Device for use with an electrical component, system including a device for use with an electrical component, method of operating an electrical component
By designing a device for encirclement components, using the changes in the component to reduce the capacitor effects, solve the shortcomings of parasitic capacitance problems in existing technologies, and achieve better electromagnetic shielding and electric field matching effects.
Patent Information
- Application Number
- CN202380047164.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2022-06-14
- Filing Date
- 2023-06-12
- Publication Date
- 2025-01-24
AI Technical Summary
The prior art has problems of huge, no good potential matching and the introduction of high capacitance loads when dealing with parasitic capacitances, especially in high bandwidth systems.
An apparatus is devised that at least partially surrounds an electrical component about an axis by at least one of the members including a property (such as a quantity or distance parameter) that varies along the axis to reduce capacitive effects between the electrical component and the environment.
Effectively reduce the electromagnetic interference between the electrical component and the environment, improve the predictability of the electric field, make the capacitor effect easier to compensate, and reduce the charging and discharge time of parasitic capacitors.
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Figure CN119365939A_ABST
Abstract
Description
Technical Field
[0001] The present invention generally relates to technology for use with electrical components. In particular, the present invention relates to devices, systems and methods for mitigating the effects of unwanted capacitance between an electrical component and its operating environment. Background Art
[0002] Parasitic or stray capacitance can cause unavoidable and usually unwanted capacitance that exists between parts of an electronic component or circuit simply because of their proximity to each other. When two electrical conductors at different voltages are brought close together, the electric field between them causes charge to be stored on them; this effect constitutes capacitance.
[0003] At low frequencies, parasitic capacitance can usually be ignored, but in high-frequency circuits, it can be a significant problem and is often a factor that limits the operating frequency and bandwidth of electronic components and circuits. In closely spaced cables, parasitic capacitive coupling can cause crosstalk, which means that signals from one circuit leak into another, causing interference and unreliable operation.
[0004] US 8373998 B2 discloses a resistor shield that minimizes crosstalk and power supply interference. The shield includes a plurality of printed circuit board shields that are arranged between each of the input resistors on the main printed circuit board in the power meter. Each PCB shield has a conductive layer that provides shielding against unwanted energy. The inventors in US 8373998 B2 also recognize that a resistor sandwiched between two grounded PCB shields can look like a capacitor and behave like a capacitor. However, to address this problem, they teach arranging resistors in a diagonal or parallel manner between each pair of PCB shields to prevent the resistors from moving. Since the capacitance depends on the distance between the two conductive materials, the distance between the fixed resistor and the PCB pair will produce a non-variable parasitic capacitance, which can then be compensated.
[0005] US 7498696 B2 discloses a method for grading voltage and shielding high voltage components in a printed circuit board (PCB). Specifically, US 7498696 B2 teaches configuring a plurality of second tracks, each of which is constructed of a metal or alloy and is provided at different positions along the length of the high voltage component. In addition, each of the second tracks is coupled to a corresponding voltage source. This configuration forces the potential at a specific position along the length of the high voltage component to become substantially equal to the potential of the second track corresponding to the specific position, thereby generating a substantially linear voltage distribution (grading) along the length of the high voltage component.
[0006] Shielded resistors having two cylindrical shields provided on opposite sides of the resistor are also known. Such shields are intended to remove the electric field in the radial direction. However, they are either too bulky or they do not provide a good match between the potential around the resistor and the potential on the resistor.
[0007] Grading rings are also known that surround the insulator covering the conductor. These grading rings make the electric field follow the voltage potential along the conductor, thus avoiding breakdown of the insulator. The grading rings are usually connected to a capacitive voltage divider. In general, such solutions are bulky and introduce a high capacitive load to the system, which is disadvantageous for systems with high bandwidth.
[0008] While known solutions in the prior art for dealing with parasitic capacitance may be satisfactory in some cases, they may have certain disadvantages and limitations. They may be bulky, do not provide a good match between the potential around the resistor and the potential across the resistor, and may introduce a high capacitive load to the system, which is disadvantageous for systems with high bandwidth. Summary of the invention
[0009] It is an object of the present invention to overcome or at least alleviate the shortcomings and disadvantages of the prior art.
[0010] According to a first aspect, the invention relates to a device for use with an electrical component.
[0011] The device is configured to at least partially surround at least a component portion of the electrical component around an axis, thereby defining an area therebetween. In this way, the electrical component (or a portion thereof) can be provided in an enclosure produced by the device and thus at least partially isolated from the environment outside the enclosure. This can be advantageous because it can allow the device to electromagnetically shield the electrical component. Therefore, electromagnetic interference between the electrical component and the environment in which the electrical component is located can be reduced and / or blocked. In other words, the device can be an electromagnetic shield for the electrical component.
[0012] Furthermore, the device may be adjacent to and surrounded by the region between the electrical component and the device. The electric field in the region may be (primarily) affected by the electrical component itself and the device. On the other hand, in the absence of the device, the electric field around and near the electrical component may be affected by the electrical component and other electrical conductors that may be present in the environment in which the electrical component is located. Therefore, the device of the present invention may be advantageous because the electric field in the region and any effect that the electric field may have on the electrical component may be more predictable and therefore more easily compensated than in the case where the device is not used.
[0013] The device includes two components. At least one of the components includes at least one variable attribute that varies along an axis. At least one variable attribute can vary along the axis so that the effect caused by the capacitance between the electric component and the environment in which the electric component is positioned can be reduced. As will be discussed further below, at least one variable attribute can be the number of components or the distance of the component from the axis. Configuring the components so that at least one of them includes at least one variable attribute allows the device to affect the electric field in the area (i.e., the electric field around the electric component) in such a way that the effect caused by the capacitance between the electric component and the environment in which the electric component is positioned can be reduced.
[0014] Thus, the device may be advantageous because even though it may generate a parasitic capacitor with the electrical component, the charging and / or discharging of said capacitor may be mitigated and / or preferably eliminated. In this way, when attempting to change the potential of the electrical component, the time delay that may be caused by the presence of said parasitic capacitor may be reduced and / or preferably eliminated. Again, this may be achieved by configuring the device so that at least one of its components may include at least one variable attribute (e.g., a quantity or distance parameter) that may be variable along an axis.
[0015] Throughout this document, the terms potential and voltage are used interchangeably.
[0016] It should be understood that the axis, which may also be interchangeably referred to as the variation axis and / or the longitudinal axis, is used herein only to refer to the direction along which at least one variation property may vary.
[0017] The axis may be a straight line indicating a straight direction.
[0018] The axis may be a central axis of the device.
[0019] The axis may be a central axis of the electrical component.
[0020] The axis may be parallel to the direction of flow of the current through the electrical component. That is, the axis may be parallel to the direction along which the potential in or on the electrical component may change. For example, the electrical component may be a circuit element, such as a resistor. In this example, the current may generally flow from one end (or terminal) of the resistor to the other end (or terminal). The potential may also be reduced from one end of the resistor to the other end. Therefore, the axis along which at least one change attribute may change may point from one end (or terminal) of the electrical component to the other end (or terminal).
[0021] The axis may be parallel to the gradient of the potential along the electrical component. In this way, at least one changing property may change along the same direction that the voltage in or on the electrical component may change. In this way, the device may affect the electric field in the area between the electrical component and the device so that the electric field may match the gradient of the change in potential along the electrical component.
[0022] The axis may be a longitudinal axis of the electrical component. That is, the electrical component may extend along the axis.
[0023] In some embodiments, the electrical component may extend substantially longitudinally along the axis. That is, the electrical component may comprise a substantially longitudinal shape in the direction of the axis, that is, it may comprise one dimension that may be larger than the other dimensions, the larger dimension being measured along the axis.
[0024] The electrical component may include two component ends, which may be opposite to each other and located at different positions along the axis. The two component ends may refer to the ends of the electrical component in the direction of the axis. Alternatively or additionally, the two component ends may refer to electrical terminals of the electrical component. The electrical terminals may be configured to facilitate electrical connection thereon. For example, one of the electrical terminals may be an input electrical port and the other may be an output electrical port.
[0025] The device may include a first device end and a second device end, the first device end and the second device end being opposite to each other and located at different positions along the axis. The first device end and the second device end are collectively referred to as device ends. The first device end and the second device end may be the ends of the device in the axial direction.
[0026] A first of the members may extend along the axis from the first device end, through the center of the device, and toward the second device end. Similarly, a second of the members may extend along the axis from the second device end, through the center of the device, and toward the first device end. That is, the device may include two halves along the axis, and each of the halves may include two members.
[0027] The minimum distance between the components may be at least 0.5 mm, preferably at least 1 mm. In other words, the components may be spaced at least 0.5 mm, preferably at least 1 mm apart from each other. This may facilitate electrical insulation of the components from each other. In this way, the components may comprise different electrical potentials.
[0028] In some embodiments, the minimum distance between members may be 1 mm.
[0029] The minimum distance between the members may be at least 0.5 mm and at most 1.5 mm, preferably at least 0.8 mm and at most 1.2 mm, more preferably at least 0.9 mm and at most 1.1 mm.
[0030] The components may be configured such that any radial line perpendicular to the axis may pass through at most one of the components.
[0031] In other words, the components may be non-overlapping. This may be advantageous because the capacitance between the components may be reduced. That is, the components may be conductive. In this way, they may form a capacitor. By configuring the device so that the components do not overlap, the capacitance between the components may be reduced. As a result, the capacitive load introduced by the device may be reduced.
[0032] The members may be coaxial. For example, both members may include an axis as a central axis.
[0033] The components may be electrically insulated from each other. This may be advantageous because it may allow the components to be held at different electrical potentials without causing a short circuit between the components.
[0034] Furthermore, the components may be configured to be electrically conductive. This may be advantageous because it may allow the components to be connected to an electrical energy source and thus be held at a predetermined potential. In this way, the components may generate a corresponding electric field, thereby influencing the electric field in the region.
[0035] The component can be configured to be electrically connected to an electrical energy source. In this way, the potential of the component can be "forced" to be at a predetermined or desired value. This can be particularly advantageous for reducing or eliminating the charging and / or discharging of capacitors generated by electrical components and devices.
[0036] The device may comprise a hollow cylindrical shape. This may be particularly easy to manufacture - as the device may be manufactured as a rectangular sheet and then wrapped to form a cylinder. Furthermore, the shape may produce a package that may accommodate electrical components of different sizes.
[0037] The device may comprise a device through-hole. In this way, the electrical component and the device may be easily arranged such that the device may at least partially surround at least a component part of the device.
[0038] The device through-hole may extend along the axis.
[0039] The device through-holes may be configured to accommodate electrical components. In some embodiments, the device through-holes may be configured to accommodate electrical components of different sizes.
[0040] A device via may include an area. In other words, a device via may refer to an enclosure created by a device that may house an electrical component.
[0041] The components may be identical in shape. In this way, the components may have exactly opposite effects on the electric field in the region. Additionally or alternatively, it may facilitate manufacturing of the device.
[0042] The device may include a substrate layer that is configured to be non-conductive. This may reduce the likelihood that the device will short-circuit, for example, with an electrical component or with other electrical conductors that may be nearby.
[0043] The base layer may be made of a non-conductive material. The base layer may include a polyimide material. For example, the base layer may be a polyimide film.
[0044] The substrate layer may be continuous. Again, this may provide better electrical insulation and / or better support for other layers of the device.
[0045] The base layer may form at least a portion of the outer surface of the device.
[0046] The device may include a conductive layer configured to be electrically conductive. The conductive layer may be particularly useful for forming a component of the device.
[0047] The conductive layer may include at least one conductive material.
[0048] At least one of the conductive materials may be a metal, such as copper, gold, aluminum, iron, or silver.
[0049] Preferably, the conductive layer may comprise copper.
[0050] The conductive layer may include two conductive layer portions that are electrically insulated from each other. Each member may include a respective one of the two conductive layer portions.
[0051] In some embodiments, the conductive layer may include two disjoint sets of conductive layer portions. Each of the two sets may include multiple conductive layer portions. All conductive layer portions of the conductive layer may be spaced apart from each other. The layer portions within the set may be configured to be electrically connected to each other, and the layer portions of different sets may be electrically insulated from each other. Each component may include a corresponding one of the two conductive layer portions. Such an embodiment may be particularly advantageous because it may allow components of the device to be configured or created by simply connecting the conductive layer portions to each other to form two disjoint sets. This may, for example, allow components to be reconfigured multiple times depending on the application and / or electrical components. For example, the size of the component may be configured by simply connecting or disconnecting the conductive layer portions to each other.
[0052] The conductive layer may be provided on the base layer. In this way, the base layer may support the conductive layer and at least partially electrically insulate the conductive layer.
[0053] The conductive layer and the base layer may be glued together. However, this is merely exemplary and other attachment means may also be possible.
[0054] The device may include a cover layer covering at least the conductive layer, such that the conductive layer may be between the base layer and the cover layer. The cover layer may support the conductive layer and / or electrically insulate the conductive layer.
[0055] The conductive layer and the cover layer may be glued together. However, this is merely exemplary and other attachment means may also be possible.
[0056] The cover layer may be configured to be non-conductive.
[0057] The cover layer may be made of a non-conductive material.
[0058] The cover layer may include a polyimide material. For example, the cover layer may be a polyimide film.
[0059] The covering layer may form at least a portion of the outer surface of the device.
[0060] The outer surface of the device may be formed by a cover layer and a base layer.
[0061] In some embodiments, the conductive layer may be embedded in the base layer. For example, the base layer may be wrapped around the conductive layer.
[0062] Thus, the base layer may form the entire outer surface of the device.
[0063] In some embodiments, one of the components may include at least one tooth that may extend parallel to the axis. Alternatively or additionally, both components may include at least one corresponding tooth that extends parallel to the axis. Alternatively or additionally, at least one of the components may include a plurality of teeth that extend parallel to the axis. Alternatively or additionally, both components may each include a plurality of teeth that extend parallel to the axis.
[0064] That is, the teeth protrude in a direction parallel to the axis. In other words, the teeth may be perpendicular to a plane, wherein the plane is perpendicular to the axis. In other words, the teeth may protrude from a plane perpendicular to the axis.
[0065] Teeth may be advantageous because they may facilitate configuring at least one of the components to include varying properties. Specifically, one or more teeth of at least one of the components may be shaped and / or distanced from the axis to configure the corresponding component with varying properties.
[0066] Each tooth may extend along an axis from a first half of the device to a second half of the device, wherein the first half and second half of the device are separated by a plane perpendicular to the axis. This may allow each tooth, and therefore a corresponding member, to be present in each half of the device.
[0067] In some embodiments, each tooth may extend from a first device end, through the center of the device and toward a second device end. However, it should be understood that it may not be necessary for each tooth to "start" exactly at one of the device ends.
[0068] For example, each tooth may include a maximum length along the axis that may be at least 25% of the maximum length along the axis of the device.For example, if the dimension of the device measured parallel to the axis is one unit, the dimension measured parallel to the axis of each tooth may be at least a quarter unit.
[0069] Each tooth may comprise a maximum length along the axis which may be at most 90% of the maximum length along the axis of the device.
[0070] Each tooth may comprise a maximum length along the axis which may be at least 25% and at most 90% of the maximum length along the axis of the device.
[0071] Each tooth may comprise a maximum length along the axis which may be at least 35% and at most 85% of the maximum length along the axis of the device.
[0072] Each tooth may comprise a maximum length along the axis which may be at least 50% of the maximum length along the axial direction of the device.
[0073] Generally, it may be advantageous to have each tooth start at a position along the axis close to one of the device ends and end at a position along the axis close to the other of the device ends.
[0074] In some embodiments, at least one of the members may include at least 3 teeth.
[0075] In some embodiments, at least one of the members may include up to 50 teeth.
[0076] In some embodiments, at least one of the members may include up to 25 teeth.
[0077] In some embodiments, at least one of the members may include at least 3 teeth and at most 15 teeth.
[0078] In some embodiments, at least one of the members may include at least 5 teeth and at most 10 teeth.
[0079] In some embodiments, at least one of the members may include 5 teeth.
[0080] In some embodiments, at least one of the members may include 10 teeth.
[0081] Generally, more teeth can more effectively reduce the effect of capacitance between the electrical component and the device. For example, a device in which each member includes 10 teeth can be more effective than a device in which each member includes 5 teeth or only one tooth. However, a device with fewer teeth can be easier to manufacture.
[0082] The teeth included by different components can be electrically insulated from each other. This can allow the teeth from different components (and the components themselves) to include different electrical potentials from each other. In this way, the teeth of different components can be configured to include opposite effects on the electrical components, which in turn can facilitate matching the electrical potential on the area (which can be referred to as the second electrical potential) with the electrical potential of the electrical components along the axis (which can be referred to as the first electrical potential).
[0083] The teeth included in the same member may be electrically connected to each other. Therefore, the teeth of the same member may be configured to have the same potential.
[0084] In some embodiments, the teeth may be identical to each other.
[0085] In some embodiments, the components may be configured so that each tooth may fit into a corresponding space between two adjacent teeth of another component. In other words, each other tooth of the device may belong to the same component. In other words, the components may include interlocking teeth. This may be advantageous because teeth from different components may be adjacent teeth and may be positioned closely to each other, thus reducing the effects of each other on the electrical components.
[0086] In some embodiments, each tooth may include a corresponding tooth width spanned in azimuth relative to the axis. The tooth width may be the dimension of the tooth measured along an azimuth or transverse direction defined by the axis. It should be understood that each tooth includes a corresponding tooth width for any position along the axis along which the tooth extends.
[0087] Each tooth may be configured so that its respective tooth width may taper along the axis. In other words, the presence or number of each tooth may decrease along the axis. Thus, the effect that the teeth may have, for example, on an electrical component, may also decrease along the axis.
[0088] The tooth width of each tooth may taper to zero along the axis. For example, the tooth may include a pointed end.
