Magnetic conductance device and magnetic conductance method for guiding single-quantum-state atoms to deflect

By designing a magnetic guide device with an uniform gradient magnetic field with an uneven gradient magnetic field, the problem of low -temperature collision between low -temperature collision between cold atom molecules and direction regulation is solved. Neutral atomic beam source with specific requirements.

CN119364629AActive Publication Date: 2025-01-24INST OF ADVANCED SCI FACILITIES SHENZHEN
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Patent Information

Application Number
CN202411469875.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2025-01-24
Estimated Expiration
2044-10-21

AI Technical Summary

Technical Problem

In the research on low-temperature collision between cold atoms and molecules, it is difficult to effectively regulate the transmission speed and direction of the atomic beam, resulting in the inability to provide a neutral atomic beam source that meets specific requirements.

Method used

Design a magnetic guide device, including a vacuum compartment, connecting frame, and multiple magnetic guidance components to form an arc -shaped atomic channel with uneven gradient magnetic fields. Byomasical atomic bundles of the magnetic field are used to achieve the deflection and screening of single -quantum atoms.

Benefits of technology

The angle deflection transmission of the neutral atomic beam is achieved, the structure is simple, the energy consumption is low, and it is suitable for cold collision experiments suitable for extremely low energy regions. It provides a neutral atomic beam source for sub -stealth atoms in the semiconductor etching field.

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Abstract

The invention discloses a magnetic conductance device and a magnetic conductance method for guiding single quantum state atoms to deflect, the magnetic conductance device comprises a vacuum chamber, a connecting frame and a plurality of magnetic conductance assemblies, and a high vacuum chamber is formed in the vacuum chamber; the connecting frame is arranged on the inner wall of the vacuum cabin; the plurality of magnetic conductive assemblies are arranged on the connecting frame in an arc shape; an atom passage is arranged at the central position of the magnetic conduction assembly; and the atom passages on the plurality of magnetic conduction assemblies are connected in sequence to form an arc-shaped atom passage with a non-uniform gradient magnetic field, and the arc-shaped atom passage is used for driving atoms to deflect. Based on the Zeeman effect of the atoms, the magnetic conductance assembly is arranged, so that the atoms are controllably deflected in the arc-shaped atom channel, specific-angle deflection transmission of the neutral atom beams is achieved, and the speed filtering effect of the atoms can be achieved.
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Description

Technical Field

[0001] The present invention relates to the field of cold atom manipulation technology, and in particular to a magnetic guidance device and a magnetic guidance method for guiding the deflection of single quantum state atoms. Background Art

[0002] The interaction process between atoms and molecules is widely present in nature. In particular, the extremely low temperature collision between cold atoms and molecules is one of the important processes in the evolution of the cold interstellar medium. In the basic physics and chemistry fields, the study of the dynamics of extremely low energy atomic and molecular collisions below the K level is an important experimental means to understand quantum effects such as quantum state selection and resonant scattering. This makes the regulation of cold atoms and the preparation of atoms with specific quantum state selection increasingly attracting people's attention in many fields such as cold atom physics, precise measurement of atomic spectra, collision reactions between neutral atoms and molecules, and semiconductor etching. Since neutral atoms do not show electrical properties, the traditional method of controlling the transmission of charged particles by electromagnetic force is difficult to achieve the regulation of neutral atomic molecules. At present, the cooling of atoms can be achieved with the help of the interaction between lasers and atoms, thereby reducing the transmission speed of atoms.

[0003] However, the laser cooling process requires a laser of a specific wavelength for a specific atomic system, and the experiment is difficult, especially the difficulty of changing the transmission direction of the atoms, and the experimental cost is high. In other words, the ability to select the speed of atoms and control the transmission direction in the current experiment is limited, resulting in the inability to provide a neutral atom beam source that meets specific requirements in some cold atom research processes.

[0004] Therefore, the prior art still needs to be improved and developed. Summary of the invention

[0005] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a magnetic guidance device and a magnetic guidance method for guiding the deflection of single quantum state atoms, aiming to solve the problem of regulating the transmission speed and transmission direction of the atomic beam source in the existing low-temperature collision research between cold atoms and molecules.

[0006] The technical solution of the present invention is as follows:

[0007] A magnetic permeability device for guiding the deflection of single quantum state atoms, comprising a vacuum chamber, a connecting frame and a plurality of magnetic permeability components, wherein a high vacuum chamber is formed in the vacuum chamber; the connecting frame is arranged on the inner wall of the vacuum chamber; a plurality of magnetic permeability components are arranged in an arc shape on the connecting frame; an atomic passage is arranged at the center of the magnetic permeability component; the atomic passages on the plurality of magnetic permeability components are connected in sequence to form an arc-shaped atomic channel with an uneven gradient magnetic field, which is used to drive the deflection of atoms.

