Inflation equipment for inflating RSP photomask box

Abstract

The invention discloses inflation equipment for inflating an RSP photomask box. The inflation equipment comprises a fixing tool and an inflation assembly, the RSP photomask box comprises a box body and an air inlet valve. The fixing tool comprises a tool bottom plate. Each inflation assembly comprises an air nozzle support, an air nozzle, a center rod, a support bottom plate and an inflation spring. The air tap comprises a sealing ring and a deformation ring. The deformation ring is of an annular umbrella-shaped structure. The center rod comprises a rod body, a blocking part, a sealing part, a head part and a tail part. Compared with the prior art, the air inflation assembly is arranged, contact type air inflation is achieved, ventilation can be achieved when the box body is placed on the air inflation assembly, closing can be achieved when the box body is taken away, and simplicity and high efficiency are achieved. And the air inlet valve is arranged, so that a double-valve structure is realized, and air deficiency in the box body can be effectively prevented. And finally, by arranging the air tap, the air inflation assembly and the air inlet valve are always kept sealed, air leakage at the joint is effectively prevented, and air loss is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor carriers, and in particular to an inflating device for inflating an RSP mask box. Background Art

[0002] RSP (Reticle SMIF Pod, RSP for short) mask box is a mask transfer box used in the semiconductor manufacturing process. It is a protective device for storing masks, referred to as RSP mask box. The main function of the RSP mask box is to reduce the adhesion of particles to the mask and outgassing during the production, transfer and processing of the mask to ensure the cleanliness and integrity of the mask. The RSP mask box is designed to provide a clean and stable environment for the mask. In addition, the RSP mask box also needs to meet requirements such as high cleanliness, good air tightness, low outgassing and anti-static protection (ESD). Therefore, in order to improve the cleanliness of the RSP mask box, clean inert gases, such as nitrogen, are usually filled in the RSP mask box to reduce the hazards of other harmful gases.

[0003] For example, in the Chinese utility model with publication number CN203339120U, a wafer / mask sealed carrier inflation purification system is specifically a wafer / mask sealed carrier inflation purification system that can control the air intake rate and has a high cleaning effect, which includes at least one inflation module, an air supply module, an exhaust module and a processing module. The inflation module is provided with at least one air intake valve connected to the air supply module, and the inflation module is provided with at least one exhaust valve connected to the exhaust module, and a flow adjustment valve and a pressure flow meter are provided between the air supply module and the air intake circuit of the air intake valve. The aforementioned flow adjustment valve is also connected to the processing module, whereby, when the carrier is placed on the inflation module for inflation, the air supply status of the inflation module can be detected and displayed through the processing module, and its flow and pressure can be adjusted according to the actual situation, so that the inflation of the carrier can be completed quickly, and the inlet and outlet stability of the clean gas inside the carrier can be maintained, effectively improving its internal cleanliness.

[0004] Although the utility model realizes the rapid inflation of the vehicle, it is manually opened or automatically opened by the induction device during inflation, which increases the complexity of the process and the equipment, resulting in an increase in production costs. At the same time, during the inflation process, this method of placing the mask box directly on the inflation device for rapid inflation must first ensure the sealing. Not only must it be ensured that no gas leaks during the inflation process, but also the airtightness of the mask box must be ensured in time after the inflation is completed to avoid gas leakage or air intrusion. In addition, the gas source needs to be turned off immediately after the inflation is completed to prevent gas consumption. Summary of the invention

[0005] In view of this, the present invention provides an inflation device for inflating an RSP mask box to solve the above technical problems.

