Vacuum evaporator uniform in evaporation

Abstract

The invention relates to the technical field of vacuum evaporators, in particular to a vacuum evaporator uniform in evaporation. According to the technical scheme, the evaporator comprises an evaporator body, a rotating structure, a storage structure, a first linkage structure and a second linkage structure. The evaporator body comprises a machine shell and an opening and closing door located on one side of the machine shell. The rotating structure comprises a ring seat and a mounting ring; the storage structure comprises a supporting angle plate, a supporting rod and a storage frame; the first linkage structure comprises a first supporting strip, a first sliding sleeve, a first guide rod, a first connecting rib, a first limiting ring, a first spring and a first flow guide plate. The second linkage structure comprises a second supporting strip, a second sliding sleeve, a second guide rod, a second connecting rib, a second limiting ring, a second spring and a second flow guide plate. According to the invention, the linkage structure I is matched with the linkage structure. The device has the function of uniformly evaporating the substrate material, and solves the problem that the substrate material needs to be supported or clamped during evaporation, so that the contact surface for clamping or supporting the substrate material cannot be uniformly deposited and processed.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum evaporators, and in particular to a vacuum evaporator with uniform evaporation. Background Art

[0002] Vapor deposition is a thin film preparation technology that uses advanced vacuum technology to evaporate, sputter or other methods to prepare materials from solid sources into gas, ion or atomic states in a vacuum environment, and then deposits them onto the substrate surface to form a thin film.

[0003] During the evaporation process of hardware parts, the atoms generated by the evaporation of the target material pass through the vacuum chamber to reach the surface of the substrate and condense to form a thin film, but the substrate material needs to be supported or clamped, and the contact surface of the clamped or supported substrate material cannot be uniformly deposited. Therefore, those skilled in the art provide a vacuum evaporator with uniform evaporation to solve the problems raised in the above background technology. Summary of the invention

[0004] The purpose of the present invention is to provide a vacuum evaporator with uniform evaporation in view of the problems existing in the background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: a vacuum evaporator with uniform evaporation, comprising an evaporator, a rotating structure, a storage structure, a linkage structure 1 and a linkage structure 2, wherein the evaporator comprises a housing and an opening and closing door located on one side of the housing;

[0006] The rotating structure includes a ring seat which is evenly distributed on one side of the opening and closing door, and a mounting ring which is located inside the upper end of the ring seat;

[0007] The storage structure includes support angle plates fixedly mounted on the upper end of the mounting ring and symmetrically distributed, support rods located at the upper ends of the support angle plates, and a storage frame located at one end of the support rods;

[0008] The linkage structure includes a plurality of groups of support bars equidistantly distributed, a sliding sleeve 1 embedded and installed inside the support angle plate, a guide rod 1 slidably inserted inside the sliding sleeve 1, a connecting rib 1 penetrating the support bar 1 and connected to the upper end of the guide rod 1 at one side of the lower end, a limiting ring 1 sleeved on the outer wall of the guide rod 1, a spring 1 fixed between the limiting ring 1 and the support angle plate, and a guide plate 1 located inside the housing and equidistantly distributed longitudinally;

[0009] The linkage structure 2 includes multiple groups of equidistantly distributed support bars 2, a sliding sleeve 2 embedded and installed inside the support angle plate, a guide rod slidably inserted into the sliding sleeve 2, a connecting rib 2 that passes through the support bars 2 and is connected to the upper end of the guide rod 2 at one side of the lower end, a limiting ring 2 that is sleeved on the outer wall of the guide rod 2, two springs fixed between the limiting ring 2 and the support angle plate, and a guide plate 2 that is located inside the casing and is equidistantly distributed longitudinally.

[0010] The housing is provided with a storage port at one end, the storage port corresponds to the opening and closing door, and the inner wall of the storage port is provided with a retaining edge. The storage port is used for the structural parts connected with the opening and closing, and the opening of the storage structure is effectively used for the storage and access of the parts after evaporation.