[0008] The magnetic permeability device for guiding the deflection of single quantum state atoms, wherein the magnetic permeability component includes a non-magnetic kit and at least two permanent magnets, the non-magnetic kit is connected to the connecting frame; the non-magnetic kit is annular in shape, and at least two fixing parts are protruding from the inner side of the non-magnetic kit, and at least two of the fixing parts are arranged on the inner wall of the non-magnetic kit in a centrally symmetrical manner; one side of the permanent magnet is connected to the fixing part, and the other side protrudes from the fixing part and extends toward the center of the non-magnetic kit; the atomic passage is formed between at least two relatively arranged permanent magnets.

[0009] The magnetic guide device for guiding the deflection of single quantum state atoms, wherein the cross-sectional shape of the fixing portion is a trapezoid, and the width of the fixing portion gradually decreases in the direction toward the center of the non-magnetic kit.

[0010] The magnetic permeability device for guiding the deflection of single quantum state atoms, wherein the fixing portion is formed with an assembly groove opening toward the center of the non-magnetic kit; a first screw hole is provided on the side wall of the assembly groove; the permanent magnet is plugged into the assembly groove; the magnetic permeability component also includes a screw, which is screwed into the first screw hole and screwed in to abut against the permanent magnet.

[0011] The magnetic permeability device for guiding the deflection of single quantum state atoms, wherein the radial cross-sectional shape of the outer wall of the non-magnetic suite is a regular polygon, and at least one surface on the outer wall of the non-magnetic suite is a contact surface for fitting with the connecting frame; the connecting frame is provided with a plurality of first connecting holes arranged in an arc shape; the contact surface is provided with at least one second connecting hole aligned with the first connecting hole; the first connecting hole and the second connecting hole are used for plugging connecting rods to connect the connecting frame and the non-magnetic suite.

[0012] The magnetic guide device for guiding the deflection of single quantum state atoms, wherein a protective layer is provided on the surface of the permanent magnet.

[0013] The magnetic guide device for guiding the deflection of single quantum state atoms, wherein the fixing parts are provided with four, and the four fixing parts are arranged in a cross shape on the inner wall of the non-magnetic kit; the permanent magnets are provided with four, and the four permanent magnets are arranged in a ring shape, and the angle between two adjacent permanent magnets is 90°.

[0014] The magnetic permeability device for guiding the deflection of single quantum state atoms, wherein the magnetic permeability device includes an aperture, the aperture is connected to the connecting frame, and is arranged in the high vacuum chamber; and the aperture and a plurality of the magnetic permeability components are arranged in sequence along the atomic transmission direction; a beam limiting channel for collimating the atomic beam is provided on the aperture directly opposite the entrance of the arc-shaped atomic channel, and the aperture of the beam limiting channel is smaller than the aperture of the arc-shaped atomic channel.

[0015] The magnetic permeability device for guiding the deflection of single quantum state atoms, wherein the magnetic permeability device includes a high vacuum gauge and a vacuum pump, the vacuum pump and the high vacuum gauge are both connected to the vacuum chamber; the high vacuum gauge is inserted into the high vacuum chamber for detecting the vacuum degree; the vacuum pump is arranged at one end of the high vacuum chamber away from the magnetic permeability component, for pumping air to maintain the vacuum degree of the high vacuum chamber.

[0016] The present application also discloses a magnetic guidance method for guiding the deflection of single quantum state atoms, which is used in any of the magnetic guidance devices for guiding the deflection of single quantum state atoms as described above, wherein the magnetic guidance method comprises:

[0017] Extract the air in the high vacuum chamber, monitor the vacuum degree in real time, and obtain the real-time vacuum degree value;

[0018] If the real-time vacuum value is less than or equal to the preset vacuum value, the atomic beam is collimated and directed to the arc-shaped atomic channel to screen out the target single quantum state atomic beam.

