Sample repositioning device for ultra-high vacuum environments

Abstract

The application discloses a sample resetting device and method for an ultrahigh vacuum environment, the sample resetting device comprising a winding piece, a hanging line, an attaching piece and two wing plates, two ends of the hanging line being connected with the winding piece and the attaching piece respectively, the winding piece being controllably rotatable around a reference axis, the attaching piece being used for attaching to a sample surface, the two wing plates being connected to opposite sides of the winding piece along the reference axis through one-way bearings, and the wing plates comprising bending parts bent towards one side close to the attaching piece. When the winding piece rotates around the reference axis in a winding direction, the wing plates do not rotate with the winding piece, the hanging line is wound on the winding piece and drives the attaching piece and the sample to move upwards. When the winding piece rotates around the reference axis in a paying-out direction, the wing plates rotate synchronously with the winding piece. The application can drive the attaching piece below the winding piece to move towards the fallen sample and stick the sample together by rotating the winding piece to pay out the line, and then rotate the winding piece to wind the line, thereby lifting the sample to reset the sample.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of sample resetting, and particularly relates to a sample resetting device for an ultrahigh vacuum environment. BACKGROUND

[0002] The nanometer vacuum interconnection experiment station is a platform in the field of nanometer materials, which integrates material growth, device processing, and testing analysis. The platform is designed with an ultrahigh vacuum pipeline, and a plurality of devices for material growth, device processing, and testing analysis are connected to the pipeline.

[0003] The sample transmission in the ultrahigh vacuum pipeline mainly relies on a dedicated transmission device, which is usually composed of a sample holder, a transmission rod, and a sample receiving table. The function of the transmission device is to transmit the sample to each part of the experiment station. Although the mechanism of the sample transmission process is perfect enough, there is still a risk of sample falling during the transmission process. Since the sample is located in the ultrahigh vacuum pipeline, the sample will be invalid if exposed to the atmosphere, and the staff cannot enter the vacuum pipeline, which makes it difficult to reset the sample after falling in the vacuum environment.

[0004] The information disclosed in this BACKGROUND section is only for the purpose of increasing the understanding of the background of the present application and should not be taken as an acknowledgment or any form of suggestion that this information forms prior art that is publicly known. SUMMARY

[0005] The present application aims to provide a sample resetting device for an ultrahigh vacuum environment, which solves the problem of difficult resetting of the sample after falling in the vacuum environment.

[0006] In order to achieve the above-mentioned purpose, one embodiment of the present application provides a sample resetting device for an ultrahigh vacuum environment, which comprises a winding member, a lifting line, an attachment member, and two wing plates. The two ends of the lifting line are connected to the winding member and the attachment member, respectively. The winding member can be controlled to rotate around a reference axis. The attachment member is used to attach to the surface of the sample. The two wing plates are connected to the opposite sides of the winding member along the reference axis through a one-way bearing. The wing plate comprises a bending part that is bent towards the side close to the attachment member. When the winding member rotates around the reference axis in the winding direction, the wing plate does not rotate with the winding member, and the lifting line is wound on the winding member and drives the attachment member and the sample to move upwards, so that the sample is stored between the two bending parts. When the winding member rotates around the reference axis in the unwinding direction, the wing plate rotates synchronously with the winding member.

[0007] In one or more embodiments of the present application, two winding grooves are concavely arranged on the winding member, and the arrangement direction of the two winding grooves has an included angle with the reference axis. The lifting line can be controlled to be wound on the winding member through the two winding grooves.

[0008] In one or more embodiments of the present application, the winding member comprises a first surface, the winding member comprises two first extending parts extending away from the first surface and oppositely arranged, and the arrangement direction of the two first extending parts has an included angle with the reference axis.

[0009] In one or more embodiments of the present application, the winding member further comprises a second surface oppositely arranged with the first surface, the winding member comprises two second extending parts extending away from the second surface and oppositely arranged, and the arrangement direction of the two second extending parts has an included angle with the reference axis.

[0010] In one or more embodiments of the present application, the sample resetting device further comprises a mechanical hand for clamping the winding member and controllably rotating around the reference axis, the mechanical hand comprises two clamping parts for clamping the winding member, and the winding member is concavely provided with two oppositely arranged combination grooves for accommodating the two clamping parts of the mechanical hand.

[0011] In one or more embodiments of the present application, the sample resetting device further comprises a magnetic force rod connected with the mechanical hand, the magnetic force rod is used for driving the mechanical hand to rotate around the reference axis, and is used for driving the mechanical hand to reciprocatingly move linearly along the reference axis.

