Suction cup, bearing device and suction method

Abstract

The invention discloses a suction cup, a bearing device and an adsorption method, the suction cup comprises a body, the body is provided with an adsorption surface, an air passage and an exhaust hole, the adsorption surface is provided with at least two air exhaust holes with different cross sectional areas, and the air exhaust hole with the larger cross sectional area is closer to the center of the adsorption surface than the air exhaust hole with the smaller cross sectional area. The air exhaust hole is communicated with the exhaust hole through the air passage and is used for gradually adsorbing the to-be-adsorbed part on the body from the center of the adsorption surface to the edge of the adsorption surface. After the center of the to-be-adsorbed piece is adsorbed, no gas flows in the area, and negative pressure diffuses towards the outer area, so that the outer area of the to-be-adsorbed piece is sequentially adsorbed. The process is repeated continuously, the to-be-adsorbed part is adsorbed from the center to the edge, then stable adsorption of the to-be-adsorbed part is achieved, and the adsorption effect of the suction cup is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of adsorption tools, and in particular to a suction cup. The present invention also relates to a carrying device comprising the suction cup. The present invention further relates to an adsorption method. Background Art

[0002] For some structures that need to be kept flat, the parts to be adsorbed are usually corrected by a carrying device.

[0003] For example, a wafer inevitably has a certain amount of warping. For wafers with large warping, they are adsorbed by a suction cup set on a carrier. A traditional suction cup has a sealing ring set on the edge of the adsorption surface of the main body, and adsorption is performed by vacuuming the inside.

[0004] When a traditional suction cup is sucking an object to be sucked, the object to be sucked is prone to movement, resulting in the suction cup being unable to accurately suck the object to be sucked. In addition, the traditional suction cup also has the problem of uneven suction, which will cause the wafer to still have a large amount of warping after being sucked, and cannot meet the application scenarios of optical inspection.

[0005] Therefore, how to improve the adsorption effect of the suction cup is a technical problem that needs to be solved urgently by those skilled in the art. Summary of the invention

[0006] The object of the present invention is to provide a suction cup having an improved adsorption effect. Another object of the present invention is to provide a carrying device comprising the suction cup. Still another object of the present invention is to provide an adsorption method.

[0007] To achieve the above-mentioned purpose, the present invention provides a suction cup, including a main body, wherein the main body has an adsorption surface, an air duct and an exhaust hole, and the adsorption surface is provided with at least two exhaust holes with different cross-sectional areas, and the exhaust holes with larger cross-sectional areas are closer to the center of the adsorption surface than the exhaust holes with smaller cross-sectional areas, and the exhaust holes are connected with the exhaust holes through the air duct, and the exhaust holes are used to gradually adsorb the part to be adsorbed onto the main body from the center of the adsorption surface to the edge of the adsorption surface.

[0008] Optionally, in the above-mentioned suction cup, the main body has a plurality of sealing rings arranged on the adsorption surface and used for sealingly fitting with the object to be adsorbed, the sealing rings are sequentially sleeved and spaced apart, and an adsorption area is formed between two adjacent sealing rings and the adsorption surface, and at least one exhaust hole is provided on the adsorption surface corresponding to each adsorption area.

[0009] Optionally, in the above suction cup, each of the adsorption regions has a radial width in the direction from the center to the edge of the adsorption surface, and the radial width of the adsorption region is related to the surface warpage distribution of the object to be adsorbed.

[0010] Optionally, in the above suction cup, the radial width of the suction area decreases as the slope of the surface warpage curve of the object to be suctioned increases.

[0011] Optionally, in the above suction cup, in the direction from the center to the edge of the object to be adsorbed, there are multiple extension segments with specific warpage differences, and the projection width of the extension segments on the adsorption surface is configured as the radial width of the adsorption area.

[0012] Optionally, in the above suction cup, each of the adsorption regions has a radial width in a direction from the center to the edge of the adsorption surface, and the radial widths of the adsorption regions are all equal.

[0013] Optionally, in the above suction cup, the adsorption area has a radial width in the direction from the center to the edge of the adsorption surface, and the radial width of the adsorption area decreases as the distance between the adsorption area and the center of the adsorption surface increases.

[0014] Optionally, in the above suction cup, a plurality of the air extraction holes are provided in each of the adsorption regions and are distributed on different air passages, and the air extraction holes in each of the adsorption regions are located on a concentric circle and are distributed at equal intervals.