[0019] Compared with the prior art, the embodiments of the present invention have the following advantages:

[0020] The magnetic permeability device disclosed in the present invention forms an arc-shaped atomic channel for deflecting atomic beams by setting a connecting frame in a vacuum chamber to fix several magnetic permeability components. Several magnetic permeability components are arranged in an arc shape, and multiple atomic passages in the center are connected in sequence, so as to form an uneven gradient magnetic field in the radial direction of the arc-shaped atomic channel. The magnetic field strength at the center position is 0, and the magnetic field strength gradually increases in the direction away from the center, so that the atoms entering the high vacuum chamber change their flight speed and flight direction under the action of magnetic potential. Since the aperture of the arc-shaped atomic channel is limited, the paramagnetic target atoms are deflected by the magnetic field force and fly out along the arc-shaped atomic channel, while other atoms are blocked, achieving the effect of screening a single quantum state atomic beam.

[0021] It can be seen that the present invention realizes the angular deflection transmission of the neutral atomic beam by setting up several magnetic permeability components to deflect the atomic beam. The structure is simple and easy to operate; the energy consumption is small and the research cost is low; it is conducive to realizing velocity filtering and can obtain a single quantum state atomic beam source, which provides a neutral atomic beam source basis for cold collision experiments in the extremely low energy zone and is also helpful for the development of the preparation of metastable atoms in the field of semiconductor etching. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic structural diagram of the magnetic guide device for guiding the deflection of single quantum state atoms in the present invention;

[0024] Figure 2 It is a cross-sectional view in the axial direction of the magnetic guide device for guiding the deflection of single quantum state atoms in the present invention;

[0025] Figure 3 It is a structural exploded diagram of a part of the structure of the magnetic guide device for guiding the deflection of single quantum state atoms in the present invention;

[0026] Figure 4 It is a schematic diagram of the structure of the magnetic guide assembly in the present invention;

[0027] Figure 5 The figure is a flow chart of the magnetic permeability method for guiding the deflection of single quantum state atoms in the present invention.

[0028] Among them, 100, vacuum chamber; 110, high vacuum chamber; 200, connecting frame; 210, first connecting hole; 300, magnetic guide assembly; 310, atomic passage; 320, non-magnetic kit; 321, contact surface; 322, second connecting hole; 330, fixing part; 331, assembly groove; 332, first screw hole; 340, permanent magnet; 400, arc-shaped atomic channel; 500, aperture; 510, beam-limiting channel. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the existing technology, the application of cold atomic beam preparation based on quantum state selection, the application of atoms in the field of semiconductor etching, the application of atomic manipulation research, etc., all require improving the transmission control of atomic beams.

[0031] See also Figure 1 , Figure 2 and Figure 4In one embodiment of the present invention application, a magnetic permeability device for guiding the deflection of single quantum state atoms is disclosed, which includes a vacuum chamber 100, a connecting frame 200 and a plurality of magnetic permeability components 300, wherein a high vacuum chamber 110 is formed in the vacuum chamber 100; the connecting frame 200 is arranged on the inner wall of the vacuum chamber 100; a plurality of the magnetic permeability components 300 are arranged in an arc shape on the connecting frame 200; an atomic passage 310 is provided at the center of the magnetic permeability component 300; the atomic passages 310 on the plurality of magnetic permeability components 300 are connected in sequence to form an arc-shaped atomic channel 400 with an uneven gradient magnetic field for driving atomic deflection.

[0032] The magnetic permeability device disclosed in this embodiment is provided with a connecting frame 200 in the vacuum chamber 100 to fix a plurality of magnetic permeability components 300, thereby forming an arc-shaped atomic channel 400 for deflecting the atomic beam. In this embodiment, a plurality of magnetic permeability components 300 are arranged in an arc shape, and a plurality of atomic passages 310 in the center are connected in sequence, thereby forming an uneven gradient magnetic field in the radial direction of the arc-shaped atomic channel 400, wherein the magnetic field strength at the center position is 0, and the magnetic field strength gradually increases in the direction away from the center, so that the atoms entering the high vacuum chamber 110 change their translational direction under the action of the magnetic potential, and change their flight direction.

[0033] Since the aperture of the arc-shaped atomic channel 400 is limited, only the paramagnetic target atoms are deflected by the magnetic field force and fly out along the arc-shaped atomic channel 400. Atoms in other quantum states except the target atoms cannot fly out along the arc-shaped atomic channel 400 due to their different moving speeds and are blocked, thereby achieving the effect of screening a single quantum state atomic beam.

[0034] It can be seen that by setting up several magnetic guide components 300 to deflect the atomic beam, the angular deflection transmission of the central atomic beam is achieved, which has a simple structure and is easy to operate; it has low energy consumption and low research cost; it is conducive to realizing velocity filtering and can obtain a single quantum state atomic beam source, providing a neutral atomic beam source basis for cold collision experiments in the extremely low energy region, and also contributing to the development of metastable atom preparation in the field of semiconductor etching.

