Substrate traction device and coating equipment

Abstract

The invention discloses a base plate traction device and coating equipment, the base plate traction device is arranged on at least one of the left side and the right side of a base plate, and the base plate traction device comprises a sliding block, an adsorption assembly and a floating assembly. The floating assembly is arranged on the sliding block and comprises a support and a first driving mechanism, the adsorption assembly is arranged on the support, and the first driving mechanism is used for driving the support and driving the adsorption assembly to move in the vertical direction. When the suction cup is sucked to the edge of the substrate, the force applied by the first driving mechanism in the vertical direction can be always kept within the preset range, and when the position of the substrate in the vertical direction changes, the first driving mechanism can drive the suction assembly to correspondingly move in the vertical direction, so that the substrate is prevented from being affected by external force and deforming. The relative positions of the suction cups and the substrate can be kept unchanged, the substrate is prevented from being deformed due to the influence of external force, it is ensured that the surface of the substrate is kept flat, meanwhile, the substrate traction device is simple in structure, and the moving load is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and in particular to a substrate traction device and coating equipment. Background Art

[0002] In the coating industry, an air flotation platform is used as a coating platform when coating large-size substrates. Usually, the coating platform includes a loading area, a coating area, and a unloading area. The edge of the substrate protrudes from the coating platform, and the substrate traction device adsorbs the edge of the substrate and drives the substrate through the loading area, the coating area, and the unloading area in sequence. Due to the high precision of the coating area, the cost of the coating area is high. In order to reduce the cost of the coating area, the length of the coating area in the coating direction is shorter than the length of the substrate, which results in that when the substrate is located in the coating area, part of the substrate will also be located in the loading area or the unloading area at the same time. Due to the different working principles of the loading area, the coating area, and the unloading area, the forces exerted on the substrate by the three areas are different, resulting in the height of the substrate when it is located in the coating area being different from the height when it is located in the loading area or the unloading area, that is, there is a height difference.

[0003] In the prior art, the substrate pulling device uses a precision electric slide, which keeps the substrate at the same height to reduce the impact of different areas on the substrate. However, since the two sides of the substrate are adsorbed and kept at the same height, when the substrate is higher than the coating platform, the surface of the substrate will be concave under the action of gravity, and when the substrate is lower than the coating platform, the coating platform will lift the substrate so that the surface of the substrate is arched, which will cause uneven coating and affect the coating quality.

[0004] Therefore, the existing substrate pulling device is in urgent need of improvement. Summary of the invention

[0005] The object of the present invention is to provide a substrate traction device and a coating device. When the substrate is located in different areas, the relative position of the suction cup and the substrate can remain unchanged, thereby preventing the substrate from being deformed by external force and ensuring that the surface of the substrate remains flat, thereby ensuring the uniformity of the coating and improving the coating quality. At the same time, the substrate traction device has a simple structure, a reduced moving load, is not easy to damage, is easy to debug, and reduces the cost of use and maintenance.

[0006] The purpose of the present invention is achieved by the following technical solutions:

[0007] A substrate pulling device, the substrate pulling device is arranged on at least one of the left and right sides of the substrate in the coating direction, the substrate pulling device is used to move the substrate from the loading area to the coating area and the unloading area in sequence, and the substrate pulling device includes:

[0008] A slider, wherein the slider is movable along a coating direction;

[0009] An adsorption component, wherein the adsorption component comprises a suction cup, wherein the suction cup is arranged close to an edge of the substrate and is used to adsorb the edge of the substrate;

[0010] A floating component, wherein the floating component is arranged on the slider, the floating component comprises a bracket and a first driving mechanism, the adsorption component is arranged on the bracket, the bracket can drive the adsorption component to move along the coating direction with the slider, the first driving mechanism is connected to the bracket, and the first driving mechanism is used to drive the bracket and drive the adsorption component to move in the vertical direction;

[0011] Among them, when the suction cup is adsorbed to the edge of the substrate, the force applied by the first driving mechanism in the vertical direction can always be maintained within a preset range. When the position of the substrate in the vertical direction changes, the first driving mechanism can drive the adsorption component to move in the vertical direction accordingly to prevent the substrate from being deformed by external force.

[0012] Preferably, when the position of the substrate is raised, the first driving mechanism drives the adsorption assembly to rise synchronously to prevent the substrate from being deformed by external force;

[0013] When the position of the substrate is lowered, the first driving mechanism drives the adsorption assembly to be lowered synchronously to prevent the substrate from being deformed due to an external force.

[0014] Preferably, it further comprises a balancing component, wherein the balancing component comprises a balancing mechanism and a connecting plate, wherein the balancing mechanism is connected to the bracket via the connecting plate and can apply a force to the bracket in the direction opposite to the gravity.

[0015] Preferably, the balancing mechanism comprises a cylinder and a pressure regulating valve connected to the cylinder, the cylinder is connected to the bracket via a floating joint, and the pressure regulating valve is used to control the magnitude of the force applied by the cylinder to the bracket in the direction opposite to gravity; or,

[0016] The balancing mechanism comprises a tension spring, which is connected to the bracket via the connecting plate and can exert a force on the bracket in a direction opposite to the gravity.

[0017] Preferably, it further comprises a measuring mechanism, which is arranged on the slider and is used to detect the position of the floating assembly in the vertical direction;

[0018] The first driving mechanism has a position mode and a force control mode. When the adsorption component is located below the substrate, the first driving component is in the position mode, and the first driving component drives the adsorption component to rise. When the adsorption component rises to a preset position, the first driving component is in the force control mode, and the suction cup is adsorbed below the substrate, and the force applied by the first driving mechanism in the vertical direction can always be maintained within a preset range.