[0006] An inflating device for inflating an RSP photomask box includes a fixed tool and a plurality of inflating components arranged on the fixed tool. The RSP photomask box includes a box body placed on the fixed tool and a plurality of air inlet valves arranged on the box body. The fixed tool includes a tool base plate. Each of the inflating components includes a nozzle bracket arranged on the tool base plate, a nozzle arranged between the nozzle bracket and the tool base plate, a center rod arranged in the nozzle bracket, a bracket base plate arranged on the nozzle bracket, and an inflating spring arranged between the center rod and the bracket base plate. The nozzle includes a sealing ring filled between the fixed tool and the air outlet, and a deforming ring arranged on the sealing ring. The deforming ring is an annular umbrella-shaped structure. The center rod includes a rod body, a blocking portion located on the rod body, a sealing portion located on one side of the blocking portion, a head located at one end of the rod body, and a tail located at the other end of the rod body. The sealing part is arranged on the side of the blocking part away from the head, and includes a conical sealing surface and a sealing bottom. The conical sealing surface is an inclined surface from the blocking part to the sealing bottom. The sealing bottom is an annular protrusion with a diameter larger than that of the blocking part. When the air nozzle is in a free state, the distance between the head and the tooling bottom plate is less than the maximum distance between the deformation ring and the tooling bottom plate. Each of the air intake valves includes an air intake valve body, an air intake valve core arranged in the air intake valve body, an air intake plug arranged on one side of the air intake valve core, and an air intake spring arranged between the air intake plug and the air intake valve body. The air intake valve body includes a valve cavity, a valve body air inlet arranged at one end of the valve cavity, an air intake pressure plate arranged at the valve body air inlet, and a valve body air outlet arranged at one end of the valve cavity away from the valve body air inlet. The spring rate of the air intake spring is greater than the spring rate of the gas filling spring. The distance between the deformation ring and the tooling bottom plate is such that the deformation ring can be tightly clamped between the air inlet pressure plate and the tooling bottom plate when the air inlet of the valve body is fully opened.

[0007] Furthermore, the fixed tool also includes at least four limiting angles arranged on the tool bottom plate, and a guiding slope is arranged on a side of the limiting angle close to the box body.

[0008] Furthermore, the tooling base plate is a rectangular plate-like structure, the limiting angle is set at the corner of the tooling base plate, and the tooling base plate is provided with a plurality of fixing holes for inserting fasteners, and a plurality of air inlet holes for setting the inflatable component.

[0009] Furthermore, the air nozzle bracket includes a bracket body, an inflation air duct arranged in the bracket body, an air outlet portion arranged at one end of the inflation air duct, an inflation air inlet arranged on one side of the inflation air duct, and a clamping ring arranged on the air outlet portion.

[0010] Furthermore, the inflation air duct is arranged on the central axis of the bracket body, the air outlet portion is arranged at one end of the inflation air duct close to the tooling base plate, the inflation air inlet is arranged on the bracket body, the opening direction is the radial direction of the bracket body, and is communicated with the interior of the inflation air duct, and the clamping ring is arranged at the end of the free end of the air outlet portion, and is a circular ring protruding in the radial direction.

[0011] Furthermore, the rod body is axially arranged in the inflation airway, and the end close to the head passes through the air outlet portion, the diameter of the blocking portion is larger than the diameter of the rod body, and a guiding slope with a guiding function is provided at the connection, and the diameter of the blocking portion is an interference fit with the aperture of the air outlet portion, the tail portion is a columnar structure with a diameter smaller than that of the rod body, and a clamping step is formed between the tail portion and the sealing portion.

[0012] Furthermore, a limiting slot is provided on the support bottom plate, and the limiting slot is provided in the axial direction of the support bottom plate and inserted into the inflation airway.

[0013] Further, the valve cavity is a cavity inside the air inlet valve body, the valve body air inlet is arranged at one end of the valve cavity close to the inflation component, opposite to the air outlet, and both are fastened inside by the deformable ring, the air inlet pressure plate is located on the valve body air inlet, the plate surface is flush with the opening of the valve body air inlet, and the valve body air outlet is arranged on the air inlet valve body and is located on one side of the air inlet valve body inside the RSP mask box.

[0014] Furthermore, the air intake plug is arranged in the valve cavity, including a movable rod inserted in the air intake valve core, and a blocking block fixed on the movable rod, one end of the movable rod passes through the center of the air intake valve core, and the other end is located in the valve cavity and is provided with an abutment portion, the blocking block is fixed on the movable rod, and the blocking block is tightly fitted with the inner wall of the air intake valve core.

