Bistable compliant flight shooting mechanism, LDI machine and target identification method

Abstract

The invention relates to the technical field of machine vision, in particular to a bistable compliant flight shooting mechanism, an LDI machine and a target recognition method.The shooting mechanism comprises a base, a lens assembly, a first driving structure, a first bistable flexible structure and a first compliant amplification mechanism, and the first driving structure is installed on the base; the first bistable flexible structure comprises a moving block and a plurality of first bistable flexible beams, the two ends of the plurality of first bistable flexible beams are connected to the base, the moving block is arranged between the two ends of the plurality of first bistable flexible beams, the lens assembly is connected with the moving block, and the output end of the first driving structure is connected with the moving block through the first compliant amplification mechanism. The first driving structure drives the moving block to do lifting motion, so that the first bistable flexible beam is switched between the first stable position and the second stable position, small input displacement of the first driving structure can be converted into large output displacement of the lens assembly through the first compliant amplification mechanism, and the focusing requirement of the lens assembly is met.

Description

Technical Field

[0001] The present invention relates to the technical field of machine vision, and more specifically, to a bistable compliant flying shooting mechanism, an LDI machine and a target recognition method. Background Art

[0002] LDI (Laser direct-imaging) machine is a maskless digital lithography equipment, which often uses DMD (Digital micro-mirror device) to expose PCB (Printed circuit board). Before lithography, target identification and alignment are required. However, traditional LDI machines cannot adjust the focus plane of the shooting component. The warping deformation of the large-area flexible substrate itself, the coupled displacement of the motion system, the environmental vibration, the wear of the kinematic pair, etc. cause defocus, resulting in the degradation of the target identification accuracy, thereby reducing the alignment accuracy and affecting the quality of the subsequent lithography process.

[0003] Machine vision is a detection technology that uses cameras to collect images. It is often used in product inspection, object recognition, positioning and tracking. Traditional machine vision is mainly based on static shooting, that is, the position of the camera relative to the object does not change. Due to the low efficiency of static shooting, flying shooting technology came into being. Since the camera and the object move relative to each other during shooting, motion blur is easily caused. Superimposed defocus blur has a greater impact on the accuracy of target recognition. Therefore, a mechanism that can achieve rapid focusing during flying shooting is required.

[0004] The prior art discloses a camera module, a terminal device and a control method thereof, wherein the camera module comprises a frame, a lens assembly, a bistable component and a driving assembly, wherein: the frame is used to form an external contour structure of the camera module; the lens assembly is used for imaging; the bistable component comprises two end regions, and the region between the two end regions of the bistable component is called other regions, both end regions are fixed to the frame, that is, the two end regions of the bistable component are immovable, and the other regions are used to be fixed to the lens assembly; the axial direction of the lens assembly comprises a relative first direction and a second direction; the bistable component has a first stable position and a second stable position, and in the first stable position, the other regions can protrude toward the first direction relative to the end regions; in the second stable position, the other regions can protrude toward the second direction relative to the end regions; the driving assembly can drive the bistable component to switch between the first stable position and the second stable position, and then can drive the lens assembly to adjust its position, however, in this scheme, the driving assembly needs to cause an equal displacement when driving the bistable component, and limited by the driving assembly, the displacement that can occur to the bistable component and the lens assembly connected thereto is relatively small. Summary of the invention

[0005] The purpose of the present invention is to overcome the disadvantage of the prior art that the displacement of the lens assembly is small, and to provide a bistable flexible flight shooting mechanism, an LDI machine and a target recognition method, which can amplify the displacement of the lens assembly and meet the lens focusing needs.