[0015] Optionally, in the above suction cup, the air extraction holes connected to the same air channel are arranged in sequence in the direction from the center to the edge of the adsorption surface.

[0016] Optionally, in the above-mentioned suction cup, the number of the air channels is at least two, one ends of all the air channels are interconnected at the center of the body, a central air hole is provided at the center of the adsorption surface and is connected to the center of the body, all the air channels are distributed radially, and each of the air channels is provided with an air extraction hole connected to each of the adsorption areas.

[0017] Optionally, in the above suction cup, the exhaust hole is connected to the center of the body and cooperates with the central air hole to penetrate the body.

[0018] Optionally, in the above suction cup, the air passage extends from an outer end of the exhaust hole to a side of the main body, and the outer end of the air passage is sealed by a plug.

[0019] Optionally, in the above suction cup, the suction cup is an integrally formed structure, and the suction cup is a metal structure, a plastic structure or a ceramic structure.

[0020] A carrying device, comprising an inflation and deflation device and a suction cup connected to the inflation and deflation device, wherein the suction cup is any one of the above-mentioned suction cups;

[0021] The gas filling and deflation device is used to be connected to the exhaust hole pipeline on the suction cup, and is used to absorb gas from the airway or to fill gas into the airway.

[0022] A method for adsorbing an object to be adsorbed by adsorbing the object with the suction cup as described in any one of the above or the carrying device as described in the above, comprising the steps of:

[0023] Detecting that the object to be adsorbed is placed on the adsorption surface of the suction cup;

[0024] Sucking air from the airway and the air extraction hole through the exhaust hole, and at the same time sucking the gas between the object to be adsorbed and the adsorption surface;

[0025] During the process of absorbing gas, the object to be adsorbed is gradually fitted and sealed with the adsorption surface from the center to the edge of the adsorption surface.

[0026] Optionally, the above adsorption method further includes the step of: monitoring the pipeline air pressure during the suction process of the suction cup, and stopping the suction when the pipeline air pressure drops to the preset adsorption pressure.

[0027] In the above technical scheme, the suction cup provided by the present invention includes a main body, the main body has an adsorption surface, an air duct and an exhaust hole, and at least two exhaust holes with different cross-sectional areas are provided on the adsorption surface. The exhaust holes with larger cross-sectional areas are closer to the center of the adsorption surface than the exhaust holes with smaller cross-sectional areas. The exhaust holes are connected with the exhaust holes through the air duct, and the exhaust holes are used to gradually adsorb the part to be adsorbed on the main body from the center of the adsorption surface to the edge of the adsorption surface.

[0028] From the above description, it can be known that in the suction cup provided by the present application, when the center of the adsorbed object is adsorbed, there is no more gas flow in the area, and the negative pressure spreads to the outer area, so that the outer area of ​​the adsorbed object is adsorbed in turn. This process is repeated continuously, so that the adsorbed object is adsorbed from the center to the edge, and then the adsorbed object is stably adsorbed, and the adsorption effect of the suction cup provided by the present application is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0030] Figure 1 An axonometric view of a suction cup provided by an embodiment of the present invention;

[0031] Figure 2 A top view of a suction cup provided by an embodiment of the present invention;

[0032] Figure 3 A bottom view of a suction cup provided by an embodiment of the present invention;

[0033] Figure 4 A partial enlarged view of a suction cup provided in an embodiment of the present invention;

[0034] Figure 5 The arrangement diagram of the air extraction holes on the main body provided by the embodiment of the present invention;

[0035] Figure 6 A working state diagram of the suction cup provided by an embodiment of the present invention;

[0036] Figure 7 A graph showing the surface warping curves of the main body and the object to be adsorbed provided in an embodiment of the present invention.

[0037] in Figure 1-6 Middle: 1-body, 2-sealing ring, 3-support, 4-part to be adsorbed, 5-exhaust hole, 6-air duct, 7-exhaust hole, 7a-exhaust hole, 7b-exhaust hole, 7c-exhaust hole, 7d-exhaust hole, 7e-exhaust hole, 8-plug, 9-fastener installation hole, 10-reserved hole for lifting column, 11, center air hole;

[0038] A1-airway extension direction, A2-airway extension direction, A3-airway extension direction. DETAILED DESCRIPTION

[0039] The core of the present invention is to provide a suction cup with improved adsorption effect. Another core of the present invention is to provide a carrying device including the suction cup. Another core of the present invention is to provide an adsorption method.

