Photoluminescence detection system and detection method

Abstract

A photoluminescence detection system and detection method, the system comprising: a light source configured to emit detection light; the optical shaping unit is configured to shape the detection light to generate a detection light spot; the detection light spot is used for irradiating a to-be-detected piece and enabling to-be-detected features on the to-be-detected piece to photoluminescence; the spectrograph is configured to detect first spectral information of signal light generated by the to-be-detected feature through photoluminescence under the irradiation of the detection light spot; the image detector is configured to detect second spectral information of signal light generated by the to-be-detected feature through photoluminescence under the irradiation of the detection light spot; and the controller has a first detection mode and a second detection mode, and is used for driving the optical shaping unit to generate a point light spot in the first detection mode and detecting the first spectral information by the spectrometer, or driving the optical shaping unit to generate a line light spot in the second detection mode and detecting the second spectral information by the image detector. By detecting the photoluminescence information light, the detection efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device detection, and in particular to a photoluminescence detection system and a detection method. Background Art

[0002] In the existing semiconductor device production, each device on the wafer needs to be tested before packaging or slicing. For some semiconductor devices with photoelectric effect, the commonly used detection method is electrical detection through test equipment or probe stations.

[0003] For example, in the production of LED devices, the use of electroluminescence detection is very time-consuming. In smaller mini-led or micro-led devices, there are millions of grains on a wafer. The time cost of using EL detection for full inspection is extremely high and it is not realistic. Generally, random inspection is adopted. Summary of the invention

[0004] The main technical problem solved by the present invention is that the existing semiconductor devices using electroluminescence detection have the problems of long detection time and single detection means.

[0005] According to the first aspect, an embodiment provides a photoluminescence detection system, comprising:

[0006] a light source configured to emit detection light;

[0007] An optical shaping unit is configured to shape the detection light to generate a detection light spot; the detection light spot is used to illuminate the object to be tested and make the feature to be tested on the object to be tested photoluminescent, and the detection light spot includes a line light spot or a point light spot;

[0008] A spectrometer configured to detect first spectrum information of signal light generated by the feature to be measured through photoluminescence under the irradiation of the detection light spot;

[0009] An image detector configured to detect second spectrum information of signal light generated by the feature to be detected through photoluminescence under the illumination of the detection light spot;

[0010] The controller has a first detection mode and a second detection mode, and is used to drive the optical shaping unit to generate a point light spot in the first detection mode and detect the first spectrum information by the spectrometer, or to drive the optical shaping unit to generate a line light spot in the second detection mode and detect the second spectrum information by the image detector.

[0011] According to the second aspect, an embodiment provides a detection method, comprising:

[0012] Obtaining a detection instruction, and determining a detection mode for the device to be tested according to the detection instruction, where the detection mode includes a first detection mode or a second detection mode;

[0013] In the first detection mode, the optical shaping unit is controlled to shape the detection light emitted by the light source to generate a point light spot, and the spectrometer is controlled to detect first spectrum information of the signal light generated by the feature to be tested on the test piece through photoluminescence under the irradiation of the point light spot;

[0014] Alternatively, in the second detection mode, the optical shaping unit is controlled to shape the detection light emitted by the light source to generate a line spot, and the image detector is controlled to detect second spectral information of the signal light generated by the feature to be tested on the test piece through photoluminescence under the illumination of the line spot.

[0015] According to the photoluminescence detection system and detection method of the above-mentioned embodiment, according to the current detection requirements of the DUT, photoluminescence can be used for detection, and a targeted detection mode can be selected. In the first detection mode, a point light spot is generated and a spectrometer is used to detect the first spectrum information, so that the DUT can be quickly detected; in the second detection mode, a line light spot is generated and an image detector is used to detect the second spectrum information, so that the DUT can be fully detected. Therefore, through photoluminescence, the sampling or comprehensive detection requirements of the DUT can be met, and the detection of the DUT can be completed efficiently. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the structure of a photoluminescence detection system provided by an embodiment of the present application;

[0017] Figure 2 A schematic diagram of the structure of an optical shaping unit provided in one embodiment of the present application;

[0018] Figure 3 A schematic diagram of the structure of an optical path configuration module provided in one embodiment of the present application (I);

[0019] Figure 4 A schematic diagram of the structure of an optical path configuration module provided in one embodiment of the present application (II);

[0020] Figure 5 A schematic diagram of the structure of a second shaping module provided in one embodiment of the present application;

[0021] Figure 6 A flow chart of a detection method provided in one embodiment of the present application.

