Transducer attachment for an acoustic microscope, in particular an ultrasound scanning microscope, and a probe of an acoustic microscope, in
By designing a transducer attachment on the probe of the ultrasonic scanning microscope, providing a local water liner and utilizing a negative pressure suction chamber to remove excess coupling media, the problem of poor contact between the sample and coupling media is solved and the quality of the sonic coupling is improved. and prevent sample oxidation.
Patent Information
- Application Number
- CN202380047516.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2022-10-04
- Filing Date
- 2023-09-27
- Publication Date
- 2025-01-24
AI Technical Summary
In acoustic microscopy, it is difficult for the prior art to achieve local and brief contact between the sample and the coupling medium, resulting in poor sound wave connection and difficult to prevent oxidation of the sample surface.
Design of a transducer attachment for use in ultrasound scanning microscopy that utilizes a negative pressure suction chamber to remove excess coupling medium and ensure short contact times by providing a local water liner between the exit opening of the receiving space and the sample surface And no bubbles.
The part of the sample and the connection medium has a local and brief contact, improves the quality of sound wave connection, prevent oxidation on the surface surface, and simplifies the transformation of existing acoustic microscopes.
Smart Images
Figure CN119365774A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a transducer attachment for an acoustic microscope, in particular an ultrasound scanning microscope, and a probe head of an acoustic microscope, in particular an ultrasound scanning microscope, having at least one transducer and a lens. Furthermore, the invention relates to a use or arrangement of a transducer attachment and to a method for operating an acoustic microscope, in particular an ultrasound scanning microscope. Background Art
[0002] Ultrasonic microscopy or acoustic microscopy (also known as scanning acoustic microscopy (SAM)) is employed to scan a sample with ultrasound in a scanning method, and to process the reflected sound waves in order to generate an image of the sample structure therefrom.
[0003] Therefore, an ultrasound microscope has an ultrasound head (referred to as probe or transducer head, respectively). Therefore, the ultrasound head consists of an acoustic lens and a sound converter (transducer) connected thereto.
[0004] In the case of acoustic microscopy examinations, water is used as a coupling medium between the acoustic transducer and the sample to be examined in order to obtain a good transmission of the acoustic waves emitted by the transducer to the sample. For this purpose, a coupling medium with good properties for sound conduction is required.
[0005] In ultrasonic microscopy operating in the frequency range of 1 MHz to 5 GHz, the sample is usually immersed in a water tank and placed on a sample holder, and the sample is examined by the ultrasonic microscope in an immersed state. In another method, a water jet is used formed between the sound transducer and the sample to ensure a good sound connection into the sample. Summary of the invention
[0006] The object of the invention is to allow, in acoustic microscopy, only local and as brief a contact as possible between the sample to be examined and the coupling medium, wherein, in particular, a stable and preferably bubble-free local coupling medium cushion, in particular a water cushion, is provided between the sound converter and the sample. Another object is to retrofit existing acoustic scanning microscopes for acoustic microscopy in a simple manner.
[0007] This object is solved by a transducer attachment body (specifically a transducer head attachment body) for a probe of an acoustic microscope (specifically an ultrasonic scanning microscope), the probe having at least one transducer and a lens, the acoustic microscope having a receiving space for receiving the probe, wherein a supply line for supplying a liquid connecting medium (specifically water) is fluidically connected to the receiving space, wherein the receiving space has an outlet opening facing a sample to be inspected, the outlet opening being used to discharge the liquid connecting medium from the receiving space, wherein a suction chamber is arranged outside the receiving space and laterally located at the outlet opening of the receiving space, the suction chamber being applied with negative pressure or being capable of being applied with negative pressure for sucking the connecting medium escaping from the outlet opening.
[0008] The invention is based on the idea that by providing a transducer attachment body for a probe in an acoustic microscope, in particular an ultrasonic scanning microscope, a local water cushion is provided between the outlet opening of the receiving space and the surface of the sample to be examined, wherein the local water cushion allows a good connection of ultrasound, wherein water serves as a connection medium between the transducer attachment body, in particular outside the outlet opening, and the sample surface for the transducer. Thus, the surrounding area outside the cushion of the connection medium which remains dry is dried again respectively after scanning. Preferably, for example, in the case of operation of the acoustic microscope at speeds of up to 2 m / s and 50 m / s 2 Scan samples smoothly and contactlessly with the highest possible acceleration.
