Membrane-free water filtering separator for semiconductor-level micro-nano particles

Abstract

The invention discloses a membrane-free water filtering separator for semiconductor-level micro-nano particles. Comprising an air pump assembly and a flotation column, one side face of the flotation column is provided with a wastewater outlet and a to-be-treated water inlet which are vertically arranged at intervals, the other side face of the flotation column is provided with a purified water outlet, the wastewater outlet is communicated with a wastewater collecting area, the to-be-treated water inlet is communicated with a to-be-treated water tank, and the purified water outlet is communicated with a purified water collecting area; an air inlet is formed in the bottom of the flotation column, and the air outlet end of the air pump assembly communicates with the air inlet of the flotation column. Gas generated by the gas pump assembly is blown into the flotation column, an inner pipe of the flotation column is a corundum sintered filter element, and the gas generates micro-nano bubbles through the micro-nano vent holes. Micro-nano-scale impurity particles are adsorbed while the bubbles diffuse along the pipe diameter, the micro-nano-scale impurity particles rise to carry out impurities, and finally, a bubble and impurity collecting device is installed, so that ultra-cleanness of the semiconductor is achieved. Compared with the prior art, the economic benefit of separation of the semiconductor-level micro-nano particles can be improved.

Description

Technical Field

[0001] The present invention relates to a filter separator in the field of ultra-clean control of fluid control component manufacturing, and in particular to a membrane-less water filter separator for semiconductor-grade micro-nano particles. Background Art

[0002] How to achieve ultra-clean control in semiconductor manufacturing is a major challenge in semiconductor manufacturing. If dust particles are inside the chip, it will cause wafer exposure defects, which can easily damage circuit functions, cause short circuits or open circuits, etc., causing integrated circuit failure and reducing the yield and production rate of chip manufacturing.

[0003] Currently, the mainstream method for achieving ultra-clean semiconductors during fluid transport in production is membrane filtration. Fluid passes through a microporous membrane, physically isolating it to remove tiny particles and other impurities. While this purification method is relatively simple in principle, it also has drawbacks. First, the current size of membranes is mostly in the micron range, making them ineffective at removing nanoscale impurities. Furthermore, membrane filtration requires frequent membrane replacement, which consumes a lot of material and can easily lead to membrane clogging, resulting in a decrease in filtration quality. Therefore, there is potential for optimizing and improving the efficiency and cost-effectiveness of existing membrane filtration methods.

[0004] Therefore, it is necessary to propose a method that is better in both filtration efficiency and economy. Summary of the Invention

[0005] To address the challenges and needs presented in this technology, the present invention proposes a novel ultra-clean method for semiconductor manufacturing—a membraneless water filtration device for semiconductor-grade micro- and nanoparticles. This device uses membraneless water filtration to control particle size in fluid delivery and control solutions during semiconductor manufacturing, capable of adsorbing impurities down to the micro- and nano-scale.

[0006] The technical solutions of the present invention are as follows:

[0007] 1. A membraneless water filtration separator for semiconductor-grade micro-nanoparticles

[0008] The membraneless water filtration separator for semiconductor-grade micro-nano particles includes an air pump assembly and a flotation column. A wastewater outlet and a treated water inlet are arranged at intervals in an upper and lower manner on one side of the flotation column. A clean water outlet is provided on the other side of the flotation column. The wastewater outlet is connected to a wastewater collection area, the treated water inlet is connected to a treated water tank, and the clean water outlet is connected to the clean water collection area. An air inlet is provided at the bottom of the flotation column, and the air outlet end of the air pump assembly is connected to the air inlet of the flotation column.

[0009] The height of the clean water outlet is the same as that of the waste water outlet.

[0010] The air pump assembly comprises a filter and an air pump, and the filter is installed at the driving air pressure port of the air pump.

[0011] The flotation column includes an inner tube, a partition and an outer tube. The inner tube is fixedly installed in the outer tube. A wastewater outlet and a treated water inlet are arranged at an upper and lower intervals on one side wall of the outer tube. A clean water outlet is opened on the other side wall of the outer tube. The partition is installed in the outer tube on the side of the inner tube close to the clean water outlet. A gap is set between the bottom of the partition and the bottom of the outer tube. An air inlet is opened at the bottom of the inner tube and is connected to the air outlet end of the air pump assembly.

[0012] The inlet for water to be treated is arranged near the top of the inner tube.

[0013] The inner tube is a filter core made of sintered corundum, and a plurality of micro-nano-level air holes are arranged in the filter core.

[0014] The inner tube is a cylindrical structure that is thin at the top and thick at the bottom.

[0015] The outer tube and the inner tube are connected via threads.

[0016] An air pressure balance valve interface is provided on the top of the inner tube, and the air pressure balance valve interface is communicated with the outside world through a one-way valve.

[0017] 2. A filtration device

[0018] The filtering device comprises the semiconductor-grade micro-nano particle membrane-free water filtering separator.

