A diamond curved optical element and its forming method
By growing diamond film on molybdenum disilide rods and combining with the peeling process of acid corrosion liquid, the existing diamond curved optical component preparation methods are solved, and efficient and low-cost diamond curved optical component preparation is achieved to meet the high quality and lightweight needs of modern optical components.
Patent Information
- Application Number
- CN202411902900.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-06-20
- Estimated Expiration
- 2044-12-23
AI Technical Summary
The existing preparation methods of diamond curved optical components are inefficient, time-consuming, difficult to control, and waste a lot of raw materials.
Molybdenum disilicate rods are used as substrates to grow diamond films by grinding, crystallization and chemical vapor deposition. Combined with the peeling process of acid corrosion liquid, diamond curved optical components are prepared.
It significantly improves the production efficiency of diamond curved optical components, reduces waste of raw materials, and can prepare thin and high-quality diamond curved optical components to meet the needs of modern optical components with lightweight and high light transmission.
Smart Images

Figure CN119351983B_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the technical field of optical element preparation, and relates to a diamond curved optical element and a forming method thereof. Background Art
[0002] In the manufacturing process of traditional optical elements, the core raw materials mainly rely on high-quality crystal rods. These crystal rods need to go through a series of precise and time-consuming processing steps, including rough grinding, fine grinding, and finally polishing, to be transformed into optical elements with a specific curved surface shape. However, since diamond is a representative of superhard materials, its Mohs hardness is 10, the tensile strength is greater than 1.2 GPa, and it has the characteristics of high hardness, low fracture toughness, and difficult processing, and is a typical brittle and hard-to-process material.
[0003] Currently, the processing method for preparing diamond curved optical elements has extremely low processing efficiency. During processing, the raw material crystal rod is usually rough ground into shape, and after the convex surface is formed, it is turned over for concave surface processing. Its processing procedures account for more than 50% of the cost of diamond optical elements, and the materials within the diameter of the curved concave surface are all removed, wasting a large amount of raw materials.
[0004] In summary, the current method for preparing diamond curved optical elements is time-consuming and inefficient, and wastes a large amount of raw materials. There is an urgent need to develop a method for obtaining diamond curved optical elements with high efficiency, low cost, and high quality. Summary of the Invention
[0005] The purpose of the present invention is to provide a diamond curved optical element and a forming method thereof, so as to solve the technical problems of low efficiency, long time consumption, and difficult quality control in the preparation method of diamond curved optical elements in the prior art.
[0006] To achieve the above object, the present invention adopts the following technical solutions:
[0007] In the first aspect, the present invention provides a forming method for a diamond curved optical element, including the following steps:
[0008] Grind the top of a pre-prepared molybdenum disilicide rod into the concave shape of the target curved optical element;
[0009] Perform seeding treatment on the top of the molybdenum disilicide rod with a diamond suspension, and then grow a diamond film by chemical vapor deposition to obtain a molybdenum disilicide substrate;
[0010] Grind the diamond film on the top of the molybdenum disilicide substrate to the target shape to obtain a ground molybdenum disilicide substrate;
[0011] Soak the ground molybdenum disilicide substrate in an acid etching solution to strip and obtain the diamond curved optical element.
[0012] Furthermore, the preparation method of the molybdenum disilicide rod includes the following steps:
[0013] Add the mixture of molybdenum powder, tungsten powder and silicon powder into a ball mill mixer, and ball mill to obtain a powder.
[0014] Mix polyethylene glycol and polyacrylamide with water to obtain a binder.
[0015] Mix the powder with the binder to form a mud, first carry out constant-temperature aging, then add it to a vacuum pug mill for pugging. After the pugging is completed, obtain a formed rod by extrusion molding.
[0016] Sinter the formed rod in a vacuum furnace to obtain a molybdenum disilicide rod.
