Movable frame with positioning function

Abstract

A movable frame with a positioning function comprises a frame body, a plurality of movable plates and a plurality of positioning units. The frame body comprises a bottom plate, a plurality of mounting columns which are connected with the bottom plate and extend upwards and a top plate which is connected with the mounting columns, each mounting column forms a plurality of lugs which are arranged at intervals up and down, and the lugs of the mounting columns respectively define a plurality of accommodating grooves which are arranged up and down. The movable plates are arranged in the containing grooves respectively and abut against the protruding pieces. The positioning units are arranged on the mounting columns and abut against the movable plate, and the positioning units can jointly position the movable plate.

Description

Technical Field

[0001] The invention relates to a movable frame, in particular to a movable frame with a positioning function. Background Art

[0002] The manufacturing process of integrated circuits mainly uses wafers as the basic material. After the formation of the surface oxide film and the coating of the photosensitive agent, the exposure and development are combined with the mask to form various types of circuits on the wafer. After etching, removal of the photoresist and addition of impurities, metal evaporation is performed to form the circuits and electrodes of each component. Finally, the wafer probe is tested, and then it is cut into chips. After bonding, wiring and packaging, it is assembled into electronic products. However, during the manufacturing process, the wafer may bend due to grinding, coating or baking, so it is necessary to use a wafer pressing device to flatten the wafer so that the wafer can maintain a better flatness.

[0003] The existing wafer pressing device includes a fixed frame and a movable frame, wherein the fixed frame has a plurality of fixed plates arranged at intervals in the upper and lower parts, and the movable frame has a plurality of movable plates arranged at intervals in the upper and lower parts, and the movable frame is connected to a driving device, and the driving device can drive the movable frame to move relative to the fixed frame to flatten the wafer placed between the fixed plate and the movable plate. However, the movable plate of the existing movable frame may shake and be misaligned relative to the movable frame during the process of flattening the wafer, which may cause the problem that the wafer cannot be flattened uniformly, and there is still room for improvement. Summary of the invention

[0004] One of the objectives of the present invention is to provide a movable frame with a positioning function that can solve at least one of the above problems.

[0005] The movable frame with positioning function described in the present invention comprises a frame body, including a bottom plate, a plurality of mounting posts connected to the bottom plate and extending upward, and a top plate connected to the mounting posts, each mounting post forms a plurality of protrusions arranged at intervals up and down, and the protrusions of the mounting posts respectively define a plurality of receiving grooves arranged up and down; a plurality of movable plates are respectively arranged in the receiving grooves and abut against the protrusions; and a plurality of positioning units are respectively arranged on the mounting posts and abut against the movable plates, and the positioning units can jointly position the movable plates.

[0006] In some implementations, each positioning unit includes a plurality of positioning blocks arranged vertically on the BCPI-230267 Page 2 / 8 protrusion, and the positioning blocks located at the same height jointly position at least one movable plate.

[0007] In some embodiments, each positioning unit includes a plurality of positioning blocks arranged vertically on the protrusion, each positioning block having a base extending vertically, a first protrusion protruding laterally from the lower end of the base, a second protrusion protruding laterally from the base and located above the first protrusion, and a third protrusion protruding laterally from the base and located above the second protrusion, the first protrusion and the second protrusion respectively abut against two movable plates arranged vertically, the base, the first protrusion and the second protrusion jointly define a first opening, and the base, the second protrusion and the third protrusion jointly define a second opening.

[0008] In some embodiments, the first protrusion, the second protrusion and the third protrusion are all square columnar, the three sides of the top surface of the first protrusion not connected to the base are chamfered to form three first inclined surfaces, the three sides of the bottom surface of the second protrusion not connected to the base are chamfered to form three second bottom inclined surfaces, the three sides of the top surface of the second protrusion not connected to the base are chamfered to form three second top inclined surfaces, and the three sides of the bottom surface of the third protrusion not connected to the base are chamfered to form three third inclined surfaces.

