Redundancy filling method and device, storage medium and electronic equipment

Abstract

The invention discloses a redundancy filling method and device, a storage medium and electronic equipment. The method comprises the steps that a to-be-filled circuit layout is obtained, the circuit layout comprises a plurality of layout patterns, and all the layout patterns in the circuit layout have first average reflectivity; on the basis of the first average reflectivity, redundant graphic units in a preset redundant graphic library are screened through a genetic algorithm, and a redundant graphic combination capable of being used for filling is obtained; wherein the redundant graph combination capable of being used for filling is a combination of redundant graph units, the average reflectivity of which is closest to the first average reflectivity, in the preset redundant graph library; and filling the circuit layout by utilizing the redundant graph combination capable of being used for filling. By adopting the scheme, the improvement effect on the graphic load effect can be improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a redundant filling method, device, storage medium and electronic equipment. Background Art

[0002] In the design and manufacture of integrated circuits (ICs), pattern loading effect is a key factor in determining device performance. Uneven pattern distribution will lead to temperature differences between devices during the annealing process, uneven stress distribution, and ultimately lead to problems such as wafer warpage, overlay shift, and device performance mismatch.

[0003] To address various problems caused by the graphic load effect, the main methods currently used include the following two: the first is to adjust the uniformity of device heating by changing the process (such as heating annealing method); the second is to compensate for device performance through subsequent light doping and other means.

[0004] However, the above two methods have limited effects on improving the graphics load effect. Summary of the invention

[0005] The problem to be solved by the present invention is: how to improve the improvement effect on the graphics load effect.

[0006] To solve the above problem, an embodiment of the present invention provides a redundant filling method, the method comprising:

[0007] Acquire a circuit layout to be filled, wherein the circuit layout includes a plurality of layout graphics, and all the layout graphics in the circuit layout have a first average reflectivity;

[0008] Based on the first average reflectivity, redundant graphic units in a preset redundant graphic library are screened using a genetic algorithm to obtain a redundant graphic combination that can be used for filling; wherein the redundant graphic combination that can be used for filling is a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the first average reflectivity;

[0009] The circuit layout is filled using the redundant pattern combination that can be used for filling.

[0010] Optionally, the preset redundant graphic library includes a plurality of redundant graphic units and an average reflectivity corresponding to each redundant graphic unit, wherein the film layer in each redundant graphic unit is different in at least one of the following aspects: shape, size, property and quantity.

[0011] Optionally, based on the first average reflectivity, using a genetic algorithm to screen redundant graphic units in a preset redundant graphic library to obtain a redundant graphic combination that can be used for filling includes:

[0012] Determining a region to be filled in the circuit layout;

[0013] The following method is used to obtain a redundant pattern combination that can be used for filling in a first area to be filled, where the first area to be filled is any area to be filled in the circuit layout:

[0014] Selecting a plurality of redundant graphic units matching the first area to be filled from a preset redundant graphic library;

[0015] The screened redundant graphic units are combined, and the average reflectivity of any redundant graphic unit combination is calculated until a redundant graphic combination that can be used for filling in the first area to be filled is obtained.

[0016] Optionally, the absolute value of the difference between an average reflectivity of the redundant pattern combination available for filling and the first average reflectivity is the smallest.

[0017] Optionally, the method further comprises:

[0018] Calculate the first average reflectivity of all layout patterns in the circuit layout.

[0019] An embodiment of the present invention further provides a redundant filling device, the device comprising:

[0020] An acquisition unit, adapted to acquire a circuit layout to be filled, wherein the circuit layout includes a plurality of layout patterns, and all the layout patterns in the circuit layout have a first average reflectivity;

[0021] A screening unit is adapted to screen the redundant graphic units in the preset redundant graphic library using a genetic algorithm based on the first average reflectivity to obtain a redundant graphic combination that can be used for filling; wherein the redundant graphic combination that can be used for filling is a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the first average reflectivity;

[0022] The filling unit is adapted to fill the circuit layout with the redundant pattern combination that can be used for filling.

[0023] Optionally, the preset redundant graphic library includes a plurality of redundant graphic units and an average reflectivity corresponding to each redundant graphic unit, wherein the film layer in each redundant graphic unit is different in at least one of the following aspects: shape, size, property and quantity.

