Part pairing device of vacuum valve

Abstract

The invention discloses a component pairing device of a vacuum valve. The component pairing device comprises a platform, a first positioning mechanism, a second positioning mechanism, an elastic assembly and a measuring mechanism. The first positioning mechanism is arranged on the platform and used for installing the rotating source. The second positioning mechanism is slidably arranged on the platform and used for installing the driven gear. The elastic assembly can ensure that the relative distance between the first positioning mechanism and the second positioning mechanism is suitable for keeping the driving gear and the driven gear in an engaged state. And the measuring mechanism is arranged on the platform, the first positioning mechanism or the second positioning mechanism. When the driving gear and the driven gear which are meshed with each other are rotated, the measuring mechanism can measure the center distance change of the driving gear and the driven gear which are meshed with each other in the rotating process. The part pairing device can be used for pairing the parts of the vacuum valve, the pressure control precision of the assembled vacuum valve is ensured, and the conditions of extra friction and abrasion generated in the operation process of the vacuum valve are reduced.

Description

Technical Field

[0001] Embodiments of the present invention relate to the technical field of component pairing of vacuum valves, and more specifically, to a component pairing device of a vacuum valve. Background Art

[0002] In the field of vacuum technology, vacuum valves are key components for controlling gas flow and maintaining vacuum environments. Their performance and reliability are critical, especially in ultra-high vacuum environments (<10 -5 The design of vacuum valves needs to meet strict pressure control requirements and smooth operating mechanisms to ensure stable operation under extreme conditions.

[0003] At present, the common vacuum valves on the market usually use gear transmission to realize the opening and closing functions of the valve. In this type of design, the vacuum valve has a driving gear as the rotation source as the power input component, which drives the valve movement by meshing with the driven gear in the vacuum valve. However, in the ultra-vacuum application scenario that pursues high precision and high reliability, the gear transmission mechanism of the existing vacuum valve has exposed some significant technical defects.

[0004] Specifically, the meshing accuracy between the driving gear and the driven gear is one of the key factors affecting the performance of the vacuum valve. Due to limitations in processing accuracy and assembly technology, the meshing of gears in existing vacuum valves often has problems such as too large a gap or too narrow a gap, which not only leads to a decrease in transmission efficiency, but also generates additional friction and wear during the operation of the gears, seriously affecting the pressure control accuracy and service life of the vacuum valve. What is more serious is that in an ultra-high vacuum environment, the vacuum degree requires a higher pressure control accuracy for the vacuum valve, and even a slight pressure change can have a significant impact on the vacuum degree, and even destroy the normal operation of the entire vacuum system. Summary of the invention

[0005] In order to solve one or more of the technical problems mentioned above, the present invention provides a component matching device for a vacuum valve, which can match the components of the vacuum valve, increase the transmission efficiency of the vacuum valve during operation, reduce the friction and wear generated by the vacuum valve during operation, thereby improving the pressure control accuracy and service life of the vacuum valve.

[0006] An embodiment of the present invention provides a component matching device for a vacuum valve, the vacuum valve comprising a rotation source with a driving gear and a driven gear for meshing with the driving gear, the component matching device comprising: a platform; a first positioning mechanism, which is arranged on the platform and used to install one of the rotation source and the driven gear; a second positioning mechanism, which is slidably arranged on the platform and used to install the other of the rotation source and the driven gear; an elastic component, which is arranged on the platform and used to push the second positioning mechanism toward the first positioning mechanism to ensure that the relative distance between the first positioning mechanism and the second positioning mechanism is adapted to maintain the driving gear and the driven gear in a meshing state; a measuring mechanism, which is arranged on the platform, the first positioning mechanism or the second positioning mechanism; when the driving gear and the driven gear meshing with each other are rotated, the relative distance between the first positioning mechanism and the second positioning mechanism can follow the change of the relative distance between the driving gear and the driven gear and produce a corresponding change, and ensure that the measuring mechanism can measure the change of the center distance of the driving gear and the driven gear meshing with each other during the rotation process.

