , the rubber wheel 23 contacts the reflective film 6 , and as the movable shaft 100 moves, the friction force generated by the contact of the rubber wheel 23 causes it to rotate, thereby squeezing and pushing the reflective film 6 toward the inner wall of the quartz diffusion tube body 200 .

[0023] Further, such as Figure 5 and Figure 7As shown, the power assembly 4 includes a gear sleeve 41 fixed in the mounting tube 31, and also includes a reduction motor 42 fixedly mounted on the moving shaft 100, a gear 43 is fixed at the output end of the reduction motor 42, the gear 43 is meshed with the gear sleeve 41, a hollow column 47 is fixed on the gear 43, a corrugated wheel 46 is fixedly mounted on the hollow column 47, the power assembly 4 also includes a micro air cylinder 44 fixed below the moving shaft 100, the micro air cylinder 44 includes an air pumping head 45 cooperating with the corrugated wheel 46, the moving shaft 100 includes an air guide tube 101, the micro air cylinder 44 also includes an air supply pipe 500 connected to the air guide tube 101, the hollow column 47 is fixed and connected to one end of the hollow tube 48, the other end of the hollow tube 48 is rotatably mounted in the air guide tube 101 and connected thereto, an air supply pipe 49 is fixed and connected between the corrugated wheel 46 and the rubber airbag 32, and stabilizing sleeves 33 are installed on both sides of the mounting tube 31, and the stabilizing sleeve 33 is rotatably sleeved on the moving shaft 100.

[0024] Starting the reduction motor 42 will drive the installation cylinder 31 to rotate, and the corrugated wheel 46 rotates to continuously squeeze the air pump 45, so that the micro air cylinder 44 supplies air to the rubber airbag 32, causing the rubber airbag 32 to expand and put pressure on the reflective film 6, so that the reflective film 6 is supported and tightly fits the inner wall of the quartz diffusion tube body 200, and drives the quartz diffusion tube body 200 to rotate for detection, thereby completing the entire installation of the reflective film 6.

[0025] In addition, the rubber airbag 32 is provided with an air outlet, and the air outlet efficiency of the air outlet is lower than the air supply efficiency of the air supply pipe 49 to the rubber airbag 32. This ensures that when the rubber airbag 32 is in use, it can be kept in an expanded state. When the operation is completed, the gas can be slowly discharged through the air outlet. This arrangement facilitates the film-sticking mechanism 3 to enter and exit the quartz diffusion tube body 200.

[0026] Furthermore, the reflective film 6 includes a reflective powder adhesive layer 65, a high temperature resistant flexible layer 64 and a first smooth layer 63 from top to bottom, the reflective powder adhesive layer 65 is adhered to the high temperature resistant flexible layer 64, and a second smooth layer 300 and a heat insulating layer 700 are provided on the rubber airbag 32 from outside to inside.

[0027] The heat insulation layer 700 can isolate the heat during operation and protect the safety of the rubber airbag 32. The second smooth layer 300 can reduce the friction when the film sticking mechanism 3 just contacts the reflective film 6, ensuring that the power component 4 can drive the film sticking mechanism 3 to rotate, so that when the film sticking mechanism 3 rotates and the rubber airbag 32 is inflated, the reflective film 6 can be completely attached to the inner wall of the quartz diffusion tube body 200.

[0028] In this embodiment, a shielding plate 8 is fixedly installed on the movable shaft 100, a pushing plate 7 is slidably installed on the reflective film 6, cylinders are installed on both sides of the frame, and the pushing ends of the two cylinders are fixedly connected to the movable shaft 100 and the pushing plate 7 respectively. The driving mechanism 52 includes a shell 527 fixed on the frame, and an adjusting column 521 and an adjusting gear 524 are rotatably installed in the shell 527. The light shield 51 is fixedly installed on the adjusting column 521, and a driven bevel gear 522 is fixedly installed on the adjusting column 521. The adjusting gear 524 is fixedly installed with an active bevel gear 523, and the driven bevel gear 522 and the active bevel gear 523 are meshed. A movable moving rod 525 is provided in the shell 527, and the moving rod 525 is fixedly installed with a tooth plate 526 meshing with the adjusting gear 524, and the moving rod 525 is fixedly connected to the shielding plate 8.

