A method and related device for generating an overlay mark measurement area

Abstract

The present application discloses a method for generating an overlay mark measurement area and a related device, which relate to the field of chip manufacturing technology. After obtaining the overlay mark center in the overlay mark image, edge point extraction areas in the horizontal direction and the vertical direction are generated respectively according to the overlay mark center, and a grayscale curve is obtained by grayscale projection of the overlay mark image in the edge point extraction areas in the horizontal direction and the vertical direction respectively, and a gradient curve corresponding to the grayscale curve is calculated. The edge points are accurately extracted according to the gradient extreme value points in the gradient curve, and the inner edge points and the outer edge points are marked, so that the inner measurement area is automatically generated according to the inner edge points in the horizontal direction and the vertical direction, and the outer measurement area is automatically generated according to the outer edge points in the horizontal direction and the vertical direction, so as to realize the adaptive generation of the measurement area according to the overlay mark, and effectively improve the drawing efficiency and drawing accuracy of the measurement area.

Description

Technical Field

[0001] The present application relates to the field of chip manufacturing technology, and in particular to a method for generating an overlay mark measurement area and a related device. Background Art

[0002] Chips are the core and cornerstone of high-end manufacturing, and determine the development of high-tech industries. Photolithography is an extremely critical part of the chip manufacturing process. The process level of photolithography directly determines the process and performance of the chip. Chips are made up of multiple layers of circuits, and the manufacture of a chip often requires dozens of photolithography to complete. The alignment deviation between adjacent circuit layers in the chip is also called overlay error. The rapid measurement and accurate evaluation of overlay error is the key to optimizing the operating parameters of the lithography machine and managing the process yield.

[0003] After the lithography machine performs lithography, there will be a certain amount of overlay deviation. If you want to accurately measure the overlay deviation, you need to train the overlay mark to obtain reasonable parameters for measurement. When measuring, you need to define the measurement area. Currently, the measurement area generally needs to be drawn manually, which is inefficient, and the quality of manual drawing is difficult to control, which will also affect the measurement accuracy. Summary of the invention

[0004] In view of the above problems, the present application provides a method and a related device for generating an overlay mark measurement area, which effectively improves the drawing efficiency and drawing accuracy of the measurement area. The specific scheme is as follows:

[0005] The first aspect of the present application provides a method for generating an overlay mark measurement area, comprising:

[0006] Acquire an overlay mark center in an overlay mark image, wherein the overlay mark image is symmetrical in the horizontal direction and the vertical direction;

[0007] Generate edge point extraction areas in horizontal and vertical directions respectively according to the centers of the overlay marks;

[0008] Performing grayscale projection on the overlay mark image in the edge point extraction areas in the horizontal direction and the vertical direction respectively to obtain a grayscale curve;

[0009] Calculate the gradient curves corresponding to the grayscale curves in the horizontal direction and the vertical direction respectively, determine the gradient extreme value points in the gradient curves as edge points, and mark the inner edge points and the outer edge points among the edge points;

[0010] An inner measurement area is generated according to inner edge points in the horizontal direction and the vertical direction, and an outer measurement area is generated according to outer edge points in the horizontal direction and the vertical direction.

[0011] In a possible implementation, generating edge point extraction regions in the horizontal direction and the vertical direction respectively according to the overlay mark center includes:

[0012] Generate a horizontal edge point extraction area with the center of the overlay mark as the center, the width as the overlay mark area width, and the height as the preset ratio value of the overlay mark area height;

[0013] A vertical edge point extraction area is generated with the center of the overlay mark as the center, the width as a preset ratio of the width of the overlay mark area, and the height as the height of the overlay mark area.

[0014] In a possible implementation, performing grayscale projection on the overlay mark image in the edge point extraction regions in the horizontal direction and the vertical direction to obtain a grayscale curve includes:

[0015] Performing a vertical grayscale projection on the overlay mark image in the horizontal edge point extraction region to obtain a grayscale curve;

[0016] A grayscale curve is obtained by performing grayscale projection in the horizontal direction on the overlay mark image in the edge point extraction area in the vertical direction.