[0007] Further, the elastic component includes: a sliding seat, which is slidably arranged on the platform; a guide rod, which includes a rod portion that can slidably penetrate the sliding seat and is fixed in the second positioning mechanism, and a head portion provided on the end of the rod portion away from the second positioning mechanism, wherein the radial dimension of the head portion is greater than the radial dimension of the rod portion; a compression spring, which is sleeved on the guide rod and located between the sliding seat and the second positioning mechanism; a linear driver, which is provided on the platform and connected to the sliding seat. The linear driver is configured to drive the sliding seat away from and close to the first positioning mechanism, and when the sliding seat is close to the first positioning mechanism, the sliding seat drives the second positioning mechanism to approach the first positioning mechanism through the compression spring, and when the sliding seat is away from the first positioning mechanism, the sliding seat first moves away from the first positioning mechanism and then moves away from the first positioning mechanism together with the second positioning mechanism through the guide rod.

[0008] Furthermore, the linear drive includes a mounting seat fixed on the platform, a motor provided on the mounting seat and having a transmission gear, and a transmission rack slidably passing through the mounting seat and meshing with the transmission gear, wherein the transmission rack is fixedly connected to the sliding seat at an end portion close to the sliding seat.

[0009] Furthermore, the linear drive further comprises a roller rotatably disposed in the mounting seat and abutting against the transmission rack, wherein the roller and the transmission gear are disposed at positions symmetrical with respect to the transmission rack.

[0010] Furthermore, the measuring mechanism comprises at least one micrometer fixed in the second positioning mechanism, and a measuring rod of at least one micrometer penetrates the second positioning mechanism along a movement direction of the second positioning mechanism and abuts against the first positioning mechanism.

[0011] Furthermore, the first positioning mechanism is used to install the rotation source, and the second positioning mechanism is used to install the driven gear.

[0012] Further, the second positioning mechanism includes a movable seat slidably disposed on the platform and used to connect the elastic component, and a rotating body rotatably disposed on the movable seat, wherein the rotating body has a receiving groove for mounting the shaft sleeve portion of the driven gear, and the second positioning mechanism also includes a fastener and / or a linkage member, the fastener is disposed on the rotating body and is used to lock the shaft sleeve portion of the driven gear in the receiving groove of the rotating body, the linkage member is disposed in the receiving groove of the rotating body and can engage with the shaft sleeve portion of the driven gear to ensure that the rotating body rotates with the driven gear.

[0013] Furthermore, the second positioning mechanism also includes a bearing arranged between the rotating body and the movable seat.

[0014] Further, the first positioning mechanism includes an enclosure fixed on the platform and having an opening, and a door structure having one end hinged on the enclosure and the other end locked with the enclosure and used to open and close the opening. When the door structure opens the opening, the enclosure allows the rotation source to be loaded into it from the opening. When the door structure closes the opening, the enclosure positions the rotation source so that the position of the rotation source is suitable for meshing the driving gear with the driven gear.

[0015] Furthermore, a positioning groove is provided on the enclosure for positioning the selected position of the rotating source, and the first positioning mechanism also includes an elastic bent piece arranged on the door structure, and the elastic bent piece can keep the selected position close to the inner wall of the positioning groove, wherein the selected position is a boss structure located at the end of the rotating source and allowing its rotating shaft to pass through it.

[0016] The core of the component matching device for a vacuum valve provided in this embodiment is to simulate the dynamic interaction between the rotation source and the driven gear in actual operation, that is, to perform a rotation test while the two remain in a meshing state. At this time, the measuring mechanism of the component matching device will measure in real time the slight changes in the center distance between the driving gear and the driven gear during the rotation process. This change, as a key indicator for evaluating the meshing accuracy of the gears, can directly reflect the tightness of the fit and the smoothness of the operation of the gear pair. With the help of this device, it is possible to efficiently screen out those combinations of rotation sources (with driving gears) and driven gears that meet the strict meshing accuracy requirements, thereby ensuring that the vacuum valve has higher pressure control accuracy and longer service life after assembly, further improving the performance and reliability of the vacuum system in which the vacuum valve is located. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By reading the following detailed description with reference to the accompanying drawings, the above and other objects, features and advantages of the exemplary embodiments of the present invention will become readily understood. In the accompanying drawings, several embodiments of the present invention are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0018] Figure 1 A diagram showing a use state of a component matching device of a vacuum valve provided by an embodiment of the present invention;