[0009] In some embodiments, the positioning block is arranged on the corresponding protrusion of the mounting column in a snap-fitting manner, and each positioning unit also includes a plurality of locking mechanisms arranged on the corresponding mounting column, and the locking mechanisms can stop the positioning block to prevent the positioning block from separating from the mounting column.

[0010] In some embodiments, each locking mechanism includes a fixing plate fixedly disposed on the mounting column and a locking plate movably disposed between the fixing plate and the mounting column, the fixing plate forming a movable groove, the locking plate forming a convex column that can movably pass through the movable groove, and the locking plate can stop the positioning block to prevent the positioning block from separating from the mounting column.

[0011] In some implementations, one of the locking plate and the positioning block forms a positioning bead, and the other forms a positioning hole for the positioning bead to engage with.

[0012] In some implementations, the positioning block is disposed on the corresponding mounting column in a locking manner.

[0013] In some implementations, each positioning unit includes a positioning bar disposed on the corresponding mounting post, and the positioning bars jointly position the movable plate.

[0014] In some implementations, the positioning bars are respectively locked or engaged with the mounting posts.

[0015] In some embodiments, each positioning unit further includes a locking mechanism disposed on the corresponding mounting post, the locking mechanism being capable of blocking the positioning bar to prevent the positioning bar from interlocking with the mounting post.

[0016] Separation.

[0017] In some embodiments, each locking mechanism includes a fixing plate fixedly disposed on the mounting column and a locking plate movably disposed between the fixing plate and the mounting column, the fixing plate forming a movable groove, the locking plate forming a convex column that can movably pass through the movable groove, and the locking plate can stop the positioning bar to prevent the positioning bar from separating from the mounting column.

[0018] In some implementations, one of the locking plate and the positioning strip forms a positioning bead, and the other forms a positioning hole for the positioning bead to engage with.

[0019] The present invention has at least the following effects: the positioning units can jointly position the movable plate, thereby effectively preventing the movable plate from shaking relative to the frame, so that the movable plate can be neatly aligned up and down. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, in which:

[0021] Figure 1 is a fragmentary front view of a first embodiment of a panel pressing device of the present invention disposed in an oven, illustrating a movable frame in an initial position where the panel is not pressed;

[0022] Figure 2 is a three-dimensional exploded view of a positioning unit and a movable plate of a pressing module of the first embodiment;

[0023] Figure 3 is a perspective exploded view of the positioning unit of the first embodiment;

[0024] Figure 4 is an incomplete three-dimensional diagram of a variation of a positioning unit of the first embodiment;

[0025] Figure 5 is a fragmentary front view of the first embodiment, illustrating that the movable frame has pressed the plate;

[0026] Figure 6 yes Figure 1 An incomplete partial enlarged view of the movable frame showing an initial position where the plate is not pressed;

[0027] Figure 7 yes Figure 5 An incomplete partial enlarged view of the movable frame, showing that the movable frame has pressed the plate;

[0028] Figure 8 is similar to Figure 6, illustrating a second embodiment of the plate pressing device of the present invention, wherein the movable frame is in an initial position where the plate is not pressed;

[0029] Fig. 9 is similar to Figure 7 A front view of the movable frame showing that the movable frame has pressed the plate;

[0030] Fig.10 is similar to Figure 6 , illustrating a third embodiment of the plate pressing device of the present invention, wherein the movable frame is in an initial position where the plate is not pressed;

[0031] BCPI-230267 Page 4 / 8

[0032] Fig.11 is similar to Figure 7 A front view of the movable frame showing that the movable frame has pressed the plate;

[0033] Fig.12 is similar to Figure 6 , illustrating a third embodiment of the panel pressing device of the present invention, wherein the pressing member of the pressing module does not press the panel; and

[0034] Fig.13 is similar to Figure 7 , indicating that the pressing part has pressed the plate part. DETAILED DESCRIPTION

[0035] Before the present invention is described in detail, it should be noted that similar elements are denoted by the same reference numerals in the following description.