[0019] Preferably, the floating assembly further comprises a first guide rail, the first guide rail extends in a vertical direction, the first guide rail is fixedly connected to the slider, and the bracket is slidably connected to the first guide rail; or,

[0020] The first guide rail is fixedly connected to the bracket, and the slider is slidably connected to the first guide rail.

[0021] Preferably, the adsorption assembly further comprises a reference bar, the suction cup is arranged on the reference bar, and the reference bar is arranged on the bracket.

[0022] Preferably, the bracket has a first notch and a second notch that are arranged opposite to each other, the first notch and the second notch both extend in the horizontal direction, the reference bar is arranged close to the second notch, and a first leveling component for adjusting the opening size of the first notch and the second notch is arranged at the first notch, and the first leveling component is used to adjust the height of the reference bar on both sides perpendicular to the coating direction;

[0023] A second leveling component is arranged at least near the two ends of the reference bar in the coating direction, and the second leveling component includes a fixed block and a third adjusting member arranged below the reference bar, the fixed block is connected to the bracket, and the third adjusting member is connected to the fixed block, one end of the third adjusting member abuts against the reference bar, and the height of the two ends of the reference bar in the coating direction is adjusted by adjusting the third adjusting member.

[0024] Preferably, the first leveling assembly includes a first adjusting member and a second adjusting member, the first adjusting member is connected to the brackets on both sides of the first incision at the same time, and the brackets on both sides of the first incision can be brought closer to each other and the opening of the second incision can be enlarged by adjusting the first adjusting member;

[0025] The second adjusting member is connected to a bracket on one side of the first incision, and one end of the second adjusting member abuts against a bracket on the other side of the first incision. By adjusting the second adjusting member, the brackets on both sides of the first incision can be moved away from each other and the opening of the second incision can be reduced.

[0026] A coating device comprises a substrate traction device as described in any one of the above, a coating platform, a second guide rail and a second driving mechanism, wherein the coating platform comprises a loading area, a coating area and a unloading area for substrates to pass through in sequence, the second guide rail extends along a coating direction, the second driving mechanism is used to drive the substrate traction device to move back and forth in the coating direction along the second guide rail, and the substrate traction device is used to absorb the edge of the substrate and move the substrate from the loading area to the coating area and the unloading area in sequence along the second guide rail.

[0027] Compared with the prior art, the beneficial effects of the present invention include at least:

[0028] The substrate traction device and coating equipment of the present invention have height differences when the substrate is respectively located in the loading area, the coating area and the unloading area. By arranging the adsorption component on the floating component, the force applied by the first driving mechanism in the vertical direction can always be maintained within a preset range. When the substrate traction device moves the substrate to different areas and causes the position of the substrate in the vertical direction to change, the substrate generates an upward pulling force or a downward pressure on the adsorption component, thereby causing the force applied by the first driving mechanism in the vertical direction to change. The first driving mechanism can drive the adsorption component to move in the vertical direction accordingly according to the change in the force in the vertical direction, thereby ensuring that the relative position of the suction cup and the substrate remains unchanged, avoiding deformation of the substrate due to external force, ensuring that the surface of the substrate remains flat, thereby ensuring the uniformity of coating and improving the coating quality. At the same time, compared with the precision electric slide, the substrate traction device of the present application has a simple structure, a reduced moving load, is not easy to be damaged, is easy to debug, and reduces the cost of use and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the three-dimensional structure of the coating device according to an embodiment of the present invention.

[0030] Figure 2 It is a schematic diagram of the three-dimensional structure of the substrate pulling device in an embodiment of the present invention.

[0031] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0032] Figure 4 It is a schematic diagram of the planar structure of the substrate pulling device in an embodiment of the present invention from one viewing angle.

[0033] Figure 5 It is a schematic plan view of the structure of the substrate pulling device in the embodiment of the present invention from another perspective.

[0034] In the figure: 100, coating equipment; 1, substrate pulling device; 11, slider; 111, first support plate; 112, second support plate; 12, adsorption assembly; 121, suction cup; 122, reference bar; 123, fixing rod; 124, locking part; 13, floating assembly; 131, bracket; 1311, first incision; 1312, second incision; 1313, first leveling assembly; 13131, first adjusting member; 13132, second adjusting member; 1314, second leveling assembly; 13141, fixing block; 13142, third adjusting member; 13143, second leveling assembly; 13144, second leveling assembly; 13145, fixing block; 13146, third adjusting member; 13147, third leveling assembly; 13148, third leveling assembly; 13149, third leveling assembly; 13150, third leveling assembly; 13151, third leveling assembly; 13152, third leveling assembly; 13153, third leveling assembly; 13154, third leveling assembly; 13155, third leveling assembly; 13156, third leveling assembly; 13157, third leveling assembly; 13158, third leveling assembly; 13159, third leveling assembly; 13160, third leveling assembly; 13161, third leveling assembly; 13162, third leveling assembly; 13163, third leveling assembly; 13164, third leveling assembly; 13165, third leveling assembly; 13166, third leveling assembly; 13167, third leveling assembly; 13168, third leveling assembly; 13169, third leveling assembly; 13170 15. Third support plate; 1316. Fourth support plate; 132. First drive mechanism; 133. First guide rail; 14. Balance assembly; 141. Balance mechanism; 1411. Cylinder; 1412. Pressure regulating valve; 142. Connecting plate; 143. Floating joint; 15. Measuring mechanism; 2. Coating platform; 21. Loading area; 211. First air flotation assembly; 22. Coating area; 221. Second air flotation assembly; 23. Unloading area; 231. Third air flotation assembly; 3. Second guide rail; 4. Second drive mechanism; 200. Base plate; 300. Weights. DETAILED DESCRIPTION

[0035] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0036] The words expressing position and direction described in the present invention are all explained by taking the accompanying drawings as examples, but they can be changed as needed, and all changes are included in the protection scope of the present invention.