[0019] Figure 2 A schematic diagram showing the structure of an elastic component provided by an embodiment of the present invention is shown;

[0020] Figure 3 A diagram showing the use status of the second positioning mechanism and the measuring mechanism provided by the embodiment of the present invention;

[0021] Figure 4 A diagram showing a use state of a rotating body provided by an embodiment of the present invention is shown;

[0022] Figure 5 The figure shows the use state of the first positioning mechanism provided by the embodiment of the present invention.

[0023] In the figure:

[0024] 1. Platform;

[0025] 2. first positioning mechanism; 21. enclosure; 211. positioning groove; 22. door structure; 221. elastic bending piece;

[0026] 3. Second positioning mechanism; 31. Movable seat; 32. Rotating body; 321. Accommodating groove; 33. Fastener; 34. Linear rail; 35. Bearing;

[0027] 4. elastic component; 41. sliding seat; 42. guide rod; 421. rod; 422. head; 43. compression spring; 44. linear drive; 441. mounting seat; 442. motor; 443. transmission rack; 444. roller;

[0028] 5. Measuring mechanism; 51. Micrometer;

[0029] 100, rotation source; 101, driving gear; 102, selected position; 200, driven gear; 201, shaft sleeve part. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0031] The vacuum valve includes a valve body, a valve core, a rotation source 100 and a transmission mechanism including a driving gear 101 and a driven gear 200. When in use, the rotation source 100 drives the driving gear 101 mounted on its rotating shaft to rotate, and the rotating driving gear 101 drives the driven gear 200 meshing therewith to rotate. Since the driven gear 200 is mounted on the valve core, it can directly drive the valve core to move in the valve body when it rotates, thereby realizing the opening, closing and opening degree of the vacuum valve. As an example, the vacuum valve is preferably a swing valve in a vacuum system, which is generally used in conjunction with a vacuum pump or a combination of a vacuum pump and a molecular pump (ultra-high vacuum system) to control the vacuum degree of the vacuum system in which it is located.

[0032] Figure 1 FIG. 2 shows a diagram of the use state of a component matching device of a vacuum valve provided in this embodiment. Figure 1As shown, this embodiment provides a component matching device for a vacuum valve, and the component matching device includes a platform 1, a first positioning mechanism 2, a second positioning mechanism 3, an elastic component 4, and a measuring mechanism 5. The first positioning mechanism 2 is arranged on the platform 1 and is used to install one of the rotation source 100 and the driven gear 200. The second positioning mechanism 3 is slidably arranged on the platform 1 and is used to install the other of the rotation source 100 and the driven gear 200. The elastic component 4 is arranged on the platform 1 and is used to push the second positioning mechanism 3 toward the first positioning mechanism 2 to ensure that the relative distance between the first positioning mechanism 2 and the second positioning mechanism 3 is adapted to maintain the driving gear 101 and the driven gear 200 in a meshing state. The measuring mechanism 5 is arranged on the platform 1, the first positioning mechanism 2, or the second positioning mechanism 3. When the driving gear 101 and the driven gear 200 that are meshed with each other rotate, the relative distance between the first positioning mechanism 2 and the second positioning mechanism 3 can change accordingly following the change in the relative distance between the driving gear 101 and the driven gear 200, and ensure that the measuring mechanism 5 can measure the change in the center distance of the driving gear 101 and the driven gear 200 that are meshed with each other during the rotation process.