[0089] In some embodiments, each tooth width of each tooth may taper linearly along the axis. That is, the teeth may include straight edges.
[0090] For example, the teeth may include a shape similar to a trapezoid or a triangle.
[0091] The tooth widths of teeth comprised by the same component may taper according to the same direction along the axis.Alternatively or additionally, the tooth widths of teeth comprised by different components may taper according to opposite directions along the axis.
[0092] In some embodiments, particularly embodiments in which the tooth width of each tooth tapers, each tooth may be configured so that any point thereof is equidistant from the axis. In other words, each tooth may be parallel to the axis.
[0093] Each tooth may include a corresponding tooth distance from the axis measured radially relative to the axis. The tooth distance may be measured in a direction that may be perpendicular to the axis. The tooth distance may be the Euclidean distance of each tooth from the axis at a specific position along the axis.
[0094] Each tooth may be configured such that its respective tooth distance may vary along the axis. That is, each tooth may include a varying distance from the axis. Thus, each tooth may include a varying distance from the electrical component. Thus, each tooth may include a varying effect on the electrical component along the axis.
[0095] Each tooth may be configured so that its corresponding tooth distance may vary monotonically along the axis. That is, for each tooth, its corresponding tooth distance never decreases or never increases along the variation axis.
[0096] In some embodiments, each tooth may be configured so that its corresponding tooth distance may vary strictly monotonically along the axis. That is, for each tooth, its corresponding tooth distance always decreases or always increases along the variation axis.
[0097] In some embodiments, each tooth may be configured so that its respective tooth distance may vary linearly along the axis. That is, each tooth may be inclined or declined relative to the axis.
[0098] The tooth distances of teeth comprised by the same component may increase according to the same direction along the axis.
[0099] Alternatively or additionally, the tooth distances of the teeth comprised by the different members increase according to opposite directions along the axis. In other words, moving along the axis, the teeth of one of the members approach the axis and the teeth of the other member are further away from the axis.
[0100] In some embodiments, particularly with respect to embodiments where the tooth distance varies along a variation axis, each tooth may include a constant tooth width along the axis.
[0101] Each tooth may be inclined relative to the axis according to an inclination angle. The inclination angles relative to the axis of the teeth of the same component may be the same. Alternatively or additionally, the inclination angles relative to the axis of the teeth of different components may comprise a difference of 180°.
[0102] In some embodiments, each tooth may be curved outwardly relative to the axis. That is, the tooth distance may vary nonlinearly along the axis.
[0103] In some embodiments, at least one of the components may include a plurality of rings. Alternatively or additionally, both components each include a plurality of rings (153, 173). That is, instead of including teeth, in some embodiments, the components may include rings.
[0104] The rings may be parallel to each other. That is, the rings may include cross-sections that lie on parallel planes.
[0105] The rings may be coaxial. That is, all the rings may be arranged such that they may surround a central axis, which may for example be an axis along which at least one varying property may vary.
[0106] That is, in some embodiments, the central axis of each ring may lie on the axis.
[0107] The ring may comprise a hollow cylindrical shape.
[0108] The rings may be spaced apart from each other along the axis. That is, in some embodiments, no two rings may include the same or overlapping positions along the axis of variation.
[0109] The component can be configured so that any two adjacent rings can belong to different components. If there are no other rings between two rings, they can be adjacent. In other words, adjacent rings can refer to rings arranged one after another along the change axis.
[0110] In some embodiments, at least one of the members may include at least 3 rings.
[0111] In some embodiments, at least one of the members may include up to 50 rings.
[0112] In some embodiments, at least one of the members may include up to 25 rings.
[0113] In some embodiments, at least one of the members may include at least 3 rings and at most 10 rings.
[0114] In some embodiments, at least one of the members may include at least 4 rings and at most 8 rings.
[0115] In some embodiments, at least one of the members may include 6 rings.
[0116] Generally, more rings can more effectively reduce the effect of capacitance between the electrical component and the device. For example, a device in which each member includes 6 rings can be more effective than a device in which each member includes 2 rings or only one tooth. However, a device with fewer rings can be easier to manufacture.
[0117] In some embodiments, the rings comprised by the same component may be electrically connected to each other. Thus, the rings of the same component may be configured to have the same electrical potential.
[0118] The rings comprised by different components may be electrically isolated from each other. This may allow the rings from different components (and the components themselves) to comprise different electrical potentials from each other. In this way, the rings of different components may be configured to comprise opposite effects on the electrical components, which in turn may facilitate matching the electrical potential on the area (which may be referred to as the second electrical potential) with the electrical potential on the electrical components along the axis (which may be referred to as the first electrical potential).
[0119] For each ring in one of the components, there may be a corresponding identical ring comprised by the other component. Typically, the rings (which may be referred to as corresponding identical rings) may be symmetrical or equally spaced relative to a central plane of the device perpendicular to the axis.
[0120] That is, corresponding identical rings may be symmetrical with respect to the center of the device along the axis.
[0121] In some embodiments, for at least one of the members, the distance along the axis between the two rings furthest from each other in its rings is at least 25% of the maximum length along the axis of the device. The distance may indicate or be the same as the maximum extension of each member along the axis. Alternatively or additionally, for at least one of the members, the distance along the axis between the two rings furthest from each other in its rings may be at most 90% of the maximum length along the axis of the device. In some embodiments, the distance may be at least 25% and at most 90% of the maximum length along the axis of the device. Preferably, the distance may be at least 35% and at most 85% of the maximum length along the axis of the device. For example, the distance may be at least 50% of the maximum length along the axial direction of the device.
[0122] In some embodiments, at least one of the components may include at least one ring on a first half of the device and at least one other ring on a second half of the device, wherein the first and second halves of the device are separated by a plane perpendicular to the axis. That is, each component may include at least one respective ring on each side of the device along the axis.
[0123] Each ring may include a respective ring height measured along the axis. The ring height of each ring may respectively refer to the Euclidean distance between two planes perpendicular to the axis adjoining the respective ring, such that the ring is completely in the space between the planes.
[0124] Each ring may be configured such that a respective ring height may depend on a respective ring's position along the axis.
[0125] Rings comprised by the same component may comprise different ring heights. In other words, in some embodiments, there may not be two rings that comprise the same ring height and belong to the same component.
[0126] The ring heights of the rings comprised by the same component may vary monotonically, preferably strictly monotonically, along the axis. That is, if ordered based on the position of the respective rings on the axis of variation, the ring heights of the rings comprised by the same component may form a monotonous, preferably strictly monotonous, numerical sequence. In other words, for each component, the ring height may be a monotonic function, preferably a strictly monotonic function, of the position along the axis.
[0127] The ring height of the ring included in one of the components and the ring height of the ring included in the other of the components may increase according to opposite directions along the axis. In other words, along the axis and in the direction along which one of the components may include a ring with an increasing ring height, the other component may include a ring with a decreasing ring height.
[0128] In the previous paragraphs, specific embodiments of the device including a member having teeth or a ring are discussed. However, those skilled in the art will appreciate that other shapes and configurations of the member may also be possible.
[0129] Typically, at least one varying attribute may vary monotonically along the axis.
[0130] Preferably, at least one varying property varies strictly monotonically along the axis.
[0131] In some embodiments, at least one varying property may vary linearly along the axis. This may be particularly advantageous if the electrical component is a resistor, ie comprises a voltage that varies gradually along the axis.
[0132] In some embodiments, the two components may each include at least one varying property that varies along an axis.
[0133] The components may be configured such that at least one varying property of one of the components and at least one varying property of another of the components may increase monotonically according to opposite directions along the axis. This may be particularly advantageous because it may allow for a gradual change along the axis of the average potential in the region between the electrical component and the device.
[0134] Alternatively or additionally, the components may be configured such that at least one varying property of one of the components and at least one varying property of another of the components may increase strictly monotonically according to opposite directions along at least a portion of the axis. The portion may preferably be aligned with the center of the electrical component along the axis.
[0135] Alternatively or additionally, the components may be configured such that at least one varying property of one of the components and at least one varying property of another of the components may increase strictly monotonically according to opposite directions along the axis.
[0136] In some embodiments, the components may be configured such that at least one variation property of one of the components and at least one variation property of another of the components may increase linearly according to opposite directions along at least a portion of the axis. The portion may preferably be aligned with the center of the electrical component along the axis. If the electrical component is a resistor, the linear variation may be particularly advantageous.
[0137] The components may be configured such that at least one varying property of one of the components and at least one varying property of another of the components increase linearly according to opposite directions along the axis. This may be particularly advantageous if the electrical component is a resistor.
[0138] In some embodiments, the components may be configured such that at least one varying property of one of the components and at least one varying property of another of the components may be equal at a central position along the axis of the device. This may be advantageous because typically, the potential of an electrical component (particularly if the former is a resistor) may be equal to half the difference between the highest potential and the lowest potential of the electrical component.
[0139] One of the at least one varying property may depend on a tooth width of the at least one tooth. That is, in embodiments in which at least one component includes at least one tooth, the tooth width may be the varying property or one of the varying properties. In other words, the component may be configured to reduce effects caused by capacitance between the electrical component and the environment in which the electrical component is positioned by including at least one tooth with a varying tooth width.
[0140] In some embodiments, one of the at least one varying attribute may depend on a tooth distance of at least one tooth. That is, in embodiments in which at least one component includes at least one tooth, the tooth distance may be the varying attribute or one of the varying attributes. In other words, the component may be configured to reduce effects caused by capacitance between the electrical component and the environment in which the electrical component is positioned by including at least one tooth with a varying tooth distance.
[0141] In some embodiments, one of the at least one varying attribute may depend on the ring height of at least one ring. That is, in embodiments where at least one component includes a ring, the ring height may be the varying attribute or one of the varying attributes. In other words, the component may be configured to reduce effects caused by capacitance between the electrical component and the environment in which the electrical component is positioned by including a ring with a varying ring height.
[0142] Typically, one of the at least one variation attribute may be a quantity parameter (which may be interchangeably referred to as a size parameter). The quantity parameter may indicate the number of respective components included by the device at a plurality of locations along the axis. Thus, the device may include different quantities of each component at different locations along the variation axis. The effect that each component may include on the electrical component may depend on the quantity (i.e., size) of each component. This is due to the following basic principle: the quantity of each component along the axis may be related to the number of charges that each component may provide at a particular location along the variation axis.
[0143] In some embodiments, the quantity parameter may depend on the tooth width of the at least one tooth. That is, in some embodiments, providing at least one component with a varying quantity parameter may be achieved by providing at least one component with at least one tooth including a varying tooth width along the axis.
[0144] In some embodiments, the quantity parameter may depend on the ring height of at least one ring. That is, in some embodiments, providing at least one component with a varying quantity parameter may be achieved by providing at least one component ring including different ring heights along the axis.
[0145] In some embodiments, one of the at least one changing attribute may be a distance parameter. The distance parameter may indicate a radial distance between a corresponding component and an axis measured radially relative to the axis. It should be understood that the farther a component may be from an electrical component, the smaller its effect on the electrical component may be. Thus, the distance between the component and the electrical component may be varied so that the effect caused by the capacitance between the electrical component and the environment in which the electrical component is positioned may be reduced.
[0146] The quantity parameter may depend on the tooth distance of the at least one tooth. That is, in some embodiments, providing at least one component with a varying distance parameter may be achieved by providing at least one component with at least one tooth comprising a varying tooth distance along the axis.
[0147] In some embodiments, the device may be configured such that effects caused by capacitance between the electrical component and the environment in which the electrical component may be positioned are reduced. At least one varying property may thus vary along an axis such that effects caused by capacitance between the electrical component and the environment in which the electrical component is positioned are reduced.
[0148] The environment in which the electrical component is positioned may include at least one electrical conductor. The latter may couple with the electrical component, thereby forming a parasitic capacitor between them. However, since knowledge of the number, size and / or electrical properties of the electrical conductors may not yet exist, it may be difficult to predict and / or account for the resulting parasitic capacitance between the electrical component and its environment. The device may act as an electromagnetic shield between the device and the at least one electrical conductor. In other words, the device may be advantageous because it may provide a controlled area around the electrical component. In this case, the only parasitic capacitance or the dominant parasitic capacitance may be between the electrical component and the device; while the parasitic coupling of the electrical component with other electrical conductors in the environment may be significantly reduced.
[0149] The environment in which the electrical component may be positioned may include the device. That is, although the device may "block" the parasitic coupling of the electrical component with other electrical conductors in the environment, the device may couple itself to the electrical component. Thus, a parasitic capacitor may be created by the electrical component and the device. However, the device of the present invention may be advantageous because it may be configured (i.e., via varying properties) such that even the effect of said parasitic capacitor created by the electrical component and the device may be reduced.
[0150] The capacitance between the electrical component and the environment may be an unwanted capacitance. For example, the capacitance between the electrical component and the environment may include stray or parasitic capacitance.
[0151] As discussed, at least one of the components may include at least one varying property that varies along the axis such that effects caused by capacitance between the electrical component and the environment in which the electrical component is positioned may be reduced.
[0152] The effect may comprise a charging time and / or a discharging time of a capacitor resulting from the electrical component and the environment the electrical component is in. This may be achieved due to the fact that the device may act as an electromagnetic shield for the electronic component.
[0153] The effects may include charging and / or discharging times of capacitors created by the electrical components and the device. In other words, the device may be configured so that parasitic capacitors created by the device and electrical components may not charge or discharge—or at least reduce the length of the charging and discharging cycles.
[0154] The effect may include a time delay in changing the potential of the electrical component from a first set voltage to a second set voltage. Parasitic capacitance may be particularly disadvantageous when attempting to change the potential of the electrical component. This is due to the fact that parasitic capacitance may increase the delay due to the charging or discharging of the parasitic capacitor. At least one of the changing attributes may be varied along the axis so that the time delay may be reduced.
[0155] The effect may include a time delay in changing the potential of an external electrical device electrically connected to the electrical component from a first set voltage to a second set voltage. This may be the case, for example, when the electrical component may be a circuit element in a drive circuit for the external electrical device (e.g., an offset drift tube).
[0156] The first potential of the electrical component may vary along the axis.
[0157] In such embodiments, at least one of the properties may vary along the axis such that an axial electric field parallel to the axis in the region may match a gradient of the first potential along the axis.
[0158] The axial electric field can be matched with the gradient of the first potential so that at any point within the region, the difference between the gradient of the axial electric field and the first potential (V1) does not exceed 10% of the gradient of the first potential (V1), preferably does not exceed 5% of the gradient of the first potential (V1), and even more preferably does not exceed 1% of the gradient of the first potential (V1).
[0159] Preferably, at least one of the properties is variable along the axis so that the axial electric field parallel to the axis in the region is uniform within a tolerance of at most 10% deviation, preferably at most 5% deviation, even more preferably 1% deviation. A uniform axial electric field can be advantageous, in particular if the electrical component is a resistor, because the potential in the region can include a gradient, which gradient can be substantially constant across the region.
[0160] A first potential of the electrical component may vary along the axis, and a second potential in the region may vary along the axis. In such embodiments, at least one of the properties may vary along the axis such that the second potential may match the first potential along the axis.
[0161] The second potential may be matched to the first potential such that at any point within the region a measure of the difference between the second potential and the first potential is at most 10%, preferably at most 5%, even more preferably at most 1% of the first potential.
[0162] The first potential may indicate an electrical potential at a point in or on the electrical component.
[0163] The first potential may be varied deterministically along the axis.
[0164] The first potential may vary monotonically along the axis.
[0165] The first potential may vary strictly monotonically along the axis.
[0166] The first potential may vary linearly along the axis.
[0167] The second potential may be an average value of potentials at points within a region including the same position along the axis.
[0168] The component portion may comprise a length along the axis of at least 45% of the length along the axis of the electrical component. That is, in some embodiments the device may comprise a length along the varying axis which may be at least 45% of the length along the axis of the electrical component.
[0169] Alternatively, the component part may be the entire electrical component.I.e. the device may be configured such that it comprises a maximum extension along the axis which is equal to or greater than a maximum extension along the axis of the electrical component.
[0170] The device may be configured to completely surround the component portion laterally about the axis.
[0171] Alternatively, the device may be configured to laterally encompass the component portion by at least 120°, preferably at least 180°, even more preferably at least 270° around the axis.
[0172] The device may be configured to be electrically connected to a source of electrical energy. This may be advantageous because it may allow the components to be "forced" to be at a corresponding electrical potential, so that charging and / or discharging of parasitic capacitors generated by the electrical components and the device may be mitigated and preferably eliminated.
[0173] The member may be configured to be electrically connected to a respective one of the opposing terminals of a source of electrical energy.
[0174] The device may be configured to be electrically connected to the same source of electrical energy to which the electrical component may be connected.
[0175] Each component may be configured to be electrically connected to a source of electrical energy such that each component may include the same electrical potential as a corresponding one of the component ends. In other words, each component may be "forced" to be at the same electrical potential as the corresponding component end of the electrical component. In this way, whenever the electrical potential of the electrical component changes, a corresponding change may also be made to the electrical potential of the component. In this way, the charging and / or discharging of parasitic capacitors generated by the electrical components and the device may be mitigated and preferably eliminated.
[0176] The electrical energy source may be a direct current source. This may be advantageous if the current supplied to the electrical component is a direct current.
[0177] Alternatively, the electrical energy source may be an alternating current source. This may be advantageous in dynamic situations where the current supplied to the electrical component is an alternating current, such as in high frequency circuits.
[0178] Each of the components may be configured to be electrically connected to a corresponding one of the component ends. In other words, each component may be "forced" to be at the same electrical potential as the corresponding component end of the electrical component. In this way, whenever the electrical potential of the electrical component changes, a corresponding change may also be made to the electrical potential of the component. In this way, the charging and / or discharging of parasitic capacitors generated by the electrical components and the device may be mitigated and preferably eliminated.
