Optical measurement method, device and system and computer readable medium

Abstract

The embodiment of the invention provides an optical measurement method, device and system and a computer readable medium, and the measurement method comprises the steps: determining parameters: determining parameter information according to the size parameters of an object to be measured; wherein the parameter information comprises a target interference mode and a target diaphragm diameter; the interference modes are selected from a plurality of interference modes with different measurement multiplying powers; a measurement result obtaining step: obtaining measurement result information obtained by measuring the to-be-measured object according to the parameter information; a measurement effect judgment step: judging the measurement effect according to the measurement result information to obtain a judgment result; a judgment result processing step: when the judgment result is that the measurement result is valid, determining an actual size parameter of the to-be-measured object according to the measurement result information; otherwise, re-determining the diameter of the target diaphragm, and returning to the step of acquiring the measurement result. The embodiment of the invention can be compatible with the measurement of TSVs with different depth-to-width ratios, the measurement difficulty is reduced, and the measurement efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of optical detection technology, and in particular to an optical measurement method, an optical measurement device, an optical measurement system and a computer-readable medium. Background Art

[0002] Optical measurement has the advantages of being fast, non-contact and non-destructive, so it is a widely used workpiece measurement method. However, the current measurement technology for TSV (Through Silicon Via) is still not mature enough. When measuring one TVS and then another TSV, it is often necessary to redetermine the components and parameters of the optical measurement system. When the depth, width or aspect ratio of the TSV changes, it is usually necessary to replace the aperture, mirror group and other components on the optical measurement system or perform parameter conversion and other adjustments to varying degrees. This adjustment process usually depends on the operator's operating experience. At the same time, the parameter adjustment of different components has different effects on the measurement results, so even experienced operators need to try to adjust multiple times to find the right parameter combination. Therefore, the existing optical measurement system has the defects of high measurement difficulty, low efficiency and difficulty in compatibility with the measurement of TSVs with different aspect ratios.

[0003] Therefore, there is an urgent need to provide a simple, efficient, and compatible measurement solution for TSVs with different aspect ratios. Summary of the invention

[0004] Therefore, in order to overcome at least some of the defects and problems in the prior art, embodiments of the present invention provide an optical measurement method, an optical measurement device, an optical measurement system and a computer-readable medium, which are compatible with the measurement of TSVs with different aspect ratios, reduce the measurement difficulty and improve the measurement efficiency.

[0005] Specifically, on the one hand, an optical measurement method provided by an embodiment of the present invention includes: a parameter determination step, determining parameter information according to the size parameters of the object to be measured; wherein the parameter information includes a target interference pattern and a target aperture diameter; the target interference pattern is selected from a plurality of interference patterns with different measurement magnifications; a measurement result acquisition step, acquiring measurement result information obtained by measuring the object to be measured according to the parameter information; a measurement effect judgment step, judging the effect of the measurement according to the measurement result information to obtain a judgment result; a judgment result processing step, when the judgment result is that the measurement result is valid, determining the actual size parameters of the object to be measured according to the measurement result information; otherwise, redetermining the target aperture diameter and returning to the measurement result acquisition step.

[0006] In one embodiment, the plurality of interference patterns include a Miller-type interference pattern, a Michelson-type interference pattern, and a Linnik-type interference pattern.

[0007] In one embodiment, the parameter determination step specifically includes: determining a detection mode according to the size parameters, the detection mode being at least one of the multiple interference modes; if the detection is one of the interference modes, determining the target interference mode as the detection mode; if the detection mode includes at least two of the interference modes, determining the target interference mode as the detection mode with the largest magnification among the detection modes.

[0008] In one embodiment, determining the detection mode according to the size parameters includes: comparing the multiple groups of measurement threshold information corresponding to the multiple groups of alternative parameter information with the size parameters respectively; determining optional parameter information in the multiple groups of alternative parameter information according to the comparison results; each group of alternative parameter information in the multiple groups of alternative parameter information includes interference pattern information; and determining the detection mode according to the interference pattern information of the optional parameter information.