[0015] Furthermore, one end of the intake spring abuts against the intake valve body, and the other end abuts against the abutting portion.

[0016] Compared with the prior art, the inflatable device for inflating the RSP mask box provided by the present invention realizes contact inflation by setting the inflatable component. The center rod is pressed to move by the deadweight of the box body, so that the gas outlet is opened. The box body can be ventilated when it is put on, and closed when it is taken away. It is simple and efficient, effectively improves the inflation efficiency of the box body, and can prevent the continuous discharge of gas after the box body is taken away, effectively reducing the non-operational consumption of gas. And by setting the inlet valve, a double valve structure is realized. By setting two springs with different stiffness coefficients, when the airway is opened, the air port of the inflatable component is opened first, and then the air port of the inlet valve is opened, so that the air loss in the box body can be effectively prevented. Finally, by setting the air nozzle, the inflatable component and the inlet valve are connected. The deformable ring that can be deformed makes the inflatable component and the inlet valve always keep sealed during the downward pressure of the box body, effectively preventing gas leakage at the connection point and reducing gas loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of an inflation device for inflating an RSP mask box provided by the present invention when in use.

[0018] Figure 2 for Figure 1 Schematic diagram of the exploded structure of the inflation device used to inflate the RSP reticle box.

[0019] Figure 3 for Figure 1 Schematic diagram of the exploded structure of the inflation device for inflating the RSP mask box from another perspective.

[0020] Figure 4 for Figure 1 A schematic cross-sectional view of an inflation device for inflating an RSP mask box in a vertical cross section when in use.

[0021] Figure 5 for Figure 4 An enlarged view of the inflation device used to inflate the RSP reticle box at A.

[0022] : Explanation of the reference numerals in the accompanying drawings: fixed tooling 10, tooling base plate 11, limiting angle 12, inflation component 20, air nozzle bracket 21, bracket body 211, inflation airway 212, air outlet 213, inflation air inlet 214, clamping ring 215, air nozzle 22, sealing ring 221, deformation ring 222, center rod 23, rod body 231, blocking portion 232, sealing portion 233, head 234, tail 235, bracket base plate 24, sealing gasket 241, limiting slot 242, inflation spring 25, air inlet connector 26, box body 30, air inlet valve 40, air inlet valve body 41, valve cavity 411, valve body air inlet 412, air inlet pressure plate 413, valve body air outlet 414, air inlet valve core 42, air inlet plug 43, movable rod 431, blocking block 432, abutment portion 433, air inlet spring 44. DETAILED DESCRIPTION

[0023] The specific embodiments of the present invention are further described in detail below. It should be understood that the description of the embodiments of the present invention herein is not intended to limit the protection scope of the present invention.

[0024] like Figures 1 to 5 As shown, it is a schematic diagram of the structure of the inflation device for inflating the RSP reticle box provided by the present invention. The inflation device for inflating the RSP reticle box includes a fixed fixture 10, and a plurality of inflation components 20 arranged on the fixed fixture 10. It can be imagined that the inflation device for inflating the RSP reticle box also includes other functional modules such as an air source, an air pipe, etc., which are well known to those skilled in the art and will not be described one by one here.

[0025] The RSP mask box is an inflatable product placed on the fixing tool 10 , and includes a box body 30 and a plurality of air inlet valves 40 disposed on the box body 30 .

[0026] The fixing fixture 10 includes a fixture base plate 11 and at least four limiting angles 12 arranged on the fixture base plate 11. The fixture base plate 11 is a base plate for carrying the box body 30, and is provided with a plurality of fixing holes for inserting fasteners, and a plurality of air inlet holes for setting the inflatable component 20, which are common technologies in the field of mechanical equipment and are not the main content of this application, so they are not illustrated one by one in the drawings of the specification, but are only briefly described here.

