Wafer box storage device

Abstract

The invention discloses a wafer box storage device, comprising a frame and a switch door system, wherein the frame comprises a side opening, the switch door system comprises a switch door that can move up and down to open and close the side opening, the switch door system further comprises a lifting assembly and a sliding lock assembly, the lifting assembly is arranged on the frame, the lifting assembly is connected to the switch door, the sliding lock assembly comprises a first slider, a second slider and a slide rail, the slide rail is provided with a sliding groove and a locking groove, the locking groove is provided with a first step and a second step, the first slider is connected to the switch door and can slide up and down in the sliding groove, the second slider is rotatably connected to the first slider, the second slider comprises a centrally symmetrical clamping groove and a side wall, when the clamping groove abuts against the second step and the first step in turn, the second slider deflects and can be clamped with the first step, when the side wall abuts against the second step and the first step in turn, the second slider deflects and can allow the second slider to enter the sliding groove. The switch door of the wafer box storage device can be opened and closed reliably.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer transmission equipment, and in particular to a wafer box storage device. Background Art

[0002] During the wafer processing, wafer boxes need to be transferred between different process stations, and an overhead crane system is usually used to transfer wafer boxes. When a new wafer box is added to the overhead crane system, it is necessary to manually place the wafer box on the wafer box storage device, and the overhead crane takes the newly added wafer box from the wafer box storage device. Similarly, when a wafer box in the overhead crane system fails, the overhead crane will also place the failed wafer box on the wafer storage device, and then manually take the fixed wafer box away. In the process of the overhead crane taking and placing the wafer box, in order to prevent personnel from accidentally touching the wafer box and causing the overhead crane system to fail, a switch door is usually provided on the overhead crane storage device. The switch door needs to be in a closed state when the overhead crane takes and places the wafer box, and needs to be in an open state when the wafer box is manually taken and placed. In order to prevent the switch door from affecting the wafer box transmission due to damage, how to reliably open and close the switch door is an urgent problem that needs to be solved. Summary of the invention

[0003] In order to overcome the above-mentioned disadvantages, an object of the present invention is to provide a wafer box storage device with a reliable opening and closing door.

[0004] In order to achieve the above object, the technical solution adopted by the present invention is: a wafer box storage device, including a frame and a switch door system, the frame includes a placement cavity for storing the wafer box, the placement cavity includes a side opening, the switch door system includes a switch door that can move up and down to open and close the side opening, and the switch door system also includes:

[0005] A lifting component, which is arranged on the frame and connected to the switch door;

[0006] The sliding lock assembly includes a first slider, a second slider and a sliding rail, the sliding rail is fixed on the frame, a sliding groove extending in the up-down direction and a locking groove connected to the bottom of the sliding groove are provided on the sliding rail, a first step and a second step arranged up-down and opposite to each other in the width direction of the sliding groove are provided in the locking groove, the first slider is connected to the switch door, the first slider cooperates with the sliding groove and can slide up and down in the sliding groove, the second slider is rotatably connected to the first slider, the second slider includes a pair of card grooves symmetrical about the center of the rotation axis and side walls adjacent to the card grooves and arranged on both sides of the rotation axis, and the second slider can slide up and down with the first slider.

[0007] Further, at the engagement position between the second slider and the first step, the distance from the first corner where the second slider abuts against the groove wall of the sliding groove to the rotation axis is smaller than the distance from the second corner of the second slider adjacent to the first corner to the rotation axis, and the curvature radius of the first angle is greater than the curvature radius of the second angle.

[0008] Further, the locking groove has two openings, a first groove and a second groove, which are opposite to each other in the width direction of the sliding groove. The upper groove wall of the first groove and the groove wall of the sliding groove form a first step. The lower groove wall of the second groove is connected to a downward extending avoidance surface away from the edge of the groove bottom of the second groove. The avoidance surface and the lower groove wall of the second groove form a second step. The second step is adjacent to the rotation axis in the width direction of the sliding groove relative to the groove wall of the sliding groove. The upper groove wall of the second groove extends obliquely upward from the upper edge of the groove bottom of the second groove to the groove wall of the sliding groove, and the upper groove wall of the second groove is higher than the upper groove wall of the first groove.

