Sample resetting device for ultrahigh vacuum environment

Abstract

The invention discloses a sample resetting device and method for an ultrahigh vacuum environment, the sample resetting device comprises a winding part, a suspension wire, an attachment part and two wing plates, the two ends of the suspension wire are respectively connected with the winding part and the attachment part, the winding part can controllably rotate around a reference shaft, the attachment part is used for being attached to the surface of a sample, and the two wing plates are connected with the winding part and the attachment part. The two wing plates are connected to the two opposite sides of the winding piece through the one-way bearing along the reference shaft, and each wing plate comprises a bent part bent towards the side close to the attachment piece. When the winding piece rotates around the reference shaft in the winding direction, the wing plate does not rotate along with the winding piece, and the suspension wire is wound on the winding piece and drives the attachment piece and the sample to move upwards. When the winding piece rotates around the reference shaft in the pay-off direction, the wing plates synchronously rotate along with the winding piece. According to the sample taking-up device, paying-off can be conducted by rotating the take-up piece, the attachment piece below the take-up piece is driven to move towards falling samples and adhere the samples together, then the take-up piece is rotated to take up, and the samples are lifted and reset.

Description

Technical Field

[0001] The invention belongs to the technical field of sample resetting, and in particular relates to a sample resetting device used in an ultra-high vacuum environment. Background Art

[0002] The Nano Vacuum Interconnection Experiment Station is a nano field platform that integrates material growth, device processing, and test analysis. The platform is designed with an ultra-high vacuum pipeline, and the pipeline is connected to multiple devices for material growth, device processing, and test analysis.

[0003] The sample transfer in the ultra-high vacuum pipeline mainly relies on a dedicated transfer device, which is usually composed of three parts: a sample holder, a transfer rod and a sample receiving table. Its function is to transfer the sample to various parts of the experimental station. Although the mechanism of the sample transfer process is perfect enough, there is still a risk of samples falling during the transfer process. Since the sample is in the ultra-high vacuum pipeline, the sample will fail when exposed to the atmosphere, and the staff cannot enter the vacuum pipeline, which makes it difficult to reset the sample after it falls in a vacuum environment.

[0004] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0005] The object of the present invention is to provide a sample resetting device for use in an ultra-high vacuum environment, which is used to solve the problem of difficulty in resetting a sample after it falls in a vacuum environment.

[0006] In order to achieve the above-mentioned purpose, a specific embodiment of the present invention provides a sample resetting device for ultra-high vacuum environment, including a winding member, a hanging wire, an attachment member and two wing plates, the two ends of the hanging wire are respectively connected to the winding member and the attachment member, the winding member can be controlled to rotate around the reference axis, the attachment member is used to attach to the sample surface, the two wing plates are connected to the opposite sides of the winding member along the reference axis through a one-way bearing, and the wing plate includes a bent portion bent toward the side close to the attachment member. When the winding member rotates around the reference axis in the winding direction, the wing plate does not rotate with the winding member, the hanging wire is wound on the winding member and drives the attachment member and the sample to move upward, and the sample is accommodated between the bent portions on both sides. When the winding member rotates around the reference axis in the unwinding direction, the wing plate rotates synchronously with the winding member.

[0007] In one or more embodiments of the present invention, the winding member is provided with two oppositely disposed winding grooves, the arrangement direction of the two winding grooves forms an angle with the reference axis, and the suspension wire can be controllably wound onto the winding member through the two winding grooves.

[0008] In one or more embodiments of the present invention, the winding member includes a first surface, and the winding member includes two first extension parts extending from the first surface toward and away from the first surface and arranged opposite to each other, and an angle is formed between the arrangement direction of the two first extension parts and the reference axis.

[0009] In one or more embodiments of the present invention, the winding member also includes a second surface arranged opposite to the first surface, and the winding member includes two second extension parts extending from the second surface toward and away from the second surface and arranged opposite to each other, and the arrangement direction of the two second extension parts has an angle with the reference axis.

[0010] In one or more embodiments of the present invention, the sample resetting device also includes a manipulator for clamping the winding member and being controllably rotatable around a reference axis, the manipulator including two clamping parts for clamping the winding member, the winding member being recessed with two oppositely disposed coupling grooves, the two coupling grooves being used to accommodate the two clamping parts of the manipulator.

[0011] In one or more embodiments of the present invention, the sample resetting device further comprises a magnetic rod connected to the manipulator, wherein the magnetic rod is used to drive the manipulator to rotate around the reference axis and to drive the manipulator to move reciprocatingly along the reference axis.

