FOUP automatic carrying equipment capable of avoiding wafer damage

Abstract

The invention discloses an FOUP automatic carrying device capable of avoiding wafer damage, which comprises a main shell cover, a cover sealing type protection mechanism and a self-clamping pickup mechanism, the cover sealing type protection mechanism is arranged on the main shell cover in a structure state capable of being opened and closed in an overturning manner, and the cover sealing type protection mechanism performs cover sealing type butt joint operation with an FOUP in an unfolded state; the main shell cover is arranged on the left side of the main shell cover, the self-clamping pickup mechanism is arranged on the left side of the main shell cover in a closed state, the self-clamping pickup mechanism is arranged on the left side of the main shell cover in a horizontal state, automatic fixing operation is carried out in the wafer pickup process by adopting a dual mode of adsorption locking and clamping limiting, and automatic pickup operation of the wafer is carried out by matching with sliding position adjustment. According to the FOUP automatic carrying equipment capable of preventing the wafers from being damaged, closed type covering protection is carried out on the wafers, pollution and damage caused by contact between the wafers and the external environment in the carrying process are reduced, and in addition, through the dual modes of adsorption locking and clamping limiting, the accidental sliding phenomenon in the picking process is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field related to FOUP wafer handling, and in particular to a FOUP automatic handling device for avoiding damage to wafers. Background Art

[0002] As a container, the front-opening wafer transfer box is used to protect, transport and store wafers in the semiconductor manufacturing process. Compared with other wafer carriers, the front-opening wafer transfer box has significant advantages. Its design reduces impurities generated by wafer displacement friction, that is, reduces wafer contamination and loss during transportation and storage. When in use, the front-opening wafer transfer box requires automated handling equipment to perform automated wafer picking and placement operations in the front-opening wafer transfer box.

[0003] After searching the invention patent with patent number CN111916381B, a wafer material box picking auxiliary mechanism is disclosed, including a mounting horizontal plate, a connecting plate is fixed to the left top surface of the top surface of the mounting horizontal plate, and side fixing plates are fixed to the front and rear of the top surface of the connecting plate. The inner side walls of the two side fixing plates are formed with front and rear corresponding placement grooves, and the wafer is placed in the corresponding two placement grooves. The present invention can automatically push the wafer out, making it convenient for the grasping mechanism to directly grasp without touching other wafers, so that when there is a certain error in the material picking, it will not touch other wafers, ensuring the processing effect.

[0004] The FOUP wafer handling equipment used in the above patents and prior art still has certain disadvantages, such as: 1. In the above patent, the grabbing and adsorption block moves to the bottom of the wafer, and the suction cup in the grabbing and adsorption block contacts and adsorbs the wafer. However, the above grabbing method cannot achieve clamping and limiting of the wafer through single adsorption fixation, resulting in insufficient stability and firmness of the above grabbing method. In the actual operation of grabbing and handling, it is easy to accidentally fall off due to loose adsorption, causing damage to the wafer; 2. The above patent adopts an open grabbing method, and the wafer handling operation is performed in an open state, which is the same as the existing method of picking up wafers in front-opening wafer cassettes. It is impossible to perform closed covering protection during wafer handling, that is, it is impossible to reduce the contact between the wafer and the external environment during handling, making the wafer easily contaminated and damaged during handling; Therefore, we propose a FOUP automatic handling device that avoids damaging wafers, so as to solve the above-mentioned problems. Summary of the invention

[0005] The purpose of the present invention is to provide a FOUP automatic handling device that avoids damage to wafers, so as to solve the problems raised in the above background technology that the wafers cannot be clamped and limited, and closed covering protection cannot be performed during wafer transportation, causing wafer damage.

[0006] To achieve the above object, the present invention provides the following technical solution: a FOUP automatic handling device for avoiding damage to wafers, comprising: A main housing, the right end of which is fixedly mounted on the execution end of the robot arm by bolts; Also includes: A cover-sealed protection mechanism, which is symmetrically arranged about the horizontal center axis of the main housing, and is arranged on the main housing in a flip-open and -closed structural state, so that it can perform a cover-sealed docking operation with the FOUP in an unfolded state, and perform a closed covering protection treatment on the wafer in a closed state; The self-clamping picking mechanism is horizontally arranged on the left side of the main shell cover. It adopts the dual methods of adsorption locking and clamping limit to perform automatic fixing operations in wafer picking, and it cooperates with the sliding position adjustment to perform automatic wafer picking operations.

[0007] Preferably, a main track of an integrated structure is provided in the middle of the shell cavity of the main shell cover, and a main rack portion of an integrated structure is provided on the right groove wall of the narrow part of the "convex" shaped slide groove in the main track.

[0008] Preferably, the cover-sealed protection mechanism comprises a secondary housing, a paddle and a transmission rod, the secondary housing close to the main housing is movably stuck in the housing cavity of the main housing, and the secondary housing forms a flip structure on the main housing, a secondary track of an integrated structure is provided in the middle of the housing cavity of the secondary housing, and a secondary rack of an integrated structure is provided on the right side of the narrow part of the "convex" shaped slide groove in the secondary track, and the bracket part in the secondary track forms a rotating structure on the bracket part in the main track with the assistance of a shaft column; The shaft column end of the bracket part in the secondary track is fixedly connected to one end of the shifting plate by bolts, and the other end of the shifting plate is connected to the end of the transmission rod in a sliding manner.

