Bonding door plate test board and test method

Abstract

The invention discloses a bonded door panel test board and a test method, the bonded door panel test board comprises a main cavity, a top cover, a connecting rod, a linear actuator and a drawing opening conversion connector, the top cover is provided with a top cover fixing piece, and the top cover is fixed on the main cavity and is sealed through the top cover fixing piece; the connecting rod is matched with the adjusting gasket, a connecting rod fastener and a bonding valve plate fastener are further arranged on the connecting rod, the connecting rod is fixedly connected with the linear actuator through the connecting rod fastener and connected with a bonding valve plate through the bonding valve plate fastener, and a bonding valve plate sealing ring is arranged on the bonding valve plate. According to the scheme, the problem that no comprehensive test board for the bonded valve plate exists in the market at present is solved, and the service life, the sealing performance and the cleanliness of the bonded valve plate are tested by providing a relatively simple technical scheme.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a bonding door panel test bench and a test method. Background Art

[0002] In the semiconductor field, the door plate of the transfer valve is often used for wafer transfer between various cavities. The main requirements are: reliability, sealing and cleanliness. Because of the ultra-high cleanliness and ultra-high life requirements in the semiconductor industry, a technology that bonds the vulcanized seal to the valve door plate was born. The bonded door plate of this technology has higher life requirements and more reliable cleanliness performance.

[0003] Because directly installing the bonded door panel in the semiconductor equipment for testing may have a significant impact on the equipment performance, it is necessary to pre-test the bonded door panel. However, there is currently no equipment on the market for testing such bonded door panels. Summary of the invention

[0004] In view of the above-mentioned problem of inorganic availability, the present invention provides a bonding door panel test bench and a testing method, which can mainly test the life, sealing performance and cleanliness of the bonding door panel.

[0005] The present invention is achieved by adopting the following technical solutions: In a first aspect, a bonding door panel test bench includes a main cavity, a top cover, a connecting rod, a linear actuator and a drawer conversion joint, wherein a top cover fixing piece is provided on the top cover, and the top cover is fixed on the main cavity and sealed by the top cover fixing piece.

[0006] Specifically, the connecting rod cooperates with the adjusting gasket, and a connecting rod fastener and a bonding valve plate fastener are also provided on the connecting rod. The connecting rod is fixedly connected to the linear actuator through the connecting rod fastener, and a bonding valve plate is connected through the bonding valve plate fastener. A bonding valve plate is provided with a bonding valve plate sealing ring.

[0007] Specifically, the draw-out conversion joint is fixed to the top cover by arranging a conversion joint fastener, and a conversion joint seal is arranged between the draw-out conversion joint and the top cover for sealing.

[0008] Specifically, the linear actuator is provided with a linear actuator fastener and is fixed to the main cavity through the linear actuator fastener, and the linear actuator and the main cavity are sealed by providing an actuator seal.

[0009] Specifically, the main cavity is integrally fixedly connected and arranged on the stand.

[0010] Specifically, the main cavity is also connected to an adapter plate and a particle counter adapter fixedly connected to the adapter plate.

[0011] On the other hand, a test method of a bonded door panel test bench is implemented based on the bonded door panel test bench, including a sealing test and a cleanliness test, wherein the sealing test includes the following steps: Step A1: Use a linear actuator to push the bonding valve plate sealing ring on the bonding valve plate and press it against the inner surface of the main cavity; Step A2: Connect the helium mass spectrometer leak detector to the extraction port adapter; Step A3: Spray oxygen toward the transmission port O in a circle along the rectangular direction to complete the leak rate detection of the bonded valve plate.

[0012] Specifically, the cleanliness detection includes the following steps: Step B1: Set the bonding valve plate to the open state, blow clean gas from the direction of the air inlet A, and connect the air outlet B to the particle counter through the pipeline and the particle counter adapter; Step B2: Purge the entire cavity and the pipeline for a period of time, and when the particle counter reading no longer increases, stop blowing from the air inlet A; Step B3: Turn on the linear actuator to reciprocate and drive the bonded valve plate to press against the inner surface of the main cavity; Step B4: after repeating steps B1 to B3 for a certain number of times, the bonding valve plate is set to an open state; Step B5: Blow clean gas from the direction of air inlet A and observe the reading of the particle counter to obtain the number of contaminated particles generated during the switching process of the bonding valve plate.