[0033] When in use, the rotation source 100 with the driving gear 101 and the driven gear 200 are installed to the corresponding first positioning mechanism 2 and second positioning mechanism 3, and the elastic component 4 causes the first positioning mechanism 2 and the second positioning mechanism 3 to approach each other until the driving gear 101 of the rotation source 100 is meshed with the driven gear 200. After ensuring that this meshing state is stably maintained, the driving gear 101 or the driven gear 200 can be manually driven, or the rotation source 100 is started to cause the meshed driving gear 101 and the driven gear 200 to rotate, and the measuring mechanism 5 measures the change in the center distance between the driving gear 101 and the driven gear 200 during rotation.

[0034] The core of the component matching device for a vacuum valve provided in this embodiment is to simulate the dynamic interaction between the rotation source 100 and the driven gear 200 in actual operation, that is, to perform a rotation test while the two remain in a meshing state. At this time, the measuring mechanism 5 of the component matching device will measure the slight changes in the center distance between the driving gear 101 and the driven gear 200 during the rotation process. This change, as a key indicator for evaluating the gear meshing accuracy, can directly reflect the tightness of the gear pair and the smoothness of operation. With the help of this device, those combinations of driving gear 101 and driven gear 200 that meet the strict meshing accuracy requirements can be efficiently screened out, thereby ensuring that the vacuum valve has excellent pressure control accuracy and service life after assembly, and further improving the performance and reliability of the vacuum system in which the vacuum valve is located.

[0035] In this embodiment, since the first positioning mechanism 2 is fixedly arranged on the platform 1 and the second positioning mechanism 3 is slidably arranged on the platform 1, the first positioning mechanism 2 is used to install the rotation source 100 and the second positioning mechanism 3 is used to install the driven gear 200, so that the rotation source 100 with a larger weight is set to a fixed state to move the driven gear 200 with a smaller weight, so that the elastic component 4 only needs a small elastic force to maintain the driving gear 101 of the rotation source 100 and the driven gear 200 to be meshed, which reduces the production cost of the component matching device to a certain extent. In other embodiments, the rotation source 100 can also be installed on the second positioning mechanism 3, and the driven gear 200 can be installed on the first positioning mechanism 2.

[0036] Exemplarily, the rotation source 100 is a motor, the driving gear 101 is a gear on the output shaft of the motor, and the driven gear 200 is a sector gear. This embodiment does not specifically limit the rotation source 100 and the driven gear 200, and all workpieces that need to be paired through gear meshing should be within the protection scope of the disclosed embodiment.

[0037] Figure 2 FIG. 4 shows a diagram of the elastic component 4 provided in this embodiment in use. Figure 2 Combined with Figure 1As shown, the elastic component 4 includes a sliding seat 41, a guide rod 42, a compression spring 43 and a linear drive 44. The sliding seat 41 is slidably arranged on the platform 1. The guide rod 42 includes a rod portion 421 that can slidably penetrate the sliding seat 41 and is fixed in the second positioning mechanism 3, and a head portion 422 that is arranged on the end of the rod portion 421 away from the second positioning mechanism 3, wherein the radial dimension of the head portion 422 is greater than the radial dimension of the rod portion 421. The compression spring 43 is sleeved on the guide rod 42 and is located between the sliding seat 41 and the second positioning mechanism 3. The linear drive 44 is on the platform 1 and connected to the sliding seat 41. Among them, the linear drive 44 is configured to be able to drive the sliding seat 41 away from and close to the first positioning mechanism 2. When it is necessary to easily install the driven gear 200 into the second positioning mechanism 3, first install the rotation source 100 into the first positioning mechanism 2, and then start the linear actuator 44 to make the sliding seat 41 move away from the first positioning mechanism 2 under the action of the linear actuator 44. At this time, the sliding seat 41 first moves away from the first positioning mechanism 2 and then moves away from the first positioning mechanism 2 together with the second positioning mechanism 3 through the guide rod 42, so that the driven gear 200 can be easily installed into the second positioning mechanism 3 without meshing with the driving gear 101. Subsequently, the sliding seat 41 approaches the first positioning mechanism 2 under the action of the linear actuator 44, and drives the second positioning mechanism 3 to approach the first positioning mechanism 2 through the compression spring 43, so as to promote the meshing of the driven gear 200 with the driving gear 101, thereby facilitating the implementation of subsequent measurement operations. When the first positioning mechanism 2 drives the second positioning mechanism 3 to approach the first positioning mechanism 2 through the compression spring 43, the compression spring 43 is compressed and deformed, and the second positioning mechanism 3 is urged to approach the first positioning mechanism 2 through its own elastic force, so that the driven gear 200 on the second positioning mechanism 3 and the driving gear 101 of the rotating source 100 on the first positioning mechanism 2 always maintain a meshing state during the rotation test, thereby ensuring that the relative distance between the first positioning mechanism 2 and the second positioning mechanism 3 is adapted to maintain the driving gear 101 and the driven gear 200 in a meshing state.