[0022] Figure numerals: 1-light source; 10-test piece; 2-optical shaping unit; 20-light path configuration unit; 201-beam splitting element; 202-light absorbing element; 203-first reflector; 204-first driving component; 20-light path configuration module; 21-first shaping module; 22-second shaping module; 221-focusing component; 222-focusing component; 3-spectrometer; 4-image detector; 40-imaging module; 5-controller. DETAILED DESCRIPTION

[0023] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0024] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0025] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0026] In the semiconductor field, a device to be tested (such as a wafer or a display panel) has features to be tested or is processed with features to be tested, such as a light emitting diode, etc. These features to be tested are generally detected by electroluminescence.

[0027] Taking light-emitting diodes as an example, the size of Micro LED chips is at the micron level. Due to the small size, high integration and self-luminescence of Micro LED chips, they have greater advantages in brightness, resolution, contrast, energy consumption, service life, response speed and thermal stability compared with LCD and OLED in terms of display.

[0028] There are millions of Micro LED chips on a wafer, so it is unrealistic to conduct a full inspection through PL (electroluminescence) inspection.

[0029] The embodiment of the present application uses photoluminescence to detect the information light of photoluminescence, and determines whether the feature to be tested is qualified by detecting the spectral information, so as to achieve rapid detection. It should be noted that photoluminescence refers to the phenomenon that an object relies on external light source for irradiation to obtain energy, generate excitation and cause luminescence.

[0030] like Figure 1 As shown, an embodiment of the present application provides a photoluminescence detection system, which may include: a light source 1, an optical shaping unit 2, a spectrometer 3, an image detector 4 and a controller 5.

[0031] The light source 1 is configured to emit detection light; for example, the light source 1 may be a high-power laser to provide an excitation source for the photoluminescence of the device under test.

[0032] The optical shaping unit 2 is configured to shape the detection light to generate a detection light spot; the detection light spot is used to illuminate the object to be tested and make the feature to be tested on the object to be tested 10 photoluminescent, and the detection light spot may include a line light spot or a point light spot.

[0033] In the present application, the features to be tested may be, in addition to light-emitting diodes, photovoltaic semiconductors, MOSFETs or silicon wafer grains. These structural features may also produce photoluminescence under laser excitation, and may also be detected using the photoluminescence detection system and detection method provided in the present application.

[0034] The spectrometer 3 is configured to detect first spectrum information of signal light generated by photoluminescence of the feature to be measured under the illumination of the detection light spot.

[0035] The image detector 4 is configured to detect second spectrum information of signal light generated by photoluminescence of the feature to be detected under the illumination of the detection light spot.

[0036] The controller 5 has a first detection mode and a second detection mode, and is used to drive the optical shaping unit 2 to generate a point light spot in the first detection mode and the spectrometer 3 to detect the first spectral information, or to drive the optical shaping unit 2 to generate a line light spot in the second detection mode and the image detector 4 to detect the second spectral information.

[0037] Of course, the photoluminescence detection system may also include optical elements such as reflectors for deflecting the light path. The locations of such optical elements may be flexibly configured as required and are not strictly limited here.

[0038] It should be noted that the spectral information of the information light generated by the characteristic photoluminescence to be measured may include: brightness, main wavelength, peak wavelength, half-wave width, center wavelength, chromaticity coordinates, color purity and color temperature and other information. The first spectral information may include one or more of the above information, and the second spectral information may include one or more of the above information.

[0039] Taking LED as an example, laser can be used to stimulate the LED to undergo energy level transition and generate fluorescence (information light). By obtaining the brightness and wavelength information of the fluorescence, it can be compared with the standard spectrum information to determine whether there is any abnormality in the current LED.

[0040] Among them, the spectrometer 3 and the image detector 4 can actually be used under the line spot or the point spot, but under different combinations, there are differences in the amount of information or reaction speed for the spectral information collection. In the first detection mode, the system provided by the embodiment of the present application uses the spectrometer 3 to detect the first spectral information of the information light generated by the point spot, and uses the image detector 4 to detect the second spectral information of the information light generated by the line spot. Here, a reasonable hardware combination is used to meet different detection needs.

[0041] The combination of the point light spot and the spectrometer 3 can meet the needs of rapid detection, such as product sampling; the combination of the line light spot and the image detector 4 can meet the needs of comprehensive scanning, such as full product inspection.