[0006] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0007] A bistable compliant flying shooting mechanism is provided, comprising a base, a lens assembly, a first driving structure and a first bistable flexible structure, wherein the first driving structure is installed on the base, the first bistable flexible structure comprises a moving block and a plurality of first bistable flexible beams, both ends of the plurality of first bistable flexible beams are connected to the base, the moving block is arranged between the two ends of the plurality of first bistable flexible beams, the lens assembly is connected to the moving block, the output end of the first driving structure is connected to the moving block, the first driving structure drives the moving block to move up and down along the base, so that the first bistable flexible beam switches between a first stable position and a second stable position; and further comprising a first compliant amplifying mechanism for amplifying the displacement of the moving block when the first driving structure drives the moving block, the output end of the first driving structure is connected to one end of the first compliant amplifying mechanism, and the other end of the first compliant amplifying mechanism is connected to the moving block.

[0008] The bistable compliant flying shooting mechanism of the present invention utilizes a first driving structure to drive a moving block and a lens assembly to move through a first compliant amplifying mechanism. The movement of the moving block causes the first bistable flexible beam to deform. During the deformation process, the rigidity of the first bistable flexible structure is small, which can reduce the energy consumption of the adjustment process. When the first bistable flexible beam is deformed to the first stable position or the second stable position, the lens assembly has different focal lengths. At this time, the first bistable flexible structure has a large rigidity and high shooting stability. The coordinates of the target center and other information can be calculated by fusing two sets of pictures taken at the first stable position and the second stable position, thereby improving the accuracy of target identification and anti-interference performance. Among them, the first compliant amplifying mechanism can be used to realize the conversion of a small input displacement of the first driving structure into a large output displacement of the moving block and the lens assembly, thereby meeting the focusing needs of the lens assembly.

[0009] Furthermore, the first compliant amplification mechanism includes an input block, a first flexible rod, a second flexible rod, a first-stage amplification rod, a second-stage amplification rod, a third-stage amplification rod, and a plurality of the flexible beams. The input block is connected to the base through the flexible beams. The output end of the first driving structure is connected to the input block. One end of the input block is flexibly hinged between the two ends of the first-stage amplification rod. The other end of the input block is flexibly hinged to one end of the first flexible rod. One end of the first-stage amplification rod is flexibly hinged between the two ends of the second-stage amplification rod. The other end of the first-stage amplification rod is connected to the base. One end of the second-stage amplification rod is flexibly hinged to the base. The other end of the second-stage amplification rod is connected to one end of the third-stage amplification rod through the flexible beam. The other end of the first flexible rod is connected through the flexible beam between the middle of the third-stage amplification rod and one end of the third-stage amplification rod. The other end of the third-stage amplification rod is connected to the moving block through the flexible beam.

[0010] Furthermore, an output block is further included. The moving block is connected to the output block through a flexible beam. The lens assembly is mounted on the output block.

[0011] Furthermore, a second driving structure and a second bistable flexible structure are further included. The second driving structure is mounted on the base. The second bistable flexible structure includes a moving platform and a plurality of second bistable flexible beams. The top and bottom of the moving platform are respectively connected to the base through a plurality of the second bistable flexible beams. The output end of the second driving structure is connected to the moving platform. The second driving structure drives the moving platform to move horizontally along the base. The output block is located in the middle of the moving platform. The two sides of the top and the two sides of the bottom of the output block are respectively connected to the moving platform through four groups of composite connection structures. The four groups of composite connection structures are centrosymmetric about the center of the output block.

[0012] Furthermore, each group of the composite connection structures includes a plurality of composite flexible beams and a plurality of composite rigid blocks. The plurality of composite flexible beams are arranged in parallel. The plurality of composite flexible beams are perpendicular to the composite rigid blocks. The adjacent two composite flexible beams in the same group of composite connection structures are connected into a "C" shape through the composite rigid blocks. Only the two composite flexible beams with one end connected to the composite rigid block in each group of composite connection structures are respectively connected to the moving platform and the output block.

[0013] Furthermore, it also includes a second flexible amplification mechanism for amplifying the displacement of the moving table when the second driving structure drives the moving table, the second flexible amplification mechanism includes a transverse amplification rod, the output end of the second driving structure is connected to one end of the transverse amplification rod, the base is flexibly hinged between the middle part of the transverse amplification rod and one end of the transverse amplification rod, and the other end of the transverse amplification rod is connected to the moving table through the flexible beam.