[0179] That is, each member may be configured to be electrically connected to a corresponding one of the component ends such that each member and the corresponding component end may comprise the same electrical potential.
[0180] For example, each member may be configured to be electrically connected to a corresponding one of the component ends using a wire. A wire herein may refer to any circuit element that may be configured to allow current to flow without resistance or with very little resistance.
[0181] The electrical component may be configured as a resistor. In some embodiments, the electrical component may be a resistor. Specifically, the electrical component may be a high-ohmic resistor.
[0182] For example, the electrical component may be a resistor having a resistance of at least 1 megohm and at most 15 megohms, preferably at least 5 megohms and at most 12 megohms. In some embodiments, the electrical component may be a resistor having a resistance of (substantially) 7 megohms (e.g., it may be between 6.5 and 7.5 megohms). In some embodiments, the electrical component may be a resistor having a resistance of (substantially) 10 megohms (e.g., it may be between 9.5 and 10.5 megohms). However, it should be understood that these values are exemplary only. In particular, the values may be advantageous when the electrical component may be used in a voltage regulating circuit for offsetting a drift tube.
[0183] In some embodiments, the electrical component may include a resistor. For example, the electrical component may be a plurality of resistors.
[0184] In some embodiments, the electrical component may be a transistor.
[0185] In some embodiments, the electrical component may include a transistor. For example, the electrical component may be a plurality of transistors.
[0186] In some embodiments, the electrical component may include a plurality of circuit elements. In some such embodiments, at least one circuit element may be a resistor. Alternatively or additionally, the circuit element may be a resistor. For example, the circuit element may be a string of resistors electrically connected in series.
[0187] In some embodiments, the electrical component may be part of a voltage divider circuit.
[0188] The electrical component may be part of a control circuit for setting the voltage of the second device to at least one set point voltage.
[0189] The second device may be part of a charged particle microscopy system.
[0190] The second device may be part of an imaging system of a charged particle microscopy system.
[0191] The second device may be part of a drift tube of a charged particle microscopy system. For example, the second device may be part of an offset drift tube. In this case, it may be particularly advantageous to use the device of the invention in order to be able to switch the voltage of the offset drift tube at as high a frequency as possible.
[0192] The device may be configured to reduce electromagnetic interference in a circuit including an electrical component. As discussed, the device may be configured as an electromagnetic shield for the electrical component. That is, the device may be used as an electromagnetic shield for the electrical component.
[0193] The apparatus may be configured to reduce resistance-capacitance delay in a circuit comprising an electrical component.
[0194] The device may be configured for use in a charged particle microscopy system comprising electrical components.
[0195] In some embodiments, the device may be configured to include an unfolded state and a wrapped state. In the unfolded state, the device may be configured to be flat. Preferably, in the unfolded state, the device may be configured to include a rectangular shape.
[0196] The device may include a device through hole in a wrapped state. That is, the device may be configured to be wrapped so that it may include a device through hole. In other words, in the wrapped state, the device may be configured to include a hollow cylindrical shape.
[0197] Typically, the device can be used in a wrapped state. That is, in the wrapped state, the device can at least partially surround at least a component part of the electrical component around an axis.
[0198] The device may be configured to be presented to the wrapped state at least once from the unfolded state. For example, the device may be provided in the unfolded state (which may facilitate the transport of the device) and may be presented to the wrapped state for use with the electrical component.
[0199] Preferably, the device can be configured to be assumed multiple times from a wrapped state to an unfolded state and vice versa. This can allow easy removal and installation of the device for use with the electrical component.
[0200] For example, the device may be configured to assume a wrapped state from an unfolded state by attaching two opposing edges of the device to each other. The device may be configured such that the two opposing edges may be securely and releasably attached to each other.
[0201] In a further aspect, a system comprising an apparatus and an electrical component is disclosed.It will be appreciated that any of the features discussed above may be applied mutatis mutandis to the system.
[0202] The devices included in the system may be configured according to any of the aforementioned device embodiments.
[0203] Furthermore, all features discussed above with respect to electrical components may be applied mutatis mutandis to the electrical components comprised by the system.
[0204] The system may include an offset drift tube for use in a charged particle microscope and wherein the electrical component may be electrically connected to the offset drift tube.The offset drift tube may include a region through which a charged particle beam may pass and may be configured to generate a magnetic field in the region.
[0205] The system may include a voltage regulating circuit for providing a bias voltage to the offset drift tube, and wherein the voltage regulating circuit may include electrical components.
[0206] The offset drift tube may be configured to generate a magnetic field based on a bias voltage.
[0207] The voltage regulating circuit may be configured to alternate the bias voltage between a plurality of set points. In some embodiments, the voltage regulating circuit may be configured to alternate the bias voltage between a plurality of set points at a frequency of at least 100 kHz, preferably at least 130 kHz. Specifically, the voltage regulating circuit may be configured to alternate the bias voltage between a plurality of set points such that each bias voltage may be reached and maintained within 10 μs. In addition, the voltage regulating circuit may be configured to set each bias voltage within 300 ppm (parts per million) of the set value. The apparatus of the present invention may facilitate the voltage regulating circuit to achieve these objectives.
[0208] Furthermore, the voltage regulating circuit may provide a step response up to 5 kV, preferably up to 3 kV.
[0209] The system may include a charged particle microscope, and wherein the charged particle microscope may include electrical components. The charged particle microscope may be a transmission-type charged particle microscope, an electron microscope, a scanning electron microscope, a transmission electron microscope, a scanning transmission electron microscope, and / or an electron energy loss spectrometer. Alternatively, the charged particle microscope may be an ion-based microscope.
[0210] The charged particle microscope may include a charged particle emitter configured to emit a charged particle beam. The charged particle microscope may also include an imaging system configured to receive the charged particle beam emitted by the charged particle emitter.
[0211] The charged particle microscope may include an offset drift tube. Specifically, in some embodiments, the imaging system may include an offset drift tube.
[0212] In a further aspect, the present invention relates to a method of operating an electrical component. It should be understood that any of the features discussed above may be applied to the method mutatis mutandis. The method of operating an electrical component comprises providing a device that at least partially surrounds at least a component portion of the electrical component around an axis, thereby defining an area therebetween. The device comprises two components. At least one of the components comprises at least one variable property that varies along the axis.
[0213] In a further aspect, the present invention relates to a method of operating a system. It should be understood that any of the features discussed above may be applied to the method mutatis mutandis. The method of operating a system comprises providing a device that at least partially surrounds at least a component portion of an electrical component around an axis, thereby defining an area therebetween. The device comprises two components. At least one of the components comprises at least one variable attribute that varies along the axis.
[0214] The provided apparatus may be configured according to any of the aforementioned apparatus embodiments.
[0215] Furthermore, all features discussed above with respect to the electrical component may be applied mutatis mutandis to the electrical component of the method.
[0216] Furthermore, the system may be configured according to any of the aforementioned system embodiments.
[0217] The method may include electrically connecting the device to a source of electrical energy.
[0218] Electrically connecting the device to a source of electrical energy may include electrically connecting each of the components to a respective one of the opposing terminals of the source of electrical energy.
[0219] Electrically connecting the device to a source of electrical energy may include electrically connecting the device and the electrical component to the same source of electrical energy.
[0220] The electrical energy source may be a direct current source. Alternatively, the electrical energy source may be an alternating current source.
[0221] The method may include maintaining each member and a respective one of the component ends at equal electrical potentials.
[0222] The method may include electrically connecting each member to a respective one of the component ends.
[0223] The method may include alternating the electrical potential of the component between a plurality of set points.
[0224] The method may comprise alternating the potential of the component between a plurality of set points at a frequency of at least 100 kHz, preferably at least 130 kHz.
[0225] The method may include alternating the electrical potential of the electrical component.
[0226] The method may include synchronously alternating the electrical potential of the component and the electrical potential of the electrical part.
[0227] The method may comprise synchronizing the alternation of the potential of the member and the potential of the electrical component so that the difference between the potential of each member and a respective one of the component ends is minimized, preferably zero.
[0228] The method may include using the apparatus to at least partially surround at least a component portion of the electrical component around an axis.
[0229] In some embodiments, the method may include wrapping a device around at least a component portion of the electrical component.
[0230] The method may include aligning the device and the electrical component so that they are coaxial.
[0231] A method may include an apparatus for reducing electromagnetic interference in an electrical circuit including an electrical component.
[0232] The method may include means for electromagnetically shielding an electrical component.
[0233] A method may include an apparatus for reducing resistance-capacitance (RC) delay in a circuit including an electrical component.
[0234] The method may include means for reducing effects caused by capacitance between the electrical component and the environment in which the electrical component is located. The capacitance between the electrical component and the environment may be an unwanted capacitance. For example, the capacitance between the electrical component and the environment may include stray or parasitic capacitance.
[0235] The method may include using the apparatus in a charged particle microscopy system including electrical components.
[0236] In a further aspect, the invention relates to use of a device according to any of the preceding device embodiments to at least partially surround at least a component part of an electrical component around an axis.
[0237] In a further aspect, the invention relates to a use of a device according to any of the preceding device embodiments for reducing electromagnetic interference in an electrical circuit.
[0238] In a further aspect, the invention relates to use of a device according to any of the preceding device embodiments as an electromagnetic shield.
[0239] In a further aspect, the invention relates to use of a device according to any of the preceding device embodiments for reducing resistance-capacitance (RC) delays in a circuit.
[0240] In a further aspect, the invention relates to use of a device according to any of the preceding device embodiments in a charged particle microscopy system.
[0241] In a further aspect, the invention relates to the use of a device according to any of the preceding device embodiments in a voltage regulating circuit for providing a bias voltage to an offset drift tube of a charged particle microscope.
[0242] In a further aspect, the invention relates to a method comprising providing a device model of a device according to any of the preceding device embodiments, simulating a second potential in a region using a data processing system and modifying the model of the device dependent on the second potential.
[0243] The method may allow for automatic determination of an optimized model of the device.
[0244] The method may include producing a device according to the modified device model of the device.
[0245] The method may include providing a component model of the electrical component including a first potential of the electrical component along an axis.
[0246] Modifying the device model of the device may include determining, for at least one of the components, at least one varying property that is variable along an axis.
[0247] The method may include determining at least one variation property such that a difference between the first potential and the second potential may be minimized.
[0248] The method may include providing a voltage difference threshold and determining at least one change attribute such that a difference between the first potential and the second potential is less than the voltage difference threshold.
[0249] The method may comprise determining at least one variation property such that a difference between an axial electric field parallel to the axis and a gradient of the first potential along the axis in the region is minimised.
[0250] The method may comprise providing a gradient difference threshold and determining at least one variation attribute such that a difference between an axial electric field parallel to the axis and a gradient of the first potential along the axis in the region is less than the field difference threshold.
[0251] The method may include determining at least one variation property such that effects caused by capacitance between the electrical component and the device are minimized.
[0252] The method may include providing a capacitance threshold and determining at least one change property such that an effect caused by capacitance between the electrical component and the device is less than the capacitance threshold.
[0253] The method may include determining at least one variation property such that an axial electric field parallel to the axis may be uniform in the region.
[0254] The method may comprise providing a field variance threshold and determining at least one variation attribute such that a measure of a difference in the axial electric field parallel to the axis in the region is less than the field variance threshold.
[0255] The method may include determining at least one varying property such that a radial electric field directed radially relative to an axis in the region is zero.
[0256] The method may include providing a radial field threshold and determining at least one variation attribute such that a radial electric field directed radially relative to the axis in the region is less than the radial field threshold.
[0257] In some embodiments, a method may include providing a model of a device such that the device may include a toothed member, as discussed above.
[0258] Modifying the device model of the device may include determining a shape of at least one tooth.
[0259] Modifying the device model of the device may include determining the number of teeth included in each component.
[0260] Modifying the device model of the device may include determining a length along an axis of each tooth.
[0261] Modifying the device model of the device may include determining a position along the axis of each tooth.
[0262] Modifying the device model of the device may include determining a position along the axis of each tooth relative to the electrical component.
[0263] Modifying the device model of the device may include determining the potential of each tooth as a function of the potential of the electrical component.
[0264] In some embodiments, a method may include providing a model of a device such that the device may include at least one tooth having a varying tooth width, as discussed above.
[0265] Modifying the device model of the device may include determining, for each tooth, a respective tooth width along the axis.
[0266] In some embodiments, a method may include providing a model of a device such that the device may include at least one tooth having a varying tooth distance, as discussed above.
[0267] Modifying the device model of the device may include determining, for each tooth, a respective tooth distance along the axis.
[0268] In some embodiments, a method may include providing a device model such that the device may include rings having varying ring heights, as discussed above.
[0269] Modifying the device model of the device may include determining, for each ring, a respective ring height.
[0270] Modifying the device model of the device may include determining a material of the device.
[0271] Simulating the second potential in the region using the data processing system may include the data processing system executing a finite element method.
[0272] Simulating the second potential in the region may include determining the second potential at a plurality of points in the region.
[0273] Simulating the second potential in the region may include determining the second potential in a cross-section of the region, the cross-section being parallel to the axis.
[0274] Simulating the second potential in the region may include determining the second potential over a portion of a cross-section of the region, the cross-section being parallel to the axis. The portion of the cross-section may be a half cross-sectional portion of the region.
[0275] The technology is also defined by the following numbered embodiments.
[0276] Next, device embodiments will be discussed. Whenever "device embodiments" are mentioned herein, these embodiments are intended.
[0277] 1. A device (1) for use with an electrical component (2),
[0278] wherein the device (1) is configured to at least partially surround at least a component portion (25) of the electrical component (2) around an axis (Z) so as to define a region therebetween
[0279] (3) and
[0280] The device (1) comprises two components (15, 17),
[0281] wherein at least one of the members (15, 17) comprises a
[0282] (Z) at least one changed attribute (130, 150, 190) of the change.
[0283] 2. The device according to the preceding embodiment, wherein the electrical component (2) comprises two component ends (22, 24), the two component ends (22, 24) being opposite to each other and located at different positions along the axis (Z).
[0284] 3. The device according to any of the preceding embodiments, wherein the axis (Z) is the central axis (Z) of the device (1).
[0285] 4. The device according to any one of the preceding embodiments, wherein the axis (Z) is a central axis (Z) of the electrical component (2).
[0286] 5. The device according to any one of the preceding embodiments, wherein the axis (Z) is parallel to the direction of flow of electric current through the electrical component (2).
[0287] 6. The device according to any one of the preceding embodiments, wherein the axis (Z) is the longitudinal axis (Z) of the electrical component (2).
[0288] 7. The device according to any of the preceding embodiments, wherein the electrical component (2) extends substantially longitudinally along the axis (Z).
[0289] 8. The device according to any one of the preceding embodiments, wherein the device (1) comprises a first device end (12) and a second device end (14), wherein the first device end
[0290] (12) and said second device end (14) are opposite to each other and are located at different positions along said axis (Z).
[0291] 9. The device according to the preceding embodiment, wherein
[0292] A first of the members (15, 17) extends along the axis (Z) from the first device end (12), through the center of the device (1) and towards the second device end (14), and
[0293] The second of the members (15, 17) extends along the axis (Z) from the second device end (14), through the centre of the device (1) and towards the first device end (12).
[0294] 10. The device according to any of the preceding embodiments, wherein the minimum distance between the members (15, 17) is at least 0.5 mm, preferably at least 1 mm.
[0295] 11. The device according to any one of the preceding embodiments, wherein the minimum distance between the members (15, 17) is 1 mm.
[0296] 12. A device according to any of the preceding embodiments, wherein the minimum distance between the members (15, 17) is at least 0.5 mm and at most 1.5 mm, preferably at least 0.8 mm and at most 1.2 mm, more preferably at least 0.9 mm and at most 1.1 mm.
[0297] 13. A device according to any of the preceding embodiments, wherein the members (15, 17) are configured such that any radial line perpendicular to the axis (Z) passes through at most one of the members (15, 17).
[0298] 14. The device according to any of the preceding embodiments, wherein the members (15, 17) are non-overlapping.
[0299] 15. The device according to any of the preceding embodiments, wherein the members (15, 17) are coaxial.
[0300] 16. The device according to any one of the preceding embodiments, wherein the components (15, 17) are electrically insulated from each other.
[0301] 17. The device according to any of the preceding embodiments, wherein the member (15, 17) is configured to be electrically conductive.
[0302] 18. The device according to any of the preceding embodiments, wherein the member (15, 17) is configured to be electrically connected to a source of electrical energy.
[0303] 19. The device according to any one of the preceding embodiments, wherein the device (1) comprises a hollow cylindrical shape.
[0304] 20. The device according to any of the preceding embodiments, wherein the device (1) comprises a device through hole (19).
[0305] 21. Device according to the preceding embodiment, wherein the device through hole (19) extends along the axis (Z).
[0306] 22. The device according to any of the 2 preceding embodiments, wherein the device through-hole (19) is configured to accommodate the electrical component (2).
[0307] 23. The device according to any of the 3 preceding embodiments, wherein the device through hole (19) includes the area (3).
[0308] 24. The device according to any of the preceding embodiments, wherein the members (15, 17) are identical in shape.
[0309] 25. The device according to any one of the preceding embodiments, wherein the device (1) comprises a substrate layer (102) configured to be non-conductive.
[0310] 26. The device according to the preceding embodiment, wherein the base layer (102) is made of a non-conductive material.
[0311] 27. The device according to any one of the 2 preceding embodiments, wherein the base layer (102) comprises a polyimide material.
[0312] 28. The device of any of the 3 preceding embodiments, wherein the substrate layer (102) is a polyimide film.
[0313] 29. The device according to any one of the 4 preceding embodiments, wherein the base layer (102) is continuous.
