Configuration file generation method and semiconductor process equipment

Abstract

The invention discloses a configuration file generation method and semiconductor process equipment. The method comprises the following steps: acquiring an identifier of a target hardware configuration item related to target semiconductor process equipment; a pre-constructed configuration file template is obtained, the configuration file template comprises configuration item configuration files corresponding to the identifiers of the hardware configuration items supported by the semiconductor process equipment, and the configuration item configuration files comprise configuration item configuration file contents corresponding to the identifiers of the hardware configuration items; determining a target configuration item configuration file in each configuration item configuration file of the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item; and generating a configuration file corresponding to the target semiconductor process equipment according to the configuration item configuration file content in each target configuration item configuration file. According to the method, the maintenance cost of the configuration file is reduced, human resources are saved, and the generation efficiency and accuracy of the configuration file are improved.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor technology, and in particular, relates to a configuration file generation method and semiconductor process equipment. Background Art

[0002] As the soul of production line equipment such as semiconductor process equipment, control software directly affects the equipment's process, production efficiency, stability, reliability, safety, and ease of operation. With the expansion of multiple product lines, more and more types of equipment have emerged. Even for the same type of equipment, the software requirements change in a variety of ways due to customer customization requirements and hardware module changes. Therefore, in order to reduce the cost of control software maintenance and enhance the reusability of control software, the configuration file method is used to customize the control software, adapt to the hardware combination of different devices, and the initial settings of various functional parameters.

[0003] In the related art, software engineers usually manually write a set of configuration files for each device in combination with the hardware and process information of the machine to realize the customized development of the device control software. However, due to the highly customized characteristics of the device control software, there is the possibility of any combination of various configuration items. Therefore, with the iteration of software functions and the increase of hardware types, the combination of configuration files has shown an exponential growth. With the explosive linear growth of the number of devices, the workload of generating and maintaining the configuration files of the device control software has increased sharply, increasing the maintenance cost of the configuration files. In addition, the writing of configuration files depends on the device control software, so modifying the configuration files requires software expertise and business capabilities, so it requires professional personnel to maintain, which consumes a lot of human resources. And for cluster-type chambers, the same type of chambers are only arranged in different positions, but the changes involved require the configuration of each chamber to be modified one by one, and the configuration files of several devices of the same model also need to be manually modified one by one. This work is repetitive, cumbersome and prone to errors, consuming a lot of human resources and reducing the efficiency and accuracy of the generation of configuration files. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a configuration file generation method and semiconductor process equipment to solve the problem in the related art that a set of configuration files is manually written for each device, which increases the maintenance cost of the configuration files, consumes a lot of human resources, and reduces the generation efficiency and accuracy of the configuration files.

[0005] To achieve the above objectives, the present application embodiment adopts the following technical solutions:

[0006] In a first aspect, an embodiment of the present application provides a method for generating a configuration file, comprising: obtaining an identifier of a target hardware configuration item related to a target semiconductor process equipment; obtaining a pre-built configuration file template, wherein the configuration file template includes a configuration item configuration file corresponding to the identifier of a hardware configuration item supported by each semiconductor process equipment, wherein the configuration item configuration file includes configuration item configuration file content corresponding to the identifier of the hardware configuration item; determining a target configuration item configuration file in each of the configuration item configuration files in the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item; and generating a configuration file corresponding to the target semiconductor process equipment according to the configuration item configuration file content in each of the target configuration item configuration files.

[0007] In a second aspect, an embodiment of the present application provides a semiconductor process device, comprising: a configuration file generation device, the configuration file generation device is arranged in a host computer and / or a slave computer of the semiconductor process device, the configuration file generation device comprises at least one processor and at least one memory, a computer program is stored in the memory, and when the computer program is executed by the processor, the steps of the configuration file generation method as described in the embodiment of the first aspect of the present application are implemented.