[0009] In one embodiment, the size parameter includes aspect ratio information of the object to be measured, and each group of measurement threshold information in the multiple groups of measurement threshold information includes a measurable maximum aspect ratio; the multiple groups of measurement threshold information corresponding one-to-one to the multiple groups of alternative parameter information are compared with the size parameters respectively, and optional parameter information in the multiple groups of alternative parameter information is determined according to the comparison result, including: according to the fact that the measurable maximum aspect ratio of the compared threshold information in the multiple groups of measurement threshold information is greater than or equal to the aspect ratio information, determining that the alternative parameter information in the multiple groups of alternative parameter information corresponding to the compared threshold information is the optional parameter information.

[0010] In one embodiment, the size parameters include aspect ratio information and depth information of the object to be measured, and each group of measurement threshold information in the multiple groups of measurement threshold information includes a measurable maximum aspect ratio and a measurable maximum depth; the multiple groups of measurement threshold information corresponding one-to-one to the multiple groups of alternative parameter information are compared with the size parameters respectively, and the optional parameter information in the multiple groups of alternative parameter information is determined according to the comparison result, including: according to the fact that the measurable maximum aspect ratio of the compared threshold information in the multiple groups of measurement threshold information is greater than or equal to the aspect ratio information and the measurable maximum depth is greater than or equal to the depth information, determining that the alternative parameter information in the multiple groups of alternative parameter information corresponding to the compared threshold information is the optional parameter information.

[0011] In one embodiment, the target aperture diameter includes a target aperture aperture diameter, and the step parameter determination step specifically includes: comparing multiple groups of measurement threshold information of the target interference pattern corresponding to multiple aperture aperture diameters with the size parameters respectively, and selecting the target aperture aperture diameter from the multiple aperture aperture diameters according to the comparison result.

[0012] In one embodiment, the re-determining the target measurement information includes: reducing the diameter of the target aperture stop.

[0013] In one embodiment, the target aperture diameter parameter further includes a target field of view aperture diameter, and re-determining the target aperture diameter includes: when the target aperture diameter is the smallest value among the plurality of aperture diameters, reducing the target field of view aperture diameter.

[0014] In one embodiment, the measurement result information includes interference signal strength, and the measurement effect judgment step is specifically: comparing the interference signal strength with a strength threshold, and when the interference signal strength is greater than or equal to the strength threshold, the judgment result is that the measurement result is valid.

[0015] Another embodiment of the present invention provides an optical measuring device, including: a parameter determination module, used to execute a parameter determination step, and determine parameter information according to the size parameters of the object to be measured; wherein the parameter information includes a target interference pattern and a target aperture diameter; the target interference pattern is selected from a plurality of interference patterns with different measurement magnifications; a measurement result acquisition module, used to execute the measurement result acquisition step, and obtain measurement result information obtained by measuring the object to be measured according to the parameter information; a measurement effect judgment module, used to execute the measurement effect judgment step, and judge the effect of the measurement according to the measurement result information to obtain a judgment result; a judgment result processing module, used to execute the judgment result processing step, when the judgment result is that the measurement result is valid, determine the actual size parameters of the object to be measured according to the measurement result information; otherwise, redetermine the target aperture diameter and return to the measurement result acquisition step.

[0016] Another embodiment of the present invention provides an optical measurement method, including: a processor and a memory connected to the processor, wherein the memory stores instructions executed by the processor, and the instructions enable the processor to perform operations to perform the optical measurement method described in any one of the aforementioned embodiments.

[0017] Another embodiment of the present invention provides a computer-readable medium, wherein the computer-readable medium stores computer-readable instructions, wherein the computer-readable instructions include instructions for executing the optical measurement method described in any one of the aforementioned embodiments.