[0035] Specifically, in this embodiment, the gas in the vacuum chamber 100 is extracted to form a high vacuum chamber 110 with a high vacuum degree, thereby reducing the influence of the background gas and avoiding collision loss between the atomic gas introduced into the high vacuum chamber 110 and the background gas.

[0036] Specifically, in one implementation of the present embodiment, the vacuum chamber 100 is made of stainless steel, such as 316L stainless steel, and is formed by stamping, so that the structure has high strength, can withstand high pressure, and can form a spatially stable high vacuum chamber 110. A plurality of openings are provided on the vacuum chamber 100 to connect the vacuum pump, window sheet at the front end, experimental equipment at the rear end, etc., and a standard CF knife-edge flange is used at the connection, and a sealing gasket is provided on the flange to ensure a high vacuum and low leakage rate internal environment.

[0037] Specifically, as another implementation of this embodiment, it is disclosed that the magnetic permeability device includes a high vacuum gauge and a vacuum pump, and the vacuum pump and the high vacuum gauge are both connected to the vacuum chamber 100; the high vacuum gauge is inserted into the high vacuum chamber 110 to detect the vacuum degree; the vacuum pump is arranged at one end of the high vacuum chamber 110 away from the magnetic permeability component 300, and is used to evacuate air to maintain the vacuum degree of the high vacuum chamber 110.

[0038] In this embodiment, a vacuum pump is used to extract the gas in the vacuum chamber 100, and a high vacuum gauge, i.e., a vacuum sensor, is used to monitor the vacuum degree of the high vacuum chamber 110 in real time. When the target vacuum condition is reached, the atomic beam is introduced to ensure that the atomic beam is transmitted to the arc-shaped atomic channel 400 during the magnetic conduction process, thereby reducing the loss during the transmission process.

[0039] Specifically, in the actual working process, the vacuum degree in the high vacuum chamber 110 is required to be relatively high, and needs to reach at least 10 -8 Torr, so the vacuum pump can be a combination of a mechanical pump and a molecular pump. First use the mechanical pump to initially evacuate the air, and then use the molecular pump to continue to increase the vacuum degree until the working requirements are met.

[0040] Specifically, the molecular pump disclosed in this embodiment is arranged at a position far away from the magnetic permeability component 300, for example, the magnetic permeability component 300 is arranged at the tail end of the vacuum chamber 100, and the ion pump is arranged at the head end of the vacuum chamber 100, so as to reduce the influence of the magnetic field and avoid affecting the normal operation of the ion pump. Correspondingly, a pump connection port is arranged at a position far away from the magnetic permeability component 300 on the vacuum chamber 100 to connect the molecular pump.

[0041] like Figure 3 and Figure 4As shown, as an implementation of this embodiment, it is disclosed that the magnetic permeability component 300 includes a non-magnetic kit 320 and at least two permanent magnets 340, and the non-magnetic kit 320 is connected to the connecting frame 200; the non-magnetic kit 320 is in a ring shape, and at least two fixing parts 330 are protruding from the inner side of the non-magnetic kit 320, and at least two of the fixing parts 330 are arranged on the inner wall of the non-magnetic kit 320 in a centrally symmetrical manner; one side of the permanent magnet 340 is connected to the fixing part 330, and the other side protrudes from the fixing part 330 and extends toward the center of the non-magnetic kit 320; the atomic passage 310 is formed between at least two relatively arranged permanent magnets 340.

[0042] In this embodiment, the permanent magnet 340 is used to provide a magnetic field, and the non-magnetic kit 320 is only used to support and fix the permanent magnet 340. In order to reduce mutual interference, the non-magnetic kit 320 can be made of non-magnetic materials such as copper, aluminum alloy, etc.

[0043] Specifically, the permanent magnet 340 can be a permanent magnet, or a permanent magnet material sintered into a magnetic steel, such as a super-hard permanent magnet alloy sintered from a neodymium iron boron material or an aluminum nickel cobalt alloy material, to increase the rigidity of the permanent magnet, thereby being used in a vacuum environment and improving stability and service life.

[0044] Specifically, as another implementation of this embodiment, it is disclosed that a protective layer is provided on the surface of the permanent magnet 340. The permanent magnet 340 disclosed in this embodiment is arranged on the outside of the arc-shaped atomic channel 400, and the target atoms can fly out through the arc-shaped atomic channel 400, while atoms of other speeds will remain in the high vacuum chamber 110, which is easy to cause oxidation or corrosion problems to the permanent magnet 340. Therefore, a protective layer is provided on the surface of the permanent magnet 340, which is conducive to extending the service life of the permanent magnet 340.

