A sealed structure, a gallium nitride production reactor and a horizontal gallium nitride production system

Abstract

The present invention relates to the field of sealing technology, and in particular to a sealing structure, a gallium nitride production reactor and a horizontal gallium nitride production system. The sealing structure comprises a main body, a protective ring, a conduit, a piston, a pressure sensor, a gas detection sensor and a data center. An inlet flange is provided at the air inlet end of the main body. An annular groove is provided on the inner ring wall of the protective ring, the protective ring is sleeved on the inlet flange, the sealing surface of the inlet flange is arranged corresponding to the annular groove, and a sealing treatment is performed between the protective ring and the inlet flange. One end of the conduit is fixedly connected to the protective ring and communicated with the annular groove, and the conduit is arranged along the axial direction of the main body. The piston is slidably fitted in the conduit. A plug rod is fixedly connected to the side of the piston away from the protective ring. The pressure sensor is used to detect the air pressure in the annular groove, and the gas detection sensor is used to detect whether there is corresponding gas in the annular groove. The pressure sensor and the gas detection sensor are both electrically connected to the data center. It can monitor the sealing effect in real time.

Description

Technical Field

[0001] The present invention relates to the field of sealing technology, and in particular to a sealing structure, a gallium nitride production reactor and a horizontal gallium nitride production system. Background Art

[0002] For pipes with airtightness requirements, sealing performance is directly related to their use effect. In traditional sealing solutions, it is impossible to monitor the sealing effect in real time, especially it is difficult to monitor trace gas leakage, which is not conducive to the continuous use of these pipes in environments with high airtightness requirements.

[0003] In view of this, this application is hereby filed. Summary of the invention

[0004] The first object of the present invention is to provide a sealing structure which can monitor the sealing effect in real time and has a high monitoring sensitivity for trace leakage of gas.

[0005] The second object of the present invention is to provide a gallium nitride production reactor, which can monitor the sealing effect of the raw gas in the production process in real time, and has a high monitoring sensitivity for trace leakage of the raw gas, while making the structural components easier to observe, install and maintain.

[0006] The third object of the present invention is to provide a horizontal gallium nitride production system, which can monitor the raw gas sealing effect of the production process in real time during the production process, and also has a high monitoring sensitivity for trace leakage of the raw gas, thereby effectively improving the overall safety and reliability.

[0007] The embodiment of the present invention is achieved as follows:

[0008] A sealing structure comprises: a main pipe body, a protective ring, a conduit, a piston, a pressure sensor, a gas detection sensor and a data center.

[0009] The air inlet end of the main body is provided with an air inlet flange. The inner ring wall of the protective ring is provided with an annular groove, the protective ring is sleeved on the air inlet flange, the sealing surface of the air inlet flange is provided corresponding to the annular groove, and a sealing treatment is performed between the protective ring and the air inlet flange.

[0010] One end of the conduit is fixedly connected to the protective ring and communicated with the annular groove, and the conduit is arranged along the axial direction of the main pipe body. The piston is slidably fitted in the conduit, and a sliding seal is formed between the piston and the conduit. A plug rod is fixedly connected to the side of the piston away from the protective ring, and the plug rod extends out of the conduit.

[0011] The pressure sensor is used to detect the air pressure in the annular groove, and the gas detection sensor is used to detect whether there is corresponding gas in the annular groove. Both the pressure sensor and the gas detection sensor are electrically connected to the data center.

[0012] The piston is driven by a driving mechanism so that the piston can move between an end of the catheter close to the retaining ring and an end of the catheter away from the retaining ring.

[0013] Furthermore, a mounting hole is provided on one side of the piston close to the protective ring, and the mounting hole includes a first hole segment, a second hole segment and a third hole segment that are connected to each other. The third hole segment is located at an end of the first hole segment away from the protective ring, and the second hole segment is located between the first hole segment and the third hole segment. The apertures of the first hole segment and the third hole segment are both smaller than the aperture of the second hole segment.

[0014] A first sliding member is slidably matched in the first hole section, and the first sliding member is slidably sealed with the first hole section. A second sliding member is slidably matched in the second hole section, and the second sliding member is slidably sealed with the second hole section. A third sliding member is slidably matched in the third hole section. Both the first sliding member and the third sliding member are fixedly connected to the second sliding member.