[0009] According to the invention, an internal area is formed by the escape of the connecting medium from the outlet opening of the receiving space with the aid of the transducer attachment body, in which internal area a local cushion of the connecting medium is formed between the receiving space and the surface of the sample, wherein, by using negative pressure, excess connecting medium is vacuum-sucked from the surface of the sample in the external area through the suction chamber.
[0010] In the case of using the transducer attachment body according to the invention in an acoustic microscope, the examination of water-sensitive samples is facilitated, since occasionally only a portion of the sample surface is wetted by the coupling medium (i.e. temporarily and locally wetted by the coupling medium), while other areas of the sample surface that are not examined are not wetted and dry. Due to the short contact time of the coupling medium with the sample surface provided by the transducer attachment body, for example, oxidation of the metal sample surface can be prevented. Preferably, pure water is used as the coupling medium.
[0011] Furthermore, another advantage of the transducer attachment body is that the acoustic microscope formed therefrom can be operated independently of position. This means that the sample can be oriented horizontally and vertically, respectively, and a horizontally oriented sample can be examined both on the underside and on the upper side.
[0012] Due to the formation of the receiving space and the outlet opening facing the sample to be examined, it is allowed to introduce a coupling medium between the transducer attachment body and the sample, or to introduce a coupling medium between the transducer attachment body and the sample, so that the coupling medium between the transducer of the probe and the area of the sample to be examined is formed or can be formed as a kind of cushion, and in particular, outside the receiving space and / or outside the outlet opening. Due to the use and formation of a suction chamber arranged laterally at the outlet opening of the receiving space, existing coupling medium outside the ultrasound zone is removed again by suction, whereby the contact time between the coupling medium and the surface of the sample to be examined remains short.
[0013] Furthermore, another advantage of the present invention is that a probe for an existing acoustic microscope (particularly an ultrasonic scanning microscope) can be easily retrofitted with the transducer attachment body according to the present invention so as to improve the implementation of the existing acoustic microscope.
[0014] By forming the suction chamber on the sensor attachment body, in particular formed as a sensor head attachment body or probe attachment body, it is achieved that the coupling medium between the sensor attachment bodies, preferably outside the examination region of the sensor, can be evacuated or evacuated.
[0015] In the case where the probe is arranged in the receiving space, the outlet opening of the receiving space is formed opposite to the acoustic lens of the probe or opposite to the distal end of the probe. Therefore, the outlet opening is formed centrally or centrally on the outlet side of the receiving space. Preferably, the outlet opening is formed on the lower side or the upper side of the receiving space. In addition, the area of the outlet opening (particularly circular) is preferably smaller than the cross-section of the receiving space, wherein the outlet opening is formed as a flow restriction in the case of the coupling medium escaping from the receiving space.
[0016] Furthermore, a further development of the transducer attachment body is distinguished in that the suction chamber at least partially surrounds the outlet opening annularly or annularly, preferably the suction chamber surrounds the outlet opening in the region of the outlet side of the receiving space. As a result, a larger outer region of the coupling medium gasket can be removed in an effective manner from the sample surface between the receiving space of the transducer attachment body and the surface of the sample to be examined, between the outlet opening and the surface of the sample to be examined, respectively, by the partially annular or annular suction chamber.
[0017] Due to the transducer attachment body according to the invention, a flow of coupling medium can be continuously supplied from the receiving space of the transducer attachment body to the surface of the sample to be examined and the coupling medium can be continuously removed outside the examination area of the transducer. Preferably, an air bubble-free pad or a bubble-free pad is arranged below the lens of the acoustic transducer.
[0018] Furthermore, an embodiment of the transducer attachment body is distinguished in that the suction chamber is fluidly connected to at least one discharge line for discharging the coupling medium from the suction chamber. Via the discharge line, negative pressure is provided at the suction chamber in order to remove coupling medium escaping from the outlet opening from the examination region.
[0019] Preferably, according to a further development, two or more discharge lines are fluidly connected to the suction chamber, which two or more discharge lines are fluidly connected to the main discharge line. Thus, it is provided that the discharge lines connected to the suction chamber lead to the main supply line so that the vacuum coupling medium is guided away from the probe through the main discharge line.
[0020] Therefore, in a further embodiment, it is provided that two discharge lines are provided for the suction chamber, wherein the suction chamber comprises two suction chamber openings, wherein each suction chamber opening is connected to a respective discharge line, wherein, in particular, the suction chamber openings are arranged opposite one another. Due to the provision of two discharge lines at the suction chamber, the coupling medium is directed away from the probe at multiple locations simultaneously in an efficient manner.
