Quartz ring flatness detector with limiting function

Abstract

The invention discloses a quartz ring flatness detection machine with a limiting function, which comprises a mounting box, a sliding rod is mounted at the top end of the mounting box, a sliding sleeve sleeves the outer side of the sliding rod in a sliding manner, a transverse sliding rod is welded to the outer side of the sliding sleeve, and a sliding block sleeves the outer side of the transverse sliding rod in a sliding manner. The planeness gauge is scientific and reasonable in structure and safe and convenient to use, the planeness gauge can be moved to different positions by screwing the fixing screw rod and then rotating the L-shaped connecting rod, and the planeness gauge is convenient to use and high in practicability. At the moment, the flatness and radian of the quartz ring can be detected through one device, and the quartz ring does not need to be moved to different detection devices, so that the quartz ring is prevented from being abraded and damaged in the moving process, the diversity of detection results is improved, the detection steps are simplified, and the detection efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of flatness detection, in particular to a quartz ring flatness detection machine with a limiting function. Background Art

[0002] Quartz rings are usually used in precision fields such as semiconductor manufacturing. Their flatness has an important impact on product quality and performance, so they need to be tested by special testing machines. Flatness testing machines are a type of equipment used to measure the flatness of workpiece surfaces. They are widely used in manufacturing, mechanical processing, and electronics industries. Flatness is a measure of surface flatness, which is used to describe the degree of deviation between the workpiece surface and an ideal plane. The main function of a flatness testing machine is to detect and evaluate the flatness of the workpiece surface through a high-precision measurement system. Therefore, flatness testing machines are often used to test the flatness of quartz rings.

[0003] However, the existing flatness detection machine can only perform plane detection on the top and bottom ends of the quartz ring, but cannot detect the flatness of the arc surface of the quartz ring. The quartz ring needs to be moved multiple times, which will cause surface wear of the quartz ring, thereby damaging the quartz ring and causing economic losses. In order to avoid the above technical problems, it is indeed necessary to provide a quartz ring flatness detection machine with a limiting function to overcome the above defects in the prior art. Summary of the invention

[0004] The present invention provides a quartz ring flatness detection machine with a limiting function, which can effectively solve the problem proposed in the above background technology that the existing flatness detection machine can only perform plane detection on the top and bottom ends of the quartz ring, but cannot detect the flatness of the arc surface of the quartz ring. The quartz ring needs to be moved multiple times, which will cause surface wear of the quartz ring, thereby damaging the quartz ring and causing economic losses, in order to avoid the above technical problems.

[0005] To achieve the above object, the present invention provides the following technical solution: a quartz ring flatness detection machine with a limit position function, comprising a mounting box, a detection component is installed on the top of the mounting box;

[0006] The detection assembly includes a sliding rod, a sliding sleeve, a transverse sliding rod, a limit screw, a sliding block, a fixed column, an L-shaped connecting rod, a plane positioning hole, an annular positioning hole, a fixed screw, a flatness table, a moving groove, a support seat, a stable groove, a stable annular groove plate, a servo motor, a lubrication box, a sponge chamber, a lubrication sponge, a lubrication groove, a limit slide groove, a liquid outlet hole, an opening and closing threaded rod, an opening and closing groove, a twisting block, a rubber plug, a liquid storage tank, a liquid viewing glass, a scale horizontal line and a lifting groove;

[0007] The top of the installation box is equipped with a sliding rod, the outer side of the sliding rod is slidably sleeved with a sliding sleeve, the outer side of the sliding sleeve is welded with a transverse sliding rod, the inner side of the sliding sleeve is threadedly connected to a limiting screw, the outer side of the transverse sliding rod is slidably sleeved with a sliding block, one end surface of the sliding block is equipped with a fixing column, the outer side of the fixing column is rotatably sleeved with an L-shaped connecting rod, one end surface of the L-shaped connecting rod and the fixing column are horizontally provided with a plane positioning hole, one end surface of the sliding block and the fixing column are vertically provided with an annular positioning hole, the inner side of the L-shaped connecting rod is threadedly connected with a fixing screw, one end surface of the L-shaped connecting rod is installed with a flatness gauge, and the top of the installation box is symmetrically provided with two moving grooves;

[0008] A support seat is installed on the inner side of the installation box, a stabilizing groove is opened on the top of the support seat, a stabilizing ring groove plate is rotatably connected to the inner side of the stabilizing groove, and a servo motor is installed at the middle position of the inner side of the support seat;

