Photoresist adding device and semiconductor equipment

Abstract

The invention provides a photoresist adding device and semiconductor equipment. The photoresist adding device comprises a photoresist memory, a photoresist pipeline and a photoresist adding assembly, the photoresist memory is used for storing photoresist; a plurality of photoresist pipelines are arranged, and the two ends of the plurality of photoresist pipelines are respectively connected with the photoresist storage and the machine table so as to convey the photoresist to the machine table; and the photoresist adding assembly is used for replacing and moving a photoresist bottle so as to add the photoresist into the photoresist memory. According to the invention, through centralized liquid supply and unified photoresist replacement, the human input is greatly reduced, the photoresist replacement efficiency is improved, the probability of mis-replacement of the photoresist is reduced, and the output efficiency of a machine is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a photoresist adding device and a semiconductor equipment. Background Art

[0002] Photolithography is a common process in semiconductor manufacturing. Photoresist (PR), also known as photoresist or photoresist, refers to an etch-resistant thin film liquid whose solubility changes when exposed to light or radiation such as ultraviolet light, deep ultraviolet light, electron beam, ion beam, X-ray, etc. It is a key liquid material in the photolithography process and is mainly used in the fine pattern processing of integrated circuits and discrete semiconductor devices.

[0003] Currently, every time photoresist is added to the lithography machine, the machine needs to report an empty alarm and the machine needs to be shut down before operation can be performed. After the production line personnel replace the photoresist and clear the alarm, the machine can continue to work, which will lead to the following problems:

[0004] When the machine has a light barrier alarm, the machine stops working and is in a suspended state, which seriously affects the machine's output efficiency;

[0005] (2) Although many factories have strict standard operating procedures for replacing photoresists, it is still impossible to eliminate the mistaken replacement of photoresists caused by human factors. The wrong replacement of photoresists or the use of expired photoresists will cause unstable product quality and even scrap the chip;

[0006] (3) The current method of adding photoresist in the industry is to replace the photoresist of the machine where the alarm occurs. In workshops with high production volumes, a dedicated person needs to be assigned to replace the photoresist, which results in an increase in manpower. Summary of the invention

[0007] The purpose of the present invention is to provide a photoresist adding device and semiconductor equipment, which can greatly reduce manpower input, improve photoresist replacement efficiency, reduce the probability of erroneous photoresist replacement, and improve machine output efficiency through centralized liquid supply and unified photoresist replacement.

[0008] To achieve the above-mentioned purpose, the photoresist adding device of the present invention includes a photoresist storage, a photoresist pipeline and a photoresist adding component; the photoresist storage is used to store photoresist; a plurality of photoresist pipelines are provided, and the two ends of the plurality of photoresist pipelines are respectively connected to the photoresist storage and the machine to transport the photoresist to the machine; the photoresist adding component is used to replace and move the photoresist bottle to add the photoresist into the photoresist storage.

[0009] The semiconductor device of the present invention comprises a plurality of the photoresist adding devices, and the photoresist memories in the plurality of photoresist adding devices are respectively used to store the same or different photoresists.

[0010] The photoresist adding device and the semiconductor device including the photoresist adding device of the present invention have the following beneficial effects: the photoresist storage device is used to realize centralized liquid supply to the same photoresist pipelines of all machines, so that the photoresist of a machine does not need to be replaced when a machine alarms. Compared with the original method of replacing photoresists for different machines, which is time-consuming and labor-intensive, the present invention has unified liquid supply and centralized replacement of photoresists, which is conducive to improving the efficiency of photoresist replacement, thereby effectively avoiding the machine from stopping due to empty photoresist reports and affecting production output, thereby improving the output efficiency of the machine and greatly reducing manpower input; the photoresist adding component is used to replace and move the photoresist bottle to add the photoresist to the photoresist storage device, that is, the photoresist is added to the photoresist storage device, and then the photoresist is centrally input into each machine by the photoresist storage device, thereby reducing the error rate of the original replacement method, that is, each machine needs to replace the photoresist separately, reducing the probability of mistaken replacement of photoresists, and reducing the property loss caused by wrong replacement of photoresists and the impact on product delivery cycle.

[0011] Preferably, the photoresist adding assembly includes a photoresist bottle mounting rack and a moving part, the photoresist bottle mounting rack is used to carry the inverted photoresist bottle, and the photoresist bottle mounting rack moves toward or away from the photoresist storage device through the moving part to add the photoresist to the photoresist storage device or replace the photoresist bottle. Its beneficial effect is that the inverted photoresist bottle can be moved to the liquid inlet of the photoresist storage device through the moving part to add photoresist, and there is no need to invert the photoresist bottle. The inverted photoresist bottle is moved away from the photoresist storage device through the moving part to replace the photoresist bottle, which is convenient and fast, and improves the efficiency of photoresist replacement, thereby effectively avoiding the machine from stopping due to empty photoresist, affecting production output, thereby improving the machine output efficiency.

[0012] Preferably, the movable member includes a vertical guide rail and a transverse guide rail, at least part of the vertical guide rail is arranged above the photoresist storage device, the transverse guide rail is arranged at the end of the vertical guide rail away from the photoresist storage device, the photoresist bottle placement rack is slidably arranged on the vertical guide rail and the transverse guide rail, and the photoresist bottle placement rack slides to the vertical guide rail above the photoresist storage device to add the photoresist into the photoresist storage device, and the photoresist bottle placement rack slides to the transverse guide rail to replace the photoresist bottle. Its beneficial effects are: adding photoresist through the vertical guide rail is convenient and fast, and replacing the photoresist bottle through the transverse guide rail is stable and safe, and the efficiency of photoresist replacement is improved, so that the machine can be effectively prevented from stopping due to empty photoresist, affecting production output, thereby improving the machine output efficiency.