[0009] Furthermore, the upper groove wall of the first groove is smoothly transitionally connected to the groove wall of the sliding groove, and the included angle of the first step is an obtuse angle.

[0010] Furthermore, the sliding lock assembly also includes a first stop member, a second stop member and a needle roller. The first stop member and the second stop member both extend in the up-down direction and have an L-shaped cross-section. The L-shaped folded edges of the first stop member and the second stop member and the two groove walls of the sliding groove form two first accommodating cavities with openings toward the bottom of the sliding groove. The two first accommodating cavities are arranged at intervals on both sides of the width direction of the first slider. The two first accommodating cavities both accommodate a needle roller that facilitates the movement of the first slider. The folded edges of the walls of the accommodating cavities formed by the first stop member and the second stop member, the needle rollers on both sides of the width direction of the first slider and the bottom of the sliding groove form a second accommodating cavity that limits the horizontal movement of the first slider.

[0011] Furthermore, the wafer box storage device also includes a buffer assembly, which includes a cover and an elastomer. The cover is arranged at the upper end of the slide rail, and the cover is provided with a groove opening downward. The dimension of the groove in the width direction of the sliding groove is larger than the distance between the first stop member and the second stop member, and smaller than the distance between the two side walls of the sliding groove. The elastomer is accommodated in a third cavity formed by the upper end face of the sliding lock assembly and the groove.

[0012] Furthermore, the elastic body includes a rubber block and a compression spring, and the rubber block is pre-compressed under the compression spring.

[0013] Further, the lifting assembly includes a lifting unit arranged at intervals on both sides of the switch door, the lifting unit includes two pulleys, a pull rope and a counterweight block, the two pulleys are arranged on the frame at intervals along the thickness direction of the switch door, the pull rope is wound around the two pulleys, both ends of the pull rope extend in the up and down directions, one end of the pull rope is connected to the upper end of the switch door, and the other end of the pull rope is connected to the counterweight block.

[0014] Furthermore, the frame also includes a temporary storage cavity arranged below the placement cavity, the temporary storage cavity is closed when the switch door moves downward, and the temporary storage cavity is opened when the switch door moves upward. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the switch door in the open state according to the embodiment of the present invention;

[0016] Figure 2 It is a schematic diagram of the three-dimensional structure of the switch door in the closed state according to the embodiment of the present invention;

[0017] Figure 3 Schematic diagram of the connection structure of the sliding lock assembly and the buffer assembly in an embodiment of the present invention;

[0018] Figure 4 An exploded view of a slide lock assembly and a buffer assembly in an embodiment of the present invention;

[0019] Figure 5 for Figure 3 A cross-sectional view at AA;

[0020] Figure 6 for Figure 3 A local enlarged view at point A;

[0021] Figure 7 This is a schematic diagram of the structure in which the first slider is connected to the second slider in an embodiment of the present invention;

[0022] Figure 8 It is a structural schematic diagram of a slide rail in an embodiment of the present invention;

[0023] Fig. 9 for Figure 8 A local enlarged view of point B;

[0024] Fig.10 is a schematic structural diagram of a second sliding block in an embodiment of the present invention;

[0025] Fig.11a is a schematic diagram of the second sliding block approaching the second step during the door opening process in an embodiment of the present invention;

[0026] Fig.11b This is a schematic diagram of the second sliding block sliding to the bottom during the door opening process in the embodiment of the present invention;

[0027] Fig.11c It is a schematic diagram of the second sliding block abutting against the first step during the door opening process in an embodiment of the present invention;

[0028] Fig.11d It is a schematic diagram of the second sliding block being engaged with the first step when the door is opened in an embodiment of the present invention;

[0029] Fig.11e It is a schematic diagram of the second sliding block abutting against the second step during the closing process of the door in the embodiment of the present invention;

[0030] Fig.11fIt is a schematic diagram of the second sliding block sliding to the bottom in the process of closing the door in the embodiment of the present invention;

[0031] Figure 11g It is a schematic diagram of the second sliding block abutting against the first step during the closing process of the door in the embodiment of the present invention;

[0032] Fig.11h It is a schematic diagram of the second slider being guided in the process of closing the door in the embodiment of the present invention;

[0033] Fig.12 for Fig.11d A local enlarged view of point C;