[0009] Preferably, the transmission rod and the shift plate member are arranged in an inclined state, the transmission rod forms a sliding structure on the shell cavity wall of the main shell cover, and the end of the transmission rod away from the shift plate member is fixedly connected to the connecting frame of the pneumatic telescopic cylinder by bolts, and the pneumatic telescopic cylinder is fixedly installed on the right shell wall of the main shell cover by bolts.

[0010] Preferably, the self-clamping picking mechanism comprises a "U"-shaped bracket, an active plate, a main clamping column, a suction cup and an auxiliary clamping column, the upper sides of the two longitudinal frames in the "U"-shaped bracket are slidably connected with the active plate, and the lower side of the left end of the active plate is fixedly connected with a movable seat by bolts, and the movable seat and the active plate form a synchronous sliding structure, and the middle part of the movable seat is provided with a main clamping column that can telescopically slide; Wherein, the groove walls on both sides of the front and rear sides of the left end of the longitudinal frame of the "U"-shaped bracket are provided with "L"-shaped limiting grooves, and the longitudinal groove path in the "L"-shaped limiting groove is arranged in an inclined state; Wherein, a suction cup is fixedly connected to the middle of the longitudinal frame of the "U"-shaped bracket, and the suction cup is connected to the middle airway of the longitudinal frame of the "U"-shaped bracket; Among them, a driven plate is slidably connected in the groove cavity of the right section of the longitudinal frame in the "U"-shaped bracket, and a secondary clamping column is fixedly connected to the upper side of the right end of the driven plate by bolts, and the secondary clamping column and the driven plate form a synchronous sliding structure.

[0011] Preferably, strip-shaped limit grooves are provided on the front and rear sides of the movable seat, the right side wall of the movable seat is fixedly connected to the rod body part of the piston rod by bolts, and the two piston rods in the movable seat are movably inserted into the air passages on both sides of the longitudinal frame in the "U"-shaped bracket.

[0012] Preferably, a reset spring is installed at the connection between the movable seat and the main clamping column, and the middle part of the main clamping column is fixedly connected with a vertical pin rod member by bolts, and the pin rod member movably penetrates the strip limiting groove, and the pin rod member is connected to the "L"-shaped limiting groove in a sliding manner.

[0013] Preferably, a gear member is rotatably connected in the groove cavity of the right section of the longitudinal frame in the "U"-shaped bracket, and the upper end of the gear member is meshed and connected with the rack-shaped groove cavity wall in the active plate, and the lower end of the gear member is meshed and connected with the rack-shaped frame cavity wall in the driven plate, and the rack-shaped frame cavity wall in the driven plate and the rack-shaped groove cavity wall in the active plate are arranged in opposite directions.

[0014] Preferably, the right end bending portion of the "U"-shaped bracket is fixedly connected to the housing seat by bolts, and a worm gear is connected to the upper housing cavity of the housing seat through bearing-assisted rotation, and driving wheels are fixedly installed at both ends of the shaft column in the worm gear by bolts; The left side of the worm wheel is meshed with a worm member, and the worm member is assisted by a bearing to form a rotating structure in the upper shell cavity of the shell seat, and the lower end of the worm member is fixedly connected to the output end of the servo motor by bolts, and the servo motor is fixedly installed in the lower shell cavity of the shell seat by bolts; Wherein, both the front and rear sides of the lower end of the shell seat are rotatably connected with driven wheels, and the shell seat forms a sliding structure on the main track with the assistance of the driving wheel and the driven wheel.