[0038] In this embodiment, the linear actuator 44 includes a mounting seat 441 fixedly arranged on the platform 1, a motor 442 arranged on the mounting seat 441 and having a transmission gear, and a transmission rack 443 slidably passing through the mounting seat 441 and meshing with the transmission gear, wherein the end of the transmission rack 443 close to the sliding seat 41 is fixedly connected to the sliding seat 41. The motor 442 drives the transmission rack 443 meshing with the transmission gear of the motor 442 to move, so as to convert the rotational motion of the transmission gear of the motor 442 into the linear motion of the transmission rack 443, and drive the sliding seat 41 to approach the first positioning mechanism 2 by the transmission rack 443. In other embodiments, the linear actuator 44 can also be a linear drive mechanism such as a cylinder, a hydraulic cylinder or an electric cylinder, and any mechanical structure that can achieve linear drive is within the protection scope of the embodiments of the present disclosure.

[0039] Furthermore, the linear drive 44 also includes a roller 444 rotatably disposed in the mounting seat 441 and abutting against the transmission rack 443, wherein the roller 444 and the transmission gear are disposed symmetrically with respect to the transmission rack 443, and the roller 444 can support and guide the transmission rack 443 to help the transmission rack 443 maintain stability and accuracy during the transmission process, and prevent the transmission rack 443 from being offset or deformed due to uneven force or vibration.

[0040] It should be noted that, in addition to the aforementioned structure, the elastic component 4 may also be a device that only provides elasticity, or even a spring with one end fixed to the platform 1 and the other end fixed to the second positioning mechanism 3 .

[0041] Figure 3 The diagram shows the use state of the second positioning mechanism 3 and the measuring mechanism 5 provided in this embodiment. Figure 4 FIG. 2 shows a diagram of the use state of the rotating body 32 provided in this embodiment. Figure 3 and Figure 4 Combined with Figure 1 As shown, the second positioning mechanism 3 includes a movable seat 31 slidably disposed on the platform 1 and used to connect the elastic component 4, and a rotating body 32 rotatably disposed on the movable seat 31, wherein the rotating body 32 has a receiving groove 321 for mounting the shaft sleeve portion 201 of the driven gear 200, and the second positioning mechanism 3 also includes a fastener 33 and a linkage member, and the fastener 33 can be a locking screw, etc., which is disposed on the rotating body 32 and is used to lock the shaft sleeve portion 201 of the driven gear 200 in the receiving groove 321 of the rotating body 32. The linkage member is disposed in the receiving groove 321 of the rotating body 32 and can be engaged with the shaft sleeve portion 201 of the driven gear 200. When the rotation source 100 rotates, the rotating body 32, the fastener 33 and the linkage member limit the driven gear 200 to ensure that the driven gear 200 can only move with the rotation, and cooperate with the movable seat 31 so that the driven gear 200 can move along the second positioning mechanism 3 towards or away from the first positioning mechanism 2 while rotating with the driving gear 101, thereby adapting the elastic component 4 to ensure that the driving gear 101 and the driven gear 200 can still maintain a meshing state when they rotate.