[0040] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and implementation modes.

[0041] Please refer to Figures 1 to 7 .

[0042] In a specific embodiment, the suction cup provided by the specific embodiment of the present invention includes a main body 1, and the main body 1 has an adsorption surface, an air channel 6 and an exhaust hole 5. The adsorption surface is provided with at least two exhaust holes with different cross-sectional areas, and the exhaust holes with larger cross-sectional areas are closer to the center of the adsorption surface than the exhaust holes with smaller cross-sectional areas. The exhaust holes 7 are connected with the exhaust holes 5 through the air channel 6, and the exhaust holes 7 are used to gradually adsorb the part to be adsorbed 4 from the center of the adsorption surface to the edge of the adsorption surface on the main body 1. Specifically, the air channel 6 is located in the inner cavity of the main body 1. The adsorption surface can be the upper surface, side surface or lower surface of the main body 1. For the convenience of description, the adsorption surface is defined as the front surface of the main body 1, and the exhaust hole 5 can be set on the back or side surface of the main body 1, wherein the back and the front are two opposite surfaces, and the two ends of the side surface are respectively connected with the front and the back.

[0043] The air extraction hole 7 can be a square hole, a round hole, an elliptical hole structure, etc. There are multiple air extraction holes 7. All the air extraction holes 7 are connected to the exhaust hole 5 through the air channel 6. Specifically, there can be one air channel 6, preferably at least two air channels 6, and the number of air extraction holes 7 on each air channel 6 is the same.

[0044] The body 1 has a plurality of sealing rings 2 arranged on the adsorption surface and used for sealing and fitting with the adsorbed part 4. The sealing rings 2 are sequentially sleeved and arranged at intervals. An adsorption area is formed between two adjacent sealing rings 2 and the adsorption surface. The adsorption surface corresponding to each adsorption area is provided with at least one suction hole 7. Specifically, each adsorption area is arranged in an annular shape, and the area of ​​adjacent adsorption areas can be the same or different.

[0045] The cross-sectional area of ​​the air extraction hole 7 gradually decreases radially from the center of the body 1 to the edge of the body 1, so that the adsorbed part 4 gradually fits on the suction cup from the center to the edge. Specifically, the air extraction holes 7 can be arranged sequentially from the center of the body 1 to the edge of the body 1. For ease of processing, the air extraction holes 7 are preferably circular hole structures, such as Figure 5 As shown, the five air extraction holes 7 are respectively air extraction hole 7e, air extraction hole 7d, air extraction hole 7c, air extraction hole 7b and air extraction hole 7a, and their cross-sectional areas gradually decrease; of course, each air extraction hole may also have a trend of decreasing cross-sectional area, for example, the cross-sectional areas of air extraction hole 7e and air extraction hole 7d are equal, and the cross-sectional areas of air extraction hole 7c, air extraction hole 7b and air extraction hole 7a are equal, and the cross-sectional area of ​​the former is greater than that of the latter.

[0046] Each adsorption region has a radial width in the direction from the center to the edge of the adsorption surface. The radial width of the adsorption region is related to the surface curvature distribution of the adsorption object, that is, the radial width of the adsorption region is set according to the surface curvature of the adsorption object.

[0047] In a specific embodiment, Figure 7 As shown, X represents the relationship between the position of the main body 1 from the center 0mm to the radius 150mm and the wafer warpage Y. Figure 7 It can be seen that the warpage at the center (0) of the wafer is the largest, and the warpage changes faster toward the edge. Preferably, the radial width of the adsorption area from the center of the body 1 to the edge of the body 1 and the part to be adsorbed decrease as the slope of the warpage curve increases.

[0048] In a specific implementation, the size of the adsorption area gradually decreases from the center of the body 1 to the edge of the body 1. Specifically, the size of the adsorption area from the center of the body 1 to the edge of the body 1 can be arranged in an arithmetic progression.

[0049] In a specific embodiment, in the direction from the center to the edge of the adsorbed part 4, there are multiple extension segments with a specific warpage difference, and the projection width of the extension segments on the adsorption surface is configured as the radial width of the adsorption area. In this case, the projection can be a projection of the adsorbed part 4 placed horizontally downward.