[0014] Furthermore, both the first driving structure and the second driving structure are piezoelectric drivers.

[0015] Furthermore, the lens assembly includes a moving bracket, a fixed block and a lens, the fixed block is connected to the moving bracket, the lens is clamped by the fixed block and the moving bracket, and the moving bracket is fixedly connected to the output block.

[0016] The present invention also provides an LDI machine, comprising a machine platform, a first motion system, a substrate, a second motion system, a bottom plate and the above-mentioned bistable flexible flight shooting mechanism, wherein the first motion system and the second motion system are installed on the machine platform, the output end of the first motion system is connected to the substrate, the first motion system drives the substrate to move in a horizontal plane, the base is fixed to the bottom plate through a supporting back plate, the output end of the second motion system is connected to the bottom plate, and the second motion system drives the bottom plate to move laterally along the machine platform.

[0017] The LDI machine of the present invention drives the substrate through the first motion system, and drives the bottom plate and the bistable flexible flying shooting mechanism and the light source component thereon through the second motion system, so as to perform flying shooting of the target on the substrate, wherein the bistable flexible flying shooting mechanism can realize the bistable focusing of the lens component, and shooting at the first stable position and the second stable position can improve the shooting stability, improve the imaging quality, and improve the production quality of the LDI machine. By fusing the two groups of pictures shot at the first stable position and the second stable position to calculate the information such as the center of the target, the accuracy of target identification and the anti-interference performance are improved, and the first flexible amplification mechanism of the bistable flexible flying shooting mechanism can realize the amplification of the displacement of the lens component, and realize the large output displacement by using the small input displacement to meet the focusing requirements.

[0018] The present invention also provides a target recognition method, which is applied to the above-mentioned LDI machine, and the method comprises:

[0019] The base plate is driven by the first motion system, and the bottom plate and the bistable compliant flight shooting mechanism are driven by the second motion system to coordinate the flight shooting;

[0020] The first driving structure drives the first bistable flexible structure to adjust the lens assembly. When the first bistable flexible beam is in the first stable position and the second stable position, pictures are taken above the target of the substrate respectively, and the target information is calculated by fusing the two sets of pictures.

[0021] The target recognition method of the present invention can convert a small input displacement into a large output displacement through a first compliant amplification mechanism to meet the focusing needs of a lens assembly, and can shoot at a first stable position and a second stable position to improve shooting stability, improve imaging quality, and improve the production quality of an LDI machine. Through fusion calculation of two groups of pictures shot at the first stable position and the second stable position, the accuracy degradation of flying target search caused by defocusing caused by warping deformation of a large-area flexible substrate, coupled displacement of a motion system, environmental vibration, wear of motion pairs, etc. is effectively improved, and the accuracy of target identification and anti-interference performance are improved.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. Through the first compliant amplification mechanism, the small input displacement of the first driving structure can be converted into a large output displacement of the moving block and the lens assembly, meeting the focusing needs of the lens assembly;

[0024] 2. Through the first bistable flexible structure, the energy consumption of the focusing process is reduced, the shooting stability is improved in the stable position with high rigidity, and the accuracy of target identification and anti-interference performance are improved;

[0025] 3. The motion guidance of the output block and the lens assembly is achieved through the second bistable flexible beam, the motion platform and the composite connection structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A three-dimensional diagram of a bistable compliant flight shooting mechanism in an embodiment of the present invention;

[0027] Figure 2 Schematic diagram of the installation of the first compliant amplifying mechanism in an embodiment of the present invention;

[0028] Figure 3 An exploded view of a bistable compliant flight shooting mechanism in an embodiment of the present invention;

[0029] Figure 4 Schematic diagram of the structure of the LDI machine in an embodiment of the present invention.