[0015] The middle part of the side wall of the first sliding member is provided with an installation groove, and the gas detection sensor is arranged in the installation groove. An elastic member is abutted between the third sliding member and the end of the third hole section away from the protective ring, so that in a natural state, the second sliding member abuts against the end of the second hole section close to the first hole section, thereby moving the installation groove into the annular groove.

[0016] The piston has an inner cavity, and a window communicating with the inner cavity is provided on the side wall where the piston fits the catheter. A roller is installed in the inner cavity, and the roller contacts the inner wall of the catheter through the window, so that when the piston moves along the catheter, the roller can roll along with it.

[0017] The piston is also provided with a first air passage and a second air passage, wherein the first air passage connects the inner cavity with the second hole section, and the second air passage extends from the second hole section to a side wall of the piston away from the protective ring. An air supply mechanism for supplying air to the first air passage is provided in the inner cavity.

[0018] The side wall of the third hole section is provided with a strip-shaped notch, which extends along the axial direction of the third hole section, and connects the third hole section with the inner cavity. The third sliding member is fixedly connected with an extension arm extending into the inner cavity.

[0019] The inner cavity is also provided with a toggle wheel and an internal meshing ratchet mechanism. The toggle wheel rotates and cooperates with the inner cavity, and the toggle wheel has a toggle arm. The inner ratchet wheel of the internal meshing ratchet mechanism cooperates with the roller in transmission, and the ratchet plate of the internal meshing ratchet mechanism cooperates with the air supply mechanism and the toggle wheel in transmission.

[0020] The piston is provided with an air inlet pipe, one end of which is communicated with the inner cavity, and the other end of which extends out of the guide tube.

[0021] When the piston moves toward the side away from the protective ring, the roller rotates, the inner ratchet drives the pawl plate, the pawl plate drives the air supply mechanism and the toggle wheel, so that the toggle wheel uses the toggle arm to push the extension arm toward the side away from the protective ring, so that the installation groove moves to the second hole section.

[0022] Furthermore, when the mounting groove moves to the middle of the second hole section, an end portion of the first sliding member away from the second sliding member is located in the first hole section.

[0023] Furthermore, the mounting groove is located on a side of the first sliding member close to the first air channel.

[0024] A gallium nitride production reactor comprises: a first furnace body, a second furnace body and the above-mentioned sealing structure.

[0025] Among them, the main pipe of the sealing structure is a quartz tube, and the gas detection sensor is used to detect the raw gas used in gallium nitride production.

[0026] The first furnace body and the second furnace body are both sleeved on the main pipe body, and both are used to heat the main pipe body. Along the axial direction of the main pipe body, the first furnace body can be slidably matched with the main pipe body and the movement is controlled by the driver.

[0027] The driving mechanism is composed of a first furnace body and a driver, and the plug rod is in driving cooperation with the first furnace body. When the first furnace body is in cooperation with the second furnace body, the piston is located at the end of the guide tube close to the protection ring. When the first furnace body is separated from the second furnace body, the piston is located at the end of the guide tube away from the protection ring.

[0028] Furthermore, the second furnace body comprises a first half furnace body and a second half furnace body, and the first half furnace body and the second half furnace body are detachably connected to surround the main pipe body.

[0029] Furthermore, the heating temperature of the first furnace body is higher than the heating temperature of the second furnace body.

[0030] A horizontal gallium nitride production system comprises: the gallium nitride production reactor mentioned above.

[0031] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0032] During use of the sealing structure provided by the embodiment of the present invention, when the piston is located at the end of the conduit close to the guard ring, the pressure sensor can detect the air pressure in the annular groove. If the air pressure in the annular groove increases, or the gas detection sensor detects the presence of gas, it means that there is a problem with the sealing of the intake flange.

[0033] When the piston is driven by the driving mechanism and moves toward the end of the conduit away from the protective ring, the air pressure in the annular groove continues to drop during this process, which can increase the pressure difference between the inside and outside of the intake flange. If there is a defect in the sealing of the intake flange, it is easier to show up under a larger pressure difference. In other words, if there is a problem with the sealing of the intake flange, it is more likely to leak under a larger pressure difference. This strengthens the detection of the sealing of the intake flange.

[0034] Therefore, the driving mechanism can be used to drive the piston according to actual detection needs to complete the above detection work.