[0018] As can be seen from the above, the above embodiments of the present invention can achieve one or more of the following beneficial effects: first determine the target interference pattern and preliminarily determine the target aperture diameter through the parameter size of the object to be measured, and then judge the measurement effect. If the measurement result is valid, the actual size parameter of the object to be measured can be determined according to the measurement result, otherwise the target aperture diameter is re-determined and the previous measurement steps are repeated until the measurement result is valid. First, after determining a more suitable target interference pattern, use this target interference pattern as a reference, and adjust to a suitable parameter combination by adjusting the target aperture diameter. The measurement process is simple and clear. The above method can be used for TSV measurements with different aspect ratios. In addition, the above method can be executed automatically, so an automated measurement solution compatible with TSVs with different aspect ratios can be implemented, thereby achieving an efficient measurement effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 A schematic flow chart of an optical measurement method disclosed in one embodiment of the present invention.

[0021] Figure 2 It is a schematic diagram of the structural principle of the objective lens types corresponding to the three interference modes described in one embodiment of the present invention.

[0022] Figure 3 FIG. 4 is a schematic diagram of the structure of an optical measurement system in one embodiment of the present invention.

[0023] Figure 4 This is a comparison table of candidate parameter information and measurement threshold information in an embodiment of the present invention.

[0024] Figure 5 A schematic diagram of light incident on an object to be measured in an optical measurement method provided by an embodiment of the present invention.

[0025] Figure 6 A schematic structural diagram of an optical measuring device provided in one embodiment of the present invention.

[0026] Figure 7 A schematic diagram of the structure of an optical measurement system provided by one embodiment of the present invention.

[0027] Figure 8 A schematic diagram of the structure of a computer-readable medium provided for one embodiment of the present invention. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0029] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work should fall within the scope of protection of the present invention.

[0030] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchangeable where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0031] It should also be noted that the division of multiple embodiments in the present invention is only for the convenience of description and should not constitute a special limitation. The features in various embodiments can be combined and referenced to each other without contradiction.

[0032] [First embodiment]

[0033] The first embodiment of the present invention provides an optical measurement method, which can be applied to an optical measurement system. For example, the optical measurement system includes a carrying module, an illumination module, an optical lens group, an aperture assembly, an objective lens assembly, a collection assembly and a processor. The principle of optical measurement by the optical measurement system is as follows: the carrying module carries and moves the object to be measured to the bottom of the objective lens of the corresponding objective lens assembly, the illumination module emits an illumination beam, and the optical lens group and the aperture assembly adjust the path of the beam so that the beam is irradiated to the surface of the object to be measured and reflected. The reflected beam can be collected by the collection assembly to obtain a corresponding interference signal after beam expansion and shaping by the objective lens assembly, and the processing module processes the interference signal to obtain the final measurement result. The illumination mode of the illumination module can be, for example, Kohler illumination or critical illumination. The aperture assembly includes, for example, an aperture diaphragm and a field diaphragm. The field diaphragm is mainly responsible for controlling the size of the illumination spot, and the aperture diaphragm is mainly responsible for controlling the angle of the light incident on the object to be measured, that is, controlling the NA (numerical aperture) of the illumination system.

[0034] Reference Figure 1 , an optical measurement method provided by an embodiment of the present invention includes:

[0035] S1: a parameter determination step, determining parameter information according to the size parameters of the object to be measured; wherein the parameter information includes a target interference pattern and a target aperture diameter; the target interference pattern is selected from a plurality of interference patterns with different measurement magnifications;

[0036] S2: a measurement result acquisition step, acquiring measurement result information obtained by measuring the object to be measured according to the parameter information;

[0037] S3: a measurement effect judgment step, judging the effect of the measurement according to the measurement result information to obtain a judgment result;

[0038] S4: judgment result processing step, S4.1: when the judgment result is that the measurement result is valid, determine the actual size parameters of the object to be measured according to the measurement result information; otherwise, S4.2: re-determine the target aperture diameter and return to the measurement result acquisition step.

[0039] In this embodiment, the object to be measured is specifically TSV, and the size parameter is, for example, any two of the depth information, width information, and aspect ratio information (i.e., the ratio of the depth information to the width information) of the object to be measured. The target interference pattern can be selected from any one of the Linik interference pattern (Linik type), the Mirau interference pattern (Mirau type), and the Michelson interference pattern (Michelson type). The type of interference pattern corresponds to the type of objective lens of the objective lens assembly. The structural principles of the Linik type, Mirau type, and Michelson type objective lenses can be referred to in turn. Figure 2As mentioned above, the aperture assembly includes an aperture aperture and a field aperture. In this embodiment, the target aperture diameter includes, for example, a target aperture aperture diameter and a target field aperture diameter.