[0037] refer to Figures 1 to 5 The present invention provides a coating device 100, comprising: a substrate traction device 1, a coating platform 2, a second guide rail 3 and a second driving mechanism 4, the coating platform 2 comprises a loading area 21, a coating area 22 and a unloading area 23 for the substrate 200 to pass through in sequence, the second guide rail 3 extends along the coating direction, the second driving mechanism 4 is used to drive the substrate traction device 1 to move back and forth along the second guide rail 3 in the coating direction, the substrate traction device 1 is used to absorb the edge of the substrate 200 and move the substrate 200 from the loading area 21 to the coating area 22 and the unloading area 23 in sequence along the second guide rail 3, and when the substrate 200 is located in the coating area 22, the coating assembly can coat the substrate 200. The coating platform 2 is, for example, a marble platform, the second driving mechanism 4 can be a linear motor, and the second guide rail 3 and the second driving mechanism 4 can be directly arranged on both sides of the coating platform 2.

[0038] The substrate traction device 1 can be arranged on at least one of the left and right sides of the substrate 200 in the coating direction, and the substrate traction device 1 is used to move the substrate 200 from the loading area 21 to the coating area 22 and the unloading area 23 in sequence. That is to say, the substrate traction device 1 can be arranged only on one side of the substrate 200, or the substrate traction device 1 can be arranged on both sides of the substrate 200 at the same time. In this embodiment, the substrate traction device 1 is arranged on both sides of the substrate 200 at the same time, so that the substrate traction device 1 adsorbs the substrate 200 more stably, so that the movement of the substrate 200 is more stable. In other words, the substrate traction device 1 is arranged in pairs. In this application, it is more preferred that multiple pairs of substrate traction devices 1 are adsorbed on the same substrate 200 at the same time, so that the substrate traction device 1 adsorbs the substrate 200 more stably, further improving the stability of the movement of the substrate 200.

[0039] The loading area 21 is used to carry the substrate 200 to be coated. The substrate 200 to be coated first enters the loading area 21, and the substrate 200 can be transferred to the loading area 21 by a robot, a conveyor belt, etc. The substrate traction device 1 can adsorb the substrate 200 in the loading area 21, and then the substrate traction device 1 moves the substrate 200 to be coated to the coating area 22. The coating area 22 is used to carry the substrate 200 being coated, and the coating head (not shown) can directly coat the substrate 200. The unloading area 23 is used to carry the substrate 200 that has been coated. The coated substrate 200 enters the unloading area 23, and the substrate 200 can be transferred away from the unloading area 23 by a robot, a conveyor belt, etc.

[0040] The loading area 21 may be provided with a first air flotation component 211, which is used to form a positive pressure below the substrate 200 and to suspend the substrate 200 in the loading area 21. The first air flotation component 211 can blow air toward the substrate 200 to form a positive pressure below the substrate 200 and to suspend the substrate 200 above the first air flotation component 211, and the substrate 200 is not in contact with the carrier and the first air flotation component 211, so that static electricity generated by friction between the substrate 200, the carrier and the first air flotation component 211 can be avoided, thereby improving the coating quality.

[0041] The coating area 22 may be provided with a second air flotation component 221 , which is used to simultaneously form positive pressure and negative pressure under the substrate 200 and to suspend the substrate 200 in the coating area 22 . The positive pressure and negative pressure form an air film, which is used to adjust the height of the substrate 200 . The second air flotation component 221 can blow air toward the substrate 200 to form a positive pressure under the substrate 200, and can also draw air toward the substrate 200 to form a negative pressure under the substrate 200. By adjusting the distribution of positive and negative pressures and the loads of positive and negative pressures, a stable and evenly spaced air film can be formed to keep the substrate 200 in a horizontal state. This not only prevents the substrate 200 from contacting the carrier platform and the third air flotation component 231, thus avoiding static electricity generated by mutual friction between the substrate 200, the carrier platform and the third air flotation component 231, thereby improving the coating quality, but also ensures that the distance from each point on the substrate 200 to the coating head is equal or approximately equal, so that the coating head can evenly coat the coating liquid on the substrate 200, further improving the coating quality.

[0042] The unloading area 23 may be provided with a third air flotation component 231, which is used to form a positive pressure below the substrate 200 and to suspend the substrate 200 in the unloading area 23. The third air flotation component 231 can blow air toward the substrate 200 to form a positive pressure below the substrate 200 and to suspend the substrate 200 above the third air flotation component 231, and the substrate 200 is not in contact with the carrier and the third air flotation component 231, so that static electricity generated by friction between the substrate 200, the carrier and the third air flotation component 231 can be avoided, thereby improving the coating quality.

[0043] The first air flotation component 211, the second air flotation component 221 and the third air flotation component 231 can adopt existing technology. As an example, the first air flotation component 211 and the third air flotation component 231 can be positive pressure bars or positive pressure plates, that is, the first air flotation component 211 and the third air flotation component 231 only generate positive pressure to suspend the substrate 200. The second air flotation component 221 can be a positive and negative pressure plate or a positive and negative pressure bar, that is, the second air flotation component 221 can generate positive pressure and negative pressure at the same time. The positive pressure and negative pressure form an air film. The air film can not only suspend the substrate 200, but also control the height of the substrate 200 so that the substrate 200 maintains a predetermined distance from the coating head, and can also keep the surface of the substrate 200 level. Compared with directly placing the substrate 200 on a marble platform, in the present application, by placing a first air flotation assembly 211, a second air flotation assembly 221 and a third air flotation assembly 231, the substrate 200 can always remain in a suspended state during the process from loading to coating and then to unloading, thereby avoiding or reducing static electricity generated by contact, thereby improving the coating quality.