[0024] Optionally, the screening unit comprises:

[0025] A determination subunit, adapted to determine a to-be-filled area of ​​the circuit layout;

[0026] The screening subunit is adapted to screen out a number of redundant graphic units matching the first area to be filled from a preset redundant graphic library, combine the screened redundant graphic units, and calculate the average reflectivity of any combination of redundant graphic units until a redundant graphic combination that can be used for filling in the first area to be filled is obtained; the first area to be filled is any area to be filled in the circuit layout.

[0027] Optionally, the absolute value of the difference between an average reflectivity of the redundant pattern combination available for filling and the first average reflectivity is the smallest.

[0028] Optionally, the device further comprises:

[0029] The calculation unit is adapted to calculate a first average reflectivity of all layout patterns in the circuit layout.

[0030] An embodiment of the present invention further provides a computer-readable storage medium on which a computer program is stored. The computer program is executed by a processor to implement the steps of any of the above methods.

[0031] An embodiment of the present invention further provides an electronic device, including a memory and a processor, wherein the memory stores a computer program that can be run on the processor, and the processor executes the steps of any of the above methods when running the computer program.

[0032] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0033] By applying the scheme of the present invention, redundant graphic units in a preset redundant graphic library are screened using a genetic algorithm, and a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the average reflectivity of the layout graphic is used as a redundant graphic combination that can be finally used for filling. After the circuit layout is filled with the redundant graphic combination that can be used for filling, the reflectivity of the redundant filling area can match the reflectivity of the layout graphic, thereby making the graphic distribution of the entire circuit layout more uniform. In the subsequent process, the heating of the entire circuit layout is more uniform, the stress can be more balanced, and the improvement effect on the graphic load effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a flow chart of a redundant filling method in an embodiment of the present invention;

[0035] Figure 2 It is a schematic diagram of the layout graphics on a circuit layout;

[0036] Figures 3 to 11is a schematic diagram of a redundant graphics unit in an embodiment of the present invention;

[0037] Fig.12 is a schematic diagram of a process of obtaining a redundant graphic combination that can be used for filling by using a genetic algorithm in an embodiment of the present invention;

[0038] Figures 13 to 17 is a schematic diagram of different redundant graphic combinations in an embodiment of the present invention;

[0039] Fig.18 This is a schematic diagram before the circuit layout is filled;

[0040] Fig.19 yes Fig.18 Schematic diagram after the circuit layout is filled;

[0041] Fig. 20 This is a schematic diagram of the surface temperature distribution of the same wafer before and after filling;

[0042] Fig.21 It is a structural schematic diagram of a redundant filling device in an embodiment of the present invention. DETAILED DESCRIPTION

[0043] At present, in order to solve various problems caused by the pattern loading effect, either the uniformity of device heating is adjusted by changing the process, or the device performance is compensated by subsequent light doping and other means. Although these two methods can improve the pattern loading effect, the improvement effect is very limited and the cost is high.

[0044] The inventors have found that redundant (Dummy) filling is an efficient and feasible solution to improve the graphic load effect. The so-called redundant filling is to fill the redundant graphics into the unoccupied area to improve the layout uniformity, thereby reducing the process variation caused by the graphic load. During the annealing process, the film layers (film) of different properties and different shapes of redundant graphics have different reflectivities to light. For example, the length (Length) of the shallow trench isolation (STI) and the length of the active area (AA) will affect the temperature of the layout graphics during annealing. Therefore, different redundant graphics can be added to match the reflectivity of the layout graphics, thereby affecting the distribution of the layout graphics' endothermic stress.

[0045] To this end, the present invention provides a redundant filling method. The method is applied to screen redundant graphic units in a preset redundant graphic library using a genetic algorithm, and a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the average reflectivity of the layout graphic is used as the final redundant graphic combination that can be used for filling. After the circuit layout is filled with the redundant graphic combination that can be used for filling, the graphic distribution of the entire circuit layout can be made more uniform, the heat can be more uniform, the stress can be more balanced, and the improvement effect on the graphic load effect is naturally better.

[0046] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0047] Reference Figure 1 , an embodiment of the present invention provides a redundant filling method, the method may include the following steps:

[0048] Step 11, obtain the circuit layout to be filled.

[0049] The circuit layout includes a plurality of layout graphics, and all the layout graphics in the circuit layout have a first average reflectivity.