[0034] Fig.13 This is a schematic diagram of the structure of the connection between the lifting assembly and the switch door in an embodiment of the present invention;

[0035] Fig.14 Schematic diagram of the structure of the substrate in an embodiment of the present invention. DETAILED DESCRIPTION

[0036] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0037] See attached Figure 1 and attached Figure 2 As shown, the wafer box storage device of the present invention includes a frame 1 and a switch door 5 system. The frame 1 includes a placement cavity, which is used to store a wafer box 6. The placement cavity is provided with a side opening 1a on one side of the Y direction, and the wafer box 6 in the placement cavity is manually taken in and placed from the side opening 1a. The switch door 5 system includes a switch door 5 that can make a linear reciprocating movement in the Z direction, and the switch door 5 opens and closes the side opening 1a during lifting.

[0038] In one embodiment, see the attached Figure 1 As shown, the frame 1 includes a bracket 11, a base plate 12 and a panel assembly 13. The panel assembly 13 and the base plate 12 are fixed on the frame 1. The panel assembly 13 includes two side panels, a rear panel and a bottom panel. The base plate 12 is located above the bottom panel, and the base plate 12 is used to place the wafer box 6. The base plate 12 and the two side panels surround to form a placement cavity, and an upper opening 1b is also provided above the placement cavity. The overhead crane takes and places the wafer box 6 on the base plate 12 from the upper opening 1b.

[0039] See attached Fig.13 As shown, the door opening system further comprises a sliding lock assembly 2 and a lifting assembly 4. The lifting assembly 4 is arranged on the frame 1, and the lifting assembly 4 always provides an upward moving force F for the door 5 to be opened and closed.

[0040] See attached Figure 3 , Attachment Figure 4 , Attachment Figure 7 , Attachment Figure 8 and attached Fig. 9 As shown, the slide lock assembly 2 includes a first slider 22, a second slider 23 and a slide rail 21. The slide rail 21 is fixed to the frame 1. The slide rail 21 is provided with a slide groove 211 extending in the up-down direction and a locking groove 212 connected to the bottom of the slide groove 211. The locking groove 212 is provided with a first step 212a and a second step 212b arranged up and down and opposite to each other in the width direction of the slide groove 211. The first slider 22 is connected to the switch door 5. The first slider 22 cooperates with the slide groove 211 and can slide up and down in the slide groove 211. The second slider 23 is rotatably connected to the first slider 22. See the attached Fig.10 As shown, the second slider 23 includes a pair of slots 231 symmetrical about the center of the rotation axis and side walls 235 adjacent to the slots 231 and arranged on both sides of the rotation axis. The second slider 23 can slide up and down with the first slider 22. When the slots 231 abut against the second step 212b and the first step 212a in sequence, the second slider 23 deflects and can be engaged with the first step 212a, and the first slider 22 abuts against the slot wall (second guide surface 2112) of the sliding slot 211 away from the first step. When the side walls 235 abut against the second step 212b and the first step 212a in sequence, the second slider 23 deflects and can enter the sliding slot 211.

[0041] Door opening and closing principle: When the door 5 needs to be opened, the door 5 is pressed by an external force, and the external force overcomes the upward force of the lifting assembly 4 to move the door 5 downward, and the door 5 drives the first slider 22 and the second slider 23 to slide along the sliding groove 211. Fig.11a The schematic diagram shows the second slider 23 approaching the second step 212b. When the slot wall of the slot 231 of the second slider 23 approaching the second step 212b contacts the second step 212b and continues to move downward, the second slider 23 deflects counterclockwise. Fig.11b A schematic diagram showing the second slider 23 sliding to the bottom;

[0042] Then, the switch door 5 is released, and the switch door 5 is lifted by the lifting assembly 4. The deflected second slider 23 moves upward under the pulling force. When the slot 231 of the second slider 23 is close to the slot wall of the first step 212a and abuts against the first step 212a and continues to move upward, the second slider 23 continues to deflect counterclockwise and engages with the first step 212a. The schematic diagram of the second slider 23 abutting against the first step 212a is shown in FIG. Fig.11c As shown, the schematic diagram of the second sliding block 23 and the first step 212a being engaged is as shown in Fig.11d and attached Fig.12 shown.

