Annealing device

By adopting the design of guide rails and support rod assemblies in the annealing device, the problems of tipping risk and inconvenient maintenance when the annealing chamber is moved out of the rack are solved, and the stability and operation convenience of the device are achieved.

CN119343029APending Publication Date: 2025-01-21SUZHOU MAIZHUANG SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202411456680.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-18
Publication Date
2025-01-21

AI Technical Summary

Technical Problem

When the annealing cavity is removed from the frame, it is easy to cause the center of gravity of the annealing device to shift, which will cause the risk of pouring and will be inconvenient for maintenance operation.

Method used

Design an annealing device that uses guide rails and support rod assemblies. The guide rails are used to support the annealing chamber and make it slide synchronously. The support rod assembly is supported on the ground when the annealing chamber moves out of the rack to ensure that there are Supportive force.

Benefits of technology

It effectively reduces or avoids the risk of tipping when the annealing chamber is moved out of the rack, and facilitates maintenance operations on the annealing chamber.

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Abstract

The invention discloses an annealing device which comprises a rack, an annealing cavity, a guide rail and a supporting rod assembly. An annealing cavity for placing a material is formed in the annealing cavity; the guide rail is connected with the rack and can slide relative to the rack, and the guide rail is used for supporting the annealing cavity and can drive the annealing cavity to synchronously slide, so that the annealing cavity is moved out of or moved into the rack; the supporting rod assembly is connected with the guide rail or the annealing cavity, and the supporting rod assembly can be supported on the ground when the annealing cavity is moved out of the rack and directly or indirectly support the annealing cavity; when the annealing cavity is moved out of the rack, supporting force applied to the annealing cavity by the supporting rod assembly and the rack is distributed on the two opposite sides of the annealing cavity. The annealing device is used for reducing or avoiding the toppling risk generated when the annealing cavity is moved out of the rack.
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Description

Technical Field

[0001] The present invention relates to the technical field of perovskite cell crystallization, and in particular to an annealing device. Background Art

[0002] Perovskite solar cells have become the third generation of photovoltaic cells to replace crystalline silicon due to their excellent photoelectric conversion efficiency. The preparation process of perovskite solar cells includes steps such as perovskite solution coating, drying and crystallization. Perovskite crystallization is usually carried out using an annealing device.

[0003] The annealing device includes a frame and an annealing chamber having an annealing chamber arranged in the frame. The annealing chamber is used to accommodate the coated and dried perovskite film, and the perovskite film is annealed in the annealing chamber to promote the nucleation and crystallization of the perovskite film. When the annealing chamber of the annealing device needs to be repaired or other operations, the annealing chamber needs to be pulled out. The annealing chamber is heavy. If the annealing chamber is completely or substantially completely pulled out of the frame, the center of gravity of the annealing device will shift and there will be a risk of tipping. If the annealing chamber is partially pulled out, it will be inconvenient to perform maintenance or other operations on the annealing chamber. Summary of the invention

[0004] The object of the present invention is to provide an annealing device, which is used to reduce or avoid the risk of tipping over when an annealing chamber is moved out of a frame.

[0005] The purpose of the present invention is achieved by the following technical solutions:

[0006] An annealing device, comprising:

[0007] frame;

[0008] An annealing cavity body is formed with an annealing cavity for placing materials;

[0009] A guide rail connected to the frame and capable of sliding relative to the frame, the guide rail being used to support the annealing chamber and capable of driving the annealing chamber to slide synchronously, so that the annealing chamber moves out of or into the frame;

[0010] A support rod assembly connected to the guide rail or the annealing chamber, and the support rod assembly can be supported on the ground when the annealing chamber is moved out of the rack, and directly or indirectly supports the annealing chamber;

[0011] Wherein, when the annealing chamber moves out of the frame, the supporting force applied by the support rod assembly and the frame to the annealing chamber is distributed on two opposite sides of the annealing chamber.

[0012] Preferably, the guide rails are provided in multiple groups, and the multiple groups of guide rails are arranged in sequence along the height direction of the rack, and each group of guide rails is used to support an annealing chamber respectively; the support rod assembly is connected to the multiple groups of guide rails respectively, and the support rod assembly is used to directly or indirectly support the multiple annealing chambers when the multiple annealing chambers are moved out of the rack.

[0013] Preferably, the support rod assembly comprises a first rod body and a second rod body supporting each other, the first rod body is supported between two adjacent guide rails in the height direction, and the second rod body is used to be supported between the bottommost guide rail and the ground.

[0014] Preferably, a first connecting portion is provided at one end of the first rod, a second connecting portion matching with the first connecting portion is provided at one end of the second rod adjacent to the first rod, and the second rod is connected to the first rod via the second connecting portion;

[0015] And / or, a foot cup is provided at one end of the second rod body adjacent to the ground, and the foot cup is used to abut against the ground.