[0050] In a specific implementation, the circuit layout may be an integrated circuit layout. An integrated circuit layout is a planar geometric shape description of the physical situation of a real integrated circuit. The physical design of the circuit layout converts the results of logic synthesis into a circuit layout file through layout and wiring technology, and the corresponding file format is a graphic data stream (GDS). The file contains the shape, area and position information of each hardware unit on the chip.

[0051] In a specific implementation, the circuit layout may include a metal wiring layer or a metal interconnection layer. The circuit layout may be an integrated circuit layout that has undergone a metallization or multi-layer interconnection process but has not undergone a redundant filling process. The circuit layout may include multiple layout graphics. For example, referring to Figure 2 , the circuit layout may include a first layout pattern 21 to an eighth layout pattern 28. Each layout pattern may be composed of at least one layout pattern unit, and each layout pattern unit may include at least one film layer. When the layout pattern unit includes more than two film layers, the shapes and properties of the two or more film layers may be the same or different, and the two or more film layers may have a variety of arrangements.

[0052] In a specific implementation, the first average reflectivity of all layout patterns in the circuit layout can be directly obtained.

[0053] In one embodiment of the present invention, after the circuit layout is acquired, the first average reflectivity of all layout graphics in the circuit layout may be calculated using formula (1).

[0054] The first average reflectivity is obtained by calculating the reflectivity of each layout pattern in the circuit layout and then averaging the average reflectivity of each layout pattern. The average reflectivity of the layout pattern is the average of the average reflectivity of each layout pattern unit in the layout pattern. The average reflectivity of a layout pattern unit can be the ratio of the product of the average reflectivity of each film layer in the layout pattern unit and the area of ​​the film layer to the area of ​​the layout pattern unit, which can be specifically referred to as shown in formula (1):

[0055]

[0056] Wherein, μ′ represents the average reflectivity of a layout graphic unit, j represents the film layer j in the layout graphic unit, M represents the total number of film layers in the layout graphic unit, and ε j represents the reflectivity of film layer j, S′ j represents the area of ​​film layer j, S′ window Represents the total area of ​​each film layer of the layout graphic unit.

[0057] In a specific implementation, the reflectivity of film layers of different properties may be known. For example, the reflectivity of a silicon layer is 0.43, the reflectivity of an oxide layer is 0.8, the reflectivity of a polysilicon layer over oxide is 0.46, and the reflectivity of a polysilicon layer over silicon is 0.55.

[0058] Step 12: Based on the first average reflectivity, a genetic algorithm is used to screen redundant graphic units in a preset redundant graphic library to obtain a redundant graphic combination that can be used for filling.

[0059] The redundant graphic combination that can be used for filling is a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the first average reflectivity.

[0060] In a specific implementation, a redundant graphic library may be pre-set, the redundant graphic library including a plurality of redundant graphic units and an average reflectivity corresponding to each redundant graphic unit, wherein the film layers in each redundant graphic unit differ in at least one of the following: shape, size, property, and quantity. Specifically, the film layers in each redundant graphic unit may differ in only shape, size, property, or quantity, or may differ in two or more of the shape, size, property, and quantity. For example, the redundant graphic library may include Figures 3 to 11 The redundant graphics unit shown in .

[0061] In a specific implementation, a genetic algorithm is a series of search algorithms inspired by the theory of natural evolution, a method for obtaining an optimal solution by imitating the process of natural selection and reproduction. The genetic algorithm mainly generates an initial population through coding, calculates the corresponding fitness function, and obtains the optimal solution after multiple iterative operations. In the present invention, the optimal solution obtained by using the genetic algorithm refers to a combination of redundant graphic units in a preset redundant graphic library whose average reflectivity is closest to the first average reflectivity, that is, a redundant graphic combination that can be used for filling.

[0062] In one embodiment of the present invention, the method of screening redundant graphic units in a preset redundant graphic library using a genetic algorithm based on the first average reflectivity to obtain a redundant graphic combination that can be used for filling may include:

[0063] Determining a region to be filled in the circuit layout;

[0064] The following method is used to obtain a redundant graphic combination that can be used for filling in a first area to be filled, where the first area to be filled is any area to be filled in the circuit layout: a plurality of redundant graphic units that match the first area to be filled are screened out from a preset redundant graphic library; the screened redundant graphic units are combined, and the average reflectivity of any combination of redundant graphic units is calculated until a redundant graphic combination that can be used for filling in the first area to be filled is obtained.