[0017] In a possible implementation, after marking the inner edge point and the outer edge point in the edge point, the method for generating the overlay mark measurement area further includes:

[0018] The overlay mark parameters are calculated according to the edge points in the horizontal direction and the vertical direction, and the overlay mark parameters at least include: inner layer mark size, outer layer mark size and mark width.

[0019] In a possible implementation, generating an inner measurement area according to inner edge points in horizontal and vertical directions, and generating an outer measurement area according to outer edge points in horizontal and vertical directions, includes:

[0020] Determine the width of the inner layer measurement area and the outer layer measurement area according to the mark width;

[0021] Determining whether the inner layer measurement area and the outer layer measurement area overlap according to the widths of the inner layer measurement area and the outer layer measurement area;

[0022] If there is overlap, the widths of the inner measurement area and the outer measurement area are corrected respectively;

[0023] If there is no overlap, the length of the inner measurement area is determined according to the inner mark size, and the length of the outer measurement area is determined according to the outer mark size.

[0024] In a possible implementation, the type of the overlay mark is a Bar mark, a Frame mark, or a Box mark.

[0025] A second aspect of the present application provides a device for generating an overlay mark measurement area, comprising:

[0026] A center positioning unit, used to obtain the center of the overlay mark in the overlay mark image, wherein the overlay mark image is symmetrical in the horizontal direction and the vertical direction;

[0027] A first region generating unit, used to generate edge point extraction regions in horizontal and vertical directions respectively according to the center of the overlay mark;

[0028] A grayscale projection unit, used for performing grayscale projection on the overlay mark image in edge point extraction areas in the horizontal direction and the vertical direction respectively to obtain a grayscale curve;

[0029] An edge point extraction unit is used to calculate the gradient curves corresponding to the grayscale curves in the horizontal direction and the vertical direction respectively, determine the gradient extreme value points in the gradient curve as edge points, and mark the inner edge points and the outer edge points in the edge points;

[0030] The second region generating unit is used to generate an inner layer measurement region according to the inner layer edge points in the horizontal direction and the vertical direction, and to generate an outer layer measurement region according to the outer layer edge points in the horizontal direction and the vertical direction.

[0031] A third aspect of the present application provides an electronic device, comprising at least one processor and a memory connected to the processor, wherein:

[0032] The memory is used to store computer programs;

[0033] The processor is used to execute the computer program so that the electronic device can implement the method for generating an overlay mark measurement area according to the first aspect or any implementation manner of the first aspect.

[0034] The fourth aspect of the present application provides a computer program product, including computer-readable instructions. When the computer-readable instructions are executed on an electronic device, the electronic device implements the method for generating an overlay mark measurement area according to the first aspect or any implementation of the first aspect.

[0035] A fifth aspect of the present application provides a computer storage medium, which carries one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement the method for generating an overlay mark measurement area according to the first aspect or any implementation of the first aspect.

[0036] By means of the above technical scheme, the present application provides a method and related device for generating an overlay mark measurement area. After obtaining the overlay mark center in the overlay mark image, edge point extraction areas in the horizontal and vertical directions are generated according to the overlay mark center, respectively. A grayscale curve is obtained by grayscale projection of the overlay mark image in the edge point extraction areas in the horizontal and vertical directions, and a gradient curve corresponding to the grayscale curve is calculated. The edge points are accurately extracted according to the gradient extreme points in the gradient curve, and the inner edge points and the outer edge points are marked, so that the inner measurement area is automatically generated according to the inner edge points in the horizontal and vertical directions, and the outer measurement area is automatically generated according to the outer edge points in the horizontal and vertical directions, so as to realize the adaptive generation of the measurement area according to the overlay mark, and effectively improve the drawing efficiency and drawing accuracy of the measurement area. And due to the symmetry of the overlay mark, the corresponding generated measurement area is also symmetrical, which effectively reduces the probability of measurement failure and further improves the stability and reliability of the measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. Throughout the accompanying drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and the originals and elements are not necessarily drawn to scale.