[0036] See also Figures 1 to 4 A first embodiment of a plate pressing device of the present invention is suitable for being arranged on a bottom wall 11 of an oven 1 to press a plurality of plates W, the plates W being, for example, wafers. The bottom wall 11 has two partitions 12 and a heat-insulating layer 13 defined by the partitions 12. The plate pressing device comprises a fixing frame 2 and a pressing module 10.

[0037] The fixed frame 2 includes a plurality of fixed plates 21 spaced apart from each other. Each fixed plate 21 has a plate body 211 and four stoppers 212 formed above the plate body 211 and capable of abutting against the corresponding plate W. The pressing module 10 includes a plurality of pressing members, which can respectively cooperate with the fixed plates 21 to respectively press the plate W. The pressing module 10 includes a movable frame 3 that can move up and down relative to the fixed frame 2, and the movable frame 3 includes a frame body 31, a plurality of movable plates 32 spaced apart from each other for the plate W to be placed, four positioning units 33, a lifting mechanism 34 connected to the frame body 31, and four distance sensors 35 disposed on the lifting mechanism 34 and located outside the oven 1. The frame 31 includes a bottom plate 311, four mounting posts 312 connected to the bottom plate 311 and extending upward, and a top plate 313 connected to the mounting posts 312. Each mounting post 312 forms a plurality of protrusions 314 arranged in an upper and lower interval, and the protrusions 314 of the mounting posts 312 respectively define a plurality of receiving grooves arranged in an upper and lower interval.

[0038] In this embodiment, the movable plate 32 is used as a pressed part. The movable plate 32 is respectively arranged in the accommodating groove and abuts against the protruding piece 314 to be supported by the protruding piece 314, and is staggered with the fixed plate 21. Each movable plate 32 has a plate body 321, four top columns 322 arranged on the upper surface of the plate body 321 and passing through the corresponding fixed plate 21, and four openings 323 for the limit blocks 212 to pass through respectively. The top columns 322 are suitable for supporting the corresponding plate W. The positioning units 33 are respectively arranged on the mounting columns 312 and abut against the movable plate 32. The positioning units 33 can jointly clamp and position the movable plate 32. Each positioning unit 33 includes a plurality of positioning blocks 331 arranged up and down and arranged on the protruding piece 314 and a plurality of BCPI-230267 Page 5 / 8

[0039] A locking mechanism 332 is disposed on the corresponding mounting post 312 .

[0040] See also Figures 1 to 3The positioning block 331 is provided on the corresponding protruding piece 314 of the mounting column 312 in a snap-fitting manner, but the present invention is not limited thereto. In other embodiments, the positioning block 331 may be provided on the corresponding mounting column 312 in a locking manner. In this embodiment, the positioning blocks 331 at the same height jointly clamp and position two movable plates 32, but the present invention is not limited thereto. In other embodiments, the positioning blocks 331 may jointly clamp and position one or more movable plates 32, but at least one is sufficient. Each positioning block 331 has a base 331a extending up and down, a first protrusion 331b protruding laterally from the lower end of the base 331a, a second protrusion 331c protruding laterally from the base 331a and located above the first protrusion 331b, and a third protrusion 331d protruding laterally from the base 331a and located above the second protrusion 331c. The first protrusion 331b and the second protrusion 331c respectively abut against two movable plates 32 arranged up and down. The base 331a, the first protrusion 331b and the second protrusion 331c jointly define a first opening 331e, and the base 331a, the second protrusion 331c and the third protrusion 331d jointly define a second opening 331f. The first protrusion 331b, the second protrusion 331c and the third protrusion 331d are all in the shape of square columns. The three sides of the top surface of the first protrusion 331b that are not connected to the base 331a are chamfered to form three first inclined surfaces 331b1, the three sides of the bottom surface of the second protrusion 331c that are not connected to the base 331a are chamfered to form three second bottom inclined surfaces 331c1, the three sides of the top surface of the second protrusion 331c that are not connected to the base 331a are chamfered to form three second top inclined surfaces 331c2, and the three sides of the bottom surface of the third protrusion 331d that are not connected to the base 331a are chamfered to form three third inclined surfaces 331d1. The first inclined surface 331b1, the second bottom inclined surface 331c1, the second top inclined surface 331c2 and the third inclined surface 331d1 enable the corresponding movable plate 32 to be removed from the first opening 331e or the second opening 331f for replacement without being easily worn by friction.