[0042] For example, although the spectrometer 3 and the line spot can be used in combination, the unreasonable setting of the width and incident angle of the line spot can easily affect the detection results. For example, when using the line spot for spectrum measurement, multiple features to be measured will be illuminated by the spot at the same time and photoluminescence will occur, and the information light of multiple features to be measured will be collected by the spectrometer at the same time, and the spectra of multiple features to be measured will be mixed together, which may interfere with the results and affect the accuracy. In order to avoid such interference, some special calibration and analysis are required before measurement.

[0043] Therefore, in order to improve the accuracy and speed of detection, the present application adopts the combination of a point light spot and a spectrometer 3, and detects the first spectrum information of the information light generated by the feature to be measured in the first detection mode. When using point light spot detection, the size of the point light spot is generally smaller than the size of a single feature to be measured, which can avoid interference from other features to be measured.

[0044] For another example, the image detector 4 can simultaneously collect the second spectrum information of the information light generated by multiple features to be tested to ensure the detection speed required for comprehensive detection. Although the combination of the point light spot and the image detector 4 can also realize the detection of a single feature to be tested, when a large area or full inspection is required, this combination takes a long time and there is a problem of waste of resources.

[0045] Therefore, in the present application, the first detection mode can be understood as a small area detection mode or a single body detection mode, and the second detection mode can be understood as a large area detection mode or a comprehensive detection mode. The photoluminescence detection system provided in the embodiment of the present application can switch the detection mode, adopt the photoluminescence method and adopt different types of light spots and detection instruments (spectrometer 3 and image detector 4) to meet different detection requirements, so as to achieve efficient and accurate detection of the characteristics to be tested of the test piece 10.

[0046] In some embodiments, the photoluminescence detection system may further include a motion platform, which is used to drive the test piece 10 to move along a preset motion direction so that the test features in any area of ​​the test piece 10 can be illuminated by the light spot to achieve comprehensive scanning detection of the test piece 10 or detection of a specified position.

[0047] In some embodiments, Figure 2 As shown, the optical shaping unit 2 may include: an optical path configuration module, a first shaping module 21 and a second shaping module 22 .

[0048] The optical path configuration module 20 is used to configure the transmission optical path of the detection light to guide the detection light to a preset first path and / or second path.

[0049] The first shaping module 21 is disposed on the first path and is configured to shape the detection light into a line spot.

[0050] The second shaping module 22 is disposed on the second path and is configured to shape the detection light into a point light spot.

[0051] The optical path configuration module 20 can guide the detection light to one or both of the first path and the second path by means of light splitting or optical path switching; the first shaping module 21 and the second shaping module 22 can be two independent modules, and the optical elements included in each can be independent. However, it is not excluded that some optical elements may be shared.

[0052] The optical path configuration module 20 is described below.

[0053] In some embodiments, the optical path configuration module 20 may include a beam splitting element 201 and a light absorbing element 202 .

[0054] The beam splitting element 201 is disposed on the transmission optical path of the detection light. The beam splitting element 201 may include a beam splitter, a beam splitter or a beam splitter. Through the reflection and transmission of the beam splitter, the detection light may be split into two independent beams, and guided to the first path and the second path respectively. The light absorbing element 202 may include an optical element with a high absorption coefficient such as a light absorbing plate.

[0055] In the first detection mode, the light absorbing element 202 is placed on the second path to block the detection light entering the second path. The detection light is transmitted through the first path and is shaped into a line light spot after passing through the first shaping module 21. In the second detection mode, the light absorbing element 202 is placed on the first path to block the detection light entering the first path. The detection light is transmitted through the second path and is shaped into a point light spot after passing through the second shaping module 22. At this time, the optical path configuration module 20 may also include a motion device such as a displacement driver for driving the light absorbing element 202 to move. The controller 5 drives the motion device to work according to the detection module to achieve the function of the optical path configuration.

[0056] In some embodiments, Figure 4 As shown, the optical path configuration module 20 may include a first reflector 203 and a first driving component 204 .