[0016] Preferably, the first rod body is provided with a plurality of parts, one end of the first rod body is provided with a first matching part, and the other end of the first rod body is provided with a second matching part, and the second matching part of the first rod body is used to match with the first matching part of another first rod body;

[0017] And / or, the second rod body is a telescopic rod.

[0018] Preferably, an opening and closing door is provided on one side of the annealing chamber, and the opening and closing door is connected to a first driving assembly, the first driving assembly includes a first driving member and a rotating shaft connected to the opening and closing door, the first driving member is connected to the rotating shaft and can drive the opening and closing door to rotate through the rotating shaft to close or open the annealing chamber.

[0019] Preferably, the first driving assembly further comprises a mounting plate, the rotating shaft is connected to the mounting plate via a bearing seat so that the rotating shaft can rotate relative to the mounting plate, and the first driving member is fixedly mounted on the mounting plate;

[0020] And / or, the first driving assembly further includes a belt rotation group, and the belt rotation group is respectively connected to the first driving member and the rotating shaft to transmit the power of the first driving member to the rotating shaft.

[0021] Preferably, the first driving assembly further comprises a sensor and a detection member, wherein the detection member is connected to the rotating shaft and can move synchronously with the rotating shaft, and the detection member can be coupled with the sensor when the opening and closing door is in an open and / or closed state to determine the opening and closing state of the opening and closing door;

[0022] And / or, the first driving member is a rotary cylinder.

[0023] Preferably, the annealing chamber includes an upper cover, the upper cover is connected to a second driving assembly, the second driving assembly includes a second driving member and a support rod connected to the second driving member, the support rod is connected to the upper cover so that the second driving member can drive the upper cover to move and seal or open the annealing chamber through the support rod.

[0024] Preferably, the annealing chamber includes a support seat, and the second driving assembly includes a connecting seat; one end of the second driving member is hinged to the support seat, and the other end of the second driving member is hinged to the connecting seat, the connecting seat and the support rod are connected to the upper cover, and the second driving member drives the support rod to move.

[0025] Preferably, it further comprises a cooling component, the cooling component comprises a shell and an air blowing port and an air exhaust port penetrating the shell, the shell covers the components of the annealing device;

[0026] The blowing port is connected to an external blowing component to blow air into the shell, and the exhaust port is connected to an external exhaust component and is used to extract gas from the shell to cool the inside of the shell.

[0027] Compared with the prior art, the beneficial effects of the present invention include at least:

[0028] By providing a support rod assembly, when the annealing chamber is moved out of the frame, the support force applied by the support rod assembly and the frame to the annealing chamber is distributed on opposite sides of the annealing chamber, so that the annealing chamber can be effectively supported, and the risk of the annealing device tipping over due to the gravity of the annealing chamber can be reduced or avoided; and, when the annealing chamber is moved out of the frame and the center of gravity of the annealing device is shifted, the support rod assembly and the frame can be located on opposite sides of the center of gravity of the annealing device, so the risk of tipping over when the annealing chamber is moved out of the frame can be reduced or avoided; in addition, the annealing chamber in the present application can be completely or substantially completely moved out of the frame, so that operations such as maintenance of the annealing chamber can be facilitated. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a schematic structural diagram of an annealing chamber in an annealing device according to an embodiment of the present invention when the annealing chamber is moved out of a frame;

[0030] Figure 2 is a partial structural schematic diagram of an annealing device according to an embodiment of the present invention;

[0031] Figure 3 is a schematic structural diagram of a guide assembly and a guide rail according to an embodiment of the present invention;

[0032] Figure 4is a partial structural schematic diagram of a support rod assembly according to an embodiment of the present invention;

[0033] Figure 5 is a partial exploded schematic diagram of a support rod assembly according to an embodiment of the present invention;

[0034] Figure 6 is a partial structural schematic diagram of an annealing device according to an embodiment of the present invention;

[0035] Figure 7 is a schematic structural diagram of a first drive assembly and an opening and closing door according to an embodiment of the present invention;

[0036] Figure 8 is a schematic structural diagram of an annealing chamber and a second driving assembly according to an embodiment of the present invention;

[0037] Fig. 9 This is a structural schematic diagram of the annealing chamber and the second driving assembly from another perspective of an embodiment of the present invention.

[0038] Fig.10 It is a schematic structural diagram of a first driving component and a cooling component in an embodiment of the present invention.