[0041] The locking mechanism 332 can stop the positioning block 331 to prevent the positioning block 331 from being separated from the mounting column 312. Each locking mechanism 332 includes a fixed plate 332a fixedly disposed on the mounting column 312 and a locking plate 332b movably disposed between the fixed plate 332a and the mounting column 312, the fixed plate 332a forming a movable groove 332a1, the locking plate 332b forming a convex column 332b1 movably passing through the movable groove 332a1, and the locking plate 332b can stop the positioning block 331 to prevent the positioning block 331 from being separated from the mounting column 312. One of the locking plate 332b and the positioning block 331 forms a positioning bead 331g, and the other forms a positioning hole 332b2 for the positioning bead 331g to engage with, and the locking plate 332b can be positioned on the positioning block 331 by the concave-convex cooperation of the two. In this example, BCPI-230267 Page 6 / 8

[0042] The locking plate 332 b forms the positioning hole 332 b 2 , and the positioning block 331 forms the positioning bead 331 g , but the present invention is not limited thereto.

[0043] See also Figure 3 and Figure 4 The positioning unit has a variation, wherein each positioning unit 33' has a positioning bar 333 disposed on the corresponding mounting post 312 and a locking mechanism 332' disposed on the corresponding mounting post 312. The positioning bar 333 can be used as the positioning block 331 to clamp and position the movable plate 32. The locking mechanism 332' can stop the positioning strip 333 to prevent the positioning strip 333 from being separated from the mounting column 312. The positioning strip 333 is respectively locked or engaged with the mounting column 312. Each locking mechanism 332' includes a fixing plate 332a' fixedly disposed on the mounting column 312 and a locking plate 332b' movably disposed between the fixing plate 21 and the mounting column 312. The fixing plate 332a' forms a movable groove 332a1'. The locking plate 332b' forms a convex column 332b1' that can movably pass through the movable groove 332a1'. The locking plate 332b' can stop the positioning strip 333 to prevent the positioning strip 333 from being separated from the mounting column 312. One of the locking plate 332b' and the positioning bar 333 forms a positioning bead 331g', and the other forms a positioning hole 332b2' for the positioning bead 331g' to engage with. The locking plate 332b' can be positioned on the positioning bar 333 by the concave-convex fit of the two. In this variation, the locking plate 332b' forms the positioning hole 332b2', and the positioning bar 333 forms the positioning bead 331g', but this is not limiting.

[0044] See also Figure 1 and Figure 5The lifting mechanism 34 can drive the frame 31 of the movable frame 3 to move up and down. The lifting mechanism 34 includes a lifting plate 341, four transmission shafts 342 fixed to the lifting plate 341, extending upward through the bottom wall 11 and connected to the frame 31, four telescopic members 343 connected to the lifting plate 341, and a lifting motor 344 connected to the lifting plate 341 and the telescopic members 343. The lifting motor 344 can drive the telescopic members 343 to drive the lifting plate 341 to move up and down, and drive the frame 31 to move up and down through the transmission shafts 342. The distance sensor 35 is used to ensure that the lifting mechanism 34 can be parallel to the bottom wall 11. The pressing module 10 also includes a gas pipeline 4 arranged on the lifting plate 341, and the gas pipeline 4 is used to cool the transmission shaft 342. The gas pipeline 4 includes a diverter 41 and four pipelines 42 connected to the diverter 41 and respectively passing through the transmission shaft 342 and opening at the insulation layer 13. The diverter 41 is connected to a gas supply source (not shown). The nitrogen provided by the gas supply source can cool the transmission shaft 342 and be discharged into the insulation layer 13, which can prevent the transmission shaft 342 from being stuck due to overheating and expansion and thus unable to be lifted or lowered. The discharge port is located in the insulation layer 13 and will not affect the temperature inside the oven 1.