[0045] Specifically, the protective layer disclosed in this embodiment is prepared by a coating process, for example, nickel, copper and other materials are used to form a dense protective layer to wrap the permanent magnet 340, thereby protecting the permanent magnet 340. In addition, after the protective layer is formed, the surface of the permanent magnet 340 still needs to be flat. In this embodiment, the surfaces of the permanent magnet 340, the non-magnetic kit 320 and the connector are all processed with high precision.

[0046] Specifically, the magnetic permeability component 300 in this embodiment is columnar as a whole, the non-magnetic suite 320 is annular, the inner wall is smooth, and a plurality of fixing parts 330 can be protruded in an integral manner, wherein the fixing part 330 extends toward the center direction of the non-magnetic suite 320, and the permanent magnet 340 is connected to the fixing part 330, so as to be stabilized on the inner side of the non-magnetic suite 320.

[0047] In this embodiment, at least two fixing parts 330 are provided, and correspondingly, the same number of permanent magnets 340 are also provided on the fixing parts 330. The arrangement of the fixing parts 330 determines that the permanent magnets 340 are provided in pairs on the non-magnetic set 320, symmetrically distributed on both sides of the inner wall of the non-magnetic set 320, and a gap is left between the permanent magnets 340 arranged opposite to each other, thereby forming an atomic passage 310 for atoms to be transmitted therethrough.

[0048] like Figure 3 As shown, as another implementation of this embodiment, it is disclosed that the cross-sectional shape of the fixing portion 330 is a trapezoid, and the width of the fixing portion 330 gradually decreases in the direction toward the center of the non-magnetic set 320. In this embodiment, the connection stability is improved by increasing the thickness of the inner wall contact end of the fixing portion 330 and the non-magnetic set 320. The thickness of the end of the fixing portion 330 away from the inner wall of the non-magnetic set 320 is reduced because the space is small near the center of the non-magnetic set 320, and multiple fixing portions 330 are arranged around the atomic passage 310, which are easy to interfere with each other, so reducing the thickness can play a role of avoidance, so that multiple fixing portions 330 and multiple permanent magnets 340 are independently set.

[0049] like Figure 4 As shown, as another implementation of this embodiment, it is disclosed that the fixing portion 330 is formed with an assembly groove 331 opening toward the center of the non-magnetic kit 320; the side wall of the assembly groove 331 is provided with a first screw hole 332; the permanent magnet 340 is plugged into the assembly groove 331; the magnetic permeability component 300 also includes a screw (not shown in the drawings), which is screwed into the first screw hole 332 and screwed in to abut against the permanent magnet 340.

[0050] In this embodiment, the permanent magnet 340 is inserted into the assembly groove 331 to improve the stability of the permanent magnet 340. Specifically, in order to further improve the stability of the permanent magnet 340 and avoid changes in the magnetic field, the depth of the assembly groove 331 can be set to two-thirds to three-quarters of the width of the permanent magnet 340, so that most of the surface area of ​​the permanent magnet 340 is in contact with the side wall or bottom wall of the assembly groove 331, thereby increasing the contact area and improving the friction force, thereby achieving the effect of increasing stability.

[0051] Specifically, in this embodiment, the permanent magnet 340 is connected to the fixing portion 330 by providing a first screw connection hole 332 and screwing with a screw, and the connection direction is perpendicular to the direction in which the permanent magnet 340 is inserted into the assembly slot 331, thereby constraining the permanent magnet 340 and preventing the permanent magnet 340 from slipping out of the assembly slot 331, thereby improving the stability of the magnetic guide assembly 300. Specifically, a plurality of first screw connection holes 332 can be provided, and a plurality of screws can be assembled without affecting the magnetism of the permanent magnet 340, so as to further increase the connection stability.

[0052] Specifically, the fixing part 330 disclosed in this embodiment is integrally formed with the non-magnetic set 320, and the fixing part 330, the non-magnetic set 320 and the screw are all made of non-magnetic materials, such as copper and aluminum alloy. It should be noted that only some non-magnetic materials are cited in this embodiment, and other non-magnetic materials, as long as they can achieve the technical effects disclosed in this application, should also be within the scope of protection of this application as equivalent replacements of the concept of the present invention.