[0050] Specifically, five sealing rings 2 are arranged on the adsorption surface, and the diameters of the outer rings of the five sealing rings 2 are respectively set to and In the specific design, Figure 7 As shown, the diameter of the sealing ring 2 is determined by the warpage curve. Usually, the warpage at the center of the wafer is the largest, and the warpage changes faster towards the edge. The radial width of the adsorption area at the center of the adsorption surface is 30mm, the radial width of the adsorption area at the middle position is 25mm, and the radial width of the adsorption area at the edge is 20mm, all of which correspond to a warpage difference of 20um. Multiple independently set sealing rings are set according to the warpage of the wafer surface to slow down the influx of atmospheric air and enhance the adsorption effect of the suction cup on the wafer.

[0051] Alternatively, each adsorption region has a radial width in the direction from the center to the edge of the adsorption surface, and the radial widths of the adsorption regions are equal. In this case, the adsorption surface corresponding to each adsorption region is arranged in a circular ring shape, and the difference between the inner diameter and the outer diameter of the ring is equal.

[0052] In another specific embodiment, the adsorption region has a radial width in the direction from the center to the edge of the adsorption surface, and the radial width of the adsorption region decreases as the distance between the adsorption region and the center of the adsorption surface increases. In this case, the adsorption surface corresponding to each adsorption region is arranged in a circular ring shape, and the difference between the inner diameter and the outer diameter of the ring is not equal, and the difference between the inner diameter and the outer diameter of the ring decreases as the distance between the adsorption region and the center of the adsorption surface increases.

[0053] Specifically, the sealing ring 2 can be attached to the adsorption surface. To improve assembly efficiency, preferably, the sealing ring 2 is an integrally formed structure with the body 1. There are multiple sealing rings 2, and specifically, there can be two, three, four or at least five sealing rings 2, and the specific number and size are determined according to actual needs.

[0054] Specifically, the distance between two adjacent sealing rings 2 may be equal.

[0055] In order to stably adsorb the adsorbed part 4 on the suction cup, preferably, a plurality of air extraction holes 7 are provided in each adsorption area and are distributed on different air passages 6, and the air extraction holes 7 in each adsorption area are located on a concentric circle and are distributed at equal intervals. For example, when two air extraction holes 7 are provided in each adsorption area, the angle formed by the two air extraction holes 7 and the center of the circle is 180 degrees, and when there are three air extraction holes 7, the angle between the three air extraction holes 7 and the center of the circle and the adjacent air extraction holes 7 is 120 degrees.

[0056] Specifically, a central air hole 11 connected to the first end of the air channel 6 is provided on the adsorption surface. During operation, air is sucked into the air channel 6 through the central air hole 11 and then discharged through the exhaust hole 5 .

[0057] Preferably, the number of air channels 6 is at least two, one end of all air channels 6 is connected to each other at the center of the body 1, a central air hole 11 is provided at the center of the adsorption surface and is connected to the center of the body 1, all air channels 6 are radially distributed, and each air channel 6 is provided with an air extraction hole 7 connected to each adsorption area. Figure 2 As shown, during specific processing, the air channel 6 can be set to three, and the three air channels 6 extend along the air channel extension direction A1, the air channel extension direction A2 and the air channel extension direction A3 respectively. Three exhaust holes 7 are set in every two sealing rings 2, that is, each air channel 6 is provided with an exhaust hole 7 in the same adsorption area, and an exhaust hole 7 is set in the center. When the wafer is adsorbed, the wafer warpage is divided into multiple areas by the sealing ring 2, and three air holes are set in each area. The negative pressure values ​​of different areas are adjusted by the cross-sectional area of ​​the air holes. The air holes close to the center are larger, and a larger negative pressure can be achieved, so that the center of the wafer can be adsorbed quickly. After the center is adsorbed, there is no gas flow in the area, and the negative pressure diffuses to the outer area, so that the outer area of ​​the adsorbent 4 is adsorbed. This process is repeated continuously to achieve the effect of adsorbing the wafer from the center to the edge.

[0058] The size of the adsorption area decreases from the center of the body 1 to the edge of the body 1 as the warpage of the structure to be adsorbed increases. Since the widths of different sealing areas, i.e., the spacings between the two sealing rings 2, are different, the overall effect is gradually reduced from the inside to the outside. The purpose of this setting is to ensure that the warpage of the wafer surface corresponding to the width of each area is the same.

[0059] At least two air extraction holes 7 are provided in each adsorption region and are distributed on different air passages 6 . The air extraction holes 7 in each adsorption region are located on a concentric circle and are distributed at equal intervals.