[0057] The first driving assembly 204 is configured to drive the first reflecting mirror 203 to move. Figure 4 As shown in (A) in FIG. 1 , in the first detection mode, the first driving component 204 drives the first reflector 203 to cut into the transmission optical path of the detection light, and the detection light enters the first path through the reflection of the first reflector 203, and is then shaped into a line light spot by the first shaping module 21; Figure 4 As shown in (B), in the second detection mode, the first driving component 204 drives the first reflector 203 to cut out the transmission light path of the detection light, so that the detection light enters the second path without hindrance, and is then shaped into a line spot by the second shaping module 22.

[0058] For example, the first driving component 204 may be a device for performing motion such as a displacement actuator, or a device for performing rotational motion such as a rotation actuator, and the switching between the first path and the second path is achieved by driving the first reflector 203 to displace or rotate.

[0059] The following is an explanation of the light spot shaping.

[0060] In some embodiments, the first shaping module 21 may include a converging lens assembly and / or a linear shaping assembly.

[0061] The converging lens assembly is configured to converge the detection light, for example, to focus it into a line light spot. For example, the converging lens assembly may include a lens array composed of a plurality of converging lenses or a gradient refractive index lens.

[0062] For example, a lens array is composed of multiple small lenses, which usually have the same radius of curvature and focal length. When the laser light passes through the lens array, each small lens focuses a part of the laser spot into a small point, and multiple small points form the entire linear spot. The refractive index of a gradient refractive index lens changes with position, usually presenting a conical or rotationally symmetrical shape. By designing and manufacturing a gradient refractive index lens in a specific way, the laser spot can be focused into a linear shape.

[0063] The linear shaping component is configured to change the area through which the detection light passes after convergence, so that the detection light is shaped into a line spot.

[0064] For example, the linear shaping component may include at least one of a linear aperture and a linear pupil. The linear aperture has a controllable optical aperture and can be used to control the amount and shape of light passing through the optical path. The linear pupil can change the propagation direction of the light and the spatial distribution of the light. The linear pupil can convert a circular or other shaped light spot into a linear shape by changing the phase distribution of the light.

[0065] In some embodiments, Figure 5 As shown, the second shaping module 22 may include a focusing component 221 and a focusing component 222, and the focusing component 221 is configured to focus the detection light into a point light spot; for example, the focusing component 221 may include an optical element with focusing capability such as a convex lens or a concave mirror.

[0066] like Figure 5 As shown in (A) and (B) in FIG. 1 , the focus component 222 is configured to adjust the position of the focusing component 221 to change the spot size of the point light spot by adjusting the focal position. The focus component 222 can also be implemented in the form of a linear motion displacement actuator.

[0067] For another example, the focusing component 222 can be replaced by a pupil component or an aperture component, and the size of the point light spot can be changed by changing the luminous flux or aperture of the light output path of the focusing component 221.

[0068] In some embodiments, the controller 5 is further configured to obtain a characteristic size of the feature to be measured, and control the focusing component 222 to adjust the position of the focusing component 221 according to the characteristic size, so that the spot size of the point light spot matches the characteristic size.

[0069] For example, taking the photodiode in the display field as an example, it can be divided into LED, mini-led or micro-led. The size of a single device ranges from millimeter level to micrometer level. Therefore, the size of the point light spot required for a single device is not the same. Therefore, it is necessary to adjust it according to the size of the feature to be measured, which is achieved by adjusting the position of the focusing component 221.

[0070] In some embodiments, Figure 1 As shown, the photoluminescence detection system may further include an imaging module 40 .

[0071] The imaging module 40 is used to collect the signal light generated by the feature to be measured through photoluminescence under the irradiation of the detection spot, and project the image of the signal light onto the image detector 4. The imaging module 40 may include an imaging lens, and may also include optical elements such as filters, so that the image detector 4 can better image and avoid stray light interference.

[0072] In some embodiments, the image detector 4 may be a hyperspectral camera, and the photoluminescence detection system may further include a spectroscopic module.

[0073] The spectroscopic module is arranged on the optical path between the imaging module 40 and the image detector 4, and is used to split the signal light into a plurality of discrete spectral frequency bands; for example, the spectroscopic module may include a grating. The spectroscopic module may be finely split into a plurality of channels in the spectral dimension. What is obtained by the image detector 4 is a data cube, which not only has the image information, but also is expanded in the spectral dimension. As a result, not only the spectral data of each point on the image can be obtained, but also the image information of any spectral band can be obtained.

[0074] The above is a detailed description of the photoluminescence detection system, and the detection method is described below.