[0065] In a specific implementation, the difference between the average reflectivity of the redundant graphic combination that can be used for filling and the first average reflectivity is the smallest in absolute value. In other words, the optimal solution obtained by the genetic algorithm is the combination of redundant graphic units with the smallest absolute difference between the first average reflectivity and the first average reflectivity.

[0066] Step 13, filling the circuit layout using the redundant pattern combination that can be used for filling.

[0067] In a specific implementation, the circuit layout can be scanned to determine each area to be filled in the circuit layout, and then a genetic algorithm can be used to obtain redundant graphic combinations that can be used to fill each area to be filled, and finally the redundant graphic combinations that can be used to fill are filled into the corresponding area to be filled.

[0068] Through genetic algorithms, the optimal redundant filling method is provided for the unoccupied space in the circuit layout, and attempts are made to find a redundant pattern combination with the minimum absolute value of the difference between the reflectivity after filling with different redundant patterns and the overall average reflectivity of the layout pattern, so that the entire layout pattern is heated more evenly, the stress can be more balanced, and finally the pattern load effect in IC design is improved. The solution of the present invention can provide an optimal redundant filling method in the early stage of design, reduce the trial and error cost, and save the design cycle.

[0069] Fig.12 FIG. 1 is a schematic diagram of a process of obtaining a redundant graphic combination that can be used for filling by using a genetic algorithm in one embodiment of the present invention. Fig.12 , the process may include the following steps:

[0070] Step 121, creating a preset redundant graphics library.

[0071] In a specific implementation, the redundant graphic library includes a plurality of redundant graphic units and an average reflectivity corresponding to each redundant graphic unit, wherein the film layers in each redundant graphic unit have at least one of the following differences: shape, size, property and quantity. For example, film layers of different shapes can be combined to form a redundant graphic unit.

[0072] Step 122, calculating the average reflectivity of each redundant graphic unit in the redundant graphic library.

[0073] In a specific implementation, the normalization function can be used to calculate the reflectivity of each redundant graphic unit in the redundant graphic library. Specifically, the normalization function can obtain the reflectivity of the redundant graphic unit based on the shape, size, film layers included, and design rules of the redundant graphic unit. The design rule refers to whether the design of the redundant graphic unit itself meets the design rule constraints.

[0074] In one embodiment of the present invention, the average reflectivity of the redundant graphic unit can be calculated with reference to formula (2):

[0075]

[0076] Wherein, μ represents the average reflectivity of a redundant graphic unit, i represents the film layer i in the redundant graphic unit, n represents the total number of film layers in the redundant graphic unit, and ε i represents the reflectivity of film layer i, S i represents the area of ​​film layer i, S window Represents the total area of ​​each film layer of the redundant graphic unit.

[0077] In a specific implementation, the reflectivity of film layers of different properties may be known. For example, the reflectivity of a silicon layer is 0.43, the reflectivity of an oxide layer is 0.8, the reflectivity of a polysilicon layer over oxide is 0.46, and the reflectivity of a polysilicon layer over silicon is 0.55.

[0078] by Figure 7 Taking the redundant graphic unit shown in as an example, the average reflectivity μ of the redundant graphic unit can be expressed as:

[0079] μ=[ε poly *S poly +ε silicon *S silicon ] / (S poly +S silicon )

[0080] =(0.55*S poly +0.43*S ilicon ) / (S poly +S silicon )

[0081] Step 123: For the first area to be filled, select a good redundant graphic unit from the redundant graphic library.

[0082] In a specific implementation, the first area to be filled is any area to be filled in the circuit layout. Taking the first area to be filled as an example, when performing redundant filling on the first area to be filled, a redundant graphic unit close to the first average reflectivity can be selected from the redundant graphic library based on the first average reflectivity as the first initial population of the genetic algorithm. The difference range between the average reflectivity of the redundant graphic unit selected from the redundant graphic library and the first average reflectivity can be set according to actual conditions.

[0083] It can be understood that the more redundant graphic units are selected from the redundant graphic library, the closer the actual average reflectivity of the redundant graphic combination that can be used for filling is to the first average reflectivity, but the amount of calculation will also be greater.

[0084] Step 124, mutating and combining the redundant graphic units in the first initial group to form a first redundant graphic combination library.