[0012] In one or more embodiments of the present application, the combination groove is provided with a protrusion clamped by the mechanical hand.

[0013] In one or more embodiments of the present application, the attachment member comprises a counterweight part connected with the hanging line and an attachment part connected with the counterweight part, the counterweight part is made of a metal material, and the attachment part is made of a vacuum adhesive.

[0014] In one or more embodiments of the present application, the two wing plates are connected through a connecting rod, the one-way bearing comprises an outer ring synchronously rotating with the winding member and an inner ring sleeved on the inner side of the outer ring, and the connecting rod is arranged on the inner side of the inner ring and synchronously rotates with the inner ring.

[0015] In one or more embodiments of the present application, the winding member comprises a threading hole penetrating through the winding member in the vertical direction, and the hanging line is arranged in the threading hole.

[0016] Another aspect of the present application further provides a sample resetting method of a sample resetting device, the sample resetting method comprises the following steps:

[0017] The winding piece moves above the sample, the winding piece rotates around the reference shaft in the pay-off direction, the hanging line drives the attachment piece to move towards the sample until the attachment piece is attached to the surface of the sample; the winding piece rotates around the reference shaft in the take-up direction, the hanging line drives the sample to move upwards until the sample moves between the two side bending parts; the sample is moved to the reset area.

[0018] In one or more embodiments of the present application, after the sample is moved between the two side bending parts, the method further comprises the following steps: rotating the winding piece around the reference shaft in the pay-off direction to turn the sample upside down above the winding piece.

[0019] Compared with the prior art, the present application can rotate the winding piece to pay off the line, drive the attachment piece below the winding piece to move towards the falling sample and stick the sample together, and then rotate the winding piece to take up the line to lift the sample to reset the sample. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments described in the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0021] Figure 1 It is a perspective view of the winding piece and the wing plate in an embodiment of the present application;

[0022] Figure 2 It is a front view of the winding piece and the wing plate in an embodiment of the present application;

[0023] Figure 3 It is a side view of the winding piece and the wing plate in an embodiment of the present application;

[0024] Figure 4 It is a sectional view of the winding piece in an embodiment of the present application;

[0025] Figure 5 It is a perspective view of the sample reset device for ultra-high vacuum environment in an embodiment of the present application;

[0026] Figure 6 It is a working state diagram of the sample reset device for ultra-high vacuum environment in an embodiment of the present application;

[0027] Figure 7 It is another working state diagram of the sample reset device for ultra-high vacuum environment in an embodiment of the present application;

[0028] Figure 8 It is a flow chart of the sample reset method for ultra-high vacuum environment in an embodiment of the present application.

[0029] Explanation of main reference signs: 1, winding piece, 101, winding groove, 102, first surface, 103, first extension, 104, second surface, 105, second extension, 106, combination groove, 107, threading hole, 2, hanging line, 3, attaching piece, 301, counterweight part, 302, attaching part, 4, wing plate, 401, bending part, 5, one-way bearing, 501, outer ring, 502, inner ring, 6, connecting rod, 7, protruding block, 8, mechanical hand, 9, magnetic force rod. DETAILED DESCRIPTION

[0030] In order to make the personnel in the technical field better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the person of ordinary skill in the art without creative labor should belong to the protection scope of the present application.

[0031] In the description of the present application, it should be understood that the terms "top", "bottom", "upper", "lower", "clockwise", "counterclockwise", "forward", "reverse" and the like indicate the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0032] In an embodiment, referring to Figures 1 to 7 The present application provides a sample resetting device for ultra-high vacuum environment, which comprises a winding piece 1, a hanging line 2, an attaching piece 3 and two wing plates 4. The two ends of the hanging line 2 are connected with the winding piece 1 and the attaching piece 3 respectively. The winding piece 1 can be controlled to rotate around a reference axis, which is generally a straight line passing through the center of gravity of the winding piece 1, and can refer to the direction of the X axis in Figure 1 The attaching piece 3 is used for adhering a sample, and the surface of the attaching piece 3 has a certain adhesion. When the attaching piece 3 touches the sample falling in the vacuum environment, it can be adhered to the sample by its own adhesion. The two wing plates 4 are connected to the opposite sides of the winding piece 1 along the reference axis through the one-way bearing 5. Each wing plate 4 comprises a bending part 401 bending towards the side close to the attaching piece 3, and the bending part 401 is located at the end of the wing plate 4 away from the winding piece 1. The distance between the two bending parts 401 is adapted to the planar size of the sample. Generally, the distance between the two bending parts 401 is set to be able to accommodate the sample between the two bending parts 401.