[0029] By moving the baffle plate 8, the tooth plate 526 drives the adjusting gear 524 to rotate, thereby driving the active bevel gear 523 to engage the driven bevel gear 522 to rotate, so that the adjusting column 521 can rotate, so that the light shield 51 can make the two light shields 51 close, and in this embodiment, the length of the tooth plate 526 is only enough to move the light shield 51 to the closed position.

[0030] In addition, the light shield 51 is provided with a movable groove 53, and the detection mechanism 9 includes a reciprocating screw 91 installed in the movable groove 53, a motor is installed in the movable groove 53, the reciprocating screw 91 and the output end of the motor are fixedly connected, and movable seats are threadedly installed on the two reciprocating screws 91, and laser scanners 92 and detection lights 93 are respectively installed on the two movable seats. The detection mechanism 9 also includes a fill light 95 fixed in the light shield 51, and a miniature industrial camera 94 installed on the push plate 7.

[0031] Working principle: In the first step, the quartz diffusion tube body 200 is sleeved on the positioning sleeve 600, and one end of the quartz diffusion tube body 200 is against the pushing plate 7. During operation, the reflective film 6 is rolled up on the winding roller 11, and one end of the reflective film 6 passes between the guide roller group 14. The arc clamping plate 62 is hung on the support rod 15 to keep the position of the arc clamping head 61 stable. The two cylinders are started to push the moving shaft 100 and the pushing plate 7 respectively, so that the two are close to each other, so that the coating mechanism 1 will first enter the quartz diffusion tube body 200. As the two continue to move, the arc clamping head 61 is hung on the pipe mouth wall of the quartz diffusion tube body 200, and then the rubber wheel 23 and the reflective film 6 are connected. The rubber wheel 23 is touched and rotated by friction during the movement, pushing the reflective film 6 toward the inner wall of the quartz diffusion tube 200. At the same time, as the moving shaft 100 moves, the film sticking mechanism 3 begins to enter the quartz diffusion tube 200. At this time, the reduction motor 42 is started to drive the gear 43 to rotate, and as the gear 43 rotates, the corrugated wheel 46 is driven to rotate. The corrugations on the corrugated wheel 46 will continuously squeeze the pumping head 45, so that the micro cylinder 44 emits gas, and the gas enters the hollow tube 48 through the gas delivery pipe 500, and finally is input into the rubber airbag 32 through the air delivery pipe 49, so that the rubber airbag 32 is continuously inflated and begins to expand; In the second step, as the moving shaft 100 moves, the shielding plate 8 drives the moving rod 525 to move, and the tooth plate 526 drives the adjusting gear 524 to rotate, thereby rotating the adjusting column 521, and the two light shielding covers 51 will move closer to each other. As the pushing plate 7 and the moving shaft 100 continue to move, the coating mechanism 1 and the guiding mechanism 2 enter the positioning sleeve 600, and the coating mechanism 3 completely enters the quartz diffusion tube body 200. At this time, the two light shielding covers 51 are successfully closed, and the pushing plate 7 and the shielding plate 8 will block both ends of the light shielding covers to form a closed environment. At this time, the moving shaft 100 and the pushing plate 7 stop moving. Step 3: During this time, the reduction motor 42 will also drive the installation cylinder 31 to rotate, so that the rubber airbag 32 will also rotate. At this time, the rubber airbag 32 is not in contact with the reflective film 6. When the moving shaft 100 is completely moved, the rubber airbag 32 will also be fully expanded. Through the extrusion force of the expansion, the rubber airbag 32 and the reflective film 6 are completely attached, and the reflective film 6 is also completely attached to the inner wall of the quartz diffusion tube body 200. Specifically, during the continuous expansion of the rubber airbag 32, the rubber airbag 32 and the reflective film 6 may occasionally contact each other. The second smooth layer 300 and the first smooth layer 63 can reduce the friction force to prevent the reflective film 6 from rotating due to the rotation of the rubber airbag 32. When the rubber airbag 32 is fully expanded, the rubber airbag 32 and the reflective film 6 will be in contact, and the squeezing force of the expansion is greater than the friction force, so that the rubber airbag 32 will drive the reflective film 6 to rotate. The fourth step is to start the electric heating plate 400, set the temperature threshold of the electric heating plate 400, and then generate high temperature. As the electric heating plate 400 continues to heat up, the reflective powder adhesive layer 65 gradually melts. When the electric heating plate 400 reaches the set temperature value, the reflective powder adhesive layer 65 is semi-melted and adheres to the inner wall of the quartz diffusion tube body 200. As the reflective powder adhesive layer 65 rotates, it is evenly distributed on the inner wall of the quartz diffusion tube body 200. After that, the electric heating plate 400 starts to cool down, so that the reflective powder adhesive layer 65 solidifies on the inner wall of the quartz diffusion tube body 200. Step 5: With the solidification of the reflective powder adhesive layer 65 and the expansion and squeezing force of the rubber airbag 32, the rotation of the mounting tube 31 will also drive the quartz diffusion tube body 200 to rotate. At this time, the motor of the detection mechanism 9 is started to drive the reciprocating screw 91 to rotate, so that the laser scanner 92 and the detection light 93 move synchronously. With the rotation of the quartz diffusion tube body 200, the laser scanner 92 performs a comprehensive scan and detection of the appearance of the quartz diffusion tube body 200. Turning on the detection light 93 ensures the ambient brightness, and starting the miniature industrial camera 94 can shoot and detect the port of the quartz diffusion tube body 200, and starting the fill light 95 can ensure the light intensity of the fill light 95 when shooting. Step 6. When the scan is completed, start the cylinder again to return the movable shaft 100 to its original position. At this time, the light shield 51 will also return to its original position. Finally, when the rubber airbag 32 is deflated, remove the quartz diffusion tube body 200. At this time, the reflective powder glue layer 65 is still adhered to the inner wall of the quartz diffusion tube body 200. It can be torn off by simply pulling the arc-shaped clamp 61. In this way, all operations are completed without causing difficult-to-clean contamination to the quartz diffusion tube body 200.