[0038] Figure 1 A schematic diagram of a flow chart of a method for generating an overlay mark measurement area provided in an embodiment of the present application;

[0039] Figure 2 A schematic diagram of an overlay mark image provided in an embodiment of the present application;

[0040] Figure 3 A schematic diagram of an overlay mark area provided in an embodiment of the present application;

[0041] Figure 4 A schematic diagram of a horizontal gradient curve provided in an embodiment of the present application;

[0042] Figure 5 A schematic diagram of edge points in an overlay mark image provided in an embodiment of the present application;

[0043] Figure 6 A schematic diagram of a marking area in an overlay marking image provided in an embodiment of the present application;

[0044] Figure 7 A schematic diagram of the overlay mark type provided in the embodiment of the present application;

[0045] Figure 8 A schematic diagram of overlay marking parameters provided in an embodiment of the present application;

[0046] Fig. 9 Another schematic diagram of overlay marking parameters provided in an embodiment of the present application;

[0047] Fig.10 Another schematic diagram of overlay marking parameters provided in an embodiment of the present application;

[0048] Fig.11 Another schematic diagram of overlay marking parameters provided in an embodiment of the present application;

[0049] Fig.12 A schematic diagram of the structure of an overlay mark measurement area generation device provided in an embodiment of the present application;

[0050] Fig.13 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0051] The following describes the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. The terms used in the implementation method section of the present application are only used to explain the specific embodiments of the present application, and are not intended to limit the present application.

[0052] The embodiments of the present application are described below in conjunction with the accompanying drawings. Those skilled in the art will appreciate that, with the development of technology and the emergence of new scenarios, the technical solutions provided in the embodiments of the present application are also applicable to similar technical problems.

[0053] The terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and need not be used to describe a specific order or sequential order. It should be understood that the terms used in this way can be interchangeable under appropriate circumstances, which is only to describe the distinction mode adopted by the objects of the same attributes when describing in the embodiments of the present application. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, so that the process, method, system, product or equipment comprising a series of units need not be limited to those units, but may include other units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0054] The embodiment of the present application provides a method for generating an overlay mark measurement area. The method for generating an overlay mark measurement area according to the embodiment of the present application is described in detail below with reference to the accompanying drawings.

[0055] Reference Figure 1 , Figure 1 A schematic diagram of a process of generating an overlay mark measurement area provided in an embodiment of the present application is shown as follows: Figure 1 As shown, a method for generating an overlay mark measurement area provided in an embodiment of the present application may include steps 101 to 105, and these steps are described in detail below.

[0056] 101: Obtaining the center of the overlay mark in the overlay mark image;

[0057] like Figure 2 As shown in the schematic diagram of the overlay mark image, the overlay mark image is symmetrical in the horizontal and vertical directions.

[0058] The center of the overlay mark can be manually pre-calibrated or automatically located based on the overlay mark image.

[0059] Exemplarily, locating the center of the overlay mark based on the overlay mark image includes: performing grayscale projection on the overlay mark image in the horizontal direction (i.e., X direction) and the vertical direction (i.e., Y direction) to obtain a projection curve, respectively calculating the first-order derivatives of the projection curves in the horizontal direction and the vertical direction to calculate the corresponding gradient curves, and determining the starting position and the ending position of the overlay mark according to the gradient in the gradient curve, thereby obtaining Figure 3 In the overlay mark area shown, the symmetry center is calculated in the horizontal direction and the vertical direction respectively in the overlay mark area, so as to locate the overlay mark center.

[0060] 102: Generate edge point extraction regions in the horizontal direction and the vertical direction respectively according to the center of the overlay mark;

[0061] To determine the overlay mark measurement area, it is necessary to determine edge points in the horizontal direction and the vertical direction respectively, so that the entire overlay mark measurement area can be described. Therefore, it is necessary to generate edge point extraction areas in the horizontal direction and the vertical direction.

[0062] The horizontal edge point extraction area is used to extract the edge points of the overlay mark measurement area in the horizontal direction, and the vertical edge point extraction area is used to extract the edge points of the overlay mark measurement area in the vertical direction.

[0063] 103: performing grayscale projection on the overlay mark image in the edge point extraction regions in the horizontal direction and the vertical direction respectively to obtain a grayscale curve;

[0064] Specifically, a grayscale curve in the horizontal direction is obtained by performing a vertical grayscale projection on the overlay mark image in the horizontal edge point extraction area. The horizontal grayscale curve is used to determine the edge points of the overlay mark measurement area in the horizontal direction.