[0027] In one embodiment of the present application, the tooling base plate 11 is a rectangular plate-like structure, and the limiting angle 12 is set at the corner of the tooling base plate 11. A guiding slope is set on the side of the limiting angle 12 close to the box body 30, which is used to guide the box body 30 when it is placed on the fixed tool 10. The limiting angle 12 is an L-shaped structure, which plays a limiting role after the box body 30 is placed on the fixed tool 10. It can be imagined that when two fixed tools 10 are arranged side by side, the limiting angle 12 located at the adjacent position of the two fixed tools 10 can be set to a T shape to reduce the number of limiting angles 12 used and reduce equipment costs.

[0028] Each of the inflation components 20 includes an air nozzle bracket 21 arranged on the tooling base plate 11, an air nozzle 22 arranged between the air nozzle bracket 21 and the tooling base plate 11, a center rod 23 arranged in the air nozzle bracket 21, a bracket base plate 24 arranged on the air nozzle bracket 21, an inflation spring 25 arranged between the center rod 23 and the bracket base plate 24, and an air intake connector 26 arranged on the air nozzle bracket 21.

[0029] The air nozzle bracket 21 includes a bracket body 211, an inflation air channel 212 arranged in the bracket body 211, an air outlet portion 213 arranged at one end of the inflation air channel 212, an inflation air inlet 214 arranged on one side of the inflation air channel 212, and a clamping ring 215 arranged on the air outlet portion 213.

[0030] The support body 211 is a cylindrical structure, which is axially and vertically fixed to the tooling base plate 11 by fasteners, and is located on the other surface of the tooling base plate 11 away from the limiting angle 12. The inflatable airway 212 is arranged on the central axis of the support body 211 to allow gas to flow and to set the central rod 23. The air outlet portion 213 is arranged at one end of the inflatable airway 212 close to the tooling base plate 11, and forms a tubular structure passing through the tooling base plate 11, for setting the air nozzle 22. The aperture of the gas outlet 213 is smaller than the diameter of the gas charging channel 212, and the cross-sectional shape of the connection between the gas charging channel 212 and the gas outlet 213 is consistent with the cross-sectional shape of the center rod 23, so that the center rod 23 can be pressed against and blocked and extended out of the gas outlet 213 under the action of the gas charging spring 25, so that it can cooperate with the gas inlet valve 40 of the RSP mask box for inflation, and seal the gas outlet 213 when not inflated. The gas charging inlet 214 is arranged on the bracket body 211, and the opening direction is parallel to the radial direction of the bracket body 211 to reduce the volume of the entire device, and communicates with the inside of the gas charging channel 212 for setting the gas inlet joint 26. The clamping ring 215 is arranged at the end of the free end of the gas outlet 213, and is a radially protruding circular ring, so as to play a clamping role when the gas nozzle 22 is mounted on the gas nozzle bracket 21.

[0031] The air nozzle 22 is a sealing ring formed by injection molding of silicone or rubber material, and includes a sealing ring 221 filled between the fixing fixture 10 and the air outlet portion 213 , and a deformable ring 222 arranged on the sealing ring 221 .

[0032] The sealing ring 221 is sleeved on the air outlet portion 213 and is clamped by the clamping ring 215, so that the sealing ring 221 will not be displaced after installation. The deformable ring 222 is an annular umbrella-shaped structure. When the box body 30 is placed on the fixing fixture 10, the deformable ring 222 is deformed and opened with the downward pressure of gravity. The deformable ring 222 will be buckled on the box body 30, thereby ensuring the sealing performance. The height of the deformable ring 222 should be set in coordination with the structure of the air intake valve 40 to ensure that the air intake valve 40 will not leak during the entire inflation process.

[0033] The central rod 23 may be a columnar structure made of PEEK plastic injection molding, and includes a rod body 231, a blocking portion 232 located on the rod body 231, a sealing portion 233 located on one side of the blocking portion 232, a head 234 located at one end of the rod body 231, and a tail 235 located at the other end of the rod body 231. When the air nozzle 22 is in a free state, the distance between the head 234 of the central rod 23 and the tooling base plate 11 is less than the maximum distance between the deformation ring 22 and the tooling base plate 11.