[0013] Preferably, the photoresist adding device further comprises a controller, and a detector and a barrier assembly connected to the controller, the barrier assembly being movably arranged on the vertical guide rail, the photoresist bottle being provided with a barcode identifying the photoresist information, the detector being used to detect and read the barcode and send the photoresist information to the controller, the controller analyzing and judging the photoresist information, and sending a first driving instruction to the barrier assembly when the photoresist information meets the preset photoresist information, the barrier assembly moving away from the vertical guide rail according to the first driving instruction to allow the photoresist bottle mounting rack to move toward the photoresist storage device. Its beneficial effect is that a locking function is added to the vertical guide rail, and the photoresist bottle mounting rack is allowed to move toward the photoresist storage device on the vertical guide rail to add the photoresist to the photoresist storage device only when the photoresist information on the photoresist bottle meets the preset photoresist information, that is, only the correct photoresist can be unlocked for photoresist addition, which can effectively prevent the photoresist from being replaced incorrectly.

[0014] Preferably, the photoresist adding device further comprises a photoresist bottle cap, which is detachably arranged at the mouth of the photoresist bottle, and comprises a liquid outlet and a sealing member, and the sealing member is movably arranged at the liquid outlet; the top portion of the photoresist storage device is provided with a liquid inlet portion adapted to the photoresist bottle cap, and when the photoresist bottle cap is loaded on the liquid inlet portion, the sealing member moves away from the liquid outlet to connect the photoresist bottle with the photoresist storage device, and when the photoresist bottle cap is not loaded on the liquid inlet portion, the sealing member is arranged against the liquid outlet to seal the liquid outlet. Its beneficial effect is that: by cooperating with the liquid inlet portion of the top portion of the photoresist bottle cap and the photoresist storage device, the photoresist bottle and the photoresist storage device can be automatically connected when the photoresist bottle cap is loaded on the liquid inlet portion, so that the photoresist in the photoresist bottle can automatically flow to the photoresist storage device without removing the bottle cap, which is convenient and fast, and improves the efficiency of photoresist adding, thereby effectively avoiding the machine from stopping due to empty photoresist and affecting the production output, thereby improving the output efficiency of the machine.

[0015] Preferably, the light-resistance bottle cap further comprises a receiving groove, a cover plate, an elastic member and a sealing member movable cavity, the receiving groove is used for inserting the light-resistance bottle mouth and accommodating the light-resistance, the liquid outlet is arranged on the cover plate, the sealing member movable cavity is fixedly arranged on the cover plate and extends from the liquid outlet toward the receiving groove, the sealing member movable cavity is provided with a liquid outlet channel to connect the liquid outlet and the receiving groove, the elastic member is arranged on the sealing member movable cavity and connected with the sealing member, the elastic member drives the sealing member to move toward or away from the liquid outlet in the sealing member movable cavity to seal the liquid outlet or connect the liquid outlet and the receiving groove. Its beneficial effect is that the elastic member drives the sealing member to move toward the liquid outlet in the sealing member movable cavity so that the sealing member abuts against the liquid outlet to seal the liquid outlet, and the elastic member drives the sealing member to move away from the liquid outlet in the sealing member movable cavity to connect the liquid outlet and the receiving groove, so that the light-resistance in the receiving groove flows to the liquid outlet through the liquid outlet channel.

[0016] Preferably, the liquid inlet portion includes a bottom plate, a liquid inlet, a supporting portion, and an insertion groove docked with the accommodating groove, the liquid inlet is arranged on the bottom plate, the supporting portion is fixedly arranged on the bottom plate and extends from the liquid inlet toward the insertion groove, the supporting portion is provided with a liquid inlet channel to connect the liquid inlet and the insertion groove, and when the light-blocking bottle cap is loaded on the liquid inlet portion, the supporting portion pushes the sealing member to move away from the liquid outlet in the sealing member movable cavity. Its beneficial effect is that when the light-blocking bottle cap is loaded on the liquid inlet portion, the supporting portion pushes the sealing member to move away from the liquid outlet in the sealing member movable cavity, and the elastic member contracts at this time; when the light-blocking bottle cap is not loaded on the liquid inlet portion, the elastic member pushes the sealing member to move toward the liquid outlet in the sealing member movable cavity through elastic force to seal the liquid outlet.

[0017] Preferably, the photoresist bottle placement rack includes a photoresist bottle fixing part and a sliding part, the sliding part is fixedly arranged on the side wall of the photoresist bottle fixing part, the vertical guide rail and the horizontal guide rail both include a sliding groove, and the sliding part is slidably arranged in the sliding groove. The beneficial effect is that the sliding part drives the photoresist bottle fixing part to slide in the sliding groove, so as to add the photoresist to the photoresist storage or replace the photoresist bottle.

[0018] Preferably, the barrier assembly includes a connected driving member and a barrier member, the barrier member is movably arranged on the vertical guide rail and straddles the sliding slot, the controller is connected to the driving member, the controller sends a first driving instruction to the driving member, and the driving member drives the barrier member to move away from the sliding slot according to the first driving instruction to allow the sliding member to move toward the photoresist storage device in the sliding slot. The beneficial effect is that the barrier assembly has a simple structure, the barrier method is simple and convenient to operate, and can effectively prevent the photoresist from changing incorrectly.

[0019] Preferably, the distance between the barrier and the top of the photoresist storage is 2-3.5 cm. The beneficial effect is that when the barrier moves away from the sliding groove and the sliding member is allowed to slide in the sliding groove, the photoresist bottle placement rack automatically slides down under its own gravity, so that the photoresist bottle cap is automatically loaded and inserted into the liquid inlet to add photoresist to the photoresist storage. If the distance is too small, the abutment part is not enough to push the seal to move in the seal active cavity. If the distance is too large, the impact force of the photoresist bottle placement rack when it falls will be too large to damage the photoresist bottle cap and the liquid inlet.

[0020] Preferably, the transverse guide rail further comprises a movable groove connected to the sliding groove, the movable groove is in a square structure, and the side length of the movable groove is greater than the side length of the sliding member. The photoresist bottle fixing part slides into the movable groove through the sliding part and turns over to replace the photoresist bottle. The beneficial effect is that it is easy to replace the photoresist bottle, and the movable groove has a square structure, which is conducive to improving the stability and safety when replacing the photoresist bottle.