[0060] The exhaust hole 5 is connected to the center of the body 1 , and cooperates with the central air hole 11 to penetrate the body 1 .

[0061] Preferably, the cross-sectional areas of all the air extraction holes 7 gradually decrease in radial width from the center of the body 1 to the edge of the body 1 .

[0062] Alternatively, the cross-sectional areas of two adjacent air extraction holes 7 along the radial direction are the same, that is, the two air extraction holes 7 form a group.

[0063] It can be known from the above description that in the suction cup provided in the specific embodiment of the present application, all the sealing rings 2 are sequentially arranged at intervals, and an adsorption area is formed between two adjacent sealing rings 2 and the adsorption surface, and the area of ​​the air extraction hole 7 gradually decreases from the center of the body 1 to the edge of the body 1, so that when the suction cup is performing adsorption work, the pores close to the center are larger, and a larger negative pressure can be achieved, so that the center of the wafer can be quickly adsorbed. After the center is adsorbed, there is no more gas flow in this area, and the negative pressure diffuses to the outer area, so that the outer area is adsorbed. This process is repeated continuously to achieve adsorption of the wafer from the center to the edge. The sealing ring 2 can divide the warping amount of the wafer into multiple parts, and with the different cross-sectional areas of the pores, the effect of gradual adsorption from the center to the edge is achieved, thereby achieving stable adsorption of the part to be adsorbed 4, and the adsorption effect of the suction cup provided by the present application is improved.

[0064] In a specific embodiment, the suction cup further includes a plurality of support members 3 disposed on the adsorption surface and used to abut against the adsorbed part 4. Specifically, the support members 3 can be disposed on the adsorption surface. Air holes with different cross-sectional areas are disposed in different sealing rings 2. The present application provides a method of arranging the support members 3 to cooperate with the adsorption area, which can reduce the contact area between the suction cup and the adsorbed part 4 and reduce the possibility of contamination of the adsorbed part 4.

[0065] During specific assembly, the support members 3 are configured as a convex structure and are arranged in a circular array around the center of the adsorption surface. Since the support members 3 are arranged between the sealing rings 2, preferably, the support members 3 are arranged in a circular array, and the spacing between two adjacent circles of support members 3 is equal.

[0066] For specific settings, refer to Figure 4 The cross-sectional areas of the air extraction holes 7 vary in size and can be distinguished based on the diameter of the air extraction holes 7. First, the suction cup is set from the inside to the outside as the first to sixth annular adsorption areas; a diameter of The suction hole 7 is used to quickly adsorb and fix the central area of ​​the adsorbed part 4; the second and third adsorption areas are both provided with a diameter of The suction holes 7 provide a relatively large initial suction force, so that the adsorbed part 4 can be adsorbed in the extension direction from the center to the outside; the fourth, fifth, and sixth adsorption areas are all provided with a diameter of The suction hole 7 facilitates the air flow to be concentrated inward, so that the edge of the adsorbed part 4 can be adsorbed. The central air hole 11 is connected to the suction device, and the ends of the three air channels 6 extending from the central reflective type are sealed. When the wafer is placed on the surface of the suction cup, the suction device will simultaneously evacuate the three air channels 6 through the central air hole 11, and will first evacuate the covering area where the central air hole 11 is located, then the inner circle covering area, and finally the outer circle covering area, so that the adsorbed part is adsorbed on the surface of the suction cup from the inside to the outside. Stop suction after the vacuum degree is reached. For example, if the height of the bump on the surface of the suction cup is 0.2mm, the vacuum degree can be improved, and a 4mm inner diameter air pipe or two 2.5mm inner diameter air pipes are connected in parallel to increase the suction volume.

[0067] In order to facilitate processing, it is preferred that the suction cup is an integrally formed structure to avoid the situation where the suction cup is assembled by the staff at a later stage, thereby preventing the suction cup from being assembled in the wrong position or having deviations in the structure inside the suction cup.

[0068] In the specific processing, the suction cup is a metal structure, a plastic structure or a ceramic structure. Preferably, the same suction cup is made of the same material. When the suction cup is made of metal, the suction cup can be a processed part made of iron, copper, stainless steel, etc.

[0069] In order to facilitate processing and ensure smooth and stable airflow in each chamber, preferably, the sealing ring 2 is a circular ring structure, and each sealing ring 2 is concentrically arranged.