[0314] 30. The device according to any one of the 5 preceding embodiments, wherein the substrate layer (102) forms at least a part of the outer surface of the device (1).
[0315] 31. The device according to any one of the preceding embodiments, wherein the device (1) comprises a conductive layer (104) configured to conduct electricity.
[0316] 32. The device according to the preceding embodiment, wherein the conductive layer (104) comprises at least one conductive material.
[0317] 33. The device according to the preceding embodiment, wherein at least one of the conductive materials is a metal, such as copper, gold, aluminum, iron or silver.
[0318] 34. The device of any of the 3 preceding embodiments, wherein the conductive layer (104) comprises copper.
[0319] 35. The device according to any of the 4 preceding embodiments, wherein the conductive layer (104) comprises two conductive layer portions (1045, 1047) electrically insulated from each other, and
[0320] Each member (15, 17) comprises a respective one of the two conductive layer portions (1045, 1047).
[0321] 36. The device according to any one of the 5 preceding embodiments, wherein
[0322] The conductive layer (104) comprises two disjoint sets of conductive layer portions (1045, 1047),
[0323] Each of the two sets includes a plurality of conductive layer portions (1045, 1047),
[0324] All of the conductive layer portions (1045, 1047) are spaced apart from each other,
[0325] The layer portions (1045, 1047) within the set are configured to be electrically connected to each other,
[0326] Different sets of layer portions (1045, 1047) are electrically insulated from each other,
[0327] Each member (15, 17) comprises a respective one of the two conductive layer portions (1045, 1047).
[0328] 37. A device according to any of the preceding embodiments and having the features of embodiments 25 and 31, wherein the conductive layer (104) is provided on the base layer (102).
[0329] 38. The device according to the preceding embodiment, wherein the conductive layer (104) and the base layer (102) are glued together.
[0330] 39. An apparatus according to any one of the two preceding embodiments, wherein the apparatus (1) comprises a covering layer (106) at least covering the conductive layer (104), such that the conductive layer (104) is between the base layer (102) and the covering layer (106).
[0331] 40. The device according to the preceding embodiment, wherein the conductive layer (104) and the cover layer (106) are glued together.
[0332] 41. The device according to any one of the two preceding embodiments, wherein the cover layer (106) is configured to be non-conductive.
[0333] 42. The device according to any one of the 3 preceding embodiments, wherein the cover layer (106) is made of a non-conductive material.
[0334] 43. The device according to any of the 4 preceding embodiments, wherein the cover layer (106) comprises a polyimide material.
[0335] 44. The device of any of the 5 preceding embodiments, wherein the cover layer (106) is a polyimide film.
[0336] 45. The device according to any one of the 6 preceding embodiments, wherein the covering layer (106) forms at least a part of the outer surface of the device (1).
[0337] 46. The device according to the preceding embodiment, wherein the outer surface of the device (1) is formed by the cover layer (106) and the base layer (102).
[0338] 47. A device according to any one of the preceding embodiments and having the features of embodiments 25 and 31, wherein the conductive layer (104) is embedded on the base layer (102).
[0339] 48. A device according to the preceding embodiment, wherein the substrate layer (102) forms the entire outer surface of the device (1).
[0340] 49. Device according to any of the preceding embodiments, wherein at least one of the members (15, 17) comprises at least one tooth (155, 175) extending parallel to the axis (Z).
[0341] 50. Device according to any of the preceding embodiments, wherein two of said members (15, 17) comprise at least one respective tooth (155, 175) extending parallel to said axis (Z).
[0342] 51. Device according to any of the preceding embodiments, wherein at least one of the members (15, 17) comprises a plurality of teeth (155, 175) extending parallel to the axis (Z).
[0343] 52. Device according to any of the preceding embodiments, wherein two of the members (15, 17) respectively comprise a plurality of teeth (155, 175) extending parallel to the axis (Z).
[0344] 53. A device according to any one of the 4 preceding embodiments, wherein each tooth (155, 175) extends along the axis from a first half of the device (1) to a second half of the device (1), wherein the first half and the second half of the device (1) are separated by a plane perpendicular to the axis (Z).
[0345] 54. A device according to any one of the five preceding embodiments and having the features of embodiment 8, wherein each tooth (155, 175) extends from the first device end (12), through the center of the device (1) and toward the second device end (14).
[0346] 55. A device according to any one of the 6 preceding embodiments, wherein each tooth (155, 175) comprises a maximum length along the axis (Z) that is at least 25% of the maximum length along the axis (Z) of the device (1).
[0347] 56. A device according to any one of the 7 preceding embodiments, wherein each tooth (155, 175) comprises a maximum length along the axis (Z), which is at most 90% of the maximum length along the axis (Z) of the device (1).
[0348] 57. A device according to any one of the 8 preceding embodiments, wherein each tooth (155, 175) comprises a maximum length along the axis (Z), which is at least 25% and at most 90% of the maximum length along the axis (Z) of the device (1).
[0349] 58. A device according to any one of the 9 preceding embodiments, wherein each tooth (155, 175) comprises a maximum length along the axis (Z), which is at least 35% and at most 85% of the maximum length along the axis (Z) of the device (1).
[0350] 59. The device according to any one of the 10 preceding embodiments, wherein each tooth (155, 175) comprises a maximum length along the axis (Z), which is at least 50% of the maximum length along the axial direction of the device (1).
[0351] 60. The device according to any of the 11 preceding embodiments, wherein at least one of the members (15, 17) comprises at least 3 teeth (155, 175).
[0352] 61. The device according to any of the 12 preceding embodiments, wherein at least one of the members (15, 17) comprises at most 50 teeth (155, 175).
[0353] 62. The device according to any of the 13 preceding embodiments, wherein at least one of the members (15, 17) comprises at most 25 teeth (155, 175).
[0354] 63. The device according to any of the 14 preceding embodiments, wherein at least one of the members (15, 17) comprises at least 3 teeth (155, 175) and at most 15 teeth.
[0355] 64. The device according to any of the 15 preceding embodiments, wherein at least one of the members (15, 17) comprises at least 5 teeth (155, 175) and at most 10 teeth.
[0356] 65. The device according to any of the 16 preceding embodiments, wherein at least one of the members (15, 17) comprises 5 teeth (155, 175).
[0357] 66. The device according to any of the 17 preceding embodiments, wherein at least one of the members (15, 17) comprises 10 teeth (155, 175).
[0358] 67. The device according to any one of the 18 preceding embodiments, wherein the teeth (153, 173) comprised by different components (15, 17) are electrically insulated from each other.
[0359] 68. The device according to any one of the 19 preceding embodiments, wherein the teeth (155, 175) comprised by the same member (15, 17) are electrically connected to each other.
[0360] 69. The device of any of the 20 preceding embodiments, wherein the teeth (155, 175) are identical to each other.
[0361] 70. A device according to any one of the 21 preceding embodiments, wherein the member (15, 17) is configured so that each tooth (155, 175) fits in a corresponding space between two adjacent teeth (175, 155) of the other member (15, 17).
[0362] 71. A device according to any of the preceding embodiments 49 to 70, wherein each tooth (155, 175) includes a corresponding tooth width (150) spanned in an azimuth relative to the axis (Z).
[0363] 72. The device according to the preceding embodiment, wherein each tooth (155, 175) is configured such that its respective tooth width (150) tapers along said axis (Z).
[0364] 73. The device according to any one of the two preceding embodiments, wherein the tooth width (150) of each tooth (155, 175) tapers to zero along the axis (Z).
[0365] 74. The device according to any one of the 3 preceding embodiments, wherein the tooth width (150) of each tooth (155, 175) tapers linearly along the axis (Z).
[0366] 75. The device of any one of the 4 preceding embodiments, wherein each tooth (155, 175) comprises a triangular shape.
[0367] 76. The device according to any of the 5 preceding embodiments, wherein the tooth width (150) of the teeth (155, 175) comprised by the same member (15, 17) tapers according to the same direction along the axis (Z).
[0368] 77. The device according to any one of the 6 preceding embodiments, wherein the tooth widths (150) of the teeth (155, 175) comprised by different members (15, 17) taper in opposite directions along the axis (Z).
[0369] 78. The device according to any one of the 7 preceding embodiments, wherein each tooth (155, 175) is configured so that any point thereof is equidistant from the axis (Z).
[0370] 79. A device according to any of the preceding embodiments and having the features of any of embodiments 49 to 52, wherein each tooth (155, 175) includes a corresponding tooth distance (190) from the axis (Z) measured radially relative to the axis (Z).
[0371] 80. The device according to the preceding embodiment, wherein each tooth (155, 175) is configured such that its respective tooth distance (190) varies along said axis (Z).
[0372] 81. The device according to any one of the two preceding embodiments, wherein each tooth (155, 175) is configured such that its corresponding tooth distance (190) varies monotonically along the axis (Z).
[0373] 82. The device according to any one of the 3 preceding embodiments, wherein each tooth (155, 175) is configured such that its respective tooth distance (190) varies strictly monotonically along the axis (Z).
[0374] 83. The device of any one of the 4 preceding embodiments, wherein each tooth (155, 175) is configured such that its effective tooth distance (190) varies linearly along the axis (Z).
[0375] 84. The device according to any one of the 5 preceding embodiments, wherein the tooth distance (190) of the teeth (155, 175) comprised by the same member (15, 17) increases according to the same direction along the axis (Z).
[0376] 85. A device according to any one of the 6 preceding embodiments, wherein the tooth distance (190) of the teeth (155, 175) comprised by different components (15, 17) increases according to opposite directions along the axis (Z).
[0377] 86. The device according to any of the 7 preceding embodiments, wherein each tooth (155, 175) comprises a constant tooth width (150) along the axis (Z).
[0378] 87. The device according to any of the 8 preceding embodiments, wherein each tooth (155, 175) is inclined relative to the axis (Z) according to an inclination angle.
[0379] 88. The device according to any of the 9 preceding embodiments, wherein each tooth (155, 175) is bent outwardly relative to the axis (Z).
[0380] 89. A device according to any of the preceding embodiments 1 to 48, wherein at least one of the members (15, 17) comprises a plurality of rings (153, 173).
[0381] 90. The device according to any of the preceding embodiments 1 to 48, wherein two of the members (15, 17) respectively comprise a plurality of rings (153, 173).
[0382] 91. The device according to any one of the 2 preceding embodiments, wherein the rings (153, 173) are parallel to each other.
[0383] 92. The device according to any one of the 3 preceding embodiments, wherein the rings (153, 173) are coaxial.
[0384] 93. A device according to any one of the 4 preceding embodiments, wherein the central axis of each ring (153, 173) is located on the axis (Z).
[0385] 94. The device according to any one of the 5 preceding embodiments, wherein the ring (153, 173) comprises a hollow cylindrical shape.
[0386] 95. The device according to any one of the 6 preceding embodiments, wherein the rings (153, 173) are spaced apart from each other along the axis (Z).
[0387] 96. The device according to any one of the 7 preceding embodiments, wherein the members (15, 17) are configured such that any two adjacent rings (153, 173) belong to different members (15, 17).
[0388] 97. The device according to any of the 8 preceding embodiments, wherein at least one of the members (15, 17) comprises at least 3 rings (153, 173).
[0389] 98. The device according to any of the 9 preceding embodiments, wherein at least one of the members (15, 17) comprises at most 50 rings (153, 173).
[0390] 99. The device according to any one of the 10 preceding embodiments, wherein at least one of the members (15, 17) comprises at most 25 rings (153, 173).
[0391] 100. The device according to any one of the 11 preceding embodiments, wherein the member (15,
[0392] 17) comprises at least 3 rings (153, 173) and at most 10 rings.
[0393] 101. The device according to any one of the 12 preceding embodiments, wherein the member (15,
[0394] 17) comprises at least 4 rings (153, 173) and at most 8 rings.
[0395] 102. The device according to any of the 13 preceding embodiments, wherein at least one of the members (15, 17) comprises 6 rings (153, 173).
[0396] 103. The device according to any one of the 14 preceding embodiments, wherein the rings (153, 173) comprised by the same member (15, 17) are electrically connected to each other.
[0397] 104. The device according to any one of the 15 preceding embodiments, wherein the rings (153, 173) comprised by different components (15, 17) are electrically isolated from each other.
[0398] 105. The device according to any one of the 16 preceding embodiments, wherein for each ring (153, 173) of one of the members (15, 17), there is a corresponding identical ring (173, 153) comprised by the other member (17, 15).
[0399] 106. A device according to the preceding embodiment, wherein corresponding identical rings (153, 173) are symmetrical about the center of the device (1) along the axis (Z).
[0400] 107. A device according to any one of the 18 preceding embodiments, wherein, for at least one of the members (15, 17), the distance along the axis (Z) between the two farthest from each other of its rings (153, 173) is at least 25% of the maximum length along the axis (Z) of the device (1).
[0401] 108. A device according to any one of the 19 preceding embodiments, wherein, for at least one of the members (15, 17), the distance along the axis (Z) between the two most distant ones of its rings (153, 173) is at most 90% of the maximum length along the axis (Z) of the device (1).
[0402] 109. A device according to any one of the 20 preceding embodiments, wherein, for at least one of the components (15, 17), the distance along the axis (Z) between the two farthest from each other in its rings (153, 173) is at least 25% and at most 90% of the maximum length along the axis (Z) of the device (1).
[0403] 110. A device according to any one of the 21 preceding embodiments, wherein, for at least one of the components (15, 17), the distance along the axis (Z) between the two farthest from each other in its rings (153, 173) is at least 35% and at most 85% of the maximum length along the axis (Z) of the device (1).
[0404] 111. A device according to any one of the 22 preceding embodiments, wherein, for at least one of the components (15, 17), the distance along the axis (Z) between the two farthest ones of its rings (153, 173) from each other is at least 50% of the maximum length along the axial direction of the device (1).
[0405] 112. The device according to any one of the 23 preceding embodiments, wherein the member (15,
[0406] 17) comprises at least one ring (153, 173) on a first half of the device (1) and at least one other ring (153, 173) on a second half of the device (1),
[0407] The first half and the second half of the device (1) are separated by a plane perpendicular to the axis (Z).
[0408] 113. The device according to any one of the 24 preceding embodiments, wherein each ring (153,
[0409] 173) comprises a corresponding ring height (130) measured along said axis (Z).
[0410] 114. A device according to the preceding embodiment, wherein each ring (153, 173) is configured such that the respective ring height (130) depends on the position of the respective ring (153, 173) along the axis (Z).
[0411] 115. The device according to any of the 2 preceding embodiments, wherein the rings (153, 173) comprised by the same member (15, 17) comprise different ring heights (130).
[0412] 116. A device according to any one of the 3 preceding embodiments, wherein the ring height (130) of the rings (153, 173) comprised by the same member (15, 17) varies monotonically along the axis (Z).
[0413] 117. An apparatus according to any one of the 4 preceding embodiments, wherein the ring height (130) of the ring (153, 173) included by one of the components (15, 17) and the ring height (130) of the ring (153, 173) included by the other of the components (15, 17) increase in opposite directions along the axis (Z).
[0414] 118. A device according to any of the preceding embodiments, wherein the at least one varying property (130, 150, 190) varies monotonically along the axis (Z).
[0415] 119. A device according to any of the preceding embodiments, wherein the at least one varying property (130, 150, 190) varies strictly monotonically along the axis (Z).
[0416] 120. The device according to any of the preceding embodiments, wherein the at least one varying property (130, 150, 190) varies linearly along the axis (Z).
[0417] 121. Device according to any of the preceding embodiments, wherein the two components (15, 17) each comprise at least one varying property (130, 150, 190) varying along the axis (Z).
[0418] 122. An apparatus according to the preceding embodiment, wherein the components (15, 17) are configured such that at least one of the varying properties (130, 150, 190) of one of the components (15, 17) and at least one of the varying properties (130, 150, 190) of another of the components (15, 17) increase monotonically in opposite directions along the axis (Z).
[0419] 123. The device according to any one of the two preceding embodiments, wherein the member (15,
[0420] 17) is configured so that the at least one varying property (130, 150, 190) of one of the components (15, 17) and the at least one varying property (130, 150, 190) of the other of the components (15, 17) increase strictly monotonically in opposite directions along at least a portion of the axis (Z).
[0421] 124. The device according to any one of the 3 preceding embodiments, wherein the member (15,
[0422] 17) is configured so that the at least one varying property (130, 150, 190) of one of the components (15, 17) and the at least one varying property (130, 150, 190) of the other of the components (15, 17) increase strictly monotonically according to opposite directions along the axis (Z).
[0423] 125. The device according to any one of the 4 preceding embodiments, wherein the member (15,
[0424] 17) is configured such that the at least one varying property (130, 150, 190) of one of the components (15, 17) and the at least one varying property (130, 150, 190) of the other of the components (15, 17) increase linearly according to opposite directions along at least a portion of the axis (Z).
[0425] 126. An apparatus according to any one of the five preceding embodiments, wherein the components (15, 17) are configured such that at least one variable attribute (130, 150, 190) of one of the components (15, 17) and at least one variable attribute (130, 150, 190) of another of the components (15, 17) increase linearly in opposite directions along the axis (Z).
[0426] 127. An apparatus according to any one of the 6 preceding embodiments, wherein the components (15, 17) are configured such that at least one variable attribute (130, 150, 190) of one of the components (15, 17) and at least one variable attribute (130, 150, 190) of another of the components (15, 17) are equal at a center position along the axis (Z) of the apparatus (1).
[0427] 128. An apparatus according to any of the preceding embodiments and having the features of embodiment 71, wherein one of the at least one varying attribute (150) depends on the tooth width (150) of at least one tooth (155, 175).
[0428] 129. An apparatus according to any of the preceding embodiments and having the features of embodiment 79, wherein one of the at least one varying attribute (190) depends on the tooth distance (190) of at least one tooth (155, 175).