[0013] Specifically, the testing method further includes: sorting data on the bonded valve plate after a certain number of tests to determine whether the bonded valve plate can still meet the technical indicators of sealing and cleanliness, and judging the service life of the bonded valve plate.

[0014] The beneficial effect of the present invention is that: the present invention solves the problem that there is no comprehensive test bench for bonded valve plates on the market, and by proposing a relatively simple technical solution, the life, sealing performance and cleanliness of the bonded valve plates can be tested. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0016] Figure 1 This is a schematic diagram of sealing detection in an embodiment of the present invention; Figure 2A schematic diagram of cleanliness detection in an embodiment of the present invention; Figure 3 It is a side cross-sectional view of a test bench for bonding door panels in an embodiment of the present invention; Figure 4 This is a diagram of the closed state of the bonding valve plate in an embodiment of the present invention; Figure 5 This is a schematic diagram of the bonding valve plate in the open state in an embodiment of the present invention; Figure 6 This is a rear view of the bonding door panel test bench in an embodiment of the present invention; Among them, 1-main cavity; 2-top cover; 201-top cover fixing piece; 202-top cover fastener; 3-connecting rod; 31-adjusting gasket; 301-connecting rod fastener; 302-bonding valve plate fastener; 4-linear actuator; 41-actuator extension rod; 401-actuator seal; 402-linear actuator fastener; 5-withdrawal conversion joint; 501-conversion joint fastener; 502-conversion joint seal; 6-bonding valve plate; 601-bonding valve plate seal ring; 7-adapter plate; 8-particle counter adapter; 13-stand; A-air inlet; B-air outlet; C-vacuum outlet, which can be used for vacuuming; O-transmission outlet, which can be used for leak detection. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0018] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0019] The following is combined with Figures 1 to 6 , some embodiments of the present invention are described in detail. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0020] The present invention provides a test bench and a test method for bonding door panels. In this embodiment, Figures 1 to 6 As shown, the bonding door panel test bench includes a main cavity 1, a top cover 2, a connecting rod 3, a linear actuator 4 and a drawer conversion joint 5, and a top cover fixing part 201 is provided on the top cover 2. The top cover 2 is fixed on the main cavity 1 and sealed by the top cover fixing part 201.

[0021] In this embodiment, the connecting rod 3 cooperates with the adjusting gasket 31, and a connecting rod fastener 301 and a bonding valve plate fastener 302 are also provided on the connecting rod 3. The connecting rod 3 is fixedly connected to the linear actuator 4 through the connecting rod fastener 301, and a bonding valve plate 6 is connected through the bonding valve plate fastener 302. The bonding valve plate 6 is provided with a bonding valve plate sealing ring 601.

[0022] In this embodiment, the drawer conversion joint 5 is fixed to the top cover 2 by providing a conversion joint fastener 501, and a conversion joint seal 502 is provided between the drawer conversion joint 5 and the top cover 2 for sealing.

[0023] In one embodiment, the suction port conversion joint 5 is connected to the suction port C and is operated when vacuuming is required.

[0024] In this embodiment, the linear actuator 4 is provided with a linear actuator fastener 402 and is fixed to the main cavity 1 through the linear actuator fastener 402 , and the linear actuator 4 and the main cavity 1 are sealed by providing an actuator seal 401 .

[0025] In this embodiment, the main cavity 1 is integrally fixedly connected to the stand 13 .

[0026] In this embodiment, the main cavity 1 is also connected to an adapter plate 7 and a particle counter adapter 8 fixedly connected to the adapter plate 7 .