[0044] refer to Figures 2 to 5The substrate traction device 1 may include: a slider 11, an adsorption component 12 and a floating component 13. The adsorption component 12 can be adsorbed on the edge of the substrate 200. The adsorption component 12 is arranged on the floating component 13. The floating component 13 can provide floating support for the adsorption component 12, that is, the floating component 13 can make the adsorption component 12 rise or fall in the vertical direction. The floating component 13 is arranged on the slider 11, and the floating component 13 can drive the adsorption component 12 to move along the coating direction with the slider 11.

[0045] refer to Figure 2 The slider 11 is used to carry the adsorption component 12 and the floating component 13, and the slider 11 can move along the coating direction. In this embodiment, the slider 11 can move back and forth along the coating direction, that is, the slider 11 can move from the loading area 21 to the coating area 22 and the unloading area 23 in sequence, and can also move from the unloading area 23 to the coating area 22 and the loading area 21 in sequence. The slider 11 may include a first support plate 111 and a second support plate 112, and the first support plate 111 and the second support plate 112 are arranged perpendicularly or approximately perpendicularly to each other, so that the slider 11 as a whole can be L-shaped.

[0046] refer to Figure 2 The adsorption component 12 may include a suction cup 121. The suction cup 121 may be arranged near the edge of the substrate 200. The suction cup 121 is used to adsorb the edge of the substrate 200. The number of suction cups 121 is preferably multiple, and the multiple suction cups 121 are preferably evenly distributed along the coating direction. The adsorption component 12 may also include a reference bar 122. The suction cup 121 may be arranged on the reference bar 122. The reference bar 122 may be arranged on the bracket 131 of the floating component 13. The reference bar 122 is not only used to install the suction cup 121, provide support for the suction cup 121, and facilitate the installation of the suction cup 121, but also the reference bar 122 can ensure that the multiple suction cups 121 are in the same horizontal plane, ensure that the adsorption force between each suction cup 121 and the substrate 200 is the same or approximately the same, and avoid the substrate 200 being pulled by the suction cup 121 and deformed, thereby ensuring the flatness of the surface of the substrate 200, and further ensuring the uniformity of the coating of the substrate 200.

[0047] As a preferred method, refer to Figure 4The adsorption assembly 12 may further include a fixing rod 123 and a locking portion 124. The fixing rod 123 may move up and down in the vertical direction, and the locking portion 124 is used to fix the position of the fixing rod 123. One end of the fixing rod 123 may be connected to the suction cup 121, that is, the suction cup 121 may move with the fixed movement. When the fixing rod 123 rises, the suction cup 121 may rise with the fixing rod 123. When the fixing rod 123 falls, the suction cup 121 may fall with the fixing rod 123. The height of the suction cup 121 may be adjusted by the fixing rod 123. When the height of the suction cup 121 is adjusted to the right position, the fixing rod 123 may be fixed by the locking portion 124, so that the position of the suction cup 121 may be fixed. Each suction cup 121 can be connected to the fixing rod 123 one by one, so that the height of each suction cup 121 can be adjusted by the fixing rod 123, so that the height of each suction cup 121 is consistent, further preventing the substrate 200 from being pulled by the suction cup 121 and deformed, thereby ensuring the flatness of the surface of the substrate 200 and further ensuring the uniformity of the coating of the substrate 200.

[0048] refer to Figure 2 , Figure 4 , the floating component 13 can be arranged on the slider 11, the floating component 13 can include a bracket 131 and a first driving mechanism 132, the adsorption component 12 can be arranged on the bracket 131, the bracket 131 can drive the adsorption component 12 to move along the coating direction with the slider 11, the first driving mechanism 132 can be connected to the bracket 131, the first driving mechanism 132 is used to drive the bracket 131 and drive the adsorption component 12 to move in the vertical direction, that is, the first driving mechanism 132 can drive the suction cup 121 to rise or fall in the vertical direction. The bracket 131 can include a third support plate 1315 and a fourth support plate 1316, the third support plate 1315 and the fourth support plate 1316 are arranged perpendicularly or approximately perpendicularly to each other, so that the bracket 131 as a whole can be L-shaped. The first driving mechanism 132 may be a voice coil motor, and the voice coil motor may have a position mode and a force control mode, that is, the first driving mechanism 132 has a position mode and a force control mode. When the voice coil motor is in the position mode, the voice coil motor may drive the adsorption component 12 to move in the vertical direction. When the voice coil motor is in the force control mode, the force applied by the voice coil motor to the load may be controlled by adjusting the current, that is, the force applied by the voice coil motor to the adsorption component 12 may be controlled.

[0049] As a preferred method, refer to Figure 2 , Figure 5The floating component 13 may also include a first guide rail 133, which extends in the vertical direction. The second support plate 112 of the slider 11 and the third support plate 1315 of the bracket 131 may be arranged relatively to each other. The first guide rail 133 may be fixedly connected to the slider 11, that is, the first guide rail 133 may be fixedly connected to the second support plate 112 of the slider 11, and the bracket 131 may be slidably connected to the first guide rail 133.

[0050] In some embodiments, the second support plate 112 of the slider 11 and the third support plate 1315 of the bracket 131 can be arranged relative to each other, and the first guide rail 133 can be fixedly connected to the bracket 131, that is, the first guide rail 133 can be fixedly connected to the third support plate 1315 of the bracket, and the slider 11 can be slidably connected to the first guide rail 133.