[0017] Furthermore, the mass ratio of molybdenum powder, tungsten powder and silicon powder in the mixture is (10~70):(10~15):(10~70); the mass ratio of the mixture to the balls in the ball mill mixer is 1:1, and the ball milling time is 8 hours to 10 hours.
[0018] Furthermore, the mass ratio of polyethylene glycol to polyacrylamide is 1:1, and the mass fraction of the obtained binder is 10%~20%.
[0019] Furthermore, the volume ratio of the powder to the binder in the mud is 1:2; the temperature of the constant-temperature aging is <10°C; the sintering temperature is 1000°C to 1500°C, and the sintering time is 0.5h to 3h.
[0020] Furthermore, the diamond suspension is obtained by mixing diamond powder and water; the volume ratio of diamond powder to water is 1:3, and the particle size of diamond powder is 0.1μm to 1μm; the way of seeding treatment adopts ultrasonic seeding method, spin coating method or direct grinding method; the chemical vapor deposition method adopts microwave plasma CVD (Chemical Vapor Deposition) method, DC jet plasma CVD method or hot wire CVD method.
[0021] Furthermore, during the process of growing diamond thin film by chemical vapor deposition method, control the surface temperature of the molybdenum disilicide rod at 900°C to 1100°C, and the thickness of the grown diamond thin film is 20μm to 2000μm.
[0022] Furthermore, the acid etching solution is a mixed solution of hydrofluoric acid and nitric acid, and the volume ratio of hydrofluoric acid to nitric acid is (1~3):1.
[0023] Furthermore, it also includes: cleaning the obtained diamond curved optical element with deionized water, and then drying it.
[0024] In a second aspect, the present invention provides a diamond curved optical element, which is prepared by the above-mentioned forming method of a diamond curved optical element.
[0025] Compared with the prior art, the present invention has the following beneficial effects:
[0026] The present invention discloses a diamond curved optical element and its forming method. First, a molybdenum disilicide rod is ground into the shape of a target curved optical element, then a diamond film is grown on the molybdenum disilicide rod, then the grown diamond film is ground, and finally a diamond curved optical element is obtained by peeling with an acid etching solution. Different from the existing diamond curved optical element forming using crystal blanks, the present invention directly grows a curved diamond blank by using a near-size forming method, reducing a large amount of diamond removal cost and significantly improving production efficiency. Moreover, by using the method of the present invention, a thinner diamond curved optical element can be prepared. The traditional preparation method is often limited by the material thickness and processing technology, and it is difficult to produce an ultra-thin and high-quality diamond curved optical element. However, the diamond curved optical element prepared by the present invention has a significantly reduced thickness while ensuring optical performance, which is undoubtedly a major breakthrough for modern optical elements requiring light weight and high light transmittance. Secondly, the present invention can control the growth temperature of the diamond film during the preparation process by adjusting the composition of molybdenum disilicide, thereby controlling the quality of the diamond curved optical element. This not only makes the growth process of the diamond film more controllable, but also can precisely optimize different requirements of the diamond curved optical element for different application scenarios, such as hardness, thermal conductivity, light transmittance, etc. It can produce diamond curved optical elements with different performances to meet diverse needs, greatly expanding the application scope of diamond optical elements. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.
[0028] Figure 1 It is a manufacturing flow chart of the method of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0029] To enable those skilled in the art to understand the features and effects of the present invention, the following provides a general description and definition of the terms and phrases mentioned in the specification and claims. Unless otherwise specified, all technical and scientific terms used herein shall have the ordinary meanings understood by those skilled in the art with respect to the present invention. In case of conflict, the definitions in this specification shall prevail.
[0030] The theories or mechanisms described and disclosed herein, whether correct or incorrect, shall in no way limit the scope of the present invention, that is, the content of the present invention can be implemented without being limited by any specific theory or mechanism.
[0031] In this document, all features defined in the form of numerical ranges or percentage ranges, such as numerical values, quantities, contents, and concentrations, are only for the sake of brevity and convenience. Accordingly, the description of a numerical range or percentage range should be regarded as having covered and specifically disclosed all possible sub-ranges and individual numerical values within the range (including integers and fractions).