[0027] The present invention also proposes a test method corresponding to the bonding door panel test bench, including a sealing test and a cleanliness test, wherein the sealing test includes the following steps: Step A1: using the linear actuator 4 to push the bonding valve plate sealing ring 601 on the bonding valve plate 6 and press it against the inner surface of the main cavity 1; Step A2: Connect the helium mass spectrometer leak detector to the extraction port conversion joint 5; Step A3: Spray oxygen toward the transmission port O in a circle along the rectangular direction to complete the leak rate detection of the bonded valve plate.

[0028] In this embodiment, the cleanliness detection includes the following steps: Step B1: Set the bonding valve plate 6 to an open state, blow clean gas from the direction of the air inlet A, and connect the air outlet B to the particle counter through the pipeline and the particle counter adapter 8; Step B2: Purge the entire cavity and the pipeline for a period of time, and when the particle counter reading no longer increases, stop blowing from the air inlet A; Step B3: Turn on the linear actuator 4 to reciprocate and drive the bonding valve plate 6 to press against the inner surface of the main cavity 1; Step B4: after repeating steps B1 to B3 for a certain number of times, the bonding valve plate 6 is set to an open state; Step B5: Blow clean gas from the direction of the air inlet A and observe the reading of the particle counter to obtain the number of polluted particles generated during the switching process of the bonding valve plate 6.

[0029] In this embodiment, the testing method further includes: sorting data on the bonded valve plate 6 after a certain number of tests to determine whether the bonded valve plate 6 can still meet the technical indicators of sealing and cleanliness, and judging the service life of the bonded valve plate.

[0030] In another embodiment, the attached Figures 1 to 6 For explanation: the top cover 2 is fixed to the main cavity 1 by the top cover fastener 202, and the two are sealed by the top cover fastener 201. The connecting rod 3 is fixedly connected to the actuator extension rod 41 by the connecting rod fastener 301. The connecting rod 3 is fixedly connected to the bonding valve plate 6 by the bonding valve plate fastener 302. The draw-out conversion joint 5 is fixed to the top cover 2 by the conversion joint fastener 501, and the two are sealed by the conversion joint seal 502. The linear actuator 4 is fixed to the main cavity 1 by the linear actuator fastener 402, and the two are sealed by the actuator seal 401. The main cavity 1 is fixedly connected to the stand 13.

[0031] like Figure 2 As shown, the adapter plate 7 is fixedly connected to the main cavity 1, and a seal is provided between the two. Particle counter adapter 8 The particle counter is fixedly connected to the adapter plate 7, and a seal is also provided between the two.

[0032] like Figure 1 , 3 , 4, and 5 illustrate how to perform leak detection on the test bench: use the linear actuator 4 to push the sealing ring 601 of the bonded valve plate to press against the inner surface of the main cavity 1, and then connect the helium mass spectrometer leak detector to the extraction port conversion joint 5. Then spray oxygen toward the transmission port O in a circle along the rectangular direction. This completes the leak rate detection of the bonded valve plate.

[0033] like Figure 2 , 3 As shown in , 4, and 5, how to perform cleanliness test on the test bench is described: First, the bonding valve plate 6 is in an open state. Figure 2As shown, clean gas is blown from the direction of air inlet A, and the air outlet B is connected to the particle counter through a pipeline. After the entire cavity and pipeline are purged for a period of time, when the particle counter reading no longer increases, the blowing from the air inlet A is stopped. At this time, the linear actuator 4 is turned on, and the bonding valve plate 6 is driven back and forth to be pressed against the inner surface of the main cavity 1. After a certain number of reciprocating movements, the bonding valve plate 6 is put into the open state. Start blowing clean gas from the direction of air inlet A, and observe the reading of the particle counter to obtain the number of contaminated particles generated by the switching of the bonding valve plate 6. The cleanliness test of the bonding valve plate 6 is thus completed.

[0034] Furthermore, by collating the data of the bonded valve plate after a certain number of tests, it can be determined whether the bonded valve plate can still meet the technical indicators of sealing and cleanliness, and the service life of the bonded valve plate can be determined.