[0040] The existing optical measurement methods for detecting TSVs of different sizes are still immature. The parameters of the optical measurement components, such as the diameter of the aperture stop, the diameter of the field stop, and the interference mode to be used, often rely on the operator's choice based on his or her own experience. Therefore, it is necessary to manually adjust and explore a more suitable parameter combination for measurement. In addition, the most suitable parameter combination cannot be selected in one selection during the measurement process, and the adjustment of different parameters has different effects on the measurement results. Therefore, the existing TSV measurement methods are difficult to operate and do not have the conditions for automated measurement. In particular, different magnifications must be used for TSVs with different aspect ratios, resulting in the incompatibility of existing optical measurement methods with the measurement of TSVs with different aspect ratios.

[0041] The optical measurement method provided by the above embodiment of the present invention first determines the target interference pattern and preliminarily determines the target aperture diameter through the design parameter size of the object to be measured, and then judges the measurement effect. If the measurement result is judged to be valid, the actual size parameter of the object to be measured can be determined according to the measurement result, otherwise the aperture diameter is re-determined to repeat the previous measurement steps until the measurement result is valid. First, after determining a more suitable target interference pattern, this target interference pattern is used as a reference, and the target aperture diameter is adjusted to a suitable parameter combination, and the measurement process is simple and clear. The above method can be used for TSV measurements with different aspect ratios. In addition, the above method can be executed automatically, so an automated measurement solution compatible with TSVs with different aspect ratios can be implemented, thereby achieving an efficient measurement effect.

[0042] In some embodiments, as mentioned in the above embodiments, different objective lens assemblies according to the objective lens type in the optics can be combined with the optical lens group, the aperture assembly and the collection assembly to form different interference modules, for example Figure 3The optical measurement 100 in one embodiment of the present invention shown in the figure includes an illumination module 11, a first interference module 121 and a second interference module 122. The first interference module 121, for example, uses a Linnik type objective lens, and the second interference module 122, for example, uses a Milau and Michelson type objective lens. When the above optical measurement method is used for measurement, the processor can be respectively connected with the necessary components such as the bearing module, the aperture assembly, and the objective lens assembly by signal. After the processor determines the target interference mode in the parameter information in step S1, the bearing device can be controlled to automatically move the object to be measured to the bottom of the corresponding type of objective lens. When a plurality of switchable objective lenses are provided in the objective lens assembly, the processor can also control the switching of the objective lenses in the objective lens assembly. The processor controls the aperture assembly to adjust the diameter according to the aperture diameter parameter, wherein the aperture can be a continuously adjustable aperture or a multi-stem independent switchable aperture. The aperture in the aperture assembly can be an ordinary circular aperture or a soft-edge aperture, which is conducive to eliminating diffraction and reducing the illumination spot. According to the determined parameter information, the acquisition assembly can measure the measurement result information required in step S2 and output it to the processor. Of course, for some optical measurement systems with a single interference pattern or a low degree of automation, the processor can determine the parameter information according to step S1 and output it to the display screen for display, so that the inspection personnel can select a suitable optical measurement system for measurement according to the displayed parameters, or manually switch the objective lens or apertures of different apertures. Nevertheless, this measurement method no longer relies solely on the actual experience of the operator to select and adjust the parameters, and can more quickly and clearly obtain a more suitable parameter combination for measurement, which can still reduce the measurement difficulty and improve the measurement efficiency. It is also compatible with TSV measurements of different aspect ratios.

[0043] In one embodiment, step S1 specifically includes, for example:

[0044] Step S11: determining a detection mode according to the size parameter, wherein the detection mode includes at least one of the multiple interference modes;

[0045] Step S12: if the detection mode is one of the multiple interference modes, determine the target interference mode as the detection mode; if the detection mode includes at least two of the multiple interference modes, determine the target interference mode as the detection mode with the largest magnification among the detection modes.