[0030] In the accompanying drawings: 1-base; 2-lens assembly; 201-moving bracket; 202-fixed block; 203-lens; 3-first driving structure; 4-first flexible amplification mechanism; 401-input block; 402-first flexible rod; 403-second flexible rod; 404-first-stage amplification rod; 405-second-stage amplification rod; 406-third-stage amplification rod; 5-first bistable flexible beam; 6-moving block; 7-flexible beam; 8-output block; 9- The second driving structure; 10-lateral amplification rod; 11-moving table; 12-second bistable flexible beam; 13-composite flexible beam; 14-composite rigid block; 15-light source assembly; 1501-light source box; 1502-first bracket; 1503-light source; 1504-second bracket; 16-support back plate; 17-light source back plate; 18-bottom plate; 19-machine table; 20-first motion system; 21-base plate; 22-second motion system. DETAILED DESCRIPTION

[0031] The present invention is further described below in conjunction with specific implementation methods. The accompanying drawings are only used for exemplary descriptions and are only schematic diagrams, not actual drawings, and cannot be understood as limiting this patent; in order to better illustrate the embodiments of the present invention, some parts of the accompanying drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the accompanying drawings may be omitted.

[0032] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limitations on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0033] Embodiment 1

[0034] This embodiment is the first embodiment of a bistable compliant flight shooting mechanism. Figure 1 , Figure 2As shown, it includes a base 1, a lens assembly 2, a first driving structure 3 and a first bistable flexible structure, the first driving structure 3 is installed on the base 1, the first bistable flexible structure includes a moving block 6 and a plurality of first bistable flexible beams 5, both ends of the plurality of first bistable flexible beams 5 are connected to the base 1, the moving block 6 is arranged between the two ends of the plurality of first bistable flexible beams 5, the lens assembly 2 is connected to the moving block 6, the output end of the first driving structure 3 is connected to the moving block 6, the first driving structure 3 drives the moving block 6 to move up and down along the base 1, so that the first bistable flexible beam 5 switches between the first stable position and the second stable position; it also includes a first flexible amplifying mechanism 4 for amplifying the displacement of the moving block 6 when the first driving structure 3 drives the moving block 6, the output end of the first driving structure 3 is connected to one end of the first flexible amplifying mechanism 4, and the other end of the first flexible amplifying mechanism 4 is connected to the moving block 6.

[0035] The above-mentioned bistable flexible flying shooting mechanism utilizes the first driving structure 3 to drive the moving block 6 and the lens assembly 2 to move through the first flexible amplifying mechanism 4. The movement of the moving block 6 causes the first bistable flexible beam 5 to deform. During the deformation process, the rigidity of the first bistable flexible structure is small, which can reduce the energy consumption of the adjustment process; when the first bistable flexible beam 5 is deformed to the first stable position or the second stable position, the lens assembly 2 has different focal lengths. At this time, the first bistable flexible structure has a large rigidity and high shooting stability. The two sets of pictures taken at the first stable position and the second stable position can be used to fuse and calculate the information such as the center of the target coordinates, thereby improving the accuracy of target identification and anti-interference performance. Among them, the first flexible amplifying mechanism 4 can be used to realize the conversion of the small input displacement of the first driving structure 3 into a large output displacement of the moving block 6 and the lens assembly 2, thereby meeting the focusing needs of the lens assembly 2.