[0008] At least one of the above technical solutions adopted in the embodiments of the present application can achieve the following beneficial effects:

[0009] When generating a configuration file, the embodiment of the present application obtains the identifier of the target hardware configuration item related to the target semiconductor process equipment, obtains a pre-built configuration file template, the configuration file template includes a configuration item configuration file corresponding to the identifier of the hardware configuration item supported by each semiconductor process equipment, the configuration item configuration file includes the configuration item configuration file content corresponding to the identifier of the hardware configuration item, and determines the target configuration item configuration file in each configuration item configuration file of the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item, and generates a configuration file corresponding to the target semiconductor process equipment according to the configuration item configuration file content in each target configuration item configuration file. The embodiment of the present application uniformly manages the target hardware configuration items of the target semiconductor process equipment and compares them with the pre-built configuration file template, thereby determining the target configuration item configuration file in the configuration file template, and then generating a configuration file corresponding to the target semiconductor process equipment, so that when the hardware changes or the configuration file needs to be changed according to customer needs, only one configuration file template needs to be modified, thereby reducing the maintenance cost of the configuration file. In addition, in the embodiment of the present application, the configuration file is automatically generated. Compared with manually written configuration files, subsequent maintenance can reduce dependence on professional knowledge and business capabilities, and no professional personnel are required for maintenance, saving a lot of human resources. In addition, for devices of the same model and the same chamber but different arrangement positions, only one configuration file template needs to be modified to automatically generate the configuration file, saving human resources and improving the efficiency and accuracy of configuration file generation. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0011] Figure 1 A flowchart of a method for generating a configuration file provided in one embodiment of the present application;

[0012] Figure 2 A flowchart of a method for generating a configuration file provided in another embodiment of the present application;

[0013] Figure 3 A flowchart of a method for generating a configuration file provided in another embodiment of the present application;

[0014] Figure 4 A schematic structural diagram of a semiconductor process equipment provided for one embodiment of the present application. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0016] The terms "first", "second", etc. in this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here. In addition, the "and / or" in this application represents at least one of the connected objects, and the character " / " generally represents that the front and back associated objects are in an "or" relationship. It should be noted that the data involved in this application are all obtained on the premise of obtaining user authorization.

[0017] As the soul of production line equipment such as semiconductor process equipment, control software directly affects the process, production efficiency, stability, reliability, safety and ease of operation of the equipment. With the expansion of multiple product lines, more and more types of equipment have emerged. Even for the same type of equipment, the software requirements are changed in a variety of ways due to customer customization requirements and hardware module changes. Therefore, in order to reduce the cost of control software maintenance and enhance the reusability of control software, the configuration file method is used to customize the control software to adapt to the hardware combination of different devices and the initial settings of various functional parameters. By using the dynamic creation of control software objects and the message mapping mechanism, software engineers can easily and quickly adjust the application's own content or operating environment by modifying the configuration file, avoiding the trouble of modifying the code and recompiling, improving development efficiency, enhancing the reusability of the code, and reducing the difficulty of modification and maintenance.

[0018] In the related technology, software engineers usually manually write a set of configuration files for each device based on the hardware and process information of the machine to realize customized development of the device control software. The specific methods are as follows: 1) Software engineers develop a complete set of device control software to achieve compatibility with various hardware; 2) For a specific device, software engineers manually modify the configuration file according to the device hardware configuration (such as referring to the material management system: Product Lifecycle Management (PLM) system or the material information in the Engineering Bill of Materials (EBOM) system) and the functional requirements required by the customer, to achieve the trade-offs of various functions in the device control software to meet the requirements of adapting to the device. Each device corresponds to a set of configuration files; 3) During subsequent equipment maintenance, for the newly added functions, the corresponding configuration files need to be manually modified to achieve the addition. If each device needs to be upgraded, each set of configuration files needs to be modified one by one.

[0019] However, due to the highly customized characteristics of the equipment control software, there is the possibility of any combination of various configuration items. Therefore, with the iteration of software functions and the increase of hardware types, the combination of configuration files shows an exponential growth, and then accompanied by the explosive linear growth of the number of devices, the generation and maintenance workload of the configuration files of the equipment control software increases sharply, increasing the maintenance cost of the configuration files. In addition, the writing of the configuration files depends on the equipment control software, so modifying the configuration files requires software expertise and business capabilities, so it requires professionals to maintain, consuming a lot of human resources. And for the cluster type (Cluster) chamber, the same type of chamber is only arranged in different positions, but the changes involved need to modify the configuration of each chamber one by one, and the configuration files of several devices of the same model also need to be manually modified one by one. This work is repeated, cumbersome and prone to errors, consuming a lot of human resources, and reducing the generation efficiency and accuracy of the configuration files. For this reason, the present application proposes a method for generating a configuration file, a semiconductor process device and a storage medium to solve the problem of manually writing a set of configuration files for each device in the related art, increasing the maintenance cost of the configuration files, consuming a lot of human resources, and reducing the generation efficiency and accuracy of the configuration files.