[0046] Among the various interference modes, the measurement of the Michelson type objective lens is low magnification and low resolution; the measurement magnification of the Millau type objective lens is medium-low magnification and medium resolution, and the medium, low and high magnifications of the Linnik type objective lens can be achieved, depending on the specific objective lens used. Therefore, for some TSVs, there may be a situation where multiple interference modes can be used to effectively measure them. At this time, selecting the target interference mode with the largest magnification in the detection mode can further speed up the measurement speed and improve the measurement efficiency. For example, when the above three interference modes are all detection modes, it is determined that the target interference mode is the Linnik interference mode.

[0047] Specifically, multiple groups of measurement parameter combinations can be preset, each group of measurement parameter combinations can be called a group of candidate parameter information, each group of candidate parameter information corresponds to a measurement mode, and step S1 can determine parameter information according to the size parameter and measurement capability information corresponding to the multiple measurement modes. Specifically, the measurement capability information includes, for example, a measurement threshold corresponding to each of the multiple measurement modes, and the measurement threshold includes, for example, the maximum aspect ratio that can be measured under the measurement mode, the maximum depth that can be measured, etc. The measurement capability information can be stored in the memory in the form of a comparison table for reading and use in the corresponding step.

[0048] Specifically, in one embodiment, step S11 specifically includes:

[0049] Step S111: comparing the multiple groups of measurement threshold information corresponding to the multiple groups of candidate parameter information with the size parameters respectively;

[0050] Step S112: determining optional parameter information in the plurality of sets of candidate parameter information according to the comparison result; each set of candidate parameter information in the plurality of sets of candidate parameter information includes interference pattern information;

[0051] Step S113: Determine the detection mode according to the interference pattern information of the optional parameter information.

[0052] In one embodiment, the size parameter includes aspect ratio information of the object to be measured, and each set of measurement threshold information in the multiple sets of measurement threshold information includes a measurable maximum aspect ratio. Step S111 includes: according to the measurable maximum aspect ratio of the compared threshold information in the multiple sets of measurement threshold information being greater than or equal to the aspect ratio information, determining that the alternative parameter information corresponding to the compared threshold information in the multiple sets of alternative parameter information is the optional parameter information.

[0053] Figure 4 An example of a comparison table of candidate parameter information and measurement threshold information is given. For example, if the aspect ratio of the object to be measured is 2, according to Figure 4According to the comparison table shown, the multiple measurable maximum aspect ratios corresponding to the Michelson interference mode are all greater than the aspect ratio information, so the multiple groups of alternative parameter information corresponding to the Michelson interference mode are all optional parameter information. Among the multiple measurable maximum aspect ratios corresponding to the Miller interference mode, only two are greater than the aspect ratio information, and the corresponding two groups of alternative parameter information are also optional parameter information. Among the multiple measurable maximum aspect ratios corresponding to the Linnick interference mode, only one is greater than the aspect ratio information, and the corresponding group of alternative parameter information is optional parameter information. Therefore, there are a total of 8 groups of optional parameter information. According to the interference mode information in the 8 groups of optional parameter information, there are Michelson interference mode, Miller interference mode, and Linnick interference mode, so the three interference modes are all detection modes. Or the aspect ratio information of the object to be measured is 10, according to Figure 4 As shown in the comparison table, only the Michelson interference mode has two sets of optional parameter information among the multiple sets of alternative parameter information corresponding to the Michelson interference mode, so only the Michelson interference mode is the detection mode.

[0054] In other embodiments, the size parameter includes aspect ratio information and depth information of the object to be measured, and each set of measurement threshold information in the multiple sets of measurement threshold information includes a measurable maximum aspect ratio and a measurable maximum depth. Step S111, for example, includes: determining that the alternative parameter information corresponding to the compared threshold information in the multiple sets of measurement threshold information is the optional parameter information based on the fact that the measurable maximum aspect ratio of the compared threshold information in the multiple sets of measurement threshold information is greater than or equal to the aspect ratio information and the measurable maximum depth is greater than or equal to the depth information. This embodiment further limits the selection of optional parameters by the measurable maximum depth, which is conducive to determining a more suitable target interference mode and improving measurement efficiency.