[0032] In this embodiment, the reflective powder glue layer 65 is made of a mixture of titanium dioxide powder and epoxy resin glue, and the high temperature resistant flexible layer 64 is made of a flexible ceramic material. It should be noted that the use of reflective powder to reduce refraction and reflection is a common technical means in this technical field, and in this technical field, it is also a common technical means to stick a mixture of glue and reflective powder to the inner wall of a quartz diffusion tube.

[0033] The present invention mainly solves the problem of how to adhere the reflective powder to the inner wall of the quartz diffusion tube without pollution or damage. The reflective powder adhesive layer 65 is attached to the high temperature resistant flexible layer by the dipping method or spraying method in the prior art.

[0034] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An automatic scanning device for appearance defects of a quartz diffusion tube, characterized in that: The invention comprises a positioning sleeve (600) and a movable shaft (100) respectively arranged on both sides of a frame, and also comprises a light shielding device (5) mounted on the frame, a quartz diffusion tube body (200) to be detected is sleeved on the positioning sleeve (600), and a film-type reflective device capable of entering into the quartz diffusion tube body (200) is arranged on the movable shaft (100), and the film-type reflective device comprises a film coating mechanism (1), a guide mechanism (2) and a film sticking mechanism (3) arranged in sequence along the forward direction of the movable shaft (100); The laminating mechanism (1) comprises a plurality of winding rollers (11) and guide roller groups (14) fixed on the circumference of a movable shaft (100) and distributed at equal intervals, the winding roller (11) winding a reflective film (6), one end of the reflective film (6) passing through the guide roller group (14) and fixed with an arc-shaped clamping head (61), the guide mechanism (2) comprising a guide plate (21) fixed on the movable shaft (100), a plurality of circularly distributed rubber wheels (23) rotatably mounted in the guide plate (21); The film sticking mechanism (3) comprises a mounting tube (31) whose center coincides with the moving shaft (100), and also comprises a plurality of rubber airbags (32) fixed on the outside of the mounting tube (31) and distributed in a circular shape. The film sticking mechanism (3) is provided with a power assembly (4) for driving the mounting tube (31) to rotate and for inflating the rubber airbags (32). The shading device (5) comprises two shading covers (51) respectively arranged on both sides of the moving shaft (100), and also comprises a driving mechanism (52) for driving the two shading covers (51) to close and surround the film sticking mechanism (3). The two shading covers (51) are provided with a detection mechanism (9) and an electric heating plate (400). The driving mechanism (52) operates when the moving shaft (100) moves.