[0043] The second slider 23 is Fig.11d When the second slider 23 is in the position, the rotation axis position of the second slider 23 is subjected to the upward pulling force of the lifting assembly 4 through the first slider 22, and the first step 212a provides a downward supporting reaction force to the second slider 23. Since there is a gap between the pulling force and the supporting reaction force in the horizontal direction, the second slider 23 has a tendency to continue to deflect counterclockwise. At this time, the groove wall (first guide surface 2111) of the sliding groove 211 close to the first step 212a provides a supporting force for the connection between the slot 231 and the side wall 235 of the second slider 23 to prevent the second slider 23 from continuing to deflect. The supporting force of the first guide surface 2111 can be obtained by the abutment of the first slider 22 and the first guide surface 2111. When the first slider 22 and the first guide surface 2111 abut against each other, they are pressed against each other, and the first slider 22 will be subjected to a large friction force. The friction force and the supporting reaction force of the first step 212a limit the upward movement of the second slider 23. Therefore, the second slider 23 is in the position. Fig.11d The position is locked with the first step 212a, and the switch door 5 connected to the first slider 22 will not continue to move upward. At this time, the switch door 5 is stably in the open state.

[0044] When the switch door 5 needs to be closed, the switch door 5 is pressed down, and the switch door 5 pushes the second slider 23 downward through the first slider 22. The second slider 23 is out of contact with the first step 212a, and the first guide surface 2111 no longer provides support force for the connection between the slot 231 of the second slider 23 and the side wall 235. The second guide surface 2112 and the first slider 22 are no longer pressed against each other. At this time, the first slider 22 and the second slider 23 can move downward.

[0045] When the second slider 23 moves downward, the side wall 235 of the second slider 23 contacts and abuts against the second step 212b. Fig.11e As shown, when the second slider 23 continues to move downward, the second step 212b continues to rotate the second slider 23 counterclockwise through the side wall 235. When the second step 212b pushes the second slider 23 so that the second slider 23 has a tendency to move horizontally, the second slider 23 obtains the support force of the first guide surface 2111 through the first slider 22. The first slider 22 and the first guide surface 2111 are pressed tightly to form a friction force. The friction force and the support reaction force of the second step 212b on the second slider 23 prevent the second slider 23 from continuing to move downward. Fig.11f As shown, at this time, the switch door 5 no longer moves downward.

[0046] Then release the switch door 5. At this time, under the action of the lifting component 4, the second slider 23 is no longer subjected to the supporting reaction force of the second step 212b, and the second slider 23 has no tendency to move horizontally. The first slider 22 and the first guide surface 2111 are no longer pressed tightly, and the first slider 22 and the second slider 23 can move upward.

[0047] When the second slider 23 moves upward, the side wall 235 of the second slider 23 contacts and abuts against the first step 212a. Figure 11g As shown, when the second slider 23 continues to move upward, the first step 212a continues to rotate the second slider 23 counterclockwise through the side wall 235, and the second slider 23 is rotated to a position suitable for entering the sliding groove 211, as shown in FIG. Fig.11h As shown, at this time, the second slider 23 can be brought into the sliding groove 211 by the first slider 22 and continue to slide upward, and the switch door 5 is closed. After the switch door 5 is closed, the side opening 1a of the wafer box storage device is closed, and the wafer box storage device can only be used by the overhead crane to take and place the wafer box 6 through the upper opening 1b.

[0048] When the switch door 5 is opened and closed, no electrical control is required and only the switch door 5 can be opened and closed by pressing the switch door 5. There is no electrical failure and the switch door 5 is relatively reliable when opened and closed.

[0049] When the switch door 5 is opened, the second slider 23 prevents the second slider 23 from sliding and rotating by abutting against the first slider 22 and the first guide surface 2111. At the same time, the first slider 22 and the first guide surface 2111 are pressed against each other to form a friction force. The friction force and the supporting reaction force of the first step 212a together limit the second slider 23 from moving upward. This method of limiting the upward movement of the switch door 5 by cooperating with the first slider 22, the second slider 23, the first step 212a and the first guide surface 2111 is stable and reliable. The second slider 23 will not slide and rotate in the locked position due to the inertia of the switch door 5, thereby causing the second slider 23 to fail to lock, or the two corners of the second slider 23 that are not in the same slot 231 are stuck on the first guide surface 2111 and the wall surface of the locking slot 212, making it difficult for a person to press the switch door 5 downward.