[0015] Preferably, the roller part in the driving wheel and the roller part in the driven wheel are pressed and stuck in the "convex" sliding groove in the main track, and the gear part in the driving wheel and the gear part in the driven wheel are connected to the main rack part in a meshing manner.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: the FOUP automatic handling device that avoids damage to wafers realizes closed covering protection of wafers, reduces the contamination and damage of wafers in contact with the external environment during handling, and in addition, through the dual modes of adsorption locking and clamping limit, ensures the stability and firmness of wafers during picking up, and avoids accidental slipping during the picking up process; 1. It is provided with a main shell cover and a sub-shell cover, and the sub-shell cover is symmetrically arranged about the horizontal central axis of the main shell cover. When the sub-shell cover is turned over and unfolded, one end of the sub-shell cover close to the main shell cover is movably stuck in the shell cavity of the main shell cover, so that the two sub-shell covers and the main shell cover are combined to form a complete protective cover. When the FOUP picks up the wafer, the FOUP box mouth is sealed and protected, which is different from the traditional open wafer picking operation and reduces the entry of contaminants during picking; Furthermore, the transmission rod and the paddle member are arranged in an inclined state, and the sliding cooperation between the transmission rod and the paddle member enables the secondary track to form a flipping structure on the main track, even if the secondary shell cover forms a flipping structure on the main shell cover, when the secondary shell cover is flipped and folded, the upper and lower secondary shell covers are folded and attached together to form a complete protective box, so that when the wafer is picked up and transported, the wafer is protected in a closed manner, and the contact between the wafer and the external environment during transportation is reduced to be contaminated and damaged, and the wafer is prevented from being damaged by bumping during transportation through all-round covering protection; 2. A main clamping column and a sub-clamping column are provided. After the main clamping column slides out on the movable seat, it is driven by the movable seat to slide synchronously. Through the meshing action between the rack-shaped groove cavity wall in the active plate, the gear part and the rack-shaped frame cavity wall in the driven plate, the driven plate drives the sub-clamping column to slide, and the sub-clamping column moves in the opposite direction to the main clamping column, so as to realize the clamping and limiting operation of the wafer, and cooperate with the suction cup part to adsorb and lock the wafer. Through the dual methods of adsorption locking and clamping and limiting, the stability and firmness of the wafer in picking up are guaranteed, and the phenomenon of accidental slipping during the picking process is avoided; Furthermore, driven by the piston rod, the movable seat drives the main clamping column to slide, and through the mutual cooperation between the pin rod member, the "L"-shaped limit groove and the strip limit groove, the main clamping column is driven to slide out and slide with the movable seat, and through the meshing action between the rack-shaped groove cavity wall in the active plate, the gear member and the rack-shaped frame cavity wall in the driven plate, the auxiliary clamping column slides synchronously with the driven plate, and through the setting of the linkage structure, the automatic clamping limit operation is realized, ensuring the automation performance in the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front view structural schematic diagram of the present invention; Figure 2 It is a schematic diagram of the three-dimensional structure of the present invention from a side view; Figure 3It is a schematic diagram of the three-dimensional structure of the cover-sealed protection mechanism of the present invention from a side view; Figure 4 It is a schematic diagram of the three-dimensional structure of the main shell cover and the auxiliary shell cover separated from each other from the side of the present invention; Figure 5 It is a schematic diagram of a side view of a three-dimensional structure of a transmission rod and a pneumatic telescopic cylinder connected to each other in the present invention; Figure 6 It is a top view of the three-dimensional structure of the self-gripping picking mechanism of the present invention; Figure 7 It is a schematic diagram of the front view cross-section of the three-dimensional structure of the connection between the "U"-shaped bracket and the piston rod of the present invention; Figure 8 It is a schematic diagram of a front view cross-section of a three-dimensional structure of a U-shaped bracket and a suction cup member connected to each other in the present invention; Fig. 9 It is a bottom-view cross-sectional three-dimensional structural diagram of the active plate and the driven plate connected to each other according to the present invention; Fig.10 It is a schematic diagram of a top-view cross-sectional three-dimensional structure of the connection between the "U"-shaped bracket and the movable seat of the present invention; Fig.11 It is a schematic diagram of the three-dimensional structure of the connection between the "U"-shaped bracket and the housing seat in a side view of the present invention; Fig.12 It is a schematic diagram of the front view cross-section of the three-dimensional structure of the connection between the housing seat and the worm gear of the present invention; Fig.13 It is a top view cross-sectional three-dimensional structural schematic diagram of the connection between the driving wheel and the main track of the present invention.

[0018] In the figure: 1. main shell cover; 101. main track; 102. main rack; 2. cover-sealed protection mechanism; 3. self-gripping picking mechanism; 4. auxiliary shell cover; 401. auxiliary track; 402. auxiliary rack; 5. paddle plate; 6. transmission rod; 7. pneumatic telescopic cylinder; 8. "U"-shaped bracket; 801. "L"-shaped limit groove; 9. active plate; 10. movable seat; 1001. strip limit groove; 11. main clamping column; 1101. pin rod; 12. suction cup; 13. driven plate; 14. auxiliary clamping column; 15. piston rod; 16. reset spring; 17. gear; 18. shell seat; 19. worm wheel; 20. active wheel; 21. worm wheel; 22. servo motor; 23. driven wheel. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] See also Figure 1-13 The present invention provides a technical solution: a FOUP automatic handling device for avoiding damage to wafers, comprising a main shell cover 1, a cover-sealed protection mechanism 2 and a self-clamping picking mechanism 3.