[0021] Preferably, the photoresist adding device further includes a controller, and an alarm and at least two groups of liquid level sensors respectively connected to the controller, wherein the at least two groups of liquid level sensors include a first liquid level sensor group and a second liquid level sensor group sequentially arranged on the side wall of the photoresist storage device from bottom to top; when the photoresist liquid level is lower than the first liquid level sensor group, the first liquid level sensor group sends the first photoresist liquid level information to the controller, and the controller controls the alarm to issue an empty warning and control the device to stop running according to the first photoresist liquid level information; when the photoresist liquid level is lower than the second liquid level sensor group, the second liquid level sensor group sends the second photoresist liquid level information to the controller, and the controller controls the alarm to issue a warning to remind to add photoresist according to the second photoresist liquid level information. The beneficial effect is that the at least two groups of liquid level sensors ensure that there is sufficient time to add photoresist, and avoid the machine directly stopping due to the empty photoresist reporting, thereby affecting the output.

[0022] Preferably, the first liquid level sensor group is arranged at a first position of the photoresistance storage device, not lower than the connection portion between the photoresistance pipeline and the photoresistance storage device, and the second liquid level sensor group is arranged at a second position of the photoresistance storage device, which is 1 / 3-1 / 2 of the height of the photoresistance storage device. The beneficial effect is that the arrangement position of the second liquid level sensor avoids frequent alarms and prompts for adding photoresistance due to proximity to the liquid inlet, and ensures sufficient time for adding photoresistance. The arrangement position of the first liquid level sensor group makes the photoresistance liquid level not lower than the connection portion between the photoresistance pipeline and the photoresistance storage device, and the controller can give an empty warning and control the equipment to stop running, avoiding the risk of product scrapping due to the absence of a photoresistance conveyor.

[0023] Preferably, each group of liquid level sensors includes at least two liquid level sensors, and the at least two liquid level sensors in the same group are circumferentially arranged on the side wall of the photoresist storage device. The beneficial effect is to prevent one of the liquid level sensors from being damaged and failing to trigger an alarm, resulting in failure to add photoresist in time, thus affecting production.

[0024] Preferably, the first driving instruction includes moving the barrier assembly away from the vertical guide rail, and after 2 to 5 seconds, moving the barrier assembly toward the vertical guide rail to restore the barrier assembly to its original position; when receiving information on replacing an empty photoresist bottle, the controller sends a second driving instruction to the barrier assembly, and the second driving instruction includes moving the barrier assembly away from the vertical guide rail, and after 5 to 10 seconds, moving the barrier assembly toward the vertical guide rail to restore the barrier assembly to its original position. The beneficial effect is that when the light resistance information on the light resistance bottle meets the preset light resistance information, the baffle assembly moves away from the vertical guide rail, and the light resistance bottle placement rack is conducive to its own gravity falling to make the light resistance bottle cap dock with the liquid inlet part to add light resistance, so there is no need to reserve a long time for the baffle assembly to return to its original position. The light resistance bottle placement rack falls and passes the position of the baffle assembly and then returns to its original position, which can effectively prevent the replacement of the light resistance without the detector detecting and reading the barcode; and when replacing an empty light resistance bottle, because the user needs to hold the handle to drive the light resistance bottle placement rack to move away from the light resistance storage device, a long time needs to be reserved for the baffle assembly to return to its original position. The light resistance bottle placement rack moves away from the light resistance storage device and passes the position of the baffle assembly and then returns to its original position, which can effectively avoid the damage to the light resistance bottle cap and the liquid inlet caused by misoperation due to the light resistance bottle placement rack falling to the light resistance storage device.

[0025] Preferably, the photoresist bottle fixing member includes a fixing part, a movable part and a locking part, one end of the movable part is connected to the fixing part by a hinge to form a receiving cavity for receiving the photoresist bottle, and the other end of the movable part is locked with the fixing part by the locking part to fix the photoresist bottle. The beneficial effect is that it ensures that the photoresist bottle can stably and smoothly approach the photoresist storage for adding photoresist.

[0026] Preferably, the photoresist bottle placement rack further comprises a handle, which is arranged at one end of the sliding member away from the photoresist bottle fixing member, and the sliding member slides in the sliding groove when the user holds the handle. The beneficial effect is that it ensures that the photoresist bottle can stably and smoothly approach the photoresist storage for adding photoresist. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a front view schematic diagram of a photoresist adding device according to an embodiment of the present invention;

[0028] Figure 2 for Figure 1 A schematic side view of a photoresist adding device shown;

[0029] Figure 3 for Figure 2 An enlarged schematic diagram of a local structure A in the photoresist adding device shown;

[0030] Figure 4 for Figure 1 A schematic diagram showing a photoresist bottle placement rack in a photoresist adding device in a locked state;

[0031] Figure 5 for Figure 4 A schematic diagram of the photoresist bottle placement rack in an open state is shown;

[0032] Figure 6 for Figure 1 A schematic diagram of a normal state of a photoresist bottle cap in a photoresist adding device shown;

[0033] Figure 7 for Figure 6 The schematic diagram of the state when the photoresist bottle cap is loaded on the liquid inlet part;

[0034] Figure 8 for Figure 1 A schematic diagram of a liquid inlet portion of a photoresist storage device in a photoresist adding device is shown;

[0035] Fig. 9 for Figure 1 An enlarged schematic diagram of a local structure B in the photoresist adding device shown;

[0036] Fig.10 for Figure 1The structural block diagram of part of the structure of the photoresist adding device is shown. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0038] To overcome the problems existing in the prior art, an embodiment of the present invention provides semiconductor equipment, which can replace photoresists in a unified manner through centralized liquid supply, thereby greatly reducing manpower input, improving the efficiency of photoresist replacement, reducing the probability of erroneous photoresist replacement, and improving machine output efficiency.

[0039] Figure 1 It is a front view schematic diagram of a photoresist adding device according to an embodiment of the present invention; Figure 2 for Figure 1 A side view schematic diagram of a photoresist adding device is shown.