[0020] The technical solutions provided by various embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0021] Figure 1 A flowchart of a method for generating a configuration file provided in one embodiment of the present application is shown below. Figure 1 As shown, the method for generating a configuration file in the embodiment of the present application may specifically include the following steps:

[0022] S101, obtaining an identifier of a target hardware configuration item related to a target semiconductor process equipment.

[0023] In an embodiment of the present application, the execution subject of the configuration file generation method of the embodiment of the present application is a configuration file generation device, which can be set in the host computer and / or the slave computer of the semiconductor process equipment (such as vertical furnace oxidation equipment, etc.).

[0024] The target semiconductor process equipment is the semiconductor process equipment for which the configuration file is currently to be generated. The target hardware configuration item is the hardware configuration item in the target semiconductor process equipment.

[0025] It should be noted here that the configuration items in semiconductor process equipment can be divided into two categories: one is the configuration items related to the hardware type, recorded as hardware configuration items, and the other is the configuration items related to the functional logic, recorded as functional configuration items. Taking a simple gas circuit as an example, the model and range of the flow meter involved, the model of the valve controller, etc. are hardware configuration items, and the gas circuit name, the type of gas passed by the flow meter, whether to start the flow meter calibration compensation, the order of opening the gas circuit valve, whether the valve is a fast valve, etc. are functional configuration items.

[0026] For function configuration items, a function list can be established with function names and option values ​​as content. The function list can be fixedly stored in the device (e.g., the lower computer) in the form of an Extensible Markup Language (XML) file. After reading the file through a graphical user interface (GUI) (e.g., the GUI interface of the upper computer), the function list will be displayed on the operation interface. The personnel with administrator authority can determine the usage of the corresponding function configuration item (i.e., whether to enable the corresponding function configuration item) by modifying the option value. For example, taking the Integrated development and learning environment Bake (Idle Bake) function as an example, when the option value is Enable, it means to turn on, and when the option value is Disable, it means to turn off. The administrator can choose to enable or turn off the function according to the specific needs of the site. In actual applications, each type of device has a default function item configuration, and the setting of the function configuration item can be quickly completed by importing the file, that is, the device replaces the original function configuration item setting by reading the function list XML file.

[0027] For hardware configuration items, the configuration file generation method of the embodiment of the present application can be used to generate a corresponding configuration file. The hardware configuration item can be uniquely characterized by the identifier of the hardware configuration item. Obtaining the target hardware configuration item related to the target semiconductor process equipment is embodied in obtaining the identifier of the target hardware configuration item related to the target semiconductor process equipment.

[0028] The identifier of the target hardware configuration item may specifically include the name of the target hardware configuration item.

[0029] The target hardware configuration item can be named according to the following rules:

[0030] Rule 1) The name of the target hardware configuration item includes any one or any combination of the name of the target hardware, the vendor name of the target hardware, and the model of the target hardware.

[0031] Specifically, for very low-level target hardware, the names of its configuration items are generally named using "name of target hardware_vendor name_model".

[0032] If there is only one model of this type of hardware, no model is required. For example, if different suppliers of valve groups (Solenoid) (such as supplier A and supplier B) correspond to the same model, the naming is as follows: Solenoid_A, Solenoid_B.

[0033] If there are multiple models of this type of hardware, for example, there are two models of Turbopump C from supplier, they are named as follows: Turbopump_C_V1, Turbopump_C_V2.

[0034] Rule 2) The name of the target hardware configuration item includes the functional module corresponding to the target hardware and the type of the functional module.

[0035] Specifically, for the target hardware at the upper level, the configuration items are generally named as "Functional Module_Type". For example, the chuck has different types: Ped, Pin, BLT, and they are named as follows: Chuck_Ped, Chuck_Pin, Chuck_BLT.

[0036] S102, obtaining a pre-built configuration file template, wherein the configuration file template includes a configuration item configuration file corresponding to the identifier of the hardware configuration item supported by each semiconductor process equipment, and the configuration item configuration file includes configuration item configuration file content corresponding to the identifier of the hardware configuration item.

[0037] In an embodiment of the present application, configuration files of all device software can be managed by pre-creating a configuration file template. The configuration file template can cover all hardware configuration items supported by the device, and can specifically include multiple configuration files corresponding to the identifier of each hardware configuration item, which are recorded as configuration item configuration files. Each configuration item configuration file includes the configuration file content corresponding to the identifier of the hardware configuration item, which is recorded as the configuration item configuration file content. The configuration file template can be saved in other text forms such as XML files or object notations (C JavaScript object notation, abbreviated as CJSon) written in C, JS (JavaScript) language.