[0034] The rod body 231 is axially arranged in the inflation airway 212, and one end close to the head 234 passes through the inflation outlet 213. The diameter of the blocking portion 232 is larger than the diameter of the rod body 231, and a guiding inclined surface with a guiding function is arranged at the connection, and the diameter of the blocking portion 232 is interference fit with the aperture of the inflation outlet 213, so that when the center rod 23 is inserted, the inflation outlet 213 is blocked. The sealing portion 233 is arranged on the side of the blocking portion 232 away from the head 234, and includes a conical sealing surface and a sealing bottom, the conical sealing surface is an inclined surface from the blocking portion 232 to the sealing bottom, and the sealing bottom is an annular protrusion with a diameter larger than that of the blocking portion 232. The sealing portion 233 is pressed against the connection between the inflation outlet 213 and the inflation airway 212 by the action of the inflation spring 25, so as to close the inflation outlet 213 and prevent gas from flowing when not inflated. The head 234 is a spherical round head, which is arranged on the free end of the rod body 231 passing through the inflation outlet 213, so as to press against the air inlet valve 40 arranged on the box body 30. The specific working principle will be described in detail below. The tail 235 is a columnar structure with a diameter smaller than that of the rod body 231, and a clamping step is formed between the tail 235 and the sealing portion 233 to cover and fix the relative position of the inflation spring 25.

[0035] The support base plate 24 is fixed to the support body 211 by fasteners and is located at one end away from the air outlet portion 213 to close the air passage 212. A sealing gasket 241 is provided between the support base plate 24 and the support body 211 to ensure the sealing performance in the air passage 212 during the fastening connection. A limiting slot 242 is also provided on the support base plate 24. The limiting slot 242 is a hollow cylindrical protrusion, which is provided at the axial position of the support base plate 24 and inserted into the air passage 212 for the tail 235 to be inserted, and when the center rod 23 moves in the air passage 212, the tail 235 is located in the limiting slot 242, thereby ensuring that the center rod 23 will only move along the axial direction in the air passage 212 without positional displacement.

[0036] The inflatable spring 25 is sleeved on the limiting slot 242, with one end abutting against the sealing portion 233 and the other end abutting against the bracket bottom plate 24, and when there is no external force, it pushes the center rod 23 to abut against the air outlet portion 213 for sealing.

[0037] The air inlet connector 26 is a threaded straight-through connector, which is fixed to the inflation air inlet 214 by a threaded connection, and a sealing coating and a sealing gasket are used at the thread to ensure the sealing performance of the connection, so as to facilitate the connection of the air pipe to the air source for air supply.

[0038] The box body 30 is a box-shaped structure, and the main body is limited by the limiting angle 12. Since the box body 30 has its own weight, when the box body 30 is stored, the air inlet valve 40 contacts the head 234 and presses down the center rod 23, so that the blocking part 232 and the sealing part 233 are separated and a gap is generated, so that gas can enter the box body 30 from the inflatable component 20.

[0039] The air intake valve 40 is arranged on the box body 30, and when the box body 30 is placed on the fixing fixture 10, the position and number of the air intake valve 40 correspond to the position and number of the inflation assembly 20, so as to inflate the box body 30 through the inflation assembly 20. Each of the air intake valves 40 includes an air intake valve body 41, an air intake valve core 42 arranged in the air intake valve body 41, an air intake plug 43 arranged on one side of the air intake valve core 42, and an air intake spring 44 arranged between the air intake plug 43 and the air intake valve body 41.

[0040] The air inlet valve body 41 is arranged on the air inlet of the box body 30 through a snap-fit ​​structure, and the connection is sealed by a sealing gasket. The air inlet valve body 41 includes a valve cavity 411, a valve body air inlet 412 arranged at one end of the valve cavity 411, an air inlet pressure plate 413 arranged at the valve body air inlet 412, and a valve body air outlet 414 arranged at one end of the valve cavity 411 away from the valve body air inlet 412.