[0042] In this embodiment, the rotating body 32 is the outer ring of the expansion sleeve, the linkage member is the inner ring of the expansion sleeve, and the fastener 33 is a bolt. The inner ring is tightened by screwing the bolt to engage with the shaft sleeve 201, thereby realizing the rotation of the driven gear 200. In other embodiments, the rotating body 32 is the main body of the hydraulic expansion sleeve, the linkage member is the inner ring of the hydraulic expansion sleeve, and the inner ring is forced to engage with the shaft sleeve 201 by hydraulic means; or the rotating body 32 is the shaft sleeve, and the fastener 33 is a bolt, and the driven gear 200 is tightened by screwing the bolt.

[0043] Furthermore, the second positioning mechanism 3 also includes a bearing 35 arranged between the rotating body 32 and the movable seat 31. The bearing 35 supports the rotating body 32 and determines the rotation center of the rotation, ensuring that the rotating body 32 rotates smoothly and accurately along a predetermined axis, and can reduce the friction and wear between the rotating body 32 and the movable seat 31, so as to extend the service life of the second positioning mechanism 3.

[0044] Exemplarily, the second grading mechanism also includes a linear rail 34 arranged on the platform 1, and the movable seat 31 and the sliding seat 41 are arranged on the platform 1 through the linear rail 34, so that the movable seat 31 and the sliding seat 41 can move closer to or away from the first positioning mechanism 2 with the help of the linear rail 34.

[0045] In this embodiment, the measuring mechanism 5 includes at least one micrometer 51 fixed in the second positioning mechanism 3, and the measuring rod of the at least one micrometer 51 passes through the second positioning mechanism 3 along the movement direction of the second positioning mechanism 3 and abuts against the first positioning mechanism 2. When the driving gear 101 and the driven gear 200 meshing with each other are forced to rotate, the center distance between the driving gear 101 and the driven gear 200 changes, and the relative distance between the second positioning mechanism 3 and the first positioning mechanism 2 is also forced to change. The micrometer 51 can directly measure and feedback the change in the relative distance between the second positioning mechanism 3 and the first positioning mechanism 2, thereby indirectly measuring and feedbacking the change in the center distance between the driving gear 101 and the driven gear 200. If the change in the center distance between the driving gear 101 and the driven gear 200 is within a predetermined range, this set of the driving gear 101 and the driven gear 200 meets the pairing requirements. If the change in the center distance between the driving gear 101 and the driven gear 200 exceeds the predetermined range, this set of the driving gear 101 and the driven gear 200 does not meet the pairing requirements. At this time, the driven gear 200 is removed from the second positioning mechanism 3 and replaced with another driven gear 200 for pairing, until a driven gear 200 that meets the pairing requirements with the driving gear 101 is selected.

[0046] In an alternative embodiment, the measuring mechanism 5 includes a grating ruler arranged on the platform 1 along the movement of the second positioning mechanism 3 and a reading head fixed in the second positioning mechanism 3 and slidably connected to the grating ruler. The reading head cooperates with the grating ruler and can also feedback the change of the center distance between the driving gear 101 of the rotation source 100 and the driven gear 200 rotating in a meshing state. This embodiment does not impose any specific restrictions on the specific structure of the measuring mechanism 5. Any mechanical structure that can measure and feedback the change of the center distance between the driving gear 101 of the rotation source 100 and the driven gear 200 rotating in a meshing state should be within the protection scope of the disclosed embodiment.

[0047] Preferably, two micrometers 51 are provided, and the two micrometers 51 are arranged on both sides of the axial direction of the guide rod 42 to improve the matching accuracy of the rotation source 100 and the driven gear 200 .