[0021] Furthermore, in one configuration of the transducer attachment body, it is advantageous if a bubble collecting area (particularly an air bubble collecting area) for bubbles (particularly air bubbles) contained in the coupling medium is formed inside the receiving space. As a result, the quality of the inspection by means of the acoustic microscope is improved, since bubbles do not enter the area between the transducer and the surface of the sample to be inspected due to the bubble collecting area and thus do not affect the inspection. Preferably, bubbles or air bubbles are captured and collected in the receiving area by means of the bubble collecting area, whereby the bubbles are not transported through the outlet opening of the receiving area.
[0022] To this end, according to a further aspect, it is advantageously provided that the bubble collecting region comprises a collecting channel, wherein in particular the collecting channel is formed at least partially circumferential and / or at least partially annular or ring-shaped in the interior of the receiving space.
[0023] Preferably, according to a further development, the air bubble collecting region or collecting channel is formed on the opposite side of the outlet opening of the receiving region.
[0024] Furthermore, in the case of the transducer attachment body, it is preferred that the bubble collection area or the collection channel is fluidically connected to the discharge line, in particular, or to the main discharge line, by means of a bypass line. Thus, microbubbles collected in the bubble collection area or the collection channel can be removed from the receiving area, preferably continuously.
[0025] Furthermore, one configuration of the transducer attachment body is distinguished in that the receiving space comprises an introduction opening for introducing the probe into the receiving space, the introduction opening being formed opposite to the outlet opening. Thus, the probe and the transducer can be arranged in the receiving space of the transducer attachment body. Thus, different working distances of the transducer to the sample can be achieved. For example, the transducer attachment body is displaced along the lateral surface of the probe and is positioned accordingly. Thus, the attachment body can be fixed to the probe.
[0026] Furthermore, in an advantageous further development of the transducer attachment body, it is provided that the introduction opening is formed with a sealing body, in particular a sealing ring, and / or that the introduction opening comprises a preferably circumferential recess for a sealing body, in particular a sealing ring, wherein in particular the sealing body, in particular a sealing ring, is arranged in the recess.
[0027] Furthermore, in the case of the transducer attachment body, it is preferred that a rib structure or at least one channel or a channel structure is formed in the interior of the receiving space on the inner wall of the receiving space. By arranging the probe in the receiving space, the flowing coupling medium can be guided from the supply line via the receiving space through the rib structure or at least one channel or through the channel structure to the outlet opening of the receiving space, the channel structure being formed between the inner wall of the receiving space and the lateral surface of the preferably cylindrical probe.
[0028] Preferably, the transducer attachment body is formed as an adapter.
[0029] Furthermore, in one configuration, the transducer attachment body is distinguished in that it is made of plastic. Thus, preferably a plastic is used which releases no or only few foreign matter into the coupling medium. In particular, a plastic material is used which is also suitable for 3D printing. Furthermore, in a preferred manner, a dimensionally stable plastic and / or a long-lasting plastic is used.
[0030] Preferably, according to one embodiment, the transducer attachment body is formed with a preferably wirelessly readable identification device, in particular an RFID chip or a barcode or an EEPROM. By doing so, clearly detectable, preferably automatically assessable features of the transducer attachment body can be detected by a corresponding detection device, thereby improving the handling of the transducer attachment body.
[0031] Furthermore, embodiments of the transducer attachment body differ in that a supply line for connecting a medium comprises a connector link for the line, and in that a discharge line or a total discharge line for connecting a medium comprises a connector link for the line, wherein the connector link of the supply line is formed differently from the connector link of the discharge line or the total discharge line. For example, the connector links of the supply line and the discharge line or the total discharge line comprise different geometric shapes, whereby the lines connected to the respective connector links are connected differently to the respective connector links.
[0032] Furthermore, the above objects are achieved by an acoustic microscope, in particular an ultrasound scanning microscope, having a probe having at least one transducer and a lens, wherein a transducer attachment body as described above is arranged on the probe. To avoid repetitions, explicit reference is made to the previous explanations.
[0033] According to a further development of the acoustic microscope, it is advantageous if the supply line is connected to a coupling medium reservoir for a liquid coupling medium, wherein in particular a pump connected to the coupling medium reservoir is arranged in the supply line, and / or the discharge line, in particular a total discharge line, is connected to a negative pressure source.