[0065] The overlay mark image is horizontally projected in the vertical edge point extraction area to obtain a vertical grayscale curve, and the vertical grayscale curve is used to determine the edge points of the overlay mark measurement area in the vertical direction.

[0066] 104: Calculate the gradient curves corresponding to the grayscale curves in the horizontal direction and the vertical direction respectively, determine the gradient extreme value points in the gradient curves as edge points, and mark the inner edge points and the outer edge points among the edge points;

[0067] The first-order derivatives of the grayscale curves in the horizontal and vertical directions are respectively calculated to calculate the corresponding gradient curves.

[0068] As Figure 2 Taking the overlay mark image shown in FIG. 1 as an example, the gradient curves corresponding to the grayscale curves in the horizontal direction include: Figure 4 The 8 extreme gradient points are identified as edge points. The 8 extreme gradient points are sorted from left to right (i.e., sorted by the size in the X direction), and the 1st, 2nd, 7th, and 8th extreme gradient points are marked as outer edge points, and the 3rd, 4th, 5th, and 6th extreme gradient points are marked as inner edge points.

[0069] Similarly, 8 marked edge points (X1, X2, X3, X4, Y1, Y2, Y3, Y4) can be obtained in the vertical direction (i.e., Y direction). Finally, 8 outer edge points and 8 inner edge points are marked.

[0070] 105: Generate an inner measurement area according to the inner edge points in the horizontal direction and the vertical direction, and generate an outer measurement area according to the outer edge points in the horizontal direction and the vertical direction.

[0071] Specifically, the outer edge points form two inner and outer rectangular frames, and the area between the two rectangular frames is the outer measurement area; the inner edge points form two inner and outer rectangular frames, and the area between the two rectangular frames is the inner measurement area

[0072] Also as Figure 2 Take the overlay mark image shown as an example. Figure 5 The 8 outer edge points in the overlay mark image shown are composed of Figure 6 There are two larger rectangular boxes shown, and the area between the two larger rectangular boxes is the outer measurement area; Figure 5 The eight inner edge points in the overlay mark image shown are composed as follows: Figure 6 There are two smaller rectangular boxes shown, and the area between the two smaller rectangular boxes is the inner measurement area.

[0073] The present embodiment discloses a method for generating an overlay mark measurement area. After acquiring the center of the overlay mark in the overlay mark image, edge point extraction areas in the horizontal direction and the vertical direction are generated respectively according to the center of the overlay mark. A grayscale curve is obtained by performing grayscale projection on the overlay mark image in the edge point extraction areas in the horizontal direction and the vertical direction respectively. A gradient curve corresponding to the grayscale curve is calculated. Edge points are accurately extracted according to the gradient extreme value points in the gradient curve, and inner edge points and outer edge points are marked. Thus, an inner measurement area is automatically generated according to the inner edge points in the horizontal direction and the vertical direction, and an outer measurement area is automatically generated according to the outer edge points in the horizontal direction and the vertical direction. The measurement area is adaptively generated according to the overlay mark, and the drawing efficiency and drawing accuracy of the measurement area are effectively improved.

[0074] In a possible implementation, edge point extraction areas in the horizontal direction and the vertical direction are generated respectively according to the center of the overlay mark, including: taking the center of the overlay mark as the center, the width being the width of the overlay mark area, and the height being a preset ratio value (such as 50%) of the height of the overlay mark area, to generate an edge point extraction area in the horizontal direction; taking the center of the overlay mark as the center, the width being a preset ratio value (such as 50%) of the width of the overlay mark area, and the height being the height of the overlay mark area, to generate an edge point extraction area in the vertical direction.

[0075] Furthermore, this embodiment can automatically calculate overlay mark parameters while automatically generating an overlay mark measurement area.

[0076] The method for generating an overlay mark measurement area disclosed in this embodiment supports the following Figure 7 The Bar mark, Frame mark, and Box mark types shown have wide adaptability.

[0077] Taking the Bar mark as an example, the following is a detailed introduction to the calculation of the overlay mark parameters.

[0078] The overlay mark parameters at least include: inner mark size InnerTargetSize, outer mark size OuterTargetSize and mark width BarWidth.