[0036] like Figure 1 , Figure 2As shown, the first flexible amplification mechanism 4 includes an input block 401, a first flexible rod 402, a second flexible rod 403, a first-stage amplification rod 404, a second-stage amplification rod 405, a third-stage amplification rod 406 and a plurality of flexible beams 7. The input block 401 is connected to the base 1 through the flexible beams 7. The output end of the first driving structure 3 is connected to the input block 401. One end of the input block 401 is flexibly hinged between the two ends of the first-stage amplification rod 404. The other end of the input block 401 is flexibly hinged to one end of the first flexible rod 402. The first-stage amplification rod One end of 404 is flexibly hinged between the two ends of the second-stage amplifying rod 405, the other end of the first-stage amplifying rod 404 is connected to the base 1, one end of the second-stage amplifying rod 405 is flexibly hinged to the base 1, the other end of the second-stage amplifying rod 405 is connected to one end of the third-stage amplifying rod 406 through the flexible beam 7, the other end of the first flexible rod 402 is connected between the middle part of the third-stage amplifying rod 406 and one end of the third-stage amplifying rod 406 through the flexible beam 7, and the other end of the third-stage amplifying rod 406 is connected to the moving block 6 through the flexible beam 7. During implementation, the first driving structure 3 drives the input block 401, which pushes the first-stage amplifying rod 404 to rotate through the input block 401, and the displacement of one end of the first-stage amplifying rod 404 relative to the hinge position of the first-stage amplifying rod 404 and the input block 401 increases. The first-stage amplifying rod 404 pushes the second-stage amplifying rod 405 to rotate, and the displacement of the other end of the second-stage amplifying rod 405 relative to the hinge position of the second-stage amplifying rod 405 and the first-stage amplifying rod 404 increases. The second-stage amplifying rod 405 pushes the third-stage amplifying rod 406 to rotate, and the displacement of the other end of the third-stage amplifying rod 406 relative to the hinge position of the third-stage amplifying rod 406 and the second-stage amplifying rod 405 increases. The small input displacement of the first driving structure 3 is converted into a large output displacement of the moving block 6 through multi-stage displacement increase.

[0037] like Figure 2 As shown, it also includes an output block 8, the moving block 6 is connected to the output block 8 through a flexible beam 7, and the lens assembly 2 is installed on the output block 8. During implementation, the moving block 6 and the flexible beam 7 drive the lens assembly 2 to move up and down along the base 1 to achieve focusing of the lens assembly 2.

[0038] like Figure 1 As shown, the lens assembly 2 includes a moving bracket 201, a fixed block 202 and a lens 203, the fixed block 202 is connected to the moving bracket 201, the lens 203 is clamped by the fixed block 202 and the moving bracket 201, and the moving bracket 201 is fixedly connected to the output block 8. During implementation, the lens 203 and the output block 8 are fixed by the fixed block 202 and the moving bracket 201 to achieve synchronous movement of the lens 203 and the output block 8, and when the first driving structure 3 drives the output block 8 to rise and fall, the lens 203 is focused along with the output block 8 to rise and fall.

[0039] Embodiment 2

[0040] This embodiment is the second embodiment of the bistable compliant flight shooting mechanism. This embodiment is similar to the first embodiment, except that it further includes a second driving structure 9 and a second bistable flexible structure. As shown in Figure 1 and Figure 2 , the second driving structure 9 is installed on the base 1. The second bistable flexible structure includes a moving platform 11 and a plurality of second bistable flexible beams 12. The top and bottom of the moving platform 11 are respectively connected to the base 1 through a plurality of second bistable flexible beams 12. The output end of the second driving structure 9 is connected to the moving platform 11. The second driving structure drives the moving platform 11 to move laterally along the base 1. The output block 8 is located in the middle of the moving platform 11. The two sides of the top and the two sides of the bottom of the output block 8 are respectively connected to the moving platform 11 through four groups of composite connection structures. The four groups of composite connection structures are centrosymmetric about the center of the output block 8. During implementation, the second driving structure 9 drives the moving platform 11 to move laterally, deforming the second bistable flexible beams 12 and driving the composite connection structures and the output block 8 to move laterally, thereby realizing the lateral movement of the lens assembly 2; and the output block 8 is located in the middle of the moving platform 11, which can avoid the interference between the lateral movement and the lifting movement of the output block 8; at the same time, when the first driving structure 3 drives the output block 8 to move up and down, the output block 8 can be guided through the second bistable flexible beams 12 and the composite connection structures.