[0050] In one embodiment, at the engagement position between the second slider 23 and the first step 212a, the distance from the first corner 232 where the second slider 23 abuts against the groove wall (first guide surface 2111) of the sliding groove 211 to the rotation axis is smaller than the distance from the second corner 233 of the second slider 23 adjacent to the first corner 232 to the rotation axis, and the curvature radius of the first corner 232 is greater than the curvature radius of the second corner 233.

[0051] By making the distance from the first corner 232 to the rotation axis smaller than the distance from the second corner 233 to the rotation axis, the second slider 23 can deflect a larger angle when rotating counterclockwise, and the direction of the support reaction force of the first guide surface 2111 on the first corner 232 can act on the thicker area of ​​the first corner 232, thereby avoiding fatigue failure of the first corner 232. At the same time, the first corner 232 is easy to form a larger curvature radius. When the first corner 232 abuts against the first guide surface 2111, the first corner 232 is not easy to have a large stress concentration and the first corner 232 is not easy to have a large stress concentration. 232 and the first guide surface 2111 wear each other more quickly, and the second slider 23 can easily and stably deflect to a predetermined angle, thereby preventing the second slider 23 that is excessively worn from contacting the first guide surface 2111 that is excessively worn after the second slider 23 is used multiple times, causing the second slider 23 to exceed the predetermined deflection angle, thereby preventing the two corners of the second slider 23 that are not in the same slot 231 from being stuck on the first guide surface 2111 and the wall surface of the locking slot 212, causing a person to have difficulty in pressing the switch door 5 downward.

[0052] The distance from the second corner 233 to the rotation axis is longer than that from the first corner 232 to the rotation axis, so that the groove wall of the slot 231 corresponding to the second corner 233 can easily abut against the first step 212a and the second step 212b, and the second slider 23 can rotate smoothly.

[0053] In one embodiment, see Fig. 9 As shown, the locking groove 212 has two openings, a first groove 2121 and a second groove 2122, which are opposite to each other in the width direction of the sliding groove 211. The upper groove wall 21211 of the first groove and the groove wall (first guide surface 2111) of the sliding groove 211 form a first step 212a. The lower groove wall 21222 of the second groove is connected to a downwardly extending avoidance surface 2123 at an edge away from the groove bottom 21223 of the second groove. The avoidance surface 2123 and the lower groove wall 21222 of the second groove form a second step 212b. The second step 212b is adjacent to the rotation axis in the width direction of the sliding groove 211 relative to the groove wall (second guide surface 2112) of the sliding groove. The upper groove wall 21221 of the second groove extends obliquely upward from the upper edge of the groove bottom 21223 of the second groove to the groove wall (second guide surface 2112) of the sliding groove. The upper groove wall 21221 of the second groove is higher than the upper groove wall 21211 of the first groove.

[0054] When the side wall 235 of the second slider 23 abuts against the first step 212a and deflects to a vertical state, the second slider 23 may not be in a completely vertical state. When the second slider 23 is slightly tilted, the first corner 232 of the second slider 23 contacts the upper groove wall 21211 of the first groove when the second slider 23 moves upward, so that the second slider 23 returns counterclockwise to a vertical state, and the second slider 23 can smoothly enter the sliding groove 211.

[0055] In one embodiment, the upper groove wall 21211 of the first groove is smoothly transitionally connected to the groove wall (first guide surface 2111) of the sliding groove, and the included angle of the first step 212a is an obtuse angle.

[0056] By smoothly transitioning the upper groove wall 21211 of the first groove and the first guide surface 2111, and setting the included angle of the first step 212a to an obtuse angle, the first step 212a can have a larger radius of curvature. When the second slider 23 is locked with the first step 212a, the groove wall of the locking groove 231 of the second slider 23 abuts against the first step 212a to be subjected to force, thereby preventing the second slider 23 from being damaged prematurely due to stress concentration.