[0019] The technical solution provided by the present invention has the following effects:

[0020] 1. The separator proposed in the present invention uses an air pump and a corundum sintered filter element to prepare a 10μm diameter bubble group. The bubbles remove micron-sized impurities from the flotation column at a flow rate of 40mL under circulating conditions at a rate of not less than 80%, and the removal rate is not less than 50%, achieving ultra-cleanliness.

[0021] 2. The separator proposed by the present invention does not require manual operation after it starts running. The air pump continuously generates bubbles and enters the flotation column, realizing the flotation process of impurities in the flotation column, thereby improving the ultra-clean impurity removal efficiency of semiconductors. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] To illustrate the embodiments of the present invention in more detail, the following briefly describes the drawings required for use in the embodiments or prior art descriptions. Obviously, the drawings described below are merely embodiments of the present invention, and those skilled in the art can derive other drawings based on the provided drawings without inventive effort.

[0023] Figure 1A front view of a flotation column of a membraneless water filtration separator for semiconductor-grade micro-nano particles provided by an embodiment of the present invention;

[0024] Figure 2 A side view of a flotation column of a membraneless water filtration separator for semiconductor-grade micro-nanoparticles provided by an embodiment of the present invention;

[0025] Figure 3 A cross-sectional view of a flotation column of a membraneless water filtration separator for semiconductor-grade micro-nanoparticles provided in an embodiment of the present invention;

[0026] Figure 4 A front view of the inner tube portion of a flotation column of a membraneless water filtration separator for semiconductor-grade micro-nano particles provided by an embodiment of the present invention;

[0027] Figure 5 A cross-sectional view of the inner tube portion of a flotation column of a membraneless water filtration separator for semiconductor-grade micro-nano particles provided by an embodiment of the present invention;

[0028] Figure 6 Schematic diagram of the structure of a membraneless water filtration separator for semiconductor-grade micro-nano particles provided in an embodiment of the present invention.

[0029] In the figure: driving air pressure port 1, filter 2, ball valve 3, air pump 4, first hose 5, second hose 6, flotation column 7, clean water collection area 8, treated water tank 9, wastewater 10, wastewater outlet 11, treated water inlet 12, inner pipe 13, clean water outlet 14, outer pipe thread 15, partition 16, outer pipe 17, air pressure balance valve interface 18, inner pipe thread 19. DETAILED DESCRIPTION

[0030] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] like Figure 1 、 Figure 2 、 Figure 3 and Figure 6As shown, the membraneless water filtration separator for semiconductor-grade micro-nanoparticles proposed in the present invention includes an air pump assembly and a flotation column 7. A wastewater outlet 11 and a treated water inlet 12 are arranged in an upper and lower spaced relationship on one side of the flotation column 7. A clean water outlet 14 is provided on the other side of the flotation column 7. The height of the clean water outlet 14 is the same as that of the wastewater outlet 11. Wastewater 10 flows out of the wastewater outlet 11 and is connected to the wastewater collection area through a second hose 6. The treated water inlet 12 is connected to the treated water tank 9 through a first hose 5. The clean water outlet 14 is connected to the clean water collection area 8 through a second hose 6. An air inlet is provided at the bottom of the flotation column 7. The air outlet end of the air pump assembly is connected to the air inlet of the flotation column 7 through the first hose 5. An air pump delivers air into the flotation column, and the air generates micro-nano bubbles after passing through the corundum sintered filter core. The bubbles adhere to hydrophobic impurities and float up to carry out the impurities while diffusing radially in the contact area separated by the partition in the flotation column. Finally, the liquid containing more impurities is discharged from the upper part of the flotation column. The turbid liquid is collected into the bubble generating liquid circulation pool through a hose, and the clean water flows out from the clean water pipe port separated by the partition and is collected and flows into the clean water collection device, thereby achieving ultra-clean semiconductors. The cleaning method of this micro-nano particle membraneless water filtration device can better remove the nano impurities generated during the manufacturing process of flow control components, thereby maintaining ultra-clean control of the manufacturing process. Compared with traditional membrane filtration technology, the membraneless water filtration separator proposed by the present invention reduces the problems of frequent membrane replacement and high consumables.

[0032] The air pump assembly consists of a filter 2, a ball valve 3, and an air pump 4. The filter 2 is installed at the drive air pressure port 1 of the air pump 4. The ball valve 3 is also installed in the air pump 4, serving as an air inlet switch valve. The air pump is a piston-type air pump, a mechanical device that uses the reciprocating motion of a piston within a cylinder to compress and transport air. Its operation can be divided into four main stages: intake, compression, exhaust, and expansion (return stroke). During the intake process, the piston moves downward, increasing the volume within the cylinder and reducing the air pressure, allowing air to enter the cylinder through a one-way valve. During the compression process, the piston moves upward, decreasing the volume within the cylinder, compressing the air and increasing the pressure. During the exhaust process, when the pressure within the cylinder exceeds the set value of the exhaust valve, the compressed air is discharged from the cylinder through the exhaust valve. This discharged air is then pumped into a flotation column, the inner tube of which is a corundum sintered filter element. The air passes through micro- and nano-scale air permeabilities, generating micro- and nano-sized bubbles. These micro-nano bubbles have a large specific surface area and high dissolution efficiency, and due to their small size, they have a long residence time and high stability, are not easy to merge and dissipate, and can remain in the liquid for a long time.