[0021] The FOUP automatic handling device for avoiding damage to wafers is applied to the automatic picking operation of wafers in the FOUP. The automatic handling device is first placed in correspondence with the box opening of the FOUP. The self-clamping picking mechanism 3 is horizontally arranged on the left side of the main shell cover 1. It is arranged in a slidable structural state. The sliding position is adjusted by the self-clamping picking mechanism 3 to correspond to the wafer to be picked up. Then, the self-clamping picking mechanism 3 is operated to be inserted into the FOUP. The cover-sealed protection mechanism 2 is symmetrically arranged about the horizontal central axis of the main shell cover 1. It is in a flip-opening and closing structural state on the main shell cover 1. The cover-sealed protection mechanism 2 is set in a vertical state when in the unfolded state, and the cover-sealed protection mechanism 2 is flipped and unfolded to be connected with the FOUP in a cover-sealed manner, so that the self-clamping picking mechanism 3 is inserted into the lower side of the wafer to be picked up, and then the self-clamping picking mechanism 3 adopts a dual mode of adsorption locking and clamping limit to perform an automatic fixing operation during wafer picking, and finally the wafer is taken out of the FOUP. The cover-sealed protection mechanism 2 is set in a horizontal state when in the closed state, and the cover-sealed protection mechanism 2 is flipped and folded to perform a closed covering and protection treatment on the wafer; When operating the self-gripping picking mechanism 3 to adjust the sliding position, specifically, according to the attached Figure 1 , Figure 2 , Figure 3 , Fig.11 , Fig.12 and Fig.13 As shown, after the main housing 1 is installed, its right end frame is clamped and fixed by bolts to the execution end of the robot arm (the above-mentioned robot arm is an existing automated robot arm, which is a prior art and is not described in detail in the drawings of the specification). The movement of the wafer automatic handling equipment is controlled by the robot arm operation, corresponding to the box opening of the FOUP; Since the cross section of the main track 101 is a "concave" groove-shaped structure, it is arranged in an integrated structure in the middle of the shell cavity of the main shell cover 1, and is arranged in a vertically upward state, the cross section of the secondary track 401 is a "concave" groove-shaped structure, and it is arranged in an integrated structure in the middle of the shell cavity of the secondary shell cover 4, and is arranged in a vertically upward state, and it is arranged in an adaptive state corresponding to the main track 101, and since the front and rear side groove walls of the main track 101 are both provided with a through "convex" shaped slide groove, the narrowness of the "convex" shaped slide groove The right side groove wall of the auxiliary rail 401 is provided with a main rack part 102 of an integrated structure, and the groove walls on both sides of the front and rear sides of the auxiliary rail 401 are provided with a through "convex" shaped sliding groove, wherein the right side groove wall of the narrow part of the "convex" shaped sliding groove is provided with an auxiliary rack part 402 of an integrated structure, and the specifications and dimensions of the main rack part 102 are the same as those of the auxiliary rack part 402. When the auxiliary shell cover 4 is turned over and unfolded, the auxiliary rail 401 is adapted to be connected with the main rail 101, and the auxiliary rack part 402 is adapted to be connected with the main rack part 102; Since the servo motor 22 is fixedly installed in the lower shell cavity of the shell seat 18 by bolts after being placed, and is arranged in a vertical upward state, and since the upper and lower ends of the worm member 21 are fixedly clamped with bearings, it is placed in the upper shell cavity of the shell seat 18 after being placed, and its two ends are respectively movably plugged into the shell cavity walls on both sides with bearings, and its lower end is fixedly connected to the output end of the servo motor 22 by bolts, the servo motor 22 is started to operate, so that the worm member 21 rotates in the upper shell cavity of the shell seat 18 with the assistance of the bearings; Since a shaft column is inserted through the middle of the worm wheel 19 and fixedly connected by bolts, wherein both ends of the shaft column are fixedly clamped with bearings, the worm wheel 19 is placed in the upper shell cavity of the shell seat 18, wherein both ends of the shaft column are respectively inserted through the shell walls on both sides with bearings and extend outwards, and are arranged in a movable positioning state, and since the left side of the worm wheel 19 is meshingly connected with the worm member 21, after the worm member 21 is driven to rotate, through the meshing action between the worm member 21 and the worm wheel 19, the worm wheel 19 is assisted by the bearings to rotate in the upper shell cavity of the shell seat 18; Since both ends of the shaft column of the worm wheel 19 are provided with driving wheels 20, the driving wheels 20 are sleeved and fixedly mounted on the ends of the shaft column of the worm wheel 19 by bolts after being installed, the driving wheels 20 are driven to rotate synchronously when the worm wheel 19 rotates; Since an open notch is provided in the middle of the shell wall of the side of the secondary shell cover 4 close to the main shell cover 1, the secondary shell cover 4 is connected with the shell cavity of the main shell cover 1 through the notch, and the self-gripping and picking mechanism 3 is assisted to slide from the shell cavity of the main shell cover 1 to the shell cavity of the secondary shell cover 4 for position adjustment through the setting of the notch; Since the driving wheel 20 is composed of a roller portion and a coaxial gear portion, the specifications and dimensions of the driven wheel 23 are the same as those of the driving wheel 20, and it is also composed of a roller portion and a coaxial gear portion. It is arranged in a corresponding state with the driving wheel 20. In addition, since the driven wheels 23 are arranged on both the front and rear sides of the lower end of the shell seat 18, a bearing is fixedly connected at the center of the roller portion of the driven wheel 23. After the installation, the roller portion and the bearing are sleeved on the shell wall column at the lower end of the shell seat 18. After the shell seat 18 is installed, it is movably stuck in the groove cavity of the main track 101, so that the roller portion in the driving wheel 20 and the roller portion in the driven wheel 23 are pressed and stuck in the "convex" in the main track 101. shaped chute, and the gear part in the driving wheel 20 and the gear part in the driven wheel 23 are connected with the main rack part 102 in a meshing manner, and the shell seat 18 is positioned in the main track 101 in an active state with the assistance of the driving wheel 20 and the driven wheel 23. When the driving wheel 20 rotates, the gear part in the driving wheel 20 and the main rack part 102 or the auxiliary rack part 402 mesh with each other, so that the driving wheel 20 rolls and slides along the "convex" shaped chute in the main track 101 or the "convex" shaped chute in the auxiliary track 401. At the same time, the driven wheel 23 operates in the same way as the driving wheel 20, rotates at the lower end of the shell seat 18, and cooperates with the driving wheel 20 to assist the shell seat 18 to slide; Since the right end of the horizontal frame of the "U"-shaped bracket 8 is provided with a bent portion of an integrated structure, the shell seat 18 is clamped and connected to the right end bent portion of the "U"-shaped bracket 8 by bolts after being placed, and is arranged in a vertical state. When the shell seat 18 is driven to move, the "U"-shaped bracket 8 is driven to move synchronously, that