[0070] The air extraction holes 7 connected to the same air channel 6 are arranged in sequence in the direction from the center to the edge of the adsorption surface.

[0071] Specifically, the air extraction holes 7 in each adsorption area are distributed at equal intervals.

[0072] In order to facilitate the processing of the air channel 6, the air channel 6 preferably extends to the side of the body 1 away from the outer end of the exhaust hole 5, and the outer end is sealed by a plug 8. Specifically, the air channel 6 is a straight cavity, and the plug 8 is threadedly connected to the end of the air channel 6 to achieve sealing of the end of the air channel 6.

[0073] In a specific embodiment, a lifting column reserved hole 10 and a fastener installation hole 9 are provided on the adsorption surface, the number of the lifting column reserved holes 10 is at least two, and the number of the fastener installation holes 9 is one or more. Specifically, when the fastener is a screw, the fastener installation hole 9 is used for the screw to pass through. By providing the lifting column reserved hole 10, it is convenient to detach the belt adsorption piece from the suction cup.

[0074] The suction cup involved in the present invention can achieve the adsorption of wafers with a warpage of 1mm. At the same time, since the surface of the suction cup can effectively support the wafer, the drastic fluctuations of the wafer surface after adsorption can be avoided, and the overall flatness can be controlled within 1um.

[0075] The surface of each sealing ring 2 that is bonded to the wafer adopts an annular plane structure, has high smoothness and flatness, and will not cause contact damage and air leakage to the wafer.

[0076] When the suction cup is specifically selected, the size of the adapted wafer should be determined by the cross-sectional area of ​​the outermost sealing ring 2 .

[0077] The present application provides a carrying device, including an inflation and deflation device and a suction cup connected to the inflation and deflation device, wherein the suction cup is any of the above-mentioned suction cups. The foregoing describes the specific structure of the suction cup, and the present application includes the above-mentioned suction cup, which also has the above-mentioned technical effects. Specifically, the inflation and deflation device is used to be connected to the exhaust hole 5 pipeline on the suction cup, and is used to absorb gas from the airway 6, or to fill gas into the airway 6. Specifically, it also includes a pressure monitoring device for monitoring the air pressure in the airway 8. When the suction cup is evacuated, the pressure monitoring device monitors the air pressure in the airway 6. When the airway 6 drops to the preset adsorption pressure, the inflation and deflation device stops suctioning. The preset adsorption pressure is the pressure corresponding to the suction of the suction cup to the adsorbed part. The specific value depends on actual needs and is not specifically limited in the present application.

[0078] The present application provides an adsorption method, which uses the above-mentioned suction cup or the carrying device to adsorb the object 4 to be adsorbed, including the steps of:

[0079] The detected object 4 is placed on the adsorption surface of the suction cup.

[0080] The air passage 6 and the air extraction hole 7 are sucked through the exhaust hole 5, and the gas between the adsorbed part 4 and the adsorption surface is sucked at the same time.

[0081] In the process of sucking gas, the adsorbed part 4 is gradually sealed with the adsorption surface from the center to the edge of the adsorption surface. Specifically, in the process of sucking gas from the suction cup, the pipeline air pressure is monitored, and when the pipeline air pressure drops to the preset adsorption pressure, the air suction is stopped.

[0082] The suction cup includes a sealing ring 2. During the specific operation, the object to be adsorbed 4 is placed on the sealing ring 2 on the adsorption surface. Specifically, the object to be adsorbed 4 can be placed on the sealing ring 2 manually by a staff member or by a robot. Projected along the placement direction of the object to be adsorbed 4, the sealing ring 2 is within the projection range of the object to be adsorbed 4.

[0083] The suction cup is evacuated through the exhaust hole 5. Specifically, the suction cup can be evacuated through an exhaust pipe connected to the exhaust hole 5 as a pipeline. The exhaust pipe is a vacuum device, and the vacuum degree of the suction cup is determined according to actual needs.

[0084] The adsorbed part 4 is gradually sealed with the sealing ring 2 from the center of the body 1 to the edge of the body 1, and the adsorbed part 4 is corrected by adsorbing it. After the correction is completed, the adsorbed part 4 is removed from the wafer. The adsorbed part 4 can be a wafer, a glass panel, etc.