[0011] An opening and closing structure is provided inside the inner wall of the lower end of the casing, and the opening and closing structure includes a second motor located on the inner wall of the lower end of the casing, a screw is provided at the output end of the second motor, a second bearing bracket is provided on the inner wall of the lower end of the casing, and one end of the screw is rotatably inserted into the inside of the second bearing bracket. When the second motor drives the screw to rotate, one end of the screw is supported by the second bearing bracket, and the stability of the screw during rotation is improved.

[0012] The inner wall at the lower end of the housing is provided with a guide rail, the outer wall of the guide rail is slidably mounted with a slider, the upper end of the slider is provided with a nut threadedly sleeved with the screw rod, and the upper end of the nut is provided with a connecting plate fixedly connected to the opening and closing door. The nut is threadedly mounted with the screw rod, and the lower end slides on the outer wall of the guide rail through the slider, so that the rotating screw rod pushes the thread raceway inside the nut, driving the nut to move in the guiding direction of the slider, and the driving force applied to the nut is applied to the opening and closing door through the connecting plate.

[0013] A motor 1 is provided at one end of the opening and closing door, a rotating shaft is provided at the output end of the motor 1, a bearing bracket 1 is provided at one end of the opening and closing door, and the upper end of the rotating shaft is rotatably installed inside the bearing bracket 1. When the motor 1 drives the rotating shaft to rotate, one end of the rotating shaft rotates inside the bearing bracket 1, thereby supporting the rotating shaft in rotation, and the stability of the rotating shaft is improved when the rotating shaft rotates.

[0014] One end of each ring seat is provided with a symmetrically distributed fixing rod fixedly connected to the opening and closing door, the outer wall of the rotating shaft is sleeved with gears distributed equidistantly in the longitudinal direction, and the outer wall of the mounting ring is sleeved with a gear ring meshing with the gears. Multiple ring seats suspended on one side of the opening and closing door are connected to the opening and closing door through the fixing rod, thereby supporting the ring seats.

[0015] The inner walls on both sides of the ring seat and the lower end are provided with annular rolling grooves, and the steel balls distributed in an annular array and slidably installed in the rolling grooves are rotatably installed at both ends and the lower end of the mounting ring. The ring seat is supported at multiple points and on multiple surfaces by the steel balls, and is guided in the rolling grooves when rotating. The rotation of the steel balls themselves improves the rotation stability of the mounting ring.

[0016] Both ends of the guide plate 1 are provided with a guide surface 1, and the thickness of the guide surface 1 gradually increases toward the center section of the guide plate 1. A ball 1 is rotatably mounted on the lower end of the guide rod. When the guide rod 1 enters the guide plate 2, the guide surface 1 guides the guide rod 1, and at the same time, the ball 1 rolls in contact with the guide plate 1, thereby reducing the friction resistance when passing through.

[0017] Both ends of the guide plate 2 are provided with guide surfaces 2, and the thickness of the guide surfaces 2 gradually increases toward the center section of the guide plate 2. The lower end of the guide rod 2 is rotatably mounted with a ball bearing 2. The outer walls of the guide plates 1 and 2 are both provided with side plates that are symmetrically distributed and fixedly connected to the inner wall of the casing. When the guide rod 2 enters the guide plate 2, the guide surface 2 guides the guide rod 2, and the ball bearing 2 rolls in contact with the guide plate 2, thereby reducing the friction resistance when passing through. The guide plates 1 and 2 are both fixed inside the casing through the side plates.