[0085] In a specific implementation, based on the size of the first area to be filled and the size of the redundant graphic unit itself, a corresponding number of redundant graphic units can be selected in the first initial group for combination to obtain different redundant graphic combinations. All redundant graphic combinations constitute a first redundant graphic combination library. In the first redundant graphic combination library, the number of redundant graphics in each redundant graphic combination can be the same or different. Among them, the so-called mutual mutation refers to splitting the film layer in each redundant graphic unit and reorganizing it with the film layer in other redundant graphics to form a new redundant graphic unit. The so-called combination refers to combining redundant graphic units. The redundant graphic units that can be combined include both new redundant graphic units formed after mutual mutation and redundant graphic units in the initial group.

[0086] Figures 13 to 17 Five redundant graphic combination structures are shown. The first redundant graphic combination library may include but is not limited to these five redundant graphic combinations. Each redundant graphic combination matches the size of the first area to be filled.

[0087] Step 125, calculating the average reflectivity of each redundant pattern combination in the first redundant pattern combination library, and selecting the first redundant pattern combination.

[0088] The first redundant pattern combination is a redundant pattern combination in the first redundant pattern combination library that is closest to the first average reflectivity.

[0089] In a specific implementation, the average reflectivity of each redundant graphic combination is the average of the average reflectivities of all redundant graphic units in the combination.

[0090] In a specific implementation, the difference between the average reflectivity of each redundant pattern combination and the first average reflectivity is calculated, and the absolute value is taken, and the redundant pattern combination with the smallest absolute value is selected as the first redundant pattern combination.

[0091] Step 126, determining whether the first redundant pattern combination is a redundant pattern combination closest to the first average reflectivity.

[0092] In a specific implementation, the first redundant pattern combination is a redundant pattern combination in the first redundant pattern combination library that is closest to the first average reflectivity, but is not necessarily the closest redundant pattern combination among all redundant pattern combinations.

[0093] In a specific implementation, steps 123 to 124 may be repeated to construct multiple redundant graphic combination libraries, and the redundant graphic combination closest to the first average reflectivity in each redundant graphic combination library is obtained. For ease of description, the redundant graphic combination libraries other than those passing through the first redundant graphic combination library are collectively referred to as the second redundant graphic combination library. The redundant graphic combination closest to the first average reflectivity in the second redundant graphic combination library is referred to as the second redundant graphic combination.

[0094] By comparing the absolute value of the difference between the first redundant pattern combination and the first average reflectivity with the absolute value of the difference between the second redundant pattern combination and the first average reflectivity, it is determined whether the absolute value of the difference between the first redundant pattern combination and the first average reflectivity is the minimum value. If so, step 127 is executed; otherwise, the iterative operation is continued, that is, steps 123 to 126 are repeated until the redundant pattern combination with the smallest absolute value of the difference with the first average reflectivity is found.

[0095] Step 127: Among all the redundant pattern combinations, the redundant pattern combination with the smallest absolute value of difference from the first average reflectivity is used as the redundant pattern combination that can be used for filling.

[0096] For other areas to be filled, the above method for selecting a redundant graphic combination that can be used for filling in the first area to be filled can be referred to to select a redundant graphic combination that can be used for filling in other areas to be filled, and examples will not be given one by one here.

[0097] Fig.18 This is a schematic diagram of the circuit layout before and after filling. The blank areas in the figure are not to be filled. Fig.19 For Fig.18 Schematic diagram after the circuit layout is filled. Fig.19 In FIG. 1 , A, B, C, D, F, L, K, J, and M represent redundant graphic unit identifiers. The redundant graphic unit may be a redundant unit in a redundant graphic library, or a new redundant graphic unit obtained by mutating and combining the redundant units in the redundant graphic library. The redundant units are combined to form a redundant graphic combination that can be used for filling in the area to be filled. For example, for the area to be filled 180, the redundant graphic combination that can be used for filling is AABCD. For the area to be filled 181, the redundant graphic combination that can be used for filling is DBCA.

[0098] Fig. 20 The figure shows the surface temperature distribution of the same wafer before and after filling. Fig. 20 (a) is a schematic diagram of the temperature distribution on the wafer surface before wafer filling. Fig. 20 (b) is a schematic diagram of the temperature distribution on the wafer surface after the wafer is filled. Fig. 20(a) It can be seen that before the wafer is filled, the temperature distribution on the wafer surface is uneven due to the pattern load effect. Fig. 20 As shown in (b), the surface temperature of the wafer is uniform.