[0079] Among them, the method for calculating the outer layer marker size TargetSize is as follows:

[0080] T=(Y1+Y2) / 2,

[0081] L=(X1+X2) / 2,

[0082] B=(Y4+Y3) / 2,

[0083] R=(X4+X3) / 2,

[0084] SizeX=R-L+1,

[0085] SizeY=B-T+1,

[0086] TargetSize=(SizeX+ SizeY) / 2;

[0087] in:

[0088] Take the above TargetSize as OuterTargetSize as an example, Figure 8 As shown, X1, X2, X3, and X4 are edge positions marked in the X direction, and X1, X2, X3, and X4 can be obtained based on edge points in the horizontal direction.

[0089] Y1, Y2, Y3, and Y4 are edge positions marked in the Y direction, and Y1, Y2, Y3, and Y4 can be obtained based on edge points in the vertical direction.

[0090] T is the center position of the upper bar in the Y direction, and B is the center position of the lower bar in the Y direction.

[0091] Where L is the center position of the left Bar in the X direction, and R is the center position of the right Bar in the X direction.

[0092] like Fig. 9 As shown, SizeX is the size of the mark in the X direction, and SizeY is the size of the mark in the X direction.

[0093] TargetSize is the average of the size of the marker in the X direction and the size of the marker in the X direction.

[0094] The method to calculate BarWidth is as follows:

[0095] BarWidth1 = X2-X1,

[0096] BarWidth2 = X4-X3,

[0097] BarWidth3 = Y2-Y1,

[0098] BarWidth4 = Y4-Y3,

[0099] BarWidth = (BarWidth1+BarWidth2+BarWidth3+BarWidth4) / 4.

[0100] in:

[0101] BarWidth1 is the width of the bar on the left side of the marker;

[0102] BarWidth2 is the width of the bar on the right side of the marker;

[0103] BarWidth3 is the width of the upper Bar of the marker;

[0104] BarWidth4 is the width of the bar below the marker;

[0105] BarWidth is the average width of the above four bars.

[0106] P Fig.10 As shown, it represents the distance between the inner and outer layers. The method for calculating P is as follows:

[0107] P = (OuterTargetSize-InnerTargetSize) / 2,

[0108] Among them, OuterTargetSize is the outer mark size, and InnerTargetSize is the inner mark size.

[0109] The length of the outer measurement area and the width of the outer measurement area are as follows: Fig.11 As shown, in a possible implementation, generating an inner measurement area according to inner edge points in the horizontal direction and the vertical direction, and generating an outer measurement area according to outer edge points in the horizontal direction and the vertical direction, includes the following steps 1051-1054:

[0110] 1051: Determine the width of the inner layer measurement area and the outer layer measurement area according to the mark width;

[0111] The inner measurement area and the outer measurement area are composed of four rectangular marking areas, top, bottom, left and right, and are symmetrically distributed. The sizes of the four rectangular marking areas in the inner layer are exactly the same, and the sizes of the four rectangular marking areas in the outer layer are also exactly the same.

[0112] Specifically, the calculation method of the width of the inner measurement area InnerROIWidth is as follows:

[0113] InnerROIWidth=2×BarWidth;

[0114] The calculation method of the width of the outer measurement area OuterROIWidth is as follows:

[0115] OuterROIWidth=2×BarWidth.

[0116] 1052: judging whether the inner measurement area and the outer measurement area overlap according to the widths of the inner measurement area and the outer measurement area;

[0117] The calculation method of overlap Overlap is as follows:

[0118] Overlap=(InnerROIWidth+OuterROIWidth) / 2-P.

[0119] If Overlap is greater than 0, the inner measurement area and the outer measurement area overlap.

[0120] If Overlap is equal to 0, there is no overlap between the inner measurement area and the outer measurement area.

[0121] If there is overlap, execute 1053: respectively correct the width of the inner measurement area and the outer measurement area;

[0122] Exemplarily, the widths of the inner measurement area and the outer measurement area are modified as follows:

[0123] InnerROIWidth=InnerROIWidth-Overlap;

[0124] OuterROIWidth=OuterROIWidth-Overlap.

[0125] If there is no overlap, execute 1054: determine the length of the inner measurement area according to the inner mark size, and determine the length of the outer measurement area according to the outer mark size.