[0009] The outer side of the transverse sliding rod is sleeved with a lubrication box, the inner bottom of the lubrication box is provided with a sponge chamber, the inner side of the sponge chamber is embedded with a lubrication sponge, the inner side of the lubrication sponge is provided with a lubrication groove at a position corresponding to the transverse sliding rod, the inner side of the lubrication box is provided with a limiting sliding groove at a position corresponding to the transverse sliding rod, the inner top of the lubrication box is provided with a liquid storage tank, the bottom end of the liquid storage tank is provided with a liquid outlet, an opening and closing threaded rod is slidably installed on the inner side of the liquid outlet, an opening and closing groove is provided at the inner bottom position of the opening and closing threaded rod, a torsion block is welded to the top of the opening and closing threaded rod, a rubber plug is clamped at the top of the lubrication box, a liquid viewing glass is provided on the front end surface of the lubrication box, a scale horizontal line is bonded to the front of the liquid viewing glass, and a lifting groove is provided at the top of the lubrication box and the corresponding position of the opening and closing threaded rod.

[0010] Preferably, a movable hole is provided on the inner side of the sliding sleeve at a position corresponding to the sliding rod, and the sliding sleeve is slidably sleeved on the outer side of the sliding rod through a movable hole.

[0011] Preferably, an angle hole is provided on the inner side of the L-shaped connecting rod at a position corresponding to the fixing screw, and the fixing screw passes through the angle hole and is inserted into the inner side position of the planar positioning hole.

[0012] Preferably, the transmission end of the servo motor is connected to the bottom end of the stabilizing ring groove plate, and the input end of the servo motor is electrically connected to the output end of the external power supply.

[0013] Preferably, the diameter of the opening and closing threaded rod is equal to the diameter of the liquid outlet hole, and the opening and closing threaded rod is threadedly connected to the lubrication box through a lifting groove.

[0014] Preferably, two groups of scale horizontal lines are provided, and the two groups of scale horizontal lines are symmetrically bonded to the front end surface of the liquid viewing glass.

[0015] Preferably, a liquid injection groove is provided at the top of the lubrication box at a position corresponding to the rubber plug, and the rubber plug is clamped at an inner position of the lubrication box through the liquid injection groove.

[0016] Preferably, two groups of the limiting sliding grooves are provided, and the two groups of limiting sliding grooves are symmetrically opened on both side end surfaces of the lubrication box.

[0017] Preferably, a fixing assembly is installed at the top end of the stabilizing ring groove plate;

[0018] The fixing assembly includes a positioning slot, an electromagnet, a mounting block, a positioning block, a positioning sleeve, a positioning slide rod, a supporting spring and a rubber supporting plate;

[0019] The top of the stabilizing ring groove plate is provided with positioning grooves at equal angles, an electromagnet is slidably embedded in the inner side of the positioning groove, a mounting block is installed on the top of the electromagnet, a positioning block is welded to the top of the mounting block, a positioning sleeve is welded on the inner side of the positioning block, a positioning slide rod is slidably embedded in the inner side of the positioning sleeve, a supporting spring is sleeved on the outer side of the positioning slide rod, and a rubber support plate is bonded to one end of the positioning slide rod.

[0020] Preferably, one end of the support spring is spot welded to the positioning block, and the other end of the support spring is spot welded to the rubber support plate.

[0021] Compared with the prior art, the present invention has the following beneficial effects: the present invention has a scientific and reasonable structure and is safe and convenient to use:

[0022] 1. A detection component is provided. By twisting the fixed screw and then rotating the L-shaped connecting rod, the flatness gauge can be moved to different positions. At this time, the flatness and curvature of the quartz ring can be detected by a device, and the quartz ring does not need to be moved to different detection devices, thereby preventing the quartz ring from being worn and damaged during the movement. While improving the diversity of the detection results, the detection steps are simplified to improve the detection efficiency. The lubrication box can be slid on the outside of the horizontal slide bar, and then the movement of the lubrication box will drive the lubrication sponge to lubricate the horizontal slide bar through the lubrication groove. At this time, the sliding block can be moved more smoothly, so that the measurement work can be carried out more quickly, and when the device is in use, the overlapping angle between the lubricating liquid level inside the reservoir and the scale level is observed, so that the measuring device can be quickly leveled.