[0099] By adopting the redundant filling method in the embodiment of the present invention and optimizing through a genetic algorithm, a redundant pattern combination that can be used for filling is obtained, which is the best redundant pattern combination. The redundant pattern combination that can be used for filling has a reflectivity close to the first average reflectivity. Therefore, during the annealing heating process, the entire wafer will be heated more evenly, which will make the stress distribution of the wafer more uniform and balanced, and will greatly reduce the impact of stress on the wafer.

[0100] In addition, by adopting the solution of the present invention, the size and design rules of redundant graphic units can be closely linked to the actual production of wafers, with repeated feedback and continuous evolution, so that the current optimal solution can be obtained and used at any time.

[0101] In order to enable those skilled in the art to better understand and implement the present invention, the device, test system, electronic device and computer-readable storage medium corresponding to the above method are described in detail below.

[0102] Reference Fig.21 The embodiment of the present invention further provides a redundant filling device 210, which may include: an acquisition unit 211, a screening unit 212, and a filling unit 213. Among them:

[0103] The acquisition unit 211 is adapted to acquire a circuit layout to be filled, wherein the circuit layout includes a plurality of layout graphics, and all the layout graphics in the circuit layout have a first average reflectivity;

[0104] The screening unit 212 is adapted to screen the redundant graphic units in the preset redundant graphic library using a genetic algorithm based on the first average reflectivity to obtain a redundant graphic combination that can be used for filling; wherein the redundant graphic combination that can be used for filling is a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the first average reflectivity;

[0105] The filling unit 213 is adapted to fill the circuit layout with the redundant pattern combination available for filling.

[0106] In one embodiment of the present invention, the preset redundant graphic library includes multiple redundant graphic units and an average reflectivity corresponding to each redundant graphic unit, wherein the film layer in each redundant graphic unit has at least one of the following differences: shape, size, property and quantity.

[0107] In an embodiment of the present invention, the screening unit 212 may include: a determination subunit 2121 and a screening subunit 2122. Among them:

[0108] The determining subunit 2121 is adapted to determine a to-be-filled area of ​​the circuit layout;

[0109] The screening subunit 2122 is suitable for screening out a number of redundant graphic units matching the first area to be filled from a preset redundant graphic library, combining the screened redundant graphic units, and calculating the average reflectivity of any combination of redundant graphic units until a redundant graphic combination that can be used for filling in the first area to be filled is obtained; the first area to be filled is any area to be filled in the circuit layout.

[0110] In one embodiment of the present invention, the absolute value of the difference between the average reflectivity of the redundant pattern combination available for filling and the first average reflectivity is the smallest.

[0111] In an embodiment of the present invention, the redundant filling device 210 may further include: a calculation unit 213, wherein the calculation unit 213 is adapted to calculate a first average reflectivity of all layout patterns in the circuit layout.

[0112] An embodiment of the present invention further provides a computer-readable storage medium on which a computer program is stored. The computer program is executed by a processor to implement the steps of any of the above methods.

[0113] In a specific implementation, the computer-readable storage medium may include: ROM, RAM, magnetic disk or optical disk, etc.

[0114] An embodiment of the present invention further provides an electronic device, comprising a memory and a processor, wherein the memory stores a computer program that can be run on the processor, and the processor executes the steps of any of the above methods when running the computer program.

[0115] Regarding the various modules / units included in the various devices and products described in the above embodiments, they can be software modules / units, or hardware modules / units, or they can be partially software modules / units and partially hardware modules / units. For example, for various devices and products applied to or integrated in a chip, the various modules / units included therein can all be implemented in the form of hardware such as circuits, or at least some of the modules / units can be implemented in the form of software programs, which run on a processor integrated inside the chip, and the remaining (if any) modules / units can be implemented in the form of hardware such as circuits; for various devices and products applied to or integrated in a chip module, the various modules / units included therein can all be implemented in the form of hardware such as circuits, and different modules / units can be located in the same component (such as a chip, circuit module, etc.) or different components of the chip module, or at least some of the modules / units can be implemented in the form of hardware such as circuits. The element can be implemented in the form of a software program, which runs on a processor integrated inside the chip module, and the remaining (if any) modules / units can be implemented in the form of hardware such as circuits; for various devices and products applied to or integrated in the terminal, the various modules / units contained therein can be implemented in the form of hardware such as circuits, and different modules / units can be located in the same component (for example, chip, circuit module, etc.) or in different components in the terminal, or, at least some modules / units can be implemented in the form of a software program, which runs on a processor integrated inside the terminal, and the remaining (if any) modules / units can be implemented in the form of hardware such as circuits.