[0075] like Figure 6 As shown, the embodiment of the present application also provides a detection method, which may include:

[0076] Step 100: Obtain a detection instruction, and determine a detection mode for the device under test 10 according to the detection instruction. The detection mode may include a first detection mode or a second detection mode.

[0077] Step 201, in a first detection mode, control the optical shaping unit 2 to shape the detection light emitted by the light source 1 to generate a point light spot, and control the spectrometer 3 to detect first spectrum information of the signal light generated by the feature to be tested on the device to be tested 10 through photoluminescence under the irradiation of the point light spot.

[0078] Step 202, in the second detection mode, control the optical shaping unit 2 to shape the detection light emitted by the light source 1 to generate a line spot, and control the image detector 4 to detect the second spectrum information of the signal light generated by the feature to be tested on the test piece 10 through photoluminescence under the illumination of the line spot.

[0079] In some embodiments, the first detection mode is configured to sequentially illuminate a feature to be measured on the test piece 10 using a point light spot, and the first spectrum information is used to quickly analyze the stimulated emission characteristics of the feature to be measured.

[0080] The second detection mode is configured to use a line spot to sequentially illuminate a plurality of features to be measured on the test piece 10 , and the second spectrum information is used to comprehensively analyze the stimulated emission characteristics of the plurality of features to be measured.

[0081] The controller 5 can determine the detection mode required by the test piece 10 according to the detection instruction, and the detection instruction can include a first detection instruction corresponding to the first detection mode and a second detection instruction corresponding to the second detection mode. Under the triggering of the detection instruction, the controller 5 can drive the optical shaping element to shape the light spot, and control the spectrometer 3 or the image detector 4 to detect the spectral information to determine whether the current feature to be tested is qualified.

[0082] In some embodiments, Figure 2 As shown, the optical shaping unit 2 may include an optical path configuration module 20, a first shaping module 21 and a second shaping module 22, for example: the optical path configuration module 20 is used to configure the transmission optical path of the detection light to guide the detection light to a preset first path and / or second path; the first shaping module 21 is arranged on the first path and is configured to shape the detection light into a line light spot; the second shaping module 22 is arranged on the second path and is configured to shape the detection light into a point light spot.

[0083] Among them, in step 201, in the first detection mode, controlling the optical shaping unit 2 to shape the detection light emitted by the light source 1 to generate a point light spot may include:

[0084] The control light path configuration module 20 guides the detection light to the second path, and shapes the detection light into a point light spot through the second shaping module 22 arranged on the second path.

[0085] Among them, in step 202, in the second detection mode, controlling the optical shaping unit 2 to shape the detection light emitted by the light source 1 to generate a line spot may include:

[0086] The control light path configuration module 20 guides the detection light to the first path, and shapes the detection light into a line light spot through the first shaping module 21 arranged on the first path.

[0087] The detection method provided in the embodiment of the present application can select a matching shaping module to shape the detection light according to the setting of the optical shaping unit 2 in the system to obtain a detection light spot matching the current detection mode to meet the needs of rapid detection or comprehensive detection.

[0088] In some embodiments, the second shaping module 22 may include a focusing component 221 and a focusing component 222, wherein the focusing component 221 is configured to focus the detection light into a point light spot; and the focusing component 222 is configured to adjust the position of the focusing component 221 to change the spot size of the point light spot by adjusting the focal position.

[0089] Wherein, in the first detection mode, after controlling the optical shaping unit 2 to shape the detection light emitted by the light source 1 to generate a point light spot, the method may further include:

[0090] The characteristic size of the feature to be measured is obtained, and the focus component is controlled to adjust the position of the focusing component 221 according to the characteristic size, so that the spot size of the point light spot matches the characteristic size.

[0091] When the sizes of the features to be tested on the test piece 10 are different, point light spots of different sizes are used for detection to avoid problems caused by too large or too small light spots, such as interference or too low brightness of the generated information light. By obtaining the characteristic size of the current feature to be tested and adjusting the position of the focusing component 221 according to the characteristic size, the point light spot can be adjusted to ensure the accuracy of the detection.

[0092] In summary, the detection method provided in the present application adopts the method of detecting the information light of the characteristic photoluminescence to be detected, which can correspond to the detection requirements of the object to be tested 10 and the characteristic size, realize efficient and accurate detection, and improve the detection efficiency.

[0093] The detection method provided in the present application is implemented by a terminal device, which may include a memory and a processor. For example, the terminal device may be a computer, a server, or other device with computing and data processing capabilities.