[0051] The substrate pulling device 1 may further include a measuring mechanism 15, which may be disposed on the slider 11, that is, the measuring mechanism 15 may be disposed on the first supporting plate 111 of the slider 11, and the measuring mechanism 15 is used to detect the vertical position of the floating assembly 13. The measuring mechanism 15 is, for example, a grating ruler, which may extend in the vertical direction, and the grating ruler may determine the rising distance of the first driving mechanism 132 or the position of the adsorption assembly 12 by measuring the vertical position of the bracket 131 or the connecting plate 142.

[0052] As an example, when the adsorption component 12 is located below the substrate 200, the first drive component is in the position mode, and the first drive component drives the adsorption component 12 to rise. When the adsorption component 12 rises to the preset position, that is, it is determined by the measuring mechanism 15, the first drive component is in the force control mode, and when the suction cup 121 contacts the substrate 200, the controller (not shown) will receive a current change signal, and then the vacuum pump is turned on, and the vacuum pump is connected to the suction cup 121, and the suction cup 121 is adsorbed below the substrate 200, and the force applied by the first drive mechanism 132 in the vertical direction can always be maintained within the preset range. The suction cup 121 is a soft material that will shrink after being subjected to force, so that the suction cup 121 and the substrate 200 are attached and maintain a force that can drag the substrate 200, so as to ensure that the suction cup 121 and the substrate 200 will not separate when the substrate 200 is pulled to move along the coating direction.

[0053] Among them, when the suction cup 121 is adsorbed on the edge of the substrate 200, the force applied by the first driving mechanism 132 in the vertical direction can always be maintained within a preset range. When the position of the substrate 200 in the vertical direction changes, the first driving mechanism 132 can drive the adsorption component 12 to move in the vertical direction accordingly to prevent the substrate 200 from being deformed by external force, thereby ensuring the flatness of the surface of the substrate 200 and ensuring the uniformity of the coating on the substrate 200. When the position of the substrate 200 in the vertical direction changes, the substrate 200 generates an upward pulling force or a downward pressure on the suction cup 121, causing the load of the first driving mechanism 132 in the vertical direction to change, thereby causing the force applied by the first driving mechanism 132 in the vertical direction to change. The first driving mechanism 132 can drive the corresponding vertical movement of the adsorption component 12 according to the change of the force applied in the vertical direction to eliminate the change of the load of the first driving mechanism 132 in the vertical direction, that is, eliminate the upward pulling force or the downward pressure generated by the substrate 200 on the first driving mechanism 132 through the suction cup 121, so that the force applied by the first driving mechanism 132 in the vertical direction can always be maintained within a preset range. In other words, since the force of the first driving mechanism 132 in the vertical direction can always reach a balance, when the position of the substrate 200 in the vertical direction changes, the first driving mechanism 132 can drive the corresponding vertical movement of the adsorption component 12. As an example, when the suction cup 121 is adsorbed on the edge of the substrate 200 in the loading area 21, the first driving mechanism 132 has an initial load in the vertical direction, that is, the first driving mechanism 132 applies an initial force in the vertical direction. When the substrate traction device 1 drives the substrate 200 to move from the loading area 21 to the coating area 22, if the height of the coating area 22 is higher than the height of the loading area 21, the middle position of the substrate 200 will be lifted up by the coating area 22, and the substrate 200 has an upward pulling force on the suction cup 121, which makes the first driving mechanism 13 2 is reduced. Since the force of the first driving mechanism 132 in the vertical direction can always reach a balance, the first driving mechanism 132 will drive the suction cup 121 to rise, so that the edge of the substrate 200 and the middle position of the substrate 200 are leveled, so that the load of the first driving mechanism 132 is restored to the initial state, that is, the force of the first driving mechanism 132 in the vertical direction is balanced, or in other words, the force applied by the first driving mechanism 132 in the vertical direction can always be maintained within a preset range.

[0054] When the position of the substrate 200 rises, if the position of the suction cup 121 does not change, the middle position of the substrate 200 will be supported upward by the coating platform 2 and bulge upward. The substrate 200 will generate an upward pulling force on the suction cup 121, causing the load of the first driving mechanism 132 in the vertical direction to change, thereby causing the force applied by the first driving mechanism 132 in the vertical direction to change. The first driving mechanism 132 can drive the adsorption component 12 to rise synchronously, so that the force applied by the first driving mechanism 132 in the vertical direction can always be maintained within a preset range to prevent the substrate 200 from being deformed by external forces.

[0055] When the position of the substrate 200 is lowered, if the position of the suction cup 121 does not change, the middle position of the substrate 200 will be depressed downward by the downward force of the coating platform 2 or the gravity of the substrate 200 itself. The substrate 200 will exert downward pressure on the suction cup 121, causing the load of the first driving mechanism 132 in the vertical direction to change, thereby causing the force applied by the first driving mechanism 132 in the vertical direction to change. The first driving mechanism 132 can drive the adsorption assembly 12 to descend synchronously, so that the force applied by the first driving mechanism 132 in the vertical direction can always be maintained within a preset range to prevent the substrate 200 from being deformed by external forces.