[0018] The guide plate 1 and the guide plate 2 are both semicircular, and a travel groove is provided between the guide plate 1 and the guide plate 2. The upper end of the support bar 1 is provided with a rubber head 1, and the upper end of the support bar 2 is provided with a rubber head 2. The travel groove ensures the passage of the storage structure, and the storage structure effectively passes through the guide plate 1 and the guide plate 2 horizontally, so that the storage structure will not be hindered when entering the inside of the casing. When the support bar 1 and the support bar 2 support the bottom of the parts through the rubber head 1 and the rubber head 2, the parts are avoided from being scratched, and the parts are protected.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] The feed inlet of the vacuum evaporator of the present invention is opened and closed by an opening and closing door that opens and closes automatically. A rotating structure is provided on one side of the lower end of the opening and closing door to drive the base material to rotate. The base material is supported by a plurality of groups of support bars 1 and support bars 2 distributed in an array. The support bars 1 and support bars 2 are linked together through the guide plates 1 and 2. During the rotation of the base material, support is performed at different points according to different positions. When the base material is located inside the casing for evaporation processing, the situation in which the contact surface cannot be uniformly evaporated due to the constant clamping or support at the same position is avoided, and uniform evaporation of the base material is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the main stereoscopic structure of the present invention;

[0022] Figure 2 It is a rear-view stereoscopic structural schematic diagram of the present invention;

[0023] Figure 3 It is a schematic diagram of the three-dimensional structure of the casing of the present invention from a side view;

[0024] Figure 4 It is a schematic diagram of the three-dimensional structure of the casing of the present invention in top cross-section;

[0025] Figure 5 It is a schematic diagram of the three-dimensional structure of the opening and closing plate of the present invention at a first angle;

[0026] Figure 6 It is a schematic diagram of the second angle three-dimensional structure of the interior of the opening and closing plate of the present invention;

[0027] Figure 7 It is a schematic diagram of the three-dimensional structure of the ring seat of the present invention from top view;

[0028] Figure 8 It is a schematic diagram of the three-dimensional structure of the gear ring of the present invention from a side view;

[0029] Fig. 9 It is a schematic diagram of the top view of the three-dimensional structure of the guide plate 1 and the guide plate 2 of the present invention;

[0030] Fig.10 It is a schematic diagram of the main three-dimensional structure of the linkage structure 1 and the linkage structure 2 of the present invention;

[0031] Fig.11 It is a schematic diagram of a three-dimensional structure of a linkage structure of the present invention from a first angle;

[0032] Fig.12 It is a schematic diagram of a three-dimensional structure of a linkage structure of the present invention from a second angle;

[0033] Fig.13 It is a schematic diagram of the three-dimensional structure of the linkage structure 2 of the present invention at a first angle;

[0034] Fig.14 It is a schematic diagram of the three-dimensional structure of the linkage structure 2 of the present invention at a second angle;

[0035] Fig.15 It is a schematic diagram of a three-dimensional structure of a storage structure of the present invention from a top view;

[0036] Fig.16 It is a schematic diagram of a partial main cross-sectional three-dimensional structure of the ring seat of the present invention.

[0037] Reference numerals:

[0038] 100, vapor deposition device; 101, housing; 102, opening and closing door; 103, access opening; 104, retaining edge;

[0039] 200, rotating structure; 201, motor 1; 202, fixing rod; 203, rotating shaft; 204, gear; 205, bearing bracket 1; 206, gear ring; 207, ring seat; 208, mounting ring; 209, rolling groove; 210, steel ball;

[0040] 300, storage structure; 301, support angle plate; 302, support rod; 303, storage frame; 304, travel groove;

[0041] 400, linkage structure one; 401, rubber head one; 402, support bar one; 403, connecting rib one; 404, guide rod one; 405, limit ring one; 406, ball one; 407, spring one; 408, sliding sleeve one; 409, guide plate one; 410, guide surface one;

[0042] 500, linkage structure 2; 501, rubber head 2; 502, connecting rib 2; 503, support bar 2; 504, ball bearing 2; 505, limit ring 2; 506, spring 2; 507, sliding sleeve 2; 508, guide rod 2; 509, guide plate 2; 510, guide surface 2; 511, side plate;

[0043] 600, opening and closing structure; 601, motor 2; 602, screw; 603, slider; 604, guide rail; 605, bearing bracket 2; 606, nut; 607, connecting plate. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] See also Figures 1 to 9 , the present invention provides three embodiments:

[0046] Embodiment 1:

[0047] The evaporator 100 includes a rotating structure 200, a storage structure 300, a linkage structure 1 400 and a linkage structure 2 500. The evaporator 100 includes a housing 101 and an opening and closing door 102 located at one side of the housing 101.