[0038] S103: Determine a target configuration item configuration file in each configuration item configuration file of the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item.

[0039] In an embodiment of the present application, the configuration file template obtained in step S102 is compared with the identifier of the target hardware configuration item obtained in step S101, and the configuration item configuration file corresponding to the identifier of the hardware configuration item in the configuration file template that is consistent with the identifier of the target hardware configuration item is determined as the configuration file corresponding to the target hardware configuration item, and is recorded as the target configuration item configuration file.

[0040] For example, if the identifiers of the target hardware configuration items acquired in step S101 are configuration item A and configuration item B, the configuration item configuration files corresponding to configuration item A and configuration item B in the configuration file template are determined as the target configuration item configuration files.

[0041] S104, generating a configuration file corresponding to the target semiconductor process equipment according to the configuration item configuration file content in each target configuration item configuration file.

[0042] In an embodiment of the present application, the configuration item configuration file content in each target configuration item configuration file in the configuration file template is retained, and the configuration item configuration file content in each non-target configuration item configuration file in the configuration file template is deleted to obtain a configuration file corresponding to the target semiconductor process equipment.

[0043] In summary, the configuration file generation method of the embodiment of the present application, when generating the configuration file, obtains the identifier of the target hardware configuration item related to the target semiconductor process equipment, obtains a pre-built configuration file template, the configuration file template includes a configuration item configuration file corresponding to the identifier of the hardware configuration item supported by each semiconductor process equipment, the configuration item configuration file includes the configuration item configuration file content corresponding to the identifier of the hardware configuration item, determines the target configuration item configuration file in each configuration item configuration file of the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item, and generates the configuration file corresponding to the target semiconductor process equipment according to the configuration item configuration file content in each target configuration item configuration file. The embodiment of the present application uniformly manages the target hardware configuration items of the target semiconductor process equipment and compares them with the pre-built configuration file template, thereby determining the target configuration item configuration file in the configuration file template, and then generating the configuration file corresponding to the target semiconductor process equipment, so that when the hardware changes or the customer needs to change the configuration file, only one configuration file template needs to be modified, thereby reducing the maintenance cost of the configuration file. In addition, in the embodiment of the present application, the configuration file is automatically generated. Compared with manually written configuration files, subsequent maintenance can reduce dependence on professional knowledge and business capabilities, and no professional personnel are required for maintenance, saving a lot of human resources. In addition, for devices of the same model and the same chamber but different arrangement positions, only one configuration file template needs to be modified to automatically generate the configuration file, saving human resources and improving the efficiency and accuracy of configuration file generation.

[0044] Figure 2 A flowchart of a method for generating a configuration file provided in another embodiment of the present application is shown below. Figure 2 As shown, in Figure 1 Based on the illustrated embodiment, the method for generating a configuration file in the embodiment of the present application may specifically include the following steps:

[0045] In the above embodiment, step S101 of “obtaining target hardware configuration items related to target semiconductor process equipment” may specifically include the following step S201 .

[0046] S201, obtaining a preset software configuration menu, wherein the software configuration menu includes an identifier of a target hardware configuration item.

[0047] In an embodiment of the present application, the identifiers of each target hardware configuration item can be stored in advance in a comma-separated values ​​(CSV) file format, and the file is recorded as a software configuration menu, which stores the identifiers of each target hardware configuration item related to the target semiconductor process equipment. Among them, CSV is a common plain text file format for storing tabular data (numbers and text) in plain text form. By reading the above-mentioned pre-stored CSV format software configuration menu, the identifiers of each target hardware configuration item stored in the software configuration menu are obtained.

[0048] It should be noted here that the software configuration menu can also be stored in other file formats such as XML, CJSon, Structured Query Language (SQL), etc., and the storage methods include but are not limited to text, database and other storage formats.

[0049] Further, such as Figure 3 As shown, before step S201 "obtaining a preset software configuration menu", the following steps of generating the software configuration menu may also be included:

[0050] S301, obtaining a preset target material configuration relationship table, wherein the target material configuration relationship table includes the serial numbers of target materials related to target semiconductor process equipment and identifiers of target hardware configuration items corresponding to the serial numbers of the target materials.

[0051] In the embodiment of the present application, the target material is the material required by the control software of the target semiconductor process equipment.

[0052] The target material number and target material information stored in the material management system can be obtained. The target material information may include but is not limited to the following information: supplier number, supplier name, model, purchase order number, line item, material description, purchase order quantity, project definition, WBS name, net price, undelivered quantity and purchase time. The target hardware configuration item identifier is generated based on the target material information. The target material configuration relationship table is generated based on the mapping relationship between the target material number and the target hardware configuration item identifier.