[0035] For the aforementioned embodiments, for the sake of simplicity, they are all described as a series of action combinations, but those skilled in the art should be aware that the present application is not limited by the order of the actions described, because according to the present application, some steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are preferred embodiments, and the actions involved are not necessarily required by the present application.

[0036] The above embodiments describe the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the changes and modifications made by those skilled in the art shall be within the scope of protection of the appended claims of the present invention without departing from the spirit and scope of the present invention.

Claims

1. A test bench for bonding door panels, characterized in that: The invention comprises a main cavity (1), a top cover (2), a connecting rod (3), a linear actuator (4) and a draw-out conversion joint (5), wherein a top cover fixing piece (201) is provided on the top cover (2), and the top cover (2) is fixed on the main cavity (1) and sealed by the top cover fixing piece (201).

2. A bonding door panel test bench as claimed in claim 1, characterized in that: The connecting rod (3) cooperates with the adjustment gasket (31), and is further provided with a connecting rod fastener (301) and a bonding valve plate fastener (302). The connecting rod (3) is fixedly connected to the linear actuator (4) via the connecting rod fastener (301), and is connected to a bonding valve plate (6) via the bonding valve plate fastener (302). The bonding valve plate (6) is provided with a bonding valve plate sealing ring (601).

3. A bonding door panel test bench as claimed in claim 2, characterized in that: The draw-out conversion joint (5) is fixed to the top cover (2) by providing a conversion joint fastener (501), and a conversion joint seal (502) is provided between the draw-out conversion joint (5) and the top cover (2) for sealing.

4. A bonding door panel test bench as claimed in claim 3, characterized in that: The linear actuator (4) is provided with a linear actuator fastener (402) and is fixed to the main cavity (1) via the linear actuator fastener (402); the linear actuator (4) and the main cavity (1) are sealed by providing an actuator seal (401).

5. A bonding door panel test bench as claimed in claim 4, characterized in that: The main cavity (1) is integrally fixedly connected and arranged on the stand (13).

6. A bonding door panel test bench as claimed in claim 5, characterized in that: The main cavity (1) is also connected to an adapter plate (7) and a particle counter adapter (8) fixedly connected to the adapter plate (7).

7. A method for testing a bonded door panel test bench, implemented based on a bonded door panel test bench according to any one of claims 1 to 6, characterized in that: It includes sealing detection and cleanliness detection, and the sealing detection includes the following steps: Step A1: using the linear actuator (4) to push the bonding valve plate sealing ring (601) on the bonding valve plate (6) to press it against the inner surface of the main cavity (1); Step A2: Connect the helium mass spectrometer leak detector to the extraction port conversion connector (5); Step A3: Spray oxygen toward the transmission port O in a circle along the rectangular direction to complete the leak rate detection of the bonded valve plate.

8. A test method for a bonded door panel test bench as claimed in claim 7, characterized in that: The cleanliness detection comprises the following steps: Step B1: The bonding valve plate (6) is set to an open state, clean gas is blown from the direction of the air inlet A, and the air outlet B is connected to the particle counter through a pipeline and a particle counter adapter (8); Step B2: Purge the entire cavity and the pipeline for a period of time, and when the particle counter reading no longer increases, stop blowing from the air inlet A; Step B3: turning on the linear actuator (4) to reciprocate and drive the bonding valve plate (6) to be pressed against the inner surface of the main cavity (1); Step B4: after repeating steps B1 to B3 for a certain number of times, the bonding valve plate (6) is set to an open state; Step B5: Blow clean gas from the direction of the air inlet A and observe the reading of the particle counter to obtain the number of contaminated particles generated during the switching process of the bonded valve plate (6).

9. A test method for a bonded door panel test bench as claimed in claim 8, characterized in that: The testing method further comprises: collating data on the bonded valve plate (6) after a certain number of tests, determining whether the bonded valve plate (6) can still meet the technical indicators of sealing performance and cleanliness index, and determining the service life of the bonded valve plate.

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