[0048] The storage structure 300 includes a support angle plate 301 fixed to the upper end of the mounting ring 208 and symmetrically distributed, a support rod 302 located at the upper end of the support angle plate 301, and a storage frame 303 located at one end of the support rod 302;

[0049] In this embodiment, hardware and other parts that need to be evaporated are stored in the storage frame 303. The structure of the storage frame 303 is grid-shaped, and there are several gaps inside. The vacuum evaporator 100 includes:

[0050] The vacuum system removes the pressure inside the chamber to a certain level to create a highly vacuum working environment;

[0051] Heating the evaporation source, such as an electron beam furnace, provides heat to sublime or evaporate the raw materials into a gaseous state:

[0052] During the deposition process, the vaporized material diffuses along the chamber and deposits on the substrate to form a thin film;

[0053] Thin film control, by controlling parameters such as deposition rate, temperature, gas pressure, etc. to adjust the thickness, smoothness and uniformity of the film; finally, the process is terminated, and the evaporation is stopped after the desired film thickness is reached, the system is shut down and the normal pressure in the chamber is restored;

[0054] At the same time, the evaporator 100 also includes:

[0055] Monitoring system, used to monitor parameters such as temperature, pressure, ion flow, etc. during the deposition process to ensure the quality of the film;

[0056] The control system is responsible for adjusting parameters such as the heating source, substrate position, and deposition rate to control the thickness and uniformity of the film;

[0057] During use, the evaporator 100 operates, and evaporation materials such as gas, ions or atoms pass through the grid-shaped storage frame 303, flow between the storage frames 303, come into contact with parts such as base material hardware, and then form a thin film on the outside of the base material hardware, thereby realizing the evaporation processing of the base material.

[0058] Embodiment 2:

[0059] An access opening 103 is provided at one end of the housing 101, the access opening 103 corresponds to the opening and closing door 102, and a retaining edge 104 is provided on the inner wall of the access opening 103;

[0060] An opening and closing structure 600 is provided inside the inner wall of the lower end of the casing 101. The opening and closing structure 600 includes a second motor 601 located on the inner wall of the lower end of the casing 101. A screw 602 is provided at the output end of the second motor 601. A second bearing bracket 605 is provided on the inner wall of the lower end of the casing 101. One end of the screw 602 is rotatably inserted into the inside of the second bearing bracket 605.

[0061] A guide rail 604 is provided on the inner wall of the lower end of the housing 101, a slider 603 is slidably mounted on the outer wall of the guide rail 604, a nut 606 threadedly sleeved with the screw rod 602 is provided on the upper end of the slider 603, and a connecting plate 607 fixedly connected to the opening and closing door 102 is provided on the upper end of the nut 606;

[0062] In this embodiment: after the substrate material is evaporated, the second motor 601 drives the screw 602 to rotate. Because the lower end of the nut 606 slides on the outer wall of the guide rail 604 through the slider 603, the nut 606 slides horizontally. When the screw 602 rotates, the thread raceway inside the nut 606 is squeezed, thereby pushing the nut 606 to move. The opening and closing door 102 is connected to the nut 606 through the connecting plate 607, and the opening and closing door 102 is realized. The substrate material inside the storage frame 303 is also moved out of the body through the access port 103 and enters the outside. After the evaporated substrate material is taken out, the new substrate material is stored in the storage frame 303, thereby realizing the storage and access of the material;

[0063] And during the process of material storage and access, the screw 602 can rotate in the opposite direction through the motor 2 601. At this time, the force applied to the nut 606 changes, and the nut 606 is pulled to drive the connecting plate 607 and the opening and closing plate to move toward the machine body. It is worth mentioning that during the movement, the storage frame 303 corresponds to the travel groove 304 to ensure the passage of the storage frame and the supporting angle plate 301. When the opening and closing door 102 is in contact with the retaining edge 104, the storage and access port 103 is closed. In addition, sealing can be added at the fitting to improve the sealing and ensure the sealing during the evaporation process.