[0033] The flotation column 7 includes an inner tube 13, a partition 16, and an outer tube 17. The inner tube 13 is fixedly installed in the outer tube 17. The bottom of the inner tube 13 is connected to the bottom of the outer tube 17 through the inner tube thread 19 and the outer tube thread 15. A wastewater outlet 11 and a treated water inlet 12 are arranged at an upper and lower intervals on one side wall of the outer tube 17. A clean water outlet 14 is opened on the other side wall of the outer tube 17. The treated water inlet 12 is set near the top of the inner tube 13. The partition 16 is installed in the outer tube 17 on the side of the inner tube 13 near the clean water outlet 14. The function of the partition 16 is to isolate the contact flotation area and the clean water outlet area in the flotation column. A gap is set between the bottom of the partition 16 and the bottom of the outer tube 17. The bottom of the inner tube 13 is provided with an air inlet and is connected to the air outlet end of the air pump assembly through the first hose 5.

[0034] like Figure 4 and Figure 5 As shown, the inner tube 13 is a filter element made of sintered corundum, and a plurality of micro-nano-scale air holes are arranged in the filter element. The gas passes through the micro-nano-scale air holes of the inner tube to generate micro-nano-scale bubbles.

[0035] The inner tube 13 is a cylindrical structure that is thin at the top and thick at the bottom, the purpose of which is to increase the contact area and prolong the contact time between the bubbles and the impurities.

[0036] An air pressure balance valve interface 18 is provided at the top of the inner tube 13 . The air pressure balance valve interface 18 is connected to the outside through a one-way valve and is used to balance the air pressure in the flotation column.

[0037] The separator works as follows:

[0038] The ultra-clean process in the semiconductor ultra-clean field can be achieved by allowing various wastewater solutions to flow through the treatment water tank 9 and then into the flotation column 7. Gas flows from the driving air pressure port 1 through the filter 2 and the piston air pump 4 to generate high-pressure gas. The gas flows through the inner tube 13 and becomes micro-nano bubbles that are then pumped into the flotation column. During this process, the bubbles diffuse radially and float upward. The bubbles absorb particles in the treatment water. Hydrophobic impurities will adhere to the bubbles, and then the bubbles rise and carry away the impurities. Influenced by the position of the partition 16, the flotation column is divided into a left contact flotation zone and a right clean water zone. The filtered clean water is collected through the clean water outlet 14, thus achieving an ultra-clean process.

[0039] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. A membrane-free water filtration separator for semiconductor-grade micro-nano particles, characterized in that: The invention comprises an air pump assembly and a flotation column (7). A wastewater outlet (11) and a to-be-treated water inlet (12) arranged in an upper and lower interval are provided on one side of the flotation column (7). A clean water outlet (14) is provided on the other side of the flotation column (7). The wastewater outlet (11) is connected to a wastewater collection area. The to-be-treated water inlet (12) is connected to a to-be-treated water tank (9). The clean water outlet (14) is connected to a clean water collection area (8). An air inlet is provided at the bottom of the flotation column (7). The air outlet end of the air pump assembly is connected to the air inlet of the flotation column (7).

2. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 1, characterized in that: The height of the clean water outlet (14) is the same as the height of the waste water outlet (11).

3. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 1, characterized in that: The air pump assembly comprises a filter (2) and an air pump (4), and the filter (2) is installed at the driving air pressure port (1) of the air pump (4).

4. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 1, characterized in that: The flotation column (7) comprises an inner tube (13), a partition (16) and an outer tube (17); the inner tube (13) is fixedly mounted inside the outer tube (17); a wastewater outlet (11) and a to-be-treated water inlet (12) are arranged at intervals in the upper and lower sides at one side wall of the outer tube (17); a clean water outlet (14) is disposed at the other side wall of the outer tube (17); the partition (16) is mounted inside the outer tube (17) on the side of the inner tube (13) close to the clean water outlet (14); a gap is provided between the bottom of the partition (16) and the bottom of the outer tube (17); an air inlet is disposed at the bottom of the inner tube (13) and is communicated with the air outlet of the air pump assembly.

5. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 1, characterized in that: The inlet (12) for the water to be treated is arranged near the top of the inner tube (13).

6. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 4, characterized in that: The inner tube (13) is a corundum sintered filter core, and a plurality of micro-nano-scale air permeable holes are arranged in the filter core.

7. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 4, characterized in that: The inner tube (13) is a cylindrical structure that is thin at the top and thick at the bottom.

8. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 4, characterized in that: The outer tube (17) and the inner tube (13) are connected via threads.

9. The membraneless water filtration separator of semiconductor-grade micro-nano particles according to claim 4, characterized in that: A gas pressure balance valve interface (18) is provided at the top of the inner tube (13), and the gas pressure balance valve interface (18) is connected to the outside through a one-way valve.

10. A filtering device, characterized in that: A membraneless water filtration separator comprising the semiconductor-grade micro-nano particles according to claim 1.

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