[0126] Specifically, the calculation method of the length of the inner measurement area InnerROILength is as follows:

[0127] InnerROILength=InnerTargetSize×Percent,

[0128] The calculation method of the length of the outer measurement area OuterROILength is as follows:

[0129] OuterROILength=OuterTargetSize×Percent,

[0130] Among them, Percent can be set to 70%.

[0131] A method for generating an overlay mark measurement area provided in an embodiment of the present application is introduced above. A device for executing the above method for generating an overlay mark measurement area will be introduced below.

[0132] See also Fig.12 , Fig.12 This is a schematic diagram of the structure of a device for generating an overlay mark measurement area provided in an embodiment of the present application. Fig.12 As shown, the overlay mark measurement area generating device comprises:

[0133] A center positioning unit 1201 is used to obtain the center of the overlay mark in the overlay mark image, and the overlay mark image is symmetrical in the horizontal direction and the vertical direction;

[0134] A first region generating unit 1202 is used to generate edge point extraction regions in horizontal and vertical directions respectively according to the center of the overlay mark;

[0135] A grayscale projection unit 1203, configured to perform grayscale projection on the overlay mark image in edge point extraction regions in the horizontal direction and the vertical direction to obtain a grayscale curve;

[0136] The edge point extraction unit 1204 is used to calculate the gradient curves corresponding to the grayscale curves in the horizontal direction and the vertical direction respectively, determine the gradient extreme value points in the gradient curves as edge points, and mark the inner edge points and the outer edge points among the edge points;

[0137] The second region generating unit 1205 is configured to generate an inner measurement region according to inner edge points in the horizontal and vertical directions, and to generate an outer measurement region according to outer edge points in the horizontal and vertical directions.

[0138] In a possible implementation, the first area generation unit 1202 is specifically used to generate a horizontal edge point extraction area with the center of the overlay mark as the center, the width as the preset ratio value of the overlay mark area width, and the height as the preset ratio value of the overlay mark area height; and to generate a vertical edge point extraction area with the center of the overlay mark as the center, the width as the preset ratio value of the overlay mark area width, and the height as the overlay mark area height.

[0139] In a possible implementation, the grayscale projection unit 1203 is specifically used to perform vertical grayscale projection on the overlay mark image in the horizontal edge point extraction area to obtain a grayscale curve; and perform horizontal grayscale projection on the overlay mark image in the vertical edge point extraction area to obtain a grayscale curve.

[0140] In a possible implementation, the overlay mark measurement area generating device further includes:

[0141] The parameter calculation unit is used to calculate the overlay mark parameters according to the edge points in the horizontal direction and the vertical direction after marking the inner edge points and the outer edge points in the edge points. The overlay mark parameters at least include: inner mark size, outer mark size and mark width.

[0142] In a possible implementation, the second area generating unit 1205 is specifically configured to determine the widths of the inner measurement area and the outer measurement area according to the mark width; determine whether the inner measurement area and the outer measurement area overlap according to the widths of the inner measurement area and the outer measurement area; if there is overlap, respectively correct the widths of the inner measurement area and the outer measurement area; if there is no overlap, determine the length of the inner measurement area according to the inner mark size, and determine the length of the outer measurement area according to the outer mark size.

[0143] In a possible implementation, the type of the overlay mark is a Bar mark, a Frame mark, or a Box mark.

[0144] The present embodiment discloses a device for generating an overlay mark measurement area. After acquiring the center of the overlay mark in the overlay mark image, edge point extraction areas in the horizontal direction and the vertical direction are generated respectively according to the center of the overlay mark, a grayscale curve is obtained by performing grayscale projection on the overlay mark image in the edge point extraction areas in the horizontal direction and the vertical direction respectively, a gradient curve corresponding to the grayscale curve is calculated, edge points are accurately extracted according to the gradient extreme value points in the gradient curve, and inner edge points and outer edge points are marked, so that an inner measurement area is automatically generated according to the inner edge points in the horizontal direction and the vertical direction, and an outer measurement area is automatically generated according to the outer edge points in the horizontal direction and the vertical direction, so as to realize adaptive generation of the measurement area according to the overlay mark, and effectively improve the drawing efficiency and drawing accuracy of the measurement area.