[0012] In one or more embodiments of the present invention, a protrusion for clamping by the robot arm is provided in the coupling groove.

[0013] In one or more embodiments of the present invention, the attachment comprises a weight portion connected to the suspension wire and an attachment portion connected to the weight portion, the weight portion is made of a metal material, and the attachment portion is made of vacuum glue.

[0014] In one or more embodiments of the present invention, the two wing plates are connected by a connecting rod, the one-way bearing includes an outer ring that rotates synchronously with the winding element and an inner ring that is sleeved on the inner side of the outer ring, and the connecting rod is passed through the inner side of the inner ring and rotates synchronously with the inner ring.

[0015] In one or more embodiments of the present invention, the winding member includes a threading hole penetrating therethrough in a vertical direction, and the suspension wire is passed through the threading hole.

[0016] Another aspect of the present invention further provides a sample resetting method of a sample resetting device, the sample resetting method comprising the following steps:

[0017] The winding piece moves to the top of the sample, rotates around the reference axis in the pay-off direction, and the suspension wire drives the attachment to move toward the sample until the attachment is attached to the surface of the sample; the winding piece rotates around the reference axis in the winding direction, and the suspension wire drives the sample to move upward until the sample moves between the bending parts on both sides; the sample is moved to the reset area.

[0018] In one or more embodiments of the present invention, after the sample moves between the bending parts on both sides, the following step is further included: the winding member rotates around the reference axis along the pay-off direction to flip the sample over to the top of the winding member.

[0019] Compared with the prior art, the present invention can pay out the wire by rotating the winding member, drive the attachment member under the winding member to move toward the fallen sample and stick the sample together, then rotate the winding member to rewind the wire, lift the sample and reset the sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 It is a three-dimensional structural diagram of a winding member and a wing plate in one embodiment of the present invention;

[0022] Figure 2 It is a front view structural diagram of a winding member and a wing plate in one embodiment of the present invention;

[0023] Figure 3 It is a side view of the winding member and the wing plate in one embodiment of the present invention;

[0024] Figure 4 It is a cross-sectional structural diagram of a winding member in one embodiment of the present invention;

[0025] Figure 5 It is a three-dimensional structural diagram of a sample resetting device used in an ultra-high vacuum environment in one embodiment of the present invention;

[0026] Figure 6 A working state diagram of a sample resetting device used in an ultra-high vacuum environment in one embodiment of the present invention;

[0027] Figure 7 Another working state diagram of a sample resetting device for ultra-high vacuum environment in one embodiment of the present invention;

[0028] Figure 8 Flow chart of a sample resetting method for an ultra-high vacuum environment according to an embodiment of the present invention.

[0029] Explanation of main figure marks: 1. Winding member, 101. Winding groove, 102. First surface, 103. First extension portion, 104. Second surface, 105. Second extension portion, 106. Combination groove, 107. Threading hole, 2. Suspension wire, 3. Attachment member, 301. Counterweight portion, 302. Attachment portion, 4. Wing plate, 401. Bending portion, 5. One-way bearing, 501. Outer ring, 502. Inner ring, 6. Connecting rod, 7. Bump, 8. Manipulator, 9. Magnetic rod. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0031] In the description of the present invention, it is necessary to understand that the terms "top", "bottom", "up", "down", "clockwise", "counterclockwise", "forward", "reverse", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In one embodiment, referring to Figures 1 to 7 As shown, the present invention provides a sample resetting device for ultra-high vacuum environment, which comprises a winding member 1, a suspension wire 2, an attachment member 3 and two wing plates 4. The two ends of the suspension wire 2 are respectively connected to the winding member 1 and the attachment member 3. The winding member 1 can be controlled to rotate around a reference axis, which is generally a straight line passing through the center of gravity of the winding member 1. The specific reference axis can be referred to Figure 1 The X-axis direction in the drawing. The attachment 3 is used to adhere the sample. The surface of the attachment 3 has a certain viscosity. After it touches the sample dropped in the vacuum environment, it can adhere to the sample by its own viscosity. The two wing plates 4 are connected to the opposite sides of the winding member 1 along the reference axis through the one-way bearing 5. Each wing plate 4 includes a bending portion 401 bent toward the side close to the attachment 3. The bending portion 401 is located at the end of the wing plate 4 away from the winding member 1. The distance between the two bending portions 401 is adapted to the plane size of the sample. Generally, the distance between the two bending portions 401 is set to be able to accommodate the sample between the two bending portions 401.