[0053] Among them, before the above-mentioned step of "generating a target material configuration relationship table according to the mapping relationship between the target material number and the identifier of the target hardware configuration item", the following step of obtaining the mapping relationship between the target material number and the identifier of the target hardware configuration item is also included: the target material number and the corresponding target hardware configuration item identifier are stored in the form of a key-value pair; based on the stored key-value pair, the mapping relationship between the target material number and the identifier of the target hardware configuration item is obtained.

[0054] For example, if the target material numbered 00000A corresponds to valve group model A, then create <00000A, Solenoid_A> Key-value pair, the target material numbered 00001A corresponds to the valve group of model B, so create <00001A, Solenoid_B> Key-value pairs, so that the number of each target material is mapped to the identifier of the target hardware configuration item. The mapping relationship can be saved in the material management system as an XML file and recorded as a target material configuration relationship table. At present, the material management system is generally purchased from outside, and the material management system can also be upgraded to store the mapping relationship in the material management system for easy management.

[0055] It should be noted here that, in addition to using the XML file format, the target material configuration relationship table can also be saved in other text formats or other storage methods such as databases.

[0056] S302, generating a software configuration menu according to the target material configuration relationship table.

[0057] In an embodiment of the present application, the target material configuration relationship table stores the mapping relationship between the target material number and the target hardware configuration item identifier. The target hardware configuration item identifier is exported from the material management system and stored in the CVS file format, which is recorded as a software configuration menu.

[0058] S202, obtaining a pre-built configuration file template, wherein the configuration file template includes a configuration item configuration file corresponding to the identifier of the hardware configuration item supported by each semiconductor process equipment, and the configuration item configuration file includes configuration item configuration file content corresponding to the identifier of the hardware configuration item.

[0059] In the embodiment of the present application, step S202 is the same as step S102 in the above embodiment and will not be described again here.

[0060] In the above embodiment, step S103 "determining a target configuration item configuration file in each configuration item configuration file of the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item" may specifically include the following steps S203-S204:

[0061] S203, generating a corresponding target configuration item label pair set according to the identifier of the target hardware configuration item, wherein the target configuration item label pair set includes a target configuration item label pair corresponding to the identifier of each target hardware configuration item, and the target configuration item label pair includes a target start configuration item label and a target end configuration item label.

[0062] In the embodiment of the present application, a corresponding target configuration item label pair is generated according to each target hardware configuration item, and a set consisting of multiple target configuration item label pairs corresponding to multiple target hardware configuration items is a target configuration item label pair set U, and each target configuration item label pair includes a target start configuration item label "target hardware configuration item identifier_beg" and a target end configuration item label "target hardware configuration item identifier_end". For example, the target configuration item label pair corresponding to the target hardware configuration item "Solenoid_A" is "Solenoid_A_beg" and "Solenoid_A_end".

[0063] S204, determining a target configuration item configuration file in each configuration item configuration file of the configuration file template, wherein the configuration item tag pair in the target configuration item configuration file is consistent with the target configuration item tag pair, and the configuration item configuration file in the configuration file template includes a configuration item tag pair corresponding to the identifier of the hardware configuration item and configuration item configuration file content located between the start configuration item tag and the end configuration item tag of the configuration item tag pair.

[0064] In an embodiment of the present application, in the configuration file template, the configuration item configuration file corresponding to each hardware configuration item is started with "identification of the hardware configuration item_beg" and ended with "identification of the hardware configuration item_end" to identify the content of the configuration item configuration file corresponding to each hardware configuration item.

[0065] The configuration file template obtained in step S202 is compared with the target configuration item label pair set U generated in step S203, and the configuration item configuration file corresponding to the identifier of the hardware configuration item in the configuration file template that is consistent with each target hardware configuration item label pair in set U is determined as the configuration file corresponding to the target hardware configuration item, and is recorded as the target configuration item configuration file.

[0066] For example, if the target configuration item label pair set U generated in step S203 includes the target configuration item label pair "Solenoid_A_beg" and "Solenoid_A_end", the configuration item configuration file corresponding to the target configuration item label pair "Solenoid_A_beg" and "Solenoid_A_end" in the configuration file template is determined as the target configuration item configuration file.

[0067] S205 , generating a configuration file corresponding to the target semiconductor process equipment according to the configuration item configuration file content in each target configuration item configuration file.