[0023] 2. A fixing component is provided, and the electromagnet is turned on to fix the position of the mounting block. Then the operator can put the quartz ring on the outside of several rubber support plates. At this time, under the action of multiple support springs, all the positioning slide bars will slide outward on the inside of the positioning sleeve, thereby pushing the rubber support plate to support and fix the adaptation ring, which is convenient for detecting quartz rings of different diameters and improving the use range of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention.

[0025] In the attached picture:

[0026] Figure 1 It is a schematic diagram of the structure of the present invention;

[0027] Figure 2 It is a schematic diagram of the structure of the detection component of the present invention;

[0028] Figure 3 It is a schematic diagram of the installation structure of the servo motor of the present invention;

[0029] Figure 4 It is a schematic diagram of the installation structure of the lubricating sponge of the present invention;

[0030] Figure 5 It is a schematic diagram of the structure of the fixing assembly of the present invention;

[0031] Numbers in the figure: 1. Installation box;

[0032] 2. Detection assembly; 201. Sliding rod; 202. Sliding sleeve; 203. Horizontal sliding rod; 204. Limiting screw; 205. Sliding block; 206. Fixed column; 207. L-shaped connecting rod; 208. Planar positioning hole; 209. Annular positioning hole; 210. Fixed screw; 211. Flatness meter; 212. Moving groove; 213. Support seat; 214. Stable groove; 215. Stable annular groove plate; 216. Servo motor; 217. Lubrication box; 218. Sponge chamber; 219. Lubricating sponge; 220. Lubrication groove; 221. Limiting slide groove; 222. Liquid outlet; 223. Opening and closing threaded rod; 224. Opening and closing groove; 225. Twisting block; 226. Rubber plug; 227. Liquid storage tank; 228. Liquid viewing glass; 229. Scale horizontal line; 230. Lifting tank;

[0033] 3. Fixing assembly; 301. Positioning slot; 302. Electromagnet; 303. Mounting block; 304. Positioning block; 305. Positioning sleeve; 306. Positioning slide bar; 307. Support spring; 308. Rubber support plate; DETAILED DESCRIPTION

[0034] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0035] Example: Figure 1-5As shown, the present invention provides a technical solution, a quartz ring flatness detection machine with a limit function, comprising a mounting box 1, a detection component 2 is installed on the top of the mounting box 1;

[0036] The detection assembly 2 includes a sliding rod 201, a sliding sleeve 202, a transverse sliding rod 203, a limiting screw 204, a sliding block 205, a fixed column 206, an L-shaped connecting rod 207, a plane positioning hole 208, an annular positioning hole 209, a fixed screw 210, a flatness meter 211, a moving groove 212, a support seat 213, a stable groove 214, a stable annular groove plate 215, a servo motor 216, a lubrication box 217, a sponge chamber 218, a lubricating sponge 219, a lubrication groove 220, a limiting sliding groove 221, a liquid outlet hole 222, an opening and closing threaded rod 223, an opening and closing groove 224, a twisting block 225, a rubber plug 226, a liquid storage tank 227, a liquid viewing glass 228, a scale horizontal line 229 and a lifting tank 230;

[0037] A sliding rod 201 is installed at the top of the installation box 1, and a sliding sleeve 202 is slidably sleeved on the outer side of the sliding rod 201. A movable hole is opened on the inner side of the sliding sleeve 202 at a position corresponding to the sliding rod 201. The sliding sleeve 202 is slidably sleeved on the outer side of the sliding rod 201 through a movable hole, which is convenient for adjusting the height. A transverse sliding rod 203 is welded on the outer side of the sliding sleeve 202. The inner side of the sliding sleeve 202 is threadedly connected with a limiting screw 204. A sliding block 205 is slidably sleeved on the outer side of the transverse sliding rod 203. A fixed column 206 is installed on one end surface of the sliding block 205. An L-shaped connecting rod 206 is rotatably sleeved on the outer side of the fixed column 206. 07, a plane positioning hole 208 is provided at the horizontal position of one side end face of the L-shaped connecting rod 207 and the fixed column 206, a ring surface positioning hole 209 is provided at the vertical position of one side end face of the sliding block 205 and the fixed column 206, the inner side of the L-shaped connecting rod 207 is threadedly connected with a fixing screw 210, and an angle hole is provided at the inner side of the L-shaped connecting rod 207 and the corresponding position of the fixing screw 210, and the fixing screw 210 passes through the angle hole and is inserted into the inner position of the plane positioning hole 208, which is conducive to measuring different data, a flatness gauge 211 is installed on one side end face of the L-shaped connecting rod 207, and two moving grooves 212 are symmetrically provided on the top of the installation box 1;