[0033] The one-way bearing 5 is a bearing that can rotate freely in one direction and is locked in the other direction. The one-way bearing 5 generally includes an outer ring 501 and an inner ring 502 sleeved inside the outer ring 501. The outer ring 501 rotates synchronously with the winding member 1, and the inner ring 502 rotates synchronously with the wing plate 4.

[0034] When the outer ring 501 is subjected to an external torque and has a tendency to rotate relative to the inner ring 502 in the winding direction, only the outer ring 501 rotates in the winding direction, and the inner ring 502 remains stationary. Conversely, when the outer ring 501 has a tendency to rotate relative to the inner ring 502 in the unwinding direction, the outer ring 501 and the inner ring 502 rotate together in the unwinding direction. Figure 2 The clockwise direction in the drawing can be referred to Figure 2 In the counterclockwise direction.

[0035] Based on the above structure, when it is necessary to reset a sample that has fallen in a vacuum environment, the operator moves the winding member 1 to the top of the sample, and then rotates the winding member 1 along the pay-off direction to pay out the wire, so that the hanging wire 2 wound on the winding member 1 is separated from the winding member 1, and drives the attachment 3 to move toward the sample below until the attachment 3 is attached to the surface of the sample.

[0036] Then, the winding member 1 is rotated forward to wind up the wire, so that the hanging wire 2 is wound on the winding member 1, and the sample is lifted upward until the sample moves to a position close to the winding member 1 and is stuck between the two bent parts 401. Then, the winding member 1 is moved to a specified position, and the sample on the attachment 3 is removed by an auxiliary device to complete the sample reset. The auxiliary device can be a magnetic rod, a manipulator, or a linear moving mechanism with a suction cup. During the sample reset process, the bent part 401 on the edge of the wing plate 4 can protect the periphery of the sample to prevent the sample from touching other objects during the subsequent reset process.

[0037] Alternatively, when the sample is stuck between the two bending parts 401, the operator can also rotate the winding member 1 along the pay-off direction. At this time, the wing plate 4 rotates along the pay-off direction along with the winding member 1, flipping the sample upward, and then moving the winding member 1 to the specified position. The sample on the attachment 3 can be removed using an auxiliary device to complete the sample reset.

[0038] In one embodiment, referring to Figure 1As shown, in order to prevent the suspension wire 2 wound on the winding member 1 from loosening and detaching from the winding member 1, two oppositely arranged winding grooves 101 are concavely provided on the winding member 1, and the arrangement direction of the two winding grooves 101 forms an angle with the reference axis. Two oppositely arranged stop surfaces are formed in the winding groove 101. When the suspension wire 2 is wound on the winding member 1 between the two winding grooves 101 through the two winding grooves 101, the two stop surfaces in the winding groove 101 can limit the wound part of the suspension wire 2 to prevent it from moving along the reference axis and detaching from the winding groove 101.

[0039] Preferably, the angle between the arrangement direction of the two winding slots 101 and the reference axis is 90°.

[0040] In one embodiment, referring to Figure 2 and Figure 3 As shown, the winding member 1 includes a first surface 102, and the winding member 1 includes two first extension parts 103 extending from the first surface 102 toward and away from the first surface 102 and arranged opposite to each other, and there is an angle between the arrangement direction of the two first extension parts 103 and the reference axis, and the spacing between the two first extension parts 103 should be equal to or greater than the length of the sample in its arrangement direction, so that the sample can be moved between the two first extension parts 103, and the edge of the sample is protected by the space between the two first extension parts 103.

[0041] In addition, when the distance between the two first extension parts 103 is equal to the length of the sample in the arrangement direction, the sample can also be stuck between the two first extension parts 103 to stabilize the position of the sample during the resetting process.

[0042] Furthermore, each first extension portion 103 is penetrated by the winding groove 101 , and each first extension portion 103 is divided into two parts by the winding groove 101 .

[0043] Preferably, the angle between the arrangement direction of the two first extension portions 103 and the reference axis is 90°.

[0044] Considering that when the sample is close to the winding member 1, the first extension portion 103 may face upwards instead of downwards, and the sample cannot be protected. Figure 1 and Figure 3 As shown, the take-up member 1 also includes a second surface 104 arranged opposite to the first surface 102, and includes two second extension portions 105 extending from the second surface 104 and away from the second surface 104 and arranged opposite to each other, and an angle is formed between the arrangement direction of the two second extension portions 105 and the reference axis.