[0053] It should be noted that, in this embodiment, only the permanent magnet 340 and the fixing part 330 are connected by punching and assembling screws, but the protection scope of this embodiment is not limited to this. Other types of connection methods, such as welding, bonding, snap-on, interference fit and other connection methods, as long as they can achieve the technical effects disclosed in this application, should also be within the scope of protection of this application as an equivalent replacement of the concept of the present invention.

[0054] like Figure 3 and Figure 4 As shown, as another implementation of this embodiment, it is disclosed that the radial cross-sectional shape of the outer wall of the non-magnetic kit 320 is a regular polygon, and at least one surface on the outer wall of the non-magnetic kit 320 is a contact surface 321, which is used to fit with the connecting frame 200. By closely fitting one surface on the outer wall of the non-magnetic kit 320 with the connecting frame 200, the contact area between the connecting frame 200 and the non-magnetic kit 320 is large, which is convenient for connection and stability. In addition, in this embodiment, multiple connecting frames 200 can be arranged on the inner wall of the vacuum chamber 100 in the radial direction, corresponding to multiple surfaces of the outer wall of the non-magnetic kit 320, so that there are two or more contact surfaces 321 on the outer wall of the non-magnetic kit 320 to increase the contact area, and multiple connection structures can be installed.

[0055] Specifically, the connecting frame 200 is provided with a plurality of first connecting holes 210 arranged in an arc shape; the contact surface 321 is provided with at least one second connecting hole 322 aligned with the first connecting hole 210; the first connecting hole 210 and the second connecting hole 322 are used to plug in connecting rods to connect the connecting frame 200 and the non-magnetic kit 320.

[0056] In this embodiment, the connection between the connecting frame 200 and the non-magnetic kit 320 is realized by providing the first connecting hole 210 and the second connecting hole 322 and plugging the connecting rod. Specifically, the connecting rod can be a screw rod. The non-magnetic kit 320 is fixed by passing the connecting rod through the first connecting hole 210 and the second connecting hole 322 and locking it with a nut. By providing 2, 3 or more connecting rods and increasing the connection points, the non-magnetic kit 320 is fixed in space and connected to the connecting frame 200 as a whole without shaking, thereby ensuring stability during use.

[0057] Specifically, a plurality of first connection holes 210 are arranged along an arc on the connection frame 200 disclosed in the present embodiment, and a plurality of magnetic permeability components 300 are sequentially assembled on the connection frame 200 at the same intervals, so that a plurality of atomic passages 310 can be arranged in an arc shape to form an arc-shaped atomic channel 400. In other words, the first connection holes 210 on the connection frame 200 also play a role in positioning the magnetic permeability components 300, so that the plurality of magnetic permeability components 300 can be sequentially assembled at the same angle, and the plurality of magnetic permeability components 300 can be accurately aligned.

[0058] It should be noted that, in this embodiment, only the connection between the connecting frame 200 and the non-magnetic kit 320 by punching holes and assembling connecting rods is exemplified, but the protection scope of this embodiment is not limited to this, and other types of connection methods, such as welding, bonding, snap-on, interference fit and other connection methods, as long as they can achieve the technical effects disclosed in this application, should also be within the scope of protection of this application as an equivalent replacement of the concept of the present invention.

[0059] like Figure 4 As shown, as another implementation of this embodiment, it is disclosed that the fixing parts 330 are provided with four, and the four fixing parts 330 are arranged in a cross shape on the inner wall of the non-magnetic kit 320; the permanent magnets 340 are provided with four, and the four permanent magnets 340 are arranged in a ring shape, and the angle between two adjacent permanent magnets 340 is 90°.

[0060] The four permanent magnets 340 disclosed in this embodiment are arranged in a cross shape, which can ensure that an uneven gradient magnetic field is formed in the center of the non-magnetic set 320, that is, in the atomic passage 310. A small number of permanent magnets 340 are used, and the magnetic field in the arc-shaped atomic passage 400 is relatively stable, which has a good deflection and guidance effect on the atomic beam.

[0061] It should be noted that, in this embodiment, only the number of fixing parts 330 and permanent magnets 340 is exemplified, but the protection scope of this embodiment is not limited to this. Other arrangements, such as 6, 8 or 12 permanent magnets 340, can achieve the technical effect disclosed in this application as long as the permanent magnets 340 are spaced at a specific angle and are evenly arranged in a ring shape around the arc-shaped atomic channel 400. As an equivalent replacement of the concept of the present invention, it should also be within the scope of protection of this application.