[0064] Embodiment three:

[0065] The rotating structure 200 includes a ring seat 207 equidistantly distributed on one side of the opening and closing door 102 and a mounting ring 208 located inside the upper end of the ring seat 207;

[0066] A motor 201 is disposed at one end of the opening and closing door 102, a rotating shaft 203 is disposed at the output end of the motor 201, a bearing bracket 205 is disposed at one end of the opening and closing door 102, and the upper end of the rotating shaft 203 is rotatably mounted inside the bearing bracket 205;

[0067] A fixing rod 202 symmetrically distributed and fixedly connected to the opening and closing door 102 is provided at one end of the ring seat 207, gears 204 equidistantly distributed in the longitudinal direction are sleeved on the outer wall of the rotating shaft 203, and a gear ring 206 meshing with the gears 204 is sleeved on the outer wall of the mounting ring 208;

[0068] The inner walls on both sides and the lower end of the ring seat 207 are provided with annular rolling grooves 209, and the steel balls 210 distributed in an annular array and slidably installed in the rolling grooves 209 are rotatably installed at both ends and the lower end of the mounting ring 208;

[0069] In this embodiment: the travel groove 304 is used to ensure that after the support angle plate 301 and the storage frame 303 enter the interior of the machine body horizontally, the motor 201 drives the rotating shaft 203 to rotate, and the rotating shaft 203 drives the gear 204 to push the gear ring 206. Because the mounting ring 208 is supported by the steel balls rotating inside the rolling groove 209, the three groups of steel balls distributed in a circular array maintain a stable rotation time interval, and multi-point rolling support is performed during rotation, with high rotation stability. The mounting ring 208 drives the support stirring and the mounting frame to rotate, and the stability is improved, thereby ensuring the stability of the base material inside the mounting frame. During the evaporation process, the base material rotates with the mounting ring 208, and the gas, ions or atoms prepared by sputtering or other methods more fully contact the base material, thereby improving the uniformity of evaporation.

[0070] Embodiment 4:

[0071] The linkage structure 400 includes a plurality of groups of support bars 402 distributed at equal intervals, a sliding sleeve 408 embedded and installed inside the support angle plate 301, a guide rod 404 slidably inserted inside the sliding sleeve 408, a connecting rib 403 penetrating the support bar 402 and connected to the upper end of the guide rod 404 at one side of the lower end, a limiting ring 405 sleeved on the outer wall of the guide rod 404, a spring 407 fixed between the limiting ring 405 and the support angle plate 301, and a guide plate 409 located inside the housing 101 and distributed at equal intervals in the longitudinal direction;

[0072] The linkage structure 500 includes a plurality of groups of equally spaced support bars 503, a sleeve 507 embedded in the support angle plate 301, a guide rod 508 slidably inserted in the sleeve 507, a connecting rib 502 penetrating the support bar 503 and connected to the upper end of the guide rod 508 at one side of the lower end, a limiting ring 505 sleeved on the outer wall of the guide rod 508, a spring 506 fixed between the limiting ring 505 and the support angle plate 301, and a guide plate 509 located inside the housing 101 and equidistantly distributed longitudinally.

[0073] Both ends of the guide plate 409 are provided with a guide surface 410, and the thickness of the guide surface 410 gradually increases toward the central section of the guide plate 409. A ball 406 is rotatably installed at the lower end of the guide rod 404.

[0074] Both ends of the guide plate 509 are provided with guide surfaces 510, the thickness of the guide surfaces 510 gradually increases toward the center section of the guide plate 509, the lower end of the guide rod 508 is rotatably mounted with a ball 504, and the outer walls of the guide plate 1 409 and the guide plate 509 are both provided with side plates 511 that are symmetrically distributed and fixedly connected to the inner wall of the housing 101;

[0075] The guide plate 1 409 and the guide plate 2 509 are both semicircular, and a travel groove 304 is provided between the guide plate 1 409 and the guide plate 2 509 . A rubber head 1 401 is provided at the upper end of the support bar 1 402 , and a rubber head 2 501 is provided at the upper end of the support bar 2 503 .