[0094] A memory is used to store a program. A processor is used to implement the detection method described in the above embodiment by executing the program stored in the memory.

[0095] Those skilled in the art will appreciate that all or part of the functions of the various methods in the above-mentioned embodiments can be implemented by hardware or by computer programs. When all or part of the functions in the above-mentioned embodiments are implemented by computer programs, the program can be stored in a computer-readable storage medium, and the storage medium can include: read-only memory, random access memory, disk, optical disk, hard disk, etc., and the program is executed by a computer to implement the above-mentioned functions. For example, the program is stored in the memory of the device, and when the program in the memory is executed by the processor, all or part of the above-mentioned functions can be implemented. In addition, when all or part of the functions in the above-mentioned embodiments are implemented by computer programs, the program can also be stored in a storage medium such as a server, another computer, disk, optical disk, flash disk or mobile hard disk, and can be downloaded or copied and saved in the memory of the local device, or the system of the local device is updated, and when the program in the memory is executed by the processor, all or part of the functions in the above-mentioned embodiments can be implemented.

[0096] This document is described with reference to various exemplary embodiments. However, those skilled in the art will recognize that changes and modifications may be made to the exemplary embodiments without departing from the scope of this document. For example, various operating steps and components for performing the operating steps may be implemented in different ways (e.g., one or more steps may be deleted, modified, or incorporated into other steps) depending on the specific application or considering any number of cost functions associated with the operation of the system.

[0097] Although the principles of this invention have been shown in various embodiments, many modifications of structures, arrangements, proportions, elements, materials and components particularly suitable for specific environments and operational requirements can be used without departing from the principles and scope of this invention. The above modifications and other changes or amendments will be included in the scope of this invention.

[0098] The foregoing specific description has been described with reference to various embodiments. However, those skilled in the art will recognize that various modifications and changes can be made without departing from the scope of the present disclosure. Therefore, the consideration of the present disclosure will be illustrative rather than restrictive, and all these modifications will be included in its scope. Similarly, the advantages, other advantages and solutions to the problems of various embodiments have been described above. However, the benefits, advantages, solutions to the problems and any elements that can produce these, or make them more clear, should not be interpreted as critical, necessary or necessary. The term "include" and any other variants used in this article are all non-exclusive inclusions, so that the process, method, article or device including the list of elements not only includes these elements, but also includes other elements that are not explicitly listed or do not belong to the process, method, system, article or device. In addition, the term "coupled" and any other variants used in this article refer to physical connections, electrical connections, magnetic connections, optical connections, communication connections, functional connections and / or any other connections.

[0099] Those skilled in the art will appreciate that many changes may be made to the details of the above-described embodiments without departing from the basic principles of the invention. Therefore, the scope of the present invention should be determined solely by the claims.

Claims

1. A photoluminescence detection system, characterized in that: include: a light source configured to emit detection light; an optical shaping unit, configured to shape the detection light to generate a detection light spot; The detection light spot is used to illuminate the object to be tested and make the feature to be tested on the object to be tested photoluminescent, and the detection light spot includes a line light spot or a point light spot; A spectrometer configured to detect first spectrum information of signal light generated by the feature to be measured through photoluminescence under the irradiation of the detection light spot; An image detector configured to detect second spectrum information of signal light generated by the feature to be detected through photoluminescence under the illumination of the detection light spot; The controller has a first detection mode and a second detection mode, and is used to drive the optical shaping unit to generate a point light spot in the first detection mode and have the spectrometer detect the first spectral information, or to drive the optical shaping unit to generate a line light spot in the second detection mode and have the image detector detect the second spectral information.

2. The photoluminescence detection system according to claim 1, characterized in that: The optical shaping unit comprises: An optical path configuration module, used for configuring a transmission optical path of the detection light to guide the detection light to a preset first path and / or a second path; A first shaping module, disposed on the first path, configured to shape the detection light into a line spot; The second shaping module is disposed on the second path and is configured to shape the detection light into a point light spot.

3. The photoluminescence detection system according to claim 2, characterized in that: The optical path configuration module includes a beam splitting element and a light absorbing element; The beam splitting element is arranged on the transmission optical path of the detection light; In the first detection mode, the light absorbing element is placed on the second path to block the detection light entering the second path, and in the second detection mode, the light absorbing element is placed on the first path to block the detection light entering the first path.