[0116] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A redundant filling method, characterized in that: include: Acquire a circuit layout to be filled, wherein the circuit layout includes a plurality of layout graphics, and all the layout graphics in the circuit layout have a first average reflectivity; Based on the first average reflectivity, redundant graphic units in a preset redundant graphic library are screened using a genetic algorithm to obtain a redundant graphic combination that can be used for filling; wherein the redundant graphic combination that can be used for filling is a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the first average reflectivity; The circuit layout is filled using the redundant pattern combination that can be used for filling.

2. The redundant filling method according to claim 1, characterized in that: The preset redundant graphic library includes a plurality of redundant graphic units and an average reflectivity corresponding to each redundant graphic unit, wherein the film layers in each redundant graphic unit are different in at least one of the following aspects: shape, size, property and quantity.

3. The redundant filling method according to claim 1, characterized in that: The method of screening redundant graphic units in a preset redundant graphic library by using a genetic algorithm based on the first average reflectivity to obtain a redundant graphic combination that can be used for filling includes: Determining a region to be filled in the circuit layout; The following method is used to obtain a redundant pattern combination that can be used for filling in a first area to be filled, where the first area to be filled is any area to be filled in the circuit layout: Selecting a plurality of redundant graphic units matching the first area to be filled from a preset redundant graphic library; The screened redundant graphic units are combined, and the average reflectivity of any redundant graphic unit combination is calculated until a redundant graphic combination that can be used for filling in the first area to be filled is obtained.

4. The redundant filling method according to claim 3, characterized in that: The absolute value of the difference between the average reflectivity of the combination of redundant patterns available for filling and the first average reflectivity is the smallest.

5. The redundant filling method according to claim 1, characterized in that: Also includes: Calculate the first average reflectivity of all layout patterns in the circuit layout.

6. A redundant filling device, characterized in that: include: An acquisition unit, adapted to acquire a circuit layout to be filled, wherein the circuit layout includes a plurality of layout patterns, and all the layout patterns in the circuit layout have a first average reflectivity; A screening unit is adapted to screen the redundant graphic units in the preset redundant graphic library using a genetic algorithm based on the first average reflectivity to obtain a redundant graphic combination that can be used for filling; wherein the redundant graphic combination that can be used for filling is a combination of redundant graphic units in the preset redundant graphic library whose average reflectivity is closest to the first average reflectivity; The filling unit is adapted to fill the circuit layout with the redundant pattern combination that can be used for filling.

7. The redundant filling device according to claim 6, characterized in that: The preset redundant graphic library includes a plurality of redundant graphic units and an average reflectivity corresponding to each redundant graphic unit, wherein the film layers in each redundant graphic unit are different in at least one of the following aspects: shape, size, property and quantity.

8. The redundant filling device according to claim 6, characterized in that: The screening unit comprises: A determination subunit, adapted to determine a to-be-filled area of ​​the circuit layout; The screening subunit is adapted to screen out a number of redundant graphic units matching the first area to be filled from a preset redundant graphic library, combine the screened redundant graphic units, and calculate the average reflectivity of any combination of redundant graphic units until a redundant graphic combination that can be used for filling in the first area to be filled is obtained; the first area to be filled is any area to be filled in the circuit layout.

9. The redundant filling device according to claim 8, characterized in that: The absolute value of the difference between the average reflectivity of the combination of redundant patterns available for filling and the first average reflectivity is the smallest.

10. The redundant filling device according to claim 6, characterized in that: Also includes: The calculation unit is adapted to calculate a first average reflectivity of all layout patterns in the circuit layout.

11. A computer-readable storage medium having a computer program stored thereon, characterized in that: The computer program is executed by a processor to implement the steps of the method according to any one of claims 1 to 5.

12. An electronic device comprising a memory and a processor, wherein the memory stores a computer program that can be run on the processor, wherein: When the processor runs the computer program, the steps of the method according to any one of claims 1 to 5 are performed.

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