[0032] In this document, unless otherwise specified, the terms "comprising", "including", "containing", "having", or similar terms cover the meanings of "consisting of" and "consisting essentially of". For example, "A comprises a" covers the meanings of "A comprises a and others" and "A consists only of a".
[0033] In this document, for the sake of brevity of description, all possible combinations of all technical features in each embodiment or example are not described. Therefore, as long as there is no contradiction in the combination of these technical features, the technical features in each embodiment or example can be combined arbitrarily, and all possible combinations should be considered as being within the scope described in this specification.
[0034] The following further describes the present invention in detail with reference to the accompanying drawings:
[0035] See Figure 1 , an embodiment of the present invention discloses a method for forming a diamond curved optical element, including the following steps:
[0036] S1, grinding the top of a pre-prepared molybdenum disilicide rod into the concave shape of the target curved optical element;
[0037] In this step, the method for preparing the molybdenum disilicide rod includes the following steps:
[0038] Step 1, adding a mixture of molybdenum powder, tungsten powder, and silicon powder into a ball mill mixer and ball milling to obtain a powder;
[0039] It should be noted that the mass ratio of molybdenum powder, tungsten powder and silicon powder in the mixture is (10~70):(10~15):(10~70); the mass ratio of the mixture to the balls in the ball mill mixer is 1:1, and the ball milling time is 8 hours to 10 hours.
[0040] Step 2, Mix polyethylene glycol and polyacrylamide with water to obtain a binder.
[0041] It should be noted that the mass ratio of polyethylene glycol to polyacrylamide is 1:1, and the mass fraction of the obtained binder is 10% to 20%.
[0042] Step 3, Mix the powder and the binder into a mud, first carry out constant temperature aging, then add it to a vacuum pug mill for pugging, and obtain a formed rod by extrusion molding after the pugging is completed.
[0043] It should be noted that the volume ratio of the powder to the binder in the mud is 1:2; the temperature of the constant temperature aging is <10°C.
[0044] Step 4, Sinter the formed rod in a vacuum furnace to obtain a molybdenum disilicide rod.
[0045] It should be noted that the sintering temperature is 1000°C to 1500°C, and the sintering time is 0.5 h to 3 h.
[0046] S2, Use a diamond suspension to perform seeding treatment on the top of the molybdenum disilicide rod, and then grow a diamond film by chemical vapor deposition to obtain a molybdenum disilicide substrate.
[0047] In this step, the diamond suspension is obtained by mixing diamond powder and water; the volume ratio of diamond powder to water is 1:3, and the particle size of diamond powder is 0.1 μm to 1 μm; the seeding treatment method uses ultrasonic seeding method, spin coating method or direct grinding method; the chemical vapor deposition method uses microwave plasma CVD method, DC jet plasma CVD method or hot wire CVD method. During the process of growing the diamond film by chemical vapor deposition, control the surface temperature of the molybdenum disilicide rod to be 900°C to 1100°C (the surface temperature of the molybdenum disilicide rod can be achieved by adjusting the ratio of molybdenum powder, tungsten powder and silicon powder in the previous step 1), and the thickness of the grown diamond film is 20 μm to 2000 μm.
[0048] S3, Grind the diamond film on the top of the molybdenum disilicide substrate to the target shape to obtain a ground molybdenum disilicide substrate.
[0049] S4, Immerse the ground molybdenum disilicide substrate in an acid etching solution to strip and obtain a diamond curved optical element.
[0050] In this step, the acid etching solution is a mixed solution of hydrofluoric acid and nitric acid, and the volume ratio of hydrofluoric acid to nitric acid is (1-3):1.
[0051] S5, cleaning the peeled diamond curved surface optical element with deionized water and then drying it.
[0052] The embodiment of the present invention further discloses a diamond curved surface optical element, which is prepared by adopting the above-mentioned forming method of a diamond curved surface optical element.