[0041] The valve cavity 411 is a cavity in the inlet valve body 41, which is used as a gas flow channel and for arranging the inlet valve core 42, the inlet plug 43 and the inlet spring 44. The valve body inlet port 412 is arranged at one end of the valve cavity 411 close to the inflation assembly 20, opposite to the outlet port 213, and both are buckled in by the deformable ring 222 to realize gas transmission. The inlet pressure plate 413 is located on the valve body inlet port 412, and the plate surface is flush with the opening of the valve body inlet port 412, so as to serve as the main structure pressed on the deformable ring 222, and the valve body inlet port 412 is buckled and sealed with the outlet port 213 to prevent gas leakage during the inflation operation. The valve body outlet port 414 is arranged on the inlet valve body 41, and is located on the side of the inlet valve body 41 in the box body 30, so as to communicate with the valve cavity 411 to realize gas supply to the box body 30.

[0042] The air inlet valve core 42 is disposed in the valve cavity 411 and is disposed close to the valve body air inlet 412. The air inlet valve core 42 is provided with a plurality of through holes for gas to enter. A sealing gasket is provided between the air inlet valve core 42 and the inner wall of the valve cavity 411 to prevent gas leakage.

[0043] The air intake plug 43 is arranged in the valve cavity 411, and includes a movable rod 431 inserted in the air intake valve core 42, and a blocking block 432 fixed on the movable rod 431. One end of the movable rod 431 passes through the center of the air intake valve core 42, and the other end is located in the valve cavity 411, and is provided with an abutment portion 433. The blocking block 432 is fixed on the movable rod 431, and the blocking block 432 and the inner wall of the air intake valve core 42 are tightly matched. By pressing the blocking block 432 on the air intake valve core 42, the air intake port 412 of the valve body can be closed.

[0044] One end of the intake spring 44 abuts against the inner wall of the intake valve body 41, and the other end abuts against the abutment portion 433, so that in the absence of external force, the elastic force generated by elastic deformation can be used to press the intake plug 43 into the intake valve core 42, thereby blocking the valve body intake port 412 and preventing gas circulation.

[0045] In this embodiment, the stiffness coefficient of the air intake spring 44 is greater than the stiffness coefficient of the inflation spring 25, so that after inflation is completed, when the box body 30 is separated from the fixing tool 10, the air intake valve 40 is closed first, and then the inflation assembly 20 is closed, to ensure that the box body 30 is sufficiently inflated.

[0046] When in use, the box body 30 is placed on the fixed fixture 10. First, the deformable ring 222 abuts against the air inlet valve 40 to prevent dust from entering the box body 30. Then, the center rod 23 is pressed down to open the inflation outlet 213. Then, the air inlet plug 43 is also pushed open. Since the stiffness coefficient of the air inlet spring 44 is greater than the stiffness coefficient of the inflation spring 25, the air inlet plug 43 is opened after the inflation outlet 213, and then inflation is carried out. After the inflation is completed, when the box body 30 leaves the fixed fixture 10, under the action of the gas pressure and the elastic force of the inflation spring 25, the center rod 23 rebounds and blocks the inflation outlet 213, sealing the inflation outlet 213 to prevent gas consumption in a non-working state.

[0047] When the box body 30 is placed on the fixing fixture 10, the deformable ring 222 first abuts against the air inlet valve 40, and then the movable rod 431 and the central rod 23 abut against each other. Since the stiffness coefficient of the air inlet spring 44 is greater than the stiffness coefficient of the air charging spring 25, the central rod 23 moves first. When the blocking portion 232 leaves the air outlet portion 213, the deformable ring 222 is continuously pressed downward. As the box body 30 is continuously pressed downward, the sealing portion 233 and the limiting slot 242 are abutted against each other and cannot move further. At this time, the air intake spring 44 is deformed due to extrusion, the movable rod 431 moves inward, the blocking block 432 is separated from the air intake valve core 42, and the valve body air inlet 412 is opened, so that the inflation component 20 and the box body 30 form a gas passage for inflation. At this time, the deformable ring 222 is flattened and clamped between the air intake pressure plate 413 and the tooling bottom plate 11 to achieve the purpose of sufficient sealing. Therefore, the distance from the deformable ring 222 to the tooling bottom plate 11 should be based on the fact that it is tightly clamped between the air intake pressure plate 413 and the tooling bottom plate 11 when the valve body air inlet 412 is fully opened.