[0033] The one-way bearing 5 is a bearing that can rotate freely in one direction and is locked in the other direction. The one-way bearing 5 generally comprises an outer ring 501 and an inner ring 502 sleeved in the outer ring 501, the outer ring 501 rotates synchronously with the winding member 1, and the inner ring 502 rotates synchronously with the wing plate 4.

[0034] When the outer ring 501 is subjected to an external torque and has a tendency to rotate in the winding direction relative to the inner ring 502, only the outer ring 501 rotates in the winding direction, and the inner ring 502 is stationary. Conversely, when the outer ring 501 has a tendency to rotate in the unwinding direction relative to the inner ring 502, the outer ring 501 and the inner ring 502 rotate together in the unwinding direction. Among them, the winding direction can refer to the clockwise direction in Figure 2 , and the unwinding direction can refer to the counterclockwise direction in Figure 2 .

[0035] Based on the above structure, when it is necessary to reset the sample dropped in the vacuum environment, the operator moves the winding member 1 above the sample, and then rotates the winding member 1 in the unwinding direction to unwind the wire 2 wound on the winding member 1, so that the attached member 3 moves towards the sample below, until the attached member 3 is attached to the surface of the sample.

[0036] Then rotate the winding member 1 in the forward direction to wind the wire 2, so that the wire 2 is wound on the winding member 1, and the sample is lifted upwards until the sample moves to a position close to the winding member 1 and is clamped between the two bending portions 401. Then move the winding member 1 to the designated position, and use the auxiliary device to take the sample on the attached member 3, so as to complete the sample resetting. The auxiliary device can be a magnetic rod, a mechanical hand or a linear moving mechanism with a suction cup. During the sample resetting process, the bending portion 401 at the edge of the wing plate 4 can protect the circumference of the sample to prevent the sample from touching other objects in the subsequent resetting process.

[0037] Alternatively, after the sample is clamped between the two bending portions 401, the operator can also rotate the winding member 1 in the unwinding direction, at this time the wing plate 4 rotates together with the winding member 1 in the unwinding direction, and the sample is turned over to the upper side, and then the winding member 1 is moved to the designated position, and the sample on the attached member 3 is taken down by using the auxiliary device, so as to complete the sample resetting.

[0038] In an embodiment, refer to Figure 1As shown, in order to avoid the hanging line 2 from being loosened and separated from the winding member 1, two winding grooves 101 are arranged oppositely on the winding member 1, and the arrangement direction of the two winding grooves 101 has an included angle with the reference axis. Two stop surfaces are formed in the winding groove 101 oppositely, and when the hanging line 2 is wound on the winding member 1 between the two winding grooves 101, the two stop surfaces in the winding groove 101 can limit the winding part of the hanging line 2, preventing it from moving along the reference axis and separating from the winding groove 101.

[0039] Preferably, the included angle between the arrangement direction of the two winding grooves 101 and the reference axis is 90°.

[0040] In an embodiment, referring to Figure 2 and Figure 3 As shown, the winding member 1 includes a first surface 102, and the winding member 1 includes two first extension parts 103 oppositely arranged extending away from the first surface 102, and the arrangement direction of the two first extension parts 103 has an included angle with the reference axis. The distance between the two first extension parts 103 should be equal to or greater than the length of the sample in the arrangement direction, so that the sample can move between the two first extension parts 103, and the edges of the sample are protected by the two first extension parts 103.

[0041] In addition, when the distance between the two first extension parts 103 is equal to the length of the sample in the arrangement direction, the sample can also be clamped between the two first extension parts 103, and the position of the sample during the resetting process is stable.

[0042] Further, each first extension part 103 is penetrated by the winding groove 101, and each first extension part 103 is divided into two parts by the winding groove 101.

[0043] Preferably, the included angle between the arrangement direction of the two first extension parts 103 and the reference axis is 90°.

[0044] Considering that when the sample approaches the winding member 1, the first extension part 103 can be directed upward instead of downward, and cannot protect the sample. Therefore, in an embodiment, referring to Figure 1 and Figure 3 As shown, the winding member 1 further includes a second surface 104 oppositely arranged with the first surface 102, and the winding member 1 includes two second extension parts 105 oppositely arranged extending away from the second surface 104, and the arrangement direction of the two second extension parts 105 has an included angle with the reference axis.