[0053] The present invention can solve the problem of difficult processing of diamond curved optical elements in the prior art, and help to further promote the application of diamond curved optical elements. It has the following three advantages: 1. Unlike the existing curved optical element molding using crystal rods, the present invention uses a near-size molding method to directly grow curved diamond blanks, reducing a large amount of diamond removal costs. 2. The present invention can also prepare thinner curved diamond films. 3. The present invention can control the growth temperature of curved diamond by regulating the composition of molybdenum disilicide, thereby regulating the quality of curved diamond.
[0054] The present invention will be further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms fall within the scope limited by the appended claims of the application equally.
[0055] The following examples use conventional instruments and equipment in the art. The experimental methods in the following examples where specific conditions are not specified are usually carried out under conventional conditions or under conditions recommended by the manufacturer. The various raw materials used in the following examples are conventional commercial products unless otherwise specified, and their specifications are conventional specifications in the art. In the specification of the present invention and the following examples, unless otherwise specified, "%" means weight percentage, "part" means weight part, and ratio means weight ratio.
[0056] Embodiment 1:
[0057] 1) Molybdenum powder, tungsten powder and silicon powder were mixed in a mass ratio of 20:14:50 to obtain a mixture, and then added into a ball mill mixer, and mixed for 8 hours in a mass ratio of mixture: ball of 1:1 to obtain a powder.
[0058] 2) Mix polyethylene glycol and polyacrylamide in a mass ratio of 1:1 with water to prepare a binder with a mass fraction of 13%.
[0059] 3) Mix the powder and the binder in a volume ratio of 1:2 to form a mud material. First, conduct isothermal aging (at 8°C), and then add it to a vacuum pug mill for pugging. After that, obtain a formed rod by extrusion molding.
[0060] 4) Sinter the formed rod in a high-temperature vacuum furnace. Set the temperature to 1300°C and the sintering time to 2 h. After sintering, obtain a molybdenum disilicide rod.
[0061] 5) Use an ultra-precision machine tool to grind the top of the molybdenum disilicide rod into the concave shape of the target curved surface optical element, and then cut the bottom of the molybdenum disilicide rod so that the molybdenum disilicide rod can maintain a stable position during the subsequent chemical vapor deposition process.
[0062] 6) Use the ultrasonic seeding method to conduct seeding treatment on the top of the molybdenum disilicide rod obtained in step 5). The diamond suspension used for seeding treatment is made by mixing diamond powder with a particle size of 0.3 μm and water in a volume ratio of 1:3.
[0063] 7) Use the microwave plasma CVD method to grow a diamond film on the molybdenum disilicide rod after seeding treatment. The surface temperature of the molybdenum disilicide is 980°C; the thickness of the grown diamond film is 200 μm.
[0064] 8) Use an ultra-precision machine tool to grind the diamond film grown on the top of the molybdenum disilicide substrate to the target shape to obtain a ground molybdenum disilicide substrate;
[0065] 9) Immerse the ground molybdenum disilicide substrate in a mixed solution of hydrofluoric acid and nitric acid with a volume ratio of 1:1, and peel off the diamond curved surface optical element by acid etching.
[0066] 10) Wash the peeled diamond curved surface optical element with deionized water, and then dry it to finally obtain the target diamond curved surface optical element.
[0067] Example 2:
[0068] 1) Mix molybdenum powder, tungsten powder, and silicon powder according to a mass ratio of 61:14:59 to obtain a mixture, and then add it to a ball mill mixer. Mix thoroughly for 9.5 hours according to a mass ratio of mixture:balls of 1:1 to obtain a powder.
[0069] 2) Mix polyethylene glycol and polyacrylamide in a mass ratio of 1:1 with water to prepare a binder with a mass fraction of 18%.
[0070] 3) Mix the powder and the binder in a volume ratio of 1:2 to form a mud material. First, conduct isothermal aging (at 8°C), and then add it to a vacuum pug mill for pugging. After that, obtain a formed rod by extrusion molding.