[0040] In some embodiments, reference Figure 1 and Figure 2 The photoresist adding device includes a photoresist storage 1, a photoresist pipeline 2 and a photoresist adding component 3; the photoresist storage 1 is used to store photoresist; a plurality of photoresist pipelines 2 are provided, and the two ends of the plurality of photoresist pipelines 2 are respectively connected to the photoresist storage 1 and a machine (not shown in the figure) to transport the photoresist to the machine (not shown in the figure); the photoresist adding component 3 is used to replace and move a photoresist bottle (not shown in the figure) to add the photoresist into the photoresist storage 1.

[0041] Specifically, the photoresist storage device is used to centrally supply liquid to the same photoresist pipelines of all machines, so that the photoresist of a machine does not need to be replaced when an alarm is sounded by a certain machine. Compared with the original method of replacing photoresists for different machines, which is time-consuming and labor-intensive, the present invention has unified liquid supply and centralized replacement of photoresists, which is beneficial to improving the efficiency of photoresist replacement, thereby effectively solving the problem of machine shutdown due to empty photoresist reports affecting production output, thereby improving the output efficiency of the machine and greatly reducing manpower input; the photoresist adding component is used to replace and move the photoresist bottle to add the photoresist to the photoresist storage device, that is, the photoresist is added to the photoresist storage device, and then the photoresist is centrally input into each machine by the photoresist storage device, thereby reducing the error rate of the original replacement method, that is, the need to replace the photoresist of each machine separately, reducing the probability of mistaken replacement of photoresists, and reducing the property loss caused by wrong replacement of photoresists and the impact on product delivery cycle.

[0042] In some embodiments, reference Figure 1 and Figure 2 The photoresist adding assembly 3 includes a photoresist bottle mounting frame 31 and a moving member 32. The photoresist bottle mounting frame 31 is used to carry the inverted photoresist bottle (not shown in the figure). The photoresist bottle mounting frame 31 moves toward or away from the photoresist storage device 1 through the moving member 32 to add the photoresist to the photoresist storage device 1 or replace the photoresist bottle (not shown in the figure). The inverted photoresist bottle (not shown in the figure) can be moved to the liquid inlet of the photoresist storage device through the moving member 32 to add photoresist, and there is no need to invert the photoresist bottle. The inverted photoresist bottle (not shown in the figure) is moved away from the photoresist storage device 1 through the moving member 32 to replace the photoresist bottle (not shown in the figure). It is convenient and fast, and the efficiency of photoresist replacement is improved, so that the machine can be effectively prevented from stopping due to empty photoresist, which affects the production output, thereby improving the machine output efficiency.

[0043] In some embodiments, reference Figure 1 and Figure 2 The movable member 32 includes a vertical guide rail 321 and a transverse guide rail 322, at least part of the vertical guide rail 321 is arranged above the photoresist storage device 1, and the transverse guide rail 322 is arranged at the end of the vertical guide rail 321 away from the photoresist storage device 1, and the photoresist bottle placement rack 31 is slidably arranged on the vertical guide rail 321 and the transverse guide rail 322, and the photoresist bottle placement rack 31 slides to the vertical guide rail 321 above the photoresist storage device 1 to add the photoresist into the photoresist storage device 1, and the photoresist bottle placement rack 31 slides to the transverse guide rail 322 to replace the photoresist bottle (not shown in the figure). Adding photoresist through the vertical guide rail 321 is convenient and quick, and replacing the photoresist bottle through the transverse guide rail 322 is stable and safe, and the efficiency of photoresist replacement is improved, so that the machine can be effectively prevented from stopping due to empty photoresist, which affects the production output, thereby improving the machine output efficiency.

[0044] In some embodiments, reference Figure 1 There are two moving parts 32, and the two moving parts 32 are respectively arranged on both sides of the photoresist storage 1, which is conducive to improving the stability and safety of the operation of the photoresist bottle placement rack 31. In some specific embodiments, the two moving parts 32 are respectively fixedly arranged on the symmetrical side walls of the photoresist storage 1.

[0045] Figure 3 for Figure 2 An enlarged schematic diagram of a local structure A in the photoresist adding device shown; Figure 4 for Figure 1 A schematic diagram showing a photoresist bottle placement rack in a photoresist adding device in a locked state; Figure 5 for Figure 4 The photoresist bottle placement rack shown is a schematic diagram in an open state.

[0046] In some embodiments, reference Figures 1 to 5 The photoresist bottle placement rack 31 includes a photoresist bottle fixing part 311 and a sliding part 312. The sliding part 312 is fixedly arranged on the side wall of the photoresist bottle fixing part 311. The vertical guide rail 321 and the transverse guide rail 322 both include a sliding groove 323. The sliding part 312 is slidably arranged in the sliding groove 323. The sliding part 312 drives the photoresist bottle fixing part 311 to slide in the sliding groove 323, so as to add the photoresist to the photoresist storage 1 or replace the photoresist bottle.

[0047] In some embodiments, reference Figures 1 to 3 The transverse guide rail 322 also includes a movable groove 324 connected to the sliding groove 323, the movable groove 324 is a square structure, and the side length of the movable groove 324 is greater than the side length of the sliding member 312. The photoresist bottle fixing member 311 slides into the movable groove 324 through the sliding member 312 and turns over to replace the photoresist bottle, which is convenient for replacing the photoresist bottle. The movable groove 324 is in a square structure, which is conducive to improving the stability and safety when replacing the photoresist bottle.

[0048] In some embodiments, reference Figure 1 , Figure 4 and Figure 5 The photoresist bottle placement rack 31 also includes a handle 313, which is arranged at one end of the sliding member 312 away from the photoresist bottle fixing member 311. The sliding member 312 slides in the sliding groove 323 when the user holds the handle 313, ensuring that the photoresist bottle can stably and smoothly approach the photoresist storage 1 for photoresist addition.

[0049] In some embodiments, reference Figure 1 , Figure 4 and Figure 5 The handle member 313 and the sliding member 312 are each provided with two and are arranged on the symmetrical side of the photoresist bottle fixing member 311 .