[0045] BCPI-230267 Page 7 / 8

[0046] See also Figure 1 , Figures 5 to 7 In the initial state, the plate W is supported by the top column 322 and is located on the movable plate 32. Figure 1 and Figure 6 As shown. The movable frame 3 can be driven by the lifting mechanism 34 to move downward to press the plate W. In the process of the movable plate 32 moving downward, when the top column 322 does not protrude from the fixed plate 21, the plate W is transferred to the fixed plate 21 and is abutted by the limit block 212 to ensure that the plate W does not deviate. At this time, the limit block 212 passes through the corresponding opening 323. Finally, the movable plate 32 at the top and the fixed plate 21 at the bottom clamp and press the plate W together. Figure 5 and Figure 7 As shown, the plates W are pressed one by one, so that the forces applied to the plates W are consistent, ensuring that the plates W are flat and not damaged or warped.

[0047] See also Figure 8 and Fig. 9A second embodiment of the plate W pressing device of the present invention is similar to the first embodiment, and the difference is that the limit block 212 of the fixed plate 21 is formed below the plate body 211, the movable plate 32 does not have a top column 322, and the plate W is directly placed on the plate body 211 of the movable plate 32. Figure 8 As shown. The movable frame 3 is changed to move upward to press the plate W, and finally the movable plate 32 at the bottom and the fixed plate 21 at the top clamp and press the plate W together, as shown. Fig. 9 As shown, the force applied to the plate W when pressed can also be made consistent, ensuring that the plate W can be flat without being damaged or warped.

[0048] See also Fig.10 and Fig.11 A third embodiment of the plate pressing device of the present invention is similar to the first embodiment, except that: the fixing plate 21 forms four top pillars 213, and in the initial state, the plate W is supported by the top pillars 213 and is located on the fixing plate 21. Fig.10 As shown. The movable frame 3 can be driven by the lifting mechanism 34 to move downward to press the plate W. When the movable plate 32 moves downward, the top column 213 is shortened to not protrude from the plate body 211, and the plate W is transferred to the plate body 211 and is supported by the limit block 212 to ensure that the plate W does not deviate. At this time, the limit block 212 passes through the corresponding opening 323, and finally the movable plate 32 at the top and the fixed plate 21 at the bottom clamp and press the plate W together, as shown in FIG. Fig.11 As shown, the force applied to the plate W when pressed can also be made consistent, ensuring that the plate W can be flat without being damaged or warped.

[0049] See also Fig.12 and Fig.13 The fourth embodiment of the panel W pressing device of the present invention is similar to the first embodiment, and the difference is that the pressing module 10 does not have the movable frame 3 and BCPI-230267 Page 8 / 8

[0050] The pressing member is an air bag 5 which is respectively arranged on the fixing frame 2. The pressing module 10 also includes an inflatable member 6 connected to the pressing member by a plurality of inflatable tubes 7. The inflatable member 6 can inflate the pressing member to press the plate W. Fig.13 As shown, the force applied to the plate W when pressed can also be made consistent, ensuring that the plate W can be flat without being damaged or warped.

[0051] In summary, the movable frame 3 with positioning function of the present invention can clamp and position the movable plate 32 by the positioning units 33 and 33', which can effectively prevent the movable plate 32 from shaking relative to the frame body 31, so that the movable plate 32 can be neatly aligned up and down, thereby achieving the purpose of the present invention.

[0052] The above are merely embodiments of the present invention and should not be used to limit the scope of the present invention. That is, any simple equivalent changes and modifications made according to the claims and description of the present invention still fall within the scope of the present invention.