[0055] Furthermore, similar to the above embodiment, the target aperture diameter can be determined by a correspondence between multiple measurement modes and measurement capabilities. Specifically, the target aperture diameter includes a target aperture aperture diameter, and step S1 further includes: step S13: comparing the multiple groups of measurement threshold information corresponding to the target interference mode to the multiple aperture aperture diameters with the size parameters respectively, and selecting the target aperture aperture diameter from the multiple aperture aperture diameters according to the comparison result.

[0056] For example, refer to Figure 4 For example, the Michelson interference pattern has been determined as the target interference pattern. Figure 4The target aperture diameter can be determined by four sets of measurement threshold information corresponding to four aperture stop diameters. For example, the measurement threshold information includes the maximum measurable aspect ratio. If the aspect ratio information of the object to be measured is 10, the aperture stop diameter of 1.5 mm corresponding to the maximum aspect ratio of 10.89 can be selected as the target aperture stop diameter. The selection basis is to select the aperture stop diameter corresponding to the measurement threshold information that meets the condition of the size parameter and is closest to the size parameter in the multiple sets of measurement threshold information as the target aperture stop diameter.

[0057] Of course, the target aperture stop diameter can also be determined using multiple groups of candidate parameter information and multiple groups of measurement threshold information in the aforementioned step S111. Each group of candidate parameter information includes interference pattern information and aperture stop diameter. The optional parameter information has been determined in the aforementioned step S111. After the target interference pattern is determined in step S12, the target aperture stop diameter can be determined directly according to the optional parameter information corresponding to the target interference pattern. For example, the size parameter is compared with the measurement threshold information corresponding to these optional parameter information, and the aperture stop diameter in the optional parameter corresponding to the measurement threshold information closest to the size parameter is determined as the stop diameter. For example, if the aspect ratio information of the object to be measured is 10, after determining that the Michelson interference pattern is the interference pattern, it is only necessary to compare the maximum measured aspect ratios of 10.89 and 16.35 with the aspect ratio information, wherein the maximum measured aspect ratio of 10.89 is the value closest to the aspect ratio information, and 1.5 mm is selected as the aperture stop diameter.

[0058] In some embodiments, the measurement result information obtained in step S2 is, for example, the interference signal collected by the collection component in the optical measurement. Step S3 is specifically: comparing the interference signal intensity with the intensity threshold, and when the interference signal intensity is greater than or equal to the intensity threshold, the judgment result is that the measurement result is valid. The setting of the intensity threshold can be designed according to actual needs. The intensity threshold is used to judge whether the interference fringes formed after the light beam is reflected by the object to be measured are obvious. When the interference fringes are obvious, the interference signal intensity is large. When the interference signal intensity is greater than or equal to the intensity threshold, it means that the bottom of the TSV hole is detected, and the measurement result is judged to be valid. When the interference fringes are not obvious, the interference signal intensity is small. When the interference signal intensity is less than the intensity threshold, it means that the bottom of the TSV hole is not detected or other reasons lead to poor signal-to-noise ratio, and the judgment result is invalid.

[0059] In some embodiments, re-determining the target measurement information in step S4.2 includes: reducing the diameter of the target aperture stop. According to. The aperture stop determines NA, that is, determines the angle θ of the light incident on the object to be measured, according to Figure 5 It can be seen that when θ decreases, the maximum measurable aspect ratio increases.

[0060] In some embodiments, step S4.2 is specifically: when the target aperture stop diameter is the minimum value among the multiple aperture stop diameters, the target field of view stop diameter is reduced. When the target aperture stop diameter is the minimum value among the multiple aperture stop diameters, if the measurement result is still invalid when step S3 determines, it means that the light projected into the TSV may be incident on the inner wall of the hole, and reflected in the hole to form stray light, which reduces the signal-to-noise ratio at the bottom of the hole, that is, causes poor interference signal. By reducing the target field of view stop diameter, the stray light incident on the inner wall of the hole can be reduced, the signal-to-noise ratio can be improved, and thus the measurement result can be valid.