[0062] For example Figure 2 and Figure 3As shown, as another implementation of this embodiment, it is disclosed that the magnetic permeability device includes an aperture 500, which is connected to the connecting frame 200 and is arranged in the high vacuum chamber 110; and the aperture 500 and a plurality of the magnetic permeability components 300 are arranged in sequence along the atomic transmission direction; a beam limiting channel 510 for collimating the atomic beam is provided on the aperture 500 facing the entrance of the arc-shaped atomic channel 400, and the aperture of the beam limiting channel 510 is smaller than the aperture of the arc-shaped atomic channel 400.

[0063] Specifically, in this embodiment, the aperture 500 is arranged on the front side of the magnetic permeability component 300. After passing through the aperture 500, the atomic beam is injected into the center of the magnetic permeability component 300. After the atomic beam is introduced into the high vacuum chamber 110, part of the atoms are restricted by the aperture 500. The beam limiting channel 510 can only pass the atomic beam moving toward the arc-shaped atomic channel 400 and block atoms in other moving directions, so that the target atomic beam can smoothly enter the arc-shaped atomic channel 400.

[0064] Specifically, in this embodiment, two apertures 500 are provided, which are spaced apart along the moving direction of the atomic beam. The two apertures 500 are collimated one after the other, and only the target atomic beam toward the arc-shaped atomic channel 400 passes through, so the collimation effect is better.

[0065] like Figure 5 As shown, as another embodiment of the present application, a magnetic permeation method for guiding the deflection of a single quantum state atom is also disclosed, which is used in any of the magnetic permeation devices for guiding the deflection of a single quantum state atom as described above, wherein the magnetic permeation method includes:

[0066] S100, extracting air from the high vacuum chamber 110, and monitoring the vacuum degree in real time to obtain a real-time vacuum degree value;

[0067] S200, if the real-time vacuum value is less than or equal to the preset vacuum value, collimating the atomic beam, and directing the atomic beam to the arc-shaped atomic channel 400, to screen out the atomic beam selected by the target single quantum state.

[0068] In this embodiment, a high vacuum chamber 110 that meets the conditions is first manufactured, and then an atomic beam is introduced to reduce the influence of the background gas in the high vacuum chamber 110, so that the deflection and velocity filtering of the atomic beam can be carried out efficiently. Specifically, the preset vacuum value is pre-set according to the actual requirements of the magnetic permeability operation, for example, 10 -8 Entrust.

[0069] It should be understood that the various parts of the present application can be implemented in hardware, software, firmware or a combination thereof. In the above-mentioned embodiments, multiple steps or methods can be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. If implemented in hardware, as in another embodiment, it can be implemented by any one of the following technologies known in the art or their combination: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, a dedicated integrated circuit having a suitable combination of logic gate circuits, a programmable gate array, a field programmable gate array, etc.

[0070] In addition, each functional unit in each embodiment of the present application may be integrated into a processing module, or each unit may exist physically separately, or two or more units may be integrated into one module. The above-mentioned integrated module may be implemented in the form of hardware or in the form of a software functional module. If the integrated module is implemented in the form of a software functional module and sold or used as an independent product, it may also be stored in a computer-readable storage medium.

[0071] In summary, the present application discloses a magnetic permeability device for guiding the deflection of single quantum state atoms, which includes a vacuum chamber 100, a connecting frame 200 and a plurality of magnetic permeability components 300, wherein a high vacuum chamber 110 is formed in the vacuum chamber 100; the connecting frame 200 is arranged on the inner wall of the vacuum chamber 100; a plurality of magnetic permeability components 300 are arranged in an arc shape on the connecting frame 200; an atomic passage 310 is provided at the center of the magnetic permeability component 300; the atomic passages 310 on the plurality of magnetic permeability components 300 are connected in sequence to form an arc-shaped atomic channel 400 with an uneven gradient magnetic field, which is used to drive the deflection of atoms. By setting a plurality of magnetic permeability components 300 to deflect the atomic beam, the angular deflection transmission of the central atomic beam is realized, which is conducive to realizing velocity filtering, and a single quantum state atomic beam source can be obtained, which provides a neutral atomic beam source basis for cold collision experiments in extremely low energy regions, and also contributes to the development of the preparation of metastable atoms in the field of semiconductor etching.

[0072] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0073] It should be noted that the present invention takes the magnetic guidance device and the magnetic guidance method for guiding the deflection of single quantum state atoms as an example to introduce the specific structure and working principle of the present invention, but the application of the present invention is not limited to the magnetic guidance device and the magnetic guidance method for guiding the deflection of single quantum state atoms, and can also be applied to other similar production and use.