2. The automatic scanning device for the appearance defects of a quartz diffusion tube according to claim 1, characterized in that: The laminating mechanism (1) further comprises a plurality of first mounting frames (12) and second mounting frames (13) respectively fixed on the circumference of the movable shaft (100) and distributed at equal intervals, the winding roller (11) being rotatably mounted on the first mounting frame (12), the guide roller group (14) being rotatably mounted on the second mounting frame (13), the guide roller group (14) being composed of two guide rollers rotatably mounted on the second mounting frame (13), a support rod (15) being fixedly mounted on the second mounting frame (13), and the arc-shaped clamping head (61) being fixedly mounted with an arc-shaped clamping plate (62).

3. The automatic scanning device for the appearance defects of a quartz diffusion tube according to claim 1, characterized in that: The guide mechanism (2) further comprises a circular groove (24) formed on the guide plate (21), a plurality of partitions (25) being equidistantly mounted in the circular groove (24), a rotating shaft (22) being rotatably mounted between adjacent partitions (25), and the rubber wheel (23) being fixedly mounted on the rotating shaft (22).

4. The automatic scanning device for the appearance defects of a quartz diffusion tube according to claim 1, characterized in that: The power assembly (4) comprises a gear sleeve (41) fixed in the mounting tube (31), and also comprises a reduction motor (42) fixedly mounted on the moving shaft (100); a gear (43) is fixedly mounted on the output end of the reduction motor (42); the gear (43) and the gear sleeve (41) are meshed; a hollow column (47) is fixedly mounted on the gear (43); a corrugated wheel (46) is fixedly mounted on the hollow column (47); the power assembly (4) also comprises a micro air cylinder (44) fixedly mounted below the moving shaft (100); the micro air cylinder (44) comprises an air pump that cooperates with the corrugated wheel (46); The micro air cylinder (44) further comprises an air supply pipe (500) connected to the air guide pipe (101); the hollow column (47) is fixed to and connected to one end of the hollow pipe (48); the other end of the hollow pipe (48) is rotatably mounted in and connected to the air guide pipe (101); an air supply pipe (49) is fixed between the corrugated wheel (46) and the rubber airbag (32) and connected to the air guide pipe (49); and stabilizing sleeves (33) are mounted on both sides of the mounting cylinder (31); the stabilizing sleeves (33) are rotatably mounted on the movable shaft (100).

5. The automatic scanning device for the appearance defects of a quartz diffusion tube according to claim 4, characterized in that: The reflective film (6) comprises, from top to bottom, a reflective powder adhesive layer (65), a high temperature resistant flexible layer (64), and a first smooth layer (63); the reflective powder adhesive layer (65) is adhered to the high temperature resistant flexible layer (64); and the rubber airbag (32) is provided with, from outside to inside, a second smooth layer (300) and a heat insulation layer (700).

6. The automatic scanning device for the appearance defects of a quartz diffusion tube according to claim 1, characterized in that: A shielding plate (8) is fixedly mounted on the movable shaft (100), a pushing plate (7) is slidably mounted on the reflective film (6), and cylinders are mounted on both sides of the frame, with pushing ends of the two cylinders being fixedly connected to the movable shaft (100) and the pushing plate (7) respectively.

7. The automatic scanning device for the appearance defects of a quartz diffusion tube according to claim 6, characterized in that: The driving mechanism (52) comprises a housing (527) fixed on a frame, an adjusting column (521) and an adjusting gear (524) being rotatably mounted in the housing (527), the light shield (51) being fixedly mounted on the adjusting column (521), a driven bevel gear (522) being fixedly mounted on the adjusting column (521), a driving bevel gear (523) being fixedly mounted on the adjusting gear (524), the driven bevel gear (522) and the driving bevel gear (523) being meshed, a movable moving rod (525) being provided in the housing (527), a toothed plate (526) being fixedly mounted on the moving rod (525) and meshing with the adjusting gear (524), and the moving rod (525) and the shielding plate (8) being fixedly connected.

8. The automatic scanning device for the appearance defects of a quartz diffusion tube according to claim 7, characterized in that: The light shield (51) is provided with a movable groove (53), the detection mechanism (9) comprises a reciprocating screw (91) installed in the movable groove (53), a motor is installed in the movable groove (53), the reciprocating screw (91) and the output end of the motor are fixedly connected, two reciprocating screws (91) are threadedly mounted with movable seats, and the two movable seats are respectively mounted with a laser scanner (92) and a detection lamp (93), the detection mechanism (9) further comprises a fill light (95) fixed in the light shield (51), and a miniature industrial camera (94) mounted on the push plate (7).

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