[0035] In general, the sealing structure provided by the embodiment of the present invention can monitor the sealing effect in real time and has a high monitoring sensitivity for trace leakage of gas.

[0036] The gallium nitride production reactor provided by the embodiment of the present invention can monitor the sealing effect of the raw gas in the production process in real time, and also has a high monitoring sensitivity for trace leakage of the raw gas, while making the structural components easier to observe, install and maintain.

[0037] The horizontal gallium nitride production system provided by the embodiment of the present invention can monitor the raw material gas sealing effect of the production process in real time during the production process, and also has a high monitoring sensitivity for trace leakage of the raw material gas, thereby effectively improving the overall safety and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0039] Figure 1 A schematic diagram of the overall structure of a sealing structure provided by an embodiment of the present invention;

[0040] Figure 2 It is a structural schematic diagram of the connection between the conduit and the protective ring;

[0041] Figure 3 It is a schematic diagram of the structure at the piston (when the piston is not moving);

[0042] Figure 4 It is a schematic diagram of the structure of the end of the catheter away from the protective ring;

[0043] Figure 5 The schematic diagram of the structure at the piston (when the piston moves to the side away from the guard ring);

[0044] Figure 6 A schematic diagram of the overall structure of a gallium nitride production reactor provided by an embodiment of the present invention (when the first furnace body and the second furnace body are not separated);

[0045] Figure 7 A schematic diagram of the overall structure of a gallium nitride production reactor provided by an embodiment of the present invention (when the first furnace body and the second furnace body are separated);

[0046] Figure 8 A schematic diagram of the overall structure of a gallium nitride production reactor provided in an embodiment of the present invention (when the second furnace body is opened).

[0047] Description of reference numerals:

[0048] A first furnace body 100; a second furnace body 200; a first half furnace body 210; a second half furnace body 220;

[0049] Main body 300; intake flange 310; protective ring 400; annular groove 410; conduit 500; piston 600; plug rod 601; first hole section 610; second hole section 620; third hole section 630; strip notch 631; first sliding member 640; mounting groove 641; second sliding member 650; third sliding member 660; elastic member 661; extension arm 662; inner cavity 670; first air channel 680; second air channel 690; roller 710; air supply mechanism 720; toggle wheel 730; toggle arm 731; internal meshing ratchet mechanism 740; inner ratchet 741; ratchet plate 742; intake pipe 750; gas detection sensor 800. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0051] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0053] The terms “first”, “second”, “third”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0054] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0055] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0056] In order to overcome the shortcomings of the prior art, please refer to Figure 1~Figure 5 This embodiment provides a sealing structure, which includes: a main body 300, a protective ring 400, a conduit 500, a piston 600, a pressure sensor (not shown in the figure), a gas detection sensor 800 and a data center (not shown in the figure).

[0057] The sealing structure can be used in sealing solutions for pipe fittings, and is particularly suitable for gas pipe fittings, but is not limited thereto.

[0058] An air inlet flange 310 is provided at the air inlet end of the main pipe body 300 for conveying gas into the main pipe body 300 .

[0059] The inner ring wall of the protective ring 400 is provided with an annular groove 410, and the protective ring 400 is sleeved on the air inlet flange 310. The inner ring wall of the protective ring 400 fits with the outer ring wall of the air inlet flange 310, and the sealing surface of the air inlet flange 310 (i.e., the surface where the two flanges fit) is arranged corresponding to the annular groove 410, so that the fitting seam of the air inlet flange 310 (such as Figure 1 The fitting seam X) shown is arranged corresponding to the annular groove 410. A sealing treatment is performed between the protective ring 400 and the air inlet flange 310.

[0060] One end of the conduit 500 is fixedly connected to the protective ring 400 and communicated with the annular groove 410. The conduit 500 is arranged along the axial direction of the main body 300. The piston 600 is slidably fitted in the conduit 500, and a sliding seal is formed between the piston 600 and the conduit 500. A plug rod 601 is fixedly connected to the side of the piston 600 away from the protective ring 400. The plug rod 601 extends along the axial direction of the conduit 500 and extends outside the conduit 500.

[0061] The pressure sensor is disposed in the annular groove 410 to detect the air pressure in the annular groove 410 .