[0048] Figure 5 FIG. 2 shows a diagram of the use state of the first positioning mechanism 2 provided in this embodiment. Figure 5 Combined with Figure 1 As shown, the first positioning mechanism 2 includes an enclosure 21 fixed on the platform 1 and having an opening, and a door structure 22, one end of which is hinged on the enclosure 21 and the other end is locked with the enclosure 21 and is used to open and close the opening. When the door structure 22 opens the opening, the enclosure 21 allows the rotation source 100 to be loaded into it from the opening. When the door structure 22 closes the opening, the enclosure 21 positions the rotation source 100 so that the position of the rotation source 100 is suitable for meshing the driving gear 101 with the driven gear 200, thereby realizing the positioning of the driving gear 101. Among them, the door structure 22 can not only realize opening or closing the opening, but also cooperate with the enclosure 21 after closing the opening, to ensure that the driving gear 101 will not be offset during the pairing, thereby affecting the pairing result.

[0049] Furthermore, a positioning groove 211 for positioning the selected position 102 of the rotating source 100 is also provided on the enclosure 21, and the first positioning mechanism 2 also includes an elastic bent piece 221 provided on the door structure 22, and the elastic bent piece 221 can keep the selected position 102 of the rotating source 100 close to the inner wall of the positioning groove 211, wherein the selected position 102 is a boss structure located at the end of the rotating source 100 and allowing its rotating shaft to pass through it. Due to actual production limitations, each rotating source 100 for pairing has slight differences in shape and volume. The elastic bent piece 221 is used to keep the selected position 102 of the rotating source 100 close to the inner wall of the positioning groove 211, so that each rotating source 100 for pairing can be positioned with the inner wall of the positioning groove 211 as a reference, thereby achieving that each rotating source 100 for pairing is kept at the reference position.

[0050] In summary, the component matching device of the vacuum valve provided in this embodiment can simulate the dynamic interaction between the driving gear 101 and the driven gear 200 in actual operation, and use the change in the relative distance between the second positioning mechanism 3 and the first positioning mechanism 2 to feedback the change in the center distance between the rotation source 100 and the driven gear 200, and use the micrometer 51 to directly measure and feedback the change in the relative distance between the second positioning mechanism 3 and the first positioning mechanism 2, thereby indirectly measuring and feedback the change in the driving gear 101 and the driven gear 200, so as to screen out the driving gear 101 and the driven gear 200 that meet the requirements, thereby increasing the transmission efficiency of the rotation source 100 and the driven gear 200 used in the vacuum valve, reducing the friction and wear generated by the vacuum valve during operation, and thus improving the pressure control accuracy and service life of the vacuum valve.

[0051] In the above description of the present application, unless otherwise clearly specified and limited, the terms "fixed", "installed", "connected" or "connected" and the like should be understood in a broad sense. For example, with regard to the term "connection", it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements. Therefore, unless otherwise clearly defined in the present application, those skilled in the art can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0052] According to the above description of the present application, those skilled in the art may also understand that the terms used below, such as "upper", "inner", "axial" and other terms indicating orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings of the present application, and are only for the purpose of facilitating the explanation of the scheme of the present invention and simplifying the description, rather than explicitly or implicitly indicating that the device or element involved must have the specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of the present invention.

[0053] In addition, the terms "first" or "second" used in this application to refer to numbers or ordinals are only used for descriptive purposes and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0054] Although multiple embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may conceive of many changes, modifications, and alternatives without departing from the thought and spirit of the present invention. It should be understood that in the process of practicing the present invention, various alternatives to the embodiments of the present invention described herein may be adopted. The appended claims are intended to define the scope of protection of the present invention, and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A component matching device for a vacuum valve, the vacuum valve comprising a rotation source with a driving gear and a driven gear for meshing with the driving gear, characterized in that: The component matching device comprises: platform; A first positioning mechanism, which is disposed on the platform and is used to mount one of the rotation source and the driven gear; a second positioning mechanism slidably disposed on the platform and used to mount the other of the rotation source and the driven gear; an elastic component, which is disposed on the platform and is used to push the second positioning mechanism toward the first positioning mechanism to ensure that the relative distance between the first positioning mechanism and the second positioning mechanism is adapted to maintain the driving gear and the driven gear in a meshing state; a measuring mechanism, which is arranged on the platform, the first positioning mechanism or the second positioning mechanism; When the driving gear and the driven gear that are meshed with each other rotate, the relative distance between the first positioning mechanism and the second positioning mechanism can change accordingly following the change in the relative distance between the driving gear and the driven gear, and ensure that the measuring mechanism can measure the change in the center distance of the driving gear and the driven gear that are meshed with each other during the rotation process.