[0041] As shown in Figure 2 , each group of composite connection structures includes a plurality of composite flexible beams 13 and a plurality of composite rigid blocks 14. The plurality of composite flexible beams 13 are arranged in parallel, and the plurality of composite flexible beams 13 are perpendicular to the composite rigid blocks 14. The adjacent two composite flexible beams 13 in the same group of composite connection structures are connected into a "C" shape through the composite rigid blocks 14. The two composite flexible beams 13 with only one end connected to the composite rigid block 14 in each group of composite connection structures are respectively connected to the moving platform 11 and the output block 8. When the second driving structure 9 drives the moving platform 11 to move laterally, the composite flexible beams 13, the moving platform 11, the second bistable flexible beams 12 and the base 1 form a parallelogram structure, which can play a guiding role.

[0042] It further includes a second compliant amplification mechanism for amplifying the displacement of the moving platform 11 when the second driving structure 9 drives the moving platform 11. As shown in Figure 1 and Figure 2As shown, the second compliant amplification mechanism includes a transverse amplification rod 10, the output end of the second driving structure 9 is connected to one end of the transverse amplification rod 10, the base 1 is flexibly hinged between the middle part of the transverse amplification rod 10 and one end of the transverse amplification rod 10, and the other end of the transverse amplification rod 10 is connected to the motion platform 11 through the flexible beam 7. During implementation, the output end of the second driving structure 9 drives the transverse amplification rod 10 to rotate around the hinge position of the transverse amplification rod 10 and the base 1, and the displacement of the end of the transverse amplification rod 10 connected to the motion platform 11 relative to the end of the transverse amplification rod 10 connected to the second driving structure 9 is increased, thereby achieving a larger displacement of the motion platform 11 and the output block 8.

[0043] The first driving structure 3 and the second driving structure 9 are both piezoelectric drivers. The piezoelectric driver has a fast response speed, can complete the switching action within the nanometer level, and has a high positioning accuracy, and can adjust the lens assembly 2 quickly and accurately.

[0044] like Figure 1 , Figure 3 and Figure 4 As shown, the light source assembly 15 is also included, and the light source assembly 15 is fixed to the bottom plate 18 through the light source back plate 17. Specifically, the light source assembly 15 includes a light source box 1501, a first bracket 1502, a light source 1503, and a second bracket 1504. The first bracket 1502 and the second bracket 1504 are respectively connected to the light source back plate 17, the light source box 1501 is installed on the first bracket 1502, the light source 1503 is installed at the bottom of the second bracket 1504, and the light source box 1501 is located between the lens assembly 2 and the light source 1503. During implementation, the light source 1503 illuminates the object to be photographed, and the lens assembly 2 photographs the object to be photographed.

[0045] Embodiment 3

[0046] This embodiment is the first embodiment of the LDI machine. Figure 4 As shown, it includes a platform 19, a first motion system 20, a substrate 21, a second motion system 22, a bottom plate 18, and a bistable flexible flying shooting mechanism of embodiment one or embodiment two. The first motion system 20 and the second motion system 22 are installed on the platform 19, the output end of the first motion system 20 is connected to the substrate 21, the first motion system 20 drives the substrate 21 to move in a horizontal plane, the base 1 is fixed to the bottom plate 18 through the supporting back plate 16, the output end of the second motion system 22 is connected to the bottom plate 18, and the second motion system 22 drives the bottom plate 18 to move laterally along the platform 19.

[0047] The above-mentioned LDI machine drives the substrate 21 through the first motion system 20, and drives the bottom plate 18 and the bistable flexible flying shooting mechanism thereon through the second motion system 22, so as to perform flying shooting of the target on the substrate 21, wherein the bistable flexible flying shooting mechanism can realize the bistable focusing of the lens assembly 2, and shoot at the first stable position and the second stable position, which can improve the shooting stability, improve the imaging quality, and improve the production quality of the LDI machine. By fusing the two sets of pictures shot at the first stable position and the second stable position to calculate the information such as the center of the target, the accuracy of target identification and the anti-interference performance are improved, and the first flexible amplification mechanism 4 of the bistable flexible flying shooting mechanism can realize the amplification of the displacement of the lens assembly 2, and realize the large output displacement by using the small input displacement to meet the focusing requirements.