[0062] The gas detection sensors 800 are used to detect whether there is corresponding gas in the annular groove 410. The specific type of gas detected by the gas detection sensor 800 can be flexibly adjusted according to actual conditions. Normally, the gas detected by the gas detection sensor 800 is one or more of the gases in the main pipe 300.

[0063] If the gas detection sensor 800 detects the presence of the corresponding gas, it means that gas leakage has occurred at the joint of the air inlet flange 310 and there is a problem with its sealing.

[0064] The pressure sensor and the gas detection sensor 800 are both electrically connected to the data center.

[0065] The piston 600 is driven by a driving mechanism so that the piston 600 can move between an end of the catheter 500 close to the retaining ring 400 and an end of the catheter 500 away from the retaining ring 400 .

[0066] During use, when the piston 600 is located at one end of the conduit 500 close to the guard ring 400, the pressure sensor can detect the air pressure in the annular groove 410. If the air pressure in the annular groove 410 increases, or the gas detection sensor 800 detects the presence of gas, it means that there is a problem with the sealing of the inlet flange 310.

[0067] When the piston 600 is driven by the driving mechanism through the plug rod 601, the piston 600 moves toward the end of the conduit 500 away from the guard ring 400. During this process, the air pressure in the annular groove 410 continues to decrease, which can increase the pressure difference between the inside and outside of the air inlet flange 310. If there is a defect in the sealing of the air inlet flange 310, it is easier to reveal under a larger pressure difference. In other words, if there is a problem with the sealing of the air inlet flange 310, it is easier to leak under a larger pressure difference. In this way, the detection of the sealing of the air inlet flange 310 is strengthened.

[0068] Therefore, the driving mechanism can be used to drive the piston according to actual detection needs to complete the above detection work.

[0069] In addition, since the pressure and gas concentration in the annular groove 410 change, the electrical data of the pressure sensor and the gas detection sensor 800 can be stimulated to change, thereby reducing the inertia of the pressure sensor and the gas detection sensor 800.

[0070] When the piston 600 is located at the end of the conduit 500 away from the protective ring 400, if the inlet flange 310 leaks gas during this process, that is, leaks under a larger pressure difference, when the piston 600 begins to reset (that is, returns to the end of the conduit 500 close to the protective ring 400), the gas in the annular groove 410 and the conduit 500 will be recompressed during this process. If there was gas leakage before, the air pressure in the annular groove 410 after reset will be greater than the previous air pressure, which can amplify the detection sensitivity of the pressure sensor. In addition, since the gas is recompressed after reset, the concentration of the gas can also be amplified, which is convenient for the gas detection sensor 800 to detect the gas entering the annular groove 410.

[0071] The data center can be used to centrally manage the test results and alert management personnel of sealing problems based on the test results.

[0072] In general, the sealing structure provided in this embodiment can monitor the sealing effect in real time and has a high monitoring sensitivity for trace leakage of gas.

[0073] For further information, please refer to Figure 1~Figure 5 In this embodiment, a mounting hole is provided on one side of the piston 600 close to the protective ring 400, and the mounting hole includes a first hole section 610, a second hole section 620, and a third hole section 630 that are connected. The first hole section 610, the second hole section 620, and the third hole section 630 are coaxially arranged and are all arranged along the axial direction of the catheter 500.

[0074] The third hole segment 630 is located at one end of the first hole segment 610 away from the protective ring 400 , and the second hole segment 620 is located between the first hole segment 610 and the third hole segment 630 . The apertures of the first hole segment 610 and the third hole segment 630 are both smaller than the aperture of the second hole segment 620 .

[0075] The first sliding member 640 is slidably matched in the first hole section 610, and the outer wall of the first sliding member 640 is in contact with the inner wall of the first hole section 610, and the first sliding member 640 is slidably sealed with the first hole section 610. The second sliding member 650 is slidably matched in the second hole section 620, and the outer wall of the second sliding member 650 is in contact with the inner wall of the second hole section 620, and the second sliding member 650 is slidably sealed with the second hole section 620. The third sliding member 660 is slidably matched in the third hole section 630, and the outer wall of the third sliding member 660 is in contact with the inner wall of the third hole section 630. The first sliding member 640 and the third sliding member 660 are both fixedly connected to the second sliding member 650.