[0145] The present application also provides an electronic device in an embodiment. Fig.13 As shown, it shows a schematic diagram of the structure of an electronic device suitable for implementing the embodiment of the present application. The electronic device in the embodiment of the present application may include but is not limited to fixed terminals such as mobile phones, laptops, PDAs (personal digital assistants), PADs (tablet computers), desktop computers, etc. Fig.13 The electronic device shown is merely an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0146] like Fig.13As shown, the electronic device may include a processing device (e.g., a central processing unit, a graphics processing unit, etc.) 701, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 702 or a program loaded from a storage device 708 to a random access memory (RAM) 703. When the electronic device is powered on, various programs and data required for the operation of the electronic device are also stored in the RAM 703. The processing device 701, the ROM 702, and the RAM 703 are connected to each other via a bus 704. An input / output (I / O) interface 705 is also connected to the bus 704.

[0147] Typically, the following devices may be connected to the I / O interface 705: an input device 706 including, for example, a touch screen, a touch pad, a keyboard, a mouse, a camera, a microphone, an accelerometer, a gyroscope, etc.; an output device 707 including, for example, a liquid crystal display (LCD), a speaker, a vibrator, etc.; a storage device 708 including, for example, a memory card, a hard disk, etc.; and a communication device 709. The communication device 709 may allow the electronic device to communicate with other devices wirelessly or by wire to exchange data. Although Fig.13 An electronic device having various devices is shown, but it should be understood that it is not required to implement or possess all the devices shown. More or fewer devices may be implemented or possessed instead.

[0148] An embodiment of the present application also provides a computer program product including computer-readable instructions. When the computer-readable instructions are executed on an electronic device, the electronic device implements any of the overlay mark measurement area generation methods provided in the embodiments of the present application.

[0149] A computer-readable storage medium is also provided in an embodiment of the present application. The storage medium carries one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement any of the overlay mark measurement area generation methods provided in the embodiments of the present application.

[0150] It should also be noted that the device embodiments described above are merely schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed over multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. In addition, in the drawings of the device embodiments provided by the present application, the connection relationship between the modules indicates that there is a communication connection between them, which may be specifically implemented as one or more communication buses or signal lines.

[0151] Through the description of the above implementation mode, the technicians in the field can clearly understand that the present application can be implemented by means of software plus necessary general hardware, and of course, it can also be implemented by special hardware including special integrated circuits, special CPUs, special memories, special components, etc. In general, all functions completed by computer programs can be easily implemented by corresponding hardware, and the specific hardware structure used to implement the same function can also be various, such as analog circuits, digital circuits or special circuits. However, for the present application, software program implementation is a better implementation mode in more cases. Based on such an understanding, the technical solution of the present application is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a readable storage medium, such as a computer floppy disk, a U disk, a mobile hard disk, a ROM, a RAM, a disk or an optical disk, etc., including a number of instructions to enable a computer device (which can be a personal computer, a training device, or a network device, etc.) to execute the methods described in each embodiment of the present application.

[0152] In the above embodiments, all or part of the embodiments may be implemented by software, hardware, firmware or any combination thereof. When implemented by software, all or part of the embodiments may be implemented in the form of a computer program product.

[0153] The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website site, a computer, a training device, or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, training device, or data center. The computer-readable storage medium may be any available medium that a computer can store or a data storage device such as a training device, a data center, etc. that includes one or more available media integrations. The available medium may be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state drive (SSD)), etc.

Claims

1. A method for generating an overlay mark measurement area, characterized in that: include: Acquire an overlay mark center in an overlay mark image, wherein the overlay mark image is symmetrical in the horizontal direction and the vertical direction; Generate edge point extraction areas in horizontal and vertical directions respectively according to the centers of the overlay marks; Performing grayscale projection on the overlay mark image in the edge point extraction areas in the horizontal direction and the vertical direction respectively to obtain a grayscale curve; Calculate the gradient curves corresponding to the grayscale curves in the horizontal direction and the vertical direction respectively, determine the gradient extreme value points in the gradient curves as edge points, and mark the inner edge points and the outer edge points among the edge points; Generate an inner measurement area according to the inner edge points in the horizontal direction and the vertical direction, and generate an outer measurement area according to the outer edge points in the horizontal direction and the vertical direction; The step of generating edge point extraction regions in the horizontal direction and the vertical direction respectively according to the overlay mark center comprises: Generate a horizontal edge point extraction area with the center of the overlay mark as the center, the width as the overlay mark area width, and the height as the preset ratio value of the overlay mark area height; A vertical edge point extraction area is generated with the center of the overlay mark as the center, the width as a preset ratio of the width of the overlay mark area, and the height as the height of the overlay mark area.