[0076] In this embodiment, the bottom of the base material located inside the storage frame 303 is supported by multiple groups of equally spaced support bars 1 402 and support bars 2 503. The support bars 1 402 and support bars 2 503 support the bottom of the base material at multiple points, and the support bars 1 402 and support bars 2 503 are connected in the same group by connecting ribs 1 403 and connecting ribs 2 502. Because multiple groups of support bars 1 402 and support bars 2 503 in the same storage frame 303 are distributed at intervals, even if only support bars 1 402 or support bars 2 503 support the bottom of the base material, multi-point uniform support is achieved, providing stable conditions for the separate support of support bars 1 402 or support bars 2 503 in the same storage frame 303.

[0077] When the mounting ring 208 rotates, the base material is driven to rotate along the ring seat 207. When the storage frame 303 passes through the guide plate 409, the guide surface 410 squeezes the bottom of the ball 406. The gradually rising height of the guide surface 410 squeezes the spring 407, thereby causing the spring 407 to contract. The thickness of the guide surface 410 gradually increases, and the spring extrusion process is smooth. The ball 406 moves on the guide plate, and the support bar 402 in the same storage frame 303 is synchronously lifted through the connecting rib 403, thereby lifting the stored base material. The ball 406 passes through the guide plate 409, and the thickness of the guide surface 410 gradually decreases, so that the spring resets smoothly, thereby avoiding violent shaking of the spring, and ensuring the stability of the base material during transportation.

[0078] When ball 1 406 passes through guide plate 1 409, ball 2 504 enters onto corresponding guide plate 2 509, which is consistent with the above principle, except that support bar 1 402 loses the condition of being squeezed at this time, and support bar 2 503 is squeezed and lifted, thereby causing the support point at the bottom of the base material to change. In the evaporation environment, it avoids the situation where the base material is always clamped or supported at a fixed point, and the contact surface of the clamping or supporting base material cannot be uniformly deposited. During the rotation of the base material, the support is repeatedly performed at different points, and the evaporation effect of the base material is improved.

[0079] The above-mentioned specific embodiments are only several preferred embodiments of the present invention. Based on the technical solutions of the present invention and the relevant inspirations of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.

[0080] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A vacuum evaporator with uniform evaporation, comprising an evaporator (100), a rotating structure (200), a storage structure (300), a linkage structure 1 (400) and a linkage structure 2 (500), characterized in that: The evaporator (100) comprises a housing (101) and an opening and closing door (102) located on one side of the housing (101); The rotating structure (200) comprises a ring seat (207) which is evenly distributed and located on one side of the opening and closing door (102), and a mounting ring (208) which is located inside the upper end of the ring seat (207); The storage structure (300) comprises a supporting angle plate (301) fixedly disposed on the upper end of the mounting ring (208) and symmetrically distributed, a supporting rod (302) located on the upper end of the supporting angle plate (301), and a storage frame (303) located at one end of the supporting rod (302); The linkage structure (400) comprises a plurality of groups of equally spaced support bars (402), a sliding sleeve (408) embedded and installed inside the support angle plate (301), a guide rod (404) slidably inserted inside the sliding sleeve (408), a connecting rib (403) penetrating the support bar (402) and having one side of the lower end connected to the upper end of the guide rod (404), a limiting ring (405) sleeved on the outer wall of the guide rod (404), a spring (407) fixed between the limiting ring (405) and the support angle plate (301), and a guide plate (409) located inside the housing (101) and longitudinally and equally spaced. The linkage structure 2 (500) comprises a plurality of groups of equally spaced support bars 2 (503), a sliding sleeve 2 (507) embedded and installed inside the support angle plate (301), a guide rod 2 (508) slidably inserted inside the sliding sleeve 2 (507), a connecting rib 2 (502) penetrating the support bar 2 (503) and having one side of the lower end connected to the upper end of the guide rod 2 (508), a limiting ring 2 (505) sleeved on the outer wall of the guide rod 2 (508), a spring 2 (506) fixed between the limiting ring 2 (505) and the support angle plate (301), and a guide plate 2 (509) located inside the housing (101) and equidistantly distributed longitudinally.