[0076] A mounting groove 641 is provided in the middle of the side wall of the first sliding member 640, and the gas detection sensor 800 is arranged in the mounting groove 641. An elastic member 661 is abutted between the third sliding member 660 and the end of the third hole section 630 away from the protective ring 400. In a natural state, under the elastic force of the elastic member 661, the elastic member 661 pushes the third sliding member 660, so that the second sliding member 650 abuts against the end of the second hole section 620 close to the first hole section 610, so that the end of the first sliding member 640 away from the second sliding member 650 extends out of the piston 600, and the mounting groove 641 moves to the outside of the piston 600. When the piston 600 is located at the end of the conduit 500 close to the protective ring 400, the mounting groove 641 can extend into the annular groove 410.

[0077] The piston 600 has an inner cavity 670. The side wall of the piston 600 that is in contact with the conduit 500 is provided with a window that is in communication with the inner cavity 670. A roller 710 is installed in the inner cavity 670. The roller 710 contacts the inner wall of the conduit 500 through the window. The wheel surface of the roller 710 is in contact with the inner wall of the conduit 500, so that when the piston 600 moves along the conduit 500, the roller 710 can roll along with it. The rotation axis of the roller 710 is arranged perpendicular to the central axis of the conduit 500.

[0078] The piston 600 is also provided with a first air passage 680 and a second air passage 690. The first air passage 680 connects the inner cavity 670 with the second hole section 620, and the end of the first air passage 680 is located at the inner side wall of the second hole section 620. The second air passage 690 extends from the inner side wall of the second hole section 620 away from the first air passage 680 to the side wall of the piston 600 away from the protective ring 400, that is, the second air passage 690 connects the space of the second hole section 620 and the side of the piston 600 away from the protective ring 400.

[0079] An air supply mechanism 720 for supplying air into the first air passage 680 is disposed in the inner cavity 670. The air supply mechanism 720 may be a turbine, but is not limited thereto.

[0080] The side wall of the third hole section 630 is provided with a strip-shaped notch 631, which extends along the axial direction of the third hole section 630 and connects the third hole section 630 with the inner cavity 670. The third sliding member 660 is fixedly connected with an extension arm 662 extending into the inner cavity 670.

[0081] The inner cavity 670 is also provided with a toggle wheel 730 and an inner meshing ratchet mechanism 740. The toggle wheel 730 is rotatably engaged with the inner cavity 670, and the toggle wheel 730 has a toggle arm 731, and a plurality of toggle arms 731 are evenly spaced along the circumference of the toggle wheel 730. The inner ratchet 741 of the inner meshing ratchet mechanism 740 is in transmission engagement with the roller 710, and the pawl plate 742 of the inner meshing ratchet mechanism 740 is in transmission engagement with the air supply mechanism 720 and the toggle wheel 730.

[0082] The piston 600 has an air inlet pipe 750, one end of which is connected to the inner cavity 670, and the other end of which extends along the axial direction of the conduit 500 and extends outside the conduit 500. The outer end of the air inlet pipe 750 is also bent along the radial direction of the conduit 500 and extends along the radial direction of the conduit 500.

[0083] When the piston 600 moves toward the side away from the protective ring 400, the roller 710 rotates, the inner ratchet 741 drives the ratchet plate 742, and the ratchet plate 742 drives the air supply mechanism 720 and the toggle wheel 730. At this time, the air supply mechanism 720 supplies air into the first air passage 680, and the toggle wheel 730 uses the toggle arm 731 to push the extension arm 662 toward the side away from the protective ring 400, so that the installation groove 641 moves to the second hole section 620. When the toggle wheel 730 continues to rotate synchronously with the roller 710, the toggle arm 731 continues to intermittently toggle the extension arm 662, so that the extension arm 662 is always kept at the end of the strip notch 631 away from the protective ring 400. In this way, the third sliding member 660 continuously compresses the elastic member 661, and the second sliding member 650 is pulled by the third sliding member 660 and moves to the end of the second hole section 620 away from the first hole section 610, and the first sliding member 640 also moves synchronously into the second hole section 620, so that the end of the first sliding member 640 away from the protective ring 400 and the mounting groove 641 both move into the second hole section 620, while the end of the first sliding member 640 close to the protective ring 400 is still located in the first hole section 610.