[0056] As an example, when the substrate 200 moves from the loading area 21 to the coating area 22, if the height of the substrate 200 becomes higher, since the edge of the substrate 200 is adsorbed by the suction cup 121, and the middle position of the substrate 200 is supported by the second air flotation component 221 and rises, the substrate 200 is convex, which is equivalent to the suction cup 121 being subjected to an upward pulling force, which will reduce the load of the first drive mechanism 132. In order to ensure that the load of the first drive mechanism 132 remains unchanged or is within a reasonable range, that is, the force applied by the first drive mechanism 132 in the vertical direction remains unchanged or is within a reasonable range, and the first drive mechanism 132 is in force control mode, the first drive mechanism 132 will drive the suction cup 121 to rise until the load of the first drive mechanism 132 reaches a preset value or within a preset range, so that the edge of the substrate 200 and the middle position of the substrate 200 can be kept flat.

[0057] When the substrate 200 moves from the loading area 21 to the coating area 22, if the height of the substrate 200 becomes lower, since the edge of the substrate 200 is supported by the adsorption wall of the suction cup 121, and the middle position of the substrate 200 drops due to gravity or the negative pressure of the second air flotation component 221, the substrate 200 is concave, which is equivalent to the suction cup 121 being subjected to downward pressure, which will increase the load of the first drive mechanism 132. In order to ensure that the load of the first drive mechanism 132 remains unchanged or is within a reasonable range, that is, the force applied by the first drive mechanism 132 in the vertical direction remains unchanged or is within a reasonable range, and the first drive mechanism 132 is in force control mode, the first drive mechanism 132 will drive the suction cup 121 to descend until the load of the first drive mechanism 132 reaches a preset value or within a preset range, so that the edge of the substrate 200 and the middle position of the substrate 200 can be kept flat.

[0058] In this embodiment, since there is a height difference when the substrate 200 is located in the loading area 21, the coating area 22 and the unloading area 23, respectively, by setting the adsorption component 12 on the floating component 13, the force applied by the first driving mechanism 132 in the vertical direction can always be kept within a preset range. When the substrate traction device 1 moves the substrate 200 to different areas and causes the position of the substrate 200 in the vertical direction to change, the substrate 200 generates an upward pulling force or a downward pressure on the adsorption component 12, thereby causing the first driving mechanism 132 to apply a force in the vertical direction to the adsorption component 12. When the force changes, the first driving mechanism 132 can drive the adsorption component 12 to move in the vertical direction accordingly according to the change of the force applied in the vertical direction, ensuring that the relative position of the suction cup 121 and the substrate 200 remains unchanged, avoiding deformation of the substrate 200 due to external force, and ensuring that the surface of the substrate 200 remains flat, thereby ensuring the uniformity of coating and improving the coating quality. At the same time, compared with the precision electric slide, the substrate traction device 1 of the present application has a simple structure, a reduced moving load, is not easy to be damaged, is easy to debug, and reduces the cost of use and maintenance.

[0059] As a preferred method, refer to Figure 2The substrate pulling device 1 may further include a balancing assembly 14, which includes a balancing mechanism 141 and a connecting plate 142. The balancing mechanism 141 is connected to the bracket 131 through the connecting plate 142 and can apply a force to the bracket 131 in the direction opposite to the gravity. The magnitude of the force applied by the balancing mechanism 141 may be consistent with the weight of the component moving in the vertical direction, that is, the magnitude of the force applied by the balancing mechanism 141 is the same or substantially the same as the total weight of the adsorption assembly 12, the bracket 131 and the connecting plate 142, which is equivalent to the load of the first driving mechanism 132 in the vertical direction being only affected by the height change of the substrate 200, that is, the load of the first driving mechanism 132 in the vertical direction is only affected by the influence of the substrate 200 on the suction cup 121, so that the load of the first driving mechanism 132 can be reduced, and the first driving mechanism 132 is more sensitive to the change of the load, that is, the control of the first driving mechanism 132 is more precise, which further ensures that the surface of the substrate 200 remains flat, thereby ensuring the uniformity of the coating and improving the coating quality.

[0060] refer to Figure 2 The balancing mechanism 141 may include a cylinder 1411 and a pressure regulating valve 1412 connected to the cylinder 1411. The cylinder 1411 and the pressure regulating valve 1412 may be connected via an air pipe (not shown). The cylinder 1411 may be disposed on the first support plate 111 of the slider 11. The cylinder 1411 may be connected to the bracket 131 via a floating joint 143. The pressure regulating valve 1412 is used to control the magnitude of the force applied by the cylinder 1411 to the bracket 131 in the direction opposite to the gravity, that is, the magnitude of the force applied by the cylinder 1411 to the bracket 131 in the direction opposite to the gravity may be controlled by adjusting the air pressure of the pressure regulating valve 1412. When the first driving mechanism 132 is in the force control mode, a weight 300 may be placed on the bracket 131 or the connecting plate 142. If the first driving mechanism 132 drives the suction cup 121 to descend in the vertical direction, it indicates that the first driving mechanism 132 operates normally. The weight of the weight 300 may be set according to the control accuracy of the first driving mechanism 132. For example, when the first driving mechanism 132 is in the force control mode, a weight 300 weighing one gram is placed on the bracket 131 or the connecting plate 142, and the first driving mechanism 132 can drive the suction cup 121 to descend in the vertical direction, which means that the control accuracy of the first driving mechanism 132 is one gram. The weight of the weight 300 is preferably less than the force that causes the substrate 200 to deform, that is, the control accuracy of the first driving mechanism 132 is high, so as to ensure that when the substrate 200 is deformed, the first driving mechanism 132 can drive the suction cup 121 to rise and fall, thereby ensuring that the surface of the substrate 200 remains flat.

[0061] In some embodiments, the balancing mechanism 141 includes a tension spring (not shown), which can be connected to the bracket 131 through the connecting plate 142 and can apply a force in the direction opposite to the gravity to the bracket 131. In other words, the tension spring can be used instead of the cylinder 1411 and the pressure regulating valve 1412, and the structure of the tension spring is simpler, so the structure of the substrate pulling device 1 can be simplified.