[0068] In an embodiment of the present application, the device control software reads the configuration file template, and with the help of the XML parsing function module, in the process of traversing the configuration file template, when the keywords "identification of the hardware configuration item_beg" and "identification of the hardware configuration item_end" are read, it is checked whether the tag pair is located in the set U. If the tag pair is in the set U, the configuration file content between "identification of the hardware configuration item_beg" and "identification of the hardware configuration item_end" is retained, that is, the configuration file associated with the target hardware configuration item corresponding to the device is retained; if the tag pair is not in the set U, the configuration file content between "identification of the hardware configuration item__beg" and "identification of the hardware configuration item__end" is deleted, that is, the configuration file associated with the hardware configuration item not related to the device is deleted. When the device control software completes the traversal of all target hardware configuration items in the configuration file template, the automatic generation of the configuration files of all target hardware configuration items is also completed, and the device control software adapted to the whole device is also built.

[0069] For example, if the material information of the device contains a target material numbered 00000A, then the software configuration menu corresponds to the target hardware configuration item Solenoid_A. After reading the software configuration menu, the device control software creates a tag pair of "Solenoid_A_beg" and "Solenoid_A_end" and puts it in the set U. After reading the configuration file template, when the device control software traverses to the keywords "Solenoid_B_beg" and "Solenoid_B_end", it is checked that the tag pair is not in the tag set U, and the configuration file content between "Solenoid_B_beg" and "Solenoid_B_end" is deleted, that is, the device does not use the B model valve group. When the keywords "Solenoid_A_beg" and "Solenoid_A_end" are traversed, it is checked that the pair of tags is in the tag set U, and the configuration file content between "Solenoid_A_beg" and "Solenoid_A_end" is retained, that is, the device uses the A model valve group.

[0070] Furthermore, the method for generating a configuration file of the embodiment of the present application may also include the following steps for dynamically managing configuration items: obtaining the newly added target material and the information of the newly added target material in the material management system; generating an identifier of the newly added target hardware configuration item based on the information of the newly added target material; and updating the target material configuration relationship table based on the mapping relationship between the number of the newly added target material and the identifier of the newly added target hardware configuration item.

[0071] In an embodiment of the present application, when a new material completes verification and is added to the material management system, an identifier of the newly added target hardware configuration item is generated based on the information of the newly added target material in the material management system, and the number of the newly added target material and the identifier of the newly added target hardware configuration item are stored in the form of a key-value pair. Based on the newly stored key-value pair, a mapping relationship between the number of the newly added target material and the identifier of the newly added target hardware configuration item is obtained, and the mapping relationship is added to the target material configuration relationship table stored in the form of an XML file, so as to realize the update of the target material configuration relationship table, and then realize the update of the software configuration menu.

[0072] Correspondingly, the software engineer needs to add the configuration file content corresponding to the newly added target hardware configuration item in the configuration file template, and mark it with "hardware configuration item identification_beg" and "hardware configuration item identification_end". When the pre-built configuration file template is subsequently obtained, the pre-built configuration file template based on the newly added target hardware configuration item is obtained, and the configuration file after the newly added target hardware configuration item is automatically generated.

[0073] When a material is deleted from the material management system, only the software configuration menu needs to be updated without making any changes to the configuration file template. The configuration file of the deleted material can be removed later.

[0074] From the above, it can be seen that in the whole process, the logic of automatic configuration file generation does not need to be rewritten, which realizes the high scalability of hardware configuration items and achieves the effect of configuring the configuration file corresponding to the newly added hardware configuration item once and using it multiple times (for the generation of the entire device configuration file).

[0075] In summary, the method for generating a configuration file in the embodiment of the present application, by uniformly managing the target hardware configuration items of the target semiconductor process equipment, and comparing them with the pre-built configuration file template, thereby determining the target configuration item configuration file in the configuration file template, and then generating the configuration file corresponding to the target semiconductor process equipment, so that when the hardware changes or the customer needs to change the configuration file, only one configuration file template needs to be modified, which reduces the maintenance cost of the configuration file. In addition, the configuration file in the embodiment of the present application is automatically generated. Compared with manually writing the configuration file, the subsequent maintenance can reduce the dependence on professional knowledge and business capabilities, and no professional personnel are required to maintain it, saving a lot of human resources. In addition, for the same type of equipment with the same type of chamber but different arrangement positions, only one configuration file template needs to be modified to automatically generate the configuration file, saving human resources and improving the generation efficiency and accuracy of the configuration file. By setting the label pair of the hardware configuration item, the target configuration item configuration file can be determined more quickly and accurately in each configuration item configuration file of the configuration file template, which improves the generation efficiency of the configuration file. The identification of the target hardware configuration item adopts the name of the target hardware configuration item with a certain naming rule, which can simply and quickly realize the setting of the identification of the target hardware configuration item. When adding a new target material, you only need to modify the configuration file template once, and it can be used multiple times to generate configuration files for the entire device, reducing the maintenance cost of the configuration file.