[0045] Two second extending parts 105 are located at opposite sides of the two first extending parts 103, when the sample is close to the first extending part 103 of the winding member 1 upwards, the second extending part 105 is downwards, at this time, the sample can be protected by the second extending part 105.

[0046] Likewise, each first extending part 103 is penetrated by the winding groove 101, and each second extending part 105 is divided into two parts by the winding groove 101.

[0047] Preferably, the angle between the arrangement direction of the two second extending parts 105 and the reference axis is 90°.

[0048] In an embodiment, as shown in Figure 1 and Figure 4 The winding member 1 comprises a threading hole 107 penetrating in the vertical direction, and the hanging line 2 is threaded in the threading hole 107.

[0049] In an embodiment, as shown in Figure 5 The sample resetting device further comprises a mechanical hand 8 for clamping the winding member 1 and a magnetic force rod 9 connected with the mechanical hand 8, the magnetic force rod 9 can drive the mechanical hand 8 to rotate around the reference axis, so as to drive the winding member 1 to wind and unwind the hanging line.

[0050] Further, the magnetic force rod 9 can also drive the mechanical hand 8 to reciprocate linearly along the reference axis, so as to adjust the position of the winding member 1.

[0051] In an embodiment, as shown in Figure 5 The mechanical hand 8 comprises two clamping parts for clamping the winding member 1, the two clamping parts can approach and move away from each other, thereby clamping and fixing the winding member 1.

[0052] Further, the winding member 1 is concavely provided with two oppositely arranged combination grooves 106, the concave direction of the combination groove 106 is parallel to the reference axis, and the two combination grooves 106 are used for accommodating the two clamping parts of the mechanical hand 8.

[0053] Further, the combination groove 106 is provided with a protrusion 7 for clamping the two clamping parts of the mechanical hand 8.

[0054] In an embodiment, as shown in Figure 4 The attachment member 3 comprises a counterweight part 301 connected with the hanging line 2 and an attachment part 302 connected with the counterweight part 301. The counterweight part 301 is made of metal material, and the attachment part 302 is made of vacuum glue. The mass of the counterweight part 301 accounts for the majority of the mass of the attachment member 3, so as to ensure that the attachment member 3 can move in the vertical direction.

[0055] In another embodiment, the attachment member 3 can also be selected as a suction cup or other structure capable of generating negative pressure, and the attachment member 3 is adsorbed on the surface of the sample by the negative pressure.

[0056] In an embodiment, referring to Figure 4 , two wing plates 4 are connected by a connecting rod 6, a part of the connecting rod 6 is exposed in the threading hole 107 and is threaded by the lifting line 2, the connecting rod 6 is threaded in the inner side of the inner ring 502 of the one-way bearing 5 and rotates synchronously with the inner ring 502.

[0057] The inner ring 502 and the connecting rod 6 can be connected by clamping, for example, a clamping groove extending radially and axially through the inner ring 502 is arranged on the inner wall of the inner ring 502, and a clamping block capable of being inserted into the clamping groove is arranged on the circumference of the connecting rod 6.

[0058] Similarly, the outer ring 501 of the one-way bearing 5 and the winding member 1 can also adopt the above connection mode.

[0059] In an embodiment, referring to Figures 5 to 8 , the present application provides a sample resetting method for an ultrahigh vacuum environment, the sample resetting method adopts the above-mentioned sample resetting device to reset the sample, and the sample resetting method comprises the following steps:

[0060] The winding member 1 moves above the sample, the winding member 1 rotates slightly in the unwinding direction around the reference axis, the lifting line 2 drives the attached member 3 to move towards the sample until the attached member 3 is attached to the surface of the sample;

[0061] The winding member 1 rotates in the winding direction around the reference axis, the lifting line 2 drives the sample to move upwards until the sample moves between the two side bending portions 401;

[0062] The sample is moved to the resetting area.

[0063] In an embodiment, referring to Figure 7 and Figure 8 , when the sample is between the two side bending portions 401, the winding member 1 rotates in the unwinding direction around the reference axis, the sample is flipped above the winding member 1, and then the sample is moved to the resetting area.

[0064] It should be noted that the above-mentioned resetting method does not require the winding member 1 to rotate greatly in the unwinding direction, because the distance between the adhesive member and the winding member 1 is small in the initial state, so the lifting line 2 does not need to be wound greatly when lifting the sample.

[0065] It will be obvious to a person skilled in the art that the application is not limited to the details of the foregoing exemplary embodiments and can be implemented in other concrete forms without departing from the spirit or essential characteristics of the application. The embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalents of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims concerned.