[0048] In addition, during the placement of the box body 30, when the center rod 23 moves to open the inflatable component 20, the inlet pressure plate 413 contacts the deformable ring 222, which makes the deformable ring 222 snap on the inlet pressure plate 413, thereby maintaining the sealing of the gas flow channel. Subsequently, during the continuous downward pressure of the box body 30, the movable rod 431 moves to open the valve body air inlet 412, thereby ensuring that the gas flow channel remains fully sealed during the inflation operation. And because the air source is fully open, the airflow rushing out at the moment the inflatable component 20 is opened will discharge the air in the deformable ring 222, thereby preventing the residual air from entering the product after the inlet valve 40 is opened. After the inflation is completed, when the box body 30 leaves the fixed fixture 10, since the stiffness coefficient of the air intake spring 44 is greater than the stiffness coefficient of the air charging spring 25, the air intake plug 43 must be closed before the air charging outlet 213. At the same time, when the box body 30 leaves the fixed fixture 10, the deformable ring 222 always abuts against the air intake pressure plate 413 until the air intake valve 40 is completely closed, thereby ensuring that the gas in the box body 30 will not leak. When the air intake pressure plate 413 is separated from the deformable ring 222, the inflation assembly 20 is closed again, thereby ensuring that the air intake valve 40 will never come into contact with the outside air during the process of opening and closing during the inflation operation.

[0049] Compared with the prior art, the inflatable device for inflating the RSP mask box provided by the present invention realizes contact-type inflation by setting the inflatable component 20, and the center rod 23 is pressed to move by the deadweight of the box body 30, so that the gas outlet 213 is opened, and the box body 30 can be ventilated when it is put on, and closed when it is taken away. It is simple and efficient, effectively improving the inflation efficiency of the box body 30, and can prevent the continuous discharge of gas after the box body 30 is taken away, effectively reducing the non-operational consumption of gas. And by setting the inlet valve 40, a double valve structure is realized, and by setting two springs with different stiffness coefficients, when the airway is opened, the gas port of the inflatable component 20 is opened first, and then the gas port of the inlet valve 40 is opened, so that the gas loss in the box body 30 can be effectively prevented. Finally, by setting the air nozzle 22, the inflation component 20 and the air inlet valve 40 are connected. The deformable ring 222 can be deformed so that when the box body 30 is pressed down, the inflation component 20 and the air inlet valve 40 are always sealed, effectively preventing gas leakage at the connection and reducing gas loss.

[0050] The above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modification, equivalent substitution or improvement within the spirit of the present invention is included in the scope of the claims of the present invention.

