Plate pressing device
Patent Information
- Application Number
- CN202310920536.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-07-25
- Publication Date
- 2025-01-28
AI Technical Summary
When the existing wafer pressing device presses multiple stacked wafers at one time, the stress of each wafer may cause damage or warping due to the different up and down positions.
A board suppression device is designed, which contains a fixed frame and a suppression module. The fixed rack includes multiple fixed plates with upper and lower intervals, and the suppression module includes a activity rack that can displacement from the fixed rack. The activity plate of the activity shelf is staggered with the fixed board, which can be clamped and pressed the board parts together with the fixed board to ensure that the force of each board is consistent.
Through the staggered clamping of the fixed board and the activity board, the uniform suppression of the board is achieved, avoiding the wafer damage or warning caused by unevenness due to unevenness, and ensure the flatness of the board.
Smart Images

Figure CN119381284A_ABST