[0066] Furthermore, it should be understood that, although the present specification is described according to the embodiments, not every embodiment contains only one independent technical solution, and such a description manner of the specification is only for clearness, and a person skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be combined appropriately to form other embodiments which can be understood by a person skilled in the art.

Claims

1. A sample resetting device for ultra-high vacuum environment, characterized in that: The invention comprises a winding member (1), a hanging wire (2), an attachment member (3) and two wing plates (4), wherein the two ends of the hanging wire (2) are respectively connected to the winding member (1) and the attachment member (3), the winding member (1) can be controlled to rotate around a reference axis, the attachment member (3) is used to attach to the sample surface, the two wing plates (4) are connected to opposite sides of the winding member (1) along the reference axis through a one-way bearing (5), and the wing plates (4) include a bent portion (401) bent toward a side close to the attachment member (3); When the winding member (1) rotates around the reference axis in the winding direction, the wing plate (4) does not rotate with the winding member (1), and the hanging wire (2) is wound on the winding member (1) and drives the attachment member (3) and the sample to move upward, so that the sample is accommodated between the bending parts (401) on both sides; When the winding member (1) rotates around the reference axis in the pay-off direction, the wing plate (4) rotates synchronously with the winding member (1); The winding member (1) comprises a first surface (102), and the winding member (1) comprises two first extension portions (103) extending from the first surface (102) and away from the first surface (102) and arranged opposite to each other, wherein an angle is formed between the arrangement direction of the two first extension portions (103) and the reference axis; The winding member (1) further comprises a second surface (104) arranged opposite to the first surface (102), and the winding member (1) comprises two second extension portions (105) extending from the second surface (104) and away from the second surface (104) and arranged opposite to each other, wherein an angle is formed between the arrangement direction of the two second extension portions (105) and the reference axis.

2. The sample resetting device according to claim 1, characterized in that: The winding member (1) is provided with two oppositely arranged winding grooves (101), and an angle is formed between the arrangement direction of the two winding grooves (101) and a reference axis. The suspension wire (2) can be controlled to be wound onto the winding member (1) via the two winding grooves (101).

3. The sample resetting device according to claim 1, characterized in that: The sample resetting device further comprises a manipulator (8) for clamping the winding member (1) and being controllably rotatable about a reference axis, the manipulator (8) comprising two clamping portions for clamping the winding member (1), the winding member (1) being recessed with two oppositely disposed coupling grooves (106), the two coupling grooves (106) being used to accommodate the two clamping portions of the manipulator (8).

4. The sample resetting device according to claim 3, characterized in that: The sample resetting device further comprises a magnetic rod (9) connected to the manipulator (8), wherein the magnetic rod (9) is used to drive the manipulator (8) to rotate around the reference axis and to drive the manipulator (8) to move back and forth linearly along the reference axis; and / or, A protrusion (7) for clamping by the robot (8) is provided in the coupling groove (106).

5. The sample resetting device according to claim 1, characterized in that: The attachment (3) comprises a counterweight portion (301) connected to the suspension line (2) and an attachment portion (302) connected to the counterweight portion (301), wherein the counterweight portion (301) is made of a metal material, and the attachment portion (302) is made of vacuum glue.

6. The sample resetting device according to claim 1, characterized in that: The two wing plates (4) are connected via a connecting rod (6); the one-way bearing (5) comprises an outer ring (501) that rotates synchronously with the winding member (1) and an inner ring (502) that is sleeved on the inner side of the outer ring (501); the connecting rod (6) is passed through the inner side of the inner ring (502) and rotates synchronously with the inner ring (502).

7. The sample resetting device according to claim 1, characterized in that: The winding member (1) comprises a threading hole (107) passing through the winding member in a vertical direction, and the suspension wire (2) is passed through the threading hole (107).

8. A method for resetting a sample using the sample resetting device according to any one of claims 1 to 7, characterized in that: The reset method comprises the following steps: Step 1: The winding member (1) moves to the top of the sample, the winding member (1) rotates around the reference axis in the pay-off direction, and the hanging wire (2) drives the attachment member (3) to move toward the sample until the attachment member (3) is attached to the surface of the sample; Step 2: The winding member (1) rotates around the reference axis in the winding direction, and the hanging wire (2) drives the sample to move upward until the sample moves between the bending parts (401) on both sides. The winding member (1) rotates around the reference axis in the unwinding direction, and flips the sample over to the top of the winding member (1); Step 3: Move the sample to the reset area.

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