4. The photoluminescence detection system according to any one of claims 2, characterized in that: The optical path configuration module includes a first reflector and a first driving component; The first driving component is configured to drive the first reflector to move. In the first detection mode, the first driving component drives the first reflector to cut into the transmission optical path of the detection light, so that the detection light enters the first path through reflection by the first reflector; In the second detection mode, the first driving component drives the first reflector to cut out the transmission light path of the detection light, so that the detection light enters the second path without hindrance.

5. The photoluminescence detection system according to claim 2, characterized in that: The second shaping module comprises a focusing component and a focus adjustment component, wherein the focusing component is configured to focus the detection light into a point light spot; The focusing component is configured to adjust the position of the focusing component to change the spot size of the point light spot by adjusting the focal position.

6. The photoluminescence detection system according to claim 5, characterized in that: The controller is further configured to obtain a characteristic size of the feature to be measured, and control the focusing component to adjust the position of the focusing component according to the characteristic size, so that the spot size of the point light spot matches the characteristic size.

7. The photoluminescence detection system according to claim 2, characterized in that: The first shaping module includes a converging lens assembly and / or a linear shaping assembly; The converging lens assembly is configured to converge the detection light; The linear shaping component is configured to change the area through which the concentrated detection light passes, so that the detection light is shaped into a line spot.

8. The photoluminescence detection system according to claim 1, characterized in that: Also includes: The imaging module is used to collect the signal light generated by the feature to be measured through photoluminescence under the irradiation of the detection light spot, and project the imaging of the signal light onto the image detector.

9. The photoluminescence detection system according to claim 8, characterized in that: The image detector is a hyperspectral camera, and the photoluminescence detection system further includes a spectroscopic module; The light splitting module is arranged on the optical path between the imaging module and the image detector, and is used to split the signal light into a plurality of discrete spectral frequency bands; The light splitting module includes a grating.

10. The photoluminescence detection system according to claim 1, characterized in that: The feature to be measured is a light emitting diode, a photovoltaic semiconductor, a MOSFET or a silicon wafer grain.

11. A detection method, characterized in that: include: Obtaining a detection instruction, and determining a detection mode for the device to be tested according to the detection instruction, wherein the detection mode includes a first detection mode or a second detection mode; In the first detection mode, the optical shaping unit is controlled to shape the detection light emitted by the light source to generate a point light spot, and the spectrometer is controlled to detect first spectrum information of the signal light generated by the feature to be tested on the test piece through photoluminescence under the irradiation of the point light spot; Alternatively, in the second detection mode, the optical shaping unit is controlled to shape the detection light emitted by the light source to generate a line spot, and the image detector is controlled to detect the second spectral information of the signal light generated by the feature to be tested on the test piece through photoluminescence under the illumination of the line spot.

12. The detection method according to claim 11, characterized in that: The first detection mode is configured to use a point light spot to successively illuminate a feature to be tested on the test object, and the first spectrum information is used to quickly analyze the stimulated emission characteristics of the feature to be tested; The second detection mode is configured to sequentially illuminate a plurality of features to be measured on the test piece using a line light spot, and the second spectrum information is used to comprehensively analyze the stimulated emission characteristics of the plurality of features to be measured.

13. The detection method according to claim 11, characterized in that: The optical shaping unit includes an optical path configuration module, a first shaping module and a second shaping module; Wherein, in the first detection mode, controlling the optical shaping unit to shape the detection light emitted by the light source to generate a point light spot includes: controlling the optical path configuration module to guide the detection light to a preset second path, and shaping the detection light into a point light spot through the second shaping module arranged on the second path; Among them, in the second detection mode, the optical shaping unit is controlled to shape the detection light emitted by the light source to produce a line light spot, including: controlling the optical path configuration module to guide the detection light to a preset first path, and shaping the detection light into a line light spot through the first shaping module arranged on the first path.

14. The detection method according to claim 13, characterized in that: The second shaping module includes a focusing component and a focusing component, wherein the focusing component is configured to focus the detection light into a point light spot; the focusing component is configured to adjust the position of the focusing component to change the spot size of the point light spot by adjusting the focus position; Among them, in the first detection mode, after controlling the optical shaping unit to shape the detection light emitted by the light source to produce a point light spot, it also includes: obtaining the characteristic size of the feature to be measured, and controlling the focusing component to adjust the position of the focusing component according to the characteristic size so that the spot size of the point light spot matches the characteristic size.

Images