[0045] The two second extensions 105 are located at opposite sides of the two first extensions 103 . When the sample approaches the winding member 1 and the first extension 103 faces upward, the second extensions 105 face downward. At this time, the sample can be protected by the second extensions 105 .

[0046] Likewise, each first extension portion 103 is penetrated by the winding groove 101 , and each second extension portion 105 is divided into two parts by the winding groove 101 .

[0047] Preferably, the angle between the arrangement direction of the two second extension portions 105 and the reference axis is 90°.

[0048] In one embodiment, referring to Figure 1 and Figure 4 As shown, the winding member 1 includes a threading hole 107 penetrating therethrough in a vertical direction, and the suspension wire 2 is passed through the threading hole 107 .

[0049] In one embodiment, referring to Figure 5 As shown, the sample resetting device also includes a manipulator 8 for clamping the winding member 1 and a magnetic rod 9 connected to the manipulator 8. The magnetic rod 9 can drive the manipulator 8 to rotate around the reference axis to drive the winding member 1 to reel in and unreel.

[0050] Furthermore, the magnetic rod 9 can also drive the robot 8 to move back and forth linearly along the reference axis, so as to adjust the position of the winding member 1 .

[0051] In one embodiment, referring to Figure 5 As shown, the robot 8 includes two clamping parts for clamping the winding piece 1 , and the two clamping parts can approach and move away from each other, thereby clamping and fixing the winding piece 1 .

[0052] Furthermore, two oppositely disposed coupling grooves 106 are concavely formed on the winding member 1 , and the concave direction of the coupling grooves 106 is parallel to the reference axis. The two coupling grooves 106 are used to accommodate two clamping parts of the robot 8 .

[0053] Furthermore, a protrusion 7 for being clamped by two clamping parts of the robot 8 is provided in the coupling groove 106 .

[0054] In one embodiment, referring to Figure 4 As shown, the attachment 3 includes a counterweight portion 301 connected to the suspension wire 2 and an attachment portion 302 connected to the counterweight portion 301. The counterweight portion 301 is made of metal material, and the attachment portion 302 is made of vacuum glue. The mass of the counterweight portion 301 occupies most of the mass of the attachment 3, ensuring that the attachment 3 can move in the vertical direction.

[0055] In another embodiment, the attachment 3 may also be a structure that can generate negative pressure, such as a suction cup, and the attachment 3 is adsorbed on the surface of the sample by using the negative pressure.

[0056] In one embodiment, referring to Figure 4 As shown, the two wing plates 4 are connected by a connecting rod 6, a part of which is exposed in the threading hole 107 and passed through by the suspension wire 2. The connecting rod 6 is inserted into the inner side of the inner ring 502 of the one-way bearing 5 and rotates synchronously with the inner ring 502.

[0057] The inner ring 502 and the connecting rod 6 can be connected by snapping, for example, a slot extending radially and axially passing through the inner ring 502 is provided on the inner wall of the inner ring 502, and a block that can be inserted into the slot is provided on the circumference of the connecting rod 6.

[0058] Similarly, the outer ring 501 of the one-way bearing 5 and the winding member 1 may also be connected in the above-mentioned manner.

[0059] In one embodiment, referring to Figures 5 to 8 As shown, the present invention provides a sample resetting method for ultra-high vacuum environment, the sample resetting method adopts the above-mentioned sample resetting device to perform sample resetting, and the sample resetting method comprises the following steps:

[0060] The winding member 1 moves to the top of the sample, and the winding member 1 rotates slightly around the reference axis in the pay-off direction, and the suspension wire 2 drives the attachment member 3 to move toward the sample until the attachment member 3 is attached to the surface of the sample;

[0061] The winding member 1 rotates around the reference axis in the winding direction, and the suspension wire 2 drives the sample to move upward until the sample moves between the bending parts 401 on both sides;

[0062] Move the sample to the reset area.

[0063] In one embodiment, referring to Figure 7 and Figure 8 As shown, when the sample is between the bending parts 401 on both sides, the winding member 1 rotates around the reference axis in the pay-off direction to flip the sample to the top of the winding member 1, and then moves the sample to the reset area.

[0064] It should be noted that the above reset method does not require the take-up member 1 to rotate significantly along the unwinding direction, because the distance between the adhesive and the take-up member 1 is small in the initial state, so there is no need to significantly rewind the suspension wire 2 when lifting the sample.