is, the sliding position adjustment operation of the self-clamping pickup mechanism 3 is completed, so that the self-clamping pickup mechanism 3 corresponds to the wafer to be picked up; When the self-gripping picking mechanism 3 is inserted into the FOUP, specifically, according to the attached Figure 1 , Figure 2 , Figure 3 and Figure 6 As shown, the sub-shell cover 4 is symmetrically arranged about the horizontal center axis of the main shell cover 1. When the cover-sealed protective mechanism 2 is in the unfolded state, one end of the sub-shell cover 4 close to the main shell cover 1 is movably stuck in the shell cavity of the main shell cover 1. The upper and lower sub-shell covers 4 are combined with the main shell cover 1 to form a complete protective shell cover, which is compatible with the FOUP. In addition, since the main clamping column 11 in the self-clamping picking mechanism 3 is set in a retracted state when the clamping limit operation is not performed, the upper end side wall thereof is flush with the upper side plate wall of the active plate 9 in the retracted state, that is, it does not affect the insertion of the self-clamping picking mechanism 3 into the lower side of the wafer. The automatic handling equipment is driven by the robot arm to dock with the FOUP and move, so that the self-clamping picking mechanism 3 is inserted into the lower side of the wafer to be picked up, and the complete protective shell cover combined with the sub-shell cover 4 and the main shell cover 1 is correspondingly sealed at the box mouth of the FOUP for protective treatment; When the wafer is picked up by the self-gripping pick-up mechanism 3 and the automatic fixing operation is performed, specifically, according to the attached Figure 6 , Figure 7 , Figure 8 , Fig. 9 and Fig.10 As shown, the "U"-shaped bracket 8 is divided into two parts, a transverse frame and a longitudinal frame, wherein three airways are sequentially opened in the longitudinal frame, wherein the airways are connected to the air supply equipment through external pipes (the above-mentioned air supply equipment is a prior art and is not described in the drawings of the specification), since the piston rod 15 is symmetrically arranged about the horizontal central axis of the movable seat 10, the two piston rods 15 in the movable seat 10 are respectively movably plugged into the airways on both sides of the longitudinal frame of the "U"-shaped bracket 8, that is, after the piston rod 15 is placed, the plug part thereof is placed in the airway of the longitudinal frame of the "U"-shaped bracket 8 for sealing and fitting connection, and air is sucked through the airways on both sides of the "U"-shaped bracket 8 to form a negative pressure cavity in the airway, driving the piston rod 15 to shrink and slide in the airway; After the piston rod 15 is placed, the rod body part thereof movably penetrates through the airway wall and extends outward, and the end of the rod body part thereof is plugged and fixedly connected to the right side wall of the movable seat 10 by bolts, and after the piston rod 15 is driven to slide, it pulls the movable seat 10 to move synchronously; Since the longitudinal section of the movable seat 10 is a "convex" shaped structure, it is fixedly connected to the lower left end of the active plate 9 by bolts, and the longitudinal section of the movable seat 10 and the active plate 9 form an "I" shaped structure, the movable seat 10 is arranged in the left end groove cavity of the longitudinal frame of the "U" shaped bracket 8, and is arranged in a movable positioning state. After being pulled, the movable seat 10 slides in the left end groove cavity of the longitudinal frame of the "U" shaped bracket 8, and the movable seat 10 and the active plate 9 form a synchronous sliding structure, driving the active plate 9 to move synchronously; Since "L"-shaped limiting grooves 801 are provided on the front and rear groove walls of the left end of the longitudinal frame body in the "U"-shaped bracket 8, the "L"-shaped limiting groove 801 is divided into two parts, a transverse groove and a longitudinal groove, wherein the longitudinal groove is arranged in an inclined state. Moreover, since the front and rear sides of the movable seat 10 are provided with a through-state strip limiting groove 1001, the length dimension of the strip limiting groove 1001 is equal to the height dimension of the longitudinal groove in the "L"-shaped limiting groove 801, and the two are arranged correspondingly, the length dimension of the transverse groove in the "L"-shaped limiting groove 801 is adapted to the maximum sliding distance dimension of the movable seat 10. Furthermore, since the pin rod member 1101 is arranged to vertically penetrate the middle part of the main clamping column 11, and both ends are arranged to extend outward, the two are fixedly connected by bolts. When the movable seat 10 is driven to slide initially, the pin rod 1101 slides along the inclined longitudinal groove in the "L"-shaped limiting groove 801, and slides along the strip limiting groove 1001, so that the main clamping column 11 is driven by the lifting of the pin rod 1101, and the main clamping column 11 extends and slides on the movable seat 10. When the movable seat 10 is continuously driven to slide, the pin rod 1101 slides along the transverse groove in the "L"-shaped limiting groove 801, keeps the main clamping column 11 in an extended state, and follows the movable seat 10 to slide; After the main clamping column 11 is installed, it is movably clamped in the middle groove cavity of the movable seat 10, and its upper end is connected to the plate body of the active plate 9 in a movably penetrating manner. In addition, a reset spring piece 16 is installed at the connection between the movable seat 10 and the main clamping column 11. The reset spring piece 16 is arranged in a "V"-shaped structure, and a slide groove is provided at both ends of the left and right sides, and a "T"-shaped limit bolt is slidably connected to both ends of the left and right sides. After the reset spring piece 16 is installed, the middle part is fixedly connected to the lower side wall of the main clamping column 11 by bolts, and the "T"-shaped limit bolt movably penetrates the slide groove at its end and is threadedly fixed to the groove cavity wall of the movable seat 10. With the assistance of the reset spring piece 16, the main clamping column 11 is movably positioned in the middle groove cavity of the movable seat 10. When the main clamping column 11 is driven, it slides and extends out in the middle of the movable seat 10, so that the reset spring piece 16 is squeezed and elastically deformed; Since active plates 9 are arranged on the upper sides of the two longitudinal frames in the "U"-shaped bracket 8, the active plates 9 are arranged in a "mouth"-shaped frame-shaped plate frame structure, and after being installed, they are movably arranged in the upper groove cavity of the longitudinal frame in the "U"-shaped bracket 8, and since the lower groove cavity wall at the right end of the active plate 9 is arranged in a rack-shaped structure, wherein the rack-shaped groove cavity wall is meshed and connected with the upper end of the gear member 17, and since the middle part of the gear member 17 is fixedly connected with a bearing, it is arranged at the overlap of the active plate 9 and the driven plate 13, and the upper end is movably inserted In the lower groove cavity at the right end of the active plate 9, and its associated bearing sleeve is connected to the right section groove cavity wall column of the longitudinal frame of the "U"-shaped bracket 8. When the movable seat 10 continues to slide, it drives the main clamping column 11 in the extended state to slide synchronously, and drives the active plate 9 to slide on the upper side of the longitudinal frame of the "U"-shaped bracket 8. When the active plate 9 slides, through the meshing action between the rack-shaped groove cavity wall of the active plate 9 and the gear member 17, the