[0039] In the figure: 1, frame; 11, guide assembly; 111, first guide plate; 112, second guide plate; 12, top plate; 2, annealing chamber; 21, support seat; 22, opening and closing door; 23, upper cover; 3, guide rail; 4, support rod assembly; 41, first rod body; 411, first matching part; 412, second matching part; 413, nut; 414, gasket; 42, second rod body; 421, foot cup; 5, first driving assembly; 51. First driving member; 52. Rotating shaft; 53. Mounting plate; 531. Bearing seat; 54. Belt rotating group; 541. Driving wheel; 542. Driven wheel; 543. Belt; 55. Sensor; 56. Detection member; 6. Second driving assembly; 61. Second driving member; 611. Throttle valve; 62. Support rod; 63. Connecting seat; 7. Cooling assembly; 71. Shell; 72. Air outlet; 73. Air exhaust port; 74. Exhaust fan. DETAILED DESCRIPTION

[0040] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0041] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0042] like Figures 1 to 10 As shown, the present invention provides an annealing device, including a frame 1, an annealing chamber 2, a guide rail 3 and a support rod assembly 4, and may also include a first drive assembly 5, a second drive assembly 6 and a cooling assembly 7.

[0043] Reference Figure 1 The frame 1 may be formed with a space having an opening at one end, specifically, an opening may be formed on one side of the frame 1 so that the annealing chamber 2 can be moved out of or into the opening of the frame 1. When the annealing device is working, the annealing chamber 2, the guide rail 3, the support rod assembly 4, the first drive assembly 5, the second drive assembly 6 and the cooling assembly 7 can be accommodated in the internal space of the frame 1.

[0044] Reference Figure 2 and Figure 3 , the guide rail 3 is connected to the frame 1 and can slide relative to the frame 1. Specifically, the frame 1 can be provided with a guide assembly 11 that cooperates with the guide rail 3, the guide assembly 11 is provided with a slider extending along the moving direction of the annealing chamber 2, the guide rail 3 is provided with a slide groove extending along the moving direction of the annealing chamber 2, and the slider of the guide assembly 11 can cooperate with the slide groove of the guide rail 3, so that the guide rail 3 can slide relative to the guide assembly 11. Among them, the moving direction of the annealing chamber 2 is the moving direction when the annealing chamber 2 moves into or out of the frame 1.

[0045] The guide assembly 11 may include a first guide plate 111 and a second guide plate 112, the first guide plate 111 is provided with a slider matched with the slide groove of the guide rail 3, and the second guide plate 112 can be slidably connected with the first guide plate 111 by using the matching mode of the slide groove slider, so that the first guide plate 111 can slide relative to the second guide plate 112 along the moving direction of the annealing chamber 2. The second guide plate 112 is fixedly installed on the main body of the frame 1. When the annealing chamber 2 moves into the frame 1, the guide rail 3, the first guide plate 111 and the second guide plate 112 are all located in the frame 1 and are stacked; when the annealing chamber 2 moves out of the frame 1, the first guide plate 111 slides toward the outside of the frame 1 relative to the second guide plate 112, and the guide rail 3 slides toward the outside of the frame 1 relative to the first guide plate 111, and the guide rail 3 can be completely or substantially completely moved out of the frame 1, one end of the first guide plate 111 can be moved out of the frame 1 and connected to the guide rail 3, and the other end of the first guide plate 111 is located in the frame 1 and connected to the second guide plate 112.

[0046] The upper surface of the guide rail 3 can abut against the annealing chamber 2 to support the annealing chamber 2. The upper surface of the guide rail 3 can directly abut against the annealing chamber 2, and when the guide rail 3 slides relative to the guide assembly 11, the guide rail 3 drives the annealing chamber 2 to move synchronously through the friction between the guide rail 3 and the annealing chamber 2, so that the annealing chamber 2 can be moved into or out of the rack 1; or, the guide rail 3 and the annealing chamber 2 can be fixedly connected by fastening with screws, etc., so that the guide rail 3 and the annealing chamber 2 can move synchronously, so that the annealing chamber 2 can be moved into or out of the rack 1.

[0047] The guide rails 3 may be provided with at least one group, each group of guide rails 3 includes two guide rails 3, the two guide rails 3 are distributed at opposite ends of the frame 1, and the upper surfaces of the two guide rails 3 are located in the same plane, and the two guide rails 3 are used together to support an annealing chamber 2. Among them, the two guide rails 3 used to support an annealing chamber 2 are distributed at opposite ends of the annealing chamber 2 to apply a supporting force to the opposite ends of the annealing chamber 2, thereby improving the stability of the support for the annealing chamber 2. Each guide rail 3 in each group of guide rails 3 may be connected to a guide assembly 11, respectively, and when an annealing chamber 2 moves into or out of the frame 1, the two guide rails 3 used to support the annealing chamber 2 slide relative to the corresponding guide assembly 11, respectively.