[0057] like Figure 5 As shown, in one embodiment, the sliding lock assembly 2 also includes a first stopper 241, a second stopper 242 and a needle roller 25. The first stopper 241 and the second stopper 242 both extend in the up-down direction and have an L-shaped cross-section. The L-shaped folded edges of the first stopper 241 and the second stopper 242 and the two groove walls of the sliding groove 211 form two first accommodating cavities with openings toward the groove bottom of the sliding groove 211. The two first accommodating cavities are arranged at intervals on both sides of the width direction of the first slider 22. The two first accommodating cavities both accommodate needle rollers 25 for facilitating the movement of the first slider 22. The folded edges of the walls of the accommodating cavities formed by the first stopper 241 and the second stopper 242, the needle rollers 25 on both sides of the width direction of the first slider 22, and the groove bottom of the sliding groove 211 form a second accommodating cavity for limiting the horizontal movement of the first slider 22.

[0058] When the first slider 22 moves along the sliding groove 211, the needle roller 25 rolls due to the friction of the first slider 22. The friction force on the first slider 22 is small, and the person can press down the door 5 smoothly. When the first slider 22 slides in the sliding groove 211, the second slider 23 can be prevented from moving horizontally in the width direction of the sliding groove 211. The first corner 232 and the second corner 233 of the second slider 23 are not easy to get stuck between adjacent needle rollers 25, thereby preventing the second slider 23 from getting stuck when sliding in the sliding groove 211, and the door 5 cannot be closed or opened.

[0059] In one embodiment, see the attached Figure 6 As shown, the wafer box storage device also includes a buffer assembly 3, which includes a cover 31 and an elastomer. The cover 31 is arranged at the upper end of the slide rail 21. The cover 31 is provided with a groove opening downward. The dimension of the groove in the width direction of the sliding groove 211 is greater than the distance between the first stop member 241 and the second stop member 242, and is smaller than the distance between the two side walls of the sliding groove 211. The elastomer is accommodated in a third cavity formed by the upper end face of the sliding lock assembly 2 and the groove.

[0060] By setting the dimension of the groove of the cover 31 in the width direction of the sliding groove 211 to be larger than the distance between the first stop member 241 and the second stop member 242, and smaller than the distance between the two side walls of the sliding groove 211, the needle roller 25 can be prevented from escaping upward from the first accommodating cavity. At the same time, the elastomer can fall on the upper end surface of the sliding lock assembly 2, preventing the elastomer from falling into the sliding groove 211.

[0061] In one embodiment, the elastic body includes a rubber block 33 and a compression spring 32, and the rubber block 33 is pre-compressed under the compression spring 32. When the switch door 5 is buffered by the second slider 23, the second slider 23 elastically contacts the rubber block 33 and pushes the compression spring 32 to compress the compression spring 32, so that the switch door 5 can achieve buffering, thereby preventing the switch door 5 from causing vibration of the wafer box 6 on the wafer box storage device and causing damage to the wafers in the wafer box 6.

[0062] In one embodiment, see the attached Fig.13 As shown, the lifting assembly 4 includes a lifting unit arranged at intervals on both sides of the switch door 5, the lifting unit includes two pulleys 43, a pull rope 41 and a counterweight 42, the two pulleys 43 are arranged on the frame 1 at intervals along the thickness direction of the switch door 5, the pull rope 41 is wound around the two pulleys 43, both ends of the pull rope 41 extend in the up and down directions, one end of the pull rope 41 is connected to the upper end of the switch door 5, and the other end of the pull rope 41 is connected to the counterweight 42.

[0063] The weight of the counterweight 42 can be set according to the weight of the switch door 5. For example, when the switch door 5 adopts lightweight materials such as plastic plates or adopts a hollow structure to reduce the weight, the weight of the counterweight 42 can be set lighter accordingly. When the switch door 5 is heavier, the counterweight 42 needs to be set heavier accordingly to meet the requirement that the switch door 5 is in a pulled state when in a free state.

[0064] The two pulleys 43 of the lifting assembly 4 can lead the counterweight 42 to a side away from the switch door 5 to prevent the counterweight 42 from accidentally injuring the personnel storing the wafer box 6 when moving up and down. The counterweight 42 provides a constant pulling force to the switch door 5. When the personnel press down the switch door 5, they can press down with a relatively uniform force, which is also convenient for controlling the speed of the switch door 5 moving up and down, and the operation is relatively convenient.