gear member 17 is driven to rotate in the right section groove cavity of the longitudinal frame of the "U"-shaped bracket 8; Since the driven plate 13 is arranged in a "U"-shaped frame-like plate frame structure, it is movably inserted into the right section groove cavity of the longitudinal frame body in the "U"-shaped bracket 8 after being placed, and its left section plate body and the right section plate body of the active plate 9 are arranged in an upper and lower overlapping state. Since one side frame cavity wall of the driven plate 13 is arranged in a rack-like structure, the lower end of the gear member 17 is movably inserted into the frame cavity of the driven plate 13 after being placed, and its lower end is meshed and connected with the rack-like frame cavity wall in the driven plate 13. Since the rack-like frame cavity wall in the driven plate 13 and the rack-like groove cavity wall in the active plate 9 are arranged in opposite directions, when the gear member 17 is driven to rotate, the meshing action between the rack-like frame cavity wall in the driven plate 13 and the gear member 17 drives the driven plate 13 to slide in the right section groove cavity of the longitudinal frame body in the "U"-shaped bracket 8, and its sliding direction is opposite to the sliding direction of the movable seat 10. Since a through-shaped sliding groove is provided on the upper side wall of the right section of the longitudinal frame of the "U"-shaped bracket 8, after the auxiliary clamping column 14 is placed, its lower end is clamped and fixedly connected to the right end of the driven plate 13 by bolts, and its upper end is movably inserted through the sliding groove of the longitudinal frame of the "U"-shaped bracket 8, and is arranged in an outwardly protruding state. When the driven plate 13 is driven to slide, the auxiliary clamping column 14 and the driven plate 13 form a synchronous sliding structure; Since the main clamping column 11 is cylindrical, a rubber protective ring is provided on its outer side. When the main clamping column 11 is extended, its upper end is arranged beyond the plate body of the active plate 9. Since the auxiliary clamping column 14 is cylindrical, a rubber protective ring is provided on its outer side. The auxiliary clamping column 14 is arranged in a corresponding state with the main clamping column 11. The auxiliary clamping column 14 slides in the opposite direction to the main clamping column 11 to clamp and limit the wafer. Since the suction cup member 12 is arranged in a funnel-shaped structure, it is symmetrically arranged about the vertical central axis of the longitudinal frame of the "U"-shaped bracket 8. After being placed, the suction cup member 12 is plugged and fixedly connected in the middle groove cavity of the longitudinal frame of the "U"-shaped bracket 8. It is connected with the middle airway of the longitudinal frame of the "U"-shaped bracket 8. The suction process is performed through the middle airway of the "U"-shaped bracket 8 to form a negative pressure cavity in the airway. The wafer is adsorbed and locked by the suction cup member 12, and the wafer is fixed by the clamping of the main clamping column 11 and the auxiliary clamping column 14. When operating the cover-sealed protection mechanism 2 to cover and protect the wafer, specifically, according to the attached Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, after the wafer is picked up and fixed by the self-clamping picking mechanism 3, the self-clamping picking mechanism 3 is operated to move the wafer to the initial position of the main shell cover 1. Since the output end of the pneumatic telescopic cylinder 7 is fixedly connected with a connecting frame, it is clamped and fixedly connected to the right shell wall of the main shell cover 1 by bolts after being installed, and is arranged in a parallel state with the transmission rod 6. Since the transmission rod 6 is movably inserted through the shell cavity wall of the main shell cover 1 after being installed, it is arranged in a vertical state, and its end away from the paddle member 5 is fixedly connected to the connecting frame of the pneumatic telescopic cylinder 7 by bolts, and the pneumatic telescopic cylinder 7 is started to stretch and operate, so that the transmission rod 6 slides on the shell cavity wall of the main shell cover 1. Since the other end of the paddle member 5 is provided with a through-shaped slide groove, the end of the transmission rod 6 close to the paddle member 5 is plugged and connected with a pin through bolts, and the end of the transmission rod 6 is movably clamped on the paddle member 5 after being placed, and the pin movably penetrates the slide groove in the paddle member 5. In addition, since the transmission rod 6 and the paddle member 5 are arranged in an inclined state, the two paddle members 5 on the same auxiliary track 401 are arranged in the same inclined direction, and the inclined direction of the paddle member 5 in the upper auxiliary track 401 is opposite to the inclined direction of the paddle member 5 in the lower auxiliary track 401, and the combination of the two forms an "eight"-shaped structure. After the transmission rod 6 is driven to slide, the end of the transmission rod 6 slides on the other end of the paddle member 5, and the transmission rod 6 pulls the paddle member 5 to move; Since bracket parts of an integrated structure are vertically arranged at the upper and lower front and rear corners of the left side wall of the main track 101, wherein bearings are fixedly clamped on the bracket parts, bracket parts of an integrated structure are vertically arranged at the front and rear positions of the left side wall of the auxiliary track 401 close to one end of the main shell 1, wherein a shaft column in a horizontal state is inserted and fixedly connected to the bracket part by bolts, and since after the auxiliary shell 4 located above is placed, the two bracket parts of the auxiliary track 401 respectively correspond to the two upper bracket parts of the main track 101, and the bracket part in the auxiliary track 401 is movably clamped together with the bracket part in the main track 101, so that the shaft column in the bracket part of the auxiliary track 401 can be movably inserted through the bearings of the bracket part in the main track 101, and after the auxiliary shell 4 located below is placed, the two bracket parts of the auxiliary track 401 respectively correspond to the two lower bracket parts of the main track 101, and the placement method of the auxiliary shell 4 located below is the same as the placement method of the auxiliary shell 4 located above; Since one end of the shifting plate 5 is sleeved and fixedly connected to the end of the shaft column of the bracket part of the secondary track 401 through bolts after being placed, the shifting plate 5 drives the shaft column of the bracket part of the secondary track 401 to move after being pulled, so that the bracket part of the secondary track 401 rotates on the bracket part of the main track 101 with the assistance of the shaft column, that is, the secondary housing 4 is turned over and folded on the main housing 1; Since the upper and lower sides of the horizontal frame of the "U"-shaped bracket 8 are vertically provided with baffle parts of an integrated structure, wherein the baffle parts are adapted to the notch parts in the secondary shell cover 4, when the cover-sealed protective mechanism 2 is in the folded state, the upper and lower secondary shell covers 4 are folded and attached together, and the notch parts in the secondary shell cover 4 are engaged with the baffle parts in the "U"-shaped bracket 8 to block and form a complete protective box, which covers the self-clamping picking mechanism 3 in a closed manner; This is the entire working process of the FOUP automatic handling equipment to avoid damaging the wafer. The contents not described in detail in this specification belong to the existing technology known to professional and technical personnel in this field.