[0050] In some embodiments, reference Figure 4 and Figure 5 The photoresist bottle fixing member 311 includes a fixing portion 3111, a movable portion 3112 and a locking portion 3113. One end of the movable portion 3112 is connected to the fixing portion 3111 through a hinge 3114 to form a containing cavity for accommodating the photoresist bottle. The other end of the movable portion 3112 is locked with the fixing portion 3111 through the locking portion 3113 to fix the photoresist bottle, ensuring that the photoresist bottle can stably and smoothly approach the photoresist storage 1 for adding photoresist.

[0051] In some embodiments, reference Figure 1 , Figure 2 , Figure 4 and Figure 5 The top end of the photoresist bottle fixing member 311 is also provided with a through portion 3115 for the photoresist bottle cap to pass through.

[0052] In some embodiments, reference Figure 4 and Figure 5 The body of the fixed part 3111 and the body of the movable part 3112 are both composed of a plurality of arc-shaped rods, so that the body of the photoresist bottle fixing member 311 is a hollow structure, so that the detector can scan the barcode on the photoresist bottle.

[0053] Figure 6 for Figure 1 A schematic diagram of a normal state of a photoresist bottle cap in a photoresist adding device shown; Figure 7 for Figure 6 The schematic diagram of the state when the photoresist bottle cap is loaded on the liquid inlet part; Figure 8 for Figure 1 A schematic diagram of the liquid inlet portion of the photoresist storage in the photoresist adding device is shown.

[0054] In some embodiments, reference Figures 6 to 8The photoresist adding device further comprises a photoresist bottle cap 4, which is detachably arranged at the mouth of the photoresist bottle (not shown in the figure), and comprises a liquid outlet 41 and a sealing member 42, and the sealing member 42 is movably arranged at the liquid outlet 41; a liquid inlet portion 11 adapted to the photoresist bottle cap 4 is provided at the top end of the photoresist storage device 1, when the photoresist bottle cap 4 is loaded on the liquid inlet portion 11, the sealing member 42 moves away from the liquid outlet 41 to connect the photoresist bottle (not shown in the figure) with the photoresist storage device 1, and when the photoresist bottle cap 4 is not loaded on the liquid inlet portion 11, the sealing member 42 is arranged to abut against the liquid outlet 41 to seal the liquid outlet 41. By cooperating the photoresist bottle cap 4 with the liquid inlet 11 at the top of the photoresist storage 1, the photoresist bottle and the photoresist storage 1 can be automatically connected when the photoresist bottle cap 4 is loaded on the liquid inlet 11, so that the photoresist in the photoresist bottle can automatically flow to the photoresist storage 1 without removing the bottle cap, which is convenient and fast, and improves the efficiency of photoresist adding, thereby effectively avoiding the machine from stopping due to empty photoresist and affecting production output, thereby improving the output efficiency of the machine.

[0055] In some embodiments, after the photoresist bottle cap 4 on the empty photoresist bottle is removed, it is cleaned using a dust-free cloth dipped in an edge glue cleaner (EBR). The cleaned photoresist bottle cap 4 can be reused, and cross contamination can be prevented, thereby saving cost investment.

[0056] In some embodiments, reference Figure 6 and Figure 7 The photoresist bottle cover 4 further includes a receiving groove 43, a cover plate 44, an elastic member 45 and a sealing member movable cavity 46. The receiving groove 43 is used for inserting the photoresist bottle mouth (not shown in the figure) into and accommodating the photoresist. The liquid outlet 41 is provided on the cover plate 44. The sealing member movable cavity 46 is fixedly provided on the cover plate 44 and extends from the liquid outlet 41 toward the receiving groove 43. The sealing member movable cavity 46 is provided with a liquid outlet channel 47 to connect the liquid outlet 41 and the receiving groove 43. The elastic member 45 is provided in the sealing member movable cavity 46 and connected to the sealing member 42. The elastic member 45 drives the sealing member 42 to move toward or away from the liquid outlet 41 in the sealing member movable cavity 46 to seal the liquid outlet 41 or connect the liquid outlet 41 and the receiving groove 43. The elastic member 45 drives the seal 42 to move in the seal movable cavity 46 toward the liquid outlet 41, so that the seal 42 presses against the liquid outlet 41 to seal the liquid outlet 41. The elastic member 45 drives the seal 42 to move in the seal movable cavity 46 away from the liquid outlet 41 to connect the liquid outlet 41 and the receiving groove 43, so that the photoresist in the receiving groove 43 flows to the liquid outlet 41 through the liquid outlet channel 47.

[0057] In some embodiments, reference Figures 6 to 8The liquid inlet portion 11 includes a bottom plate 112, a liquid inlet port 113, a supporting portion 114, and an insertion groove 111 docking with the accommodating groove 43. The liquid inlet port 113 is arranged on the bottom plate 112. The supporting portion 114 is fixedly arranged on the bottom plate 112 and extends from the liquid inlet port 113 toward the insertion groove 111. The supporting portion 114 is provided with a liquid inlet channel 115 to connect the liquid inlet port 113 and the insertion groove 111. When the photoresist bottle cap 4 is loaded on the liquid inlet portion 11, the supporting portion 114 pushes the sealing member 42 to move away from the liquid outlet 41 in the sealing member movable cavity 46. When the photoresist bottle cap 4 is loaded on the liquid inlet portion 11, the supporting portion 114 pushes the sealing member 42 to move in the sealing member movable cavity 46 away from the liquid outlet 41, and the elastic member 45 contracts at this time; when the photoresist bottle cap 4 is not loaded on the liquid inlet portion 11, the elastic member 45 pushes the sealing member 42 in the sealing member movable cavity 46 toward the liquid outlet 41 through the elastic force to seal the liquid outlet 41.

[0058] Specifically, when the photoresist bottle is replaced with the photoresist bottle cap 4 and is inverted in the photoresist bottle fixing member 311, the photoresist in the photoresist bottle flows into the receiving groove 43. When the photoresist bottle cap 4 is loaded on the liquid inlet portion 11, the abutting portion 114 pushes the sealing member 42 to move away from the liquid outlet 41 in the sealing member movable cavity 46, and the abutting portion 114 also enters the sealing member movable cavity 46, the liquid outlet channel 47 is connected to the liquid inlet channel 115, and the photoresist in the receiving groove 43 flows from the liquid outlet channel 47 through the liquid inlet channel 115, the liquid outlet 41 and the liquid inlet 113 to flow into the photoresist storage 1.