Claims

1. A movable frame with positioning function, characterized in that: Include: The frame includes a bottom plate, a plurality of mounting posts connected to the bottom plate and extending upward, and a top plate connected to the mounting posts, each mounting post forms a plurality of protrusions arranged in an upper and lower interval, and the protrusions of the mounting posts respectively define a plurality of receiving grooves arranged in an upper and lower interval; A plurality of movable plates are respectively disposed in the receiving grooves and abut against the protruding pieces; and A plurality of positioning units are respectively arranged on the mounting posts and abut against the movable plate, and the positioning units can jointly position the movable plate.

2. The movable frame according to claim 1, characterized in that: Each positioning unit includes a plurality of positioning blocks arranged vertically on the protruding piece, and the positioning blocks located at the same height jointly position at least one movable plate.

3. The movable frame according to claim 1, characterized in that: Each positioning unit includes a plurality of positioning blocks arranged vertically on the protruding piece, each positioning block having a base extending vertically, a first protrusion protruding laterally from the lower end of the base, a second protrusion protruding laterally from the base and located above the first protrusion, and a third protrusion protruding laterally from the base and located above the second protrusion, the first protrusion and the second protrusion respectively abut against two movable plates arranged vertically, the base, the first protrusion and the second protrusion jointly define a first opening, and the base, the second protrusion and the third protrusion jointly define a second opening.

4. The movable frame according to claim 3, characterized in that: The first protrusion, the second protrusion and the third protrusion are all in the shape of square columns. The three sides of the top surface of the first protrusion that are not connected to the base are chamfered to form three first inclined surfaces, the three sides of the bottom surface of the second protrusion that are not connected to the base are chamfered to form three second bottom inclined surfaces, the three sides of the top surface of the second protrusion that are not connected to the base are chamfered to form three second top inclined surfaces, and the three sides of the bottom surface of the third protrusion that are not connected to the base are chamfered to form three third inclined surfaces.

5. The movable frame according to claim 2, characterized in that: The positioning block is a convex piece arranged on the corresponding mounting post in a snap-fitting manner. Each positioning unit also includes a plurality of locking mechanisms arranged on the corresponding mounting post. The locking mechanisms can block the positioning block to prevent the positioning block from being separated from the mounting post.

6. The movable frame according to claim 5, characterized in that: Each locking mechanism includes a fixing plate fixedly disposed on the mounting column and a fixing plate movably disposed on the fixing plate. A locking plate is provided between the fixing plate and the mounting column, wherein the fixing plate forms a movable groove, the locking plate forms a convex column which can movably pass through the movable groove, and the locking plate can stop the positioning block to prevent the positioning block from being separated from the mounting column.

7. The movable frame according to claim 6, characterized in that: One of the locking plate and the positioning block forms a positioning bead, and the other forms a positioning hole for the positioning bead to engage.

8. The movable frame according to claim 2, characterized in that: The positioning block is arranged on the corresponding mounting column in a locking manner.

9. The movable frame according to claim 1, characterized in that: Each positioning unit includes a positioning bar arranged on the corresponding mounting column, and the positioning bars jointly position the movable plate.

10. The movable frame according to claim 9, characterized in that: The positioning bars are respectively locked or engaged with the mounting posts.

11. The movable frame according to claim 9, characterized in that: Each positioning unit further comprises a locking mechanism disposed on the corresponding mounting post, and the locking mechanism can block the positioning strip to prevent the positioning strip from being separated from the mounting post.

12. The movable frame according to claim 11, characterized in that: Each locking mechanism includes a fixing plate fixedly arranged on the mounting column and a locking plate movably arranged between the fixing plate and the mounting column, the fixing plate forms a movable groove, the locking plate forms a convex column that can movably pass through the movable groove, and the locking plate can stop the positioning strip to prevent the positioning strip from separating from the mounting column.

13. The movable frame according to claim 12, characterized in that: One of the locking plate and the positioning strip forms a positioning bead, and the other forms a positioning hole for the positioning bead to engage.

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