2. The method for generating an overlay mark measurement area according to claim 1, characterized in that: The grayscale projection of the overlay mark image in the edge point extraction areas in the horizontal direction and the vertical direction to obtain a grayscale curve comprises: Performing a vertical grayscale projection on the overlay mark image in the horizontal edge point extraction region to obtain a grayscale curve; A grayscale curve is obtained by performing grayscale projection in the horizontal direction on the overlay mark image in the edge point extraction area in the vertical direction.

3. The method for generating an overlay mark measurement area according to claim 1, characterized in that: After marking the inner edge point and the outer edge point in the edge point, the overlay mark measurement area generation method further includes: The overlay mark parameters are calculated according to the edge points in the horizontal direction and the vertical direction, and the overlay mark parameters at least include: inner layer mark size, outer layer mark size and mark width.

4. The method for generating an overlay mark measurement area according to claim 3, characterized in that: The step of generating an inner measurement area according to inner edge points in the horizontal direction and the vertical direction, and generating an outer measurement area according to outer edge points in the horizontal direction and the vertical direction, comprises: Determine the width of the inner layer measurement area and the outer layer measurement area according to the mark width; Determining whether the inner layer measurement area and the outer layer measurement area overlap according to the widths of the inner layer measurement area and the outer layer measurement area; If there is overlap, the widths of the inner measurement area and the outer measurement area are corrected respectively; If there is no overlap, the length of the inner measurement area is determined according to the inner mark size, and the length of the outer measurement area is determined according to the outer mark size.

5. The method for generating an overlay mark measurement area according to claim 1, characterized in that: The type of the overlay mark is Bar mark, Frame mark or Box mark.

6. A device for generating an overlay mark measurement area, characterized in that: include: A center positioning unit, used to obtain the center of the overlay mark in the overlay mark image, wherein the overlay mark image is symmetrical in the horizontal direction and the vertical direction; A first region generating unit, used to generate edge point extraction regions in horizontal and vertical directions respectively according to the center of the overlay mark; A grayscale projection unit, used for performing grayscale projection on the overlay mark image in edge point extraction areas in the horizontal direction and the vertical direction respectively to obtain a grayscale curve; An edge point extraction unit is used to calculate the gradient curves corresponding to the grayscale curves in the horizontal direction and the vertical direction respectively, determine the gradient extreme value points in the gradient curve as edge points, and mark the inner edge points and the outer edge points in the edge points; A second region generating unit, configured to generate an inner layer measurement region according to inner layer edge points in the horizontal direction and the vertical direction, and to generate an outer layer measurement region according to outer layer edge points in the horizontal direction and the vertical direction; The first area generation unit is specifically used to generate an edge point extraction area in the horizontal direction with the center of the overlay mark as the center, the width as the preset ratio value of the overlay mark area width, and the height as the preset ratio value of the overlay mark area height; and to generate an edge point extraction area in the vertical direction with the center of the overlay mark as the center, the width as the preset ratio value of the overlay mark area width, and the height as the overlay mark area height.

7. An electronic device, characterized in that: The method comprises at least one processor and a memory connected to the processor, wherein: The memory is used to store computer programs; The processor is used to execute the computer program so that the electronic device can implement the method for generating an overlay mark measurement area as claimed in any one of claims 1 to 5.

8. A computer program product, characterized in that The method comprises computer-readable instructions, and when the computer-readable instructions are executed on an electronic device, the electronic device implements the method for generating an overlay mark measurement area according to any one of claims 1 to 5.

9. A computer storage medium, characterized in that: The storage medium carries one or more computer programs, and when the one or more computer programs are executed by an electronic device, the electronic device can implement the method for generating an overlay mark measurement area as described in any one of claims 1 to 5.

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