[0061] [Second embodiment]

[0062] Reference Figure 6 The second embodiment of the present invention provides an optical measurement device 200, including a parameter determination module 21, a measurement result acquisition module 22, a measurement effect judgment module 23, and a judgment result processing module 24. The parameter determination module 21 is used to perform the aforementioned step S1, the measurement result acquisition module 22 is used to perform the aforementioned step S2, the measurement effect judgment module 23 is used to perform the aforementioned step S3, and the judgment result processing module 24 is used to perform the aforementioned step S4. The specific working principle and technical effects of the optical measurement device 200 can refer to the example of the optical measurement method in the aforementioned first embodiment, and will not be repeated here.

[0063] [Third embodiment]

[0064] Reference Figure 7 The third embodiment of the present invention provides an optical measurement system 300, which includes, for example, a processor 301 and a memory 302 connected to the processor 301, wherein the memory 302 stores instructions executed by the processor 301, and the instructions enable the processor 301 to perform operations to perform any one of the optical measurement methods in the first embodiment described above.

[0065] The functions and technical effects of the optical measurement system 300 provided in the third embodiment of the present invention can be referred to the relevant description of the optical measurement method in the first embodiment, which will not be described in detail here.

[0066] [Fourth embodiment]

[0067] Reference Figure 8 The fourth embodiment of the present invention provides a computer-readable medium 400, which stores computer-readable instructions 401. The computer-readable instructions 401 include instructions for executing any one of the optical measurement methods in the first embodiment.

[0068] The functions and technical effects of the computer-readable medium 300 provided in the fourth embodiment of the present invention may refer to the technical effects of the optical measurement method in the first embodiment, and will not be described in detail herein.

[0069] It should be noted that in the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and / or methods can be implemented in other ways. For example, the device embodiments described above are merely schematic. For example, the division of the units / modules is only a logical function division. There may be other division methods in actual implementation, such as multiple units or modules can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0070] The units / modules described as separate components may or may not be physically separated, and the components shown as units / modules may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units / modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0071] In addition, each functional unit / module in each embodiment of the present invention may be integrated into one processing unit / module, or each unit / module may exist physically separately, or two or more units / modules may be integrated into one unit / module. The above-mentioned integrated unit / module may be implemented in the form of hardware or in the form of hardware plus software functional units / modules.

[0072] The above-mentioned integrated unit / module implemented in the form of a software functional unit / module can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium, including a number of instructions for causing one or more processors of a computer device (which can be a personal computer, a server, or a network device, etc.) to perform some steps of the method described in each embodiment of the present invention.

[0073] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of equivalent changes using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. An optical measurement method, characterized in that: include: A parameter determination step, determining parameter information according to the size parameters of the object to be measured; wherein the parameter information includes a target interference pattern and a target aperture diameter; the target interference pattern is selected from a plurality of interference patterns with different measurement magnifications; A measurement result acquisition step, acquiring measurement result information obtained by measuring the object to be measured according to the parameter information; A measurement effect judgment step, judging the effect of the measurement according to the measurement result information to obtain a judgment result; The judgment result processing step is as follows: when the judgment result is that the measurement result is valid, the actual size parameter of the object to be measured is determined according to the measurement result information; otherwise, the target aperture diameter is re-determined and the process returns to the measurement result acquisition step.

2. The optical measurement method according to claim 1, characterized in that: The multiple interference modes include a Miller-type interference mode, a Michelson-type interference mode and a Linnik-type interference mode.

3. The optical measurement method according to claim 1, characterized in that: The parameter determination step specifically includes: determining a detection mode according to the size parameter, the detection mode comprising at least one of the plurality of interference modes; If the detection mode is one of the multiple interference modes, the target interference mode is determined to be the detection mode; if the detection mode includes at least two of the multiple interference modes, the multiple target interference modes are determined to be the detection modes with the largest magnification among the detection modes.