[0062] As a preferred method, refer to Figure 2 , Figure 3 The bracket 131 may have a first incision 1311 and a second incision 1312 that are relatively arranged. The first incision 1311 and the second incision 1312 may be arranged on a fourth support plate 1316 of the bracket 131. The first incision 1311 and the second incision 1312 both extend in a horizontal direction. The reference bar 122 may be arranged close to the second incision 1312, that is, the reference bar 122 is arranged on the fourth support plate 1316 of the bracket 131. A first leveling component 1313 for adjusting the opening size of the first incision 1311 and the second incision 1312 may be arranged at the first incision 1311. The first leveling component 1313 is used to adjust the height of the reference bar 122 on both sides perpendicular to the coating direction so that the suction cup 121 remains horizontal in the direction perpendicular to the coating direction.

[0063] refer to Figure 2 , Figure 3The first leveling component 1313 may include a first adjusting member 13131 and a second adjusting member 13132, both of which may be screws. The first adjusting member 13131 may simultaneously connect the brackets 131 on both sides of the first cutout 1311, and the brackets 131 on both sides of the first cutout 1311 may be brought closer to each other and the opening of the second cutout 1312 may be enlarged by adjusting the first adjusting member 13131. That is to say, the first adjusting member 13131 can pass through the bracket 131 on one side of the first incision 1311, and the first adjusting member 13131 and the bracket 131 on one side of the first incision 1311 can be connected by threads, one end of the second adjusting member 13132 can be embedded in the bracket 131 on the other side of the first incision 1311, and one end of the first adjusting member 13131 and the bracket 131 on the other side of the first incision 1311 can also be connected by threads, and the opening of the first incision 1311 can be made smaller and the opening of the second incision 1312 can be made larger by adjusting the first adjusting member 13131. The second adjusting member 13132 can be connected to the bracket 131 on one side of the first incision 1311. The second adjusting member 13132 and the bracket 131 on one side of the first incision 1311 can be connected by threads. One end of the second adjusting member 13132 abuts against the bracket 131 on the other side of the first incision 1311. By adjusting the second adjusting member 13132, the brackets 131 on both sides of the first incision 1311 can be moved away from each other and the opening of the second incision 1312 can be reduced. That is, by adjusting the second adjusting member 13132, the opening of the first incision 1311 can be enlarged, and the opening of the second incision 1312 can be reduced.

[0064] The number of the second adjusting members 13132 and the number of the first adjusting members 13131 are preferably multiple, and the multiple second adjusting members 13132 and the multiple first adjusting members 13131 are distributed along the coating direction, and the second adjusting members 13132 and the first adjusting members 13131 are preferably arranged in pairs. In this embodiment, the number of the second adjusting members 13132 and the number of the first adjusting members 13131 are two, that is, there are two pairs of second adjusting members 13132 and first adjusting members 13131, and the two pairs of second adjusting members 13132 and first adjusting members 13131 are respectively arranged at both ends of the coating direction close to the fourth support plate 1316 of the bracket 131. Multiple second adjusting members 13132 and multiple first adjusting members 13131 can improve the adjustment accuracy of the first leveling assembly 1313, thereby improving the horizontal accuracy of the suction cup 121 in the direction perpendicular to the coating direction.

[0065] refer to Figure 4A second leveling component 1314 may be provided at least near both ends of the reference bar 122 in the coating direction. The second leveling component 1314 may include a fixed block 13141 and a third adjusting member 13142 provided below the reference bar 122. The third adjusting member 13142 may be a screw. The number of the third adjusting members 13142 is at least two. The two third adjusting members 13142 are respectively provided near both ends of the reference bar 122 in the coating direction. The fixed block 13141 can be connected to the bracket 131, that is, the fixed block 13141 can be connected to the fourth support plate 1316 of the bracket 131, the third adjusting member 13142 can be connected to the fixed block 13141, the third adjusting member 13142 and the fixed block 13141 can be connected by threads, one end of the third adjusting member 13142 can abut against the reference bar 122, and the height of the two ends of the reference bar 122 in the coating direction can be adjusted by adjusting the third adjusting member 13142 to make the reference bar 122 horizontal in the coating direction, so that the suction cup 121 can remain horizontal in the coating direction.

[0066] The first leveling component 1313 and the second leveling component can be used to adjust the height of the two sides of the reference bar 122 perpendicular to the coating direction and the height of the two ends of the reference bar 122 in the coating direction respectively, so that the suction cup 121 can be kept horizontal in the coating direction and in the coating direction, and finally multiple suction cups 121 are placed in the same horizontal plane. In this way, the distance between each suction cup 121 and the substrate 200 is equal. When the suction cup 121 is attached to the substrate 200, the substrate 200 can be prevented from being pulled by the suction cup 121 and deformed, thereby ensuring the flatness of the surface of the substrate 200 and further ensuring the uniformity of the coating of the substrate 200.

[0067] The number of the fixed blocks 13141 may be one or more, and the fixed blocks 13141 may be in the shape of a long strip as a whole. When the number of the fixed blocks 13141 is one, the length of the fixed block 13141 is preferably the same or substantially the same as the length of the reference bar 122, and a plurality of third adjusting members 13142 may be provided on the same fixed block 13141. When the number of the fixed blocks 13141 is multiple, a third adjusting member 13142 may be provided on each fixed block 13141, that is, the fixed blocks 13141 and the third adjusting members 13142 are provided in a one-to-one correspondence, or a plurality of third adjusting members 13142 may be provided on one fixed block 13141 at the same time.