[0048] An annealing chamber for placing materials may be formed inside the annealing chamber 2, and the annealing chamber 2 may be provided with a main body, an opening and closing door 22, and an upper cover 23. The main body, the opening and closing door 22, and the upper cover 23 of the annealing chamber 2 together form an annealing chamber. One or more annealing chambers 2 may be provided. Preferably, a plurality of annealing chambers 2 are provided, and a plurality of annealing chambers 2 are arranged in sequence along the height direction of the frame 1. Each annealing chamber 2 is connected to a set of guide rails 3, and a plurality of sets of guide rails 3 corresponding to the plurality of annealing chambers 2 are arranged in sequence along the height direction of the frame 1, and each annealing chamber 2 is supported by a corresponding set of guide rails 3. Among them, the material placed in the annealing chamber may specifically be a perovskite film that needs to be crystallized.

[0049] Reference Figure 1 and Figure 2, the support rod assembly 4 is connected to the guide rail 3 or the annealing chamber 2, and the support rod assembly 4 can be supported on the ground when the annealing chamber 2 is moved out of the rack 1, and at the same time directly or indirectly supports the annealing chamber 2. When the support rod assembly 4 is directly connected to the annealing chamber 2, the support rod assembly 4 can directly support the annealing chamber 2; and the support rod assembly 4 can be arranged at one end of the annealing chamber 2 away from the rack 1, when the annealing chamber 2 is moved out of the rack 1, the end of the annealing chamber 2 away from the rack 1 is supported by the support rod assembly 4, and the end of the annealing chamber 2 adjacent to the rack 1 is connected to the guide assembly 11 of the rack 1, and the rack 1 can support the annealing chamber 2 through the guide assembly 11. When the support rod assembly 4 is connected to the guide rail 3, the support rod assembly 4 can indirectly support the annealing chamber 2 through the guide rail 3; and the support rod assembly 4 can be arranged at one end of the guide rail 3 away from the frame 1. When the annealing chamber 2 moves out of the frame 1, the end of the annealing chamber 2 away from the frame 1 is indirectly supported by the support rod assembly 4, and the end of the annealing chamber 2 adjacent to the frame 1 is connected to the guide assembly 11 of the frame 1, and the frame 1 can support the annealing chamber 2 through the guide assembly 11. Therefore, when the annealing chamber 2 moves out of the frame 1, the supporting force applied by the support rod assembly 4 and the frame 1 to the annealing chamber 2 is distributed on opposite sides of the annealing chamber 2.

[0050] In the prior art, when the annealing chamber 2 is moved out of the rack 1, one end of the annealing chamber 2 adjacent to the rack 1 is connected to the rack 1 and supported by the rack 1, while the other parts of the annealing chamber 2 are not supported. At this time, due to the movement of the annealing chamber 2, the center of gravity of the annealing device is shifted, and the center of gravity of the annealing device does not coincide with the center of the rack 1, resulting in the risk of the annealing device tipping over when supported only by the rack 1. The present application adopts a support rod assembly 4 to cooperate with the rack 1 to apply a supporting force on opposite sides of the annealing chamber 2. When the annealing chamber 2 is moved out of the rack 1, the center of gravity of the annealing device changes. At this time, the support rod assembly 4 and the rack 1 can be located on both sides of the center of gravity of the annealing device, and the support rod assembly 4 and the rack 1 can be supported on the ground to jointly support the annealing device, so as to effectively reduce or avoid the risk of the annealing device tipping over due to the center of gravity shift after the annealing chamber 2 is moved out of the rack 1.

[0051] In this embodiment, the support rod assembly 4 is specifically connected to the guide rail 3 and indirectly supports the annealing chamber 2 through the guide rail 3. When multiple groups of guide rails 3 are provided and multiple annealing chambers 2 are provided, the support rod assembly 4 can be connected to the multiple groups of guide rails 3 respectively, and the support rod assembly 4 can directly abut the multiple annealing chambers 2 when the multiple annealing chambers 2 are moved out of the frame 1 to support the multiple annealing chambers 2.

[0052] Reference Figure 2 , Figure 4 and Figure 5Specifically, the support rod assembly 4 may include a first rod body 41 and a second rod body 42 that support each other. The first rod body 41 is supported between two adjacent guide rails 3 in the height direction, and the second rod body 42 is used to support between the guide rail 3 at the bottom and the ground. Among them, one end of the first rod body 41 may be provided with a first matching portion 411, and one end of the second rod body 42 adjacent to the first rod body 41 is provided with a second matching portion 412. The end of the second rod body 42 provided with the second matching portion 412 can be used to support the guide rail 3 located at the bottom, and the second matching portion 412 can pass through the guide rail 3 located at the bottom. The end of the first rod body 41 provided with the first matching portion 411 can be matched with the second matching portion 412 of the second rod body 42, and the first rod body 41 and the second rod body 42 have the same extension direction, for example, both are rods extending in the vertical direction, so that the first rod body 41 and the second rod body 42 are connected to each other and can form a long rod, and the end of the first rod body 41 not provided with the second matching portion can be used to support other guide rails 3. At this time, the long rod formed by the first rod body 41 and the second rod body 42 can be used to support a plurality of guide rails 3 .