[0038] A support base 213 is installed on the inner side of the installation box 1, and a stabilizing groove 214 is opened on the top of the support base 213. A stabilizing ring groove plate 215 is rotatably connected to the inner side of the stabilizing groove 214. A servo motor 216 is installed at the middle position of the inner side of the support base 213. The transmission end of the servo motor 216 is connected to the bottom end of the stabilizing ring groove plate 215. The input end of the servo motor 216 is electrically connected to the output end of the external power supply, so as to facilitate the uniform rotation of the quartz ring.

[0039] A lubrication box 217 is sleeved on the outer side of the transverse slide bar 203, a sponge chamber 218 is provided at the inner bottom of the lubrication box 217, a lubrication sponge 219 is embedded in the inner side of the sponge chamber 218, a lubrication groove 220 is provided on the inner side of the lubrication sponge 219 at a position corresponding to the transverse slide bar 203, a limiting slide groove 221 is provided on the inner side of the lubrication box 217 at a position corresponding to the transverse slide bar 203, a liquid storage tank 227 is provided on the inner top of the lubrication box 217, a liquid outlet 222 is provided at the bottom end of the liquid storage tank 227, an opening and closing threaded rod 223 is slidably installed on the inner side of the liquid outlet 222, the diameter of the opening and closing threaded rod 223 is equal to the diameter of the liquid outlet 222, the opening and closing threaded rod 223 is threadedly connected to the lubrication box 217 through a lifting groove 230, so as to release the lubricant conveniently, an opening and closing groove 224 is provided at the inner bottom position of the opening and closing threaded rod 223, A twisting block 225 is welded to the top of the closing threaded rod 223, a rubber plug 226 is clamped on the top of the lubrication box 217, a liquid viewing glass 228 is provided on the front end surface of the lubrication box 217, and a liquid injection groove is provided at the top of the lubrication box 217 and the corresponding position of the rubber plug 226. The rubber plug 226 is clamped on the inner position of the lubrication box 217 through the liquid injection groove, which is convenient for adding lubricating liquid. Two groups of limiting slide grooves 221 are provided, and the two groups of limiting slide grooves 221 are symmetrically provided on the two side end surfaces of the lubrication box 217, which is convenient for moving the lubrication box 217. The front of the liquid viewing glass 228 is bonded with scale horizontal lines 229, and two groups of scale horizontal lines 229 are provided. The two groups of scale horizontal lines 229 are symmetrically bonded to the front end surface of the liquid viewing glass 228, which is conducive to quick leveling. A lifting groove 230 is provided at the top of the lubrication box 217 and the corresponding position of the opening and closing threaded rod 223.

[0040] A fixing assembly 3 is installed on the top of the stabilizing ring groove plate 215;

[0041] The fixing assembly 3 includes a positioning groove 301, an electromagnet 302, a mounting block 303, a positioning block 304, a positioning sleeve 305, a positioning slide bar 306, a supporting spring 307 and a rubber supporting plate 308;

[0042] A positioning groove 301 is provided at an equal angle on the top of the stabilizing ring groove plate 215, an electromagnet 302 is slidably embedded in the inner side of the positioning groove 301, a mounting block 303 is installed on the top of the electromagnet 302, a positioning block 304 is welded to the top of the mounting block 303, a positioning sleeve 305 is welded on the inner side of the positioning block 304, a positioning slide bar 306 is slidably embedded in the inner side of the positioning sleeve 305, a supporting spring 307 is sleeved on the outer side of the positioning slide bar 306, a rubber supporting plate 308 is bonded to one end of the positioning slide bar 306, one end of the supporting spring 307 is spot welded to the positioning block 304, and the other end of the supporting spring 307 is spot welded to the rubber supporting plate 308, so as to facilitate the clamping of the quartz ring.