[0429] 130. An apparatus according to any of the preceding embodiments and having the features of embodiment 113, wherein one of the at least one varying attribute (130) depends on the ring height (130) of at least one ring (153, 173).
[0430] 131. The apparatus of any preceding embodiment, wherein one of the at least one varying attribute (130, 150) is a quantity parameter (130, 150).
[0431] 132. A device according to the preceding embodiment, wherein the quantity parameter (130, 150) indicates the quantity of respective components (15, 17) comprised by the device (1) at a plurality of positions along the axis (Z).
[0432] 133. A device according to any one of the two preceding embodiments and having the features of embodiment 71, wherein the quantity parameter (150) depends on the tooth width (150) of at least one tooth (155, 175).
[0433] 134. An apparatus according to any one of the three preceding embodiments and having the features of embodiment 113, wherein the quantity parameter (150) depends on the ring height (130) of at least one ring (153, 173).
[0434] 135. The apparatus of any preceding embodiment, wherein one of the at least one varying attribute (190) is a distance parameter (190).
[0435] 136. A device according to the preceding embodiment, wherein the distance parameter (190) indicates a radial distance between the respective component (15, 17) and the axis (Z) measured radially relative to the axis (Z).
[0436] 137. A device according to any one of the two preceding embodiments and having the features of embodiment 79, wherein the distance parameter (190) depends on the tooth distance (190) of at least one tooth (155, 175).
[0437] 138. An apparatus according to any of the preceding embodiments, wherein the apparatus (1) is configured such that effects caused by capacitance between the electrical component (2) and the environment in which the electrical component (2) is positioned are reduced.
[0438] 139. An apparatus according to any of the preceding embodiments, wherein at least one of the varying properties (130, 150, 190) varies along the axis (Z) such that an effect caused by the capacitance between the electrical component (2) and the environment in which the electrical component (2) is positioned is reduced.
[0439] 140. The device according to the preceding embodiment, wherein the environment in which the electrical component (2) is located comprises at least one electrical conductor.
[0440] 141. The device according to any of the 2 preceding embodiments, wherein the environment in which the electrical component (2) is located comprises the device (1).
[0441] 142. The device according to any of the 3 preceding embodiments, wherein the capacitance between the electrical component (2) and the environment is an unwanted capacitance.
[0442] 143. The device according to any of the 4 preceding embodiments, wherein the capacitance between the electrical component (2) and the environment comprises stray capacitance or parasitic capacitance.
[0443] 144. The device according to any one of the 5 preceding embodiments, wherein the effect comprises a charging time and / or a discharging time of a capacitor generated by the electrical component (2) and the environment in which the electrical component (2) is located.
[0444] 145. The device according to any of the 6 preceding embodiments, wherein the effect comprises a charging time and / or a discharging time of a capacitor generated by the electrical component (2) and the device (1).
[0445] 146. The device according to any of the 7 preceding embodiments, wherein the effect comprises a time delay for the potential of the electrical component (2) to change from a first set voltage to a second set voltage.
[0446] 147. The device of any one of the 8 preceding embodiments, wherein the effect comprises a time delay for a potential of an external electrical device electrically connected to the electrical component (2) to change from a first set voltage to a second set voltage.
[0447] 148. The device according to any of the preceding embodiments, wherein the first potential (V1) of the electrical component (2) varies along the axis (Z) and
[0448] At least one of the properties (130, 150, 190) is along the axis (Z)
[0449] The electric field of the region (3) parallel to the axis (Z) is changed so that the axial electric field in the region (3) matches the gradient of the first potential (V1) along the axis (Z).
[0450] 149. The device according to the preceding embodiment, wherein the axial electric field is matched to the gradient of the first potential (V1) so that at any point within the region (3)
[0451] The difference between the gradient of the axial electric field and the gradient of the first potential (V1) does not exceed 10% of the gradient of the first potential (V1),
[0452] preferably does not exceed 5% of the gradient of said first potential (V1),
[0453] Even more preferably, it does not exceed 1% of the gradient of said first potential (V1).
[0454] 150. An apparatus according to any of the preceding embodiments, wherein the attribute (130, 150,
[0455] 190) varies along said axis (Z) such that
[0456] The axial electric field parallel to said axis (Z) in said region (3) is homogeneous within a tolerance of at most 10% deviation, preferably at most 5% deviation, even more preferably 1% deviation.
[0457] 151. The device according to any of the preceding embodiments, wherein
[0458] The first potential (V1) of the electrical component (2) varies along the axis (Z) and
[0459] The second potential (V2) in the region (3) varies along the axis (Z) and
[0460] At least one of the properties (130, 150, 190) is along the axis (Z)
[0461] changes so that the second potential (V2) matches the first potential (V1) along the axis (Z).
[0462] 152. The device according to the preceding embodiment, wherein the second potential (V2) matches the first potential (V1) so that at any point within the region (3)
[0463] a measure of the difference between said second potential (V2) and said first potential (V1) being at most 10% of said first potential (V1),
[0464] Preferably at most 5% of said first potential (V1),
[0465] Even more preferably at most 1% of said first potential (V1).
[0466] 153. The device according to any one of the 2 preceding embodiments and / or having the features of embodiment 148, wherein the first potential (V1) indicates the potential at a point in or on the electrical component (2).
[0467] 154. A device according to any one of the 3 preceding embodiments and / or having the features of embodiment 148, wherein the first potential (V1) varies deterministically along the axis (Z).
[0468] 155. An apparatus according to any one of the 4 preceding embodiments and / or having the features of embodiment 148, wherein the first potential (V1) varies monotonically along the axis.
[0469] 156. A device according to any one of the 5 preceding embodiments and / or having the features of embodiment 148, wherein the first potential (V1) varies strictly monotonically along the axis.
[0470] 157. An apparatus according to any one of the 6 preceding embodiments and / or having the features of embodiment 148, wherein the first potential (V1) varies linearly along the axis.
[0471] 158. An apparatus according to any one of the 7 preceding embodiments, wherein the second potential (V2) is an average value of the potentials at points within the region (3) including the same position along the axis (Z).
[0472] 159. A device according to any of the preceding embodiments, wherein the component portion (25) comprises a length along the axis (Z) of the electrical component (2) of at least 45% of the length along the axis (Z).
[0473] 160. The device according to any one of the preceding embodiments and without the features of the preceding embodiments, wherein the component part (25) is the entire electrical component (2).
[0474] 161. A device according to the preceding embodiment, wherein the device (1) is configured such that it comprises a maximum extension along the axis (Z) that is equal to or greater than the maximum extension of the electrical component (2) along the axis (Z).
[0475] 162. A device according to any of the preceding embodiments, wherein the device (1) is configured to completely surround the component part (25) laterally around the axis (Z).
[0476] 163. An apparatus according to any of the preceding embodiments, wherein the apparatus (1) is configured to laterally surround the component part (25) by at least 120°, preferably at least 180°, and even more preferably at least 270° around the axis (Z).
[0477] 164. An apparatus according to any of the preceding embodiments, wherein the apparatus (1) is configured to be electrically connected to an electrical energy source.
[0478] 165. A device according to the preceding embodiment, wherein the member (15, 17) is configured to be electrically connected to a corresponding one of the opposite terminals of the electrical energy source.
[0479] 166. The device according to any one of the 2 preceding embodiments, wherein the device (1) is configured to be electrically connected to the same electrical energy source to which the electrical component (2) is connected.
[0480] 167. The device according to any one of the 3 preceding embodiments and having the features of embodiment 2, wherein each member (15, 17) is configured to be electrically connected to the electrical energy source such that
[0481] Each member (15, 17) comprises the same electrical potential as a corresponding one of the component ends (22, 24).
[0482] 168. An apparatus according to any one of the 4 preceding embodiments, wherein the electrical energy source is a direct current source.
[0483] 169. The device of any one of embodiments 164 to 167, wherein the source of electrical energy is an alternating current source.
[0484] 170. A device according to any of the preceding embodiments and having the features of embodiment 2, wherein each of the members (15, 17) is configured to be electrically connected to a corresponding one of the component ends (22, 24).
[0485] 171. An apparatus according to the preceding embodiment, wherein each member (15, 17) is configured to be electrically connected to a corresponding one of the member ends (22, 24) such that each member (15, 17) and the corresponding member end (22, 24) comprise the same electrical potential.
[0486] 172. The device according to any one of the two preceding embodiments, wherein each member (15,
[0487] 17) is configured to be electrically connected to a corresponding one of the component ends (22, 24) using a wire.
[0488] 173. The device according to any of the preceding embodiments, wherein the electrical component (2) is a resistor (2).
[0489] 174. The device according to any of the preceding embodiments, wherein the electrical component (2) comprises a resistor.
[0490] 175. The device according to any of the preceding embodiments, wherein the electrical component (2) comprises a transistor.
[0491] 176. The device according to any of the preceding embodiments, wherein the electrical component (2) comprises a plurality of circuit elements.
[0492] 177. The device of the preceding embodiment, wherein at least one circuit element is a resistor.
[0493] 178. The device of any one of the two preceding embodiments, wherein the circuit element is a resistor.
[0494] 179. The device of any one of the 3 preceding embodiments, wherein the circuit element is a string of resistors electrically connected in series.
[0495] 180. The device according to any one of the preceding embodiments, wherein the electrical component (2) is part of a voltage divider circuit.
[0496] 181. The device according to any of the preceding embodiments, wherein the electrical component (2) is part of a control circuit for setting the voltage of the second device at at least one set point voltage.
[0497] 182. An apparatus according to the preceding embodiment, wherein the second apparatus is part of a charged particle microscopy system.
[0498] 183. The device of any one of the two preceding embodiments, wherein the second device is part of an imaging system of a charged particle microscopy system.
[0499] 184. The device of any one of the 3 preceding embodiments, wherein the second device is part of a drift tube of a charged particle microscopy system.
[0500] 185. An apparatus according to any of the preceding embodiments, wherein the apparatus (1) is configured to reduce electromagnetic interference in a circuit comprising the electrical component (2).
[0501] 186. The device according to any of the preceding embodiments, wherein the device (1) is configured as an electromagnetic shield for the electrical component (2).
[0502] 187. An apparatus according to any of the preceding embodiments, wherein the apparatus (1) is configured to reduce resistance-capacitance (RC) delay in a circuit including the electrical component (2).
[0503] 188. A device according to any of the preceding embodiments, wherein the device (1) is configured to be used in a charged particle microscopy system comprising the electrical component (2).
[0504] 189. An apparatus according to any of the preceding embodiments, wherein the apparatus (1) is configured to include an unfolded state and a wrapped state.
[0505] 190. A device according to the preceding embodiment, wherein in the unfolded state, the device (1) is configured to be flat.
[0506] 191. An apparatus according to any one of the two preceding embodiments, wherein in the expanded state, the apparatus (1) is configured to include a rectangular shape.
[0507] 192. A device according to any one of the three preceding embodiments and having the features described in embodiment 20, wherein the device (1) includes the device through hole (19) in the wrapped state.
[0508] 193. An apparatus according to any one of the 4 preceding embodiments, wherein in the wrapped state, the apparatus (1) is configured to include a hollow cylindrical shape.
[0509] 194. The device according to any one of the 5 preceding embodiments, wherein the device (1) is used in a wrapped state.
[0510] 195. An apparatus according to any one of the six preceding embodiments, wherein the apparatus (1) is configured to transition from the unfolded state to the wrapped state at least once.
[0511] 196. An apparatus according to any one of the 7 preceding embodiments, wherein the apparatus (1) is configured to be able to transition from the wrapped state to the unfolded state and vice versa multiple times.
[0512] 197. The device of any one of the 8 preceding embodiments, wherein the device (1)
[0513] The device (1) is configured to be brought into the wrapped state from the unfolded state by attaching two opposite edges of the device (1) to each other.
[0514] 198. A device according to the preceding embodiment, wherein the device (1) is configured such that the two opposing edges can be securely and releasably attached to each other.
[0515] Next, system embodiments will be discussed. These embodiments are abbreviated as the letter "S" followed by a number. Whenever "system embodiments" are mentioned herein, these embodiments are intended.
[0516] S1. A system comprising
[0517] Device (1) and electrical component (2),
[0518] wherein the device (1) is configured to at least partially surround at least a component portion (25) of the electrical component (2) around an axis (Z) so as to define a region (3) therebetween, and
[0519] The device (1) comprises two components (15, 17),
[0520] wherein at least one of the members (15, 17) comprises a
[0521] At least one changing attribute (130, 150, 190) of the change.
[0522] S2. A system according to the preceding embodiments, wherein the device (1) is configured according to any one of the preceding device embodiments.
[0523] S3. The system according to any of the preceding system embodiments, wherein the electrical component is configured according to any of embodiments 173 to 184.
[0524] S4. A system according to any of the preceding system embodiments, wherein the system further comprises an offset drift tube for use in a charged particle microscope, and wherein the electrical component (2) is electrically connected to the offset drift tube.
[0525] S5. The system according to the preceding embodiment, wherein the offset drift tube comprises a region through which the charged particle beam can pass, and wherein the offset drift tube is configured to generate a magnetic field in the region.
[0526] S6. The system according to any one of the 2 preceding embodiments, wherein the system comprises a voltage regulating circuit for providing a bias voltage to the offset drift tube, and wherein the voltage regulating circuit comprises the electrical component (2).
[0527] S7. The system according to the two preceding embodiments, wherein the offset drift tube is configured to generate the magnetic field based on the bias voltage.
[0528] S8. The system of any one of the two preceding embodiments, wherein the voltage regulation circuit is configured to alternate the bias voltage between a plurality of set points.
[0529] S9. The system according to any one of the 3 preceding embodiments, wherein the voltage regulation circuit is configured to alternate the bias voltage between a plurality of set points at a frequency of at least 100 kHz, preferably at least 130 kHz.
[0530] S10. The system according to any one of the 4 preceding embodiments, wherein the bias voltage is varied by up to 5 kV, preferably up to 3 kV.
[0531] S11. A system according to any of the preceding system embodiments, wherein the system further comprises a charged particle microscope, and wherein the charged particle microscope comprises the electrical component (2).
[0532] S12. The system according to the preceding embodiment, wherein the charged particle microscope is a transmission-type charged particle microscope.
[0533] S13. A system according to any one of the 2 preceding embodiments, wherein the charged particle microscope is an electron microscope.
[0534] S14. A system according to any one of the 3 preceding embodiments, wherein the charged particle microscope is a scanning electron microscope.
[0535] S15. A system according to any one of the 4 preceding embodiments, wherein the charged particle microscope is a transmission electron microscope.
[0536] S16. A system according to any one of the 5 preceding embodiments, wherein the charged particle microscope is a scanning transmission electron microscope.
[0537] S17. A system according to any one of the 6 preceding embodiments, wherein the charged particle microscope is an electron energy loss spectrometer.
[0538] S18. A system according to embodiment S11, wherein the charged particle microscope is an ion-based microscope.
[0539] S19. A system according to any one of the 8 preceding embodiments, wherein the charged particle microscope comprises a charged particle emitter configured to emit a charged particle beam.
[0540] S20. The system according to the preceding embodiment, wherein the charged particle microscope comprises an imaging system configured to receive the charged particle beam emitted by the charged particle emitter.
[0541] S21. A system according to any one of the 10 preceding embodiments and having the features described in embodiment S4, wherein the charged particle microscope includes the offset drift tube.
[0542] S22. The system of any two preceding embodiments, wherein the imaging system comprises the offset drift tube.
[0543] Next, method embodiments will be discussed. These embodiments are abbreviated as the letter "M" followed by a number. Whenever "method embodiments" are mentioned herein, these embodiments are intended.
[0544] M1. A method of operating an electrical component (2), the method comprising
[0545] A device (1) is provided for at least partially surrounding at least a component part (25) of the electrical component (2) around an axis (Z) so as to define a region (3) therebetween, wherein the device (1) comprises two members (15, 17), and
[0546] At least one of the components (15, 17) includes at least one varying property (130, 150, 190) that varies along an axis (Z).
[0547] M2. A method of operating a system, the method comprising
[0548] providing a device (1) and an electrical component (2) such that the device (1) at least partially surrounds at least a component portion (25) of the electrical component (2) around an axis (Z), thereby defining a region (3) therebetween,
[0549] The device (1) comprises two components (15, 17), and
[0550] At least one of the components (15, 17) includes at least one varying property (130, 150, 190) that varies along an axis (Z).
[0551] M3. A method according to any one of the aforementioned method embodiments, wherein the device (1) is configured according to any one of the aforementioned device embodiments.
[0552] M4. A method according to any one of the 3 preceding embodiments, wherein the system is configured according to any one of the preceding system embodiments.
[0553] M5. A method according to any of the preceding method embodiments, wherein the method comprises electrically connecting the device (1) to an electrical energy source.
[0554] M6. A method according to the preceding embodiment, wherein electrically connecting the device (1) to an electrical energy source comprises
[0555] Each of the members (15, 17) is electrically connected to a respective one of the opposing terminals of the source of electrical energy.
[0556] M7. A method according to any one of the two preceding embodiments, wherein electrically connecting the device (1) to an electrical energy source comprises
[0557] The device (1) and the electrical component (2) are electrically connected to the same electrical energy source.
[0558] M8. A method according to any one of the 3 preceding embodiments, wherein the electrical energy source is a direct current source.
[0559] M9. A method according to any one of embodiments M5 to M7, wherein the electrical energy source is an AC source.
[0560] M10. A method according to any one of the preceding method embodiments, wherein the device (1)
[0561] The invention includes the features of embodiment 2, and wherein the method includes maintaining each member (15, 17) and a corresponding one of the component ends (22, 24) at equal electrical potentials.
[0562] M11. A method according to any one of the preceding method embodiments, wherein the device (1)
[0563] The invention includes the features of embodiment 2, and wherein the method includes electrically connecting each member (15, 17) to a corresponding one of the component ends (22, 24).