[0065] It is understandable that the lifting assembly 4 can also be replaced by a tension spring. One end of the tension spring is connected to the switch door 5, and the other end of the tension spring is connected to the frame 1.

[0066] In one embodiment, the frame 1 further includes a temporary storage cavity arranged below the placement cavity, the temporary storage cavity is closed when the switch door 5 moves downward, and is opened when the switch door 5 moves upward.

[0067] In one embodiment, the present invention discloses a method for placing a wafer box 6 in a wafer box storage device. When it is necessary to manually place the wafer box 6 on the wafer box storage device and then use an overhead crane in a transport system to transport the wafer box 6, the method specifically includes:

[0068] The switch door 5 is pressed down, and the switch door 5 drives the second slider 23 to move to the bottom through the first slider 22, and the second slider 23 touches the second step 212b and deflects;

[0069] The switch door 5 is released, and the switch door 5 is lifted by the lifting assembly 4. The second slider 23 moves upward with the switch door 5. The second slider 23 touches the first step 212a and deflects. The first slider 22 abuts against the second guide surface 2112 to stop the second slider 23. The second slider 23 cannot continue to move upward. At this time, the switch door 5 is locked in the open position, and the side opening 1a is in an open state.

[0070] The personnel side opening 1a places the wafer box 6 on the base plate 12, the positioning column 121 on the base plate 12 positions the wafer box 6, the in-place sensor 122 detects that the wafer box 6 is in place, and the code reader 123 reads the coding information of the wafer box 6 and feeds the information back to the overhead crane control system. The position of the code reader 123 is shown in the attached Fig.14 shown.

[0071] After placing the wafer box 6, the operator presses down the switch door 5, and the switch door 5 drives the second slider 23 to move downward through the first slider 22, and the side wall 235 of the second slider 23 touches the second step 212b and deflects.

[0072] The switch door 5 is released, and the switch door 5 is lifted by the lifting assembly 4. The first slider 22 drives the second slider 23 to move upward with the switch door 5. The second slider 23 contacts the first step 212a and deflects. The second slider 23 continues to move upward, and the second slider 23 gradually becomes vertical. Then, the sliding groove 211 of the second slider 23 extending in the vertical direction is lifted to the position before being pressed down, and the switch door 5 closes the side opening 1a.

[0073] After receiving the coded information, the crane control system controls the crane to take the wafer box 6 away from the upper opening 1 b.

[0074] When an overhead crane is required to place the wafer box 6 on the wafer box storage device, and then the wafer box 6 is manually removed from the wafer box 6 storage device, the method specifically includes:

[0075] The side opening 1a of the enclosure is closed by the switch door 5, and the overhead crane places the wafer box 6 on the wafer box storage device through the upper opening 1b;

[0076] The switch door 5 is pressed down, and the switch door 5 drives the first slider 22 and the second slider 23 to move to the bottom, and the second slider 23 touches the second step 212b and deflects;

[0077] The switch door 5 is released, and the switch door 5 is lifted by the lifting assembly 4. The second slider 23 moves upward with the switch door 5. The second slider 23 touches the first step 212a and deflects. The first slider 22 abuts against the second guide surface 2112 to stop the second slider 23. The second slider 23 cannot continue to move upward. At this time, the switch door 5 is locked in the open position, and the side opening 1a is in an open state.

[0078] The personnel takes the wafer box 6 out of the wafer box storage device and presses down the switch door 5, which drives the second slider 23 to move downward, and the side wall 235 of the second slider 23 touches the second step 212b and deflects;

[0079] Release the switch door 5, and the switch door 5 is lifted by the lifting assembly 4. The second slider 23 moves upward with the switch door 5, and the second slider 23 contacts the first step 212a and deflects. The second slider 23 continues to move upward, and the second slider 23 gradually becomes vertical. Then, the sliding groove 211 of the second slider 23 extending in the vertical direction is lifted to the position before being pressed down, and the switch door 5 closes the side opening 1a.