[0059] Fig. 9 for Figure 1 An enlarged schematic diagram of a local structure B in the photoresist adding device shown; Fig.10 for Figure 1 The structural block diagram of part of the structure of the photoresist adding device is shown.

[0060] In some embodiments, reference Figure 1 , Figure 2 , Fig. 9 and Fig.10The photoresist adding device further comprises a controller 5, and a baffle assembly 6 and a detector 7 connected to the controller 5. The baffle assembly 6 is movably arranged on the vertical guide rail 321. The photoresist bottle (not shown in the figure) is provided with a barcode 71 for identifying the photoresist information. The detector 7 is used to detect and read the barcode 71 and send the photoresist information to the controller 5. The controller 5 analyzes and determines the photoresist information, and sends a first driving instruction to the baffle assembly 6 when the photoresist information meets the preset photoresist information. The baffle assembly 6 moves away from the vertical guide rail 321 according to the first driving instruction to allow the photoresist bottle placement rack 31 to move toward the photoresist storage 1. That is, a locking function is added to the vertical guide rail 321. Only when the photoresist information on the photoresist bottle meets the preset photoresist information, the photoresist bottle placement rack 31 is allowed to move toward the photoresist storage 1 on the vertical guide rail 321 to add the photoresist to the photoresist storage 1. That is, only the correct photoresist can be unlocked for photoresist addition, which can effectively prevent the photoresist from being replaced incorrectly.

[0061] In some specific embodiments, the barcode 71 is arranged around the body of the photoresist bottle.

[0062] In some embodiments, reference Fig. 9 and Fig.10 The barrier component 6 includes a driving member 61 and a barrier member 62 connected to each other. The barrier member 62 is movably arranged on the vertical guide rail 321 and straddles the sliding groove 323. The controller 5 is connected to the driving member 61. The controller 5 sends a first driving instruction to the driving member 61. The driving member 61 drives the barrier member 62 to move away from the sliding groove 323 according to the first driving instruction to allow the sliding member 312 to move toward the photoresist storage device 1 in the sliding groove 323. The barrier component 6 has a simple structure, and the barrier method is simple and convenient to operate, which can effectively prevent the photoresist from being replaced incorrectly.

[0063] In some specific embodiments, the driving member is a cylinder or a gas spring.

[0064] In some embodiments, the first driving instruction includes moving the barrier assembly away from the vertical guide rail, and after 2 to 5 seconds, moving the barrier assembly toward the vertical guide rail to restore the barrier assembly to its original position; when the controller receives information about replacing an empty photoresist bottle, it sends a second driving instruction to the barrier assembly, and the second driving instruction includes moving the barrier assembly away from the vertical guide rail, and after 5 to 10 seconds, moving the barrier assembly toward the vertical guide rail to restore the barrier assembly to its original position. When the photoresistance information on the photoresistance bottle meets the preset photoresistance information, the barrier assembly moves away from the vertical guide rail, and the photoresistance bottle mounting rack is conducive to its own gravity falling to make the photoresistance bottle cap dock with the liquid inlet to add photoresist, so there is no need to reserve a long time for the barrier assembly to return to its original position. The photoresistance bottle mounting rack falls through the position of the barrier assembly and then returns to its original position, which can effectively prevent the photoresist from being replaced without the detector detecting and reading the barcode; and when replacing an empty photoresistance bottle, because the user is required to hold the handle to drive the photoresistance bottle mounting rack to move away from the photoresistance storage device, a long time needs to be reserved for the barrier assembly to return to its original position. The photoresistance bottle mounting rack moves away from the photoresistance storage device and passes the position of the barrier assembly and then returns to its original position, which can effectively avoid misoperation that causes the photoresistance bottle mounting rack to fall to the photoresistance storage device and cause damage to the photoresistance bottle cap and the liquid inlet.

[0065] In some embodiments, the detector includes a photoresist adding button and an empty photoresist bottle replacement button. When it is necessary to add photoresist, the user chooses to press the photoresist adding button, and uses the detector to scan the barcode to send the photoresist information to the controller, and the controller analyzes and determines the photoresist information, and sends the first driving instruction to the barrier component when the photoresist information meets the preset photoresist information. When it is necessary to replace an empty photoresist bottle, the user chooses to press the empty photoresist bottle replacement button, and uses the detector to scan the barcode to send the photoresist information to the controller, and the controller analyzes and determines the photoresist information, and sends the second driving instruction to the barrier component when the photoresist information meets the preset photoresist information.

[0066] In some embodiments, reference Figure 1 and Figure 2, the distance L between the barrier 62 and the top of the photoresist storage 1 is 2-3.5 cm. The barrier 62 moves away from the sliding groove 323, and when the sliding member 312 is allowed to slide in the sliding groove 323, the photoresist bottle placement rack 31 automatically slides down under its own gravity, so that the photoresist bottle cap 4 is automatically loaded and inserted into the liquid inlet 11 to add photoresist to the photoresist storage 1. If the distance L is too small, the abutting portion 114 is not enough to push the sealing member 42 to move in the sealing member active cavity 46. If the distance L is too large, the impact force of the photoresist bottle placement rack 31 when falling will be too large to damage the photoresist bottle cap 4 and the liquid inlet 11.

[0067] In some specific embodiments, the distance L between the barrier 62 and the top of the photoresist memory 1 is 2.5-3 cm.