[0564] M12. A method according to any of the preceding method embodiments, wherein the method comprises alternating the potential of the member (15, 17) between a plurality of set points.
[0565] M13. A method according to any of the preceding method embodiments, wherein the method comprises alternating the potential of the member (15, 17) between a plurality of set points at a frequency of at least 100 kHz, preferably at least 130 kHz.
[0566] M14. A method according to any of the preceding method embodiments, wherein the method comprises alternating the electrical potential of the electrical component (2).
[0567] M15. A method according to any of the preceding method embodiments, wherein the method comprises synchronously alternating the potential of the member (15, 17) and the potential of the electrical component (2).
[0568] M16. A method according to the preceding embodiment, wherein the device (1) comprises the features of embodiment 2, and wherein the method comprises synchronously alternating the potential of the member (15, 17) and the potential of the electrical component (2), so that
[0569] The difference between the potential of each component (15, 17) and a corresponding one of the component ends (22, 24) is minimized.
[0570] M17. The method according to any one of the two preceding embodiments, wherein the device (1)
[0571] The method comprises the features of embodiment 2, wherein the method comprises synchronously alternating the potential of the member (15, 17) and the potential of the electrical component (2), so that
[0572] The difference between the potential of each member (15, 17) and a corresponding one of the component ends (22, 24) is zero.
[0573] M18. A method according to any one of the preceding method embodiments, wherein the method comprises
[0574] The device (1) is used to at least partially surround at least the component part (25) of the electrical component (2) around the axis (Z).
[0575] M19. A method according to any of the preceding method embodiments, wherein the method comprises wrapping the device (1) around at least the component portion (25) of the electrical component (2).
[0576] M20. A method according to the preceding embodiment, wherein the method comprises aligning the device (1) and the electrical component (2) so that they are coaxial.
[0577] M21. A method according to any of the preceding method embodiments, wherein the method comprises the device (1) reducing electromagnetic interference in a circuit comprising the electrical component (2).
[0578] M22. A method according to any of the preceding method embodiments, wherein the method comprises the device (1) electromagnetically shielding the electrical component (2).
[0579] M23. A method according to any of the preceding method embodiments, wherein the method comprises the device (1) reducing a resistance-capacitance (RC) delay in a circuit comprising the electrical component (2).
[0580] M24. A method according to any of the preceding method embodiments, wherein the method comprises the device (1) reducing effects caused by capacitance between the electrical component (2) and the environment in which the electrical component (2) is positioned.
[0581] M25. The method according to the preceding embodiment, wherein the capacitance between the electrical component (2) and the environment is an unwanted capacitance.
[0582] M26. The method according to any one of the 2 preceding embodiments, wherein the capacitance between the electrical component (2) and the environment comprises stray or parasitic capacitance.
[0583] M27. A method according to any of the preceding method embodiments, wherein the method comprises using the device (1) in a charged particle microscopy system comprising the electrical component (2).
[0584] M28. The method according to any of the preceding method embodiments, wherein the electrical component is configured according to any of embodiments 173 to 184.
[0585] Next, use examples will be discussed. These examples are abbreviated as the letter "U" followed by a number. Whenever "use examples" are mentioned herein, these examples are intended.
[0586] U1. Use of a device according to any of the preceding device embodiments to at least partially surround at least a component part (25) of an electrical component (2) around an axis (Z).
[0587] U2. Use of the device according to any one of the aforementioned device embodiments to reduce electromagnetic interference in a circuit.
[0588] U3. Use of the device according to any one of the aforementioned device embodiments as an electromagnetic shield.
[0589] U4. Use of the apparatus according to any of the preceding apparatus embodiments to reduce resistor-capacitor (RC) delay in a circuit.
[0590] U5. Use of a device according to any one of the preceding device embodiments in a charged particle microscopy system.
[0591] U6. Use of the device according to any one of the preceding device embodiments in a voltage regulating circuit for providing a bias voltage to an offset drift tube of a charged particle microscope.
[0592] Below, additional method embodiments will be discussed. These embodiments are abbreviated as the letter "A" followed by a number. Whenever "A" embodiments are mentioned herein, these embodiments are intended.
[0593] A1. A method comprising:
[0594] Providing a device model of the device (1) according to any one of the aforementioned device embodiments;
[0595] simulating a second potential (V2) in the region (3) using a data processing system; and
[0596] The model of the device (1) is modified depending on the second potential (V2).
[0597] A2. The method according to the preceding embodiment, wherein the method comprises producing the device (1) according to a modified device model of the device (1).
[0598] A3. The method according to any one of the 2 preceding embodiments, wherein the method comprises providing a component model of the electrical component (2) comprising a first potential (V1) of the electrical component (2) along an axis (Z).
[0599] A4. A method according to any one of the above "A" embodiments, wherein modifying the device model of the device (1) includes
[0600] At least one varying property (130, 150, 190) that varies along the axis (Z) is determined for at least one of the components (15, 17).
[0601] A5. A method according to the preceding embodiment and having the features of embodiment A3, wherein
[0602] The method comprises
[0603] The at least one change property (130, 150, 190) is determined such that a difference between the first potential (V1) and the second potential (V1) is minimized.
[0604] A6. A method according to any one of the two preceding embodiments and having the features of embodiment A3, wherein the method comprises providing a voltage difference threshold and
[0605] The at least one change attribute (130, 150, 190) is determined such that a difference between the first potential (V1) and the second potential (V1) is smaller than the voltage difference threshold.
[0606] A7. A method according to any one of the 3 preceding embodiments and having the features of embodiment A3, wherein the method comprises
[0607] The at least one variation property (130, 150, 190) is determined so that the difference between the axial electric field parallel to the axis (Z) in the region (3) and the gradient of the first potential (V1) along the axis (Z) is minimized.
[0608] A8. A method according to any one of the 4 preceding embodiments and having the features of embodiment A3, wherein the method comprises providing a gradient difference threshold and
[0609] The at least one change attribute (130, 150, 190) is determined so that the difference between the axial electric field parallel to the axis (Z) in the region (3) and the gradient of the first potential (V1) along the axis (Z) is less than a field difference threshold.
[0610] A9. A method according to any one of the 5 preceding embodiments, wherein the method comprises determining the at least one variation property (130, 150, 190) such that an effect caused by a capacitance between the electrical component (2) and the device (1) is minimized.
[0611] A10. A method according to any one of the 6 preceding embodiments, wherein the method comprises providing a threshold value and determining the at least one change attribute (130, 150, 190) so that the effect caused by the capacitance between the electrical component (2) and the device (1) is less than the threshold value.
[0612] A11. A method according to any one of the 7 preceding embodiments, wherein the method comprises determining at least one of the varying properties (130, 150, 190) so that the axial electric field parallel to the axis (Z) in the region (3) is uniform.
[0613] A12. A method according to any one of the 8 preceding embodiments, wherein the method comprises providing a field variance threshold and
[0614] The at least one variation attribute (130, 150, 190) is determined such that a measure of a difference in the axial electric field parallel to the axis (Z) in the region (3) is less than the field variance threshold.
[0615] A13. A method according to any one of the 9 aforementioned embodiments, wherein the method includes determining at least one of the changing attributes (130, 150, 190) so that a radial electric field in the region (3) pointing radially relative to the axis (Z) is zero.
[0616] A14. A method according to any one of the 10 preceding embodiments, wherein the method comprises providing a radial field threshold and
[0617] The at least one variation property (130, 150, 190) is determined such that a radial electric field in the region (3) directed radially relative to the axis (Z) is less than the radial field threshold.
[0618] A15. A method according to any one of the aforementioned "A" embodiments, wherein the method includes providing a model of the device so that the device (1) includes the features described in any one of embodiments 49 to 70.
[0619] A16. A method according to the preceding embodiment, wherein modifying the device model of the device (1) comprises determining the shape of at least one tooth (155, 175).
[0620] A17. A method according to any one of the two preceding embodiments, wherein modifying the device model of the device (1) comprises determining the number of teeth (155, 175) included by each component (15, 17).
[0621] A18. A method according to any one of the three preceding embodiments, wherein modifying the device model of the device (1) comprises determining the length of each tooth (155, 175) along the axis (Z).
[0622] A19. A method according to any one of the 4 preceding embodiments, wherein modifying the device model of the device (1) comprises determining the position of each tooth (155, 175) along the axis (Z).
[0623] A20. A method according to any one of the 5 preceding embodiments, wherein modifying the device model of the device (1) comprises determining the position of each tooth (155, 175) relative to the electrical component (2) along the axis (Z).
[0624] A21. A method according to any one of the 6 preceding embodiments, wherein modifying the device model of the device (1) comprises determining the potential of each tooth (155, 175) as a function of the potential of the electrical component (2).
[0625] A22. A method according to any one of the aforementioned "A" embodiments, wherein the method includes providing a model of the device so that the device (1) includes the features of any one of embodiment 71, and wherein modifying the device model of the device (1) includes determining a corresponding tooth width (150) along the axis (Z) for each tooth (155, 175).
[0626] A23. A method according to any one of the aforementioned "A" embodiments, wherein the method includes providing a model of the device so that the device (1) includes the features of any one of embodiment 79, and wherein modifying the device model of the device (1) includes determining a corresponding tooth distance (190) along the axis (Z) for each tooth (155, 175).
[0627] A24. A method according to any one of the preceding "A" embodiments, wherein providing a device model of the device (1) comprises providing the device model so that the device (1) includes the features of any one of Embodiments 113, and
[0628] Modifying the device model of the device (1) depending on the second potential (V2) includes determining a respective ring height (130) for each ring (153, 173).
[0629] A25. A method according to any of the preceding "A" embodiments, wherein modifying the device model of the device (1) comprises determining a material of the device (1).
[0630] A26. A method according to any of the aforementioned "A" embodiments, wherein simulating the second potential (V2) in the region (3) using a data processing system includes the data processing system executing a finite element method.
[0631] A27. A method according to any one of the aforementioned "A" embodiments, wherein simulating the second potential (V2) in the region (3) includes determining the second potential (V2) at multiple points within the region (3).
[0632] A28. A method according to any one of the aforementioned "A" embodiments, wherein simulating the second potential (V2) in the region (3) includes determining the second potential (V2) on a cross section of the region (3), the cross section being parallel to the axis (Z).
[0633] A29. A method according to any one of the aforementioned "A" embodiments, wherein simulating the second potential (V2) in the region (3) includes determining the second potential (V2) on a portion of a cross-section of the region (3), the cross-section being parallel to the axis (Z).
[0634] A30. A method according to the preceding embodiment, wherein the portion of the cross-section is a half cross-sectional portion of the region (3). BRIEF DESCRIPTION OF THE DRAWINGS
[0635] Figure 1 shows the voltage around an electrical component when a shield known in the prior art is used;
[0636] Figure 2 shows the voltage around an electrical component when using a device according to an embodiment of the present invention;
[0637] Figure 3a -c depicts a perspective view, a cross-sectional view and an expanded view of an apparatus according to an embodiment of the present invention, the apparatus being configured to completely surround an electrical component;
[0638] Figure 4 is a perspective view of an apparatus according to an embodiment of the present invention, the apparatus being configured to partially surround an electrical component;
[0639] Figure 5 is a cross-sectional view of an apparatus according to an embodiment of the present invention, the apparatus being configured to at least partially surround a component portion of an electrical component;
[0640] Figure 6a-9b Different embodiments of devices including components having varying numbers of parameters are shown;
[0641] Fig.10 An embodiment of an apparatus including a member having a varying distance parameter is shown;
[0642] Fig.11 is a diagram showing the electrical potential at and near an electrical component and at a device;
[0643] Fig.12a - b shows the layers that may be comprised by a device according to an embodiment of the present invention;
[0644] Fig.13 An embodiment of a microscopy system that may include the apparatus of the present invention is depicted;
[0645] Fig.14 shows the corresponding step responses of the circuit when the input voltage of the circuit is changed for different situations;
[0646] Fig.15a -b shows a circuit in which the device 1 is used. DETAILED DESCRIPTION
[0647] Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings. These examples are provided to facilitate further understanding of the present invention, rather than to limit its scope. In addition, in the following description, a series of features and / or steps are described. The skilled person will appreciate that, unless the context requires, the order of features and steps is not critical to the resulting configuration and its effects. Further, it will be clear to the skilled person that no matter how the order of features and steps, some or all of the steps may or may not have time delays between steps.
[0648] Before providing a description of exemplary embodiments of the present invention, the description of the drawings first provides a brief description of known electromagnetic shields and their problems.
[0649] Figure 1 Shown is a cross section of an electrical component 2 surrounded by a typical electromagnetic shield 1 ' known in the art, which for the sake of brevity may be interchangeably referred to as shield 1 '. The shield 1 ' may surround the electrical component 2 such that a region 3 may be formed between them. Figure 1 The potential distribution within the region 3 is also shown, wherein the darker regions indicate higher potentials than the lighter regions. The potentials may be obtained, for example, using a finite element method (FEM) analysis. It can be easily noted that around the first component end 22 (i.e., the top component end 22) of the electrical component 2, the potential is higher than around the second component end 24 (i.e., the bottom component end 24), as indicated by the darker color. In this document, the terms "top" and "bottom" refer to different positions along the axis Z - the axis Z may also be referred to as the variation axis Z for reasons that will become clear further below.
[0650] During operation of the electrical component 2, an electric field may be generated by the electrical component 2, which may extend in the operating environment in which the electrical component 2 is located. The operating environment may include environmental elements, such as electrical conductors, conductive surfaces, and / or circuit elements. Thus, the electric field generated by the electrical component 2 may encounter the environmental elements that may be present in the operating environment. Similarly, the electric field generated by the environmental elements in the operating environment may encounter the electrical component 2.
[0651] Therefore, in the operating environment, capacitance can be generated between the electric component and the environmental element. Usually, such capacitance is undesirable and is usually referred to as parasitic capacitance or stray capacitance. Parasitic capacitance may include a negative effect on the operation of the electric component 2 and / or the circuit comprising the electric component 2. For example, parasitic capacitance may cause crosstalk between the electric component 2 and the element in the operating environment. In addition, when changing the voltage applied to the electric component 2 and / or when changing the voltage applied to the element in the operating environment, it may cause resistance-capacitance delay or RC delay. Therefore, parasitic capacitance may be a significant problem, particularly in high-frequency circuits, and may usually become a limiting factor in increasing the operating frequency of high-frequency circuits.
[0652] like Figure 1 As shown in , it is known that electromagnetic shielding reduces crosstalk between an electrical component 2 and its operating environment. The electromagnetic shield 1' may be formed by a continuum or grid of conductive material that creates the enclosure. The shield 1' may typically be connected to ground (i.e., to a reference point of the circuit). This may prevent (or significantly reduce) electromagnetic fields from entering or leaving the enclosure. Figure 1 As shown in , by providing the electrical component 2 in the enclosure of the electromagnetic shield 1 ′, the capacitance and thus the crosstalk between the electrical component 2 and the ambient elements in the operating environment may be mitigated and / or completely removed.
[0653] However, although the capacitance between the electrical component 2 and the environmental elements outside the enclosure of the shield 1' can be reduced or prevented by using the shield 1', parasitic capacitance can still exist between the electrical component 2 and the shield 1' itself. That is, on the one hand, the use of the shield 1' can reduce the parasitic capacitance between the electrical component 2 and the environmental elements outside the enclosure of the shield 1'. However, on the other hand, the use of the shield 1' introduces parasitic capacitance between the electrical component 2 and the shield 1' itself. In addition, the electrical component 2 or a portion thereof may include a different potential from the shield 1'-it can usually be connected to the ground. The potential difference causes the parasitic capacitor generated by the shield 1' and the electrical component 2 to charge and / or discharge, which therefore introduces a delay when changing the voltage of the electrical component 2.
[0654] More specifically, the electrical component 2 may comprise an electrical potential that varies along the axis Z. Said electrical potential may also be referred to as a first electrical potential V1 (see Fig.11 ). For example, the potential at the top component end 22 may be higher than the potential at the bottom component end 24. Between the component ends 22, 24, the potential of the electrical component 2 may vary from a high voltage to a low voltage. For example, the electrical component 2 may be a resistor and the potential of the electrical component 2 may gradually decrease from one of the component ends 22, 24 to the other. On the other hand, the shield 1 'formed by a continuum or mesh of conductive material may include an overall constant voltage. Therefore, a portion of the electrical component 2 may face a portion of the shield 1 ' and both may include different potentials.
[0655] This can be found in Figure 1 , for example, by observing the potential along a line perpendicular to the axis Z. At the bottom part end 24, the potential along the line is constant. This is due to the fact that the shield 1 ' and the bottom part end 24 are connected to ground in this example. However, at the top part end 22, the voltage along the line decreases. This is also true at other positions along the axis Z between the top part end 22 and the bottom part end 24.
[0656] Since the voltages of the electrical component 2 and the shield 1 ' may be different along at least a portion of the electrical component 2 along the axis Z, the parasitic capacitors created by them will charge and / or discharge. For example, when increasing the voltage applied at the top component end 22, there may be a delay between the time the applied voltage is increased and the time the voltage at the top component end 22 is equal to the applied voltage due to the charging of the parasitic capacitance. This may also be the case when reducing the voltage applied at the top component end 22 due to the discharging of the parasitic capacitance.
[0657] Embodiments of the present invention provide an apparatus 1 that can be configured to mitigate the effects of parasitic capacitance from an electrical component towards its operating environment. This can reduce RC delays and allow for increases in operating frequencies of circuits including the electrical component 2.