[0080] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer box storage device, comprising a frame and a switch door system, wherein the frame comprises a placement cavity for storing the wafer box, the placement cavity comprises a side opening, and the switch door system comprises a switch door that can move up and down to open and close the side opening, characterized in that: The door opening and closing system further comprises: A lifting assembly, the lifting assembly is arranged on the frame, and the lifting assembly is connected to the switch door; The slide lock assembly comprises a first slider, a second slider and a slide rail, the slide rail is fixed to the frame, the slide rail is provided with a slide groove extending in an up-down direction and a locking groove connected to the bottom of the slide groove, the locking groove is provided with a first step and a second step arranged up-down and opposite to each other in the width direction of the slide groove, the first slider is connected to the switch door, the first slider cooperates with the slide groove and can slide up-down in the slide groove, the second slider is rotatably connected to the first slider, the second slider comprises a pair of card grooves symmetrical about the center of the rotation axis and side walls adjacent to the card grooves and arranged on both sides of the rotation axis, and the second slider can slide up-down with the first slider; The locking groove has two openings, a first groove and a second groove, which are opposite to each other in the width direction of the sliding groove. The upper groove wall of the first groove and the groove wall of the sliding groove form a first step. The lower groove wall of the second groove is connected to an edge away from the groove bottom of the second groove and has an avoidance surface extending downward. The avoidance surface and the lower groove wall of the second groove form a second step.

2. The wafer box storage device according to claim 1, characterized in that: At the engagement position between the second slider and the first step, the distance from the first corner where the second slider abuts against the groove wall of the sliding groove to the rotation axis is smaller than the distance from the second corner of the second slider adjacent to the first corner to the rotation axis, and the curvature radius of the first angle is greater than the curvature radius of the second angle.

3. The wafer box storage device according to claim 1, characterized in that: The second step is adjacent to the rotation axis in the width direction of the sliding groove relative to the groove wall of the sliding groove, and the upper groove wall of the second groove extends obliquely upward from the upper edge of the groove bottom of the second groove to the groove wall of the sliding groove, and the upper groove wall of the second groove is higher than the upper groove wall of the first groove.

4. The wafer box storage device according to claim 3, characterized in that: The upper groove wall of the first groove is smoothly transitionally connected to the groove wall of the sliding groove, and the included angle of the first step is an obtuse angle.

5. The wafer box storage device according to claim 1, characterized in that: The sliding lock assembly also includes a first stopper, a second stopper and a needle roller. The first stopper and the second stopper both extend in the up-down direction and have an L-shaped cross-section. The L-shaped folded edges of the first stopper and the second stopper and the two groove walls of the sliding groove form two first accommodating cavities with openings toward the groove bottom of the sliding groove. The two first accommodating cavities are arranged at intervals on both sides of the width direction of the first slider. The two first accommodating cavities both accommodate the needle rollers that facilitate the movement of the first slider. The folded edges of the walls of the accommodating cavities formed by the first stopper and the second stopper, the needle rollers on both sides of the width direction of the first slider and the groove bottom of the sliding groove form a second accommodating cavity that limits the horizontal movement of the first slider.

6. The wafer box storage device according to claim 5, characterized in that: It also includes a buffer component, which includes a cover and an elastomer. The cover is arranged at the upper end of the slide rail, and the cover is provided with a groove opening downward. The dimension of the groove in the width direction of the sliding groove is larger than the distance between the first stop member and the second stop member, and smaller than the distance between the two side walls of the sliding groove. The elastomer is accommodated in a third cavity formed by the upper end surface of the sliding lock component and the groove.

7. The wafer box storage device according to claim 6, characterized in that: The elastic body includes a rubber block and a compression spring, and the rubber block is pre-compressed under the compression spring.

8. The wafer box storage device according to any one of claims 1 to 7, characterized in that: The lifting assembly includes lifting units arranged at intervals on both sides of the switch door, and the lifting unit includes two pulleys, a pull rope and a counterweight block. The two pulleys are arranged on the frame at intervals along the thickness direction of the switch door, and the pull rope is wound around the two pulleys. Both ends of the pull rope extend in the up and down directions. One end of the pull rope is connected to the upper end of the switch door, and the other end of the pull rope is connected to the counterweight block.

9. The wafer box storage device according to claim 1, characterized in that: The frame further comprises a temporary storage cavity arranged below the placement cavity, wherein the temporary storage cavity is closed when the switch door moves downward, and is opened when the switch door moves upward.

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