[0071] 4) Sinter the formed rod in a high-temperature vacuum furnace with the temperature set at 1250 °C and the sintering time of 1 h. After sintering, a molybdenum disilicide rod is obtained.
[0072] 5) Grind the top of the molybdenum disilicide rod into the concave shape of the target curved surface optical element by using an ultra-precision machine tool, and then cut the bottom of the molybdenum disilicide rod so that the molybdenum disilicide rod can maintain a stable position during the subsequent chemical vapor deposition process.
[0073] 6) Use the spin coating method to conduct seeding treatment on the top of the molybdenum disilicide rod obtained in step 5). The diamond suspension used for the seeding treatment is made by mixing diamond powder with a particle size of 0.5 μm and water in a volume ratio of 1:3.
[0074] 7) Grow a diamond film on the molybdenum disilicide rod after the seeding treatment by using the DC jet plasma CVD method. The surface temperature of the molybdenum disilicide is 1050 °C; the thickness of the grown diamond film is 1500 μm.
[0075] 8) Grind the diamond film grown on the top of the molybdenum disilicide substrate to the target shape by using an ultra-precision machine tool to obtain a ground molybdenum disilicide substrate;
[0076] 9) Immerse the ground molybdenum disilicide substrate into a mixed solution of hydrofluoric acid and nitric acid with a volume ratio of 2:1, and strip the diamond curved surface optical element by means of acid corrosion.
[0077] 10) Wash the stripped diamond curved surface optical element with deionized water, and then dry it to finally obtain the target diamond curved surface optical element.
[0078] Example 3:
[0079] 1) Mix molybdenum powder, tungsten powder and silicon powder according to the mass ratio of 40:11:33 to obtain a mixture, and then add it into a ball mill mixer. Mix thoroughly for 10 hours according to the mass ratio of mixture:balls of 1:1 to obtain a powder.
[0080] 2) Mix polyethylene glycol and polyacrylamide according to the mass ratio of 1:1 and add water to make a binder with a mass fraction of 13%.
[0081] 3) Mix the powder and the binder according to the volume ratio of 1:2 to form a mud. First, conduct constant-temperature aging (8 °C), then add it into a vacuum clay kneader for kneading. After that, obtain a formed rod by means of extrusion molding.
[0082] 4) Sinter the formed rod in a high-temperature vacuum furnace with the temperature set at 1400 °C and the sintering time of 2.5 h. After sintering, a molybdenum disilicide rod is obtained.
[0083] 5) Use an ultra-precision machine tool to grind the top of the molybdenum disilicide rod into the concave shape of the target curved surface optical element, and then cut the bottom of the molybdenum disilicide rod so that the molybdenum disilicide rod can maintain a stable position during the subsequent chemical vapor deposition process.
[0084] 6) Use the spin coating method to perform seeding treatment on the top of the molybdenum disilicide rod obtained in step 5). The diamond suspension used for the seeding treatment is made by mixing diamond powder with a particle size of 0.8 μm and water in a volume ratio of 1:3.
[0085] 7) Use the microwave plasma CVD method to grow a diamond film on the molybdenum disilicide rod after the seeding treatment. The surface temperature of the molybdenum disilicide is 950 °C; the thickness of the grown diamond film is 20 μm.
[0086] 8) Use an ultra-precision machine tool to grind the diamond film grown on the top of the molybdenum disilicide substrate to the target shape to obtain a ground molybdenum disilicide substrate;
[0087] 9) Immerse the ground molybdenum disilicide substrate in a mixed solution of hydrofluoric acid and nitric acid with a volume ratio of 3:1, and strip the diamond curved surface optical element by acid etching.
[0088] 10) Wash the stripped diamond curved surface optical element with deionized water, and then dry it to finally obtain the target diamond curved surface optical element.