[0658] Typically, an electrical component 2 that can be used with the device 1 of the present invention may include a conductive path, wherein the voltage along the path can vary when current flows through it. In other words, a voltage referred to as a first potential V1 (see Fig.11 ) can vary the potential of the electrical component 1 along the axis Z. The axis Z can be parallel to the direction of the current flowing through the electrical component 2. In other words, the axis Z can be parallel to the conductive path. The electrical component can extend substantially longitudinally along the axis Z. That is, the axis Z can be the longitudinal axis of the electrical component 2.
[0659] In general, and with reference to all figures, the device 1 may include two components 15, 17. They may be individually referred to as a first component 15 and a second component 17, and collectively referred to as components 15, 17. The components 15, 17 may be electrically insulated from each other. This may allow the components 15, 17 to be at different electrical potentials from each other. In other words, unlike known electromagnetic shields 1', in which the entire shield 1' is at the same electrical potential, the present device 1 includes two components 15, 17, in which each component may include a corresponding electrical potential. For example, one of the components 15, 17 may include a high voltage, while the other of the components 15, 17 may include a low voltage. Preferably, each component 15, 17 may include the same electrical potential as a corresponding one of the component ends 22, 24 of the electrical component 2.
[0660] The members 15, 17 may extend along the axis Z from opposite sides of the device 1 towards the center of the device 1, and preferably through the center of the device 1. Thus, the members 15, 17 may extend along the axis Z from one side of the device 1 to the other side of the device 1. The device 1 and the electrical component 2 may be arranged vis-à-vis to each other, such that the members 15, 17 with a higher potential may be aligned with the component ends 22, 24 comprising a higher potential, and the members 15, 17 with a lower potential may be aligned with the component ends 22, 24 also comprising a lower first potential V1. In this way, the difference between the voltage at the electrical component 2 and the voltage at the device 1 at the same position along the axis may be smaller than in the prior art shield 1'. Thus, by comprising only two members 15, 17, the device 1 may already provide the advantage of reducing the effect caused by the capacitance between the electrical component 2 and the device 1, compared to the prior art electromagnetic shield 1'.
[0661] However, while the components 15, 17 may include different voltages from one another, they include a constant voltage within themselves. That is, the voltage along the axis Z of each component 15, 17 may be substantially constant. However, as discussed, the voltage of the electrical component 2 may vary along the axis Z. Thus, while the voltage at the component ends 22, 24 may be the same as the voltage of the respective components 15, 17, the voltage along the electrical component 2 may be different than the voltage of the components 15, 17.
[0662] For example, the voltage of the electrical component 2, which may be a resistor 2, may gradually decrease from the first component end 22 to the second component end 24. Therefore, the voltage of the electrical component 2 may be highest at the first component end 22 and smallest at the second component end 24. Therefore, the first member 15 may include a high voltage at the first component end 22, and the second member 17 may include a low voltage at the second component end 24. Therefore, at the component ends 22, 24, the voltage between the electrical component 2 and the device 1 may match. However, at different positions between the component ends 22, 24, the voltage between the electrical component 2 and the device 1 may be different. Specifically, at a position closer to the first component end 22, the voltage of the electrical component 2 may be lower than the voltage of the device 1. Similarly, at a position closer to the second component end 24, the voltage of the electrical component 2 may be higher than the voltage of the device 1.
[0663] To further reduce the effect of the capacitance between the device 1 and the electrical component 2 , the device 1 may be configured such that at least one of the members 15 , 17 may include at least one varying property 130 , 150 , 190 that may vary along the axis Z. The at least one varying property 130 , 150 , 190 may vary along the axis Z such that each member 15 , 17 may cancel the effect of the other in a manner that varies along the axis Z.
[0664] Continuing with the above example, at a position closer to the first component end 22, the voltage of the electric component 2 may be lower than the voltage of the first member 15, and thus there may be a first electric field directed from the first member 15 to the electric component 2. However, at such a position, there may also be a second member 17, which may include a lower voltage than the electric component 2 at these positions. Therefore, there may be a second electric field directed from the electric component 2 to the second member 17. The first electric field and the second electric field include opposite directions, i.e., opposite to each other. These fields also exist at a position closer to the second component end 24, but have opposite directions as described in the preceding sentence. Therefore, the purpose of the present invention may be to configure the members 15, 17 and in particular at least one variable attribute 130, 150, 190 so that the first electric field and the second electric field completely or at least significantly cancel each other at each position along the axis Z.
[0665] As will be understood by a person skilled in the art, for each position along the axis Z, each field may depend on the number (i.e., amount) of the respective components 15 , 17 at that position along the axis Z and on the distance between the electrical component 2 and the respective component 15 , 17 at that position along the axis Z. More specifically, how much these fields may cancel each other may depend on the ratio between the number of first components 15 and the number of second components 17 and / or on the ratio between the distance of the first components 15 from the electrical component 2 and the distance of the second components 17 from the electrical component 2 .
[0666] Thus, the variation attribute 130, 150, 190 may be a quantity parameter 130, 150 which may indicate the number of respective components 15, 17 included by the device 1 at a plurality of positions along the axis Z. Continuing with the above example, at the first component end 22, the device 1 may include only the first component 15. There may be no need for the second component 17 because the first component 15 and the first component end 22 may be at the same voltage. Moving along the axis Z toward the second component end 22, the voltage of the device 1 may drop, and thus a first electric field may appear. The more the voltage of the device 1 drops along the axis Z, the stronger the first electric field may become. In order to eliminate or reduce this field, the device 1 may include an increasing number of second components 17 along the axis Z. Ideally, the second electric field may match the first electric field so that they may cancel each other out. At the second component end 24, the device 1 may include only the second component 17. Likewise, there may be no need for the first component 15 because the second component 17 and the second component end 24 may be at the same voltage. This is in Figures 3a to 9b Shown in.
[0667] Alternatively or additionally, the variation attribute 130, 150, 190 may be a distance parameter 190 which may indicate a radial distance between the respective member 15, 17 and the axis Z measured radially relative to the axis Z. Continuing with the above example, at the first component end 22, the device 1 may include a first member 15 that is closer to the electrical component 2 than the second member 17. The second member 17 may also not be present at the first component end 22, or it may be far enough away that it includes a negligible effect. Moving along the axis Z and toward the second component end 22, the voltage of the device 1 may drop, and thus a first electric field may appear. The more the voltage of the device 1 drops along the axis Z, the stronger the first electric field may become. In order to eliminate or reduce this field, the device 1 may be configured such that the distance between the first member 15 and the electrical component 2 may be increased. This may reduce the first field. Alternatively or additionally, the device 1 may be configured such that the distance between the second member 17 and the electrical component 2 may be reduced. This may increase the second field. Ideally, the second electric field may match the first electric field so that they may cancel each other out. This is Fig.10 Shown in.
[0668] Those skilled in the art will appreciate that the above examples are provided only for the purpose of facilitating understanding of the description of the present invention. In general, by changing the number of at least one of the components 15, 17 along the axis Z and / or by changing the distance of at least one of the components 15, 17 along the axis Z, the effect of the capacitance between the electrical component 2 and the device 1 can be reduced and preferably (or ideally) offset.
[0669] In other words, at least one of the members 15, 17 may be configured such that it may include at least one varying property 130, 150, 190 that varies along the axis Z, such that the effect of the capacitance between the electrical component 2 and the device 1 may be reduced. Ideally, the effect may be completely offset. Via at least one varying property 130, 150, 190, the device 1 may be configured such that the parasitic capacitor formed by the electrical component 2 and the device 1 may have very little and ideally no charging or discharging. In this way, the device 1 may have no effect on the speed of changing the potential of the electrical component 2. Thus, even though there may be capacitance between the electrical component 2 and the device 1, its effect may be reduced and ideally offset.
[0670] The effect of the capacitance between the electrical component 2 and the device 1 may be a delay in changing the potential of the electrical component. The delay may be caused by charging and / or discharging of the capacitor. The delay may comprise a resistance-capacitance delay. Alternatively or additionally, the effect of the capacitance between the electrical component 2 and the device 1 may be a reduction in the maximum operating frequency of a circuit comprising the electrical component 2. Alternatively or additionally, in particular when the electrical component is used in an amplifier circuit, the effect of the capacitance between the electrical component 2 and the device 1 may be the generation of a feedback current path between the input and the output of the amplifier circuit. The feedback current path may cause instabilities and / or parasitic oscillations in the amplifier.
[0671] The present invention will now be described with reference to the accompanying drawings.
[0672] Figure 2 A cross section of a device 1 according to an embodiment of the invention is depicted.The device 1 may surround an electrical component 2 such that a region 3 may be formed therebetween. Figure 2 The potential distribution in region 3 is also shown, where darker regions indicate higher potentials than lighter regions. The potentials can be obtained, for example, using a finite element method (FEM) analysis. In addition, the potential can also be referred to as a second potential V2 - see Fig.11 It can be easily noticed that around the first component end 22 (which may also be referred to as the top component end 22) of the electrical component 2, the potential is higher than around the second component end 24 (which may also be referred to as the bottom component end 24), as indicated by the darker color. In this document, the terms "top" and "bottom" refer to different positions along the axis Z - which may also be referred to as the variation axis Z for reasons that will become clear further below.
[0673] In this particular embodiment, the number of each member 15 , 17 varies along the axis Z. Moving from top to bottom along the axis Z, it can be seen that the device 1 is initially constituted only by the first members 15 and then their number decreases, while the number of second members 17 increases. In this way, the potential in the area 3 gradually decreases along the axis Z - as indicated by the gradual increase in brightness in the area 3.
[0674] As shown in the FEM analysis, the device 1 can significantly cancel the radial electric field in the region 3 between the device 1 and the electrical component 2. The radial electric field in this document refers to an electric field directed perpendicularly to the axis Z, that is, an electric field directed radially relative to the axis Z. In addition, the device 1 can also homogenize the axial electric field in the region 3 between the device 1 and the electrical component 2. The axial electric field in this document refers to an electric field directed parallel to the axis Z.
[0675] Now refer to Figures 3a to 3c , depicts an embodiment of a device 1 comprising members 15, 17, which may be configured as toothed members 15, 17. Specifically, Figure 3a depicts a perspective view of the device 1, Figure 3b A cross-sectional view is shown, and Figure 3c The device 1 is shown in an unfolded state.
[0676] Each of the members 15, 17 may include a corresponding tooth 155, 175. In the depicted example, each member includes 5 teeth; however, this is merely illustrative. Each tooth may include a corresponding tooth width 150. The tooth width 150 of each tooth 155, 175 may vary along the axis Z. In the depicted example, the tooth width 150 of each tooth 155, 175 varies linearly along the axis Z; however, this is merely illustrative. Therefore, the number of each member 15, 17 may vary along the axis. In other words, the tooth width 150 may be an example of a quantity parameter 130, 150 of a varying attribute 130, 150, 190. Specifically, in the depicted example, the number of first members 15 decreases in a direction from top to bottom along the axis Z, and the number of second members 17 increases in a direction from top to bottom along the axis Z.
[0677] As depicted, the members 15, 17 may include interlocking teeth 155, 175. That is, each tooth 155, 175 may be positioned in the space between two adjacent teeth 155, 175 of the other member 15, 17. It should be understood that there may be some spacing in the boundary between the two members 15, 17 (see FIG. Figure 12b ), which allows for electrical insulation between the two.
[0678] Device 1 can be obtained from Figure 3c The expanded state shown in Figure 3a . In the latter state, the device 1 may include a through hole 19 and may be configured so that the through hole 19 can accommodate the electrical component 2. In this way, the device 1 can surround the electrical component 2. Region 3 can be generated between them. It should be understood that region 3 can also refer to the boundary between the device 1 and the electrical component 2-that is, the device 1 can be wrapped around the electrical component 2 adjacent to the outer surface of the electrical component 2. In this case, electrical insulation may be required between the electrical component 2 and the device 1.
[0679] The embodiment shown in FIG. 3 completely surrounds the entire electrical component 2 around the axis Z. However, this may not always be necessary.
[0680] Figure 4 Another embodiment of the device 1 is depicted. As depicted, the device 1 may partially surround the entire electrical component 2 around the axis Z. In addition, Figure 4 The device 1 shown in may comprise any of the features discussed above in relation to the device 1. In general, such a solution may be inferior to the solution shown in FIG. 3 in terms of reducing the effects caused by the capacitance between the electrical component 2 and the device 1 .
[0681] Figure 5 A cross-sectional view of another embodiment of the device 1 is depicted. As depicted, the device 1 may partially or completely surround a component portion 25 of the electrical component 2 around an axis Z. In addition, Figure 5 The device 1 shown in may comprise any of the features discussed above in relation to the device 1. In general, such a solution may be inferior to the solution shown in FIG. 3 in terms of reducing the effects caused by the capacitance between the electrical component 2 and the device 1 .
[0682] Figure 6a and Figure 6b Another embodiment of the device 1 is depicted. As depicted, each of the members 15, 17 includes 10 teeth 155, 17, respectively. In addition, Figure 6a and Figure 6b The device 1 shown in may include any of the features discussed above with respect to the device 1. In general, such a solution may be superior to the solution shown in FIG3 in reducing the effects caused by the capacitance between the electrical component 2 and the device 1. In general, the more teeth 155, 175 a device may include, the better it may reduce the effects caused by the capacitance between the electrical component 2 and the device 1.
[0683] The embodiment shown in Figures 3 to 6b comprises triangular teeth. However, this may not always be necessary. Typically, triangular teeth may be advantageous if the electrical component 2 comprises a voltage that varies linearly along the axis Z (typically the case if the electrical component 2 is a resistor 2).
[0684] Figure 7 Another embodiment of the device 1 is depicted. As depicted, each of the members 15, 17 includes a tooth 155, 175 having a curved edge. That is, the tooth 150 of each tooth 155, 175 varies non-linearly along the axis Z. In addition, Figure 7 The device 1 shown in may include any of the features discussed above in relation to the device 1. In general, if the voltage of the electrical component 2 along the axis does not vary linearly, this solution may be superior to the solution shown in FIG. 3 in reducing the effects caused by the capacitance between the electrical component 2 and the device 1.
[0685] Figure 8a and 8b Another embodiment of the device 1 is depicted. As depicted, each of the members 15, 17 includes only one tooth 155, 175, respectively. Furthermore, the teeth 155, 175 do not include a bilateral triangular shape, but rather a right-angled triangular shape; however, this is also merely illustrative. Additionally, Figure 8a and 8bThe device 1 shown in may comprise any of the features discussed above in relation to the device 1. Generally, this solution may be inferior to the solution shown in Figure 3 in reducing the effects caused by the capacitance between the electrical component 2 and the device 1. However, it may be easier to manufacture.
[0686] Now refer to Figure 9a and 9b , depicts another embodiment of the device 1 including members 15, 17, which may be configured as ring-shaped members 15, 17. Specifically, Figure 9a depicts a perspective view of the device 1 and Figure 9b The device 1 is shown in an unfolded state.
[0687] Each of the members 15, 17 may include a corresponding ring 153, 173. In the depicted example, each member includes 6 rings; however, this is merely illustrative. Each of the rings 153, 173 may include a corresponding ring height 130. The ring height 130 of each ring 153, 173 may vary along the axis Z. In the depicted example, the ring height 130 of each ring 153, 173 varies strictly monotonically along the axis Z; however, this is merely illustrative. Therefore, the number of each member 15, 17 may vary along the axis. In other words, the ring height 130 may be an example of a quantity parameter 130, 150 of a varying attribute 130, 150, 190. Specifically, in the depicted example, the number of first members 15 decreases in a direction from top to bottom along the axis Z, and the number of second members 17 increases in a direction from top to bottom along the axis Z.
[0688] As depicted, each ring 153, 173 may be positioned in the space between two adjacent rings 153, 173 of another member 15, 17. It should be understood that there may be some spacing in the boundary between the two members 15, 17, which may allow for electrical insulation between the two.
[0689] in addition, Figure 9a and 9b The apparatus 1 shown in may include any of the features discussed above with respect to the apparatus 1 .
[0690] Now refer to Fig.10 , depicts another embodiment of a device 1 comprising toothed members 15, 17. In order not to overcomplicate the figure and / or reduce its comprehensibility, only the front teeth 155, 175 (as seen in the depicted perspective view) are hatched. It should be understood that each of the members 15, 17 may also include teeth 155, 175 on the rear side relative to the depicted perspective view.
[0691] Each of the members 15, 17 may include a respective tooth 155, 175. Each of the teeth 155, 175 may include a respective tooth width 150, which may be constant along the axis Z; however, this is merely illustrative. Additionally, each of the teeth 155, 175 may include a respective tooth distance 190, which may indicate a Euclidean distance between the respective tooth 155, 175 and the axis Z. The tooth distance 190 of each tooth 155, 175 may vary along the axis Z. In the depicted example, the tooth distance 190 of each tooth 155, 175 varies linearly along the axis Z; however, this is merely illustrative. Thus, the distance of each member 15, 17 may vary along the axis Z. In other words, the tooth distance 190 may be an example of a distance parameter 190 of a varying attribute 130, 150, 190. Specifically, in the depicted example, the distance of the first members 15 increases in the direction along the axis Z from top to bottom, and the distance of the second members 17 decreases in the direction along the axis Z from top to bottom.
[0692] As depicted, members 15, 17 may include interlocking teeth 155, 175. That is, each tooth 155, 175 may be positioned in the space between two adjacent teeth 155, 175 of another member 15, 17. It should be understood that there may be some spacing in the boundary between the two members 15, 17, which may allow for electrical isolation between the two.
[0693] in addition, Fig.10 The device 1 shown in may include any of the features discussed above with respect to the device 1 .
[0694] Fig.11 is a diagram showing the potential at and near the electrical component 2 and at the device 1. Specifically, Fig.11 is a graph comprising a vertical axis indicating the position along the axis Z and a horizontal axis indicating the potential. In other words, Fig.11 Included is a plot of potential versus position along axis Z.