[0034] Furthermore, an embodiment of the acoustic microscope is distinguished in that the probe preferably comprises one transducer and one lens, or in that the probe comprises several transducers and several lenses for each transducer. In the context of the present invention, a probe will be introduced or arranged in the receiving space of the transducer attachment body, the probe comprising a single transducer with a (single) lens for focusing (ultrasound) waves. In an alternative configuration, in particular, the probe is formed with an array, or with an arrangement of several transducers and several lenses for the corresponding transducers. For example, in the case of an array, the transducers are arranged adjacent to each other in a linear sequence. In the context of the present invention, other arrangements of the probe, transducers and lenses are also possible or feasible in this case.
[0035] Furthermore, the above objects are solved by using or arranging a transducer attachment body on a probe of an acoustic microscope, in particular an ultrasound scanning microscope, in particular as described above, wherein the transducer attachment body is formed as described above. For this purpose, explicit reference is made to the previous explanations.
[0036] The above objects are further achieved from a method for operating an acoustic microscope, in particular an ultrasonic scanning microscope, wherein the acoustic microscope is formed with a probe having at least one transducer and a lens, and wherein the transducer attachment body according to the invention is arranged as described above. To avoid repetitions, explicit reference is made to the above explanations.
[0037] Other features of the present invention will become apparent from the description of the embodiments of the present invention, the claims and the accompanying drawings. According to the embodiments of the present invention, individual features or a combination of several features can be realized.
[0038] In the context of the present invention, features identified with "particularly" or "preferably" are to be understood as optional features. BRIEF DESCRIPTION OF THE DRAWINGS
[0039] The invention will be described below based on a number of exemplary embodiments and with reference to the accompanying drawings without limiting the general inventive concept, and with regard to any details according to the invention that are not further described in the text, explicit reference is made to the accompanying drawings. They are shown below:
[0040] Figure 1 A perspective view schematically shows a transducer attachment body of a probe for an acoustic microscope,
[0041] Figure 2 is a cross section through the transducer attachment body, in which the probe of the acoustic microscope is arranged, and
[0042] Figure 3 A top view of a transducer attachment body is schematically shown.
[0043] In the drawings, elements and / or parts of the same or similar types are provided with the same reference numerals, thereby omitting the corresponding re-introduction, respectively. DETAILED DESCRIPTION
[0044] Figure 1 is a schematic diagram of a transducer attachment body 10 according to the present invention. Figure 2 and Figure 3 Shown are a cross section through the transducer attachment body 10 and a plan view of the transducer attachment body 10, respectively. The transducer attachment body 10 is made of plastic, preferably in one piece.
[0045] The transducer attachment body 10 comprises a main body 12 which has a receiving space 18 in the interior. The receiving space 18 is fluidically connected to a supply unit 140 which comprises a supply line 14 for supplying a coupling medium, such as water, into the receiving space 18 of the main body 12. Furthermore, the body comprises a discharge unit 16 in order to discharge the coupling medium from the suction chamber 32 of the body 12 (see Figure 2 ).
[0046] Further details of the transducer attachment body 10 will be found in Figure 2 Internally, the main body 12 comprises a receiving space 18 which is fluidically connected to a supply unit 140. The supply line 14 of the supply unit 140 itself is equipped with a coupling medium reservoir (not shown here) in order to supply a liquid coupling medium, for example water, into the receiving space 18.
[0047] exist Figure 2In the cross-sectional view of FIG. 1 , a probe 20 of an acoustic microscope (specifically, an ultrasonic scanning microscope) is introduced into the receiving space 18 through an introduction opening 24 of the main body 12. The probe 20 includes a sound converter and a transducer 21 for generating acoustic waves, wherein a lens 23 for focusing the acoustic waves is provided at the front end of the probe 20. The probe 20 having the transducer 21 and the lens 22 is a part of an acoustic scanning microscope (specifically, an ultrasonic scanning microscope) (not shown here).
[0048] In the upper region of the introduction opening 24 , a circumferential recess 26 is formed in which a sealing ring 28 is accommodated in order to seal the receiving space 18 relative to the lateral surface of the probe 20 when the probe 20 is arranged in the receiving space 18 .