[0089] Example 4:
[0090] 1) Mix molybdenum powder, tungsten powder and silicon powder according to a mass ratio of 35:12:28 to obtain a mixture, and then add it to a ball mill mixer. Mix well for 8.5 hours according to a mass ratio of mixture:balls of 1:1 to obtain a powder.
[0091] 2) Mix polyethylene glycol and polyacrylamide in a mass ratio of 1:1 with water to make a binder with a mass fraction of 11%.
[0092] 3) Mix the powder and the binder in a volume ratio of 1:2 to form a clay. First, perform constant-temperature aging (8 °C), then add it to a vacuum clay mixer for clay mixing. After that, obtain a formed rod by extrusion molding.
[0093] 4) Sinter the formed rod in a high-temperature vacuum furnace. The temperature is set at 1115 °C, and the sintering time is 3 h. After sintering, obtain a molybdenum disilicide rod.
[0094] 5) Use an ultra-precision machine tool to grind the top of the molybdenum disilicide rod into the concave shape of the target curved surface optical element, and then cut the bottom of the molybdenum disilicide rod so that the molybdenum disilicide rod can maintain a stable position during the subsequent chemical vapor deposition process.
[0095] 6) The top of the molybdenum disilicide rod obtained in step 5) is subjected to seeding treatment by the direct grinding method. The diamond suspension used for the seeding treatment is made by mixing diamond powder with a particle size of 0.9 μm and water in a volume ratio of 1:3.
[0096] 7) A diamond film is grown on the molybdenum disilicide rod after the seeding treatment by the microwave plasma CVD method. The surface temperature of the molybdenum disilicide is 1030 °C; the thickness of the grown diamond film is 600 μm.
[0097] 8) The diamond film grown on the top of the molybdenum disilicide substrate is ground to the target shape by an ultra-precision machine tool to obtain a ground molybdenum disilicide substrate;
[0098] 9) The ground molybdenum disilicide substrate is immersed in a mixed solution of hydrofluoric acid and nitric acid with a volume ratio of 1.5:1, and the diamond curved optical element is peeled off by acid etching.
[0099] 10) The peeled diamond curved optical element is washed with deionized water and then dried to finally obtain the target diamond curved optical element.
[0100] Example 5:
[0101] 1) Molybdenum powder, tungsten powder and silicon powder are mixed in a mass ratio of 55:15:45 to obtain a mixture, which is then added to a ball mill mixer. According to the mass ratio of mixture:balls of 1:1, it is fully mixed for 9 hours to obtain a powder.
[0102] 2) Polyethylene glycol and polyacrylamide are mixed with water in a mass ratio of 1:1 to make a binder with a mass fraction of 16%.
[0103] 3) The powder and the binder are mixed into a mud in a volume ratio of 1:2. First, it is subjected to constant temperature aging (8 °C), and then added to a vacuum pug mill for pugging. After that, a formed rod is obtained by the extrusion molding method.
[0104] 4) The formed rod is sintered in a high-temperature vacuum furnace. The temperature is set at 1500 °C and the sintering time is 0.5 h. After sintering, a molybdenum disilicide rod is obtained.
[0105] 5) The top of the molybdenum disilicide rod is ground into the concave shape of the target curved optical element by an ultra-precision machine tool, and then the bottom of the molybdenum disilicide rod is cut so that the molybdenum disilicide rod can maintain a stable position during the subsequent chemical vapor deposition process.
[0106] 6) The top of the molybdenum disilicide rod obtained in step 5) is subjected to seeding treatment by the ultrasonic seeding method. The diamond suspension used for the seeding treatment is made by mixing diamond powder with a particle size of 0.6 μm and water in a volume ratio of 1:3.
[0107] 7) The diamond film was grown on the molybdenum disilicide rod after seeding treatment by hot wire CVD method, and the surface temperature of molybdenum disilicide was 1020 °C; the thickness of the grown diamond film was 1100 μm.