[0695] The diagram depicts the electric potential at the electric component 2 in dashed lines, said electric potential being referred to as the first electric potential V1 . As can be noticed, the first electric potential V1 decreases linearly along the axis. The electric component 2 may be a resistor 2 , for example.
[0696] Likewise, it is an object of the present invention to make the potential around the electrical component match (ideally identical to) the first potential V1.
[0697] The figure depicts with a solid line the potential around the electrical component 2 when the device 1 of the present invention is used. In particular, the figure depicts with a solid line the average potential within the area 3 along the axis Z. This may be referred to as the second potential V2. As may be noted, the second potential V2 matches (i.e. is substantially the same as) the first potential V1.
[0698] The figure also depicts the effective potential V3 of the device 1 in dashed lines. It will be appreciated that within the components 15, 17 of the device 1, the potential along the axis Z may be substantially constant. However, due to the cancelling or averaging effect that the components 15, 17 may have on each other, the device 1 may include, for example Fig.11 In other words, by configuring the members 15, 17 as discussed above, the device 1 can influence the electrical component 2 in a similar manner as if its potential along the axis Z were the same as the effective potential V3.
[0699] As can be noted, at the top position along the axis Z - which may correspond to the position where the first component end 22 may be located - the effective potential V3 of the device 1 is at a maximum value. It can be noted that the maximum values of V1 and V3 are the same, which may be an indication that in this example, the first component end 22 and one of the members 15, 17 (e.g., the first member 15) are electrically connected to the same voltage source. Moreover, moving along the axis Z from said top position, the effective potential V3 of the device 1 does not change. This is due to the fact that in this region, the device 1 may consist of only the first member 15 - see e.g. Figures 3a to 9b .
[0700] On the other hand, at the bottom position along the axis Z, which may correspond to the position where the second component end 24 may be located, the effective potential V3 of the device 1 is at a minimum. In the vicinity of said bottom position, the effective potential V3 of the device 1 does not change. This is due to the fact that in this region, the device 1 may consist only of the second component 17 - see e.g. Figures 3a to 9b .
[0701] Between these two regions, the effective potential V3 changes gradually from a maximum value to a minimum value - matching the first potential V1. Ideally, the members 15, 17 would be configured so that the effective potential V3 is the same as the first potential V1 - as this would completely reduce the capacitance between the device 1 and the electrical component 2. However, using Fig.11 Satisfactory results can also be achieved with the effective potential V3 shown in FIG.
[0702] Fig.12a and 12b The material composition of the device 1 is shown.
[0703] like Fig.12a, device 1 may include a conductive layer 104, which may be located between a base layer 102 and a cover layer 106. The cover layer 106 and the base layer 102 may be non-conductive. For example, the base layer 102 and the cover layer 106 may be made of a non-conductive material such as a polyimide material. In some embodiments, the cover layer 106 and the base layer 102 may be the same. In some embodiments, the conductive layer 104 may be embedded on the base layer 102.
[0704] like Figure 12b , the conductive layer 104 may include two conductive layer portions 1045, 1047 that may be electrically insulated from each other. Each of the components 15, 17 may include a respective one of the two conductive layer portions 1045, 1047. In addition, the two conductive layer portions 1045, 1047 may be spaced apart from each other, as indicated by a spacing 1049. This may facilitate electrically isolating the two conductive layer portions 1045, 1047 and thereby electrically isolating the two components 15, 17. The spacing 1049 may include a width of at least 0.5 mm, such as 1 mm.
[0705] Fig.13 An embodiment of a microscopic system 3000 that may include the apparatus 1 of the present invention is depicted. Specifically, Fig.13 A charged particle microscopy system 3000 is depicted that is configured to observe and / or characterize a sample 3018 using a charged particle beam B. The charged particle beam B may include electrons or ions. Fig.13 In the particular case depicted, it includes electrons. In addition, Fig.13 The microscope system 3000 depicted in FIG. 3000 may include a transmission-type microscope system 3000, in which an image of the sample 3018 is taken using emission in a transmission region of the microscope system 3000. Thus, the microscope system 3000 may represent a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM).
[0706] like Fig.13 As depicted in , within the vacuum enclosure 3002, a modified particle emitter 3004, in this case an electron source 3004, can generate a beam B of electrons that can propagate along an electron optical axis B' (shown by a dashed line). The beam B can pass through an electron optical illuminator 3006, which can be configured to direct and / or focus the electron beam B onto a selected portion of a sample 3018. A deflector 3008 is also depicted, which can be used to (among other things) enable a scanning motion of the beam B.
[0707] The sample 3018 may be held on a sample holder 3016, which may be positioned with multiple degrees of freedom by a positioning device 3014. The latter may move a cradle 3014' to which the holder 3016 may preferably be attached in a removable manner. Thus, different parts of the sample 3018 may be illuminated, imaged and / or inspected by an electron beam B travelling along an axis B' (in the W direction). As an alternative to beam scanning, the movement(s) may also allow a scanning motion to be performed.
[0708] The electron beam B will interact with the sample 3018 in such a way that various types of "stimulated" radiation are emitted from the sample 3018. The "stimulated" radiation may include, for example, secondary electrons, backscattered electrons, X-rays, and optical radiation (cathodoluminescence). If desired, one or more of these radiation types may be detected with the aid of an analysis device 3022, which may be, for example, a combined scintillator / photomultiplier tube or an EDX (energy dispersive X-ray spectroscopy) module. Alternatively or additionally, however, electrons that pass through the sample 3018, leave or are emitted therefrom, and propagate along the axis B' may be studied.
[0709] This transmitted electron flux may enter the imaging system 3024, which may also be referred to as an energy filter 3024. Specifically, when the microscope system 3000 is used for electron energy loss spectrometry, the imaging system 3024 may include an offset drift tube 3026. The offset drift tube 3026 may include a region where a magnetic field (not shown) may be applied to the electron beam B. Fig.13 In the configuration depicted in FIG. 1 , a magnetic field may be applied in a direction substantially parallel to the Y direction so that the paths of the electrons in beam B are Fig.13 . Under the influence of magnetic forces resulting from the interaction with magnetic field B, the electrons may describe a substantially circular path, wherein the radius of the circular path may be based on the velocity of the electrons. Electrons with higher velocities travel on paths with larger radii. Thus, depending on the velocity (and therefore energy) of the electrons, the electron beam travels along the X direction ( Fig.13 The dispersion dimension in the configuration of ) splits.
[0710] In order to generate a magnetic field, a potential may be applied to the offset drift tube 3026, which may be referred to as a drift tube bias voltage. In other words, the magnetic field generated by the offset drift tube 3026 depends on the drift tube bias voltage, and the way in which the electron beam B splits in the X direction also depends on the drift tube bias voltage. In this way, based on the drift tube bias voltage, a specific spectrum of the electron beam B may be incident on the electronic sensor 3030, as discussed below. In order to obtain different parts of the spectrum, the bias voltage of the offset drift tube 3026 needs to be switched between set point voltages at a high frequency. Using a linear amplifier as a driver for the offset drift tube 3026 may be advantageous, but it may require a high voltage / high ohm resistor divider. The stray capacitance of the measuring resistor has been shown to be a limiting factor. The device 1 of the present invention can eliminate this limitation.
[0711] The electrons emitted from the offset drift tube 3026 may then enter an imaging subsystem 3028, which may also include various electrostatic or magnetic lenses, deflectors, correctors (such as astigmatism correction devices), etc. The imaging subsystem 3028 may be configured, for example, to cause a Y direction ( Fig.13 The expansion of the electron beam B on the non-dispersed dimension in the configuration of the electron beam B (in the non-dispersed dimension in the configuration of the electron beam B). The 2-dimensional electron spectrum 3100 representing the electron energy spectrum can then be acquired by the electron sensor 3030. The electron sensor 3030 may include a direct or indirect detection sensor. The electron sensor 3030 may include an important 2-dimensional receiving segment, which includes a plurality of pixels, and the 2-dimensional electron spectrum acquired as the 2-dimensional electron spectrum 3100 may be incident on the plurality of pixels. The sensor 3030 may be configured to detect a pixel position on which a plurality of electrons exceeding a threshold number are incident. This may correspond to the detection of electrons at the pixel position.
[0712] Fig.14 The corresponding step responses of the circuit when the input voltage of the circuit is changed for different situations are shown. Specifically, Fig.14 The time behavior of a voltage of a circuit comprising an electrical component 2 is shown when its input voltage changes.
[0713] exist Fig.14 In each of the graphs, the horizontal axis indicates time. For example, the horizontal axis in each graph may indicate the time from 0 to 100 microseconds after changing the input voltage, where each tick may indicate a time increment of 20 microseconds. The vertical axis may indicate a normalized offset voltage, for example, the difference between the instantaneous voltage and the applied voltage. Thus, Fig.14 Each graph of may indicate how quickly and how well the voltage of a circuit may change.
[0714] Fig.14 The top diagram of shows the ideal situation. As indicated therein, in the ideal situation, the voltage of the circuit can change instantaneously.
[0715] Fig.14 The middle and bottom graphs show the drift tube when it is offset (see Fig.13 ) is changed and when an amplifier circuit including a voltage divider circuit is used. Each of the continuous line, the dashed line and the dotted line depicts the step response of a different step size, that is, a different change of the input voltage from one level to another. In the case corresponding to the middle plot, the device 1 of the present invention is not used. In the case corresponding to the bottom plot, the device 1 of the present invention is used around the resistor of the voltage divider circuit (see FIG. 15 ).
[0716] As shown in the middle plot, the behavior of the circuit is unstable, especially for the first 50 μs. During this time, high voltage peaks can be observed - which can damage the circuit. Only after about 100 μs does the voltage of the circuit settle. The complex frequency response observed in the middle plot is mainly due to the parasitic capacitance generated by the high-ohmic resistor divider used with the amplifier circuit for setting the bias voltage of the offset drift tube.
[0717] As shown in the bottom plot, the use of device 1 allows the voltage of the circuit to stabilize in about 20 μs. Furthermore, the response is very similar to the square response (as indicated in the top plot) - without any voltage spikes.
[0718] therefore, Fig.14 It is shown how the use of the device 1 can reduce the effects caused by parasitic capacitances in a circuit.
[0719] Fig.15a and 15b A circuit is shown in which the device 1 is used. Specifically, Fig.15a Depicts a perspective view of the entire circuit and Fig.15b A close-up view of the device 1 enclosing an electrical component 2 of the circuit is depicted. In the depicted example, the circuit may be a driver for an external electrical device, such as for an offset drift tube. That is, the depicted circuit may be configured to set and change a bias voltage of an external electrical device, such as an offset drift tube. Furthermore, the electrical component 2 enclosed by the device 1 may be a resistor 2, such as a high-ohmic resistor 2.
[0720] Whenever relative terms such as "about", "substantially" or "approximately" are used in this specification, such terms should also be interpreted as also including precise terms. That is, for example, "substantially straight" should be interpreted as also including "(precisely) straight".
[0721] Whenever a step is recorded above or also in the appended claims, it should be noted that the order in which the steps are recorded herein may be accidental. That is, unless otherwise specified or unless it is clear to the skilled person, the order in which the steps are recorded may be accidental. That is, when this document states, for example, that a method includes steps (A) and (B), this does not necessarily mean that step (A) is before step (B), but it is also possible that step (A) is (at least partially) performed simultaneously with step (B) or that step (B) is before step (A). In addition, when it is said that step (X) is before another step (Z), this does not mean that there are no steps between steps (X) and (Z). That is, step (X) before step (Z) covers the case where step (X) is performed directly before step (Z), but also covers the case where step (X) is performed before one or more steps (Y1)..., following step (Z). When terms such as "after" or "before" are used, corresponding considerations apply.
[0722] Although a preferred embodiment has been described above with reference to the accompanying drawings, skilled persons will appreciate that this embodiment is provided for illustrative purposes only and should in no way be construed as limiting the scope of the present invention, which is defined by the claims.
Claims
1. A device (1) for use with an electrical component (2), wherein the device (1) is configured to at least partially surround at least a component portion (25) of the electrical component (2) around an axis (Z) so as to define a region (3) therebetween, and The device (1) comprises two components (15, 17), At least one of the members (15, 17) comprises at least one varying property (130, 150, 190) that varies along the axis (Z) such that effects caused by capacitance between the electrical component (2) and the environment in which the electrical component (2) is located are reduced.
2. The device according to the preceding claim, wherein the electrical component (2) is a resistor (2).
3. The device according to any of the preceding claims, wherein the effect comprises a charging time and / or a discharging time of a capacitor generated by the electrical component (2) and the device (1).
4. A device according to any one of the preceding claims, wherein the effect comprises The potential of the electrical component (2) and / or A time delay in which the potential of an external electrical device electrically connected to the electrical component (2) changes from a first set voltage to a second set voltage.
5. Device according to any of the preceding claims, wherein the two members (15, 17) each comprise at least one varying property (130, 150, 190) varying along the axis (Z), and The components (15, 17) are configured such that the at least one varying property (130, 150, 190) of one of the components (15, 17) and the at least one varying property (130, 150, 190) of the other of the components (15, 17) increase monotonically in opposite directions along the axis (Z).
6. The apparatus according to any of the preceding claims, wherein one of the at least one changing attribute (130, 150) is a quantity parameter (130, 150), and The quantity parameter (130, 150) indicates the quantity of corresponding components (15, 17) included in the device (1) at multiple positions along the axis (Z).
7. The apparatus according to any of the preceding claims, wherein one of the at least one changing attribute (190) is a distance parameter (190), and The distance parameter (190) indicates a radial distance between the respective component (15, 17) and the axis (Z), measured radially relative to the axis (Z).
8. A device according to any one of the preceding claims, wherein The device (1) comprises a first device end (12) and a second device end (14) which are opposite to each other and are located at different positions along the axis (Z); A first of the members (15, 17) extends along the axis (Z) from the first device end (12), through the center of the device (1) and towards the second device end (14), and The second of the members (15, 17) extends along the axis (Z) from the second device end (14), through the centre of the device (1) and towards the first device end (12).
9. Device according to any of the preceding claims, wherein the members (15, 17) are configured so that any radial line perpendicular to the axis (Z) passes through at most one of the members (15, 17).
10. The device according to any one of the preceding claims, wherein at least one of the members (15, 17) comprises at least one tooth (155, 175) extending parallel to the axis (Z) or Two of the members (15, 17) respectively comprise a plurality of teeth (155, 175) extending parallel to the axis (Z).
11. A device according to the preceding claim, wherein each tooth (155, 175) extends along the axis from a first half of the device (1) to a second half of the device (1), wherein the first half and the second half of the device (1) are separated by a plane perpendicular to the axis (Z).
12. The device according to any of the two preceding claims, wherein each tooth (155, 175) comprises a respective tooth width (150) spanned azimuthally relative to said axis (Z), wherein each tooth (155, 175) is configured such that its respective tooth width (150) tapers along said axis (Z), and One of the at least one varying property (150) is dependent upon the tooth width (150) of at least one tooth (155, 175).
13. The device according to any one of the three preceding claims, wherein each tooth (155, 175) comprises a respective tooth distance (190) from said axis (Z) measured radially relative to said axis (Z), wherein each tooth (155, 175) is configured such that its respective tooth distance (190) varies monotonically along said axis (Z), and One of the at least one varying property (190) is dependent upon the tooth distance (190) of at least one tooth (155, 175).
14. The device according to any one of the preceding claims 1 to 9, wherein At least one of the members (15, 17) comprises a plurality of rings (153, 173), Each ring (153, 173) comprises a respective ring height (130) measured along said axis (Z), The ring height (130) of the rings (153, 173) comprised by the same member (15, 17) varies monotonically along the axis (Z), and One of the at least one varying property (130) is dependent upon the ring height (130) of at least one ring (153, 173).
15. A system comprising The device (1) according to any one of the preceding claims, and Electrical components (2), wherein the device (1) is configured to at least partially surround at least a component portion (25) of the electrical component (2) around an axis (Z) so as to define a region (3) therebetween, and The device (1) comprises two components (15, 17), At least one of the members (15, 17) comprises at least one varying property (130, 150, 190) that varies along the axis (Z) such that effects caused by capacitance between the electrical component (2) and the environment in which the electrical component (2) is located are reduced.
16. The system of the preceding claim, wherein the system further comprises an offset drift tube for use in a charged particle microscope, and wherein The electrical component (2) is electrically connected to the offset drift tube, The offset drift tube includes a region through which a charged particle beam can pass, and The offset drift tube is configured to generate a magnetic field in the region.
17. A method of operating an electrical component (2), comprising: A device (1) according to any one of the preceding claims 1 to 14 is provided, the device (1) at least partially surrounding at least a component part (25) of the electrical component (2) around an axis (Z) so as to define a region (3) therebetween, The device (1) comprises two components (15, 17), and At least one of the members (15, 17) comprises at least one varying property (130, 150, 190) that varies along the axis (Z) such that effects caused by capacitance between the electrical component (2) and the environment in which the electrical component (2) is located are reduced.
18. The method according to the preceding claim, wherein the electrical component (2) comprises two component ends (22, 24) which are opposite to each other and are located at different positions along the axis (Z), and The method includes maintaining each member (15, 17) and a respective one of the component ends (22, 24) at equal electrical potentials.
19. A method comprising: Providing a device model of the device (1) according to any one of the preceding claims 1 to 14; simulating a second potential (V2) in the region (3) using a data processing system; and The model of the device (1) is modified depending on the second potential (V2).
20. The method according to the preceding claim, wherein modifying the device model of the device (1) comprises determining at least one variation property (130, 150, 190) that varies along the axis (Z) for at least one of the components (15, 17).
Citation Information
Patent Citations
Voltage grading and shielding method for a high voltage component in a PCB and an X-ray apparatus
US7498696B2
Resistor shield to minimize crosstalk and power supply interference
US8373998B2