[0049] When the connecting medium flows into the receiving space 18 via the supply unit 140, the connecting medium is guided through the channel formed between the outer surface of the probe and the inner wall of the receiving space in the direction of the outlet opening 38 (specifically, on the lower side and / or on the circle of the receiving space 18), so that the connecting medium (specifically water) is guided through the outlet opening 38 in the direction of the surface 42 of the sample 40 to be inspected.
[0050] Due to the spacing of the transducer attachment body 10 and the sample 40 to be inspected, a coupling medium pad 50 is formed between the outlet opening 38 and the surface 42 of the sample 40 , so that in operation of the transducer 21 , the acoustic wave will be well coupled to the sample 40 to be inspected.
[0051] The outlet opening 38 is laterally surrounded by the suction chamber 32 so that the outer region of the coupling medium pad 50 is removed from the examination region between the transducer 21 and the surface 42 of the sample 40 by applying negative pressure to the suction chamber 32. For this purpose, the suction chamber 32 is connected by two opposite openings (see Figure 3 ) is fluidly connected to two discharge lines 34.1, 34.2, the two opposite orifices being connected to a total discharge line 34, wherein, when negative pressure is applied to the total discharge line 34, the discharge lines 34.1, 34.2 fluidly connected thereto continue to be fluidly connected to the suction chamber 32. The suction chamber 32 as well as the discharge lines 34.1, 34.2 and the total discharge line 34 are part of a discharge unit 15 for discharging the sucked or evacuated connection medium.
[0052] Furthermore, the receiving space 18 comprises a collecting channel 30 in the region of the sealing ring 28 within the receiving space 18 in order to collect, for example, air bubbles which are contained as microbubbles in the coupling medium. The collecting channel 38 is also fluidically connected to the main discharge line 34 via a bypass line 36, so that when a negative pressure is applied in the main discharge line 34, air bubbles or gas bubbles are removed from the collecting channel 30 via the bypass line 36.
[0053] All cited features, including also those features taken from the drawings alone, and individual features disclosed in combination with other features, are considered essential to the invention both individually and in combination. Embodiments according to the invention can be realized by individual features or a combination of several features.
[0054] Reference numerals
[0055] 10 Transducer attachment body
[0056] 12 Main body
[0057] 14 Supply Unit
[0058] 16 Emission Unit
[0059] 18 Receiving Space
[0060] 20 Probe
[0061] 21 Transducer
[0062] 21 Lens
[0063] 24 Introduction opening
[0064] 26 recess
[0065] 28 Sealing ring
[0066] 30 Collection Channels
[0067] 32 Suction chamber
[0068] 34 Total discharge pipeline
[0069] 34.1, 34.2 Discharge pipeline
[0070] 36 Bypass line
[0071] 38 Exit opening
[0072] 40 samples
[0073] 42 Surface
[0074] 50 Connecting medium gasket
[0075] 140 Supply Unit
Claims
1. A transducer attachment body (10) for a probe (20) of an acoustic microscope, wherein the probe (20) has at least one transducer (21) and a lens (22), and the acoustic microscope has a receiving space (18) for receiving the probe (20), and the acoustic microscope is specifically an ultrasonic scanning microscope; wherein: A supply line (14) for supplying a liquid coupling medium, in particular water, is fluidically connected to the receiving space (18); wherein the receiving space (18) comprises an outlet opening (38) facing the sample (40) to be tested for discharging the liquid coupling medium from the receiving space (18); wherein a suction chamber (32) to which negative pressure is applied or can be applied is arranged outside the receiving space (18) and laterally at the outlet opening (38) of the receiving space for sucking the coupling medium escaping from the outlet opening (38).
2. The transducer attachment body (10) according to claim 1, characterized in that: The suction chamber (32) at least partially surrounds the outlet opening (38) annularly or annularly, preferably the suction chamber (32) at least partially surrounds the outlet opening (38) annularly or annularly in the region of the outlet side of the receiving space (18).
3. The transducer attachment body (10) according to claim 1 or 2, characterized in that: The suction chamber (32) is fluidically connected to at least one discharge line (34, 34.1, 34.2) for discharging the coupling medium from the suction chamber (32).
4. The transducer attachment body (10) according to claim 3, characterized in that: Two or more discharge lines (34, 34.1, 34.2) are fluidically connected to the suction chamber (32), wherein the two or more discharge lines (34.1, 34.2) are fluidically connected to a total discharge line (34).