[0076] The present application also provides a semiconductor process equipment. Figure 4 As shown, the semiconductor process equipment 400 includes: a configuration file generating device 401, which is arranged in the upper computer and / or the lower computer of the semiconductor process equipment 400, and the configuration file generating device 401 includes at least one processor and at least one memory, and a computer program is stored in the memory. When the computer program is executed by the processor, the steps of any of the above configuration file generating method embodiments are implemented.

[0077] The semiconductor process equipment of the embodiment of the present application uniformly manages the target hardware configuration items of the target semiconductor process equipment and compares them with the pre-built configuration file template, thereby determining the target configuration item configuration file in the configuration file template, and then generating the configuration file corresponding to the target semiconductor process equipment, so that when the hardware changes or the customer needs to change the configuration file, only one configuration file template needs to be modified, which reduces the maintenance cost of the configuration file. In addition, the configuration file in the embodiment of the present application is automatically generated. Compared with manually writing the configuration file, the subsequent maintenance can reduce the dependence on professional knowledge and business capabilities, and no professional personnel are required to maintain it, saving a lot of human resources. In addition, for the same type of equipment with the same type of chamber but different arrangement positions, only one configuration file template needs to be modified to automatically generate the configuration file, saving human resources and improving the generation efficiency and accuracy of the configuration file. By setting the label pair of the hardware configuration item, the target configuration item configuration file can be determined more quickly and accurately in each configuration item configuration file of the configuration file template, which improves the generation efficiency of the configuration file. The identification of the target hardware configuration item adopts the name of the target hardware configuration item with a certain naming rule, which can simply and quickly realize the setting of the identification of the target hardware configuration item. When adding a new target material, you only need to modify the configuration file template once, and it can be used multiple times to generate configuration files for the entire device, reducing the maintenance cost of the configuration file.

[0078] An embodiment of the present application also proposes a readable storage medium, on which one or more computer programs are stored. The one or more computer programs include instructions. When the program or instructions are executed by a processor in a semiconductor process equipment including multiple application programs, the processor in the semiconductor process equipment can execute the various processes of the above-mentioned configuration file generation method embodiment, and is specifically used to execute the steps of any of the above-mentioned configuration file generation method embodiments.

[0079] The readable storage medium of the embodiment of the present application uniformly manages the target hardware configuration items of the target semiconductor process equipment and compares them with the pre-built configuration file template, thereby determining the target configuration item configuration file in the configuration file template, and then generating the configuration file corresponding to the target semiconductor process equipment, so that when the hardware changes or the customer needs to change the configuration file, only one configuration file template needs to be modified, which reduces the maintenance cost of the configuration file. In addition, the configuration file in the embodiment of the present application is automatically generated. Compared with manually writing the configuration file, the subsequent maintenance can reduce the dependence on professional knowledge and business capabilities, and no professional personnel are required to maintain it, saving a lot of human resources. In addition, for the same type of equipment with the same type of chamber but different arrangement positions, only one configuration file template needs to be modified to automatically generate the configuration file, saving human resources and improving the generation efficiency and accuracy of the configuration file. By setting the label pair of the hardware configuration item, the target configuration item configuration file can be determined more quickly and accurately in each configuration item configuration file of the configuration file template, which improves the generation efficiency of the configuration file. The identification of the target hardware configuration item adopts the name of the target hardware configuration item with a certain naming rule, which can simply and quickly realize the setting of the identification of the target hardware configuration item. When adding a new target material, you only need to modify the configuration file template once, and it can be used multiple times to generate configuration files for the entire device, reducing the maintenance cost of the configuration file.

[0080] The systems, devices, modules or units described in the above embodiments may be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0081] For the convenience of description, the above device is described in various units according to their functions. Of course, when implementing the present application, the functions of each unit can be implemented in the same or multiple software and / or hardware.

[0082] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment in combination with software and hardware. Moreover, the present application may adopt the form of a computer program product implemented in one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that include computer-usable program code.