[0084] Among them, when the second sliding member 650 is located at one end of the second hole section 620 close to the first hole section 610, the second sliding member 650 closes the first air channel 680 and the second air channel 690; when the second sliding member 650 is located at one end of the second hole section 620 away from the first hole section 610, the first air channel 680 and the second air channel 690 are both connected to the second hole section 620, and the first air channel 680 and the second air channel 690 are connected through the second hole section 620.

[0085] When the piston 600 moves toward the side away from the protective ring 400, the air inlet pipe 750 continuously introduces external air into the inner cavity 670, and the air supply mechanism 720 delivers the air in the inner cavity 670 into the first air channel 680, so that the air enters the second hole section 620 through the first air channel 680 to flush the gas detection sensor 800 in the mounting groove 641, and finally leaves the second hole section 620 through the second air channel 690.

[0086] Through this design, when the piston 600 moves toward the side away from the protective ring 400, the gas detection sensor 800 can be calibrated to zero to ensure its detection accuracy and sensitivity.

[0087] When the piston 600 moves toward the end of the conduit 500 close to the guard ring 400 and resets, the roller 710 will also roll during this process, but the inner ratchet 741 will not drive the pawl plate 742, and the air supply mechanism and the toggle wheel 730 will not rotate. Under the action of the elastic member 661, the first sliding member 640, the second sliding member 650 and the first sliding member 640 are all reset, the installation groove 641 is extended from the piston 600 again, and the gas detection sensor 800 is in contact with the gas in the annular groove 410 again to detect the gas.

[0088] In order to ensure accurate and stable transmission, the pawl plate 742 is constructed to rotate and fit in the inner cavity 670 with damping.

[0089] Optionally, the mounting groove 641 is located on a side of the first sliding member 640 close to the first air channel 680, and the second air channel 690 is located on a side of the mounting groove 641 away from the first air channel 680, so as to enhance the flushing effect of the airflow on the gas detection sensor 800 and optimize the calibration effect.

[0090] This embodiment further provides a gallium nitride production reactor, which includes: a first furnace body 100, a second furnace body 200 and the above-mentioned sealing structure.

[0091] At this time, the main tube 300 of the sealing structure is a quartz tube, and the gas detection sensor 800 is used to detect the raw material gas used in the production of gallium nitride, such as hydrogen gas, hydrogen chloride gas, etc., but is not limited thereto.

[0092] The first furnace body 100 and the second furnace body 200 are both sleeved on the main tube 300, and both are used to heat (eg, electrically heat) the main tube 300. When used for gallium nitride production, the main tube 300 is used to place related components and raw materials, but is not limited thereto.

[0093] The first furnace body 100 is slidably matched with the main tube 300 along the axial direction of the main tube 300 , and the movement of the first furnace body 100 is controlled by a driver (not shown in the figure).

[0094] The driving mechanism is composed of the first furnace body 100 and the driver, and the plug rod 601 is in driving cooperation with the first furnace body 100. When the first furnace body 100 is in cooperation with the second furnace body 200, the piston 600 is located at the end of the conduit 500 close to the protective ring 400. When the first furnace body 100 is separated from the second furnace body 200, the piston 600 is located at the end of the conduit 500 away from the protective ring 400.

[0095] During production, the first furnace body 100 and the second furnace body 200 are attached and matched, and the first furnace body 100 and the second furnace body 200 heat a specific position of the main body 300 together. After the production is completed, or at a necessary point in the production process, the driver can be used to drive the first furnace body 100 away from the second furnace body 200 to expose the corresponding part of the main body 300, so as to facilitate observation or related operations (including but not limited to: installation of related components, maintenance).

[0096] Optionally, the second furnace body 200 may also be configured as a first half furnace body 210 and a second half furnace body 220, and the first half furnace body 210 and the second half furnace body 220 are detachably connected to surround the main body 300. The first half furnace body 210 and the second half furnace body 220 may be detachably connected in the form of hinged connection on one side and buckled connection on the other side, but is not limited thereto.

[0097] With this design, after the first furnace body 100 is removed, the second furnace body 200 is opened, so that the exposed area of ​​the main body 300 becomes larger, making it easier to observe and perform related operations.