5. The transducer attachment body (10) according to claim 4, characterized in that: Two discharge lines are provided for the suction chamber (32), wherein the suction chamber (32) comprises two suction chamber openings; wherein each suction chamber opening is connected to a corresponding discharge line (34, 34.1, 34.2); wherein the suction chamber openings are arranged opposite to each other.
6. The transducer attachment body (10) according to any one of claims 1 to 5, characterized in that: A bubble collecting area (28) is formed in the interior of the receiving space (18), which is in particular a bubble collecting area for bubbles contained in the coupling medium, in particular air bubbles.
7. The transducer attachment body (10) according to claim 6, characterized in that: The air bubble collecting region (28) comprises a collecting channel, wherein, in particular, the collecting channel is formed in the interior of the receiving space (18) to be at least partially circumferential and / or at least partially annular or ring-shaped.
8. The transducer attachment body (10) according to claim 6 or 7, characterized in that: The bubble collecting area (28) or the collecting channel is formed on the opposite side of the outlet opening (38) of the receiving area.
9. The transducer attachment body (10) according to any one of claims 6 to 8, characterized in that: The bubble collecting area (28) or the collecting channel is fluidically connected to a discharge line (34, 34.1, 34.2), in particular to a total discharge line or the total discharge line (34, 34.1, 34.2), via a bypass line.
10. The transducer attachment body (10) according to any one of claims 1 to 9, characterized in that: The receiving space (18) includes an introduction opening for introducing a probe (20) into the receiving space (18), the introduction opening being formed to be opposite to the outlet opening (38).
11. The transducer attachment body (10) according to claim 10, characterized in that: The introduction opening is formed with a sealing body, in particular a sealing ring, and / or the introduction opening comprises a preferably circumferential recess for a sealing body, in particular a sealing ring; wherein, in particular, the sealing body, in particular a sealing ring, is arranged in the recess.
12. The transducer attachment body (10) according to any one of claims 1 to 11, characterized in that: A rib structure or at least one channel or a channel structure is formed in the interior of the receiving space (18) on an inner wall of the receiving space (18).
13. The transducer attachment body (10) according to any one of claims 1 to 12, characterized in that: The transducer attachment body (10) is formed as an adapter.
14. The transducer attachment body (10) according to any one of claims 1 to 13, characterized in that: The transducer attachment body (10) is made of plastic.
15. The transducer attachment body (10) according to any one of claims 1 to 14, characterized in that: The transducer attachment body (10) is formed with a preferably wirelessly readable identification device, in particular an RFID chip or a barcode or an EEPROM.
16. The transducer attachment body (10) according to any one of claims 1 to 15, characterized in that: The supply line (14) for the connecting medium comprises a connector link for the pipeline, and is characterized in that the discharge line (34, 34.1, 34.2) or the total discharge line (34, 34.1, 34.2) for the connecting medium comprises a connector link for the pipeline, wherein the connector link of the supply pipeline is formed differently from the connector link of the discharge line (34, 34.1, 34.2) or the total discharge line (34, 34.1, 34.2).
17. An acoustic microscope, comprising a probe (20), wherein the probe (20) comprises at least one transducer (21) and a lens (22), wherein the acoustic microscope is specifically an ultrasonic scanning microscope, wherein: The transducer attachment body (10) according to any one of claims 1 to 16 is arranged on the probe (20).
18. The acoustic microscope according to claim 17, characterized in that The supply line (14) is connected to a coupling medium reservoir for the liquid coupling medium, wherein in particular a pump connected to the coupling medium reservoir is arranged in the supply line (14), and / or is characterized in that The discharge line (34, 34.1, 34.2), in particular the total discharge line (34, 34.1, 34.2), is connected to a negative pressure source.
19. The acoustic microscope according to claim 17 or 18, characterized in that: The probe (20) preferably exclusively comprises a transducer (21) and a lens (22), or is characterized in that: The probe (20) includes a plurality of transducers (21) and a plurality of lenses (21) for each transducer (21).
20. Use or arrangement of a transducer attachment body (10) on a probe head (20) of an acoustic microscope, in particular an ultrasonic scanning microscope, in particular according to any one of claims 17 to 19, wherein: The transducer attachment body (10) is formed according to any one of claims 1 to 16.
21. A method for operating an acoustic microscope, the acoustic microscope being in particular an ultrasonic scanning microscope, wherein: The acoustic microscope is formed with a probe head (20) having at least one transducer (21) and a lens (22), wherein the transducer attachment body (10) according to any one of claims 1 to 16 is arranged on the probe head (20).