[0043] The working principle and use process of the present invention are as follows: first, the operator fixes the quartz ring on the outside of the rubber support plate 308, and then loosens the limit screws 204 on both sides, and slides the sliding sleeve 202 on the outside of the two sliding rods 201. When the flatness gauge 211 contacts the surface of the quartz ring, tighten the limit screws 204 on both sides, and then slide the sliding block 205 to move the flatness gauge 211 to the position to be detected, and then turn on the servo motor 216, thereby driving the stable ring groove plate 215 to rotate smoothly on the inside of the stable groove 214. At this time, the flatness gauge 211 can be observed to detect the end face flatness of the quartz ring, and then the fixing screw 210 can be screwed, and then the L can be rotated. The L-shaped connecting rod 207 is used to make the flatness gauge 211 parallel to the quartz ring. When the height of the sliding sleeve 202 is adjusted, the flatness gauge 211 will be located on the inner side of the moving groove 212 and adjusted to the outer arc surface of the quartz ring. At this time, the outer arc surface of the quartz ring can be tested for flatness by rotating the stabilizing ring groove plate 215. The flatness gauge 211 can be moved to different positions by twisting the fixing screw 210 and then rotating the L-shaped connecting rod 207. At this time, the flatness and curvature of the quartz ring can be tested by one device without moving the quartz ring to different testing devices, thereby preventing the quartz ring from being worn and damaged during the movement, improving the diversity of the test results, simplifying the test steps and improving the test efficiency;

[0044] Subsequently, after a period of use, the twist block 225 can be rotated upward to drive the opening and closing threaded rod 223 to move upward. At this time, the opening and closing groove 224 will move to the top position of the liquid outlet 222. At this time, the lubricating liquid inside the liquid storage tank 227 will flow from the liquid outlet 222 to the lubricating sponge 219 at the bottom. At this time, the lubrication box 217 can be slid on the outside of the horizontal slide bar 203. Then the movement of the lubrication box 217 will drive the lubrication sponge 219 to lubricate the horizontal slide bar 203 through the lubrication groove 220. At this time, the sliding block 205 can be moved more smoothly, so that the measurement work can be carried out more quickly, and when the device is in use, the overlapping angle between the lubricating liquid level inside the liquid storage tank 227 and the scale level is observed, so that the measuring device can be quickly leveled, and after a period of use, the rubber plug 226 can be opened to add lubricating liquid.

[0045] Next, when testing quartz rings of different diameters, the electromagnet 302 can be turned off first, and then multiple electromagnets 302 can be slid on the inner side of the positioning groove 301 to a suitable radius, and then the electromagnet 302 is turned on to fix the position of the mounting block 303. Then the operator can put the quartz ring on the outside of several rubber support plates 308. At this time, under the action of multiple support springs 307, all the positioning slide rods 306 will slide outward on the inner side of the positioning sleeve 305, thereby pushing the rubber support plate 308 to support and fix the adaptation ring, which is convenient for testing quartz rings of different diameters and improves the use range of the equipment.

[0046] Finally, it should be noted that the above description is only a preferred example of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A quartz ring flatness detection machine with a limit function, comprising a mounting box (1), characterized in that: A detection component (2) is installed on the top of the installation box (1); The detection assembly (2) comprises a sliding rod (201), a sliding sleeve (202), a transverse sliding rod (203), a limiting screw (204), a sliding block (205), a fixed column (206), an L-shaped connecting rod (207), a plane positioning hole (208), an annular positioning hole (209), a fixed screw (210), a flatness meter (211), a movable groove (212), a support seat (213), a stable groove (214), a stable annular groove plate (215), a servo motor (216), a lubrication box (217), a sponge chamber (218), a lubrication sponge (219), a lubrication groove (220), a limiting sliding groove (221), a liquid outlet hole (222), an opening and closing threaded rod (223), an opening and closing groove (224), a twisting block (225), a rubber stopper (226), a liquid storage tank (227), a liquid viewing glass (228), a scale horizontal line (229) and a lifting groove (230); A sliding rod (201) is installed at the top of the installation box (1), a sliding sleeve (202) is slidably sleeved on the outer side of the sliding rod (201), a transverse sliding rod (203) is welded on the outer side of the sliding sleeve (202), a limiting screw (204) is threadedly connected on the inner side of the sliding sleeve (202), a sliding block (205) is slidably sleeved on the outer side of the transverse sliding rod (203), a fixing column (206) is installed on one end face of the sliding block (205), and an L is rotatably sleeved on the outer side of the fixing column (206). A plane positioning hole (208) is provided at a horizontal position between one end surface of the L-shaped connecting rod (207) and the fixed column (206), an annular positioning hole (209) is provided at a vertical position between one end surface of the sliding block (205) and the fixed column (206), a fixing screw (210) is threadedly connected to the inner side of the L-shaped connecting rod (207), a flatness gauge (211) is installed on one end surface of the L-shaped connecting rod (207), and two moving grooves (212) are symmetrically provided at the top of the installation box (1); A support seat (213) is installed on the inner side of the installation box (1); a stabilizing groove (214) is provided on the top of the support seat (213); a stabilizing ring groove plate (215) is rotatably connected to the inner side of the stabilizing groove (214); and a servo motor (216) is installed at the middle position of the inner side of the support seat (213); The outer side of the transverse slide bar (203) is sleeved with a lubrication box (217), the inner bottom of the lubrication box (217) is provided with a sponge chamber (218), the inner side of the sponge chamber (218) is embedded with a lubrication sponge (219), the inner side of the lubrication sponge (219) is provided with a lubrication groove (220) at a position corresponding to the transverse slide bar (203), the inner side of the lubrication box (217) is provided with a limit groove (221) at a position corresponding to the transverse slide bar (203), the inner top of the lubrication box (217) is provided with a liquid storage tank (227), and the bottom end of the liquid storage tank (227) is provided with a liquid outlet hole (220). 2), an opening and closing threaded rod (223) is slidably mounted on the inner side of the liquid outlet hole (222), an opening and closing groove (224) is provided at the inner bottom position of the opening and closing threaded rod (223), a twisting block (225) is welded to the top of the opening and closing threaded rod (223), a rubber plug (226) is clamped at the top of the lubrication box (217), a liquid viewing glass (228) is provided on the front end surface of the lubrication box (217), a scale horizontal line (229) is bonded to the front of the liquid viewing glass (228), and a lifting groove (230) is provided at the top of the lubrication box (217) and at the corresponding position of the opening and closing threaded rod (223).