[0048] Embodiment 4

[0049] This embodiment is the first embodiment of the target recognition method, which is applied to the LDI machine of the third embodiment. The method includes:

[0050] The first motion system 20 drives the base plate 21, and the second motion system 22 drives the bottom plate 18 and the bistable compliant flight shooting mechanism and the light source assembly 15 to coordinately perform flight shooting;

[0051] Among them, the first bistable flexible structure is driven by the first driving structure 3 to adjust the lens assembly 2. When the first bistable flexible beam 5 is in the first stable position and the second stable position, pictures are taken above the target of the substrate 21 respectively, and the target information is calculated by fusing the two sets of pictures.

[0052] The above-mentioned target recognition method can convert a small input displacement into a large output displacement through the first flexible amplification mechanism 4 to meet the focusing needs of the lens assembly 2. Shooting at the first stable position and the second stable position can improve the stability of shooting, improve the imaging quality, and improve the production quality of the LDI machine. By fusion calculation of two sets of pictures taken at the first stable position and the second stable position, the degradation of the flying shooting target search accuracy caused by defocusing caused by the warping deformation of the large-area flexible substrate 21 itself, the coupling displacement of the motion system, the environmental vibration, the wear of the motion pair, etc. can be effectively improved, and the accuracy of target identification and anti-interference performance can be improved.

[0053] In the specific contents of the above-mentioned specific implementation methods, the various technical features can be combined in any non-contradictory manner. In order to make the description concise, not all possible combinations of the above-mentioned technical features are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0054] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A bistable compliant flying shooting mechanism, comprising a base (1), a lens assembly (2), a first driving structure (3) and a first bistable flexible structure, wherein the first driving structure (3) is mounted on the base (1), the first bistable flexible structure comprises a moving block (6) and a plurality of first bistable flexible beams (5), both ends of the plurality of first bistable flexible beams (5) are connected to the base (1), the moving block (6) is arranged between the two ends of the plurality of first bistable flexible beams (5), the lens assembly (2) is connected to the moving block (6), the output end of the first driving structure (3) is connected to the moving block (6), the first driving structure (3) drives the moving block (6) to move up and down along the base (1), so that the first bistable flexible beam (5) switches between a first stable position and a second stable position; characterized in that It also includes a first compliant amplifying mechanism (4) for amplifying the displacement of the moving block (6) when the first driving structure (3) drives the moving block (6), wherein the output end of the first driving structure (3) is connected to one end of the first compliant amplifying mechanism (4), and the other end of the first compliant amplifying mechanism (4) is connected to the moving block (6).

2. The bistable compliant flight shooting mechanism according to claim 1, characterized in that: The first compliant amplifying mechanism (4) comprises an input block (401), a first flexible rod (402), a second flexible rod (403), a first-stage amplifying rod (404), a second-stage amplifying rod (405), a third-stage amplifying rod (406) and a plurality of flexible beams (7); the input block (401) is connected to the base (1) via the flexible beams (7); the output end of the first driving structure (3) is connected to the input block (401); one end of the input block (401) is flexibly hinged between two ends of the first-stage amplifying rod (404); the other end of the input block (401) is flexibly hinged to one end of the first flexible rod (402); the first-stage amplifying rod (40 4), one end of the first-stage amplifying rod (404) is flexibly hinged between the two ends of the second-stage amplifying rod (405), the other end of the first-stage amplifying rod (404) is connected to the base (1), one end of the second-stage amplifying rod (405) is flexibly hinged to the base (1), the other end of the second-stage amplifying rod (405) is connected to one end of the third-stage amplifying rod (406) through the flexible beam (7), the other end of the first flexible rod (402) is connected between the middle part of the third-stage amplifying rod (406) and one end of the third-stage amplifying rod (406) through the flexible beam (7), and the other end of the third-stage amplifying rod (406) is connected to the moving block (6) through the flexible beam (7).