[0053] The second connection portion 412 may be a convex column, and the first connection portion 411 may be a groove matched with the convex column. When the first rod 41 and the second rod 42 are matched, the second connection portion 412 of the second rod 42 passes through the corresponding guide rail 3 and is accommodated in the first connection portion 411 of the first rod 41. The second connection portion 412 may pass through the corresponding guide rail 3, and the portion of the second connection portion 412 passing through the corresponding guide rail 3 is accommodated in the corresponding first connection portion 411.

[0054] The first rod body 41 and the second rod body 42 in the support rod assembly 4 can be arranged in pairs, and a pair of first rod bodies 41 or a pair of second rod bodies 42 can correspond to the guide rails 3 arranged in groups, so that multiple guide rails 3 located on the same side can be supported by the long rod composed of the first rod body 41 and the second rod body 42, and multiple guide rails 3 on the other side can be supported by the long rod composed of other first rod bodies 41 and second rod bodies 42.

[0055] In order to facilitate the stable support of the support rod assembly 4 on the ground, a foot cup 421 is provided at one end of the support rod assembly 4 that contacts the ground, that is, at one end of the second rod body 42 that faces away from the first rod body 41. The surface of the foot cup 421 that contacts the ground is larger than the cross-sectional area of ​​the second rod body 42, so as to increase the contact area between the support rod assembly 4 and the ground and thus enhance the support stability of the support rod assembly 4. In addition, the foot cup 421 can be connected to the second rod body 42 by means of threaded fitting, so that the connection position of the foot cup 421 and the second rod body 42 is adjustable, so that a pair of foot cups 421 in a pair of second rod bodies 42 and the support feet of the rack 1 can simultaneously and stably contact the ground.

[0056] When there are multiple annealing chambers 2, for example, there are n annealing chambers 2, there may be n groups of guide rails 3, and each group of guide rails 3 is connected to one annealing chamber 2. In this case, there are n-1 pairs of first rods 41, each pair of first rods 41 is arranged between two adjacent groups of guide rails 3, and the adjacent first rods 41 in the height direction are connected to each other, and the pair of first rods 41 at the bottom in the height direction is connected to the pair of second rods 42, so that the support rod assembly 4 composed of multiple first rods 41 and second rods 42 can support multiple annealing chambers 2. Wherein, n is a positive integer greater than or equal to 2.

[0057] For example, when the annealing chamber 2 is provided with three groups, the guide rails 3 can be provided with three groups accordingly. In this case, two pairs of first rod bodies 41 can be provided, and each pair of first rod bodies 41 is supported between two adjacent groups of guide rails 3, and adjacent first rod bodies 41 can be connected to each other along the height direction. Specifically, a first coupling portion 411 is provided at one end of the first rod body 41, and a second coupling portion 412 is provided at the other end. One end of the first rod body 41 provided with the first coupling portion 411 can be arranged opposite to one end of the adjacent first rod body 41 provided with the second coupling portion 412, and the adjacent first rod bodies 41 can be connected through the first coupling portion 411 and the second coupling portion 412. The multiple first rod bodies 41 and the second rod bodies 42 located on the same side together form a long rod to support the multiple guide rails 3 on the same side, and the multiple first rod bodies 41 and the second rod bodies 42 located on the other side together form a long rod to support the multiple guide rails 3 on the other side.

[0058] In addition, when the annealing chamber 2 is set as one, a group of guide rails 3 are provided, and the support rod assembly 4 may also not be provided with the first rod body 41, that is, the support rod assembly 4 only includes a pair of second rod bodies 42, and the pair of second rod bodies 42 are connected to a group of guide rails 3 to support the annealing chamber 2 through the guide rails 3.

[0059] Reference Figure 6 In order to achieve a stable connection between the first rod body 41 and the second rod body 42 and the guide rail 3, one end of the second matching portion 412 of the first rod body 41 passes through the corresponding guide rail 3 and is formed with an external thread. The second matching portion 412 of the first rod body 41 passes through the guide rail 3 and is connected to the nut 413 and the washer 414. The main part of the first rod body 41 that does not form the first matching portion 411 and the second matching portion 412 can abut against the corresponding guide rail 3, so that the first rod body 41 can be locked to the corresponding guide rail 3 by the nut 413. One end of the second matching portion 412 of the second rod body 42 passes through the corresponding guide rail 3 and is formed with an external thread. The second matching portion 412 of the second rod body 42 passes through the guide rail 3 and is connected to the nut 413 and the washer 414. The main part of the second rod body 42 that does not form the second matching portion 412 can abut against the corresponding guide rail 3, so that the second rod body 42 can be locked to the corresponding guide rail 3 by the nut 413.