2. A vacuum evaporator with uniform evaporation according to claim 1, characterized in that: An access opening (103) is provided at one end of the housing (101), the access opening (103) corresponds to the opening and closing door (102), and a retaining edge (104) is provided on the inner wall of the access opening (103).

3. The vacuum evaporator with uniform evaporation according to claim 1, characterized in that: An opening and closing structure (600) is arranged inside the inner wall of the lower end of the casing (101), and the opening and closing structure (600) comprises a second motor (601) located on the inner wall of the lower end of the casing (101), a screw rod (602) is arranged at the output end of the second motor (601), and a second bearing bracket (605) is arranged on the inner wall of the lower end of the casing (101), and one end of the screw rod (602) is rotatably inserted into the interior of the second bearing bracket (605).

4. The vacuum evaporator with uniform evaporation according to claim 3, characterized in that: A guide rail (604) is arranged on the inner wall of the lower end of the casing (101); a slider (603) is slidably mounted on the outer wall of the guide rail (604); a nut (606) threadedly sleeved with the screw rod (602) is arranged on the upper end of the slider (603); and a connecting plate (607) fixedly connected to the opening and closing door (102) is arranged on the upper end of the nut (606).

5. The vacuum evaporator with uniform evaporation according to claim 1, characterized in that: A motor (201) is disposed at one end of the opening and closing door (102), a rotating shaft (203) is disposed at the output end of the motor (201), a bearing bracket (205) is disposed at one end of the opening and closing door (102), and the upper end of the rotating shaft (203) is rotatably mounted inside the bearing bracket (205).

6. The vacuum evaporator with uniform evaporation according to claim 5, characterized in that: One end of the ring seat (207) is provided with a fixing rod (202) which is symmetrically distributed and fixedly connected to the opening and closing door (102); the outer wall of the rotating shaft (203) is sleeved with gears (204) which are equidistantly distributed in the longitudinal direction; and the outer wall of the mounting ring (208) is sleeved with a gear ring (206) which meshes with the gears (204).

7. The vacuum evaporator with uniform evaporation according to claim 1, characterized in that: The inner walls on both sides of the ring seat (207) and the lower end thereof are provided with annular rolling grooves (209), and steel balls (210) distributed in an annular array and slidably installed in the rolling grooves (209) are rotatably installed at both ends and the lower end thereof.

8. The vacuum evaporator with uniform evaporation according to claim 1, characterized in that: Both ends of the guide plate 1 (409) are provided with a guide surface 1 (410), and the thickness of the guide surface 1 (410) gradually increases toward the central section of the guide plate 1 (409). A ball 1 (406) is rotatably mounted on the lower end of the guide rod 1 (404).

9. The vacuum evaporator with uniform evaporation according to claim 1, characterized in that: Both ends of the guide plate 2 (509) are provided with guide surfaces 2 (510), and the thickness of the guide surfaces 2 (510) gradually increases toward the center section of the guide plate 2 (509). The lower end of the guide rod 2 (508) is rotatably mounted with a ball 2 (504). The outer walls of the guide plate 1 (409) and the guide plate 2 (509) are both provided with side panels (511) that are symmetrically distributed and fixedly connected to the inner wall of the housing (101).

10. The vacuum evaporator with uniform evaporation according to claim 1, characterized in that: The guide plate 1 (409) and the guide plate 2 (509) are both semicircular, a travel groove (304) is provided between the guide plate 1 (409) and the guide plate 2 (509), a rubber head 1 (401) is provided at the upper end of the support bar 1 (402), and a rubber head 2 (501) is provided at the upper end of the support bar 2 (503).

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