[0098] Correspondingly, the first furnace body 100 can be used as a high-temperature heating furnace body in a high-temperature section, and the second furnace body 200 can be used as a low-temperature heating furnace body in a low-temperature section, that is, the heating temperature of the first furnace body 100 is higher than the heating temperature of the second furnace body 200. Since the second furnace body 200 will be opened, such a design can reduce heat loss during the opening process.

[0099] That is, when the driver drives the first furnace body 100, it will synchronously drive the plug rod 601. The first furnace body 100 and the plug rod 601 can be matched with each other through components including but not limited to gears, racks, etc., and the transmission ratio between the two can be flexibly set according to actual needs, which will not be elaborated in this application.

[0100] Specifically, during the use of the gallium nitride production reactor, when the first furnace body 100 and the second furnace body 200 are matched (fitted), the piston 600 is located at one end of the guide tube 500 close to the guard ring 400. The pressure sensor can detect the air pressure in the annular groove 410. If the air pressure in the annular groove 410 increases, or the gas detection sensor 800 detects the presence of gas, it means that there is a problem with the sealing of the air inlet flange 310.

[0101] In addition, when the first furnace body 100 is driven by the driver, the first furnace body 100 is separated from the second furnace body 200, and the piston 600 is also driven synchronously, and the piston 600 moves toward the end of the conduit 500 away from the protective ring 400. In this process, the air pressure in the annular groove 410 continues to decrease, which can increase the pressure difference between the inside and outside of the air inlet flange 310. If there is a defect in the sealing of the air inlet flange 310, it is easier to show under a larger pressure difference. In other words, if there is a problem with the sealing of the air inlet flange 310, it is easier to leak under a larger pressure difference. In this way, the detection of the sealing of the air inlet flange 310 is strengthened.

[0102] When the separation movement of the first furnace body 100 is completed, the piston 600 is located at the end of the guide tube 500 away from the protection ring 400 .

[0103] If gas leakage occurs in the inlet flange 310 during this process, that is, leakage occurs under a greater pressure difference, when the first furnace body 100 is reset, the piston 600 is also reset, and the gas in the annular groove 410 and the conduit 500 will be recompressed during this process. If gas has leaked out before, the gas pressure in the annular groove 410 after reset will be greater than the gas pressure before the first furnace body 100 and the second furnace body 200 are separated, and the detection sensitivity of the pressure sensor can be amplified. In addition, since the gas is recompressed after reset, the concentration of the gas can also be amplified, which is convenient for the gas detection sensor 800 to detect the gas entering the annular groove 410.

[0104] This embodiment also provides a horizontal gallium nitride production system, which includes: the above-mentioned gallium nitride production reactor.

[0105] In summary, the sealing structure provided in the embodiment of the present invention can monitor the sealing effect in real time and also has a high monitoring sensitivity for trace leakage of gas.

[0106] The gallium nitride production reactor provided by the embodiment of the present invention can monitor the sealing effect of the raw gas in the production process in real time, and also has a high monitoring sensitivity for trace leakage of the raw gas, while making the structural components easier to observe, install and maintain.

[0107] The horizontal gallium nitride production system provided by the embodiment of the present invention can monitor the raw material gas sealing effect of the production process in real time during the production process, and also has a high monitoring sensitivity for trace leakage of the raw material gas, thereby effectively improving the overall safety and reliability.