Claims

1. An inflating device for inflating an RSP reticle box, characterized in that: The inflation device for inflating the RSP mask box includes a fixed tool and a plurality of inflation components arranged on the fixed tool, the RSP mask box includes a box body placed on the fixed tool and a plurality of air intake valves arranged on the box body, the fixed tool includes a tool base plate, each of the inflation components includes an air nozzle bracket arranged on the tool base plate, an air nozzle arranged between the air nozzle bracket and the tool base plate, a center rod arranged in the air nozzle bracket, a bracket base plate arranged on the air nozzle bracket, and an inflation spring arranged between the center rod and the bracket base plate, the air nozzle includes a sealing ring filled between the fixed tool and the air outlet, and a deforming ring arranged on the sealing ring, the deforming ring is an annular umbrella-shaped structure, the center rod includes a rod body, a blocking portion located on the rod body, a sealing portion located on one side of the blocking portion, a head located at one end of the rod body, and a tail located at the other end of the rod body, the sealing portion is arranged at the blocking portion The side of the part away from the head portion includes a conical sealing surface and a sealing bottom, the conical sealing surface is an inclined surface from the blocking portion to the sealing bottom, the sealing bottom is an annular protrusion with a diameter larger than the blocking portion, the gas nozzle is in a free state, the distance between the head and the tooling bottom plate is less than the maximum distance between the deformation ring and the tooling bottom plate, each of the intake valves includes an intake valve body, an intake valve core arranged in the intake valve body, an intake plug arranged on one side of the intake valve core, and An intake spring is arranged between the intake plug and the intake valve body, the intake valve body includes a valve cavity, a valve body air inlet arranged at one end of the valve cavity, an intake pressure plate arranged at the valve body air inlet, and a valve body air outlet arranged at one end of the valve cavity away from the valve body air inlet, the stiffness coefficient of the intake spring is greater than the stiffness coefficient of the charging spring, and the distance from the deformable ring to the tooling bottom plate is such that the deformable ring can be tightly clamped between the intake pressure plate and the tooling bottom plate when the valve body air inlet is fully opened.

2. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The fixed tool also includes at least four limiting angles arranged on the tool bottom plate, and a guiding inclined surface is arranged on a side of the limiting angle close to the box body.

3. The inflating device for inflating an RSP reticle box according to claim 2, characterized in that: The tooling base plate is a rectangular plate-like structure, the limiting angle is set at the corner of the tooling base plate, and the tooling base plate is provided with a plurality of fixing holes for inserting fasteners, and a plurality of air inlet holes for setting the inflatable component.

4. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The air nozzle bracket includes a bracket body, an inflation airway arranged in the bracket body, an air outlet portion arranged at one end of the inflation airway, an inflation air inlet arranged at one side of the inflation airway, and a clamping ring arranged on the air outlet portion.

5. The inflating device for inflating an RSP reticle box according to claim 4, characterized in that: The inflation air duct is arranged on the central axis of the bracket body, the air outlet is arranged at one end of the inflation air duct close to the tooling base plate, the inflation air inlet is arranged on the bracket body, the opening direction is the radial direction of the bracket body, and is communicated with the inside of the inflation air duct, and the clamping ring is arranged at the end of the free end of the air outlet, and is a circular ring protruding in the radial direction.

6. The inflating device for inflating an RSP reticle box according to claim 4, characterized in that: The rod body is axially arranged in the inflation airway, and the end close to the head passes through the air outlet portion. The diameter of the blocking portion is larger than the diameter of the rod body, and a guiding slope with a guiding function is provided at the connection. The diameter of the blocking portion is an interference fit with the aperture of the air outlet portion. The tail portion is a columnar structure with a smaller diameter than the rod body, and a clamping step is formed between the tail portion and the sealing portion.

7. The inflating device for inflating an RSP reticle box according to claim 4, characterized in that: The support bottom plate is provided with a limiting slot, which is arranged at the axial direction of the support bottom plate and inserted into the inflation airway.

8. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The valve cavity is a hollow cavity inside the air inlet valve body. The valve body air inlet is arranged at one end of the valve cavity close to the inflation component, opposite to the air outlet, and both are fastened inside by the deformable ring. The air inlet pressure plate is located on the valve body air inlet, and the plate surface is flush with the opening of the valve body air inlet. The valve body air outlet is arranged on the air inlet valve body and is located on one side of the air inlet valve body inside the RSP mask box.

9. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The air intake plug is arranged in the valve cavity, and includes a movable rod inserted in the air intake valve core, and a blocking block fixed on the movable rod. One end of the movable rod passes through the center of the air intake valve core, and the other end is located in the valve cavity and is provided with an abutment portion. The blocking block is fixed on the movable rod, and the blocking block is tightly fitted with the inner wall of the air intake valve core.

10. The inflating device for inflating an RSP reticle box according to claim 9, characterized in that: One end of the intake spring abuts against the intake valve body, and the other end abuts against the abutting portion.

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