2. A quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: A movable hole is provided on the inner side of the sliding sleeve (202) at a position corresponding to the sliding rod (201), and the sliding sleeve (202) is slidably sleeved on the outer side of the sliding rod (201) through a movable hole.

3. The quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: An angle hole is provided on the inner side of the L-shaped connecting rod (207) at a position corresponding to the fixing screw (210), and the fixing screw (210) passes through the angle hole and is inserted into the inner side position of the plane positioning hole (208).

4. The quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: The transmission end of the servo motor (216) is connected to the bottom end of the stabilizing ring groove plate (215), and the input end of the servo motor (216) is electrically connected to the output end of an external power source.

5. The quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: The diameter of the opening and closing threaded rod (223) is equal to the diameter of the liquid outlet hole (222), and the opening and closing threaded rod (223) is threadedly connected to the lubrication box (217) through the lifting groove (230).

6. The quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: The scale horizontal lines (229) are provided in two groups, and the two groups of scale horizontal lines (229) are symmetrically bonded to the front end surface of the liquid viewing glass (228).

7. The quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: A liquid injection groove is provided at the top of the lubrication box (217) at a position corresponding to the rubber plug (226), and the rubber plug (226) is clamped at an inner position of the lubrication box (217) through the liquid injection groove.

8. The quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: The limiting sliding grooves (221) are provided in two groups, and the two groups of limiting sliding grooves (221) are symmetrically arranged on the two side end surfaces of the lubrication box (217).

9. The quartz ring flatness detection machine with a limit function according to claim 1, characterized in that: A fixing assembly (3) is installed on the top end of the stabilizing ring groove plate (215); The fixing assembly (3) comprises a positioning groove (301), an electromagnet (302), a mounting block (303), a positioning block (304), a positioning sleeve (305), a positioning slide bar (306), a supporting spring (307) and a rubber supporting plate (308); The top of the stabilizing ring groove plate (215) is provided with a positioning groove (301) at an equal angle, an electromagnet (302) is slidably embedded in the inner side of the positioning groove (301), a mounting block (303) is installed at the top of the electromagnet (302), a positioning block (304) is welded to the top of the mounting block (303), a positioning sleeve (305) is welded to the inner side of the positioning block (304), a positioning slide rod (306) is slidably embedded in the inner side of the positioning sleeve (305), a support spring (307) is sleeved on the outer side of the positioning slide rod (306), and a rubber support plate (308) is bonded to one end of the positioning slide rod (306).

10. The quartz ring flatness detection machine with a limit function according to claim 9, characterized in that: One end of the support spring (307) is spot welded to the positioning block (304), and the other end of the support spring (307) is spot welded to the rubber support plate (308).

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