[0085] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0086] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A suction cup, characterized in that: The invention comprises a main body (1), wherein the main body (1) has an adsorption surface, an air passage (6) and an exhaust hole (5), wherein the adsorption surface is provided with at least two exhaust holes with different cross-sectional areas, wherein the exhaust hole with a larger cross-sectional area is closer to the center of the adsorption surface than the exhaust hole with a smaller cross-sectional area, and the exhaust hole (7) is connected to the exhaust hole (5) through the air passage (6), and the exhaust hole (7) is used to gradually adsorb the object (4) to be adsorbed onto the main body (1) from the center of the adsorption surface to the edge of the adsorption surface.

2. The suction cup according to claim 1, characterized in that The main body (1) has a plurality of sealing rings (2) arranged on the adsorption surface and used for sealingly fitting with the adsorbed object (4), the sealing rings (2) being arranged in sequence and spaced apart, and an adsorption area is formed between two adjacent sealing rings (2) and the adsorption surface, and at least one suction hole (7) is provided on the adsorption surface corresponding to each adsorption area.

3. The suction cup according to claim 2, characterized in that Each of the adsorption regions has a radial width in the direction from the center to the edge of the adsorption surface, and the radial width of the adsorption region is related to the surface warpage distribution of the object (4) to be adsorbed.

4. The suction cup according to claim 3, characterized in that The radial width of the adsorption area decreases as the slope of the surface warpage curve of the object to be adsorbed increases.

5. The suction cup according to claim 4, characterized in that In the direction from the center to the edge of the object to be adsorbed (4), there are multiple extension segments with specific warpage differences, and the projection width of the extension segments on the adsorption surface is configured as the radial width of the adsorption area.

6. The suction cup according to claim 2, characterized in that Each of the adsorption regions has a radial width in a direction from the center to the edge of the adsorption surface, and the radial widths of the adsorption regions are all equal.

7. The suction cup according to claim 2, characterized in that The adsorption region has a radial width in a direction from the center to the edge of the adsorption surface, and the radial width of the adsorption region decreases as the distance between the adsorption region and the center of the adsorption surface increases.

8. The suction cup according to claim 2, characterized in that A plurality of the air extraction holes (7) are provided in each of the adsorption regions and are distributed on different air passages (6); the air extraction holes (7) in each of the adsorption regions are located on a concentric circle and are distributed at equal intervals.

9. The suction cup according to claim 8, characterized in that The air extraction holes (7) connected to the same air channel (6) are arranged in sequence in the direction from the center to the edge of the adsorption surface.

10. The suction cup according to claim 2, characterized in that The number of the air channels (6) is at least two, one end of all the air channels (6) are interconnected at the center of the body (1), a central air hole (11) is provided at the center of the adsorption surface and is connected to the center of the body (1), all the air channels (6) are radially distributed, and each of the air channels (6) is provided with an air extraction hole (7) connected to each of the adsorption areas.

11. The suction cup according to claim 10, characterized in that The exhaust hole (5) is connected to the center of the body (1) and cooperates with the central air hole (11) to penetrate the body (1).

12. The suction cup according to claim 1, characterized in that The air passage (6) extends away from the outer end of the exhaust hole (5) to the side of the body (1), and the outer end of the air passage (6) is sealed by a plug (8).

13. The suction cup according to claim 1, characterized in that The suction cup is an integrally formed structure, and the suction cup is a metal structure, a plastic structure or a ceramic structure.

14. A carrying device, comprising an inflation and deflation device and a suction cup connected to the inflation and deflation device, characterized in that: The suction cup is the suction cup according to any one of claims 1 to 13; The gas filling and deflation device is used to be connected to the exhaust hole (5) on the suction cup through a pipeline, and is used to absorb gas from the airway (6) or to fill gas into the airway (6).

15. An adsorption method, characterized in that: The method comprises the following steps: The detection object to be adsorbed (4) is placed on the adsorption surface of the suction cup; Sucking air from the air passage (6) and the air extraction hole (7) through the exhaust hole (5), and simultaneously sucking the gas between the object to be adsorbed (4) and the adsorption surface; In the process of absorbing gas, the object to be adsorbed (4) is gradually made to fit and seal with the adsorption surface from the center to the edge of the adsorption surface.

16. The adsorption method according to claim 15, characterized in that: The method also includes the following steps: during the suction process of the suction cup, monitoring the pipeline air pressure, and stopping the suction when the pipeline air pressure drops to the adsorption preset air pressure.

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