[0068] In some embodiments, reference Figure 1 and Fig.10 The photoresist adding device also includes an alarm 8 and at least two liquid level sensor groups 9 respectively connected to the controller 5, wherein the at least two liquid level sensor groups 9 include a first liquid level sensor group 91 and a second liquid level sensor group 92 which are sequentially arranged on the side wall of the photoresist storage device 1 from bottom to top; when the photoresist liquid level is lower than the first liquid level sensor group 91, the first liquid level sensor group 91 sends the first photoresist liquid level information to the controller 5, and the controller 5 controls the alarm 8 to issue an empty warning and control the device to stop running according to the first photoresist liquid level information; when the photoresist liquid level is lower than the second liquid level sensor group 92, the second liquid level sensor group 92 sends the second photoresist liquid level information to the controller 5, and the controller 5 controls the alarm 8 to issue a warning to remind to add photoresist according to the second photoresist liquid level information. The at least two liquid level sensor groups 9 are arranged to ensure that there is sufficient time to add photoresist, and avoid the machine directly stopping operation due to the empty photoresist reporting, thereby affecting the output.

[0069] In some embodiments, reference Figure 1 , the first liquid level sensor group 91 is set at a first position of the photoresist memory 1 not lower than the connection part 21 of the photoresist pipeline 2 and the photoresist memory 1, and the second liquid level sensor group 92 is set at a second position of the photoresist memory 1 at a height of 1 / 3-1 / 2 of the photoresist memory 1. The setting position of the second liquid level sensor group 92 avoids frequent alarm prompts to add photoresist due to being close to the liquid inlet 11, and ensures that there is sufficient time to add photoresist. The setting position of the first liquid level sensor group 91 makes the photoresist liquid level not lower than the connection part 21 of the photoresist pipeline 2 and the photoresist memory 1, and the controller can give an empty warning and control the equipment to stop running, avoiding the risk of product scrapping due to the absence of photoresist conveyor.

[0070] In some embodiments, each group of liquid level sensor groups 9 includes at least two liquid level sensors, and the at least two liquid level sensors in the same group are circumferentially arranged on the side wall of the photoresist storage 1 to prevent one of them from being damaged and failing to trigger an alarm, resulting in failure to add photoresist in time and affecting production.

[0071] In some embodiments, the semiconductor device includes a plurality of the photoresist adding devices, and the photoresist memories in the plurality of photoresist adding devices are respectively used to store the same or different photoresists.

[0072] In some embodiments, the method for using the photoresist adding device includes a photoresist adding step, and the photoresist adding step includes:

[0073] S1, removing the original bottle cap of the photoresist bottle and replacing it with the photoresist bottle cap;

[0074] S2, placing the photoresist bottle in the photoresist bottle fixing part, locking it and rotating the photoresist bottle fixing part so that the mouth of the photoresist bottle faces downward;

[0075] S3, sliding the light-resistance bottle fixing member with the light-resistance bottle to the barrier member by holding the handle member;

[0076] S4, pressing the photoresist adding button, and using the detector to scan the barcode on the photoresist bottle; when the controller analyzes and determines that the photoresist information meets the preset photoresist information, it controls the driving member to drive the baffle member to move away from the sliding groove, and after 2 to 5 seconds, the baffle member automatically moves toward the sliding groove to restore its original position, so that the photoresist bottle fixing member falls, and the photoresist bottle cap automatically docks and inserts into the liquid inlet portion of the top end of the photoresist storage device, and the abutting portion automatically pushes the sealing member to move away from the liquid outlet in the sealing member movable cavity, so that the photoresist in the photoresist bottle flows into the photoresist storage device to realize photoresist adding.

[0077] In some embodiments, the method for using the photoresist adding device includes a step of replacing a photoresist bottle, and the step of replacing the photoresist bottle includes:

[0078] P1. Press the button for replacing the empty photoresist bottle, and use the detector to scan the barcode on the photoresist bottle; when the controller analyzes and determines that the photoresist information meets the preset photoresist information, it controls the driving member to drive the barrier member to move away from the sliding groove, and after 5 to 10 seconds, the barrier member moves toward the sliding groove to return to its original position;

[0079] P2. After the barrier moves away from the sliding groove, the light-resistance bottle placement rack is driven to move away from the light-resistance storage device by holding the handle until it slides to the movable groove. At this time, the sealing member moves toward the liquid outlet in the sealing member movable cavity under the elastic force of the elastic member to seal the liquid outlet to prevent the residual light-resistance from flowing out;

[0080] P3, rotating the light-resistance bottle fixing part in the movable groove so that the mouth of the light-resistance bottle faces upward, opening the light-resistance bottle fixing part to take out the empty light-resistance bottle, and replacing it with a new light-resistance bottle. In which, removing the light-resistance bottle cap on the empty light-resistance bottle to clean it for reuse.

[0081] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A photoresist adding device, characterized in that: include: A photoresist memory for storing photoresist; There are a plurality of photoresist pipelines, and two ends of the plurality of photoresist pipelines are respectively connected to the photoresist storage and the machine platform to transport the photoresist to the machine platform; The photoresist adding component is used for replacing and moving the photoresist bottle to add the photoresist into the photoresist storage.

2. The photoresist adding device according to claim 1, characterized in that: The photoresist adding assembly includes a photoresist bottle mounting rack and a moving part. The photoresist bottle mounting rack is used to carry the inverted photoresist bottle. The photoresist bottle mounting rack moves toward or away from the photoresist storage device through the moving part to add the photoresist into the photoresist storage device or replace the photoresist bottle.

3. The photoresist adding device according to claim 2, characterized in that: The movable part includes a vertical guide rail and a transverse guide rail, at least a part of the vertical guide rail is arranged above the photoresist storage device, the transverse guide rail is arranged at the end of the vertical guide rail away from the photoresist storage device, the photoresist bottle placement rack is slidably arranged on the vertical guide rail and the transverse guide rail, and the photoresist bottle placement rack slides to the vertical guide rail above the photoresist storage device to add the photoresist into the photoresist storage device, and the photoresist bottle placement rack slides to the transverse guide rail to replace the photoresist bottle.

4. The photoresist adding device according to claim 3, characterized in that: It also includes a controller, and a detector and a barrier assembly connected to the controller, the barrier assembly being movably arranged on the vertical guide rail, the photoresist bottle being provided with a barcode for identifying photoresistance information, the detector being used to detect and read the barcode and send the photoresistance information to the controller, the controller analyzing and judging the photoresistance information, and sending a first driving instruction to the barrier assembly when the photoresistance information meets the preset photoresistance information, and the barrier assembly moving away from the vertical guide rail according to the first driving instruction to allow the photoresistance bottle placement rack to move toward the photoresistance storage device.