[0068] In some embodiments, there can be multiple third adjusting members 13142, that is, third adjusting members 13142 are not only provided at both ends of the reference bar 122 in the coating direction, but also can be provided in the middle position of the reference bar 122 in the coating direction. The third adjusting members 13142 can not only adjust the height of the reference bar 122, but multiple third adjusting members 13142 can improve the adjustment accuracy and support the alignment bar. Multiple third adjusting members 13142 can prevent the reference bar 122 from being deformed, thereby ensuring that the reference bar 122 remains horizontal during long-term use, thereby ensuring that multiple suction cups 121 remain horizontal.

[0069] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A substrate pulling device, characterized in that: The substrate traction device is arranged on at least one of the left and right sides of the substrate in the coating direction, and is used to move the substrate from the loading area to the coating area and the unloading area in sequence, and the substrate traction device includes: A slider, wherein the slider is movable along a coating direction; An adsorption component, wherein the adsorption component comprises a suction cup, the suction cup is arranged close to the edge of the substrate, and the suction cup is used to adsorb the edge of the substrate; A floating component, wherein the floating component is arranged on the slider, the floating component comprises a bracket and a first driving mechanism, the adsorption component is arranged on the bracket, the bracket can drive the adsorption component to move along the coating direction with the slider, the first driving mechanism is connected to the bracket, and the first driving mechanism is used to drive the bracket and drive the adsorption component to move in the vertical direction; Among them, when the suction cup is adsorbed to the edge of the substrate, the force applied by the first driving mechanism in the vertical direction can always be maintained within a preset range. When the position of the substrate in the vertical direction changes, the first driving mechanism can drive the adsorption component to move in the vertical direction accordingly to prevent the substrate from being deformed by external force.

2. The substrate pulling device according to claim 1, characterized in that: When the position of the substrate is raised, the first driving mechanism drives the adsorption assembly to rise synchronously to prevent the substrate from being deformed by external force; When the position of the substrate is lowered, the first driving mechanism drives the adsorption assembly to be lowered synchronously to prevent the substrate from being deformed due to an external force.

3. The substrate pulling device according to claim 1, characterized in that: It also includes a balancing component, which includes a balancing mechanism and a connecting plate. The balancing mechanism is connected to the bracket through the connecting plate and can apply a force to the bracket in the direction opposite to the gravity.

4. The substrate pulling device according to claim 3, characterized in that: The balancing mechanism comprises a cylinder and a pressure regulating valve connected to the cylinder, wherein the cylinder is connected to the bracket via a floating joint, and the pressure regulating valve is used to control the magnitude of the force applied by the cylinder to the bracket in the direction opposite to the gravity; or The balancing mechanism comprises a tension spring, which is connected to the bracket via the connecting plate and can exert a force on the bracket in a direction opposite to the gravity.

5. The substrate pulling device according to claim 1, characterized in that: It also includes a measuring mechanism, which is arranged on the slider and is used to detect the position of the floating assembly in the vertical direction; The first driving mechanism has a position mode and a force control mode. When the adsorption component is located below the substrate, the first driving component is in the position mode, and the first driving component drives the adsorption component to rise. When the adsorption component rises to a preset position, the first driving component is in the force control mode, and the suction cup is adsorbed below the substrate, and the force applied by the first driving mechanism in the vertical direction can always be maintained within a preset range.

6. The substrate pulling device according to claim 1, characterized in that: The floating assembly further includes a first guide rail, the first guide rail extends in a vertical direction, the first guide rail is fixedly connected to the slider, and the bracket is slidably connected to the first guide rail; or, The first guide rail is fixedly connected to the bracket, and the slider is slidably connected to the first guide rail.

7. The substrate pulling device according to claim 1, characterized in that: The adsorption assembly also includes a reference bar, the suction cup is arranged on the reference bar, and the reference bar is arranged on the bracket.

8. The substrate pulling device according to claim 7, characterized in that: The bracket has a first notch and a second notch that are arranged opposite to each other, the first notch and the second notch both extend in the horizontal direction, the reference bar is arranged close to the second notch, and the first notch is provided with a first leveling component for adjusting the opening size of the first notch and the second notch, and the first leveling component is used to adjust the height of the reference bar on both sides perpendicular to the coating direction; A second leveling component is arranged at least near the two ends of the reference bar in the coating direction, and the second leveling component includes a fixed block and a third adjusting member arranged below the reference bar, the fixed block is connected to the bracket, and the third adjusting member is connected to the fixed block, one end of the third adjusting member abuts against the reference bar, and the height of the two ends of the reference bar in the coating direction is adjusted by adjusting the third adjusting member.

9. The substrate pulling device according to claim 8, characterized in that: The first leveling assembly includes a first adjusting member and a second adjusting member, wherein the first adjusting member is connected to the brackets on both sides of the first incision at the same time, and the brackets on both sides of the first incision can be brought closer to each other and the opening of the second incision can be enlarged by adjusting the first adjusting member; The second adjusting member is connected to a bracket on one side of the first incision, and one end of the second adjusting member abuts against a bracket on the other side of the first incision. By adjusting the second adjusting member, the brackets on both sides of the first incision can be moved away from each other and the opening of the second incision can be reduced.

10. A coating device, comprising a substrate traction device as described in any one of claims 1 to 9, a coating platform, a second guide rail and a second driving mechanism, the coating platform comprising a loading area, a coating area and a unloading area for the substrate to pass through in sequence, the second guide rail extends along the coating direction, the second driving mechanism is used to drive the substrate traction device to move back and forth in the coating direction along the second guide rail, the substrate traction device is used to absorb the edge of the substrate and move the substrate from the loading area to the coating area and the unloading area in sequence along the second guide rail.

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