[0060] To facilitate the storage of the support rod assembly 4, the second rod body 42 can be a telescopic rod. When the annealing device is working, the second rod body 42 can be in a retracted state, and the bottom of the support rod assembly 4 is higher than the ground, so that the support rod assembly 4 will not interfere with the bottom of the rack 1 when moving toward the rack 1, and the support rod assembly 4 can be accommodated in the rack 1. When the annealing chamber 2 is extended, the second rod body 42 can be in an extended state, and at this time the second rod body 42 can be extended to abut against the ground, so that the support rod assembly 4 can support multiple guide rails 3. Among them, the second rod body 42 can adopt an existing telescopic rod structure.

[0061] When the crystallized perovskite film in the annealing chamber 2 needs to be taken out or the perovskite film to be crystallized needs to be placed in, the opening and closing door 22 of the annealing chamber 2 needs to be opened to open the annealing chamber. After that, when the perovskite film is taken out or the perovskite film is placed in, the opening and closing door 22 of the annealing chamber 2 needs to be closed to seal the annealing chamber.

[0062] The opening and closing door 22 of the existing annealing chamber 2 is opened manually, and the operation remains unchanged, in order to facilitate the opening and closing operation of the opening and closing door 22. Figure 7 In the present application, the opening and closing door 22 may be connected to a first drive assembly 5, and the first drive assembly 5 is used to drive the opening and closing door 22 to open or close. The first drive assembly 5 may include a first drive member 51, a rotating shaft 52, and a mounting plate 53. The first drive member 51 and the rotating shaft 52 may be mounted on the mounting plate 53. For example, the first drive member 51 may be fixedly mounted on the mounting plate 53 by fasteners such as screws; the mounting plate 53 is provided with a plurality of bearing seats 531, and the rotating shaft 52 is connected to the mounting plate 53 through the bearing seats 531, and the rotating shaft 52 can rotate relative to the mounting plate 53 under the drive of the first drive member 51. Among them, the rotating shaft 52 can be fixedly connected to the opening and closing door 22 and can enable the rotating shaft 52 and the opening and closing door 22 to rotate synchronously. When it is necessary to open or close the opening and closing door 22, the first driving member 51 is controlled to drive the rotating shaft 52 to rotate forward or reverse, so that the rotating shaft 52 can drive the opening and closing door 22 to rotate to cooperate with the main body of the annealing chamber 2 and the upper cover 23 and block the annealing chamber, or drive the opening and closing door 22 to rotate to separate from the main body of the annealing chamber 2 and the upper cover 23 and open the annealing chamber. Among them, the first driving member 51 can be a rotary cylinder or a motor, and the first driving member 51 is preferably a rotary cylinder. The electric drive of the opening and closing door 22 can be realized by adopting the first driving component 5, and the first driving member 51 can be connected to the controller, so that the first driving component 5 can be controlled by the user's operating instructions or automatically realize the opening and closing of the opening and closing door 22.

[0063] The connection mode between the first driving member 51 and the rotating shaft 52 can be a belt transmission connection. Specifically, the first driving member 51 is connected with a belt rotation group 54. The belt rotation group 54 includes a driving wheel 541, a driven wheel 542, and a belt 543 sleeved on the driving wheel 541 and the driven wheel 542. The driving wheel 541 is sleeved on the output shaft of the first driving member 51, and the driven wheel 542 is sleeved on the rotating shaft 52, so that the first driving member 51 can transmit power to the rotating shaft 52 through the belt rotation group 54, and the rotating shaft 52 rotates.

[0064] In order to facilitate the detection of the closed or open state of the opening and closing door 22, the first drive assembly 5 may also include a sensor 55 and a detection member 56. The detection member 56 may be connected to the rotating shaft 52, for example, fixedly connected to the rotating shaft 52 by fasteners such as screws, so that the detection member 56 can rotate synchronously with the rotating shaft 52. The sensor 55 may be set in an open position, so that when the opening and closing door 22 rotates to the open position, the detection member 56 can rotate to couple with the sensor 55, and then the opening and closing door 22 can be detected to be in an open state; or, the sensor 55 may be set in a closed position, so that when the opening and closing door 22 rotates to the closed position, the detection member 56 can rotate to couple with the sensor 55, and then the opening and closing door 22 can be detected to be in a closed state; or, the sensor 55 may be provided with two sensors, one sensor 55 is set in the open position, and the other sensor 55 is set in the closed position. Among them, the sensor 55 can be a photoelectric sensor capable of generating a light beam, and when the detection member 56 is coupled with the sensor 55, the detection member 56 blocks the light beam generated by the sensor 55 and causes the sensor 55 to generate a signal.