[0022] The standard parts used in the present invention can all be purchased from the market, and special-shaped parts can be customized according to the instructions and the drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. Machinery, parts and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here.

[0023] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A FOUP automatic handling device for avoiding damage to wafers, comprising: A main housing (1), the right end of the main housing (1) being fixedly mounted on the execution end of the robot arm by means of bolts; It is characterized by further comprising: A cover-sealed protection mechanism (2), the cover-sealed protection mechanism (2) being arranged symmetrically with respect to the horizontal central axis of the main housing (1), and the cover-sealed protection mechanism (2) being arranged on the main housing (1) in a structure state capable of being flipped open and closed, and performing a cover-sealed docking operation with the FOUP in an unfolded state, and performing a closed covering protection treatment on the wafer in a closed state; A self-clamping picking mechanism (3) is arranged in a horizontal state on the left side of the main shell cover (1), and adopts a dual mode of adsorption locking and clamping limit to perform an automatic fixing operation in wafer picking, and cooperates with the sliding position adjustment to perform an automatic wafer picking operation.

2. The FOUP automatic handling device for avoiding wafer damage according to claim 1, characterized in that: A main track (101) of an integrated structure is provided in the middle of the shell cavity of the main shell cover (1), and a main rack portion (102) of an integrated structure is provided on the right side groove wall of the narrow portion of the "convex" shaped slide groove in the main track (101).

3. The FOUP automatic handling device for avoiding wafer damage according to claim 1, characterized in that: The enclosed protection mechanism (2) comprises a secondary housing (4), a shifting plate (5) and a transmission rod (6); one end of the secondary housing (4) close to the main housing (1) is movably stuck in the housing cavity of the main housing (1), and the secondary housing (4) forms a flip structure on the main housing (1); a secondary track (401) of an integrated structure is provided in the middle of the housing cavity of the secondary housing (4); a secondary rack (402) of an integrated structure is provided on the right side groove wall of the narrow part of the "convex" shaped sliding groove in the secondary track (401); and a bracket part in the secondary track (401) forms a rotating structure on the bracket part in the main track (101) with the assistance of a shaft column; The shaft column end of the bracket part in the auxiliary track (401) is fixedly connected to one end of the shifting plate (5) by means of bolts, and the other end of the shifting plate (5) is connected to the end of the transmission rod (6) in a sliding manner.