3. The bistable compliant flight shooting mechanism according to claim 1, characterized in that: It also comprises an output block (8), the moving block (6) is connected to the output block (8) via a flexible beam (7), and the lens assembly (2) is mounted on the output block (8).

4. The bistable compliant flight shooting mechanism according to claim 3, characterized in that: The invention also comprises a second driving structure (9) and a second bistable flexible structure, wherein the second driving structure (9) is mounted on the base (1), the second bistable flexible structure comprises a moving platform (11) and a plurality of second bistable flexible beams (12), the top and bottom of the moving platform (11) are respectively connected to the base (1) via the plurality of second bistable flexible beams (12), the output end of the second driving structure (9) is connected to the moving platform (11), the two driving structures drive the moving platform (11) to move laterally along the base (1), the output block (8) is located in the middle of the moving platform (11), the top two sides of the output block (8) and the bottom two sides of the output block (8) are respectively connected to the moving platform (11) via four groups of composite connection structures, and the four groups of composite connection structures are centrally symmetrical about the center of the output block (8).

5. The bistable compliant flying shooting mechanism according to claim 4, characterized in that: Each of the composite connection structures includes a plurality of composite flexible beams (13) and a plurality of composite rigid blocks (14). The plurality of composite flexible beams (13) are arranged in parallel, and the plurality of composite flexible beams (13) are perpendicular to the composite rigid blocks (14). Adjacent two of the composite flexible beams (13) in the same group of composite connection structures are connected by the composite rigid blocks (14) to form a "C" shape. In each group of composite connection structures, two of the composite flexible beams (13) that are only connected to the composite rigid block (14) at one end are respectively connected to the moving stage (11) and the output block (8).

6. The bistable compliant flying shooting mechanism according to claim 4, characterized in that: It further includes a second compliant amplification mechanism for amplifying the displacement of the moving stage (11) when the second driving structure (9) drives the moving stage (11). The second compliant amplification mechanism includes a transverse amplification rod (10). The output end of the second driving structure (9) is connected to one end of the transverse amplification rod (10). The base (1) is flexibly hinged between the middle of the transverse amplification rod (10) and one end of the transverse amplification rod (10). The other end of the transverse amplification rod (10) is connected to the moving stage (11) through the flexible beam (7).

7. The bistable compliant flying shooting mechanism according to claim 4, characterized in that: Both the first driving structure (3) and the second driving structure (9) are piezoelectric drivers.

8. The bistable compliant flying shooting mechanism according to any one of claims 2 to 7, characterized in that: The lens assembly (2) includes a moving bracket (201), a fixing block (202), and a lens (203). The fixing block (202) is connected to the moving bracket (201), and the lens (203) is clamped by the fixing block (202) and the moving bracket (201). The moving bracket (201) is fixedly connected to the output block (8).

9. An LDI machine, characterized in that: It includes a machine table (19), a first motion system (20), a substrate (21), a second motion system (22), a bottom plate (18), and the bistable compliant flying shooting mechanism according to any one of claims 1 to 8. The first motion system (20) and the second motion system (22) are installed on the machine table (19). The output end of the first motion system (20) is connected to the substrate (21). The first motion system (20) drives the substrate (21) to move in the horizontal plane. The base (1) is fixed to the bottom plate (18) through a support back plate (16). The output end of the second motion system (22) is connected to the bottom plate (18). The second motion system (22) drives the bottom plate (18) to move laterally along the machine table (19).

10. A target recognition method, applied to the LDI machine according to claim 9, characterized in that: The method includes: driving the substrate (21) by the first motion system (20), driving the bottom plate (18) and the bistable compliant flying shooting mechanism by the second motion system (22), and performing flying shooting cooperatively; wherein, driving the first bistable flexible structure to adjust the lens assembly (2) by the first driving structure (3). When the first bistable flexible beam (5) is in the first stable position and the second stable position, pictures are respectively taken above the target on the substrate (21), and the target information is calculated by fusing the two groups of pictures.

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