[0065] When the annealing chamber 2 needs to be repaired, the upper cover 23 of the annealing chamber 2 needs to be opened. After the repair, the upper cover 23 needs to be closed. The opening and closing of the existing upper cover 23 requires manual drive, and two or three people are required to operate at the same time when opening the upper cover 23, which is time-consuming and labor-intensive and may cause injuries to the operators. Figure 8 and Fig. 9In the present application, the upper cover 23 may be connected to a second drive assembly 6, and the second drive assembly 6 drives the upper cover 23 to open or close. The second drive assembly 6 may include a second drive member 61, a support rod 62, and a connecting seat 63. The second drive member 61 is connected to the support rod 62 to apply a force to the support rod 62. The support rod 62 may be connected to the upper cover 23 and may cause the upper cover 23 to move under the drive of the second drive member 61, thereby opening or closing the upper cover 23. Specifically, the second drive member 61 may be a cylinder, and the main body of the annealing chamber 2 includes a support seat 21. One end of the second drive member 61 is hinged to the support seat 21, and the other end is hinged to the connecting seat 63. One end of the support rod 62 is connected to the upper cover 23, and the other end is connected to the connecting seat 63. The connecting seat 63 is connected to the upper cover 23. The second driving member 61 and the support rod 62 can be arranged on the same side of the connecting seat 63, and the driving direction of the second driving member 61 can intersect with the extending direction of the support rod 62. When the second driving member 61 applies a force to the connecting seat 63, the connecting seat 63 can form a fulcrum, so that the driving force of the second driving member 61 is converted into a force driving the support rod 62 to move, so that the support rod 62 can drive the upper cover 23 to open or close under the action of the second driving member 61. Wherein, throttle valves 611 can be respectively arranged at opposite ends of the second driving member 61 to facilitate the adjustment of the second driving member 61.

[0066] At least one pair of second drive assemblies 6 may be provided, and a pair of second drive assemblies 6 is provided on opposite sides of the corresponding upper cover 23 and connected to opposite sides of the upper cover 23, so that a pair of second drive assemblies 6 can apply driving force to opposite sides of the upper cover 23 to achieve smooth driving of the upper cover 23. The number of second drive assemblies 6 may correspond to the number of upper covers 23, and each group of second drive assemblies 6 is used to drive the corresponding upper cover 23 to move.

[0067] Reference Fig.10 When the annealing device is running, the heat in the annealing chamber 2 may overflow and dissipate into the rack 1, causing the temperature in the rack 1 to rise, which in turn causes the temperature of the components in the rack 1 to be too high and affects the use of the components. In order to cool the components, a cooling component 7 may be provided in the annealing device, and the cooling component 7 can cool the components. One or more cooling components 7 may be provided, and each cooling component 7 may cooperate with a component to cool a component. Among them, the components may include the first driving member 51, the second driving member 61 and other components in the annealing device.

[0068] The cooling component 7 includes a shell 71, a blowing port 72 and an exhaust port 73. The shell 71 can be covered with corresponding components. The air outlet runs through the shell 71, and the blowing port 72 can be connected to an external blowing component so that the external blowing component can blow air into the shell 71. The exhaust port 73 runs through the shell 71, and the exhaust port 73 can be connected to an external exhaust component so that the external exhaust component can exhaust air into the shell 71. Through the cooperation of the blowing port 72 and the exhaust port 73, the flow of gas in the shell 71 can be accelerated. When the gas flows in the shell 71, it can absorb the heat around the components and the heat dissipated by the components themselves, and be extracted through the exhaust port 73, thereby realizing the heat dissipation of the components. Among them, the blowing port 72 can be a CDA (clean dry air) blowing interface.

[0069] In addition, the cooling component 7 may also include an exhaust fan 74 located at the top of the rack 1. The hot air in the rack 1 will float up, and by arranging the exhaust fan 74 at the top of the rack 1, the hot air in the rack 1 can be effectively exhausted, thereby achieving cooling inside the rack 1. The exhaust fan 74 may be arranged on the top plate 12 of the rack 1, and one or more exhaust fans 74 may be arranged, and specifically two exhaust fans 74 may be arranged.