4. The FOUP automatic handling device for avoiding wafer damage according to claim 3, characterized in that: The transmission rod (6) and the shifting plate member (5) are arranged in an inclined state, the transmission rod (6) forms a sliding structure on the shell cavity wall of the main shell cover (1), and one end of the transmission rod (6) away from the shifting plate member (5) is fixedly connected to a connecting frame of the pneumatic telescopic cylinder (7) by means of bolts, and the pneumatic telescopic cylinder (7) is fixedly mounted on the right shell wall of the main shell cover (1) by means of bolts.

5. The FOUP automatic handling device for avoiding wafer damage according to claim 1, characterized in that: The self-gripping picking mechanism (3) comprises a "U"-shaped bracket (8), an active plate (9), a main clamping column (11), a suction cup (12) and a secondary clamping column (14), wherein the upper sides of the two longitudinal frames in the "U"-shaped bracket (8) are slidably connected to the active plate (9), and the lower side of the left end of the active plate (9) is fixedly connected to a movable seat (10) by bolts, and the movable seat (10) and the active plate (9) form a synchronous sliding structure, and a main clamping column (11) capable of telescopic sliding is arranged in the middle of the movable seat (10); Wherein, "L"-shaped limiting grooves (801) are provided on the front and rear groove walls at the left end of the longitudinal frame body in the "U"-shaped bracket (8), and the longitudinal groove path in the "L"-shaped limiting groove (801) is arranged in an inclined state; Wherein, a suction cup member (12) is fixedly connected to the middle part of the longitudinal frame of the "U"-shaped bracket (8), and the suction cup member (12) is communicated with the middle air passage of the longitudinal frame of the "U"-shaped bracket (8); A driven plate (13) is slidably connected in the groove cavity of the right section of the longitudinal frame of the "U"-shaped bracket (8), and a secondary clamping column (14) is fixedly connected to the upper side of the right end of the driven plate (13) by bolts, and the secondary clamping column (14) and the driven plate (13) form a synchronous sliding structure.

6. The FOUP automatic handling device for avoiding wafer damage according to claim 5, characterized in that: The movable seat (10) is provided with strip-shaped limit grooves (1001) on both the front and rear sides, the right side wall of the movable seat (10) is fixedly connected to the rod body of the piston rod (15) by bolts, and the two piston rods (15) in the movable seat (10) are respectively movably inserted into the air passages on both sides of the longitudinal frame in the "U"-shaped bracket (8).

7. The FOUP automatic handling device for avoiding wafer damage according to claim 6, characterized in that: A reset spring (16) is installed at the connection between the movable seat (10) and the main clamping column (11), and a vertical pin rod (1101) is fixedly connected to the middle of the main clamping column (11) by bolts, and the pin rod (1101) movably penetrates the strip-shaped limiting groove (1001), and the pin rod (1101) is connected to the "L"-shaped limiting groove (801) in a sliding manner.

8. The FOUP automatic handling device for avoiding wafer damage according to claim 5, characterized in that: A gear member (17) is rotatably connected in the groove cavity of the right section of the longitudinal frame body in the "U"-shaped bracket (8), and the upper end of the gear member (17) is meshed and connected with the rack-shaped groove cavity wall in the active plate (9), and the lower end of the gear member (17) is meshed and connected with the rack-shaped frame cavity wall in the driven plate (13), and the rack-shaped frame cavity wall in the driven plate (13) and the rack-shaped groove cavity wall in the active plate (9) are arranged in opposite directions.

9. The FOUP automatic handling device for avoiding wafer damage according to claim 5, characterized in that: The right end bend of the "U"-shaped bracket (8) is fixedly connected to a housing seat (18) by means of bolts, and a worm wheel (19) is rotatably connected to the upper housing cavity of the housing seat (18) by means of a bearing, and driving wheels (20) are fixedly mounted on both ends of the shaft column of the worm wheel (19) by means of bolts; The left side of the worm wheel (19) is meshingly connected with a worm member (21), and the worm member (21) is assisted by a bearing to form a rotating structure in the upper shell cavity of the shell seat (18), and the lower end of the worm member (21) is fixedly connected to the output end of the servo motor (22) by bolts, and the servo motor (22) is fixedly installed in the lower shell cavity of the shell seat (18) by bolts; The front and rear sides of the lower end of the shell seat (18) are both rotatably connected to driven wheels (23), and the shell seat (18) forms a sliding structure on the main track (101) with the assistance of the driving wheel (20) and the driven wheel (23).

10. The FOUP automatic handling device for avoiding wafer damage according to claim 9, characterized in that: The roller portion in the driving wheel (20) and the roller portion in the driven wheel (23) are both pressed and stuck in the "convex" shaped sliding groove in the main track (101), and the gear portion in the driving wheel (20) and the gear portion in the driven wheel (23) are both connected to the main rack portion (102) in a meshing manner.

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