5. The photoresist adding device according to claim 1, characterized in that: It also includes a photoresistance bottle cap, which is detachably arranged on the mouth of the photoresistance bottle, and includes a liquid outlet and a sealing member, which is movably arranged on the liquid outlet; the top end of the photoresistance storage device is provided with a liquid inlet portion adapted to the photoresistance bottle cap, when the photoresistance bottle cap is loaded on the liquid inlet portion, the sealing member moves away from the liquid outlet to connect the photoresistance bottle with the photoresistance storage device, and when the photoresistance bottle cap is not loaded on the liquid inlet portion, the sealing member is arranged to abut against the liquid outlet to seal the liquid outlet.

6. The photoresist adding device according to claim 5, characterized in that: The photoresist bottle cap also includes a receiving groove, a cover plate, an elastic member and a sealing member movable cavity. The receiving groove is used for inserting the photoresist bottle mouth into and accommodating the photoresist. The liquid outlet is arranged on the cover plate. The sealing member movable cavity is fixedly arranged on the cover plate and extends from the liquid outlet toward the receiving groove. The sealing member movable cavity is provided with a liquid outlet channel to connect the liquid outlet and the receiving groove. The elastic member is arranged in the sealing member movable cavity and connected to the sealing member. The elastic member drives the sealing member to move toward or away from the liquid outlet in the sealing member movable cavity to seal the liquid outlet or connect the liquid outlet and the receiving groove.

7. The photoresist adding device according to claim 6, characterized in that: The liquid inlet portion includes a bottom plate, a liquid inlet, a supporting portion, and an insertion groove docked with the accommodating groove, the liquid inlet is arranged on the bottom plate, the supporting portion is fixedly arranged on the bottom plate and extends from the liquid inlet toward the insertion groove, the supporting portion is provided with a liquid inlet channel to connect the liquid inlet and the insertion groove, and when the photoresist bottle cap is loaded on the liquid inlet portion, the supporting portion pushes the sealing member to move away from the liquid outlet in the sealing member movable cavity.

8. The photoresist adding device according to claim 4, characterized in that: The photoresist bottle placement rack comprises a photoresist bottle fixing part and a sliding part, wherein the sliding part is fixedly arranged on the side wall of the photoresist bottle fixing part, and the vertical guide rail and the horizontal guide rail both comprise sliding grooves, and the sliding part is slidably arranged in the sliding grooves.

9. The photoresist adding device according to claim 8, characterized in that: The barrier assembly includes a connected driving member and a barrier member, the barrier member is movably arranged on the vertical guide rail and straddles the sliding groove, the controller is connected to the driving member, the controller sends a first driving instruction to the driving member, and the driving member drives the barrier member to move away from the sliding groove according to the first driving instruction to allow the sliding member to move toward the photoresistance storage device in the sliding groove.

10. The photoresist adding device according to claim 9, characterized in that: The distance between the blocking member and the top end of the photoresistance storage device is 2-3.5 cm.

11. The photoresist adding device according to claim 8, characterized in that: The transverse guide rail also includes a movable groove connected to the sliding groove, the movable groove is a square structure, and the side length of the movable groove is greater than √2 times the side length of the sliding member. The photoresist bottle fixing member slides into the movable groove through the sliding member and is inverted to replace the photoresist bottle.

12. The photoresist adding device according to claim 1, characterized in that: It also includes a controller, an alarm and at least two groups of liquid level sensors respectively connected to the controller, wherein the at least two groups of liquid level sensors include a first liquid level sensor group and a second liquid level sensor group sequentially arranged on the side wall of the photoresistor storage device from bottom to top; when the photoresist liquid level is lower than the first liquid level sensor group, the first liquid level sensor group sends first photoresist liquid level information to the controller, and the controller controls the alarm to issue an empty warning and control the equipment to stop running according to the first photoresist liquid level information; when the photoresist liquid level is lower than the second liquid level sensor group, the second liquid level sensor group sends second photoresist liquid level information to the controller, and the controller controls the alarm to issue a reminder to add photoresist according to the second photoresist liquid level information.

13. The photoresist adding device according to claim 12, characterized in that: The first liquid level sensor group is arranged at a first position of the photoresistor memory not lower than the connection portion of the photoresistor pipeline and the photoresistor memory, and the second liquid level sensor group is arranged at a second position of the photoresistor memory at 1 / 3-1 / 2 of the height of the photoresistor memory.

14. The photoresist adding device according to claim 12, characterized in that: Each group of liquid level sensors includes at least two liquid level sensors, and the at least two liquid level sensors in the same group are circumferentially arranged on the side wall of the photoresistance storage.

15. The photoresist adding device according to claim 4 or 9, characterized in that: The first driving instruction includes moving the barrier assembly away from the vertical guide rail, and after 2 to 5 seconds, moving the barrier assembly toward the vertical guide rail to restore the barrier assembly to its original position; When receiving information about replacing an empty photoresist bottle, the controller sends a second driving instruction to the barrier assembly, wherein the second driving instruction includes moving the barrier assembly away from the vertical guide rail and moving the barrier assembly toward the vertical guide rail after 5 to 10 seconds to restore the barrier assembly to its original position.

16. The photoresist adding device according to claim 8, characterized in that: The photoresist bottle fixing member includes a fixing part, a movable part and a locking part. One end of the movable part is connected to the fixing part through a hinge to form a containing cavity for accommodating the photoresist bottle. The other end of the movable part is locked with the fixing part through the locking part to fix the photoresist bottle.

17. The photoresist adding device according to claim 8, characterized in that: The photoresist bottle placement rack further comprises a handle member, which is disposed at one end of the sliding member away from the photoresist bottle fixing member. The sliding member slides in the sliding groove when a user holds the handle member.

18. A semiconductor device, characterized in that: It comprises a plurality of photoresist adding devices as described in any one of claims 1 to 17, wherein the photoresist memories in the plurality of photoresist adding devices are respectively used to store the same or different photoresists.

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