[0108] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A sealing structure, characterized in that: include: Main bodies, retaining rings, conduits, pistons, pressure sensors, gas detection sensors and data centers; The air inlet end of the main body is provided with an air inlet flange; the inner ring wall of the protective ring is provided with an annular groove, the protective ring is sleeved on the air inlet flange, the sealing surface of the air inlet flange is arranged corresponding to the annular groove, and a sealing treatment is performed between the protective ring and the air inlet flange; One end of the conduit is fixedly connected to the protective ring and communicated with the annular groove, and the conduit is arranged along the axial direction of the main pipe body; the piston is slidably fitted in the conduit, and a sliding seal is formed between the piston and the conduit; a plug rod is fixedly connected to the side of the piston away from the protective ring, and the plug rod extends out of the conduit; The pressure sensor is used to detect the air pressure in the annular groove, and the gas detection sensor is used to detect whether there is corresponding gas in the annular groove; the pressure sensor and the gas detection sensor are both electrically connected to the data center; The piston is driven by a driving mechanism so that the piston can move between an end of the catheter close to the retaining ring and an end of the catheter away from the retaining ring; A mounting hole is provided on a side of the piston close to the protective ring, the mounting hole comprises a first hole section, a second hole section and a third hole section which are connected to each other, the third hole section is located at an end of the first hole section away from the protective ring, the second hole section is located between the first hole section and the third hole section, and the apertures of the first hole section and the third hole section are both smaller than the aperture of the second hole section; A first sliding member is slidably matched in the first hole section, and the first sliding member is slidably sealed with the first hole section; a second sliding member is slidably matched in the second hole section, and the second sliding member is slidably sealed with the second hole section; a third sliding member is slidably matched in the third hole section; the first sliding member and the third sliding member are both fixedly connected to the second sliding member; A mounting groove is provided in the middle of the side wall of the first sliding member, and the gas detection sensor is arranged in the mounting groove; an elastic member is abutted between the third sliding member and an end of the third hole section away from the protective ring, so that in a natural state, the second sliding member abuts against an end of the second hole section close to the first hole section, thereby moving the mounting groove into the annular groove; The piston has an inner cavity, and a window communicating with the inner cavity is provided on the side wall of the piston that is in contact with the conduit. A roller is installed in the inner cavity, and the roller contacts the inner wall of the conduit through the window, so that when the piston moves along the conduit, the roller can roll along with it; The piston is also provided with a first air passage and a second air passage, wherein the first air passage connects the inner cavity with the second hole section, and the second air passage extends from the second hole section to a side wall of the piston away from the protective ring; an air supply mechanism for supplying air into the first air passage is provided in the inner cavity; A strip-shaped notch is formed on the side wall of the third hole segment, and the strip-shaped notch extends along the axial direction of the third hole segment, and the strip-shaped notch connects the third hole segment with the inner cavity; the third sliding member is fixedly connected with an extension arm extending into the inner cavity; The inner cavity is also provided with a toggle wheel and an internal meshing ratchet mechanism; the toggle wheel is rotationally matched with the inner cavity, and the toggle wheel has a toggle arm; the inner ratchet wheel of the internal meshing ratchet mechanism is in transmission cooperation with the roller, and the pawl disk of the internal meshing ratchet mechanism is in transmission cooperation with the air supply mechanism and the toggle wheel; The piston has an air inlet pipe, one end of which is in communication with the inner cavity and the other end of which extends out of the conduit; When the piston moves toward the side away from the protective ring, the roller rotates, the inner ratchet drives the pawl plate, and the pawl plate drives the air supply mechanism and the toggle wheel, so that the toggle wheel uses the toggle arm to push the extension arm toward the side away from the protective ring, so that the mounting groove moves to the second hole section.

2. The sealing structure according to claim 1, characterized in that: When the mounting slot moves to the middle of the second hole section, an end portion of the first sliding member away from the second sliding member is located in the first hole section.

3. The sealing structure according to claim 1, characterized in that: The mounting groove is located on a side of the first sliding member close to the first air channel.

4. A gallium nitride production reactor, characterized in that: include: A first furnace body, a second furnace body and a sealing structure as claimed in any one of claims 1 to 3; Wherein, the main pipe of the sealing structure is a quartz tube, and the gas detection sensor is used to detect the raw material gas for gallium nitride production; The first furnace body and the second furnace body are both sleeved on the main tube, and both are used to heat the main tube; along the axial direction of the main tube, the first furnace body can be slidably matched with the main tube and the movement is controlled by the driver; The driving mechanism is composed of the first furnace body and the driver, and the plug rod is in transmission cooperation with the first furnace body; when the first furnace body is in cooperation with the second furnace body, the piston is located at the end of the guide tube close to the protective ring; when the first furnace body is separated from the second furnace body, the piston is located at the end of the guide tube away from the protective ring.

5. The gallium nitride production reactor according to claim 4, characterized in that: The second furnace body includes a first half furnace body and a second half furnace body, and the first half furnace body and the second half furnace body are detachably connected to surround the main tube.

6. The gallium nitride production reactor according to claim 4, characterized in that: The heating temperature of the first furnace body is higher than the heating temperature of the second furnace body.

7. A horizontal gallium nitride production system, characterized in that: include: A gallium nitride production reactor as described in any one of claims 4 to 6.

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