2. The component matching device according to claim 1, characterized in that: The elastic component comprises: A sliding seat, which is slidably disposed on the platform; A guide rod, comprising a rod portion slidably passing through the sliding seat and fixed in the second positioning mechanism, and a head portion provided on an end of the rod portion away from the second positioning mechanism, wherein the radial dimension of the head portion is greater than the radial dimension of the rod portion; A compression spring, which is sleeved on the guide pull rod and located between the sliding seat and the second positioning mechanism; A linear drive, disposed on the platform and connected to the sliding seat; In which, the linear drive is configured to drive the sliding seat away from and towards the first positioning mechanism. When the sliding seat approaches the first positioning mechanism, the sliding seat drives the second positioning mechanism to approach the first positioning mechanism through the compression spring. When the sliding seat moves away from the first positioning mechanism, the sliding seat first moves away from the first positioning mechanism and then moves away from the first positioning mechanism together with the second positioning mechanism through the guide rod.

3. The component matching device according to claim 2, characterized in that: The linear drive includes a mounting seat fixed on the platform, a motor provided on the mounting seat and having a transmission gear, and a transmission rack slidably passing through the mounting seat and meshing with the transmission gear, wherein the transmission rack is fixedly connected to the sliding seat at an end portion close to the sliding seat.

4. The component matching device according to claim 3, characterized in that: The linear drive further comprises a roller rotatably arranged in the mounting seat and abutting against the transmission rack, wherein the arrangement positions of the roller and the transmission gear are symmetrical with respect to the transmission rack.

5. The component matching device according to any one of claims 1 to 4, characterized in that: The measuring mechanism comprises at least one micrometer fixed in the second positioning mechanism, and a measuring rod of at least one micrometer penetrates the second positioning mechanism along a moving direction of the second positioning mechanism and abuts against the first positioning mechanism.

6. The component matching device according to any one of claims 1 to 4, characterized in that: The first positioning mechanism is used to install the rotation source, and the second positioning mechanism is used to install the driven gear.

7. The component matching device according to claim 6, characterized in that: The second positioning mechanism includes a movable seat slidably disposed on the platform and used to connect the elastic component, and a rotating body rotatably disposed on the movable seat, wherein the rotating body has a receiving groove for mounting the shaft sleeve portion of the driven gear, and the second positioning mechanism also includes a fastener and / or a linkage member, the fastener is disposed on the rotating body and is used to lock the shaft sleeve portion of the driven gear in the receiving groove of the rotating body, the linkage member is disposed in the receiving groove of the rotating body and can engage with the shaft sleeve portion of the driven gear to ensure that the rotating body rotates with the driven gear.

8. The component matching device according to claim 7, characterized in that: The second positioning mechanism also includes a bearing arranged between the rotating body and the movable seat.

9. The component matching device according to claim 6, characterized in that: The first positioning mechanism includes an enclosure fixed on the platform and having an opening, and a door structure with one end hinged on the enclosure and the other end locked with the enclosure and used to open and close the opening. When the door structure opens the opening, the enclosure allows the rotation source to be loaded into it from the opening. When the door structure closes the opening, the enclosure positions the rotation source so that the position of the rotation source is suitable for meshing the driving gear with the driven gear.

10. The component matching device according to claim 9, characterized in that: The enclosure is also provided with a positioning groove for positioning the selected position of the rotating source, and the first positioning mechanism also includes an elastic bent piece arranged on the door structure, and the elastic bent piece can keep the selected position close to the inner wall of the positioning groove, wherein the selected position is a boss structure located at the end of the rotating source and allowing its rotating shaft to pass through it.

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