[0074] It should be understood that the present invention is not limited to the exact construction that has been described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

[0075] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A magnetic permeability device for guiding the deflection of single quantum state atoms, characterized in that: include: A vacuum chamber, wherein a high vacuum chamber is formed in the vacuum chamber; A connecting frame, arranged on the inner wall of the vacuum chamber; A plurality of magnetic permeability components are arranged in an arc shape on the connection frame; an atomic passage is provided at the center of the magnetic permeability component; Among them, the atomic passages on several of the magnetic permeability components are connected in sequence to form an arc-shaped atomic channel with an uneven gradient magnetic field, which is used to drive atomic deflection.

2. The magnetic guide device for guiding the deflection of single quantum state atoms according to claim 1, characterized in that: The magnetic guide assembly comprises: A non-magnetic kit connected to the connecting frame; the non-magnetic kit is annular in shape, and at least two fixing parts are protruding from the inner side of the non-magnetic kit, and at least two of the fixing parts are centrally symmetrically arranged on the inner wall of the non-magnetic kit; at least two permanent magnets, one side of each permanent magnet being connected to the fixing portion, and the other side of each permanent magnet protruding from the fixing portion and extending toward the center of the non-magnetic sleeve; Wherein, the atomic passage is formed between at least two of the permanent magnets that are arranged opposite to each other.

3. The magnetic guide device for guiding the deflection of single quantum state atoms according to claim 2, characterized in that: The cross-sectional shape of the fixing portion is a trapezoid, and the width of the fixing portion gradually decreases in a direction toward the center of the non-magnetic sleeve.

4. The magnetic guide device for guiding the deflection of single quantum state atoms according to claim 2, characterized in that: The fixing portion is formed with an assembly groove opening toward the center of the non-magnetic sleeve; a first screw hole is provided on the side wall of the assembly groove; the permanent magnet is plugged into the assembly groove; The magnetic guide assembly further includes a screw rod, which is screwed into the first screw hole and screwed in until it abuts against the permanent magnet.

5. The magnetic guide device for guiding the deflection of single quantum state atoms according to claim 2, characterized in that: The radial cross-section of the outer wall of the non-magnetic sleeve is a regular polygon, and at least one surface of the outer wall of the non-magnetic sleeve is a contact surface for fitting with the connecting frame; Among them, the connecting frame is provided with a plurality of first connecting holes arranged in an arc shape; the contact surface is provided with at least one second connecting hole aligned with the first connecting hole; the first connecting hole and the second connecting hole are used to plug in connecting rods to connect the connecting frame and the non-magnetic kit.

6. The magnetic guide device for guiding the deflection of single quantum state atoms according to claim 2, characterized in that: A protective layer is provided on the surface of the permanent magnet.

7. The magnetic guide device for guiding the deflection of single quantum state atoms according to any one of claims 2 to 6, characterized in that: There are four fixing parts, and the four fixing parts are arranged in a cross shape on the inner wall of the non-magnetic kit; There are four permanent magnets, which are arranged in a ring shape, and the angle between two adjacent permanent magnets is 90°.

8. The magnetic guide device for guiding the deflection of single quantum state atoms according to claim 1, characterized in that: The magnetic permeability device comprises an aperture, which is connected to the connection frame and is arranged in the high vacuum chamber; and the aperture and a plurality of magnetic permeability components are arranged in sequence along the atomic transmission direction; Wherein, a beam-limiting hole for collimating the atomic beam is arranged on the aperture directly facing the entrance of the arc-shaped atomic channel, and the aperture of the beam-limiting hole is smaller than the aperture of the arc-shaped atomic channel.

9. The magnetic guide device for guiding the deflection of single quantum state atoms according to claim 1, characterized in that: The magnetic permeability device includes a high vacuum gauge and a vacuum pump, and the vacuum pump and the high vacuum gauge are both connected to the vacuum chamber; the high vacuum gauge is inserted into the high vacuum chamber for detecting the vacuum degree; the vacuum pump is arranged at one end of the high vacuum chamber away from the magnetic permeability component, and is used to evacuate air to maintain the vacuum degree of the high vacuum chamber.

10. A magnetic permeation method for guiding the deflection of single quantum state atoms, used in the magnetic permeation device for guiding the deflection of single quantum state atoms as claimed in any one of claims 1 to 9, characterized in that: The magnetic permeability method comprises: Extract the air in the high vacuum chamber, monitor the vacuum degree in real time, and obtain the real-time vacuum degree value; If the real-time vacuum value is less than or equal to the preset vacuum value, the atomic beam is collimated and directed to the arc-shaped atomic channel to screen out the target single quantum state atomic beam.

Citation Information

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