[0108] 8) The diamond film grown on the top of the molybdenum disilicide substrate was ground to the target shape by an ultra-precision machine tool to obtain the ground molybdenum disilicide substrate;
[0109] 9) The ground molybdenum disilicide substrate was immersed in a mixed solution of hydrofluoric acid and nitric acid with a volume ratio of 2:1, and the diamond curved optical element was peeled off by acid etching.
[0110] 10) The peeled diamond curved optical element was cleaned with deionized water and then dried to finally obtain the target diamond curved optical element.
[0111] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
Claims
1. A method for forming a diamond curved surface optical element, characterized in that: The following steps are involved: Grinding the top of the pre-prepared molybdenum disilicide rod into a concave shape of a target curved optical element; The top of the molybdenum disilicide rod is subjected to a crystal planting treatment using a diamond suspension, and then a diamond film is grown using a chemical vapor deposition method to obtain a molybdenum disilicide substrate; in the process of growing the diamond film using the chemical vapor deposition method, the surface temperature of the molybdenum disilicide rod is controlled to be 900° C. to 1100° C., and the thickness of the grown diamond film is 20 μm to 2000 μm; Grinding the diamond film on the top of the molybdenum disilicide substrate to a target shape to obtain a ground molybdenum disilicide substrate; The ground molybdenum disilicide substrate is immersed in an acid etching solution and peeled off to obtain a diamond curved surface optical element; The method for preparing the molybdenum disilicide rod comprises the following steps: Adding a mixture of molybdenum powder, tungsten powder and silicon powder into a ball mill mixer, and ball milling to obtain a powder; Mixing polyethylene glycol and polyacrylamide with water to obtain a binder; The powder and the binder are mixed into a mud material, which is first aged at a constant temperature, and then put into a vacuum mud kneading machine for mud kneading. After the mud kneading is completed, a molded rod body is obtained by an extrusion molding method; The formed rod body is sintered in a vacuum furnace to obtain molybdenum disilicide rods.
2. The method for forming a diamond curved surface optical element according to claim 1, characterized in that: The mass ratio of molybdenum powder, tungsten powder and silicon powder in the mixture is (10-70): (10-15): (10-70); the mass ratio of the mixture to the balls in the ball mill mixer is 1:1, and the ball milling time is 8 hours to 10 hours.
3. The method for forming a diamond curved surface optical element according to claim 1, characterized in that: The mass ratio of the polyethylene glycol to the polyacrylamide is 1:1, and the mass fraction of the obtained binder is 10% to 20%.
4. The method for forming a diamond curved surface optical element according to claim 1, characterized in that: The volume ratio of the powder and the binder in the mud material is 1:2; the temperature of the constant temperature aging is less than 10°C; the temperature of the sintering is 1000°C to 1500°C, and the sintering time is 0.5h to 3h.
5. The method for forming a diamond curved surface optical element according to claim 1, characterized in that: The diamond suspension is obtained by mixing diamond powder and water; the volume ratio of the diamond powder to water is 1:3, and the particle size of the diamond powder is 0.1μm~1μm; the crystal planting treatment method adopts ultrasonic crystal planting method, spin coating method or direct grinding method; the chemical vapor deposition method adopts microwave plasma CVD method, DC jet plasma CVD method or hot wire CVD method.
6. The method for forming a diamond curved surface optical element according to claim 1, characterized in that: The acid etching solution is a mixed solution of hydrofluoric acid and nitric acid, and the volume ratio of hydrofluoric acid to nitric acid is (1-3):
1.
7. The method for forming a diamond curved surface optical element according to claim 1, characterized in that: Also includes: The peeled diamond curved surface optical element is cleaned with deionized water and then dried.
8. A diamond curved surface optical element, characterized in that: The diamond curved optical element is prepared by the molding method of any one of claims 1 to 7.
Citation Information
Patent Citations
Method for producing ultrahard pressure head
CN101718652A
Preparation method of high temperature silicon molybdenum rods
CN103231058A