[0065] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0066] In addition, it should be understood that although the present specification is described according to embodiments, not every embodiment contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A sample resetting device for ultra-high vacuum environment, characterized in that: The invention comprises a winding member (1), a hanging wire (2), an attachment member (3) and two wing plates (4), wherein two ends of the hanging wire (2) are respectively connected to the winding member (1) and the attachment member (3), the winding member (1) can be controlled to rotate around a reference axis, the attachment member (3) is used to attach to the surface of a sample, the two wing plates (4) are connected to opposite sides of the winding member (1) along the reference axis via a one-way bearing (5), and the wing plates (4) include a bent portion (401) bent toward a side close to the attachment member (3); When the winding member (1) rotates around the reference axis in the winding direction, the wing plate (4) does not rotate along with the winding member (1), the hanging wire (2) is wound on the winding member (1) and drives the attachment member (3) and the sample to move upward, so that the sample is accommodated between the bending parts (401) on both sides; When the winding member (1) rotates around the reference axis in the unwinding direction, the wing plate (4) rotates synchronously with the winding member (1).

2. The sample resetting device according to claim 1, characterized in that: The winding member (1) is provided with two winding grooves (101) arranged opposite to each other, and an angle is formed between the arrangement direction of the two winding grooves (101) and the reference axis, and the suspension wire (2) can be controlled to be wound onto the winding member (1) via the two winding grooves (101).

3. The sample resetting device according to claim 1, characterized in that: The winding member (1) comprises a first surface (102), and the winding member (1) comprises two first extension portions (103) extending from the first surface (102) and away from the first surface (102) and arranged opposite to each other, wherein an angle is formed between the arrangement direction of the two first extension portions (103) and the reference axis; The winding member (1) further comprises a second surface (104) arranged opposite to the first surface (102), and the winding member (1) comprises two second extension portions (105) extending from the second surface (104) and away from the second surface (104) and arranged opposite to each other, wherein an angle is formed between the arrangement direction of the two second extension portions (105) and the reference axis.

4. The sample resetting device according to claim 1, characterized in that: The sample resetting device further comprises a manipulator (8) for clamping the winding member (1) and being controllably rotatable about a reference axis, the manipulator (8) comprising two clamping parts for clamping the winding member (1), the winding member (1) being recessed with two oppositely disposed coupling grooves (106), the two coupling grooves (106) being used to accommodate the two clamping parts of the manipulator (8).

5. The sample resetting device according to claim 4, characterized in that: The sample resetting device further comprises a magnetic rod (9) connected to the manipulator (8), wherein the magnetic rod (9) is used to drive the manipulator (8) to rotate around the reference axis and to drive the manipulator (8) to move reciprocatingly along the reference axis; and / or, A protrusion (7) for clamping by the robot (8) is provided in the coupling groove (106).

6. The sample resetting device according to claim 1, characterized in that: The attachment part (3) comprises a counterweight part (301) connected to the suspension line (2) and an attachment part (302) connected to the counterweight part (301); the counterweight part (301) is made of a metal material, and the attachment part (302) is made of vacuum glue.

7. The sample resetting device according to claim 1, characterized in that: The two wing plates (4) are connected via a connecting rod (6); the one-way bearing (5) comprises an outer ring (501) that rotates synchronously with the winding member (1) and an inner ring (502) that is sleeved on the inner side of the outer ring (501); the connecting rod (6) is passed through the inner side of the inner ring (502) and rotates synchronously with the inner ring (502).

8. The sample resetting device according to claim 1, characterized in that: The winding member (1) comprises a threading hole (107) penetrating the winding member in a vertical direction, and the suspension wire (2) is inserted into the threading hole (107).

9. A resetting method using the sample resetting device according to any one of claims 1 to 8, characterized in that: The reset method comprises the following steps: Step 1: The winding member (1) moves to the top of the sample, the winding member (1) rotates around the reference axis in the pay-off direction, and the suspension wire (2) drives the attachment member (3) to move toward the sample until the attachment member (3) is attached to the surface of the sample; Step 2: The winding member (1) rotates around the reference axis in the winding direction, and the suspension wire (2) drives the sample to move upward until the sample moves between the bending parts (401) on both sides; Step 3: Move the sample to the reset area.

10. The resetting method according to claim 9, characterized in that: After the sample is moved between the bending parts on both sides, the following steps are also included: The winding member (1) rotates around the reference axis in the pay-off direction, and the sample is turned over to the top of the winding member (1).

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