[0070] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. An annealing device, characterized in that: include: Rack (1); An annealing cavity (2) is formed with an annealing cavity for placing materials; a guide rail (3) connected to the frame (1) and capable of sliding relative to the frame (1); the guide rail (3) is used to support the annealing chamber (2) and can drive the annealing chamber (2) to slide synchronously, so that the annealing chamber (2) moves out of or into the frame (1); a support rod assembly (4) connected to the guide rail (3) or the annealing chamber (2), and the support rod assembly (4) is capable of being supported on the ground when the annealing chamber (2) is moved out of the frame (1), and directly or indirectly supporting the annealing chamber (2); When the annealing chamber (2) moves out of the frame (1), the supporting force applied by the support rod assembly (4) and the frame (1) to the annealing chamber (2) is distributed on two opposite sides of the annealing chamber (2).

2. The annealing device according to claim 1, characterized in that: The guide rails (3) are provided in a plurality of groups, and the plurality of groups of guide rails (3) are arranged in sequence along the height direction of the frame (1), and each group of guide rails (3) is used to support one annealing chamber (2); the support rod assembly (4) is respectively connected to the plurality of groups of guide rails (3), and the support rod assembly (4) is used to directly or indirectly support the plurality of annealing chambers (2) when the plurality of annealing chambers (2) are moved out of the frame (1).

3. The annealing device according to claim 2, characterized in that: The support rod assembly (4) comprises a first rod body (41) and a second rod body (42) supporting each other, wherein the first rod body (41) is supported between two guide rails (3) adjacent to each other in the height direction, and the second rod body (42) is used to be supported between the guide rail (3) at the bottom and the ground.

4. The annealing device according to claim 3, characterized in that: A first matching portion (411) is disposed at one end of the first rod body (41), a second matching portion (412) matching with the first matching portion (411) is disposed at one end of the second rod body (42) adjacent to the first rod body (41), and the second rod body (42) is matched with the first rod body (41) via the second matching portion (412); And / or, a foot cup (421) is provided at one end of the second rod body (42) adjacent to the ground, and the foot cup (421) is used to abut against the ground.

5. The annealing device according to claim 3, characterized in that: The first rod body (41) is provided with a plurality of parts, one end of the first rod body (41) is provided with a first matching portion (411), and the other end is provided with a second matching portion (412), and the second matching portion (412) of the first rod body (41) is used to match with the first matching portion (411) of another first rod body (41); And / or, the second rod body (42) is a telescopic rod.

6. The annealing device according to claim 1, characterized in that: A door (22) is provided on one side of the annealing chamber (2); the door (22) is connected to a first drive assembly (5); the first drive assembly (5) comprises a first drive member (51) and a rotating shaft (52) connected to the door (22); the first drive member (51) is connected to the rotating shaft (52) and can drive the door (22) to rotate via the rotating shaft (52) to close or open the annealing chamber.

7. The annealing device according to claim 6, characterized in that: The first driving component (5) further comprises a mounting plate (53), the rotating shaft (52) and the mounting plate (53) being connected via a bearing seat (531) so that the rotating shaft (52) can rotate relative to the mounting plate (53), and the first driving member (51) is fixedly mounted on the mounting plate (53); And / or, the first driving component (5) further comprises a belt rotating group (54), wherein the belt rotating group (54) is respectively connected to the first driving member (51) and the rotating shaft (52) to transmit the power of the first driving member (51) to the rotating shaft (52).

8. The annealing device according to claim 6, characterized in that: The first driving assembly (5) further comprises a sensor (55) and a detection member (56), wherein the detection member (56) is connected to the rotating shaft (52) and is capable of moving synchronously with the rotating shaft (52), and the detection member (56) is capable of coupling with the sensor (55) when the opening and closing door (22) is in an open and / or closed state, so as to determine the opening and closing state of the opening and closing door (22); And / or, the first driving member (51) is a rotary cylinder.

9. The annealing device according to claim 1, characterized in that: The annealing chamber (2) comprises an upper cover (23), the upper cover (23) is connected to a second driving assembly (6), the second driving assembly (6) comprises a second driving member (61) and a support rod (62) connected to the second driving member (61), the support rod (62) is connected to the upper cover (23), so that the second driving member (61) can drive the upper cover (23) to move and close or open the annealing chamber through the support rod (62).

10. The annealing device according to claim 9, characterized in that: The annealing chamber (2) comprises a supporting seat (21), and the second driving component (6) comprises a connecting seat (63); one end of the second driving member (61) is hinged to the supporting seat (21), and the other end of the second driving member (61) is hinged to the connecting seat (63); the connecting seat (63) and the support rod (62) are connected to the upper cover (23), and the second driving member (61) drives the support rod (62) to move.

11. The annealing device according to claim 1, characterized in that: It also includes a cooling component (7), the cooling component (7) including a shell (71) and an air blowing port (72) and an air exhaust port (73) penetrating the shell (71), the shell (71) covering components of the annealing device; The blowing port (72) is connected to an external blowing component to blow air into the shell (71), and the exhaust port (73) is connected to an external exhaust component and is used to extract gas from the shell (71) to cool the interior of the shell (71).