4. The optical measurement method according to claim 3, characterized in that: Determining the detection mode according to the size parameter includes: Compare the multiple groups of measurement threshold information corresponding to the multiple groups of candidate parameter information with the size parameters respectively; Determine optional parameter information in the plurality of sets of candidate parameter information according to the comparison result; each set of candidate parameter information in the plurality of sets of candidate parameter information includes interference pattern information; The detection mode is determined according to the interference pattern information of the optional parameter information.

5. The optical measurement method according to claim 4, characterized in that: The size parameter includes aspect ratio information of the object to be measured, and each set of measurement threshold information in the multiple sets of measurement threshold information includes a maximum measurable aspect ratio; and comparing the multiple sets of measurement threshold information corresponding to the multiple sets of candidate parameter information with the size parameters respectively, and determining the optional parameter information in the multiple sets of candidate parameter information according to the comparison result, comprises: According to the measurable maximum aspect ratio of the compared threshold information in the multiple sets of measurement threshold information being greater than or equal to the aspect ratio information, the candidate parameter information in the multiple sets of candidate parameter information corresponding to the compared threshold information is determined as the optional parameter information.

6. The optical measurement method according to claim 4, characterized in that: The size parameters include aspect ratio information and depth information of the object to be measured, and each set of measurement threshold information in the multiple sets of measurement threshold information includes a measurable maximum aspect ratio and a measurable maximum depth; and the multiple sets of measurement threshold information corresponding to the multiple sets of candidate parameter information are compared with the size parameters respectively, and the optional parameter information in the multiple sets of candidate parameter information is determined according to the comparison result, including: According to the measurable maximum aspect ratio of the compared threshold information in the multiple sets of measurement threshold information being greater than or equal to the aspect ratio information and the measurable maximum depth being greater than or equal to the depth information, the candidate parameter information corresponding to the compared threshold information in the multiple sets of candidate parameter information is determined as the optional parameter information.

7. The optical measurement method according to claim 1, characterized in that: The target aperture diameter includes the target aperture diameter, and the step parameter determination step specifically includes: The target interference patterns are respectively compared with a plurality of groups of measurement threshold information corresponding to a plurality of aperture stop diameters with the size parameters, and the target aperture stop diameter is selected from the plurality of aperture stop diameters according to the comparison result.

8. The optical measurement method according to claim 7, characterized in that: The re-determining the target measurement information includes: reducing the diameter of the target aperture stop.

9. The optical measurement method according to claim 7, characterized in that: The target aperture diameter also includes a target field aperture diameter, and the re-determining the aperture diameter includes: When the target aperture stop diameter is the smallest value among the plurality of aperture stop diameters, the target field stop diameter is reduced.

10. The optical measurement method according to claim 1, characterized in that: The measurement result information includes interference signal strength, and the measurement effect judgment step is specifically: comparing the interference signal strength with a strength threshold, and when the interference signal strength is greater than or equal to the strength threshold, the judgment result is that the measurement result is valid.

11. An optical measuring device, characterized in that: include: A parameter determination module is used to execute the parameter determination step and determine parameter information according to the size parameters of the object to be measured; wherein the parameter information includes a target interference pattern and a target aperture diameter; the target interference pattern is selected from a plurality of interference patterns with different measurement magnifications. A measurement result acquisition module, used to execute the measurement result acquisition step to acquire measurement result information obtained by measuring the object to be measured according to the parameter information; A measurement effect judgment module, used to execute the measurement effect judgment step, judge the effect of the measurement according to the measurement result information, and obtain a judgment result; The judgment result processing module is used to execute the judgment result processing step. When the judgment result is that the measurement result is valid, the actual size parameter of the object to be measured is determined according to the measurement result information; otherwise, the target aperture diameter is re-determined and the process returns to the measurement result acquisition step.

12. An optical measurement system, characterized in that: include: A processor and a memory connected to the processor, wherein the memory stores instructions executed by the processor, wherein the instructions enable the processor to perform operations to perform the optical measurement method according to any one of claims 1 to 10.

13. A computer readable medium, characterized in that The computer-readable medium stores computer-readable instructions, wherein the computer-readable instructions include instructions for executing the optical measurement method according to any one of claims 1 to 10.

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