[0083] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0084] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0085] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0086] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0087] The memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. The memory is an example of a computer-readable medium.

[0088] Computer readable media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer readable media does not include temporary computer readable media (transitory media), such as modulated data signals and carrier waves.

[0089] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0090] The present application may be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present application may also be practiced in distributed computing environments where tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules may be located in local and remote computer storage media, including storage devices.

[0091] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0092] The above are only embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included within the scope of the claims of the present application.

Claims

1. A method for generating a configuration file, characterized in that: include: Obtaining an identification of a target hardware configuration item associated with a target semiconductor process equipment; Acquire a pre-built configuration file template, wherein the configuration file template includes a configuration item configuration file corresponding to an identifier of a hardware configuration item supported by each semiconductor process device, and the configuration item configuration file includes configuration item configuration file content corresponding to the identifier of the hardware configuration item; Determine a target configuration item configuration file in each of the configuration item configuration files of the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item; A configuration file corresponding to the target semiconductor process equipment is generated according to the configuration item configuration file content in each of the target configuration item configuration files.

2. The method according to claim 1, characterized in that The step of determining a target configuration item configuration file from among the configuration item configuration files of the configuration file template, wherein the identifier of the hardware configuration item corresponding to the target configuration item configuration file is consistent with the identifier of the target hardware configuration item, comprises: Generate a corresponding target configuration item label pair set according to the identifier of the target hardware configuration item, wherein the target configuration item label pair set includes a target configuration item label pair corresponding to the identifier of each target hardware configuration item, and the target configuration item label pair includes a target start configuration item label and a target end configuration item label; The target configuration item configuration file is determined in each of the configuration item configuration files in the configuration file template, the configuration item tag pair in the target configuration item configuration file is consistent with the target configuration item tag pair, and the configuration item configuration file in the configuration file template includes the configuration item tag pair corresponding to the identifier of the hardware configuration item and the configuration item configuration file content located between the start configuration item tag and the end configuration item tag of the configuration item tag pair.

3. The method according to claim 1, characterized in that The identifier of the target hardware configuration item includes the name of the target hardware configuration item; The name of the target hardware configuration item includes any one or any combination of the name of the target hardware, the name of the supplier of the target hardware, and the model of the target hardware; or, The name of the target hardware configuration item includes a functional module corresponding to the target hardware and a type of the functional module.

4. The method according to claim 1, characterized in that: The step of obtaining target hardware configuration items related to target semiconductor process equipment includes: A preset software configuration menu is obtained, wherein the software configuration menu includes an identifier of the target hardware configuration item.

5. The method according to claim 4, characterized in that Before obtaining the preset software configuration menu, the method further includes: Obtaining a preset target material configuration relationship table, wherein the target material configuration relationship table includes the serial number of the target material related to the target semiconductor process equipment and the identifier of the target hardware configuration item corresponding to the serial number of the target material; The software configuration menu is generated according to the target material configuration relationship table.

6. The method according to claim 5, characterized in that Before obtaining the preset target material configuration relationship table, the method further includes: Obtaining the number of the target material and the information of the target material stored in the material management system; Generating an identifier of the target hardware configuration item according to the information of the target material; The target material configuration relationship table is generated according to the mapping relationship between the serial number of the target material and the identifier of the target hardware configuration item.

7. The method according to claim 6, characterized in that Also includes: Acquire a newly added target material and information of the newly added target material in the material management system; Generate an identifier of a newly added target hardware configuration item according to the information of the newly added target material; The target material configuration relationship table is updated according to the mapping relationship between the serial number of the newly added target material and the identifier of the newly added target hardware configuration item.

8. The method according to claim 7, characterized in that The step of obtaining a pre-built configuration file template includes: The configuration file template pre-built based on the newly added target hardware configuration item is obtained.

9. The method according to claim 5, characterized in that Before generating the target material configuration relationship table according to the mapping relationship between the target material number and the identifier of the target hardware configuration item, the method further includes: The target material number and the corresponding target hardware configuration item identifier are stored in a key-value pair format; Based on the stored key-value pair, a mapping relationship between the serial number of the target material and the identifier of the target hardware configuration item is obtained.

10. A semiconductor process equipment, characterized in that: include: A configuration file generation device, wherein the configuration file generation device is arranged in the upper computer and / or the lower computer of the semiconductor process equipment, and the configuration file generation device comprises at least one processor and at least one memory, wherein a computer program is stored in the memory, and when the computer program is executed by the processor, the steps of the method as described in any one of claims 1 to 9 are implemented.

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